WO2022228379A1 - Device for use in high-speed line-scan detection, and detection method therefor - Google Patents

Device for use in high-speed line-scan detection, and detection method therefor Download PDF

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WO2022228379A1
WO2022228379A1 PCT/CN2022/088960 CN2022088960W WO2022228379A1 WO 2022228379 A1 WO2022228379 A1 WO 2022228379A1 CN 2022088960 W CN2022088960 W CN 2022088960W WO 2022228379 A1 WO2022228379 A1 WO 2022228379A1
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camera
product
speed line
line scan
light source
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PCT/CN2022/088960
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French (fr)
Chinese (zh)
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谢春林
张腾飞
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广东奥普特科技股份有限公司
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Publication of WO2022228379A1 publication Critical patent/WO2022228379A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • the invention belongs to the technical field of machine vision, and in particular relates to a device and a detection method applied to high-speed line scan detection.
  • the market demand for inspection stability and inspection efficiency is getting higher and higher.
  • the stability of visual imaging effects and the detection speed are two important factors that affect the detection efficiency.
  • the camera needs to capture the flexible screen of the mobile phone and image the slightly raised heat-affected area for analysis, which requires higher stability and shooting speed of the shooting device.
  • the coaxial light source used for thermal detection of mobile phone flexible screens cannot have both the brightness and directivity of the light source at the same time.
  • the existing coaxial light sources either have high brightness of the light source, poor directivity, and need to manually adjust the light source many times. , so that the directionality meets the shooting requirements, the operation is difficult, and the image acquisition speed is low; or the directionality is good, but the brightness of the light source is low, resulting in insufficient brightness of the light source lighting unit and unclear image acquisition.
  • the purpose of the present invention is to: in view of the deficiencies of the prior art, to provide a device for high-speed line scan detection and a detection method thereof, which have the characteristics of high brightness and good light directionality, and can greatly increase the amount of light entering the lens, Increase light utilization, shorten exposure time, and improve the efficiency of visual inspection.
  • a device applied to high-speed line scan detection comprising a parallel light source device, a beam splitter, a backlight source and a camera, the beam splitter is inclined at one end of the parallel light source device, the beam splitter, the backlight source and the The cameras are arranged in a line.
  • the telecentric optical path design is adopted, which makes the output light have high parallelism, so that the light flux of the lens is more, and the exposure time required for camera acquisition is reduced. Compared with ordinary coaxial light, the exposure can be reduced by 13 times, thereby greatly improving the visual inspection efficiency. .
  • the parallel light source device includes a fixed body and an optical fiber point light source disposed in the fixed body. This structural design effectively enhances the structural firmness of the entire device.
  • the fixing body is used to make the divergence angle of the light ⁇ 1°. It ensures that the light output by the light source remains parallel and has a high coaxiality, increases the amount of light passing through the lens, and reduces the required exposure time for camera acquisition. Compared with ordinary coaxial light, the exposure can be reduced by 13 times, thereby greatly improving the visual inspection efficiency.
  • the fixing body includes a first base body, a second base body and a third base body, one end of the first base body is provided with a first connection port, and one end of the third base body is provided with a corresponding first connection port
  • the two ends of the second base are respectively connected to the first connection port and the second connection port, and the third base extends outward along the light exit direction to form expansion ports.
  • a heat dissipation device is built in the first base body, and the heat dissipation device is used for heat dissipation.
  • This structural design effectively prolongs the service life of the parallel light source device, and avoids the occurrence of equipment failure due to excessive heat generated by the light source during operation.
  • the backlight source is used to increase the backlight amount of the product to be inspected.
  • the purpose of adding the backlight is to assist the camera to photograph the outer contour of the product to be inspected, so as to facilitate the camera to locate and capture the product to be inspected.
  • the distance between the upper end surface of the backlight source and the lower end surface of the product to be detected is 19.5 mm ⁇ 20.5 mm.
  • the distance between the lower end face of the spectroscope and the upper end face of the product to be detected is 9.5 mm ⁇ 10.5 mm.
  • the distance between the end face of the camera lens and the upper end face of the product to be inspected is 105mm ⁇ 145mm.
  • the camera is a 16K line scan camera.
  • the 16K line scan camera has a high resolution, and can continuously collect images of the mobile phone flexible screen without interruption; the continuous acquisition of the mobile phone flexible screen moving in a straight line improves the image collection efficiency.
  • the lens of the camera is a 0.8x telecentric lens.
  • the use of a 0.8x telecentric lens can improve the clarity of the collected mobile phone flexible screen images, thereby greatly improving the visual inspection efficiency.
  • a detection method applied to high-speed line scan which adopts the above-mentioned device applied to high-speed line scan detection to detect, comprising the following steps:
  • Step 1 Adjust the relative positions of the parallel light source device (1), the beam splitter (2), the backlight source (3) and the camera (4), and turn on the parallel light source device (1), Make the light spot fall in the middle of the field of view of the camera (4);
  • Step 2 pair the camera (4) with the computer, open the camera acquisition software, and set the exposure time;
  • Step 3 The product to be inspected (5) moves at a constant speed above the backlight source (3), and the camera (4) takes a picture of the product to be inspected (5).
  • the camera (4) described in the above step 3 shoots the product to be detected (5), and the details are as follows:
  • Step 3-1 the camera (4) locates the outer contour of the product to be detected (5);
  • Step 3-2 The camera (4) continuously shoots the outer contour of the product to be detected (5).
  • a device applied to high-speed line scan detection and a detection method thereof comprising a parallel light source device, a beam splitter, a backlight source and a camera, wherein the beam splitter is obliquely arranged at one end of the parallel light source device, The beam splitter, the backlight source and the camera are arranged in line.
  • the parallel light source device adopts a telecentric optical path design, the output light has high parallelism and has the characteristics of ultra-high brightness, which can make the lens light pass more light, increase the light efficiency utilization rate, and reduce the required camera acquisition and exposure time. Axial light can reduce exposure by 13 times, thereby greatly improving the efficiency of visual inspection.
  • FIG. 1 is a schematic structural diagram of a device applied to high-speed line scan detection in Embodiment 1 of the present invention.
  • 1-parallel light source device 11-fixed body; 111-first base body; 112-second base body; 113-third base body; 12-heat dissipation device;
  • the terms “installed”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrally connected; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication between the two components.
  • installed e.g., it may be a fixed connection or a detachable connection , or integrally connected; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication between the two components.
  • a device applied to high-speed line scan detection includes a parallel light source device 1, a beam splitter 2, a backlight source 3 and a camera 4.
  • the beam splitter 2 is inclined and arranged at one end of the parallel light source device 1, and the beam splitter 2 , the backlight source 3 and the camera 4 are arranged in a line.
  • the parallel light source device 1 adopts a telecentric optical path design, so that the parallelism of the emitted light is high, and it is convenient to realize rapid detection.
  • the device can be used for detection, which can image the slightly raised area caused by the thermal of the flexible screen of the mobile phone, and quickly capture and shoot.
  • the device due to the high parallelism and ultra-high brightness of the light generated by the device, it can increase the light flux of the lens and reduce the acquisition and exposure time required by the camera 4. Compared with ordinary coaxial light, the exposure can be reduced by 13 times. , thereby greatly improving the visual inspection efficiency.
  • the beam splitter 2 is inclined at 45°, which is used to reflect the light emitted by the parallel light source device 1 to the product through the beam splitter 2 , and the light is reflected by the product through the beam splitter 2 and finally enters the lens of the camera 4 .
  • the parallel light source device 1 includes a fixed body 11 and an optical fiber point light source disposed in the fixed body 11 . This structural design effectively enhances the structural firmness of the entire device.
  • the fixing body 11 is used to make the divergence angle of the light ⁇ 1°. It ensures that the light output by the light source remains parallel and has a high degree of coaxiality, increases the amount of light passing through the lens, and reduces the required exposure time for camera 4 acquisition. Compared with ordinary coaxial light, the exposure can be reduced by 13 times, thereby greatly improving the visual inspection efficiency.
  • the fixing body 11 includes a first base body 111 , a second base body 112 and a third base body 113 .
  • One end of the first base body 111 is provided with a first connection port
  • one end of the third base body 113 is provided with a first connection port corresponding to the first connection port.
  • Two connection ports, two ends of the second base body 112 are respectively connected to the first connection port and the second connection port, and the third base body 113 extends outward along the light exit direction to form expansion ports.
  • This structural design makes the divergence angle of the light ⁇ 1°, which improves the utilization rate of the light source, so that the light can be guaranteed to propagate in the same direction during the transmission process. It has a reflection effect on light, which can reduce the loss of light in the transmission process and improve the brightness of the light spot.
  • the first base body 111 has a built-in heat dissipation device 12, and the heat dissipation device 12 is used for heat dissipation.
  • This structural design effectively prolongs the service life of the parallel light source device 1 and avoids the occurrence of equipment failure due to excessive heat generated by the light source during operation.
  • the backlight source 3 is used to increase the backlight amount of the product 5 to be inspected.
  • the purpose of adding the backlight is to assist the camera 4 to photograph the outer contour of the product 5 to be inspected, so that the camera 4 can locate and capture the product 5 to be inspected.
  • the distance between the upper end surface of the backlight source 3 and the lower end surface of the product to be inspected 5 is 19.5 mm ⁇ 20.5 mm.
  • This structural design enables a large amount of light to pass through the lens of the camera 4 , and improves the quality of the contour image of the product 5 to be inspected captured by the camera 4 .
  • the distance between the lower end surface of the spectroscope 2 and the upper end surface of the product to be inspected 5 is 9.5 mm ⁇ 10.5 mm.
  • This structural design enables a large amount of light to pass through the lens of the camera 4 , and improves the quality of the contour image of the product 5 to be inspected captured by the camera 4 .
  • the distance between the end face of the lens of the camera 4 and the upper end face of the product 5 to be inspected is 105 mm ⁇ 145 mm.
  • This structural design enables a large amount of light to pass through the lens of the camera 4 , and improves the quality of the contour image of the product 5 to be inspected captured by the camera 4 .
  • the camera 4 is a 16K line scan camera 4.
  • the 16K line scan camera 4 has a high resolution and can continuously capture images of the mobile phone flexible screen without interruption; the continuous acquisition of the mobile phone flexible screen moving in a straight line improves the acquisition of images efficiency.
  • the lens of the camera 4 is a 0.8x telecentric lens.
  • the use of a 0.8x telecentric lens can improve the clarity of the collected mobile phone flexible screen images, thereby greatly improving the visual inspection efficiency.
  • the working principle of a device applied to high-speed line scan detection adjust the relative positions of the parallel light source device 1, the beam splitter 2, the backlight source 3, the camera 4 and the product to be detected 5, set up the corresponding detection program, and connect Computer, start the camera 4 acquisition software, set the appropriate exposure time, and then turn on the parallel light source device 1, so that the parallel light source device 1 emits a group of high-brightness light with high parallelism and high coaxiality, passing through the beam splitter 2.
  • the light is reflected on the surface of the workpiece to be inspected, and then reflected by the surface of the workpiece to be inspected, and through the transmission effect of the beam splitter 2, the beam of light enters the camera 4 arranged above the workpiece to be inspected, and the backlight source 3 is used to increase the The amount of backlight assists the camera 4 to capture and photograph the outer contour of the product 5 to be inspected, which facilitates the camera 4 to locate the product to be inspected 5 .
  • the device utilizes the light emitting characteristics of ultra-bright parallel coaxial light and parallel coaxial structure, which greatly increases the amount of light entering the lens, and makes the thermal effect of the product 5 photographed by the camera 4 more obvious.
  • the present embodiment 2 provides a detection method applied to a high-speed line scan, which adopts a device applied to the high-speed line scan detection of the embodiment 1 for detection, and the details are as follows:
  • Step 1 Adjust the relative positions of the parallel light source device (1), the beam splitter (2), the backlight source (3) and the camera (4), and turn on the parallel light source device (1) so that the light spot falls on the camera (4) field of view. middle;
  • Step 2 Pair the camera (4) with the computer, open the camera acquisition software, and set the exposure time;
  • Step 3 The product to be detected (5) moves at a constant speed above the backlight source (3), and the camera (4) shoots the product to be detected (5).
  • the camera (4) of the above-mentioned step 3 shoots the product to be detected (5), and the details are as follows:
  • Step 3-1 the camera (4) locates the outer contour of the product to be detected (5);
  • Step 3-2 The camera (4) continuously shoots the outer contour of the product (5) to be detected.

Abstract

A device for use in high-speed line-scan detection, and a detection method therefor. The device comprises a parallel light source device (1), a beam splitter (2), a backlight source (3) and a camera (4), wherein the beam splitter (2) is obliquely arranged at one end of the parallel light source device (1); and the beam splitter (2), the backlight source (3) and the camera (4) are arranged in a line. The device uses a telecentric optical path design of the parallel light source device (1), and emergent light has the characteristics of high parallelism and ultrahigh brightness, such that the amount of light passing through a lens can be increased, thereby increasing the light efficiency utilization rate, reducing the required camera acquisition and exposure time, and greatly improving the visual detection efficiency.

Description

一种应用于高速线扫检测的装置及其检测方法A device applied to high-speed line scan detection and its detection method
本申请要求于2021年04月30日提交中国专利局、申请号为202110483877.0、发明名称为“一种应用于高速线扫检测的装置及其检测方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed on April 30, 2021 with the application number of 202110483877.0 and the invention titled "A device applied to high-speed line scan detection and its detection method", the entire contents of which are Incorporated herein by reference.
技术领域technical field
本发明属于机器视觉技术领域,具体涉及一种应用于高速线扫检测的装置及其检测方法。The invention belongs to the technical field of machine vision, and in particular relates to a device and a detection method applied to high-speed line scan detection.
背景技术Background technique
随着自动光学检测科技的迅猛发展,市场对检测稳定性和检测效率需求越来越高。高速检测时,视觉成像效果稳定性和检测速度快慢是影响到检测效率的其中两个重要因素。例如,在手机柔性屏热检测时,柔性屏经过激光切割屏幕后,在切割道附近由于激光热量的影响,融化旁边的区域,产生轻微的凸起。为评估凸起的大小,需要相机捕捉手机柔性屏并将轻微凸起的热影响区域成像出来进行分析,这对拍摄装置的效果稳定性及拍摄速度要求较高。With the rapid development of automatic optical inspection technology, the market demand for inspection stability and inspection efficiency is getting higher and higher. During high-speed inspection, the stability of visual imaging effects and the detection speed are two important factors that affect the detection efficiency. For example, during the thermal detection of the flexible screen of a mobile phone, after the flexible screen is cut by a laser, the area next to it is melted due to the influence of the heat of the laser near the cutting line, resulting in a slight bulge. In order to evaluate the size of the bump, the camera needs to capture the flexible screen of the mobile phone and image the slightly raised heat-affected area for analysis, which requires higher stability and shooting speed of the shooting device.
在现有技术中,用于手机柔性屏热检测的同轴光源,光源亮度和方向性无法同时兼具,现有的同轴光源,要么是光源亮度高、方向性差并需要多次手动调节光源,使其方向性满足拍摄要求,操作难度大,图像采集速度低;要么是方向性好,但光源亮度低,从而导致光源照明单元亮度不足,图像采集不清楚。In the prior art, the coaxial light source used for thermal detection of mobile phone flexible screens cannot have both the brightness and directivity of the light source at the same time. The existing coaxial light sources either have high brightness of the light source, poor directivity, and need to manually adjust the light source many times. , so that the directionality meets the shooting requirements, the operation is difficult, and the image acquisition speed is low; or the directionality is good, but the brightness of the light source is low, resulting in insufficient brightness of the light source lighting unit and unclear image acquisition.
发明内容SUMMARY OF THE INVENTION
本发明的目的在于:针对现有技术的不足,提供一种应用于高速线扫检测的装置及其检测方法,其具有亮度高且光线方向性好的特点,可以大幅提升进入镜头的通光量,增加光线利用率,缩短曝光时间,提高视觉检测的效率。The purpose of the present invention is to: in view of the deficiencies of the prior art, to provide a device for high-speed line scan detection and a detection method thereof, which have the characteristics of high brightness and good light directionality, and can greatly increase the amount of light entering the lens, Increase light utilization, shorten exposure time, and improve the efficiency of visual inspection.
为了实现上述目的,本发明采用如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:
一种应用于高速线扫检测的装置,包括平行光源装置、分光镜、背光 源和相机,所述分光镜呈倾斜设置于所述平行光源装置一端,所述分光镜、所述背光源和所述相机呈一字排列。采用远心光路设计、使出射光平行度高,使镜头光线通光量更多,降低相机采集所需的曝光时间,相比普通同轴光,可降低13倍曝光,从而大幅度提升视觉检测效率。A device applied to high-speed line scan detection, comprising a parallel light source device, a beam splitter, a backlight source and a camera, the beam splitter is inclined at one end of the parallel light source device, the beam splitter, the backlight source and the The cameras are arranged in a line. The telecentric optical path design is adopted, which makes the output light have high parallelism, so that the light flux of the lens is more, and the exposure time required for camera acquisition is reduced. Compared with ordinary coaxial light, the exposure can be reduced by 13 times, thereby greatly improving the visual inspection efficiency. .
进一步地,进一步地,所述平行光源装置包括固定体和设置于所述固定体内的光纤点光源。这种结构设计,有效增强了整个装置的结构牢固性。Further, further, the parallel light source device includes a fixed body and an optical fiber point light source disposed in the fixed body. This structural design effectively enhances the structural firmness of the entire device.
进一步地,所述固定体用于使光线的发散角≤1°。保证了光源输出的光线保持平行且同轴度高,增加镜头光线通光量,降低所需相机采集曝光时间,相比普通同轴光,可降低13倍曝光,从而大幅度提升视觉检测效率。Further, the fixing body is used to make the divergence angle of the light ≤ 1°. It ensures that the light output by the light source remains parallel and has a high coaxiality, increases the amount of light passing through the lens, and reduces the required exposure time for camera acquisition. Compared with ordinary coaxial light, the exposure can be reduced by 13 times, thereby greatly improving the visual inspection efficiency.
进一步地,所述固定体包括第一基体、第二基体和第三基体,所述第一基体一端设置有第一连接口,所述第三基体一端设置有与所述第一连接口相对应的第二连接口,所述第二基体的两端分别连接于所述第一连接口和所述第二连接口,所述第三基体沿光线出射方向向外延伸扩展形成扩张端口。这种结构设计,使光线的发散角≤1°,提高了光源的利用率,使光线在传输过程中能够保证朝着同一方向传播,第一基体、第二基体和第三基体内壁对光线具有反射作用,能够降低光线在传输过程中的损耗,提高了光线的光斑亮度。Further, the fixing body includes a first base body, a second base body and a third base body, one end of the first base body is provided with a first connection port, and one end of the third base body is provided with a corresponding first connection port The two ends of the second base are respectively connected to the first connection port and the second connection port, and the third base extends outward along the light exit direction to form expansion ports. This structural design makes the divergence angle of the light ≤ 1°, which improves the utilization rate of the light source, so that the light can be guaranteed to propagate in the same direction during the transmission process. The reflection effect can reduce the loss of light in the transmission process and improve the brightness of the light spot.
进一步地,所述第一基体内置有散热装置,所述散热装置用于散热。这种结构设计,有效延长了平行光源装置的使用寿命,避免了由于工作过程中光源产生的热量过多从而导致设备出现故障的现象发生。Further, a heat dissipation device is built in the first base body, and the heat dissipation device is used for heat dissipation. This structural design effectively prolongs the service life of the parallel light source device, and avoids the occurrence of equipment failure due to excessive heat generated by the light source during operation.
进一步地,所述背光源用于增加待检测产品的背光量。增加背光的目的是辅助相机拍摄出所述待检测产品外轮廓,方便所述相机定位捕捉到所述待检测产品。Further, the backlight source is used to increase the backlight amount of the product to be inspected. The purpose of adding the backlight is to assist the camera to photograph the outer contour of the product to be inspected, so as to facilitate the camera to locate and capture the product to be inspected.
进一步地,所述背光源的上端面与所述待检测产品的下端面之间的距离为19.5mm~20.5mm。这种结构设计,使相机镜头光线通光量大,提高了相机拍摄的所述待检测产品轮廓图像的质量。Further, the distance between the upper end surface of the backlight source and the lower end surface of the product to be detected is 19.5 mm˜20.5 mm. With this structural design, the light flux of the camera lens is large, and the quality of the contour image of the product to be detected captured by the camera is improved.
进一步地,所述分光镜的下端面与所述待检测产品的上端面之间的距离为9.5mm~10.5mm。这种结构设计,使所述相机镜头光线通光量大,提高了相机拍摄的所述待检测产品轮廓图像的质量。Further, the distance between the lower end face of the spectroscope and the upper end face of the product to be detected is 9.5 mm˜10.5 mm. With this structural design, the light flux of the camera lens is large, and the quality of the contour image of the product to be detected captured by the camera is improved.
进一步地,所述相机镜头端面与所述待检测产品的上端面之间的距离为105mm~145mm。这种结构设计,使所述相机镜头光线通光量大,提高了所述相机拍摄的所述待检测产品轮廓图像的质量。Further, the distance between the end face of the camera lens and the upper end face of the product to be inspected is 105mm˜145mm. With this structural design, the light flux of the camera lens is large, and the quality of the contour image of the product to be detected captured by the camera is improved.
进一步地,所述相机为16K线阵相机。所述16K线阵相机具有高分辨率,可以不间断的连续采集手机柔性屏的图像;对直线运动的手机柔性屏进行连续采集,提高了图像的采集效率。Further, the camera is a 16K line scan camera. The 16K line scan camera has a high resolution, and can continuously collect images of the mobile phone flexible screen without interruption; the continuous acquisition of the mobile phone flexible screen moving in a straight line improves the image collection efficiency.
进一步地,所述相机的镜头为0.8倍远心镜头。采用0.8倍远心镜头,能够提高采集的手机柔性屏图像的清晰度,从而大幅度提升视觉检测效率。Further, the lens of the camera is a 0.8x telecentric lens. The use of a 0.8x telecentric lens can improve the clarity of the collected mobile phone flexible screen images, thereby greatly improving the visual inspection efficiency.
一种应用于高速线扫的检测方法,其采用上述的应用于高速线扫检测的装置来进行检测,包括如下步骤:A detection method applied to high-speed line scan, which adopts the above-mentioned device applied to high-speed line scan detection to detect, comprising the following steps:
步骤1:调整所述平行光源装置(1)、所述分光镜(2)、所述背光源(3)和所述相机(4)的相对位置,并开启所述平行光源装置(1),使光斑落于所述相机(4)视野正中间;Step 1: Adjust the relative positions of the parallel light source device (1), the beam splitter (2), the backlight source (3) and the camera (4), and turn on the parallel light source device (1), Make the light spot fall in the middle of the field of view of the camera (4);
步骤2:将所述相机(4)与电脑配对连接,开启相机采集软件,设置好曝光时间;Step 2: pair the camera (4) with the computer, open the camera acquisition software, and set the exposure time;
步骤3:待检测产品(5)于所述背光源(3)上方匀速运动,所述相机(4)对所述待检测产品(5)进行拍摄。Step 3: The product to be inspected (5) moves at a constant speed above the backlight source (3), and the camera (4) takes a picture of the product to be inspected (5).
上述步骤3所述的所述相机(4)对所述待检测产品(5)进行拍摄,其具体如下:The camera (4) described in the above step 3 shoots the product to be detected (5), and the details are as follows:
步骤3-1:所述相机(4)对待所述待检测产品(5)的外轮廓定位;Step 3-1: the camera (4) locates the outer contour of the product to be detected (5);
步骤3-2:所述相机(4)对待所述待检测产品(5)的外轮廓连续拍摄。Step 3-2: The camera (4) continuously shoots the outer contour of the product to be detected (5).
本发明的有益效果在于:一种应用于高速线扫检测的装置及其检测方法,包括平行光源装置、分光镜、背光源和相机,所述分光镜呈倾斜设置于所述平行光源装置一端,所述分光镜、所述背光源和所述相机呈一字排列。平行光源装置采用远心光路设计,出射光线平行度高且具有超高亮度的特点,可以使镜头光线通光量更多,增加了光效利用率,降低所需相机采集曝光时间,相比普通同轴光,可降低13倍曝光,从而大幅度提升视觉检测效率。The beneficial effects of the present invention are as follows: a device applied to high-speed line scan detection and a detection method thereof, comprising a parallel light source device, a beam splitter, a backlight source and a camera, wherein the beam splitter is obliquely arranged at one end of the parallel light source device, The beam splitter, the backlight source and the camera are arranged in line. The parallel light source device adopts a telecentric optical path design, the output light has high parallelism and has the characteristics of ultra-high brightness, which can make the lens light pass more light, increase the light efficiency utilization rate, and reduce the required camera acquisition and exposure time. Axial light can reduce exposure by 13 times, thereby greatly improving the efficiency of visual inspection.
附图说明Description of drawings
图1为本发明实施例1中的一种应用于高速线扫检测的装置的结构示意图。FIG. 1 is a schematic structural diagram of a device applied to high-speed line scan detection in Embodiment 1 of the present invention.
其中:in:
1-平行光源装置;11-固定体;111-第一基体;112-第二基体;113-第三基体;12-散热装置;1-parallel light source device; 11-fixed body; 111-first base body; 112-second base body; 113-third base body; 12-heat dissipation device;
2-分光镜;2- beam splitter;
3-背光源;3- Backlight;
4-相机;4- camera;
5-待检测产品。5- Products to be tested.
具体实施方式Detailed ways
如在说明书及权利要求当中使用了某些词汇来指称特定组件,本领域技术人员应可理解,制造商可能会用不同名词来称呼同一个组件。本说明书及权利要求并不以名称的差异来作为区分组件的方式,而是以组件在功能上的差异来作为区分的准则。如在通篇说明书及权利要求当中所提及的“包含”为一开放式用语,故应解释成“包含但不限定于”。“大致”是指在可接受的误差范围内,本领域技术人员能够在一定误差范围内解决技术问题,基本达到技术效果。If certain terms are used in the description and claims to refer to specific components, those skilled in the art should understand that manufacturers may use different terms to refer to the same component. The description and claims do not use the difference in name as a way to distinguish components, but use the difference in function of the components as a criterion for distinguishing. As mentioned in the entire specification and claims, "comprising" is an open-ended term, so it should be interpreted as "including but not limited to". "Approximately" means that within an acceptable error range, those skilled in the art can solve technical problems within a certain error range, and basically achieve technical effects.
在本发明的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”、水平”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", horizontal" etc. is based on the accompanying drawings The orientation or positional relationship shown is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a reference to the present invention. limits.
在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明 中的具体含义。In the present invention, unless otherwise expressly specified and limited, the terms "installed", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrally connected; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.
以下结合附图和具体实施例对本发明作进一步详细说明,但不作为对本发明的限定。The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments, but it is not intended to limit the present invention.
实施例1Example 1
如图1所示,一种应用于高速线扫检测的装置,包括平行光源装置1、分光镜2、背光源3和相机4,分光镜2呈倾斜设置于平行光源装置1一端,分光镜2、背光源3和相机4呈一字排列。平行光源装置1采用远心光路设计、使出射光平行度高,便于实现快速检测。例如,在手机柔性屏热检测时,采用该装置检测,其可以将手机柔性屏热引起的轻微凸起区域成像出来,并快速捕捉拍摄。同时,由于该装置产生的光线平行度高且具有超高亮度的特点,可以使镜头光线通光量更多,降低相机4所需的采集曝光时间,相比普通同轴光,可降低13倍曝光,从而大幅度提升视觉检测效率。As shown in FIG. 1, a device applied to high-speed line scan detection includes a parallel light source device 1, a beam splitter 2, a backlight source 3 and a camera 4. The beam splitter 2 is inclined and arranged at one end of the parallel light source device 1, and the beam splitter 2 , the backlight source 3 and the camera 4 are arranged in a line. The parallel light source device 1 adopts a telecentric optical path design, so that the parallelism of the emitted light is high, and it is convenient to realize rapid detection. For example, in the thermal detection of the flexible screen of the mobile phone, the device can be used for detection, which can image the slightly raised area caused by the thermal of the flexible screen of the mobile phone, and quickly capture and shoot. At the same time, due to the high parallelism and ultra-high brightness of the light generated by the device, it can increase the light flux of the lens and reduce the acquisition and exposure time required by the camera 4. Compared with ordinary coaxial light, the exposure can be reduced by 13 times. , thereby greatly improving the visual inspection efficiency.
其中,分光镜2呈45°倾斜放置,其用于将平行光源装置1发射的光线经过分光镜2反射到产品上,光线再由产品反射经过分光镜2,最后进入相机4的镜头。The beam splitter 2 is inclined at 45°, which is used to reflect the light emitted by the parallel light source device 1 to the product through the beam splitter 2 , and the light is reflected by the product through the beam splitter 2 and finally enters the lens of the camera 4 .
进一步地,平行光源装置1包括固定体11和设置于固定体11内的光纤点光源。这种结构设计,有效增强了整个装置的结构牢固性。Further, the parallel light source device 1 includes a fixed body 11 and an optical fiber point light source disposed in the fixed body 11 . This structural design effectively enhances the structural firmness of the entire device.
进一步地,固定体11用于使光线的发散角≤1°。保证了光源输出的光线保持平行且同轴度高,增加镜头光线通光量,降低所需相机4采集曝光时间,相比普通同轴光,可降低13倍曝光,从而大幅度提升视觉检测效率。Further, the fixing body 11 is used to make the divergence angle of the light ≤ 1°. It ensures that the light output by the light source remains parallel and has a high degree of coaxiality, increases the amount of light passing through the lens, and reduces the required exposure time for camera 4 acquisition. Compared with ordinary coaxial light, the exposure can be reduced by 13 times, thereby greatly improving the visual inspection efficiency.
进一步地,固定体11包括第一基体111、第二基体112和第三基体113,第一基体111一端设置有第一连接口,第三基体113一端设置有与第一连接口相对应的第二连接口,第二基体112的两端分别连接于第一连接口和第二连接口,第三基体113沿光线出射方向向外延伸扩展形成扩张端口。这种结构设计,使光线的发散角≤1°,提高了光源的利用率,使光线在传输过程中能够保证朝着同一方向传播,第一基体111、第二基体112和第三基体113内壁对光线具有反射作用,能够降低光线在传输过程中的损耗,提高了光线的光斑亮度。Further, the fixing body 11 includes a first base body 111 , a second base body 112 and a third base body 113 . One end of the first base body 111 is provided with a first connection port, and one end of the third base body 113 is provided with a first connection port corresponding to the first connection port. Two connection ports, two ends of the second base body 112 are respectively connected to the first connection port and the second connection port, and the third base body 113 extends outward along the light exit direction to form expansion ports. This structural design makes the divergence angle of the light ≤ 1°, which improves the utilization rate of the light source, so that the light can be guaranteed to propagate in the same direction during the transmission process. It has a reflection effect on light, which can reduce the loss of light in the transmission process and improve the brightness of the light spot.
进一步地,第一基体111内置有散热装置12,散热装置12用于散热。这种结构设计,有效延长了平行光源装置1的使用寿命,避免了由于工作过程中光源产生的热量过多从而导致设备出现故障的现象发生。Further, the first base body 111 has a built-in heat dissipation device 12, and the heat dissipation device 12 is used for heat dissipation. This structural design effectively prolongs the service life of the parallel light source device 1 and avoids the occurrence of equipment failure due to excessive heat generated by the light source during operation.
进一步地,背光源3用于增加待检测产品5的背光量。增加背光的目的是辅助相机4拍摄出待检测产品5外轮廓,方便相机4定位捕捉到待检测产品5。Further, the backlight source 3 is used to increase the backlight amount of the product 5 to be inspected. The purpose of adding the backlight is to assist the camera 4 to photograph the outer contour of the product 5 to be inspected, so that the camera 4 can locate and capture the product 5 to be inspected.
进一步地,背光源3的上端面与待检测产品5的下端面之间的距离为19.5mm~20.5mm。这种结构设计,使相机4镜头光线通光量大,提高了相机4拍摄的待检测产品5轮廓图像的质量。Further, the distance between the upper end surface of the backlight source 3 and the lower end surface of the product to be inspected 5 is 19.5 mm˜20.5 mm. This structural design enables a large amount of light to pass through the lens of the camera 4 , and improves the quality of the contour image of the product 5 to be inspected captured by the camera 4 .
进一步地,分光镜2的下端面与待检测产品5的上端面之间的距离为9.5mm~10.5mm。这种结构设计,使相机4镜头光线通光量大,提高了相机4拍摄的待检测产品5轮廓图像的质量。Further, the distance between the lower end surface of the spectroscope 2 and the upper end surface of the product to be inspected 5 is 9.5 mm˜10.5 mm. This structural design enables a large amount of light to pass through the lens of the camera 4 , and improves the quality of the contour image of the product 5 to be inspected captured by the camera 4 .
进一步地,相机4镜头端面与待检测产品5的上端面之间的距离为105mm~145mm。这种结构设计,使相机4镜头光线通光量大,提高了相机4拍摄的待检测产品5轮廓图像的质量。Further, the distance between the end face of the lens of the camera 4 and the upper end face of the product 5 to be inspected is 105 mm˜145 mm. This structural design enables a large amount of light to pass through the lens of the camera 4 , and improves the quality of the contour image of the product 5 to be inspected captured by the camera 4 .
进一步地,相机4为16K线阵相机4。16K线阵相机4具有高分辨率,可以不间断的连续采集手机柔性屏的图像;对直线运动的手机柔性屏进行连续采集,提高了图像的采集效率。Further, the camera 4 is a 16K line scan camera 4. The 16K line scan camera 4 has a high resolution and can continuously capture images of the mobile phone flexible screen without interruption; the continuous acquisition of the mobile phone flexible screen moving in a straight line improves the acquisition of images efficiency.
进一步地,相机4的镜头为0.8倍远心镜头。采用0.8倍远心镜头,能够提高采集的手机柔性屏图像的清晰度,从而大幅度提升视觉检测效率。Further, the lens of the camera 4 is a 0.8x telecentric lens. The use of a 0.8x telecentric lens can improve the clarity of the collected mobile phone flexible screen images, thereby greatly improving the visual inspection efficiency.
一种应用于高速线扫检测的装置的工作原理:调整好平行光源装置1、分光镜2、背光源3、相机4和待检测产品5之间的相对位置,设置好相应检测程序,并连接电脑,开启相机4采集软件,设置好适当的曝光时间,然后开启平行光源装置1,使平行光源装置1发射出一组平行度高、且同轴度高的高亮度光线,经过分光镜2的全反射作用,将光线反射于待检测工件的表面,经过待检测工件表面再反射,并通过分光镜2的透射作用,该束光线进入设置于待检测工件上方的相机4,利用背光源3增加背光量,辅助相机4捕捉并拍摄待检测产品5的外轮廓,方便相机4定位到待检测产品5,待检测产品5水平匀速运动,同时相机4配合捕捉待检测产品5 的图像。该装置利用超高亮平行同轴光和平行同轴结构的出光特点,大幅提升了进入镜头的通光量,使相机4拍摄的待检测产品5的热影响效果对比度更明显。The working principle of a device applied to high-speed line scan detection: adjust the relative positions of the parallel light source device 1, the beam splitter 2, the backlight source 3, the camera 4 and the product to be detected 5, set up the corresponding detection program, and connect Computer, start the camera 4 acquisition software, set the appropriate exposure time, and then turn on the parallel light source device 1, so that the parallel light source device 1 emits a group of high-brightness light with high parallelism and high coaxiality, passing through the beam splitter 2. Total reflection, the light is reflected on the surface of the workpiece to be inspected, and then reflected by the surface of the workpiece to be inspected, and through the transmission effect of the beam splitter 2, the beam of light enters the camera 4 arranged above the workpiece to be inspected, and the backlight source 3 is used to increase the The amount of backlight assists the camera 4 to capture and photograph the outer contour of the product 5 to be inspected, which facilitates the camera 4 to locate the product to be inspected 5 . The device utilizes the light emitting characteristics of ultra-bright parallel coaxial light and parallel coaxial structure, which greatly increases the amount of light entering the lens, and makes the thermal effect of the product 5 photographed by the camera 4 more obvious.
实施例2Example 2
本实施例2提供了一种应用于高速线扫的检测方法,其采用实施例1一种应用于高速线扫检测的装置来进行检测,具体如下:The present embodiment 2 provides a detection method applied to a high-speed line scan, which adopts a device applied to the high-speed line scan detection of the embodiment 1 for detection, and the details are as follows:
步骤1:调整平行光源装置(1)、分光镜(2)、背光源(3)和相机(4)的相对位置,并开启平行光源装置(1),使光斑落于相机(4)视野正中间;Step 1: Adjust the relative positions of the parallel light source device (1), the beam splitter (2), the backlight source (3) and the camera (4), and turn on the parallel light source device (1) so that the light spot falls on the camera (4) field of view. middle;
步骤2:将相机(4)与电脑配对连接,开启相机采集软件,设置好曝光时间;Step 2: Pair the camera (4) with the computer, open the camera acquisition software, and set the exposure time;
步骤3:待检测产品(5)于背光源(3)上方匀速运动,相机(4)对待检测产品(5)进行拍摄。Step 3: The product to be detected (5) moves at a constant speed above the backlight source (3), and the camera (4) shoots the product to be detected (5).
上述步骤3的相机(4)对待检测产品(5)进行拍摄,其具体如下:The camera (4) of the above-mentioned step 3 shoots the product to be detected (5), and the details are as follows:
步骤3-1:相机(4)对待待检测产品(5)的外轮廓定位;Step 3-1: the camera (4) locates the outer contour of the product to be detected (5);
步骤3-2:相机(4)对待待检测产品(5)的外轮廓连续拍摄。Step 3-2: The camera (4) continuously shoots the outer contour of the product (5) to be detected.
根据上述说明书的揭示和教导,本发明所属领域的技术人员还能够对上述实施方式进行变更和修改。因此,本发明并不局限于上述的具体实施方式,凡是本领域技术人员在本发明的基础上所作出的任何显而易见的改进、替换或变型均属于本发明的保护范围。此外,尽管本说明书中使用了一些特定的术语,但这些术语只是为了方便说明,并不对本发明构成任何限制。Based on the disclosure and teaching of the above specification, those skilled in the art to which the present invention pertains can also make changes and modifications to the above-described embodiments. Therefore, the present invention is not limited to the above-mentioned specific embodiments, and any obvious improvement, replacement or modification made by those skilled in the art on the basis of the present invention falls within the protection scope of the present invention. In addition, although some specific terms are used in this specification, these terms are only for convenience of description and do not constitute any limitation to the present invention.

Claims (10)

  1. 一种应用于高速线扫检测的装置,其特征在于:包括平行光源装置(1)、分光镜(2)、背光源(3)和相机(4),所述分光镜(2)呈倾斜设置于所述平行光源装置(1)一端,所述分光镜(2)、所述背光源(3)和所述相机(4)呈一字排列。A device applied to high-speed line scan detection, characterized in that it comprises a parallel light source device (1), a beam splitter (2), a backlight source (3) and a camera (4), wherein the beam splitter (2) is arranged in an inclined manner At one end of the parallel light source device (1), the beam splitter (2), the backlight source (3) and the camera (4) are arranged in a line.
  2. 根据权利要求1所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 1, wherein:
    所述平行光源装置(1)包括固定体(11)和设置于所述固定体(11)内的光纤点光源。The parallel light source device (1) comprises a fixed body (11) and an optical fiber point light source arranged in the fixed body (11).
  3. 根据权利要求2所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 2, wherein:
    所述固定体(11)用于使光线的发散角≤1°。The fixing body (11) is used to make the divergence angle of the light ≤ 1°.
  4. 根据权利要求3所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 3, wherein:
    所述固定体(11)包括第一基体(111)、第二基体(112)和第三基体(113),所述第一基体(111)一端设置有第一连接口,所述第三基体(113)一端设置有与所述第一连接口相对应的第二连接口,所述第二基体(112)的两端分别连接于所述第一连接口和所述第二连接口,所述第三基体(113)沿光线出射方向向外延伸扩展形成扩张端口。The fixed body (11) includes a first base body (111), a second base body (112) and a third base body (113), one end of the first base body (111) is provided with a first connection port, and the third base body One end of (113) is provided with a second connection port corresponding to the first connection port, and both ends of the second base body (112) are respectively connected to the first connection port and the second connection port, so The third base body (113) extends outward along the light exit direction to form expansion ports.
  5. 根据权利要求4所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 4, wherein:
    所述第一基体(111)内置有散热装置(12),所述散热装置(12)用于散热。A heat dissipation device (12) is built in the first base body (111), and the heat dissipation device (12) is used for heat dissipation.
  6. 根据权利要求1所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 1, wherein:
    所述背光源(3)用于增加待检测产品(5)的背光量。The backlight source (3) is used to increase the backlight amount of the product (5) to be inspected.
  7. 根据权利要求6所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 6, wherein:
    所述分光镜(2)的下端面与所述待检测产品(5)的上端面之间的距离为9.5mm~10.5mm;The distance between the lower end face of the spectroscope (2) and the upper end face of the product to be detected (5) is 9.5mm to 10.5mm;
    所述背光源(3)的上端面与所述待检测产品(5)的下端面之间的距离为19.5mm~20.5mm。The distance between the upper end surface of the backlight source (3) and the lower end surface of the product to be inspected (5) is 19.5 mm˜20.5 mm.
  8. 根据权利要求6所述的一种应用于高速线扫检测的装置,其特征在于:A device applied to high-speed line scan detection according to claim 6, wherein:
    所述相机(4)镜头端面与所述待检测产品(5)的上端面之间的距离为105mm~145mm。The distance between the end face of the lens of the camera (4) and the upper end face of the product to be inspected (5) is 105mm˜145mm.
  9. 一种如权利要求1~8任一项所述的应用于高速线扫检测装置的检测方法,其特征在于,包括如下步骤:A detection method applied to a high-speed line scan detection device according to any one of claims 1 to 8, characterized in that it comprises the following steps:
    步骤1:调整所述平行光源装置(1)、所述分光镜(2)、所述背光源(3)和所述相机(4)的相对位置,并开启所述平行光源装置(1),使光斑落于所述相机(4)视野正中间;Step 1: Adjust the relative positions of the parallel light source device (1), the beam splitter (2), the backlight source (3) and the camera (4), and turn on the parallel light source device (1), Make the light spot fall in the middle of the field of view of the camera (4);
    步骤2:将所述相机(4)与电脑配对连接,开启相机采集软件,设置好曝光时间;Step 2: pair the camera (4) with the computer, open the camera acquisition software, and set the exposure time;
    步骤3:待检测产品(5)于所述背光源(3)上方匀速运动,所述相机(4)对所述待检测产品(5)进行拍摄。Step 3: The product to be inspected (5) moves at a constant speed above the backlight source (3), and the camera (4) takes a picture of the product to be inspected (5).
  10. 根据权利要求9所述的一种应用于高速线扫检测装置的使用方法,其特征在于:A kind of using method applied to the high-speed line scan detection device according to claim 9, is characterized in that:
    上述步骤3所述的所述相机(4)对所述待检测产品(5)进行拍摄,其具体如下:The camera (4) described in the above step 3 shoots the product to be detected (5), and the details are as follows:
    步骤3-1:所述相机(4)对待所述待检测产品(5)的外轮廓定位;Step 3-1: the camera (4) locates the outer contour of the product to be detected (5);
    步骤3-2:所述相机(4)对待所述待检测产品(5)的外轮廓连续拍摄。Step 3-2: The camera (4) continuously shoots the outer contour of the product to be detected (5).
PCT/CN2022/088960 2021-04-30 2022-04-25 Device for use in high-speed line-scan detection, and detection method therefor WO2022228379A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116295019A (en) * 2023-05-22 2023-06-23 中国石油大学(华东) Automatic detection device for pipe threads of pipe

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113137936A (en) * 2021-04-30 2021-07-20 广东奥普特科技股份有限公司 Device applied to high-speed line scanning detection and detection method thereof

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11142243A (en) * 1997-11-13 1999-05-28 Yokogawa Electric Corp Interferometer and fourier transform-type spectral apparatus using the same
JP2015039580A (en) * 2013-08-23 2015-03-02 キヤノン株式会社 Optical tomographic imaging device
CN205256822U (en) * 2015-12-23 2016-05-25 苏州河图电子科技有限公司 Coaxial light source of compound labeller
CN205562432U (en) * 2016-01-22 2016-09-07 深圳市顶点视觉自动化技术有限公司 Electron sheet glass defect detecting's image acquisition device
CN107870511A (en) * 2017-12-04 2018-04-03 江苏维普光电科技有限公司 Quick scanning means based on double light path and apply its scan method
CN208794185U (en) * 2018-09-24 2019-04-26 东莞锐视光电科技有限公司 A kind of parallel coaxial light supply apparatus based on machine visual detection device
CN111716017A (en) * 2020-06-16 2020-09-29 罗建华 Visual detection device and laser processing system
CN113137936A (en) * 2021-04-30 2021-07-20 广东奥普特科技股份有限公司 Device applied to high-speed line scanning detection and detection method thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11142243A (en) * 1997-11-13 1999-05-28 Yokogawa Electric Corp Interferometer and fourier transform-type spectral apparatus using the same
JP2015039580A (en) * 2013-08-23 2015-03-02 キヤノン株式会社 Optical tomographic imaging device
CN205256822U (en) * 2015-12-23 2016-05-25 苏州河图电子科技有限公司 Coaxial light source of compound labeller
CN205562432U (en) * 2016-01-22 2016-09-07 深圳市顶点视觉自动化技术有限公司 Electron sheet glass defect detecting's image acquisition device
CN107870511A (en) * 2017-12-04 2018-04-03 江苏维普光电科技有限公司 Quick scanning means based on double light path and apply its scan method
CN208794185U (en) * 2018-09-24 2019-04-26 东莞锐视光电科技有限公司 A kind of parallel coaxial light supply apparatus based on machine visual detection device
CN111716017A (en) * 2020-06-16 2020-09-29 罗建华 Visual detection device and laser processing system
CN113137936A (en) * 2021-04-30 2021-07-20 广东奥普特科技股份有限公司 Device applied to high-speed line scanning detection and detection method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116295019A (en) * 2023-05-22 2023-06-23 中国石油大学(华东) Automatic detection device for pipe threads of pipe
CN116295019B (en) * 2023-05-22 2023-08-15 中国石油大学(华东) Automatic detection device for pipe threads of pipe

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