WO2021232767A1 - Mems麦克风的信号处理方法、装置及mems麦克风 - Google Patents

Mems麦克风的信号处理方法、装置及mems麦克风 Download PDF

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Publication number
WO2021232767A1
WO2021232767A1 PCT/CN2020/136797 CN2020136797W WO2021232767A1 WO 2021232767 A1 WO2021232767 A1 WO 2021232767A1 CN 2020136797 W CN2020136797 W CN 2020136797W WO 2021232767 A1 WO2021232767 A1 WO 2021232767A1
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Prior art keywords
electrical signal
mems microphone
predetermined
signal
threshold
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PCT/CN2020/136797
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English (en)
French (fr)
Inventor
李钉云
安康
吴劼
舒开发
杨征
朱宗霞
韩菲菲
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歌尔股份有限公司
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Priority to US17/929,024 priority Critical patent/US20230083805A1/en
Publication of WO2021232767A1 publication Critical patent/WO2021232767A1/zh

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R29/00—Monitoring arrangements; Testing arrangements
    • H04R29/004—Monitoring arrangements; Testing arrangements for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/008—Transducers other than those covered by groups H04R9/00 - H04R21/00 using optical signals for detecting or generating sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/70—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer
    • G06F21/71—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer to assure secure computing or processing of information
    • G06F21/75—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer to assure secure computing or processing of information by inhibiting the analysis of circuitry or operation
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10L—SPEECH ANALYSIS TECHNIQUES OR SPEECH SYNTHESIS; SPEECH RECOGNITION; SPEECH OR VOICE PROCESSING TECHNIQUES; SPEECH OR AUDIO CODING OR DECODING
    • G10L15/00—Speech recognition
    • G10L15/22—Procedures used during a speech recognition process, e.g. man-machine dialogue
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/08—Mouthpieces; Microphones; Attachments therefor
    • H04R1/083—Special constructions of mouthpieces
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/007—Protection circuits for transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/04—Circuits for transducers, loudspeakers or microphones for correcting frequency response
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/015—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being integrated on the same substrate
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10L—SPEECH ANALYSIS TECHNIQUES OR SPEECH SYNTHESIS; SPEECH RECOGNITION; SPEECH OR VOICE PROCESSING TECHNIQUES; SPEECH OR AUDIO CODING OR DECODING
    • G10L15/00—Speech recognition
    • G10L15/22—Procedures used during a speech recognition process, e.g. man-machine dialogue
    • G10L2015/223—Execution procedure of a spoken command
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Definitions

  • the embodiments of the present disclosure relate to the technical field of signal processing. More specifically, the embodiments of the present disclosure relate to a signal processing method of a MEMS microphone, a signal processing device of a MEMS microphone, and a MEMS microphone.
  • MEMS microphone is an acousto-electric transducer made by micro-machining technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the development of smaller and thinner electronic devices, MEMS microphones are more and more widely used in these devices.
  • the MEMS microphone includes a MEMS chip and an ASIC chip electrically connected to the MEMS chip.
  • the capacitance of the MEMS chip will change correspondingly with the input sound signal, and then the ASIC chip is used to process and output the changed capacitance signal to realize the sound pickup.
  • the MEMS chip may include a substrate with a back cavity, and a diaphragm and a back electrode plate supported on the substrate, and the diaphragm and the back electrode plate are spaced apart.
  • the sound hole of the MEMS microphone is connected to the back cavity, and external sound and air flow can directly enter the back cavity of the MEMS chip.
  • the diaphragm of the MEMS chip vibrates to generate an electric signal to realize the sound-electric conversion function.
  • the voice signal can be modulated on the laser, and then when the laser modulated with the voice signal is hit on the MEMS microphone, the MEMS microphone will recognize the voice signal modulated in the laser.
  • the principle that the MEMS microphone can sense the laser signal that modulates the sound and recognize the acoustic signal, and the laser can be used to attack the MEMS microphone, so that it can interact with the smart voice device equipped with the MEMS microphone without making a sound.
  • attackers can use lasers to command smart voice devices to unlock, shop online, start vehicles remotely, and a series of sensitive operations.
  • the purpose of the embodiments of the present disclosure is to provide a new technical solution for signal processing of a MEMS microphone.
  • a signal processing method for a MEMS microphone including:
  • the second electrical signal is an interference signal.
  • that the second electrical signal meets a predetermined condition includes:
  • the second electrical signal reaches a predetermined second threshold.
  • that the second electrical signal meets a predetermined condition includes:
  • the step of determining that the second electrical signal is an interference signal includes :
  • the second electrical signal is an interference signal.
  • determining that the second electrical signal is an interference signal includes:
  • it also includes:
  • the step of shielding the interference signal is the step of shielding the interference signal.
  • it also includes:
  • the execution of the predetermined control instruction is prohibited.
  • it also includes:
  • the second electrical signal is output.
  • a signal processing device for a MEMS microphone including:
  • the first acquisition module is configured to acquire the first electrical signal obtained by converting the received optical signal by the optical sensor arranged near the sound hole of the MEMS microphone;
  • the second acquisition module is used to acquire the second electrical signal output by the MEMS microphone
  • the judging module is used for judging that the second electrical signal is an interference signal when the first electrical signal acquired within the substantially coincident time range reaches a predetermined first threshold and the second electrical signal meets a predetermined condition.
  • a signal processing device for a MEMS microphone including a processor and a memory.
  • the memory stores computer instructions.
  • the present disclosure is executed. The method provided in the first aspect of the embodiment.
  • a MEMS microphone including a MEMS microphone body and a light sensor; the MEMS microphone body is provided with a sound hole, and the light sensor is arranged near the sound hole of the MEMS microphone body;
  • the optical sensor is used to convert a received optical signal to obtain a first electrical signal
  • the MEMS microphone body is used to output a second electrical signal.
  • the light response frequency band of the light sensor is an ultraviolet light frequency band and/or a visible light frequency band and/or an infrared light frequency band.
  • the photosensor includes a photosensitive element, and the photosensitive element is a photoresistor, a photodiode, or a phototransistor.
  • the second electrical signal is judged to be an interference signal, so as to avoid mistakenly thinking that the second electrical signal is obtained by converting the picked-up sound signal by the MEMS microphone. Prevent the back-end electronic equipment from giving feedback on the control commands generated according to the interference signal, and improve the safety of using MEMS microphones.
  • FIG. 1 is a schematic diagram of the hardware configuration of a system that can be used to implement an embodiment of the present disclosure
  • FIG. 2 is a schematic flowchart of a signal processing method for a MEMS microphone according to an embodiment of the disclosure
  • FIG. 3 is a structural block diagram of a signal processing device of a MEMS microphone according to an embodiment of the disclosure
  • FIG. 4 is a structural block diagram of a signal processing device of a MEMS microphone according to an embodiment of the disclosure
  • FIG. 5 is a schematic structural diagram of a MEMS microphone according to an embodiment of the disclosure.
  • FIG. 6 is a schematic structural diagram of a MEMS microphone according to an embodiment of the disclosure.
  • FIG. 1 is a schematic structural diagram showing a system that can implement a signal processing method of a MEMS microphone according to an embodiment of the present disclosure.
  • the system 100 includes a signal processing device 1000, a MEMS microphone 2000, and a sound hole arranged near the MEMS microphone 1000.
  • the signal processing device 1000 is electrically connected with the MEMS microphone 2000 and the optical sensor 3000 to obtain the electrical signal output by the MEMS microphone 2000 and the electrical signal obtained by the optical sensor 3000 converting the received optical signal.
  • the signal processing device 1000, the MEMS microphone 2000, and the light sensor 3000 may be integrated in one device.
  • the system 100 may be a smart voice device, a smart home, a smart terminal with a voice recognition function, etc., provided with a MEMS microphone and a light sensor.
  • the system 100 may be a smart speaker, a smart phone, or a smart door lock.
  • the processing device 1000 may include a processor 1100, a memory 1200, an interface device 1300, a communication device 1400, a display device 1500, and an input device 1600.
  • the processor 1100 may be, for example, a central processing unit CPU, a microprocessor MCU, or the like.
  • the memory 1200 includes, for example, ROM (Read Only Memory), RAM (Random Access Memory), nonvolatile memory such as a hard disk, and the like.
  • the interface device 1300 includes, for example, a USB interface, a serial interface, and the like.
  • the communication device 1400 can perform wired or wireless communication, for example.
  • the display device 1500 is, for example, a liquid crystal display, an LED display, a touch display, or the like.
  • the input device 1600 includes, for example, a touch screen, a keyboard, and the like. Although multiple devices are shown for the signal processing device 1000 in FIG. 1, the present invention may only involve some of the devices. For example, the signal processing device 1000 only involves the processor 1100 and the memory 1200.
  • the memory 1200 of the signal processing device 1000 is used to store instructions, and the instructions are used to control the processor 1100 to operate to support the implementation of the MEMS microphone according to any of the embodiments provided in the first aspect of the present disclosure.
  • Signal processing method. Technicians can design instructions according to the solutions disclosed in the embodiments of the present disclosure. How the instruction controls the processor to operate is well known in the art, so it will not be described in detail here.
  • the system 100 shown in FIG. 1 is merely explanatory, and is in no way intended to limit the present disclosure, its applications, or uses.
  • the signal processing method of the MEMS microphone includes the following steps:
  • Step 202 Obtain a first electrical signal obtained by converting the optical signal received by the optical sensor disposed near the sound hole of the MEMS microphone.
  • the light sensor is used to convert the received light signal to obtain the first electrical signal, and output the first electrical signal.
  • the light sensor is arranged near the sound hole of the MEMS microphone to detect whether there is a light beam illuminating the MEMS microphone.
  • the signal processing device is electrically connected to the light sensor to obtain the first electrical signal output by the light sensor.
  • the signal processing device can determine whether a light beam illuminates the MEMS microphone according to the first electrical signal output by the light sensor. According to the embodiment of the present disclosure, by acquiring the first electrical signal output by the light sensor arranged near the sound hole of the MEMS microphone, it can be determined whether there is a light beam illuminating the MEMS microphone, and it can further detect whether the MEMS microphone is attacked by the light beam, thereby avoiding back-end electronic equipment Give feedback to control commands generated based on interference signals to improve the safety of using MEMS microphones.
  • Step 204 Obtain a second electrical signal output by the MEMS microphone.
  • the second electrical signal may be generated by the vibration of the diaphragm of the MEMS microphone when external sound enters the back cavity of the MEMS microphone.
  • the second electrical signal may be that when the MEMS microphone is irradiated by laser, the laser pulse will heat the diaphragm of the MEMS microphone. The thermal expansion of the air around the diaphragm of the MEMS microphone will cause pressure on the diaphragm of the MEMS microphone. Produced by vibrating the diaphragm of a MEMS microphone.
  • the second electrical signal may also be generated by the vibration of the diaphragm of the MEMS microphone when laser light modulated with a voice signal is hit on the MEMS microphone. In other words, when the MEMS microphone is illuminated by the light beam, the diaphragm of the MEMS microphone will also vibrate and output the second electrical signal.
  • the signal processing device is electrically connected with the MEMS microphone to obtain the second electrical signal output by the MEMS microphone.
  • the signal processing device can determine whether the second electrical signal is generated by the MEMS microphone being irradiated by the light beam according to the acquired first electrical signal and the second electrical signal.
  • Step 206 When the first electrical signal acquired within the substantially coincident time range reaches a predetermined first threshold and the second electrical signal meets a predetermined condition, determine that the second electrical signal is an interference signal.
  • the signal processing device stores the acquired first electrical signal and the second electrical signal, and respectively marks the time when the first electrical signal is acquired and the time when the second electrical signal is acquired.
  • the time for acquiring the first electrical signal and the time for acquiring the second electrical signal are within a substantially coincident time range, it is determined whether the first electrical signal reaches a predetermined first threshold and whether the second electrical signal meets a predetermined condition.
  • the first electrical signal reaches the predetermined first threshold and the second electrical signal meets the predetermined condition, it is considered that the second electrical signal is generated by the MEMS microphone being irradiated by the light beam, and the second electrical signal is determined as the interference signal.
  • the time when the first electrical signal is acquired and the time when the second electrical signal is acquired are within a time range that substantially coincides with each other, which may refer to the first electrical signal and the second electrical signal acquired at the same time.
  • the time for acquiring the first electrical signal and the time for acquiring the second electrical signal are within the time range that substantially overlaps. It may also mean that the time difference between the time for acquiring the first electrical signal and the time for acquiring the second electrical signal is within a predetermined time range. .
  • the signal processing device compares the first electrical signal with a predetermined first threshold to determine whether the MEMS microphone is irradiated by the light beam. When the first electrical signal reaches the predetermined first threshold, it is determined that the MEMS microphone is irradiated by the light beam. When the first electrical signal does not reach the predetermined first threshold, it is determined that the MEMS microphone is not irradiated by the light beam. For example, when the light sensor is not stimulated by the outside, the first electrical signal is the electrical signal of the light sensor itself. At this time, the first electrical signal does not reach the first threshold, and it can be determined that the MEMS microphone is not irradiated by the light beam.
  • the light sensor when the MEMS microphone is in normal use, the light sensor will be irradiated by natural light or illuminating light. At this time, the first electrical signal converted by the light sensor is much smaller than the first threshold, and it can be determined that the MEMS microphone is not irradiated by the light beam.
  • the first threshold may be set in advance, and the predetermined first threshold may be set according to engineering experience or simulation test experience, which is not limited in the embodiment of the present disclosure.
  • the first threshold may be set according to the type of the light sensor.
  • the light sensor may be a photoresistor. When the photoresistor is not irradiated by the light beam, the resistance value of the photoresistor is larger, generally greater than 1 megaohm; when the photoresistor is irradiated by the light beam, the resistance value of the photoresistor becomes smaller, generally less than a few thousand ohms.
  • the photoresistor when a constant voltage is applied to the photoresistor, it can be determined whether the photoresistor is irradiated by the light beam by detecting the change of the current in the circuit of the photoresistor, that is, whether the MEMS microphone is irradiated by the light beam.
  • the first electrical signal acquired by the signal processing device is the current value of the circuit of the photoresistor
  • the first threshold value is a predetermined first current value threshold value.
  • the signal processing device obtains the second electrical signal output by the MEMS microphone, and determines whether the second signal meets a predetermined condition, so as to determine whether the MEMS microphone performs acoustic-electric conversion.
  • the second electrical signal is the electrical signal generated by the acoustic-electric conversion when the MEMS microphone is irradiated by the light beam.
  • that the second electrical signal meets a predetermined condition includes: the second electrical signal reaches a predetermined second threshold.
  • the second threshold may be preset, and the predetermined second threshold may be set according to engineering experience or simulation test experience, which is not limited in the embodiment of the present disclosure.
  • the second electrical signal may be the capacitance value of the MEMS chip of the MEMS microphone, and the predetermined second threshold value is the second capacitance value threshold value.
  • the predetermined second capacitance value threshold When the second electrical signal is greater than or equal to the predetermined second capacitance value threshold, it is considered that the second electrical signal meets the predetermined condition. At this time, it can be determined that acoustic-electrical conversion occurs in the MEMS microphone.
  • the second electrical signal is less than the predetermined second capacitance value threshold, it is considered that the second electrical signal does not meet the predetermined condition.
  • the second electrical signal is less than the predetermined second capacitance threshold, it is considered that the second electrical signal meets the predetermined condition.
  • the chip of the MEMS microphone does not sense external stimulation, and The electrical signal is the capacitance value of the chip itself of the MEMS microphone.
  • the second electrical signal does not reach the second threshold, and it can be determined that no acoustic-electric conversion occurs in the MEMS microphone.
  • the second electrical signal generated by the MEMS microphone chip sensing the sound signal or the light signal does not reach the second threshold, and it can be determined that no sound-electricity occurs in the MEMS microphone. Conversion.
  • that the second electrical signal meets a predetermined condition includes: performing voice recognition on the second electrical signal to obtain a predetermined control instruction.
  • voice recognition is performed on the second electrical signal to obtain a predetermined control instruction.
  • other electronic devices can be controlled to work.
  • the other electronic device may be an electronic device that establishes a communication connection with the signal processing device.
  • Other electronic devices may also be electronic devices integrated with signal processing devices.
  • Other electronic devices can be smart voice devices, smart homes, smart terminals with voice recognition functions, and so on.
  • the external device may be a smart speaker, a smart phone, or a smart door lock.
  • the control instruction may be preset according to the usage scenarios of other electronic devices.
  • the predetermined control instruction may be an instruction to control the opening and closing of the smart door lock.
  • the predetermined control instruction may be an instruction to confirm payment.
  • the signal processing method of the MEMS microphone may further include: prohibiting execution of the predetermined control instruction.
  • the step of determining that the second electrical signal is an interference signal may be It further includes: steps 302-306.
  • Step 302 Acquire the first electrical signal and the second electrical signal synchronously.
  • Step 304 Start timing when the first electrical signal acquired at the same time reaches a predetermined first threshold and the second electrical signal reaches a predetermined second threshold.
  • Step 306 When performing voice recognition on the second electrical signal within a predetermined timing to obtain a predetermined control instruction, determine that the second electrical signal is an interference signal.
  • the signal processing device acquires the first electrical signal and the second electrical signal synchronously, and stores the first electrical signal and the second electrical signal.
  • the first electrical signal and the second electrical signal acquired at the same time are selected, the first electrical signal is compared with a predetermined first threshold, and the second electrical signal is compared with a predetermined second threshold.
  • the second electrical signal is considered to be the electrical signal generated when the MEMS microphone is irradiated by the light beam.
  • the timing is started, and voice recognition is performed on the second electrical signal. It is further determined whether a predetermined control instruction is obtained by performing voice recognition on the second electrical signal.
  • Stop timing when performing voice recognition on the second electrical signal to obtain a predetermined control instruction and obtain the timing time. Determine whether the timing time is within the predetermined timing.
  • the control command obtained according to the second electrical signal can be used to manipulate other electronic devices, that is, the second electrical signal is generated by the MEMS microphone being irradiated by the light beam and can be used to perform the second electrical signal.
  • Voice recognition obtains control instructions for manipulating other electronic devices to perform corresponding operations.
  • the second electrical signal is judged as an interference signal to avoid mistakenly thinking that the second electrical signal is obtained by converting the picked-up sound signal by the MEMS microphone.
  • the step of determining that the second electrical signal is an interference signal may further include: steps 3062-3064.
  • Step 3062 it is determined whether the second electrical signal matches a predetermined voice recognition model.
  • Step 3064 If yes, determine that the second electrical signal performs voice recognition to obtain a predetermined control instruction.
  • the speech recognition model may be preset.
  • the voice recognition model is stored in the signal processing device.
  • the second electrical signal is input into a predetermined speech recognition model to obtain a recognition result . It is determined whether the recognition result is a predetermined control instruction, and if the recognition result is a predetermined control instruction, the second electrical signal is considered to be an interference signal.
  • the signal processing method of the MEMS microphone may further include the step of shielding the interference signal.
  • shielding the interference signal can avoid controlling the electronic device connected to the MEMS microphone according to the control command generated by the interference signal, and improve the safety of using the MEMS microphone.
  • the signal processing method of the MEMS microphone may further include: when the first electrical signal does not reach a predetermined first threshold, outputting a second electrical signal.
  • the first electrical signal when the first electrical signal does not reach the predetermined first threshold, it is considered that the MEMS microphone is not illuminated by the light beam.
  • the second electrical signal generated by the MEMS microphone is not an interference signal, and the second electrical signal can be directly output. According to the second electrical signal, other electronic devices connected to the MEMS microphone are controlled to execute corresponding instructions.
  • the second electrical signal is judged to be an interference signal, so as to avoid mistakenly thinking that the second electrical signal is obtained by converting the picked-up sound signal by the MEMS microphone. Prevent the back-end electronic equipment from giving feedback on the control commands generated according to the interference signal, and improve the safety of using MEMS microphones.
  • an embodiment of the present disclosure provides a signal processing device 30 for a MEMS microphone.
  • the signal processing device 30 may be, for example, the signal processing device 1000 shown in FIG. 1.
  • the signal processing device 30 of the MEMS microphone includes a first acquisition module 31, a second acquisition module 32, and a judgment module 33.
  • the first obtaining module 31 may be used to obtain a first electrical signal obtained by converting a received optical signal by a photo sensor arranged near the sound hole of the MEMS microphone.
  • the second acquisition module 32 may be used to acquire the second electrical signal output by the MEMS microphone.
  • the judging module 33 can be used to judge that the second electrical signal is an interference signal when the first electrical signal acquired within the substantially coincident time range reaches a predetermined first threshold and the second electrical signal meets a predetermined condition.
  • the second electrical signal meeting a predetermined condition includes:
  • the second electrical signal reaches a predetermined second threshold.
  • the second electrical signal meeting a predetermined condition includes:
  • the judgment module 33 may also be used to obtain the first electrical signal and the second electrical signal synchronously;
  • the second electrical signal is an interference signal.
  • an embodiment of the present disclosure provides a signal processing device 40 for a MEMS microphone.
  • the signal processing device 40 may be, for example, the signal processing device 1000 shown in FIG. 1.
  • the signal processing device 40 of the MEMS microphone includes a processor 41 and a memory 42.
  • the memory 42 is used to store a computer program, and when the computer program is executed by the processor 41, the signal processing method of the MEMS microphone disclosed in any one of the foregoing embodiments is implemented.
  • an embodiment of the present disclosure provides a MEMS microphone including a MEMS microphone body 51 and a light sensor 52.
  • the MEMS microphone body 51 is provided with an acoustic hole 511, and the optical sensor 52 is arranged near the acoustic hole 511 of the MEMS microphone body 51.
  • the optical sensor 52 may be used to convert the received optical signal to obtain the first electrical signal.
  • the MEMS microphone body 51 can be used to output a second electrical signal.
  • the light sensor 52 is arranged near the sound hole of the MEMS microphone body to detect whether a light beam illuminates the MEMS microphone, and the light beam can interfere with the MEMS microphone.
  • the light sensor 52 may be circular, bar-shaped, ring-shaped, or the like.
  • Various forms of light sensors 52 can achieve the technical effects of the embodiments of the present disclosure, which are not limited in the embodiments of the present disclosure.
  • the light sensor 52 may have a ring shape, and the light sensor 52 may be arranged around the sound hole of the MEMS microphone. For the case where the intensity of the light beam is weak, this arrangement can also be detected.
  • the light response frequency band of the light sensor 52 is an ultraviolet light frequency band and/or a visible light frequency band and/or an infrared light frequency band.
  • the light response section of the light sensor 52 can be set according to the use scene of the MEMS microphone.
  • the photosensor 52 includes a photosensitive element, and the photosensitive element is a photoresistor, a photodiode, or a phototransistor.
  • the embodiments of the present disclosure may be systems, methods, and/or computer program products.
  • the computer program product may include a computer-readable storage medium loaded with computer-readable program instructions for enabling a processor to implement various aspects of the embodiments of the present disclosure.
  • the computer-readable storage medium may be a tangible device that can hold and store instructions used by the instruction execution device.
  • the computer-readable storage medium may be, for example, but not limited to, an electrical storage device, a magnetic storage device, an optical storage device, an electromagnetic storage device, a semiconductor storage device, or any suitable combination of the foregoing.
  • Non-exhaustive list of computer-readable storage media include: portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM) Or flash memory), static random access memory (SRAM), portable compact disk read-only memory (CD-ROM), digital versatile disk (DVD), memory stick, floppy disk, mechanical encoding device, such as a printer with instructions stored thereon
  • RAM random access memory
  • ROM read-only memory
  • EPROM erasable programmable read-only memory
  • flash memory flash memory
  • SRAM static random access memory
  • CD-ROM compact disk read-only memory
  • DVD digital versatile disk
  • memory stick floppy disk
  • mechanical encoding device such as a printer with instructions stored thereon
  • the computer-readable storage medium used here is not interpreted as the instantaneous signal itself, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through waveguides or other transmission media (for example, light pulses through fiber optic cables), or through wires Transmission of electrical signals.
  • the computer-readable program instructions described herein can be downloaded from a computer-readable storage medium to various computing/processing devices, or downloaded to an external computer or external storage device via a network, such as the Internet, a local area network, a wide area network, and/or a wireless network.
  • the network may include copper transmission cables, optical fiber transmission, wireless transmission, routers, firewalls, switches, gateway computers, and/or edge servers.
  • the network adapter card or network interface in each computing/processing device receives computer-readable program instructions from the network, and forwards the computer-readable program instructions for storage in the computer-readable storage medium in each computing/processing device .
  • the computer program instructions used to perform the operations of the embodiments of the present disclosure may be assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-related instructions, microcode, firmware instructions, state setting data, or one or more programming instructions.
  • Source code or object code written in any combination of languages, the programming language includes object-oriented programming languages such as Smalltalk, C++, etc., and conventional procedural programming languages such as "C" language or similar programming languages.
  • Computer-readable program instructions can be executed entirely on the user's computer, partly on the user's computer, executed as a stand-alone software package, partly on the user's computer and partly executed on a remote computer, or entirely on the remote computer or server implement.
  • the remote computer can be connected to the user's computer through any kind of network-including a local area network (LAN) or a wide area network (WAN), or it can be connected to an external computer (for example, using an Internet service provider to connect to the user's computer) connect).
  • LAN local area network
  • WAN wide area network
  • an electronic circuit such as a programmable logic circuit, a field programmable gate array (FPGA), or a programmable logic array (PLA), can be customized by using the status information of the computer-readable program instructions.
  • the computer-readable program instructions are executed to implement various aspects of the embodiments of the present disclosure.
  • These computer-readable program instructions can be provided to the processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, thereby producing a machine that makes these instructions when executed by the processor of the computer or other programmable data processing device , A device that implements the functions/actions specified in one or more blocks in the flowcharts and/or block diagrams is produced. It is also possible to store these computer-readable program instructions in a computer-readable storage medium. These instructions make computers, programmable data processing apparatuses, and/or other devices work in a specific manner, so that the computer-readable medium storing the instructions includes An article of manufacture, which includes instructions for implementing various aspects of the functions/actions specified in one or more blocks in the flowcharts and/or block diagrams.
  • each block in the flowchart or block diagram may represent a module, program segment, or part of an instruction, and the module, program segment, or part of an instruction contains one or more components for realizing the specified logical function.
  • Executable instructions may also occur in a different order from the order marked in the drawings. For example, two consecutive blocks can actually be executed substantially in parallel, or they can sometimes be executed in the reverse order, depending on the functions involved.
  • each block in the block diagram and/or flowchart, and the combination of the blocks in the block diagram and/or flowchart can be implemented by a dedicated hardware-based system that performs the specified functions or actions Or it can be realized by a combination of dedicated hardware and computer instructions. It is well known to those skilled in the art that realization by hardware, realization by software, and realization by a combination of software and hardware are all equivalent.

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Abstract

本公开实施例公开了一种MEMS麦克风的信号处理方法、装置及MEMS麦克风，该方法包括：获取通过设置在MEMS麦克风声孔附近的光传感器对接收到的光信号进行转换获得的第一电信号；获取MEMS麦克风输出的第二电信号；当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断第二电信号为干扰信号。

Description

MEMS麦克风的信号处理方法、装置及MEMS麦克风
本申请要求于2020年5月19日提交中国专利局、申请号为202010425443.0、发明名称为“MEMS麦克风的信号处理方法、装置及MEMS麦克风”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本公开实施例涉及信号处理技术领域，更具体地，本公开实施例涉及一种MEMS麦克风的信号处理方法、一种MEMS麦克风的信号处理装置及一种MEMS麦克风。
背景技术
MEMS麦克风是一种用微机械加工技术制作出来的声电换能器，其具有体积小、频响特性好、噪声低等特点。随着电子设备的小巧化、薄型化发展，MEMS麦克风被越来越广泛地运用到这些设备上。
MEMS麦克风包括MEMS芯片和与该MEMS芯片电连接的ASIC芯片。MEMS芯片的电容会随着输入声音信号的不同产生相应的变化，再利用ASIC芯片对变化的电容信号进行处理和输出从而实现对声音的拾取。MEMS芯片可以包括具有背腔的衬底，以及支撑在衬底上的振膜和背极板，振膜与背极板间隔开来。MEMS麦克风的声孔与背腔连通，外部的声音、气流可以直接进入到MEMS芯片的背腔内。在外部的声音或者气流进入MEMS芯片的背腔内时，MEMS芯片的振膜发生振动产生电信号，实现声-电转换功能。
但是，经研究发现，可以将语音信号调制到激光上，再将调制有语音信号的激光打到MEMS麦克风上时，MEMS麦克风会识别到激光中调制的语音信号。利用MEMS麦克风能够感应调制声音的激光信号并识别出声信号的原理，可以使用激光攻击MEMS麦克风，这样在不发出声音的情况下可以与设置有MEMS麦克风的智能语音设备进行交互。例如，攻击者可以使用激光命令智能语音设备进行解锁、在线购物、远程启动车辆以及一系列敏感操作。
因此，有必要提供一种新的MEMS麦克风的信号处理方法。
发明内容
本公开实施例的目的在于提供一种MEMS麦克风的信号处理的新技术方案。
根据本公开实施例的第一方面，提供了一种MEMS麦克风的信号处理方法，包括：
获取通过设置在所述MEMS麦克风声孔附近的光传感器对接收到的光信号进行转换获得的第一电信号；
获取所述MEMS麦克风输出的第二电信号；
当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断所述第二电信号为干扰信号。
可选地，所述第二电信号符合预定条件包括：
所述第二电信号达到预定的第二阈值。
可选地，所述第二电信号符合预定条件包括：
对所述第二电信号进行语音识别获得预定的控制指令。
可选地，当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且所述第二电信号符合预定条件时，判断所述第二电信号为干扰信号的步骤包括：
同步获取所述第一电信号和所述第二电信号；
当同一时刻获取的所述第一电信号达到预定的第一阈值且所述第二电信号达到预定的第二阈值时启动计时；
当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号。
可选地，当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号包括：
判断所述第二电信号是否匹配预定的语音识别模型；
如是，确定所述第二电信号进行语音识别获得预定的控制指令。
可选地，还包括：
对所述干扰信号进行屏蔽的步骤。
可选地，还包括：
禁止执行所述预定的控制指令。
可选地，还包括：
当所述第一电信号未达到预定的第一阈值时，输出第二电信号。
根据本公开实施例的第二方面，提供了一种MEMS麦克风的信号处理装置，包括：
第一获取模块，用于获取通过设置在所述MEMS麦克风声孔附近的光传感器对接收到的光信号进行转换获得的第一电信号；
第二获取模块，用于获取所述MEMS麦克风输出的第二电信号；
判断模块，用于当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断所述第二电信号为干扰信号。
根据本公开实施例的第三方面，提供了一种MEMS麦克风的信号处理装置，包括处理器和存储器，所述存储器存储有计算机指令，所述计算机指令被所述处理器运行时，执行本公开实施例的第一方面提供的方法。
根据本公开实施例的第四方面，提供了一种MEMS麦克风，包括MEMS麦克风本体和光传感器；所述MEMS麦克风本体上设置有声孔，所述光传感器设置在所述MEMS麦克风本体的声孔附近；
所述光传感器，用于对接收到的光信号进行转换获得的第一电信号；
所述MEMS麦克风本体，用于输出第二电信号。
可选地，所述光传感器的光响应频段为紫外光频段和/或可见光频段和/或红外光频段。
可选地，所述光传感器包括光敏元件，所述光敏元件为光敏电阻、光敏二极管或光敏三极管。
根据本公开实施例，通过获取设置在MEMS麦克风声孔附近的光传感器输出的第一电信号和MEMS麦克风输出的第二电信号，当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，将所述第二电信号判断为干扰信号，以避免将第二电信号误认为是MEMS麦克风对拾取到的声音信号转换获得的，从而避免后端电子设备对根据干扰信号生成的控制指令做出反馈，提高使用MEMS麦克风的安全性。
通过以下参照附图对本公开实施例的示例性实施例的详细描述，本公开 实施例的其它特征及其优点将会变得清楚。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍。应当理解，以下附图仅示出了本公开的某些实施例，因此不应被看作是对范围的限定。对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1为可用于实现本公开实施例的系统的硬件配置示意图；
图2为本公开实施例的MEMS麦克风的信号处理方法的流程示意图；
图3为本公开实施例的MEMS麦克风的信号处理装置的结构方框图；
图4为本公开实施例的MEMS麦克风的信号处理装置的结构方框图；
图5为本公开实施例的MEMS麦克风的结构示意图；
图6为本公开实施例的MEMS麦克风的结构示意图。
具体实施方式
现在将参照附图来详细描述本公开的各种示例性实施例。应注意到：除非另外具体说明，否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本公开实施例的范围。
以下对至少一个示例性实施例的描述实际上仅仅是说明性的，决不作为对本公开及其应用或使用的任何限制。
对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论，但在适当情况下，所述技术、方法和设备应当被视为说明书的一部分。
在这里示出和讨论的所有例子中，任何具体值应被解释为仅仅是示例性的，而不是作为限制。因此，示例性实施例的其它例子可以具有不同的值。
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步讨论。
<硬件配置>
图1是示出可以实现本公开实施例的MEMS麦克风的信号处理方法的一种系统的结构示意图，该系统100包括信号处理设备1000、MEMS麦克风2000 和设置在所述MEMS麦克风1000的声孔附近的光传感器3000。该信号处理设备1000分别与MEMS麦克风2000和光传感器3000电连接，以获取MEMS麦克风2000输出的电信号和光传感器3000对接收到的光信号进行转换得到的电信号。
在一个实施例中，该信号处理设备1000、MEMS麦克风2000与光传感器3000可以集成在一个设备中。也就是说，该系统100可以是设置有MEMS麦克风和光传感器的智能语音设备、智能家居、具有语音识别功能的智能终端等。例如，系统100可以是智能音箱、智能手机、智能门锁。
在一个实施例中，如图1所示，该处理设备1000可以包括处理器1100、存储器1200、接口装置1300、通信装置1400、显示装置1500、输入装置1600。其中，处理器1100例如可以是中央处理器CPU、微处理器MCU等。存储器1200例如包括ROM(只读存储器)、RAM(随机存取存储器)、诸如硬盘的非易失性存储器等。接口装置1300例如包括USB接口、串行接口等。通信装置1400例如能够进行有线或无线通信。显示装置1500例如是液晶显示屏、LED显示屏、触摸显示屏等。输入装置1600例如包括触摸屏、键盘等。尽管在图1中对信号处理设备1000示出了多个装置，但是，本发明可以仅涉及其中的部分装置，例如信号处理设备1000只涉及理器1100、存储器1200。
应用于本公开实施例中，信号处理设备1000的存储器1200用于存储指令，所述指令用于控制所述处理器1100进行操作以支持实现根据本公开第一方面提供的任意实施例的MEMS麦克风的信号处理方法。技术人员可以根据本公开实施例所公开方案设计指令。指令如何控制处理器进行操作，这是本领域公知，故在此不再详细描述。
图1所示的系统100仅是解释性的，并且决不是为了要限制本公开、其应用或用途。
<方法实施例>
参见图2所示，说明本公开实施例提供的MEMS麦克风的信号处理方法。该方法涉及到信号处理设备，该信号处理设备可以是如图1所示的信号处理设备1000。该MEMS麦克风的信号处理方法包括以下步骤：
步骤202、获取通过设置在所述MEMS麦克风声孔附近的光传感器对接 收到的光信号进行转换获得的第一电信号。
在该实施例中，光传感器用于对接收到的光信号进行转换获得第一电信号，并将第一电信号输出。光传感器设置在MEMS麦克风的声孔附近，用于检测是否有光束照射MEMS麦克风。
在一个具体的例子中，信号处理设备与光传感器电连接，以获取光传感器输出的第一电信号。并且，信号处理设备可以根据光传感器输出的第一电信号，判断是否有光束照射MEMS麦克风。根据本公开实施例，通过获取设置在MEMS麦克风声孔附近的光传感器输出的第一电信号，可以判断是否有光束照射MEMS麦克风，进一步可以检测MEMS麦克风是否受到光束攻击，从而避免后端电子设备对根据干扰信号生成的控制指令做出反馈，提高使用MEMS麦克风的安全性。
步骤204、获取所述MEMS麦克风输出的第二电信号。
在一个实施例中，第二电信号可以是在外部的声音进入MEMS麦克风的背腔内时，MEMS麦克风的振膜发生振动而产生的。
在一个实施例中，第二电信号可以是在MEMS麦克风受到激光照射时，激光脉冲会加热MEMS麦克风的振膜，MEMS麦克风振膜周围的空气受热膨胀会对MEMS麦克风的振膜形成压力，从而使MEMS麦克风的振膜发生振动而产生的。可选地，第二电信号也可以是将调制有语音信号的激光打到MEMS麦克风上时，使MEMS麦克风的振膜发生振动而产生的。也就是说，MEMS麦克风在受到光束照射时，MEMS麦克风的振膜也会发生振动并输出第二电信号。
信号处理设备与MEMS麦克风电连接，以获取MEMS麦克风输出的第二电信号。信号处理设备可以根据获取的第一电信号和第二电信号，判断所述第二电信号是否是MEMS麦克风受到光束照射而产生的。
步骤206、当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断所述第二电信号为干扰信号。
在一个实施例中，信号处理设备将获取到第一电信号和第二电信号进行存储，并分别对获取第一电信号的时间和获取第二电信号的时间进行标记。当获取第一电信号的时间与获取第二电信号的时间在基本重合的时间范围内时，判断该第一电信号是否达到预定的第一阈值、该第二电信号是否符合预 定条件。在第一电信号达到预定的第一阈值且第二电信号符合预定条件的情况下，认为该第二电信号是MEMS麦克风受到光束照射而产生的，将第二电信号确定为干扰信号。
在一个实施例中，获取第一电信号的时间与获取第二电信号的时间在基本重合的时间范围内可以是指，在同一时刻获取的第一电信号和第二电信号。获取第一电信号的时间与获取第二电信号的时间在基本重合的时间范围内也可以是指，获取第一电信号的时间与获取第二电信号的时间的时间差在预定的时间范围内。
下面分别对判断该第一电信号是否达到预定的第一阈值的过程进行说明。
信号处理设备将第一电信号与预定的第一阈值进行比较，以判断MEMS麦克风是否受到光束照射。在第一电信号达到预定的第一阈值时，判断MEMS麦克风受到光束照射。在第一电信号未达到预定的第一阈值时，判断MEMS麦克风未受到光束照射。例如，在光传感器未受到外界的刺激时，第一电信号为光传感器自身的电信号，此时，第一电信号达不到第一阈值，可以判定MEMS麦克风未受到光束照射。还例如，MEMS麦克风在正常使用的情况下，光传感器会受到自然光或者照明灯光的照射，此时，光传感器转换获得的第一电信号远小于第一阈值，可以判定MEMS麦克风未受到光束照射。
该实施例中，第一阈值可以是预先设定的，该预定的第一阈值可以根据工程经验或者仿真试验经验进行设定，本公开实施例对此不做限制。可选地，第一阈值可以根据光传感器的类型进行设定。例如，光传感器可以是光敏电阻。在光敏电阻没有受到光束照射时，光敏电阻的电阻值较大，一般大于1兆欧姆；在光敏电阻受到光束照射时，光敏电阻的电阻值变小，一般小于几千欧姆。也就是说，当光敏电阻外加恒定电压时，可以通过检测光敏电阻的电路中电流的变化，判断光敏电阻是否受到光束照射，即判断MEMS麦克风是否受到光束照射。此时，信号处理设备获取的第一电信号为光敏电阻的电路的电流值，第一阈值为预定的第一电流值阈值。当第一电信号大于等于预定的第一电流值阈值时，判断MEMS麦克风受到光束照射。
在第一电信号达到预定的第一阈值的情况下，进一步判断第二电信号是否符合预定条件。信号处理设备获取MEMS麦克风输出的第二电信号，判断 第二信号是否符合预定条件，以判断MEMS麦克风是否进行声-电转换。在第一电信号达到预定的第一阈值且第二电信号符合预定条件的情况下，认为第二电信号是MEMS麦克风受到光束照射时发生声-电转换而产生的电信号。
可选地，所述第二电信号符合预定条件包括：所述第二电信号达到预定的第二阈值。
在一个实施例中，第二阈值可以是预先设定的，该预定的第二阈值可以根据工程经验或者仿真试验经验进行设定，本公开实施例对此不做限制。例如，第二电信号可以是MEMS麦克风的MEMS芯片的电容值，预定的第二阈值为第二电容值阈值。在第二电信号大于等于预定的第二电容值阈值时，认为第二电信号符合预定条件。此时，可以判定MEMS麦克风内发生声-电转换。在第二电信号小于预定的第二电容值阈值时，认为第二电信号不符合预定条件，此时，可以判定MEMS麦克风内未发生声-电转换。例如，在第二电信号小于预定的第二电容值阈值时，认为第二电信号符合预定条件例如，在MEMS麦克风在正常使用的情况下，MEMS麦克风的芯片未感应到外界的刺激，第二电信号为MEMS麦克风的芯片本身的电容值，此时第二电信号达不到第二阈值，可以判定MEMS麦克风内未发生声-电转换。还例如，当出现的声音信号很弱或者光信号很弱时，MEMS麦克风的芯片感应声音信号或者光信号产生的第二电信号达不到第二阈值，可以判定MEMS麦克风内未发生声-电转换。
可选地，所述第二电信号符合预定条件包括：对所述第二电信号进行语音识别获得预定的控制指令。
在一个实施例中，对第二电信号进行语音识别获得预定的控制指令。根据所述预定的控制指令可以控制其他电子设备工作。其他电子设备可以是与信号处理设备建立通信连接的电子设备。其他电子设备也可以是集成有信号处理设备的电子设备。其他电子设备可以是智能语音设备、智能家居、具有语音识别功能的智能终端等。例如，外部设备可以是智能音箱、智能手机、智能门锁。控制指令可以是根据其他电子设备的使用场景预先设定的。例如，在使用智能门锁的场景下，预定的控制指令可以是控制智能门锁打开和关闭的指令。还例如，在使用智能手机进行购物的场景下，预定的控制指令可以是确认支付的指令。
在一个实施例中，该MEMS麦克风的信号处理方法还可以包括：禁止执行所述预定的控制指令。
在该实施例中，当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且对所述第二电信号进行语音识别获得预定的控制指令时，禁止执行所述预定的控制指令。
可选地，当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且所述第二电信号符合预定条件时，判断所述第二电信号为干扰信号的步骤可以进一步包括：步骤302-306。
步骤302、同步获取所述第一电信号和所述第二电信号。
步骤304、当同一时刻获取的所述第一电信号达到预定的第一阈值且所述第二电信号达到预定的第二阈值时启动计时。
步骤306、当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号。
在一个实施例中，信号处理设备同步获取第一电信号和第二电信号，并存储第一电信号和第二电信号。选取同一时刻获取的第一电信号和第二电信号，将第一电信号与预定的第一阈值进行比较，将第二电信号与预定的第二阈值进行比较。当第一电信号达到预定的第一阈值且第二电信号达到预定的第二阈值时，认为第二电信号是MEMS麦克风受到光束照射时产生的电信号。此时启动计时，并对第二电信号进行语音识别。进一步判断对第二电信号进行语音识别是否获得预定的控制指令。当对第二电信号进行语音识别获取预定的控制指令时停止计时，得到计时时间。判断计时时间是否在预定计时之内。当计时时间在预定计时之内时，认为根据第二电信号获得的控制指令可以用于操控其他电子设备，即第二电信号是MEMS麦克风受到光束照射产生的且可以对该第二电信号进行语音识别获得用于操控其他电子设备执行相应的操作的控制指令。这时，将所述第二电信号判断为干扰信号，以避免将第二电信号误认为是MEMS麦克风对拾取到的声音信号转换获得的。
可选地，当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号的步骤可以进一步包括：步骤3062-3064。
步骤3062、判断所述第二电信号是否匹配预定的语音识别模型。
步骤3064、如是，确定所述第二电信号进行语音识别获得预定的控制指令。
在一个实施例中，所述语音识别模型可以是预先设定的。该语音识别模型存储在信号处理设备中。当同一时刻获取的所述第一电信号达到预定的第一阈值且所述第二电信号达到预定的第二阈值时，将所述第二电信号输入预定的语音识别模型中，得到识别结果。判断该识别结果是否是预定的控制指令，如果该识别结果是预定的控制指令，则认为该第二电信号为干扰信号。
在一个实施例中，该MEMS麦克风的信号处理方法还可以包括：对所述干扰信号进行屏蔽的步骤。
根据本公开实施例，对干扰信号进行屏蔽，可以避免根据干扰信号生成的控制指令对与MEMS麦克风连接的电子设备进行控制，提高使用MEMS麦克风的安全性。
在一个实施例中，该MEMS麦克风的信号处理方法还可以包括：当所述第一电信号未达到预定的第一阈值时，输出第二电信号。
在该实施例中，在第一电信号未达到预定的第一阈值时，认为MEMS麦克风未受到光束照射，此时MEMS麦克风产生的第二电信号不是干扰信号，可以直接输出第二电信号，以根据第二电信号控制与MEMS麦克风连接的其他电子设备执行相应的指令。
根据本公开实施例，通过获取设置在MEMS麦克风声孔附近的光传感器输出的第一电信号和MEMS麦克风输出的第二电信号，当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，将所述第二电信号判断为干扰信号，以避免将第二电信号误认为是MEMS麦克风对拾取到的声音信号转换获得的，从而避免后端电子设备对根据干扰信号生成的控制指令做出反馈，提高使用MEMS麦克风的安全性。
<装置实施例一>
参见图3，本公开实施例提供了MEMS麦克风的信号处理装置30，该信号处理装置30可以例如是如图1所示的信号处理设备1000。
该MEMS麦克风的信号处理装置30包括第一获取模块31、第二获取模块32、判断模块33。
该第一获取模块31可以用于获取通过设置在所述MEMS麦克风声孔附近的光传感器对接收到的光信号进行转换获得的第一电信号。
该第二获取模块32可以用于获取所述MEMS麦克风输出的第二电信号。
该判断模块33可以用于当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断所述第二电信号为干扰信号。
在一个实施例中，所述第二电信号符合预定条件包括：
所述第二电信号达到预定的第二阈值。
在一个实施例中，所述第二电信号符合预定条件包括：
对所述第二电信号进行语音识别获得预定的控制指令。
在一个实施例中，该判断模块33还可以用于同步获取所述第一电信号和所述第二电信号；
当同一时刻获取的所述第一电信号达到预定的第一阈值且所述第二电信号达到预定的第二阈值时启动计时；以及
当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号。
参见图4，本公开实施例提供了MEMS麦克风的信号处理装置40，该信号处理装置40可以例如是如图1所示的信号处理设备1000。
该MEMS麦克风的信号处理装置40包括处理器41和存储器42。存储器42用于存储计算机程序，计算机程序被处理器41执行时实现前述任一实施例公开的MEMS麦克风的信号处理方法。
<装置实施例二>
参见图5，本公开的实施例提供了一种MEMS麦克风，该MEMS麦克风包括MEMS麦克风本体51和光传感器52。所述MEMS麦克风本体51上设置有声孔511，所述光传感器52设置在所述MEMS麦克风本体51的声孔511附近。
该光传感器52可以用于对接收到的光信号进行转换获得的第一电信号。
该MEMS麦克风本体51可以用于输出第二电信号。
光传感器52设置在MEMS麦克风本体的声孔附近，用于检测是否有光束照射MEMS麦克风，且该光束可以对MEMS麦克风形成干扰。
在一个实施例中，光传感器52可以是圆形、条形或环形等。多种形式的光传感器52均可实现本公开的实施例的技术效果，本公开实施例对此不做限制。可选地，如图6所示，光传感器52可以是环形的，光传感器52可以环绕MEMS麦克风的声孔设置，对于光束强度较弱的情况，该设置方式也可以检测的。
在一个实施例中，所述光传感器52的光响应频段为紫外光频段和/或可见光频段和/或红外光频段。光传感器52的光响应段可以根据MEMS麦克风的使用场景进行设定。
在一个实施例中，所述光传感器52包括光敏元件，所述光敏元件为光敏电阻、光敏二极管或光敏三极管。
本公开实施例可以是系统、方法和/或计算机程序产品。计算机程序产品可以包括计算机可读存储介质，其上载有用于使处理器实现本公开实施例的各个方面的计算机可读程序指令。
计算机可读存储介质可以是可以保持和存储由指令执行设备使用的指令的有形设备。计算机可读存储介质例如可以是――但不限于――电存储设备、磁存储设备、光存储设备、电磁存储设备、半导体存储设备或者上述的任意合适的组合。计算机可读存储介质的更具体的例子(非穷举的列表)包括：便携式计算机盘、硬盘、随机存取存储器(RAM)、只读存储器(ROM)、可擦式可编程只读存储器(EPROM或闪存)、静态随机存取存储器(SRAM)、便携式压缩盘只读存储器(CD-ROM)、数字多功能盘(DVD)、记忆棒、软盘、机械编码设备、例如其上存储有指令的打孔卡或凹槽内凸起结构、以及上述的任意合适的组合。这里所使用的计算机可读存储介质不被解释为瞬时信号本身，诸如无线电波或者其他自由传播的电磁波、通过波导或其他传输媒介传播的电磁波(例如，通过光纤电缆的光脉冲)、或者通过电线传输的电信号。
这里所描述的计算机可读程序指令可以从计算机可读存储介质下载到各个计算/处理设备，或者通过网络、例如因特网、局域网、广域网和/或无线 网下载到外部计算机或外部存储设备。网络可以包括铜传输电缆、光纤传输、无线传输、路由器、防火墙、交换机、网关计算机和/或边缘服务器。每个计算/处理设备中的网络适配卡或者网络接口从网络接收计算机可读程序指令，并转发该计算机可读程序指令，以供存储在各个计算/处理设备中的计算机可读存储介质中。
用于执行本公开实施例操作的计算机程序指令可以是汇编指令、指令集架构(ISA)指令、机器指令、机器相关指令、微代码、固件指令、状态设置数据、或者以一种或多种编程语言的任意组合编写的源代码或目标代码，所述编程语言包括面向对象的编程语言—诸如Smalltalk、C++等，以及常规的过程式编程语言—诸如“C”语言或类似的编程语言。计算机可读程序指令可以完全地在用户计算机上执行、部分地在用户计算机上执行、作为一个独立的软件包执行、部分在用户计算机上部分在远程计算机上执行、或者完全在远程计算机或服务器上执行。在涉及远程计算机的情形中，远程计算机可以通过任意种类的网络—包括局域网(LAN)或广域网(WAN)—连接到用户计算机，或者，可以连接到外部计算机(例如利用因特网服务提供商来通过因特网连接)。在一些实施例中，通过利用计算机可读程序指令的状态信息来个性化定制电子电路，例如可编程逻辑电路、现场可编程门阵列(FPGA)或可编程逻辑阵列(PLA)，该电子电路可以执行计算机可读程序指令，从而实现本公开实施例的各个方面。
这里参照根据本公开实施例的方法、装置(系统)和计算机程序产品的流程图和/或框图描述了本公开实施例的各个方面。应当理解，流程图和/或框图的每个方框以及流程图和/或框图中各方框的组合，都可以由计算机可读程序指令实现。
这些计算机可读程序指令可以提供给通用计算机、专用计算机或其它可编程数据处理装置的处理器，从而生产出一种机器，使得这些指令在通过计算机或其它可编程数据处理装置的处理器执行时，产生了实现流程图和/或框图中的一个或多个方框中规定的功能/动作的装置。也可以把这些计算机可读程序指令存储在计算机可读存储介质中，这些指令使得计算机、可编程数据处理装置和/或其他设备以特定方式工作，从而，存储有指令的计算机可读介质则包括一个制造品，其包括实现流程图和/或框图中的一个或多个方框中规 定的功能/动作的各个方面的指令。
也可以把计算机可读程序指令加载到计算机、其它可编程数据处理装置、或其它设备上，使得在计算机、其它可编程数据处理装置或其它设备上执行一系列操作步骤，以产生计算机实现的过程，从而使得在计算机、其它可编程数据处理装置、或其它设备上执行的指令实现流程图和/或框图中的一个或多个方框中规定的功能/动作。
附图中的流程图和框图显示了根据本公开的多个实施例的系统、方法和计算机程序产品的可能实现的体系架构、功能和操作。在这点上，流程图或框图中的每个方框可以代表一个模块、程序段或指令的一部分，所述模块、程序段或指令的一部分包含一个或多个用于实现规定的逻辑功能的可执行指令。在有些作为替换的实现中，方框中所标注的功能也可以以不同于附图中所标注的顺序发生。例如，两个连续的方框实际上可以基本并行地执行，它们有时也可以按相反的顺序执行，这依所涉及的功能而定。也要注意的是，框图和/或流程图中的每个方框、以及框图和/或流程图中的方框的组合，可以用执行规定的功能或动作的专用的基于硬件的系统来实现，或者可以用专用硬件与计算机指令的组合来实现。对于本领域技术人物来说公知的是，通过硬件方式实现、通过软件方式实现以及通过软件和硬件结合的方式实现都是等价的。
以上已经描述了本公开的各实施例，上述说明是示例性的，并非穷尽性的，并且也不限于所披露的各实施例。在不偏离所说明的各实施例的范围和精神的情况下，对于本技术领域的普通技术人物来说许多修改和变更都是显而易见的。本文中所用术语的选择，旨在最好地解释各实施例的原理、实际应用或对市场中的技术改进，或者使本技术领域的其它普通技术人物能理解本文披露的各实施例。本公开实施例的范围由所附权利要求来限定。

Claims (13)

  1. 一种MEMS麦克风的信号处理方法，其特征在于，所述方法包括：
    获取通过设置在所述MEMS麦克风声孔附近的光传感器对接收到的光信号进行转换获得的第一电信号；
    获取所述MEMS麦克风输出的第二电信号；
    当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断所述第二电信号为干扰信号。
  2. 根据权利要求1所述的方法，其中，所述第二电信号符合预定条件包括：
    所述第二电信号达到预定的第二阈值。
  3. 根据权利要求1所述的方法，其中，所述第二电信号符合预定条件包括：
    对所述第二电信号进行语音识别获得预定的控制指令。
  4. 根据权利要求1所述的方法，其中，当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且所述第二电信号符合预定条件时，判断所述第二电信号为干扰信号的步骤包括：
    同步获取所述第一电信号和所述第二电信号；
    当同一时刻获取的所述第一电信号达到预定的第一阈值且所述第二电信号达到预定的第二阈值时启动计时；
    当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号。
  5. 根据权利要求4所述的方法，其中，当在预定计时之内对所述第二电信号进行语音识别获得预定的控制指令时，判断所述第二电信号为干扰信号包括：
    判断所述第二电信号是否匹配预定的语音识别模型；
    如是，确定所述第二电信号进行语音识别获得预定的控制指令。
  6. 根据权利要求1、4或5所述的方法，其中，还包括：
    对所述干扰信号进行屏蔽的步骤。
  7. 根据权利要求3、4或5所述的方法，其中，还包括：
    禁止执行所述预定的控制指令。
  8. 根据权利要求1所述的方法，其中，还包括：
    当所述第一电信号未达到预定的第一阈值时，输出第二电信号。
  9. 一种MEMS麦克风的信号处理装置，其特征在于，包括：
    第一获取模块，用于获取通过设置在所述MEMS麦克风声孔附近的光传感器对接收到的光信号进行转换获得的第一电信号；
    第二获取模块，用于获取所述MEMS麦克风输出的第二电信号；
    判断模块，用于当在基本重合的时间范围内所获取的第一电信号达到预定的第一阈值且第二电信号符合预定条件时，判断所述第二电信号为干扰信号。
  10. 一种MEMS麦克风的信号处理装置，其特征在于，包括处理器和存储器，所述存储器存储有计算机指令，所述计算机指令被所述处理器运行时，执行权利要求1-8任一项所述的方法。
  11. 一种MEMS麦克风，其特征在于，包括MEMS麦克风本体和光传感器；所述MEMS麦克风本体上设置有声孔，所述光传感器设置在所述MEMS麦克风本体的声孔附近；
    所述光传感器，用于对接收到的光信号进行转换获得的第一电信号；
    所述MEMS麦克风本体，用于输出第二电信号。
  12. 根据权利要求11所述的MEMS麦克风，所述光传感器的光响应频段 为紫外光频段和/或可见光频段和/或红外光频段。
  13. 根据权利要求11所述的MEMS麦克风，所述光传感器包括光敏元件，所述光敏元件为光敏电阻、光敏二极管或光敏三极管。
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