WO2022143566A1 - Light-emitting device and preparation method therefor - Google Patents

Light-emitting device and preparation method therefor Download PDF

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WO2022143566A1
WO2022143566A1 PCT/CN2021/141797 CN2021141797W WO2022143566A1 WO 2022143566 A1 WO2022143566 A1 WO 2022143566A1 CN 2021141797 W CN2021141797 W CN 2021141797W WO 2022143566 A1 WO2022143566 A1 WO 2022143566A1
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light
electron transport
transport layer
emitting device
preparing
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PCT/CN2021/141797
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French (fr)
Chinese (zh)
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王天锋
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Tcl科技集团股份有限公司
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/115OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising active inorganic nanostructures, e.g. luminescent quantum dots
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14Carrier transporting layers
    • H10K50/16Electron transporting layers

Definitions

  • the present application relates to the technical field of display devices, and in particular, to a light-emitting device and a preparation method thereof.
  • Quantum dots are nanocrystalline particles with a radius smaller than or close to the Bohr exciton radius, and their size and diameter are generally between one. Quantum dots have quantum confinement effect and can emit fluorescence when excited. Moreover, quantum dots have unique luminescence characteristics such as wide excitation peak, narrow emission peak, and tunable luminescence spectrum, which make quantum dot materials have broad application prospects in the field of optoelectronic luminescence. Quantum dot light-emitting diode (QLED) is a new type of display technology that has emerged rapidly in recent years. Quantum dot light-emitting diode is a device that uses colloidal quantum dots as the light-emitting layer. The quantum dot light-emitting layer is introduced between different conductive materials to obtain the required wavelength of light. Quantum dot light-emitting diodes have the advantages of high color gamut, self-luminescence, low startup voltage, and fast response speed.
  • OLED devices generally adopt a multi-layer device structure, and the quantum dot light-emitting layer mostly adopts quantum dot nanomaterials with a core-shell structure.
  • the organic surface ligands of quantum dot nanoparticles and the refined core-shell structure inside them make the annealing temperature not too high, so the interface roughness of the formed quantum dot layer is relatively high.
  • the annealing temperature of the quantum dot layer also limits the annealing temperature of its adjacent electron transport layer ETL, making it difficult for the electron transport material to achieve a good crystallization temperature, resulting in discontinuous internal structure of the electron transport layer and reducing the electron transport mobility.
  • the charge accumulation center is easily formed at the interface gap, which accelerates the aging of the material and seriously affects the life of the device.
  • One of the purposes of the embodiments of the present application is to provide a light-emitting device and a preparation method thereof, aiming at solving the problems of poor interfacial fusion between the electron transport layer and the adjacent functional layer, affecting the electron injection efficiency, and easily forming charge accumulation .
  • a method for preparing a light-emitting device comprising the following steps:
  • the electron transport layer comprising a metal oxide transport material
  • a quantum dot light-emitting layer and an anode are sequentially prepared on the side surface of the electron transport layer away from the cathode to obtain a light-emitting device.
  • a light-emitting device is provided, and the light-emitting device is manufactured by the above-mentioned method.
  • the beneficial effect of the method for preparing a light-emitting device is that: after preparing the metal oxide electron transport layer on the surface of the cathode, the electron transport layer is subjected to the first ultraviolet light irradiation treatment, and through the ultraviolet light irradiation treatment, electron
  • the metal oxide in the transport layer has a strong absorption effect on ultraviolet and visible light, which leads to an increase in the internal temperature of the electron transport layer, and the bonding electrons are activated, which promotes the internal bonding and crystal regrowth in the electron transport layer.
  • the UV light treatment promotes the fusion of the metal oxide electron transport material and the electrode, reduces the potential barrier, and improves the electron injection efficiency.
  • the electron transport layer with a flatter surface is conducive to the subsequent preparation of the quantum dot light-emitting layer on its surface, which makes the interface between the quantum dot layer and the quantum dot layer have better bonding performance, improves the efficiency of electron transport and injection, and avoids the accumulation of charges at the interface. and safety performance.
  • the beneficial effects of the light-emitting device provided by the embodiments of the present application are that the first ultraviolet irradiation treatment is performed after the electron transport layer is prepared on the surface of the cathode, which promotes the fusion of the metal oxide electron transport material and the electrode, reduces the potential barrier, and improves the Electron injection efficiency. At the same time, the internal bonding and crystal regrowth in the electron transport layer are promoted, the internal physical structure defects and surface roughness of the electron transport layer are reduced, and the electron mobility in the electron transport layer is improved, thereby improving the efficiency and stability of optoelectronic devices. Extends the device life for a long time.
  • FIG. 1 is a schematic flowchart of a method for preparing a light-emitting device provided in an embodiment of the present application
  • FIG. 2 is a schematic structural diagram of a quantum dot light-emitting diode provided by an embodiment of the present application
  • Example 3 is a graph of the efficiency of the quantum dot light-emitting diodes provided in Example 1 and Comparative Example 1 of the present application;
  • Example 4 is a current density-voltage curve diagram of the quantum dot light-emitting diodes provided in Example 1 and Comparative Example 1 of the present application;
  • FIG. 5 is a graph showing the brightness of the quantum dot light-emitting diodes provided in Example 1 and Comparative Example 1 of the present application.
  • At least one means one or more
  • plural items means two or more.
  • At least one item(s) below” or similar expressions thereof refer to any combination of these items, including any combination of single item(s) or plural items(s).
  • at least one (one) of a, b, or c or, “at least one (one) of a, b, and c” can mean: a,b,c,a-b( That is, a and b), a-c, b-c, or a-b-c, where a, b, and c may be single or multiple, respectively.
  • a first aspect of an embodiment of the present application provides a method for preparing a light-emitting device, including the following steps:
  • a quantum dot light-emitting layer and an anode are sequentially prepared on the side surface of the electron transport layer away from the cathode to obtain a light-emitting device.
  • the electron transport layer is subjected to a first ultraviolet light irradiation treatment, and the metal oxide in the electron transport layer is oxidized by the ultraviolet light irradiation treatment.
  • the material has a strong absorption effect on ultraviolet and visible light, which leads to an increase in the internal temperature of the electron transport layer, and the bonding electrons are activated, which promotes the internal bonding and crystal growth in the electron transport layer.
  • the UV light treatment promotes the fusion of the metal oxide electron transport material and the electrode, reduces the potential barrier, and improves the electron injection efficiency.
  • the electron transport layer with a flatter surface is conducive to the subsequent preparation of the quantum dot light-emitting layer on its surface, which makes the interface between the quantum dot layer and the quantum dot layer have better bonding performance, improves the efficiency of electron transport and injection, and avoids the accumulation of charges at the interface. and safety performance.
  • the substrate on which the cathode is deposited is obtained.
  • the cathode includes at least one metal material or at least two alloy materials among Mg, Ag, Al, and Ca. Under the condition of ultraviolet light irradiation, these cathode metal materials and metal oxide electron transport materials have a fusion effect. Well, the electron injection barrier can be reduced and the efficiency of electron injection into optoelectronic devices can be improved.
  • the thickness of the cathode is 10-200 nm. In the embodiments of the present application, the thickness of the cathode is selected to be below 200 nm, and when the ultraviolet light wave is irradiated from the cathode side, the thickness is selected to be below 100 nm, so as to avoid the attenuation of the transition of the irradiation light by the cathode metal layer.
  • a metal oxide electron transport layer is prepared on the side surface of the cathode facing away from the substrate.
  • the metal oxide transport material is selected from at least one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , Ta 2 O 3 ; these metal oxide materials have high electron mobility and are After excitation by ultraviolet light, it has good fusion with the cathode, which is beneficial to reduce the potential barrier and improve the efficiency of electron injection.
  • the metal oxide transport material may be one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , and Ta 2 O 3 , or a mixture of two or more of them.
  • the metal oxide transport material is selected from at least one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , Ta 2 O 3 doped with metal elements, wherein the metal elements include aluminum, magnesium , at least one of lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, and cobalt.
  • the metal oxide transport materials of the embodiments of the present application are doped with metal elements such as aluminum, magnesium, lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, cobalt, etc., which are beneficial to improve the electron transport and migration efficiency of the materials.
  • the metal oxide transport material is doped with one of aluminum, magnesium, lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, and cobalt, or any two or more metal elements.
  • the particle size of the metal transport material is less than or equal to 10 nm, and the transport material with small particle size is not only more favorable for forming an electron transport layer with dense, uniform thickness and smooth surface; and the metal oxide material with small particle size has more advantages.
  • the large specific surface area has a better fusion effect with the metal electrode layer after being excited by ultraviolet light, which is more conducive to reducing the potential barrier and improving the electron injection efficiency.
  • the electron transport layer is subjected to a first ultraviolet light irradiation treatment.
  • the first step of irradiating with ultraviolet light includes: irradiating the electron transport layer for 10-60 minutes under the condition that the wavelength of ultraviolet light is 250-420 nm and the light wave density is 10-300 mJ/cm 2 .
  • the ultraviolet irradiation treatment conditions in the examples of the present application can not only promote the internal bonding and crystal regrowth of the metal oxide transport material in the electron transport layer, but also facilitate the interface fusion between the electron transport layer and the metal cathode layer. , make the bonding tighter, reduce the interface gap, optimize the interface roughness, and make the electron injection from the cathode to the electron transport layer more favorable.
  • the step of the first ultraviolet light irradiation treatment includes: using ultraviolet light waves with a wavelength of 320 to 420 nm and an optical wave density of 10 to 150 mJ/cm 2 to perform irradiation treatment from one side of the electron transport layer for 10 to 60 minutes.
  • the ultraviolet light wave in the embodiment of the present application is from one side of the electron transport layer
  • the metal oxide electron transport material can directly absorb the UV light to carry out crystal regrowth and internal bonding, and the attenuation of light is small, so a relatively long wavelength can be used for convenience. The treatment effect can be achieved, and the influence on the material is small.
  • the step of the first ultraviolet irradiation treatment includes: using ultraviolet light waves with a wavelength of 250-320 nm and an optical wave density of 100-300 mJ/cm 2 to perform irradiation treatment from the cathode side for 10-60 minutes.
  • the ultraviolet light wave in the embodiment of the present application is from one side of the cathode layer, since there are many free electrons in the metal cathode layer, the light loss is large, and the light passing through the cathode metal layer is greatly attenuated. At this time, it is necessary to use UV light with a shorter wavelength and a higher density processing to achieve better processing results.
  • the conditions for the first ultraviolet light irradiation treatment further include: performing the treatment in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C.
  • ultraviolet light irradiation treatment is performed in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C., so as to avoid the influence on the material properties during the light treatment process caused by excessive water content in the environment.
  • the heating environment of 80-120 °C is conducive to promoting the formation of bonds between the electrons excited by O and the zinc ions, and is also conducive to the activation of the bonding electrons.
  • the thickness of the electron transport layer is 10-200 nm, which meets the device performance requirements and structural requirements. In some specific embodiments, when the thickness of the electron transport layer is less than 80 nm, the duration of the ultraviolet light irradiation treatment is 15 minutes to 45 minutes. In the examples of the present application, when the thickness of the electron transport layer is less than 80 nm, the light wave energy of the low-thickness material layer is relatively easy to penetrate. At this time, the irradiation time required to achieve the treatment effect is short, and the duration of the ultraviolet light irradiation treatment is 15 minutes to 45 minutes. minutes are appropriate.
  • the duration of the ultraviolet light irradiation treatment is 30 minutes to 90 minutes.
  • the thickness of the electron transport layer is higher than 80 nm, the light wave energy of the thick material layer is difficult to penetrate, and at this time, the illumination time required to achieve the treatment effect is longer, and the duration of the ultraviolet light irradiation treatment is 30 minutes to 90 minutes. minutes are appropriate.
  • the step of preparing the quantum dot light-emitting layer on the side surface of the electron transport layer away from the cathode includes: after the quantum dot material is deposited on the side surface of the electron transport layer away from the cathode, performing a second ultraviolet light irradiation treatment, A quantum dot light-emitting layer is formed.
  • a second ultraviolet light irradiation treatment is performed after the quantum dot material is deposited on the surface of the electron transport layer. Through the ultraviolet light irradiation treatment, the electrons of O in the metal oxide transport material in the electron transport layer are excited and the quantum dot light-emitting layer is excited.
  • Active metal elements such as Zn form complexes, and the formation of complex bonds optimizes the ETL-QD interface, reduces interface defects, and facilitates the injection of electrons from the electron transport layer to the interior of the quantum dot light-emitting layer.
  • the electrons of O are coordinated with the metal of the quantum dot material, the bonding defects inside the electron transport layer are increased, thereby improving the electron mobility in the electron transport layer.
  • the formed complex has a strong absorption effect on UV, which leads to an increase in the temperature at the interface between the electron transport layer and the quantum dot light-emitting layer, and the bonding electrons are activated, which promotes the re-growth of crystals in the electron transport layer and reduces the electron transport layer.
  • the quantum dot material has a core-shell structure, and the outer shell layer of the quantum dot material contains zinc. Since most of the current quantum dot synthesis uses II-VI group elements, Zn element and VI group elements have better matching in terms of lattice matching and band gap, which can cover the entire visible light band, and the outer shell of the quantum dot material
  • the zinc-containing outer shell layer has suitable chemical activity, high flexibility and controllability, wide band gap, good exciton binding, high quantum efficiency, and good water-oxygen stability. In addition, the coordination effect of zinc element and O electrons is better and more stable.
  • the electrons of O of the metal oxide transport material in the electron transport layer are excited, and it is easy to form a complex with the Zn element in the QD, that is, a ZnO complex.
  • the formation of ZnO complex bonds facilitates electron injection and improves electron mobility in the electron transport layer.
  • the ZnO complex has a strong absorption effect on the wavelength of ultraviolet light, which is conducive to activating the bonding electrons, making the crystal in the ETL grow again, reducing the internal physical structure defects and surface roughness of the ETL, which is conducive to the injection of electrons and reduces the accumulation of electrons. , slow down the material aging, and help to improve the life of the device.
  • the outer shell layer of the quantum dot material includes: at least one of ZnS, ZnSe, ZnTe, CdZnS, ZnCdSe, or an alloy material formed by at least two kinds of the outer shell materials, all of which contain zinc element, and the zinc element has high activity, It has a good coordination effect with the excited O electrons in the electron transport material.
  • the thickness of the outer shell layer of the quantum dot material is 0.2-6.0 nm, which ensures the stability of the inner layer material of the quantum dot and the carrier injection effect, and at the same time ensures the zinc element and the metal oxide in the outer shell layer. Coordination effects of O element in transport materials.
  • the thickness of the quantum dot light-emitting layer is 8-100 nm, which meets the requirements of device performance and structure.
  • the second ultraviolet irradiation treatment step includes: irradiating the quantum dot material of the quantum dot light-emitting layer for 10 to 60 minutes under the condition that the wavelength of the ultraviolet light is 300-420 nm and the light wave density is 10-300 mJ/cm 2 .
  • the conditions of the second ultraviolet irradiation treatment include: performing in an environment where the H 2 O content is less than 1 ppm.
  • the ultraviolet illumination conditions for the quantum dot light-emitting layer after the quantum dot material is deposited is conducive to promoting the excitation of the electrons of O in the metal oxide transport material in the electron transport layer and the Zn in the quantum dot light-emitting layer.
  • the formation of complexes with other active metal elements optimizes the ETL-QD interface through the formation of complex bonds, reduces interface defects, and facilitates the injection of electrons from the ETL to the interior of the QD.
  • the characteristics of the core-shell structure quantum dot materials are fully considered. In order to avoid the damaging effect of ultraviolet light energy on the quantum dot materials, light with a longer wavelength and a lower light wave energy is used for processing.
  • the wavelength of ultraviolet light irradiation treatment is 300-355 nm
  • the optical wave density is 50-150 mJ/cm 2 .
  • the bond energy of ZnS is about 3.5eV
  • the bond energy of ZnO is about 3.3eV.
  • the transfer of the bonding charges of electron transport materials such as ZnS and ZnO in the material shell makes the zinc element in the shell layer and the O element in the electron transport material have a better coordination effect, forming a complex between the electron transport material and the quantum dot material.
  • the wavelength of ultraviolet light irradiation treatment is 320-375 nm, and the optical wave density is 30-120 mJ/cm 2 .
  • the bond energy of ZnSe is about 2.9eV, and the bond energy of ZnO is about 3.3eV, and the wavelength of ultraviolet light irradiation treatment is 320 ⁇ 375nm, and the light wave density is 30 ⁇ 120mJ/ cm2 .
  • the wavelength of ultraviolet light irradiation treatment is 350-375 nm
  • the optical wave density is 30-150 mJ/cm 2 .
  • the bond energy of ZnSeS is about 2.7eV
  • the bond energy of ZnO is about 3.3eV
  • the wavelength of ultraviolet light irradiation treatment is 350 ⁇ 375nm
  • the optical wave density is 30 ⁇ 150mJ/ cm2 under the conditions It can cause the transfer of bonding charges of electron transport materials such as ZnSeS and ZnO in the shell of the quantum dot material, so that the zinc element in the shell layer and the O element in the electron transport material have a better coordination effect, forming the electron transport material and the quantum dot material. complex.
  • the method further includes the steps of: preparing a hole transport layer on the surface of the quantum dot light-emitting layer facing away from the electron transport layer, and preparing an anode on the surface of the hole transport layer facing away from the quantum dot light-emitting layer.
  • the preparation of the light-emitting device in the embodiments of the present application includes the steps:
  • step S40 in order to obtain a high-quality light-emitting device, the substrate needs to undergo a pretreatment process, including the steps of: cleaning the substrate with a cleaning agent to preliminarily remove the stains on the surface, and then sequentially cleaning the substrate with deionized water, acetone, and anhydrous Ultrasonic cleaning was performed in ethanol and deionized water for 20 minutes to remove impurities on the surface, and finally dried with high-purity nitrogen.
  • a pretreatment process including the steps of: cleaning the substrate with a cleaning agent to preliminarily remove the stains on the surface, and then sequentially cleaning the substrate with deionized water, acetone, and anhydrous Ultrasonic cleaning was performed in ethanol and deionized water for 20 minutes to remove impurities on the surface, and finally dried with high-purity nitrogen.
  • the step of preparing the electron transport layer includes: the electron transport layer is a metal oxide transport material, and on the cathode, a solution of the metal oxide transport material prepared with a certain concentration is passed through drop coating, spin coating, soaking, Coating, printing, evaporation and other processes are used to deposit films, and the thickness of the electron transport layer is controlled by adjusting the concentration of the solution, the deposition speed (for example, the rotation speed is between 3000 and 5000 rpm) and the deposition time, about 20 to 60 nm. Annealing at 150° C. to 200° C. to form a film, fully removing the solvent, and obtaining an electron transport layer.
  • the deposition speed for example, the rotation speed is between 3000 and 5000 rpm
  • the step of performing the first ultraviolet light irradiation treatment on the electron transport layer includes: in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C., the wavelength of the ultraviolet light is 250-420 nm, The electron transport layer is irradiated vertically for 10 to 60 minutes by ultraviolet light with an optical wave density of 10 to 300 mJ/cm 2 .
  • the step of preparing the quantum dot light-emitting layer includes: depositing a prepared solution of a certain concentration of light-emitting substance on the electron transport layer by processes such as drop coating, spin coating, soaking, coating, printing, evaporation, etc.
  • the film is formed, and the thickness of the light-emitting layer is controlled by adjusting the concentration of the solution, the deposition speed and the deposition time, about 20-60 nm, and dried at an appropriate temperature.
  • the step of performing the second ultraviolet light treatment on the quantum dot light-emitting layer includes: in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C., the wavelength of the ultraviolet light is 300-420 nm, The electron transport layer is irradiated vertically for 10 to 60 minutes by ultraviolet light with an optical wave density of 10 to 300 mJ/cm 2 .
  • the step of preparing the hole transport layer includes: on the surface of the quantum dot light-emitting layer, applying the prepared solution of the hole transport material by drop coating, spin coating, soaking, coating, printing, evaporation It is deposited into a film by other processes; the film thickness is controlled by adjusting the concentration of the solution, the deposition speed and the deposition time, and then thermal annealing is performed at an appropriate temperature.
  • step S100 the substrate on which each functional layer has been deposited is placed in an evaporation chamber to deposit and prepare an anode.
  • the obtained QLED device is packaged, and the package process can be packaged by a common machine or by manual packaging.
  • the oxygen content and water content are both lower than 0.1ppm to ensure the stability of the device.
  • a second aspect of the embodiments of the present application provides a light-emitting device, and the light-emitting device is manufactured by the above method.
  • the first ultraviolet irradiation treatment is performed after the electron transport layer is prepared on the surface of the cathode, the fusion of the metal oxide electron transport material and the electrode is promoted, the potential barrier is reduced, and the electron injection efficiency is improved .
  • the internal bonding and crystal regrowth in the electron transport layer are promoted, the internal physical structure defects and surface roughness of the electron transport layer are reduced, and the electron mobility in the electron transport layer is improved, thereby improving the efficiency and stability of optoelectronic devices. Extends the device life for a long time.
  • the light emitting device includes a stacked structure of an anode and a cathode disposed oppositely, a light emitting layer disposed between the anode and the cathode, and the cathode disposed on the substrate.
  • a hole functional layer such as a hole injection layer, a hole transport layer, and an electron blocking layer can also be arranged between the anode and the light-emitting layer; an electron transport layer, an electron injection layer, and a hole can also be arranged between the cathode and the light-emitting layer.
  • Electronic functional layers such as barrier layers are shown in Figure 2.
  • the light emitting device includes a substrate, a cathode disposed on the surface of the substrate, an electron transport layer disposed on the surface of the cathode, a light emitting layer disposed on the surface of the electron transport layer, holes disposed on the surface of the light emitting layer
  • the transport layer is an anode disposed on the surface of the hole transport layer.
  • the choice of the substrate is not limited, and a rigid substrate or a flexible substrate may be used.
  • the rigid substrate includes, but is not limited to, one or more of glass and metal foil.
  • the flexible substrate includes, but is not limited to, polyethylene terephthalate (PET), polyethylene terephthalate (PEN), polyetheretherketone (PEEK), polystyrene (PS), polyethersulfone (PES), polycarbonate (PC), polyarylate (PAT), polyarylate (PAR), polyimide (PI), polyvinyl chloride (PV), poly One or more of ethylene (PE), polyvinylpyrrolidone (PVP), and textile fibers.
  • PET polyethylene terephthalate
  • PEN polyethylene terephthalate
  • PEEK polyetheretherketone
  • PS polystyrene
  • PS polyethersulfone
  • PC polycarbonate
  • PAT polyarylate
  • PAR polyarylate
  • PI polyimide
  • PV polyviny
  • the choice of anode material is not limited and can be selected from doped metal oxides, including but not limited to indium doped tin oxide (ITO), fluorine doped tin oxide (FTO), antimony doped tin oxide (ATO), Aluminum-Doped Zinc Oxide (AZO), Gallium-Doped Zinc Oxide (GZO), Indium-Doped Zinc Oxide (IZO), Magnesium-Doped Zinc Oxide (MZO), Aluminum-Doped Magnesium Oxide (AMO) one or more.
  • doped metal oxides including but not limited to indium doped tin oxide (ITO), fluorine doped tin oxide (FTO), antimony doped tin oxide (ATO), Aluminum-Doped Zinc Oxide (AZO), Gallium-Doped Zinc Oxide (GZO), Indium-Doped Zinc Oxide (IZO), Magnesium-Doped Zinc Oxide (MZO), Aluminum-Doped Magnesium Oxide (AMO)
  • the hole injection layer includes, but is not limited to, one or more of organic hole injection materials, doped or undoped transition metal oxides, doped or undoped metal chalcogenides .
  • organic hole injection materials include, but are not limited to, poly(3,4-ethylenedioxythiophene)-polystyrenesulfonic acid (PEDOT:PSS), copper phthalocyanine (CuPc), 2,3, 5,6-Tetrafluoro-7,7',8,8'-tetracyanoquinone-dimethane (F4-TCNQ), 2,3,6,7,10,11-hexacyano-1,4,5 One or more of ,8,9,12-hexaazatriphenylene (HATCN).
  • PDOT:PSS poly(3,4-ethylenedioxythiophene)-polystyrenesulfonic acid
  • CuPc copper phthalocyanine
  • F4-TCNQ 2,3,6,7,10,11-hexacyano-1,
  • transition metal oxides include, but are not limited to, one or more of MoO 3 , VO 2 , WO 3 , CrO 3 , and CuO.
  • the metal chalcogenide compounds include, but are not limited to, one or more of MoS 2 , MoSe 2 , WS 2 , WSe 2 , and CuS.
  • the hole transport layer may be selected from organic materials with hole transport capability and/or inorganic materials with hole transport capability.
  • the organic material with hole transport capability includes, but is not limited to, poly(9,9-dioctylfluorene-CO-N-(4-butylphenyl)diphenylamine) (TFB), poly(9,9-dioctylfluorene-CO-N-(4-butylphenyl)diphenylamine) Vinylcarbazole (PVK), poly(N,N'bis(4-butylphenyl)-N,N'-bis(phenyl)benzidine) (poly-TPD), poly(9,9-dioctyl) Fluorene-co-bis-N,N-phenyl-1,4-phenylenediamine) (PFB), 4,4,4"-tris(carbazol-9-yl)triphenylamine (TCTA), 4, 4'-bis
  • inorganic materials with hole transport capability include but are not limited to doped graphene, undoped graphene, C60, doped or undoped MoO 3 , VO 2 One or more of , WO 3 , CrO 3 , CuO, MoS 2 , MoSe 2 , WS 2 , WSe 2 , and CuS.
  • the light-emitting layer includes a quantum dot material
  • the quantum dot material is a quantum dot material with a core-shell structure
  • the outer shell layer of the quantum dot material contains zinc element.
  • the outer shell layer of the quantum dot material includes: at least one of ZnS, ZnSe, ZnTe, CdZnS, and ZnCdSe, or an alloy material formed by at least two of them.
  • the particle size of the quantum dot material is in the range of 2 to 10 nm. If the particle size is too small, the film-forming property of the quantum dot material becomes poor, and the energy resonance transfer effect between the quantum dot particles is significant, which is not conducive to the application of the material. , the particle size is too large, the quantum effect of the quantum dot material is weakened, resulting in a decrease in the optoelectronic properties of the material.
  • the material of the electron transport layer adopts the above-mentioned metal oxide transport material.
  • the cathode material may be one or more of various conductive carbon materials, conductive metal oxide materials, and metallic materials.
  • conductive carbon materials include, but are not limited to, doped or undoped carbon nanotubes, doped or undoped graphene, doped or undoped graphene oxide, C60, graphite, carbon fiber, multi- Empty carbon, or a mixture thereof.
  • the conductive metal oxide material includes, but is not limited to, ITO, FTO, ATO, AZO, or mixtures thereof.
  • the metal materials include, but are not limited to, Al, Ag, Cu, Mo, Au, or their alloys; among the metal materials, their forms include but are not limited to dense films, nanowires, nanospheres, nanometers Rods, nano cones, nano hollow spheres, or their mixtures; the cathode is Ag, Al.
  • a light-emitting diode comprising the following preparation steps:
  • step (2) (2) forming an electron transport layer on the Al cathode of step (1): in a glove box (water oxygen content is less than 0.1 ppm), spin-coat ZnO solution (concentration is 45 mg/mL, solvent is ethanol) on the ITO cathode , spin coating at 3000rpm for 30s and then anneal at 80°C for 30min to form an electron transport layer.
  • a glove box water oxygen content is less than 0.1 ppm
  • spin-coat ZnO solution concentration is 45 mg/mL, solvent is ethanol
  • the electron transport layer is irradiated vertically from the electron transport layer side, UV wavelength 400 nm, intensity 100 mJ/cm 2 , and UV time 30 min.
  • the light-emitting layer is irradiated vertically for 10 minutes by UV light with a UV wavelength of 320 nm and an intensity of 150 mJ/cm 2 .
  • a hole transport layer on the light-emitting layer: under an electric field, spin-coat TFB solution (concentration of 8 mg/mL, solvent is chlorobenzene) on the light-emitting layer, spin at 3000 rpm for 30 s, and then anneal at 80 °C for 30 min.
  • a hole transport layer is formed; wherein the direction of action of the electric field is perpendicular to the anode and towards the hole transport layer, and the electric field strength is 10 4 V/cm.
  • An ITO anode is formed on the hole injection layer.
  • a light-emitting diode the difference between its preparation steps and Example 1 is: in step (3), vertical UV irradiation is performed from the cathode side, UV wavelength 300nm, intensity 200mJ/cm 2 , and UV time 30min.
  • a light-emitting diode the preparation steps of which are different from those in Example 1 are: in step (2), a TiO2 solution is used to spin-coat on the light-emitting layer.
  • a light-emitting diode the preparation steps of which are different from those in Example 1 are: ZnMgO is used in step (2).
  • a light-emitting diode the preparation steps of which are different from those in Example 1 are: CdZnSe/ZnSe is used in step (4).
  • the ultraviolet illumination conditions are as follows: UV light with a UV wavelength of 340 nm and an intensity of 100 mJ/cm 2 is used to vertically irradiate the light-emitting layer for 10 minutes.
  • a light-emitting diode the preparation steps of which are different from those in Example 1 are: CdZnSe/ZnSeS is used in step (4).
  • the ultraviolet illumination conditions are as follows: UV light with a UV wavelength of 370 nm and an intensity of 120 mJ/cm 2 is used to vertically irradiate the light-emitting layer for 10 minutes.
  • a light-emitting diode whose preparation steps differ from those of Example 1 in that it is not UV-treated in steps (3) and (5).
  • a light-emitting diode the preparation steps of which are different from those in Example 1 are: no UV treatment in step (5).
  • a light-emitting diode the preparation steps of which are different from those in Example 1 are that step (3) UV treatment is not performed.
  • the specific calculation formula is as follows:
  • ⁇ e is the optical output coupling efficiency
  • ⁇ r is the ratio of the number of recombined carriers to the number of injected carriers
  • is the ratio of the number of excitons that generate photons to the total number of excitons
  • KR is the radiation process rate
  • KNR is the nonradiative process rate.
  • Test conditions At room temperature, the air humidity is 30-60%.
  • Luminance (L) is the ratio (cd/m2) of the area of the luminous flux in the specified direction to the luminous flux perpendicular to the specified direction of the light-emitting surface.
  • the life test adopts the constant current method, under the constant current of 50mA/ cm2 , the silicon photosystem is used to test the brightness change of the device, and the time when the brightness of the device starts from the highest point and decays to 95% of the highest brightness is recorded LT95, Then extrapolate the 1000nit LT95S life of the device through the empirical formula:
  • This method is convenient for comparing the lifetime of devices with different brightness levels, and has a wide range of applications in practical optoelectronic devices.

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Abstract

Disclosed are a light-emitting device and a preparation method therefor. The preparation method for the light-emitting device comprises the following steps: obtaining a substrate deposited with a negative electrode; preparing an electron transport layer on the surface of the negative electrode away from the substrate, the electron transport layer comprising a metal oxide transport material; and after performing first ultraviolet irradiation treatment on the electron transport layer, sequentially preparing a quantum dot light-emitting layer and a positive electrode on the side surface of the electron transport layer away from the negative electrode, thereby obtaining the light-emitting device. According to the preparation method for the light-emitting device of the present application, after a metal oxide electron transport layer is prepared on a surface of a negative electrode, by means of ultraviolet irradiation treatment, fusion between a metal oxide electron transport material and the electrode is promoted, the barrier is reduced, and the electron injection efficiency is improved. In addition, internal bonding and a second crystal growth in the electron transport layer are promoted, so that the surface of the electron transport layer is smoother, the interface roughness is reduced, the interface gap is optimized, and the impact of charge accumulation on the service life of the device is avoided.

Description

发光器件及其制备方法Light-emitting device and preparation method thereof
本申请要求于2020年12月31日在中国专利局提交的、申请号为202011633001.1、发明名称为“发光器件及其制备方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application with the application number 202011633001.1 and the invention title "Light-emitting device and its preparation method", which was filed in the China Patent Office on December 31, 2020, the entire contents of which are incorporated herein by reference. middle.
技术领域technical field
本申请涉及显示设备技术领域,具体涉及一种发光器件及其制备方法。The present application relates to the technical field of display devices, and in particular, to a light-emitting device and a preparation method thereof.
背景技术Background technique
这里的陈述仅提供与本申请有关的背景信息,而不必然构成现有技术。量子点是半径小于或者接近波尔激子半径的纳米晶颗粒,其尺寸粒径一般介于一之间。量子点具有量子限域效应,受激发后可以发射荧光。而且量子点具有激发峰宽、发射峰窄、发光光谱可调等独特的发光特性,使得量子点材料在光电发光领域具有广阔的应用前景。量子点发光二极管(QLED)是近年来迅速兴起的一种新型显示技术,量子点发光二极管是将胶体量子点作为发光层的器件,在不同的导电材料之间引入量子点发光层从而得到所需要波长的光。量子点发光二极管具有色域高、自发光、启动电压低、响应速度快等优点。The statements herein merely provide background information related to the present application and do not necessarily constitute prior art. Quantum dots are nanocrystalline particles with a radius smaller than or close to the Bohr exciton radius, and their size and diameter are generally between one. Quantum dots have quantum confinement effect and can emit fluorescence when excited. Moreover, quantum dots have unique luminescence characteristics such as wide excitation peak, narrow emission peak, and tunable luminescence spectrum, which make quantum dot materials have broad application prospects in the field of optoelectronic luminescence. Quantum dot light-emitting diode (QLED) is a new type of display technology that has emerged rapidly in recent years. Quantum dot light-emitting diode is a device that uses colloidal quantum dots as the light-emitting layer. The quantum dot light-emitting layer is introduced between different conductive materials to obtain the required wavelength of light. Quantum dot light-emitting diodes have the advantages of high color gamut, self-luminescence, low startup voltage, and fast response speed.
目前OLED器件为了平衡载流子注入,一般采用多层的器件结构,量子点发光层多采用核壳结构的量子点纳米材料。量子点发光二极管中,量子点纳米颗粒的有机表面配体和其内部精细化的核壳结构,导致其退火温度不能过高,所以形成的量子点层界面粗糙度较高。另外,量子点层的退火温度也限制了其相邻电子传输层ETL的退火温度,使得电子传输材料难以达到较好的结晶温度,导致电子传输层内部结构不连续,降低了电子传输迁移率,增大了界面粗糙度。然而,量子点发光层和电子传输层之间高的界面粗糙度,影响了载流子注入到量子点发光层的连续性,注入效率低,降低了载流子注入性能。并且,界面缝隙处易形成电荷累积中心,加速材料老化,严重影响了器件寿命。At present, in order to balance the injection of carriers, OLED devices generally adopt a multi-layer device structure, and the quantum dot light-emitting layer mostly adopts quantum dot nanomaterials with a core-shell structure. In quantum dot light-emitting diodes, the organic surface ligands of quantum dot nanoparticles and the refined core-shell structure inside them make the annealing temperature not too high, so the interface roughness of the formed quantum dot layer is relatively high. In addition, the annealing temperature of the quantum dot layer also limits the annealing temperature of its adjacent electron transport layer ETL, making it difficult for the electron transport material to achieve a good crystallization temperature, resulting in discontinuous internal structure of the electron transport layer and reducing the electron transport mobility. Increased interface roughness. However, the high interface roughness between the QD light-emitting layer and the electron transport layer affects the continuity of carrier injection into the QD light-emitting layer, resulting in low injection efficiency and reduced carrier injection performance. In addition, the charge accumulation center is easily formed at the interface gap, which accelerates the aging of the material and seriously affects the life of the device.
技术问题technical problem
本申请实施例的目的之一在于:提供一种发光器件及其制备方法,旨在解决电子传输层与相邻功能层之间的界面融合差,影响电子注入效率,且易形成电荷累积的问题。One of the purposes of the embodiments of the present application is to provide a light-emitting device and a preparation method thereof, aiming at solving the problems of poor interfacial fusion between the electron transport layer and the adjacent functional layer, affecting the electron injection efficiency, and easily forming charge accumulation .
技术解决方案technical solutions
为解决上述技术问题,本申请实施例采用的技术方案是:In order to solve the above-mentioned technical problems, the technical solutions adopted in the embodiments of the present application are:
第一方面,提供了一种发光器件的制备方法,包括以下步骤:In a first aspect, a method for preparing a light-emitting device is provided, comprising the following steps:
获取沉积有阴极的衬底;obtaining a substrate on which the cathode is deposited;
在所述阴极背离衬底的表面制备电子传输层,所述电子传输层中包括金属氧化物传输材料;preparing an electron transport layer on the surface of the cathode facing away from the substrate, the electron transport layer comprising a metal oxide transport material;
对所述电子传输层进行第一次紫外光照射处理后,在所述电子传输层背离所述阴极的侧表面依次制备量子点发光层和阳极,得到发光器件。After the electron transport layer is irradiated with ultraviolet light for the first time, a quantum dot light-emitting layer and an anode are sequentially prepared on the side surface of the electron transport layer away from the cathode to obtain a light-emitting device.
第二方面,提供了一种发光器件,所述发光器件由上述的方法制得。In a second aspect, a light-emitting device is provided, and the light-emitting device is manufactured by the above-mentioned method.
本申请实施例提供的发光器件的制备方法的有益效果在于:在阴极表面制备金属氧化物电子传输层后,对所述电子传输层进行第一次紫外光照射处理,通过紫外光照射处理,电子传输层中金属氧化物对紫外可见光有较强的吸收作用,导致电子传输层内部温度升高,成键电子被激活,促进电子传输层中内部成键和晶体再次生长。减少金属氧化物结构缺陷,降低晶体材料的表面粗糙度,从而使电子传输层表面更平整,界面粗糙度降低,与相邻阴极结合性能更好,界面缝隙优化,避免电荷积累对器件寿命的影响。同时,紫外光照处理促进金属氧化物电子传输材料与电极的融合,减小势垒,提高电子注入效率。另外,表面更平整的电子传输层有利于后续量子点发光层在其表面制备,使其与量子点层界面结合性能更好,提高电子的传输和注入效率,避免电荷在界面处累积对器件寿命和安全性能的影响。The beneficial effect of the method for preparing a light-emitting device provided by the embodiment of the present application is that: after preparing the metal oxide electron transport layer on the surface of the cathode, the electron transport layer is subjected to the first ultraviolet light irradiation treatment, and through the ultraviolet light irradiation treatment, electron The metal oxide in the transport layer has a strong absorption effect on ultraviolet and visible light, which leads to an increase in the internal temperature of the electron transport layer, and the bonding electrons are activated, which promotes the internal bonding and crystal regrowth in the electron transport layer. Reduce the structural defects of metal oxides, reduce the surface roughness of crystalline materials, so that the surface of the electron transport layer is smoother, the interface roughness is reduced, the bonding performance with the adjacent cathode is better, the interface gap is optimized, and the impact of charge accumulation on the device life is avoided. . At the same time, the UV light treatment promotes the fusion of the metal oxide electron transport material and the electrode, reduces the potential barrier, and improves the electron injection efficiency. In addition, the electron transport layer with a flatter surface is conducive to the subsequent preparation of the quantum dot light-emitting layer on its surface, which makes the interface between the quantum dot layer and the quantum dot layer have better bonding performance, improves the efficiency of electron transport and injection, and avoids the accumulation of charges at the interface. and safety performance.
本申请实施例提供的发光器件的有益效果在于:由于在阴极表面制备电子传输层后进行了第一次紫外光照处理,促进了金属氧化物电子传输材料与电极的融合,减小势垒,提高电子注入效率。同时,促进了电子传输层中内部成键和晶体再次生长,降低了电子传输层内部物理结构缺陷和表面粗糙度,提高了 电子传输层中电子迁移率,从而提高了光电器件效率和稳定性,延长了器件使用寿命长。The beneficial effects of the light-emitting device provided by the embodiments of the present application are that the first ultraviolet irradiation treatment is performed after the electron transport layer is prepared on the surface of the cathode, which promotes the fusion of the metal oxide electron transport material and the electrode, reduces the potential barrier, and improves the Electron injection efficiency. At the same time, the internal bonding and crystal regrowth in the electron transport layer are promoted, the internal physical structure defects and surface roughness of the electron transport layer are reduced, and the electron mobility in the electron transport layer is improved, thereby improving the efficiency and stability of optoelectronic devices. Extends the device life for a long time.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例或示范性技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其它的附图。In order to illustrate the technical solutions in the embodiments of the present application more clearly, the following briefly introduces the accompanying drawings that are used in the description of the embodiments or exemplary technologies. Obviously, the drawings in the following description are only for the present application. In some embodiments, for those of ordinary skill in the art, other drawings can also be obtained according to these drawings without any creative effort.
图1是本申请实施例提供的发光器件的制备方法的流程示意图;1 is a schematic flowchart of a method for preparing a light-emitting device provided in an embodiment of the present application;
图2是本申请实施例提供的量子点发光二极管的结构示意图;2 is a schematic structural diagram of a quantum dot light-emitting diode provided by an embodiment of the present application;
图3是本申请实施例1和对比例1提供的量子点发光二极管的效率曲线图;3 is a graph of the efficiency of the quantum dot light-emitting diodes provided in Example 1 and Comparative Example 1 of the present application;
图4是本申请实施例1和对比例1提供的量子点发光二极管的电流密度-电压曲线图;4 is a current density-voltage curve diagram of the quantum dot light-emitting diodes provided in Example 1 and Comparative Example 1 of the present application;
图5是本申请实施例1和对比例1提供的量子点发光二极管的亮度曲线图。FIG. 5 is a graph showing the brightness of the quantum dot light-emitting diodes provided in Example 1 and Comparative Example 1 of the present application.
本发明的实施方式Embodiments of the present invention
为了使本申请的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本申请进行进一步详细说明。应当理解,此处所描述的具体实施例仅用以解释本申请,并不用于限定本申请。In order to make the purpose, technical solutions and advantages of the present application more clearly understood, the present application will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application.
本申请中,术语“和/或”,描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B的情况。其中A,B可以是单数或者复数。In this application, the term "and/or", which describes the relationship between related objects, means that there can be three relationships, for example, A and/or B, which can mean that A exists alone, A and B exist at the same time, and B exists alone Happening. where A and B can be singular or plural.
本申请中,“至少一个”是指一个或者多个,“多个”是指两个或两个以上。“以下至少一项(个)”或其类似表达,是指的这些项中的任意组合,包括单项(个)或复数项(个)的任意组合。例如,“a,b,或c中的至少一项(个)”,或,“a,b,和c中的至少一项(个)”,均可以表示:a,b,c,a-b(即a和b),a-c,b-c,或a-b-c, 其中a,b,c分别可以是单个,也可以是多个。In this application, "at least one" means one or more, and "plurality" means two or more. "At least one item(s) below" or similar expressions thereof refer to any combination of these items, including any combination of single item(s) or plural items(s). For example, "at least one (one) of a, b, or c", or, "at least one (one) of a, b, and c", can mean: a,b,c,a-b( That is, a and b), a-c, b-c, or a-b-c, where a, b, and c may be single or multiple, respectively.
应理解,在本申请的各种实施例中,上述各过程的序号的大小并不意味着执行顺序的先后,部分或全部步骤可以并行执行或先后执行,各过程的执行顺序应以其功能和内在逻辑确定,而不应对本申请实施例的实施过程构成任何限定。在本申请实施例中使用的术语是仅仅出于描述特定实施例的目的,而非旨在限制本申请。在本申请实施例和所附权利要求书中所使用的单数形式的“一种”和“该”也旨在包括多数形式,除非上下文清楚地表示其他含义。It should be understood that, in various embodiments of the present application, the size of the sequence numbers of the above-mentioned processes does not imply the sequence of execution, some or all of the steps may be executed in parallel or sequentially, and the execution sequence of each process should be based on its functions and It is determined by the internal logic and should not constitute any limitation on the implementation process of the embodiments of the present application. The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. As used in the embodiments of this application and the appended claims, the singular forms "a" and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise.
为了说明本申请所述的技术方案,以下结合具体附图及实施例进行详细说明。In order to illustrate the technical solutions described in the present application, a detailed description is given below with reference to the specific drawings and embodiments.
如附图1所示,本申请实施例第一方面提供一种发光器件的制备方法,包括以下步骤:As shown in FIG. 1 , a first aspect of an embodiment of the present application provides a method for preparing a light-emitting device, including the following steps:
S10.获取沉积有阴极的衬底;S10. Obtain the substrate on which the cathode is deposited;
S20.在阴极背离衬底的表面制备电子传输层,电子传输层中包括金属氧化物传输材料;S20. Prepare an electron transport layer on the surface of the cathode away from the substrate, and the electron transport layer includes a metal oxide transport material;
S30.对电子传输层进行第一次紫外光照射处理后,在电子传输层背离阴极的侧表面依次制备量子点发光层和阳极,得到发光器件。S30. After the first ultraviolet light irradiation treatment is performed on the electron transport layer, a quantum dot light-emitting layer and an anode are sequentially prepared on the side surface of the electron transport layer away from the cathode to obtain a light-emitting device.
本申请第一方面提供的发光器件的制备方法,在阴极表面制备金属氧化物电子传输层后,对电子传输层进行第一次紫外光照射处理,通过紫外光照射处理,电子传输层中金属氧化物对紫外可见光有较强的吸收作用,导致电子传输层内部温度升高,成键电子被激活,促进电子传输层中内部成键和晶体再次生长。减少金属氧化物结构缺陷,降低晶体材料的表面粗糙度,从而使电子传输层表面更平整,界面粗糙度降低,与相邻阴极结合性能更好,界面缝隙优化,避免电荷积累对器件寿命的影响。同时,紫外光照处理促进金属氧化物电子传输材料与电极的融合,减小势垒,提高电子注入效率。另外,表面更平整的电子传输层有利于后续量子点发光层在其表面制备,使其与量子点层界面结合性能更好,提高电子的传输和注入效率,避免电荷在界面处累积对器件寿命和安全性能的影响。In the method for preparing a light-emitting device provided by the first aspect of the present application, after a metal oxide electron transport layer is prepared on the surface of the cathode, the electron transport layer is subjected to a first ultraviolet light irradiation treatment, and the metal oxide in the electron transport layer is oxidized by the ultraviolet light irradiation treatment. The material has a strong absorption effect on ultraviolet and visible light, which leads to an increase in the internal temperature of the electron transport layer, and the bonding electrons are activated, which promotes the internal bonding and crystal growth in the electron transport layer. Reduce the structural defects of metal oxides, reduce the surface roughness of crystalline materials, so that the surface of the electron transport layer is smoother, the interface roughness is reduced, the bonding performance with the adjacent cathode is better, the interface gap is optimized, and the impact of charge accumulation on the device life is avoided. . At the same time, the UV light treatment promotes the fusion of the metal oxide electron transport material and the electrode, reduces the potential barrier, and improves the electron injection efficiency. In addition, the electron transport layer with a flatter surface is conducive to the subsequent preparation of the quantum dot light-emitting layer on its surface, which makes the interface between the quantum dot layer and the quantum dot layer have better bonding performance, improves the efficiency of electron transport and injection, and avoids the accumulation of charges at the interface. and safety performance.
具体地,上述步骤S10中,获取沉积有阴极的衬底。在一些实施例中,阴极包括Mg、Ag、Al、Ca中的至少一种金属材料或者至少两种的合金材料,在紫外光照射条件下,这些阴极金属材料与金属氧化物电子传输材料融合效果好,可减小电子注入势垒,提高电子注入到光电器件中的效率。Specifically, in the above step S10, the substrate on which the cathode is deposited is obtained. In some embodiments, the cathode includes at least one metal material or at least two alloy materials among Mg, Ag, Al, and Ca. Under the condition of ultraviolet light irradiation, these cathode metal materials and metal oxide electron transport materials have a fusion effect. Well, the electron injection barrier can be reduced and the efficiency of electron injection into optoelectronic devices can be improved.
在一些实施例中,阴极的厚度为10~200nm。本申请实施例阴极厚度选自200nm以下,当紫外光波从阴极一侧进行照射处理时,选自100nm以下,避免阴极金属层对照射光过渡的衰减。In some embodiments, the thickness of the cathode is 10-200 nm. In the embodiments of the present application, the thickness of the cathode is selected to be below 200 nm, and when the ultraviolet light wave is irradiated from the cathode side, the thickness is selected to be below 100 nm, so as to avoid the attenuation of the transition of the irradiation light by the cathode metal layer.
具体地,上述步骤S20中,在阴极背离衬底的侧表面制备金属氧化物电子传输层。在一些实施例中,金属氧化物传输材料选自ZnO、TiO 2、Fe 2O 3、SnO 2、Ta 2O 3中的至少一种;这些金属氧化物材料具有较高的电子迁移率,受紫外光激发后与阴极融合性好,有利于减小势垒,提高电子注入效率。在一些实施例中,金属氧化物传输材料可以是ZnO、TiO 2、Fe 2O 3、SnO 2、Ta 2O 3中的一种,也可以是其中两种或两种以上的混合材料。 Specifically, in the above step S20, a metal oxide electron transport layer is prepared on the side surface of the cathode facing away from the substrate. In some embodiments, the metal oxide transport material is selected from at least one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , Ta 2 O 3 ; these metal oxide materials have high electron mobility and are After excitation by ultraviolet light, it has good fusion with the cathode, which is beneficial to reduce the potential barrier and improve the efficiency of electron injection. In some embodiments, the metal oxide transport material may be one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , and Ta 2 O 3 , or a mixture of two or more of them.
在一些实施例中,金属氧化物传输材料选自掺杂有金属元素的ZnO、TiO 2、Fe 2O 3、SnO 2、Ta 2O 3中的至少一种,其中,金属元素包括铝、镁、锂、镧、钇、锰、镓、铁、铬、钴中至少一种。本申请实施例金属氧化物传输材料中掺杂有铝、镁、锂、镧、钇、锰、镓、铁、铬、钴等金属元素,有利于提高材料的电子传输迁移效率。在一些实施例中,金属氧化物传输材料中掺杂铝、镁、锂、镧、钇、锰、镓、铁、铬、钴中的一种,或者任意两种或两种以上的金属元素。 In some embodiments, the metal oxide transport material is selected from at least one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , Ta 2 O 3 doped with metal elements, wherein the metal elements include aluminum, magnesium , at least one of lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, and cobalt. The metal oxide transport materials of the embodiments of the present application are doped with metal elements such as aluminum, magnesium, lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, cobalt, etc., which are beneficial to improve the electron transport and migration efficiency of the materials. In some embodiments, the metal oxide transport material is doped with one of aluminum, magnesium, lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, and cobalt, or any two or more metal elements.
在一些实施例中,金属传输材料的粒径小于等于10nm,小粒径的传输材料不但更有利形成致密、厚度均一、表面平整的电子传输层;而且小粒径的金属氧化物材料,有更大的比表面积,受紫外光激发后与金属电极层有更好的融合效果,更有利于减小势垒,提高电子注入效率。In some embodiments, the particle size of the metal transport material is less than or equal to 10 nm, and the transport material with small particle size is not only more favorable for forming an electron transport layer with dense, uniform thickness and smooth surface; and the metal oxide material with small particle size has more advantages. The large specific surface area has a better fusion effect with the metal electrode layer after being excited by ultraviolet light, which is more conducive to reducing the potential barrier and improving the electron injection efficiency.
具体地,上述步骤S30中,对电子传输层进行第一次紫外光照射处理。在一些实施例中,第一次紫外光照射处理的步骤包括:在紫外光波长为250~420nm,光波密度10~300mJ/cm 2的条件下,对电子传输层照射10~60min。本申请实施例该紫外光照射处理条件,不但可以较好的促使电子传输层中金属氧化 物传输材料内部成键和晶体再生长,而且有利于促进电子传输层与金属阴极层之间的界面融合,使结合更紧密,减少界面缝隙,优化界面粗糙度,使电子更有利于从阴极注入到电子传输层。 Specifically, in the above step S30, the electron transport layer is subjected to a first ultraviolet light irradiation treatment. In some embodiments, the first step of irradiating with ultraviolet light includes: irradiating the electron transport layer for 10-60 minutes under the condition that the wavelength of ultraviolet light is 250-420 nm and the light wave density is 10-300 mJ/cm 2 . The ultraviolet irradiation treatment conditions in the examples of the present application can not only promote the internal bonding and crystal regrowth of the metal oxide transport material in the electron transport layer, but also facilitate the interface fusion between the electron transport layer and the metal cathode layer. , make the bonding tighter, reduce the interface gap, optimize the interface roughness, and make the electron injection from the cathode to the electron transport layer more favorable.
在一些实施例中,第一次紫外光照射处理的步骤包括:采用波长为320~420nm,光波密度10~150mJ/cm 2的紫外光波从电子传输层一侧进行照射处理10~60min。本申请实施例紫外光波从电子传输层一侧时,金属氧化物电子传输材料可以直接吸收UV光进行晶体再生长和内部成键,对光的衰减较小,因而可以采用相对较长的波长便可达到处理效果,对材料影响小。 In some embodiments, the step of the first ultraviolet light irradiation treatment includes: using ultraviolet light waves with a wavelength of 320 to 420 nm and an optical wave density of 10 to 150 mJ/cm 2 to perform irradiation treatment from one side of the electron transport layer for 10 to 60 minutes. When the ultraviolet light wave in the embodiment of the present application is from one side of the electron transport layer, the metal oxide electron transport material can directly absorb the UV light to carry out crystal regrowth and internal bonding, and the attenuation of light is small, so a relatively long wavelength can be used for convenience. The treatment effect can be achieved, and the influence on the material is small.
在一些实施例中,第一次紫外光照射处理的步骤包括:采用波长为250~320nm,光波密度100~300mJ/cm 2的紫外光波从阴极一侧进行照射处理10~60min。本申请实施例紫外光波从阴极层一侧时,由于金属阴极层中自由电子多,对光减损大,光通过阴极金属层衰减较大,此时需要采用较短波长、密度较高的UV光进行处理才能达到较好的处理效果。 In some embodiments, the step of the first ultraviolet irradiation treatment includes: using ultraviolet light waves with a wavelength of 250-320 nm and an optical wave density of 100-300 mJ/cm 2 to perform irradiation treatment from the cathode side for 10-60 minutes. When the ultraviolet light wave in the embodiment of the present application is from one side of the cathode layer, since there are many free electrons in the metal cathode layer, the light loss is large, and the light passing through the cathode metal layer is greatly attenuated. At this time, it is necessary to use UV light with a shorter wavelength and a higher density processing to achieve better processing results.
在一些实施例中,第一次紫外光照射处理的条件还包括:在H 2O含量小于1ppm,温度为80~120℃的环境下进行。本申请实施例在H 2O含量小于1ppm,温度为80~120℃的环境下进行紫外光照射处理,避免环境中含水量过高导致在光照处理过程中对材料性能的影响。同时80~120℃的加热环境,有利于促进激发O的电子与锌离子成键,也有利于成键电子被激活。 In some embodiments, the conditions for the first ultraviolet light irradiation treatment further include: performing the treatment in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C. In the examples of the present application, ultraviolet light irradiation treatment is performed in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C., so as to avoid the influence on the material properties during the light treatment process caused by excessive water content in the environment. At the same time, the heating environment of 80-120 °C is conducive to promoting the formation of bonds between the electrons excited by O and the zinc ions, and is also conducive to the activation of the bonding electrons.
在一些实施例中,电子传输层的厚度为10~200nm,该厚度满足器件性要求和结构要求。在一些具体实施例中,当电子传输层的厚度低于80nm时,紫外光照射处理的时长为15分钟~45分钟。本申请实施例当电子传输层厚度低于80nm时,低厚度的材料层光波能量相对容易穿透,此时达到处理效果所需的光照时间较短,紫外光照射处理的时长为15分钟~45分钟适宜。在另一些具体实施例中,当电子传输层的厚度高于80nm时,紫外光照射处理的时长为30分钟~90分钟。本申请实施例当电子传输层厚度高于80nm时,厚度较厚的材料层光波能量难以穿透,此时达到处理效果所需的光照时间较长,紫外光照射处理的时长为30分钟~90分钟适宜。In some embodiments, the thickness of the electron transport layer is 10-200 nm, which meets the device performance requirements and structural requirements. In some specific embodiments, when the thickness of the electron transport layer is less than 80 nm, the duration of the ultraviolet light irradiation treatment is 15 minutes to 45 minutes. In the examples of the present application, when the thickness of the electron transport layer is less than 80 nm, the light wave energy of the low-thickness material layer is relatively easy to penetrate. At this time, the irradiation time required to achieve the treatment effect is short, and the duration of the ultraviolet light irradiation treatment is 15 minutes to 45 minutes. minutes are appropriate. In other specific embodiments, when the thickness of the electron transport layer is higher than 80 nm, the duration of the ultraviolet light irradiation treatment is 30 minutes to 90 minutes. In the embodiment of the present application, when the thickness of the electron transport layer is higher than 80 nm, the light wave energy of the thick material layer is difficult to penetrate, and at this time, the illumination time required to achieve the treatment effect is longer, and the duration of the ultraviolet light irradiation treatment is 30 minutes to 90 minutes. minutes are appropriate.
具体地,上述步骤S30中,在电子传输层背离阴极的侧表面制备量子点发光层的步骤包括:在电子传输层背离阴极的侧表面沉积量子点材料后,进行第二次紫外光照射处理,形成量子点发光层。本申请实施例在电子传输层表面沉积量子点材料后进行第二次紫外光照射处理,通过紫外光照射处理,使电子传输层中金属氧化物传输材料中O的电子受激发与量子点发光层中Zn等活泼金属元素形成配合物,配合键的形成优化了ETL-QD界面,减少了界面缺陷,有利于电子从电子传输层向量子点发光层内部的注入。且由于O的电子与量子点材料的金属配位,增加了电子传输层内部成键缺陷,从而提高了电子传输层中电子迁移率。另外,形成的配合物对UV有较强的吸收作用,导致电子传输层与量子点发光层界面处温度升高,成键电子被激活,促进电子传输层中晶体再次生长,降低了电子传输层内部物理结构缺陷和表面粗糙度,使QD-ETL界面结合紧密性更好,减少电子传输层内部和QD-ETL界面处的电子累积中心,提高发光层内电子注入效率,材料老化减缓,提高器件寿命。Specifically, in the above step S30, the step of preparing the quantum dot light-emitting layer on the side surface of the electron transport layer away from the cathode includes: after the quantum dot material is deposited on the side surface of the electron transport layer away from the cathode, performing a second ultraviolet light irradiation treatment, A quantum dot light-emitting layer is formed. In the embodiment of the present application, after the quantum dot material is deposited on the surface of the electron transport layer, a second ultraviolet light irradiation treatment is performed. Through the ultraviolet light irradiation treatment, the electrons of O in the metal oxide transport material in the electron transport layer are excited and the quantum dot light-emitting layer is excited. Active metal elements such as Zn form complexes, and the formation of complex bonds optimizes the ETL-QD interface, reduces interface defects, and facilitates the injection of electrons from the electron transport layer to the interior of the quantum dot light-emitting layer. And because the electrons of O are coordinated with the metal of the quantum dot material, the bonding defects inside the electron transport layer are increased, thereby improving the electron mobility in the electron transport layer. In addition, the formed complex has a strong absorption effect on UV, which leads to an increase in the temperature at the interface between the electron transport layer and the quantum dot light-emitting layer, and the bonding electrons are activated, which promotes the re-growth of crystals in the electron transport layer and reduces the electron transport layer. Internal physical structure defects and surface roughness make the QD-ETL interface more tightly bonded, reduce the electron accumulation center inside the electron transport layer and at the QD-ETL interface, improve the electron injection efficiency in the light-emitting layer, slow down the material aging, and improve the device. life.
在一些实施例中,量子点材料为核壳结构,量子点材料的外壳层含有锌元素。由于目前的量子点合成大多采用II-VI族的元素,Zn元素与VI族的元素从晶格匹配和带隙方面均有更好的匹配性,能够覆盖整个可见光波段,且量子点材料的外壳层含锌元素的外壳层化学活泼性适合,灵活可控性高,带隙宽,激子束缚性好,量子效率高,水氧稳定性好。另外,锌元素与O的电子的配位效果更好且更稳定。通过UV照射,电子传输层中金属氧化物传输材料的O的电子受激发,易与QD中的Zn元素形成配合物,即ZnO配合物。ZnO配合键的形成有利于电子注入,提高了电子传输层中电子迁移率。同时,ZnO配合物对紫外光波长有较强的吸收作用,有利于激活成键电子,使ETL中晶体再次生长,降低了ETL内部物理结构缺陷和表面粗糙度,有利于电子注入,减少电子累积,减缓材料老化,有利于提高器件寿命。In some embodiments, the quantum dot material has a core-shell structure, and the outer shell layer of the quantum dot material contains zinc. Since most of the current quantum dot synthesis uses II-VI group elements, Zn element and VI group elements have better matching in terms of lattice matching and band gap, which can cover the entire visible light band, and the outer shell of the quantum dot material The zinc-containing outer shell layer has suitable chemical activity, high flexibility and controllability, wide band gap, good exciton binding, high quantum efficiency, and good water-oxygen stability. In addition, the coordination effect of zinc element and O electrons is better and more stable. By UV irradiation, the electrons of O of the metal oxide transport material in the electron transport layer are excited, and it is easy to form a complex with the Zn element in the QD, that is, a ZnO complex. The formation of ZnO complex bonds facilitates electron injection and improves electron mobility in the electron transport layer. At the same time, the ZnO complex has a strong absorption effect on the wavelength of ultraviolet light, which is conducive to activating the bonding electrons, making the crystal in the ETL grow again, reducing the internal physical structure defects and surface roughness of the ETL, which is conducive to the injection of electrons and reduces the accumulation of electrons. , slow down the material aging, and help to improve the life of the device.
在一些实施例中,量子点材料的外壳层包括:ZnS、ZnSe、ZnTe、CdZnS、ZnCdSe中的至少一种或者至少两种形成的合金材料,这些外壳材料均含有锌元素,锌元素活性高,与电子传输材料中受激O电子有较好的配位效果。In some embodiments, the outer shell layer of the quantum dot material includes: at least one of ZnS, ZnSe, ZnTe, CdZnS, ZnCdSe, or an alloy material formed by at least two kinds of the outer shell materials, all of which contain zinc element, and the zinc element has high activity, It has a good coordination effect with the excited O electrons in the electron transport material.
在一些实施例中,量子点材料的外壳层厚度为0.2~6.0nm,该厚度确保了量子点内层材料的稳定性和载流子注入效果,同时确保了外壳层中锌元素与金属氧化物传输材料中O元素的配位效果。In some embodiments, the thickness of the outer shell layer of the quantum dot material is 0.2-6.0 nm, which ensures the stability of the inner layer material of the quantum dot and the carrier injection effect, and at the same time ensures the zinc element and the metal oxide in the outer shell layer. Coordination effects of O element in transport materials.
在一些实施例中,量子点发光层的厚度为8~100nm,该厚度满足器件性要求和结构要求。In some embodiments, the thickness of the quantum dot light-emitting layer is 8-100 nm, which meets the requirements of device performance and structure.
在一些实施例中,第二次紫外光照射处理的步骤包括:在紫外光波长为300~420nm,光波密度10~300mJ/cm 2的条件下,对量子点发光层量子点材料照射10~60min。在一些实施例中,第二次紫外光照射处理的条件包括:在H 2O含量小于1ppm的环境下进行。本申请上述实施例在沉积完量子点材料后对量子点发光层的紫外光照条件,一方面,有利于促进电子传输层中金属氧化物传输材料中O的电子受激发与量子点发光层中Zn等活泼金属元素形成配合物,通过配合键的形成优化了ETL-QD界面,减少了界面缺陷,有利于电子从ETL向QD内部的注入。另一方面,又充分考虑了核壳结构量子点材料的特性,为避免紫外光能量对量子点材料的破坏作用,采用波长较长,光波能量较低的光进行处理。 In some embodiments, the second ultraviolet irradiation treatment step includes: irradiating the quantum dot material of the quantum dot light-emitting layer for 10 to 60 minutes under the condition that the wavelength of the ultraviolet light is 300-420 nm and the light wave density is 10-300 mJ/cm 2 . . In some embodiments, the conditions of the second ultraviolet irradiation treatment include: performing in an environment where the H 2 O content is less than 1 ppm. In the above-mentioned embodiments of the present application, the ultraviolet illumination conditions for the quantum dot light-emitting layer after the quantum dot material is deposited, on the one hand, is conducive to promoting the excitation of the electrons of O in the metal oxide transport material in the electron transport layer and the Zn in the quantum dot light-emitting layer. The formation of complexes with other active metal elements optimizes the ETL-QD interface through the formation of complex bonds, reduces interface defects, and facilitates the injection of electrons from the ETL to the interior of the QD. On the other hand, the characteristics of the core-shell structure quantum dot materials are fully considered. In order to avoid the damaging effect of ultraviolet light energy on the quantum dot materials, light with a longer wavelength and a lower light wave energy is used for processing.
在一些具体实施例中,当量子点材料的外壳层为ZnS时,紫外光照射处理的波长为300~355nm,光波密度50~150mJ/cm 2。本申请实施例当外壳层为ZnS时,ZnS键能为3.5eV左右,ZnO键能在3.3eV左右,在波长为300~355nm,光波密度50~150mJ/cm 2的条件下,可引起量子点材料外壳中ZnS和ZnO等电子传输材料成键电荷的转移,使外壳层中锌元素与电子传输材料中O元素有较好的配位效果,形成电子传输材料与量子点材料的配合物。 In some specific embodiments, when the outer shell layer of the quantum dot material is ZnS, the wavelength of ultraviolet light irradiation treatment is 300-355 nm, and the optical wave density is 50-150 mJ/cm 2 . In the examples of the present application, when the outer shell layer is ZnS, the bond energy of ZnS is about 3.5eV, and the bond energy of ZnO is about 3.3eV. Under the conditions of wavelength of 300-355nm and optical wave density of 50-150mJ/ cm2 , quantum dots can be induced. The transfer of the bonding charges of electron transport materials such as ZnS and ZnO in the material shell makes the zinc element in the shell layer and the O element in the electron transport material have a better coordination effect, forming a complex between the electron transport material and the quantum dot material.
在一些具体实施例中,当量子点材料的外壳层为ZnSe时,紫外光照射处理的波长为320~375nm,光波密度30~120mJ/cm 2。本申请实施例当外壳层为ZnSe时,ZnSe键能为2.9eV左右,ZnO键能在3.3eV左右,在紫外光照射处理的波长为320~375nm,光波密度30~120mJ/cm 2的条件下可引起量子点材料外壳中ZnSe和ZnO等电子传输材料成键电荷的转移,使外壳层中锌元素与电子传输材料中O元素有较好的配位效果,形成电子传输材料与量子点材料的 配合物。 In some specific embodiments, when the outer shell layer of the quantum dot material is ZnSe, the wavelength of ultraviolet light irradiation treatment is 320-375 nm, and the optical wave density is 30-120 mJ/cm 2 . In the examples of this application, when the outer shell layer is ZnSe, the bond energy of ZnSe is about 2.9eV, and the bond energy of ZnO is about 3.3eV, and the wavelength of ultraviolet light irradiation treatment is 320~375nm, and the light wave density is 30~120mJ/ cm2 . It can cause the transfer of bonding charges of electron transport materials such as ZnSe and ZnO in the outer shell of the quantum dot material, so that the zinc element in the outer shell layer and the O element in the electron transport material have a better coordination effect, forming the electron transport material and the quantum dot material. complex.
在一些具体实施例中,当量子点材料的外壳层为ZnSeS时,紫外光照射处理的波长为350~375nm,光波密度30~150mJ/cm 2。本申请实施例当外壳层为ZnSeS时,ZnSeS键能为2.7eV左右,ZnO键能在3.3eV左右,在紫外光照射处理的波长为350~375nm,光波密度30~150mJ/cm 2的条件下可引起量子点材料外壳中ZnSeS和ZnO等电子传输材料成键电荷的转移,使外壳层中锌元素与电子传输材料中O元素有较好的配位效果,形成电子传输材料与量子点材料的配合物。 In some specific embodiments, when the outer shell layer of the quantum dot material is ZnSeS, the wavelength of ultraviolet light irradiation treatment is 350-375 nm, and the optical wave density is 30-150 mJ/cm 2 . In the examples of this application, when the outer shell layer is ZnSeS, the bond energy of ZnSeS is about 2.7eV, and the bond energy of ZnO is about 3.3eV, and the wavelength of ultraviolet light irradiation treatment is 350~375nm, and the optical wave density is 30~150mJ/ cm2 under the conditions It can cause the transfer of bonding charges of electron transport materials such as ZnSeS and ZnO in the shell of the quantum dot material, so that the zinc element in the shell layer and the O element in the electron transport material have a better coordination effect, forming the electron transport material and the quantum dot material. complex.
在一些实施例中,制备子点发光层后,还包括步骤:在量子点发光层背离电子传输层的表面制备空穴传输层,在空穴传输层背离量子点发光层的表面制备阳极。In some embodiments, after preparing the sub-dot light-emitting layer, the method further includes the steps of: preparing a hole transport layer on the surface of the quantum dot light-emitting layer facing away from the electron transport layer, and preparing an anode on the surface of the hole transport layer facing away from the quantum dot light-emitting layer.
在一些具体实施例中,本申请实施例发光器件的制备包括步骤:In some specific embodiments, the preparation of the light-emitting device in the embodiments of the present application includes the steps:
S40.提供沉积有阴极的基板;S40. Provide a substrate on which the cathode is deposited;
S50.在阴极背离衬底的侧表面制备电子传输层,电子传输层中包括金属氧化物传输材料;S50. Prepare an electron transport layer on the side surface of the cathode away from the substrate, and the electron transport layer includes a metal oxide transport material;
S60.对电子传输层进行第一次紫外光照射处理;S60. Perform the first ultraviolet light irradiation treatment on the electron transport layer;
S70.在电子传输层背离阴极的侧表面制备量子点发光层;S70. Prepare a quantum dot light-emitting layer on the side surface of the electron transport layer away from the cathode;
S80.对量子点发光层进行第二次紫外光照处理;S80. Perform a second ultraviolet irradiation treatment on the quantum dot light-emitting layer;
S90.在量子点发光层表面制备空穴传输层;S90. Prepare a hole transport layer on the surface of the quantum dot light-emitting layer;
S100.蒸镀阳极于空穴注入层上,得到发光器件。S100. Evaporating an anode on the hole injection layer to obtain a light-emitting device.
具体地,步骤S40中,为了得到高质量的发光器件,基板需要经过预处理过程,包括步骤:将基板用清洁剂清洗,初步去除表面存在的污渍,随后依次在去离子水、丙酮、无水乙醇、去离子水中分别超声清洗20min,以除去表面存在的杂质,最后用高纯氮气吹干。Specifically, in step S40, in order to obtain a high-quality light-emitting device, the substrate needs to undergo a pretreatment process, including the steps of: cleaning the substrate with a cleaning agent to preliminarily remove the stains on the surface, and then sequentially cleaning the substrate with deionized water, acetone, and anhydrous Ultrasonic cleaning was performed in ethanol and deionized water for 20 minutes to remove impurities on the surface, and finally dried with high-purity nitrogen.
具体地,步骤S50中,制备电子传输层的步骤包括:电子传输层为金属氧化物传输材料,在阴极上,将配制好一定浓度的金属氧化物传输材料溶液通过滴涂、旋涂、浸泡、涂布、打印、蒸镀等工艺沉积成膜,通过调节溶液的浓度、 沉积速度(如,转速在3000~5000rpm之间)和沉积时间来控制电子传输层的厚度,约20~60nm,然后在150℃~200℃的条件下退火成膜,充分去除溶剂,得到电子传输层。Specifically, in step S50, the step of preparing the electron transport layer includes: the electron transport layer is a metal oxide transport material, and on the cathode, a solution of the metal oxide transport material prepared with a certain concentration is passed through drop coating, spin coating, soaking, Coating, printing, evaporation and other processes are used to deposit films, and the thickness of the electron transport layer is controlled by adjusting the concentration of the solution, the deposition speed (for example, the rotation speed is between 3000 and 5000 rpm) and the deposition time, about 20 to 60 nm. Annealing at 150° C. to 200° C. to form a film, fully removing the solvent, and obtaining an electron transport layer.
具体地,步骤S60中,对电子传输层进行第一次紫外光照射处理的步骤包括:在H 2O含量小于1ppm,温度为80~120℃的环境下,采用紫外光波长为250~420nm,光波密度10~300mJ/cm 2的紫外光对电子传输层进行垂直照射10~60min。 Specifically, in step S60, the step of performing the first ultraviolet light irradiation treatment on the electron transport layer includes: in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C., the wavelength of the ultraviolet light is 250-420 nm, The electron transport layer is irradiated vertically for 10 to 60 minutes by ultraviolet light with an optical wave density of 10 to 300 mJ/cm 2 .
具体地,步骤S70中,制备量子点发光层的步骤包括:在电子传输层上,将配制好一定浓度的发光物质溶液通过滴涂、旋涂、浸泡、涂布、打印、蒸镀等工艺沉积成膜,通过调节溶液的浓度、沉积速度和沉积时间来控制发光层的厚度,约20~60nm,在适当温度下干燥。Specifically, in step S70, the step of preparing the quantum dot light-emitting layer includes: depositing a prepared solution of a certain concentration of light-emitting substance on the electron transport layer by processes such as drop coating, spin coating, soaking, coating, printing, evaporation, etc. The film is formed, and the thickness of the light-emitting layer is controlled by adjusting the concentration of the solution, the deposition speed and the deposition time, about 20-60 nm, and dried at an appropriate temperature.
具体地,步骤S80中,对量子点发光层进行第二次紫外光照处理的步骤包括:在H 2O含量小于1ppm,温度为80~120℃的环境下,采用紫外光波长为300~420nm,光波密度10~300mJ/cm 2的紫外光对电子传输层进行垂直照射10~60min。 Specifically, in step S80, the step of performing the second ultraviolet light treatment on the quantum dot light-emitting layer includes: in an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C., the wavelength of the ultraviolet light is 300-420 nm, The electron transport layer is irradiated vertically for 10 to 60 minutes by ultraviolet light with an optical wave density of 10 to 300 mJ/cm 2 .
具体地,步骤S90中,制备空穴传输层的步骤包括:在量子点发光层的表面,将配制好的空穴传输材料的溶液通过滴涂、旋涂、浸泡、涂布、打印、蒸镀等工艺沉积成膜;通过调节溶液的浓度、沉积速度和沉积时间来控制膜厚,然后在适当温度下热退火处理。Specifically, in step S90, the step of preparing the hole transport layer includes: on the surface of the quantum dot light-emitting layer, applying the prepared solution of the hole transport material by drop coating, spin coating, soaking, coating, printing, evaporation It is deposited into a film by other processes; the film thickness is controlled by adjusting the concentration of the solution, the deposition speed and the deposition time, and then thermal annealing is performed at an appropriate temperature.
具体地,步骤S100中,将沉积完各功能层的衬底置于蒸镀仓中沉积制备阳极。Specifically, in step S100, the substrate on which each functional layer has been deposited is placed in an evaporation chamber to deposit and prepare an anode.
在一些实施例中,将得到的QLED器件进行封装处理,封装处理可采用常用的机器封装,也可以采用手动封装。封装处理的环境中,氧含量和水含量均低于0.1ppm,以保证器件的稳定性。In some embodiments, the obtained QLED device is packaged, and the package process can be packaged by a common machine or by manual packaging. In the packaging process environment, the oxygen content and water content are both lower than 0.1ppm to ensure the stability of the device.
本申请实施例第二方面提供一种发光器件,发光器件由上述的方法制得。A second aspect of the embodiments of the present application provides a light-emitting device, and the light-emitting device is manufactured by the above method.
本申请第二方面提供的发光器件,由于在阴极表面制备电子传输层后进行了第一次紫外光照处理,促进了金属氧化物电子传输材料与电极的融合,减小 势垒,提高电子注入效率。同时,促进了电子传输层中内部成键和晶体再次生长,降低了电子传输层内部物理结构缺陷和表面粗糙度,提高了电子传输层中电子迁移率,从而提高了光电器件效率和稳定性,延长了器件使用寿命长。In the light-emitting device provided in the second aspect of the present application, since the first ultraviolet irradiation treatment is performed after the electron transport layer is prepared on the surface of the cathode, the fusion of the metal oxide electron transport material and the electrode is promoted, the potential barrier is reduced, and the electron injection efficiency is improved . At the same time, the internal bonding and crystal regrowth in the electron transport layer are promoted, the internal physical structure defects and surface roughness of the electron transport layer are reduced, and the electron mobility in the electron transport layer is improved, thereby improving the efficiency and stability of optoelectronic devices. Extends the device life for a long time.
在一些实施方式中,发光器件包括相对设置的阳极和阴极的叠层结构,设置在阳极和阴极之间的发光层,且阴极设置在衬底上。另外,阳极和发光层之间还可以设置空穴注入层、空穴传输层、电子阻挡层等空穴功能层;在阴极和发光层之间还可以设置电子传输层、电子注入层和空穴阻挡层等电子功能层,如附图2所示。在一些结构器件的实施例中,发光器件包括衬底,设置在衬底表面的阴极,设置在阴极表面的电子传输层,设置在电子传输层表面的发光层,设置在发光层表面的空穴传输层,设置在空穴传输层表面的阳极。In some embodiments, the light emitting device includes a stacked structure of an anode and a cathode disposed oppositely, a light emitting layer disposed between the anode and the cathode, and the cathode disposed on the substrate. In addition, a hole functional layer such as a hole injection layer, a hole transport layer, and an electron blocking layer can also be arranged between the anode and the light-emitting layer; an electron transport layer, an electron injection layer, and a hole can also be arranged between the cathode and the light-emitting layer. Electronic functional layers such as barrier layers are shown in Figure 2. In some structural device embodiments, the light emitting device includes a substrate, a cathode disposed on the surface of the substrate, an electron transport layer disposed on the surface of the cathode, a light emitting layer disposed on the surface of the electron transport layer, holes disposed on the surface of the light emitting layer The transport layer is an anode disposed on the surface of the hole transport layer.
在一些实施例中,衬底的选用不受限制,可以采用刚性基板,也可以采用柔性基板。在一些具体实施例中,刚性基板包括但不限于玻璃、金属箔片中的一种或多种。在一些具体实施例中,柔性基板包括但不限于聚对苯二甲酸乙二醇酯(PET)、聚对苯二甲酸乙二醇酯(PEN)、聚醚醚酮(PEEK)、聚苯乙烯(PS)、聚醚砜(PES)、聚碳酸酯(PC)、聚芳基酸酯(PAT)、聚芳酯(PAR)、聚酰亚胺(PI)、聚氯乙烯(PV)、聚乙烯(PE)、聚乙烯吡咯烷酮(PVP)、纺织纤维中的一种或多种。In some embodiments, the choice of the substrate is not limited, and a rigid substrate or a flexible substrate may be used. In some specific embodiments, the rigid substrate includes, but is not limited to, one or more of glass and metal foil. In some embodiments, the flexible substrate includes, but is not limited to, polyethylene terephthalate (PET), polyethylene terephthalate (PEN), polyetheretherketone (PEEK), polystyrene (PS), polyethersulfone (PES), polycarbonate (PC), polyarylate (PAT), polyarylate (PAR), polyimide (PI), polyvinyl chloride (PV), poly One or more of ethylene (PE), polyvinylpyrrolidone (PVP), and textile fibers.
在一些实施例中,阳极材料的选用不受限制,可选自掺杂金属氧化物,包括但不限于铟掺杂氧化锡(ITO)、氟掺杂氧化锡(FTO)、锑掺杂氧化锡(ATO)、铝掺杂氧化锌(AZO)、镓掺杂氧化锌(GZO)、铟掺杂氧化锌(IZO)、镁掺杂氧化锌(MZO)、铝掺杂氧化镁(AMO)中的一种或多种。也可以选自掺杂或非掺杂的透明金属氧化物之间夹着金属的复合电极,包括但不限于AZO/Ag/AZO、AZO/Al/AZO、ITO/Ag/ITO、ITO/Al/ITO、ZnO/Ag/ZnO、ZnO/Al/ZnO、TiO 2/Ag/TiO 2、TiO 2/Al/TiO 2、ZnS/Ag/ZnS、ZnS/Al/ZnS、TiO 2/Ag/TiO 2、TiO 2/Al/TiO 2中的一种或多种。 In some embodiments, the choice of anode material is not limited and can be selected from doped metal oxides, including but not limited to indium doped tin oxide (ITO), fluorine doped tin oxide (FTO), antimony doped tin oxide (ATO), Aluminum-Doped Zinc Oxide (AZO), Gallium-Doped Zinc Oxide (GZO), Indium-Doped Zinc Oxide (IZO), Magnesium-Doped Zinc Oxide (MZO), Aluminum-Doped Magnesium Oxide (AMO) one or more. It can also be selected from doped or undoped transparent metal oxides sandwiched metal composite electrodes, including but not limited to AZO/Ag/AZO, AZO/Al/AZO, ITO/Ag/ITO, ITO/Al/ ITO, ZnO/Ag/ZnO, ZnO/Al/ZnO, TiO 2 /Ag/TiO 2 , TiO 2 /Al/TiO 2 , ZnS/Ag/ZnS, ZnS/Al/ZnS, TiO 2 /Ag/TiO 2 , One or more of TiO 2 /Al/TiO 2 .
在一些实施例中,空穴注入层包括但不限于有机空穴注入材料、掺杂或非掺杂的过渡金属氧化物、掺杂或非掺杂的金属硫系化合物中的一种或多种。在 一些具体实施例中,有机空穴注入材料包括但不限于聚(3,4-乙烯二氧噻吩)-聚苯乙烯磺酸(PEDOT:PSS)、酞菁铜(CuPc)、2,3,5,6-四氟-7,7',8,8'-四氰醌-二甲烷(F4-TCNQ)、2,3,6,7,10,11-六氰基-1,4,5,8,9,12-六氮杂苯并菲(HATCN)中的一种或多种。在一些具体实施例中,过渡金属氧化物包括但不限于MoO 3、VO 2、WO 3、CrO 3、CuO中的一种或多种。在一些具体实施例中,金属硫系化合物包括但不限于MoS 2、MoSe 2、WS 2、WSe 2、CuS中的一种或多种。 In some embodiments, the hole injection layer includes, but is not limited to, one or more of organic hole injection materials, doped or undoped transition metal oxides, doped or undoped metal chalcogenides . In some specific embodiments, organic hole injection materials include, but are not limited to, poly(3,4-ethylenedioxythiophene)-polystyrenesulfonic acid (PEDOT:PSS), copper phthalocyanine (CuPc), 2,3, 5,6-Tetrafluoro-7,7',8,8'-tetracyanoquinone-dimethane (F4-TCNQ), 2,3,6,7,10,11-hexacyano-1,4,5 One or more of ,8,9,12-hexaazatriphenylene (HATCN). In some specific embodiments, transition metal oxides include, but are not limited to, one or more of MoO 3 , VO 2 , WO 3 , CrO 3 , and CuO. In some specific embodiments, the metal chalcogenide compounds include, but are not limited to, one or more of MoS 2 , MoSe 2 , WS 2 , WSe 2 , and CuS.
在一些实施例中,空穴传输层可选自具有空穴传输能力的有机材料和/或具有空穴传输能力的无机材料。在一些具体实施例中,具有空穴传输能力的有机材料包括但不限于聚(9,9-二辛基芴-CO-N-(4-丁基苯基)二苯胺)(TFB)、聚乙烯咔唑(PVK)、聚(N,N'双(4-丁基苯基)-N,N'-双(苯基)联苯胺)(poly-TPD)、聚(9,9-二辛基芴-共-双-N,N-苯基-1,4-苯二胺)(PFB)、4,4,4”-三(咔唑-9-基)三苯胺(TCTA)、4,4'-二(9-咔唑)联苯(CBP)、N,N’-二苯基-N,N’-二(3-甲基苯基)-1,1’-联苯-4,4’-二胺(TPD)、N,N’-二苯基-N,N’-(1-萘基)-1,1’-联苯-4,4’-二胺(NPB)中的一种或多种。在一些具体实施例中,具有空穴传输能力的无机材料包括但不限于掺杂石墨烯、非掺杂石墨烯、C60、掺杂或非掺杂的MoO 3、VO 2、WO 3、CrO 3、CuO、MoS 2、MoSe 2、WS 2、WSe 2、CuS中的一种或多种。 In some embodiments, the hole transport layer may be selected from organic materials with hole transport capability and/or inorganic materials with hole transport capability. In some specific embodiments, the organic material with hole transport capability includes, but is not limited to, poly(9,9-dioctylfluorene-CO-N-(4-butylphenyl)diphenylamine) (TFB), poly(9,9-dioctylfluorene-CO-N-(4-butylphenyl)diphenylamine) Vinylcarbazole (PVK), poly(N,N'bis(4-butylphenyl)-N,N'-bis(phenyl)benzidine) (poly-TPD), poly(9,9-dioctyl) Fluorene-co-bis-N,N-phenyl-1,4-phenylenediamine) (PFB), 4,4,4"-tris(carbazol-9-yl)triphenylamine (TCTA), 4, 4'-bis(9-carbazole)biphenyl (CBP), N,N'-diphenyl-N,N'-bis(3-methylphenyl)-1,1'-biphenyl-4, In 4'-diamine (TPD), N,N'-diphenyl-N,N'-(1-naphthyl)-1,1'-biphenyl-4,4'-diamine (NPB) One or more. In some specific embodiments, inorganic materials with hole transport capability include but are not limited to doped graphene, undoped graphene, C60, doped or undoped MoO 3 , VO 2 One or more of , WO 3 , CrO 3 , CuO, MoS 2 , MoSe 2 , WS 2 , WSe 2 , and CuS.
在一些实施例中,发光层中包括量子点材料,量子点材料为核壳结构的量子点材料,且量子点材料的外壳层含有锌元素。在一些具体实施例中,量子点材料的外壳层包括:ZnS、ZnSe、ZnTe、CdZnS、ZnCdSe中的至少一种或者至少两种形成的合金材料。在一些实施例中,量子点材料的粒径范围为2~10nm,粒径过小,量子点材料成膜性变差,且量子点颗粒之间的能量共振转移效应显著,不利于材料的应用,粒径过大,量子点材料的量子效应减弱,导致材料的光电性能下降。In some embodiments, the light-emitting layer includes a quantum dot material, the quantum dot material is a quantum dot material with a core-shell structure, and the outer shell layer of the quantum dot material contains zinc element. In some specific embodiments, the outer shell layer of the quantum dot material includes: at least one of ZnS, ZnSe, ZnTe, CdZnS, and ZnCdSe, or an alloy material formed by at least two of them. In some embodiments, the particle size of the quantum dot material is in the range of 2 to 10 nm. If the particle size is too small, the film-forming property of the quantum dot material becomes poor, and the energy resonance transfer effect between the quantum dot particles is significant, which is not conducive to the application of the material. , the particle size is too large, the quantum effect of the quantum dot material is weakened, resulting in a decrease in the optoelectronic properties of the material.
在一些实施例中,电子传输层的材料采用上述金属氧化物传输材料。In some embodiments, the material of the electron transport layer adopts the above-mentioned metal oxide transport material.
在一些实施例中,阴极材料可以是各种导电碳材料、导电金属氧化物材料、金属材料中的一种或多种。在一些具体实施例中,导电碳材料包括但不限于掺杂或非掺杂碳纳米管、掺杂或非掺杂石墨烯、掺杂或非掺杂氧化石墨烯、C60、 石墨、碳纤维、多空碳、或它们的混合物。在一些具体实施例中,导电金属氧化物材料包括但不限于ITO、FTO、ATO、AZO、或它们的混合物。在一些具体实施例中,金属材料包括但不限于Al、Ag、Cu、Mo、Au、或它们的合金;其中的金属材料中,其形态包括但不限于致密薄膜、纳米线、纳米球、纳米棒、纳米锥、纳米空心球、或它们的混合物;阴极为Ag、Al。In some embodiments, the cathode material may be one or more of various conductive carbon materials, conductive metal oxide materials, and metallic materials. In some embodiments, conductive carbon materials include, but are not limited to, doped or undoped carbon nanotubes, doped or undoped graphene, doped or undoped graphene oxide, C60, graphite, carbon fiber, multi- Empty carbon, or a mixture thereof. In some embodiments, the conductive metal oxide material includes, but is not limited to, ITO, FTO, ATO, AZO, or mixtures thereof. In some specific embodiments, the metal materials include, but are not limited to, Al, Ag, Cu, Mo, Au, or their alloys; among the metal materials, their forms include but are not limited to dense films, nanowires, nanospheres, nanometers Rods, nano cones, nano hollow spheres, or their mixtures; the cathode is Ag, Al.
为使本申请上述实施细节和操作能清楚地被本领域技术人员理解,以及本申请实施例发光器件及其制备方法的进步性能显著的体现,以下通过多个实施例来举例说明上述技术方案。In order to make the above implementation details and operations of the present application clearly understood by those skilled in the art, and to significantly reflect the improved performance of the light-emitting devices and their preparation methods in the embodiments of the present application, the above technical solutions are exemplified by multiple embodiments below.
实施例1Example 1
一种发光二极管,包括以下制备步骤:A light-emitting diode, comprising the following preparation steps:
(1)提供沉积有Al阴极的基板,对基板进行清洁前处理。(1) Provide a substrate on which Al cathode is deposited, and perform pre-cleaning treatment on the substrate.
(2)在步骤(1)的Al阴极上形成电子传输层:在手套箱(水氧含量小于0.1ppm)内,将ZnO溶液(浓度为45mg/mL,溶剂为乙醇)旋涂在ITO阴极上,3000rpm旋涂30s后80℃退火处理30min,形成电子传输层。(2) forming an electron transport layer on the Al cathode of step (1): in a glove box (water oxygen content is less than 0.1 ppm), spin-coat ZnO solution (concentration is 45 mg/mL, solvent is ethanol) on the ITO cathode , spin coating at 3000rpm for 30s and then anneal at 80℃ for 30min to form an electron transport layer.
(3)在H 2O含量小于1ppm,温度为100℃的环境下,从电子传输层侧垂直照射电子传输层,UV波长400nm,强度100mJ/cm 2,UV时间30min。 (3) In an environment with H 2 O content less than 1 ppm and a temperature of 100° C., the electron transport layer is irradiated vertically from the electron transport layer side, UV wavelength 400 nm, intensity 100 mJ/cm 2 , and UV time 30 min.
(4)在电子传输层上形成发光层:取CdSe/ZnS量子点溶液(浓度为30mg/mL,溶剂为正辛烷),将CdSe/ZnS量子点溶液在手套箱(水氧含量小于0.1ppm)内以3000rpm转速旋涂于电子传输层上,形成发光层。(4) Form the light-emitting layer on the electron transport layer: take the CdSe/ZnS quantum dot solution (concentration is 30mg/mL, the solvent is n-octane), put the CdSe/ZnS quantum dot solution in a glove box (water oxygen content is less than 0.1ppm) ) was spin-coated on the electron transport layer at a speed of 3000 rpm to form a light-emitting layer.
(5)在H 2O含量小于1ppm,温度为100℃的环境下,采用UV波长320nm,强度150mJ/cm 2的UV光垂直照射发光层时间10min。 (5) In an environment where the H 2 O content is less than 1 ppm and the temperature is 100° C., the light-emitting layer is irradiated vertically for 10 minutes by UV light with a UV wavelength of 320 nm and an intensity of 150 mJ/cm 2 .
(6)在发光层上形成空穴传输层:在电场下,将TFB溶液(浓度为8mg/mL,溶剂为氯苯)旋涂在发光层上,3000rpm旋涂30s后80℃退火处理30min,形成空穴传输层;其中,电场的作用方向垂直于阳极并朝向空穴传输层,电场强度为10 4V/cm。 (6) Forming a hole transport layer on the light-emitting layer: under an electric field, spin-coat TFB solution (concentration of 8 mg/mL, solvent is chlorobenzene) on the light-emitting layer, spin at 3000 rpm for 30 s, and then anneal at 80 °C for 30 min. A hole transport layer is formed; wherein the direction of action of the electric field is perpendicular to the anode and towards the hole transport layer, and the electric field strength is 10 4 V/cm.
(7)在空穴传输层上形成空穴注入层:在电场下,将PEDOT:PSS溶液 旋涂在空穴传输层上,5000rpm旋涂40s后150℃退火处理15min,形成空穴注入层;其中,电场的作用方向垂直于阳极并朝向空穴注入层,电场强度为10 4V/cm。 (7) Forming a hole injection layer on the hole transport layer: under an electric field, spin-coat the PEDOT:PSS solution on the hole transport layer, spin at 5000 rpm for 40 s, and then anneal at 150° C. for 15 minutes to form a hole injection layer; The action direction of the electric field is perpendicular to the anode and toward the hole injection layer, and the electric field strength is 10 4 V/cm.
(8)在空穴注入层上形成ITO阳极。(8) An ITO anode is formed on the hole injection layer.
实施例2Example 2
一种发光二极管,其制备步骤与实施例1的区别在于:步骤(3)中,从阴极侧进行垂直UV照射,UV波长300nm,强度200mJ/cm 2,UV时间30min。 A light-emitting diode, the difference between its preparation steps and Example 1 is: in step (3), vertical UV irradiation is performed from the cathode side, UV wavelength 300nm, intensity 200mJ/cm 2 , and UV time 30min.
实施例3Example 3
一种发光二极管,其制备步骤与实施例1的区别在于:步骤(2)中采用TiO 2溶液旋涂在发光层上。 A light-emitting diode, the preparation steps of which are different from those in Example 1 are: in step (2), a TiO2 solution is used to spin-coat on the light-emitting layer.
实施例4Example 4
一种发光二极管,其制备步骤与实施例1的区别在于:步骤(2)中采用ZnMgO。A light-emitting diode, the preparation steps of which are different from those in Example 1 are: ZnMgO is used in step (2).
实施例5Example 5
一种发光二极管,其制备步骤与实施例1的区别在于:步骤(4)中采用CdZnSe/ZnSe。步骤(5)中,紫外光照条件为:采用UV波长340nm,强度100mJ/cm 2的UV光垂直照射发光层时间10min。 A light-emitting diode, the preparation steps of which are different from those in Example 1 are: CdZnSe/ZnSe is used in step (4). In step (5), the ultraviolet illumination conditions are as follows: UV light with a UV wavelength of 340 nm and an intensity of 100 mJ/cm 2 is used to vertically irradiate the light-emitting layer for 10 minutes.
实施例6Example 6
一种发光二极管,其制备步骤与实施例1的区别在于:步骤(4)中采用CdZnSe/ZnSeS。步骤(5)中,紫外光照条件为:采用UV波长370nm,强度120mJ/cm 2的UV光垂直照射发光层时间10min。 A light-emitting diode, the preparation steps of which are different from those in Example 1 are: CdZnSe/ZnSeS is used in step (4). In step (5), the ultraviolet illumination conditions are as follows: UV light with a UV wavelength of 370 nm and an intensity of 120 mJ/cm 2 is used to vertically irradiate the light-emitting layer for 10 minutes.
对比例1Comparative Example 1
一种发光二极管,其制备步骤与实施例1的区别在于:未经步骤(3)和(5)UV处理。A light-emitting diode whose preparation steps differ from those of Example 1 in that it is not UV-treated in steps (3) and (5).
对比例2Comparative Example 2
一种发光二极管,其制备步骤与实施例1的区别在于:未经步骤(5)UV处理。A light-emitting diode, the preparation steps of which are different from those in Example 1 are: no UV treatment in step (5).
对比例3Comparative Example 3
一种发光二极管,其制备步骤与实施例1的区别在于:未经步骤(3)UV处理。A light-emitting diode, the preparation steps of which are different from those in Example 1 are that step (3) UV treatment is not performed.
为了验证本申请实施例的进步性,对实施例1~6和对比例1~3进行了如下性能测试,测试指标和测试方法如下,测试结果如下表1和附图3~5所示:In order to verify the progress of the embodiments of the present application, the following performance tests were carried out on Examples 1 to 6 and Comparative Examples 1 to 3. The test indicators and test methods are as follows, and the test results are shown in Table 1 and accompanying drawings 3 to 5 below:
(1)构建电流密度-电压(J-V)曲线(1) Constructing a current density-voltage (J-V) curve
在室温、空气湿度为30%-60%的环境下,采用LabView控制QE PRO光谱仪、Keithley 2400、Keithley 6485搭建的效率测试系统进行测试,并测量电压、电流等参数,构建J-V曲线。Under the environment of room temperature and air humidity of 30%-60%, use LabView to control the efficiency test system built by QE PRO spectrometer, Keithley 2400, and Keithley 6485 for testing, and measure parameters such as voltage and current to construct J-V curve.
(2)外量子效率(EQE):(2) External quantum efficiency (EQE):
注入到量子点中的电子-空穴对数转化为出射的光子数的比值,单位是%,是衡量电致发光器件优劣的一个重要参数,采用EQE光学测试仪器测定即可得到。具体计算公式如下:The ratio of the number of electron-hole pairs injected into the quantum dots converted to the number of photons emitted, the unit is %, is an important parameter to measure the quality of electroluminescent devices, and can be obtained by EQE optical testing instrument. The specific calculation formula is as follows:
Figure PCTCN2021141797-appb-000001
Figure PCTCN2021141797-appb-000001
式中,ηe为光输出耦合效率,ηr为复合的载流子数与注入载流子数的比值,χ为产生光子的激子数与总激子数的比值,KR为辐射过程速率,KNR为非辐射过程速率。测试条件:在室温下进行,空气湿度为30~60%。In the formula, ηe is the optical output coupling efficiency, ηr is the ratio of the number of recombined carriers to the number of injected carriers, χ is the ratio of the number of excitons that generate photons to the total number of excitons, KR is the radiation process rate, KNR is the nonradiative process rate. Test conditions: At room temperature, the air humidity is 30-60%.
(3)构建亮度-电压(L-V)曲线(3) Constructing a luminance-voltage (L-V) curve
亮度(L)为发光表面在指定方向的光通量与垂直于指定方向的光通量的面积之比(cd/m2)。采用LabView控制校准过的线性硅光管系统PDB-C613测量,并结合光谱和视觉函数计算器件亮度,并根据亮度随电压的变化,构建L-V曲线。Luminance (L) is the ratio (cd/m2) of the area of the luminous flux in the specified direction to the luminous flux perpendicular to the specified direction of the light-emitting surface. Using LabView to control the calibrated linear silicon light pipe system PDB-C613 to measure, and combine the spectral and visual functions to calculate the brightness of the device, and construct the L-V curve according to the change of brightness with voltage.
(4)寿命测试(4) Life test
在下列实施例中,寿命测试采用恒流法,在恒定50mA/cm 2电流驱动下,采用硅光系统测试器件亮度变化,记录器件亮度从最高点开始,衰减到最高亮 度95%的时间LT95,再通过经验公式外推器件1000nit LT95S寿命: In the following examples, the life test adopts the constant current method, under the constant current of 50mA/ cm2 , the silicon photosystem is used to test the brightness change of the device, and the time when the brightness of the device starts from the highest point and decays to 95% of the highest brightness is recorded LT95, Then extrapolate the 1000nit LT95S life of the device through the empirical formula:
1000nit LT95=(L Max/1000) 1.7×LT95; 1000nit LT95=(L Max /1000) 1.7 ×LT95;
此方法便于不同亮度水平器件的寿命比较,在实际光电器件中有着广泛的应用。This method is convenient for comparing the lifetime of devices with different brightness levels, and has a wide range of applications in practical optoelectronic devices.
表1Table 1
Figure PCTCN2021141797-appb-000002
Figure PCTCN2021141797-appb-000002
由实施例1~6和对比例1~3的表1测试结果,以及实施例1(S2)和对比例1(S1)附图3效率曲线(横坐标为电压,纵坐标为外量子效率),附图4电流密度-电压曲线(横坐标为电压,纵坐标为电流密度),附图5亮度曲线(横坐标为时间,纵坐标为亮度)可知,本申请实施例1~6经过UV处理后的器件,相对于对比例1~3的器件,有更好的发光效率和更长的发光寿命。From the test results of Table 1 of Examples 1 to 6 and Comparative Examples 1 to 3, and the efficiency curves of Figure 3 of Example 1 (S2) and Comparative Example 1 (S1) (the abscissa is the voltage, and the ordinate is the external quantum efficiency) , accompanying drawing 4 current density-voltage curve (abscissa is voltage, ordinate is current density), accompanying drawing 5 brightness curve (abscissa is time, ordinate is brightness), it can be known that the embodiment 1~6 of the present application is processed by UV Compared with the devices of Comparative Examples 1-3, the latter devices have better luminous efficiency and longer luminous lifetime.
以上仅为本申请的可选实施例而已,并不用于限制本申请。对于本领域的技术人员来说,本申请可以有各种更改和变化。凡在本申请的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本申请的权利要求范围之内。The above are only optional embodiments of the present application, and are not intended to limit the present application. Various modifications and variations of this application are possible for those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included within the scope of the claims of this application.

Claims (17)

  1. 一种发光器件的制备方法,其特征在于,包括以下步骤:A method for preparing a light-emitting device, comprising the following steps:
    获取沉积有阴极的衬底;obtaining a substrate on which the cathode is deposited;
    在所述阴极背离衬底的表面制备电子传输层,所述电子传输层中包括金属氧化物传输材料;preparing an electron transport layer on the surface of the cathode facing away from the substrate, the electron transport layer comprising a metal oxide transport material;
    对所述电子传输层进行第一次紫外光照射处理后,在所述电子传输层背离所述阴极的侧表面依次制备量子点发光层和阳极,得到发光器件。After the electron transport layer is irradiated with ultraviolet light for the first time, a quantum dot light-emitting layer and an anode are sequentially prepared on the side surface of the electron transport layer away from the cathode to obtain a light-emitting device.
  2. 如权利要求1所述的发光器件的制备方法,其特征在于,所述第一次紫外光照射处理的步骤包括:在紫外光波长为250~420nm,光波密度10~300mJ/cm 2的条件下,对所述电子传输层照射10~60min。 The method for preparing a light-emitting device according to claim 1, wherein the step of the first ultraviolet irradiation treatment comprises: under the conditions that the wavelength of the ultraviolet light is 250-420 nm and the light wave density is 10-300 mJ/cm 2 , irradiating the electron transport layer for 10-60 min.
  3. 如权利要求2所述的发光器件的制备方法,其特征在于,所述第一次紫外光照射处理的步骤包括:采用波长为320~420nm,光波密度10~150mJ/cm 2的紫外光波从所述电子传输层一侧进行照射处理10~60min。 The method for preparing a light-emitting device according to claim 2, wherein the step of the first ultraviolet irradiation treatment comprises: using an ultraviolet light wave with a wavelength of 320-420 nm and an optical wave density of 10-150 mJ/cm 2 from the The side of the electron transport layer is subjected to irradiation treatment for 10 to 60 minutes.
  4. 如权利要求2所述的发光器件的制备方法,其特征在于,所述第一次紫外光照射处理的步骤包括:采用波长为250~320nm,光波密度100~300mJ/cm 2的紫外光波从所述阴极一侧进行照射处理10~60min。 The method for preparing a light-emitting device according to claim 2, wherein the step of the first ultraviolet irradiation treatment comprises: using an ultraviolet light wave with a wavelength of 250-320 nm and a light wave density of 100-300 mJ/cm 2 from the The cathode side is irradiated for 10-60 min.
  5. 如权利要求3或4所述的发光器件的制备方法,其特征在于,所述第一次紫外光照射处理的条件还包括:在H 2O含量小于1ppm,温度为80~120℃的环境下进行。 The method for preparing a light-emitting device according to claim 3 or 4, wherein the conditions for the first ultraviolet irradiation treatment further include: under an environment where the H 2 O content is less than 1 ppm and the temperature is 80-120° C. conduct.
  6. 如权利要求1所述的发光器件的制备方法,其特征在于,所述金属氧化物传输材料选自:ZnO、TiO 2、Fe 2O 3、SnO 2、Ta 2O 3中的至少一种。 The method for preparing a light-emitting device according to claim 1, wherein the metal oxide transport material is selected from at least one of ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , and Ta 2 O 3 .
  7. 如权利要求1所述的发光器件的制备方法,其特征在于,所述金属氧化物传输材料选自:掺杂有金属元素的ZnO、TiO 2、Fe 2O 3、SnO 2、Ta 2O 3中的至少一种,其中,所述金属元素包括铝、镁、锂、镧、钇、锰、镓、铁、铬、钴中至少一种。 The method for preparing a light-emitting device according to claim 1, wherein the metal oxide transport material is selected from the group consisting of: ZnO, TiO 2 , Fe 2 O 3 , SnO 2 , Ta 2 O 3 doped with metal elements At least one of the metal elements, wherein the metal element includes at least one of aluminum, magnesium, lithium, lanthanum, yttrium, manganese, gallium, iron, chromium, and cobalt.
  8. 如权利要求1所述的发光器件的制备方法,其特征在于,所述金属传 输材料的粒径小于等于10nm。The method for manufacturing a light-emitting device according to claim 1, wherein the particle size of the metal transport material is less than or equal to 10 nm.
  9. 如权利要求6~8任一项所述的发光器件的制备方法,其特征在于,所述阴极包括Mg、Ag、Al、Ca中的至少一种金属材料或者至少两种的合金材料;The method for preparing a light-emitting device according to any one of claims 6 to 8, wherein the cathode comprises at least one metal material or at least two alloy materials among Mg, Ag, Al, and Ca;
    和/或,所述阴极的厚度为10~200nm。And/or, the thickness of the cathode is 10-200 nm.
  10. 如权利要求9所述的发光器件的制备方法,其特征在于,在所述电子传输层背离所述阴极的侧表面制备量子点发光层的步骤包括:在所述电子传输层背离所述阴极的侧表面沉积量子点材料后,进行第二次紫外光照射处理,形成量子点发光层。The method for preparing a light-emitting device according to claim 9, wherein the step of preparing the quantum dot light-emitting layer on the side surface of the electron transport layer away from the cathode comprises: on the side surface of the electron transport layer away from the cathode After the quantum dot material is deposited on the side surface, a second ultraviolet light irradiation treatment is performed to form a quantum dot light-emitting layer.
  11. 如权利要求9所述的发光器件的制备方法,其特征在于,制备所述量子点发光层后,还包括步骤:在所述量子点发光层背离所述电子传输层的表面制备空穴传输层,在所述空穴传输层背离所述量子点发光层的表面制备所述阳极。The method for preparing a light-emitting device according to claim 9, wherein after preparing the quantum dot light-emitting layer, the method further comprises the step of: preparing a hole transport layer on the surface of the quantum dot light-emitting layer away from the electron transport layer and preparing the anode on the surface of the hole transport layer away from the quantum dot light-emitting layer.
  12. 如权利要求10所述的发光器件的制备方法,其特征在于,所述量子点材料为核壳结构,所述量子点材料的外壳层含有锌元素。The method for preparing a light-emitting device according to claim 10, wherein the quantum dot material has a core-shell structure, and the outer shell layer of the quantum dot material contains zinc.
  13. 如权利要求10所述的发光器件的制备方法,其特征在于,所述量子点材料的外壳层包括:ZnS、ZnSe、ZnTe、CdZnS、ZnCdSe中的至少一种或者至少两种形成的合金材料。The method for preparing a light-emitting device according to claim 10, wherein the outer shell layer of the quantum dot material comprises: an alloy material formed by at least one or at least two of ZnS, ZnSe, ZnTe, CdZnS, and ZnCdSe.
  14. 如权利要求10所述的发光器件的制备方法,其特征在于,所述量子点材料的外壳层厚度为0.2~6.0nm。The method for preparing a light-emitting device according to claim 10, wherein the thickness of the outer shell layer of the quantum dot material is 0.2-6.0 nm.
  15. 如权利要求12~14任一项所述的发光器件的制备方法,其特征在于,所述第二次紫外光照射处理的步骤包括:在紫外光波长为300~420nm,光波密度10~300mJ/cm 2的条件下,对量子点发光层进行照射处理10~60min。 The method for preparing a light-emitting device according to any one of claims 12 to 14, wherein the step of the second ultraviolet light irradiation treatment comprises: when the wavelength of the ultraviolet light is 300-420 nm, the light wave density is 10-300 mJ/ Under the condition of cm 2 , the quantum dot light-emitting layer is irradiated for 10-60 min.
  16. 如权利要求12~14任一项所述的发光器件的制备方法,其特征在于,所述第二次紫外光照射处理的条件包括:在H 2O含量小于1ppm的环境下进行。 The method for preparing a light-emitting device according to any one of claims 12 to 14, wherein the conditions for the second ultraviolet irradiation treatment include: performing in an environment where the H 2 O content is less than 1 ppm.
  17. 一种发光器件,其特征在于,所述发光器件由如权利要求1~16任一 所述的方法制得。A light-emitting device, characterized in that, the light-emitting device is produced by the method according to any one of claims 1-16.
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