WO2022044673A1 - Dispositif de traitement d'image, système d'inspection et procédé d'inspection - Google Patents
Dispositif de traitement d'image, système d'inspection et procédé d'inspection Download PDFInfo
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- WO2022044673A1 WO2022044673A1 PCT/JP2021/027936 JP2021027936W WO2022044673A1 WO 2022044673 A1 WO2022044673 A1 WO 2022044673A1 JP 2021027936 W JP2021027936 W JP 2021027936W WO 2022044673 A1 WO2022044673 A1 WO 2022044673A1
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- WO
- WIPO (PCT)
- Prior art keywords
- image
- lighting
- image data
- imaging
- condition
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 95
- 238000012545 processing Methods 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims abstract description 47
- 238000010191 image analysis Methods 0.000 claims abstract description 60
- 238000005286 illumination Methods 0.000 claims abstract description 42
- 238000003384 imaging method Methods 0.000 claims description 47
- 238000011156 evaluation Methods 0.000 claims description 39
- 238000013473 artificial intelligence Methods 0.000 claims description 20
- 239000000284 extract Substances 0.000 claims 2
- 230000006870 function Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- GIUMGVUBDBDTDX-UHFFFAOYSA-N 3-{[(3-fluoro-3'-methoxybiphenyl-4-yl)amino]carbonyl}thiophene-2-carboxylic acid Chemical compound COC1=CC=CC(C=2C=C(F)C(NC(=O)C3=C(SC=C3)C(O)=O)=CC=2)=C1 GIUMGVUBDBDTDX-UHFFFAOYSA-N 0.000 description 13
- 230000000694 effects Effects 0.000 description 9
- 238000000605 extraction Methods 0.000 description 9
- 238000011176 pooling Methods 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 230000004913 activation Effects 0.000 description 5
- 238000012937 correction Methods 0.000 description 5
- 230000001186 cumulative effect Effects 0.000 description 5
- 238000013527 convolutional neural network Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
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- 229910052736 halogen Inorganic materials 0.000 description 2
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- 238000013145 classification model Methods 0.000 description 1
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- 238000001030 gas--liquid chromatography Methods 0.000 description 1
- 208000037909 invasive meningococcal disease Diseases 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
Definitions
- an inspection system including an imaging device (typically a camera) that captures an image of an inspection object and a lighting device that irradiates the inspection object with light to assist the imaging by the camera is known.
- the lighting device includes, for example, a halogen lamp light source, an LED light source, etc., and can adjust lighting conditions such as brightness and color (R, G, B, IR, etc.) so that an image of an inspection object can be clearly captured. It has become.
- the adjustment of lighting conditions is usually done manually by the user of the device. Therefore, there is a risk that the workload and working time of the user will increase when deriving the optimum value of the lighting condition.
- the image processing device 18 is not limited to such an implementation form, and the form using FPGA (Field Programmable Gate Array), ASIC (Application Specific Integrated Circuit), or the like instead of the processor, or a PC (Personal Computer). Or the like may be used. Further, although not shown, the image processing apparatus 18 separately includes, for example, an image analyzer for performing image analysis associated with the inspection of the inspection object 20a and performing a quality determination or the like.
- FPGA Field Programmable Gate Array
- ASIC Application Specific Integrated Circuit
- PC Personal Computer
- the image processing apparatus 18 separately includes, for example, an image analyzer for performing image analysis associated with the inspection of the inspection object 20a and performing a quality determination or the like.
- FIG. 5B shows a histogram showing the relationship between the pixel value (density) and the number of pixels for each pixel value.
- a group of pixels having a pixel value equal to or less than the threshold value TH is classified into class [1] (that is, one of 0/1), which is larger than the threshold value TH.
- the pixel group having the pixel value is classified into the class [2] (the other of 0/1).
- the threshold value TH at which the separation degree S is maximized is searched for by calculating the separation degree S represented by the equation (1) while changing the threshold value TH.
- S ⁇ b 2 / ⁇ w 2 ... (1)
- the classification a classification model for guessing which class the input data belongs to in the learned class is used.
- class classification for example, the lighting condition A predetermined as teacher data is output for the input of the image data 31 of the inspection object A at the time of learning, and the lighting condition A is output for the input of the image day 31 of the inspection object B.
- Each feature amount, that is, a weighting coefficient is learned so as to output the lighting condition B defined in advance as teacher data.
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
La présente invention concerne un dispositif de traitement d'image, un système d'inspection et un procédé d'inspection, qui permettent de réduire la charge de travail d'un utilisateur. Un dispositif de traitement d'image 18 traite des données d'image pour un sujet d'inspection qui a été photographié sous éclairage. Un dispositif de recherche d'état d'éclairage 26 règle de façon variable une condition d'éclairage ILC[i] pour l'éclairage. Une interface d'image 25 acquiert des données d'image IMD[i] pour chaque condition d'éclairage ILC[i]. Un analyseur d'image 27 effectue une analyse d'image sur les données d'image IMD[i] pour chaque condition d'éclairage ILC[i]. Un comparateur 28 compare le résultat d'analyse d'image AR[i] à partir de l'analyseur d'image 27 pour chaque condition d'éclairage ILC[i] pour sélectionner une condition d'éclairage quelconque ILCx parmi la pluralité de conditions d'éclairage ILC[i].
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020-143073 | 2020-08-27 | ||
| JP2020143073A JP2023153431A (ja) | 2020-08-27 | 2020-08-27 | 画像処理装置、検査システムおよび検査方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2022044673A1 true WO2022044673A1 (fr) | 2022-03-03 |
Family
ID=80353258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2021/027936 WO2022044673A1 (fr) | 2020-08-27 | 2021-07-28 | Dispositif de traitement d'image, système d'inspection et procédé d'inspection |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2023153431A (fr) |
| WO (1) | WO2022044673A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023171293A1 (fr) * | 2022-03-10 | 2023-09-14 | 住友重機械工業株式会社 | Dispositif d'inspection d'image, dispositif d'apprentissage automatique, procédé d'inspection d'image et programme d'inspection d'image |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5686987A (en) * | 1995-12-29 | 1997-11-11 | Orfield Associates, Inc. | Methods for assessing visual tasks to establish desirable lighting and viewing conditions for performance of tasks; apparatus; and, applications |
| JP2005055447A (ja) * | 1998-09-18 | 2005-03-03 | Hitachi Ltd | 欠陥検査方法及びその装置 |
| JP2019035609A (ja) * | 2017-08-10 | 2019-03-07 | オムロン株式会社 | 画像処理システム、設定支援装置および設定支援プログラム |
| JP2019101047A (ja) * | 2019-02-25 | 2019-06-24 | 株式会社アセット・ウィッツ | 部品外観自動検査装置 |
| JP2020042668A (ja) * | 2018-09-12 | 2020-03-19 | ファナック株式会社 | 検査装置及び機械学習方法 |
-
2020
- 2020-08-27 JP JP2020143073A patent/JP2023153431A/ja active Pending
-
2021
- 2021-07-28 WO PCT/JP2021/027936 patent/WO2022044673A1/fr active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5686987A (en) * | 1995-12-29 | 1997-11-11 | Orfield Associates, Inc. | Methods for assessing visual tasks to establish desirable lighting and viewing conditions for performance of tasks; apparatus; and, applications |
| JP2005055447A (ja) * | 1998-09-18 | 2005-03-03 | Hitachi Ltd | 欠陥検査方法及びその装置 |
| JP2019035609A (ja) * | 2017-08-10 | 2019-03-07 | オムロン株式会社 | 画像処理システム、設定支援装置および設定支援プログラム |
| JP2020042668A (ja) * | 2018-09-12 | 2020-03-19 | ファナック株式会社 | 検査装置及び機械学習方法 |
| JP2019101047A (ja) * | 2019-02-25 | 2019-06-24 | 株式会社アセット・ウィッツ | 部品外観自動検査装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023171293A1 (fr) * | 2022-03-10 | 2023-09-14 | 住友重機械工業株式会社 | Dispositif d'inspection d'image, dispositif d'apprentissage automatique, procédé d'inspection d'image et programme d'inspection d'image |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2023153431A (ja) | 2023-10-18 |
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