WO2022110115A1 - Industrial process intelligent control method and system - Google Patents

Industrial process intelligent control method and system Download PDF

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Publication number
WO2022110115A1
WO2022110115A1 PCT/CN2020/132679 CN2020132679W WO2022110115A1 WO 2022110115 A1 WO2022110115 A1 WO 2022110115A1 CN 2020132679 W CN2020132679 W CN 2020132679W WO 2022110115 A1 WO2022110115 A1 WO 2022110115A1
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Prior art keywords
measurement data
control
industrial process
deep learning
intelligent control
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PCT/CN2020/132679
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French (fr)
Chinese (zh)
Inventor
王珍珍
严俊杰
出口祥啓
神本崇博
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西安交通大学
德岛大学
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Application filed by 西安交通大学, 德岛大学 filed Critical 西安交通大学
Priority to CN202080003105.6A priority Critical patent/CN114846414A/en
Priority to JP2023532804A priority patent/JP2023553375A/en
Priority to PCT/CN2020/132679 priority patent/WO2022110115A1/en
Publication of WO2022110115A1 publication Critical patent/WO2022110115A1/en

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators

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  • the present application relates to the field of industrial process control, and in particular, to an industrial process intelligent control method and system.
  • Process control has a wide range of applications in power, petroleum, chemical, metallurgical and other industrial production. Through the control of process parameters such as temperature, pressure, flow, liquid level, composition, concentration, etc., industrial process efficiency can be improved, energy consumption can be reduced, and output can be increased. With the continuous advancement of scientific and technological innovation, the industrial production process is developing towards deep energy conservation and intelligence.
  • non-contact laser measurement technology has significant advantages compared with existing detection technology.
  • High-precision non-contact laser measurement can meet the requirements of accurate and rapid online measurement in high temperature and harsh environments. Its measurement data is the basis for building an integrated and intelligent industrial production system, laying a foundation for efficient integration and intelligent control of information systems and physical systems. Base.
  • laser measurement technologies such as computed tomography-tunable semiconductor laser absorption spectroscopy (CT-TDLAS) and laser-induced breakdown spectroscopy (LIBS) are developed to achieve in-situ, non-contact and high-speed measurement of temperature and material composition in industrial processes. Spatiotemporally resolved online measurements.
  • CT-TDLAS computed tomography-tunable semiconductor laser absorption spectroscopy
  • LIBS laser-induced breakdown spectroscopy
  • the problems that are prone to occur in measurement are: only point measurement can be achieved instead of surface measurement, non-online measurement, and non-fast; the problems that are prone to occur in control are: Due to the defects of the measurement method, the control is delayed and the adjustment is delayed; CFD simulation needs measurement data to verify and optimize, and the accuracy of the simulation results is insufficient; in addition, there are problems such as insufficient data volume.
  • the response speed of CFD simulation analysis is slow, the simulation time is too long, and the simulation results are not accurate enough, resulting in problems such as adjustment lag and inaccurate simulation analysis.
  • an embodiment of the present invention proposes an industrial process intelligent control method and system to solve the problems existing in the prior art.
  • an embodiment of the present application discloses an industrial process intelligent control method, which includes the following steps:
  • the control object is controlled according to the control action amount obtained by the control scheme.
  • an embodiment of the present application further discloses a terminal device, including:
  • One or more machine-readable media having instructions stored thereon that, when executed by the one or more processors, cause the terminal device to perform the method as previously described.
  • an embodiment of the present application discloses an industrial process intelligent control system
  • the industrial process intelligent control system includes: a measurement device, an analysis module, a process control platform, and an automatic control device;
  • the measurement device is used to obtain the original measurement data of the control object under the condition that the stop condition is not reached;
  • the analysis module is used to analyze the original measurement data to obtain the analyzed measurement data
  • the process control platform is used for using the deep learning model to learn the analyzed measurement data to determine a control scheme
  • the automatic control device is used for controlling the control object according to the control action amount obtained by the control scheme.
  • An embodiment of the present application also discloses a terminal device, including:
  • One or more machine-readable media having instructions stored thereon, when executed by the one or more processors, cause the terminal device to perform the above-described method.
  • An embodiment of the present application further discloses one or more machine-readable media on which instructions are stored, and when executed by one or more processors, cause the terminal device to execute the above method.
  • FIG. 1 is a block diagram of an industrial process intelligent control system according to an embodiment of the present invention.
  • FIG. 2 is a schematic structural diagram of a deep learning model corresponding to the deep learning process 1 according to an embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a deep learning model corresponding to the deep learning process 2 according to an embodiment of the present invention.
  • FIG. 4 is a flowchart of an industrial process intelligent control method according to an embodiment of the present invention.
  • FIG. 5 is a block diagram of an intelligent control system in a thermal power plant according to an embodiment of the present invention.
  • FIG. 6 shows a block diagram of an intelligent control system in a semiconductor industry process according to an embodiment of the present invention.
  • Figure 7 schematically shows a block diagram of a terminal device for carrying out the method according to the invention.
  • Figure 8 schematically shows a memory unit for holding or carrying program code implementing the method according to the invention.
  • FIG. 1 is a block diagram of an industrial process intelligent control system according to an embodiment of the present invention.
  • the industrial process intelligent control system proposed in the embodiment of the present invention has a wide range of uses, for example, it can be applied to measure the temperature field and the concentration field by using a laser.
  • the industrial process intelligent control system is used to control the control object, including: a measuring device 10, an Module 20 , process control platform 30 and automatic control device 40 .
  • the measurement device 10 is used to obtain the original measurement data of the control object
  • the analysis module 20 is configured to analyze the original measurement data to obtain the analyzed measurement data
  • the process control platform 30 is configured to determine a control scheme according to the analyzed measurement data
  • the automatic control device 40 is configured to control the control object according to the control action amount obtained from the control scheme;
  • the measurement device 10 In the case where the stop condition is not reached, the measurement device 10 repeatedly performs the operation of measuring the raw measurement data.
  • the measurement device 10 is, for example, a laser measurement device that implements various laser measurement techniques such as computed tomography-tunable semiconductor laser absorption spectroscopy and laser-induced breakdown spectroscopy, and may also be a conventional measurement device.
  • the original measurement data is the data obtained by measurement. But it is not limited to this device, other measurement devices that meet the measurement requirements are suitable for the industrial process intelligent control system of the present invention; in the embodiment of the present invention, the original measurement data obtained by the real-time measurement of the laser measurement device
  • the parameters require the analysis module 20 to select the corresponding measurement method.
  • the analysis module 20 may be an analysis model, which analyzes the raw measurement data of the measurement device collected in real time, and obtains the analyzed measurement data, that is, the process parameters of the industrial process to be obtained.
  • the fields of thermal power plants, semiconductor industries, engines, gas turbines, and metallurgical industries need to obtain temperature, pressure, flow, liquid level, composition
  • the industrial process of process parameters such as concentration, and the measurement device required to build the control object.
  • the measurement data analyzed by the analysis module 20 in the embodiment of the present invention are, for example, process parameters such as temperature, pressure, flow rate, liquid level, composition, and concentration. This will be described as an example below.
  • the process control platform 30 learns the analyzed measurement data through the deep learning model 50 , where the source of the analyzed measurement data is not limited to the laser measurement method, but also includes other process parameters obtained by other measurement methods. .
  • the CFD simulation module 70 of the control object is optimized according to the learning result, and the optimized CFD data is obtained, the CFD database 60 is established, and the CFD big data analysis platform is developed.
  • the analyzed measurement data is combined with the existing CFD data to obtain optimized CFD data through deep learning of the deep learning model 50, and then a control scheme is provided through the process control platform 30 according to the optimized CFD data;
  • the automatic control device 40 makes the actuator act according to the control scheme provided by the process control platform 30 , adjusts the control action amount, and then changes the controlled amount of the control object 100 .
  • the measurement device 10 is used to repeatedly measure the controlled object 100, and through the process control platform 30, according to the error between the given value of the controlled variable and the measured value of the controlled variable and the control Analyze and judge various evaluation indicators of the object industrial process, obtain process parameters that meet the conditions, and achieve the expected control effect.
  • the measurement and control of process parameters in the industrial process are in a state of dynamic adjustment, and the process parameters can be monitored in real time.
  • the index analyzes whether the control object 100 needs to be controlled by the automatic control device 40 .
  • the evaluation of the industrial process intelligent control system based on laser measurement in the control process can be analyzed from five aspects: 1, the evaluation index of the laser measurement method itself; 2, the evaluation index of the CFD simulation model itself; 3, the measurement results and simulation The error of the result; 4, the error of the measured value of the controlled quantity and the given value of the controlled quantity; and, 5, the comprehensive evaluation index such as the efficiency and energy consumption of the industrial process.
  • the stop condition may be that a desired control condition has been reached, or a production time has been reached, or the like. When it is judged that the stop condition is reached, the cyclic measurement is stopped.
  • FIG. 1 shows two deep learning processes involved in the process control platform 30 , which are respectively deep learning process 1 and deep learning process 2 marked by dotted lines.
  • the optimization of the measurement data and CFD data of the control object 100 under different operating conditions and the formation of big data from the CFD database is a deep learning process 1.
  • This learning process is a long-term process, with the accumulation of data for several months or years, and the amount of data is very large.
  • This learning process is a transient real-time process, and timeliness is very important.
  • the above two deep learning processes may be performed by different deep learning models respectively, or may be performed in the same deep learning model.
  • only the deep learning model 50 is used to represent the executive body performing the two different deep learning processes 1 and 2 .
  • deep learning process 2 may be performed by one deep learning model, while deep learning process 1 may be performed by another deep learning model.
  • FIG. 2 is a schematic diagram of the model architecture for the deep learning process 1 .
  • the input layer 1 is the measurement data at different times and the result error of the deep learning process 2
  • the input layer 2 is the various parameters of the CFD model
  • the output layer is the optimized parameters calculated according to the CFD model. of CFD data. According to the output CFD data, establish a CFD database and form CFD big data.
  • FIG. 3 is a schematic diagram of the model architecture for the deep learning process 2 .
  • the input layer 1 of the deep learning model is the real-time measurement data
  • the input layer 2 is the CFD data in the existing CFD database, including the results of simple algebraic operations on the existing CFD data
  • the output layer is based on the existing CFD data.
  • the optimized CFD data obtained by CFD data calculation, and then provide a control scheme through the process control platform according to the optimized CFD data.
  • the process control platform may further include a first database unit and a first deep learning model unit for respectively performing the following operations:
  • the first database unit is used to store a plurality of analyzed measurement data
  • the first deep learning model unit is configured to use the first deep learning model to learn the stored multiple analyzed measurement data, and output the CFD data processed by the first deep learning model.
  • the process control platform may further include a second database unit and a second deep learning model unit for respectively performing the following operations:
  • the second database unit is used to store a plurality of analyzed measurement data and historical CFD data
  • the first deep learning model unit is configured to use the second deep learning model to learn the stored multiple analyzed measurement data and historical CFD data, and to optimize the CFD simulation module.
  • the analysis module may further include an analysis model determination unit and an analysis unit, respectively configured to perform the following operations:
  • the analysis model determination unit is used for determining the analysis model according to the raw measurement data of the measurement device collected in real time;
  • the analysis unit is used for performing analysis using the determined analysis model to obtain the analyzed measurement data.
  • the industrial process intelligent control system proposed in this embodiment at least further includes the following advantages:
  • the analyzed measurement data is learned through artificial intelligence algorithms such as deep learning inside the process control platform.
  • the source of the analyzed measurement data here is not limited to the laser measurement method, but also Include other process parameters obtained by other measurement methods.
  • the CFD simulation module of the control object is optimized, and the optimized CFD data is obtained, the CFD database is established, and the CFD big data analysis platform is developed.
  • the analyzed real-time measurement data is combined with the existing CFD data to obtain optimized CFD data through deep learning of the process control platform, and then a control scheme is provided through the process control platform according to the optimized CFD data.
  • the automatic control device makes the actuator act to adjust the control action amount according to the control scheme provided by the process control platform, thereby changing the controlled amount of the control object.
  • the measurement device is used to repeatedly measure the control object, and through the process control platform, analysis and judgment are made according to the error between the given value of the controlled quantity and the measured value of the controlled quantity and various evaluation indicators of the industrial process of the control object. Obtain the process parameters that meet the conditions to achieve the expected control effect.
  • the measurement and control of process parameters in the industrial process are in a state of dynamic adjustment, and the process parameters can be monitored in real time. Whether the index analysis needs to control the control object through the automatic control device.
  • control system and method of the present invention are not only suitable for thermal power plants and semiconductor industrial processes, but also can be applied to the fields of engines, gas turbines, metallurgical industries, etc., to realize intelligent control of industrial processes. But it is not limited to these fields.
  • the invention establishes the CFD simulation model of the control object, calculates the CFD data of the control object under different operating conditions, and provides the CFD data obtained by the calculation to the process control platform in the form of a database; the process control platform uses artificial intelligence algorithms such as deep learning inside the process control platform. Accumulate and study the analyzed measurement data, and optimize the CFD simulation module of the control object according to the learning results to obtain the optimized CFD data; establish CFD according to the CFD data of the control object under different operating conditions and the CFD data optimized by deep learning Database, develop CFD big data analysis platform in process control platform.
  • the real-time process parameters of the control object are in a dynamic measurement state, the CFD data optimized by deep learning is also in a dynamic adjustment state, and the established CFD database is constantly being updated and improved.
  • data analysis is performed between the analyzed measurement data, CFD data and optimized CFD data through artificial intelligence algorithms such as deep learning.
  • FIG. 4 is a flowchart showing the steps of an industrial process intelligent control method according to a second embodiment of the present invention. As shown in FIG. 4 , the industrial process intelligent control method according to the embodiment of the present invention includes the following steps:
  • the execution subject is, for example, the measurement device 10 of the industrial process intelligent control system
  • the measurement device 10 is, for example, implementing various laser measurement technologies such as computed tomography-tunable semiconductor laser absorption spectroscopy technology, laser-induced breakdown spectroscopy technology, etc.
  • the laser measuring device can also be a traditional measuring device, but it is not limited to this device, and other measuring devices that meet the measurement requirements are suitable for the industrial process intelligent control method described in the present invention.
  • the raw measurement data is, for example, data obtained by measurement.
  • the evaluation of the industrial process intelligent control system based on laser measurement in the control process can be analyzed from five aspects: 1, the evaluation index of the laser measurement method itself; 2, the evaluation index of the CFD simulation model itself; 3, the measurement results and simulation The error of the result; 4, the error of the measured value of the controlled quantity and the given value of the controlled quantity; and, 5, the comprehensive evaluation index such as the efficiency and energy consumption of the industrial process.
  • the stop condition may be that a desired control condition has been reached, or a production time has been reached, or the like. When it is judged that the stop condition is reached, the cyclic measurement is stopped.
  • the execution subject is, for example, the analysis module 20 of the industrial process intelligent control system.
  • the analysis module 20 may be an analysis model, which analyzes the raw measurement data of the measurement device collected in real time, and obtains the analyzed measurement data, that is, the process parameters of the industrial process to be obtained.
  • the executive body is, for example, the process control platform 30 of the industrial process intelligent control system.
  • the process control platform 30 learns the analyzed measurement data through the deep learning model 50 , uses the deep learning model to optimize the analyzed measurement data, and generates a control plan according to the optimized CFD data.
  • S104 Control the control object according to the control action amount obtained by the control scheme.
  • the executive body is, for example, the automatic control device 40 of the industrial process intelligent control system.
  • the automatic control device 40 makes the actuator act according to the control scheme provided by the process control platform 30 , adjusts the control action amount, and then changes the controlled amount of the control object 100 .
  • the industrial process intelligent control method proposed in this embodiment at least further includes the following advantages:
  • the analyzed measurement data is learned through artificial intelligence algorithms such as deep learning inside the process control platform.
  • the source of the analyzed measurement data here is not only limited to the laser measurement method, but also Include other process parameters obtained by other measurement methods.
  • the CFD simulation module of the control object is optimized, and the optimized CFD data is obtained, the CFD database is established, and the CFD big data analysis platform is developed.
  • the analyzed real-time measurement data is combined with the existing CFD data to obtain optimized CFD data through deep learning of the process control platform, and then a control scheme is provided through the process control platform according to the optimized CFD data.
  • the automatic control device makes the actuator act to adjust the control action amount according to the control scheme provided by the process control platform, thereby changing the controlled amount of the control object.
  • the measurement device is used to repeatedly measure the control object, and through the process control platform, analysis and judgment are made according to the error between the given value of the controlled quantity and the measured value of the controlled quantity and various evaluation indicators of the industrial process of the control object. Obtain the process parameters that meet the conditions to achieve the expected control effect.
  • the measurement and control of process parameters in the industrial process are in a state of dynamic adjustment, and the process parameters can be monitored in real time. Whether the index analysis needs to control the control object through the automatic control device.
  • control system and method of the present invention are not only suitable for thermal power plants and semiconductor industrial processes, but also can be applied to the fields of engines, gas turbines, metallurgical industries, etc., to realize intelligent control of industrial processes. But it is not limited to these fields.
  • FIG. 5 is a block diagram of an intelligent control system in a thermal power plant according to an embodiment of the present invention.
  • the intelligent monitoring and control system and method for coupling laser measurement and numerical simulation of industrial process temperature field and component concentration field are described in detail by taking the boiler control of thermal power plant as an example.
  • Laser absorption spectroscopy technology measures the temperature distribution of boiler furnace and tail flue and the concentration distribution of other components, and realizes the application of high-end technologies such as big data, Internet of Things, cloud platform in thermal power plants, thereby improving the efficiency of thermal power plants and realizing energy saving and reduction in thermal power plants. It can realize intelligent control of thermal power plant process.
  • the system shown in Figure 5 mainly includes two parts: measurement control system and intelligent monitoring and control platform.
  • a CT-TDLAS measurement device is built according to the boiler furnace structure and tail flue structure, and the internal temperature field and gas component concentration field of the furnace, the temperature field of the tail flue, and the nitrogen oxides and ammonia before and after the denitrification device are measured respectively. gas concentration field, etc.
  • the original measurement data of each measuring device is collected in real time, and the original measurement data is analyzed by the analysis module to obtain the temperature field and gas concentration field of the measurement section of the furnace and the tail flue, and the analyzed measurement data can be displayed on the display.
  • the control scheme is provided through the analysis of the new generation process control platform, and the powder feeding volume and the secondary air volume of the boiler are adjusted by the automatic control device, so that the furnace and tail flue temperature and gas concentration meet the set values and achieve the expected control effect.
  • the measurement data of CT-TDLAS is represented by ai
  • the CT-TDLAS database Ai is established from the historical measurement data of CT-TDLAS
  • the CFD simulation model of the combustion process of the boiler under different operating conditions is established according to the boiler structure.
  • the CFD simulation results are obtained by setting the parameters of the CFD model, such as the CFD data of the temperature field and the concentration field, and the CFD database Di is established; according to the laser optical path structure of the CT-TDLAS measurement device, the temperature and concentration of the CT-TDLAS data and the CFD data are obtained respectively.
  • the mean, fluctuation value, and probability density function on each path of the distribution denoted by Bi and To represent, compare the database Bi of CT-TDLAS measurement results path statistics with the database of CFD simulation results path statistics
  • the correction function is formed by the CFD model parameter database Ci and the CFD database Di, as well as the database Bi of the path statistics of the measurement results and the database of the path statistics of the simulation results
  • the difference constitutes a label.
  • the deep learning method is used to process data preprocessing, feature selection, model construction, parameter optimization and evaluation.
  • the deep learning process When the model error after deep learning is not less than the set value error ⁇ , the deep learning process The model parameters continue to be optimized; when the model error after deep learning is less than the set value error ⁇ , the CFD model parameters with the smallest error between the simulation results and the measurement results are output, and the established model parameter database Ci is updated and improved to obtain the optimized CFD data. Further update and improve the established CFD database Di.
  • the long-term accumulation process that is, the CFD database is obtained through the accumulation of measurement data and CFD simulation data to form CFD big data
  • the transient real-time process is to obtain optimized CFD data based on real-time measurement data and existing CFD data, and then provide a control scheme bi .
  • the thermal power plant intelligent control system can also be evaluated from the following aspects To analyze and evaluate:
  • Evaluation of CT-TDLAS measurement methods such as the accuracy of TDLAS measurement of temperature and concentration and the reconstruction accuracy of CT algorithm; CFD simulation errors such as grid scale error, time step error, iteration error and input parameter error; furnace internal temperature and gas Errors between the measured values of component concentrations, tail flue temperature, nitrogen oxides and ammonia concentrations before and after the denitrification device and the given values; steam consumption and heat consumption of steam turbine units, heat consumption of power plants, power plants Coal consumption and power generation efficiency and other thermal economic indicators of power plants.
  • CFD simulation errors such as grid scale error, time step error, iteration error and input parameter error
  • furnace internal temperature and gas Errors between the measured values of component concentrations, tail flue temperature, nitrogen oxides and ammonia concentrations before and after the denitrification device and the given values
  • steam consumption and heat consumption of steam turbine units heat consumption of power plants, power plants Coal consumption and power generation efficiency and other thermal economic indicators of power plants.
  • FIG. 6 shows a block diagram of an intelligent control system in a semiconductor industry process according to an embodiment of the present invention.
  • the intelligent monitoring and control system and method for coupling the laser measurement and numerical simulation of the temperature field and component concentration field of the industrial process are described in detail by taking the control of the film-forming device in the semiconductor manufacturing process as an example.
  • the tunable semiconductor laser absorption spectroscopy technology measures the temperature field and gas concentration field distribution in the film forming device to achieve the purpose of controlling the performance of semiconductor materials.
  • control system and method of the present invention are not only suitable for thermal power plants and semiconductor industrial processes, but also can be applied to fields such as engines, gas turbines and metallurgical industries to realize intelligent control of industrial processes. But it is not limited to these fields.
  • the laser measurement technology adopted in the present invention includes not only the computed tomography scanning-tunable semiconductor laser absorption spectroscopy technology, but also the laser-induced breakdown spectroscopy technology and the like.
  • FIG. 7 is a schematic diagram of a hardware structure of a terminal device according to an embodiment of the present application.
  • the terminal device may include an input device 90 , a processor 91 , an output device 92 , a memory 93 and at least one communication bus 94 .
  • a communication bus 94 is used to enable communication connections between elements.
  • the memory 93 may include a high-speed RAM memory, and may also include a non-volatile memory NVM, such as at least one disk memory.
  • Various programs may be stored in the memory 93 for performing various processing functions and implementing the method steps of this embodiment.
  • the above-mentioned processor 91 may be, for example, a central processing unit (Central Processing Unit, CPU for short), an application specific integrated circuit (ASIC), a digital signal processor (DSP), a digital signal processing device (DSPD), a programmable logic Device (PLD), Field Programmable Gate Array (FPGA), controller, microcontroller, microprocessor or other electronic component implementation, the processor 91 is coupled to the aforementioned input device 90 and output device 92 through wired or wireless connections.
  • CPU Central Processing Unit
  • ASIC application specific integrated circuit
  • DSP digital signal processor
  • DSPD digital signal processing device
  • PLD programmable logic Device
  • FPGA Field Programmable Gate Array
  • the above-mentioned input device 90 may include various input devices, for example, may include at least one of a user-oriented user interface, a device-oriented device interface, a software programmable interface, a camera, and a sensor.
  • the device-oriented device interface may be a wired interface for data transmission between devices, or a hardware plug-in interface (such as a USB interface, serial port, etc.) for data transmission between devices.
  • the user-oriented user interface may be, for example, a user-oriented control button, a voice input device for receiving voice input, and a touch sensing device (such as a touch screen with a touch sensing function, a touch sensing device for receiving a user's touch input) board, etc.); optionally, the programmable interface of the above software can be, for example, an entry for a user to edit or modify a program, such as an input pin interface or an input interface of a chip. Audio input devices such as microphones can receive voice data.
  • the output device 92 may include output devices such as a display, an audio system, and the like.
  • the processor of the terminal device has a function for executing each module of the data processing apparatus in each device, and the specific functions and technical effects may refer to the above-mentioned embodiments, which will not be repeated here.
  • FIG. 8 is a schematic diagram of a hardware structure of a terminal device according to another embodiment of the present application.
  • FIG. 8 is a specific embodiment of the implementation process of FIG. 7 .
  • the terminal device in this embodiment includes a processor 101 and a memory 102 .
  • the processor 101 executes the computer program codes stored in the memory 102 to implement the industrial process intelligent control method shown in FIG. 4 in the above embodiment.
  • the memory 102 is configured to store various types of data to support operation at the terminal device. Examples of such data include instructions for any application or method operating on the end device, such as messages, pictures, videos, etc.
  • the memory 102 may include random access memory (RAM for short), and may also include non-volatile memory (non-volatile memory), such as at least one disk storage.
  • the processor 101 is provided in the processing component 100 .
  • the terminal device may further include: a communication component 103, a power supply component 104, a multimedia component 105, an audio component 106, an input/output interface 107 and/or a sensor component 108.
  • Components and the like specifically included in the terminal device are set according to actual requirements, which are not limited in this embodiment.
  • the processing component 100 generally controls the overall operation of the terminal device.
  • the processing component 100 may include one or more processors 101 to execute instructions to perform all or part of the steps of FIG. 4 described above. Additionally, processing component 100 may include one or more modules to facilitate interaction between processing component 100 and other components.
  • processing component 100 may include a multimedia module to facilitate interaction between multimedia component 105 and processing component 100 .
  • the power supply assembly 104 provides power to various components of the terminal device.
  • Power components 104 may include a power management system, one or more power supplies, and other components associated with generating, managing, and distributing power to end devices.
  • the multimedia component 105 includes a display screen that provides an output interface between the terminal device and the user.
  • the display screen may include a liquid crystal display (LCD) and a touch panel (TP). If the display screen includes a touch panel, the display screen may be implemented as a touch screen to receive input signals from a user.
  • the touch panel includes one or more touch sensors to sense touch, swipe, and gestures on the touch panel. The touch sensor may not only sense the boundaries of a touch or swipe action, but also detect the duration and pressure associated with the touch or swipe action.
  • Audio component 106 is configured to output and/or input audio signals.
  • the audio component 106 includes a microphone (MIC) that is configured to receive external audio signals when the terminal device is in an operational mode, such as a speech recognition mode.
  • the received audio signal may be further stored in the memory 102 or transmitted via the communication component 103 .
  • the audio component 106 also includes a speaker for outputting audio signals.
  • the input/output interface 107 provides an interface between the processing component 100 and a peripheral interface module, which may be a click wheel, a button, or the like. These buttons may include, but are not limited to, volume buttons, start buttons, and lock buttons.
  • Sensor assembly 108 includes one or more sensors for providing various aspects of the status assessment for the end device.
  • the sensor assembly 108 may detect the open/closed state of the end device, the relative positioning of the assembly, the presence or absence of user contact with the end device.
  • the sensor assembly 108 may include a proximity sensor configured to detect the presence of nearby objects in the absence of any physical contact, including detecting the distance between the user and the end device.
  • the sensor assembly 108 may also include a camera or the like.
  • Communication component 103 is configured to facilitate wired or wireless communication between end devices and other devices.
  • Terminal devices can access wireless networks based on communication standards, such as WiFi, 2G or 3G, or a combination thereof.
  • the terminal device may include a SIM card slot, and the SIM card slot is used for inserting a SIM card, so that the terminal device can log in to the GPRS network and establish communication with the server through the Internet.
  • the communication component 103, the audio component 106, the input/output interface 107, and the sensor component 108 involved in the embodiment of FIG. 8 can all be implemented as the input device in the embodiment of FIG. 7 .
  • Embodiments of the present application provide a terminal device, including: one or more processors; and one or more machine-readable media on which instructions are stored, which, when executed by the one or more processors, cause The terminal device executes one or more of the methods described in the embodiments of this application.

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Abstract

An industrial process intelligent control method and system. The industrial process intelligent control method comprises the following steps: if a stop condition is not met, acquiring original measurement data of a controlled object (100) (S101); analyzing the original measurement data to obtain analyzed measurement data (S102); learning the analyzed measurement data by means of a deep learning model (50), and determining a control scheme (S103); and controlling the controlled object according to a controlled action amount obtained by the control scheme (S104). By means of a new generation process control platform (30), analysis and judgment are performed according to an error between a given value of the controlled variable and a measured value of the controlled variable and various evaluation indicators of the industrial process of the controlled object (100), such that a control effect which satisfies requirements and expectations is obtained.

Description

工业过程智能控制方法和系统Industrial process intelligent control method and system 技术领域technical field
本申请涉及工业过程控制领域,特别是涉及一种工业过程智能控制方法和系统。The present application relates to the field of industrial process control, and in particular, to an industrial process intelligent control method and system.
背景技术Background technique
过程控制在电力、石油、化工、冶金等工业生产中有着广泛的应用。通过对温度、压力、流量、液位、成分、浓度等过程参数的控制,可使工业过程效率提高、能耗减少和产量增加。随着科技创新的不断推进,工业生产过程向深度节能和智能化发展。Process control has a wide range of applications in power, petroleum, chemical, metallurgical and other industrial production. Through the control of process parameters such as temperature, pressure, flow, liquid level, composition, concentration, etc., industrial process efficiency can be improved, energy consumption can be reduced, and output can be increased. With the continuous advancement of scientific and technological innovation, the industrial production process is developing towards deep energy conservation and intelligence.
过程参数的快速精确测量是实现工业过程控制的基本前提。非接触式激光测量技术作为一种潜在的、前瞻性的在线分析技术,与现有的检测技术相比具有显著的优势。高精度非接触式激光测量可满足高温恶劣环境下在线精确快速测量的要求,其测量数据是构建一体化、智能化工业生产体系的依据,为信息系统与物理系统的高效集成与智能化调控奠定基础。The fast and accurate measurement of process parameters is the basic premise for realizing industrial process control. As a potential and prospective online analysis technology, non-contact laser measurement technology has significant advantages compared with existing detection technology. High-precision non-contact laser measurement can meet the requirements of accurate and rapid online measurement in high temperature and harsh environments. Its measurement data is the basis for building an integrated and intelligent industrial production system, laying a foundation for efficient integration and intelligent control of information systems and physical systems. Base.
因此,发展计算机断层扫描-可调谐半导体激光吸收光谱技术(CT-TDLAS)和激光诱导击穿光谱技术(LIBS)等激光测量技术,实现工业过程温度和物质组分的原位、非接触和高时空分辨的在线测量。将高精度的激光测量与数值模拟耦合的工业过程智能监测与控制平台,成为了工业测控领域过程监测与控制的重要发展方向,具有很高的实际应用价值。Therefore, laser measurement technologies such as computed tomography-tunable semiconductor laser absorption spectroscopy (CT-TDLAS) and laser-induced breakdown spectroscopy (LIBS) are developed to achieve in-situ, non-contact and high-speed measurement of temperature and material composition in industrial processes. Spatiotemporally resolved online measurements. The industrial process intelligent monitoring and control platform that couples high-precision laser measurement and numerical simulation has become an important development direction of process monitoring and control in the field of industrial measurement and control, and has high practical application value.
然而现如今的工业过程控制,存在各种各样的问题,例如测量方面容易出现的问题在于:只能实现点测量而非面测量、非在线测量、非快速;控制方面容易出现的问题在于:由于测量方法的缺陷,导致控制有迟延、调节滞后;CFD仿真需要有测量数据来验证、优化,仿真结果准确度不足;此外,还存在数据量不足等问题。However, there are various problems in today's industrial process control. For example, the problems that are prone to occur in measurement are: only point measurement can be achieved instead of surface measurement, non-online measurement, and non-fast; the problems that are prone to occur in control are: Due to the defects of the measurement method, the control is delayed and the adjustment is delayed; CFD simulation needs measurement data to verify and optimize, and the accuracy of the simulation results is insufficient; in addition, there are problems such as insufficient data volume.
例如CFD仿真分析的反应速度慢、仿真时间过长、仿真结果不够精确,导致调节滞后、仿真分析不准确等问题,间接导致过程控制平台输出的参数不够准确,无法实现精准的控制。For example, the response speed of CFD simulation analysis is slow, the simulation time is too long, and the simulation results are not accurate enough, resulting in problems such as adjustment lag and inaccurate simulation analysis.
发明内容SUMMARY OF THE INVENTION
鉴于上述问题,本发明一实施例提出一种工业过程智能控制方法和系统,以解决现有技术存在的问题。In view of the above problems, an embodiment of the present invention proposes an industrial process intelligent control method and system to solve the problems existing in the prior art.
为了解决上述问题,本申请一实施例公开一种工业过程智能控制方法,包括如下步骤:In order to solve the above problems, an embodiment of the present application discloses an industrial process intelligent control method, which includes the following steps:
在未达到停止条件的情况下,获取控制对象的原始测量数据;If the stop condition is not reached, obtain the original measurement data of the control object;
分析所述原始测量数据,获得分析后的测量数据;Analyzing the original measurement data to obtain the analyzed measurement data;
利用深度学习模型对所述分析后的测量数据进行学习,确定控制方案;Use a deep learning model to learn the analyzed measurement data to determine a control plan;
根据所述控制方案获得的控制作用量,对所述控制对象进行控制。The control object is controlled according to the control action amount obtained by the control scheme.
为了解决上述问题,本申请一实施例还公开一种终端设备,包括:In order to solve the above problem, an embodiment of the present application further discloses a terminal device, including:
一个或多个处理器;和one or more processors; and
其上存储有指令的一个或多个机器可读介质,当由所述一个或多个处理器执行时,使得所述终端设备执行如前所述的方法。One or more machine-readable media having instructions stored thereon that, when executed by the one or more processors, cause the terminal device to perform the method as previously described.
为了解决上述问题,本申请一实施例公开一种工业过程智能控制系统,所述工业过程智能控制系统包括:测量装置、分析模块、过程控制平台和自动控制装置;In order to solve the above problem, an embodiment of the present application discloses an industrial process intelligent control system, the industrial process intelligent control system includes: a measurement device, an analysis module, a process control platform, and an automatic control device;
所述测量装置用于在未达到停止条件的情况下获取控制对象的原始测量数据;The measurement device is used to obtain the original measurement data of the control object under the condition that the stop condition is not reached;
所述分析模块用于分析所述原始测量数据,获得分析后的测量数据;The analysis module is used to analyze the original measurement data to obtain the analyzed measurement data;
所述过程控制平台用于利用深度学习模型对分析后的测量数据进行学习,确定控制方案;The process control platform is used for using the deep learning model to learn the analyzed measurement data to determine a control scheme;
所述自动控制装置用于根据所述控制方案获得的控制作用量,对所述控制对象进行控制。The automatic control device is used for controlling the control object according to the control action amount obtained by the control scheme.
本申请一实施例还公开一种终端设备,包括:An embodiment of the present application also discloses a terminal device, including:
一个或多个处理器;和one or more processors; and
其上存储有指令的一个或多个机器可读介质,当由所述一个或多个处理器执行时,使得所述终端设备执行上述的方法。One or more machine-readable media having instructions stored thereon, when executed by the one or more processors, cause the terminal device to perform the above-described method.
本申请一实施例还公开一个或多个机器可读介质,其上存储有指令,当由一个或多个处理器执行时,使得终端设备执行上述的方法。An embodiment of the present application further discloses one or more machine-readable media on which instructions are stored, and when executed by one or more processors, cause the terminal device to execute the above method.
由上述可知,本申请实施例包括以下优点:It can be seen from the above that the embodiments of the present application include the following advantages:
根据本发明实施例提出的工业过程智能控制方法,通过所述新一代过程控制平台,根据被控量的给定值和被控量的测量值之间的误差以及所述控制对象工业过程的各类评价指标进行分析判断,获得满足要求和预期的控制效果。According to the industrial process intelligent control method proposed in the embodiment of the present invention, through the new generation process control platform, according to the error between the given value of the controlled variable and the measured value of the controlled variable and the various parameters of the industrial process of the control object Class evaluation indicators are used to analyze and judge to obtain the control effect that meets the requirements and expectations.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained according to these drawings without creative efforts.
图1所示为本发明一实施例的工业过程智能控制系统的方框图。FIG. 1 is a block diagram of an industrial process intelligent control system according to an embodiment of the present invention.
图2所示为本发明实施例的深度学习过程1对应的深度学习模型的架构示意图。FIG. 2 is a schematic structural diagram of a deep learning model corresponding to the deep learning process 1 according to an embodiment of the present invention.
图3所示为本发明实施例的深度学习过程2对应的深度学习模型的架构示意图。FIG. 3 is a schematic structural diagram of a deep learning model corresponding to the deep learning process 2 according to an embodiment of the present invention.
图4所示为本发明一实施例的工业过程智能控制方法的流程图。FIG. 4 is a flowchart of an industrial process intelligent control method according to an embodiment of the present invention.
图5所示为根据本发明实施方式在火电厂智能控制系统的方框图。FIG. 5 is a block diagram of an intelligent control system in a thermal power plant according to an embodiment of the present invention.
图6所示为根据本发明实施方式在半导体工业过程中智能控制系统的方框图。6 shows a block diagram of an intelligent control system in a semiconductor industry process according to an embodiment of the present invention.
图7示意性地示出了用于执行根据本发明的方法的终端设备的框图。Figure 7 schematically shows a block diagram of a terminal device for carrying out the method according to the invention.
图8示意性地示出了用于保持或者携带实现根据本发明的方法的程序代码的存储单元。Figure 8 schematically shows a memory unit for holding or carrying program code implementing the method according to the invention.
具体实施方式Detailed ways
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员所获得的所有其他实施例,都属于本申请保护的范围。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application fall within the protection scope of the present application.
第一实施例first embodiment
本发明第一实施例提出一种工业过程智能控制系统。图1所示为本发明一实施例的工业过程智能控制系统的方框图。本发明实施例提出的工业过程智能控制系统的用途广泛,例如可以应用于利用激光测量温度场和浓度场,所述工业过程智能控制系统用于对控制对象进行控制,包括:测量装置10、分析模块20、过程控制平台30和自动控制装置40。The first embodiment of the present invention proposes an industrial process intelligent control system. FIG. 1 is a block diagram of an industrial process intelligent control system according to an embodiment of the present invention. The industrial process intelligent control system proposed in the embodiment of the present invention has a wide range of uses, for example, it can be applied to measure the temperature field and the concentration field by using a laser. The industrial process intelligent control system is used to control the control object, including: a measuring device 10, an Module 20 , process control platform 30 and automatic control device 40 .
所述测量装置10用于获取控制对象的原始测量数据;The measurement device 10 is used to obtain the original measurement data of the control object;
所述分析模块20用于分析所述原始测量数据,获得分析后的测量数据;The analysis module 20 is configured to analyze the original measurement data to obtain the analyzed measurement data;
所述过程控制平台30用于根据所述分析后的测量数据确定控制方案;The process control platform 30 is configured to determine a control scheme according to the analyzed measurement data;
所述自动控制装置40用于根据所述控制方案获得的控制作用量,对所述控制对象进行控制;The automatic control device 40 is configured to control the control object according to the control action amount obtained from the control scheme;
在未达到停止条件的情况下,所述测量装置10重复执行测量所述原始测量数据的操作。In the case where the stop condition is not reached, the measurement device 10 repeatedly performs the operation of measuring the raw measurement data.
测量装置10例如是实施计算机断层扫描-可调谐半导体激光吸收光谱技术、激光诱导击穿光谱技术等各种激光测量技术的激光测量装置,也可以是传统的测量装置。原始测量数据为测量获得的数据。但不限于此装置,满足测量需求的其他测量装置均适用于本发明所述的工业过程智能控制系统;在本发明实施例中,激光测量装置实时测量获得的原始测量数据,根据测量装置和测量参数要求选择相应测量方法的分析模块20。分析模块20可以为分析模型,对实时采集到的测量装置的原始测量数据进行分析,获得分析后的测量数据,也就是需要获得的工业过程的过程参数。The measurement device 10 is, for example, a laser measurement device that implements various laser measurement techniques such as computed tomography-tunable semiconductor laser absorption spectroscopy and laser-induced breakdown spectroscopy, and may also be a conventional measurement device. The original measurement data is the data obtained by measurement. But it is not limited to this device, other measurement devices that meet the measurement requirements are suitable for the industrial process intelligent control system of the present invention; in the embodiment of the present invention, the original measurement data obtained by the real-time measurement of the laser measurement device The parameters require the analysis module 20 to select the corresponding measurement method. The analysis module 20 may be an analysis model, which analyzes the raw measurement data of the measurement device collected in real time, and obtains the analyzed measurement data, that is, the process parameters of the industrial process to be obtained.
在本发明实施例中,根据工业过程特征以及所需快速精确测量的工业过程参数,如火电厂、半导体工业、发动机、燃气轮机和冶金工业等领域需要获得温度、压力、流量、液位、成分、浓度等过程参数的工业过程,搭建控制对象所需的测量装置。本发明实施例分析模块20分析后的测量数据,例如是温度、压力、流量、液位、成分、浓度等过程参数。以下将以此为例进行说明。In the embodiment of the present invention, according to the characteristics of the industrial process and the industrial process parameters that need to be measured quickly and accurately, for example, the fields of thermal power plants, semiconductor industries, engines, gas turbines, and metallurgical industries need to obtain temperature, pressure, flow, liquid level, composition, The industrial process of process parameters such as concentration, and the measurement device required to build the control object. The measurement data analyzed by the analysis module 20 in the embodiment of the present invention are, for example, process parameters such as temperature, pressure, flow rate, liquid level, composition, and concentration. This will be described as an example below.
如图1所示,过程控制平台30通过深度学习模型50对分析后的测量数据进行学习,此处分析后的测量数据的来源不仅局限于激光测量方法,也包括其他测量方法获得的其他过程参数。根据学习结果优化控制对象的CFD仿真模块70,进而得到优化后的CFD数据,建立CFD数据库60,开发CFD大数据分析平台。As shown in FIG. 1 , the process control platform 30 learns the analyzed measurement data through the deep learning model 50 , where the source of the analyzed measurement data is not limited to the laser measurement method, but also includes other process parameters obtained by other measurement methods. . The CFD simulation module 70 of the control object is optimized according to the learning result, and the optimized CFD data is obtained, the CFD database 60 is established, and the CFD big data analysis platform is developed.
分析后的测量数据结合已有的CFD数据通过深度学习模型50的深度学习,获得优化的CFD数据,进而根据优化的CFD数据通过过程控制平台30提供控制方案;The analyzed measurement data is combined with the existing CFD data to obtain optimized CFD data through deep learning of the deep learning model 50, and then a control scheme is provided through the process control platform 30 according to the optimized CFD data;
自动控制装置40根据过程控制平台30提供的控制方案使执行机构动作,调整控制作用量,进而改变控制对象100的被控量。The automatic control device 40 makes the actuator act according to the control scheme provided by the process control platform 30 , adjusts the control action amount, and then changes the controlled amount of the control object 100 .
在未达到停止条件的情况下,采用测量装置10对控制对象100进行重复测量,通过所述过程控制平台30,根据被控量的给定值和被控量的测量值之间的误差以及控制对象工业过程的各类评价指标进行分析判断,获得满足条件的过程参数,达到预期的控制效果。When the stop condition is not reached, the measurement device 10 is used to repeatedly measure the controlled object 100, and through the process control platform 30, according to the error between the given value of the controlled variable and the measured value of the controlled variable and the control Analyze and judge various evaluation indicators of the object industrial process, obtain process parameters that meet the conditions, and achieve the expected control effect.
工业过程中过程参数的测量与控制处于动态调整状态,可实时对过程参数进行监测,根据被控量的给定值和被控量的测量值之间的误差以及控制对象工业过程的各类评价指标分析是否需要通过自动控制装置40对控制对象100进行控制。The measurement and control of process parameters in the industrial process are in a state of dynamic adjustment, and the process parameters can be monitored in real time. The index analyzes whether the control object 100 needs to be controlled by the automatic control device 40 .
基于激光测量的工业过程智能控制系统在控制过程中的评价,可以从五个方面进行分析:1,激光测量方法本身的评价指标;2,CFD仿真模型本身的评价指标;3,测量结果和仿真结果的误差;4,被控量的测量值和被控量的给定值的误差;以及,5,工业过程的效率、能耗等综合评价指标。当各项评价指标、误差和综合评价指标全局最优时,即达到预期的控制效果。在一些实施例中,停止条件可以为达到了预期的控制条件,或者达到了生产时间等。当判断达到了停止条件,则停止循环测量。The evaluation of the industrial process intelligent control system based on laser measurement in the control process can be analyzed from five aspects: 1, the evaluation index of the laser measurement method itself; 2, the evaluation index of the CFD simulation model itself; 3, the measurement results and simulation The error of the result; 4, the error of the measured value of the controlled quantity and the given value of the controlled quantity; and, 5, the comprehensive evaluation index such as the efficiency and energy consumption of the industrial process. When each evaluation index, error and comprehensive evaluation index are globally optimal, the expected control effect is achieved. In some embodiments, the stop condition may be that a desired control condition has been reached, or a production time has been reached, or the like. When it is judged that the stop condition is reached, the cyclic measurement is stopped.
图1示出了过程控制平台30所涉及的两个深度学习过程,分别为虚线标示的深度学习过程1和深度学习过程2。针对控制对象100在不同运行工况下的测量数据和CFD数据优化及CFD数据库形成大数据为深度学习过程 1,本学习过程为长期过程,长达数月或者数年数据的积累,数据量非常重要;通过实时测量数据和CFD数据库中已有的CFD数据来优化CFD数据,进而通过过程控制平台提供控制方案为深度学习过程2,本学习过程为瞬态实时过程,时效性非常重要。FIG. 1 shows two deep learning processes involved in the process control platform 30 , which are respectively deep learning process 1 and deep learning process 2 marked by dotted lines. The optimization of the measurement data and CFD data of the control object 100 under different operating conditions and the formation of big data from the CFD database is a deep learning process 1. This learning process is a long-term process, with the accumulation of data for several months or years, and the amount of data is very large. Important; optimize CFD data through real-time measurement data and existing CFD data in the CFD database, and then provide a control scheme through the process control platform as deep learning process 2. This learning process is a transient real-time process, and timeliness is very important.
上述两个深度学习的过程可以分别通过不同的深度学习模型执行,也可以在同一深度学习模型中执行。本发明中,仅利用深度学习模型50表示执行两个不同的深度学习过程1和2的执行主体。在其他实施例中,例如,深度学习过程2可以由一个深度学习模型来执行,而深度学习过程1可以由另一深度学习模型来执行。The above two deep learning processes may be performed by different deep learning models respectively, or may be performed in the same deep learning model. In the present invention, only the deep learning model 50 is used to represent the executive body performing the two different deep learning processes 1 and 2 . In other embodiments, for example, deep learning process 2 may be performed by one deep learning model, while deep learning process 1 may be performed by another deep learning model.
针对深度学习过程1,图2为针对深度学习过程1的模型架构的示意图。如图2所示,深度学习模型中输入层1为不同时间的测量数据以及深度学习过程2的结果误差,输入层2为CFD模型的各种参数,输出层为根据CFD模型计算获得的优化后的CFD数据。根据输出的CFD数据,建立CFD数据库并形成CFD大数据。For the deep learning process 1 , FIG. 2 is a schematic diagram of the model architecture for the deep learning process 1 . As shown in Figure 2, in the deep learning model, the input layer 1 is the measurement data at different times and the result error of the deep learning process 2, the input layer 2 is the various parameters of the CFD model, and the output layer is the optimized parameters calculated according to the CFD model. of CFD data. According to the output CFD data, establish a CFD database and form CFD big data.
针对深度学习过程2,图3为针对深度学习过程2的模型架构的示意图。如图3所示,深度学习模型中输入层1为实时测量数据,输入层2为已有CFD数据库中的CFD数据,包括对已有CFD数据进行简单代数运算的结果,输出层为根据已有CFD数据计算获得的优化的CFD数据,进而根据优化的CFD数据通过过程控制平台提供控制方案。For the deep learning process 2 , FIG. 3 is a schematic diagram of the model architecture for the deep learning process 2 . As shown in Figure 3, the input layer 1 of the deep learning model is the real-time measurement data, the input layer 2 is the CFD data in the existing CFD database, including the results of simple algebraic operations on the existing CFD data, and the output layer is based on the existing CFD data. The optimized CFD data obtained by CFD data calculation, and then provide a control scheme through the process control platform according to the optimized CFD data.
在可选实施例中,所述过程控制平台还可以包括第一数据库单元和第一深度学习模型单元,用于分别执行下述操作:In an optional embodiment, the process control platform may further include a first database unit and a first deep learning model unit for respectively performing the following operations:
第一数据库单元用于存储多个分析后的测量数据;The first database unit is used to store a plurality of analyzed measurement data;
第一深度学习模型单元用于利用第一深度学习模型对所存储的多个分析后的测量数据进行学习,输出经过所述第一深度学习模型处理后的CFD数据。The first deep learning model unit is configured to use the first deep learning model to learn the stored multiple analyzed measurement data, and output the CFD data processed by the first deep learning model.
在可选实施例中,所述过程控制平台还可以包括第二数据库单元和第二深度学习模型单元,用于分别执行下述操作:In an optional embodiment, the process control platform may further include a second database unit and a second deep learning model unit for respectively performing the following operations:
第二数据库单元用于存储多个分析后的测量数据和历史CFD数据;The second database unit is used to store a plurality of analyzed measurement data and historical CFD data;
第一深度学习模型单元用于利用第二深度学习模型对所存储的多个分 析后的测量数据和历史CFD数据进行学习,对CFD仿真模块进行优化。The first deep learning model unit is configured to use the second deep learning model to learn the stored multiple analyzed measurement data and historical CFD data, and to optimize the CFD simulation module.
在可选实施例中,所述分析模块还可以包括分析模型确定单元和分析单元,分别用于执行下述操作:In an optional embodiment, the analysis module may further include an analysis model determination unit and an analysis unit, respectively configured to perform the following operations:
分析模型确定单元用于根据实时采集到的测量装置的原始测量数据,确定分析模型;以及The analysis model determination unit is used for determining the analysis model according to the raw measurement data of the measurement device collected in real time; and
分析单元用于利用所确定的分析模型进行分析,获得分析后的测量数据。The analysis unit is used for performing analysis using the determined analysis model to obtain the analyzed measurement data.
由上述可知,本发明第一实施例提出的工业过程智能控制系统,至少具有如下技术效果:It can be seen from the above that the industrial process intelligent control system proposed by the first embodiment of the present invention has at least the following technical effects:
根据本发明实施例提出的工业过程智能控制系统,通过所述新一代过程控制平台,根据被控量的给定值和被控量的测量值之间的误差以及所述控制对象工业过程的各类评价指标进行分析判断,获得满足要求和预期的控制效果。According to the industrial process intelligent control system proposed in the embodiment of the present invention, through the new generation process control platform, according to the error between the given value of the controlled variable and the measured value of the controlled variable and the various parameters of the industrial process of the control object Class evaluation indicators are used to analyze and judge to obtain the control effect that meets the requirements and expectations.
除此之外,本实施例提出的工业过程智能控制系统至少还包括如下优点:In addition, the industrial process intelligent control system proposed in this embodiment at least further includes the following advantages:
根据本发明实施例提出的工业过程智能控制系统,过程控制平台内部通过深度学习等人工智能算法对分析后的测量数据进行学习,此处分析后的测量数据的来源不仅局限于激光测量方法,也包括其他测量方法获得的其他过程参数。根据学习结果优化控制对象的CFD仿真模块进而得到优化后的CFD数据,建立CFD数据库,开发CFD大数据分析平台。分析后的实时测量数据结合已有的CFD数据通过过程控制平台的深度学习,获得优化的CFD数据,进而根据优化的CFD数据通过过程控制平台提供控制方案。自动控制装置根据过程控制平台提供的控制方案使执行机构动作调整控制作用量,进而改变控制对象的被控量。采用测量装置对控制对象进行重复测量,通过所述过程控制平台,根据被控量的给定值和被控量的测量值之间的误差以及控制对象工业过程的各类评价指标进行分析判断,获得满足条件的过程参数,达到预期的控制效果。According to the industrial process intelligent control system proposed by the embodiment of the present invention, the analyzed measurement data is learned through artificial intelligence algorithms such as deep learning inside the process control platform. The source of the analyzed measurement data here is not limited to the laser measurement method, but also Include other process parameters obtained by other measurement methods. According to the learning results, the CFD simulation module of the control object is optimized, and the optimized CFD data is obtained, the CFD database is established, and the CFD big data analysis platform is developed. The analyzed real-time measurement data is combined with the existing CFD data to obtain optimized CFD data through deep learning of the process control platform, and then a control scheme is provided through the process control platform according to the optimized CFD data. The automatic control device makes the actuator act to adjust the control action amount according to the control scheme provided by the process control platform, thereby changing the controlled amount of the control object. The measurement device is used to repeatedly measure the control object, and through the process control platform, analysis and judgment are made according to the error between the given value of the controlled quantity and the measured value of the controlled quantity and various evaluation indicators of the industrial process of the control object. Obtain the process parameters that meet the conditions to achieve the expected control effect.
工业过程中过程参数的测量与控制处于动态调整状态,可实时对过程参 数进行监测,根据被控量的给定值和被控量的测量值之间的误差以及控制对象工业过程的各类评价指标分析是否需要通过自动控制装置对控制对象进行控制。The measurement and control of process parameters in the industrial process are in a state of dynamic adjustment, and the process parameters can be monitored in real time. Whether the index analysis needs to control the control object through the automatic control device.
本发明的控制系统及方法,不仅适用于火电厂和半导体工业过程,可推广应用于发动机、燃气轮机和冶金工业等领域,实现工业过程智能控制。但是并不限于这些领域。The control system and method of the present invention are not only suitable for thermal power plants and semiconductor industrial processes, but also can be applied to the fields of engines, gas turbines, metallurgical industries, etc., to realize intelligent control of industrial processes. But it is not limited to these fields.
本发明建立控制对象的CFD仿真模型,计算控制对象在不同运行工况下的CFD数据,将计算获得的CFD数据以数据库的形式提供给过程控制平台;过程控制平台内部通过深度学习等人工智能算法对分析后的测量数据进行积累学习,根据学习结果优化控制对象的CFD仿真模块进而得到优化后的CFD数据;根据控制对象在不同运行工况下的CFD数据以及通过深度学习优化的CFD数据建立CFD数据库,在过程控制平台中开发CFD大数据分析平台。控制对象的实时过程参数处于动态测量状态,通过深度学习优化的CFD数据也处于动态调整状态,建立的CFD数据库也在不断更新完善。过程控制平台中,分析后的测量数据、CFD数据以及优化的CFD数据之间通过深度学习等人工智能算法进行数据分析。The invention establishes the CFD simulation model of the control object, calculates the CFD data of the control object under different operating conditions, and provides the CFD data obtained by the calculation to the process control platform in the form of a database; the process control platform uses artificial intelligence algorithms such as deep learning inside the process control platform. Accumulate and study the analyzed measurement data, and optimize the CFD simulation module of the control object according to the learning results to obtain the optimized CFD data; establish CFD according to the CFD data of the control object under different operating conditions and the CFD data optimized by deep learning Database, develop CFD big data analysis platform in process control platform. The real-time process parameters of the control object are in a dynamic measurement state, the CFD data optimized by deep learning is also in a dynamic adjustment state, and the established CFD database is constantly being updated and improved. In the process control platform, data analysis is performed between the analyzed measurement data, CFD data and optimized CFD data through artificial intelligence algorithms such as deep learning.
第二实施例Second Embodiment
本发明第二实施例提出一种工业过程智能控制方法。图4所示为本发明第二实施例的工业过程智能控制方法的步骤流程图。如图4所示,本发明实施例的工业过程智能控制方法包括如下步骤:The second embodiment of the present invention provides an industrial process intelligent control method. FIG. 4 is a flowchart showing the steps of an industrial process intelligent control method according to a second embodiment of the present invention. As shown in FIG. 4 , the industrial process intelligent control method according to the embodiment of the present invention includes the following steps:
S101,在未达到停止条件的情况下,获取控制对象的原始测量数据;S101, in the case that the stop condition is not reached, obtain the original measurement data of the control object;
在这一步骤中,执行主体例如是工业过程智能控制系统的测量装置10,测量装置10例如是实施计算机断层扫描-可调谐半导体激光吸收光谱技术、激光诱导击穿光谱技术等各种激光测量技术的激光测量装置,也可以是传统的测量装置,但不限于此装置,满足测量需求的其他测量装置均适用于本发明所述的工业过程智能控制方法。原始测量数据例如为通过测量获得的数据。In this step, the execution subject is, for example, the measurement device 10 of the industrial process intelligent control system, and the measurement device 10 is, for example, implementing various laser measurement technologies such as computed tomography-tunable semiconductor laser absorption spectroscopy technology, laser-induced breakdown spectroscopy technology, etc. The laser measuring device can also be a traditional measuring device, but it is not limited to this device, and other measuring devices that meet the measurement requirements are suitable for the industrial process intelligent control method described in the present invention. The raw measurement data is, for example, data obtained by measurement.
基于激光测量的工业过程智能控制系统在控制过程中的评价,可以从五 个方面进行分析:1,激光测量方法本身的评价指标;2,CFD仿真模型本身的评价指标;3,测量结果和仿真结果的误差;4,被控量的测量值和被控量的给定值的误差;以及,5,工业过程的效率、能耗等综合评价指标。当各项评价指标、误差和综合评价指标全局最优时,即达到预期的控制效果。在一些实施例中,停止条件可以为达到了预期的控制条件,或者达到了生产时间等。当判断达到了停止条件,则停止循环测量。The evaluation of the industrial process intelligent control system based on laser measurement in the control process can be analyzed from five aspects: 1, the evaluation index of the laser measurement method itself; 2, the evaluation index of the CFD simulation model itself; 3, the measurement results and simulation The error of the result; 4, the error of the measured value of the controlled quantity and the given value of the controlled quantity; and, 5, the comprehensive evaluation index such as the efficiency and energy consumption of the industrial process. When each evaluation index, error and comprehensive evaluation index are globally optimal, the expected control effect is achieved. In some embodiments, the stop condition may be that a desired control condition has been reached, or a production time has been reached, or the like. When it is judged that the stop condition is reached, the cyclic measurement is stopped.
S102,分析所述原始测量数据,获得分析后的测量数据;S102, analyze the original measurement data to obtain the analyzed measurement data;
在这一步骤中,执行主体例如是工业过程智能控制系统的分析模块20。分析模块20可以为分析模型,对实时采集到的测量装置的原始测量数据进行分析,获得分析后的测量数据,也就是需要获得的工业过程的过程参数。In this step, the execution subject is, for example, the analysis module 20 of the industrial process intelligent control system. The analysis module 20 may be an analysis model, which analyzes the raw measurement data of the measurement device collected in real time, and obtains the analyzed measurement data, that is, the process parameters of the industrial process to be obtained.
S103,利用深度学习模型对分析后的测量数据进行学习,确定控制方案;S103, using a deep learning model to learn the analyzed measurement data to determine a control scheme;
在这一步骤中,执行主体例如是工业过程智能控制系统的过程控制平台30。过程控制平台30通过深度学习模型50对分析后的测量数据进行学习,并对分析后的测量数据利用深度学习模型进行优化,根据优化后的CFD数据生成控制方案。In this step, the executive body is, for example, the process control platform 30 of the industrial process intelligent control system. The process control platform 30 learns the analyzed measurement data through the deep learning model 50 , uses the deep learning model to optimize the analyzed measurement data, and generates a control plan according to the optimized CFD data.
S104,根据所述控制方案获得的控制作用量,对所述控制对象进行控制。S104: Control the control object according to the control action amount obtained by the control scheme.
在这一步骤中,执行主体例如是工业过程智能控制系统的自动控制装置40。自动控制装置40根据过程控制平台30提供的控制方案使执行机构动作,调整控制作用量,进而改变控制对象100的被控量。In this step, the executive body is, for example, the automatic control device 40 of the industrial process intelligent control system. The automatic control device 40 makes the actuator act according to the control scheme provided by the process control platform 30 , adjusts the control action amount, and then changes the controlled amount of the control object 100 .
由上述可知,本发明第二实施例提出的工业过程智能控制方法至少具有如下技术效果:It can be seen from the above that the industrial process intelligent control method proposed by the second embodiment of the present invention has at least the following technical effects:
根据本发明实施例提出的工业过程智能控制方法,通过所述新一代过程控制平台,根据被控量的给定值和被控量的测量值之间的误差以及所述控制对象工业过程的各类评价指标进行分析判断,获得满足要求和预期的控制效果。According to the industrial process intelligent control method proposed in the embodiment of the present invention, through the new generation process control platform, according to the error between the given value of the controlled variable and the measured value of the controlled variable and the various parameters of the industrial process of the control object Class evaluation indicators are used to analyze and judge to obtain the control effect that meets the requirements and expectations.
除此之外,本实施例提出的工业过程智能控制方法至少还包括如下优点:In addition, the industrial process intelligent control method proposed in this embodiment at least further includes the following advantages:
根据本发明实施例提出的工业过程智能控制方法,过程控制平台内部通过深度学习等人工智能算法对分析后的测量数据进行学习,此处分析后的测量数据的来源不仅局限于激光测量方法,也包括其他测量方法获得的其他过程参数。根据学习结果优化控制对象的CFD仿真模块进而得到优化后的CFD数据,建立CFD数据库,开发CFD大数据分析平台。分析后的实时测量数据结合已有的CFD数据通过过程控制平台的深度学习,获得优化的CFD数据,进而根据优化的CFD数据通过过程控制平台提供控制方案。自动控制装置根据过程控制平台提供的控制方案使执行机构动作调整控制作用量,进而改变控制对象的被控量。采用测量装置对控制对象进行重复测量,通过所述过程控制平台,根据被控量的给定值和被控量的测量值之间的误差以及控制对象工业过程的各类评价指标进行分析判断,获得满足条件的过程参数,达到预期的控制效果。According to the industrial process intelligent control method proposed in the embodiment of the present invention, the analyzed measurement data is learned through artificial intelligence algorithms such as deep learning inside the process control platform. The source of the analyzed measurement data here is not only limited to the laser measurement method, but also Include other process parameters obtained by other measurement methods. According to the learning results, the CFD simulation module of the control object is optimized, and the optimized CFD data is obtained, the CFD database is established, and the CFD big data analysis platform is developed. The analyzed real-time measurement data is combined with the existing CFD data to obtain optimized CFD data through deep learning of the process control platform, and then a control scheme is provided through the process control platform according to the optimized CFD data. The automatic control device makes the actuator act to adjust the control action amount according to the control scheme provided by the process control platform, thereby changing the controlled amount of the control object. The measurement device is used to repeatedly measure the control object, and through the process control platform, analysis and judgment are made according to the error between the given value of the controlled quantity and the measured value of the controlled quantity and various evaluation indicators of the industrial process of the control object. Obtain the process parameters that meet the conditions to achieve the expected control effect.
工业过程中过程参数的测量与控制处于动态调整状态,可实时对过程参数进行监测,根据被控量的给定值和被控量的测量值之间的误差以及控制对象工业过程的各类评价指标分析是否需要通过自动控制装置对控制对象进行控制。The measurement and control of process parameters in the industrial process are in a state of dynamic adjustment, and the process parameters can be monitored in real time. Whether the index analysis needs to control the control object through the automatic control device.
本发明的控制系统及方法,不仅适用于火电厂和半导体工业过程,可推广应用于发动机、燃气轮机和冶金工业等领域,实现工业过程智能控制。但是并不限于这些领域。The control system and method of the present invention are not only suitable for thermal power plants and semiconductor industrial processes, but also can be applied to the fields of engines, gas turbines, metallurgical industries, etc., to realize intelligent control of industrial processes. But it is not limited to these fields.
第三实施例Third Embodiment
图5所示为根据本发明实施方式在火电厂智能控制系统的方框图。如图5所示,以火电厂锅炉控制为例对工业过程温度场和组分浓度场的激光测量与数值模拟耦合的智能监测与控制系统及方法进行具体说明,采用计算机断层扫描-可调谐半导体激光吸收光谱技术测量锅炉炉膛和尾部烟道温度分布和其他组分浓度分布,实现大数据、物联网、云平台等高端技术在火电厂的应用,从而提高火电厂效率,实现火电厂的节能减排,实现火电厂过程智能 控制。FIG. 5 is a block diagram of an intelligent control system in a thermal power plant according to an embodiment of the present invention. As shown in Figure 5, the intelligent monitoring and control system and method for coupling laser measurement and numerical simulation of industrial process temperature field and component concentration field are described in detail by taking the boiler control of thermal power plant as an example. Laser absorption spectroscopy technology measures the temperature distribution of boiler furnace and tail flue and the concentration distribution of other components, and realizes the application of high-end technologies such as big data, Internet of Things, cloud platform in thermal power plants, thereby improving the efficiency of thermal power plants and realizing energy saving and reduction in thermal power plants. It can realize intelligent control of thermal power plant process.
图5所示系统主要包括两部分:测量控制系统和智能监测与控制平台。在测量控制系统部分,根据锅炉炉膛结构和尾部烟道结构搭建CT-TDLAS测量装置,分别测量炉膛内部温度场和气体组分浓度场、尾部烟道温度场以及脱硝装置前后的氮氧化物和氨气浓度场等。实时采集每个测量装置的原始测量数据,通过分析模块对原始测量数据进行分析以获得炉膛和尾部烟道测量截面的温度场和气体浓度场,并可以在显示器上显示出分析后的测量数据,通过新一代过程控制平台的分析提供控制方案,通过自动控制装置调整锅炉的给粉量和二次风量等,使炉膛和尾部烟道温度和气体浓度满足设定值,达到预期控制效果。The system shown in Figure 5 mainly includes two parts: measurement control system and intelligent monitoring and control platform. In the measurement and control system part, a CT-TDLAS measurement device is built according to the boiler furnace structure and tail flue structure, and the internal temperature field and gas component concentration field of the furnace, the temperature field of the tail flue, and the nitrogen oxides and ammonia before and after the denitrification device are measured respectively. gas concentration field, etc. The original measurement data of each measuring device is collected in real time, and the original measurement data is analyzed by the analysis module to obtain the temperature field and gas concentration field of the measurement section of the furnace and the tail flue, and the analyzed measurement data can be displayed on the display. The control scheme is provided through the analysis of the new generation process control platform, and the powder feeding volume and the secondary air volume of the boiler are adjusted by the automatic control device, so that the furnace and tail flue temperature and gas concentration meet the set values and achieve the expected control effect.
在智能监测与控制平台部分,CT-TDLAS的测量数据用ai表示,将CT-TDLAS的历史测量数据建立CT-TDLAS数据库Ai;根据锅炉结构建立不同运行工况下锅炉燃烧过程的CFD仿真模型,通过设置CFD模型参数获得CFD的仿真结果,如温度场和浓度场的CFD数据,建立CFD数据库Di;根据CT-TDLAS测量装置的激光光路结构,分别获得CT-TDLAS数据和CFD数据的温度和浓度分布的每条路径上的平均值、波动值和概率密度函数,分别用Bi和
Figure PCTCN2020132679-appb-000001
来表示,对比CT-TDLAS测量结果路径统计值的数据库Bi和CFD仿真结果路径统计值的数据库
Figure PCTCN2020132679-appb-000002
通过CFD模型参数数据库Ci和CFD数据库Di构成修正函数,以及测量结果路径统计值的数据库Bi和仿真结果路径统计值的数据库
Figure PCTCN2020132679-appb-000003
的差值构成标签,采用深度学习方法经过数据预处理、特征选择、模型构建和参数寻优及评价等过程,经过深度学习的模型误差不小于设定值误差ε时,对深度学习过程中的模型参数继续寻优;经过深度学习的模型误差小于设定值误差ε时,输出仿真结果与测量结果误差最小时的CFD模型参数,更新并完善建立的模型参数数据库Ci,获得优化的CFD数据,进一步更新并完善建立的CFD数据库Di。
In the part of the intelligent monitoring and control platform, the measurement data of CT-TDLAS is represented by ai, and the CT-TDLAS database Ai is established from the historical measurement data of CT-TDLAS; the CFD simulation model of the combustion process of the boiler under different operating conditions is established according to the boiler structure. The CFD simulation results are obtained by setting the parameters of the CFD model, such as the CFD data of the temperature field and the concentration field, and the CFD database Di is established; according to the laser optical path structure of the CT-TDLAS measurement device, the temperature and concentration of the CT-TDLAS data and the CFD data are obtained respectively. The mean, fluctuation value, and probability density function on each path of the distribution, denoted by Bi and
Figure PCTCN2020132679-appb-000001
To represent, compare the database Bi of CT-TDLAS measurement results path statistics with the database of CFD simulation results path statistics
Figure PCTCN2020132679-appb-000002
The correction function is formed by the CFD model parameter database Ci and the CFD database Di, as well as the database Bi of the path statistics of the measurement results and the database of the path statistics of the simulation results
Figure PCTCN2020132679-appb-000003
The difference constitutes a label. The deep learning method is used to process data preprocessing, feature selection, model construction, parameter optimization and evaluation. When the model error after deep learning is not less than the set value error ε, the deep learning process The model parameters continue to be optimized; when the model error after deep learning is less than the set value error ε, the CFD model parameters with the smallest error between the simulation results and the measurement results are output, and the established model parameter database Ci is updated and improved to obtain the optimized CFD data. Further update and improve the established CFD database Di.
在智能监测与控制平台部分,包括两类深度学习过程,长期积累过程和瞬态实时过程。长期积累过程,即通过测量数据和CFD仿真数据的积累获得CFD数据库形成CFD大数据;瞬态实时过程,即根据实时测量数据和已有的CFD数据,获得优化的CFD数据,进而提供控制方案bi。In the intelligent monitoring and control platform part, there are two types of deep learning processes, long-term accumulation process and transient real-time process. The long-term accumulation process, that is, the CFD database is obtained through the accumulation of measurement data and CFD simulation data to form CFD big data; the transient real-time process is to obtain optimized CFD data based on real-time measurement data and existing CFD data, and then provide a control scheme bi .
在本示例中,基于CT-TDLAS激光测量的火电厂智能控制系统在控制过程中的评价,除了深度学习过程中模型误差分析测量结果和仿真结果,火电厂智能控制系统也可以从以下几个方面进行分析评价:In this example, the evaluation of the thermal power plant intelligent control system based on CT-TDLAS laser measurement in the control process, in addition to the model error analysis measurement results and simulation results in the deep learning process, the thermal power plant intelligent control system can also be evaluated from the following aspects To analyze and evaluate:
TDLAS测量温度和测量浓度的精度以及CT算法的重构精度等CT-TDLAS测量方法的评价;网格尺度误差、时间步长误差、迭代误差和输入参数误差等CFD仿真误差;炉膛内部温度和气体组分浓度、尾部烟道温度和脱硝装置前后的氮氧化物以及氨气浓度等的测量值与给定值之间的误差;汽轮机组的汽耗和热耗、发电厂的热耗、发电厂的煤耗以及发电效率等发电厂热经济指标。当各项评价指标、误差和综合评价指标全局最优时,即达到预期的控制效果。Evaluation of CT-TDLAS measurement methods such as the accuracy of TDLAS measurement of temperature and concentration and the reconstruction accuracy of CT algorithm; CFD simulation errors such as grid scale error, time step error, iteration error and input parameter error; furnace internal temperature and gas Errors between the measured values of component concentrations, tail flue temperature, nitrogen oxides and ammonia concentrations before and after the denitrification device and the given values; steam consumption and heat consumption of steam turbine units, heat consumption of power plants, power plants Coal consumption and power generation efficiency and other thermal economic indicators of power plants. When each evaluation index, error and comprehensive evaluation index are globally optimal, the expected control effect is achieved.
第四实施例Fourth Embodiment
图6所示为根据本发明实施方式在半导体工业过程中智能控制系统的方框图。如图6所示,以半导体制造过程中成膜装置控制为例对工业过程温度场和组分浓度场的激光测量与数值模拟耦合的智能监测与控制系统及方法进行具体说明,采用计算机断层扫描-可调谐半导体激光吸收光谱技术测量成膜装置内的温度场和气体浓度场分布,达到控制半导体材料性能的目的。6 shows a block diagram of an intelligent control system in a semiconductor industry process according to an embodiment of the present invention. As shown in Figure 6, the intelligent monitoring and control system and method for coupling the laser measurement and numerical simulation of the temperature field and component concentration field of the industrial process are described in detail by taking the control of the film-forming device in the semiconductor manufacturing process as an example. -The tunable semiconductor laser absorption spectroscopy technology measures the temperature field and gas concentration field distribution in the film forming device to achieve the purpose of controlling the performance of semiconductor materials.
值得注意的是,本发明的控制系统及方法,不仅适用于火电厂和半导体工业过程,可推广应用于发动机、燃气轮机和冶金工业等领域,实现工业过程智能控制。但是并不限于这些领域。此外,本发明所采用激光测量技术,不仅包括计算机断层扫描-可调谐半导体激光吸收光谱技术,也包括激光诱导击穿光谱技术等。It is worth noting that the control system and method of the present invention are not only suitable for thermal power plants and semiconductor industrial processes, but also can be applied to fields such as engines, gas turbines and metallurgical industries to realize intelligent control of industrial processes. But it is not limited to these fields. In addition, the laser measurement technology adopted in the present invention includes not only the computed tomography scanning-tunable semiconductor laser absorption spectroscopy technology, but also the laser-induced breakdown spectroscopy technology and the like.
图7为本申请一实施例提供的终端设备的硬件结构示意图。如图7所示,该终端设备可以包括输入设备90、处理器91、输出设备92、存储器93和至少一个通信总线94。通信总线94用于实现元件之间的通信连接。存储器93可能包含高速RAM存储器,也可能还包括非易失性存储器NVM,例如至少一个磁盘存储器,存储器93中可以存储各种程序,用于完成各种处理功能以及实现本实施例的方法步骤。FIG. 7 is a schematic diagram of a hardware structure of a terminal device according to an embodiment of the present application. As shown in FIG. 7 , the terminal device may include an input device 90 , a processor 91 , an output device 92 , a memory 93 and at least one communication bus 94 . A communication bus 94 is used to enable communication connections between elements. The memory 93 may include a high-speed RAM memory, and may also include a non-volatile memory NVM, such as at least one disk memory. Various programs may be stored in the memory 93 for performing various processing functions and implementing the method steps of this embodiment.
可选的,上述处理器91例如可以为中央处理器(Central Processing Unit,简称CPU)、应用专用集成电路(ASIC)、数字信号处理器(DSP)、数字信号处理设备(DSPD)、可编程逻辑器件(PLD)、现场可编程门阵列(FPGA)、控制器、微控制器、微处理器或其他电子元件实现,该处理器91通过有线或无线连接耦合到上述输入设备90和输出设备92。Optionally, the above-mentioned processor 91 may be, for example, a central processing unit (Central Processing Unit, CPU for short), an application specific integrated circuit (ASIC), a digital signal processor (DSP), a digital signal processing device (DSPD), a programmable logic Device (PLD), Field Programmable Gate Array (FPGA), controller, microcontroller, microprocessor or other electronic component implementation, the processor 91 is coupled to the aforementioned input device 90 and output device 92 through wired or wireless connections.
可选的,上述输入设备90可以包括多种输入设备,例如可以包括面向用户的用户接口、面向设备的设备接口、软件的可编程接口、摄像头、传感器中至少一种。可选的,该面向设备的设备接口可以是用于设备与设备之间进行数据传输的有线接口、还可以是用于设备与设备之间进行数据传输的硬件插入接口(例如USB接口、串口等);可选的,该面向用户的用户接口例如可以是面向用户的控制按键、用于接收语音输入的语音输入设备以及接收用户触摸输入的触摸感知设备(例如具有触摸感应功能的触摸屏、触控板等);可选的,上述软件的可编程接口例如可以是供用户编辑或者修改程序的入口,例如芯片的输入引脚接口或者输入接口等。麦克风等音频输入设备可以接收语音数据。输出设备92可以包括显示器、音响等输出设备。Optionally, the above-mentioned input device 90 may include various input devices, for example, may include at least one of a user-oriented user interface, a device-oriented device interface, a software programmable interface, a camera, and a sensor. Optionally, the device-oriented device interface may be a wired interface for data transmission between devices, or a hardware plug-in interface (such as a USB interface, serial port, etc.) for data transmission between devices. ); optionally, the user-oriented user interface may be, for example, a user-oriented control button, a voice input device for receiving voice input, and a touch sensing device (such as a touch screen with a touch sensing function, a touch sensing device for receiving a user's touch input) board, etc.); optionally, the programmable interface of the above software can be, for example, an entry for a user to edit or modify a program, such as an input pin interface or an input interface of a chip. Audio input devices such as microphones can receive voice data. The output device 92 may include output devices such as a display, an audio system, and the like.
在本实施例中,该终端设备的处理器具有用于执行各设备中数据处理装置各模块的功能,具体功能和技术效果参照上述实施例即可,此处不再赘述。In this embodiment, the processor of the terminal device has a function for executing each module of the data processing apparatus in each device, and the specific functions and technical effects may refer to the above-mentioned embodiments, which will not be repeated here.
图8为本申请另一实施例提供的终端设备的硬件结构示意图。图8是对图7在实现过程中的一个具体的实施例。如图8所示,本实施例的终端设备包括处理器101以及存储器102。FIG. 8 is a schematic diagram of a hardware structure of a terminal device according to another embodiment of the present application. FIG. 8 is a specific embodiment of the implementation process of FIG. 7 . As shown in FIG. 8 , the terminal device in this embodiment includes a processor 101 and a memory 102 .
处理器101执行存储器102所存放的计算机程序代码,实现上述实施例中图4的工业过程智能控制方法。The processor 101 executes the computer program codes stored in the memory 102 to implement the industrial process intelligent control method shown in FIG. 4 in the above embodiment.
存储器102被配置为存储各种类型的数据以支持在终端设备的操作。这些数据的示例包括用于在终端设备上操作的任何应用程序或方法的指令,例如消息,图片,视频等。存储器102可能包含随机存取存储器(random access memory,简称RAM),也可能还包括非易失性存储器(non-volatile memory),例如至少一个磁盘存储器。The memory 102 is configured to store various types of data to support operation at the terminal device. Examples of such data include instructions for any application or method operating on the end device, such as messages, pictures, videos, etc. The memory 102 may include random access memory (RAM for short), and may also include non-volatile memory (non-volatile memory), such as at least one disk storage.
可选地,处理器101设置在处理组件100中。该终端设备还可以包括:通信组件103,电源组件104,多媒体组件105,音频组件106,输入/输出接 口107和/或传感器组件108。终端设备具体所包含的组件等依据实际需求设定,本实施例对此不作限定。Optionally, the processor 101 is provided in the processing component 100 . The terminal device may further include: a communication component 103, a power supply component 104, a multimedia component 105, an audio component 106, an input/output interface 107 and/or a sensor component 108. Components and the like specifically included in the terminal device are set according to actual requirements, which are not limited in this embodiment.
处理组件100通常控制终端设备的整体操作。处理组件100可以包括一个或多个处理器101来执行指令,以完成上述图4全部或部分步骤。此外,处理组件100可以包括一个或多个模块,便于处理组件100和其他组件之间的交互。例如,处理组件100可以包括多媒体模块,以方便多媒体组件105和处理组件100之间的交互。The processing component 100 generally controls the overall operation of the terminal device. The processing component 100 may include one or more processors 101 to execute instructions to perform all or part of the steps of FIG. 4 described above. Additionally, processing component 100 may include one or more modules to facilitate interaction between processing component 100 and other components. For example, processing component 100 may include a multimedia module to facilitate interaction between multimedia component 105 and processing component 100 .
电源组件104为终端设备的各种组件提供电力。电源组件104可以包括电源管理系统,一个或多个电源,及其他与为终端设备生成、管理和分配电力相关联的组件。The power supply assembly 104 provides power to various components of the terminal device. Power components 104 may include a power management system, one or more power supplies, and other components associated with generating, managing, and distributing power to end devices.
多媒体组件105包括在终端设备和用户之间的提供一个输出接口的显示屏。在一些实施例中,显示屏可以包括液晶显示器(LCD)和触摸面板(TP)。如果显示屏包括触摸面板,显示屏可以被实现为触摸屏,以接收来自用户的输入信号。触摸面板包括一个或多个触摸传感器以感测触摸、滑动和触摸面板上的手势。所述触摸传感器可以不仅感测触摸或滑动动作的边界,而且还检测与所述触摸或滑动操作相关的持续时间和压力。The multimedia component 105 includes a display screen that provides an output interface between the terminal device and the user. In some embodiments, the display screen may include a liquid crystal display (LCD) and a touch panel (TP). If the display screen includes a touch panel, the display screen may be implemented as a touch screen to receive input signals from a user. The touch panel includes one or more touch sensors to sense touch, swipe, and gestures on the touch panel. The touch sensor may not only sense the boundaries of a touch or swipe action, but also detect the duration and pressure associated with the touch or swipe action.
音频组件106被配置为输出和/或输入音频信号。例如,音频组件106包括一个麦克风(MIC),当终端设备处于操作模式,如语音识别模式时,麦克风被配置为接收外部音频信号。所接收的音频信号可以被进一步存储在存储器102或经由通信组件103发送。在一些实施例中,音频组件106还包括一个扬声器,用于输出音频信号。 Audio component 106 is configured to output and/or input audio signals. For example, the audio component 106 includes a microphone (MIC) that is configured to receive external audio signals when the terminal device is in an operational mode, such as a speech recognition mode. The received audio signal may be further stored in the memory 102 or transmitted via the communication component 103 . In some embodiments, the audio component 106 also includes a speaker for outputting audio signals.
输入/输出接口107为处理组件100和外围接口模块之间提供接口,上述外围接口模块可以是点击轮,按钮等。这些按钮可包括但不限于:音量按钮、启动按钮和锁定按钮。The input/output interface 107 provides an interface between the processing component 100 and a peripheral interface module, which may be a click wheel, a button, or the like. These buttons may include, but are not limited to, volume buttons, start buttons, and lock buttons.
传感器组件108包括一个或多个传感器,用于为终端设备提供各个方面的状态评估。例如,传感器组件108可以检测到终端设备的打开/关闭状态,组件的相对定位,用户与终端设备接触的存在或不存在。传感器组件108可以包括接近传感器,被配置用来在没有任何的物理接触时检测附近物体的存在,包括检测用户与终端设备间的距离。在一些实施例中,该传感器组件108 还可以包括摄像头等。 Sensor assembly 108 includes one or more sensors for providing various aspects of the status assessment for the end device. For example, the sensor assembly 108 may detect the open/closed state of the end device, the relative positioning of the assembly, the presence or absence of user contact with the end device. The sensor assembly 108 may include a proximity sensor configured to detect the presence of nearby objects in the absence of any physical contact, including detecting the distance between the user and the end device. In some embodiments, the sensor assembly 108 may also include a camera or the like.
通信组件103被配置为便于终端设备和其他设备之间有线或无线方式的通信。终端设备可以接入基于通信标准的无线网络,如WiFi,2G或3G,或它们的组合。在一个实施例中,该终端设备中可以包括SIM卡插槽,该SIM卡插槽用于插入SIM卡,使得终端设备可以登录GPRS网络,通过互联网与服务端建立通信。 Communication component 103 is configured to facilitate wired or wireless communication between end devices and other devices. Terminal devices can access wireless networks based on communication standards, such as WiFi, 2G or 3G, or a combination thereof. In one embodiment, the terminal device may include a SIM card slot, and the SIM card slot is used for inserting a SIM card, so that the terminal device can log in to the GPRS network and establish communication with the server through the Internet.
由上可知,在图8实施例中所涉及的通信组件103、音频组件106以及输入/输出接口107、传感器组件108均可以作为图7实施例中的输入设备的实现方式。As can be seen from the above, the communication component 103, the audio component 106, the input/output interface 107, and the sensor component 108 involved in the embodiment of FIG. 8 can all be implemented as the input device in the embodiment of FIG. 7 .
本申请实施例提供了一种终端设备,包括:一个或多个处理器;和其上存储有指令的一个或多个机器可读介质,当由所述一个或多个处理器执行时,使得所述终端设备执行如本申请实施例中一个或多个所述的方法。Embodiments of the present application provide a terminal device, including: one or more processors; and one or more machine-readable media on which instructions are stored, which, when executed by the one or more processors, cause The terminal device executes one or more of the methods described in the embodiments of this application.
本说明书中的各个实施例均采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似的部分互相参见即可。The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the various embodiments may be referred to each other.
尽管已描述了本申请实施例的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例做出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本申请实施例范围的所有变更和修改。Although the preferred embodiments of the embodiments of the present application have been described, those skilled in the art may make additional changes and modifications to these embodiments once the basic inventive concepts are known. Therefore, the appended claims are intended to be construed to include the preferred embodiments as well as all changes and modifications that fall within the scope of the embodiments of the present application.
最后,还需要说明的是,在本文中,诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者终端设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者终端设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括所述要素的过程、方法、物品或者终端设备中还存在另外的相同要素。Finally, it should also be noted that in this document, relational terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply these entities or that there is any such actual relationship or sequence between operations. Moreover, the terms "comprising", "comprising" or any other variation thereof are intended to encompass non-exclusive inclusion such that a process, method, article or terminal device that includes a list of elements includes not only those elements, but also a non-exclusive list of elements. other elements, or also include elements inherent to such a process, method, article or terminal equipment. Without further limitation, an element defined by the phrase "comprises a..." does not preclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.
以上对本申请所提供的一种工业过程智能控制方法和系统,进行了详细介绍,本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想;同时,对于本领域的一般技术人员,依据本申请的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本申请的限制。A method and system for intelligent control of an industrial process provided by the present application have been introduced in detail above. The principles and implementations of the present application are described with specific examples in this paper. The method of the application and its core idea; at the same time, for those skilled in the art, according to the idea of the application, there will be changes in the specific implementation and application scope. In summary, the content of this description should not be understood to limit this application.

Claims (18)

  1. 一种工业过程智能控制方法,其特征在于,包括:An industrial process intelligent control method, characterized in that it includes:
    在未达到停止条件的情况下,获取控制对象的原始测量数据;If the stop condition is not reached, obtain the original measurement data of the control object;
    分析所述原始测量数据,获得分析后的测量数据;Analyzing the original measurement data to obtain the analyzed measurement data;
    利用深度学习模型对分析后的测量数据进行学习,确定控制方案;Use the deep learning model to learn the analyzed measurement data to determine the control plan;
    根据由所述控制方案获得的控制作用量,对所述控制对象进行控制。The control object is controlled according to the control action obtained by the control scheme.
  2. 根据权利要求1所述的工业过程智能控制方法,其特征在于,所述利用深度学习模型对所述分析后的测量数据进行学习,确定控制方案的步骤包括:The industrial process intelligent control method according to claim 1, wherein the step of using a deep learning model to learn the analyzed measurement data, and determining a control scheme comprises:
    在第一数据库中存储多个分析后的测量数据;storing a plurality of analyzed measurement data in the first database;
    利用第一深度学习模型对所存储的多个分析后的测量数据进行学习,输出经过所述第一深度学习模型处理后的CFD数据。Using the first deep learning model to learn the stored multiple analyzed measurement data, and output the CFD data processed by the first deep learning model.
  3. 根据权利要求2所述的工业过程智能控制方法,其特征在于,所述利用深度学习模型对所述分析后的测量数据进行学习,确定控制方案的步骤还包括:The industrial process intelligent control method according to claim 2, wherein the step of using a deep learning model to learn the analyzed measurement data, and determining a control scheme further comprises:
    在第二数据库中存储多个分析后的测量数据和历史CFD数据;storing a plurality of analyzed measurement data and historical CFD data in a second database;
    利用第二深度学习模型对所存储的多个分析后的测量数据和历史CFD数据进行学习,对CFD仿真模块进行优化。The second deep learning model is used to learn the stored multiple analyzed measurement data and historical CFD data to optimize the CFD simulation module.
  4. 根据权利要求1所述的工业过程智能控制方法,其特征在于,所述分析所述原始测量数据,获得分析后的测量数据的步骤包括:The method for intelligent control of an industrial process according to claim 1, wherein the step of analyzing the original measurement data and obtaining the analyzed measurement data comprises:
    根据实时采集到的测量装置的原始测量数据,确定分析模型;Determine the analysis model according to the original measurement data of the measurement device collected in real time;
    利用所确定的分析模型进行分析,获得分析后的测量数据。The analysis is performed using the determined analysis model, and the analyzed measurement data is obtained.
  5. 根据权利要求1所述的工业过程智能控制方法,其特征在于,所述原始测量数据包括:温度、压力、流量、液位、成分、浓度至少其中一者。The intelligent control method for an industrial process according to claim 1, wherein the raw measurement data includes at least one of temperature, pressure, flow rate, liquid level, composition, and concentration.
  6. 根据权利要求1所述的工业过程智能控制方法,其特征在于,所述测量装置包括激光测量装置。The industrial process intelligent control method according to claim 1, wherein the measurement device comprises a laser measurement device.
  7. 根据权利要求1所述的工业过程智能控制方法,其特征在于,所述测量装置是计算机断层扫描-可调谐半导体激光吸收光谱的激光测量装置。The industrial process intelligent control method according to claim 1, wherein the measurement device is a laser measurement device of computed tomography-tunable semiconductor laser absorption spectrum.
  8. 根据权利要求1所述的工业过程智能控制方法,其特征在于,所 述停止条件包括生产时间结束或控制目标达到其中一者。The intelligent control method for an industrial process according to claim 1, wherein the stop condition includes one of the end of production time or the achievement of a control target.
  9. 一种工业过程智能控制系统,用于对控制对象进行控制,其特征在于,所述工业过程智能控制系统包括:测量装置、分析模块、过程控制平台和自动控制装置;An industrial process intelligent control system for controlling a control object, characterized in that the industrial process intelligent control system comprises: a measuring device, an analysis module, a process control platform and an automatic control device;
    所述测量装置用于在未达到停止条件的情况下获取控制对象的原始测量数据;The measurement device is used to obtain the original measurement data of the control object under the condition that the stop condition is not reached;
    所述分析模块用于分析所述原始测量数据,获得分析后的测量数据;The analysis module is used to analyze the original measurement data to obtain the analyzed measurement data;
    所述过程控制平台用于利用深度学习模型对分析后的测量数据进行学习,确定控制方案;The process control platform is used for using the deep learning model to learn the analyzed measurement data to determine a control scheme;
    所述自动控制装置用于根据所述控制方案获得的控制作用量,对所述控制对象进行控制。The automatic control device is used for controlling the control object according to the control action amount obtained by the control scheme.
  10. 根据权利要求9所述的工业过程智能控制系统,其特征在于,所述过程控制平台包括:The industrial process intelligent control system according to claim 9, wherein the process control platform comprises:
    第一数据库单元,用于存储多个分析后的测量数据;a first database unit for storing a plurality of analyzed measurement data;
    第一深度学习模型单元,用于利用第一深度学习模型对所存储的多个分析后的测量数据进行学习,输出经过所述第一深度学习模型处理后的CFD数据。The first deep learning model unit is configured to use the first deep learning model to learn the stored multiple analyzed measurement data, and output the CFD data processed by the first deep learning model.
  11. 根据权利要求10所述的工业过程智能控制系统,其特征在于,所述过程控制平台还包括:The industrial process intelligent control system according to claim 10, wherein the process control platform further comprises:
    第二数据库单元,用于存储多个分析后的测量数据和历史CFD数据;a second database unit for storing a plurality of analyzed measurement data and historical CFD data;
    第一深度学习模型单元,用于利用第二深度学习模型对所存储的多个分析后的测量数据和历史CFD数据进行学习,对CFD仿真模块进行优化。The first deep learning model unit is configured to use the second deep learning model to learn from the stored multiple analyzed measurement data and historical CFD data, and to optimize the CFD simulation module.
  12. 根据权利要求9所述的工业过程智能控制系统,其特征在于,所述分析模块包括:The industrial process intelligent control system according to claim 9, wherein the analysis module comprises:
    分析模型确定单元,用于根据实时采集到的测量装置的原始测量数据,确定分析模型;以及an analysis model determination unit for determining an analysis model according to the raw measurement data of the measurement device collected in real time; and
    分析单元,用于利用所确定的分析模型进行分析,获得分析后的测量数据。The analysis unit is configured to perform analysis by using the determined analysis model to obtain the analyzed measurement data.
  13. 根据权利要求9所述的工业过程智能控制方法,其特征在于,所述原始测量数据包括:温度、压力、流量、液位、成分、浓度至少其中一者。The intelligent control method for an industrial process according to claim 9, wherein the raw measurement data includes at least one of temperature, pressure, flow rate, liquid level, composition, and concentration.
  14. 根据权利要求9所述的工业过程智能控制方法,其特征在于,所 述测量装置包括激光测量装置。The industrial process intelligent control method according to claim 9, wherein the measurement device comprises a laser measurement device.
  15. 根据权利要求9所述的工业过程智能控制方法,其特征在于,所述测量装置是基于计算机断层扫描-可调谐半导体激光吸收光谱技术的激光测量装置或激光诱导击穿光谱技术的激光测量装置。The industrial process intelligent control method according to claim 9, wherein the measuring device is a laser measuring device based on computed tomography-tunable semiconductor laser absorption spectroscopy technology or a laser measuring device using laser induced breakdown spectroscopy technology.
  16. 根据权利要求9所述的工业过程智能控制方法,其特征在于,所述停止条件包括生产时间结束或控制目标达到其中一者。The method for intelligent control of an industrial process according to claim 9, wherein the stop condition comprises one of the end of production time or the achievement of a control target.
  17. 一种终端设备,其特征在于,包括:A terminal device, characterized in that it includes:
    一个或多个处理器;和one or more processors; and
    其上存储有指令的一个或多个机器可读介质,当由所述一个或多个处理器执行时,使得所述终端设备执行如权利要求1-9中一个或多个所述的方法。One or more machine-readable media having instructions stored thereon which, when executed by the one or more processors, cause the terminal device to perform the method of one or more of claims 1-9.
  18. 一个或多个机器可读介质,其上存储有指令,当由一个或多个处理器执行时,使得终端设备执行如权利要求1-9中一个或多个所述的方法。One or more machine-readable media having stored thereon instructions which, when executed by one or more processors, cause a terminal device to perform a method as claimed in one or more of claims 1-9.
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