WO2022016734A1 - 集成光学相控阵及其控制方法 - Google Patents

集成光学相控阵及其控制方法 Download PDF

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WO2022016734A1
WO2022016734A1 PCT/CN2020/125444 CN2020125444W WO2022016734A1 WO 2022016734 A1 WO2022016734 A1 WO 2022016734A1 CN 2020125444 W CN2020125444 W CN 2020125444W WO 2022016734 A1 WO2022016734 A1 WO 2022016734A1
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light
phase
waveguide
phased array
optical phased
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French (fr)
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白雅文
林天华
储涛
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/2676—Optically controlled phased array

Definitions

  • the present application relates to the technical field of optical phased arrays, and in particular, to an integrated optical phased array and a control method thereof.
  • a beam splitter is used to divide a laser beam into multiple beams, phase modulation is performed on each beam with a specific phase shift, and then the beam is emitted through an optical antenna to realize the laser beam in space. deflection or shaping.
  • the present application aims to solve one of the technical problems in the related art at least to a certain extent.
  • one purpose of the present application is to propose an integrated optical phased array, which can realize on-chip optical rotation, solve the problem of crosstalk caused by the poor binding of the grating antenna to the mode field in the existing optical phased array, and can reduce the size of the device , to solve the problem of large size caused by the fact that the arrangement spacing of the existing optical phased array grating antenna units cannot be reduced to half of the wavelength.
  • Another object of the present application is to propose a control method using an integrated optical phased array.
  • an embodiment of the present application proposes an integrated optical phased array, including: a laser, a beam splitter, a phase shifter, a dense waveguide, a slab waveguide and a curved grating; the laser is used to generate a light source, and The light source is input into the beam splitter to obtain multiple beams of light; the phase shifter is used for phase modulation of each beam of light, and each beam of light after phase modulation is input into the dense waveguide; the dense waveguide uses The phase-modulated light beams are coupled into the slab waveguide, and the slab waveguide is used to lightly deflect each light beam, and each light beam after the light deflection is emitted through the curved grating.
  • a laser is used to generate a light source, and the light source is input into a beam splitter to obtain multiple beams of light; the phase shifter is used to phase-modulate each beam of light, and convert each A beam of light is input into the dense waveguide; the dense waveguide is used to couple the phase-modulated beam into the slab waveguide, and the slab waveguide is used to couple the multiple beams into one beam and then deflect the light, and pass the deflected beam through the Curved grating emission.
  • the problem of crosstalk caused by the poor binding of the grating antenna to the mode field in the existing optical phased array is solved, and the problem of the existing optical phased array grating antenna unit arrangement spacing cannot be reduced to half of the wavelength.
  • the size of the problem is larger, the purpose of realizing on-chip optical rotation, and reducing the size of the device.
  • the integrated optical phased array according to the above embodiments of the present application may also have the following additional technical features:
  • the beam splitter is composed of a cascade of 1 ⁇ 2 multi-mode interference beam splitters or a star coupler.
  • the phase shifter is formed of a thermo-optic phase shifter or an electro-optic phase shifter.
  • the phase shifter is used to perform phase modulation on each beam of light, including:
  • ⁇ is the wavelength
  • d is the adjacent waveguide
  • the dense waveguide uses a waveguide array structure based on sinusoidal spatial modulation.
  • each light beam is emitted from the dense waveguide, and the transmission field in the slab waveguide is:
  • ⁇ is the working wavelength
  • d 0 is the array element interval, when the order m ⁇ 0,
  • a second aspect embodiment of the present application proposes a control method using an integrated optical phased array, including: acquiring a light source, and splitting the light source to obtain multiple beams of light; Each beam of light in the light is phase-modulated; each beam of light after phase modulation is coupled into a slab waveguide through a dense waveguide; the slab waveguide is used for optically deflecting each beam, and deflecting the Each beam is emitted through the curved grating.
  • the light source is obtained, and the light source is subjected to beam splitting to obtain multiple beams of light; phase modulation is performed on each beam of the multiple beams of light; Each modulated light beam is coupled into the slab waveguide through the dense waveguide; the slab waveguide is used to lightly deflect the coupled light beam, and the deflected light beam is emitted through the curved grating.
  • on-chip optical rotation is achieved, and the purpose of reducing the size of the device is achieved.
  • control method using the integrated optical phased array according to the above embodiments of the present application may also have the following additional technical features:
  • the performing phase modulation on each of the multiple beams of light includes:
  • ⁇ is the wavelength
  • d is the adjacent waveguide
  • the slab waveguide is used to deflect each beam of light, including:
  • Each beam emanates from the dense waveguide, where the slab waveguide has a transmission field of:
  • FIG. 1 is a schematic diagram of an existing optical phased array according to an embodiment of the application.
  • FIG. 2 is a structural example diagram of an integrated optical phased array according to an embodiment of the application.
  • FIG. 3 is a schematic diagram of an on-chip integrated optical phased array without crosstalk according to an embodiment of the present application
  • FIG. 4 is a simulation diagram of an optical phased array implementation process according to an embodiment of the application.
  • FIG. 5 is a schematic flowchart of a control method for applying an integrated optical phased array provided by an embodiment of the present application.
  • FIG. 2 is a structural example diagram of an integrated optical phased array according to an embodiment of the present application.
  • the integrated optical phased array method for generating high-speed video from a single motion blurred image includes: a laser 1, a beam splitter 2, a phase shifter 3, a dense waveguide 4, a slab waveguide 5 and a curved grating 6 .
  • the laser 1 is used to generate a light source, and the light source is input into the beam splitter 2 to obtain multiple beams of light.
  • the phase shifter 3 is used to perform phase modulation on each beam of light, and input each beam of light after phase modulation into the dense waveguide 4 .
  • the dense waveguide 4 is used to couple the phase-modulated light beams into the slab waveguide 5
  • the slab waveguide 5 is used to couple multiple light beams into one beam and then deflect the light, and transmit the deflected light beam through the curved grating 6 .
  • the light emitted by the laser 1 is divided into multiple beams by the beam splitter 2, and then coupled to the slab waveguide 5 through the dense waveguide 4, and phase modulation is performed on each beam on the dense waveguide 4 with a specific phase shift added.
  • the phase deflection is completed on the chip, and it is emitted through the curved grating, so as to realize the deflection or shaping of the laser beam on the chip.
  • the difference is that the existing optical phased array realizes light deflection in space, while the present application realizes beam deflection and on-chip light rotation in a slab waveguide. Due to the limitation of the mode field of the grating antenna, the crosstalk of light in the waveguide is smaller than that in the grating antenna, so the optical phased array that eliminates the crosstalk is realized. The size of the existing optical phased array is too large due to the spacing requirement of the grating antenna, the present application reduces the size of the device by using a waveguide.
  • the beam splitter 2 realizes the function of uniform light splitting, and may be composed of a cascade connection of 1 ⁇ 2 multi-mode interference beam splitters or a star coupler.
  • the phase shifter 3 is constituted by a thermo-optical phase shifter or an electro-optical phase shifter.
  • the phase shifter 3 is used to perform phase modulation on each beam of light, including:
  • ⁇ is the wavelength
  • d is the adjacent waveguide
  • the dense waveguide 4 uses a waveguide array structure based on sinusoidal spatial modulation. It can be understood that the dense waveguide 4 couples the phase-modulated beam into the slab waveguide 5, and the structure has large bandwidth, low loss, and crosstalk. It can reach below -40dB, and the spacing of the output waveguide array arrangement can be reduced to half of the wavelength, avoiding the appearance of grating lobes and solving the large crosstalk caused by the use of grating antennas in the existing optical phased arrays The problem.
  • the slab waveguide 5 is used to complete the on-chip light rotation, each light beam is emitted from the dense waveguide 4, and the transmission field in the slab waveguide 5 is:
  • ⁇ is the working wavelength
  • d 0 is the array element interval, when the order m ⁇ 0,
  • the curved grating 6 can realize the emission of light beams with a specific deflection angle from the flat plate area, thereby realizing the function of an optical phased array.
  • an integrated optical phased array on a chip without crosstalk includes: a laser 1, a beam splitter 2, a shifter Phase device 3, dense waveguide 4, slab waveguide 5 and curved grating 6.
  • the beam splitter 2 can be composed of a cascade of 1 ⁇ 2 multi-mode interference (MMI) beam splitters or a star coupler to realize the function of uniform light splitting.
  • MMI multi-mode interference
  • the phase shifter 3 can be composed of an electro-optical phase shifter or a thermo-optical phase shifter, which can realize the phase modulation of each beam of light and add a specific phase shift function.
  • the dense waveguide 4 uses a waveguide array structure based on sinusoidal spatial modulation, which can realize the coupling of the phase-modulated light beam into the slab waveguide 5 .
  • the slab waveguide 5 is used to complete the on-chip optical rotation.
  • the equiphase plane is no longer perpendicular to the waveguide direction, but has a certain deflection, and the beams satisfying the equiphase relationship will be coherent and constructive.
  • the beams that do not meet the equal-phase condition will cancel each other, so the direction of the beam is always perpendicular to the equal-phase plane, thereby realizing on-chip light deflection.
  • mode solutions multi-functional waveguide mode solving and propagation simulation simulation software
  • the optical phased array with a sweep angle of 60° at 1550 nm is simulated, and the slab waveguide material is SiON.
  • the simulation results are shown in Figure 3, and it has been verified that on-chip light deflection can be achieved.
  • Figure 4(a) is a -30° light field diagram
  • Figure 4(b) is a 30° light field diagram
  • Figure 4(c) is -30° far-field image
  • Figure 4(d) is a 30° far-field image.
  • the curved grating 6 can realize the function of emitting light beams that have completed a specific deflection angle from the plate area, thereby realizing the function of optical phased array beam deflection.
  • a laser is used to generate a light source, and the light source is input into a beam splitter to obtain multiple beams of light; the phase shifter is used to phase-modulate each beam of light, and convert each A beam of light is input into the dense waveguide; the dense waveguide is used to couple the phase-modulated beam into the slab waveguide, and the slab waveguide is used to optically deflect the coupled beam and emit the deflected beam through the curved grating. Therefore, the problem of crosstalk caused by the poor binding of the grating antenna to the mode field in the existing optical phased array is solved, and the problem of the existing optical phased array grating antenna unit arrangement spacing cannot be reduced to half of the wavelength. The size of the problem is larger, the purpose of realizing on-chip optical rotation, and reducing the size of the device.
  • the present application also proposes a control method using an integrated optical phased array.
  • FIG. 5 is a schematic flowchart of a control method for applying an integrated optical phased array provided by an embodiment of the present application.
  • the method includes:
  • step 101 a light source is acquired, and multiple beams of light are obtained by splitting the light source.
  • Step 102 Perform phase modulation on each of the multiple beams of light.
  • each beam of light after phase modulation is coupled into the slab waveguide through the dense waveguide.
  • step 104 the slab waveguide is used for light deflection of the coupled light beam, and the light beam after the light deflection is emitted through the curved grating.
  • phase modulation is performed on each of the multiple beams of light, including:
  • ⁇ is the wavelength
  • d is the adjacent waveguide
  • the slab waveguide is used to deflect each beam of light, including:
  • Each beam is emitted from a dense waveguide, and the propagation field in the slab waveguide is:
  • ⁇ is the working wavelength
  • d 0 is the array element interval, when the order m ⁇ 0,
  • multiple beams of light are obtained by acquiring a light source, and the light source is subjected to beam splitting processing; phase modulation is performed on each beam of the multiple beams;
  • the beam of light is coupled into the slab waveguide through the dense waveguide; the slab waveguide is used to lightly deflect the coupled light beam, and the deflected light beam is emitted through the curved grating.
  • first and second are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature delimited with “first”, “second” may expressly or implicitly include at least one of that feature.
  • plurality means at least two, such as two, three, etc., unless expressly and specifically defined otherwise.
  • a "computer-readable medium” can be any device that can contain, store, communicate, propagate, or transport the program for use by or in connection with an instruction execution system, apparatus, or apparatus.
  • computer readable media include the following: electrical connections with one or more wiring (electronic devices), portable computer disk cartridges (magnetic devices), random access memory (RAM), Read Only Memory (ROM), Erasable Editable Read Only Memory (EPROM or Flash Memory), Fiber Optic Devices, and Portable Compact Disc Read Only Memory (CDROM).
  • the computer readable medium may even be paper or other suitable medium on which the program may be printed, as the paper or other medium may be optically scanned, for example, followed by editing, interpretation, or other suitable medium as necessary process to obtain the program electronically and then store it in computer memory.
  • each functional unit in each embodiment of the present application may be integrated into one processing module, or each unit may exist physically alone, or two or more units may be integrated into one module.
  • the above-mentioned integrated modules can be implemented in the form of hardware, and can also be implemented in the form of software function modules. If the integrated modules are implemented in the form of software functional modules and sold or used as independent products, they may also be stored in a computer-readable storage medium.
  • the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, and the like.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

本申请提出一种集成光学相控阵及其控制方法，应用于光学相控阵领域，其中，集成光学相控阵，包括：激光器、分束器、移相器、密集波导、平板波导和弯曲光栅；激光器用于产生光源，并将光源输入分束器得到多束光；移相器用于对每一束光进行相位调制，并将相位调制后的每一束光输入密集波导；密集波导用于将相位调制后的光束耦合入平板波导内，以及平板波导用于将多束光耦合成一束后进行光偏转，并将光偏转后的光束通过所述弯曲光栅发射。由此，解决了现有光学相控阵因光栅天线对模场束缚性差而产生串扰的问题，以及现有光学相控阵光栅天线单元排列的间距无法减小到波长的二分之一而产生的尺寸较大的问题。

Description

集成光学相控阵及其控制方法
相关申请的交叉引用
本申请基于申请号为202010705016.8、申请日为2020年07月21日的中国专利申请提出，并要求该中国专利申请的优先权，该中国专利申请的全部内容在此引入本申请作为参考。
技术领域
本申请涉及光学相控阵技术领域，尤其涉及一种集成光学相控阵及其控制方法。
背景技术
相关技术中，如图1所示，使用分束器将一束激光分成多束，对每一束光进行相位调制附加特定的相移，然后通过光学天线将光束发射出去，在空间实现激光光束的偏转或者整形。
因此，可以看出在硅基光电集成芯片中，受限于光学衍射和波导结构，很难将光栅天线单元排列的间距减小到波长的二分之一，为了避免多余栅瓣的出现，需要通过阵列的非均匀排列来对高阶栅瓣抑制达到只有一个栅瓣输出的效果，造成器件尺寸较大，以及由于光栅天线对模场束缚性的限制，使光在光栅天线中传输时的串扰到达一定程度将无法继续优化，高于在波导中传输的串扰。
发明内容
本申请旨在至少在一定程度上解决相关技术中的技术问题之一。
为此，本申请的一个目的在于提出一种集成光学相控阵，实现片上光旋转，解决现有光学相控阵因光栅天线对模场束缚性差而产生串扰的问题，以及可以减小器件尺寸，解决现有光学相控阵光栅天线单元排列的间距无法减小到波长的二分之一而产生的尺寸较大的问题。
本申请的另一个目的在于提出一种应用集成光学相控阵的控制方法。
为达到上述目的，本申请实施例提出了一种集成光学相控阵，包括：激光器、分束器、移相器、密集波导、平板波导和弯曲光栅；所述激光器用于产生光源，并将所述光源输入所述分束器得到多束光；所述移相器用于对每一束光进行相位调制，并将相位调制后的每一束光输入所述密集波导；所述密集波导用于将相位调制后的光束耦合入所述平板波导内，以及所述平板波导用于将每一束光进行光偏转，并将光偏转后的每一束光通过所述弯曲光栅发射。
本申请实施例的集成光学相控阵，通过激光器用于产生光源，并将光源输入分束器得到多束光；移相器用于对每一束光进行相位调制，并将相位调制后的每一束光输入密集波导； 密集波导用于将相位调制后的光束耦合入平板波导内，以及平板波导用于将多束光耦合成一束后进行光偏转，并将光偏转后的光束通过所述弯曲光栅发射。由此，解决了现有光学相控阵因光栅天线对模场束缚性差而产生串扰的问题，以及现有光学相控阵光栅天线单元排列的间距无法减小到波长的二分之一而产生的尺寸较大的问题，实现片上光旋转，以及减小器件尺寸的目的。
另外，根据本申请上述实施例的集成光学相控阵，还可以具有如下附加的技术特征：
进一步地，在本申请的一个实施例中，所述分束器为1×2多模干涉分束器级联或者星型耦合器构成。
进一步地，在本申请的一个实施例中，所述移相器为热光相移器或电光相移器构成。
进一步地，在本申请的一个实施例中，所述移相器用于对每一束光进行相位调制，包括：
对每一束光附加特定的相移，当偏转角为θ时，附加相位为：
Figure PCTCN2020125444-appb-000001
其中，
Figure PCTCN2020125444-appb-000002
其中，λ为波长，d为相邻波导，i为波导序列(i＝0,1,2...)。
进一步地，在本申请的一个实施例中，所述密集波导使用基于正弦空间调制的波导阵列结构。
进一步地，在本申请的一个实施例中，每一光束从所述密集波导发出，在所述平板波导有传输场为：
Figure PCTCN2020125444-appb-000003
其中，|En|是场强的大小，r n是监测点距离发射点的距离，e j2πrn/λ是在传播过程中产生的相位因子，ψ n为附加相位，In(θ,φ)为所述平板波导远场方向函数；当光偏转角度为θ时，通过上述公式计算相移臂附加相位ψn，进行光束偏转。
进一步地，在本申请的一个实施例中，当不附加相移时，
Figure PCTCN2020125444-appb-000004
其中，λ为工作波长，d 0为阵元间隔，当级次m≠0时，
Figure PCTCN2020125444-appb-000005
为达到上述目的，本申请第二方面实施例提出了一种应用集成光学相控阵的控制方法，包括：获取光源，并将所述光源通过分束处理得到多束光；对所述多束光中的每一束光进行相位调制；将进行相位调制后的每一束光通过密集波导耦合入平板波导；所述平板波导用于 将每一束光进行光偏转，并将光偏转后的每一束光通过所述弯曲光栅发射。
本申请实施例的应用集成光学相控阵的控制方法，通过获取光源，并将所述光源通过分束处理得到多束光；对多束光中的每一束光进行相位调制；将进行相位调制后的每一束光通过密集波导耦合入平板波导；平板波导用于将耦合的光束进行光偏转，并将光偏转后的光束通过弯曲光栅发射。由此，实现片上光旋转，以及减小器件尺寸的目的。
另外，根据本申请上述实施例的应用集成光学相控阵的控制方法，还可以具有如下附加的技术特征：
进一步地，在本申请的一个实施例中，所述对所述多束光中的每一束光进行相位调制，包括：
对每一束光附加特定的相移，当偏转角为θ时，附加相位为：
Figure PCTCN2020125444-appb-000006
其中，
Figure PCTCN2020125444-appb-000007
其中，λ为波长，d为相邻波导，i为波导序列(i＝0,1,2...)。
进一步地，在本申请的一个实施例中，所述平板波导用于将每一束光进行光偏转，包括：
每一光束从所述密集波导发出，在所述平板波导有传输场为：
Figure PCTCN2020125444-appb-000008
其中，|En|是场强的大小，r n是监测点距离发射点的距离，e j2πrn/λ是在传播过程中产生的相位因子，ψ n为附加相位，In(θ,φ)为所述平板波导远场方向函数；当光偏转角度为θ时，通过上述公式计算相移臂附加相位ψn，进行光束偏转。
本申请附加的方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本申请的实践了解到。
附图说明
本申请上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解，其中：
图1为本申请实施例的现有光学相控阵原理图；
图2为本申请实施例的集成光学相控阵的结构示例图；
图3为本申请实施例的无串扰的片上的集成光学相控阵示意图；
图4为本申请实施例的光学相控阵实现过程仿真图；
图5为本申请实施例提供的应用集成光学相控阵的控制方法的流程示意图。
具体实施方式
下面详细描述本申请的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，旨在用于解释本申请，而不能理解为对本申请的限制。
下面参照附图描述根据本申请实施例提出的集成光学相控阵及其控制方法。
图2为本申请实施例的集成光学相控阵的结构示例图。如图2所示，该集成光学相控阵根据单张运动模糊图像生成高速视频的方法，包括：激光器1、分束器2、移相器3、密集波导4、平板波导5和弯曲光栅6。
其中，激光器1用于产生光源，并将光源输入分束器2得到多束光。
移相器3用于对每一束光进行相位调制，并将相位调制后的每一束光输入密集波导4。
密集波导4用于将相位调制后的光束耦合入平板波导5内，以及平板波导5用于将多束光耦合成一束后进行光偏转，并将光偏转后的光束通过弯曲光栅6发射。
也就是说，激光器1发出的光经过分束器2分成多束，经过密集波导4耦合至平板波导5，在密集波导4上对每一束光进行相位调制附加特定相移，在平板波导5上完成相位偏转，通过弯曲光栅发射出去，从而在片上实现激光光束的偏转或者整形。
由此，区别在于现有光学相控阵在空间实现光偏转，而本申请在平板波导实现光束偏转，及片上光旋转。由于光栅天线对模场的束缚性的限制，光在波导中的串扰小于在光栅天线，因此实现消除串扰的光学相控阵。现有的光学相控阵由于光栅天线的间距要求导致尺寸过大，本申请通过波导的使用减小了器件尺寸。
在本申请实施例中，分束器2实现均匀分光的功能，可以为1×2多模干涉分束器级联或者星型耦合器构成。
在本申请实施例中，移相器3为热光相移器或电光相移器构成。
在本申请实施例中，移相器3用于对每一束光进行相位调制，包括：
对每一束光附加特定的相移，当偏转角为θ时，附加相位为：
Figure PCTCN2020125444-appb-000009
其中，
Figure PCTCN2020125444-appb-000010
其中，λ为波长，d为相邻波导，i为波导序列(i＝0,1,2...)。
在本申请实施例中，密集波导4使用基于正弦空间调制的波导阵列结构，可以理解的是，密集波导4将调相后的光束耦合入平板波导5内，该结构带宽大，损耗低，串扰可达到-40dB以下，且输出的波导阵列排列的间距可以减小到波长的二分之一，避免了栅瓣的出现， 解决了现有光学相控阵由于使用光栅天线而造成的串扰较大的问题。
在本申请实施例中，平板波导5用于完成片上光旋转，每一光束从密集波导4发出，在平板波导5有传输场为：
Figure PCTCN2020125444-appb-000011
其中，|En|是场强的大小，r n是监测点距离发射点的距离，e j2πrn/λ是在传播过程中产生的相位因子，ψ n为附加相位，In(θ,φ)为所述平板波导远场方向函数；当光偏转角度为θ时，通过上述公式计算相移臂附加相位ψn，进行光束偏转。
在本申请实施例中，当不附加相移时，
Figure PCTCN2020125444-appb-000012
其中，λ为工作波长，d 0为阵元间隔，当级次m≠0时，
Figure PCTCN2020125444-appb-000013
可以理解的是，在硅基光电集成芯片中，受限于光学衍射和波导结构，是很难将光栅天线单元排列的间距减小到波长的二分之一的，但在本申请中，由于密集波导4的设计有效避免了这个问题，并实现片上光束偏转。
在本申请实施例中，弯曲光栅6可实现将已完成特定偏转角度的光束从平板区域中发射出去，进而实现光学相控阵的功能。
为了本领域人员更加清楚本申请的集成光学相控阵，如图3所示，一种无串扰的片上的集成光学相控阵，自左向右依次包括：激光器1，分束器2，移相器3，密集波导4，平板波导5和弯曲光栅6。
具体地，分束器2，可以采用1×2多模干涉(MMI)分束器级联或者星型耦合器构成，实现均匀分光的功能。
其中，移相器3可由电光相移器或热光相移器构成，可实现对每一束光进行相位调制，附加特定的相移的功能。
其中，密集波导4使用可以使用基于正弦空间调制的波导阵列结构，可实现将调相后的光束耦合入平板波导5内。
其中，平板波导5用于完成片上光旋转，调节相移臂产生相位差后使得等相位面不再垂直于波导方向，而是有了一定的偏转，满足等相位关系的波束会相干相长，不满足等相位条件的光束就会相互抵消，故光束的指向总是垂直于等相位面，从而实现片上光偏转。
举例而言，如图4所示使用mode solutions(多功能波导模式求解和传播模拟仿真软件)对上述过程进行验证，仿真1550nm下扫面角度为60°的光学相控阵，平板波导材料为SiON，仿真结果如图3所示，经验证可以实现片上光偏转，其中，图4(a)为-30°光场图；图4(b)为30°光场图；图4(c)为-30°远场图；图4(d)为30°远场图。
因此，弯曲光栅6可实现将已完成特定偏转角度的光束从平板区域中发射出去，进而实现光学相控阵光束偏转的功能。
本申请实施例的集成光学相控阵，通过激光器用于产生光源，并将光源输入分束器得到多束光；移相器用于对每一束光进行相位调制，并将相位调制后的每一束光输入密集波导；密集波导用于将相位调制后的光束耦合入平板波导内，以及平板波导用于将耦合的光束进行光偏转，并将光偏转后的光束通过弯曲光栅发射。由此，解决了现有光学相控阵因光栅天线对模场束缚性差而产生串扰的问题，以及现有光学相控阵光栅天线单元排列的间距无法减小到波长的二分之一而产生的尺寸较大的问题，实现片上光旋转，以及减小器件尺寸的目的。
为了实现上述实施例，本申请还提出一种应用集成光学相控阵的控制方法。
图5为本申请实施例提供的应用集成光学相控阵的控制方法的流程示意图。
如图5所示，该方法包括：
步骤101，获取光源，并将光源通过分束处理得到多束光。
步骤102，对多束光中的每一束光进行相位调制。
步骤103，将进行相位调制后的每一束光通过密集波导耦合入平板波导。
步骤104，平板波导用于将耦合的光束进行光偏转，并将光偏转后的光束通过弯曲光栅发射。
在本申请实施例中，对多束光中的每一束光进行相位调制，包括：
对每一束光附加特定的相移，当偏转角为θ时，附加相位为：
Figure PCTCN2020125444-appb-000014
其中，
Figure PCTCN2020125444-appb-000015
其中，λ为波长，d为相邻波导，i为波导序列(i＝0,1,2...)。
在本申请实施例中，平板波导用于将每一束光进行光偏转，包括：
每一光束从密集波导发出，在平板波导有传输场为：
Figure PCTCN2020125444-appb-000016
其中，|En|是场强的大小，r n是监测点距离发射点的距离，e j2πrn/λ是在传播过程中产生的相位因子，ψ n为附加相位，In(θ,φ)为所述平板波导远场方向函数；当光偏转角度为θ时，通过上述公式计算相移臂附加相位ψn，进行光束偏转。
当不附加相移时，
Figure PCTCN2020125444-appb-000017
其中，λ为工作波长，d 0为阵元间隔，当级次m≠0时，
Figure PCTCN2020125444-appb-000018
需要说明的是，前述对集成光学相控阵实施例的解释说明也适用于该实施例的方法，此处不再赘述。
本申请实施例的高速视频生成装置，通过获取光源，并将所述光源通过分束处理得到多束光；对多束光中的每一束光进行相位调制；将进行相位调制后的每一束光通过密集波导耦合入平板波导；平板波导用于将耦合的光束进行光偏转，并将光偏转后的光束通过弯曲光栅发射。由此，实现片上光旋转，以及减小器件尺寸的目的。
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外，在不相互矛盾的情况下，本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
流程图中或在此以其他方式描述的任何过程或方法描述可以被理解为，表示包括一个或更多个用于实现定制逻辑功能或过程的步骤的可执行指令的代码的模块、片段或部分，并且本申请的优选实施方式的范围包括另外的实现，其中可以不按所示出或讨论的顺序，包括根据所涉及的功能按基本同时的方式或按相反的顺序，来执行功能，这应被本申请的实施例所属技术领域的技术人员所理解。
在流程图中表示或在此以其他方式描述的逻辑和/或步骤，例如，可以被认为是用于实现逻辑功能的可执行指令的定序列表，可以具体实现在任何计算机可读介质中，以供指令执行系统、装置或设备(如基于计算机的系统、包括处理器的系统或其他可以从指令执行系统、装置或设备取指令并执行指令的系统)使用，或结合这些指令执行系统、装置或设备而使用。就本说明书而言，"计算机可读介质"可以是任何可以包含、存储、通信、传播或传输程序以供指令执行系统、装置或设备或结合这些指令执行系统、装置或设备而使用的装置。计算机可读介质的更具体的示例(非穷尽性列表)包括以下：具有一个或多个布线的电连接部(电子装置)，便携式计算机盘盒(磁装置)，随机存取存储器(RAM)，只读存储器(ROM)，可擦除可编辑只读存储器(EPROM或闪速存储器)，光纤装置，以及便携式光盘只读存储器(CDROM)。另外，计算机可读介质甚至可以是可在其上打印所述程序的纸或其他合适的介质，因为可以例如通过对纸或其他介质进行光学扫描，接着进行编辑、解译或必要时以其他合适方式进行处理来以电子方式获得所述程序，然后将其存储在计算机存储器中。
应当理解，本申请的各部分可以用硬件、软件、固件或它们的组合来实现。在上述实施方式中，多个步骤或方法可以用存储在存储器中且由合适的指令执行系统执行的软件或固件来实现。如，如果用硬件来实现和在另一实施方式中一样，可用本领域公知的下列技术中的任一项或他们的组合来实现：具有用于对数据信号实现逻辑功能的逻辑门电路的离散逻辑电路，具有合适的组合逻辑门电路的专用集成电路，可编程门阵列(PGA)，现场可编程门阵列(FPGA)等。
本技术领域的普通技术人员可以理解实现上述实施例方法携带的全部或部分步骤是可以通过程序来指令相关的硬件完成，所述的程序可以存储于一种计算机可读存储介质中，该程序在执行时，包括方法实施例的步骤之一或其组合。
此外，在本申请各个实施例中的各功能单元可以集成在一个处理模块中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个模块中。上述集成的模块既可以采用硬件的形式实现，也可以采用软件功能模块的形式实现。所述集成的模块如果以软件功能模块的形式实现并作为独立的产品销售或使用时，也可以存储在一个计算机可读取存储介质中。
上述提到的存储介质可以是只读存储器，磁盘或光盘等。尽管上面已经示出和描述了本申请的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本申请的限制，本领域的普通技术人员在本申请的范围内可以对上述实施例进行变化、修改、替换和变型。

Claims (10)

  1. 一种集成光学相控阵，其特征在于，包括：激光器、分束器、移相器、密集波导、平板波导和弯曲光栅；
    所述激光器用于产生光源，并将所述光源输入所述分束器得到多束光；
    所述移相器用于对每一束光进行相位调制，并将相位调制后的每一束光输入所述密集波导；
    所述密集波导用于将相位调制后的光束耦合入所述平板波导内，以及所述平板波导用于将多束光耦合成一束后进行光偏转，并将光偏转后的光束通过所述弯曲光栅发射。
  2. 如权利要求1所述的集成光学相控阵，其特征在于，
    所述分束器为1×2多模干涉分束器级联或者星型耦合器构成。
  3. 如权利要求1所述的集成光学相控阵，其特征在于，
    所述移相器为热光相移器或电光相移器构成。
  4. 如权利要求1所述的集成光学相控阵，其特征在于，
    所述移相器用于对每一束光进行相位调制，包括：
    对每一束光附加特定的相移，当偏转角为θ时，附加相位为：
    Figure PCTCN2020125444-appb-100001
    其中，
    Figure PCTCN2020125444-appb-100002
    x i＝id；
    其中，λ为波长，d为相邻波导，i为波导序列(i＝0,1,2...)。
  5. 如权利要求1所述的集成光学相控阵，其特征在于，
    所述密集波导使用基于正弦空间调制的波导阵列结构。
  6. 如权利要求1所述的集成光学相控阵，其特征在于，每一光束从所述密集波导发出，在所述平板波导有传输场为：
    Figure PCTCN2020125444-appb-100003
    其中，|En|是场强的大小，r n是监测点距离发射点的距离，e j2πrn/λ是在传播过程中产生的相位因子，ψ n为附加相位，In(θ,φ)为所述平板波导远场方向函数；当光偏转角度为θ时，通过上述公式计算相移臂附加相位ψn，进行光束偏转。
  7. 如权利要求6所述的集成光学相控阵，其特征在于，当不附加相移时，
    Figure PCTCN2020125444-appb-100004
    其中，λ为工作波长，d 0为阵元间隔，当级次m≠0时，
    Figure PCTCN2020125444-appb-100005
  8. 一种应用权利要求1-7任一项所述的集成光学相控阵的控制方法，其特征在于，包括：
    获取光源，并将所述光源通过分束处理得到多束光；
    对所述多束光中的每一束光进行相位调制；
    将进行相位调制后的每一束光通过密集波导耦合入平板波导；
    所述平板波导用于将耦合的光束进行光偏转，并将光偏转后的光束通过所述弯曲光栅发射。
  9. 如权利要求8所述的方法，其特征在于，所述对所述多束光中的每一束光进行相位调制，包括：
    对每一束光附加特定的相移，当偏转角为θ时，附加相位为：
    Figure PCTCN2020125444-appb-100006
    其中，
    Figure PCTCN2020125444-appb-100007
    x i＝id；
    其中，λ为波长，d为相邻波导，i为波导序列(i＝0,1,2...)。
  10. 如权利要求8所述的方法，其特征在于，所述平板波导用于将每一束光进行光偏转，包括：
    每一光束从所述密集波导发出，在所述平板波导有传输场为：
    Figure PCTCN2020125444-appb-100008
    其中，|En|是场强的大小，r n是监测点距离发射点的距离，e j2πrn/λ是在传播过程中产生的相位因子，ψ n为附加相位，In(θ,φ)为所述平板波导远场方向函数；当光偏转角度为θ时，通过上述公式计算相移臂附加相位ψn，进行光束偏转。
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