WO2022179052A1 - 生产设备的控制方法、装置、系统、设备及介质 - Google Patents

生产设备的控制方法、装置、系统、设备及介质 Download PDF

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Publication number
WO2022179052A1
WO2022179052A1 PCT/CN2021/111464 CN2021111464W WO2022179052A1 WO 2022179052 A1 WO2022179052 A1 WO 2022179052A1 CN 2021111464 W CN2021111464 W CN 2021111464W WO 2022179052 A1 WO2022179052 A1 WO 2022179052A1
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Prior art keywords
process recipe
data
production equipment
control
upload
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PCT/CN2021/111464
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English (en)
French (fr)
Inventor
黎焕诚
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长鑫存储技术有限公司
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Priority to US17/569,455 priority Critical patent/US20220269244A1/en
Publication of WO2022179052A1 publication Critical patent/WO2022179052A1/zh

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/32Operator till task planning
    • G05B2219/32252Scheduling production, machining, job shop
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the present application relates to the technical field of automatic control, and in particular, to a control method, device, system, device and medium for production equipment.
  • batch control is generally performed on multiple semiconductor production equipment (Equipment) through the equipment automation control program (Equipment Automation Program, EAP), and the EAP is obtained through the tool control system (Tool Control System, TCS)
  • the recipe upload request (Recipe Upload Request) from the process recipe management system (Recipe Management System, RMS), in order to send recipe upload requests to multiple semiconductor production equipments that communicate with it in turn, so that the semiconductor production equipment uploads the process recipe data to the EAP .
  • RMS Process recipe management system
  • the EAP generally needs to obtain the process recipe data of all the semiconductor production equipments that it communicates with, it can feed back the execution result of the recipe upload request to the RMS.
  • a first aspect of the present application provides a method for controlling production equipment, the method comprising:
  • a second control instruction is generated to control the production equipment to upload the second process recipe data
  • the second process recipe data is received, and the second process recipe data is parsed to generate a second process recipe file in a corresponding preset format.
  • a second aspect of the present application provides a method for controlling production equipment, the method comprising:
  • a third aspect of the present application provides a method for controlling production equipment, the method comprising:
  • a fourth aspect of the present application provides a control device for production equipment, the device includes an instruction receiving unit, a control unit, a data receiving unit and a data parsing unit, the instruction receiving unit is used for receiving a process recipe upload instruction; the control The unit is connected to the instruction receiving unit, and is used to generate a first control instruction and a second control instruction in response to the received process recipe upload instruction, and the first control instruction is used to control the production equipment to upload the first process recipe data.
  • the second control instruction is used to control the production equipment to upload the second process recipe data
  • the data receiving unit is connected to the control unit for receiving the first process recipe data and the second process recipe data
  • the data parsing unit is connected to the data receiving unit, and is used for parsing the received first process recipe data to generate a corresponding preset format first process recipe file, and for parsing the received second process recipe data.
  • Process recipe data to generate a second process recipe file in a corresponding preset format.
  • a fifth aspect of the present application provides a control system for production equipment, including an equipment automation control program, a production equipment control system, and a process recipe management system, and the equipment automation control program is used to implement any one of the embodiments in this application.
  • a sixth aspect of the present application provides a computer device, including a memory and a processor, the memory stores a computer program that can run on the processor, and when the processor executes the program, any The steps of the method described in an embodiment.
  • a seventh aspect of the present application provides a computer-readable storage medium on which a computer program is stored, and when the computer program is executed by a processor, implements the steps of the method described in any one of the embodiments of the present application.
  • FIG. 1 is a schematic diagram of an application scenario of a control method for a production equipment provided by the application;
  • FIG. 2 is a schematic diagram of the application flow of the control method of the production equipment provided in an embodiment of the application;
  • FIG. 3 is a schematic flowchart of a control method of a production equipment applied to an equipment automation control program provided in an embodiment of the application;
  • FIG. 4 is a schematic flowchart of a control method of a production equipment applied to an equipment automation control program provided in another embodiment of the application;
  • FIG. 5 is a schematic flowchart of a control method of a production equipment applied to an equipment automation control program provided in another embodiment of the application;
  • FIG. 6 is a schematic flowchart of a control method of a production equipment applied to a production equipment control system provided in an embodiment of the application;
  • FIG. 7 is a schematic flowchart of a control method of a production equipment applied to a production equipment control system provided in another embodiment of the application;
  • FIG. 8 is a schematic diagram of an application flow of a control method for a production equipment provided in another embodiment of the present application.
  • FIG. 9 is a structural block diagram of a control device of a production equipment provided in an embodiment of the application.
  • FIG. 10 is a structural block diagram of a control system of a production equipment provided in an embodiment of the application.
  • FIG. 11 is a schematic structural diagram of a computer device provided in an embodiment of the application.
  • the terms “installed”, “connected” and “connected” should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrally connected; it can be a direct connection, an indirect connection through an intermediate medium, or an internal communication between two components.
  • installed should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrally connected; it can be a direct connection, an indirect connection through an intermediate medium, or an internal communication between two components.
  • a semiconductor automatic production equipment control system As an example, a plurality of automated semiconductor production equipments 400 sequentially upload the process recipe data to the EAP according to the received recipe upload request (Recipe Upload Request) from the semiconductor production equipment automation control program (Equipment Automation Program, EAP) 300 ;
  • a process recipe upload request can be set to include the number of process recipe data to be uploaded, so that the EAP can obtain the process recipe data uploaded by multiple semiconductor production equipment in turn by sending a process recipe upload request.
  • the Tool Control System (TCS) 200 communicates with the recipe management system (Recipe Management System, RMS) 100, and the EAP 300 can obtain the upload request of the recipe from the RMS 100 via the TCS 200.
  • the EAP analyzes the process recipe data.
  • the semiconductor production equipment controlled by the EAP will parse the process recipe data in turn.
  • it may take a long time to analyze the recipe data, resulting in idle semiconductor production equipment and wasting the production capacity of the semiconductor production equipment. Therefore, in order to reduce the idle time of equipment due to the sequential execution of control instructions by multiple equipment during the batch control of equipment, and improve the production efficiency of automated production lines, the present application provides the technical solutions described in the following embodiments.
  • a method for controlling production equipment is provided, which can be applied to the equipment automation control program 300 as shown in FIG. 2.
  • the method includes the following steps:
  • Step 32 Receive a process recipe upload instruction, and generate a first control instruction in response to the process recipe upload instruction, so as to control the production equipment to upload the first process recipe data;
  • Step 34 Receive the first process recipe data, and parse the first process recipe data to generate a corresponding preset format first process recipe file;
  • Step 36 during the analysis of the first process recipe data, generate the second control command to control the production equipment to upload the second process recipe data;
  • Step 38 Receive the second process recipe data, and parse the second process recipe data to generate a corresponding second process recipe file in a preset format.
  • the device automation control program 300 can be set to receive a process recipe upload instruction, and generate a first control command according to the process recipe upload instruction to control the production equipment 400 to upload the first process recipe data. 1, making the equipment automation control program 300 parse the received first process recipe data 1, and generate a first process recipe file in a corresponding preset format; and set the equipment automation control program 300 to perform the first process recipe data on the equipment automation control program 300.
  • a second control instruction is generated to control the production equipment 400 to upload the second process recipe data 2, so that the equipment automation control program 300 parses the received second process recipe data 2 in parallel, and generates a second corresponding preset format.
  • Process recipe file to reduce the delay caused by the equipment automation control program 300 in the process of parsing the first process recipe data 1; during the process of parsing the second process recipe data 2 by the equipment automation control program 300, regenerate the first control Instructions to repeat the preceding steps until all the production equipment 400 that communicates and interconnects with the equipment automation control program 300 have uploaded the corresponding process recipe data, for example, if the total number of production equipment 400 that communicates and interconnects with the equipment automation control program 300 is N.
  • the equipment automation control program 300 acquires N pieces of process recipe data, it stops generating a control instruction for controlling the production equipment 400 to upload the process recipe data.
  • the traditional equipment automation control program 300 after completing the analysis of the first process recipe data, it starts to analyze the second process recipe data.
  • the present application analyzes the second process recipe data in parallel.
  • Data analysis shortens the time for analyzing the process recipe data, thereby effectively reducing the idle time of the equipment due to the sequential execution of control instructions by multiple equipment in the process of batch control of equipment, and improving the production capacity of production equipment and the production efficiency of automated production lines .
  • a method for controlling production equipment is provided, which can be applied to the equipment automation control program 300 shown in FIG. , to generate the first process recipe file in the corresponding preset format, including the following steps:
  • Step 342 Invoke a first thread to parse the first process recipe data and generate a corresponding preset format first process recipe file.
  • the data of the second process formula is analyzed in parallel to shorten the time for analyzing the data of the process formula.
  • a method for controlling production equipment is provided, which can be applied to the equipment automation control program 300 shown in FIG. , so as to generate the second process recipe file in the corresponding preset format, including the following steps:
  • Step 382 Invoke a second thread to parse the second process recipe data and generate a corresponding second process recipe file in a preset format.
  • the data of the second process formula is analyzed in parallel to shorten the time for analyzing the data of the process formula.
  • a method for controlling production equipment is provided, which can be applied to the equipment automation control program 300 shown in FIG. 2 , the method also Include the following steps:
  • Step 391 Obtain the quantity of the received process recipe data, where the process recipe data includes the first process recipe data and the second process recipe data, and the process recipe upload instruction includes the preset total number of process recipe data ;
  • Step 392 if the number of the process recipe data reaches the preset total number, then determine whether the number of the generated process recipe files is equal to the preset total number, and the process recipe file includes the first process recipe. documents and the second process formula document;
  • the preset total number of process recipe data included in the process recipe upload instruction it is judged whether the sum of the received first process recipe data and the second process recipe data reaches the required number.
  • the preset total number is used to judge whether the equipment automation control program 300 has received the process recipe data uploaded by all the production equipments 400 that communicate with it; After the recipe data, it is judged whether the sum of the generated first process recipe files and the second process recipe files reaches the preset total number, and if so, it means that the equipment automation control program 300 has completed the analysis of the received process recipe data,
  • the equipment automation control program 300 generates process recipe result data to feed back the process recipe upload instruction execution result information to a higher-level control device such as the production equipment control system 200 according to the process recipe result data.
  • a method for controlling production equipment is provided, which can be applied to the equipment automation control program 300 shown in FIG. 2 , and the method also Include the following steps:
  • Step 394 if the number of the generated process recipe files is different from the preset total number, then obtain the name of the process recipe data of the process recipe file in which the corresponding preset format is not parsed and the reason for the abnormal analysis;
  • Step 395 Generate an exception signal according to the name and the cause of the parsing exception.
  • the equipment automation control program is parsing If an abnormality occurs in the process of the process recipe data, the name of the process recipe data of the process recipe file whose corresponding preset format is not parsed and the reason for the abnormal analysis are obtained, and an abnormal signal is generated according to the name and the reason for the abnormal analysis.
  • the equipment automation control program 300 feeds back to a higher-level control device such as the production equipment control system 200 according to the abnormal signal, and fails to parse out the name of the process recipe data in the corresponding preset format process recipe file and the reason for the abnormality.
  • the production equipment is a semiconductor production equipment
  • the process recipe data is semiconductor process recipe data.
  • This embodiment effectively reduces the idle time of the semiconductor production equipment due to sequentially executing control instructions during the batch control of the semiconductor production equipment, and improves the productivity of the semiconductor production equipment and the production efficiency of the semiconductor automated production line.
  • a method for controlling production equipment is provided, which can be applied to the production equipment control system 200 shown in FIG. 2 , the method includes: The following steps:
  • Step 42 Receive a process recipe upload trigger instruction sent by the process recipe management system, and generate a process recipe upload instruction in response to the process recipe upload trigger instruction, and the process recipe upload instruction is used to make the equipment automation control program receive the production equipment.
  • process recipe data and parse the process recipe data in parallel to generate process recipe result data, the process recipe data includes first process recipe data and second process recipe data;
  • Step 44 receiving the process recipe result data sent by the equipment automation control program
  • Step 46 generating a process recipe result file package according to the process recipe result data
  • Step 48 Send the process recipe result file package to the process recipe management system.
  • a process recipe upload instruction can be generated, and the process recipe upload instruction is used to automate the equipment.
  • the control program 300 receives the process recipe data uploaded by the production equipment 400, and parses the first process recipe data and the second process recipe data in parallel to generate process recipe result data, avoiding the process of parsing the first process recipe data by the equipment automation control program 300.
  • the delay caused by the production equipment control system 200 is set to receive the process recipe result data sent by the equipment automation control program 300, generate a process recipe result file package according to the process recipe result data, and use the process recipe
  • the result file package is sent to the process recipe management system 100 to realize the automatic control of the production equipment control system 200 , the equipment automation control program 300 and each production equipment 400 in sequence through the process recipe management system 100 . Since this embodiment shortens the time for analyzing the process recipe data, it effectively reduces the idle time of the equipment due to the sequential execution of control instructions by multiple devices in the process of batch control of the equipment, and improves the production capacity of the production equipment and the production of the automated production line. efficiency.
  • a method for controlling production equipment is provided, which can be applied to the production equipment control system 200 shown in FIG. 2 , and the method also Include the following steps:
  • Step 471 receiving an abnormal signal, and generating an abnormal feedback signal according to the abnormal signal;
  • Step 472 sending the abnormal feedback signal to the process recipe management system.
  • the production equipment control system 200 by setting the production equipment control system 200 to receive an abnormal signal, generate an abnormal feedback signal according to the abnormal signal, and send the abnormal feedback signal to the process recipe management system 100, which is convenient for users
  • the process recipe management system 100 acquires the name of the process recipe data for which the corresponding preset format is not parsed and the reason for the abnormal analysis, which effectively improves the efficiency and intelligence of automatic control.
  • the process recipe management system is a semiconductor process recipe management system
  • the equipment automation control program is an automation control program of a semiconductor production equipment
  • the production equipment is a semiconductor production equipment.
  • a method for controlling production equipment is provided, which can be applied to the process recipe management system 100 as shown in FIG. 8 , and the method includes the following steps:
  • Step 12 sending a process recipe upload trigger instruction, so that the production equipment control system 200 receives the process recipe upload trigger instruction, and generates a process recipe upload instruction according to the process recipe upload trigger instruction, and the process recipe upload instruction is used to make the equipment automatically control
  • the program 300 realizes the control method of the production equipment applied to the equipment automation control program described in any embodiment of the present application;
  • Step 14 Receive a process recipe result file package.
  • the process recipe management system 100 by setting the process recipe management system 100 to send a process recipe upload trigger instruction, so that the production equipment control system 200 receives the process recipe upload trigger instruction, and generates a process recipe upload instruction according to the process recipe upload trigger instruction.
  • the equipment automation control program 300 analyzes the second process recipe data in parallel during the process of analyzing the first process recipe data, shortening the time for analyzing the process recipe data, thereby effectively reducing the number of factors in the process of equipment batch control.
  • the process recipe management system 100 is set to receive the process recipe result file package, which is convenient for the user to obtain the process recipe result file package through the process recipe management system 100, which effectively improves the efficiency and intelligence of automatic control. sex.
  • a method for controlling production equipment is provided, which can be applied to the process recipe management system 100 shown in FIG. 8 , the method further includes the following step:
  • Step 16 Receive an abnormal feedback signal, and acquire, according to the abnormal feedback signal, the name of the process recipe data for which the corresponding preset format of the process recipe file is not parsed, and the reason for the abnormal analysis.
  • the process recipe management system 100 is configured to receive an abnormal feedback signal, and according to the abnormal feedback signal, the name of the process recipe data of the process recipe file of the corresponding preset format that has not been parsed and the parsing abnormality are obtained.
  • the reason is that it is convenient for the user to directly obtain the name of the process recipe data and the reason for the abnormal parsing of the process recipe file without parsing the corresponding preset format through the process recipe management system 100, which effectively improves the efficiency and intelligence of automatic control.
  • the process recipe management system is a semiconductor process recipe management system
  • the production equipment control system is a semiconductor production equipment control system
  • the equipment automation control program is semiconductor production equipment automation A control program
  • the production equipment is a semiconductor production equipment.
  • a control device 1000 for production equipment includes an instruction receiving unit 1001 , a control unit 1002 , a data receiving unit 1003 and a data receiving unit 1000 .
  • the parsing unit 1004, the instruction receiving unit 1001 is used for receiving the process recipe uploading instruction; the control unit 1002 is connected with the instruction receiving unit 1001, and is used for responding to the received said process recipe uploading instruction and generating the first control instruction and the second control instruction,
  • the first control instruction is used to control the production equipment to upload the first process recipe data
  • the second control instruction is used to control the production equipment to upload the second process recipe data;
  • the data receiving unit 1003 is connected to the control unit 1002 for receiving all the data.
  • the data parsing unit 1004 is connected to the data receiving unit 1003 for parsing the received first process recipe data to generate a corresponding preset format of the first process A recipe file, and used for parsing the received second process recipe data to generate a corresponding second process recipe file in a preset format. Since the data analysis unit 1004 analyzes the data of the second process recipe in parallel during the process of analyzing the data of the first process recipe, the time for analyzing the data of the process recipe is shortened, thereby effectively reducing the need for multiple devices in the process of batch control of equipment. The time during which the sequential execution of control commands causes the device to be idle.
  • control device of the production equipment For the specific definition of the control device of the production equipment, reference may be made to the above definition of the control method of the production equipment, which will not be repeated here.
  • each module in the control device of the above-mentioned production equipment can be implemented by software, hardware and combinations thereof.
  • the above modules can be embedded in or independent of the processor in the computer device in the form of hardware, or stored in the memory in the computer device in the form of software, so that the processor can call and execute the operations corresponding to the above modules.
  • a control system 2000 for production equipment including an equipment automation control program 300 , a production equipment control system 200 and a process recipe management system 100 .
  • the program 300 is used to realize the control method of the production equipment described in any embodiment of this application and applied to the equipment automation control program; the production equipment control system 200 is applied with the application described in any embodiment of this application.
  • the control method of the production equipment of the production equipment control system 200; the process recipe management system 100 is applied with the control method of the production equipment applied to the process recipe management system 100 described in any embodiment of the present application.
  • the equipment automation control program 300 Since the equipment automation control program 300 generates a second control instruction during the analysis of the first process recipe data to control the production equipment 400 to upload the second process recipe data, the equipment automation control program 300 parses the received first process recipe data in parallel. 2. Process recipe data, and generate a corresponding second process recipe file in a preset format, so as to avoid the delay caused by the equipment automation control program 300 in the process of parsing the first process recipe data. Compared with the traditional equipment automation control program 300, after completing the analysis of the first process recipe data, it starts to analyze the second process recipe data. In the process of analyzing the first process recipe data, the present application analyzes the second process recipe data in parallel.
  • Data analysis shortens the time for analyzing the process recipe data, thereby effectively reducing the idle time of the equipment due to the sequential execution of control instructions by multiple equipment in the process of batch control of the equipment, and improving the production capacity of the production equipment 400 and the production of automated production lines. efficiency.
  • a computer device including a memory and a processor, the memory stores a computer program that can run on the processor, the When the processor executes the program, the steps of the method described in any embodiment of the present application are implemented.
  • a computer-readable storage medium is provided, and a computer program is stored thereon, and when the computer program is executed by a processor, the computer program described in any one of the embodiments of the present application is implemented. steps of the method.
  • the second technological recipe data is parsed in parallel, which shortens the process of parsing the technological recipe data. This effectively reduces the idle time of the equipment due to the sequential execution of control instructions by multiple equipment in the process of batch control of the equipment, and improves the production capacity of the production equipment and the production efficiency of the automated production line.
  • Nonvolatile memory may include read only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory.
  • Volatile memory may include random access memory (RAM) or external cache memory.
  • RAM is available in various forms such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous chain Road (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.
  • SRAM static RAM
  • DRAM dynamic RAM
  • SDRAM synchronous DRAM
  • DDRSDRAM double data rate SDRAM
  • ESDRAM enhanced SDRAM
  • SLDRAM synchronous chain Road (Synchlink) DRAM
  • SLDRAM synchronous chain Road (Synchlink) DRAM
  • Rambus direct RAM
  • DRAM direct memory bus dynamic RAM
  • RDRAM memory bus dynamic RAM

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Abstract

一种生产设备(400)的控制方法、装置(1000)、系统(2000)、设备及介质,方法包括:接收工艺配方上传指令,响应于工艺配方上传指令并生成第一控制指令,以控制生产设备(400)上传第一工艺配方数据(32);接收第一工艺配方数据,并对第一工艺配方数据进行解析,以生成对应的预设格式的第一工艺配方文件(34);在对第一工艺配方数据进行解析期间,生成第二控制指令,以控制生产设备(400)上传第二工艺配方数据(36);接收第二工艺配方数据,并对第二工艺配方数据进行解析,以生成对应的预设格式的第二工艺配方文件(38)。

Description

生产设备的控制方法、装置、系统、设备及介质
相关申请的交叉引用
本申请要求于2021年2月23日提交中国专利局、申请号为2021102009227、发明名称为“生产设备的控制方法、装置、系统、设备及介质”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。
技术领域
本申请涉及自动控制技术领域,具体涉及一种生产设备的控制方法、装置、系统、设备及介质。
技术背景
随着设备生产技术的快速发展及其自动化水平的不断提高,生产车间的各控制设备之间及控制设备与被控设备之间,一般通过程序指令来实现对设备自动化运作的智能控制。
在半导体自动化生产控制系统中,一般经由设备自动化控制程序(Equipment Automation Program,EAP)来对多台半导体生产设备(Equipment)进行批量化控制,EAP经由机台控制系统(Tool Control System,TCS)获取来自制程工艺配方管理系统(Recipe Management System,RMS)的配方上载请求(Recipe Upload Request),以向与其通信互联的多台半导体生产设备依次发送配方上载请求,使得半导体生产设备向EAP上传工艺配方数据。由于EAP一般需要在获取到所有与其通信互联的半导体生产设备的工艺配方数据之后,才能够向RMS反馈配方上载请求执行结果,导致批量化控制的半导体生产设备的数量越多,执行配方上载请求花费的时间越长。然而,配方数据未检核完成,不能开始生产,造成半导体生产设备闲置,浪费半导体生产设备产能。
因此,如何减少对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间,成为进一步提高自动化生产线的生产效率的过程中亟待解决的技术问题之一。
发明内容
根据本申请的各种实施例,提供一种生产设备的控制方法、装置、系统、设备及介质。
本申请的第一方面提供一种生产设备的控制方法,所述方法包括:
接收工艺配方上传指令,响应于所述工艺配方上传指令并生成第一控制指令,以控制生产设备上传第一工艺配方数据;
接收所述第一工艺配方数据,并对所述第一工艺配方数据进行解析,以生成对应的预设格式的第一工艺配方文件;
在对所述第一工艺配方数据进行解析期间,生成第二控制指令,以控制生产设备上传第二工艺配方数据;
接收所述第二工艺配方数据,并对所述第二工艺配方数据进行解析,以生成对应的预设格式的第二工艺配方文件。
本申请的第二方面提供一种生产设备的控制方法,所述方法包括:
接收工艺配方管理系统发送的工艺配方上传触发指令,响应于所述工艺配方上传触发指令并生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序接收生产设备上传的工艺配方数据,并并行解析所述工艺配方数据,以生成工艺配方结果数据,所述工艺配方数据包括第一工艺配方数据和第二工艺配方数据;
接收所述设备自动化控制程序发送的所述工艺配方结果数据;
根据所述工艺配方结果数据生成工艺配方结果文件包;
将所述工艺配方结果文件包发送至所述工艺配方管理系统。
本申请的第三方面提供一种生产设备的控制方法,所述方法包括:
发送工艺配方上传触发指令,使得生产设备控制系统接收工艺配方上传触发指令,并根据所述工艺配方上传触发指令生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序实现,本申请中任一实施例中所述的应用于设备自动化控制程序的生产设备的控制方法;
接收工艺配方结果文件包。
本申请的第四方面提供一种生产设备的控制装置,所述装置包括指令接收单元、控制单元、数据接收单元及数据解析单元,所述指令接收单元用于接收工艺配方上传指令;所述控制单元与所述指令接收单元连接,用于响应于接收的所述工艺配方上传指令并生成第 一控制指令和第二控制指令,所述第一控制指令用于控制生产设备上传第一工艺配方数据,所述第二控制指令用于控制生产设备上传第二工艺配方数据;所述数据接收单元与所述控制单元连接,用于接收所述第一工艺配方数据和所述第二工艺配方数据;所述数据解析单元与所述数据接收单元连接,用于解析接收的所述第一工艺配方数据,以生成对应的预设格式的第一工艺配方文件,及用于解析接收的所述第二工艺配方数据,以生成对应的预设格式的第二工艺配方文件。
本申请的第五方面提供一种生产设备的控制系统,包括设备自动化控制程序、生产设备控制系统及工艺配方管理系统,所述设备自动化控制程序用于实现本申请中任一实施例中所述的应用于设备自动化控制程序的生产设备的控制方法;所述生产设备控制系统上应用有本申请中任一实施例中所述的应用于生产设备控制系统的生产设备的控制方法;所述工艺配方管理系统上应用有本申请中任一实施例中所述的应用于工艺配方管理系统的生产设备的控制方法。
本申请的第六方面提供一种计算机设备,包括存储器和处理器,所述存储器上存储有可在所述处理器上运行的计算机程序,所述处理器执行所述程序时实现本申请中任一实施例中所述的方法的步骤。
本申请的第七方面提供一种计算机可读存储介质,其上存储有计算机程序,所述计算机程序被处理器执行时实现本申请中任一个实施例中所述的方法的步骤。
附图说明
为了更清楚地说明本申请实施例的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他实施例的附图。
图1为本申请提供的一种生产设备的控制方法的应用场景示意图;
图2为本申请一实施例中提供的生产设备的控制方法的应用流程示意图;
图3为本申请一实施例中提供的应用于设备自动化控制程序的生产设备的控制方法的流程示意图;
图4为本申请另一实施例中提供的应用于设备自动化控制程序的生产设备的控制方法的流程示意图;
图5为本申请又一实施例中提供的应用于设备自动化控制程序的生产设备的控制方法的流程示意图;
图6为本申请一实施例中提供的应用于生产设备控制系统的生产设备的控制方法的流程示意图;
图7为本申请另一实施例中提供的应用于生产设备控制系统的生产设备的控制方法的流程示意图;
图8为本申请另一实施例中提供的生产设备的控制方法的应用流程示意图;
图9为本申请一实施例中提供的生产设备的控制装置的结构框图;
图10为本申请一实施例中提供的生产设备的控制系统的结构框图;
图11为本申请一实施例中提供的计算机设备的结构示意图。
具体实施方式
为了便于理解本申请,下面将参照相关附图对本申请进行更全面的描述。附图中给出了本申请的较佳的实施例。但是,本申请可以以许多不同的形式来实现,并不限于本文所描述的实施例。相反地,提供这些实施例的目的是使对本申请的公开内容的理解更加透彻全面。
除非另有定义,本文所使用的所有的技术和科学术语与属于本申请的技术领域的技术人员通常理解的含义相同。本文中在本申请的说明书中所使用的术语只是为了描述具体的实施例的目的,不是旨在于限制本申请。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。
在使用本文中描述的“包括”、“具有”、和“包含”的情况下,除非使用了明确的限定用语,例如“仅”、“由……组成”等,否则还可以添加另一部件。除非相反地提及,否则单数形式的术语可以包括复数形式,并不能理解为其数量为一个。
应当理解,尽管本文可以使用术语“第一”、“第二”等来描述各种元件,但是这些元件不应受这些术语的限制。这些术语仅用于将一个元件和另一个元件区分开。例如,在不 脱离本申请的范围的情况下,第一元件可以被称为第二元件,并且类似地,第二元件可以被称为第一元件。
在本申请的描述中,需要说明的是,除非另有明确规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是直接连接,亦可以是通过中间媒介间接连接,可以是两个部件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本申请中的具体含义。
请参考图1,以半导体自动化生产设备控制系统为例来示例性说明本申请的具体实现原理。在半导体自动化生产线中,多台自动化半导体生产设备400根据接收的来自半导体生产设备自动化控制程式(Equipment Automation Program,EAP)300的工艺配方上载请求(Recipe Upload Request),依次向EAP上传制程工艺配方数据;可以设置一个工艺配方上载请求中包含要求上传的工艺配方数据的数量,使得EAP通过发送一个工艺配方上载请求可以获取到多台半导体生产设备依次上传的工艺配方数据,其中,EAP 300可以经由机台控制系统(Tool Control System,TCS)200与制程工艺配方管理系统(Recipe Management System,RMS)100通信互联,EAP 300可以经由TCS 200获取来自RMS 100的工艺配方上载请求。EAP在接收到半导体生产设备上传的工艺配方数据之后,对该工艺配方数据进行解析,很明显地,如果设置EAP依次对各半导体生产设备上传的工艺配方数据进行解析,在该EAP控制的半导体生产设备的数量较多的情况下,容易导致解析配方数据花费的时间较长,造成半导体生产设备闲置,浪费半导体生产设备的产能。因此,为了减少对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间,提高自动化生产线的生产效率,本申请提供如下实施例中所述的技术方案。
请参考图2和图3,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的设备自动化控制程序300中,所述方法包括以下步骤:
步骤32,接收工艺配方上传指令,响应于所述工艺配方上传指令并生成第一控制指令,以控制生产设备上传第一工艺配方数据;
步骤34,接收所述第一工艺配方数据,并对所述第一工艺配方数据进行解析,以生成对应的预设格式的第一工艺配方文件;
步骤36,在对所述第一工艺配方数据进行解析期间,生成第二控制指令,以控制生 产设备上传第二工艺配方数据;
步骤38,接收所述第二工艺配方数据,并对所述第二工艺配方数据进行解析,以生成对应的预设格式的第二工艺配方文件。
具体地,请继续参考图2和图3,可以通过设置设备自动化控制程序300接收工艺配方上传指令,根据所述工艺配方上传指令生成第一控制指令,以控制生产设备400上传第一工艺配方数据1,使得设备自动化控制程序300解析接收的所述第一工艺配方数据1,生成对应的预设格式的第一工艺配方文件;并设置设备自动化控制程序300在对所述第一工艺配方数据进行解析期间,生成第二控制指令,以控制生产设备400上传第二工艺配方数据2,使得设备自动化控制程序300并行解析接收的所述第二工艺配方数据2,生成对应的预设格式的第二工艺配方文件,减少设备自动化控制程序300在解析第一工艺配方数据1的过程中导致的延时;在设备自动化控制程序300对所述第二工艺配方数据2进行解析期间,重新生成第一控制指令,以重复前述步骤,直至所有与设备自动化控制程序300通信互联的生产设备400均向其上传了对应的工艺配方数据,例如,若与设备自动化控制程序300通信互联的生产设备400的总数为N,当设备自动化控制程序300获取到N个工艺配方数据之后,其停止生成用于控制生产设备400上传工艺配方数据的控制指令。相对于传统的设备自动化控制程序300在完成对第一工艺配方数据解析后,再开始对第二工艺配方数据解析,本申请在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短了对工艺配方数据解析的时间,从而有效地减少了对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间,提高了生产设备的产能及自动化生产线的生产效率。
作为示例,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的设备自动化控制程序300中,所述对所述第一工艺配方数据进行解析,以生成对应的预设格式的第一工艺配方文件,包括以下步骤:
步骤342,调用第一线程对所述第一工艺配方数据进行解析并生成对应的预设格式的第一工艺配方文件。
具体地,通过调用第一线程对所述第一工艺配方数据进行解析并生成对应的预设格式的第一工艺配方文件,以实现对第一工艺配方数据的独立解析,便于设置设备自动化控制 程序在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短对工艺配方数据解析的时间。
作为示例,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的设备自动化控制程序300中,所述对所述第二工艺配方数据进行解析,以生成对应的预设格式的第二工艺配方文件,包括以下步骤:
步骤382,调用第二线程对所述第二工艺配方数据进行解析并生成对应的预设格式的第二工艺配方文件。
具体地,通过调用第二线程对所述第二工艺配方数据进行解析并生成对应的预设格式的第二工艺配方文件,以实现对第二工艺配方数据的独立解析,便于设置设备自动化控制程序在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短对工艺配方数据解析的时间。
进一步地,请参考图2和图4,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的设备自动化控制程序300中,所述方法还包括以下步骤:
步骤391,获取接收的所述工艺配方数据的数量,所述工艺配方数据包括所述第一工艺配方数据及所述第二工艺配方数据,所述工艺配方上传指令包含工艺配方数据的预设总数;
步骤392,若所述工艺配方数据的数量达到所述预设总数,则判断生成的所述工艺配方文件的数量是否与所述预设总数相等,所述工艺配方文件包括所述第一工艺配方文件及所述第二工艺配方文件;
步骤393,若是,则生成工艺配方结果数据。
具体地,请继续参考图2和图4,通过设置所述工艺配方上传指令包含工艺配方数据的预设总数,判断接收的第一工艺配方数据及第二工艺配方数据的数量之和是否达到所述预设总数,以判断设备自动化控制程序300是否接收到所有与之通信互联的生产设备400上传的工艺配方数据;在设备自动化控制程序300接收到所有与之通信互联的生产设备400上传的工艺配方数据之后,判断生成的第一工艺配方文件及第二工艺配方文件的数量之和是否达到所述预设总数,若是,说明设备自动化控制程序300完成了对接收的各工艺配方数据的解析,设备自动化控制程序300生成工艺配方结果数据,以根据工艺配方结果 数据向上一级控制装置例如是生产设备控制系统200反馈工艺配方上传指令执行结果信息。
进一步地,请参考图2和图5,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的设备自动化控制程序300中,所述方法还包括以下步骤:
步骤394,若生成的所述工艺配方文件的数量与所述预设总数不同,则获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因;
步骤395,根据所述名称及所述解析异常的原因生成异常信号。
具体地,请继续参考图2和图5,如果检测到生成的工艺配方文件的数量与预设总数不同,例如生成的工艺配方文件的数量n小于预设总数N,说明设备自动化控制程序在解析工艺配方数据的过程中出现异常,则获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因,并根据所述名称及所述解析异常的原因生成异常信号,使得设备自动化控制程序300根据该异常信号向上一级控制装置例如是生产设备控制系统200反馈,未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因。
作为示例,在本申请的一个实施例中,所述生产设备为半导体生产设备,所述工艺配方数据为半导体制程工艺配方数据。本实施例有效地减少了对半导体生产设备批量化控制过程中因半导体生产设备依次执行控制指令导致设备闲置的时间,提高了半导体生产设备的产能及半导体自动化生产线的生产效率。
进一步地,请参考图2和图6,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的生产设备控制系统200中,所述方法包括以下步骤:
步骤42,接收工艺配方管理系统发送的工艺配方上传触发指令,响应于所述工艺配方上传触发指令并生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序接收生产设备上传的工艺配方数据,并并行解析所述工艺配方数据,以生成工艺配方结果数据,所述工艺配方数据包括第一工艺配方数据和第二工艺配方数据;
步骤44,接收所述设备自动化控制程序发送的所述工艺配方结果数据;
步骤46,根据所述工艺配方结果数据生成工艺配方结果文件包;
步骤48,将所述工艺配方结果文件包发送至所述工艺配方管理系统。
具体地,请继续参考图6,可以通过设置生产设备控制系统200根据接收的工艺配方管理系统100发送的工艺配方上传触发指令,生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序300接收生产设备400上传的工艺配方数据,并并行解析第一工艺配方数据和第二工艺配方数据,以生成工艺配方结果数据,避免设备自动化控制程序300在解析第一工艺配方数据的过程中导致的延时;通过设置生产设备控制系统200接收所述设备自动化控制程序300发送的所述工艺配方结果数据,根据所述工艺配方结果数据生成工艺配方结果文件包,并将所述工艺配方结果文件包发送至工艺配方管理系统100,以实现经由工艺配方管理系统100依次对生产设备控制系统200、设备自动化控制程序300及各生产设备400的自动化控制。由于本实施例缩短了对工艺配方数据解析的时间,从而有效地减少了对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间,提高了生产设备的产能及自动化生产线的生产效率。
进一步地,请参考图2和图7,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图2所示的生产设备控制系统200中,所述方法还包括以下步骤:
步骤471,接收异常信号,并根据所述异常信号生成异常反馈信号;
步骤472,发送所述异常反馈信号至所述工艺配方管理系统。
具体地,请参考图7和图8,通过设置生产设备控制系统200接收异常信号,根据所述异常信号生成异常反馈信号,并发送所述异常反馈信号至所述工艺配方管理系统100,便于用户通过工艺配方管理系统100获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因,有效地提高了自动化控制的效率及智能性。
作为示例,在本申请的一个实施例中,所述工艺配方管理系统为半导体工艺配方管理系统,所述设备自动化控制程序为半导体生产设备自动化控制程序,所述生产设备为半导体生产设备。本实施例有效地减少了对半导体生产设备批量化控制过程中因半导体生产设备依次执行控制指令导致设备闲置的时间,提高了半导体生产设备的产能及半导体自动化生产线的生产效率。
进一步地,请参考图8,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图8所示的工艺配方管理系统100中,所述方法包括以下步骤:
步骤12,发送工艺配方上传触发指令,使得生产设备控制系统200接收工艺配方上 传触发指令,并根据所述工艺配方上传触发指令生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序300实现,本申请中任一实施例中所述的应用于设备自动化控制程序的生产设备的控制方法;
步骤14,接收工艺配方结果文件包。
具体地,请继续参考图8,通过设置工艺配方管理系统100发送工艺配方上传触发指令,使得生产设备控制系统200接收工艺配方上传触发指令,并根据所述工艺配方上传触发指令生成工艺配方上传指令,使得设备自动化控制程序300在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短对工艺配方数据解析的时间,从而有效地减少了对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间;设置工艺配方管理系统100接收工艺配方结果文件包,便于用户通过工艺配方管理系统100获取工艺配方结果文件包,有效地提高了自动化控制的效率及智能性。
进一步地,请继续参考图8,在本申请的一个实施例中,提供了一种生产设备的控制方法,可以应用于如图8所示的工艺配方管理系统100中,所述方法还包括以下步骤:
步骤16,接收异常反馈信号,并根据所述异常反馈信号获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因。
具体地,请继续参考图8,通过设置工艺配方管理系统100接收异常反馈信号,并根据所述异常反馈信号获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因,便于用户直接通过工艺配方管理系统100获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因,有效地提高了自动化控制的效率及智能性。
作为示例,在本申请的一个实施例中,所述工艺配方管理系统为半导体制程工艺配方管理系统,所述生产设备控制系统为半导体生产设备控制系统,所述设备自动化控制程序为半导体生产设备自动化控制程序,所述生产设备为半导体生产设备。本实施例有效地减少了对半导体生产设备批量化控制过程中因半导体生产设备依次执行控制指令导致设备闲置的时间,提高了半导体生产设备的产能及半导体自动化生产线的生产效率。
应该理解的是,虽然图2-图8的流程图中的各个步骤按照箭头的指示依次显示,但是这些步骤并不是必然按照箭头指示的依次执行。除非本文中有明确的说明,这些步骤的执 行并没有严格的依次限制,这些步骤可以以其它的依次执行。而且,虽然图2-图8中的至少一部分步骤可以包括多个子步骤或者多个阶段,这些子步骤或者阶段并不必然是在同一时刻执行完成,而是可以在不同的时刻执行,这些子步骤或者阶段的执行依次也不必然是依次进行,而是可以与其它步骤或者其它步骤的子步骤或者阶段的至少一部分轮流或者交替地执行。
进一步地,请参考图9,在本申请的一个实施例中,提供了一种生产设备的控制装置1000,生产设备的控制装置1000包括指令接收单元1001、控制单元1002、数据接收单元1003及数据解析单元1004,指令接收单元1001用于接收工艺配方上传指令;控制单元1002与指令接收单元1001连接,用于响应于接收的所述工艺配方上传指令并生成第一控制指令和第二控制指令,所述第一控制指令用于控制生产设备上传第一工艺配方数据,所述第二控制指令用于控制生产设备上传第二工艺配方数据;数据接收单元1003与控制单元1002连接,用于接收所述第一工艺配方数据和所述第二工艺配方数据;数据解析单元1004与数据接收单元1003连接,用于解析接收的所述第一工艺配方数据,以生成对应的预设格式的第一工艺配方文件,及用于解析接收的所述第二工艺配方数据,以生成对应的预设格式的第二工艺配方文件。由于数据解析单元1004在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短对工艺配方数据解析的时间,从而有效地减少了对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间。
关于生产设备的控制装置的具体限定可以参见上文中对于生产设备的控制方法的限定,在此不再赘述。
上述生产设备的控制装置中的各个模块可全部或部分通过软件、硬件及其组合来实现。上述各模块可以硬件形式内嵌于或独立于计算机设备中的处理器中,也可以以软件形式存储于计算机设备中的存储器中,以便于处理器调用执行以上各个模块对应的操作。
进一步地,请参考图10,在本申请的一个实施例中,提供了一种生产设备的控制系统2000,包括设备自动化控制程序300、生产设备控制系统200及工艺配方管理系统100,设备自动化控制程序300用于实现本申请中任一实施例中所述的应用于设备自动化控制程序的生产设备的控制方法;生产设备控制系统200上应用有本申请中任一实施例中所述的应用于生产设备控制系统200的生产设备的控制方法;工艺配方管理系统100上应用有 本申请中任一实施例中所述的应用于工艺配方管理系统100的生产设备的控制方法。由于设备自动化控制程序300在对所述第一工艺配方数据进行解析期间,生成第二控制指令,以控制生产设备400上传第二工艺配方数据,使得设备自动化控制程序300并行解析接收的所述第二工艺配方数据,生成对应的预设格式的第二工艺配方文件,避免设备自动化控制程序300在解析第一工艺配方数据的过程中导致的延时。相对于传统的设备自动化控制程序300在完成对第一工艺配方数据解析后,再开始对第二工艺配方数据解析,本申请在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短了对工艺配方数据解析的时间,从而有效地减少了对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间,提高了生产设备400的产能及自动化生产线的生产效率。
进一步地,请参考图11,在本申请的一个实施例中,提供了一种计算机设备,包括存储器和处理器,所述存储器上存储有可在所述处理器上运行的计算机程序,所述处理器执行所述程序时实现本申请中任一实施例中所述的方法的步骤。
进一步地,在本申请的一个实施例中,提供了一种计算机可读存储介质,其上存储有计算机程序,所述计算机程序被处理器执行时实现本申请中任一个实施例中所述的方法的步骤。
于上述实施例中的计算机设备或计算机可读存储介质中,通过设置设备自动化控制程序在对第一工艺配方数据解析的过程中,并行对第二工艺配方数据解析,缩短了对工艺配方数据解析的时间,从而有效地减少了对设备批量化控制过程中因多设备依次执行控制指令导致设备闲置的时间,提高了生产设备的产能及自动化生产线的生产效率。
本领域普通技术人员可以理解实现上述实施例方法中的全部或部分流程,是可以通过计算机程序来指令相关的硬件来完成,所述的计算机程序可存储于一非易失性计算机可读取存储介质中,该计算机程序在执行时,可包括如上述各方法的实施例的流程。其中,本申请所提供的各实施例中所使用的对存储器、存储、数据库或其它介质的任何引用,均可包括非易失性和/或易失性存储器。非易失性存储器可包括只读存储器(ROM)、可编程ROM(PROM)、电可编程ROM(EPROM)、电可擦除可编程ROM(EEPROM)或闪存。易失性存储器可包括随机存取存储器(RAM)或者外部高速缓冲存储器。作为说明而非局限,RAM以多种形式可得,诸如静态RAM(SRAM)、动态RAM(DRAM)、同步DRAM (SDRAM)、双数据率SDRAM(DDRSDRAM)、增强型SDRAM(ESDRAM)、同步链路(Synchlink)DRAM(SLDRAM)、存储器总线(Rambus)直接RAM(RDRAM)、直接存储器总线动态RAM(DRDRAM)、以及存储器总线动态RAM(RDRAM)等。
以上所述实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本申请的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对申请专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进,这些都属于本申请的保护范围。因此,本申请专利的保护范围应以所附权利要求为准。

Claims (16)

  1. 一种生产设备的控制方法,包括:
    接收工艺配方上传指令,响应于所述工艺配方上传指令并生成第一控制指令,以控制生产设备上传第一工艺配方数据;
    接收所述第一工艺配方数据,并对所述第一工艺配方数据进行解析,以生成对应的预设格式的第一工艺配方文件;
    在对所述第一工艺配方数据进行解析期间,生成第二控制指令,以控制生产设备上传第二工艺配方数据;
    接收所述第二工艺配方数据,并对所述第二工艺配方数据进行解析,以生成对应的预设格式的第二工艺配方文件。
  2. 根据权利要求1所述的方法,其中,所述对所述第一工艺配方数据进行解析,以生成对应的预设格式的第一工艺配方文件,包括:
    调用第一线程对所述第一工艺配方数据进行解析并生成对应的预设格式的第一工艺配方文件。
  3. 根据权利要求1所述的方法,其中,所述对所述第二工艺配方数据进行解析,以生成对应的预设格式的第二工艺配方文件,包括:
    调用第二线程对所述第二工艺配方数据进行解析并生成对应的预设格式的第二工艺配方文件。
  4. 根据权利要求1-3任一项所述的方法,其中,所述工艺配方上传指令包含工艺配方数据的预设总数;在生成对应的预设格式的第二工艺配方文件之后,还包括:
    获取接收的所述工艺配方数据的数量,所述工艺配方数据包括所述第一工艺配方数据及所述第二工艺配方数据;
    若所述工艺配方数据的数量达到所述预设总数,则判断生成的所述工艺配方文件的数量是否与所述预设总数相等,所述工艺配方文件包括所述第一工艺配方文件及所述第二工艺配方文件;
    若是,则生成工艺配方结果数据。
  5. 根据权利要求4所述的方法,其中,所述方法还包括:
    若生成的所述工艺配方文件的数量与所述预设总数不同,则获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因;
    根据所述名称及所述解析异常的原因生成异常信号。
  6. 根据权利要求1-3任一项所述的方法,其中,所述生产设备为半导体生产设备,所述工艺配方数据为半导体制程工艺配方数据。
  7. 一种生产设备的控制方法,包括:
    接收工艺配方管理系统发送的工艺配方上传触发指令,响应于所述工艺配方上传触发指令并生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序接收生产设备上传的工艺配方数据,并并行解析所述工艺配方数据,以生成工艺配方结果数据,所述工艺配方数据包括第一工艺配方数据和第二工艺配方数据;
    接收所述设备自动化控制程序发送的所述工艺配方结果数据;
    根据所述工艺配方结果数据生成工艺配方结果文件包;
    将所述工艺配方结果文件包发送至所述工艺配方管理系统。
  8. 根据权利要求7所述的方法,其中,所述方法还包括:
    接收异常信号,并根据所述异常信号生成异常反馈信号;
    发送所述异常反馈信号至所述工艺配方管理系统。
  9. 根据权利要求7或8所述的方法,其中,所述工艺配方管理系统为半导体工艺配方管理系统,所述设备自动化控制程序为半导体生产设备自动化控制程序,所述生产设备为半导体生产设备。
  10. 一种生产设备的控制方法,包括:
    发送工艺配方上传触发指令,使得生产设备控制系统接收工艺配方上传触发指令,并根据所述工艺配方上传触发指令生成工艺配方上传指令,所述工艺配方上传指令用于使得设备自动化控制程序实现如权利要求1-6任一项所述方法的步骤;
    接收工艺配方结果文件包。
  11. 根据权利要求10所述的方法,其中,所述方法还包括:
    接收异常反馈信号,并根据所述异常反馈信号获取未解析出对应的预设格式的工艺配方文件的工艺配方数据的名称及解析异常的原因。
  12. 根据权利要求11所述的方法,其中,所述工艺配方管理系统为半导体制程工艺配方管理系统,所述生产设备控制系统为半导体生产设备控制系统,所述设备自动化控制程序为半导体生产设备自动化控制程序,所述生产设备为半导体生产设备。
  13. 一种生产设备的控制装置,包括:
    指令接收单元,用于接收工艺配方上传指令;
    控制单元,与所述指令接收单元连接,用于响应于接收的所述工艺配方上传指令并生成第一控制指令和第二控制指令,所述第一控制指令用于控制生产设备上传第一工艺配方数据,所述第二控制指令用于控制生产设备上传第二工艺配方数据;
    数据接收单元,与所述控制单元连接,用于接收所述第一工艺配方数据和所述第二工艺配方数据;
    数据解析单元,与所述数据接收单元连接,用于解析接收的所述第一工艺配方数据,以生成对应的预设格式的第一工艺配方文件,及用于解析接收的所述第二工艺配方数据,以生成对应的预设格式的第二工艺配方文件。
  14. 一种生产设备的控制系统,包括:
    设备自动化控制程序,用于实现权利要求1-6任一项所述的生产设备的控制方法;
    生产设备控制系统,其上应用有如权利要求7-9任一项所述的生产设备的控制方法;以及
    工艺配方管理系统,其上应用有如权利要求10-12任一项所述的生产设备的控制方法。
  15. 一种计算机设备,包括存储器和处理器,所述存储器上存储有可在所述处理器上运行的计算机程序,其中,所述处理器执行所述程序时实现权利要求1-12任一项所述方法的步骤。
  16. 一种计算机可读存储介质,其上存储有计算机程序,其中,所述计算机程序被处理器执行时实现权利要求1-12任一项所述方法的步骤。
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