WO2022177197A1 - Appareil destiné à mesurer l'épaisseur d'un substrat de verre et son procédé de commande - Google Patents
Appareil destiné à mesurer l'épaisseur d'un substrat de verre et son procédé de commande Download PDFInfo
- Publication number
- WO2022177197A1 WO2022177197A1 PCT/KR2022/001369 KR2022001369W WO2022177197A1 WO 2022177197 A1 WO2022177197 A1 WO 2022177197A1 KR 2022001369 W KR2022001369 W KR 2022001369W WO 2022177197 A1 WO2022177197 A1 WO 2022177197A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser beam
- glass substrate
- polyhedral prism
- frame
- captured image
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 146
- 239000011521 glass Substances 0.000 title claims abstract description 145
- 238000000034 method Methods 0.000 title claims description 44
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 238000003384 imaging method Methods 0.000 claims description 46
- 238000009434 installation Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000013461 design Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 13
- 238000006073 displacement reaction Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000004364 calculation method Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
Definitions
- FIG. 7 is a plan view illustrating an opening area in which a glass substrate is accommodated in a frame viewed from above.
- the base frame 1110, the seating frame 1120, and the beam irradiator support frame 1130 are fastened by a mutual coupling member (eg, a screw), it is described as being a separable component from each other.
- a mutual coupling member eg, a screw
- the implementation method of the frame 1100 is not limited by this embodiment, for example, at least two or more of the base frame 1110 , the seating frame 1120 , and the beam irradiator support frame 1130 are integrally implemented.
- the coupling member may include various types of members in addition to the screw.
- the polyhedral prism 1300 has an incident surface 1310 on which a laser beam is incident, and a laser beam incident into the polyhedral prism 1300 through the incident surface 1310. It has a plurality of reflective surfaces 1320 , 1330 , 1340 that sequentially reflect the , and an emitting surface 1350 from which a laser beam is emitted.
- the present embodiment describes a case in which there are three reflective surfaces 1320 , 1330 , and 1340 , the number and positions of the reflective surfaces 1320 , 1330 , and 1340 in the polyhedral prism 1300 are not limited.
- the incident surface 1310 may serve to reflect a laser beam traveling in the polyhedral prism 1300 .
- a plurality of polyhedral prisms 1300 and a plurality of imaging plates 1500 respectively correspond to a plurality of positions of the glass substrate 400 for measuring thickness.
- four sets of the polyhedral prism 1300 and the imaging plate 1500 may be provided, but the installation location and number are not limited.
- the laser beam irradiator 1200 is provided to individually irradiate a laser beam to each position.
- the configuration for amplifying the characteristics of the laser beam using the polyhedral prism 1300 has been described.
- the measuring device 1000 uses the polyhedral prism 1300 to amplify the fine amount of refraction into a displacement that is more easily measured.
- the configuration for amplifying the laser beam is not necessarily limited to only the polyhedral prism 1300 , and a configuration other than the polyhedral prism 1300 may be applied to the measuring apparatus 1000 .
- such an embodiment will be described.
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
L'invention concerne un appareil destiné à mesurer l'épaisseur d'un substrat de verre qui comprend : une armature ayant une ouverture destinée à accueillir le substrat de verre ; un irradiateur de faisceau laser qui irradie un faisceau laser à un angle d'incidence préétabli vers l'ouverture ; un prisme polyédrique qui est installé sur un chemin optique du faisceau laser qui est irradié par l'irradiateur de faisceau laser et traverse l'ouverture, le prisme polyédrique incluant une surface incidente sur laquelle le faisceau laser traversant l'ouverture est incident, une pluralité de surfaces réfléchissantes qui réfléchissent en chaîne le faisceau laser incident à travers la surface incidente, et une émettrice depuis laquelle le faisceau laser qui est réfléchi en chaîne par la pluralité de surfaces réfléchissantes est émis ; une caméra qui acquiert une image capturée du faisceau laser émis depuis le prisme polyédrique ; et une unité de commande qui mesure l'épaisseur du substrat de verre accueilli dans l'ouverture, sur la base de l'image capturée acquise par la caméra. Au moins une surface de la pluralité de surfaces réfléchissantes du prisme polyédrique est une surface incurvée.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2021-0021696 | 2021-02-18 | ||
| KR1020210021696A KR20220118061A (ko) | 2021-02-18 | 2021-02-18 | 글래스기판의 두께를 측정하기 위한 장치 및 그 제어방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2022177197A1 true WO2022177197A1 (fr) | 2022-08-25 |
Family
ID=82930910
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2022/001369 WO2022177197A1 (fr) | 2021-02-18 | 2022-01-26 | Appareil destiné à mesurer l'épaisseur d'un substrat de verre et son procédé de commande |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20220118061A (fr) |
| WO (1) | WO2022177197A1 (fr) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000171228A (ja) * | 1998-12-09 | 2000-06-23 | Nidek Co Ltd | 斜入射干渉計 |
| KR20120133734A (ko) * | 2011-06-01 | 2012-12-11 | 주식회사 나노텍 | 유리기판 에지부의 결함유무 검출을 위한 장치 및 방법 |
| KR20130134416A (ko) * | 2012-05-31 | 2013-12-10 | 주식회사 휴비츠 | 렌즈 두께 측정 장치 및 방법 |
| KR20190020143A (ko) * | 2016-07-03 | 2019-02-27 | 엘지전자 주식회사 | 두께 측정 장치 |
| KR20200130062A (ko) * | 2019-05-10 | 2020-11-18 | 삼성전자주식회사 | 치수 측정용 지그 및 그를 포함하는 치수 측정 장치 |
-
2021
- 2021-02-18 KR KR1020210021696A patent/KR20220118061A/ko active Search and Examination
-
2022
- 2022-01-26 WO PCT/KR2022/001369 patent/WO2022177197A1/fr active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000171228A (ja) * | 1998-12-09 | 2000-06-23 | Nidek Co Ltd | 斜入射干渉計 |
| KR20120133734A (ko) * | 2011-06-01 | 2012-12-11 | 주식회사 나노텍 | 유리기판 에지부의 결함유무 검출을 위한 장치 및 방법 |
| KR20130134416A (ko) * | 2012-05-31 | 2013-12-10 | 주식회사 휴비츠 | 렌즈 두께 측정 장치 및 방법 |
| KR20190020143A (ko) * | 2016-07-03 | 2019-02-27 | 엘지전자 주식회사 | 두께 측정 장치 |
| KR20200130062A (ko) * | 2019-05-10 | 2020-11-18 | 삼성전자주식회사 | 치수 측정용 지그 및 그를 포함하는 치수 측정 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20220118061A (ko) | 2022-08-25 |
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