WO2022160361A1 - 一种压电晶体称重长晶装置及工作方法 - Google Patents

一种压电晶体称重长晶装置及工作方法 Download PDF

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WO2022160361A1
WO2022160361A1 PCT/CN2021/074827 CN2021074827W WO2022160361A1 WO 2022160361 A1 WO2022160361 A1 WO 2022160361A1 CN 2021074827 W CN2021074827 W CN 2021074827W WO 2022160361 A1 WO2022160361 A1 WO 2022160361A1
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crystal
weighing
balance lever
crystal growth
motor
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PCT/CN2021/074827
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English (en)
French (fr)
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张伟明
周伟
徐秋峰
洪宇峰
袁超
沈浩
汪万盾
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天通控股股份有限公司
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Priority to JP2022539735A priority Critical patent/JP7416958B2/ja
Publication of WO2022160361A1 publication Critical patent/WO2022160361A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

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  • the invention relates to the technical field of piezoelectric crystals, in particular to a piezoelectric crystal weighing crystal growing device and a working method.
  • the method of pulling and weighing is usually used to control the crystal growth.
  • the whole crystal growth process is mainly controlled by measuring the crystal weight.
  • the conventional crystal growth method is to use a high-precision sensor to measure the weight of the crystal.
  • the crystal weight signal is continuously read during the growth process to control the growth shape of the crystal.
  • the disadvantages of the weighing crystal growing technology are: poor accuracy of the weighing sensor, small range, high price, high cost and poor reliability.
  • the load cell is directly connected to the crystal and installed in the furnace environment at the same time, it is often mechanically damaged, and there are problems of easy damage and short life.
  • the patent document with the patent publication number CN105177704B discloses "A Crystal Weighing Device for a Crystal Growth Furnace with High Stability", which includes: a crystal growth furnace shell and a weighing vacuum airtight box.
  • the weighing vacuum The airtight box is arranged above the crystal growth furnace shell, a bellows is provided between the weighing vacuum airtight box and the crystal growth furnace shell for sealing connection, and a stepper motor is arranged in the weighing vacuum airtight box, The output end of the stepping motor is connected with a seed rod that extends through the corrugated tube and extends into the crystal growth furnace shell.
  • the crystal growth furnace shell is provided with a crystal connected to the seed rod.
  • Several pneumatic support rods are arranged in the tube.
  • the patent document with the patent publication number CN102392295B discloses "Weighing Device for Sapphire Single Crystal Furnace", including: it includes a weighing sensor, and the weighing sensor is installed in the lower casing through the sensor bracket, so The lower shell is provided with a signal transmission device for transmitting the weighing signal of the load cell; the load cell and the signal transmission device are sealed and installed in the lower shell.
  • the invention can provide the weight signal required in the growth process of the sapphire crystal through the corresponding cooperation between the weighing sensor and the signal transmission device, and has corresponding precision.
  • the lower shell is separated from the upper shell; the lower shell can follow the rotation of the rotating mechanism when the sapphire crystal grows, which satisfies the signal transmission during the rotation process, and also satisfies the sealing required by the sapphire single crystal furnace.
  • the patent document with the patent publication number CN105821477B discloses "a high-precision full-scale weighing system for sapphire crystal growth equipment by foaming method", including: setting a cavity and a top cover, and setting a circular opening at the bottom of the cavity , and connect the seed rod sleeve, the seed rod sleeve is provided with a support round table, and also includes a crystal lift platform, a high-precision load cell, a suction device and a seed rod bracket are set in the cavity, and the top surface of the suction device Connected with the top cover by long neck bolts, it can move up and down, the bottom surface of the suction device is fixedly connected to the high-precision load cell, the bottom surface of the high-precision load cell is fixedly connected to the seed rod bracket, and at least two low-precision load cells are also set.
  • the large-scale load cell the circular through hole is set on the Jingsheng platform, the large-scale load cell is symmetrically arranged around the circular through hole of the Jingsheng platform, and the seed sleeve is centered through the circle of the Jingsheng platform.
  • the support round table of the seed rod sleeve is installed on the large-scale load cell, and the electronic device is also connected with the suction device, the high-precision load cell and the large-scale load cell.
  • the above inventions monitor the crystal weight and control the crystal growth process through the internal load cell.
  • the principle is still to use a load cell to measure the weight of the crystal during the growth process to realize the growth of the crystal.
  • the above invention only uses a specific mechanical structure to match the load cell, and optimizes the structure of the device.
  • the sensor is still used to detect the weighing, and there is no major breakthrough and innovation in the key technical point of weighing. Because the load cell is installed inside the furnace body and has long-term contact with crystal volatiles and high temperature, the environment where the sensor is located is harsh, resulting in a very short lifespan. At the same time, the sensor is directly connected to the crystal. During the crystal growth process, various crystal adhesion, excessive pulling and other phenomena often occur, and it is easily damaged by mechanical impact. It can be seen that the above invention is still optimized on the basis of the traditional weighing and growing crystal structure, and there is no significant technological breakthrough.
  • the current international highest precision level is 1/10,000, that is, a crystal of 100 kilograms grows, the detection accuracy is 10g, and the jump is in units of 10g.
  • This type of sensor belongs to graded precision detection, and the detection value is jumping rather than continuous. Taking this as an example, in the early stage of crystal growth, due to the small weight of the crystal, the sensor will not be able to detect the crystal growth amount within 10 grams, which will become a detection blind area and a control blind area. By analogy, weight detection between 10 and 20 grams is also a control blind zone.
  • weight detection between 10 and 20 grams is also a control blind zone.
  • the failure rate of the sensor is above 2% when the load cell is used.
  • the price of high-precision load cells is high. According to the current market price, a load cell with a measuring range of 50 kg and an accuracy of one ten thousandth is more than 50,000 yuan, and the manufacturing cost is very high.
  • the purpose of the present invention is to provide a piezoelectric crystal weighing crystal growing device and a working method.
  • the piezoelectric crystal weighing crystal growing device of the present invention abandons the weighing sensor in the traditional crystal growing technology, and through the principle of lever balance, the weight at both ends of the lever rises synchronously, so that the initial and later phases of crystal growth are always kept high. Accurate weight detection. In other words, whenever there is a weight deviation at both ends of the lever, the lever will be offset accordingly. Therefore, the device can realize stepless precision detection.
  • the present invention provides the following technical solutions:
  • a piezoelectric crystal weighing crystal growing device comprising a balance lever arranged on the top position of the outer side of a crystal growth furnace shell, the lower part of the balance lever is provided with a fulcrum;
  • a rotary motor is installed below the balance lever on the left side of the fulcrum, the lower part of the rotary motor is connected with a seed crystal rod, and the lower end of the seed crystal rod is a seed crystal;
  • a linear guide is installed above the balance lever on the right side of the fulcrum, and a slider is installed on the linear guide, and a counterweight can be placed on the slider;
  • balance lever on the right side of the fulcrum is also equipped with a motor located on the left side of the linear guide rail, the motor is connected with the lead screw through the coupling, and the lead screw is connected with the lead screw nut and then fixed with the slider.
  • the upper part of the balance lever is provided with a horizontal angle sensor at the position opposite to the fulcrum.
  • the lower part of the seed crystal is a crystal.
  • the length of the balance lever is 0.5 meters to 2 meters.
  • the counterweight can move left and right with the slider, and the weight of the counterweight is 0.1kg-10kg.
  • the horizontal angle sensor is used to detect the tilt angle data of the balance lever deviating from the horizontal, and monitor the balance state of the entire crystal growth system.
  • the motor is a servo motor, a DC motor or an AC motor.
  • the working method of a piezoelectric crystal weighing crystal growing device of the present invention during the crystal growth process, the reference weight is changed by continuously adjusting the position of the counterweight from the fulcrum through the motor; the crystal growth process is controlled so that the crystal follows the reference weight The change in weight grows in tandem, resulting in a crystal of the desired shape.
  • the value displayed by the horizontal angle sensor is not zero at this time, and the display and output of the horizontal angle sensor can be made zero by clearing the operation; so far, the preliminary horizontal reference of the entire balance system has been verified;
  • the piezoelectric crystal weighing crystal growth device is lowered as a whole, so that the seed crystal slowly contacts the full melt surface to complete the seeding operation; at this time, the horizontal angle sensor is used to clear the zero operation, clear it again, and switch Go to the automatic crystal growth program; After the automatic crystal growth process starts, the piezoelectric crystal weighing crystal growth device is pulled up synchronously, and the crystal crystal growth is carried out slowly; During the entire crystal growth process, the value of the lever offset angle is detected, to feedback the change of crystal shape and diameter; and to control the speed of crystal growth by controlling the heating temperature, so as to meet the requirements of crystal growth.
  • a piezoelectric crystal weighing crystal growing device can also replace the horizontal angle sensor in the device with other sensors with similar monitoring functions such as a resistance strain sensor or a load cell.
  • position monitoring is performed through the relative motion relationship between the load cell and the balance rod, that is, the load cell is fixed on the furnace body and connected to the balance lever.
  • the balance lever is angularly offset, the force measurement point of the load cell A positional deviation is formed with the balance lever. Since the load cell is fixed, the load cell will be subjected to a certain pulling or pushing force, and the magnitude of the force is determined by the offset angle of the balance lever.
  • the force measuring sensor can feed back to the control system for heating adjustment to realize the crystal growth control process.
  • the working principle of a piezoelectric crystal weighing crystal growing device of the present invention is:
  • the lever principle In the process of crystal growth control, the lever principle is used, and the rotating motor, seed crystal, seed rod, etc. of the crystal growth part are installed at one end of the balance lever, and on the other side of the balance lever, a motor and a screw rod are set to adjust the force arm of counterweights.
  • the balance lever can only reach a horizontal state if the gravity on both sides of the balance lever is multiplied by the same value as the force arm.
  • a piezoelectric crystal weighing crystal growing device and working method have high weighing accuracy, large weighing range, reliable structure and low cost;
  • the device can realize the growth of various special-shaped crystals due to the use of the adjustment method of the counterweight
  • the piezoelectric crystal weighing crystal growing device and the working method of the present invention can be applied to various crystal growth technologies, and have a good promotion prospect.
  • Fig. 1 is the principle schematic diagram of the device of the present invention
  • FIG. 2 is a schematic structural diagram of the device of the present invention.
  • a piezoelectric crystal weighing crystal growing device and a working method comprising a balance lever 3 arranged on the top position of the outer side of a crystal growth furnace shell, the lower part of the balance lever 3 is provided with a fulcrum 12;
  • a rotary motor 2 is installed below the balance lever 3 on the left side of the fulcrum 12, and the lower part of the rotary motor 2 is connected to a seed crystal rod 13, and the lower end of the seed crystal rod 13 is the seed crystal 14;
  • a linear guide 11 is installed above the balance lever 3 on the right side of the fulcrum 12, a slider 10 is installed on the linear guide 11, and a counterweight 9 can be placed on the slider 10;
  • balance lever 3 on the right side of the fulcrum 12 is also equipped with a motor 5 on the left side of the linear guide 11, the motor 5 is connected with the lead screw 7 through the coupling 6, and the lead screw 7 is connected through the lead screw nut 8 and connected. Fixed with slider 10.
  • a horizontal angle sensor 4 is provided on the upper part of the balance lever 3 at a position opposite to the fulcrum 12 .
  • the horizontal angle sensor 4 is used to detect the tilt angle data of the balance lever 3 deviating from the horizontal, and monitor the balance state of the entire crystal growth system.
  • the motor 5 is a servo motor, a DC motor or an AC motor.
  • the length of the balance lever 3 is 0.5 meters to 2 meters.
  • the counterweight 9 can move left and right with the slider 10 , and the weight of the counterweight 9 is 0.1kg-10kg. Below the seed crystal 14 is the crystal 1 .
  • the working method of the piezoelectric crystal weighing crystal growing device is specifically:
  • the corresponding parameters are determined before crystal growth, including growth rate, crystal shape, total amount of crystals, and moving speed of the counterweight;
  • the value displayed by the horizontal angle sensor is not zero at this time, and the display and output of the horizontal angle sensor can be made zero by clearing the operation; so far, the preliminary horizontal reference of the entire balance system has been verified;
  • the piezoelectric crystal weighing crystal growth device is lowered as a whole, so that the seed crystal slowly contacts the full melt surface to complete the seeding operation; at this time, the horizontal angle sensor is used to clear the zero operation, clear it again, and switch Go to the automatic crystal growth program; after the automatic crystal growth process starts, the piezoelectric crystal weighing crystal growth device is pulled up synchronously, and the crystal crystal growth is carried out slowly; during the entire crystal growth process, the value of the lever offset angle is detected, to feedback the change of crystal shape and diameter; and to control the speed of crystal growth by controlling the heating temperature, so as to meet the requirements of crystal growth.
  • the preset counterweight moves 6.751mm per hour.
  • the balance lever tilts left and right. If the crystal grows too fast, the balance lever will tilt to the left.
  • the horizontal angle sensor will monitor the horizontal offset angle of the balance lever, and the angle sensor will transmit the generated angle deviation value to the control system for calculation, and the control system will follow the set ratio. to adjust the heating power of the thermal field.
  • the heating power of the thermal field needs to be increased. In this way, the crystal grows at a rate of 33.755g per hour, and a cylindrical crystal will eventually grow.
  • the automatic control is released, and the grown crystal can be pulled out from the crystal melt to complete the crystal growth.
  • the adjustment of the weight change is also continuous, and the continuity throughout the growth process is very good, and the grown crystal has a smooth appearance, high cylindricity, and crystal quality. it is good.
  • a piezoelectric crystal weighing and crystal growing device which replaces the horizontal angle sensor in Embodiment 1 with a resistance strain sensor or a load cell, and the other components remain unchanged.

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Abstract

本发明涉及晶体生长技术领域，尤其是一种压电晶体称重长晶装置及工作方法，该装置包括设置在长晶炉上的平衡杠杆(3)，平衡杠杆(3)的下部设有支点(12)；支点(12)左侧的平衡杠杆(3)的下方装有旋转电机(2)，旋转电机(2)的下部与籽晶杆(13)相连，籽晶杆(13)的下端为籽晶(14)；支点(12)右侧的平衡杠杆(3)的上方装有直线导轨(11)，直线导轨(11)上装有滑块(10)，滑块(10)上可放置配重块(9)；支点(12)右侧的平衡杠杆(3)的上方还装有位于直线导轨(11)左侧的电机(5)，电机(5)通过联轴器(6)与丝杆(7)相连，丝杆(7)通过丝杆螺母(8)连接并与滑块(10)固定。

Description

一种压电晶体称重长晶装置及工作方法 技术领域
本发明涉及压电晶体技术领域，具体领域为一种压电晶体称重长晶装置及工作方法。
背景技术
在压电晶体生长技术领域中，特别是压电晶体的生长方法中，通常使用提拉称重的方法控制长晶。在整个晶体生长过程中，主要通过测量晶体重量，控制整个长晶过程。
目前，常规的长晶方法是：利用高精度传感器进行晶体重量的测量，通过将籽晶悬挂在称重传感器上，在生长过程中不断的读取晶体重量信号，控制晶体的生长外形。该称重长晶技术的缺点是：称重传感器精度差、量程小，且价格高，成本大，可靠性差。另外由于称重传感器直接连接晶体，同时安装在炉体环境内，经常受到机械损坏，存在容易损坏，寿命短的问题。
针对以上问题，专利公告号为CN105177704B的专利文件公开了《一种稳定性高的长晶炉用晶体称重装置》，包括：长晶炉壳体和称重真空密闭箱，所述称重真空密闭箱设置在长晶炉壳体的上方，所述称重真空密闭箱与长晶炉壳体之间设置有波纹管进行密封连接，所述称重真空密闭箱内设置有一个步进电机，所述步进电机的输出端连接设置有一根穿过波纹管而延伸至长晶炉壳体内的籽晶杆，所述长晶炉壳体内设置有与籽晶杆相连接的晶体，所述波纹管内设置有数个气压支撑杆。
针对以上问题，专利公告号为CN102392295B的专利文件公开了《一种蓝宝石单晶炉用称重装置》，包括：其包括称重传感器，所述称重传感器通过传感器支架安装于下壳体内，所述下壳体内设有用于传输称重传感器称重信号的信号传输装置；称重传感器及信号传输装置均密封安装于下壳体内。本发明通过称重传感器与信号传输装置的对应配合能够提供蓝宝石晶体生长过程中所需要的重量信号，具有相应的精度，称重传感器及信号传输装置密封安装于下壳体内，上壳体位于下壳体的上方，下壳体与上壳体相分离；下壳体能够跟随蓝宝石晶体长晶时的旋转机构转动，满足转动过程中的信号传输，同时也满足了蓝宝石单晶炉所需要的密封条件；结构简单紧凑，安装使用方便，提高测量精度，适应性好，提高蓝宝石生长的稳定性及可靠性。
针对以上问题，专利公告号为CN105821477B的专利文件公开了《一种泡生法蓝宝石长晶设备的高精度全量程称重系统》，包括：设置容腔和顶盖，容腔底部设置圆形开口， 并连接籽晶杆套筒，籽晶杆套筒上设置支撑圆台，还包括晶升平台，容腔内设置高精度称重传感器，吸合装置和籽晶杆支架，吸合装置的顶面通过长颈螺栓与顶盖连接，可以上下移动，吸合装置的底面固定连接所述的高精度称重传感器，高精度称重传感器的底面固定连接籽晶杆支架，还设置至少两个低精度的大量程称重传感器，晶升平台上设置圆形通孔，大量程称重传感器对称设置在晶升平台的圆形通孔周围，籽晶套筒居中穿过所述的晶升平台的圆形通孔，籽晶杆套筒的支撑圆台安装在大量程称重传感器上，还设置电子装置与吸合装置，高精度称重传感器和大量程称重传感器连接。
以上几个发明都是通过内部设置的称重传感器监测晶体重量，控制长晶过程。其原理仍然是在生长过程中使用称重传感器测量晶体的重量，实现晶体的生长。以上发明仅是使用了特定的机械结构来配合称重传感器，对设备的结构进行了优化。本质上仍是使用传感器来检测称重，没有在称重这一技术关键点上有重大突破和创新。由于称重传感器安装在炉体内部，与晶体挥发物及高温等长期接触，传感器所在环境恶劣，导致寿命很短。同时传感器直接与晶体连接，长晶过程中经常会出现各种晶体粘连，提拉过度等现象，且容易受到机械撞击等损坏。可以看出，以上发明仍然是在传统称重长晶的结构方式的基础上进行优化，没有显著的技术突破。
关于称重传感器，目前国际最高精度等级是万分之一，即生长100公斤的晶体，检测精度为10g，以10g为单位跳变。该类型的传感器属于有级精度检测，检测数值是跳变的而非连续性的。以此为例，在长晶初期，由于晶体重量很小，10克以内的晶体生长量，传感器将无法检测到，将成为检测盲区，也成为控制盲区。以此类推，10到20克之间的重量检测也是控制盲区。根据实际生产数据显示，由于在长晶过程中存在晶体触底、提拉量程超限、误操作等情况，运用称重传感器，传感器的故障率在2％以上。同时高精度称重传感器价格高，按照目前市场价格，一个量程50公斤，万分之一精度的称重传感器价格在5万元以上，制造成本非常高。
发明内容
本发明的目的在于提供一种压电晶体称重长晶装置及工作方法。
本发明的一种压电晶体称重长晶装置抛弃了传统长晶技术中的称重传感器，通过杠杆平衡的原理，使杠杆两端的重量同步上升，使得长晶初期与后期都始终保持着高精度的重量检测。换句话说，只要在杠杆的两端出现重量偏差，杠杆就会出现相应的偏移。因此，本装置可实现无级精度检测。
为实现上述目的，本发明提供如下技术方案：
一种压电晶体称重长晶装置，包括设置在长晶炉炉壳外侧顶部位置上的平衡杠杆，所述平衡杠杆的下部设有支点；
支点左侧的平衡杠杆的下方装有旋转电机，所述旋转电机的下部与籽晶杆相连，所述籽晶杆的下端为籽晶；
支点右侧的平衡杠杆的上方装有直线导轨，所述直线导轨上装有滑块，所述滑块上可放置配重块；
支点右侧的平衡杠杆的上方还装有位于直线导轨左侧的电机，所述电机通过联轴器与丝杆相连，所述丝杆连接丝杆螺母后与滑块连接固定。
其中，所述平衡杠杆上部与支点相对的位置上设有水平角度传感器。
其中，所述籽晶的下方为晶体。
其中，平衡杠杆的长度为0.5米-2米。
其中，所述配重块可随滑块左右移动，所述配重块的重量为0.1kg-10kg。
其中，所述水平角度传感器用于检测平衡杠杆偏离于水平的倾斜角度数据，监测整个长晶系统的平衡状态。
其中，所述电机为伺服电机、直流电机或交流电机。
本发明的一种压电晶体称重长晶装置的工作方法：在晶体生长过程中，通过电机不断调节配重块距离支点的位置，来改变参考重量；控制晶体的生长过程，使晶体按照参考重量的变化同步生长，最终得到所需形状的晶体。
具体的：
先按照长晶生产的工艺，长晶之前确定相应的参数，包括生长速率、晶体形状、晶体总总量、配重块移动速度；
当坩埚内的晶体粉料达到熔点，在全熔状态下，在籽晶杆上安装好籽晶进行引晶操作；通过控制电机的旋转，使丝杆旋转带动配重块左右移动；
若安装籽晶杆一侧偏重，平衡杠杆向左倾斜，则调节配重块向右侧移动，直到平衡杠杆基本达到水平状态；若安装籽晶杆一侧偏轻，平衡杠杆向右倾斜，则调节配重块向左侧移动，直到平衡杠杆基本达到水平状态；
当平衡杠杆达到基本水平状态时，此时水平角度传感器显示数值不为零，可以通过清零操作，使水平角度传感器显示和输出为零；至此整个平衡系统初步水平基准已校验好；
通过长晶控制开关，使压电晶体称重长晶装置整体下降，使籽晶缓慢接触全熔液面完成引晶操作；此时，通过水平角度传感器进行清零操作，再次清零，并切换到自动长晶生长程序； 在自动长晶过程开始后，压电晶体称重长晶装置同步向上提拉，缓慢的进行晶体结晶生长；在整个长晶过程中，检测杠杆偏移角度的数值，来反馈晶体外形直径的变化；并通过控制加热温度来控制晶体生长的速度，从而达到长晶要求。
一种压电晶体称重长晶装置，也可将上述装置中的水平角度传感器替换为电阻应变传感器或测力传感器等其他具有类似监测功能的传感器。比如，通过测力传感器与平衡杆之间的相对运动关系进行位置监测，即将测力传感器固定在炉体上，与平衡杠杆进行连接，当平衡杠杆出现角度偏移时，测力传感器的测力点与平衡杠杆形成位置偏差，由于测力传感器是固定的所以，测力传感器将受到一定的拉力或推力，所受到力的大小由平衡杠杆偏移角度的大小来决定。测力传感器通过反馈所受力的方向和大小，可以反馈给控制系统进行加热调节，实现长晶控制过程。
本发明的一种压电晶体称重长晶装置的工作原理为：
在长晶控制过程中利用了杠杆原理，将长晶部分的旋转电机、籽晶、籽晶杆等安装在平衡杠杆的一端，在平衡杠杆的另一边设置了由电机、丝杆来调节力臂的配重块。只有在平衡杠杆两侧的重力与力臂相乘的值相同的情况下，平衡杠杆才能达到水平状态。
在长晶初期，先调节配重块在平衡杠杆上的位置，先使平衡杠杆处于平衡状态。在生长开始后，随着晶体的生长，由于晶体重量会逐渐变大，杠杆的平衡将会发生变化，通过同步以一个预设的速度调节配重块的位置的方法来同步稳定杠杆的平衡状态。同时在整个长晶过程中，检测杠杆偏移角度的数值，来反馈晶体外形直径的变化。并通过控制加热调节部分，来控制晶体生长的速度，从而达到等径生长的长晶要求。
如图1所示，设动力F1、阻力F2、动力臂长度L1、阻力臂长度L2，则杠杆原理关系式为：F1×L1＝F2×L2。
与现有技术相比，本发明的有益效果是：
(1)一种压电晶体称重长晶装置及工作方法的称重精度高，称重量程大；结构可靠，成本低；
(2)该装置由于使用了配重块调节方式，可以实现各种异形晶体的生长；
(3)该装置由于使用了数字化水平角度传感器，可以直观，准确的观察到晶体生长系统的平衡情况，实时观察，直观明了；
(4)本发明的一种压电晶体称重长晶装置及工作方法可以运用到各种晶体生长技术中，具有良好的推广前景。
附图说明
图1为本发明装置的原理示意图；
图2为本发明装置的结构示意图。
其中，1-晶体、2-旋转电机、3-平衡杠杆、4-水平角度传感器、5-电机、6-联轴器、7-丝杆、8-丝杆螺母、9-配重块、10-滑块、11-直线导轨、12-支点、13-籽晶杆、14-籽晶。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图2，本发明提供一种技术方案：
一种压电晶体称重长晶装置及工作方法，包括设置在长晶炉炉壳外侧顶部位置上的平衡杠杆3，所述平衡杠杆3的下部设有支点12；
支点12左侧的平衡杠杆3的下方装有旋转电机2，所述旋转电机2的下部与籽晶杆13相连，所述籽晶杆13的下端为籽晶14；
支点12右侧的平衡杠杆3的上方装有直线导轨11，所述直线导轨11上装有滑块10，所述滑块10上可放置配重块9；
支点12右侧的平衡杠杆3的上方还装有位于直线导轨11左侧的电机5，所述电机5通过联轴器6与丝杆7相连，所述丝杆7通过丝杆螺母8连接并与滑块10固定。
平衡杠杆3上部与支点12相对的位置上设有水平角度传感器4。所述水平角度传感器4用于检测平衡杠杆3偏离于水平的倾斜角度数据，监测整个长晶系统的平衡状态。
电机5为伺服电机、直流电机或交流电机。平衡杠杆3的长度为0.5米-2米。所述配重块9可随滑块10左右移动，所述配重块9的重量为0.1kg-10kg。籽晶14的下方为晶体1。
实施例1
该压电晶体称重长晶装置的工作方法，具体为：
按照长晶生产的工艺，长晶之前确定相应的参数，包括生长速率、晶体形状、晶体总总量、配重块移动速度；
当坩埚内的晶体粉料达到熔点，在全熔状态下，在籽晶杆上安装好籽晶进行引晶操作；通过控制电机的旋转，使丝杆旋转带动配重块左右移动；
若安装籽晶杆一侧偏重，平衡杠杆向左倾斜，则调节配重块向右侧移动，直到平衡杠杆基本 达到水平状态；若安装籽晶杆一侧偏轻，平衡杠杆向右倾斜，则调节配重块向左侧移动，直到平衡杠杆基本达到水平状态；
当平衡杠杆达到基本水平状态时，此时水平角度传感器显示数值不为零，可以通过清零操作，使水平角度传感器显示和输出为零；至此整个平衡系统初步水平基准已校验好；
通过长晶控制开关，使压电晶体称重长晶装置整体下降，使籽晶缓慢接触全熔液面完成引晶操作；此时，通过水平角度传感器进行清零操作，再次清零，并切换到自动长晶生长程序；在自动长晶过程开始后，压电晶体称重长晶装置同步向上提拉，缓慢的进行晶体结晶生长；在整个长晶过程中，检测杠杆偏移角度的数值，来反馈晶体外形直径的变化；并通过控制加热温度来控制晶体生长的速度，从而达到长晶要求。
举例说明如下：
假设长晶提拉速度为5mm/h，即每小时长晶5mm。则通过密度公式可以计算出每小时晶体重量的增加量。
密度公式为：ρ＝m/V；铌酸锂晶体密度为4.3g/cm 3。
假设生长的是4英寸晶体，则每毫米晶体体积为V＝π*r 2*h＝7.85cm 3，则每毫米晶体质量为：m＝ρ*V＝33.755g。
由此，可以计算出配重块每小时移动距离。
假设配重块的质量为1000g，则预设好配重块每小时移动6.751mm。
在此提拉生长过程中，假设由于某种原因，导致晶体生长过快，则平衡杠杆会发生左右倾斜。如果晶体生长过快，则平衡杠杆将左倾，此时水平角度传感器将监测到平衡杠杆水平偏移角度，角度传感器将产生的角度偏差值传送到控制系统进行计算，控制系统将会按照设定比例来调节热场加热功率。
按照长晶原理，当晶体生长过快，则需要提高热场加热功率。如此，最终使得晶体按照每小时33.755g的速度生长，最终将生长出一个圆柱型晶体。
当生长的晶体长度达到所需要的长度时，解除自动控制，将生长好的晶体从晶体熔液中拉出即可，完成长晶。
生长过程中，由于配重块的移动是连续性进行的，配重变化量的调节也是连续性的，整个生长过程中连续性很好，所生长出的晶体外观平滑，圆柱度高，晶体质量好。
实施例2
一种压电晶体称重长晶装置，将实施例1中的水平角度传感器替换为电阻应变传感器或测力传感器，其余零部件不变。
尽管已经示出和描述了本发明的实施例，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型，本发明的范围由所附权利要求及其等同物限定。

Claims (10)

  1. 一种压电晶体称重长晶装置，其特征在于：包括设置在长晶炉炉壳外侧顶部位置上的平衡杠杆(3)，所述平衡杠杆(3)的下部设有支点(12)；
    支点(12)左侧的平衡杠杆(3)的下方装有旋转电机(2)，所述旋转电机(2)的下部与籽晶杆(13)相连，所述籽晶杆(13)的下端为籽晶(14)；
    支点(12)右侧的平衡杠杆(3)的上方装有直线导轨(11)，所述直线导轨(11)上装有滑块(10)，所述滑块(10)上可放置配重块(9)；
    支点(12)右侧的平衡杠杆(3)的上方还装有位于直线导轨(11)左侧的电机(5)，所述电机(5)通过联轴器(6)与丝杆(7)相连，所述丝杆(7)通过丝杆螺母(8)连接并与滑块(10)固定。
  2. 根据权利要求1所述的一种压电晶体称重长晶装置，其特征在于：所述平衡杠杆(3)上部与支点(12)相对的位置上设有水平角度传感器(4)。
  3. 根据权利要求1所述的一种压电晶体称重长晶装置，其特征在于：所述籽晶(14)的下方为晶体(1)。
  4. 根据权利要求1所述的一种压电晶体称重长晶装置，其特征在于：平衡杠杆(3)的长度为0.5米-2米。
  5. 根据权利要求1所述的一种压电晶体称重长晶装置，其特征在于：所述配重块(9)可随滑块(10)左右移动，所述配重块(9)的重量为0.1kg-10kg。
  6. 根据权利要求2所述的一种压电晶体称重长晶装置，其特征在于：所述水平角度传感器(4)用于检测平衡杠杆(3)偏离于水平的倾斜角度数据，监测整个长晶系统的平衡状态。
  7. 根据权利要求1所述的一种压电晶体称重长晶装置，其特征在于：所述电机(5)为伺服电机、直流电机或交流电机。
  8. 权利要求1-7任一所述的一种压电晶体称重长晶装置的工作方法，其特征在于：在晶体生长过程中，通过电机不断调节配重块距离支点的位置，来改变参考重量；控制晶体的生长过程，使晶体按照参考重量的变化同步生长，最终得到所需形状的晶体。
  9. 根据权利要求8所述的一种压电晶体称重长晶装置的工作方法，其特征在于：按照长晶生产的工艺，长晶之前确定相应的参数，包括生长速率、晶体形状、晶体总量、配重块移动速度；
    当坩埚内的晶体粉料达到熔点，在全熔状态下，在籽晶杆上安装好籽晶进行引晶操作；通过控制电机的旋转，使丝杆旋转带动配重块左右移动；
    若安装籽晶杆一侧偏重，平衡杠杆向左倾斜，则调节配重块向右侧移动，直到平衡杠杆基本 达到水平状态；若安装籽晶杆一侧偏轻，平衡杠杆向右倾斜，则调节配重块向左侧移动，直到平衡杠杆基本达到水平状态；
    当平衡杠杆达到基本水平状态时，此时水平角度传感器显示数值不为零，可以通过清零操作，使水平角度传感器显示和输出为零；至此整个平衡系统初步水平基准已校验好；
    通过长晶控制开关，使压电晶体称重长晶装置整体下降，使籽晶缓慢接触全熔液面完成引晶操作；此时，通过水平角度传感器进行清零操作，再次清零，并切换到自动长晶生长程序；在自动长晶过程开始后，压电晶体称重长晶装置同步向上提拉，缓慢的进行晶体结晶生长；在整个长晶过程中，检测杠杆偏移角度的数值，来反馈晶体外形直径的变化；并通过控制加热温度来控制晶体生长的速度，从而达到长晶要求。
  10. 一种压电晶体称重长晶装置，其特征在于：将权利要求2中的水平角度传感器(4)替换为电阻应变传感器或测力传感器。
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