WO2022012612A1

WO2022012612A1 - Improved electro-pyrolytic furnace

Info

Publication number: WO2022012612A1
Application number: PCT/CN2021/106430
Authority: WO
Inventors: 何运; 李拯舟; 张晓�
Original assignee: 上海博箭实业有限公司
Priority date: 2020-07-15
Filing date: 2021-07-15
Publication date: 2022-01-20
Also published as: KR20220002501U; TWM620542U; CN212432757U

Abstract

An electro-pyrolytic furnace comprises a housing (1), a heating pipe (2), a protective layer (108), and an electric heating wire (109). The heating pipe (2) has an "n" shape. The heating pipe (2) increases in diameter at a position where a gas pyrolysis chamber (A) is located, and an inner wall thereof is provided with uniformly distributed recessed points (201) to cause a flow to be in a turbulent state. The heating pipe (2) decreases in diameter, with the same wall thickness, in a region (B) where a rear gas discharge end portion of the gas pyrolysis chamber (A) is located. An increase in the volume of the gas pyrolysis chamber (A) extends a duration in which a gas flowing at a uniform velocity remains in a pyrolytic furnace, and ensures a high-speed reaction performed by a pyrolytic apparatus, thereby achieving thorough pyrolysis. The "n"-shaped heating pipe (2) fully utilizes transfer of heat to ensure that a gas is pre-heated before entering the gas pyrolysis chamber (A), thereby ensuring pyrolysis performance. The recessed points (201) arranged on the inner wall of the heating pipe (2) cause a stable gas flow to be in a turbulent state, thereby extending a gas pyrolysis duration, and ensuring thorough pyrolysis of the gas.

Description

An improved electric pyrolysis furnace

technical field

The utility model belongs to the technical field of electric pyrolysis furnaces, in particular to an improved electric pyrolysis furnace.

Background technique

Special gas monitoring equipment is mainly used in integrated circuit chip manufacturing, TFT-LCD panel manufacturing, LED chip manufacturing, solar panel manufacturing, and oil exploration. Due to the particularity of the industry, it is necessary to perform environmental monitoring of ppm (one part per million) to ppb (one part per billion) level for toxic, harmful and flammable special gases in special gas applications. Special gases are generally monitored by monitoring instruments that directly extract gas from the sampling point. Some special gases need to be pyrolyzed by pyrolysis devices before they can be identified by gas detectors. This electric heating cracking device is suitable for all kinds of special gas monitoring instruments that need cracking, such as NF3 (nitrogen trifluoride), C4F6 (hexafluorobutadiene), C5F8 (octafluorocyclopentene), CH2F2 (difluoromethane) , CH3F (fluoromethane), etc. These gases are mainly used for plasma etching (chip manufacturing industry) and refrigerant (refrigeration industry). With the rapid development of semiconductor chip industry and photovoltaic industry in recent years, the demand for special gases has also increased. Bear the momentum of rapidity. As a widely used cleaning and etching NF3 gas in the semiconductor and liquid crystal industries, due to its special gas, it is highly toxic. If it is exposed to the air for a long time, it can strongly stimulate the eyes, skin and respiratory mucosa, and corrode tissues. It is easy to react with hemoglobin, and it is more dangerous after inhalation. When heated with explosive gases, oxidants, water and steam mixtures, explosions can occur under spark or open flame conditions, so a leak must be detected quickly in the factory, alarms should be issued and crowds evacuated.

Defects and deficiencies of the existing technology: 1: Currently, the mainstream products for testing such substances in the market are mainly the United States and Japan. Foreign products are expensive, and the delivery cycle is relatively long, and there is often a risk of being out of stock and out of stock. 2: The cracking effect is not ideal, and the gas stays in the cracking chamber for a short time. 3: The cracking cycle is relatively long. Before the gas enters the cracking furnace, it cannot be preheated and the gas cracking cycle is too long. 4: The advective flow of the airflow takes away a lot of heat from the cracking furnace, resulting in insufficient cracking. 5: The cracking furnace has a relatively short service life. 6: The domestic innovation of high-performance electric heating cracking furnace is insufficient. Therefore, in view of the above problems, it is of great significance to provide an improved electric pyrolysis furnace.

Utility model content

The utility model provides an improved electric pyrolysis furnace, which solves the above problems.

In order to solve the above-mentioned technical problems, the utility model is realized through the following technical solutions:

An improved electric pyrolysis furnace of the utility model comprises a casing with a top plate at the top and a main body in a tubular structure, a cracking gas chamber vertically installed in the casing and located on the central axis so as to reach the peripheral side of the casing Heating pipes with equal wall distances, a protective layer arranged on the inner peripheral side wall of the casing, a first insulating packing layer arranged in the middle of the casing in a column shape and wrapping the heating pipes, filled in the first insulating packing layer and the protective layer A second insulating packing layer between; the cracking gas chamber located in the first insulating packing layer is wrapped with a section of electric heating wire which is powered by the connection of two external resistance wires, and the outer end of the electric heating wire is connected by a power lead wire The power supply is used for power supply; the bottom of the casing is locked and fixed with the bottom plate through screws for bottom sealing protection;

The heating pipe is designed in an "n" shape, and the position of the heating pipe located in the cracking gas chamber adopts a gradual thick pipe diameter under the condition of the same wall thickness, and the inner wall is uniformly provided with concave points for generating a turbulent flow state, The rear gas outlet end of the heating pipe located in the cracking gas chamber adopts a tapered pipe diameter area under the condition of the same wall thickness.

Further, the shell, the top plate and the bottom plate are all made of epoxy plate material.

Further, the protective layer adopts a high temperature resistant material.

Further, the first heat insulating filler layer adopts any one or a combination including but not limited to diatomite, perlite, foamed concrete, calcium silicate, and titanium oxide.

Further, the second heat insulating filler layer adopts any one or a combination including but not limited to asbestos, aerogel felt, and glass fiber.

Further, a first thermocouple sensor and a second thermocouple sensor are respectively detachably mounted on the top plate and the outer wall of the casing.

Further, the distance between the cracking gas chamber and the opposite outer sidewalls of the gradually increasing thick pipe diameter region is 2-6 mm.

Further, in the non-variable diameter area, a standard pipe diameter is adopted; in the gradually increased thick pipe diameter area, the pipe diameter is larger than the standard pipe diameter.

Further, the heating tube adopts any one including but not limited to a quartz tube, a halogen tube, and a carbon fiber tube.

Further, the wall thickness of the heating pipe is 0.5-3mm.

The utility model includes the following beneficial effects with respect to the prior art:

1. The utility model increases the diameter of the gas pipeline before entering the cracking gas chamber, expands the volume of the cracking gas chamber, and reduces the diameter after the gas exits the cracking gas chamber; increases the diameter of the quartz tube, thereby increasing the interception of the pipeline. Therefore, the volume of the cracking gas chamber is increased, the residence time of the gas with uniform velocity in the cracking furnace is ensured, and the high-speed reaction of the cracker is ensured, thereby realizing full cracking.

2. The heating tube of the present utility model adopts an n-type design to ensure that the gas is preheated before entering the cracking gas chamber, and the heat conduction is fully utilized to ensure the cracking effect; the early quartz tube design is an L-type design, and the gas directly enters the cracking gas The chamber is cracked, and the 90-degree bending process of the tube has a strong force that cannot be eliminated, which is easy to cause the tube to be damaged; the quartz tube with n-type design is designed with a perfect arc, which can better eliminate the pipeline bending process. The risk of breaking, and the heat conduction effect of the heated main circuit can be used, so that the gas can be fully contacted and preheated before entering the cracking gas chamber.

3. Before the gas enters the cracking gas chamber, the heating tube of the utility model changes the gas flow state from advection to turbulent flow; when the gas passes through the quartz tube at a uniform speed, it contacts with several concave points distributed on the wall of the quartz tube, thereby breaking the gas flow. The state of gas flow realizes the gas from advection to turbulent flow, prolongs the gas cracking cycle, and makes the gas cracking more fully.

4. The utility model adopts a shell with a tubular structure, and the heating tube is located in the middle position, which ensures that the distance between the heating tube and the side wall of the shell is the same. The accuracy of equipment testing is improved, and the multi-layer structure is set to improve the safety performance of equipment protection.

Of course, any product implementing the present invention does not necessarily need to simultaneously achieve all of the above-mentioned advantages.

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the accompanying drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.

Fig. 1 is the external structure schematic diagram of a kind of improved electric pyrolysis furnace of the present utility model;

Fig. 2 is the longitudinal sectional view of Fig. 1;

Fig. 3 is the structural representation of the heating pipe in Fig. 1;

In the accompanying drawings, the list of components represented by each number is as follows:

1-shell, 101-top plate, 102-bottom plate, 103-first thermocouple sensor, 104-second thermocouple sensor, 105-resistance wire, 106-first insulating filler layer, 107-second insulating filler layer, 108-protective layer, 109-electric heating wire, 2-heating tube, 201-concave point, 3-screw, A-cracking air chamber, B-gradient tapered diameter area.

detailed description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the implementations. example. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "top", "vertical", "surface", "inner", "center", "peripheral sidewall", "middle", "outer" etc. refer to The orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific orientation, are constructed and operated in a specific orientation, and therefore should not be construed as a limit.

Example 1:

Please refer to FIGS. 1-3 , an improved electric pyrolysis furnace of the present invention includes a casing 1 with a top plate 101 on the top and a tubular structure in its main body, a pyrolysis furnace vertically installed in the casing 1 and on the casing 1 The gas chamber A is located at the central axis and is arranged to make the heating pipe 2 equal to the peripheral side wall of the casing 1, and the protective layer 108 is arranged on the inner peripheral side wall of the casing 1. And the first insulating packing layer 106 that wraps the heating tube 2, the second insulating packing layer 107 filled between the first insulating packing layer 106 and the protective layer 108; the cracking gas chamber A inside the first insulating packing layer 106 is wrapped with A section of electric heating wire 109 is connected by two external resistance wires 105 for power supply, and the outer end of the electric heating wire 109 is connected to the power supply through the power lead wire for power supply; Bottom closed protection;

The heating pipe 2 is designed in an "n" shape, and the position of the heating pipe 2 located in the cracking gas chamber A adopts a gradual thick pipe diameter under the condition of the same wall thickness, and the inner wall is uniformly provided with concave points 201 for generating a turbulent state, The rear gas outlet end of the heating pipe 2 located in the cracking gas chamber A adopts the tapered pipe diameter region B under the same wall thickness condition, the depth of the concave point 201 is 0.3-0.8mm, and the diameter is 0.2-0.4mm.

The housing 1 , the top plate 101 and the bottom plate 102 are all made of epoxy board material.

Wherein, the protective layer 108 is made of high temperature resistant material.

Wherein, the first heat insulating filler layer 106 adopts a high temperature resistant heat insulating material (high temperature resistant material).

Among them, the second heat insulating filler layer 107 is made of asbestos and aerogel slurry (high temperature heat insulating material).

Wherein, a first thermocouple sensor 103 and a second thermocouple sensor 104 are respectively detachably mounted on the top plate 101 and the outer wall of the housing 1 .

Wherein, there is a certain distance between the cracking gas chamber A and the opposite outer side walls of the tapered tube diameter region B.

Among them, the heating tube 2 is a quartz tube.

Among them, the wall thickness of the heating pipe is 0.5-2mm.

Example 2:

The difference between the present embodiment 2 and the embodiment 1 is:

Among them, the first heat insulating filler layer 106 is made of perlite (high temperature resistant material).

Among them, the second heat insulating filler layer 107 adopts aerogel felt (high temperature heat insulating material).

Wherein, the heating tube 2 adopts any one including but not limited to quartz tube, halogen tube and carbon fiber tube.

Among them, the wall thickness of the heating pipe is 0.5-2mm.

Example 3:

The difference between this embodiment and Embodiment 1 is that:

Wherein, the first heat insulating filler layer 106 is made of foamed concrete (high temperature resistant material).

Among them, the second heat insulating filler layer 107 is made of glass fiber (high temperature heat insulating material).

Wherein, there is a certain distance between the cracking gas chamber A and the opposite outer sidewalls of the region B of the gradually thicker pipe diameter.

Among them, the heating tube 2 adopts carbon fiber tube.

Among them, the wall thickness of the heating pipe is 0.5-2mm.

Compared with the prior art, the utility model has the following advantages:

1. The utility model reduces the diameter of the gas pipeline before entering the cracking gas chamber, which enlarges the volume of the gas chamber of the cracking gas chamber, and reduces the diameter after the gas exits the cracking gas chamber; increases the diameter of the quartz tube, thereby increasing the number of pipelines. Therefore, the volume of the cracking gas chamber is increased, the residence time of the gas with uniform velocity in the cracking furnace is ensured, and the high-speed reaction of the cracker is ensured, thereby realizing full cracking.

2. The heating tube of the present utility model adopts an n-type design to ensure that the gas is preheated before entering the cracking gas chamber, and the heat conduction is fully utilized to ensure the cracking effect; the early quartz tube design is an L-type design, and the gas directly enters the cracking gas The 90-degree bending process of the tube has a strong force that cannot be eliminated, which is easy to cause the tube to be damaged; the quartz tube with n-type design is designed with a perfect arc, which can better eliminate the risk of breakage during the bending process. At the same time, the heat conduction effect of the heated main pipeline can be used to make the gas fully contact and preheat before entering the main pipeline.

The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details, nor do they limit the invention to only the described embodiments. Obviously, many modifications and variations are possible in light of the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present invention, so that those skilled in the art can well understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

An improved electric pyrolysis furnace, characterized in that it comprises a casing (1) with a top plate (101) at the top and a tubular structure of the main body, and a cracking gas chamber (1) vertically installed in and on the casing (1). A) A heating tube (2) positioned on the central axis so that the distance from the peripheral side wall of the casing (1) is equal, a protective layer (108) disposed on the inner peripheral side wall of the casing (1), and a protective layer (108) disposed on the casing (1) 1) A first insulating packing layer (106) arranged in a column shape at the inner middle position and wrapping the heating pipe (2), and a second insulating packing layer filled between the first insulating packing layer (106) and the protective layer (108) (107); the cracking gas chamber (A) located in the first insulating packing layer (106) is wrapped with a section of electric heating wire (109) connected to the external two resistance wires (105) for power supply, and the electric heating wire (109 The outer end of the ) is connected to the power supply through the power lead wire for power supply; the bottom of the casing (1) is locked and fixed with the bottom plate (102) through the screw (3) for bottom sealing protection;

The heating pipe (2) is designed in an "n" shape, and the position of the heating pipe (2) located in the cracking gas chamber (A) adopts a gradual thick pipe diameter under the condition of the same wall thickness, and the inner wall is evenly arranged to be useful. At the concave point (201) in the turbulent state, the rear gas outlet end of the heating pipe (2) located in the cracking gas chamber (A) adopts the tapered pipe diameter region (B) under the condition of the same wall thickness.
An improved electric pyrolysis furnace according to claim 1, characterized in that, the shell (1), the top plate (101), and the bottom plate (102) are all made of epoxy plate material.
An improved electric pyrolysis furnace according to claim 1, characterized in that, the protective layer (108) is made of high temperature resistant material.
An improved electric pyrolysis furnace according to claim 1, characterized in that, the first insulating filler layer (106) is made of materials including but not limited to diatomite, perlite, foamed concrete, calcium silicate, titanium oxide , any one or combination of aluminum oxide.
An improved electric pyrolysis furnace according to claim 1, characterized in that, the second heat insulating filler layer (107) adopts any one or a combination including but not limited to asbestos, aerogel felt, and glass fiber.
An improved electric pyrolysis furnace according to claim 1, characterized in that a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) and a first thermocouple sensor (103) are respectively detachably mounted on the top plate (101) and the outer wall of the casing (1) according to claim 1. Two thermocouple sensors (104).
An improved electric pyrolysis furnace according to claim 1, characterized in that, the distance between the cracking gas chamber (A) and the opposite outer side walls of the tapered tube diameter region (B) is 2-6 mm.
An improved electric pyrolysis furnace according to claim 1, characterized in that, in the tapered tube diameter region (B), the inner tube diameter of the cracking gas chamber (A) becomes thicker.
An improved electric pyrolysis furnace according to claim 1, characterized in that, the heating tube (2) adopts any one including but not limited to a quartz tube, a halogen tube, and a carbon fiber tube.
An improved electric pyrolysis furnace according to claim 1, characterized in that, the wall thickness of the heating pipe (2) is 0.5-2 mm.