WO2022080452A1 - Connector, temperature sensor equipped with connector, and extension line equipped with connector - Google Patents

Connector, temperature sensor equipped with connector, and extension line equipped with connector Download PDF

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Publication number
WO2022080452A1
WO2022080452A1 PCT/JP2021/038061 JP2021038061W WO2022080452A1 WO 2022080452 A1 WO2022080452 A1 WO 2022080452A1 JP 2021038061 W JP2021038061 W JP 2021038061W WO 2022080452 A1 WO2022080452 A1 WO 2022080452A1
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WO
WIPO (PCT)
Prior art keywords
connector
thin film
thermocouple element
base member
film thermocouple
Prior art date
Application number
PCT/JP2021/038061
Other languages
French (fr)
Japanese (ja)
Inventor
正平 宮武
和己 伊藤
Original Assignee
ジオマテック株式会社
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Filing date
Publication date
Application filed by ジオマテック株式会社 filed Critical ジオマテック株式会社
Publication of WO2022080452A1 publication Critical patent/WO2022080452A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/10—Arrangements for compensating for auxiliary variables, e.g. length of lead
    • G01K7/12—Arrangements with respect to the cold junction, e.g. preventing influence of temperature of surrounding air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • G01K7/10—Arrangements for compensating for auxiliary variables, e.g. length of lead
    • G01K7/12—Arrangements with respect to the cold junction, e.g. preventing influence of temperature of surrounding air
    • G01K7/13—Circuits for cold-junction compensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/66—Structural association with built-in electrical component

Definitions

  • the present invention relates to a connector, a temperature sensor with a connector, and an extension line with a connector, and more specifically, to a connector corresponding to a thin film thermocouple element, a temperature sensor with a connector, and an extension line with a connector.
  • thermocouple An element consisting of a combination of two types of metals made for temperature measurement is called a thermocouple, and is a technology that has been used for a long time as a temperature measurement element using the Zeebeck effect.
  • thermocouple There is a thin film thermocouple as a thin and flexible temperature sensor.
  • the thin-film thermocouple element is made of a heat-resistant film and a conductive thin film, and can measure the temperature in a small and narrowly complicated place.
  • the temperature measuring element described in Patent Document 1 is not an exchangeable type, but a thin film thermocouple element and a connector are assembled and integrated in a one-to-one manner.
  • the connector of Patent Document 1 is provided with an elastic material for crimping on the side of the substrate that does not have the conductive thin film in order to crimp the conductive thin film element to the compensating lead wire, and the terminals are pressure-welded with screws or the like.
  • Need to be reinforced with adhesive That is, an auxiliary material is required to sufficiently press-contact the thin-film thermocouple element and the compensating lead wire.
  • Patent Document 2 discloses a connector in which a band-shaped thermocouple is inserted and conductively connected. In this connector, when a thin film thermocouple element is inserted, the conductive thin film may be damaged and damaged by friction. Further, the connector of Patent Document 2 does not incorporate a temperature sensor for correction, and cannot be applied to a thin film thermocouple element.
  • Patent Document 3 discloses a slide-type connector provided with a leaf spring-shaped terminal. In this connector, when the slide lid is slid, the element is pressure-fixed by the leaf spring.
  • the connector of Patent Document 3 does not incorporate a temperature sensor for correction, and cannot be applied to a thin film thermocouple element. Further, it is generally difficult to process a thermocouple material into a leaf spring-shaped terminal.
  • the thin film thermocouple element Due to the difference between the thin metal wire and the thin film at the contact point between the thin film thermocouple element and the lead wire, the thin film thermocouple element shows a value lower than the thermoelectromotive force derived from the actual temperature difference. Therefore, the temperature-thermoelectromotive force characteristic of the thin-film thermocouple element does not match the temperature-thermoelectromotive force characteristic of the bulk thermocouple, and accurate temperature measurement cannot be performed.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide an interchangeable connector compatible with a thin film thermocouple element, a temperature sensor with the connector, and an extension line with a connector. be.
  • the subject is a connector for connecting a thin film thermocouple element to an external device, which includes a base member and a cover member, and the base member is the thin film thermocouple. It has an electrode connected to the external contact of the element and a temperature sensor for correction, and the thin film thermocouple element is sandwiched between the cover member and the base member, so that the external contact is connected to the electrode. It will be solved by that.
  • the structure is such that the thin-film thermocouple element cannot be installed unless the cover member is opened. Can be prevented.
  • a temperature sensor for correction into the connector, the temperature on the cold contact side of the thin-film thermocouple element can be grasped, so measurement is derived from the difference in thermoelectromotive force between the thin-film thermocouple and the electrode made of bulk material. It is possible to correct the temperature error and measure the temperature accurately.
  • the cover member is rotatably attached to the base member. As described above, when the cover member is rotatable with respect to the base member, the operation of opening the cover member becomes easy, and the thin film thermocouple element can be pressed and sandwiched by the cover member.
  • the base member has a mounting portion on which the connection end portion of the thin film thermocouple element provided with the external contact is mounted, and the previously described mounting portion engages with the connection end portion. It is preferable to have an engaging portion. In this way, the engaging portion provided in the base portion engages with the connection end portion of the thin film thermocouple element, so that the thin film thermocouple element is prevented from coming off from the connector when the cover member of the connector is closed. At the same time, the electrical contact between the external contact of the thin film thermocouple element and the electrode is ensured.
  • the electrode is a round bar electrode, and the base member is provided with a concave groove for receiving the round bar electrode in the above-mentioned mounting portion.
  • the electrode is a material having poor workability, for example, chromel or alumel, and the shape is not made into a thin flat plate, and the electrode (terminal) is formed in a round bar state. It becomes possible to process. Since the round bar is easily available and easy to cut and bend, the workability of the electrode is improved as compared with the flat plate, and the electrode (terminal) can be easily manufactured at low cost.
  • the correction temperature sensor is a correction thermocouple composed of a pair of metal wires
  • the base member includes a housing recess for accommodating the correction thermocouple and a protrusion provided in the storage recess.
  • the pair of metal wires are preferably arranged in the accommodating recess so as to surround the protrusion. According to such a configuration, the physical strength can be increased by welding the tips of a pair of metal wires constituting the compensating thermocouple into a ring shape and hooking them so as to surround the protrusions.
  • the concave groove has a curved shape on the side close to the above-mentioned placement portion and a square shape on the side close to the accommodation recess. According to such a configuration, when the round bar electrode is inserted into the concave groove, the size of the connector 1 is made compact without enlarging the accommodating concave portion by inserting the round bar electrode from the square groove close to the concave portion accommodating the correction thermocouple. However, the mountability of the electrodes is good.
  • the problem is solved by providing the connector and the thin film thermocouple element connected to the connector according to the temperature sensor with a connector of the present invention.
  • the problem is solved by providing the above-mentioned connector and an extension line having a compensating lead wire connected to the electrode.
  • the connector of the present invention, the temperature sensor with a connector, and the extension wire with a connector can prevent damage due to friction by sandwiching the thin film thermocouple element. Further, in the connector, the temperature sensor with a connector, and the extension line with a connector of the present invention, the temperature on the cold contact side of the thin film thermocouple element can be grasped by the correction temperature sensor, so that the temperature can be measured accurately. It becomes.
  • FIG. 1A is a cross-sectional view taken along the line AA of FIG. 1A.
  • FIG. 1A is a cross-sectional view taken along the line AA of FIG. 1A.
  • FIG. 1A is a cross-sectional view taken along the line AA of FIG. 1A.
  • It is an external view of a base member. It is an external view of a base member. It is an external view in the state which the cover member of a connector is closed. It is an external view in the state which the cover member of a connector is opened.
  • It is an exploded perspective view of a connector. It is a perspective view which shows the back surface of a connector.
  • FIG. 15 is a cross-sectional view taken along the line BB of FIG. 16 is a cross-sectional view taken along the line CC of FIG.
  • FIGS. 1 to 18 a connector, a temperature sensor with a connector, and an extension line with a connector according to an embodiment of the present invention will be described with reference to FIGS. 1 to 18.
  • ⁇ Thin film thermocouple element 50> 1A and 1B are schematic schematic views of a thin film thermocouple element 50 connected to the connector 1 according to the present embodiment.
  • the thin film thermocouple element 50 is formed of a pair of thin films made of different metals on a substrate 51 such as a long rectangular film, and includes a pair of conductive thin films 52 and 53 extending in parallel along the longitudinal direction. ..
  • the pair of conductive thin films 52 and 53 intersect at one end side (tip side, front end side), and the intersecting points are connected to each other for temperature measurement contact 54 for measuring the temperature of the object. It has become.
  • External contacts 52a and 53a are provided on the other end sides (base end side and rear end side) of the pair of conductive thin films 52 and 53.
  • the thin film thermocouple element 50 is connected to a pair of electrodes 30 provided on the mounting portion 11 of the base member 10 at the external contacts 52a and 53a, respectively.
  • the conductive thin films 52 and 53 are different materials, respectively, and are joined so that the conductive thin films 52 and 53 overlap each other at the temperature measuring contact 54.
  • the substrate 51 forming the thin film thermocouple element 50 glass, a resin film, a metal, or the like can be used.
  • a resin film Unlike conductive substrates such as metal, glass and resin films do not require pretreatment, so operations are not complicated and are suitable.
  • the flexibility of the resin film can increase the strength of the thin film thermocouple element.
  • a polyimide film is used.
  • the polyimide film is a thin-film thermocouple element substrate in that it can be bent, is not easily broken even if the substrate is several microns thick, and is relatively stable even at temperatures exceeding 200 ° C. It is a suitable material.
  • the thickness of the substrate 51 is preferably 1 ⁇ m or more and 150 ⁇ m or less, more preferably 1 ⁇ m or more and 50 ⁇ m or less, and particularly preferably 1 ⁇ m or more and 18 ⁇ m or less.
  • the combinations of dissimilar metals constituting the conductive thin film of the thin film thermocouple element 50 include chromel-almel, PtRh-Pt, chromel-constantan, nycrosyl-nycil, Cu-constantan, Fe-constantan, Ir-IrRh, and W-Re. , Au-Pt, Pt-Pd, Bi-Sb and the like can be used. It is preferable to use a combination of chromel and alumel, which has a wide operating temperature range and a linear relationship between temperature and thermoelectromotive force.
  • a vacuum film forming method such as a sputtering method, an electron beam vapor deposition method, a heat vapor deposition method, or a coating method can be used. It is preferable to use a vacuum film forming method capable of forming a thinner and more uniform thin film. More preferably, it is preferable to use a sputtering method in which the atomic composition does not deviate from the vapor-filmed material and the film can be formed uniformly.
  • the thin film thermocouple element 50 is covered with a protective film 50a.
  • the applicable protective film 50a is an insulating film obtained by forming SiO 2 , Al 2 O 3 , or the like by a vapor deposition method, a sputtering method, a dipping method, or the like, a polyimide film by a screen printing method, or the like. It is preferable to use a polyimide film having high heat resistance, chemical resistance, and high adhesiveness.
  • the thickness of the conductive thin films 52 and 53 is preferably 10 nm or more and 1 ⁇ m or less, more preferably 100 nm or more and 700 nm or less, and more preferably 150 nm or more and 550 nm or less.
  • connection end portion 51a of the substrate 51 of the thin film thermocouple element 50 has a through hole 51b penetrating in the thickness direction near the center and notches 51c formed toward the center on both side portions in the left-right direction (width direction). Is formed. Further, a reinforcing member 55 may be provided on the side of the connection end portion 51a of the substrate 51 opposite to the external contacts 52a and 53a.
  • the connector 1 of the present embodiment is a connector for connecting the thin film thermocouple element 50 to an external device (for example, a temperature indicator).
  • the connector 1 is an extension wire 3 with a connector having a lead wire 1a as an extension wire and a device connection end portion 1b (FIG. 2).
  • the connector 1 constitutes the temperature sensor 2 with a connector by connecting the thin film thermocouple element 50.
  • the connector 1 includes a base member 10 and a cover member 20 attached to the base member 10. As will be described later, the cover member 20 is configured such that the first cover member 21 and the second cover member 22 are rotatably connected by a connection pin 23.
  • the material of the base member 10 and the cover member 20 forming the connector 1 is not particularly limited as long as it is an insulator, but for example, thermoplastics and the like can be used.
  • the base member 10 includes a front surface 10a (upper surface), a back surface 10b (lower surface), a nut receiving portion 10c formed on the back surface 10b, a front surface 10d, a rear surface 10e, and a side surface 10f. There is.
  • the base member 10 has a pair of electrodes 30 connected to the external contacts 52a and 53a of the thin film thermocouple element 50, and a correction thermocouple 40 as a correction temperature sensor.
  • the base member 10 has a mounting portion 11 on which the connection end portion 51a of the thin film thermocouple element 50 is mounted in front.
  • the mounting portion 11 has a through hole 12 formed in the central portion thereof. Further, the mounting portion 11 has a positioning convex portion 13 (engagement portion) for engaging the thin film thermocouple element 50 with the notch portion 51c formed in the connection end portion 51a.
  • the positioning convex portion 13 included in the mounting portion 11 of the base member 10 corresponds to the notch portion 51c formed in the connection end portion 51a of the thin film thermocouple element 50, and the connection of the thin film thermocouple element 50 in the connector 1 It is possible to determine the position of the end portion 51a (FIG. 9 described later).
  • the base member 10 includes the positioning convex portion 13
  • the thin film thermocouple element 50 cannot be mounted on the mounting portion 11 unless the first cover member 21 as a lid is opened. There is. Specifically, when the first cover member 21 is not opened, the positioning convex portion 13 prevents the thin film thermocouple element 50 from being inserted into the mounting portion 11 from the front.
  • the mounting portion 11 is formed with a round groove 14a having a curved cross section ⁇ and a square groove 14b having a square shape as concave grooves for receiving the electrodes 30 on both side portions of the through hole 12.
  • the round groove 14a is located on the front side close to the mounting portion 11, and the square groove 14b is located on the rear side close to the housing recess 16 of the correction sensor housing portion 15.
  • the width of the square groove 14b is wider than that of the round groove 14a.
  • the electrode 30 When inserting the electrode 30 as a thermocouple strand into the round groove 14a, insert it from the rear side (the side where the accommodating recess 16 is provided). At this time, if the accommodating recess 16 of the correction sensor accommodating portion 15 described later is too narrow, or if there is no square groove 14b and the entire area is a round groove 14a, the electrode 30 is inserted into the mounting portion 11 and arranged. I can't.
  • the groove for receiving the electrode 30 is a combination of the round groove 14a and the square groove 14b, so that the size of the connector 1 can be made compact and the electrode 30 can be easily attached. There is.
  • the base member 10 has a correction sensor accommodating portion 15 accommodating a correction thermocouple 40 as a correction temperature sensor described later.
  • the accommodating recess 16 of the correction sensor accommodating portion 15 is formed with a protrusion 17 projecting toward the upper cover member 20.
  • a through hole 18 is formed on the rear end side of the correction sensor accommodating portion 15.
  • cover member 20 As shown in FIGS. 5 to 8, the cover member 20 is attached to the base member 10 by a fastening member such as a screw B1, a countersunk screw B2, and hexagon nuts N1 and N2.
  • the cover member 20 is configured by connecting a first cover member 21 on the front side and a second cover member 22 on the rear side so as to be rotatably connected by a connection pin 23.
  • the first cover member 21 is formed with a counterbore portion 21a and a through hole 21b in the vertical direction. Further, the first cover member 21 is formed with recesses 21c formed toward the center on both side portions in the left-right direction (width direction).
  • the second cover member 22 has hinge portions 22a protruding so as to sandwich the rear end portion of the first cover member 21 on both side portions in the left-right direction (width direction).
  • the connection pin 23 is inserted through a through hole (not shown) formed in the first cover member 21 and the second cover member 22.
  • the second cover member 22 is formed with a chamfered portion 22b and an opening 22c that communicate with each other in the vertical direction.
  • a fall-prevention screw so that the screw B1 does not come off every time the first cover member 21 as a lid is opened and closed. Further, the heads of the screw B1 and the countersunk screw B2 can be hidden by the presence of the counterbore portion 21a and the chamfer portion 22b.
  • the electrode 30 is a round bar electrode (a round bar wire having a circular cross section), and the round groove 14a and the square groove 14b formed in the mounting portion 11 of the base member 10. Is accepted by. In a state where the electrode 30 is received by the round groove 14a and the square groove 14b, the electrode upper surface 30a is exposed to the mounting portion 11.
  • the upper surface 30a of the electrode 30 becomes a contact point with the external contacts 52a and 53a of the thin film thermocouple element 50. According to such a configuration, even a metal such as chromel or alumel, which is difficult to process, the round bar wire can be used as the electrode 30 with the minimum processing.
  • the first compensating lead wire 31 and the second compensating lead wire 32 are connected to the two electrodes 30, respectively.
  • the electrode upper surface 30a of each electrode 30 and the external contacts 52a and 53a of the thin film thermocouple element 50 are electrically connected to each other.
  • the correction thermocouple 40 is composed of a pair of first metal wire 41 and second metal wire 42, and surrounds a protrusion 17 provided in the accommodating recess 16 of the base member 10. It is arranged like this.
  • the correction thermocouple 40 has a temperature measuring contact 43 (contact) in the vicinity of the external contacts 52a and 53a of the thin film thermocouple element 50.
  • the thin film thermocouple element 50 is derived from the actual temperature difference due to the difference between the thin metal wire and the thin film at the contact points between the first compensating lead wire 31 and the second compensating lead wire 32 (lead wire). It will show a value lower than the thermoelectromotive force. Therefore, the temperature-thermoelectromotive force characteristic of the thin film thermocouple element 50 does not match the temperature-thermoelectromotive force characteristic of the bulk thermocouple.
  • the correction thermocouple 40 for that purpose is arranged in the accommodating recess 16 of the connector 1. There is. A protrusion 17 is formed in the accommodating recess 16 as a pin protruding upward. Since the correction thermocouple 40 has a ring shape by welding the tips of the first metal wire 41 and the second metal wire 42, it is hooked so as to surround the protrusion 17.
  • the temperature measuring contact 43 of the correction thermocouple 40 between the mounting portion 11 and the protruding portion 17, the tips of the first metal wire 41 and the second metal wire 42 are formed.
  • the physical strength can be increased.
  • the first cover member 21 is rotatable around the connection pin 23 as a rotation axis (FIG. 14). With the connection end 51a of the thin film thermocouple element 50 mounted on the mounting portion 11 of the base member 10 (FIG. 15), the first cover member 21 is closed by overlapping from above to form a thin film. The thermocouple element 50 is sandwiched between the first cover member 21 and the base member 10 (FIG. 16).
  • the screw B1 is inserted in a state where the through hole 21b of the first cover member 21, the through hole 51b of the thin film thermocouple element 50, and the through hole 12 of the base member 10 are overlapped in the vertical direction (FIG. 16). Then, on the back surface 10b side of the base member 10, the hexagon nut N1 is received by the nut receiving portion 10c on the front side corresponding to the through hole 12 and screwed with the screw B1. In this way, the first cover member 21 of the cover member 20 is attached to the base member 10.
  • connection pin 23 becomes a fulcrum, and by tightening the screw B1 and the hexagon nut N1, the periphery of the through hole 21b becomes a force point. 1
  • the tip of the cover member 21 serves as a point of action, and the thin film thermocouple element 50 is pressed against the cover member 21. In this way, the thin film thermocouple element 50 is attached to the connector 1.
  • the notch 51c formed at the connection end portion 51a of the thin-film thermocouple element 50 has a positioning convex portion 13 formed at the mounting portion 11 of the base member 10.
  • the first cover member 21 is arranged on the connection end portion 51a so that the concave portion 21c thereof engages with the positioning convex portion 13. In this way, the thin-film thermocouple element 50 is stably sandwiched between the base member 10 and the first cover member 21 of the connector 1, so that the thin-film thermocouple element 50 is prevented from falling out of the connector 1.
  • connector 1 it is possible to cut a thread groove in each through hole by selecting engineering plastic as the material, but considering repeated use and sufficient tightening, screw B1, It is preferable that the cover member 20 is attached to the base member 10 by a fastening member such as a countersunk screw B2 and hexagon nuts N1 and N2.
  • a fastening member such as a countersunk screw B2 and hexagon nuts N1 and N2.
  • connection end portion 51a of the thin film thermocouple element 50 is sandwiched between the first cover member 21 of the cover member 20 and the mounting portion 11 of the base member 10, so that the outside of the thin film thermocouple element 50 is formed.
  • the contacts 52a and 53a are connected to the electrode 30, respectively.
  • the external contacts 52a and 53a of the thin film thermocouple element 50 come into contact with the electrodes 30, respectively. Further, in the accommodating recess 16 of the compensating sensor accommodating portion 15, the first compensating lead wire 31 and the second compensating lead wire 32 are connected to each other at the rear end portion of the electrode 30.
  • thermocouple 40 there is a temperature measuring contact 43 of the correction thermocouple 40 made of another thin metal wire in the vicinity of the rear end portion of the electrode 30.
  • the first compensating lead wire 31 is made of the same material as the first metal wire 41 of the compensating thermocouple 40
  • the second compensating lead wire 32 is made of the same material as the second metal wire 42 of the compensating thermocouple 40.
  • the materials of the conductive thin films 52 and 53 of the thin film thermocouple element 50 are the same materials as the corresponding electrodes 30, the first compensating lead wire 31 and the second compensating lead wire 32, respectively.
  • Accurate temperature can be measured by installing the temperature measuring contact 43 (contact) of the compensating thermocouple 40 near the connection point between the electrode 30 and the first compensating lead wire 31 and the second compensating lead wire 32.
  • the first compensating lead wire 31, the second compensating lead wire 32, the first metal wire 41, and the second metal wire 42 constitute a lead wire 1a (extension wire), and are provided at the end of the lead wire 1a. It is connected to a temperature indicator (an example of an external device) (not shown) at the device connection end 1b.
  • the connector 1 of this embodiment constitutes a temperature sensor 2 with a connector by connecting a thin film thermocouple element 50 (FIGS. 2 and 16). Further, the connector 1 of the present embodiment constitutes an extension wire 3 with a connector by being combined with a lead wire 1a (extension wire) having a first compensating lead wire 31 and a second compensating lead wire 32 connected to the electrode 30. Figure 2). According to the temperature sensor 2 with a connector and the extension wire 3 with a connector, the thin film thermocouple element can be exchanged.
  • the temperature sensor with a connector, and the extension wire with a connector the thin film thermocouple element can be replaced.
  • the field of application of temperature measurement using a thin-film thermocouple element is not particularly limited, but it is possible to suitably measure the temperature of a very small portion, for example, a fuel cell, a heating roller, a hot press, and an electron. It is possible to measure the heat generation temperature, chemical reaction temperature, instantaneous heating temperature, etc. of circuit parts.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)

Abstract

Provided are a replaceable connector compatible with a thin-film thermocouple element, a temperature sensor equipped with the connector, and an extension line equipped with the connector.　A connector 1 for connecting a thin-film thermocouple element 50 to an external device comprises a base member 10 and a cover member 20. The base member 10 has electrodes 30 to be connected to external contacts 52a, 53a of the thin-film thermocouple element 50, and a correction temperature sensor. The external contacts 52a, 53a are connected to the electrodes 30 upon holding of the thin-film thermocouple element 50 by a first cover 21 and the base member 10.

Description

コネクタ、コネクタ付き温度センサ及びコネクタ付き延長線Connector, temperature sensor with connector and extension line with connector
　本発明は、コネクタ、コネクタ付き温度センサ及びコネクタ付き延長線に関し、より詳細には、薄膜熱電対素子に対応したコネクタ、コネクタ付き温度センサ及びコネクタ付き延長線に関する。 The present invention relates to a connector, a temperature sensor with a connector, and an extension line with a connector, and more specifically, to a connector corresponding to a thin film thermocouple element, a temperature sensor with a connector, and an extension line with a connector.
　温度測定用に作られた二種類の金属の組み合わせからなる素子は熱電対と称され、ゼーベック効果を利用した温度測定素子として古くから利用されてきた技術である。薄型でフレキシブルな温度センサとして薄膜熱電対がある。薄膜熱電対素子は、耐熱フィルムと導電性薄膜で形成されており、小型で狭く入り組んだ場所の温度を測定することが可能である。 An element consisting of a combination of two types of metals made for temperature measurement is called a thermocouple, and is a technology that has been used for a long time as a temperature measurement element using the Zeebeck effect. There is a thin film thermocouple as a thin and flexible temperature sensor. The thin-film thermocouple element is made of a heat-resistant film and a conductive thin film, and can measure the temperature in a small and narrowly complicated place.
　特許文献１に記載の測温素子は、交換式ではなく、薄膜熱電対素子とコネクタを1対1で組み立て一体化している。具体的には、特許文献１のコネクタは、導電性薄膜素子を補償導線に圧着するため、基板の導電性薄膜を有しない側に圧着用弾性物を備えており、ネジ等によって端子を圧接し、接着剤で補強することが必要である。つまり、薄膜熱電対素子と補償導線を十分に圧接させるため補助材料が必要となる。 The temperature measuring element described in Patent Document 1 is not an exchangeable type, but a thin film thermocouple element and a connector are assembled and integrated in a one-to-one manner. Specifically, the connector of Patent Document 1 is provided with an elastic material for crimping on the side of the substrate that does not have the conductive thin film in order to crimp the conductive thin film element to the compensating lead wire, and the terminals are pressure-welded with screws or the like. , Need to be reinforced with adhesive. That is, an auxiliary material is required to sufficiently press-contact the thin-film thermocouple element and the compensating lead wire.
　薄膜熱電対素子の基端部にコネクタが固定されている場合、薄膜熱電対素子が破損した場合に交換ができなかった。そこで、薄膜熱電対素子のみを交換しながら使用できる交換型薄膜熱電対の開発が望まれていた。 When the connector was fixed to the base end of the thin film thermocouple element, it could not be replaced if the thin film thermocouple element was damaged. Therefore, it has been desired to develop an interchangeable thin film thermocouple that can be used while exchanging only the thin film thermocouple element.
　特許文献２には、帯状の熱電対を挿入して導通接続するコネクタが開示されている。このコネクタでは、薄膜熱電対素子を挿入する場合、摩擦で導電性薄膜がダメージを受け破損してしまう可能性がある。また、特許文献２のコネクタには、補正用の温度センサが組み込まれておらず、薄膜熱電対素子に適用することができない。 Patent Document 2 discloses a connector in which a band-shaped thermocouple is inserted and conductively connected. In this connector, when a thin film thermocouple element is inserted, the conductive thin film may be damaged and damaged by friction. Further, the connector of Patent Document 2 does not incorporate a temperature sensor for correction, and cannot be applied to a thin film thermocouple element.
　特許文献３には、板バネ状の端子を備えるスライド式コネクタが開示されている。このコネクタでは、スライド蓋をスライドさせると、板バネで素子が加圧固定される。特許文献３のコネクタには、補正用の温度センサが組み込まれておらず、薄膜熱電対素子に適用することができない。また、一般的に熱電対材料は、板バネ状の端子に加工することが難しい。 Patent Document 3 discloses a slide-type connector provided with a leaf spring-shaped terminal. In this connector, when the slide lid is slid, the element is pressure-fixed by the leaf spring. The connector of Patent Document 3 does not incorporate a temperature sensor for correction, and cannot be applied to a thin film thermocouple element. Further, it is generally difficult to process a thermocouple material into a leaf spring-shaped terminal.
特開２０１０－１９０７３５号公報Japanese Unexamined Patent Publication No. 2010-190735 特開２０１５－１０９１５６号公報JP-A-2015-109156 特開２０１２－０４８９５２号公報Japanese Unexamined Patent Publication No. 2012-048552
　薄膜熱電対素子とリード線との接点における金属細線と薄膜との相違等により、薄膜熱電対素子は、実際の温度差に由来する熱起電力よりも低い値を示すことになる。したがって、薄膜熱電対素子の温度－熱起電力特性は、バルクの熱電対の温度－熱起電力特性とは一致せず、正確な温度測定ができない。 Due to the difference between the thin metal wire and the thin film at the contact point between the thin film thermocouple element and the lead wire, the thin film thermocouple element shows a value lower than the thermoelectromotive force derived from the actual temperature difference. Therefore, the temperature-thermoelectromotive force characteristic of the thin-film thermocouple element does not match the temperature-thermoelectromotive force characteristic of the bulk thermocouple, and accurate temperature measurement cannot be performed.
　つまり、薄膜熱電対素子を交換可能なものとするには、薄膜熱電対素子に対応したコネクタが必要となる。本発明は、上記課題に鑑みてなされたものであり、本発明の目的は、薄膜熱電対素子に対応可能な交換型のコネクタ、該コネクタ付きの温度センサ、コネクタ付き延長線を提供することにある。 That is, in order to make the thin film thermocouple element replaceable, a connector corresponding to the thin film thermocouple element is required. The present invention has been made in view of the above problems, and an object of the present invention is to provide an interchangeable connector compatible with a thin film thermocouple element, a temperature sensor with the connector, and an extension line with a connector. be.
　前記課題は、本発明のコネクタによれば、薄膜熱電対素子を外部の機器と接続するためのコネクタであって、ベース部材と、カバー部材と、を備え、前記ベース部材は、前記薄膜熱電対素子の外部接点と接続される電極と、補正用温度センサと、を有し、前記薄膜熱電対素子が前記カバー部材と前記ベース部材に挟まれることで、前記外部接点が前記電極と接続されること、により解決される。 According to the connector of the present invention, the subject is a connector for connecting a thin film thermocouple element to an external device, which includes a base member and a cover member, and the base member is the thin film thermocouple. It has an electrode connected to the external contact of the element and a temperature sensor for correction, and the thin film thermocouple element is sandwiched between the cover member and the base member, so that the external contact is connected to the electrode. It will be solved by that.
　上記構成により、薄膜熱電対素子をコネクタに挿入する方式ではなく挟み込み方式とすることで、カバー部材を開かないと薄膜熱電対素子を設置できない構造となるため、薄膜熱電対素子への摩擦によるダメージを防ぐことが可能となる。
　また、補正用温度センサをコネクタに組み込むことで、薄膜熱電対素子の冷接点側の温度を把握することができるため、薄膜熱電対とバルク材料からなる電極の熱起電力の違いに由来する測定温度の誤差を補正して、正確に温度測定を行うことが可能となる。 With the above configuration, by adopting a sandwiching method instead of inserting the thin-film thermocouple element into the connector, the structure is such that the thin-film thermocouple element cannot be installed unless the cover member is opened. Can be prevented.
In addition, by incorporating a temperature sensor for correction into the connector, the temperature on the cold contact side of the thin-film thermocouple element can be grasped, so measurement is derived from the difference in thermoelectromotive force between the thin-film thermocouple and the electrode made of bulk material. It is possible to correct the temperature error and measure the temperature accurately.
　このとき、前記カバー部材は、前記ベース部材に対して回動可能に取り付けられていると好適である。
　このように、カバー部材がベース部材に対して回動可能であると、カバー部材を開く操作が容易になるとともに、カバー部材で薄膜熱電対素子を押し付けるようにして挟み込むことが可能となる。 At this time, it is preferable that the cover member is rotatably attached to the base member.
As described above, when the cover member is rotatable with respect to the base member, the operation of opening the cover member becomes easy, and the thin film thermocouple element can be pressed and sandwiched by the cover member.
　このとき、前記ベース部材は、前記外部接点が設けられた前記薄膜熱電対素子の接続端部が載置される載置部を有し、前記載置部は、前記接続端部と係合する係合部を有していると好適である。
　このように、ベース部が備える係合部が、薄膜熱電対素子の接続端部と係合することで、コネクタのカバー部材を閉めたときに、コネクタから薄膜熱電対素子が抜け落ちることが防止されるとともに、薄膜熱電対素子の外部接点と電極との電気的接触が確実なものとなる。 At this time, the base member has a mounting portion on which the connection end portion of the thin film thermocouple element provided with the external contact is mounted, and the previously described mounting portion engages with the connection end portion. It is preferable to have an engaging portion.
In this way, the engaging portion provided in the base portion engages with the connection end portion of the thin film thermocouple element, so that the thin film thermocouple element is prevented from coming off from the connector when the cover member of the connector is closed. At the same time, the electrical contact between the external contact of the thin film thermocouple element and the electrode is ensured.
　このとき、前記電極は、丸棒電極であり、前記ベース部材は、前記載置部に前記丸棒電極を受容する凹溝を備えていると好適である。
　このような構成によれば、電極として加工性の悪い材料、例えば、クロメルやアルメルを用いる場合であっても、その形状を薄い平板にすることなく、丸棒状態のまま電極（端子）へと加工することが可能となる。丸棒は入手しやすく、切断や曲げ加工も容易であるため、電極の加工性が平板と比べて改善し、電極（端子）を低コストで容易に作成することができる。 At this time, it is preferable that the electrode is a round bar electrode, and the base member is provided with a concave groove for receiving the round bar electrode in the above-mentioned mounting portion.
According to such a configuration, even when a material having poor workability, for example, chromel or alumel, is used as the electrode, the shape is not made into a thin flat plate, and the electrode (terminal) is formed in a round bar state. It becomes possible to process. Since the round bar is easily available and easy to cut and bend, the workability of the electrode is improved as compared with the flat plate, and the electrode (terminal) can be easily manufactured at low cost.
　このとき、前記補正用温度センサは、一対の金属線からなる補正用熱電対であり、前記ベース部材は、前記補正用熱電対を収容する収容凹部と、該収容凹部に設けられた突起部と、を有し、前記一対の金属線は、前記収容凹部において、前記突起部を囲むように配置されていると好適である。
　このような構成によれば、補正用熱電対を構成する一対の金属線の先端を溶接してリング形状とし、突起部を囲むようにして引っ掛けることで、物理的な強度を高めることができる。 At this time, the correction temperature sensor is a correction thermocouple composed of a pair of metal wires, and the base member includes a housing recess for accommodating the correction thermocouple and a protrusion provided in the storage recess. , And the pair of metal wires are preferably arranged in the accommodating recess so as to surround the protrusion.
According to such a configuration, the physical strength can be increased by welding the tips of a pair of metal wires constituting the compensating thermocouple into a ring shape and hooking them so as to surround the protrusions.
　このとき、前記凹溝は、前記載置部に近い側が、湾曲した形状であり、前記収容凹部に近い側が、角型形状であると好適である。
　このような構成によれば、丸棒電極を凹溝に挿入する際、補正用熱電対を収容する凹部に近い角溝から挿入することで、収容凹部を大きくすることなくコネクタ１のサイズをコンパクトなものとしつつ、電極の取付性が良好なものとなる。 At this time, it is preferable that the concave groove has a curved shape on the side close to the above-mentioned placement portion and a square shape on the side close to the accommodation recess.
According to such a configuration, when the round bar electrode is inserted into the concave groove, the size of the connector 1 is made compact without enlarging the accommodating concave portion by inserting the round bar electrode from the square groove close to the concave portion accommodating the correction thermocouple. However, the mountability of the electrodes is good.
　前記課題は、本発明のコネクタ付き温度センサによれば、上記のコネクタと、該コネクタに接続された前記薄膜熱電対素子と、を備えること、により解決される。
　前記課題は、本発明のコネクタ付き延長線によれば、上記のコネクタと、前記電極に接続された補償導線を有する延長線と、を備えること、により解決される。 The problem is solved by providing the connector and the thin film thermocouple element connected to the connector according to the temperature sensor with a connector of the present invention.
According to the extension line with a connector of the present invention, the problem is solved by providing the above-mentioned connector and an extension line having a compensating lead wire connected to the electrode.
　本発明のコネクタ、コネクタ付き温度センサ及びコネクタ付き延長線は、薄膜熱電対素子を挟み込むことで摩擦によるダメージを防ぐことが可能となる。また、本発明のコネクタ、コネクタ付き温度センサ及びコネクタ付き延長線は、補正用温度センサにより薄膜熱電対素子の冷接点側の温度を把握することができるため、正確に温度測定を行うことが可能となる。 The connector of the present invention, the temperature sensor with a connector, and the extension wire with a connector can prevent damage due to friction by sandwiching the thin film thermocouple element. Further, in the connector, the temperature sensor with a connector, and the extension line with a connector of the present invention, the temperature on the cold contact side of the thin film thermocouple element can be grasped by the correction temperature sensor, so that the temperature can be measured accurately. It becomes.
本発明の一実施形態に係るコネクタに接続される薄膜熱電対素子を示す概略模式図である。It is a schematic schematic diagram which shows the thin film thermocouple element connected to the connector which concerns on one Embodiment of this invention. 図１ＡのＡ－Ａ断面図である。FIG. 1A is a cross-sectional view taken along the line AA of FIG. 1A. 本発明の一実施形態に係るコネクタ（コネクタ付き延長線）及び薄膜熱電対素子を示す概略模式図である。It is a schematic schematic diagram which shows the connector (extension line with a connector) and the thin film thermocouple element which concerns on one Embodiment of this invention. ベース部材の外観図である。It is an external view of a base member. ベース部材の外観図である。It is an external view of a base member. コネクタのカバー部材を閉じた状態の外観図である。It is an external view in the state which the cover member of a connector is closed. コネクタのカバー部材を開いた状態の外観図である。It is an external view in the state which the cover member of a connector is opened. コネクタの分解斜視図である。It is an exploded perspective view of a connector. コネクタの裏面を示す斜視図である。It is a perspective view which shows the back surface of a connector. ベース部材と薄膜熱電対素子の係合部を示す模式図である。It is a schematic diagram which shows the engaging part of a base member and a thin film thermocouple element. ベース部材に電極を取り付けた状態を示す正面図である。It is a front view which shows the state which the electrode is attached to the base member. ベース部材における補正用熱電対の配置を示す模式的斜視図である。It is a schematic perspective view which shows the arrangement of the correction thermocouple in a base member. コネクタの配線を示す模式的斜視図である。It is a schematic perspective view which shows the wiring of a connector. コネクタに薄膜熱電対素子を取り付ける手順を説明する斜視図である。It is a perspective view explaining the procedure of attaching a thin film thermocouple element to a connector. コネクタに薄膜熱電対素子を取り付ける手順を説明する斜視図である。It is a perspective view explaining the procedure of attaching a thin film thermocouple element to a connector. コネクタに薄膜熱電対素子を取り付ける手順を説明する斜視図である。It is a perspective view explaining the procedure of attaching a thin film thermocouple element to a connector. コネクタに薄膜熱電対素子を取り付ける手順を説明する斜視図である。It is a perspective view explaining the procedure of attaching a thin film thermocouple element to a connector. 図１５のＢ－Ｂ断面図である。FIG. 15 is a cross-sectional view taken along the line BB of FIG. 図１６のＣ－Ｃ断面図である。16 is a cross-sectional view taken along the line CC of FIG.
　以下、本発明の一実施形態に係るコネクタ、コネクタ付き温度センサ及びコネクタ付き延長線について図１乃至図１８を参照して説明する。 Hereinafter, a connector, a temperature sensor with a connector, and an extension line with a connector according to an embodiment of the present invention will be described with reference to FIGS. 1 to 18.
＜薄膜熱電対素子５０＞
　図１Ａ及び図１Ｂは本実施形態に係るコネクタ１に接続される薄膜熱電対素子５０の概略模式図である。薄膜熱電対素子５０は、長尺矩形状のフィルムなどの基板５１上に異なる金属からなる一対の薄膜により形成され、長手方向に沿って平行に延びる一対の導電性薄膜５２及び５３を備えている。一対の導電性薄膜５２及び５３は、一方の端部側（先端部側、前端部側）で交差して、交差した箇所は接続して被対象物の測温用である測温用接点５４となっている。一対の導電性薄膜５２及び５３の他端側（基端部側、後端部側）には、外部接点５２ａ及び５３ａを備えている。 <Thin film thermocouple element 50>
1A and 1B are schematic schematic views of a thin film thermocouple element 50 connected to the connector 1 according to the present embodiment. The thin film thermocouple element 50 is formed of a pair of thin films made of different metals on a substrate 51 such as a long rectangular film, and includes a pair of conductive thin films 52 and 53 extending in parallel along the longitudinal direction. .. The pair of conductive thin films 52 and 53 intersect at one end side (tip side, front end side), and the intersecting points are connected to each other for temperature measurement contact 54 for measuring the temperature of the object. It has become. External contacts 52a and 53a are provided on the other end sides (base end side and rear end side) of the pair of conductive thin films 52 and 53.
　薄膜熱電対素子５０は、外部接点５２ａ及び５３ａにおいて、ベース部材１０の載置部１１に設けられた一対の電極３０とそれぞれ接続される。導電性薄膜５２及び５３はそれぞれ異種材料であり、測温用接点５４において、導電性薄膜５２及び５３が重なるように接合されている。 The thin film thermocouple element 50 is connected to a pair of electrodes 30 provided on the mounting portion 11 of the base member 10 at the external contacts 52a and 53a, respectively. The conductive thin films 52 and 53 are different materials, respectively, and are joined so that the conductive thin films 52 and 53 overlap each other at the temperature measuring contact 54.
　薄膜熱電対素子５０を形成する基板５１として、ガラス、樹脂フィルム、金属などを用いることができる。但し、基板５１を金属などの導電性のある材料とする場合には、予め金属表面にＳｉＯ２、Ａｌ２Ｏ３等の絶縁膜を形成した上で薄膜熱電対素子を形成する必要がある。したがって、好ましくは樹脂フィルムを用いるのが良い。ガラス、樹脂フィルムは金属などの導電性のある基板のように、前処理を必要とすることがないため、操作が煩雑になることが無く、好適である。また、樹脂フィルムはその可撓性により、薄膜熱電対素子の強度を高めることができる。さらに好ましくは、ポリイミドフィルムを用いるのが良い。ポリイミドフィルムは、折り曲げることが可能で基板を数ミクロンの厚さにしても壊れにくく取り扱いが容易である点と、２００℃を超える温度でも比較的安定している点において、薄膜熱電対素子の基板として適した材料である。 As the substrate 51 forming the thin film thermocouple element 50, glass, a resin film, a metal, or the like can be used. However, when the substrate 51 is made of a conductive material such as metal, it is necessary to form an insulating film such as SiO 2 or Al 2 O 3 on the metal surface in advance and then form a thin film thermocouple element. Therefore, it is preferable to use a resin film. Unlike conductive substrates such as metal, glass and resin films do not require pretreatment, so operations are not complicated and are suitable. Further, the flexibility of the resin film can increase the strength of the thin film thermocouple element. More preferably, a polyimide film is used. The polyimide film is a thin-film thermocouple element substrate in that it can be bent, is not easily broken even if the substrate is several microns thick, and is relatively stable even at temperatures exceeding 200 ° C. It is a suitable material.
　基板５１の厚さは、１μｍ以上１５０μｍ以下とすることが好ましく、より好ましくは１μｍ以上５０μｍ以下、特に好ましくは１μｍ以上１８μｍ以下であるとよい。 The thickness of the substrate 51 is preferably 1 μm or more and 150 μm or less, more preferably 1 μm or more and 50 μm or less, and particularly preferably 1 μm or more and 18 μm or less.
　薄膜熱電対素子５０の導電性薄膜を構成する異種金属の組み合わせとしては、クロメル－アルメル、ＰｔＲｈ－Ｐｔ、クロメル－コンスタンタン、ナイクロシル－ナイシル、Ｃｕ－コンスタンタン、Ｆｅ－コンスタンタン、Ｉｒ－ＩｒＲｈ、Ｗ－Ｒｅ、Ａｕ－Ｐｔ、Ｐｔ－Ｐｄ、Ｂｉ－Ｓｂなどを用いることができる。好ましくは、使用温度範囲が広く、温度と熱起電力の関係が直線的である、クロメル－アルメルの組み合わせを用いるのが良い。 The combinations of dissimilar metals constituting the conductive thin film of the thin film thermocouple element 50 include chromel-almel, PtRh-Pt, chromel-constantan, nycrosyl-nycil, Cu-constantan, Fe-constantan, Ir-IrRh, and W-Re. , Au-Pt, Pt-Pd, Bi-Sb and the like can be used. It is preferable to use a combination of chromel and alumel, which has a wide operating temperature range and a linear relationship between temperature and thermoelectromotive force.
　導電性薄膜を形成するための方法としては、スパッタリング法、電子ビーム蒸着法、加熱蒸着法等の真空成膜法や、塗布法等を用いることができる。好ましくは、より薄く均一に薄膜を形成できる真空成膜法を用いるのが良い。さらに好ましくは、蒸着物質との原子組成のずれが少なく、均一に成膜ができるスパッタリング法を用いるのが良い。 As a method for forming the conductive thin film, a vacuum film forming method such as a sputtering method, an electron beam vapor deposition method, a heat vapor deposition method, or a coating method can be used. It is preferable to use a vacuum film forming method capable of forming a thinner and more uniform thin film. More preferably, it is preferable to use a sputtering method in which the atomic composition does not deviate from the vapor-filmed material and the film can be formed uniformly.
　薄膜熱電対素子５０は保護膜５０ａにより覆われていることが望ましい。保護膜５０ａは薄膜熱電対素子の耐環境性を高めると共に、薄膜熱電対素子が外力により変形した際に懸念されるクラックの発生を防ぐ効果もあるためである。適用可能な保護膜５０ａは、ＳｉＯ２、Ａｌ２Ｏ３などを蒸着法、スパッタリング法、ディッピング法等により形成した絶縁膜、スクリーン印刷法によるポリイミドフィルムなどである。好ましくは、耐熱性および耐薬品性が高く、接着性の高いポリイミドフィルムを用いるのがよい。 It is desirable that the thin film thermocouple element 50 is covered with a protective film 50a. This is because the protective film 50a has the effect of enhancing the environmental resistance of the thin-film thermocouple element and preventing the generation of cracks, which is a concern when the thin-film thermocouple element is deformed by an external force. The applicable protective film 50a is an insulating film obtained by forming SiO 2 , Al 2 O 3 , or the like by a vapor deposition method, a sputtering method, a dipping method, or the like, a polyimide film by a screen printing method, or the like. It is preferable to use a polyimide film having high heat resistance, chemical resistance, and high adhesiveness.
　導電性薄膜５２及び５３の厚さは、１０ｎｍ以上１μｍ以下とすることが好ましく、より好ましくは１００ｎｍ以上７００ｎｍ以下、より好ましくは１５０ｎｍ以上５５０ｎｍ以下であるとよい。 The thickness of the conductive thin films 52 and 53 is preferably 10 nm or more and 1 μm or less, more preferably 100 nm or more and 700 nm or less, and more preferably 150 nm or more and 550 nm or less.
　薄膜熱電対素子５０の基板５１の接続端部５１ａは、中心付近において厚み方向に貫通をした貫通孔５１ｂと、左右方向（幅方向）の両側部に中心に向かって形成された切り欠き部５１ｃが形成されている。また、基板５１の接続端部５１ａにおいて、外部接点５２ａ及び５３ａとは反対側には、補強部材５５が設けられていてもよい。 The connection end portion 51a of the substrate 51 of the thin film thermocouple element 50 has a through hole 51b penetrating in the thickness direction near the center and notches 51c formed toward the center on both side portions in the left-right direction (width direction). Is formed. Further, a reinforcing member 55 may be provided on the side of the connection end portion 51a of the substrate 51 opposite to the external contacts 52a and 53a.
＜コネクタ１＞
　本実施形態のコネクタ１は、薄膜熱電対素子５０を外部の機器（例えば、温度表示器）と接続するためのコネクタである。コネクタ１は、延長線としてのリード線１ａ及び機器接続端部１ｂを有するコネクタ付き延長線３である（図２）。コネクタ１は、薄膜熱電対素子５０が接続されることで、コネクタ付き温度センサ２を構成する。 <Connector 1>
The connector 1 of the present embodiment is a connector for connecting the thin film thermocouple element 50 to an external device (for example, a temperature indicator). The connector 1 is an extension wire 3 with a connector having a lead wire 1a as an extension wire and a device connection end portion 1b (FIG. 2). The connector 1 constitutes the temperature sensor 2 with a connector by connecting the thin film thermocouple element 50.
　コネクタ１は、ベース部材１０と、ベース部材１０に取り付けられたカバー部材２０と、を備えている。カバー部材２０は、後述するように、第１カバー部材２１と第２カバー部材２２とが接続ピン２３によって回動可能に接続されて構成されている。コネクタ１を形成するベース部材１０、カバー部材２０等の材料としては、絶縁体であれば特に限定されるものではないが、例えば、熱可塑性プラスチックなどを用いることが可能である。 The connector 1 includes a base member 10 and a cover member 20 attached to the base member 10. As will be described later, the cover member 20 is configured such that the first cover member 21 and the second cover member 22 are rotatably connected by a connection pin 23. The material of the base member 10 and the cover member 20 forming the connector 1 is not particularly limited as long as it is an insulator, but for example, thermoplastics and the like can be used.
（ベース部材１０）
　図３及び図４に示されるように、ベース部材１０は、表面１０ａ（上面）、裏面１０ｂ（下面）、裏面１０ｂに形成されたナット受容部１０ｃ、前面１０ｄ、後面１０ｅ、側面１０ｆを備えている。ベース部材１０は、薄膜熱電対素子５０の外部接点５２ａ及び５３ａと接続される一対の電極３０と、補正用温度センサとしての補正用熱電対４０と、を有している。 (Base member 10)
As shown in FIGS. 3 and 4, the base member 10 includes a front surface 10a (upper surface), a back surface 10b (lower surface), a nut receiving portion 10c formed on the back surface 10b, a front surface 10d, a rear surface 10e, and a side surface 10f. There is. The base member 10 has a pair of electrodes 30 connected to the external contacts 52a and 53a of the thin film thermocouple element 50, and a correction thermocouple 40 as a correction temperature sensor.
　ベース部材１０は、前方に薄膜熱電対素子５０の接続端部５１ａが載置される載置部１１を有している。載置部１１は、その中央部に貫通孔１２が形成されている。また、載置部１１は、薄膜熱電対素子５０を接続端部５１ａに形成された切り欠き部５１ｃと係合する位置決め凸部１３（係合部）を有している。 The base member 10 has a mounting portion 11 on which the connection end portion 51a of the thin film thermocouple element 50 is mounted in front. The mounting portion 11 has a through hole 12 formed in the central portion thereof. Further, the mounting portion 11 has a positioning convex portion 13 (engagement portion) for engaging the thin film thermocouple element 50 with the notch portion 51c formed in the connection end portion 51a.
　ベース部材１０の載置部１１が備える位置決め凸部１３は、薄膜熱電対素子５０の接続端部５１ａに形成された切り欠き部５１ｃと対応しており、コネクタ１における薄膜熱電対素子５０の接続端部５１ａの位置を決めることが可能となっている（後述する図９）。 The positioning convex portion 13 included in the mounting portion 11 of the base member 10 corresponds to the notch portion 51c formed in the connection end portion 51a of the thin film thermocouple element 50, and the connection of the thin film thermocouple element 50 in the connector 1 It is possible to determine the position of the end portion 51a (FIG. 9 described later).
　また、ベース部材１０が位置決め凸部１３を備えることで、蓋としての第１カバー部材２１を開かない場合には、載置部１１に薄膜熱電対素子５０を装着することができないようになっている。具体的には、第１カバー部材２１を開かない場合において、薄膜熱電対素子５０を前方から載置部１１に挿入することが位置決め凸部１３によって阻止される。 Further, since the base member 10 includes the positioning convex portion 13, the thin film thermocouple element 50 cannot be mounted on the mounting portion 11 unless the first cover member 21 as a lid is opened. There is. Specifically, when the first cover member 21 is not opened, the positioning convex portion 13 prevents the thin film thermocouple element 50 from being inserted into the mounting portion 11 from the front.
　載置部１１は、貫通孔１２の両方の側部に、電極３０を受容する凹溝として、断面Ω形状に湾曲した形状の丸溝１４ａ及び角型形状の角溝１４ｂが形成されている。丸溝１４ａは、載置部１１に近い前側に位置し、角溝１４ｂは、補正センサ収容部１５の収容凹部１６に近い後側に位置している。角溝１４ｂは、その幅が丸溝１４ａよりも広くなっている。 The mounting portion 11 is formed with a round groove 14a having a curved cross section Ω and a square groove 14b having a square shape as concave grooves for receiving the electrodes 30 on both side portions of the through hole 12. The round groove 14a is located on the front side close to the mounting portion 11, and the square groove 14b is located on the rear side close to the housing recess 16 of the correction sensor housing portion 15. The width of the square groove 14b is wider than that of the round groove 14a.
　熱電対素線としての電極３０を丸溝１４ａに挿入する際、後方側（収容凹部１６が設けられている側）から挿入する。このとき、後述する補正センサ収容部１５の収容凹部１６が狭すぎる場合や、角溝１４ｂがなく全域が丸溝１４ａである場合には、電極３０を、載置部１１に挿入して配置することができない。本実施形態のコネクタ１では、電極３０を受容する溝を、丸溝１４ａと角溝１４ｂの組み合わせとすることで、コネクタ１のサイズをコンパクトなものとしつつ、電極３０の取付性を両立している。 When inserting the electrode 30 as a thermocouple strand into the round groove 14a, insert it from the rear side (the side where the accommodating recess 16 is provided). At this time, if the accommodating recess 16 of the correction sensor accommodating portion 15 described later is too narrow, or if there is no square groove 14b and the entire area is a round groove 14a, the electrode 30 is inserted into the mounting portion 11 and arranged. I can't. In the connector 1 of the present embodiment, the groove for receiving the electrode 30 is a combination of the round groove 14a and the square groove 14b, so that the size of the connector 1 can be made compact and the electrode 30 can be easily attached. There is.
　ベース部材１０は、後述する補正用温度センサとしての補正用熱電対４０を収容する補正センサ収容部１５を有している。補正センサ収容部１５の収容凹部１６には、上方のカバー部材２０に向かって突出する突起部１７が形成されている。補正センサ収容部１５の後端側には、貫通孔１８が形成されている。 The base member 10 has a correction sensor accommodating portion 15 accommodating a correction thermocouple 40 as a correction temperature sensor described later. The accommodating recess 16 of the correction sensor accommodating portion 15 is formed with a protrusion 17 projecting toward the upper cover member 20. A through hole 18 is formed on the rear end side of the correction sensor accommodating portion 15.
（カバー部材２０）
　図５乃至図８に示されるように、カバー部材２０は、ネジＢ１、皿ネジＢ２及び六角ナットＮ１、Ｎ２などの締結部材によって、ベース部材１０に対して取り付けられている。カバー部材２０は、前方側の第１カバー部材２１と、後方側の第２カバー部材２２が接続ピン２３によって回動可能に接続されて構成されている。 (Cover member 20)
As shown in FIGS. 5 to 8, the cover member 20 is attached to the base member 10 by a fastening member such as a screw B1, a countersunk screw B2, and hexagon nuts N1 and N2. The cover member 20 is configured by connecting a first cover member 21 on the front side and a second cover member 22 on the rear side so as to be rotatably connected by a connection pin 23.
　第１カバー部材２１には、上下方向にザグリ部２１ａ及び貫通孔２１ｂが形成されている。また、第１カバー部材２１には、左右方向（幅方向）の両側部に中心に向かって形成された凹部２１ｃが形成されている。 The first cover member 21 is formed with a counterbore portion 21a and a through hole 21b in the vertical direction. Further, the first cover member 21 is formed with recesses 21c formed toward the center on both side portions in the left-right direction (width direction).
　第２カバー部材２２は、左右方向（幅方向）の両側部において、第１カバー部材２１の後端部を挟み込むように突出した蝶番部２２ａを有している。蝶番部２２ａにおいて、接続ピン２３が第１カバー部材２１及び第２カバー部材２２に形成された不図示の貫通孔に挿通されている。また、第２カバー部材２２には、上下方向に連通した面取り部２２ｂ及び開口２２ｃが形成されている。 The second cover member 22 has hinge portions 22a protruding so as to sandwich the rear end portion of the first cover member 21 on both side portions in the left-right direction (width direction). In the hinge portion 22a, the connection pin 23 is inserted through a through hole (not shown) formed in the first cover member 21 and the second cover member 22. Further, the second cover member 22 is formed with a chamfered portion 22b and an opening 22c that communicate with each other in the vertical direction.
　本実施形態のコネクタ１では、蓋としての第１カバー部材２１を開閉する度に、ネジＢ１が外れてしまわないように、脱落防止ネジを用いることが好ましい。また、ザグリ部２１ａや面取り部２２ｂがあることでネジＢ１や皿ネジＢ２の頭部を隠すことができる。 In the connector 1 of the present embodiment, it is preferable to use a fall-prevention screw so that the screw B1 does not come off every time the first cover member 21 as a lid is opened and closed. Further, the heads of the screw B1 and the countersunk screw B2 can be hidden by the presence of the counterbore portion 21a and the chamfer portion 22b.
（電極３０）
　図７及び図１０に示されるように、電極３０は、丸棒電極（断面が円形の丸棒素線）であり、ベース部材１０の載置部１１に形成された丸溝１４ａ及び角溝１４ｂに受容される。電極３０が丸溝１４ａ及び角溝１４ｂに受容された状態において、電極上面３０ａが、載置部１１に露出する。 (Electrode 30)
As shown in FIGS. 7 and 10, the electrode 30 is a round bar electrode (a round bar wire having a circular cross section), and the round groove 14a and the square groove 14b formed in the mounting portion 11 of the base member 10. Is accepted by. In a state where the electrode 30 is received by the round groove 14a and the square groove 14b, the electrode upper surface 30a is exposed to the mounting portion 11.
　電極３０の電極上面３０ａが、載置部１１にわずかに露出するようにすることで、電極上面３０ａが、薄膜熱電対素子５０の外部接点５２ａ及び５３ａとの接触箇所となる。このような構成によれば、加工することが難しいクロメルやアルメルなどの金属であっても、丸棒素線を最小の加工で電極３０として使用することができる。 By slightly exposing the upper surface 30a of the electrode 30 to the mounting portion 11, the upper surface 30a of the electrode becomes a contact point with the external contacts 52a and 53a of the thin film thermocouple element 50. According to such a configuration, even a metal such as chromel or alumel, which is difficult to process, the round bar wire can be used as the electrode 30 with the minimum processing.
　２本の電極３０には、第１補償導線３１及び第２補償導線３２がそれぞれ接続されている。コネクタ１に薄膜熱電対素子５０が取り付けられることで、それぞれの電極３０の電極上面３０ａと、薄膜熱電対素子５０の外部接点５２ａ及び５３ａが互いに電気的に接続される。 The first compensating lead wire 31 and the second compensating lead wire 32 are connected to the two electrodes 30, respectively. By attaching the thin film thermocouple element 50 to the connector 1, the electrode upper surface 30a of each electrode 30 and the external contacts 52a and 53a of the thin film thermocouple element 50 are electrically connected to each other.
（補正用熱電対４０）
　図１１及び図１２に示されるように、補正用熱電対４０は、一対の第１金属線４１及び第２金属線４２からなり、ベース部材１０の収容凹部１６に設けられた突起部１７を囲むように配置されている。補正用熱電対４０は、薄膜熱電対素子５０の外部接点５２ａ及び５３ａと離間した近傍に測温接点４３（接点）を有している。 (Correction thermocouple 40)
As shown in FIGS. 11 and 12, the correction thermocouple 40 is composed of a pair of first metal wire 41 and second metal wire 42, and surrounds a protrusion 17 provided in the accommodating recess 16 of the base member 10. It is arranged like this. The correction thermocouple 40 has a temperature measuring contact 43 (contact) in the vicinity of the external contacts 52a and 53a of the thin film thermocouple element 50.
　薄膜熱電対素子５０は、第１補償導線３１及び第２補償導線３２（リード線）との接点における金属細線と薄膜との相違等により、薄膜熱電対素子５０は、実際の温度差に由来する熱起電力よりも低い値を示すことになる。したがって、薄膜熱電対素子５０の温度－熱起電力特性は、バルクの熱電対の温度－熱起電力特性とは一致しない。 The thin film thermocouple element 50 is derived from the actual temperature difference due to the difference between the thin metal wire and the thin film at the contact points between the first compensating lead wire 31 and the second compensating lead wire 32 (lead wire). It will show a value lower than the thermoelectromotive force. Therefore, the temperature-thermoelectromotive force characteristic of the thin film thermocouple element 50 does not match the temperature-thermoelectromotive force characteristic of the bulk thermocouple.
　そこで、薄膜熱電対素子５０を用いた正確な温度測定のために、コネクタ１における温度を測定する必要があるため、そのための補正用熱電対４０をコネクタ１の収容凹部１６の中に配置している。この収容凹部１６には、上方に向かって突出するピンとして突起部１７が形成されている。補正用熱電対４０は、第１金属線４１及び第２金属線４２の先端を溶接し、リング形状になっているため、突起部１７を囲むようにして引っ掛けられている。 Therefore, since it is necessary to measure the temperature in the connector 1 for accurate temperature measurement using the thin film thermocouple element 50, the correction thermocouple 40 for that purpose is arranged in the accommodating recess 16 of the connector 1. There is. A protrusion 17 is formed in the accommodating recess 16 as a pin protruding upward. Since the correction thermocouple 40 has a ring shape by welding the tips of the first metal wire 41 and the second metal wire 42, it is hooked so as to surround the protrusion 17.
　このような構成によれば、補正用熱電対４０の測温接点４３を載置部１１と突起部１７との間に配置することで、第１金属線４１及び第２金属線４２の先端における物理的な強度を高めることができる。 According to such a configuration, by arranging the temperature measuring contact 43 of the correction thermocouple 40 between the mounting portion 11 and the protruding portion 17, the tips of the first metal wire 41 and the second metal wire 42 are formed. The physical strength can be increased.
（ベース部材１０とカバー部材２０の接続について）
　ベース部材１０に対するカバー部材２０の取り付け（組み付け）について説明する。まず、ベース部材１０の表面１０ａ側では、後方の一対の貫通孔１８と、第２カバー部材２２の開口２２ｃが上下方向に重ねられた状態において、皿ネジＢ２がそれぞれ挿通される（図１３）。そして、ベース部材１０の裏面１０ｂ側では、貫通孔１８に対応する後方側の一対のナット受容部１０ｃに六角ナットＮ２がそれぞれ受容され、皿ネジＢ２と螺合する（図８）。このようにして、ベース部材１０にカバー部材２０の第２カバー部材２２が取り付けられる。 (Regarding the connection between the base member 10 and the cover member 20)
The attachment (assembly) of the cover member 20 to the base member 10 will be described. First, on the surface 10a side of the base member 10, the countersunk screw B2 is inserted in a state where the pair of rear through holes 18 and the opening 22c of the second cover member 22 are overlapped in the vertical direction (FIG. 13). .. Then, on the back surface 10b side of the base member 10, the hexagon nut N2 is received by the pair of nut receiving portions 10c on the rear side corresponding to the through hole 18, and is screwed with the countersunk screw B2 (FIG. 8). In this way, the second cover member 22 of the cover member 20 is attached to the base member 10.
　第１カバー部材２１は、接続ピン２３を回転軸として回動可能である（図１４）。ベース部材１０の載置部１１に、薄膜熱電対素子５０の接続端部５１ａが載置された状態（図１５）で、第１カバー部材２１を上方から重ねるようにして閉鎖することで、薄膜熱電対素子５０が第１カバー部材２１とベース部材１０に挟まれる（図１６）。 The first cover member 21 is rotatable around the connection pin 23 as a rotation axis (FIG. 14). With the connection end 51a of the thin film thermocouple element 50 mounted on the mounting portion 11 of the base member 10 (FIG. 15), the first cover member 21 is closed by overlapping from above to form a thin film. The thermocouple element 50 is sandwiched between the first cover member 21 and the base member 10 (FIG. 16).
　このようにして、第１カバー部材２１の貫通孔２１ｂ、薄膜熱電対素子５０の貫通孔５１ｂ、ベース部材１０の貫通孔１２が上下方向に重ねられた状態において、ネジＢ１が挿通される（図１６）。そして、ベース部材１０の裏面１０ｂ側では、貫通孔１２に対応する前方側のナット受容部１０ｃに六角ナットＮ１が受容され、ネジＢ１と螺合する。このようにして、ベース部材１０にカバー部材２０の第１カバー部材２１が取り付けられる。 In this way, the screw B1 is inserted in a state where the through hole 21b of the first cover member 21, the through hole 51b of the thin film thermocouple element 50, and the through hole 12 of the base member 10 are overlapped in the vertical direction (FIG. 16). Then, on the back surface 10b side of the base member 10, the hexagon nut N1 is received by the nut receiving portion 10c on the front side corresponding to the through hole 12 and screwed with the screw B1. In this way, the first cover member 21 of the cover member 20 is attached to the base member 10.
　このとき、図１７及び図１８に示されるように、第１カバー部材２１において、接続ピン２３の箇所が支点となり、ネジＢ１及び六角ナットＮ１を締め付けることで、貫通孔２１ｂ周囲が力点となり、第１カバー部材２１の先端部が作用点となり、薄膜熱電対素子５０を押し付ける。このようにして、薄膜熱電対素子５０がコネクタ１に取り付けられる。 At this time, as shown in FIGS. 17 and 18, in the first cover member 21, the connection pin 23 becomes a fulcrum, and by tightening the screw B1 and the hexagon nut N1, the periphery of the through hole 21b becomes a force point. 1 The tip of the cover member 21 serves as a point of action, and the thin film thermocouple element 50 is pressed against the cover member 21. In this way, the thin film thermocouple element 50 is attached to the connector 1.
　薄膜熱電対素子５０がコネクタ１に取り付けた状態では、薄膜熱電対素子５０の接続端部５１ａに形成された切り欠き部５１ｃが、ベース部材１０の載置部１１に形成された位置決め凸部１３と係合する。更に、第１カバー部材２１が、その凹部２１ｃが位置決め凸部１３と係合するようにして接続端部５１ａの上に配置される。このようにして、薄膜熱電対素子５０が、コネクタ１のベース部材１０及び第１カバー部材２１に安定して挟み込まれるため、薄膜熱電対素子５０がコネクタ１から抜け落ちてしまうことが抑制される。 When the thin-film thermocouple element 50 is attached to the connector 1, the notch 51c formed at the connection end portion 51a of the thin-film thermocouple element 50 has a positioning convex portion 13 formed at the mounting portion 11 of the base member 10. Engage with. Further, the first cover member 21 is arranged on the connection end portion 51a so that the concave portion 21c thereof engages with the positioning convex portion 13. In this way, the thin-film thermocouple element 50 is stably sandwiched between the base member 10 and the first cover member 21 of the connector 1, so that the thin-film thermocouple element 50 is prevented from falling out of the connector 1.
　コネクタ１では、その材料にエンジニアプラスチックを選定することで、各貫通孔にネジ溝を切ることは可能ではあるが、繰り返して使用することや、十分に締め付けを行うことを考慮すると、ネジＢ１、皿ネジＢ２及び六角ナットＮ１、Ｎ２などの締結部材によって、ベース部材１０に対してカバー部材２０を取り付けるようにすると好適である。 In connector 1, it is possible to cut a thread groove in each through hole by selecting engineering plastic as the material, but considering repeated use and sufficient tightening, screw B1, It is preferable that the cover member 20 is attached to the base member 10 by a fastening member such as a countersunk screw B2 and hexagon nuts N1 and N2.
　以上のように、薄膜熱電対素子５０の接続端部５１ａがカバー部材２０の第１カバー部材２１とベース部材１０の載置部１１との間に挟まれることで、薄膜熱電対素子５０の外部接点５２ａ，５３ａが電極３０とそれぞれ接続される。 As described above, the connection end portion 51a of the thin film thermocouple element 50 is sandwiched between the first cover member 21 of the cover member 20 and the mounting portion 11 of the base member 10, so that the outside of the thin film thermocouple element 50 is formed. The contacts 52a and 53a are connected to the electrode 30, respectively.
　コネクタ１に薄膜熱電対素子５０が取り付けられた状態では、薄膜熱電対素子５０の外部接点５２ａ及び５３ａが、電極３０とそれぞれ当接する。また、補正センサ収容部１５の収容凹部１６においては、電極３０の後端部において、第１補償導線３１及び第２補償導線３２がそれぞれ接続されている。 In a state where the thin film thermocouple element 50 is attached to the connector 1, the external contacts 52a and 53a of the thin film thermocouple element 50 come into contact with the electrodes 30, respectively. Further, in the accommodating recess 16 of the compensating sensor accommodating portion 15, the first compensating lead wire 31 and the second compensating lead wire 32 are connected to each other at the rear end portion of the electrode 30.
　さらに、電極３０の後端部の近傍に他の金属細線からなる補正用熱電対４０の測温接点４３がある。第１補償導線３１は補正用熱電対４０の第１金属線４１と同一材料であり、第２補償導線３２は補正用熱電対４０の第２金属線４２と同一材料である。また、薄膜熱電対素子５０の導電性薄膜５２及び５３の材料は、対応するそれぞれの電極３０、第１補償導線３１及び第２補償導線３２とそれぞれ同一材料である。 Further, there is a temperature measuring contact 43 of the correction thermocouple 40 made of another thin metal wire in the vicinity of the rear end portion of the electrode 30. The first compensating lead wire 31 is made of the same material as the first metal wire 41 of the compensating thermocouple 40, and the second compensating lead wire 32 is made of the same material as the second metal wire 42 of the compensating thermocouple 40. Further, the materials of the conductive thin films 52 and 53 of the thin film thermocouple element 50 are the same materials as the corresponding electrodes 30, the first compensating lead wire 31 and the second compensating lead wire 32, respectively.
　補正用熱電対４０の測温接点４３（接点）を、電極３０と第１補償導線３１及び第２補償導線３２の接続箇所の近傍に設置することにより、正確な温度を測定することができる。このとき、第１補償導線３１及び第２補償導線３２、第１金属線４１及び第２金属線４２は、リード線１ａ（延長線）を構成し、このリード線１ａの端部に設けられた機器接続端部１ｂにおいて不図示の温度表示器（外部の機器の一例）に接続されている。 Accurate temperature can be measured by installing the temperature measuring contact 43 (contact) of the compensating thermocouple 40 near the connection point between the electrode 30 and the first compensating lead wire 31 and the second compensating lead wire 32. At this time, the first compensating lead wire 31, the second compensating lead wire 32, the first metal wire 41, and the second metal wire 42 constitute a lead wire 1a (extension wire), and are provided at the end of the lead wire 1a. It is connected to a temperature indicator (an example of an external device) (not shown) at the device connection end 1b.
＜コネクタ付き温度センサ２及びコネクタ付き延長線３＞
　本実施形態のコネクタ１は、薄膜熱電対素子５０を接続することでコネクタ付き温度センサ２を構成する（図２及び図１６）。また、本実施形態のコネクタ１は、電極３０に接続された第１補償導線３１及び第２補償導線３２を有するリード線１ａ（延長線）と組み合わされることでコネクタ付き延長線３を構成する（図２）。これらのコネクタ付き温度センサ２及びコネクタ付き延長線３によれば、薄膜熱電対素子を交換可能なものとすることができる。 <Temperature sensor 2 with connector and extension wire 3 with connector>
The connector 1 of this embodiment constitutes a temperature sensor 2 with a connector by connecting a thin film thermocouple element 50 (FIGS. 2 and 16). Further, the connector 1 of the present embodiment constitutes an extension wire 3 with a connector by being combined with a lead wire 1a (extension wire) having a first compensating lead wire 31 and a second compensating lead wire 32 connected to the electrode 30. Figure 2). According to the temperature sensor 2 with a connector and the extension wire 3 with a connector, the thin film thermocouple element can be exchanged.
　本発明のコネクタ、コネクタ付き温度センサ及びコネクタ付き延長線を用いることにより、薄膜熱電対素子を交換可能なものとすることができる。薄膜熱電対素子を用いた温度測定の利用分野は、特に限定されるものではないが、極小部の温度測定を好適に行うことが可能であり、例えば、燃料電池、加熱ローラー、熱プレス、電子回路部品発熱温度、化学反応温度、瞬間加熱温度などを測定することができる。 By using the connector of the present invention, the temperature sensor with a connector, and the extension wire with a connector, the thin film thermocouple element can be replaced. The field of application of temperature measurement using a thin-film thermocouple element is not particularly limited, but it is possible to suitably measure the temperature of a very small portion, for example, a fuel cell, a heating roller, a hot press, and an electron. It is possible to measure the heat generation temperature, chemical reaction temperature, instantaneous heating temperature, etc. of circuit parts.
１　コネクタ
　１ａ　リード線（延長線）
　１ｂ　機器接続端部
２　コネクタ付き温度センサ
３　コネクタ付き延長線
１０　ベース部材
　１０ａ　表面
　１０ｂ　裏面
　１０ｃ　ナット受容部
　１０ｄ　前面
　１０ｅ　後面
　１０ｆ　側面
１１　載置部
１２　貫通孔
１３　位置決め凸部（係合部）
１４ａ　丸溝
１４ｂ　角溝
１５　補正センサ収容部
１６　収容凹部
１７　突起部
１８　貫通孔
２０　カバー部材
２１　第１カバー部材
　２１ａ　ザグリ部
　２１ｂ　貫通孔
　２１ｃ　凹部
２２　第２カバー部材
　２２ａ　蝶番部
　２２ｂ　面取り部
　２２ｃ　開口
２３　接続ピン
３０　電極
　３０ａ　電極上面
３１　第１補償導線（補償導線）
３２　第２補償導線（補償導線）
４０　補正用熱電対
　４１　第１金属線（金属線）
　４２　第２金属線（金属線）
　４３　補正用熱電対の測温接点（接点）
５０　薄膜熱電対素子
　５０ａ　保護膜
５１　基板
　５１ａ　接続端部
　５１ｂ　貫通孔
　５１ｃ　切り欠き部
５２，５３　導電性薄膜
　５２ａ，５３ａ　外部接点
　５４　測温用接点
５５　補強部材
Ｂ１　ネジ
Ｂ２　皿ネジ
Ｎ１　六角ナット
Ｎ２　六角ナット 1 Connector 1a Lead wire (extension wire)
1b Equipment connection end 2 Temperature sensor with connector 3 Extension line with connector 10 Base member 10a Front surface 10b Back surface 10c Nut receiving part 10d Front surface 10e Rear surface 10f Side surface 11 Mounting part 12 Through hole 13 Positioning convex part (engagement part)
14a Round groove 14b Square groove 15 Compensation sensor accommodating part 16 Accommodating recess 17 Protruding part 18 Through hole 20 Cover member 21 First cover member 21a Counterbore part 21b Through hole 21c Recession 22 Second cover member 22a Hinge part 22b Chamfering part 22c Opening 23 Connection pin 30 Electrode 30a Electrode upper surface 31 First compensating lead wire (compensation lead wire)
32 Second compensating lead wire (compensation lead wire)
40 Thermocouple for correction 41 First metal wire (metal wire)
42 Second metal wire (metal wire)
43 Temperature measurement contact (contact) of the thermocouple for correction
50 Thin film thermocouple element 50a Protective film 51 Substrate 51a Connection end 51b Through hole 51c Notch 52, 53 Conductive thin film 52a, 53a External contact 54 Temperature measurement contact 55 Reinforcing member B1 Screw B2 Flat head screw N1 Hex nut N2 Hexagon nut

Claims (8)

  1. 　薄膜熱電対素子を外部の機器と接続するためのコネクタであって、
    　ベース部材と、カバー部材と、を備え、
    　前記ベース部材は、前記薄膜熱電対素子の外部接点と接続される電極と、補正用温度センサと、を有し、
    　前記薄膜熱電対素子が前記カバー部材と前記ベース部材に挟まれることで、前記外部接点が前記電極と接続されることを特徴とするコネクタ。     A connector for connecting a thin-film thermocouple element to an external device.
    A base member and a cover member are provided,
    The base member has an electrode connected to an external contact of the thin film thermocouple element and a temperature sensor for correction.
    A connector characterized in that the external contact is connected to the electrode by sandwiching the thin film thermocouple element between the cover member and the base member.
  2. 　前記カバー部材は、前記ベース部材に対して回動可能に取り付けられていることを特徴とする請求項１に記載のコネクタ。 The connector according to claim 1, wherein the cover member is rotatably attached to the base member.
  3. 　前記ベース部材は、前記外部接点が設けられた前記薄膜熱電対素子の接続端部が載置される載置部を有し、
    　前記載置部は、前記接続端部と係合する係合部を有していることを特徴とする請求項２に記載のコネクタ。     The base member has a mounting portion on which the connection end portion of the thin film thermocouple element provided with the external contact is mounted.
    The connector according to claim 2, wherein the above-mentioned mounting portion has an engaging portion that engages with the connection end portion.
  4. 　前記電極は、丸棒電極であり、
    　前記ベース部材は、前記載置部に前記丸棒電極を受容する凹溝を備えていることを特徴とする請求項３に記載のコネクタ。     The electrode is a round bar electrode and is
    The connector according to claim 3, wherein the base member is provided with a concave groove for receiving the round bar electrode in the above-mentioned mounting portion.
  5. 　前記補正用温度センサは、一対の金属線からなる補正用熱電対であり、
    　前記ベース部材は、前記補正用熱電対を収容する収容凹部と、該収容凹部に設けられた突起部と、を有し、
    　前記一対の金属線は、前記収容凹部において、前記突起部を囲むように配置されていることを特徴とする請求項４に記載のコネクタ。     The correction temperature sensor is a correction thermocouple composed of a pair of metal wires.
    The base member has an accommodating recess for accommodating the correction thermocouple and a protrusion provided in the accommodating recess.
    The connector according to claim 4, wherein the pair of metal wires are arranged in the accommodating recess so as to surround the protrusion.
  6. 　前記凹溝は、前記載置部に近い側が、湾曲した形状であり、前記収容凹部に近い側が、角型形状であることを特徴とする請求項５に記載のコネクタ。 The connector according to claim 5, wherein the concave groove has a curved shape on the side close to the above-mentioned placement portion and a square shape on the side close to the accommodation recess.
  7. 　請求項１乃至６のいずれか一項に記載のコネクタと、
    　該コネクタに接続された前記薄膜熱電対素子と、を備えることを特徴するコネクタ付き温度センサ。     The connector according to any one of claims 1 to 6.
    A temperature sensor with a connector comprising the thin film thermocouple element connected to the connector.
  8. 　請求項１乃至６のいずれか一項に記載のコネクタと、
    　前記電極に接続された補償導線を有する延長線と、を備えることを特徴とするコネクタ付き延長線。     The connector according to any one of claims 1 to 6.
    An extension line with a connector comprising: an extension line having a compensating lead wire connected to the electrode.
PCT/JP2021/038061 2020-10-15 2021-10-14 Connector, temperature sensor equipped with connector, and extension line equipped with connector WO2022080452A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10213489A (en) * 1997-01-28 1998-08-11 Showa Alum Corp Work substance temperature measuring apparatus for continuously heating furnace and work substance temperature measuring method for the furnace
JP2002365144A (en) * 2001-06-06 2002-12-18 Omron Corp Compensation structure for cold junction
JP2010190735A (en) * 2009-02-18 2010-09-02 Geomatec Co Ltd Temperature measuring element and temperature measuring instrument
JP2010230505A (en) * 2009-03-27 2010-10-14 Okazaki Mfg Co Ltd Connector for sheathed thermocouple and compensating lead wire
DE102010038104A1 (en) * 2010-10-11 2012-04-12 Ipetronik Gmbh & Co. Kg Universal-thermal socket for connecting with thermal plug or thermal element in measuring amplifier, has plug contacts co-acting with fastening device such that plug contacts are stationarily held in housing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10213489A (en) * 1997-01-28 1998-08-11 Showa Alum Corp Work substance temperature measuring apparatus for continuously heating furnace and work substance temperature measuring method for the furnace
JP2002365144A (en) * 2001-06-06 2002-12-18 Omron Corp Compensation structure for cold junction
JP2010190735A (en) * 2009-02-18 2010-09-02 Geomatec Co Ltd Temperature measuring element and temperature measuring instrument
JP2010230505A (en) * 2009-03-27 2010-10-14 Okazaki Mfg Co Ltd Connector for sheathed thermocouple and compensating lead wire
DE102010038104A1 (en) * 2010-10-11 2012-04-12 Ipetronik Gmbh & Co. Kg Universal-thermal socket for connecting with thermal plug or thermal element in measuring amplifier, has plug contacts co-acting with fastening device such that plug contacts are stationarily held in housing

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