WO2022183295A1 - Procédé de soudage de composants optiques et dispositif optique associé - Google Patents

Procédé de soudage de composants optiques et dispositif optique associé Download PDF

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Publication number
WO2022183295A1
WO2022183295A1 PCT/CA2022/050307 CA2022050307W WO2022183295A1 WO 2022183295 A1 WO2022183295 A1 WO 2022183295A1 CA 2022050307 W CA2022050307 W CA 2022050307W WO 2022183295 A1 WO2022183295 A1 WO 2022183295A1
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WIPO (PCT)
Prior art keywords
fiber
optical
laser
support member
welding
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PCT/CA2022/050307
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English (en)
Inventor
Peter Robert HERMAN
Jianzhao Li
Oleg Borisovich VOROBYEV
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The Governing Council Of The University Of Toronto
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Publication of WO2022183295A1 publication Critical patent/WO2022183295A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3608—Fibre wiring boards, i.e. where fibres are embedded or attached in a pattern on or to a substrate, e.g. flexible sheets
    • G02B6/3612—Wiring methods or machines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3608—Fibre wiring boards, i.e. where fibres are embedded or attached in a pattern on or to a substrate, e.g. flexible sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers

Definitions

  • Optical devices can be made of more than one component which may require bonding to one another.
  • various bonding techniques exist, which were satisfactory to a certain degree, there remains room for improvement.
  • an optical device comprising : a support member; and an optical component having a curved surface, curved surface bonded to a receiving surface of the support member by a seam, the seam including a portion of the material of the optical fiber fused with a portion of a material of the support member.
  • a method of welding an optical fiber having an elongated surface positioned alongside a receiving surface of a support member, with an elongated weld interface defined between the elongated surface and the receiving surface comprising : controlling a laser to emit laser pulses in a localized region of focus, the localized region of focus being delimited within a combined volume of the optical fiber and support member, the localized region of focus intersected by the weld interface, the laser pulses heating the material of the optical fiber and the material of the support member in the localized region of focus to above a point of fusion, the fused optical fiber material and support member material fusioning with one another, and displacing the region of focus along the length of the weld interface in a manner to form an elongated seam of said fusioned optical fiber material and support member material.
  • an optical device comprising : a support member; and an optical component having an elongated surface, the elongated surface having a curvilinear cross-section defined transversally to a length of the elongated surface, the elongated surface bonded to the support member by a seam extending along the length, the seam having a cross-section area defined transversally to the length, the cross-section area of the seam including a portion of a material of the optical component fused with a portion of a material of the support member.
  • welding an optical component to another in the presence of a gap at the weld interface can represent a challenge.
  • This challenge can be overcome, an example of which will be presented below.
  • welding an optical component to another in the presence of an optical interface between a curved component and a component having a different shape, e.g. flat, along the optical path of the laser can lead to the presence of optical aberrations which can influence the precision of the welding operation.
  • This challenge can be overcome by using a refractive index matching oil at the optical interface, for instance.
  • computer as used herein is not to be interpreted in a limiting manner. It is rather used in a broad sense to generally refer to the combination of some form of one or more processing units and some form of memory system accessible by the processing unit(s).
  • the memory system can be of the non-transitory type.
  • the use of the expression “computer” in its singular form as used herein includes within its scope the combination of a two or more computers working collaboratively to perform a given function.
  • computer as used herein includes within its scope the use of partial capabilities of a given processing unit.
  • a processing unit can be embodied in the form of a general-purpose micro-processor or microcontroller, a digital signal processing (DSP) processor, an integrated circuit, a field programmable gate array (FPGA), a reconfigurable processor, a programmable read-only memory (PROM), to name a few examples.
  • DSP digital signal processing
  • FPGA field programmable gate array
  • PROM programmable read-only memory
  • the memory system can include a suitable combination of any suitable type of computer- readable memory located either internally, externally, and accessible by the processor in a wired or wireless manner, either directly or over a network such as the Internet.
  • a computer-readable memory can be embodied in the form of random-access memory (RAM), read-only memory (ROM), compact disc read-only memory (CDROM), electro- optical memory, magneto-optical memory, erasable programmable read-only memory (EPROM), and electrically-erasable programmable read-only memory (EEPROM), Ferroelectric RAM (FRAM)to name a few examples.
  • a computer can have one or more input/output (I/O) interface to allow communication with a human user and/or with another computer via an associated input, output, or input/output device such as a keybord, a mouse, a touchscreen, an antenna, a port, etc.
  • I/O interface can enable the computer to communicate and/or exchange data with other components, to access and connect to network resources, to serve applications, and/or perform other computing applications by connecting to a network (or multiple networks) capable of carrying data including the Internet, Ethernet, plain old telephone service (POTS) line, public switch telephone network (PSTN), integrated services digital network (ISDN), digital subscriber line (DSL), coaxial cable, fiber optics, satellite, mobile, wireless (e.g. Wi-Fi, Bluetooth, WiMAX), SS7 signaling network, fixed line, local area network, wide area network, to name a few examples.
  • POTS plain old telephone service
  • PSTN public switch telephone network
  • ISDN integrated services digital network
  • DSL digital subscriber line
  • coaxial cable
  • a computer can perform functions or processes via hardware or a combination of both hardware and software.
  • hardware can include logic gates included as part of a silicon chip of a processor.
  • Software e.g. application, process
  • Software can be in the form of data such as computer-readable instructions stored in a non-transitory computer-readable memory accessible by one or more processing units.
  • the expression “configured to” relates to the presence of hardware or a combination of hardware and software which is operable to perform the associated functions.
  • the various functions of the computer can be performed on hardware which is local, or which may be in part or in whole remote and/or distributed and/or virtual.
  • FIGURE 1 shows a schematic of a transparent fiber and transparent substrate in contact and under exposure of a scanning laser, undergoing bonding and forming a fiber package according to one or more embodiments;
  • FIGURE 2 schematically illustrates a diversity of fiber types appropriate for laser bonding, assembled individually in contact with a substrate according to one or more embodiments
  • FIGURES 3Ato 3D schematically illustrate various types of transparent fibers envisioned for laser bonding to substrates or ferrules, where the fibers have had various devices embedded, such as waveguides, micro-fluidic channels, Fabry-Perot etalons, fiber Bragg gratings (FBG), long period gratings, and optical waveguide circuits, according to one or more embodiments;
  • FBG fiber Bragg gratings
  • FIGURES 4A to 4F schematically illustrate various laser beam paths contemplated for focusing into the fiber-substrate interface, approaching either through the substrate or the fiber at various angles, or into the fiber through an oil immersion optic, according to one or more embodiments;
  • FIGURES 5Ato 5B schematically illustrate optical beam shaping elements such as a lens and an axicon that concentrate and direct the laser light into preferential shapes for controlling the size and position of the laser heated zone at the fiber-substrate interface according to one or more embodiments;
  • FIGURES 6A to 6E schematically illustrate a plurality of substrate configurations for fiber bonding in various laser beam directions, wherein the substrate surface has been modified and the substrate is considered to be straight, curved or a tube according to one or more embodiments
  • FIGURE 7 schematically illustrates an assembled array of transparent fibers after laser bonding to a flat transparent substrate with variable fiber-to-fiber spacing according to one or more embodiments
  • FIGURE 8 schematically illustrates a top-down view of transparent fibers after laser bonding to a flat transparent substrate wherein the fibers have been shaped into circular, S-bend and U-shaped paths according to one or more embodiments;
  • FIGURES 9A to 9C show schematic images of a fiber package formed by laser bonding of a transparent fiber to the inside of a transparent ferrule having similarly matched diameters, wherein the laser was scanned continuously or intermittently in straight, circular, and helical paths following along the fiber-ferrule interface according to one or more embodiments;
  • FIGURES 10A to 10D schematically illustrate a plurality of fiber assemblies wherein the transparent fibers were laser bonded to the transparent substrates and plates along the inner diameter of the through-holes or bonded similarly inside of a blind hole terminated for matching of the fiberwaveguides with waveguide circuits in secondary body (i.e., planar substrate) according to one or more embodiments;
  • FIGURES 11A to 11 B schematically illustrates an assembly of two or more transparent fibers of different sizes, formed by laser bonding at the position of fiber-to-fiber contact according to one or more embodiments;
  • FIGURE 12 shows one preferred arrangement for laser welding of a fiber to a planar substrate, wherein the laser is focused through the substrate to heat the interface region (thermal model inset), and scanned along the interface to form a weld seam;
  • FIGURE 13 shows images in end facet-cut views and top down substrate views of an array of single-mode optical fibers, illustrating a varying size and position of the laser welding zone at the fiber-substrate interface according to one or more embodiments;
  • FIGURES 14Ato 14B shows spectral recordings of a fiber Bragg grating recorded before, during, and after laser welding, demonstrating thermal responses acting on the FBG during welding to a planar transparent substrate without inducing permanent thermal damage at the fiber core position according to one or more embodiments;
  • FIGURE 15 plots the spectral shift in FBG wavelength resonance of a welded fiber- substrate system undergoing four-pointing bending with compressive and tensile loading, while also heated to 1000 °C, and not failing mechanically, according to one or more embodiments;
  • FIGURE 16 shows (a) facet images of the cleaved fiber-substrate after bonding by laser welding together with steady-state temperature profiles simulated at the axial position of peak laser exposure according to one or more embodiments.
  • the modelling also provides a graph (b) plotting the pseudo-instantaneous temperature profile along the fiber axis as calculated at both fiber-substrate interface and the fiber core center positions for different times after the start of laser welding.
  • the plots illustrate a confined heat affect zone and short heating time exposure according to one or more embodiments;
  • FIGURE 17 shows the peak temperatures expected by simulation at the fiber-substrate interface and the fiber core positions for different laser exposure and focusing positions, and identifies zones for creating strong welding seams while avoiding overheating damage to the fiber core, according to one or more embodiments;
  • FIGURE 18 shows a schematic of a transparent fiber, positioned inside the inner sleave of a cylindrical shaped ferrule, under exposure of a scanning laser delivered through flat transparent plate with refractive index matching oil applied to remove astigmatic aberration by the cylindrical ferrule and fiber shape.
  • the ferrule and fiber undergo bonding and forming of a fiber-ferrule package according to one or more embodiments;
  • FIGURES 19A to 19E show images of an optical fiber bonded inside of a ferrule by longitudinal welding tracks of varying widths and numbers of tracks according to one or more embodiments;
  • FIGURES 20Ato 20F show microscope images in cross-section views (top) and top views (bottom) of an optical fiber bonded inside of a ferrule by longitudinal welding tracks at varying azimuthal positions around the fiber-ferrule interface, and the comparison view with bonding of a fiber to a planar transparent plate (a), according to one or more embodiments; and
  • FIGURES 21 A to 21 B show spectral recordings of a fiber Bragg grating embedded with a pi-defect, recorded before and after laser welding at the bottom fiber-ferrule interface, demonstrating permanent thermal damage at the fiber core position when focused in a shallow position (a) relative to nearly insignificant damage in a deeper focusing position (b), according to one or more embodiments.
  • Example optical fiber packages are disclosed together with the associated methods of bonding the transparent fibers to transparent substrates and ferrules amongst various geometric configurations.
  • the method of assembly relies on focusing of a short-pulsed laser to the contact interface of the fiber and substrate or ferrule, wherein nonlinear optical absorption mechanisms are induced at a focal volume near to the interface that results in a localized laser heating.
  • the laser repetition rate is sufficiently high to induce a pseudo-continuous heating, thereby creating a zone of continuous melt in the heat-affected zone.
  • the disclosure centers on translating of the heat-affected zone preferentially along the contact interface of the fiber and substrate to form a zone of uninterrupted bonding between the fiber and substrate.
  • the scanning direction of the fiber may follow any circular, helical or linear direction around or along the cylindrical shaped interface of the two materials.
  • An advantage of directing the laser interaction near the interface can be to limit the size of the heat affected zone and sufficiently localized the melt zone to enable bonding of fiber and substrate without causing materially damage to the overall fiber structure, including any form of components such as waveguides, channels, or optical devices that are embedded within the fiber.
  • methods of laser bonding of transparent fiber with transparent substrates and ferrules can provide a strong welding between otherwise fragile components that constitute optical devices related to applications in optical telecommunication, optical sensing, heads up display, and/or biomedical devices, to name a few examples.
  • Optical fibers serve extensively in optical communication networks as well as a wide base of applications in sensing, imaging, medical diagnostics, and therapeutic treatment.
  • the thermal and mechanical properties of glass fibers present challenges in packaging as more complex fiber assemblies are sought with higher density integration, more compact footprint, and increased resilience to extreme environmental conditions.
  • Optical fibers can be assembled with curable adhesives that also provide refractive index matching for reducing Fresnel reflection and light scattering loss. Such adhesives impose limitations in maximum operating temperature (200 - 500 °C) and mechanical strength, and bear disadvantages of degradation and outgassing overtime.
  • Direct glass-to-glass surface bonding can be consequently desired to enable an all-glass fiber packaging solution for high strength and high temperature application.
  • Optical contact bonding can offers such properties but may be impractical for optical fibers due to the imprecise conformal matching of their small cylindrically-shaped surfaces.
  • Spatially confined thermal heating with lasers can be favored for strong fiber-to-glass bonding.
  • C0 2 laser melting and re-solidification of fiber end facets can be applied to bond fibers with other fibers or optical components, but due to strong glass absorption, laser heating cannot be directly applied to the bonding interface, and relies on transport by thermal diffusion from laser heating from a nearby open surface. This indirect heating can results in an overly large heat affected zone that may damage neighboring elements or cause undesirable physical distortion of the work pieces.
  • Ultrashort-pulsed lasers can be used to weld relying on optical transparency inside of glass to position a focal volume in the vicinity of the interface and locally drive impulse heating by nonlinear optical absorption.
  • strong glass-to-glass bonding of two flat substrates can be achieved by scanning the laser focal volume along an internal optical interface.
  • a more favorable pseudo-continuous heating and volume melt may be generated with heat accumulation effects by using high-repetition-rate laser pulses.
  • continuous melt zones can be directed along the interface to weld or join surfaces of varying combinations of glass-to-glass, glass-to-semiconductor, and glass-to-metal materials when held in close optical contact. Higher power exposure can accommodate glass-to-glass welding across gaps of 3 pm.
  • Optical fibers can be bonded to flat substrates by multi-line scanning of a laser focus transversely across the fiber. Such as bonding process can be assisted by selecting a substrate or a thin film coating with lower melting temperature than the fiber to favor substrate melting and bonding with the non-melted fiber. Such bonding can be weaker than fusion welding and remain susceptible to fracture from the thermal expansion mismatch between dissimilar materials.
  • optical fibers made of fused silica may be selected and matched with packaging substrates also made of fused silica.
  • a combination of fiber and silica glass plate welding can be performed with transverse scanning of deep ultraviolet laser (DUV) light using low repetition rate scanning exposure of 15 ns pulses.
  • DUV deep ultraviolet laser
  • Weak DUV absorption while focusing enables a concentration of the laser absorption locally at the fiber-substrate interface.
  • strong weld seams can be generated due to a discontinuous heating under the low (i.e., 100 Hz) repetition rate.
  • the DUV irradiation may drive photochemical modification and damage to the fiber core waveguide and devices embedded therein.
  • the bonding can rely on inducing a pseudo-continuous melt in a small volume at the interface of the fiber and substrate or fiber and sleeve that is directed by a laser beam and device positioning system to move along the interface.
  • the scanning direction can provide for a zone of uninterrupted welding to form between the two structures to secure a strong bond.
  • the resulting fiber and substrate assembly can present benefits in packaging such as high mechanical strength and high temperature operation.
  • the method can enable assembly of fibers with substrates, ferrules and other fibers in flexible geometries and combinations that offer advantages of high mechanical strength, long-term material stability and wide temperature range of application.
  • the disclosure includes an example method of laser bonding wherein a short-pulsed laser of high repetition rate is focused to near the contact interface of a transparent fiber and transparent substrate.
  • Nonlinear optical absorption mechanisms can be periodically induced at a rate preferentially faster than thermal diffusion, permitting a pseudo- continuous melt to form in a small laser interaction zone at the interface.
  • the melt zone is translated to follow closely along the interface formed between the fiber and either of the substrate or the ferrule or a second fiber and thereby create an uninterrupted welding zone between the fiber and the second body.
  • the laser focusing position, the relative scanning speed along the interface, and the power delivery are tuned to preferentially balance the degree of heating dissipated in the fiber and second body (i.e., substrate, ferrule, second fiber) and thus control the size, position, and quality of the welding zone.
  • This localized heating can permit a further temperature control within the fiber to minimize the overall thermal damage that may result nearby inside of the fiber, for example at the core waveguide, from thermal transport from the welding zone.
  • Formation of a sufficiently small heat affected zone is described that enables strong welding seams to form without inducing thermal degradation to any key components that may be contained nearby with the fiber, such as waveguides, micro-holes, or micro-channels, or other optical or mechanical devices that have been previously manufactured or embedded within the fiber.
  • the disclosure further includes embodiments of fiber connectors, fiber assemblies, and fiber sensors that can be formed by the disclosed methods.
  • the example(s) takes advantage of the transparency of a fiber and mounting substrate or ferrule to deliver focused laser energy to a position near to an interface of contact or near contact between the two bodies.
  • the laser is of sufficiently short pulse duration to induce nonlinear optical absorption of the laser, localized near to the interface, resulting in heating of both the substrate and fiber in the nearby interface zone.
  • the time interval between laser pulses, t r is sufficiently short on a thermal diffusion scale length to result in heat accumulation and pseudo-continuous melting of the two bodies, thereby sustaining a melt volume near the fiber-substrate interface.
  • This melt zone is preferably translated along the contact interface of the fiber and substrate in order to form an unbroken welding region between the fiber and substrate of flexible shape size that exceeds the dimensions of the laser heat affected zone (in a static exposure).
  • the laser formed melt zone will smooth out high levels of thermal cycling, for example, from melting temperature to room temperature in the heat-affected zone surrounding the central zone of laser interaction.
  • the size of the heat zone above the melting threshold will be defined by the laser scan speed, pulse energy, focusing geometry, repetition rate, and other parameters as well known to a practitioner of the art in laser interaction physics.
  • the heat zone size will influence the size of the weld seam, both of which will exceed the laser-absorption volume or also known as the laser interaction volume when using high repetition rate lasers in the heat accumulation domain.
  • the example(s) preferentially harnesses this pseudo-continuous heat zone for laser bonding of a transparent fiber to a transparent substrate or ferrule by scanning the heat zone along the interface between the two materials.
  • atransparent glass fiber 10 of cylindrical shape is positioned in contact with a flat substrate 12 as shown in Figure 1.
  • Figure 1 shows a schematic of a transparent fiber 10 and flat transparent substrate 12 in contact 14 and under exposure of a scanning focused laser beam 16, undergoing bonding 18 and forming a fiber package 20 according to one or more embodiments of the example(s).
  • a laser beam 16 is focused to the interface of the two materials through the substrate 12 from below (wide arrow).
  • the laser 16 propagation becomes less converging following Snell’s Law after entering the first surface 22 of the substrate 12.
  • the nonlinear laser energy absorption zone 26 near the interface 14 is typically concentrated inside of an asymmetric volume with length known as the depth of focus (DOF along Z) typically exceeding a narrower beam waist (w 0 along X and Y) as represented by the vertical line drawn shown on cross-sectional view of the front interface 28.
  • DOE depth of focus
  • w 0 along X and Y narrower beam waist
  • Laser 16 heating accumulation effects result in an expanded heating zone, known as a heat affected zone (HAZ) 24, identify by the ellipse.
  • the size of the heat affected zone 24 is controlled by the laser parameters and can balloon to sizes much larger than the laser absorption zone 26 due to the heat accumulation.
  • the laser beam 16 is scanned on contrary to the prior art to preferably follow along the contact interface (-X) 14 and form a continuous melting zone in which a weld seam will result in bonding between the fiber 10 and substrate 12.
  • the weld seam 30 could be a smooth line with ellipsoidal or circular cross-section, or a modulated line as shown in Figure 1 by highly overlapping voxels.
  • the welding seam 30 following the interface 14 could be continuous 32 along the whole interface 14, or formed shorter segments 34.
  • the laser 16 focal position is forgiving on the size and relative position of the HAZ 24 in overlapping with the interface, and can be adjusted laterally ( ⁇ Y) or vertically ( ⁇ Z) to further modify the evolving shape of the HAZ 24, and finally the shape of the weld seam 30.
  • the relative displacement of the laser 16 heating zone within the fiber 10 and substrate 12 may be controlled by scanning of the laser beam 16 or by translation of the fiber 10 and substrate 12, or a combination of both laser 16 and fiber-substrate 10,12 motions, by a variety of methods as well known to practitioners of the art.
  • the first one is the control of the laser parameters, which can include the control of parameters such as amplitude, repetition rate, pulse width, etc., of the laser pulses emitted by the laser emitter 36. This can be controlled by a component of module which will be referred to herein as the laser parameter controller 38.
  • the second one is the control of the relative movement between the optical components and the focus region. This can involve some form or another of movement system 40 which can be controlled by a component or module which we will referred to herein as the movement system controller 42.
  • the laser parameter controller 38 and the movement system controller 42 involve independent software modules running on a common computer 44, but it will be understood that in alternate embodiments, the controllers can take other forms, and can be entirely independent from one another.
  • the laser anticipated for application in the present application encompasses a wide range of commercially available types, for example, Titanium-Sapphire, neodymium-, ytterbium- , and chromium-doped glass or crystal rods or disks, rare-earth-doped (ytterbium (Yb) and erbium (Er)) fiber lasers, diode laser, and dye lasers.
  • a tunable laser wavelength generator such as based on optical parametric amplifier (OPA) are also considered.
  • the laser pulse duration is anticipated between 4 femtoseconds and 500 picoseconds, which is sufficiently short to induce nonlinear absorption within the focal volume that is Illustrated as an example to be at the fiber-substrate interface in Figure 1.
  • the laser wavelength extends from the deep UV, for example 193 nm, to mid-IR wavelength, for example 5 pm.
  • the selection of wavelength may be matched with the selection of welding materials to facilitate sufficient transparency for the laser pulse to propagate with little absorption before reaching the interface interaction zone.
  • the time interval (t r ) between successive pulses is anticipated to vary from 1 ps to 1 ps, and serve as a control with the thermal diffusion scale length to manage the degree of heat accumulation and pseudo-continuous melting being driven between the two bodies (i.e., fiber and substrate in Figure 1) near the interface.
  • Such parameters may include the focal length and numerical aperture (NA) of the focusing optics, optical aberrations in the beam line components and/or the fiber, substrate or ferrule welding components, the beam modal quality and coherence, the beam spatial and temporal shape, and the phase front shape amongst other parameters that are anticipated embodiments of the example(s).
  • NA numerical aperture
  • the fiber 10 and substrate 12 can consist of the same, similar, or dissimilar materials, and have a structure of glass, crystalline, polycrystalline, glass-ceramic, or ceramic material.
  • materials anticipated by the example(s) include fused silica, borosilicate glass, quartz, sapphire, soda-lime glass, lead glass, aluminosilicates, magnesium fluoride, calcium fluoride, artificial diamond, polymer, transparent conductive oxides like ITO, chalcogenide, lithium niobite, phosphate glass, aluminate glass, and borate glass, fluoride glass.
  • Figure 2 schematically illustrates non-limiting examples of fiber 10 types amongst a much wider diversity that are anticipated for laser bonding.
  • the example illustrates welding to a flat substrate 12, the example(s) anticipates a diversity of substrate, ferrule and other body types for fiber welding.
  • the fibers 10 have been assembled individually in contact or near contact with the substrate 12 in preparation for laser welding .
  • the illustrated fiber examples from left to right include a waveguide coreless fiber 46, a single-core fiber 48, a fiber with multiple cores in hexagonal 50 or linear arrangement 52, a photonic crystal or photonic bandgap fiber, a hollow core photonic crystal fiber 54, a polarization maintaining fiber with stress bars (left/right) straddling a center core waveguide 56, a thin film coated fiber 58, a double cladding fiber of hexagonal shape 60, and a polished D-shape fiber 62 with or without thin film coating on the polished surface.
  • all here illustrated core waveguides could be of single or multimode type, and all here illustrated single-core fibers could be multi-core fibers as well.
  • the fiber waveguides 10 could be based on total internal reflection or photonic bandgap structures.
  • the fiber 10 may be made of multiple choices and combinations of materials that offer optically transparency, for example, described in the prior paragraph ( Figure 1).
  • the fiber cladding and core waveguides could be of any size and shape commercially or not commercially available.
  • the example(s) anticipates laser bonding of fibers 10 having diameters varying from 1 pm to 1,000 pm.
  • Figures 3A to 3D schematically illustrates various types of optical fibers 10 envisioned for laser bonding to substrates or ferrules, where the fibers 10 (such as illustrated in Figure 2) have had various devices embedded either in a core waveguide or in the cladding, such as fiber Bragg gratings 64 (a), long period gratings 66 (b), micro-fluidic channels 68 and Fabry-Perot etalons 70 (c), and optical waveguide circuits 72 (d), according to one or more embodiments of the example(s).
  • the internal devices add value to the fiber 10 in sensing, optical communication, bio-imaging and other applications, and such fiber devices can be further integrated to form micro-optical, opto-mechanical, bio-photonics microsystems, etc.
  • the HAZ 24 formed by the laser welding process as well as any direct laser irradiation onto the devices noted above need to be minimized to avoid deleterious damage or reduction of performance by any of the embedded devices as well as to integral components in the packaging system.
  • Figures 4Ato 4F schematically illustrates a further embodiment of the example(s) in Figure 1 , wherein the laser beam direction contemplated for focusing to the fiber-substrate 10,12 interface 14, may be varied, according to optical methods as well known to the practitioner of the art.
  • Figure 4a depicts the configuration of Figure 1 , with the laser beam 16 aligned normal to enter the substrate 12 before the fiber 10.
  • the laser 16 approaches the fiber-substrate 10,12 interface 14 passing through the substrate 12 at various angles of incidence 72 according to one or more embodiments of the example(s).
  • the beam direction general shown by the large arrow, is shown altered at the first interface 22 of the substrate 12 according to Snell’s Law.
  • the laser may be focused first through the fiber 10 at normal (c) or tilted angle (d) and directed to interact near the fiber-substrate 10,12 interface 14 following the optical rules of refraction and external beam focusing optics.
  • Optical aberrations arising from the incident angles or surface astigmatism when focusing the laser beam 16 through the fiber 10 could be harnessed, modified, or compensated by adjusting the beam 16 pointing or other external focusing control parameters of the beam delivery system and create an appropriate shape and position of the HAZ 24 for strong welding at the fiber-substrate 10,12 interface 14.
  • the varying beam directions as here illustrated increase the flexibility for laser fiber-substrate welding to bypass obstacles on the laser beam path to the welding interface.
  • the surfaces may further have non-planar or irregular shapes, or surface modifications or opaque coatings or optically sensitive coatings that influence the laser interaction.
  • Figures 5Ato 5B schematically illustrates a conventional lens focusing arrangement in (a) for the non-limiting example of fiber-to-substrate welding (i.e., Figure 1).
  • a laser beam with Gaussian profile is focused by a spherical lens 74, with focusing controlled by the NA, beam diameter, lens design and substrate aberration to create a focusing volume near the fiber-substrate 10,12 interface 14.
  • a combination of nonlinear optical interactions, transient absorption, surface aberration and other effects lead to a combination of laser interaction physics and heat accumulation that results in the laser heating volume expanding from a small focusing zone (vertical line) into the HAZ 24 as defined by the ellipse.
  • the beam focusing lens may be aspheric, doublet, Fresnel, multi-lensed, diffractive, or a metamaterial, amongst many other types well known to a practitioner of the art.
  • the laser beam may be of other non-Gaussian profiles such as a super-Gaussian, donut, flat top, or Bessel beam, amongst many more types.
  • beam shaping tools that tilt or reshape the phase front as well as manipulate the temporal profile are anticipated by the example(s).
  • Figure 5b illustrates an axicon optic 76 that in combination with a lens can elongate the focal volume to increase the thickness of the heating and welding zone.
  • beam shaping may be obtained by combination of lens with beam processing tools such as liquid crystal amplitude or spatial light modulators, MEMs mirrors, acousto-optical lenses, diffractive optics, holograms, phase-arrayed beam steering antennas, and flexible membrane mirrors, as non-limiting examples.
  • the spatial light modulator generates a phase modulation of the electric field distribution from the laser beam, which provides a Fourier transform reshaping by the lens to create preferential beam shapes at the fiber-substrate 10,12 interface 14 for controlling the size and position of the laser heated zone according to one or more embodiments of the example(s).
  • this approach can be used to create multiple laser foci for simultaneous welding of multiple fiber-substrate interfaces, or to form an elongated focusing beam, according to one or more embodiments of the example(s).
  • the example(s) anticipates the application of such corrections to counter the astigmatic distortion and misalignment effects and facilitate a means for precise laser focusing that forms strong laser fiber bonds when beam delivery is directed to pass first through a transparent fiber 10 such as in the nonlimiting configurations illustrated in Figures 4c, 4d, 6a, 6b, 6c, 11a, and 11b.
  • the example(s) anticipates removal of the astigmatic aberration of the fiber 10 by the application of refractive index matching solvents or oils 78 used in combination with a planar transparent plate 80 when positioned at the first surface of the optical fiber 10 for beam delivery as was illustrated in the embodiments of Figures 4c, 4d, 6a, 6c, 6d, 11a, and 11b.
  • Figures 4e and 4f illustrate this modification of the beam delivery for the cases in Figures 4c and 4d, respectively.
  • the laser beam 16 first enters a planar transparent plate 80, undergoing refraction by Snell’s law.
  • the beam focusses undistorted when passing through the bottom surface 82 of the top plate 80 into the index matched emersion oil 78, and similarly is undistorted when passing from the oil 78 into the first surface of the fiber 10.
  • the combination of the top plate 80, the oil 78, and the fiber 10 is equivalent to focusing the beam 16 into bulk glass through a single top planar surface.
  • This non-limiting embodiment of the example(s) removes astigmatic focusing distortion by the air-fiber interface, providing a wider diversity of beam delivery options for fiber bonding and welding.
  • the example(s) considers a plurality of fiber-to-substrate interface geometries and selection of materials extending beyond the flat-substrate-to-fiber contact shown in Figure 1.
  • Figures 6A to 6E schematically illustrates a plurality of non-limiting examples of substrate- to-fiber mounting configurations for laser welding.
  • Figure 6a illustrates a fiber 10 in contact with a coated flat substrate 84 wherein the coated film 86 could be of a transparent or opaque material, for example, UV-curable optical adhesive, that could serve, for example, to enhance laser absorption near the interface 14 for fiber-substrate welding at reduced laser energy or at a weaker absorption laser wavelength.
  • Figure 6b follows from Figure 6a wherein materials such as optical adhesive glue 88 are confined by meniscus or other effects to increase fiber-substrate contact surface area and reduce the welding gap. Alternative, narrow contact zone may assist with alignment and positioning of the fiber 10 prior to laser welding.
  • Figure 6c illustrates a fiber 10 resting in the surface V-groove 90 of the substrate 12, for example, to offer precise lateral alignment or registration of fiber 10 position onto the substrate 12.
  • the fiber 10 is inserted inside of a cylindrical ferrule 92 with oversized internal walls (d) or close fitting (not shown).
  • the example(s) anticipates positioning of the fiber 10 onto non-planar substrates 94 that may be curved or bent (e).
  • all substrates described herein may have curved or modulated structures on one or both surfaces.
  • each fiber 10 may be welded to the substrate following a serial process of laser scanning or substrate 12 translation.
  • many or all fibers may be bonded in parallel by multiplexing the beam delivery with multi-beam generators and/or multi-lens focusing, such as possible with a spatial light modulator.
  • the example(s) anticipates a variety of welding geometries wherein the fibers are not straight as presented in the above examples, but are preferentially mounted or aligned along curing paths and then welded into position with the laser beam steering and sample position tools controlled to follow the path of the contact interface.
  • An example of this principle is schematically illustrated in Figure 8 with a top-down view of transparent fibers 100 positioned over a flat transparent substrate 12.
  • the fibers have been pre-shaped into circular, S-bend and U-shaped paths according to one or more embodiments of the example(s).
  • the laser beam may be scanned continuously or by segments following the curved fiber-substrate contact interface 14 as with the straight fibers.
  • the substrate 12 may include formation of guiding surface structures, such as curved V-channels 90, for example, fabricated by femtosecond laser induced chemical etching.
  • the illustrated examples are nonlimiting examples and extend to a platform of fiber optical circuits that may serve as optical interposers for high-speed data communication, fiber modal trimming, fiber-based signal processing, and 2D or 3D optical sensing applications.
  • Figures 9A to 9C illustrate schematic images of laser bonding of a transparent fiber 10 to the inside of a cylindrical channel 102 of near matching diameter 104 to the diameter 106 of the fiber 10.
  • the open channel 102 has been positioned in a transparent substrate 12 of cuboid (a, b) or cylindrica (c) shape, amongst many other anticipated shapes.
  • a transparent substrate 12 of cuboid (a, b) or cylindrica (c) shape, amongst many other anticipated shapes.
  • Several exemplary pathways for laser scanning are illustrated wherein the laser heating zone 26 was scanned continuously (a) or intermittently (b; left) on two parallel straight paths on 180° azimuthally rotated positions (top/bottom).
  • the number of straight scan lines may be increased azimuthally to provide a solid welding zone around the fiber circumference (b; right) (b).
  • the laser focus may be directed in circular or helical (c) path to following along a fiber-ferrule interface.
  • FIGs 10A to 10D schematically illustrates the plurality of fiber-in- channel welding units wherein the transparent fibers 10 were laser bonded within the matching open channels 102 as pre-formed in various transparent substrates 12 of planar (a), rectangular (b), and cylindrical disk (c) geometric shapes.
  • the arrangement of open channels 102 may be in a linear array (a), hexagonal (b), or zig-zag (c) pattern according to one or more embodiments of the example(s).
  • the inner diameter of the through-holes may be similarly matched with the fiber diameter 106 to provide a small welding gap favorable for creating strong weld seams.
  • the laser welding extends further to welding of a single mode or multi-core optical fiber 10 inside of a blind hole 108 as illustrated in (d).
  • the fiber facet is terminated with the core waveguides 110 matching the positions of optical waveguide circuits 112 positioned inside of the substrate 12 (d) according to one or more embodiments of the example(s).
  • FIG. 11A to 11B schematically illustrates an assembly of two (a) or more (b) transparent fibers 10 of different sizes, formed by laser bonding at the position of fiber-to-fiber contact according to one or more embodiments of the example(s).
  • Example 1 Fiber-to-Substrate welding
  • femtosecond laser welding of optical telecommunication fiber 210 (Corning SMF- 28) to a flat fused silica substrate 212 is presented.
  • a pseudo- continuous volume of melt was driven along the fiber-substrate contact line to form strong weld seams of up to 30 pm width.
  • FIG. 12 An optimized arrangement for welding of the telecommunication fiber 210 (Corning, NY, USA, SMF- 28) to a fused silica plate 212 (Corning 7980, Industrial Grade, softening point 1585 °C) substrate of 1 mm thickness is illustrated in Figure 12.
  • the fiber buffer was mechanically stripped, presenting a glass fiber 210 of 125 ⁇ 0.7 pm diameter in mechanical contact with the glass plate 212.
  • the laser beam 214 was focused with an aspheric lens 216 of x40 magnification (Newport 5722-A-H, 0.55 NA) to various positions above and below the fiber- substrate contact line 218 ( Figure 12) to tune the relative heating load dissipated in the fiber 210 and substrate 212.
  • Intensity profiles of the focused Gaussian laser beam were simulated by optical Fourier transformation and a local propagator to account for surface spherical aberration effects on the approximately 1 mm focusing depth in fused silica substrate 212.
  • a first level calibration of the size and position of the HAZ 220 anticipated for welding was obtained from laser tracks formed in bulk fused silica, removing the influence of the curved fiber-substrate interface. Laser tracks and welding seams were assessed under backlighting with an optical microscope (Olympus, BX51), and best conditions were translated to fiber welding. Cross-section views of fiber-substrate weld seams were recorded from samples cut with an automatic dicing saw (Disco, DAD3220). In optimizing of laser welding, laser exposure was narrowed to the 700 - 1100 nJ/pulse range, and applied at various focal depths to assess the welding strength and possible damage to FBGs 222 in the core waveguide. Fibers welded with 700 nJ pulse energy formed relatively stable weld seams up to 15 pm wide, however, the welds frequently broke under a diamond saw cutting.
  • Figure 13 present cross-sectional (bottom) and side (top) views in back-lighting microscopy of the fiber-to-substrate weld seams centered on 900 (top) and 1100 nJ (bottom) exposures.
  • the progression of cross-sectional views for both exposures in Figure 13 show morphology having general characteristics that are similar to the HAZ zones formed in bulk glass, presented on the inset images (right side) for each pulse energy.
  • the lateral boundary of the HAZ is narrowed by 5 to 10 pm in the vicinity of the fiber-substrate interface, limited by the size of the weld seam.
  • voids may affect the weld strength, depending on their size and location with respect to the welding interface.
  • the top-view micrographs of welding seams in Figure 13 capture the void patterns longitudinally, imaged from the interface plane.
  • Figures 14A and 14B presents a non-limiting example of dynamic sensing of fiber Bragg gratings (FBG) embedded within the core of the optical fiber.
  • FBG fiber Bragg gratings
  • Such FBGs were used to monitor the temperature of the fiber core during laser welding as well as any permanent degradation or damage to the core area of the fiber.
  • a first-order FBG was pre-formed by the laser described in example 1 , to create a filament array grating of 3 mm length.
  • Moderately strong and narrow Bragg reflection peaks of approximately 3 dB and approximately 0.7 nm, respectively, are shown in Figure 14(a) and 14(b) (solid lines) for peaks at 1561 and 1552 nm wavelengths, respectively.
  • FBG reflectance spectra were recorded at 2.5 Hz sampling frequency during a full welding scan of 4 s duration, using identical laser welding exposures of 0.2 NA focusing, 1.8 W power, and 5 mm/s scan speed.
  • a representative FBG spectrum recorded at the time when the welding laser beam was positioned near the center of the grating is plotted for each focusing depth (dotted lines) together with spectral recordings obtained long after the laser exposure (dashed line).
  • the FBG evaluation confirmed the degree of heating and potential for thermal damage arising in the FBG core waveguide with changing focal position.
  • Laser welding parameters were optimized for forming sufficiently strong weld seams at minimal focusing depth without causing overly large HAZ and stress fields inside of the fiber.
  • the strength of weld seams was evaluated with four-point bending testing of fiber-welded substrates (75x25x1 mm 3 ) carried out in compressive and tensile modes.
  • Four ceramic loading cylinders were positioned on 60 mm outer and 30 mm inner loading spans.
  • the thermo-optic strain response of the welded FBGs were evaluated in bending tests conducted with mass loads of up to 2.5 kg, while heating in an oven to 1000 °C (Dentsply Sirona, Vulcan 3 - 550).
  • the peak load force of 9000 mN corresponds to relatively high ⁇ 16 MPa stress for the heated fiber.
  • the slopes provide different strain-optic responses of 0.030 and 0.027 pm/mN as expected with an asymmetric fiber-substrate geometry.
  • a thermal model for laser welding of the optical fiber to the substrate was developed to follow the build-up of a large HAZ through the heat accumulation effect.
  • the model was tuned to follow the pseudo-continuous bath of melt with boundaries as exemplified by the dashed lines in Figure 13, marking the glass softening temperature at 1585 °C for fused silica.
  • the model targets matching a heat zone stretching laterally and vertically to 54 pm and - z approximately 100 pm, respectfully, for the 2 MHz, 5 mm/s, and 1300 nJ exposure case.
  • Such a heat zone builds over thousands of laser pulses, expanding incrementally on a thermal diffusion scale length of j Dt r o 1.3 pm during each pulse-to-pulse interval.
  • a steady-state temperature profile develops in the periphery surrounding the laser absorption, and one can then ignore the oscillating dynamics of large temperature swings arise only at the center of the HAZ.
  • uix.y.z. t) is the dissipated power density
  • / 0 the time-averaged peak of light intensity at position (y x t, 0,z o )
  • P 0 — is the average pulse power
  • v x is the scanning t velocity
  • t is the time lapse from the start of the exposure.
  • Figures 16A and 16B presents results of thermal simulations matched with optimal weld parameters for the case of fiber-substrate welding provided in Example 1.
  • Figure 16(a) A closer inspection of Figure 16(a) reveals a pinching of the temperature profile at the contact interface, with dipropionate higher heating levels arising in the fiber in contrast with the upper substrate due to the low heat sinking capacity of fiber in air.
  • This 16 pm HAZ corresponds to an approximately 3 ms dwell time for laser heating, and approaches the 25 pm size of weld seams in Figure 16(a). Comparing the temperature profiles at 100 and 200 ms ( Figure 16(b)), one sees fully developed temperature profile providing an approximately 20 pm long heat zone at the softening temperature of 1585 °C.
  • the longitudinal temperature profile ( Figure 16(b), dashed lines) is lower and broader at the fiber core, peaking only at 750 °C over a heat zone 85 pm thick at the 90% peak level.
  • This core temperature falls well below the typical value of approximately 1050 °C noted for FBG degradation. Hence, deeper focusing and higher laser exposures may thus be tolerated without causing thermal damage to the FBG during welding.
  • the voids forming deeper inside of the HAZ may be a second factor increasing light scattering loss for deeper focusing.
  • Figure 17 illustrates a nonlimiting example of the laser processing zones observed for welding of optical fiber to flat substrates as based on the Examples 1 to 4 above. Welding was restricted by two boundaries on temperature that enabled robust fusion connection at the interface without inducing damage into the nearby core waveguide of the fiber as verified by monitoring the embedded FBG spectral response.
  • the thermal modelling and welding observations ( Figure 13 and 16a/16b) have permitted a classification of different welding zones according to the steady-state peak temperature expected at the weld interface and the fiber core and their variation with focusing position (z 0 ) as summarized in Figure 17.
  • a further condition to minimize thermal degradation of the fiber grating was set at 1200 °C to mark an upper temperature exposure of 1200 °C for the core waveguide position, based on the FBG sensing results.
  • the fiber core temperature (squares in Figure 17) exceeds this level for focusing depths varying from approximately 40 to approximately 54 pm for pulse energy exposure increasing from 700 to 1100 nJ.
  • Laser welding of fiber inside of cylindrical channels or open ferrules presents the opportunity for creating stronger welded fiber packages as well as creating hermetic seals.
  • the present example introduces the laser welding of a fiber to the inner sleeve of a ferrule wherein an air gap of cylindrical shape had presented a more challenging welding requirement in the absence of mechanical contacting forces as compared with the direct fiber-to-plate welding case.
  • Figure 18 shows a schematic of a transparent fiber 310 inserted inside of the inner sleeve 311 of transparent and cylindrically shaped ferrule 313.
  • the ferrule 313 is further mounted onto a transparent planar substrate 312.
  • the air gap (not shown) between the outer cylindrical surface 314 of the ferrule 313 and of the upper surface 316 of the substrate 312 induces a strong astigmatism in the laser beam, shown arriving from below.
  • the astigmatism will result in beam distortion and formation of two focusing zones.
  • lateral movement of the beam will induce further refractive beam steering and focusing distortions that significantly inhibit a localized laser heating and a precise positioning of the laser focus that inhibits welding around the circumference of the fiber-ferrule interface.
  • refractive index matching oil 318 is illustrated in Figure 18 to fill the gap between the ferrule 313 and lower substrate 312.
  • exposure of a scanning focused laser beam (wide arrow from below) will provide an undistorted laser propagation to the focus that is shown in Figure 18 to be preferentially directed at the right side of the interface of the fiber 310 and ferrule 313.
  • the beam propagation follows a similar sequence of refraction at the first (lowest) ferrule-substrate interface, and focusing to the fiber-ferrule interface zone, providing a controlled laser interaction and HAZ zone as first presented for the fiber and substrate bonding example in Figure 1.
  • the undistorted laser focusing permits control over positioning of the HAZ (ellipse on front facet) to direct a weld seam in any direction longitudinally or circularly along the cylindrical-shaped interface for this case of fiber-to-ferrule welding.
  • Figure 18 illustrates two longitudinal weld seams 320 having formed on the left and right sides of the interface over long and short segments along the fiber.
  • Figures 19A to 19E presents a nonlimiting example of laser welding of optical fiber (SMF 28) to a fused silica ferrule having an open cylindrical channel of close matching inner diameter. Variable air gap distances arise around the circumference, reaching up to 3 pm that can distort the laser interaction volume and impede the flow of melt to create a wide weld seam. By applying the same techniques of laser welding optimization presented in Examples 1-5, strong weld seams have been formed longitudinally along the fiber ferrule interface. A photograph of the welded fiber-in-ferrule ( Figure 19a) indicates no macroscopic damage to either of the fiber or ferrule after welding.
  • the higher magnification side views of the fiber-ferrule interface show various combinations of axial laser welding tracks formed around the circumference of the fiber in low (e) or high (d) density of azimuthal spacing.
  • Wide welding seams are noted in (b) together with the formation of small voids when laser welding in a single laser track.
  • the onset of heat accumulation effects at the start of this single welding line is revealed by the widening of the welding seam as the laser was scanned from left to right in (c).
  • Figures 20A to 20F illustrates laser welding of SMF-28 fiber (125 pm diameter) to fused silica (a) substrates of 1 mm thickness in comparison with (b-d) ferrules with 450 pm outside diameter.
  • the microscope images were recorded in backlighting and show cross sectional (top row) and top (bottom row) views of weld seams.
  • the laser beam propagated from top to bottom.
  • the 50 pm scale bar applies to all figures.
  • the inset images (e) and (f) show the comparable cross-sectional views of the HAZ as generated in bulk glass with similar laser exposure and focusing depth (1 mm).
  • the top-interface ferrule welding in Figure 20(b) had generated a nearly identical HAZ area of 3700 pm 2 compared with the substrate welding (a) and bulk glass cases (e). However, a varying air gap as large as 3 pm at the fiber-ferrule interface resulted in an irreproducible weld seam with voids remaining at the interface that weakened the weld seam.
  • a more modest pulse energy of 900 nJ was applied to minimize damage as laser light passed directly through fiber core.
  • the size of HAZ was reduced from 1850 pm 2 to 1450 pm 2 when compared to the bulk glass processing case (f). Nevertheless, a strong and wide weld seam of 25 pm wide was formed.
  • Figures 21 A and 21 B illustrates the varying degree of degradation by radiative and thermal damage induced by laser welding at the bottom interface position for fiber-to- ferrule welding, following from the cases presented in Figures 20Ato 20F.
  • Ap-shifted FBG was first written into the core waveguide with a UV laser phase mask method to provide moderately strong and narrow reflection of approximately 3 dB peak and approximately 0.3 nm (p-shift) width as shown in Figure 21 before welding (light lines).
  • the welding technique can be applied to an optical component having a spherical, cylindrical, curved, or otherwise non-planar surface, such as an optical fiber, a ferrule, a capillary, etc.
  • an optical component having a spherical, cylindrical, curved, or otherwise non-planar surface such as an optical fiber, a ferrule, a capillary, etc.

Abstract

Le dispositif optique peut avoir un élément de support et un composant optique ayant une surface allongée, la surface allongée ayant une section transversale curviligne définie transversalement à une longueur de la surface allongée, la surface allongée étant liée à l'élément de support par une couture s'étendant le long de la longueur, la couture présentant une zone de section transversale définie transversalement à la longueur, la zone de section transversale de la couture comprenant une partie d'un matériau du composant optique fusionné avec une partie d'un matériau de l'élément de support.
PCT/CA2022/050307 2021-03-05 2022-03-03 Procédé de soudage de composants optiques et dispositif optique associé WO2022183295A1 (fr)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060140537A1 (en) * 2004-12-28 2006-06-29 Precise Gauges Co,. Ltd. Optical device and fabrication method and apparatus for the same
US20140126235A1 (en) * 2011-08-08 2014-05-08 Quarkstar Llc Lightguide Luminaire Module for Direct and Indirect Illumination
US20160178135A1 (en) * 2014-12-05 2016-06-23 Jiaxing Super Lighting Electric Appliance Co., Ltd Led tube lamp
WO2019079271A1 (fr) * 2017-10-20 2019-04-25 Corning Optical Communications LLC Cartes de circuits imprimés optiques-électriques avec réseaux de guides d'ondes optiques intégrés et ensembles photoniques les utilisant

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060140537A1 (en) * 2004-12-28 2006-06-29 Precise Gauges Co,. Ltd. Optical device and fabrication method and apparatus for the same
US20140126235A1 (en) * 2011-08-08 2014-05-08 Quarkstar Llc Lightguide Luminaire Module for Direct and Indirect Illumination
US20160178135A1 (en) * 2014-12-05 2016-06-23 Jiaxing Super Lighting Electric Appliance Co., Ltd Led tube lamp
WO2019079271A1 (fr) * 2017-10-20 2019-04-25 Corning Optical Communications LLC Cartes de circuits imprimés optiques-électriques avec réseaux de guides d'ondes optiques intégrés et ensembles photoniques les utilisant

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