WO2022239791A1

WO2022239791A1 - Measuring sensor

Info

Publication number: WO2022239791A1
Application number: PCT/JP2022/019895
Authority: WO
Inventors: 崇宏砂田
Original assignee: 京セラ株式会社
Priority date: 2021-05-14
Filing date: 2022-05-11
Publication date: 2022-11-17
Also published as: JPWO2022239791A1

Abstract

This measuring sensor includes: at least one piezoelectric substrate; a first detecting portion including a first IDT electrode which is disposed on the piezoelectric substrate and in which a plurality of electrode fingers are arranged in one direction; a second detecting portion including a second IDT electrode which is disposed on the piezoelectric substrate and in which a plurality of electrode fingers are arranged along a virtual straight line overlapping said one direction; and a flow passage member including a flow passage inside which the first IDT electrode and the second IDT electrode are arranged.

Description

measurement sensor

The present invention relates to a measurement sensor capable of measuring properties of a sample liquid or components contained in the sample liquid.

Patent Document 1 discloses a technique that can measure the properties of a sample liquid or the components contained in the sample liquid.

Japan 2008-286606

A measurement sensor according to an aspect of the present disclosure includes: at least one piezoelectric substrate; a first detection unit having a first IDT electrode arranged on the at least one piezoelectric substrate and having a plurality of electrode fingers arranged in one direction; a second detection unit on at least one piezoelectric substrate and having a second IDT electrode in which a plurality of electrode fingers are aligned along the virtual straight line overlapping in one direction; a channel member having a channel.

1 is a schematic diagram of a measurement sensor according to a first embodiment; FIG. 1 is a schematic diagram of a measuring device according to a first embodiment; FIG. FIG. 2 is a plan view showing a configuration of part of the measurement sensor shown in FIG. 1; FIG. 2 is a schematic diagram showing a configuration of part of the measurement sensor shown in FIG. 1; FIG. 2 is a cross-sectional view of a portion of the measurement sensor shown in FIG. 1 taken along section line II'; FIG. 2 is a plan view showing a configuration of part of the measurement sensor shown in FIG. 1; FIG. 5 is a schematic diagram of a measurement sensor according to a second embodiment; FIG. 8 is a schematic diagram showing a configuration of part of the measurement sensor shown in FIG. 7; FIG. 8 is a cross-sectional view of a portion of the measurement sensor shown in FIG. 7 taken along section line II'; FIG. 11 is a schematic diagram of a measurement sensor according to a third embodiment; FIG. 11 is a schematic diagram showing a configuration of part of the measurement sensor shown in FIG. 10; FIG. 11 is a cross-sectional view of a portion of the measurement sensor shown in FIG. 10 taken along section line II';

[Embodiment 1]
Hereinafter, a measurement sensor according to an embodiment of the present invention will be described with appropriate use of the drawings.

FIG. 1 shows an outline of a measurement sensor 1 according to one embodiment of the present disclosure.

Although any direction of the measurement sensor 1 may be upward or downward, an orthogonal coordinate system xyz is defined below for the sake of convenience. In this specification, terms such as the upper surface and the lower surface are used, with the positive side in the z direction being the upper side. In this specification, "height" means, for example, the distance along the Z-axis between any two points. In this specification, the term "width" refers to the distance along the Y-axis between any two points.

The measurement sensor 1 can detect the first substance, which is a specific substance, as a target from the sample liquid that is the object of measurement. The measurement sensor 1 can output a signal that changes due to detection of the first substance. A change in the signal output by the measurement sensor 1 indicates, for example, information on a change in phase, frequency, voltage value, current value, weight value, or the like.

The measurement sensor 1 of the present disclosure may be connectable with a control device 2 that controls the measurement sensor 1 . In this case, the measuring sensor 1 has an external terminal 3 . The control device 2 has a connection terminal 4 . The measurement sensor 1 may be arranged in the control device 2 so that the external terminal 3 and the connection terminal 4 are connected. The measurement sensor 1 can, for example, output a signal to the control device 2 that changes due to the detection of the first substance.

The outline of the control device 2 is shown in FIG.

The measurement sensor 1 of the present disclosure is a surface acoustic wave sensor that detects the first substance based on the phase change of surface acoustic waves. In this case, the output of the measurement sensor 1 may be the amount of change in the phase difference of the surface acoustic waves. Here, the phase difference is the difference between the phase of the transmitted surface acoustic wave and the phase of the received surface acoustic wave. The amount of change in phase difference is a value that indicates how much the phase difference has changed due to the presence of the first substance.

The measurement sensor 1 includes a channel member 5 and a sensor substrate 7, as shown in FIG. The measurement sensor 1 comprises at least one piezoelectric substrate 8 located on a sensor substrate 7 . The measurement sensor 1 further comprises a first detector 9 positioned on the piezoelectric substrate 8 and a second detector 10 positioned on the piezoelectric substrate 8 . The external terminals 3 may be located on the sensor substrate 7 .

The channel member 5 has a channel 6 through which the specimen liquid flows. A part or all of the sensor substrate 7 and the piezoelectric substrate 8 may be exposed to the channel 6 .

FIG. 3 is a plan view showing the configuration of part of the measurement sensor shown in FIG. As shown in FIG. 3 , the sensor substrate 7 includes an insulating substrate 11 , conductive substrate wiring arranged on the insulating substrate 11 , and external terminals 3 . The external terminals 3 and the board wiring are electrically connected to each other. The insulating substrate 11 is made of, for example, a resin material or a ceramic material.

The piezoelectric substrate 8 is composed of, for example, a lithium tantalate (LiTaO ₃ ) single crystal, a lithium niobate (LiNbO ₃ ) single crystal, or a piezoelectric single crystal such as quartz. The planar shape and various dimensions of the piezoelectric substrate 8 may be appropriately set. The thickness of the piezoelectric substrate 8 can be set to 0.3 mm to 1.0 mm, for example.

The first detection unit 9 can detect the presence of the first substance. The second detection unit 10 may detect the presence of the first substance, or may not detect the presence of the first substance. For example, when the second detection unit 10 does not detect the presence of the first substance, by analyzing the signal from the first detection unit 9 using the detection result of the second detection unit 10 as a reference line, the presence of the first substance is detected. It can be detected with high accuracy.

The first detection section 9 and the second detection section 10 may be positioned on one piezoelectric substrate 8 or may be positioned on independent and separate piezoelectric substrates 8 . In addition, when the first detection unit 9 and the second detection unit 10 are positioned on independent and separate piezoelectric substrates 8, the respective piezoelectric substrates 8 may be positioned on one sensor substrate 7, or may be independent. may be located on separate sensor substrates 7 . In this embodiment, as shown in FIG. 3, the first detection unit 9 and the second detection unit 10 are located on independent and separate piezoelectric substrates 8, and the respective piezoelectric substrates 8 are independent and separate sensor substrates. Located on 7. That is, in the present embodiment, the measurement sensor 1 has a first piezoelectric substrate on which the first detection section 9 is located and a second piezoelectric substrate on which the second detection section 10 is located.

A part of the first detection unit 9 and the second detection unit 10 may be positioned within the channel 6 , or all of them may be positioned within the channel 6 . In this embodiment, all of them are located within the channel 6 .

The first detection unit 9 includes a first IDT (Inter Digital Transducer) electrode 91 having a plurality of electrode fingers. A plurality of electrode fingers of the first IDT electrode 91 are arranged along one direction A. As shown in FIG. The second detection unit 10 includes a second IDT (Inter Digital Transducer) electrode 101 having a plurality of electrode fingers. The first IDT electrode 91 may be composed of one IDT electrode, or may be composed of a first input IDT electrode 91a and a first output IDT electrode 91b. In this embodiment, the first IDT electrode 91 is composed of a first input IDT electrode 91a and a first output IDT electrode 91b. Further, the second IDT electrode 101 may be composed of one IDT electrode, or may be composed of a second input IDT electrode 101a and a second output IDT electrode 101b. In this embodiment, the second IDT electrode 101 is composed of a second input IDT electrode 101a and a second output IDT electrode 101b.

A part of the first IDT (Inter Digital Transducer) electrode 91 and the second IDT (Inter Digital Transducer) electrode 101 may be positioned within the channel 6, or all of them may be positioned within the channel 6. may In this embodiment, the first IDT electrode 91 and the second IDT electrode 101 are all positioned within the channel 6 .

The first IDT electrode 91 can generate surface acoustic waves. In the first IDT electrode 91, surface acoustic waves are generated along one direction A, which is the direction in which the plurality of electrode fingers are arranged. When the first IDT electrode 91 includes, for example, a first input IDT electrode 91a and a first output IDT electrode 91b, the first IDT electrode 91 has a surface acoustic wave current between the first input IDT electrode 91a and the first output IDT electrode 91b. can be generated. The first input IDT electrode 91a receives an electrical signal and converts the electrical signal into a surface acoustic wave. The first output IDT electrode 91b receives the surface acoustic wave generated by the first input IDT electrode 91a, converts the received surface acoustic wave into an electric signal, and outputs the electric signal.

Also, the second IDT electrode 101 can generate a surface acoustic wave. In the second IDT electrode 101, surface acoustic waves are generated along the direction in which the plurality of electrode fingers are arranged. When the second IDT electrode 101 comprises, for example, a first input IDT electrode 101a and a first output IDT electrode 101b, the first IDT electrode 101 may generate a surface acoustic wave current between the first input IDT electrode 101a and the first output IDT electrode 101b. can be generated. The second input IDT electrode 101a receives an electrical signal and converts the electrical signal into a surface acoustic wave. The first output IDT electrode 101b receives the surface acoustic wave generated by the first input IDT electrode 91a, converts the received surface acoustic wave into an electric signal, and outputs the electric signal.

The first IDT electrode 91 and the second IDT electrode 101 are made of metal material such as gold, chromium, or titanium, for example. The first IDT electrode 91 and the second IDT electrode 101 may be single-layer electrodes or may be electrodes composed of a plurality of layers.

The first detection section 9 may further include a first waveguide 92 and the second detection section 10 may further include a second waveguide 102 . The first waveguide 92 is a propagation path for surface acoustic waves generated by the first IDT electrode 91 . The second waveguide 102 is a propagation path for surface acoustic waves generated by the second IDT electrode 101 . For example, when the first IDT electrode 91 includes a first input IDT electrode 91a and a first output IDT electrode 91b, the first waveguide 92 is formed between the first input IDT electrode 91a and the first output IDT electrode 91a on the upper surface of the piezoelectric substrate 8. It is located in the area sandwiched between the electrodes 91b. Further, for example, when the second IDT electrode 101 includes the second input IDT electrode 101a and the second output IDT electrode 101b, the second waveguide 102 is formed on the upper surface of the piezoelectric substrate 8 by the second input IDT electrode 101a and the second IDT electrode 101b. It is positioned in a region sandwiched between the output IDT electrodes 101b.

A part of the first waveguide 92 and the second waveguide 102 may be located in the flow channel 6, or all of them may be located in the flow channel 6. In this embodiment, all of the first waveguide 92 and the second waveguide 102 are exposed to the channel 6 .

A second substance, which is a substance that reacts with the first substance, is fixed to the first detection unit 9 . The second substance may be fixed to the second detection section 10 or may not be fixed to the second detection section 10 . In this embodiment, the second substance is not immobilized. Here, the second substance is fixed to the first waveguide 92 in the first detection section 9 . Moreover, when the second substance is fixed to the second detection section 10 , the second substance may be fixed to the second waveguide 102 .

When the first substance and the second substance react in the first detection unit 9, for example, the viscosity or density of the sample liquid in contact with the first detection unit 9 changes, and the surface acoustic wave generated by the first IDT electrode 91 changes. Phase changes. This phase change allows the measurement sensor 1 to detect the presence of the first substance. A signal resulting from detection of the first substance is output from the measurement sensor 1 to the control device 2 .

The greater the reaction between the first substance and the second substance and the greater the change in the viscosity or density of the sample liquid in contact with the first detection unit 9, the greater the phase change amount. In other words, the amount of phase change of the surface acoustic wave depends on the first substance and the second substance. Therefore, it is possible not only to detect the first substance, but also to measure the content or concentration of the first substance.

In the present embodiment, unlike the first waveguide 92, the second waveguide 102 is not fixed with the second substance. That is, since the reaction between the first substance and the second substance does not occur in the second waveguide 102 , the phase change of the surface acoustic wave caused by the reaction between the first substance and the second substance is does not occur. Therefore, by taking the difference between the signal acquired by the second detection unit 10 and the signal acquired by the first detection unit 9, it is possible to acquire the change in the signal caused by the reaction between the first substance and the second substance. .

The reaction between the first substance and the second substance may be any reaction that causes a change in the output of the measurement sensor 1. Examples of such reactions include reactions in which the first substance and the second substance are bound by oxidation-reduction reactions, enzymatic reactions, antigen-antibody reactions, chemical adsorption, intermolecular interactions, or ionic interactions, or enzymatic reactions. It may be a reaction that generates a second substance, which is a new substance, by, for example.

The second substance fixed to the first waveguide 92 and/or the second waveguide 102 may be appropriately selected according to the first substance. For example, if the first substance is a specific protein, DNA, or cell in the specimen fluid, the second substance may be an antibody, peptide, aptamer, or the like. When the first substance is an antibody, for example, an antigen can be used as the second substance. When the first substance is a substrate, an enzyme can be used as the second substance, for example.

The measurement sensor 1 may further have one or more detection units having the same configuration as the first detection unit 9 or the second detection unit 10.

The measurement sensor 1 may have a connection conductor 12. The first IDT electrode 91 and the substrate wiring are electrically connected to each other by the connection conductor 12 . The second IDT electrode 101 and the substrate wiring are electrically connected to each other by the connection conductor 12 . The connection conductor 12 may be located across the sensor substrate 7 and the piezoelectric substrate 8 .

The sensor substrate 7, the piezoelectric substrate 8, the first detection section 9, and the second detection section 10 can be manufactured by a well-known manufacturing method.

The channel 6 can function as a passageway for the specimen liquid. The channel member 5 has a supply port 13 that is open to the upper surface of the channel member 5 and that supplies the sample liquid to the channel 6, and a discharge port 14 that discharges the sample liquid. The measurement sensor 1 acquires signal changes in the first detection unit 9 and the second detection unit 10 when the sample liquid supplied from the supply port 13 reaches the first detection unit 9 and the second detection unit 10. , and then the specimen liquid is discharged from the discharge port 14 .

The channel member 5 may further include a substrate opening 15 that opens to the outside on the upper or lower surface of the channel member 5 . The number of substrate openings 15 may be one, or two or more.

The sensor substrate 7 may be positioned on the channel member 5 . The sensor substrate 7 may be positioned on the flow path member 5 so that the first detection section 9 and the second detection section 10 are exposed to the flow path 6 from the substrate opening 15 . At this time, the sensor substrate 7 may be positioned so as to cover the substrate opening 15 in plan view of the measurement sensor 1 . That is, the substrate opening 15 may be closed by the sensor substrate 7 and the channel 6 may be surrounded by the channel member 5 and the sensor substrate 7 .

At least one of the supply port 13 and the discharge port 14 may be located on a different plane from the plane on which the first detection unit 9 and the second detection unit 10 are located. Here, being positioned in different planes means being positioned in planes having different z-coordinates. That is, it can be said that at least one of the supply port 13 and the discharge port 14 is positioned on a plane having a different z-coordinate from that of the first detection unit 9 and the second detection unit 10 . The supply port 13 or the discharge port 14 may be positioned on a surface above or below the surface on which the first detection unit 9 and the second detection unit 10 are positioned. . In this embodiment, it is positioned downward. As a result, even if air bubbles flow into the flow path 6, the air bubbles are less likely to remain in the first detection section 9 or the second detection section 10, and the detection accuracy can be improved.

The channel member 5 may be composed of one member, or may be composed of a combination of two or more members. In this embodiment, the flow path member 5 is composed of a base material 16 and a thin film 17 provided so as to face the base material 16 . The number of thin films 17 may be one, or two or more. In this embodiment, the first thin film 171 , the substrate 16 , and the second thin film 172 are arranged in this order from the upper surface of the flow path member 5 . The base material 16 and the thin film 17 may be adhered with an adhesive. By forming a part of the surface forming the flow path with the thin film 17, the thickness of the measurement sensor 1 can be made thinner than when the entire flow path is formed with the base material 16. FIG. In addition, the base material 16 may be formed by a conventionally known technique such as vacuum forming. The thin film 17 may be formed by conventionally known techniques such as solution film formation and melt film formation.

Any material can be used as the material for the flow channel member 5 as long as it can maintain the shape of the flow channel 6 at room temperature. For example, a resin material can be used. The channel member 5 according to one embodiment is made of a hydrophobic material. Specifically, the channel member 5 may be made of a resin having a contact angle with water of 60 degrees or more, for example. The contact angle with water of the material forming the flow path member 5 can be obtained, for example, by a substrate glass surface wettability test method (JIS R 3257:1999). Examples of the resin include polycarbonate, cycloolefin polymer, polymethylmethacrylate resin, and polydimethylsiloxane. The flow path member 5 according to one embodiment is made of polymethyl methacrylate resin.

As shown in FIGS. 4 to 6, the plurality of electrode fingers of the second IDT electrode 101 are arranged along a virtual straight line B that overlaps in one direction A. As a result, the amount of the sample liquid required for the sample liquid to reach both the first detection unit 9 having the first IDT electrode 91 and the second detection unit 10 having the second IDT electrode 101 is reduced. Measurements can be made in quantity.

FIG. 4 is a schematic diagram showing a configuration of part of the measurement sensor 1 shown in FIG. Specifically, it is a schematic diagram extracting and describing the flow path 6 of the measurement sensor 1 shown in FIG.

FIG. 5 is a cross-sectional view of a portion of the measurement sensor shown in FIG. 1 taken along the section line II'.

FIG. 6 is a plan view showing the configuration of part of the measurement sensor shown in FIG. Specifically, in the measurement sensor 1 shown in FIG. 1, it is a plan view showing the first detection section 9, the second detection section 10, and the flow path 6 as a perspective view.

In the present disclosure, unless otherwise specified, the cross section orthogonal to the fluid flow direction in the channel 6 is referred to as "cross section C". Specifically, the section of the flow path parallel to the y-axis and z-axis in FIGS. 4 to 6 is referred to as "section C". The height from the upper end to the lower end of the flow channel is defined as "the height of the flow channel". Specifically, in FIGS. 4 to 6, the length represented by the z-coordinate range of the flow path at any x value is defined as the "height of the flow path". Let the length from end to end of the channel at the same height of any cross-section C be the “width of the channel”. Specifically, in FIGS. 4A to 4C, the length represented by the range of the y-coordinate of the cross section C at an arbitrary z-value is defined as the "channel width".

The direction in which the fluid flows in the channel 6 may be any direction along the virtual straight line B, and may be substantially parallel along the virtual straight line B, for example. As a result, the amount of sample liquid required for the sample liquid to reach both the first detection section 9 and the second detection section 10 can be reduced, and measurement can be performed with a small amount of sample liquid.

The angular difference between the directional vector of the surface acoustic wave in the first detection unit 9 and the directional vector of the surface acoustic wave in the second detection unit 10 can be set to 0° or 180°, for example. In this embodiment, the angle difference is 0°.

A region of the channel 6 in which the first IDT electrode 91 and the second IDT electrode 101 are arranged may have a linear shape extending along the imaginary straight line B. Here, the linear shape extending along the imaginary straight line B is a shape in which the length along the imaginary straight line B is longer than the length along the other direction, and the shortest distance between arbitrary cross sections C It refers to the shape that connects.

Although the width of the channel 6 in the region where the first IDT electrode 91 and the second IDT electrode 101 are arranged inside may be constant or different. In this embodiment, there are areas where the width of the flow path 6 is different.

As shown in FIGS. 4 to 6, the flow path 6 has a first area 18 where the first detection section 9 is located, a third area 20, and a second area 19 where the second detection section 10 is located. may At this time, the first area 18, the third area 20, and the second area 19 may be positioned in order.

The first area 18, the second area 19, and the third area 20 can be distinguished by the width of the channel 6. In this embodiment, the first area 18, the third area 20, and the second area 19 are connected in order.

The channel 6 further has a fourth region 21 and a fifth region 22, the fourth region 21 and the first region 18 may be positioned in order, and the second region 19 and the fifth region 22 may be positioned in order. . The fourth region 21 and the first region 18 and the second region 19 and the fifth region 22 can be distinguished by the width of the channel 6 . In this embodiment, the fourth region 21 and the first region 18 are connected in order, the third region 20 and the second region 19 are connected in order, and the second region 19 and the fifth region 22 are connected in order. ing.

The width of the channel 6 in the first region 18 is greater than the width of the channel 6 in the third region 20. Here, when the width of the flow channel 6 in the first region 18 is greater than the width of the flow channel 6 in the third region 20, the average value of the widths of the flow channels 6 in the first region 18 is equal to that in the third region 20 means that the width of the flow channel 6 is larger than the average value of the width of the flow channel 6 in the first region 18, even if there is a location where the width of the flow channel 6 in the first region 18 is locally smaller than the width of the flow channel 6 in the third region 20 good. In this embodiment, the width of the channel 6 in the first region 18 is greater than the width of the channel 6 in the third region 20 at all locations.

The width of the flow channel 6 in the second region 19 is larger than the width of the flow channel 6 in the third region 20. Here, when the width of the flow channel 6 in the second region 19 is larger than the width of the flow channel 6 in the third region 20, the average value of the widths of the flow channels 6 in the second region 19 means that the width of the flow channel 6 is larger than the average value of the width of the flow channel 6 in the second region 19, even if there is a location where the width of the flow channel 6 in the second region 19 is locally smaller than the width of the flow channel 6 in the third region 20 good. In this embodiment, the width of the channel 6 in the second region 19 is greater than the width of the channel 6 in the third region 20 at all locations.

As a result, even if the installation positions of the first detection unit 9 and the second detection unit 10 deviate from the designated positions when assembling the measurement sensor 1 , the first detection unit 9 and the second detection unit 10 are installed in the flow path 6 . Since it becomes easier to position the entire second detection unit 10, the non-defective product rate can be improved. In addition, while the first detection unit 9 and the second detection unit 10 are positioned in the first region 18 and the second region 19 where the width of the flow channel 6 is large, between the first region 18 and the second region 19, the flow channel A third region 20 having a small width of 6 may be used. With such a configuration, the volume of the third region 20 can be reduced, so the amount of sample liquid required for the sample liquid to reach both the first detection unit 9 and the second detection unit 10 can be reduced. Measurements can be made with sample fluid volume.

The first region 18 may be arranged closer to the supply port 13 than the second region 19 . That is, by arranging the supply port 13, the first region 18, the third region 20, the second region 19, and the discharge port 14 in order, the sample liquid supplied from the supply port 13 is distributed between the first region 18 and the third region 20. , the second region 19 and discharged from the discharge port 14 .

The width of the channel 6 in the first region 18 and the width of the channel 6 in the second region 19 may be the same or different. In this embodiment, the width of the channel 6 in the first region 18 and the width of the channel 6 in the second region 19 are equal.

The first area 18, the second area 19, and the third area 20 may each have a linear shape extending along the imaginary straight line B. At this time, it can be understood that the first area 18, the third area 20, and the second area 19 are positioned along the imaginary straight line B in this order.

The volume of the third region 20 may be smaller than the volume of the first region 18. Also, the volume of the third region 20 may be smaller than the volume of the second region 19 . As a result, the amount of sample liquid required for the sample liquid to reach both the first detection section 9 and the second detection section 10 can be reduced, and measurement can be performed with a small amount of sample liquid.

The area of the cross section C of the third region 20 may be smaller than the area of the cross section C of the first region 18 . Also, the area of the cross section C of the third region 20 may be smaller than the area of the cross section C of the second region 19 . By making the area of the cross section C of the third region 20 smaller than the area of the cross section C of the first region 18 and/or the second region 19, the specimen liquid existing in the first region 18 and the second region 19 Mixing with the existing specimen liquid can be reduced, and detection accuracy can be improved.

The area of the cross section C of the first region 18 and the area of the cross section C of the second region 19 may be the same or different. In this embodiment, the area of the cross section C of the first region 18 and the area of the cross section C of the second region 19 are equal.

The first region 18 includes a first end 18a and a first base connected to the first end 18a and located further away from the third region 20 than the first end 18a, as shown in FIG. 18b. That is, it can be said that the first base portion 18b, the first end portion 18a, and the third region 20 are arranged in this order.

The area of the cross section C of the first end portion 18a may be smaller than the area of the cross section C of the first base portion 18b. As a result, the volume of the first region 18 is reduced, the amount of sample liquid required for the sample liquid to reach both the first detection unit 9 and the second detection unit 10 is reduced, and measurement is performed with a small amount of sample liquid. be able to.

The area of the cross section C of the first end portion 18a may decrease as the third region 20 is approached. That is, the area of the cross section C of the first end portion 18a is the largest in the area of the cross section C of the portion connected to the first base portion 18b, and the cross section C of the end of the first end portion 18a on the side of the third region 20 is It can be said that the area of the cross section C may gradually decrease from the smallest portion connected to the first base portion 18b toward the end of the first end portion 18a on the third region 20 side. As a result, even when bubbles flow into the first region 18, the cross-sectional area of the flow path 6 gradually decreases from the first base portion 18b toward the third region 20, so that the bubbles flow toward the third region 20. air bubbles are less likely to remain in the first region 18, and detection accuracy can be improved.

Also, the width of the flow path 6 at the first end portion 18a may decrease as the third region 20 is approached. That is, the width of the channel 6 at the first end 18a is the largest at the portion connected to the first base 18b, and the width at the end of the first end 18a on the third region 20 side is the largest. The width of the channel 6 is the smallest, and the width of the channel 6 gradually decreases from the portion connected to the first base portion 18b toward the end of the first end portion 18a on the side of the third region 20. It can be said that it is good. As a result, even if bubbles flow into the first region 18, the bubbles tend to flow toward the third region 20, making it difficult for the bubbles to remain in the first region 18, thereby improving detection accuracy.

Also, the height of the flow path 6 at the first end portion 18a may decrease as the third region 20 is approached. That is, the height of the flow path 6 at the first end 18a is the highest at the portion connected to the first base 18b, and The height of the flow path 6 is the smallest, and the height of the flow path 6 gradually decreases from the portion connected to the first base portion 18b toward the end of the first end portion 18a on the side of the third region 20 It can be said that it is acceptable. As a result, even if bubbles flow into the first region 18, the bubbles tend to flow toward the third region 20, making it difficult for the bubbles to remain in the first region 18, thereby improving detection accuracy.

The height of the channel 6 at the first end portion 18a is such that, of the z-coordinates of the upper end and the lower end of the channel 6 of the first end portion 18a, the z-coordinate of the upper end becomes smaller while the z-coordinate of the lower end does not change. may be smaller by Alternatively, the height of the channel 6 at the first end portion 18a is such that, of the z-coordinates of the upper end and the lower end of the channel 6 of the first end portion 18a, the z-coordinate at the upper end does not change and the z-coordinate at the lower end increases. It may become smaller by becoming Alternatively, the height of the channel 6 at the first end 18a may be reduced by changing both the upper and lower z-coordinates of the upper and lower ends of the channel 6 at the first end 18a. . In the present embodiment, the z-coordinate of the lower end of the flow channel 6 of the first end portion 18a does not change, and the z-coordinate of the upper end becomes smaller, thereby decreasing the height of the flow channel 6 of the first end portion 18a. ing.

Here, the volume of the first region 18 may be equal to the volume of the second region 19. The volume of the sample liquid located in the first region 18, that is, the sample liquid that contacts the first detection unit 9, and the sample liquid that is located in the second region 19, that is, the volume of the sample liquid that contacts the second detection unit 10 are equal. good too. By equalizing the volume of the sample liquid in contact with the first detection section 9 and the volume of the sample liquid in contact with the second detection section 10, the measurement accuracy can be improved.

Here, the second area 19 may have the same configuration as the first area 18.

The second region 19 has a second end and a second base connected to the second end and located further away from the third region 20 than the second end. That is, it can be said that the third region 20, the second end, and the second base are arranged in this order.

The area of the cross section C of the second end may be smaller than the area of the cross section C of the second base. This reduces the volume of the second region 19, reduces the amount of sample liquid required for the sample liquid to reach both the first detection unit 9 and the second detection unit 10, and performs measurement with a small amount of sample liquid. be able to.

The area of the cross section C of the second end may decrease as the third region 20 is approached. That is, with respect to the area of the cross section C of the second end, the area of the cross section C of the portion connected to the second base is the largest, and the cross section C of the end of the second end on the side of the third region 20 is the smallest. It can be said that the area of the cross section C may gradually decrease from the portion connected to the second base toward the end of the second end on the third region 20 side. As a result, the sample liquid flows gently from the third region 20 to the second region 19, and air bubbles are less likely to occur, thereby improving the measurement accuracy.

Also, the width of the flow path 6 at the second end may decrease as it approaches the third region 20 . That is, the width of the channel 6 at the second end is the largest at the portion connected to the second base, and the width of the channel 6 at the end of the second end on the third region 20 side is the largest. It can be said that the width of the channel 6 may gradually decrease from the portion where the width is the smallest and is connected to the second base toward the end of the second end on the third region 20 side. As a result, the sample liquid flows gently from the third region 20 to the second region 19, bubbles are less likely to occur, and measurement accuracy can be improved.

Also, the height of the channel 6 at the second end may decrease as it approaches the third linear region. That is, the height of the channel 6 at the second end is the highest in the portion connected to the second base, and the height of the channel 6 at the end of the second end on the third region 20 side is the highest. The height of the flow path 6 may gradually decrease from the portion where the height of the channel 6 is the lowest and is connected to the second base toward the end of the second end on the side of the third region 20. It can be said. As a result, the sample liquid flows gently from the third region 20 to the second region 19, and air bubbles are less likely to occur, thereby improving the detection accuracy.

The height of the channel 6 at the second end is reduced by decreasing the z-coordinate of the upper end without changing the z-coordinate of the lower end among the z-coordinates of the upper end and the lower end of the channel 6 of the second end. You can become Alternatively, the height of the channel 6 at the second end is such that, of the z-coordinates of the upper end and the lower end of the channel 6 at the second end, the z-coordinate of the upper end does not change and the z-coordinate of the lower end increases. may be smaller by Alternatively, the height of the second end channel 6 may be reduced by changing both the upper and lower z-coordinates of the upper and lower ends of the second end channel 6 . In this embodiment, the z-coordinate of the lower end of the channel 6 of the second end remains unchanged, and the z-coordinate of the upper end becomes smaller, so that the height of the channel 6 of the second end becomes smaller.

In addition, the first region 18 has a third end located opposite the first end 18a and connected to the third end and closer to the first base 18b than the third end. It may have a third base located. That is, it can be said that they are arranged in the order of the third end, the third base, the first base 18b, and the first end 18a, and are connected in the order of the fourth region 21, the third end, and the third base. It can also be said.

The area of the cross section C of the third end may be smaller than the area of the cross section C of the third base. As a result, the volume of the first region 18 is reduced, the amount of sample liquid required for the sample liquid to reach both the first detection unit 9 and the second detection unit 10 is reduced, and measurement is performed with a small amount of sample liquid. be able to.

The area of the cross section C of the third end portion may decrease as the distance from the third base portion increases. That is, the area of the cross section C of the third end is the largest in the area of the cross section C of the portion connected to the third base, and the cross section C of the end of the third end connected to the fourth region 21 is the largest. It can be said that the area of the cross section C may gradually decrease from the smallest portion connected to the third base toward the end of the third end connected to the fourth region 21 . As a result, the sample liquid flows gently from the fourth region 21 to the first region 18, making it difficult for air bubbles to be generated, and the detection accuracy can be improved.

Also, the width of the flow path 6 at the third end may decrease as it approaches the fourth region 21 . That is, the width of the channel 6 at the third end is the largest in the portion connected to the third base, and the width of the channel 6 at the end of the third end 27e on the side of the fourth region 21 is the largest. It can be said that the width of the flow path 6 may gradually decrease from the portion where the width of is the smallest and is connected to the third base portion toward the end of the third end portion on the side of the fourth region 21 . As a result, the sample liquid flows gently from the fourth region 21 to the first region 18, making it difficult for air bubbles to be generated, and the detection accuracy can be improved.

Also, the height of the channel 6 at the third end may decrease as it approaches the fourth region 21 . That is, the height of the channel 6 at the third end is the highest in the portion connected to the third base, and the height of the channel 6 at the end of the third end on the side of the fourth region 21 is the highest. The height of the flow path 6 may be gradually reduced from the portion where the height of the channel 6 is the lowest and connected to the third base toward the end of the third end on the side of the fourth region 21. It can be said. As a result, the sample liquid flows gently from the fourth region 21 to the first region 18, making it difficult for air bubbles to be generated, and the detection accuracy can be improved.

The height of the channel 6 at the third end is reduced by decreasing the z-coordinate of the upper end without changing the z-coordinate of the lower end among the z-coordinates of the upper end and the lower end of the channel 6 of the third end. You can become Alternatively, the height of the channel 6 at the third end is such that, of the z-coordinates of the upper end and the lower end of the channel 6 at the third end, the z-coordinate of the upper end does not change and the z-coordinate of the lower end increases. It may be smaller by Alternatively, the height of the third end channel 6 may be reduced by changing both the upper and lower z-coordinates of the upper and lower ends of the third end channel 6 . In the present embodiment, the z-coordinate of the lower end of the channel 6 at the third end remains unchanged, and the z-coordinate of the upper end becomes smaller, thereby reducing the height of the channel 6 at the third end.

Further, the second region 19 has a fourth end located opposite the second end and a second end connected to the fourth end and located closer to the second base than the fourth end. It may have four bases. That is, it can be said that they are arranged in the order of the second end, the second base, the fourth base, and the fourth end, and it can be said that they are connected in the order of the fourth base, the fourth end, and the fifth region 22 . .

The area of the cross section C of the fourth end may be smaller than the area of the cross section C of the fourth base. This reduces the volume of the second region 19, reduces the amount of sample liquid required for the sample liquid to reach both the first detection unit 9 and the second detection unit 10, and performs measurement with a small amount of sample liquid. be able to.

The area of the cross section C of the fourth end portion may decrease as the distance from the fourth base portion increases. That is, with respect to the area of the cross section C of the fourth end, the area of the cross section C of the portion connected to the fourth base is the largest, and the cross section C of the end of the fourth end connected to the fifth region 22 has the largest area. It can be said that the area of the cross section C may gradually decrease from the smallest portion connected to the fourth base toward the end of the fourth end connected to the fifth region 22 . As a result, even when bubbles flow into the second region 19, the bubbles tend to flow toward the fifth region 22, making it difficult for the bubbles to remain in the second region 19, thereby improving measurement accuracy.

Also, the width of the channel 6 at the fourth end may decrease as it approaches the fifth region 22 . That is, the width of the channel 6 at the fourth end is the largest at the portion connected to the fourth base, and the width of the channel 6 at the end of the fourth end on the fifth region 22 side is the largest. It can be said that the width of the channel 6 may gradually decrease from the portion where the width is the smallest and is connected to the fourth base toward the end of the fourth end on the fifth region 22 side. As a result, even when bubbles flow into the second region 19, the bubbles tend to flow toward the fifth region 22, making it difficult for the bubbles to remain in the second region 19, thereby improving measurement accuracy.

Also, the height of the channel 6 at the fourth end may decrease as it approaches the fifth region 22 . That is, the height of the channel 6 at the fourth end is the highest in the portion connected to the fourth base, and the height of the channel 6 at the end of the fourth end on the side of the fifth region 22 is the highest. The height of the flow path 6 may gradually decrease from the portion where the height of the channel 6 is the lowest and is connected to the fourth base toward the end of the fourth end on the side of the fifth region 22. It can be said. As a result, even when bubbles flow into the second region 19, the bubbles tend to flow toward the fifth region 22, making it difficult for the bubbles to remain in the second region 19, thereby improving measurement accuracy.

The height of the channel 6 at the fourth end is reduced by decreasing the z-coordinate of the upper end without changing the z-coordinate of the lower end among the z-coordinates of the upper end and the lower end of the channel 6 of the fourth end. , the z-coordinate of the top edge may decrease by increasing the z-coordinate of the bottom edge without changing, or it may decrease by varying both the top and bottom edges. In the present embodiment, the z-coordinate of the lower end of the channel 6 of the fourth end remains unchanged, and the z-coordinate of the upper end becomes smaller, so that the height of the channel 6 of the fourth end becomes smaller.

The first base 18b and the third base may or may not be connected to each other, but are not connected to each other in this embodiment. Also, the second base portion and the fourth base portion may or may not be connected to each other, but are not connected to each other in this embodiment. At this time, the first detector 9 may be positioned between the first base 18b and the third base. The second detector 10 may be positioned between the second base and the fourth base.

[Embodiment 2]
7, 8 and 9 show an outline of the sensor device of the second embodiment.

FIG. 8 is a schematic diagram showing a configuration of part of the measurement sensor 1 shown in FIG. Specifically, it is a schematic diagram extracting and describing the flow path 6 of the measurement sensor 1 shown in FIG.

FIG. 9 is a cross-sectional view of a portion of the measurement sensor shown in FIG. 7 taken along the section line II'.

As shown in FIG. 9 , the measurement sensor 1 of the second embodiment differs from the above embodiments in that the sensor substrate 7 and the piezoelectric substrate 8 are positioned on the lower surface of the flow path member 5 . Further, the measurement sensor 1 of the second embodiment differs from the above embodiments in that the substrate opening 15 of the channel member 5 is positioned on the lower surface of the channel member 5 . That is, part or all of the sensor substrate 7 and the piezoelectric substrate 8 are exposed from the bottom surface of the flow path member 5 to the flow path 6 , and the first detection section 9 and the second detection section 10 are located on the bottom surface of the flow path member 5 . are exposed to the flow path 6 from the

[Embodiment 3]
10, 11 and 12 schematically show the sensor device of the third embodiment.

FIG. 11 is a schematic diagram showing the configuration of part of the measurement sensor 1 shown in FIG. Specifically, it is a schematic diagram extracting and describing the flow path 6 of the measurement sensor 1 shown in FIG.

FIG. 12 is a cross-sectional view of a portion of the measurement sensor shown in FIG. 10, taken along line II'.

The measurement sensor 1 of the second embodiment differs from the above embodiments in that the sensor substrate 7 and the piezoelectric substrate 8 are positioned on the lower surface of the flow path member 5, as shown in FIG. Further, the measurement sensor 1 of the second embodiment differs from the above embodiments in that the substrate opening 15 of the channel member 5 is positioned on the lower surface of the channel member 5 . That is, part or all of the sensor substrate 7 and the piezoelectric substrate 8 are exposed from the bottom surface of the flow path member 5 to the flow path 6 , and the first detection section 9 and the second detection section 10 are located on the bottom surface of the flow path member 5 . are exposed to the flow path 6 from the

Furthermore, as shown in FIG. 12, the measurement sensor 1 of the third embodiment includes the first and second embodiments, the first end 18a, the second end, the third end and the fourth end. The height of the channel 6 is reduced by increasing the z-coordinate of the lower end without changing the z-coordinate of the upper end.

[Additional notes]
The invention according to the present disclosure has been described above based on the drawings and examples. However, the invention according to the present disclosure is not limited to each embodiment described above. That is, the invention according to the present disclosure can be variously modified within the scope shown in the present disclosure, and the embodiments obtained by appropriately combining the technical means disclosed in different embodiments can also be applied to the invention according to the present disclosure. Included in the technical scope. In other words, it should be noted that a person skilled in the art can easily make various variations or modifications based on this disclosure. Also, note that these variations or modifications are included within the scope of this disclosure.

DESCRIPTION OF SYMBOLS 1... Measurement sensor 2... Control device 3... External terminal 4... Connection terminal 5... Flow path member 6... Flow path 7... Sensor substrate 8... Piezoelectric substrate 9 First detection section 91 First IDT (Inter Digital Transducer) electrode 92 First waveguide 10 Second detection section 101 Second IDT (Inter Digital Transducer) electrode 102 - 2nd waveguide 11... Insulating substrate 12... Connection conductor 13... Supply port 14... Discharge port 15... Substrate opening part 16... Base material 17... Thin film 171... First thin film 172 Second thin film 18 First region 19 Second region 20 Third region 21 Fourth region 22 Fifth region 18a Third 1 end 18b... 1st base

Claims

at least one piezoelectric substrate;
a first detection unit having a first IDT electrode arranged on the at least one piezoelectric substrate and having a plurality of electrode fingers aligned in one direction;
a second detection unit having a second IDT electrode arranged on the at least one piezoelectric substrate and having a plurality of electrode fingers aligned along the imaginary straight lines overlapping in one direction;
a flow path member having a flow path in which the first IDT electrode and the second IDT electrode are arranged.
The flow path is
a first region where the first detection unit is located;
a second region where the second detection unit is located;
a third region positioned between the first region and the second region;
the width of the channel in the third region is smaller than the width of the channel in the first region;
The measurement sensor according to claim 1, wherein the width of the channel in the third region is smaller than the width of the channel in the second region.
the first region has a first end and a first base connected to the first end and spaced apart from the third region relative to the first end;
3. The measurement sensor of claim 2, wherein the cross-sectional area of the cross-section perpendicular to the direction of fluid flow of the first end is small compared to the cross-sectional area of the first base.
The measurement sensor according to claim 3, wherein said cross-sectional area of said first end decreases as it approaches a third region.
The measurement sensor according to claim 3 or 4, wherein the width of the first end decreases as it approaches the third area.
The measurement sensor according to any one of claims 3 to 5, wherein the height of said first end decreases as it approaches the third area.
the second region has a second end and a second base connected to the second end and spaced apart from the third region relative to the second end;
The measurement sensor according to any one of claims 2 to 6, wherein the cross-sectional area of the cross section perpendicular to the direction of fluid flow of the second end is smaller than the cross-sectional area of the cross section of the second base. .
The measurement sensor according to any one of claims 1 to 7, wherein a second substance that reacts with the first substance in the sample liquid to be measured is immobilized on the first detection section.
The channel member further has a supply port for supplying the sample liquid to the channel and a discharge port for discharging the sample liquid,
The measurement sensor according to any one of claims 1 to 8, wherein said supply port, said first detection section, said second detection section, and said discharge port are arranged in order.
The measurement sensor according to claim 9, wherein at least one of the supply port and the discharge port is located on a different plane from the plane on which the first detection section and the second detection section are located.
11. Any one of claims 1 to 10, wherein the at least one piezoelectric substrate comprises a first piezoelectric substrate on which the first detection section is arranged and a second piezoelectric substrate on which the second detection section is arranged. Measurement sensor as described.