WO2022171614A3 - Mems-actuated light-emitting device, and method for changing the position of a light-emitting device - Google Patents

Mems-actuated light-emitting device, and method for changing the position of a light-emitting device Download PDF

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Publication number
WO2022171614A3
WO2022171614A3 PCT/EP2022/052987 EP2022052987W WO2022171614A3 WO 2022171614 A3 WO2022171614 A3 WO 2022171614A3 EP 2022052987 W EP2022052987 W EP 2022052987W WO 2022171614 A3 WO2022171614 A3 WO 2022171614A3
Authority
WO
WIPO (PCT)
Prior art keywords
light
emitting device
mems
changing
actuated
Prior art date
Application number
PCT/EP2022/052987
Other languages
German (de)
French (fr)
Other versions
WO2022171614A2 (en
Inventor
Martin Blasl
Jan Grahmann
Meysam NAMDARI
Michael Wildenhain
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of WO2022171614A2 publication Critical patent/WO2022171614A2/en
Publication of WO2022171614A3 publication Critical patent/WO2022171614A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0163—Spring holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/055—Translation in a plane parallel to the substrate, i.e. enabling movement along any direction in the plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

The invention relates to an apparatus comprising: a light-emitting device which is designed to emit light; and an MEMS positioning device which is designed to change a position of the light-emitting device in the apparatus in order to change a position from which the light can be emitted. The apparatus comprises a control device which is designed to obtain control information associated with a position of the light-emitting device, and, based on said control information, to control the MEMS positioning device in order to change the position of the light-emitting device.
PCT/EP2022/052987 2021-02-12 2022-02-08 Mems-actuated light-emitting device, and method for changing the position of a light-emitting device WO2022171614A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021201373.2 2021-02-12
DE102021201373.2A DE102021201373A1 (en) 2021-02-12 2021-02-12 MEMS-actuated light-emitting device and method for changing the position of a light-emitting device

Publications (2)

Publication Number Publication Date
WO2022171614A2 WO2022171614A2 (en) 2022-08-18
WO2022171614A3 true WO2022171614A3 (en) 2022-10-06

Family

ID=80445642

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2022/052987 WO2022171614A2 (en) 2021-02-12 2022-02-08 Mems-actuated light-emitting device, and method for changing the position of a light-emitting device

Country Status (2)

Country Link
DE (1) DE102021201373A1 (en)
WO (1) WO2022171614A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661667A (en) * 1994-03-14 1997-08-26 Virtek Vision Corp. 3D imaging using a laser projector
WO2015069960A1 (en) * 2013-11-11 2015-05-14 DigitalOptics Corporation MEMS Mems electrical contact systems and methods
US20200014892A1 (en) * 2017-03-07 2020-01-09 Goertek Inc. Laser projection device and laser projection system
WO2020140144A1 (en) * 2019-01-04 2020-07-09 Ba Tis Faez Five degrees of freedom mems actuator for autofocus, optical image stabilization, and super resolution imaging in miniature cameras

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6738539B2 (en) 2001-10-03 2004-05-18 Continuum Photonics Beam-steering optical switching apparatus
JP3647411B2 (en) 2001-10-25 2005-05-11 キヤノン株式会社 Image forming apparatus
US20060291769A1 (en) 2005-05-27 2006-12-28 Eastman Kodak Company Light emitting source incorporating vertical cavity lasers and other MEMS devices within an electro-optical addressing architecture
EP3114511A4 (en) 2014-03-07 2017-10-11 Aeponyx Inc. Methods and system for wavelength tunable optical components and sub-systems
US9746611B2 (en) 2015-11-18 2017-08-29 The Boeing Company Systems and methods for tiltable grating out-couplers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661667A (en) * 1994-03-14 1997-08-26 Virtek Vision Corp. 3D imaging using a laser projector
WO2015069960A1 (en) * 2013-11-11 2015-05-14 DigitalOptics Corporation MEMS Mems electrical contact systems and methods
US20200014892A1 (en) * 2017-03-07 2020-01-09 Goertek Inc. Laser projection device and laser projection system
WO2020140144A1 (en) * 2019-01-04 2020-07-09 Ba Tis Faez Five degrees of freedom mems actuator for autofocus, optical image stabilization, and super resolution imaging in miniature cameras

Also Published As

Publication number Publication date
WO2022171614A2 (en) 2022-08-18
DE102021201373A1 (en) 2022-08-18

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