WO2022052162A1 - 一种含双抛物面镜动态聚焦模块的三维扫描系统 - Google Patents

一种含双抛物面镜动态聚焦模块的三维扫描系统 Download PDF

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Publication number
WO2022052162A1
WO2022052162A1 PCT/CN2020/116945 CN2020116945W WO2022052162A1 WO 2022052162 A1 WO2022052162 A1 WO 2022052162A1 CN 2020116945 W CN2020116945 W CN 2020116945W WO 2022052162 A1 WO2022052162 A1 WO 2022052162A1
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galvanometer
mirror
focusing
plane
parabolic mirror
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PCT/CN2020/116945
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English (en)
French (fr)
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张震
余良
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清华大学
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Publication of WO2022052162A1 publication Critical patent/WO2022052162A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

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  • the present application relates to a new type of laser three-dimensional scanning system, which realizes high-speed and synchronous positioning of laser focusing spots in three-dimensional space through a dual parabolic mirror dynamic focusing module and a laser two-dimensional scanning module included in the system, and belongs to the fields of opto-mechanical integration and laser processing. .
  • laser processing is used in more and more fields, such as material surface modification, 3D printing, punching, sheet cutting, etc.
  • the basic equipment of laser processing that is, the scanning system for guiding the laser beam and positioning the laser focusing spot
  • its design mostly includes fast and accurate galvanometer scanning technology to achieve fast laser scanning.
  • the laser beam scanning system is mainly divided into two categories according to the different positions of the focusing lens, namely the front focusing scanning system with the focusing lens located in front of the XY dual-axis scanning galvanometer, and the rear focusing scanning system with the focusing lens located behind the XY dual-axis scanning galvanometer.
  • the traditional laser scanning technology mostly uses a back-focusing scanning system, that is, combining the XY dual-axis galvanometer and the field lens to achieve two-dimensional scanning in the plane range, and the field lens is located behind the XY dual-axis galvanometer to focus the laser beam. Limited by the field lens, it is difficult to realize laser scanning in large format or three-dimensional space.
  • a front focus laser scanning system with a dynamic focusing system is proposed to realize laser scanning in large format and three-dimensional space.
  • patent US7339750B2 discloses a laser beam dynamic focusing module, which mainly includes two groups of lenses on the optical path, and realizes the change of the focus position by dynamically changing the spacing of one group of lenses.
  • Patent US7531772B2 discloses a lens moving device used in a laser focusing system, which is driven by double rotating motors, and a transmission mechanism of a crank slider is designed to move the lens along the optical axis.
  • Patent CN208391288U discloses a large-scale complex curved surface dynamic focusing laser processing system.
  • the dynamic focusing module included in the system mainly includes a dynamic focusing mirror, a first focusing lens and a second focusing lens on the optical path, and the driving method adopted is a voice coil.
  • the motor or piezoelectric ceramic can directly drive the dynamic focusing lens to move linearly along the optical axis, thereby realizing the change of the focused spot position.
  • the high-speed dynamic focusing laser galvanometer module disclosed by the patent CN205899130U, the dynamic focusing module included in the optical path is composed of a zoom lens and a focusing lens group. The linear movement of the dynamic focusing lens along the optical axis is realized, thereby realizing the dynamic change of the focusing position.
  • the dynamic focusing technology used in the laser 3D scanning system mainly realizes the dynamic change of the focusing spot along the optical axis by dynamically changing the distance between the lens elements in the laser beam expanding and focusing optical system.
  • There is a big difference between the two it is difficult to realize the synchronous control of the two, and the linear motion of the lens is slower and the response time is longer than the rotating motion of the scanning galvanometer, which will eventually reduce the scanning speed of the overall 3D scanning system. .
  • the present application provides a three-dimensional scanning system including a dynamic focusing module of double parabolic mirrors.
  • the dynamic zooming system adopts a galvanometer with consistent performance as a driving component, which can realize the position change of the focusing spot on the three axes of space.
  • the synchronous high-speed response can realize synchronous and fast laser 3D scanning.
  • the three-dimensional scanning system provided by the present application with a dynamic focusing module of double parabolic mirrors mainly includes a dynamic focusing module of double parabolic mirrors, a laser beam expanding and focusing lens group, and a two-dimensional laser scanning module;
  • the dynamic focusing module of the double parabolic mirrors It further includes a first paraboloid mirror, a first galvanometer, a second paraboloid mirror and a second galvanometer;
  • the first galvanometer and the second galvanometer are both composed of a rotating motor and a plane reflector, and the plane reflector and the rotating motor are composed of The rotating shaft is fixedly connected;
  • the laser beam expanding and focusing lens group further includes a first diverging lens, a second focusing lens and a third focusing lens;
  • the laser two-dimensional scanning module further includes an X-axis galvanometer and a Y-axis galvanometer
  • the X-axis galvanometer and the Y-axis galvanometer are both composed of a rotating motor and
  • first parabolic mirror and the second parabolic mirror included in the dual parabolic mirror dynamic focusing module are concave parabolic mirrors with the same focal length; the first parabolic mirror and the second parabolic mirror are mirror-symmetrically arranged, and the central axes coincide.
  • the rotation axis of the rotating motor of the first galvanometer included in the double parabolic mirror dynamic focusing module is perpendicular to the central axis of the first parabolic mirror, and the rotation axis of the rotating motor of the second galvanometer is the same as that of the second galvanometer.
  • the central axis of the second parabolic mirror is vertical, and the rotation axes of the rotating motors of the first and second galvanizing mirrors are parallel to each other and are all parallel to the horizontal plane; the center of the plane mirror of the first galvanizing mirror and the The focal points of the first parabolic reflector are coincident, the center of the plane reflector of the second galvanometer and the focus of the second paraboloid reflector overlap; the plane reflector of the first galvanometer and the second galvanometer
  • the plane mirror of the galvanometer and the horizontal plane have the same angle and are not parallel to each other.
  • the first diverging lens is a concave lens or a plano-concave lens
  • the second focusing lens and the third focusing lens are a convex lens or a plano-convex lens
  • the first diverging lens, the second focusing lens and the third focusing lens The optical axis is the same as the optical axis, and the optical axis passes through the center point of the plane mirror of the second galvanometer and is respectively perpendicular to the rotation axis of the second galvanometer and the central axis of the second parabolic mirror.
  • the three-dimensional scanning system including the dynamic focusing module of double parabolic mirrors is characterized in that the laser beam after beam expansion and collimation is incident on the center point of the plane mirror of the first galvanometer along the vertical horizontal plane direction After being reflected, it is incident on the first parabolic mirror, and after being focused, it is incident on the second parabolic mirror along the direction of the central axis of the first parabolic mirror; After the focusing, the laser is incident on the center point of the plane mirror of the second galvanometer, and exits in a direction parallel to the incident direction of the laser beam; at the same time, the plane mirror and the second galvanometer of the first galvanometer are changed.
  • the included angle between the plane mirror and the horizontal plane is kept the same, the divergence angle of the outgoing laser beam can be mentioned above, and the position of the focusing spot after being focused by the laser beam expanding and focusing lens group can be changed.
  • the dynamic focusing module included in the laser 3D scanning system of the present application can control the divergence angle of the laser light emitted by the dynamic focusing module only by synchronously controlling the change of the rotation angles of the two plane mirrors (galvanometers), and then can control the position of the focusing spot.
  • the high-speed response and high precision of the galvanometer can realize high-speed and accurate focusing spot positioning.
  • the rotary motor (galvanometer) used in the laser 3D scanning system of the present application determines the spot positioning performance of the overall system.
  • the dual parabolic mirror dynamic focusing module and the laser 2D scanning module included can use motors with consistent performance, which can achieve The high synchronization of 3D scanning in the three-axis direction, and the fast response and high precision characteristics of the galvanometer motor, finally realize high-speed and high-precision laser 3D scanning.
  • FIG. 1 is a schematic diagram of the overall structure of an example of the application.
  • FIGS. 2a and 2b are schematic structural diagrams of the dynamic focusing module of the parabolic mirror of the present application
  • FIG. 3a and FIG. 3b are schematic diagrams of the optical path of the zoom principle of the present application.
  • 4a and 4b are isometric views of the laser three-dimensional scanning system of the present application.
  • 5a and 5b are side views of the laser three-dimensional scanning system of the present application.
  • FIG. 6 is a front view of the laser three-dimensional scanning system of the present application.
  • FIG. 7 is a functional schematic diagram of the laser three-dimensional scanning system of the present application for realizing plane scanning.
  • a 3D scanning system with a dual parabolic mirror dynamic focusing module mainly includes a dual parabolic mirror dynamic focusing module, a laser beam expanding and focusing lens group, and a laser two-dimensional scanning module; the dual parabolic mirror dynamic focusing module
  • the module further includes a first parabolic mirror 101, a first galvanometer 103, a second parabolic mirror 102 and a second galvanometer 104; the first galvanometer 103 and the second galvanometer 104 are both composed of a rotating motor and a plane mirror , the plane mirror is fixedly connected with the rotating shaft of the rotating motor;
  • the laser beam expanding and focusing lens group further includes a first diverging lens 201, a second focusing lens 202 and a third focusing lens 203;
  • the laser two-dimensional scanning module further includes It includes an X-axis galvanometer 301 and a Y-axis galvanometer 302; the X-axis galvanometer and the Y-axis galvanometer are both composed of
  • the rotation axes of the X-axis galvanometer 301 and the Y-axis galvanometer 302 are arranged perpendicular to each other.
  • FIGS. 2a and 2b are schematic diagrams of the structure of the dual parabolic mirror dynamic focusing module.
  • the first parabolic mirror 101 and the second parabolic mirror 102 included in the dual parabolic mirror dynamic focusing module are concave parabolic mirrors with the same focal length;
  • the first parabolic mirror 101 and the second parabolic mirror 102 are mirror-symmetrically arranged, and the central axes coincide.
  • the rotation axis of the rotating motor of the first galvanometer 103 included in the dual parabolic mirror dynamic focusing module is perpendicular to the central axis of the first parabolic mirror 101, and the rotation of the rotating motor of the second galvanometer 104
  • the axis is perpendicular to the central axis of the second parabolic mirror 102, the rotation axes of the rotating motors of the first galvanometer 103 and the second galvanometer 104 are parallel to each other and parallel to the horizontal plane;
  • the center of the plane mirror coincides with the focal point of the first parabolic mirror 101, and the center of the plane mirror 104 of the second galvanometer coincides with the focal point of the second parabolic mirror 102;
  • the first The plane mirror of the galvanometer 103 and the plane mirror of the second galvanometer 104 have the same angle with the horizontal plane but are not parallel to each other.
  • the first diverging lens 201 is a concave lens or a plano-concave lens
  • the second focusing lens 202 and the third focusing lens 203 are convex lenses or plano-convex lenses
  • the first diverging lens 201, the second focusing lens 202 and the third focusing lens 203 have the same optical axis, and the optical axis passes through the center point of the plane mirror of the second galvanometer 104 and is related to the rotation axis of the second galvanometer 104 and
  • the central axes of the second parabolic mirrors 102 are respectively vertical.
  • the first diverging lens 201 is a plano-concave lens
  • the second focusing lens 202 and the third focusing lens 203 are plano-convex lenses.
  • Figures 3a and 3b are schematic diagrams of the zooming principle of the three-dimensional scanning system with dual parabolic mirror dynamic focusing modules.
  • the expanded and collimated laser beam is incident on the first Mirror 103 is at the center point of the plane mirror; after being reflected, it is incident on the first parabolic mirror 101, and after being focused, it is incident on the first parabolic mirror along the direction of the central axis of the first parabolic mirror.
  • Two parabolic mirrors 102 after being focused, the laser is incident on the center point of the plane mirror of the second galvanometer 104, and exits in a direction parallel to the incident direction of the laser beam; at the same time, the first vibration is changed.
  • the angle between the plane mirror of the mirror 103 and the plane mirror of the second galvanometer 104 and the horizontal plane is kept the same, which can change the divergence angle of the laser beam emitted by the dynamic focusing module, and finally change the laser beam expansion and focus after the described laser beam expansion and focus.
  • the position of the focused spot after the lens group is focused.
  • the rotation angles of the plane mirrors of the X-axis galvanometer 301 and the Y-axis galvanometer 302 remain the same as the initial values. After the angle between the plane mirror of the galvo mirror 104 and the horizontal plane, the position of the focused light spot changes along the optical axis.
  • FIG. 4a and FIG. 4b it is an isometric view of the laser three-dimensional scanning system, and the plane mirror rotation angle of the X-axis galvanometer 301 and the Y-axis galvanometer 302 and the angle of the first galvanometer 103 are changed at the same time.
  • the angle between the plane reflector and the plane reflector of the second galvanometer 104 and the horizontal plane, the focusing spot will correspond to the two different positions shown in the left and right parts of the figure.
  • Fig. 5a and Fig. 5b which are side views of the laser 3D scanning system
  • the rotation angles of the plane mirrors of the X-axis galvanometer 301 and the Y-axis galvanometer 302 and the plane mirror of the first galvanometer 103 are changed
  • the position of the focus spot changes
  • the rotation of the plane mirror of the X-axis galvanometer 301 can control the scanning of the focus spot along the X-axis direction.
  • FIG. 6 which is a side view of the laser 3D scanning system
  • the rotation angles of the plane mirrors of the X-axis galvanometer 301 and the Y-axis galvanometer 302 and the plane mirrors of the first galvanometer 103 and the second mirror are changed.
  • the position of the focus spot can be dynamically changed, which corresponds to two different focus spot positions as shown in the left and right parts of FIG. 6 .
  • FIG. 7 it is a functional schematic diagram of the laser three-dimensional scanning system of the present application to realize plane scanning.
  • the laser focus spot can be positioned at any point within a certain range of plane areas.

Abstract

一种含双抛物面镜动态聚焦模块的三维扫描系统，含双抛物面镜动态聚焦模块的三维扫描系统由双抛物面镜动态聚焦模块、激光扩束和聚焦透镜组以及激光二维扫描模块组成。采用由双抛物面反射镜（101，102）以及动平面反射镜（103，104）组成的动态聚焦模块实现聚焦光斑沿光轴的位置变化，进而通过激光扩束和聚焦透镜组后的二维扫描模块实现三维激光扫描。动态聚焦模块中包含两个动平面反射镜（103，104），通过改变其转角即可改变动态聚焦模块出射光的发散角，进而可改变经过激光扩束和聚焦透镜组变换后的聚焦光斑的位置。双抛物面镜动态聚焦模块和激光二维扫描模块中使用性能一致的旋转电机部件，可实现聚焦光斑在三维空间内的高速、同步定位。

Description

一种含双抛物面镜动态聚焦模块的三维扫描系统 技术领域
本申请涉及一种新型激光三维扫描系统，通过系统包含的双抛物面镜动态聚焦模块和激光二维扫描模块实现激光聚焦光斑在三维空间内的高速、同步定位，属于光机电一体化、激光加工领域。
背景技术
随着激光技术的日益成熟，激光加工应用于越来越广的领域，如材料表面改性、3D打印、打孔、板材切割等。其中，作为激光加工的基础装备，即对激光束导向、激光聚焦光斑定位的扫描系统，其设计多包含快速准确的振镜扫描技术以实现快速的激光扫描。激光束扫描系统按照聚焦透镜布置位置的不同主要分为两类，即聚焦透镜位于XY双轴扫描振镜前的前聚焦扫描系统以及聚焦透镜位于XY双轴扫描振镜后的后聚焦扫描系统。传统的激光扫描技术多采用后聚焦扫描系统，即结合XY双轴振镜和场镜实现平面范围内的二维扫描，场镜位于XY双轴振镜后实现对激光束的聚焦，但该技术受限于场镜而难以实现大幅面或三维空间的激光扫描。为解决上述问题，人们提出一种含动态聚焦系统的前聚焦激光扫描系统以实现大幅面及三维空间内的激光扫描。
现有的较为成熟的动态聚焦技术多通过改变激光扩束、聚焦的光学系统中的相关光学元件间的距离以实现，不同的实施方案中主要在所选用的透镜移动的驱动方式与传动方式部存在不同。例如，专利US7339750B2公开的一种激光束动态聚焦模块，该模块在光路上主 要包括两组透镜，其通过动态改变其中一组透镜的间距实现聚焦位置的变化。专利US7531772B2公开的一种用于激光聚焦系统中的透镜移动装置，其采用双旋转电机驱动，并设计曲柄滑块的传动机构实现沿光轴移动透镜。专利CN208391288U公开了一种大型复杂曲面动态聚焦激光加工系统，该系统所包含的动态聚焦模块在光路上主要包括动态聚焦镜、第一聚焦透镜和第二聚焦透镜，所采用的驱动方式是音圈电机或压电陶瓷，可以直接驱动动态聚焦透镜沿光轴直线运动，进而实现聚焦光斑位置的变化。专利CN205899130U公开的高速动态聚焦激光振镜模组，其包含的动态聚焦模块在光路上是由变焦透镜、聚焦透镜组组成，设计采用旋转电机驱动以及由铰接杆、滑块以及导轨组成传动机构以实现动态聚焦透镜沿光轴的直线运动，进而实现聚焦位置的动态变化。
综上所述，激光三维扫描系统中采用的动态聚焦技术在原理上主要通过动态改变激光扩束、聚焦的光学系统中透镜元件之间的距离以实现聚焦光斑沿光轴的动态变化，该原理从本质上均需要控制透镜沿光轴方向进行直线运动，因此，其驱动以及传动方式与二维振镜扫描相比，具有较大的差异，这导致动态聚焦系统与二维扫描系统在动态性能上存在很大的不同，实现对两者的同步控制较为困难，且透镜沿直线运动相较于扫描振镜旋转运动，其响应速度慢、响应时间长，会最终降低整体三维扫描系统的扫描速度。
发明内容
为解决已有技术的不足，本申请提供一种含双抛物面镜动态聚焦模块的三维扫描系统，该动态变焦系统采用性能一致的振镜作为驱动部件，可实现聚焦光斑在空间三轴上位置变化的同步高速响应，即可以实现同步、快速的激光三维扫描。
本申请的技术方案是：
本申请所提供的一种含双抛物面镜动态聚焦模块的三维扫描系统主要包括双抛物面镜动态聚焦模块、激光扩束和聚焦透镜组以及激光二维扫描模块；所述的双抛物面镜动态聚焦模块进一步包括第一抛物面镜、第一振镜、第二抛物面镜和第二振镜；所述的第一振镜、第二振镜均由旋转电机和平面反射镜组成，平面反射镜与旋转电机转轴固连；所述的激光扩束和聚焦透镜组进一步包括第一发散透镜、第二聚焦透镜和第三聚焦透镜；所述的激光二维扫描模块进一步包括X轴振镜和Y轴振镜；所述的X轴振镜、Y轴振镜均由旋转电机和平面反射镜组成，平面反射镜与旋转电机转轴固连。
其中，所述的双抛物面镜动态聚焦模块包含的第一抛物面镜和第二抛物面镜为焦距相同的凹面抛物面镜；所述的第一抛物面镜和第二抛物面镜镜像对称布置，中心轴重合。
其中，所述的双抛物面镜动态聚焦模块包含的第一振镜的旋转电机的旋转轴与所述的第一抛物面镜中心轴垂直，所述的第二振镜的旋转电机的旋转轴与所述的第二抛物面镜中心轴垂直，所述的第一振镜和第二振镜的旋转电机的旋转轴相互平行且均与水平面平行；所述的第一振镜的平面反射镜中心与所述的第一抛物面反射镜的焦点重合， 所述的第二振镜的平面反射镜中心与所述的第二抛物面反射镜的焦点重合；所述的第一振镜的平面反射镜与第二振镜的平面反射镜与水平面夹角相同且相互不平行。
其中，所述的第一发散透镜为凹透镜或者平凹透镜；所述的第二聚焦透镜和第三聚焦透镜为凸透镜或者平凸透镜；所述的第一发散透镜、第二聚焦透镜和第三聚焦透镜同光轴，且光轴通过所述的第二振镜的平面反射镜的中心点并与所述的第二振镜的旋转轴以及第二抛物面镜的中心轴分别垂直。
其中，所述的含双抛物面镜动态聚焦模块的三维扫描系统，其特征在于，经扩束准直后的激光光束沿垂直水平面方向入射到所述的第一振镜的平面反射镜中心点处；后经其反射后入射到所述的第一抛物面反射镜上，经其聚焦后沿所述的第一抛物面反射镜的中心轴的方向入射到所述的第二抛物面反射镜上；后经其聚焦后激光入射到所述的第二振镜的平面反射镜中心点处，沿与激光光束入射方向平行的方向出射；同时改变所述的第一振镜的平面反射镜及第二振镜的平面反射镜与水平面的夹角并保持其相同，可以前述出射激光束发散角，并改变经所述的激光扩束和聚焦透镜组聚焦后的聚焦光斑的位置。
本申请的有益效果：
本申请的激光三维扫描系统所包含的动态聚焦模块仅需要同步控制两个平面反射镜(振镜)的转角变化即可以控制动态聚焦模块出射激光的发散角，进而可以控制聚焦光斑的位置，由于振镜的高速响应、高精度可以实现高速精确的聚焦光斑定位。
本申请的激光三维扫描系统中所采用的旋转电机(振镜)决定整体系统的光斑定位性能，所包含的双抛物面镜动态聚焦模块和激光二维扫描模块可采用性能一致的电机，进而可实现三维扫描在三轴方向上的高度同步性，同时利用振镜电机快速响应与高精度的特性，最终实现高速、高精度的激光三维扫描。
附图说明
图1为本申请实例整体结构示意图。
图2a和图2b为本申请抛物面镜动态聚焦模块结构示意图
图3a和图3b为本申请变焦原理光路示意图。
图4a和图4b为本申请激光三维扫描系统等轴测视图。
图5a和图5b为本申请激光三维扫描系统侧视图。
图6为本申请激光三维扫描系统正视图。
图7为本申请激光三维扫描系统实现平面扫描的功能示意图。
具体实施方式
下面结合附图对本申请进一步详细介绍具体结构实例以及工作原理的相关内容：
如图1所示，一种含双抛物面镜动态聚焦模块的三维扫描系统主要包括双抛物面镜动态聚焦模块、激光扩束和聚焦透镜组以及激光二维扫描模块；所述的双抛物面镜动态聚焦模块进一步包括第一抛物面镜101、第一振镜103、第二抛物面镜102和第二振镜104；所述的 第一振镜103、第二振镜104均由旋转电机和平面反射镜组成，平面反射镜与旋转电机转轴固连；所述的激光扩束和聚焦透镜组进一步包括第一发散透镜201、第二聚焦透镜202和第三聚焦透镜203；所述的激光二维扫描模块进一步包括X轴振镜301和Y轴振镜302；所述的X轴振镜、Y轴振镜均由旋转电机和平面反射镜组成，平面反射镜与旋转电机转轴固连。
具体的，所述的X轴振镜301和Y轴振镜302旋转轴互相垂直布置。
如图2a和图2b所示为双抛物面镜动态聚焦模块结构示意图，所述的双抛物面镜动态聚焦模块包含的第一抛物面镜101和第二抛物面镜102为焦距相同的凹面抛物面镜；所述的第一抛物面镜101和第二抛物面镜102镜像对称布置，中心轴重合。
其中，所述的双抛物面镜动态聚焦模块包含的第一振镜103的旋转电机的旋转轴与所述的第一抛物面镜101中心轴垂直，所述的第二振镜104的旋转电机的旋转轴与所述的第二抛物面镜102中心轴垂直，所述的第一振镜103和第二振镜104的旋转电机的旋转轴相互平行且与水平面平行；所述的第一振镜103的平面反射镜中心与所述的第一抛物面反射镜101的焦点重合，所述的第二振镜的平面反射镜104中心与所述的第二抛物面反射镜102的焦点重合；所述的第一振镜103的平面反射镜与第二振镜104的平面反射镜与水平面夹角相同但相互不平行。
如图3a和图3b所示，所述的第一发散透镜201为凹透镜或者平凹透镜；所述的第二聚焦透镜202和第三聚焦透镜203为凸透镜或者平凸透镜；所述的第一发散透镜201、第二聚焦透镜202和 第三聚焦透镜203同光轴，且光轴通过所述的第二振镜104的平面反射镜的中心点并与所述的第二振镜104的旋转轴以及第二抛物面镜102的中心轴分别垂直。
具体的，所述的第一发散透镜201为平凹透镜；所述的第二聚焦透镜202和第三聚焦透镜203为平凸透镜。
如图3a和图3b所示为所述的含双抛物面镜动态聚焦模块的三维扫描系统的变焦原理示意图光路，经扩束准直后的激光光束沿垂直水平面方向入射到所述的第一振镜103平面反射镜中心点处；后经其反射后入射到所述的第一抛物面反射镜101，经其聚焦后沿所述的第一抛物面反射镜的中心轴的方向入射到所述的第二抛物面反射镜102上；后经其聚焦后激光入射到所述的第二振镜104的平面反射镜中心点处，沿与激光光束入射方向平行的方向出射；同时改变所述的第一振镜103的平面反射镜及第二振镜104的平面反射镜与水平面的夹角并保持其相同，可以改变动态聚焦模块出射激光束的发散角，并最终改变经所述的激光扩束和聚焦透镜组聚焦后的聚焦光斑的位置。
如图3a和图3b所示，所述的X轴振镜301和Y轴振镜302的平面反射镜转角保持初始值不变，在改变所述的第一振镜103的平面反射镜及第二振镜104的平面反射镜与水平面的夹角后，聚焦光斑沿光轴位置发生变化。
如图4a和图4b所示，为激光三维扫描系统等轴测视图，同时改变所述的X轴振镜301和Y轴振镜302的平面反射镜转角以及所述的第一振镜103的平面反射镜及第二振镜104的平面反射镜与水平面的夹角，聚焦光斑将对应图中左右部分所示的两种不同的位置。
如图5a和图5b所示，为激光三维扫描系统侧视图，改变所述的X轴振镜301和Y轴振镜302的平面反射镜转角以及所述的 第一振镜103的平面反射镜和第二振镜104的平面反射镜的转角后，聚焦光斑位置发生变化，且所述的X轴振镜301的平面反射镜的旋转可以控制聚焦光斑沿X轴方向的扫描。
如图6所示，为激光三维扫描系统侧视图，改变所述的X轴振镜301和Y轴振镜302的平面反射镜转角以及所述的第一振镜103的平面反射镜和第二振镜104的平面反射镜的转角后，可以动态改变聚焦光斑位置，如图6左右部分所示对应为两种不同的聚焦光斑位置。
如图7所示，为本申请激光三维扫描系统实现平面扫描的功能示意图，在所述的X轴振镜301和Y轴振镜302的平面反射镜转角以及所述的第一振镜103的平面反射镜和第二振镜104的平面反射镜的转角对应不同的值时，激光聚焦光斑可以在一定范围的平面区域内实现任意点的定位。

Claims (5)

  1. 一种含双抛物面镜动态聚焦模块的三维扫描系统，其特征在于，包括：
    双抛物面镜动态聚焦模块，所述的双抛物面镜动态聚焦模块进一步包括：第一抛物面镜、第一振镜、第二抛物面镜和第二振镜；所述的第一振镜、第二振镜均由旋转电机和平面反射镜组成，平面反射镜与旋转电机转轴固连；
    激光扩束和聚焦透镜组，所述的激光扩束和聚焦透镜组进一步包括：第一发散透镜，第二聚焦透镜和第三聚焦透镜；
    激光二维扫描模块，所述的二维扫描模块进一步包括：X轴振镜和Y轴振镜；所述的X轴振镜、Y轴振镜均由旋转电机和平面反射镜组成，平面反射镜与旋转电机转轴固连。
  2. 根据权利要求1所述的含双抛物面镜动态聚焦模块的三维扫描系统，其特征在于，所述的第一抛物面镜和第二抛物面镜为焦距相同的凹面抛物面镜；其中，所述的第一抛物面镜和第二抛物面镜镜像对称布置，中心轴重合。
  3. 根据权利要求1所述的含双抛物面镜动态聚焦模块的三维扫描系统，其特征在于，所述的第一振镜的旋转电机的旋转轴与所述的第一抛物面镜中心轴垂直，第二振镜的旋转电机的旋转轴与所述的第二抛物面镜中心轴垂直，第一振镜和第二振镜的旋转电机的旋转轴相互平行且均与水平面平行；所述的第一振镜的平面反射镜中心与所述的第一抛物面反射镜的焦点重合，所述的第二振镜的平面反射镜中心与所述的第二抛物面反射镜的焦点重合；所述的第一振镜的平面反射镜与第二振镜的平面反射镜与水平面夹角相同且相互不平行。
  4. 根据权利要求1所述的含双抛物面镜动态聚焦模块的三维扫描系统，其特征在于，所述的第一发散透镜为凹透镜或者平凹透镜；所述的第二聚焦透镜和第三聚焦透镜为凸透镜或者平凸透镜；所述的第一发散透镜、第二聚焦透镜和第三聚焦透镜同光轴，且光轴通过所述的第二振镜的平面反射镜的中心点并与所述的第二振镜的旋转轴以及第二抛物面镜的中心轴分别垂直。
  5. 根据权利要求1所述的含双抛物面镜动态聚焦模块的三维扫描系统，其特征在于，经扩束准直后的激光光束沿垂直水平面方向入射到所述的第一振镜的平面反射镜中心点处；后经其反射后入射到所述的第一抛物面反射镜上，经其聚焦后沿所述的第一抛物面反射镜的中心轴的方向入射到所述的第二抛物面反射镜上；后经其聚焦后激光入射到所述的第二振镜的平面反射镜中心点处，沿与激光光束入射方向平行的方向出射；同时改变所述的第一振镜的平面反射镜及第二振镜的平面反射镜与水平面的夹角并保持其相同，可以改变所述出射激光束发散角，并改变经所述的激光扩束和聚焦透镜组聚焦后的聚焦光斑的位置。
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