WO2022057241A1 - 电光调制装置及激光谐振腔 - Google Patents

电光调制装置及激光谐振腔 Download PDF

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WO2022057241A1
WO2022057241A1 PCT/CN2021/085867 CN2021085867W WO2022057241A1 WO 2022057241 A1 WO2022057241 A1 WO 2022057241A1 CN 2021085867 W CN2021085867 W CN 2021085867W WO 2022057241 A1 WO2022057241 A1 WO 2022057241A1
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electro
crystal
laser
mounting box
optical modulation
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PCT/CN2021/085867
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English (en)
French (fr)
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程存峰
胡水明
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中国科学技术大学
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/107—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using electro-optic devices, e.g. exhibiting Pockels or Kerr effect
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering

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  • the invention relates to the field of laser technology, in particular to an electro-optical tuning device and a laser resonant cavity.
  • electro-optic modulation is widely used in laser frequency stabilization and control, and spectral detection.
  • the main idea of laser modulation is to derive the signal light in the laser cavity, modulate the derived laser, and compare it with the external reference cavity, and compensate the change of the cavity mode frequency of the laser by modulating the cavity length of the laser cavity.
  • this method requires additional tuning elements, which increases the system cost, and loads the modulated signal on the cavity mirror of the laser cavity, which is limited by the bandwidth and cannot achieve fast compensation, making it difficult to ensure the stable operation of the laser.
  • the present application provides an electro-optical modulation device and a laser resonator cavity, which can realize the rapid modulation of the laser light and ensure the stable operation of the laser light by using the modulation idea in the cavity.
  • the present invention provides the following technical solutions:
  • An electro-optical modulation device for a laser resonator comprising:
  • a temperature control assembly located in the crystal mounting box for regulating the temperature of the nonlinear crystal
  • An adjustment rack the crystal mounting box is arranged on the adjustment rack, and the adjustment rack is used to adjust the spatial position of the crystal mounting box.
  • the nonlinear crystal is a magnesium oxide-doped lithium niobate crystal
  • the nonlinear crystal has opposite first and second ends and opposite third and fourth ends, the first and second ends for passing light, the first and the second ends
  • the second end has an anti-reflection film
  • the third end and the fourth end are used for electrification
  • both the third end and the fourth end are coated with a conductive film.
  • the crystal mounting box is a metal box.
  • the temperature control component is connected to a nonlinear crystal temperature control circuit, and the nonlinear crystal temperature control circuit controls the fluctuation amplitude of the nonlinear crystal to be less than 10 mK through the temperature control component.
  • the temperature control assembly includes a temperature sensor and a heater located on the crystal mounting box.
  • the mounting stress of the crystal mounting box to the nonlinear crystal is less than 0.1 N per square millimeter.
  • the adjustment frame has a first moving mechanism for driving the crystal mounting box to perform three-dimensional translation and a second moving mechanism for driving the crystal mounting box to perform three-dimensional rotation.
  • the present invention also provides a laser resonator, the laser resonator comprising:
  • a laser gain medium and an electro-optical modulation device according to any one of the above.
  • the laser gain medium is titanium sapphire or a nonlinear crystal or a semiconductor gain medium.
  • FIG. 1 is a schematic structural diagram of an electro-optical modulation device according to an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a nonlinear crystal provided by an embodiment of the present invention.
  • FIG. 3 is a top view of a laser resonator according to an embodiment of the present invention.
  • Laser modulation technology has broad application prospects.
  • the main idea of the current laser modulation technology is to derive the signal light in the laser cavity, modulate the derived laser, and compare it with the external reference cavity, and compensate the change of the cavity mode frequency of the laser by modulating the cavity length of the laser cavity.
  • this method has three shortcomings: first, additional modulation elements are added, which increases the system cost; second, the modulation signal is loaded on the cavity mirror of the laser cavity, which is limited by the bandwidth and cannot achieve fast compensation; third, modulation The signal is loaded on the laser cavity length, and it is difficult to ensure the stable operation of the laser.
  • the laser frequency modulation and tuning of the mainstream commercial solid-state lasers all adopt the method of modulating the length of the laser cavity.
  • the modulation bandwidth is small, the modulation speed is slow, and it is easily disturbed by external noise.
  • electro-optic modulation is widely used in laser frequency stabilization and control, and spectral detection.
  • the main problems include: large insertion loss, high half-wave voltage, and unstable refractive index of electro-optic crystals.
  • the present invention provides an electro-optical modulation device and a laser resonant cavity, the electro-optical modulation device is used for a laser resonant cavity, and the electro-optical modulation device includes:
  • a temperature control assembly located in the crystal mounting box for regulating the temperature of the nonlinear crystal
  • An adjustment rack the crystal mounting box is arranged on the adjustment rack, and the adjustment rack is used to adjust the spatial position of the crystal mounting box.
  • FIG. 1 is a schematic structural diagram of an electro-optical modulation device according to an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a nonlinear crystal according to an embodiment of the present invention.
  • the electro-optical modulation device is used for a laser resonator, and the electro-optical modulation device includes:
  • Crystal mounting box 11 the crystal mounting box can be a metal box.
  • a nonlinear crystal located in the crystal installation box 11 ; wherein, the nonlinear crystal may be a magnesium oxide doped lithium niobate crystal.
  • a temperature control assembly located in the crystal mounting box 11 is used to adjust the temperature of the nonlinear crystal; wherein, the temperature control assembly includes a temperature sensor and a heater located on the crystal mounting box 11 .
  • An adjustment frame 12 , the crystal mounting box 11 is disposed on the adjustment frame 12 , and the adjustment frame 12 is used to adjust the spatial position of the crystal mounting box 11 .
  • the laser resonator using the idea of intra-cavity modulation, by adding an electro-optical modulation device to the laser resonator, and adding a specially designed nonlinear crystal to the laser resonator, rapid modulation of the laser phase and frequency can be achieved, and intra-cavity modulation can be achieved.
  • the half-wave voltage is small, and an electro-optical modulation device is introduced into the laser resonator, which has the advantages of stable refractive index, low half-wave voltage, and low insertion loss.
  • the laser after adding the electro-optical modulation device can run stably. It has a wide range of application values in the fields of laser modulation, laser frequency control, and laser spectral detection.
  • the nonlinear crystal has opposite first ends 21 and second ends 22 and opposite third ends 23 and fourth ends 24.
  • the first ends 21 and the second ends 22 are used for In order to pass light, the first end 21 and the second end 22 both have anti-reflection coatings, the third end 23 and the fourth end 24 are used for electricity, the third end 23 and the The four ends 24 are all plated with conductive films.
  • the nonlinear crystal is a polyhedron, wherein the two opposite surfaces are the first end 21 and the second section 22, which are the light-passing ends, and the other two opposite surfaces are the third section 23 and the fourth end 24, which are the power-passing ends. .
  • the nonlinear crystal can be configured as a cube.
  • the material of the nonlinear crystal may be a magnesium oxide-doped lithium niobate crystal
  • the crystal is a nonlinear crystal coated with a film on the light-passing end
  • the film layer is an anti-reflection film for laser light.
  • the crystal can also be a non-linear crystal with a coating on the power-on end, and the power-on end film layer has good electrical conductivity, as well as preferred characteristics and lengths, which can realize wide-range modulation of the frequency of the optical cavity mode.
  • the selection of the length and coating characteristics of the nonlinear crystal of the present invention can realize the small insertion loss of the laser power in the laser resonator, which is beneficial to the stable operation of the laser.
  • the temperature control assembly includes a temperature sensor and a heater located on the crystal mounting box 11 .
  • the mounting stress of the crystal mounting box 11 to the nonlinear crystal is relatively small, and the typical stress value is less than 0.1 N per square millimeter.
  • the crystal mounting box 11 is a metal box with good thermal conductivity, so the temperature controller can be installed on the outer surface of the crystal mounting box 11 .
  • the crystal installation box 11 of the present invention has small installation stress, realizes that the stability of the refractive index of the nonlinear crystal in the laser cavity is better than 0.1%, and is beneficial to the stable operation of the laser.
  • the temperature control component is connected to a nonlinear crystal temperature control circuit, and the nonlinear crystal temperature control circuit controls the fluctuation amplitude of the nonlinear crystal to be less than 10 mK through the temperature control component, which can realize the control of the temperature of the nonlinear crystal. Precise control.
  • the adjusting frame 12 has a first moving mechanism for driving the crystal mounting box 11 to perform three-dimensional translation and a second moving mechanism for driving the crystal mounting box 11 to perform three-dimensional rotation, so that it can The position adjustment of nonlinear crystal in three-dimensional parallel and three-dimensional rotation is realized.
  • the material, coating and size selection of the nonlinear crystal of the electro-optical modulation device can be adjusted based on requirements, the installation method of the nonlinear crystal can be adjusted based on the requirements, and the temperature control method of the nonlinear crystal can be adjusted based on the requirements.
  • the multi-dimensional adjustment method of the nonlinear crystal can be adjusted based on requirements, and is not limited to the method described in the actual description of the present invention and the accompanying drawings.
  • the idea and technology of the intra-cavity modulation electro-optic modulation device adopted in the present invention can also realize the laser intra-cavity electro-optic modulation device composed of arbitrary wavelengths, and can be applied to pulsed and continuous laser systems.
  • FIG. 3 is a top view of a laser resonator provided by an embodiment of the present invention.
  • the laser resonator includes: a laser gain medium 32 and the electro-optic modulation device 35 described in the above embodiments.
  • the laser gain medium 32 may be titanium sapphire, nonlinear crystal or semiconductor gain medium.
  • the laser resonator includes: a ring laser cavity mirror, which is used to realize stable resonance amplification of the laser in the cavity.
  • the method shown in Fig. 3 is illustrated by taking a ring laser cavity mirror as an example. It should be noted that the number and arrangement of cavity mirrors in the laser can be set based on requirements and are not limited to the arrangement of the four cavity mirrors shown in Fig. 3. .
  • the laser intracavity electro-optic modulation device 35 with stable refractive index, low insertion loss, and low half-wave voltage described in the above embodiments is used. Its function is to modulate the phase and frequency of the laser, and the modulation has no effect on the stable operation of the laser cavity.
  • the modulated output light contains the modulated signal.
  • the light-transmitting end face of the nonlinear crystal of the electro-optical modulation device 35 may be provided with a preset cut angle, so that the intra-cavity laser light enters the nonlinear crystal at a Brewster angle, thereby achieving higher transmittance of the laser light.
  • the material of the nonlinear crystal can have a larger nonlinear coefficient. Its function is to make the electro-optical modulation device in the laser cavity have higher modulation efficiency.
  • the laser resonator has four cavity mirrors; the four cavity mirrors are sequentially a first cavity mirror 31 , a second cavity mirror 33 , a third cavity mirror 34 and a fourth cavity mirror 36 ;
  • the laser gain medium 32 is located between the light propagation paths of the first cavity mirror 31 and the second cavity mirror 33 ;
  • the electro-optical modulation device 35 is located between the light propagation paths of the third cavity mirror 34 and the fourth cavity mirror 36 .
  • the light in the laser resonator can propagate between the first cavity mirror 31 and the second cavity mirror 33, between the first cavity mirror 31 and the third cavity mirror 34, and between the second cavity mirror 33 and the fourth cavity mirror Propagation between the mirrors 36 can be propagated between the third cavity mirror 34 and the fourth cavity mirror 36 .
  • the laser gain medium 32 is capable of generating spontaneous and stimulated radiation.
  • the light-transmitting surface of the nonlinear crystal can adopt an appropriate cut angle, so that the intra-cavity laser can be incident on the crystal at the Brewster angle, so as to achieve higher transmittance of the laser, and its material can have a larger nonlinear coefficient. , which can make the electro-optical modulation device in the laser resonator have higher modulation efficiency.
  • the number of cavity mirrors in the laser resonator can be set based on requirements, and is not limited to the four cavity mirrors in this application.
  • the pump light enters the nonlinear crystal through the first cavity mirror 31 to generate idler light and signal light.
  • the third cavity mirror 34 is derived, the idler frequency light is derived from the second cavity mirror 33, enters the optical frequency reference, generates a control signal, and loads the control signal on the electro-optical modulation device 35, which can realize fast and efficient compensation of the signal light frequency, Thus, the control of the idler light frequency is realized, and the narrow linewidth output is realized.
  • the electro-optical modulation device 35 is inserted into the optical resonant cavity to perform fast and efficient feedback control, and the idea of intra-cavity compensation is used to achieve fast locking between the signal light and the optical frequency reference 37, and the optical frequency reference 37
  • the generated control signal is loaded on the electro-optical modulation device 35, so that the compensation bandwidth is greatly increased, and the frequency noise of the signal light and the line width of the signal light are greatly reduced, thereby effectively narrowing the line width of the signal light and the idler frequency light, realizing narrow Line width output.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

本发明公开了一种电光调制装置及激光谐振腔，所述电光调制装置用于激光谐振腔，所述电光调制装置包括：晶体安装盒；位于所述晶体安装盒内的非线性晶体；位于所述晶体安装盒内的温度控制组件，用于调节所述非线性晶体的温度；调节架，所述晶体安装盒设置在所述调节架上，所述调节架用于调节所述晶体安装盒的空间位置。应用本发明提供的技术方案，利用腔内调制思想，可以实现对激光的快速调制，保证激光的稳定运行。

Description

电光调制装置及激光谐振腔
本申请要求于2020年09月15日提交中国专利局、申请号为202010966011.0、发明名称为“电光调至装置及激光谐振腔”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本发明涉及激光技术领域，尤其是涉及一种电光调至装置及激光谐振腔。
背景技术
电光调制作为当前激光调制技术的重要方法之一，在激光频率稳定和控制、光谱探测中应用广泛。
目前，激光调制的主要思想是将激光腔中的信号光导出，调制导出激光，并与外部参考光腔比对，通过调制激光腔的光腔长度补偿激光器的光腔模式频率的变化。但是该方法需要额外增加调至元件，增加系统成本，而且将调制信号加载在激光光腔的腔镜上，受限于带宽，不能实现快速补偿，难于保证激光的稳定运行。
发明内容
有鉴于此，本申请提供了一种电光调制装置及激光谐振腔，利用腔内调制思想，可以实现对激光的快速调制，保证激光的稳定运行。
为了实现上述目的，本发明提供如下技术方案：
一种电光调制装置，用于激光谐振腔，所述电光调制装置包括：
晶体安装盒；
位于所述晶体安装盒内的非线性晶体；
位于所述晶体安装盒内的温度控制组件，用于调节所述非线性晶体的温 度；
调节架，所述晶体安装盒设置在所述调节架上，所述调节架用于调节所述晶体安装盒的空间位置。
优选的，在上述的电光调制装置中，所述非线性晶体为氧化镁掺杂的铌酸锂晶体；
所述非线性晶体具有相对的第一端和第二端以及相对的第三端和第四端，所述第一端和所述第二端用于通过光线，所述第一端和所述第二端均具有增透膜，所述第三端和所述第四端用于通电，所述第三端和所述第四端均镀有导电膜。
优选的，在上述的电光调制装置中，所述晶体安装盒为金属盒。
优选的，在上述的电光调制装置中，所述温度控制组件连接非线性晶体控温电路，所述非线性晶体控温电路通过所述温度控制组件控制所述非线性晶体的波动幅度小于10mK。
优选的，在上述的电光调制装置中，所述温度控制组件包括位于所述晶体安装盒上的温度传感器以及加温器。
优选的，在上述的电光调制装置中，所述晶体安装盒对所述非线性晶体的安装应力小于0.1牛每平方毫米。
优选的，在上述的电光调制装置中，所述调节架具有用于带动所述晶体安装盒进行三维平移的第一移动机构以及用于带动所述晶体安装盒进行三维转动的第二移动机构。
本发明还提供一种激光谐振腔，所述激光谐振腔包括：
激光增益介质以及如上述任一项所述的电光调制装置。
优选的，在上述的激光谐振腔中，所述激光增益介质为钛宝石或是非线性晶体或是半导体增益介质。
通过上述描述可知，本发明技术方案提供的电光调制装置及激光谐振腔中，利用腔内调制思想，通过在激光谐振腔中加入电光调制装置，可以实现对激光相位和频率的快速调制，保证激光的稳定运行。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。
本说明书附图所绘示的结构、比例、大小等，均仅用以配合说明书所揭示的内容，以供熟悉此技术的人士了解与阅读，并非用以限定本发明可实施的限定条件，故不具技术上的实质意义，任何结构的修饰、比例关系的改变或大小的调整，在不影响本发明所能产生的功效及所能达成的目的下，均应仍落在本发明所揭示的技术内容得能涵盖的范围内。
图1为本发明实施例提供的一种电光调制装置的结构示意图；
图2为本发明实施例提供的一种非线性晶体的结构示意图；
图3为本发明实施例提供的一种激光谐振腔的俯视图。
具体实施方式
下面将结合本申请实施例中的附图，对本申请实施例中的进行清楚、完整地描述，显然，所描述的实施例仅仅是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有做出创造性劳动前 提下所获得的所有其他实施例，都属于本申请保护的范围。
激光调制技术具有广泛的应用前景。目前激光调制技术的主要思想是将激光腔中的信号光导出，调制导出激光，并与外部参考光腔比对，通过调制激光腔的光腔长度补偿激光器的光腔模式频率的变化。但这种方法存在三点不足：第一，额外增加调制元件，增加系统成本；第二，调制信号加载在激光光腔的腔镜上，受限于带宽，不能实现快速补偿；第三，调制信号加载在激光腔长上，难于保证激光的稳定运行。
目前主流的商用固体激光器的激光频率调制和调谐，均采用调制激光光腔长度的方法，调制带宽小，调制速度慢，易受到外界噪声干扰。
电光调制作为当前激光调制技术的重要方法之一，在激光频率稳定和控制、光谱探测中应用广泛。在目前电光调制应用中，存在的主要问题包括：插入损耗大、半波电压高、电光晶体折射率不稳定等。
因此，为了解决上述问题，本发明提供一种电光调制装置及激光谐振腔，所述电光调制装置，用于激光谐振腔，所述电光调制装置包括：
晶体安装盒；
位于所述晶体安装盒内的非线性晶体；
位于所述晶体安装盒内的温度控制组件，用于调节所述非线性晶体的温度；
调节架，所述晶体安装盒设置在所述调节架上，所述调节架用于调节所述晶体安装盒的空间位置。
通过上述描述可知，在本发明技术方案提供的电光调制装置及激光谐振腔中，利用腔内调制思想，通过在激光谐振腔中加入电光调制装置，可以实现对 激光相位和频率的快速调制，保证激光的稳定运行。
为使本申请的上述目的、特征和优点能够更加明显易懂，下面结合附图和具体实施方式对本申请作进一步详细的说明。
参考图1和图2，图1为本发明实施例提供的一种电光调制装置的结构示意图，图2为本发明实施例提供的一种非线性晶体的结构示意图。
如图1所示，所述电光调制装置用于激光谐振腔，所述电光调制装置包括：
晶体安装盒11；所述晶体安装盒可以为金属盒。
位于所述晶体安装盒11内的非线性晶体(图1未示出)；其中，所述非线性晶体可以为氧化镁掺杂的铌酸锂晶体。
位于所述晶体安装盒11内的温度控制组件，用于调节所述非线性晶体的温度；其中，所述温度控制组件包括位于所述晶体安装盒11上的温度传感器以及加温器。
调节架12，所述晶体安装盒11设置在所述调节架12上，所述调节架12用于调节所述晶体安装盒11的空间位置。
本发明实施例中，利用腔内调制思想，通过在激光谐振腔中加入电光调制装置，将特殊设计的非线性晶体加入激光谐振腔中，可以实现对激光相位和频率的快速调制，腔内调制半波电压小，并且在激光谐振腔内引入电光调制装置，具备折射率稳定、半波电压低、插入损耗小等优点，加入电光调制装置后的激光可以稳定运行。在激光调制、激光频率控制、激光光谱探测等领域具有广泛应用价值。
如图2所示，所述非线性晶体具有相对的第一端21和第二端22以及相对的第三端23和第四端24，所述第一端21和所述第二端22用于通过光线，所 述第一端21和所述第二端22均具有增透膜，所述第三端23和所述第四端24用于通电，所述第三端23和所述第四端24均镀有导电膜。
所述非线性晶体为多面体，其中两个相对的表面为第一端21和第二段22，作为通光端，另外两个相对的表面为第三段23和第四端24，作为通电端。可以设置所述非线性晶体为立方体。
本发明实施例中，所述非线性晶体的材料可以为氧化镁掺杂的铌酸锂晶体，所述晶体为通光端镀膜的非线性晶体，膜层对激光为增透膜。其他方式中所述晶体也可以为通电端镀膜的非线性晶体，通电端膜层具有良好的导电性能，以及优选的特性和长度，可以实现对光腔模式频率的大范围调制。
本发明所述的非线性晶体，其长度和镀膜特性的选择，能够实现对激光谐振腔中激光功率较小的插入损耗，有益于激光的稳定运行。
本发明实施例中，温度控制组件包括位于晶体安装盒11上的温度传感器以及加温器。所述晶体安装盒11对所述非线性晶体的安装应力较小，典型应力值为小于0.1牛每平方毫米。所述晶体安装盒11为金属盒，具有良好的导热性，故可以将所述温度控制之间安装在所述晶体安装盒11的外侧表面。
本发明所述的晶体安装盒11，安装应力小，实现非线性晶体在激光腔内折射率的稳定性好于0.1％，有益于激光器的稳定运行。
进一步的，所述温度控制组件连接非线性晶体控温电路，所述非线性晶体控温电路通过所述温度控制组件控制所述非线性晶体的波动幅度小于10mK，可以实现对非线性晶体温度的精确控制。
本发明实施例中，所述调节架12具有用于带动所述晶体安装盒11进行三维平移的第一移动机构以及用于带动所述晶体安装盒11进行三维转动的第二移 动机构，从而可以实现对非线性晶体在三维平行和三维转动共计六维的位置调节。
所述电光调制装置非线性晶体的材料、镀膜以及尺寸选择可以基于需求进行调节，所述非线性晶体的安装方式可以基于需求进行调节，所述非线性晶体的温度控制方法可以基于需求进行调节，所述非线性晶体的多维调节方式可以基于需求进行调节，不局限于本发明实说明书以及附图记载的方式。
通过上述描述可知，在本发明技术方案提供的电光调制装置中，利用腔内调制思想，通过在激光谐振腔中加入电光调制装置，可以实现对激光相位和频率的快速调制，保证激光的稳定运行。
本发明采用的腔内调制的电光调制装置，其思路和技术也可以实现任意波长构成的、激光腔内电光调制装置，可适用于脉冲型和连续型激光系统。
基于上述实施例，本发明另一实施例还提供了一种激光谐振腔，该激光谐振腔可以参考图3，图3为本发明实施例提供的一种激光谐振腔的俯视图。
如图3所示，所述激光谐振腔包括：激光增益介质32以及上述实施例中描述的电光调制装置35。其中，所述激光增益介质32可以为钛宝石或是非线性晶体或是半导体增益介质。所述激光谐振腔包括：环形激光腔镜，用于使激光在腔内实现稳定共振放大。图3所示方式以环形激光腔镜为例进行说明，需要说明的是，激光器中腔镜的数量以及排布方式可以基于需求设定不局限于图3所示4个腔镜的排布方式。
采用上述实施例所述中折射率稳定、低插入损耗、低半波电压的激光腔内电光调制装置35。其功能是对所述的激光进行相位和频率调制，该调制对所述 的激光腔的稳定运行不产生任何影响。调制后的输出光包含调制信号。电光调制装置35的非线性晶体的通光端面可以设置有预设切角，使得腔内激光以布儒斯特角入射非线性晶体，实现激光的更高透射率。所述非线性晶体，其材料可以具有更大的非线性系数。其功能是使激光腔内电光调制装置拥有更高的调制效率。
如图3所示，所述激光谐振腔具有四个腔镜；该四个所述腔镜依次为第一腔镜31、第二腔镜33、第三腔镜34以及第四腔镜36；所述激光增益介质32位于第一腔镜31和第二腔镜33的光线传播路径之间；电光调制装置35位于第三腔镜34和第四腔镜36的光线传播路径之间。激光谐振腔内光线能够在第一腔镜31和第二腔镜33之间传播、能够在第一腔镜31和第三腔镜34之间传播、能够在第二腔镜33和第四腔镜36之间传播、能够在第三腔镜34和第四腔镜36之间传播。
所述激光增益介质32能够产生自发辐射和受激辐射光。
其中，所述非线性晶体，其通光面可以采取适当切角，使腔内激光以布儒斯特角入射该晶体，实现激光的更高透射率，其材料可以具有更大的非线性系数，可以使激光谐振腔内电光调制装置拥有更高的调制效率。
需要说明的是，所述激光谐振腔内腔镜的数量可以基于需求设定，不限于本申请中四个腔镜。
本发明实施例中，一种实现方式中，泵浦光透过第一腔镜31进入非线性晶体，产生闲频光和信号光，信号光在激光谐振腔中共振放大后，部分信号光从第三腔镜34导出，闲频光从第二腔镜33导出，进入光学频率参考，产生控制信号，将控制信号加载在电光调制装置35上，可以实现对信号光频率的快 速、高效补偿，从而实现对闲频光频率的控制，实现窄线宽输出。
本发明实施例中，将电光调制装置35插入到光学谐振腔中，进行快速、高效的反馈控制，利用腔内补偿思想，实现信号光与光学频率参考37的快速锁定，并将光学频率参考37产生的控制信号加载在电光调制装置35上，使得补偿带宽大大增加，大幅度降低了信号光的频率噪声和信号光的线宽，从而有效压窄信号光和闲频光的线宽，实现窄线宽输出。
通过上述描述可知，在本发明技术方案提供的激光谐振腔中，利用腔内调制思想，通过在激光谐振腔中加入电光调制装置，可以实现对激光相位和频率的快速调制，保证激光的稳定运行。
本说明书中各个实施例采用递进、或并列、或递进和并列结合的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。对于实施例公开的激光谐振腔而言，由于其与实施例公开的电光调制装置相对应，所以描述的比较简单，相关之处参见电光调制装置部分说明即可。
需要说明的是，在本发明的描述中，需要理解的是，术语“上”、“下”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。当一个组件被认为是“连接”另一个组件，它可以是直接连接到另一个组件或者可能同时存在居中设置的组件。
还需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来 将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括上述要素的物品或者设备中还存在另外的相同要素。
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本申请。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本申请的精神或范围的情况下，在其它实施例中实现。因此，本申请将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。

Claims (9)

  1. 一种电光调制装置，用于激光谐振腔，其特征在于，所述电光调制装置包括：
    晶体安装盒；
    位于所述晶体安装盒内的非线性晶体；
    位于所述晶体安装盒内的温度控制组件，用于调节所述非线性晶体的温度；
    调节架，所述晶体安装盒设置在所述调节架上，所述调节架用于调节所述晶体安装盒的空间位置。
  2. 根据权利要求1所述的电光调制装置，其特征在于，所述非线性晶体为氧化镁掺杂的铌酸锂晶体；
    所述非线性晶体具有相对的第一端和第二端以及相对的第三端和第四端，所述第一端和所述第二端用于通过光线，所述第一端和所述第二端均具有增透膜，所述第三端和所述第四端用于通电，所述第三端和所述第四端均镀有导电膜。
  3. 根据权利要求1所述的电光调制装置，其特征在于，所述晶体安装盒为金属盒。
  4. 根据权利要求1所述的电光调制装置，其特征在于，所述温度控制组件连接非线性晶体控温电路，所述非线性晶体控温电路通过所述温度控制组件控制所述非线性晶体的波动幅度小于10mK。
  5. 根据权利要求1所述的电光调制装置，其特征在于，所述温度控制组 件包括位于所述晶体安装盒上的温度传感器以及加温器。
  6. 根据权利要求1所述的电光调制装置，其特征在于，所述晶体安装盒对所述非线性晶体的安装应力小于0.1牛每平方毫米。
  7. 根据权利要求1所述的电光调制装置，其特征在于，所述调节架具有用于带动所述晶体安装盒进行三维平移的第一移动机构以及用于带动所述晶体安装盒进行三维转动的第二移动机构。
  8. 一种激光谐振腔，其特征在于，所述激光谐振腔包括：
    激光增益介质以及如权利要求1-7任一项所述的电光调制装置。
  9. 根据权利要求8所述的激光谐振腔，其特征在于，所述激光增益介质为钛宝石或是非线性晶体或是半导体增益介质。
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