WO2021261384A1 - Piezoelectric element and vibration-generating device - Google Patents

Piezoelectric element and vibration-generating device Download PDF

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WO2021261384A1
WO2021261384A1 PCT/JP2021/023129 JP2021023129W WO2021261384A1 WO 2021261384 A1 WO2021261384 A1 WO 2021261384A1 JP 2021023129 W JP2021023129 W JP 2021023129W WO 2021261384 A1 WO2021261384 A1 WO 2021261384A1
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electrode
piezoelectric
piezoelectric element
effective
piezoelectric body
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PCT/JP2021/023129
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French (fr)
Japanese (ja)
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茂雄 石井
隆幸 後藤
寛之 清水
純明 岸本
雄一 濤川
充昭 大谷
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太陽誘電株式会社
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details

Definitions

  • the present invention relates to a piezoelectric element and a vibration generator that can be used for tactile presentation.
  • Various actuators are used for the tactile function device that presents the tactile sensation to the user by vibration.
  • an electromagnetic actuator such as an eccentric motor or a linear resonance actuator is used for the notification function.
  • a piezoelectric actuator is also used for the force feedback function.
  • Patent Document 1 discloses an input system in which a contact sensor and a vibration element are provided on a panel.
  • an object of the present invention is to provide a piezoelectric element and a vibration generator capable of touch detection and tactile presentation and having excellent productivity.
  • the piezoelectric element includes a piezoelectric body, a first effective portion, and a second effective portion.
  • the piezoelectric material is made of a piezoelectric material.
  • the first effective portion has a first electrode and a second electrode, and the first electrode and the second electrode face each other via the piezoelectric body.
  • the second effective portion has a third electrode and a fourth electrode, and the third electrode and the fourth electrode face each other via the piezoelectric body.
  • one of the first effective part and the second effective part can function as a pressure sensor and the other as a piezoelectric actuator, and touch detection and tactile sensation can be presented by one piezoelectric element.
  • the first effective portion and the second effective portion may be separated from each other in the longitudinal direction of the piezoelectric element.
  • the first effective portion and the second effective portion may be laminated in the thickness direction of the piezoelectric element.
  • the first electrode has a plurality of first internal electrodes provided in the piezoelectric body, and has a plurality of first internal electrodes.
  • the second electrode has a plurality of second internal electrodes provided in the piezoelectric body. The first internal electrode and the second internal electrode are alternately laminated via the piezoelectric body.
  • the third electrode has a plurality of third internal electrodes provided in the piezoelectric body.
  • the fourth electrode has a plurality of fourth internal electrodes provided in the piezoelectric body. The third internal electrode and the fourth internal electrode may be alternately laminated via the piezoelectric body.
  • the vibration generator includes a piezoelectric element and a drive circuit.
  • the piezoelectric element has a piezoelectric body made of a piezoelectric material, a first electrode and a second electrode, and a first effective portion and a third effective portion in which the first electrode and the second electrode face each other via the piezoelectric body. It has an electrode and a fourth electrode, and includes a second effective portion in which the third electrode and the fourth electrode face each other via the piezoelectric body.
  • the drive source signal source and the second effective unit are electrically connected by the electromotive voltage and supplied from the drive signal source.
  • the drive signal causes the second effective portion to vibrate due to the inverse piezoelectric effect.
  • FIG. 1 is a schematic diagram of a vibration generator 100 according to the present embodiment.
  • the vibration generator 100 includes a piezoelectric element 110 and a drive circuit 120.
  • the vibration generator 100 can be mounted on an information processing device such as a smartphone.
  • the piezoelectric element 110 is joined to a display panel or the like of a smartphone, and the drive circuit 120 is built in the smartphone.
  • FIG. 2 is a perspective view of the piezoelectric element 110.
  • FIG. 3 is a cross-sectional view of the piezoelectric element 110, and is a cross-sectional view taken along the line AA of FIG.
  • FIG. 4 is a plan view of the piezoelectric element 110.
  • the piezoelectric element 110 includes a piezoelectric body 101, a first effective unit 102, and a second effective unit 103.
  • Piezoelectric body 101 is a plate-shaped member made of a piezoelectric material.
  • the piezoelectric material constituting the piezoelectric body 101 may be any material that produces a piezoelectric effect and an inverse piezoelectric effect, and may be, for example, PZT (lead zirconate titanate).
  • one main surface of the piezoelectric body 101 is the main surface 101a, and the other main surface is the main surface 101b.
  • the surfaces of the piezoelectric body 101 along the longitudinal direction (Y direction) are referred to as the side surface 101c and the side surface 101d.
  • the surfaces of the piezoelectric body 101 along the lateral direction (X direction) are referred to as end faces 101e and end faces 101f.
  • the first effective unit 102 is provided in the piezoelectric body 101 and functions as a pressure sensitive sensor.
  • FIG. 5 is a cross-sectional view of the piezoelectric element 110 showing the first effective portion 102, and is a cross-sectional view taken along the line BB of FIG.
  • the first effective unit 102 includes a first electrode 111 and a second electrode 112.
  • the first electrode 111 and the second electrode 112 are insulated from each other and face each other via the piezoelectric body 101. As shown in FIG. 5, the first electrode 111 includes a first internal electrode 111a and a first external electrode 111b. Further, the second electrode 112 includes a second internal electrode 112a and a second external electrode 112b.
  • the first internal electrode 111a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101.
  • FIG. 6 is a schematic view showing the first internal electrode 111a. As shown in the figure, at least a part of the first internal electrode 111a is provided adjacent to the side surface 101c, and a part is exposed to the side surface 101c. Further, the first internal electrode 111a is provided so as to be separated from the surfaces other than the side surface 101c.
  • the first external electrode 111b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the side surface 101c as shown in FIG. Since the first internal electrode 111a is exposed on the side surface 101c as described above, the first external electrode 111b comes into contact with the first internal electrode 111a and conducts with the first internal electrode 111a.
  • the first external electrode 111b may be provided only on the side surface 101c.
  • the second internal electrode 112a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101.
  • FIG. 7 is a schematic view showing the second internal electrode 112a. As shown in the figure, the second internal electrode 112a is provided adjacent to the end face 101e, and a part of the second internal electrode 112a is exposed to the end face 101e. Further, the second internal electrode 112a is provided so as to be separated from the surfaces other than the end surface 101e.
  • the second external electrode 112b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the end surface 101e as shown in FIG. Since the second internal electrode 112a is exposed on the end face 101e as described above, the second external electrode 112b comes into contact with the second internal electrode 112a and conducts with the second internal electrode 112a.
  • the second external electrode 112b may be provided only on the end face 101e.
  • a plurality of the first internal electrode 111a and the second internal electrode 112a are alternately laminated inside the piezoelectric body 101 and face each other via the piezoelectric body 101.
  • the number of the first internal electrode 111a and the second internal electrode 112a is not particularly limited.
  • the second effective unit 103 is provided in the piezoelectric body 101 and functions as a piezoelectric actuator.
  • FIG. 8 is a cross-sectional view of the piezoelectric element 110 showing the second effective portion 103, and is a cross-sectional view taken along the line CC of FIG.
  • the second effective unit 103 includes a third electrode 113 and a fourth electrode 114.
  • the third electrode 113 and the fourth electrode 114 are insulated from each other and face each other via the piezoelectric body 101. As shown in FIG. 8, the third electrode 113 includes a third internal electrode 113a and a third external electrode 113b. Further, the fourth electrode 114 includes a fourth internal electrode 114a and a fourth external electrode 114b.
  • the third internal electrode 113a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101.
  • FIG. 9 is a schematic view showing the first internal electrode 113a. As shown in the figure, at least a part of the third internal electrode 113a is provided adjacent to the side surface 101c, and a part is exposed to the side surface 101c. Further, the third internal electrode 113a is provided so as to be separated from the surfaces other than the side surface 101c.
  • the third external electrode 113b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the side surface 101c as shown in FIG. Since the third internal electrode 113a is exposed on the side surface 101c as described above, the third external electrode 113b comes into contact with the third internal electrode 113a and conducts with the third internal electrode 113a.
  • the third external electrode 113b may be provided only on the side surface 101c.
  • the fourth internal electrode 114a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101.
  • FIG. 10 is a schematic view showing the fourth internal electrode 114a. As shown in the figure, the fourth internal electrode 114a is provided adjacent to the end face 101f, and a part of the fourth internal electrode 114a is exposed to the end face 101f. Further, the fourth internal electrode 114a is provided so as to be separated from the surfaces other than the end surface 101f.
  • the fourth external electrode 114b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the end surface 101f as shown in FIG. Since the fourth internal electrode 114a is exposed on the end face 101f as described above, the fourth external electrode 114b comes into contact with the fourth internal electrode 114a and conducts with the fourth internal electrode 114a.
  • a plurality of the third internal electrode 113a and the fourth internal electrode 114a are alternately laminated inside the piezoelectric body 101 and face each other via the piezoelectric body 101.
  • the number of the third internal electrode 113a and the fourth internal electrode 114a is not particularly limited.
  • the first effective unit 102 and the second effective unit 103 have the above configuration. As shown in FIG. 3, the first effective portion 102 and the second effective portion 103 are provided so as to be separated from each other in the longitudinal direction (Y direction) of the piezoelectric body 101.
  • the piezoelectric element 110 has the above configuration.
  • the first effective unit 102 and the second effective unit 103 have the same laminated structure, but by being connected to the drive circuit 120, the first effective unit 102 functions as a pressure-sensitive sensor, and the second effective unit 103 Functions as a piezoelectric actuator.
  • FIG. 11 is a circuit diagram showing the configuration of the drive circuit 120.
  • the drive circuit 120 is composed of an amplifier 121, a transistor 122, a FET (Field effect transistor) 123, a capacitor 124, a semi-fixed resistor 125, a diode 126, a resistor 127, a battery 128 and a Zener diode 129. ..
  • the amplifier 121 is connected to the drive signal source 151 via the capacitor 124.
  • the base (B) of the transistor 122 is connected to the trigger signal wiring 152, and the collector (C) is connected to the gate (G) of the FET 123.
  • the emitter (E) is connected to a battery 128 (eg 0.4V).
  • the drain (D) is connected between the drive signal source 151 and the amplifier 121, and the gate (G) and the source (S) are connected to the drive voltage source 153.
  • a drive voltage (for example, 5 V) is normally applied to the FET 123 by the drive voltage source 153, the FET 123 is in the ON state, and the drive signal is supplied to the ground.
  • a drive voltage for example, 5 V
  • the FET 123 is in the ON state, and the drive signal is supplied to the ground.
  • the trigger signal is input to the transistor 122 via the trigger signal wiring 152, and the transistor 122 is turned on. As a result, the FET 123 is turned off, and the drive signal source 151 and the amplifier 121 are connected.
  • the drive signal is amplified by the amplifier 121 and input to the second effective unit 103. When a potential difference is generated between the third electrode 113 and the fourth electrode 114 by the drive signal, the second effective unit 103 causes vibration due to the inverse piezoelectric effect.
  • the drive circuit 120 electrically connects the drive signal source 151 and the second effective unit 103 by the electromotive voltage generated in the first effective unit 102 due to the piezoelectric effect, and the drive signal supplied from the drive signal source 151.
  • the first effective unit 102 can function as a pressure-sensitive sensor for touch detection
  • the second effective unit 103 can function as a piezoelectric actuator for presenting a tactile sensation.
  • the circuit configuration of the drive circuit 120 is not limited to that shown in FIG. 11, and any circuit configuration may be used as long as the first effective unit 102 and the second effective unit 103 can execute the above operation.
  • the vibration generator 100 is provided with a first effective unit 102 that functions as a pressure-sensitive sensor and a second effective unit 103 that functions as a piezoelectric actuator inside one piezoelectric element 110. Since the first effective portion 102 and the second effective portion 103 have the same laminated structure, they can be formed by the same process and are excellent in productivity. Further, since the piezoelectric actuator and the pressure-sensitive sensor can be realized by one element, the number of parts that need to be mounted can be reduced, and the manufacturing cost of the vibration generator can be reduced.
  • FIG. 12 is a cross-sectional view of the piezoelectric element 110 having another structure
  • FIG. 13 is a plan view of the piezoelectric element 110.
  • FIG. 12 is a cross-sectional view taken along the line DD of FIG.
  • the first effective portion 102 and the second effective portion 103 may be laminated in the thickness direction (Z direction) of the piezoelectric element 110.
  • FIG. 14 is a schematic view showing the first internal electrode 111a included in the first effective unit 102. As shown in the figure, a part of the first internal electrode 111a is exposed on the side surface 101c and conducts with the first external electrode 111b provided on the main surface 101a and the side surface 101c.
  • FIG. 15 is a schematic view showing a second internal electrode 112a included in the first effective unit 102. As shown in the figure, a part of the second internal electrode 112a is exposed on the side surface 101d and conducts with the second external electrode 112b provided on the side surface 101d.
  • FIG. 16 is a schematic diagram showing a first internal electrode 113a included in the second effective unit 103. As shown in the figure, a part of the third internal electrode 113a is exposed to the end surface 101e and conducts with the third external electrode 113b provided on the end surface 101e.
  • FIG. 17 is a schematic diagram showing a second internal electrode 114a included in the second effective unit 103. As shown in the figure, a part of the fourth internal electrode 114a is exposed to the end surface 101f and conducts with the main surface 101b and the fourth external electrode 114b provided on the end surface 101f.
  • the first effective portion 102 and the second effective portion 103 may be laminated in the thickness direction (Z direction) of the piezoelectric element 110 in this way.
  • the first effective unit 102 and the second effective unit 103 can have various arrangements.
  • the application of the vibration generator 100 is not particularly limited, but it can be used for a touch panel such as a smartphone, an actuator for controlling the focus of a camera module, an input device such as a track pad, a wearable sensor, a piezoelectric harvest, and the like.
  • Vibration generator 101 Piezoelectric body 102 ... 1st effective part 103 ... 2nd effective part 110 ... Piezoelectric element 111 ... 1st electrode 112 ... 2nd electrode 113 ... 3rd electrode 114 ... 4th electrode 120 ... Drive circuit

Abstract

[Problem] Provide a piezoelectric element and a vibration-generating device that are capable of touch detection and tactile presentation, and that have excellent productivity. [Solution] The piezoelectric element of the present technology comprises a piezoelectric body, a first effective unit, and a second effective unit. The piezoelectric body consists of a piezoelectric material. The first effective unit has a first electrode and a second electrode, and the first electrode and the second electrode face each other with the piezoelectric body interposed therebetween. The second effective unit has a third electrode and a fourth electrode, and the third electrode and the fourth electrode face each other with the piezoelectric body interposed therebetween.

Description

圧電素子及び振動発生装置Piezoelectric element and vibration generator
　本発明は、触覚提示に用いることが可能な圧電素子及び振動発生装置に関する。 The present invention relates to a piezoelectric element and a vibration generator that can be used for tactile presentation.
　振動によりユーザに触感を提示する触覚機能デバイスには様々なアクチュエータが用いられている。例えば、通知機能には偏心モータやリニア共振アクチュータ等の電磁式アクチュエータが用いられている。また、フォースフィードバック機能にはこれらの電磁式アクチュエータに加え、圧電式アクチュエータも用いられている。 Various actuators are used for the tactile function device that presents the tactile sensation to the user by vibration. For example, an electromagnetic actuator such as an eccentric motor or a linear resonance actuator is used for the notification function. In addition to these electromagnetic actuators, a piezoelectric actuator is also used for the force feedback function.
　さらに、アクチュエータに加え、ユーザによるパネル等への接触を検知するタッチセンサを備え、ユーザによる接触を検知するとアクチュエータを駆動し、当該パネル等に振動を発生させる装置も開発されている。例えば、特許文献１には、パネルに接触センサと振動素子が設けられた入力システムが開示されている。 Furthermore, in addition to the actuator, a device equipped with a touch sensor that detects contact with the panel or the like by the user, drives the actuator when the contact by the user is detected, and generates vibration in the panel or the like has also been developed. For example, Patent Document 1 discloses an input system in which a contact sensor and a vibration element are provided on a panel.
特開２０１８－１２８７４２号公報Japanese Unexamined Patent Publication No. 2018-128742
　しかしながら、特許文献1に記載のような構成では、一つの装置にタッチセンサとアクチュエータの両者を搭載する必要があり、アクチュエータのみを搭載する場合に比べて製造コストの上昇が避けられない。 However, in the configuration as described in Patent Document 1, it is necessary to mount both the touch sensor and the actuator in one device, and an increase in manufacturing cost is unavoidable as compared with the case where only the actuator is mounted.
　以上のような事情に鑑み、本発明の目的は、タッチ検出と触感提示が可能であり、生産性に優れる圧電素子及び振動発生装置を提供することにある。 In view of the above circumstances, an object of the present invention is to provide a piezoelectric element and a vibration generator capable of touch detection and tactile presentation and having excellent productivity.
　上記目的を達成するため、本発明の一形態に係る圧電素子は、圧電体と、第１実効部と、第２実効部とを具備する。
　上記圧電体は圧電材料からなる。
　上記第１実効部は、第１電極と第２電極を有し、上記第１電極と上記第２電極が上記圧電体を介して対向する。
　上記第２実効部は、第３電極と第４電極を有し、上記第３電極と上記第４電極が上記圧電体を介して対向する。 In order to achieve the above object, the piezoelectric element according to one embodiment of the present invention includes a piezoelectric body, a first effective portion, and a second effective portion.
The piezoelectric material is made of a piezoelectric material.
The first effective portion has a first electrode and a second electrode, and the first electrode and the second electrode face each other via the piezoelectric body.
The second effective portion has a third electrode and a fourth electrode, and the third electrode and the fourth electrode face each other via the piezoelectric body.
　この構成によれば、第１実効部と第２実効部の一方を感圧センサとして、他方を圧電アクチュエータとして機能させることができ、一つの圧電素子によってタッチ検出と触感提示可能である。また、感圧センサと圧電アクチュエータを別々の圧電素子によって実現する場合に比べ、生産性を向上せせることが可能である。 According to this configuration, one of the first effective part and the second effective part can function as a pressure sensor and the other as a piezoelectric actuator, and touch detection and tactile sensation can be presented by one piezoelectric element. In addition, it is possible to improve productivity as compared with the case where the pressure-sensitive sensor and the piezoelectric actuator are realized by separate piezoelectric elements.
　上記第１実効部と上記第２実効部は、上記圧電素子の長手方向において離間していてもよい。 The first effective portion and the second effective portion may be separated from each other in the longitudinal direction of the piezoelectric element.
　上記第１実効部と上記第２実効部は、上記圧電素子の厚み方向において積層されていてもよい。 The first effective portion and the second effective portion may be laminated in the thickness direction of the piezoelectric element.
　上記第１電極は上記圧電体中に設けられた複数の第１内部電極を有し、
　上記第２電極は上記圧電体中に設けられた複数の第２内部電極を有し、
　上記第１内部電極と上記第２内部電極は上記圧電体を介して交互に積層され、
　上記第３電極は上記圧電体中に設けられた複数の第３内部電極を有し、
　上記第４電極は上記圧電体中に設けられた複数の第４内部電極を有し、
　上記第３内部電極と上記第４内部電極は上記圧電体を介して交互に積層されていてもよい。 The first electrode has a plurality of first internal electrodes provided in the piezoelectric body, and has a plurality of first internal electrodes.
The second electrode has a plurality of second internal electrodes provided in the piezoelectric body.
The first internal electrode and the second internal electrode are alternately laminated via the piezoelectric body.
The third electrode has a plurality of third internal electrodes provided in the piezoelectric body.
The fourth electrode has a plurality of fourth internal electrodes provided in the piezoelectric body.
The third internal electrode and the fourth internal electrode may be alternately laminated via the piezoelectric body.
　上記目的を達成するため、本発明の一形態に係る振動発生装置は、圧電素子と、駆動回路とを具備する。
　上記圧電素子は、圧電材料からなる圧電体と、第１電極と第２電極を有し、上記第１電極と上記第２電極が上記圧電体を介して対向する第１実効部と、第３電極と第４電極を有し、上記第３電極と上記第４電極が上記圧電体を介して対向する第２実効部とを備える。
　上記駆動回路は、上記第１実効部において圧電効果により起電圧が発生すると、上記起電圧により、駆動源信号源と上記第２実効部を電気的に接続し、上記駆動信号源から供給される駆動信号により上記第２実効部に逆圧電効果による振動を発生させる。 In order to achieve the above object, the vibration generator according to one embodiment of the present invention includes a piezoelectric element and a drive circuit.
The piezoelectric element has a piezoelectric body made of a piezoelectric material, a first electrode and a second electrode, and a first effective portion and a third effective portion in which the first electrode and the second electrode face each other via the piezoelectric body. It has an electrode and a fourth electrode, and includes a second effective portion in which the third electrode and the fourth electrode face each other via the piezoelectric body.
In the drive circuit, when an electromotive voltage is generated by the piezoelectric effect in the first effective unit, the drive source signal source and the second effective unit are electrically connected by the electromotive voltage and supplied from the drive signal source. The drive signal causes the second effective portion to vibrate due to the inverse piezoelectric effect.
　以上のように本発明によれば、タッチ検出と触感提示が可能であり、生産性に優れる圧電素子及び振動発生装置を提供することが可能である。 As described above, according to the present invention, it is possible to provide a piezoelectric element and a vibration generator which are capable of touch detection and tactile sensation presentation and have excellent productivity.
本発明の実施形態に係る振動発生装置の模式図である。It is a schematic diagram of the vibration generator which concerns on embodiment of this invention. 上記振動発生装置が備える圧電素子の斜視図である。It is a perspective view of the piezoelectric element provided in the said vibration generator. 上記圧電素子の断面図である。It is sectional drawing of the said piezoelectric element. 上記圧電素子の平面図である。It is a top view of the said piezoelectric element. 上記圧電素子が備える第１実効部の断面図である。It is sectional drawing of the 1st effective part provided with the said piezoelectric element. 上記第１実効部が備える第１内部電極の平面図である。It is a top view of the 1st internal electrode provided in the 1st effective part. 上記第１実効部が備える第２内部電極の平面図である。It is a top view of the 2nd internal electrode provided in the 1st effective part. 上記圧電素子が備える第２実効部の断面図である。It is sectional drawing of the 2nd effective part provided with the said piezoelectric element. 上記第２実効部が備える第３内部電極の平面図である。It is a top view of the 3rd internal electrode provided in the 2nd effective part. 上記第２実効部が備える第４内部電極の平面図である。It is a top view of the 4th internal electrode provided in the 2nd effective part. 上記振動発生装置が備える駆動回路の回路図である。It is a circuit diagram of the drive circuit provided in the said vibration generator. 上記振動発生装置が備える、他の構造を有する圧電素子の断面図である。It is sectional drawing of the piezoelectric element which has the other structure provided with the said vibration generator. 上記圧電素子の平面図である。It is a top view of the said piezoelectric element. 上記圧電素子が備える第１実効部の、第１内部電極の平面図である。It is a top view of the 1st internal electrode of the 1st effective part provided with the said piezoelectric element. 上記圧電素子が備える第１実効部の、第２内部電極の平面図である。It is a top view of the 2nd internal electrode of the 1st effective part provided with the said piezoelectric element. 上記圧電素子が備える第２実効部の、第３内部電極の平面図である。It is a top view of the 3rd internal electrode of the 2nd effective part provided with the said piezoelectric element. 上記圧電素子が備える第２実効部の、第４内部電極の平面図である。It is a top view of the 4th internal electrode of the 2nd effective part provided with the said piezoelectric element.
　本発明の実施形態に係る振動発生装置について説明する。 The vibration generator according to the embodiment of the present invention will be described.
　［振動発生装置の構成］
　図１は本実施形態に係る振動発生装置１００の模式図である。同図に示すように振動発生装置１００は、圧電素子１１０及び駆動回路１２０を備える。振動発生装置１００はスマートフォン等の情報処理装置に搭載されるものとすることができる。例えば、圧電素子１１０はスマートフォンのディスプレイパネル等に接合され、駆動回路１２０は当該スマートフォンに内蔵される。 [Vibration generator configuration]
FIG. 1 is a schematic diagram of a vibration generator 100 according to the present embodiment. As shown in the figure, the vibration generator 100 includes a piezoelectric element 110 and a drive circuit 120. The vibration generator 100 can be mounted on an information processing device such as a smartphone. For example, the piezoelectric element 110 is joined to a display panel or the like of a smartphone, and the drive circuit 120 is built in the smartphone.
　［圧電素子の構成］
　図２は、圧電素子１１０の斜視図である。図３は圧電素子１１０の断面図であり、図２のＡ－Ａ線での断面図である。図４は圧電素子１１０の平面図である。図２乃至図４に示すように、圧電素子１１０は圧電体１０１、第１実効部１０２及び第２実効部１０３を備える。 [Piezoelectric element configuration]
FIG. 2 is a perspective view of the piezoelectric element 110. FIG. 3 is a cross-sectional view of the piezoelectric element 110, and is a cross-sectional view taken along the line AA of FIG. FIG. 4 is a plan view of the piezoelectric element 110. As shown in FIGS. 2 to 4, the piezoelectric element 110 includes a piezoelectric body 101, a first effective unit 102, and a second effective unit 103.
　圧電体１０１は圧電材料からなる板状部材である。圧電体１０１を構成する圧電材料は圧電効果及び逆圧電効果を生じるものであればよく、例えばＰＺＴ（チタン酸ジルコン酸鉛）とすることができる。 Piezoelectric body 101 is a plate-shaped member made of a piezoelectric material. The piezoelectric material constituting the piezoelectric body 101 may be any material that produces a piezoelectric effect and an inverse piezoelectric effect, and may be, for example, PZT (lead zirconate titanate).
　図３に示すように、圧電体１０１の一方の主面を主面１０１ａとし、反対側の主面を主面１０１ｂとする。また、図４に示すように、圧電体１０１の長手方向（Ｙ方向）に沿った面を側面１０１ｃ及び側面１０１ｄとする。また、圧電体１０１の短手方向（Ｘ方向）に沿った面を端面１０１ｅ及び端面１０１ｆとする。 As shown in FIG. 3, one main surface of the piezoelectric body 101 is the main surface 101a, and the other main surface is the main surface 101b. Further, as shown in FIG. 4, the surfaces of the piezoelectric body 101 along the longitudinal direction (Y direction) are referred to as the side surface 101c and the side surface 101d. Further, the surfaces of the piezoelectric body 101 along the lateral direction (X direction) are referred to as end faces 101e and end faces 101f.
　第１実効部１０２は、圧電体１０１中に設けられ、感圧センサとして機能する。図５は第１実効部１０２を示す圧電素子１１０の断面図であり、図４のＢ－Ｂ線での断面図である。同図に示すように、第１実効部１０２は第１電極１１１及び第２電極１１２を備える。 The first effective unit 102 is provided in the piezoelectric body 101 and functions as a pressure sensitive sensor. FIG. 5 is a cross-sectional view of the piezoelectric element 110 showing the first effective portion 102, and is a cross-sectional view taken along the line BB of FIG. As shown in the figure, the first effective unit 102 includes a first electrode 111 and a second electrode 112.
　第１電極１１１及び第２電極１１２は互いに絶縁され、圧電体１０１を介して対向する。図５に示すように、第１電極１１１は、第１内部電極１１１ａと第１外部電極１１１ｂを含む。また、第２電極１１２は、第２内部電極１１２ａと第２外部電極１１２ｂを含む。 The first electrode 111 and the second electrode 112 are insulated from each other and face each other via the piezoelectric body 101. As shown in FIG. 5, the first electrode 111 includes a first internal electrode 111a and a first external electrode 111b. Further, the second electrode 112 includes a second internal electrode 112a and a second external electrode 112b.
　第１内部電極１１１ａは、Ａｇ等の導電性材料からなり、圧電体１０１中に複数層が設けられている。図６は第１内部電極１１１ａを示す模式図である。同図に示すように、第１内部電極１１１ａは少なくとも一部が側面１０１ｃに隣接して設けられ、一部が側面１０１ｃに露出する。また、第１内部電極１１１ａは側面１０１ｃ以外の面とは離間するように設けられている。 The first internal electrode 111a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101. FIG. 6 is a schematic view showing the first internal electrode 111a. As shown in the figure, at least a part of the first internal electrode 111a is provided adjacent to the side surface 101c, and a part is exposed to the side surface 101c. Further, the first internal electrode 111a is provided so as to be separated from the surfaces other than the side surface 101c.
　第１外部電極１１１ｂは、Ａｇ等の導電性材料からなり、図５に示すように、主面１０１ａ、主面１０１ｂ及び側面１０１ｃ上に設けられている。上記のように側面１０１ｃには第１内部電極１１１ａが露出するため、第１外部電極１１１ｂは第１内部電極１１１ａに接触し、第１内部電極１１１ａと導通する。なお、第１外部電極１１１ｂは側面１０１ｃ上にのみ設けられてもよい。 The first external electrode 111b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the side surface 101c as shown in FIG. Since the first internal electrode 111a is exposed on the side surface 101c as described above, the first external electrode 111b comes into contact with the first internal electrode 111a and conducts with the first internal electrode 111a. The first external electrode 111b may be provided only on the side surface 101c.
　第２内部電極１１２ａは、Ａｇ等の導電性材料からなり、圧電体１０１中に複数層が設けられている。図７は第２内部電極１１２ａを示す模式図である。同図に示すように、第２内部電極１１２ａは端面１０１ｅに隣接して設けられ、一部が端面１０１ｅに露出する。また、第２内部電極１１２ａは端面１０１ｅ以外の面とは離間するように設けられている。 The second internal electrode 112a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101. FIG. 7 is a schematic view showing the second internal electrode 112a. As shown in the figure, the second internal electrode 112a is provided adjacent to the end face 101e, and a part of the second internal electrode 112a is exposed to the end face 101e. Further, the second internal electrode 112a is provided so as to be separated from the surfaces other than the end surface 101e.
　第２外部電極１１２ｂは、Ａｇ等の導電性材料からなり、図３に示すように、主面１０１ａ、主面１０１ｂ及び端面１０１ｅ上に設けられている。上記のように端面１０１ｅには第２内部電極１１２ａが露出するため、第２外部電極１１２ｂは第２内部電極１１２ａに接触し、第２内部電極１１２ａと導通する。なお、第２外部電極１１２ｂは端面１０１ｅ上にのみ設けられてもよい。 The second external electrode 112b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the end surface 101e as shown in FIG. Since the second internal electrode 112a is exposed on the end face 101e as described above, the second external electrode 112b comes into contact with the second internal electrode 112a and conducts with the second internal electrode 112a. The second external electrode 112b may be provided only on the end face 101e.
　図５に示すように第１内部電極１１１ａと第２内部電極１１２ａは圧電体１０１の内部において複数が交互に積層され、圧電体１０１を介して対向する。第１内部電極１１１ａと第２内部電極１１２ａの数は特に限定されない。 As shown in FIG. 5, a plurality of the first internal electrode 111a and the second internal electrode 112a are alternately laminated inside the piezoelectric body 101 and face each other via the piezoelectric body 101. The number of the first internal electrode 111a and the second internal electrode 112a is not particularly limited.
　第２実効部１０３は、圧電体１０１中に設けられ、圧電アクチュエータとして機能する。図８は第２実効部１０３を示す圧電素子１１０の断面図であり、図４のＣ－Ｃ線での断面図である。同図に示すように、第２実効部１０３は第３電極１１３及び第４電極１１４を備える。 The second effective unit 103 is provided in the piezoelectric body 101 and functions as a piezoelectric actuator. FIG. 8 is a cross-sectional view of the piezoelectric element 110 showing the second effective portion 103, and is a cross-sectional view taken along the line CC of FIG. As shown in the figure, the second effective unit 103 includes a third electrode 113 and a fourth electrode 114.
　第３電極１１３及び第４電極１１４は互いに絶縁され、圧電体１０１を介して対向する。図８に示すように、第３電極１１３は、第３内部電極１１３ａと第３外部電極１１３ｂを含む。また、第４電極１１４は、第４内部電極１１４ａと第４外部電極１１４ｂを含む。 The third electrode 113 and the fourth electrode 114 are insulated from each other and face each other via the piezoelectric body 101. As shown in FIG. 8, the third electrode 113 includes a third internal electrode 113a and a third external electrode 113b. Further, the fourth electrode 114 includes a fourth internal electrode 114a and a fourth external electrode 114b.
　第３内部電極１１３ａは、Ａｇ等の導電性材料からなり、圧電体１０１中に複数層が設けられている。図９は第１内部電極１１３ａを示す模式図である。同図に示すように、第３内部電極１１３ａは少なくとも一部が側面１０１ｃに隣接して設けられ、一部が側面１０１ｃに露出する。また、第３内部電極１１３ａは側面１０１ｃ以外の面とは離間するように設けられている。 The third internal electrode 113a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101. FIG. 9 is a schematic view showing the first internal electrode 113a. As shown in the figure, at least a part of the third internal electrode 113a is provided adjacent to the side surface 101c, and a part is exposed to the side surface 101c. Further, the third internal electrode 113a is provided so as to be separated from the surfaces other than the side surface 101c.
　第３外部電極１１３ｂは、Ａｇ等の導電性材料からなり、図８に示すように、主面１０１ａ、主面１０１ｂ及び側面１０１ｃ上に設けられている。上記のように側面１０１ｃには第３内部電極１１３ａが露出するため、第３外部電極１１３ｂは第３内部電極１１３ａに接触し、第３内部電極１１３ａと導通する。なお、第３外部電極１１３ｂは側面１０１ｃ上にのみ設けられてもよい。 The third external electrode 113b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the side surface 101c as shown in FIG. Since the third internal electrode 113a is exposed on the side surface 101c as described above, the third external electrode 113b comes into contact with the third internal electrode 113a and conducts with the third internal electrode 113a. The third external electrode 113b may be provided only on the side surface 101c.
　第４内部電極１１４ａは、Ａｇ等の導電性材料からなり、圧電体１０１中に複数層が設けられている。図１０は第４内部電極１１４ａを示す模式図である。同図に示すように、第４内部電極１１４ａは端面１０１ｆに隣接して設けられ、一部が端面１０１ｆに露出する。また、第４内部電極１１４ａは端面１０１ｆ以外の面とは離間するように設けられている。 The fourth internal electrode 114a is made of a conductive material such as Ag, and a plurality of layers are provided in the piezoelectric body 101. FIG. 10 is a schematic view showing the fourth internal electrode 114a. As shown in the figure, the fourth internal electrode 114a is provided adjacent to the end face 101f, and a part of the fourth internal electrode 114a is exposed to the end face 101f. Further, the fourth internal electrode 114a is provided so as to be separated from the surfaces other than the end surface 101f.
　第４外部電極１１４ｂは、Ａｇ等の導電性材料からなり、図３に示すように、主面１０１ａ、主面１０１ｂ及び端面１０１ｆ上に設けられている。上記のように端面１０１ｆには第４内部電極１１４ａが露出するため、第４外部電極１１４ｂは第４内部電極１１４ａに接触し、第４内部電極１１４ａと導通する。 The fourth external electrode 114b is made of a conductive material such as Ag, and is provided on the main surface 101a, the main surface 101b, and the end surface 101f as shown in FIG. Since the fourth internal electrode 114a is exposed on the end face 101f as described above, the fourth external electrode 114b comes into contact with the fourth internal electrode 114a and conducts with the fourth internal electrode 114a.
　図８に示すように、第３内部電極１１３ａと第４内部電極１１４ａは圧電体１０１の内部において複数が交互に積層され、圧電体１０１を介して対向する。第３内部電極１１３ａと第４内部電極１１４ａの数は特に限定されない。 As shown in FIG. 8, a plurality of the third internal electrode 113a and the fourth internal electrode 114a are alternately laminated inside the piezoelectric body 101 and face each other via the piezoelectric body 101. The number of the third internal electrode 113a and the fourth internal electrode 114a is not particularly limited.
　第１実効部１０２と第２実効部１０３は以上のような構成を有する。図３に示すように、第１実効部１０２と第２実効部１０３は圧電体１０１の長手方向（Ｙ方向）おいて離間するように設けられている。 The first effective unit 102 and the second effective unit 103 have the above configuration. As shown in FIG. 3, the first effective portion 102 and the second effective portion 103 are provided so as to be separated from each other in the longitudinal direction (Y direction) of the piezoelectric body 101.
　圧電素子１１０は以上のような構成を有する。第１実効部１０２と第２実効部１０３は、同一の積層構造を有するが、駆動回路１２０に接続されることにより、第１実効部１０２が感圧センサとして機能し、第２実効部１０３が圧電アクチュエータとして機能する。 The piezoelectric element 110 has the above configuration. The first effective unit 102 and the second effective unit 103 have the same laminated structure, but by being connected to the drive circuit 120, the first effective unit 102 functions as a pressure-sensitive sensor, and the second effective unit 103 Functions as a piezoelectric actuator.
　［駆動回路の構成］
　図１１は駆動回路１２０の構成を示す回路図である。同図に示すように、駆動回路１２０はアンプ１２１、トランジスタ１２２、ＦＥＴ（Field effect transistor）１２３、キャパシタ１２４、半固定抵抗１２５、ダイオード１２６、抵抗１２７、電池１２８及びツェナーダイオード１２９から構成されている。 [Drive circuit configuration]
FIG. 11 is a circuit diagram showing the configuration of the drive circuit 120. As shown in the figure, the drive circuit 120 is composed of an amplifier 121, a transistor 122, a FET (Field effect transistor) 123, a capacitor 124, a semi-fixed resistor 125, a diode 126, a resistor 127, a battery 128 and a Zener diode 129. ..
　アンプ１２１はキャパシタ１２４を介して駆動信号源１５１に接続されている。トランジスタ１２２はベース（Ｂ）はトリガ信号配線１５２と接続され、コレクタ（Ｃ）はＦＥＴ１２３のゲート（Ｇ）に接続されている。エミッタ（Ｅ）は電池１２８（例えば０．４Ｖ）と接続されている。ＦＥＴ１２３はドレイン（Ｄ）が駆動信号源１５１とアンプ１２１の間に接続され、ゲート（Ｇ）及びソース（Ｓ）は駆動電圧源１５３に接続されている。 The amplifier 121 is connected to the drive signal source 151 via the capacitor 124. The base (B) of the transistor 122 is connected to the trigger signal wiring 152, and the collector (C) is connected to the gate (G) of the FET 123. The emitter (E) is connected to a battery 128 (eg 0.4V). In the FET 123, the drain (D) is connected between the drive signal source 151 and the amplifier 121, and the gate (G) and the source (S) are connected to the drive voltage source 153.
　駆動回路１２０では、通常、駆動電圧源１５３により駆動電圧（例えば５Ｖ）がＦＥＴ１２３に印加され、ＦＥＴ１２３はＯＮ状態となっており、駆動信号はグランドに供給される。この状態で第１実効部１０２が押圧されると、圧電効果により第１電極１１１と第２電極１１２の間に起電圧が発生し、トリガ信号が生成される。 In the drive circuit 120, a drive voltage (for example, 5 V) is normally applied to the FET 123 by the drive voltage source 153, the FET 123 is in the ON state, and the drive signal is supplied to the ground. When the first effective unit 102 is pressed in this state, an electromotive voltage is generated between the first electrode 111 and the second electrode 112 due to the piezoelectric effect, and a trigger signal is generated.
　トリガ信号はトリガ信号配線１５２を介してトランジスタ１２２に入力され、トランジスタ１２２はＯＮ状態となる。これにより、ＦＥＴ１２３はＯＦＦ状態となり、駆動信号源１５１とアンプ１２１が接続される。駆動信号はアンプ１２１により増幅され、第２実効部１０３に入力される。第２実効部１０３は、駆動信号により第３電極１１３と第４電極１１４の間に電位差が生じると、逆圧電効果による振動を生じる。 The trigger signal is input to the transistor 122 via the trigger signal wiring 152, and the transistor 122 is turned on. As a result, the FET 123 is turned off, and the drive signal source 151 and the amplifier 121 are connected. The drive signal is amplified by the amplifier 121 and input to the second effective unit 103. When a potential difference is generated between the third electrode 113 and the fourth electrode 114 by the drive signal, the second effective unit 103 causes vibration due to the inverse piezoelectric effect.
　このように、駆動回路１２０は、圧電効果により第１実効部１０２において発生する起電圧により駆動信号源１５１と第２実効部１０３を電気的に接続し、駆動信号源１５１から供給される駆動信号により第２実効部１０３に逆圧電効果による振動を生じさせる。これにより第１実効部１０２をタッチ検出用の感圧センサとして機能させ、第２実効部１０３を触感提示用の圧電アクチュエータとして機能させることができる。なお、駆動回路１２０の回路構成は図１１示すものに限られず、第１実効部１０２及び第２実効部１０３に上記動作を実行させることが可能なものであればよい。 In this way, the drive circuit 120 electrically connects the drive signal source 151 and the second effective unit 103 by the electromotive voltage generated in the first effective unit 102 due to the piezoelectric effect, and the drive signal supplied from the drive signal source 151. This causes the second effective portion 103 to vibrate due to the inverse piezoelectric effect. As a result, the first effective unit 102 can function as a pressure-sensitive sensor for touch detection, and the second effective unit 103 can function as a piezoelectric actuator for presenting a tactile sensation. The circuit configuration of the drive circuit 120 is not limited to that shown in FIG. 11, and any circuit configuration may be used as long as the first effective unit 102 and the second effective unit 103 can execute the above operation.
　［振動発生装置による効果］
　振動発生装置１００では上記のように、一つの圧電素子１１０の内部に感圧センサとして機能する第１実効部１０２と圧電アクチュエータとして機能する第２実効部１０３が設けられている。第１実効部１０２と第２実効部１０３は同一の積層構造を有しているため、同一のプロセスによって形成することが可能であり、生産性に優れる。また、圧電アクチュエータと感圧センサを一つの素子で実現することができるため、実装が必要な部品点数を削減し、振動発生装置の製造コスト低減が可能である。 [Effect of vibration generator]
As described above, the vibration generator 100 is provided with a first effective unit 102 that functions as a pressure-sensitive sensor and a second effective unit 103 that functions as a piezoelectric actuator inside one piezoelectric element 110. Since the first effective portion 102 and the second effective portion 103 have the same laminated structure, they can be formed by the same process and are excellent in productivity. Further, since the piezoelectric actuator and the pressure-sensitive sensor can be realized by one element, the number of parts that need to be mounted can be reduced, and the manufacturing cost of the vibration generator can be reduced.
　［圧電素子の他の構造］
　圧電素子１１０の構造は上述のものに限られない。図１２は他の構造を有する圧電素子１１０の断面図であり、図１３はこの圧電素子１１０の平面図である。図１２は図１３のＤ－Ｄ線での断面図である。 [Other structures of piezoelectric element]
The structure of the piezoelectric element 110 is not limited to the above. FIG. 12 is a cross-sectional view of the piezoelectric element 110 having another structure, and FIG. 13 is a plan view of the piezoelectric element 110. FIG. 12 is a cross-sectional view taken along the line DD of FIG.
　これらの図に示すように、第１実効部１０２及び第２実効部１０３は、圧電素子１１０の厚み方向（Ｚ方向）において積層されてもよい。 As shown in these figures, the first effective portion 102 and the second effective portion 103 may be laminated in the thickness direction (Z direction) of the piezoelectric element 110.
　図１４は、第１実効部１０２が備える第１内部電極１１１ａを示す模式図である。同図に示すように、第１内部電極１１１ａは一部が側面１０１ｃに露出し、主面１０１ａ及び側面１０１ｃ上に設けられた第１外部電極１１１ｂと導通する。 FIG. 14 is a schematic view showing the first internal electrode 111a included in the first effective unit 102. As shown in the figure, a part of the first internal electrode 111a is exposed on the side surface 101c and conducts with the first external electrode 111b provided on the main surface 101a and the side surface 101c.
　図１５は、第１実効部１０２が備える第２内部電極１１２ａを示す模式図である。同図に示すように、第２内部電極１１２ａは一部が側面１０１ｄに露出し、側面１０１ｄ上に設けられた第２外部電極１１２ｂと導通する。 FIG. 15 is a schematic view showing a second internal electrode 112a included in the first effective unit 102. As shown in the figure, a part of the second internal electrode 112a is exposed on the side surface 101d and conducts with the second external electrode 112b provided on the side surface 101d.
　図１６は、第２実効部１０３が備える第１内部電極１１３ａを示す模式図である。同図に示すように、第３内部電極１１３ａは一部が端面１０１ｅに露出し、端面１０１ｅ上に設けられた第３外部電極１１３ｂと導通する。 FIG. 16 is a schematic diagram showing a first internal electrode 113a included in the second effective unit 103. As shown in the figure, a part of the third internal electrode 113a is exposed to the end surface 101e and conducts with the third external electrode 113b provided on the end surface 101e.
　図１７は、第２実効部１０３が備える第２内部電極１１４ａを示す模式図である。同図に示すように、第４内部電極１１４ａは一部が端面１０１ｆに露出し、主面１０１ｂ及び端面１０１ｆ上に設けられた第４外部電極１１４ｂと導通する。 FIG. 17 is a schematic diagram showing a second internal electrode 114a included in the second effective unit 103. As shown in the figure, a part of the fourth internal electrode 114a is exposed to the end surface 101f and conducts with the main surface 101b and the fourth external electrode 114b provided on the end surface 101f.
　圧電素子１１０はこのように、第１実効部１０２と第２実効部１０３が圧電素子１１０の厚み方向（Ｚ方向）において積層されていてもよい。この他にも圧電素子１１０は、第１実効部１０２と第２実効部１０３が種々の配置をとるものとすることが可能である。 In the piezoelectric element 110, the first effective portion 102 and the second effective portion 103 may be laminated in the thickness direction (Z direction) of the piezoelectric element 110 in this way. In addition to this, in the piezoelectric element 110, the first effective unit 102 and the second effective unit 103 can have various arrangements.
　［振動発生装置の用途］
　振動発生装置１００の用途は特に限定されないが、スマートフォン等のタッチパネルやカメラモジュール焦点制御用アクチュエータ、トラックパッド等の入力デバイス、ウェアラブルセンサー、圧電ハーベスト等に用いることが可能である。 [Use of vibration generator]
The application of the vibration generator 100 is not particularly limited, but it can be used for a touch panel such as a smartphone, an actuator for controlling the focus of a camera module, an input device such as a track pad, a wearable sensor, a piezoelectric harvest, and the like.
　１００…振動発生装置
　１０１…圧電体
　１０２…第１実効部
　１０３…第２実効部
　１１０…圧電素子
　１１１…第１電極
　１１２…第２電極
　１１３…第３電極
　１１４…第４電極
　１２０…駆動回路 100 ... Vibration generator 101 ... Piezoelectric body 102 ... 1st effective part 103 ... 2nd effective part 110 ... Piezoelectric element 111 ... 1st electrode 112 ... 2nd electrode 113 ... 3rd electrode 114 ... 4th electrode 120 ... Drive circuit

Claims (5)

  1. 　圧電材料からなる圧電体と、
    　第１電極と第２電極を有し、前記第１電極と前記第２電極が前記圧電体を介して対向する第１実効部と、
    　第３電極と第４電極を有し、前記第３電極と前記第４電極が前記圧電体を介して対向する第２実効部と
    　を具備する圧電素子。     Piezoelectric material made of piezoelectric material and
    A first effective portion having a first electrode and a second electrode, and the first electrode and the second electrode facing each other via the piezoelectric body.
    A piezoelectric element having a third electrode and a fourth electrode, and comprising a second effective portion in which the third electrode and the fourth electrode face each other via the piezoelectric body.
  2. 　請求項１に記載の圧電素子であって、
    　前記第１実効部と前記第２実効部は、前記圧電素子の長手方向において離間している
    　圧電素子。     The piezoelectric element according to claim 1, wherein the piezoelectric element is used.
    The first effective portion and the second effective portion are piezoelectric elements that are separated from each other in the longitudinal direction of the piezoelectric element.
  3. 　請求項１に記載の圧電素子であって、
    　前記第１実効部と前記第２実効部は、前記圧電素子の厚み方向において積層されている
    　圧電素子。     The piezoelectric element according to claim 1, wherein the piezoelectric element is used.
    The first effective portion and the second effective portion are piezoelectric elements laminated in the thickness direction of the piezoelectric element.
  4. 　請求項１から３のうちいずれか１項に記載の圧電素子であって、
    　前記第１電極は前記圧電体中に設けられた複数の第１内部電極を有し、
    　前記第２電極は前記圧電体中に設けられた複数の第２内部電極を有し、
    　前記第１内部電極と前記第２内部電極は前記圧電体を介して交互に積層され、
    　前記第３電極は前記圧電体中に設けられた複数の第３内部電極を有し、
    　前記第４電極は前記圧電体中に設けられた複数の第４内部電極を有し、
    　前記第３内部電極と前記第４内部電極は前記圧電体を介して交互に積層されている
    　圧電素子。     The piezoelectric element according to any one of claims 1 to 3.
    The first electrode has a plurality of first internal electrodes provided in the piezoelectric body.
    The second electrode has a plurality of second internal electrodes provided in the piezoelectric body.
    The first internal electrode and the second internal electrode are alternately laminated via the piezoelectric body.
    The third electrode has a plurality of third internal electrodes provided in the piezoelectric body.
    The fourth electrode has a plurality of fourth internal electrodes provided in the piezoelectric body.
    The third internal electrode and the fourth internal electrode are piezoelectric elements that are alternately laminated via the piezoelectric body.
  5. 　圧電材料からなる圧電体と、第１電極と第２電極を有し、前記第１電極と前記第２電極が前記圧電体を介して対向する第１実効部と、第３電極と第４電極を有し、前記第３電極と前記第４電極が前記圧電体を介して対向する第２実効部とを備える圧電素子と、
    　前記第１実効部において圧電効果により起電圧が発生すると、前記起電圧により、駆動源信号源と前記第２実効部を電気的に接続し、前記駆動信号源から供給される駆動信号により前記第２実効部に逆圧電効果による振動を発生させる駆動回路と
    　を具備する振動発生装置。     A first effective portion having a piezoelectric body made of a piezoelectric material, a first electrode and a second electrode, and the first electrode and the second electrode facing each other via the piezoelectric body, and a third electrode and a fourth electrode. A piezoelectric element having a third electrode and a second effective portion in which the fourth electrode faces each other via the piezoelectric body.
    When an electromotive voltage is generated by the piezoelectric effect in the first effective unit, the drive source signal source and the second effective unit are electrically connected by the electromotive voltage, and the drive signal supplied from the drive signal source causes the first. 2 A vibration generator equipped with a drive circuit that generates vibration due to the inverse piezoelectric effect in the effective part.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006048302A (en) * 2004-08-03 2006-02-16 Sony Corp Piezoelectric complex unit, its manufacturing method, its handling method, its control method, input/output device and electronic equipment
JP2011048855A (en) * 2010-11-04 2011-03-10 Kyocera Corp Input apparatus and control method of input apparatus
WO2017082105A1 (en) * 2015-11-13 2017-05-18 株式会社村田製作所 Piezoelectric deflection sensor and detection device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006048302A (en) * 2004-08-03 2006-02-16 Sony Corp Piezoelectric complex unit, its manufacturing method, its handling method, its control method, input/output device and electronic equipment
JP2011048855A (en) * 2010-11-04 2011-03-10 Kyocera Corp Input apparatus and control method of input apparatus
WO2017082105A1 (en) * 2015-11-13 2017-05-18 株式会社村田製作所 Piezoelectric deflection sensor and detection device

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