WO2022088914A1 - Dispositif photosensible et système de télémétrie par temps de vol - Google Patents

Dispositif photosensible et système de télémétrie par temps de vol Download PDF

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Publication number
WO2022088914A1
WO2022088914A1 PCT/CN2021/115373 CN2021115373W WO2022088914A1 WO 2022088914 A1 WO2022088914 A1 WO 2022088914A1 CN 2021115373 W CN2021115373 W CN 2021115373W WO 2022088914 A1 WO2022088914 A1 WO 2022088914A1
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photosensitive
pixel
logic circuit
pixel array
photosensitive pixel
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PCT/CN2021/115373
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English (en)
Chinese (zh)
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张学勇
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Oppo广东移动通信有限公司
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Publication of WO2022088914A1 publication Critical patent/WO2022088914A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves

Definitions

  • the present application belongs to the technical field of Time of Flight (TOF), and in particular relates to a photosensitive device and a time of flight ranging system.
  • TOF Time of Flight
  • the time-of-flight ranging method obtains the distance of the target by continuously sending optical pulse signals to the target, then receiving the optical signal reflected by the target, and detecting the flight (round-trip) time of the optical pulse signal.
  • Single-photon ranging systems based on time-of-flight technology have been widely used in terminal equipment in the fields of consumer electronics, unmanned aerial vehicles, virtual reality, and augmented reality.
  • the embodiments of the present application provide a photosensitive device and a time-of-flight ranging system, which can solve the problem of the low ratio between the effective photosensitive area and the total area of the photosensitive device in the prior art.
  • a first aspect of the embodiments of the present application provides a photosensitive device, including:
  • each photosensitive pixel array includes a plurality of photosensitive pixels arranged in an array, and each photosensitive pixel array is used to receive a single light spot projected on the photosensitive device by the lattice light reflected by the object;
  • each pixel logic circuit is connected to a photosensitive pixel, and each pixel logic circuit is arranged in the peripheral area of the photosensitive pixel array where the photosensitive pixel connected to it is located;
  • each shared logic circuit is connected to all the photosensitive pixels in the at least one photosensitive pixel array, and each shared logic circuit is arranged in the peripheral area of the at least one photosensitive pixel array to which it is connected.
  • the size of each photosensitive pixel array is greater than or equal to the size of a single light spot.
  • the size of each photosensitive pixel array in the row direction is greater than or equal to the diameter of a single light spot
  • the size of each photosensitive pixel array in the column direction is greater than or equal to the sum of the diameter of a single light spot and the moving distance of the light spot
  • the column The direction is the moving direction of the light spot on the photosensitive device.
  • the diameter of a single light spot is 10 micrometers to 40 micrometers
  • the moving distance of the light spot is 0 micrometers to 20 micrometers
  • the size of each photosensitive pixel array in the row is greater than or equal to 40 micrometers
  • the size in the column is greater than or equal to 40 micrometers. is equal to 60 microns.
  • each shared logic circuit is connected to all the photosensitive pixels in the at least two photosensitive pixel arrays, and each shared logic circuit is used for time-sharing to receive photon signals output by the photosensitive pixels in different photosensitive pixel arrays connected to it. .
  • each pixel logic circuit is disposed in an area in the four neighborhoods of the photosensitive pixel array where the photosensitive pixel to which it is connected is located, each pixel logic circuit is connected to the closest photosensitive pixel, and each shared logic circuit is connected to the photosensitive pixel. Pixel logic circuits are spaced between the connected photosensitive pixel arrays, or each shared logic circuit is disposed in one area of the four adjacent areas of the connected photosensitive pixel arrays.
  • each photosensitive pixel array includes M rows ⁇ 2 columns of photosensitive pixels, each column of photosensitive pixels is adjacent to M rows ⁇ 1 column of pixel logic circuits, and the pixel logic circuits and the photosensitive pixels are arranged in the same row and are closest to each other.
  • each shared logic circuit is spaced with M rows ⁇ 1 column of pixel logic circuits between each shared logic circuit and at least one photosensitive pixel array to which it is connected, where M is an integer greater than or equal to 1.
  • each photosensitive pixel array includes 4 rows ⁇ 4 columns of photosensitive pixels, each row of photosensitive pixels is adjacent to 1 row ⁇ 4 columns of pixel logic circuits, and each column of photosensitive pixels is connected to 4 rows ⁇ 1 column of pixel logic circuits. Adjacent to each other, there are 4 rows ⁇ 1 column of pixel logic circuits between each shared logic circuit and at least one photosensitive pixel array connected to it, and the size of each photosensitive pixel array is larger than the size of a single light spot.
  • each photosensitive pixel array includes m rows ⁇ n columns of photosensitive pixels, where m ⁇ n ⁇ (2m+2n), and both m and n are positive integers.
  • each pixel logic circuit includes a quench circuit for use with a photosensitive pixel.
  • each pixel logic circuit further includes one or more of a reset circuit, a gating circuit and a storage circuit.
  • each shared logic circuit includes a time-to-digital converter for calculating and converting time-of-flight to a time code from the photon signal output by each photosensitive pixel connected thereto.
  • each shared logic circuit further includes a histogram circuit for storing the time codes output by all the time-to-digital converter circuits connected thereto, and according to the time codes in at least one cycle of the dot matrix light The saved timecode generates a histogram.
  • each shared logic circuit and its correspondingly connected all photosensitive pixel arrays and all correspondingly connected pixel logic circuits of the photosensitive pixel arrays together form a super pixel unit
  • the photosensitive device includes a plurality of super pixel units.
  • the plurality of superpixel units are closely arranged in an array.
  • the photosensitive device is covered with an optical lens, and the optical lens is used to enlarge or reduce the size of the light spot projected on the photosensitive device.
  • a second aspect of the embodiments of the present application provides a time-of-flight ranging system, including:
  • a lattice light source which is used to emit lattice light to an object
  • the photosensitive device is configured to receive the dot matrix light spot projected on the photosensitive device by the dot matrix light reflected by the object, and output light used to indicate the time when the dot matrix light reaches the photosensitive device induction signal;
  • the controller is connected with the dot matrix light source and the photosensitive device, and is used to control the dot matrix light source to emit dot matrix light, control the photosensitive device to receive the dot matrix light spot and process it into a photosensitive signal, and obtain the difference between the object and the photosensitive device according to the photosensitive signal. distance.
  • the size of a single light spot is smaller than the size of each photosensitive pixel array, and the density of the dot matrix light spot projected on the photosensitive device is greater than the density of the photosensitive pixel array in the photosensitive device;
  • the time-of-flight ranging system further includes a microlens array covering the photosensitive device, and each microlens in the microlens array is used to enlarge or reduce the size of a single light spot projected to one photosensitive pixel array.
  • the lattice light source is a tunable or non-tunable device.
  • the controller when the dot matrix light source is a tunable device, the controller is further configured to:
  • the density of the lattice light emitted by the lattice light source is adjusted.
  • the time-of-flight ranging system further includes a collimating optical element and a diffractive optical element sequentially covering the lattice light source;
  • the collimating optical element is used to collimate the lattice light emitted by the lattice light source
  • the diffractive optical element is used to diffract the lattice light emitted by the lattice light source.
  • FIG. 1 is a first structural schematic diagram of a photosensitive device provided by an embodiment of the present application
  • FIG. 2 is a schematic diagram of a second structure of the photosensitive device provided by the embodiment of the present application.
  • FIG. 3 is a schematic diagram of a third structure of the photosensitive device provided by the embodiment of the present application.
  • FIG. 4 is a schematic diagram of a fourth structure of the photosensitive device provided by the embodiment of the present application.
  • FIG. 5 is a first structural schematic diagram of a time-of-flight ranging system provided by an embodiment of the present application.
  • FIG. 6 is a schematic diagram of a second structure of a time-of-flight ranging system provided by an embodiment of the present application.
  • the term “if” may be contextually interpreted as “when” or “once” or “in response to determining” or “in response to detecting “.
  • the phrases “if it is determined” or “if the [described condition or event] is detected” may be interpreted, depending on the context, to mean “once it is determined” or “in response to the determination” or “once the [described condition or event] is detected. ]” or “in response to detection of the [described condition or event]”.
  • references in this specification to "one embodiment” or “some embodiments” and the like mean that a particular feature, structure or characteristic described in connection with the embodiment is included in one or more embodiments of the present application.
  • appearances of the phrases “in one embodiment,” “in some embodiments,” “in other embodiments,” “in other embodiments,” etc. in various places in this specification are not necessarily All refer to the same embodiment, but mean “one or more but not all embodiments” unless specifically emphasized otherwise.
  • the terms “including”, “comprising”, “having” and their variants mean “including but not limited to” unless specifically emphasized otherwise.
  • the time-of-flight ranging method obtains the distance of the target by continuously sending optical pulse signals to the target, then receiving the optical signal reflected by the target, and detecting the flight (round-trip) time of the optical pulse signal.
  • Single-photon ranging systems based on time-of-flight technology have been widely used in terminal equipment in the fields of consumer electronics, unmanned aerial vehicles, virtual reality, and augmented reality.
  • a time-of-flight ranging system usually includes three parts: a transmitter, a receiver, and a signal processing circuit.
  • the core component of the receiver is a photosensitive device.
  • the most basic photosensitive pixel in the photosensitive device is the Single Photon Avalanche Diode (SPAD).
  • SPAD Single Photon Avalanche Diode
  • Photosensitive pixels need to be used with logic circuits such as quenching, reset, gating, time-to-digital signal conversion, distance calculation, etc. These logic circuits occupy a large area in the photosensitive device, resulting in the effective photosensitive area in the photosensitive device and the total area of the photosensitive device. ratio (i.e. fill factor (FF)) is lower.
  • FF fill factor
  • an embodiment of the present application provides a photosensitive device 100, including:
  • each photosensitive pixel array 1 includes a plurality of photosensitive pixels 11 arranged in an array, and each photosensitive pixel array 1 is used to receive a single spot of dot matrix light reflected by an object projected on the photosensitive device 100;
  • each pixel logic circuit 2 is connected to a photosensitive pixel 11, and each pixel logic circuit 2 is arranged in the peripheral area of the photosensitive pixel array 1 where the photosensitive pixel 11 to which it is connected is located;
  • each shared logic circuit 3 is connected to all photosensitive pixels 11 in at least one photosensitive pixel array 1, and each shared logic circuit 3 is disposed in the peripheral area of at least one photosensitive pixel array 1 to which it is connected.
  • the photosensitive device includes several photosensitive pixel arrays, several pixel logic circuits, and several shared logic circuits.
  • each photosensitive pixel array By making each photosensitive pixel array include several photosensitive pixels arranged in an array, each photosensitive pixel array is used for receiving The dot matrix light reflected by the object is projected on a single light spot on the photosensitive device; each pixel logic circuit is connected to a photosensitive pixel, and each pixel logic circuit is arranged in the peripheral area of the photosensitive pixel array where the photosensitive pixel to which it is connected is located;
  • Each shared logic circuit is connected to all the photosensitive pixels in the at least one photosensitive pixel array, and each shared logic circuit is arranged in the peripheral area of the at least one photosensitive pixel array to which it is connected, which can effectively increase the effective photosensitive area in the photosensitive device in the total photosensitive device. percentage of the area.
  • the number of photosensitive pixels included in each photosensitive pixel array can be set according to actual needs.
  • the photosensitive pixels in the photosensitive pixel array are closely arranged in an array, specifically in a rectangular array, or in a circular array. Or any other regular shape (for example, other regular polygons) array form, the distance between adjacent photosensitive pixels is as small as possible (for example, the distance between adjacent photosensitive pixels is 0).
  • the photosensitive pixel can be a single photon avalanche diode or a photomultiplier tube.
  • the photosensitive pixel can respond to a single incident photon and output a signal indicating the time when the photon reaches the photosensitive pixel. Based on the signal output by the photosensitive pixel, it can be used Time-Correlated Single Photon Counting (TCSPC) realizes the acquisition of weak light signals and the calculation of time-of-flight.
  • TCSPC Time-Correlated Single Photon Counting
  • the photosensitive device is used in the time-of-flight ranging system, it is used with a dot matrix light source. During ranging, the dot matrix light emitted by the dot matrix light source is reflected by the object and then projected to the photosensitive device, so that each photosensitive pixel array is used to receive A single spot of light projected onto the photosensitive device.
  • the number of dot matrix rays emitted by the dot matrix light source is equal to the number of photosensitive pixel arrays in the photosensitive device.
  • FIG. 1 exemplarily shows that each photosensitive pixel array 1 includes 2 rows ⁇ 2 columns of photosensitive pixels 11, and when each shared logic circuit 3 is connected to all photosensitive pixels 11 in one photosensitive pixel array 1, the photosensitive device 100 Schematic.
  • each photosensitive pixel is connected to a pixel logic circuit correspondingly, and each pixel logic circuit includes a quenching circuit that needs to be used in conjunction with a photosensitive pixel.
  • the pixel logic circuit is a necessary circuit for the photosensitive pixel to work normally.
  • the pixel logic circuit may also include a reset circuit, a gating circuit, a storage circuit, and the like.
  • the greater the number of photosensitive pixel arrays correspondingly connected to each shared logic circuit the higher the proportion of the effective photosensitive area in the photosensitive device.
  • Each shared logic circuit includes a Time to Digital Converter (TDC), which is used to calculate the time of flight from the photon signal output by each photosensitive pixel connected to it and convert it into a time code.
  • TDC Time to Digital Converter
  • Each shared logic The circuit may also include a histogram circuit, analog-to-digital conversion circuit, and the like.
  • the histogram circuit is used to save the time codes output by all the TDC circuits connected thereto and generate a histogram according to the time codes saved in at least one cycle of the lattice light.
  • Each shared logic circuit, all the photosensitive pixel arrays connected to it and the pixel logic circuits correspondingly connected to all the photosensitive pixel arrays together form a super pixel unit.
  • the photosensitive device includes several super pixel units. These super pixel units can be in the form of an array. closely arranged.
  • FIG. 1 exemplarily shows that the photosensitive device 100 includes several superpixel units 101 closely arranged in an array.
  • all pixel logic circuits and a shared logic circuit corresponding to each photosensitive pixel array can be arranged in the peripheral area of each photosensitive pixel array according to actual needs. It takes up minimal space and facilitates wiring.
  • each pixel logic circuit is disposed in an area in the four neighborhoods of the photosensitive pixel array where the photosensitive pixel to which it is connected is located, each pixel logic circuit is connected to the closest photosensitive pixel, and each shared logic circuit is connected to the photosensitive pixel. Pixel logic circuits are spaced between the connected photosensitive pixel arrays, or each shared logic circuit is disposed in one area of the four adjacent areas of the connected photosensitive pixel arrays.
  • each photosensitive pixel array includes m rows ⁇ n columns of photosensitive pixels, m ⁇ n ⁇ (2m+2n), that is, the number of photosensitive pixels included in each photosensitive pixel array is less than or equal to each photosensitive pixel
  • the number of regions of the logic pixel circuit can be set in the four neighborhoods of the pixel array, and both m and n are positive integers.
  • each photosensitive pixel since each photosensitive pixel must be connected to a pixel logic circuit, the length of the wiring between the two should be as short as possible to facilitate the wiring. Therefore, each pixel logic circuit can be arranged adjacent to the photosensitive pixel array. one of the domains and keep each pixel logic closest to the photosensitive pixel to which it is connected. When there is still a spare area that can accommodate the shared logic circuit in the four neighborhoods of the photosensitive pixel array, the shared logic circuit correspondingly connected to the photosensitive pixel array can be set in an spare area in the four neighborhoods. If there is no spare area, then A shared logic circuit correspondingly connected to the photosensitive pixel array is arranged next to the pixel logic circuit.
  • FIG. 1 exemplarily shows that each column of photosensitive pixels 11 is adjacent to 2 rows ⁇ 1 column of pixel logic circuits 2 , and the pixel logic circuits 2 arranged in the same row and with the closest distance are connected to the photosensitive pixels 11 , and each shared logic circuit 3 A pixel logic circuit 2 of 2 rows ⁇ 1 column is spaced between a photosensitive pixel array 1 connected to it.
  • the size of each photosensitive pixel array is greater than or equal to the size of a single light spot.
  • the size of each photosensitive pixel array in the row direction is greater than or equal to the diameter of a single light spot
  • the size of each photosensitive pixel array in the column direction is greater than or equal to the sum of the diameter of a single light spot and the moving distance of the light spot
  • the column The direction is the moving direction of the light spot on the photosensitive device.
  • the size of the light spot projected on the photosensitive device can remain unchanged.
  • the light spot is projected on the photosensitive device.
  • the position of each photosensitive pixel array is also fixed.
  • the size of each photosensitive pixel array should be set to be greater than or equal to the size of a single light spot.
  • the position of the light spot projected on the photosensitive device will move with the change of the distance between the object and the time-of-flight ranging system.
  • each photosensitive pixel array can still receive a complete single light spot
  • the size of each photosensitive pixel array in the row direction can be set to be greater than or equal to the diameter of a single light spot
  • each photosensitive pixel array can be set to be larger than or equal to the diameter of a single light spot.
  • the size in the column direction is set to be greater than or equal to the sum of the diameter of a single light spot and the moving distance of the light spot, and the column direction is the moving direction of the light spot on the photosensitive device.
  • the movement of the light spot on the photosensitive device is exemplarily shown; wherein, the position of the solid line circle 41 is the projection position of the light spot on the photosensitive device before the movement of the light spot, and the dotted circle 42 is the position of the light spot after the movement of the light spot. Projection position on the photosensitive device.
  • the diameter of a single light spot is 10 ⁇ m-40 ⁇ m
  • the moving distance of the light spot is 0 ⁇ m-20 ⁇ m
  • the size of each photosensitive pixel array in the first direction is greater than or equal to 40 ⁇ m
  • in the second direction dimensions greater than or equal to 60 microns.
  • the diameter of a single light spot is usually in the range of 10 microns to 40 microns, and in the ranging distance of 0.2 m to 10 m (that is, the distance between the object and the time-of-flight ranging system), the moving distance of the light spot is usually 0 Therefore, in order to make the light spot move, each photosensitive pixel array can still receive a complete single light spot, the size of each photosensitive pixel array in the row direction should be greater than or equal to the diameter of a single light spot, That is, 40 microns, and the size of each photosensitive pixel array in the column direction is greater than or equal to the sum of the diameter of a single light spot and the moving distance of the light spot, that is, 60 microns.
  • the diameter of a single photosensitive pixel is usually in the range of 10 micrometers to 20 micrometers.
  • the number of photosensitive pixels included in the photosensitive pixel array can be reasonably set, so that the size of the photosensitive pixel array is consistent with the movement of the light spot. It can also receive the ranging requirements of a single spot. For example, when the diameter of a single photosensitive pixel is 10 ⁇ m, the photosensitive pixel array should include 6 rows ⁇ 4 columns of photosensitive pixels; when the diameter of a single photosensitive pixel is 20 ⁇ m, the photosensitive pixel array should include 3 rows ⁇ 2 columns of photosensitive pixels.
  • FIG. 2 exemplarily shows that each photosensitive pixel array 1 includes 3 rows ⁇ 2 columns of photosensitive pixels 11 , and each column of photosensitive pixels 11 is adjacent to 3 rows ⁇ 1 column of pixel logic circuits 2 , arranged in the same row and closest to the distance.
  • the pixel logic circuit 2 is connected to the photosensitive pixel 11 , and each shared logic circuit 3 and a photosensitive pixel array 1 connected to it are separated by 3 rows ⁇ 1 column of pixel logic circuits 2 , which is a schematic structural diagram of the photosensitive device 100 .
  • each photosensitive pixel array includes M rows ⁇ 2 columns of photosensitive pixels, each column of photosensitive pixels is adjacent to M rows ⁇ 1 column of pixel logic circuits, and the pixel logic circuits and the photosensitive pixels are arranged in the same row and are closest to each other.
  • each shared logic circuit is spaced with M rows ⁇ 1 column of pixel logic circuits between each shared logic circuit and at least one photosensitive pixel array to which it is connected, where M is an integer greater than or equal to 1.
  • each photosensitive pixel needs to be connected to a pixel logic circuit, in order to make the wiring distance between each photosensitive pixel and its corresponding pixel logic circuit the shortest, in order to reduce unnecessary area waste, each photosensitive pixel can be made
  • Each photosensitive pixel and its corresponding pixel logic circuit are arranged as adjacent as possible.
  • each photosensitive pixel array include M rows ⁇ 2 columns of photosensitive pixels, and arranging the pixel logic circuits along the column direction, the pixel logic circuits located in the same row and closest to each other are arranged.
  • the pixel logic circuit is connected with the photosensitive pixel, and it can be realized. For example, this arrangement is adopted in FIG. 1 and FIG. 2 .
  • each photosensitive pixel array includes 4 rows ⁇ 4 columns of photosensitive pixels, each row of photosensitive pixels is adjacent to 1 row ⁇ 4 columns of pixel logic circuits, and each column of photosensitive pixels is connected to 4 rows ⁇ 1 column of pixel logic circuits. Adjacent to each other, there are 4 rows ⁇ 1 column of pixel logic circuits between each shared logic circuit and at least one photosensitive pixel array connected to it, and the size of each photosensitive pixel array is larger than the size of a single light spot.
  • the number of photosensitive pixels in each photosensitive pixel array can be increased, that is, the size of each photosensitive pixel array can be increased to ensure that the probability of the light spot falling on the photosensitive pixel array is much greater than that of the pixel logic circuit and shared The probability of logic circuit, in this way, even if the distance between the centers of adjacent light spots is not equal to the distance between the centers of adjacent photosensitive pixel arrays, and there is a slight difference, it can ensure that most of the light spots are completely projected on the effective photosensitive device of the photosensitive device.
  • each photosensitive pixel array can include 4 rows ⁇ 4 columns of photosensitive pixels, and then A corresponding number (ie, 16) of pixel logic circuits are arranged in the four neighborhoods of each photosensitive pixel array, so as to maximize the effective photosensitive area as much as possible while making full use of the four neighborhood spaces around the photosensitive pixel array.
  • FIG. 3 exemplarily shows that each photosensitive pixel array 1 includes 4 rows ⁇ 4 columns of photosensitive pixels 11 , each row of photosensitive pixels 11 is adjacent to 1 row ⁇ 4 columns of pixel logic circuits 2 , and each column of photosensitive pixels 11 is adjacent to 4 rows ⁇ 4 rows of photosensitive pixels 11 .
  • the structure of the photosensitive device shown in FIG. 3 enables a single light spot projected to each photosensitive pixel array to move only in the photosensitive pixel array, so that the light energy reflected from the object to the photosensitive device is not wasted, and the energy utilization efficiency is effectively improved.
  • the corresponding optical lens to cover the photosensitive device to enlarge or reduce the size of the light spot projected on the photosensitive device, so as to ensure that the light spot can always partially or completely fall on the corresponding photosensitive pixel array; Reduce the spot size and increase the spot density (even if the size of a single spot is smaller than the size of each photosensitive pixel array, the density of the dot matrix spot projected on the photosensitive device is greater than the density of the photosensitive pixel array in the photosensitive device) to ensure that there is always The light spots can all fall on the corresponding photosensitive pixel array.
  • each shared logic circuit is connected to all the photosensitive pixels in the at least two photosensitive pixel arrays, and each shared logic circuit is used for time-sharing to receive photon signals output by the photosensitive pixels in different photosensitive pixel arrays connected to it. .
  • each shared logic circuit can be connected with all photosensitive pixel arrays in two or more photosensitive pixel arrays, thereby effectively increasing the effective photosensitive area.
  • the method for each shared logic circuit to receive photon signals output by the photosensitive pixels in different photosensitive pixel arrays connected to it in a time-sharing manner may specifically be: receiving the photonic signals output by the photosensitive pixels in the first photosensitive pixel array connected to the shared logic circuit in a first period of time.
  • the photon signal receiving the photon signal output by the photosensitive pixel in the second photosensitive pixel array connected to it in the second time period, and receiving the photon signal output by the photosensitive pixel in the third photosensitive pixel array connected to it in the third time period ,...,So on and so forth.
  • the shared logic circuit can stop receiving photon signals output by other photosensitive pixels in the photosensitive pixel array when it receives the photon signal output from one photosensitive pixel array; it can also receive the photosensitive pixel array as much as possible.
  • the photon signals output by all the photosensitive pixels in the array that is, stop receiving when the photosensitive pixel array no longer outputs photon signals).
  • each photosensitive pixel array 1 includes 3 rows x 2 columns of photosensitive pixels 11, each column of photosensitive pixels 11 is adjacent to 3 rows x 1 column of pixel logic circuits 2, and the pixel logic circuits 2 located in the same row and with the closest distance are connected to the photosensitive pixels 11, and each shared logic circuit 3.
  • the position of the solid line circle 41 is the projection position on the photosensitive device before the light spot moves, and the dotted circle 42 is the light spot after the light spot moves. Projection position on the device.
  • an embodiment of the present application provides a time-of-flight ranging system 1000, including:
  • the lattice light source 200 is used for emitting lattice light to the object 2000;
  • the photosensitive device 100 is used to receive the dot matrix light spot projected on the photosensitive device 100 by the dot matrix light reflected by the object 2000, and output a light sensing signal used to indicate the time when the dot matrix light reaches the photosensitive device 100;
  • the controller 300 connected with the dot matrix light source 200 and the photosensitive device 100, is used to control the dot matrix light source 200 to emit dot matrix light, control the photosensitive device 100 to receive the dot matrix light spot and process it into a light sensing signal, and obtain the object 2000 according to the light sensing signal distance from the photosensitive device 100 .
  • Solid lines in FIG. 5 represent electrical connections, and dashed lines with arrows represent optical signals.
  • the time-of-flight ranging system includes a dot-matrix light source, a controller, and the photosensitive device according to the first aspect of the embodiments of the present application.
  • the dot-matrix light source emits dot-matrix light to an object;
  • the dot-matrix light reflected by the object is projected on the dot-matrix light spot on the photosensitive device, and a light-sensing signal indicating the time when the dot-matrix light reaches the photosensitive device is output;
  • the controller is connected with the dot-matrix light source and the photosensitive device to control the dot-matrix light source.
  • the light source emits lattice light, controls the photosensitive device to receive the dot matrix light spot and processes it into a photosensitive signal, and obtains the distance between the object and the photosensitive device according to the photosensitive signal, which is the basis of the photosensitive device provided in the first aspect of the embodiments of the present application.
  • the energy utilization efficiency of the time-of-flight ranging system can be effectively improved.
  • the lattice light source can be set as laser, light emitting diode (LED) array, laser diode (LD) array, edge-emitting laser (EEL), etc. according to actual needs.
  • the laser may specifically be a Vertical-Cavity Surface-Emitting Laser (VCSEL).
  • VCSEL Vertical-Cavity Surface-Emitting Laser
  • the lattice light source can be a tunable or non-tunable device. By setting the lattice light source as a non-tunable device, the design difficulty and cost of the time-of-flight ranging system can be effectively reduced.
  • the distance between the object and the time-of-flight ranging system or the light intensity of the ambient light adjust the intensity of the lattice light emitted by the lattice light source, for example, the distance between the object and the time-of-flight ranging system or the light intensity of the ambient light
  • the intensity is weak
  • the object can be any object in free space that can reflect the lattice light emitted by the lattice light source.
  • the controller may be a central processing unit (CPU), or other general-purpose controllers, digital signal processors (DSPs), application specific integrated circuits (ASICs) , Off-the-shelf programmable gate array (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.
  • the general purpose controller can be a microcontroller or any conventional controller or the like. The controller is also used to control the dot matrix light source and the photosensitive device to be turned on or off.
  • the size of a single light spot is smaller than the size of each photosensitive pixel array, and the density of the dot matrix light spot projected on the photosensitive device is greater than the density of the photosensitive pixel array in the photosensitive device;
  • the time-of-flight ranging system further includes a microlens array covering the photosensitive device, and each microlens in the microlens array is used to enlarge or reduce the size of a single light spot projected to one photosensitive pixel array.
  • FIG. 6 exemplarily shows that the time-of-flight ranging system 100 further includes an optical lens module 400 covering the photosensitive device 100 .
  • the time-of-flight ranging system includes at least a lattice light source, a photosensitive device and a controller, and may also include a collimating optical element and a diffractive optical element (Diffractive Optical Elements, DOE) covering the lattice light source, and a focusing device covering the photosensitive device.
  • a collimating optical element and a diffractive optical element Diffractive Optical Elements, DOE
  • Lenses or microlens arrays, etc., collimating optical elements and diffractive optical elements can sequentially cover the lattice light source.
  • the collimating optical element is used for collimating the lattice light emitted by the lattice light source
  • the diffractive optical element is used for diffracting the lattice light.
  • the lens or microlens array is used to focus or diverge the lattice light reflected by the object onto the photosensitive surface of the photosensitive device. Specifically, each microlens in the microlens array is used to enlarge or reduce a single light spot projected to a photosensitive pixel array. size of.
  • the photosensitive device and time-of-flight ranging system provided by the embodiments of the present application can be applied to mobile phones, tablet computers, wearable devices, vehicle-mounted devices, augmented reality (AR) devices, virtual reality (VR) devices,
  • AR augmented reality
  • VR virtual reality
  • terminal devices such as notebook computers, netbooks, and personal digital assistants (personal digital assistants, PDAs)
  • PDAs personal digital assistants

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  • Optical Radar Systems And Details Thereof (AREA)

Abstract

La présente invention s'applique au domaine technique du temps de vol, et fournit un dispositif photosensible et un système de télémétrie par temps de vol. Le dispositif photosensible comprend une pluralité de réseaux de pixels photosensibles, une pluralité de circuits logiques de pixels, et une pluralité de circuits logiques partagés ; chaque réseau de pixels photosensibles comprend une pluralité de pixels photosensibles disposés sous forme de réseau, et chaque réseau de pixels photosensibles est utilisé pour recevoir un seul point lumineux, projeté sur le dispositif photosensible, de la lumière de matrice de points réfléchie par un objet ; chaque circuit logique de pixel est connecté à un pixel photosensible, et chaque circuit logique de pixel est disposé dans une région périphérique du réseau de pixels photosensibles où le pixel photosensible connecté au circuit logique de pixel est situé ; chaque circuit logique partagé est connecté à tous les pixels photosensibles dans au moins un réseau de pixels photosensibles, et chaque circuit logique partagé est disposé dans une région périphérique du au moins un réseau de pixels photosensibles connecté au circuit logique partagé. Par conséquent, la proportion de la surface photosensible effective dans le dispositif photosensible par rapport à la surface totale du dispositif photosensible peut être augmentée efficacement.
PCT/CN2021/115373 2020-10-26 2021-08-30 Dispositif photosensible et système de télémétrie par temps de vol WO2022088914A1 (fr)

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