WO2022128402A1 - Capteur de pression pour déterminer une pression relative - Google Patents

Capteur de pression pour déterminer une pression relative Download PDF

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Publication number
WO2022128402A1
WO2022128402A1 PCT/EP2021/083101 EP2021083101W WO2022128402A1 WO 2022128402 A1 WO2022128402 A1 WO 2022128402A1 EP 2021083101 W EP2021083101 W EP 2021083101W WO 2022128402 A1 WO2022128402 A1 WO 2022128402A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
converter chamber
measuring
pressure sensor
sensor according
Prior art date
Application number
PCT/EP2021/083101
Other languages
German (de)
English (en)
Inventor
Kristine Bedner
Thomas Uehlin
Alexander Beck
Michael Noack
Florian Gutmann
Original Assignee
Endress+Hauser SE+Co. KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102020133407.9A external-priority patent/DE102020133407A1/de
Priority claimed from DE102021113923.6A external-priority patent/DE102021113923A1/de
Application filed by Endress+Hauser SE+Co. KG filed Critical Endress+Hauser SE+Co. KG
Publication of WO2022128402A1 publication Critical patent/WO2022128402A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Definitions

  • Pressure sensor for determining a relative pressure
  • the invention relates to a pressure sensor for determining a relative pressure.
  • a relative pressure sensor the pressure prevailing in a medium is measured relative to a relative pressure.
  • the relative pressure is usually the air pressure of the atmosphere prevailing in the vicinity of the pressure sensor.
  • the pressure can also be measured against an absolute value of the pressure, e.g. against a vacuum.
  • a pressure to be measured is absolute, i. H. recorded as a pressure difference versus vacuum.
  • a pressure to be measured is determined in the form of a pressure difference compared to a reference pressure - in many applications this is the atmospheric pressure at the place of use.
  • a pressure to be measured is referred to a fixed reference pressure
  • the vacuum pressure in the case of relative pressure measuring arrangements, a pressure to be measured is referred to a variable reference pressure, e.g. B. the ambient pressure recorded.
  • differential pressure sensors have become known which, for example, record the difference between two process pressures. Differential pressure sensors are used, for example, in tanks to measure fill levels or in pipelines to measure flow. It is also known to additionally determine the absolute pressure, e.g. with a differential pressure sensor, in order to be able to compensate for measurement errors due to the static pressure.
  • a large number of different pressure sensors are offered and sold by the applicant, e.g. under the designation CERABAR or DELTABAR.
  • the pressure and gas-tight separation of the two hydraulic paths is critical in the known designs of pressure sensors: in the case of the differential pressure sensor, the high-pressure side (plus side) must be separated from the low-pressure side (minus side) in a gas-tight and/or pressure-tight manner. In the case of a relative pressure sensor or absolute pressure sensor, a gas and pressure-tight separation of the measurement pressure side and relative pressure side or measurement pressure side and absolute pressure side/vacuum is also required.
  • the invention is based on the object of proposing a simply manufactured relative or absolute pressure sensor.
  • the object is achieved by a pressure sensor for determining a relative pressure or absolute pressure with a measuring mechanism and a converter chamber, with a separating membrane being provided in direct or indirect contact with the medium on or in an end region of the base body of the measuring mechanism facing the process.
  • the transducer chamber is located in the area of the pressure transducer that is remote from the process.
  • a pressure measurement cell with at least one pressure-sensitive measurement element with a first pressure application surface and a second pressure application surface is arranged in the converter chamber, the first pressure application surface and the second pressure application surface of the pressure-sensitive measurement element being arranged one behind the other relative to the longitudinal axis of the pressure sensor.
  • the pressure of the medium, which is applied to the separating membrane, is transmitted via a first hydraulic path to the first pressure application surface of the pressure-sensitive measuring element.
  • a second hydraulic path carries the relative pressure, for example the air pressure prevailing in the ambient atmosphere at the measuring location, or the absolute pressure to the second pressure-loading surface of the pressure-sensitive measuring element.
  • An outer surface of the converter chamber is connected in a pressure-tight and/or gas-tight manner to a corresponding surface of the measuring mechanism via a circumferential weld seam, with the welding beam for connecting the converter chamber and measuring mechanism being guided essentially transversely through at least one of the two hydraulic paths, so that the weld seam extends to both sides of the at least one hydraulic path.
  • the relative pressure sensor With the relative pressure sensor according to the invention, it is possible to connect the measuring mechanism and the converter chamber to one another in a pressure-tight and gas-tight manner with a single circumferential weld seam.
  • a beam welding process it is possible to weld through a hydraulic path without closing it. If necessary, the meeting sections of the hydraulic path can be widened in the border areas. For example, an expansion in the form of an appropriately dimensioned stepped bore is possible.
  • chamfers can be provided, which serve to accommodate excess weld metal.
  • the energy or the power of the welding beam is matched to the welding depth required for the weld seam.
  • the energy or power of the welding beam is varied over the depth of the weld.
  • the energy supply can be reduced, particularly in the area of the hydraulic path.
  • the energy or power of the welding beam is coordinated in such a way that the inside diameter of the hydraulic path or the capillary bore has essentially the same inside diameter as the rest of the hydraulic path or the rest of the capillary bore, even in the area of the weld seam on both sides .
  • that is after the welding process Provide the existing opening of the capillary bores in the connection area in such a way that hydraulic pressure transmission can take place.
  • the converter chamber is integrated into the base body of the measuring mechanism, i.e. in particular inserted into a corresponding recess in the measuring mechanism, or the converter chamber is attached to the area of the measuring mechanism facing away from the process.
  • the base body of the measuring mechanism is preferably designed as a process connection.
  • the process connection is connected to a housing adapter in a gas-tight and pressure-tight manner.
  • the circumferential weld seam for connecting the two components is guided axially—preferably from above—when the converter chamber is integrated into the measuring mechanism.
  • the circumferential weld seam is guided radially to connect the two components.
  • This configuration is preferably used when the converter chamber is placed on the measuring mechanism.
  • the diameters of the converter chamber and measuring mechanism must be adjusted or adapted to one another at the connection point.
  • Which welding seam is used depends on the design of the converter chamber and measuring mechanism and the connection of the hydraulic paths to the pressure measuring cell or to the pressure-sensitive measuring element. There is preferably a maximum of one penetration welding per hydraulic path transverse to the orientation of the hydraulic path. If it is necessary to weld through both hydraulic paths, the hydraulic paths are preferably oriented in such a way that the welding through can take place in one welding process.
  • an embodiment of the relative pressure sensor according to the invention provides that a recess for the converter chamber is provided in the area of the measuring unit facing away from the process.
  • the measuring unit with the corresponding capillary bores itself is advantageously in one piece, that is to say it is designed monolithically. Only the separating membrane is welded in or on the end area of the measuring unit facing the process. The pressure from the separating membrane is hydraulically conducted via a capillary borehole to the first pressure application surface of the pressure-sensitive measuring element facing the measuring mechanism. The relative pressure is conducted via a second capillary hole to the second pressure application surface facing away from the measuring mechanism.
  • a peripheral axial weld seam runs between corresponding lateral outer surfaces of the converter chamber and the recess in the measuring unit.
  • a beam welding process is used, in which the welding beam is directed axially from above in the (radial) Area of adjacent capillary bores of the second hydraulic path is passed through the capillary bores without closing them.
  • a weldable and possibly isolating cap is preferably provided, which covers the first pressure-impacting surface of the pressure-sensitive measuring element of the pressure-measuring cell toward the measuring unit.
  • the hydraulic path to the first pressurizing surface is preferably through the cap.
  • the cap consists of a ceramic disk coated with a weldable material. The converter chamber and cap are joined together in a separate welding process.
  • the two hydraulic paths to the two pressure application surfaces of the pressure-sensitive measuring element are guided past the converter chamber at the side and into the converter chamber.
  • the beam welding of the converter chamber to the measuring mechanism is then carried out via a radially circumferential weld seam at the height of the weldable cap.
  • the weld depth is dimensioned in such a way that the weld seam extends to both sides of the adjacent capillary bores of the measuring mechanism and converter chamber. In this configuration, welding is therefore carried out through two capillary bores without closing them.
  • the second hydraulic path runs laterally past the pressure measuring cell through the base body of the converter chamber and then into the converter chamber to the second pressure application surface.
  • the radially guided welding beam is used to weld only through the second hydraulic path.
  • the converter chamber is placed on the measuring unit or attached to the end area facing away from the process.
  • the measuring unit is tapered in the area of the contact surface to the converter chamber in such a way that the contact surfaces of the converter chamber and the measuring unit neck have essentially the same dimensions.
  • the pressure measuring cell is indented in the base body of the converter chamber.
  • the radial weld seam runs below the pressure measuring cell and on both sides of the adjacent capillary bores of the second hydraulic path, which is guided through the base body of the measuring mechanism and the base body of the converter chamber.
  • the pressure measuring cell has moved out of the main body of the converter chamber in the direction of the process.
  • the radial weld seam is preferably at the level of the outer surface of the pressure measuring cell facing away from the process and on both sides of the adjacent capillary bores of the second hydraulic path, which runs through the base body of the measuring mechanism and the base body of the converter chamber.
  • a further development of the pressure sensor according to the invention provides that at least one opening for supplying the relative pressure via the second hydraulic path is provided in the side wall of the measuring unit or the process connection.
  • the reference or relative pressure supply takes place via two openings that are preferably diametrically opposite one another.
  • the relative pressure is transmitted via the openings via the second hydraulic path to the second pressure application surface of the pressure-sensitive measuring element.
  • An additional configuration proposes that the at least one opening is closed by an air-permeable and moisture-impermeable membrane. Due to the supply of reference air from the environment at the measuring point of the pressure sensor, the reference air may contain moisture.
  • Relative pressure sensors have the problem that moisture can penetrate into the pressure measuring chamber with the gas, usually air, that reaches the pressure measuring cell through the reference pressure supply. Condensate forms when the temperature falls below the dew point inside the pressure measuring cell. To prevent this, the outlet opening of the reference air hole is sealed with an open-pored, hydrophobic plug of material or a membrane. This prevents contaminating particles from getting inside the housing and thus from reaching the pressure-sensitive measuring element. Splash and/or condensation water is/is repelled and water droplets are not sucked into the interior of the pressure sensor.
  • the membrane is designed in such a way that it causes a climatic separation of the reference air duct. A second reference air connection can optionally be provided. This ensures that the climatic separation is independent of the installation position of the pressure sensor.
  • Fig. 1a a reduced representation of Fig. 1, 1 b: a longitudinal section through a first embodiment of the pressure sensor according to the invention with the converter chamber attached to the measuring mechanism,
  • Fig. 2b the embodiment shown in Fig. 2a with the converter chamber attached to the measuring mechanism
  • Fig. 2c the embodiment shown in Fig. 2a with the converter chamber attached to the measuring mechanism in a variant that differs from Fig. 2b,
  • FIG. 2d the configuration shown in FIG. 2a with the converter chamber attached to the measuring mechanism in a variant that differs from FIGS. 2b and 2c.
  • a first embodiment of the pressure measurement transducer 1 can be seen in FIG.
  • the pressure sensor 1 is used to determine the relative pressure.
  • the main components of the pressure sensor 1 are the one-piece base body 5 of the measuring mechanism 2, on or in the end region of which faces the process there is a separating membrane 4 which is in direct or indirect contact with the medium, and the converter chamber 3.
  • the converter chamber 3 is in front Process remote area of the pressure sensor 1 arranged. It contains the pressure measuring cell 12 with at least one pressure-sensitive measuring element 13 with a first pressure-loading surface 13a and a second pressure-loading surface 13b.
  • the first pressure application surface 13a and the second pressure application surface 13b of the pressure-sensitive measuring element 13 are arranged one behind the other relative to the longitudinal axis L of the pressure sensor 1 .
  • the pressure measuring cell 12 is embedded in a filling body 25 .
  • the pressure p to be measured is transmitted via a first hydraulic path 7 from the separating membrane 4 to the first pressure application surface 13a of the pressure-sensitive measuring element 13 .
  • the second hydraulic path 8 in the case shown a diametral reference air path 8 with a reference air access 11 on each side in the end area, the relative pressure pR, usually the air or atmospheric pressure in the vicinity of the pressure sensor 1, is transmitted to the second pressure application surface 13b of the pressure-sensitive measuring element 13.
  • two diametral reference air paths 8, preferably offset by 180°, can also be provided.
  • At least a partial area of the outer surface or the lateral surface of the converter chamber 3 is connected in a pressure-tight and gas-tight manner to a corresponding surface of the measuring mechanism 2 via a circumferential weld seam 17 .
  • the welding beam for connecting the converter chamber 3 and the measuring unit 2 is guided axially from above and essentially transversely through the two adjoining hydraulic paths 8a, 8b, so that the weld seam 17 extends on both sides of the two hydraulic paths 8a, 8b. If there are two diametrical reference air paths 8, welding must be carried out through two further capillary bores.
  • the aforementioned configurations serve to ensure reliable ventilation; on the other hand, they allow the pressure sensor 1 to be installed in any position.
  • the hydraulic paths 8a, 8b designed as capillary bores can be widened in the boundary area of the converter chamber 3 and the measuring unit 2.
  • the through-welding takes place via widened capillary bores or stepped bores 19 in the end regions of the capillary bores.
  • the welding beam is guided through the widenings or the stepped bores 19 for the connection.
  • Exd separators 18 are installed in the hydraulic paths 7, 8a. These Exd separators 18 can be used when the pressure sensor 1 carries out measurements in the potentially explosive area.
  • FIGS. 1b, 1c and 1d differ in the arrangement of the converter chamber 3 relative to the measuring mechanism 2.
  • the converter chamber 3 is integrated into the measuring mechanism 2 in FIG. 1 and 1a is, the converter chamber 3 is attached to the measuring unit 2 here.
  • the converter chamber 3 sits on a corresponding narrowing of the base body 5 of the measuring mechanism 2.
  • the pressure measuring cell 13 is protected from the process by a cap 23.
  • the first hydraulic path 7 leads from the pressure chamber 10, which is arranged behind the separating diaphragm 4, laterally through the base body 5 of the measuring mechanism 2 and the base body 6 of the converter chamber 3 to the first pressure application surface 13a. While at that shown in Fig. 1 or Fig.
  • the diametrical second hydraulic path 8 extends radially on both sides of the converter chamber 3, the at least one reference air path 8 with the reference air inlets 11 is below the converter chamber 3.
  • the reference air path 8a is laterally through the base body 5 of the measuring mechanism 2 and the converter chamber 3 to the second pressurizing surface 13b out. The welding through both paths 7, 8 takes place via a radially guided welding beam.
  • the pressure measuring cell 12 is inserted into the converter chamber 3 .
  • the first hydraulic path 7 runs axially through the base bodies 5, 6 of the measuring mechanism 2 and the converter chamber 3 and ends on the first pressure-exerting surface 13a.
  • the gas-tight and pressure-tight connection takes place via a radially guided welding beam in the area of the end face of the converter chamber 3 facing the measuring unit 2 . It is welded through the reference air path 8 .
  • the pressure measuring cell 12 has moved out of the converter chamber 3 in the direction of the process.
  • the first hydraulic path 7 runs axially through the base bodies 5, 6 of the measuring mechanism 2 and the converter chamber 3 and ends on the first pressure-exerting surface 13a.
  • the gas-tight and pressure-tight connection takes place via a radially guided welding beam in the area of the end face of the converter chamber 3 facing the measuring mechanism 2, which lies above the pressure measuring cell 12, which is disengaged in the direction of the measuring mechanism 2.
  • the weld is pressure-bearing.
  • FIG. 2a The configuration shown in FIG. 2a largely corresponds to the configuration shown in FIG. 1 or FIG. 1a, but here there is only one hydraulic path 8 for supplying the reference pressure.
  • the reference air access 11 is closed off by a membrane 26 on the lateral surface of the measuring mechanism 2 .
  • the membrane 26 prevents moisture from reaching the pressure measuring cell 12 .
  • the second hydraulic path 8 leads to the second pressurizing surface 13b.
  • FIGS. 2b and 2c the pressure measuring cell 12 has moved out of the converter chamber 3 in the direction of the measuring unit 2 .
  • a radial welding process is used to weld through both hydraulic paths 7, 8 without closing them.
  • overload protection is provided.
  • the first hydraulic path 7 is led to the second pressurizing surface 13b, while the second reference air hydraulic path 8 is led to the first pressurizing surface 13a.
  • the filling bores 14 for the transmission liquid 16 and the corresponding closure element 15 are also sketched in the figures.
  • FIG. 2d the pressure measuring cell 12 has moved into the converter chamber 3.
  • FIG. The radial welding takes place through the—first diametrically and then—axially running reference air path 8 .
  • Shown here is a variant with a non-round membrane 26 to cover a reference air access 11 or several reference air accesses 11.
  • the membrane 26 is elongated and winds around the assembly or the measuring unit 2, preferably in the same way as a nameplate Cover reference air inlets 11. This can be clearly seen in the cross section D through the measuring unit 2. With this configuration, an effective, larger membrane can be implemented, as a result of which the influence of the ambient temperature is reduced. Alternatively, a thicker, more robust membrane 26 can be used.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

La présente invention concerne un capteur de pression (1) permettant de déterminer une pression relative, le capteur de pression comprenant une unité de mesure (2) et une chambre de convertisseur (3). Une membrane de séparation (4) en contact direct ou indirect avec le milieu est disposé sur ou dans une région d'extrémité du corps principal (5) de l'unité de mesure (2), laquelle région d'extrémité fait face au processus ; la chambre de convertisseur (3) est située dans la zone du capteur de pression (1) opposée au processus ; une cellule de mesure de pression (12) dotée d'au moins un élément de mesure sensible à la pression (13) ayant une première surface d'application de pression (13a) et une seconde surface d'application de pression (13b) est située dans la chambre de convertisseur (3) ; la première surface d'application de pression (13a) et la seconde surface d'application de pression (13b) de l'élément de mesure sensible à la pression (13) se trouvent l'une derrière l'autre par rapport à l'axe longitudinal (L) du capteur de pression (1) ; un premier trajet hydraulique (7) sert à transmettre la pression (p) depuis la membrane de séparation (4) à la première surface d'application de pression (13a) de l'élément de mesure sensible à la pression (13) ; et un second trajet hydraulique (8) sert à transmettre une pression relative (pR), qui correspond de préférence à la pression d'air régnant dans l'atmosphère ambiante au niveau du site de mesure, à la seconde surface d'application de pression (13b) de l'élément de mesure sensible à la pression (13) ; une surface externe de la chambre de convertisseur (3) est reliée à une surface correspondante de l'unité de mesure d'une manière étanche à la pression et étanche aux gaz par l'intermédiaire d'un joint de soudure périphérique (17) ; et le faisceau de soudage pour relier la chambre de convertisseur (3) et l'unité de mesure (2) est guidé sensiblement transversalement à travers au moins un des deux trajets hydrauliques (7, 8), de telle sorte que le joint de soudure (17) s'étend des deux côtés du ou des trajets hydrauliques (7, 8).
PCT/EP2021/083101 2020-12-14 2021-11-26 Capteur de pression pour déterminer une pression relative WO2022128402A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102020133407.9A DE102020133407A1 (de) 2020-12-14 2020-12-14 Druckmessaufnehmer zur Bestimmung eines Relativdrucks
DE102020133407.9 2020-12-14
DE102021113923.6 2021-05-28
DE102021113923.6A DE102021113923A1 (de) 2021-05-28 2021-05-28 Druckmessaufnehmer zur Bestimmung eines Relativdrucks

Publications (1)

Publication Number Publication Date
WO2022128402A1 true WO2022128402A1 (fr) 2022-06-23

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ID=78824814

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2021/083101 WO2022128402A1 (fr) 2020-12-14 2021-11-26 Capteur de pression pour déterminer une pression relative

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WO (1) WO2022128402A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970898A (en) * 1989-09-20 1990-11-20 Rosemount Inc. Pressure transmitter with flame isolating plug
US5709337A (en) * 1995-04-28 1998-01-20 Rosemount Inc. Mounting assembly for a pressure transmitter
DE102011017824A1 (de) * 2011-04-29 2012-10-31 Endress + Hauser Gmbh + Co. Kg Hochtemperaturdruckmessaufnehmer
US20150020600A1 (en) * 2013-07-19 2015-01-22 Rosemount Inc. Pressure transmitter having an isolation assembly with a two-piece isolator plug

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970898A (en) * 1989-09-20 1990-11-20 Rosemount Inc. Pressure transmitter with flame isolating plug
US5709337A (en) * 1995-04-28 1998-01-20 Rosemount Inc. Mounting assembly for a pressure transmitter
DE102011017824A1 (de) * 2011-04-29 2012-10-31 Endress + Hauser Gmbh + Co. Kg Hochtemperaturdruckmessaufnehmer
US20150020600A1 (en) * 2013-07-19 2015-01-22 Rosemount Inc. Pressure transmitter having an isolation assembly with a two-piece isolator plug

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