WO2022039858A1

WO2022039858A1 - Substrate processing chamber with side gas injection

Info

Publication number: WO2022039858A1
Application number: PCT/US2021/041907
Authority: WO
Inventors: Akshay Dhanakshirur; Huiyuan WANG; Rick Kustra; Kaushik Comandoor ALAYAVALLI; Bo QI; Abhijit B. MALLICK; Jay D. II PINSON
Original assignee: Applied Materials, Inc.
Priority date: 2020-08-19
Filing date: 2021-07-16
Publication date: 2022-02-24
Also published as: TW202213585A

Abstract

Embodiments of the present disclosure generally relate to apparatus and methods utilized in the manufacture of semiconductor devices, in one embodiment, a process chamber is disclosed that includes a lid assembly, a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume, a gas distribution assembly coupled to the lid assembly, a substrate support disposed and movable within the processing volume, and a plurality of nozzle devices coupled to the spacer between the substrate support and the gas distribution assembly, each of the plurality of nozzle devices in fluid communication with the processing volume.

Description

SUBSTRATE PROCESSING CHAMBER WITH SIDE GAS INJECTION

BACKGROUND

Field

[0001] Embodiments of the present disclosure generally relate to apparatus and methods utilized in the manufacture of semiconductor devices. More particularly, embodiments of the present disclosure relate to a substrate processing chamber, and components thereof, for forming semiconductor devices.

Description of the Related Art

[0002] Integrated circuits have evolved into complex devices that can include millions of transistors, capacitors and resistors on a single chip. The evolution of chip designs continually involves faster circuitry and greater circuit density. The demands for faster circuits with greater circuit densities impose corresponding demands on the materials used to fabricate such integrated circuits. In particular, as the dimensions of integrated circuit components are reduced to the sub-micron scale, there is a trend to use low resistivity conductive materials as well as low dielectric constant insulating materials to obtain suitable electrical performance from such components.

[0003] The demands for greater integrated circuit densities also impose demands on the process sequences used in the manufacture of integrated circuit components. For example, in process sequences that use conventional photolithographic techniques, a layer of energy sensitive resist is formed over a stack of material layers disposed on a substrate. The energy sensitive resist layer is exposed to an image of a pattern to form a photoresist mask. Thereafter, the mask pattern is transferred to one or more of the material layers of the stack using an etch process. The chemical etchant used in the etch process is selected to have a greater etch selectivity for the material layers of the stack than for the mask of energy sensitive resist. That is, the chemical etchant etches the one or more layers of the material stack at a rate much faster than the energy sensitive resist. The etch selectivity to the one or more material layers of the stack over the resist prevents the energy sensitive resist from being consumed prior to completion of the pattern transfer.

[0004] As the pattern dimensions are reduced, the thickness of the energy sensitive resist is correspondingly reduced in order to control pattern resolution. Such thin resist layers can be insufficient to mask underlying material layers during the pattern transfer process due to attack by the chemical etchant. An intermediate layer (e.g., silicon oxynitride, silicon carbine or carbon film), called a hardmask, is often used between the energy sensitive resist layer and the underlying material layers to facilitate pattern transfer because of greater resistance to the chemical etchant. Hardmask materials having both high etch selectivity and high deposition rates are often utilized. As critical dimensions (CD) decrease, current hardmask materials lack the desired etch selectivity relative to underlying materials (e.g., oxides and nitrides) and are often difficult to deposit. Thus, what is needed in the art are improved methods and apparatus for fabricating semiconductor devices.

SUMMARY

[ooos] Embodiments of the present disclosure generally relate to apparatus and methods utilized in the manufacture of semiconductor devices. More particularly, embodiments of the present disclosure relate to a substrate processing chamber, and components thereof, for forming semiconductor devices.

[0006] In one embodiment, a process chamber is disclosed that includes a lid assembly, a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume, a gas distribution assembly coupled to the lid assembly, a substrate support disposed and movable within the processing volume, and a plurality of nozzle devices coupled to the spacer between the substrate support and the gas distribution assembly, each of the plurality of nozzle devices in fluid communication with the processing volume.

[0007] In another embodiment, a process chamber is provided that includes a lid assembly, a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume, a gas distribution assembly coupled to the lid assembly and couplable to a first gas source, a substrate support disposed and movable within the processing volume, and a plurality of radially spaced dispersion nozzles coupled to the spacer between the substrate support and the gas distribution assembly, each of the plurality of dispersion nozzles couplable to a second gas source and in fluid communication with the processing volume.

[0008] In another embodiment, a process chamber is provided that includes a lid assembly, a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume, a gas distribution assembly coupled to the lid assembly and couplable to a first gas source, a substrate support disposed and movable within the processing volume, and a plurality of dispersion nozzles coupled to the spacer between the substrate support and the lid assembly, wherein the plurality of dispersion nozzles include a first set of nozzles and a second set of nozzles disposed in a second row vertically offset from the first row, and wherein each of the plurality of dispersion nozzles are couplable to a second gas source and in fluid communication with the processing volume.

BRIEF DESCRIPTION OF THE DRAWINGS

[0009] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, can be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this disclosure and are therefore not to be considered limiting of its scope, for the disclosure can admit to other equally effective embodiments.

[0010] Figure 1 is a schematic side cross sectional view of an illustrative processing chamber according to an embodiment.

[0011] Figure 2 is a side sectional view of the lid assembly of Figure 1 showing details of the plurality of nozzle devices. [0012] Figure 3 is an enlarged view of one of the nozzle devices of Figure 2.

[0013] Figure 4 is a side view of a mounting structure for the nozzle devices, according to one embodiment.

[0014] Figure 5 is a side sectional view of a portion of a mounting structure and a dispersion nozzle, according to one embodiment.

[0015] Figures 6A-6C are schematic diagrams showing different embodiments of nozzle patterns provided by the nozzle devices as described herein.

[0016] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

DETAILED DESCRIPTION

[0017] Embodiments of the present disclosure relate to a substrate processing chamber utilized in substrate processing in the manufacture of electronic devices. Substrate processing includes deposition processes, etch processes, as well as other low pressure, processes, plasma processes, and/or thermal processes used to manufacture electronic devices on substrates. Examples of processing chambers and/or systems that may be adapted to benefit from exemplary aspects of the disclosure are chambers commercially available from Applied Materials, Inc., located in Santa Clara, California. It is contemplated that other processing chambers and/or processing platforms, including those from other manufacturers, may be adapted to benefit from aspects of the disclosure.

[0018] Embodiments of the deposition chamber disclosed herein may be utilized for the fabrication of memory devices, and in particular, for the deposition of hardmasks utilized during fabrication of memory devices. Current memory devices are able to retain stored data for a very long period of time without applying a voltage thereto, and the reading rate of such memory devices is relatively high. It is relatively easy to erase stored data and rewrite data into the memory devices. Thus, memory devices have been widely used in microcomputers, and automatic control systems, etc.

[0019] To increase the bit density and reduce the cost per bit of memory devices, 3D NAND (three-dimensional not AND) memory devices have been developed. Other memory devices, such as DRAM (dynamic random access memory), EM (expanded memory) and ReRAM (resistive random access memory), as well as advanced hardmask materials for forming the same, are also being developed to further facilitate advances in the semiconductor industry.

[0020] Vertical gate 3D memory cells are being explored for 3D NAND technologies to reduce cost as the number of memory cell layers increase. Oxide/silicon and oxide/nitride layer stacks are useful due to material integration advantages, but with an increasing number of memory cell layers, thickness of the layers becomes a limiting factor. Thus, while there is an interest in reducing the thickness of the memory cell layers, issues of oxide quality (i.e., breakdown voltage), silicon resistivity, and high aspect ratio etching persist with the reduced layer thickness.

[0021] Figure 1 is a schematic side cross sectional view of an illustrative processing chamber 100 suitable for conducting a deposition process. In one embodiment, which can be combined with other embodiments described herein, the processing chamber 100 may be configured to deposit advanced patterning films onto a substrate, such as hardmask films, for example amorphous carbon hardmask films.

[0022] The processing chamber 100 includes a lid assembly 105, a spacer 110 disposed on a chamber body 192, a substrate support 115, and a variable pressure system 120. An edge ring 118 is shown surrounding the substrate support 115. The lid assembly 105 includes a lid plate 125 and a heat exchanger 130. In the embodiment shown, which can be combined with other embodiments described herein, the lid assembly 105 includes a concave or dome-shaped gas introduction plate (shown as a dome structure 135). [0023] The lid assembly 105 is coupled to a first processing gas source 140. The first processing gas source 140 contains precursor gases for forming films on a substrate 145 supported on the substrate support 115. As an example, the first processing gas source 140 includes precursor gases such as carbon containing gases, hydrogen containing gases, or combinations thereof. The first processing gas source 140 provides precursors gases to a gas distribution assembly 137 disposed in the lid assembly 105. The lid assembly includes one or more channels for directing precursor gases from the first processing gas source 140 into a processing volume 160 formed inside the spacer 110 between the lid assembly 105 and the substrate 145.

[0024] In some embodiments, which can be combined with other embodiments described herein, a second processing gas source 142 is fluidly coupled to the processing volume 160 via a plurality of nozzle devices 144 disposed through the spacer 110. As an example, the second processing gas source 142 includes precursor gases such as carbon containing gases, hydrogen containing gases, or combinations thereof. The flow of precursor gases in the processing volume 160 via the second processing gas source 142 modulates the flow of precursor gases through the nozzle devices 144 such that the precursor gases are uniformly distributed in the processing volume 160. In one example, the plurality of nozzle devices 144 may be radially distributed in equal increments about the spacer 110. In such an example, gas flow to each of the nozzle devices 144 may be separately controlled to further facilitate gas uniformity within the processing volume 160.

[0025] The lid assembly 105 is shown coupled to an optional remote plasma source 150. The remote plasma source 150 is coupled to a cleaning gas source 155 for providing cleaning gases to the processing volume 160.

[0026] The dome structure 135 is formed in a body 136 of the lid assembly 105. The dome structure 135 is coupled to the remote plasma source 150 by a flange 162 having an opening 164 formed axially therethrough to facilitate flow of plasma through the flange 162. [0027] In one example, cleaning gases are provided from the remote plasma source 150 through the flange 162. In another example, cleaning gases are provided through the same channels which direct precursor gases from the first processing gas source 140. Example cleaning gases include oxygen-containing gases such as oxygen and/or ozone, as well fluorine containing gases such as NF₃, or combinations thereof.

[0028] The gas distribution system of the lid assembly 105 includes the first processing gas source 140 and a purge gas source 166. Both of the first processing gas source 140 and the purge gas source 166 are coupled to the gas distribution assembly 137 by valves (not shown). The gas distribution assembly 137 also includes a baffle plate 168. The baffle plate 168 is utilized to spread excited cleaning gases from the remote plasma source 150 as well as purge and precursor gases from the purge gas source 166 and the first processing gas source 140, respectively. The baffle plate 168 is coupled to the gas distribution assembly 137 by one or more brackets 172. The brackets 172 are spaced at equal angular distances (such as three brackets spaced at 120 degrees) in a spoke-and-hub configuration. The baffle plate 168 also includes a central opening 174. The central opening 174 may be utilized to deliver one or both of the processing gases and the purge gases from the respective sources.

[0029] The lid assembly 105 includes the heat exchanger 130 to maintain a desired temperature of the lid assembly 105. The heat exchanger 130 includes an inlet 176 and an outlet 177. Heat exchanging fluids flow from the inlet 176, through channels 179 formed in the dome structure 135, and out of the outlet 177.

[0030] In addition to, or as an alternative to, the remote plasma source 150, the lid assembly 105 may be coupled to a first radio frequency (RF) power source 190. The first RF power source 190 facilitates maintenance or generation of plasma, such as a plasma generated from a cleaning gas. In one example, the remote plasma source 150 is omitted, and the cleaning gas is ionized into a plasma in situ via the first RF power source 190. The substrate support 115 is coupled to a second or lower RF power source 170. The first RF power source 190 may be a high frequency RF power source (for example, about 13.56 MHz to about 120 MHz) and the second RF power source 170 may be a low frequency RF power source (for example, about 2 MHz to about 13.56 MHz). It is to be noted that other frequencies are also contemplated. In some implementations, the second RF power source 170 is a mixed frequency RF power source, providing both high frequency and low frequency power. Utilization of a dual frequency RF power source, particularly for the second RF power source 170, improves film deposition. In one example, utilizing a second RF power source 170 provides dual frequency powers.

[0031] One or both of the first RF power source 190 and the second RF power source 170 are utilized in creating or maintaining a plasma in the processing volume 160. For example, the second RF power source 170 may be utilized during a deposition process and the first RF power source 190 may be utilized during a cleaning process (alone or in conjunction with the remote plasma source 150). In some deposition processes, the first RF power source 190 is used in conjunction with the second RF power source 170. During a deposition or etch process, one or both of the first RF power source 190 and the second RF power source 170 provide a power of about 100 Watts (W) to about 20,000 W in the processing volume 160 to facilitation ionization of a precursor gas. In one embodiment, which can be combined with other embodiments described herein, at least one of the first RF power source 190 and the second RF power source 170 are pulsed.

[0032] The substrate support 115 is coupled to an actuator 175 (i.e., a lift actuator) that provides movement thereof in the Z direction. The substrate support 115 is also coupled to a facilities cable 178 that is flexible which allows vertical movement of the substrate support 115 while maintaining communication with the second RF power source 170 as well as other power and fluid connections. The spacer 110 is disposed on the chamber body 192. A height of the spacer 110 allows movement of the substrate support 115 vertically within the processing volume 160. The height of the spacer 110 is about 0.5 inches to about 20 inches. In one example, the substrate support 115 is movable from a first distance 180A to a second distance 180B relative to the lid assembly 105 (for example, relative to a lower surface of the dome structure 135). In one embodiment, the second distance 180B is about 2/3 of the first distance 180A. For example, the difference between the first distance 180A and the second distance is about 5 inches to about 6 inches. Thus, from the position shown in Figure 1 , the substrate support 115 is movable by about 5 inches to about 6 inches relative to a lower surface of the dome structure 135. In another example, the substrate support 115 is fixed at one of the first distance 180A and the second distance 180B. In contrast to conventional plasma enhanced chemical vapor deposition (PECVD) processes, the spacer 110 greatly increases the distance between (and thus the volume between) the substrate support 115 and the lid assembly 105. The increased distance between the substrate support 115 and the lid assembly 105 reduces collisions of ionized species in the processing volume 160, resulting in deposition of film with less neutral stress, such as less than 2.5 gigapascal (GPa). Films deposited with less neutral stress facilitate improved planarity (e.g., less bowing) of substrates upon which the film is formed. Reduced bowing of substrates results in improved precision of downstream patterning operations.

[0033] The variable pressure system 120 includes a first pump 182 and a second pump 184. The first pump 182 is a roughing pump that may be utilized during a cleaning process and/or substrate transfer process. A roughing pump is generally configured for moving higher volumetric flow rates and/or operating a relatively higher (though still sub-atmospheric) pressure. In one example, the first pump 182 maintains a first pressure within the processing chamber during a cleaning process. In another example, the first pump 182 maintains a second pressure within the processing chamber that is less than the first pressure. Utilization of a roughing pump during cleaning operations facilitates relatively higher pressures and/or volumetric flow of cleaning gas (as compared to a deposition operation). The relatively higher pressure and/or volumetric flow during the cleaning operation improves cleaning of chamber surfaces. [0034] The second pump 184 may be a turbo pump or a cryogenic pump. The second pump 184 is utilized during a deposition process. The second pump 184 is generally configured to operate a relatively lower volumetric flow rate and/or pressure. For example, the second pump 184 is configured to maintain the processing volume 160 of the process chamber at a pressure of less than atmospheric pressure. The process chamber 100 is configured to utilize both relatively lower vacuum pressures to improve deposition and relatively higher vacuum pressures to improve cleaning.

[0035] In some embodiments, which can be combined with other embodiments described herein, both of the first pump 182 and the second pump 184 are utilized during a deposition process to maintain the processing volume 160 of the process chamber at a high vacuum pressure (/.e. , a first pressure). In other embodiments, the first pump 182 and the second pump 184 maintain the processing volume 160 at a vacuum pressure (i.e., a second pressure) lower than the first pressure. A valve 186 is utilized to control the conductance path to one or both of the first pump 182 and the second pump 184. The valve 186 also provides symmetrical pumping from the processing volume 160.

[0036] The processing chamber 100 also includes a substrate transfer port 185. The substrate transfer port 185 is selectively sealed by an interior door 186A and an exterior door 186B. Each of the doors 186A and 186B are coupled to actuators 188 (i.e., a door actuator). The doors 186A and 186B facilitate vacuum sealing of the processing volume 160. The doors 186A and 186B also provide symmetrical RF application and/or plasma symmetry within the processing volume 160. In one example, at least the door 186A is formed of a material that facilitates conductance of RF power, such as stainless steel, aluminum, or alloys thereof. Seals 116, such as O-rings, disposed at the interface of the spacer 110 and the chamber body 192 may further seal the processing volume 160. A controller 194 coupled to the processing chamber 100 is configured to control aspects of the processing chamber 100 during processing. [0037] Figure 2 is a side sectional view of the lid assembly 105 of Figure 1 showing details of the plurality of nozzle devices 144 disposed in or on the spacer 110. Figure 3 is an enlarged view of one of the nozzle devices 144 of Figure 2,

[0038] As shown in Figure 2, the plurality of nozzle devices 144 include an upper or first row 200A and a lower or second row 200B. The first row 200A and the second row 200B are spaced apart vertically and laterally. Both of the first row 200A and the second row 200B of nozzle devices 144 are equally spaced in a radial orientation about the spacer 110 in some embodiments.

[0039] Each of the nozzle devices 144 include a dispersion nozzle 205. Each dispersion nozzle 205 includes a tip 210 and a base 215. In some embodiments, the tips 210 of the nozzle devices 144 define a diameter 220 that is greater than a diameter of a substrate (not shown). For example, if a 300 millimeter (mm) substrate is used, the diameter 220 of the nozzle devices 144 is greater than 300 mm, such as about 330 mm to about 345 mm (+/- 25 mm).

[0040] As shown in Figure 2, the dispersion nozzles 205 of the nozzle devices 144 along the first row 200A and the second row 200B are disposed at an angle a relative to vertical (i.e., the height direction of the spacer 110 (Z direction)). The angle a of each of the dispersion nozzles 205 in the first row 200A may be the same or different than the angle a of each of the dispersion nozzles 205 in the second row 200B. In some embodiments, the angle a of each of the dispersion nozzles 205 of the first row 200A is about 20 degrees relative to a plane of an inner surface of the spacer 110 (or 160 degrees on the other side of the dispersion nozzles 205). In some embodiments, the angle a of each of the dispersion nozzles 205 of the second row 200B is about 10 degrees relative to a plane of an inner surface of the spacer 110 (or 170 degrees on the other side of the dispersion nozzles 205). The dispersion nozzles 205 of each of the first row 200A and the second row 200B are angled downward but may also be angled upward in some embodiments. In addition, some dispersion nozzles 205 may be angled upward and some angled downward. [0041] Referring to Figure 3, the nozzle devices 144 include a mounting structure 300 that couples in or on the spacer 110. The mounting structure 300 includes a fixed mounting plate 305 which receives a nozzle adapter 310. The mounting structure 300 also includes a manifold plate 315 coupled to the nozzle adapter 310. A gas supply tubing system 330 is attached to the manifold plate 315. The tubing system 330 is fluidly coupled to the second processing gas source 142 shown in Figure 1. The tubing system 330 is recursive in one embodiment. Recursive may be defined as the equal splitting of fluid lines or conduits coupled between the nozzle devices 144 and the second processing gas source 142, for example, from one conduit into two conduits, two conduits into four conduits, four conduits into eight conduits, eight conduits into sixteen conduits, and so on. Additionally, each leg of the split is same length, hydraulic diameter, and shape, so each leg of the tubing system 330 has the same flow conductance.

[0042] In the embodiment shown, the spacer 110 includes an opening 335 for each of the mounting structures 300 and nozzle devices 144. The fixed mounting plate 305 is welded or otherwise sealably joined to the outer surface of the spacer 110. The nozzle adapter 310 includes a bore 332 formed at a desired angle that receives the base 215 of the dispersion nozzle 205. The bore 332 may be angled such that the dispersion nozzle 205 is fixed to the nozzle adapter 310 at the angle a (Figure 2). The nozzle adapter 310 may be replaced with another adapter that includes a bore 332 formed at a different angle. Other portions of the mounting structure 300 are fastened to the fixed mounting plate 305 as will be described in Figure 4.

[0043] Figure 4 is a side view of the mounting structure 300. The nozzle adapter 310 is coupled to the fixed mounting plate 305 (not shown) by fasteners 400. The manifold plate 315 is coupled to the nozzle adapter 310 by fasteners 405. The fasteners 400 and 405 may be screws or bolts. The manifold plate 315 also includes a central inlet 410 that couples to the tubing system 330. Seals 340 (shown in Figure 3), such as O-rings, are positioned between the fixed mounting plate 305 and the nozzle adapter 310, and the nozzle adapter 310 and the manifold plate 315, to prevent leakage of precursor gases.

[0044] Figure 5 is a side sectional view of a portion of the mounting structure 300 and one embodiment of the dispersion nozzle 205. The dispersion nozzle 205 includes a central conduit 500 formed from the base 215 to near the tip 210. The central conduit 500 is fluidly coupled to an orifice hole 505 at the tip 210. The orifice hole 505 includes a diameter 507 that is less than a diameter 510 of the central conduit 500. The orifice hole 505 is sized to control velocity of the precursor gases exiting the tip 210.

[0045] The dispersion nozzle 205 includes a length 515. The length 515 can be adjusted depending on the desired coverage of the precursor gases relative to the substrate. For example, the length 515 can be longer for some of the dispersion nozzles 205 for center deposition on a substrate. Likewise, the length 515 can be shorter for some of the dispersion nozzles 205 for edge deposition on a substrate. The length 515 of the dispersion nozzles 205 can vary between the first row 200A and the second row 200B (both shown in Figure 2). Alternatively, the length 515 of the dispersion nozzles 205 can vary within each of the first row 200A and the second row 200B.

[0046] In some embodiments, the length 515 of the dispersion nozzles 205 is about 20 mm to about 70 mm, for example about 45 mm (+/- 25 mm). In some embodiments, the length 515 of the dispersion nozzles 205 in the first row 200A is the same as or different than the length 515 of the dispersion nozzles 205 in the second row 200B.

[0047] The base 215 of the dispersion nozzle 205 is attached to the nozzle adapter 310 via a threaded connection 520 formed at least partially in the bore 332. A seal 340 such as an O-ring is positioned between the base 215 and a surface of the nozzle adapter 310 to prevent leakage of precursor gases.

[0048] Figures 6A-6C are schematic diagrams showing different embodiments of nozzle patterns 600A-600C, respectively. The nozzle patterns 600A-600C represent various spatial orientations of the plurality of nozzle devices 144 to tune deposition on a substrate 145. Each of the nozzle patterns 600A- 600C represent a gas injection path 605 of the plurality of nozzle devices 144 in different directions or orientations relative to a center 610 of the substrate 145 (shown in Figures 6B and 6C) and/or the spacer 110. Each of the nozzle patterns 600A-600C represent a gas injection path 605 of the plurality of nozzle devices 144 in different directions or orientations relative to a radial direction 615 relative to the spacer 110.

[0049] In Figure 6A, a nozzle pattern 600A consists of a gas injection path 605 along the radial direction 615. In this embodiment, the gas injection path 605 of each of the plurality of nozzle devices 144 at least partially overlap and generally converge at a center 610 of the substrate 145 and/or the spacer 110.

[0050] In Figure 6B, a nozzle pattern 600B consists of a gas injection path 605 offset from the radial direction 615. In this embodiment, the gas injection path 605 of each of the plurality of nozzle devices 144 are offset from the radial direction 615 by an angle 620. The angle 620 may be used alone or in combination with the angle a shown in Figure 2. In one embodiment, the plurality of nozzle devices 144 in either or both of the first row 200A and the second row 200B shown in Figure 2 are angled at compound orientations when the angle a and the angle 620 are used. In some embodiments, the gas injection paths 605 generally converge at a radial position 630 that is not at the center 610 of the substrate 145 and/or the spacer 110. The radial position 630 may be any portion of the substrate 145. For example, the radial position 630 may be 10 mm, 20 mm, 30 mm, 50 mm, 60 mm, or greater. The gas injection path 605 according to this embodiment can be used to provide higher deposition rates at the radial position 630 relative to other radial positions on the substrate 145.

[0051] In Figure 6C, a nozzle pattern 600C consists of a gas injection path 605 along the radial direction 615 similar to Figure 6A. However, in this embodiment, the gas injection paths 605 generally converge at the radial position 630 that is not at the center 610 of the substrate 145 and/or the spacer 110. The gas injection path 605 according to this embodiment can be used to provide higher deposition rates at the radial position 630 relative to other radial positions on the substrate 145.

[0052] Multiple tests were conducted using the plurality of nozzle devices 144 alone, or in combination with, the gas distribution assembly 137 shown in Figure 1 . Various pressures were also tested in conjunction with one or a combination of the plurality of nozzle devices 144 and the gas distribution assembly 137. In the tests, percent non-uniform ity (NU %) of films were observed with a reduction in NU % when using the gas distribution assembly 137 alone, the plurality of nozzle devices 144 alone, or a combination of the gas distribution assembly 137 and the plurality of nozzle devices 144. In the testing, it was determined that NU % as well deposition profile across a substrate could be modulated. In addition, testing showed varying pressure as well as varying injection through one or both of the gas distribution assembly 137 and the plurality of nozzle devices 144 had a significant effect on film uniformity. Additional testing showed a decrease in NU % when using both of the gas distribution assembly 137 and the plurality of nozzle devices 144 in combination.

[0053] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure can be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

Claims:

1 . A process chamber, comprising: a lid assembly; a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume; a gas distribution assembly coupled to the lid assembly: a substrate support disposed and movable within the processing volume; and a plurality of nozzle devices coupled to the spacer between the substrate support and the gas distribution assembly, each of the plurality of nozzle devices in fluid communication with the processing volume.

2. The process chamber of claim 1 , wherein the plurality of nozzle devices include a first set of nozzle devices disposed in a first row and a second set of nozzle devices disposed in a second row that is offset from the first row.

3. The process chamber of claim 2, wherein the first set of nozzle devices are vertically angled at a first angle and the second set of nozzle devices are vertically angled at a second angle that is greater than the first angle.

4. The process chamber of claim 3, wherein a portion of one or both of the first set of nozzle devices and the second set of nozzle devices are angled in a radial direction.

5. The process chamber of claim 1 , wherein the each of the plurality of nozzle devices includes a mounting structure coupled to the spacer.

6. The process chamber of claim 5, wherein the mounting structure includes a nozzle adapter having a bore formed therein for receiving a dispersion nozzle.

7. The process chamber of claim 6, wherein the bore is vertically angled.

8. The process chamber of claim 6, wherein the bore is angled relative to a radial direction.

9. The process chamber of claim 1 , wherein the lid assembly comprises a heat exchanger.

10. A process chamber, comprising: a lid assembly; a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume; a gas distribution assembly coupled to the lid assembly and couplable to a first gas source; a substrate support disposed and movable within the processing volume; and a plurality of radially spaced dispersion nozzles coupled to the spacer between the substrate support and the gas distribution assembly, each of the plurality of dispersion nozzles couplable to a second gas source and in fluid communication with the processing volume.

11. The process chamber of claim 10, wherein the plurality of dispersion nozzles include a first set of nozzles and a second set of nozzles disposed in a second row.

12. The process chamber of claim 11 , wherein the first set of nozzles are vertically angled at a first angle and the second set of nozzles are vertically angled at a second angle that is greater than the first angle.

13. The process chamber of claim 12, wherein a portion of one or both of the first set of nozzles and the second set of nozzles are angled in a radial direction.

14. The process chamber of claim 10, wherein the each of the plurality of dispersion nozzles includes a mounting structure coupled to the spacer.

15. The process chamber of claim 10, wherein each of the dispersion nozzles are coupled to a recursive tubing system.

16. A process chamber, comprising: a lid assembly; a chamber body coupled to the lid assembly by a spacer, the spacer and the chamber body defining a processing volume; a gas distribution assembly coupled to the lid assembly and couplable to a first gas source; a substrate support disposed and movable within the processing volume; and a plurality of dispersion nozzles coupled to the spacer between the substrate support and the lid assembly, wherein the plurality of dispersion nozzles include a first set of nozzles and a second set of nozzles disposed in a second row vertically offset from the first row, and wherein each of the plurality of dispersion nozzles are couplable to a second gas source and in fluid communication with the processing volume.

17. The process chamber of claim 16, wherein the first set of nozzles are vertically angled at a first angle and the second set of nozzles are vertically angled at a second angle that is greater than the first angle.

18. The process chamber of claim 17, wherein a portion of one or both of the first set of nozzles and the second set of nozzles are angled in a radial direction.

19. The process chamber of claim 16, wherein a portion of one or both of the first set of nozzles and the second set of nozzles are angled in a radial direction.

20. The process chamber of claim 16, wherein each of the dispersion nozzles is coupled to a recursive tubing system.