WO2021193064A1 - Aluminum alloy member and method for manufacturing same - Google Patents

Aluminum alloy member and method for manufacturing same Download PDF

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Publication number
WO2021193064A1
WO2021193064A1 PCT/JP2021/009517 JP2021009517W WO2021193064A1 WO 2021193064 A1 WO2021193064 A1 WO 2021193064A1 JP 2021009517 W JP2021009517 W JP 2021009517W WO 2021193064 A1 WO2021193064 A1 WO 2021193064A1
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Prior art keywords
aluminum alloy
mass
alloy member
base material
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PCT/JP2021/009517
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French (fr)
Japanese (ja)
Inventor
飯塚 章
直人 古村
耕一 中野
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日本軽金属株式会社
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Priority to CN202180024400.4A priority Critical patent/CN115315544A/en
Priority to JP2022509562A priority patent/JPWO2021193064A1/ja
Priority to KR1020227036968A priority patent/KR20220158055A/en
Priority to EP21774412.7A priority patent/EP4130315A4/en
Priority to US17/913,035 priority patent/US20230175159A1/en
Publication of WO2021193064A1 publication Critical patent/WO2021193064A1/en

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • C25D11/20Electrolytic after-treatment
    • C25D11/22Electrolytic after-treatment for colouring layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12Both compacting and sintering
    • B22F3/16Both compacting and sintering in successive or repeated steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/20Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by extruding
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/0408Light metal alloys
    • C22C1/0416Aluminium-based alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • C22C21/02Alloys based on aluminium with silicon as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C32/00Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/001Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
    • C22C32/0015Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
    • C22C32/0036Matrix based on Al, Mg, Be or alloys thereof
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C32/00Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/0047Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
    • C22C32/0078Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only silicides
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/04Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon
    • C22F1/043Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with silicon as the next major constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • B22F2003/241Chemical after-treatment on the surface
    • B22F2003/242Coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00Metallic composition of the powder or its coating
    • B22F2301/05Light metals
    • B22F2301/052Aluminium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/06Anodisation of aluminium or alloys based thereon characterised by the electrolytes used
    • C25D11/08Anodisation of aluminium or alloys based thereon characterised by the electrolytes used containing inorganic acids

Definitions

  • the present invention relates to an aluminum alloy member whose surface is required to be blackened or darkened, and a method for manufacturing the same.
  • the surface of the optical member, the electronic circuit member, and the aluminum alloy used for the inspection device of these members is blackened with an organic dye after anodizing treatment such as alumite sulfate treatment in order to suppress light reflection. It is common to be done.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2010-237282
  • a support frame for a pellicle which is formed of an aluminum material made of aluminum or an aluminum alloy, has an optical thin film body, and is used as a pellicle.
  • a method for manufacturing a support frame for a pellicle, which comprises the above, is disclosed.
  • the aluminum material is anodized with an alkaline aqueous solution containing tartaric acid without using sulfuric acid, which is the largest causative substance of haze, to provide corrosion resistance and It is said that it is possible to obtain a support frame for pellicle that has excellent durability and reduces the occurrence of haze as much as possible.
  • the pellicle frame is formed in a frame shape, and is composed of a sintered body having a Young's modulus of 150 GPa or more and a Vickers hardness of 800 or more, and has a frame shape.
  • the corner portion is secured to have a width equal to or larger than the width of the straight portion, and at least one of the corner portions is a pellicle frame wider than the width of the straight portion, and the pellicle frame is made of ceramics, cemented carbide or cermet. It is disclosed to do.
  • the pellicle frame described in Patent Document 2 uses a sintered body having a high Young's modulus and Vickers hardness, the pellicle frame is deformed by the film tension generated when the pellicle film is stretched on the pellicle frame. Can be suppressed. Moreover, since the width of at least one corner portion is wider than the width of the straight portion, the strength of the corner portion can be increased, and the deformation and damage of the pellicle frame can be further suppressed.
  • the support frame for a pellicle described in Patent Document 1 has excellent stability that does not form a reaction product (haze) such as ammonium sulfate even when energy is input from a high-power short-wavelength exposure light source.
  • a reaction product such as ammonium sulfate
  • no consideration is given to color loss when the product is kept in a high temperature environment. Further, it has not been studied to suppress the misalignment caused by the large coefficient of linear expansion of the aluminum material.
  • Patent Document 2 has high mechanical properties at room temperature, thermal expansion and blackening of the surface in a high temperature environment have not been studied.
  • ceramics having poor workability, cemented carbide having a large specific gravity, and cermet are used, and it is difficult to widely use them as optical members.
  • an object of the present invention is a lightweight aluminum alloy member that can be manufactured at a relatively low cost, has high dimensional accuracy in a high temperature environment, and is blackened even in a high temperature environment. It is an object of the present invention to provide an aluminum alloy member having excellent heat resistance and an efficient manufacturing method thereof, in which the surface of the aluminum alloy is not easily faded.
  • the present inventors have obtained an extruded material of aluminum alloy powder having a specific composition having a low linear expansion coefficient. It has been found that it is effective to form an electrolytically colored layer in which a metal or a metal salt is precipitated in the pores of the anodized film, and the present invention has been reached.
  • the present invention It consists of an extruded aluminum powder alloy with a Si content of 20-40% by mass.
  • an aluminum alloy member which is characterized by the above.
  • Si has the effect of lowering the coefficient of linear expansion and improving Young's modulus and wear resistance by crystallizing as a Si phase in the Al matrix.
  • a high Young's modulus, excellent wear resistance and a low coefficient of linear expansion are realized by setting the Si content to 20% by mass or more, and processing is performed by setting the Si content to 40% by mass or less. It suppresses the decrease in strength and toughness due to the decrease in properties and the coarsening of the Si phase.
  • the more preferable Si content is 24 to 28% by mass.
  • the surface of the aluminum alloy member of the present invention is blackened by an electrolytic colored layer in which a metal or a metal salt is precipitated in the pores of the anodized film, and the surface is blackened as compared with the case where the aluminum alloy member is blackened with an organic dye. Fading in a high temperature environment is suppressed extremely effectively. That is, in the aluminum alloy member of the present invention, both the reduction of the coefficient of linear expansion and the suppression of fading in a high temperature environment are realized.
  • the aluminum alloy member of the present invention has a smaller specific gravity than the cemented carbide or cermet, and the optical member can be made lighter.
  • it is easy to handle because it has excellent toughness as compared with ceramics and cemented carbide. Further, since it has good workability, it is possible to reduce the manufacturing cost and to impart high dimensional accuracy to the optical member.
  • the aluminum powder alloy contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: 2% by mass or less, Fe: 2% by mass or less, Cr. : It is preferably 0.4% by mass or less, and the balance is composed of Al and unavoidable impurities.
  • the aluminum alloy member is provided with excellent mechanical properties, corrosion resistance and heat resistance by strengthening precipitation by adding Mg and Cu, improving Young's modulus and corrosion resistance by adding Fe, and refining crystal grains by adding Cr. be able to.
  • the metal and the metal salt contain at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn and Mg. By including these elements, blackening of the surface can be efficiently and surely achieved.
  • the coefficient of linear expansion is 10 ⁇ 10 -6 to 23 ⁇ 10 -6 / K.
  • the coefficient of linear expansion is close to that of a material made of silicon or the like.
  • the value is set to 23 ⁇ 10 -6 / K or less, it is possible to suppress the displacement due to thermal expansion in a high temperature environment (for example, 200 ° C.).
  • the more preferable range of the coefficient of linear expansion is 13 ⁇ 10 -6 to 20 ⁇ 10 -6 / K
  • the most preferable range of the coefficient of linear expansion is 15 ⁇ 10 -6 to 19 ⁇ 10 -6 / K. ..
  • the difference between the L * value as before heat treatment L * value after the heat treatment of holding for 100 hours in an atmosphere of 200 ° C. is 3 or less, are preferred. If the difference between the L * value before heating L * value after heating is 3 or less, need hardly consider the fading in a high-temperature environment in which the optical member is used.
  • the difference between the L * value before heating L * value after heating is 2 or less, and most preferably 1 or less.
  • the L * value of the aluminum alloy member is more preferably 50 or less, and further preferably 45 or less.
  • the aluminum alloy member of the present invention is an optical member or a member for an optical member inspection device. Since the aluminum alloy member of the present invention is an aluminum alloy member having high dimensional accuracy in a high temperature environment and having a blackened surface that is hard to fade even in a high temperature environment and has excellent heat resistance, it is an optical member or an optical member. It can be suitably used as a member for an inspection device.
  • the optical member inspection device an inspection light source device for a CCD / C-MOS image sensor can be exemplified.
  • the present invention The first step of producing a base material by subjecting aluminum alloy powder having a Si content of 20 to 40% by mass to pressure molding, sintering and extrusion processing.
  • the second step of forming an anodized film on the surface of the base material and The base material is electrolytically colored in an electrolytic solution containing a metal or a metal salt, and the metal or the metal salt is precipitated in the pores of the anodized film to form an electrolytically colored layer on the surface of the base material.
  • Including the third step Also provided is a method for manufacturing an aluminum alloy member.
  • a homogeneous aluminum alloy By extruding a sintered body of aluminum alloy powder, a homogeneous aluminum alloy can be obtained even if the Si content is 20 to 40% by mass. Further, by electrolytically coloring an aluminum alloy material having an anodized film in an electrolytic solution containing a metal or a metal salt, a metal or a metal salt is precipitated in the pores of the anodized film to achieve blackening. Can be done.
  • the present invention is a lightweight aluminum alloy member that can be manufactured at a relatively low cost, has high dimensional accuracy in a high temperature environment, and has excellent heat resistance because the blackened surface does not easily fade even in a high temperature environment. It is possible to provide an aluminum alloy member and an efficient manufacturing method thereof.
  • FIG. 1 shows a schematic cross-sectional view of the aluminum alloy member of the present invention.
  • the aluminum alloy member 1 has an anodic oxide film 4 formed on the surface of the aluminum alloy base material 2, and includes an electrolytic colored layer 6 in which a metal or a metal salt is deposited in the pores of the anodic oxide film 4.
  • the aluminum alloy base material 2 contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: more than 0 and 2% by mass or less, Fe: more than 0 and 2% by mass or less, Cr: more than 0 and 0. .4% by mass or less, and the balance is composed of extruded aluminum alloy powder sintered body composed of Al and unavoidable impurities.
  • Si In addition to contributing to the improvement of Young's modulus by crystallizing Si as the Si phase in the Al matrix phase, it has the effect of improving the wear resistance and lowering the coefficient of thermal expansion.
  • a high Young's modulus, excellent abrasion resistance and a low coefficient of linear expansion are realized by setting the Si content to 20% by mass or more, and workability is achieved by setting the Si content to 40% by mass or less.
  • the decrease in strength and toughness due to the decrease in Si phase and the coarsening of the Si phase are suppressed.
  • the Si content is more preferably 22 to 35% by mass, further preferably 24 to 30% by mass, and particularly preferably 25 to 28% by mass.
  • Mg The Mg content is 0.2 to 1.2% by mass. By setting the Mg content in this range, it is possible to improve the strength by strengthening precipitation. (Precipitation strengthening with Mg 2 Si and Al 2 Cu Mg). The more preferable Mg content is 0.55 to 0.90% by mass.
  • the Cu content is more than 0 and 2% by mass or less. By setting the Cu content in this range, it is possible to improve the strength by strengthening precipitation as in the case of Mg described above. (Precipitation strengthening with Mg 2 Si and Al 2 Cu Mg). It also contributes to improving Young's modulus and corrosion resistance. If it is more than 2% by mass, the anodizing film property is lowered. The more preferable Cu content is 0.11 to 0.30% by mass.
  • the Fe content is more than 0 and 2% by mass or less. By setting the Fe content in this range, it contributes to the improvement of Young's modulus and the improvement of corrosion resistance. If it is more than 2% by mass, elongation, thermal conductivity, and extrusion decrease. The more preferable Fe content is 0.7% by mass or less.
  • the Cr content is more than 0 and 0.4% by mass or less. By setting the Cr content in this range, the crystal is made finer and contributes to the improvement of toughness.
  • the more preferable Cr content is 0.03 to 0.26% by mass.
  • the rest is substantially composed of Al.
  • unavoidable impurities may be contained as other components.
  • the aluminum alloy base material 2 preferably has a coefficient of linear expansion of 10 ⁇ 10 -6 to 23 ⁇ 10 -6 / K.
  • the coefficient of linear expansion is close to that of a material made of silicon or the like. Further, by setting the value to 23 ⁇ 10 -6 / K or less, it is possible to suppress the displacement due to thermal expansion in a high temperature environment (for example, 200 ° C.).
  • the more preferable range of the coefficient of linear expansion is 13 ⁇ 10 -6 to 20 ⁇ 10 -6 / K
  • the most preferable range of the coefficient of linear expansion is 15 ⁇ 10 -6 to 19 ⁇ 10 -6 / K. ..
  • the film quality of the anodized film 4 is not particularly limited as long as the effects of the present invention are not impaired, and various conventionally known anodized films can be used.
  • Anodizing treatment may be performed using a sulfuric acid bath, or the aluminum alloy base material 2 may be formed by anodizing treatment in an alkaline bath.
  • anodizing is performed using a sulfuric acid bath, there is a risk that inorganic acids such as sulfuric acid and phosphoric acid may remain on the anodized film 4 on the surface of the aluminum alloy base material 2 due to this. There is.
  • the inorganic acid reacts with a basic substance such as ammonia present in the exposed atmosphere to generate a reaction product (haze) such as ammonium sulfate, and the reaction product (haze).
  • a reaction product such as ammonium sulfate
  • the reaction product haze
  • an alkaline bath for the anodizing treatment it is possible to prevent the residual inorganic acid forming the reaction product (haze) from remaining.
  • the film thickness of the anodized film 4 is not particularly limited as long as the effect of the present invention is not impaired, but it is preferably 1 to 15 ⁇ m.
  • a homogeneous anodized film 4 can be formed by setting the film thickness to 1 ⁇ m or more, and a decrease in strength of the anodized film 4 can be suppressed by setting the film thickness to 15 ⁇ m or less.
  • the metal or metal salt precipitated in the pores of the anodized film 4 contains at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn and Mg. , are preferred.
  • Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn and Mg. are preferred.
  • blackening of the surface can be efficiently and surely achieved.
  • fading in a high temperature environment can be reliably reduced as compared with the case of blackening with an organic dye.
  • Ni, Co, Cu and Sn are more preferable, and Ni is even more preferable.
  • the difference between the L * value before heating L * value after heating is 3 or less, are preferred. If the difference between the L * value before heating L * value after heating is 3 or less, need hardly consider the fading in a high-temperature environment in which the optical member is used.
  • the difference between the L * value before heating L * value after heating is 2 or less, and most preferably 1 or less.
  • the L * value of the aluminum alloy member 1 is more preferably 50 or less, and further preferably 45 or less.
  • the aluminum alloy member 1 is an optical member or a member for an optical member inspection device.
  • the aluminum alloy member of the present invention is an aluminum alloy member having high dimensional accuracy in a high temperature environment and having a blackened surface that is hard to fade even in a high temperature environment and has excellent heat resistance, it is an optical member or an optical member. It can be suitably used as a member for an inspection device.
  • the optical member inspection device an inspection light source device for a CCD / C-MOS image sensor can be exemplified.
  • the optical member include a pellicle frame, a lens holder, a barrel, a shade, a reflector, and the like.
  • the manufacturing method of the aluminum alloy member of the present embodiment includes a first step (S01) of manufacturing a base material and a first step of forming an anodized film on the surface of the base material. It includes a second step (S02) and a third step (S03) of forming an electrolytically colored layer on the surface of the base material.
  • S01 first step of manufacturing a base material
  • S02 second step of forming an anodized film on the surface of the base material.
  • S03 a third step of forming an electrolytically colored layer on the surface of the base material.
  • the base material manufacturing step (S01) is a step for manufacturing the aluminum alloy base material 2 through pressure molding, sintering, and extrusion processing using an aluminum alloy powder having a Si content of 20 to 40% by mass as a raw material. ..
  • the aluminum alloy powder contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: more than 0% by mass and less than 2% by mass, Fe: more than 0 and 2% by mass or less, Cr: more than 0 and 0.4% by mass. It is preferably mass% or less, and the balance is preferably composed of Al and unavoidable impurities.
  • the method of pressure molding on the aluminum alloy powder is not particularly limited as long as the effect of the present invention is not impaired, and various conventionally known methods can be used. For example, a press method, a CIP method, or the like can be used. ..
  • the molding pressure for pressure molding may be appropriately set according to the composition, shape, particle size, etc. of the aluminum alloy powder.
  • the conditions for sintering the pressure molded body are appropriately adjusted according to the composition, particle size and shape of the aluminum alloy powder, the density of the pressure molded body, etc., and a good extruded material is obtained by hot extrusion.
  • the sintering conditions may be used so that a sintered body in a state where it can be obtained can be obtained.
  • the pressure molded body is held in a vacuum furnace having a vacuum degree of 1 Torr or less and a furnace temperature controlled to 100 to 400 ° C. for 0.5 to 2 hours, and then the vacuum degree is 1 Torr.
  • the temperature inside the furnace may be raised to 520 to 570 ° C. and held for 1 to 6 hours while keeping the temperature below (preferably 0.1 Torr or less).
  • hot extrusion for extrusion of aluminum alloy powder sintered body.
  • the hot extrusion method and conditions are not particularly limited as long as the effects of the present invention are not impaired, and conventionally known hot extrusion methods and conditions for aluminum alloy powder sintered bodies may be used, but the hot extrusion temperature. May be set to about 400 to 500 ° C.
  • a metal plate for example, pure aluminum or a 5000 series aluminum alloy
  • a thin film having a metal plate composition can be formed on the surface of the extruded material, which causes pitting corrosion and total corrosion over time at the interface between Si and Al, which may occur when the Al—Si material is on the outermost surface. It can be suppressed.
  • the hot-extruded molded product is forged or the like to give it a desired shape, if necessary.
  • the molded product may be heat-treated prior to the forging or the like.
  • the forging property of the hot-extruded molded product can be improved by performing the heat treatment at 200 to 400 ° C. for about 0.5 to 2 hours.
  • the anodizing film forming step (S02) is a step for forming the anodizing film 4 on the surface of the aluminum alloy base material 2 obtained in the base material manufacturing step (S01).
  • the conditions of the anodizing treatment are not particularly limited as long as the effects of the present invention are not impaired, and various conventionally known anodizing treatments can be used.
  • a sulfuric acid bath or any one or more inorganic alkaline components selected from the group consisting of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide, strontium hydroxide, and rubidium hydroxide may be used.
  • An inorganic alkaline bath containing, or a salt of any one or more organic acids selected from the group consisting of tartaric acid, citric acid, oxalic acid, and salicylic acid, and sodium hydroxide, potassium hydroxide, lithium hydroxide, and water.
  • An alkali mixed bath or the like containing any one or more inorganic alkali components selected from the group consisting of calcium oxide, strontium hydroxide, and rubidium hydroxide is preferably used.
  • Electrolytic colored layer forming step (third step: S03) is a step for precipitating a metal or a metal salt in the pores of the anodic oxide film 4 formed in the anodic oxide film forming step (S02) to form the electrolytic colored layer 6. be.
  • the aluminum alloy base material 2 on which the anodic oxide film 4 is formed is immersed in an electrolytic treatment liquid containing a soluble metal salt, subjected to a color pretreatment for constant current electrolysis using the aluminum alloy base material 2 as an anode, and then the same electrolytic treatment liquid.
  • the aluminum alloy base material 2 may be used as a cathode for electrolytic coloring treatment, or the coloring pretreatment may be omitted.
  • the current density of the positive component is substantially equal to the current density at the time of the coloring pretreatment, and specifically, 1 / 0.6 to 1/0 of the cathode current density at the time of electrolytic coloring. It is preferable to set it in the range of 95 times.
  • the absolute value of the maximum current density of the negative component is preferably set in the range of 0.6 to 0.95 times the absolute value of the maximum current density of the positive component. maintain.
  • the potential difference in the electrolytic coloring treatment tank is kept at 4 V or less, and the absolute value of the current density at the time of electrolytic coloring is set to 0 of the current density at the time of pre-coloring treatment. It is preferable to maintain it at about 7 times.
  • the current density of the cathode current flowing through the aluminum alloy base material 2 during electrolytic coloring is set to a value in the range of 0.6 to 0.95 times the anode current flowing through the aluminum alloy base material 2 during the pre-coloring treatment, the anode current flows.
  • the current distribution is the same and uniform depending on whether the current flows or the cathode current flows.
  • a uniform electrolytic coloring reaction occurs over the entire surface of the aluminum alloy base material 2, and a colored film having excellent color tone uniformity is formed.
  • the coloring pretreatment is applied to the anodized aluminum alloy base material 2 using the same treatment liquid as the electrolytic coloring treatment liquid used in the subsequent coloring step.
  • the non-uniformity of the current distribution during the coloring treatment is corrected by the coloring pretreatment.
  • the coloring pretreatment and the coloring treatment are carried out in different tanks, that is, in different electrolytic cell conditions and bath conditions, the optimum current density ratio Rd for homogenizing the color tone differs between the tanks, so that the same electrolysis is performed.
  • the uniformity of color tone is reduced as compared with the case of using a tank.
  • the electrolytic coloring treatment bath is not particularly restricted by the component type, concentration, etc., but usually a weakly acidic to neutral treatment bath is used.
  • Metal salts include nitrates containing at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn, and Mg, inorganic acid salts such as sulfates, phosphates, and chromate, and oxalic acid.
  • organic acid salts such as salts, acetates and tartrates, which are added to the electrolytic coloring treatment bath alone or in combination. In the electrolytic coloring method, even if the same electrolytic treatment bath is used, different color tones are developed depending on the treatment conditions such as applied voltage, current, and time.
  • electrolytic conditions such as voltage, current, temperature, and time are set in order to eliminate variations in the thickness of the barrier layer in these electrolytic coloring treatment liquids.
  • the electrolytic conditions depend on the type of electrolytic coloring treatment liquid to be used, but are appropriately selected within the range of a voltage of 20 to 70 V, a current of 10 to 50 A / m 2 , a temperature of 10 to 30 ° C., and a treatment time of 100 seconds or less. It is preferable to do so.
  • a voltage of 20 to 70 V, a current of 10 to 50 A / m 2, and a current of 10 to is preferable to appropriately select the temperature within the range of 30 ° C. and the treatment time of 600 seconds or less.
  • the waveform of the current used for the coloring pretreatment and the electrolytic coloring treatment is not particularly restricted.
  • a direct current, a pulse wave, a square wave, a sine wave, a waveform similar to these, a waveform obtained by combining these, and the like can be used.
  • the positive component (anode current) during the electrolytic coloring process is used as the anode current during the pre-coloring process in order to make the current distribution of each part uniform. It is effective to make them substantially equal, or to set the anode current during the electrolytic coloring treatment to 1 / 0.6 to 1 / 0.95 of the cathode current during the electrolytic coloring pretreatment.
  • the electrolytic coloring reaction proceeds with a uniform current distribution over the entire surface, so that the electrolytic coloring layer 6 having excellent color tone uniformity is formed.
  • the electrolytically colored aluminum alloy base material 2 can be sealed or the like according to a conventional method.
  • Example 1 Aluminum alloy powder having a composition of Si: 27% by mass, Fe: 0.25% by mass, Cu: 0.25% by mass, Mg: 0.7% by mass, Cr: 0.15% by mass is 565 ° C. after CIP molding. It was sintered by holding it in a vacuum atmosphere for 4 hours, and formed into a columnar shape having a bulk density of 2.3 g / cm 3 and an outer diameter of 250 mm. The particle size of the aluminum alloy powder used as a raw material is 93%, which is less than 150 ⁇ m.
  • the obtained sintered body was hot-extruded as a billet for hot extrusion.
  • the billet was heated at 450 ° C. and inserted into a container of a 10-inch extruder to obtain a plate-shaped extruder having a width of 100 mm and a thickness of 8 mm by extrusion molding.
  • the obtained extruded material was cut to produce an aluminum alloy base material having a size of 50 ⁇ 50 ⁇ 10 mm.
  • the aluminum alloy base material was subjected to an anodic oxide film treatment under the conditions of a current density of 15 mA / cm 2 and a treatment time of 1333 seconds using a sulfuric acid bath having a concentration of 180 g / l to form an anodic oxide film.
  • the aluminum alloy base material after forming the anodic oxide film is used as the anode, SUS304 pole is used as the counter electrode, and nickel sulfate hexahydrate: 140 g / l, boric acid: 40 g / l, and tartrate acid: 4 g / l as the electrolytic bath.
  • Aluminum alloy group after pre-coloring treatment in which a DC current is passed under the conditions of an anode current density of 2.5 mA / cm 2 and an energization time of 5 seconds in an electrolytic bath having a composition (pH 5, temperature 30 ° C.)
  • a DC current with a pulsed voltage superimposed on the counter electrode SUS304
  • cathode current density 2.5 mA / cm. 2.
  • the electrolytic coloring layer was formed by performing the electrolytic coloring treatment under the conditions of the electrolytic time: 360 seconds, and the aluminum alloy member of Example 1 was obtained.
  • Comparative Example 1 A 50 ⁇ 50 ⁇ 10 mm aluminum alloy base material was produced by cutting a JIS-A5052 aluminum alloy material. Using this aluminum alloy base material, the aluminum alloy of Comparative Example 1 is subjected to a dyeing treatment in which an organic dye (TAC411 manufactured by Okuno Pharmaceutical Co., Ltd.) is placed in an aqueous solution containing a concentration of 10 g / L and immersed at a temperature of 55 ° C. for 10 minutes. Obtained a member.
  • an organic dye TAC411 manufactured by Okuno Pharmaceutical Co., Ltd.
  • Comparative Example 2 An aluminum alloy base material was produced in the same manner as in Example 1, and an anodized film was formed on the aluminum alloy base material in the same manner as in Example 1. The aluminum alloy base material after the formation of the anodized film was dyed in the same manner as in Comparative Example 1 to obtain the aluminum alloy member of Comparative Example 2.
  • Electrolytic coloring layer 1 ... Aluminum alloy member, 2 ... Aluminum alloy base material, 4 ... Anodized film, 6 . Electrolytic coloring layer.

Abstract

The present invention provides: an aluminum alloy member which can be manufactured at a relatively low cost and has a light weight, and which can have high dimensional accuracy under a high-temperature environment and is less likely to undergo the color-fading of a blackened surface even under a high-temperature environment, and has excellent heat resistance; and a method for manufacturing the aluminum alloy member with high efficiency. The aluminum alloy member according to the present invention comprises: a substrate which comprises an extruded material of an aluminum powder alloy having an Si content of 20 to 40% by mass and has an anodic oxide coating film formed on the surface thereof; and an electrolytically colored layer which is formed by precipitating a metal or a metal salt on voids in the anodic oxide coating film.

Description

アルミニウム合金部材及びその製造方法Aluminum alloy member and its manufacturing method
 本発明は、表面の黒色化又は暗色化が求められるアルミニウム合金部材及びその製造方法に関する。 The present invention relates to an aluminum alloy member whose surface is required to be blackened or darkened, and a method for manufacturing the same.
 近年、車載向けの光学部材及び電子回路部材、並びにこれらの部材の検査装置に対する需要が増加している。これらの材料には軽量であることに加えて加工が容易なアルミニウム合金が汎用されているが、車載向けの部材の温度保証範囲は広く、最高温度は200℃程度になる場合も存在する。また、車載向けの部材に関しては、当該最高温度にて検査を行う要求がある。 In recent years, there has been an increase in demand for optical members and electronic circuit members for automobiles, and inspection devices for these members. Aluminum alloys, which are lightweight and easy to process, are widely used as these materials, but the temperature guarantee range of members for automobiles is wide, and the maximum temperature may be about 200 ° C. In addition, there is a demand for inspecting members for automobiles at the maximum temperature.
 ここで、光学部材及び電子回路部材、並びにこれらの部材の検査装置に用いられるアルミニウム合金は、光の反射を抑制するために、硫酸アルマイト処理等の陽極酸化処理の後に有機染料で表面が黒色化されるのが一般的である。 Here, the surface of the optical member, the electronic circuit member, and the aluminum alloy used for the inspection device of these members is blackened with an organic dye after anodizing treatment such as alumite sulfate treatment in order to suppress light reflection. It is common to be done.
 しかしながら、車載向けの高温環境では有機染料によって黒色化したアルミニウム合金部材の色が抜けてしまうことがある。加えて、光学部材には高い寸法精度が要求されるところ、アルミニウムは基本的に線膨張係数が大きく、一般環境と比較して耐久温度が高い車載向けの環境では熱膨張によって位置ずれが生じ、動作や検査に影響を及ぼす懸念がある。 However, in a high temperature environment for automobiles, the color of the aluminum alloy member blackened by the organic dye may be lost. In addition, where high dimensional accuracy is required for optical members, aluminum basically has a large coefficient of linear expansion, and in an in-vehicle environment where the durability temperature is high compared to the general environment, misalignment occurs due to thermal expansion. There is a concern that it may affect the operation and inspection.
 これに対し、例えば、特許文献1(特開2010-237282号公報)においては、アルミニウム又はアルミニウム合金からなるアルミニウム材で形成され、光学的薄膜体を備えてペリクルとして使用されるペリクル用支持枠の製造方法であって、酒石酸を含んだアルカリ性水溶液を用いた陽極酸化処理によりアルミニウム材の表面に陽極酸化皮膜を形成し、有機系染料を用いて染色処理した後、水蒸気により封孔処理すること、を特徴とするペリクル用支持枠の製造方法、が開示されている。 On the other hand, for example, in Patent Document 1 (Japanese Unexamined Patent Publication No. 2010-237282), a support frame for a pellicle, which is formed of an aluminum material made of aluminum or an aluminum alloy, has an optical thin film body, and is used as a pellicle. A manufacturing method in which an anodized film is formed on the surface of an aluminum material by anodizing with an alkaline aqueous solution containing tartrate, dyed with an organic dye, and then sealed with steam. A method for manufacturing a support frame for a pellicle, which comprises the above, is disclosed.
 上記特許文献1に記載のペリクル用支持枠の製造方法においては、ヘイズの最大原因物質である硫酸を用いることなく、酒石酸を含んだアルカリ性水溶液を用いてアルミニウム材を陽極酸化することで、耐食性及び耐久性に優れながら、ヘイズの発生を可及的に低減したペリクル用支持枠を得ることができる、とされている。 In the method for producing a support frame for a pellicle described in Patent Document 1, the aluminum material is anodized with an alkaline aqueous solution containing tartaric acid without using sulfuric acid, which is the largest causative substance of haze, to provide corrosion resistance and It is said that it is possible to obtain a support frame for pellicle that has excellent durability and reduces the occurrence of haze as much as possible.
 また、特許文献2(特開2016-177120号公報)においては、枠形状に形成されたペリクルフレームであり、ヤング率が150GPa以上で、かつビッカース硬度が800以上の焼結体からなり、枠形状におけるコーナー部は直線部の幅以上の幅を確保し、コーナー部のうちの少なくとも1つの幅は直線部の幅より広いペリクルフレームであって、当該ペリクルフレームはセラミックス、超硬合金又はサーメット製とすることが開示されている。 Further, in Patent Document 2 (Japanese Unexamined Patent Publication No. 2016-177120), the pellicle frame is formed in a frame shape, and is composed of a sintered body having a Young's modulus of 150 GPa or more and a Vickers hardness of 800 or more, and has a frame shape. The corner portion is secured to have a width equal to or larger than the width of the straight portion, and at least one of the corner portions is a pellicle frame wider than the width of the straight portion, and the pellicle frame is made of ceramics, cemented carbide or cermet. It is disclosed to do.
 上記特許文献2に記載のペリクルフレームにおいては、高いヤング率およびビッカース硬度の焼結体を用いているので、ペリクルフレームにペリクル膜を張設した際に発生する膜張力により、ペリクルフレームが変形するのを抑制できる。しかも、少なくとも一つのコーナー部の幅が直線部の幅より広いので、コーナー部の強度が高くでき、ペリクルフレームの変形や損壊を、更に抑制できる、とされている。 Since the pellicle frame described in Patent Document 2 uses a sintered body having a high Young's modulus and Vickers hardness, the pellicle frame is deformed by the film tension generated when the pellicle film is stretched on the pellicle frame. Can be suppressed. Moreover, since the width of at least one corner portion is wider than the width of the straight portion, the strength of the corner portion can be increased, and the deformation and damage of the pellicle frame can be further suppressed.
特開2010-237282号公報Japanese Unexamined Patent Publication No. 2010-237282 特開2016-177120号公報Japanese Unexamined Patent Publication No. 2016-177120
 上記特許文献1に記載のペリクル用支持枠は、高出力の短波長の露光光源からのエネルギー投入に対しても硫酸アンモニウム等の反応生成物(ヘイズ)を形成しない優れた安定性を有しているが、高温環境下に保持された場合の色抜けについては考慮されていない。また、アルミニウム材の大きな線膨張係数に起因する位置ずれを抑制することについても検討されていない。 The support frame for a pellicle described in Patent Document 1 has excellent stability that does not form a reaction product (haze) such as ammonium sulfate even when energy is input from a high-power short-wavelength exposure light source. However, no consideration is given to color loss when the product is kept in a high temperature environment. Further, it has not been studied to suppress the misalignment caused by the large coefficient of linear expansion of the aluminum material.
 また、上記特許文献2に記載のペリクルフレームは、室温において高い機械的性質を有しているが、高温環境下における熱膨張や表面の黒色化については検討されていない。加えて、加工性に乏しいセラミックスや比重が大きな超硬合金及びサーメットを使用するものであり、光学部材として広く利用することは困難である。 Further, although the pellicle frame described in Patent Document 2 has high mechanical properties at room temperature, thermal expansion and blackening of the surface in a high temperature environment have not been studied. In addition, ceramics having poor workability, cemented carbide having a large specific gravity, and cermet are used, and it is difficult to widely use them as optical members.
 以上のような従来技術における問題点に鑑み、本発明の目的は、比較的安価に製造できる軽量なアルミニウム合金部材であって、高温環境下で高い寸法精度を有すると共に高温環境下でも黒色化された表面が退色し難い、耐熱性に優れたアルミニウム合金部材及びその効率的な製造方法を提供することを目的としている。 In view of the above problems in the prior art, an object of the present invention is a lightweight aluminum alloy member that can be manufactured at a relatively low cost, has high dimensional accuracy in a high temperature environment, and is blackened even in a high temperature environment. It is an object of the present invention to provide an aluminum alloy member having excellent heat resistance and an efficient manufacturing method thereof, in which the surface of the aluminum alloy is not easily faded.
 本発明者らは、上記目的を達成すべく、アルミニウム合金部材の組成及び表面黒色化方法等について鋭意研究を重ねた結果、線膨張係数が低くなる特定の組成を有するアルミニウム合金粉末の押出材を用い、陽極酸化皮膜の空孔に金属又は金属塩を析出させた電解着色層を形成させること等が有効であることを見出し、本発明に到達した。 As a result of intensive studies on the composition of aluminum alloy members and the method of surface blackening in order to achieve the above object, the present inventors have obtained an extruded material of aluminum alloy powder having a specific composition having a low linear expansion coefficient. It has been found that it is effective to form an electrolytically colored layer in which a metal or a metal salt is precipitated in the pores of the anodized film, and the present invention has been reached.
 即ち、本発明は、
 Si含有量が20~40質量%であるアルミニウム粉末合金の押出材からなり、
 表面に陽極酸化皮膜を有する基材と、
 前記陽極酸化皮膜の空孔に金属又は金属塩を析出させた電解着色層と、を備えること、
 を特徴とするアルミニウム合金部材、を提供する。
That is, the present invention
It consists of an extruded aluminum powder alloy with a Si content of 20-40% by mass.
A base material with an anodized film on the surface and
Provided with an electrolytically colored layer in which a metal or a metal salt is precipitated in the pores of the anodized film.
Provided is an aluminum alloy member, which is characterized by the above.
 SiはAl母相中にSi相として晶出することで線膨張係数を低下させ、ヤング率及び耐摩耗性を向上させる効果を有している。本発明のアルミニウム合金部材においては、Si含有量を20質量%以上とすることで、高いヤング率、優れた耐摩耗性及び低い線膨張係数を実現し、40質量%以下とすることで、加工性の低下及びSi相の粗大化による強度及び靭性の低下を抑制している。なお、より好ましいSi含有量は24~28質量%である。 Si has the effect of lowering the coefficient of linear expansion and improving Young's modulus and wear resistance by crystallizing as a Si phase in the Al matrix. In the aluminum alloy member of the present invention, a high Young's modulus, excellent wear resistance and a low coefficient of linear expansion are realized by setting the Si content to 20% by mass or more, and processing is performed by setting the Si content to 40% by mass or less. It suppresses the decrease in strength and toughness due to the decrease in properties and the coarsening of the Si phase. The more preferable Si content is 24 to 28% by mass.
 また、本発明のアルミニウム合金部材は陽極酸化皮膜の空孔に金属又は金属塩を析出させた電解着色層によって表面の黒色化が達成されており、有機染料で黒色化した場合と比較して、高温環境下での退色が極めて効果的に抑制されている。即ち、本発明のアルミニウム合金部材では、線膨張係数の低下と高温環境下における退色の抑制が共に実現されている。 Further, the surface of the aluminum alloy member of the present invention is blackened by an electrolytic colored layer in which a metal or a metal salt is precipitated in the pores of the anodized film, and the surface is blackened as compared with the case where the aluminum alloy member is blackened with an organic dye. Fading in a high temperature environment is suppressed extremely effectively. That is, in the aluminum alloy member of the present invention, both the reduction of the coefficient of linear expansion and the suppression of fading in a high temperature environment are realized.
 また、本発明のアルミニウム合金部材は超硬合金やサーメットと比較して比重が小さく、光学部材を軽量とすることができる。加えて、セラミックスや超硬合金と比較して優れた靭性を有していることから取り扱いも容易である。更に、良好な加工性を有していることから製造コストを低減することができることに加え、光学部材に高い寸法精度を付与することができる。 Further, the aluminum alloy member of the present invention has a smaller specific gravity than the cemented carbide or cermet, and the optical member can be made lighter. In addition, it is easy to handle because it has excellent toughness as compared with ceramics and cemented carbide. Further, since it has good workability, it is possible to reduce the manufacturing cost and to impart high dimensional accuracy to the optical member.
 本発明のアルミニウム合金部材においては、前記アルミニウム粉末合金が、Si:20~40質量%、Mg:0.2~1.2質量%、Cu:2質量%以下、Fe:2質量%以下、Cr:0.4質量%以下であり、残部がAl及び不可避不純物からなること、が好ましい。 In the aluminum alloy member of the present invention, the aluminum powder alloy contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: 2% by mass or less, Fe: 2% by mass or less, Cr. : It is preferably 0.4% by mass or less, and the balance is composed of Al and unavoidable impurities.
 Mg及びCuの添加による析出強化、Feの添加によるヤング率及び耐食性の向上、Crの添加による結晶粒の微細化効果等によって、アルミニウム合金部材に優れた機械的性質、耐食性及び耐熱性を付与することができる。 The aluminum alloy member is provided with excellent mechanical properties, corrosion resistance and heat resistance by strengthening precipitation by adding Mg and Cu, improving Young's modulus and corrosion resistance by adding Fe, and refining crystal grains by adding Cr. be able to.
 また、本発明のアルミニウム合金部材においては、前記金属及び前記金属塩がNi、Co、Cu、Sn、Mn、Fe、Pb、Ca、Zn、Mgのうちの少なくとも一つを含むこと、が好ましい。これらの元素を含むことで、表面の黒色化を効率的かつ確実に達成することができる。 Further, in the aluminum alloy member of the present invention, it is preferable that the metal and the metal salt contain at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn and Mg. By including these elements, blackening of the surface can be efficiently and surely achieved.
 また、本発明のアルミニウム合金部材においては、線膨張係数が10×10-6~23×10-6/Kであること、が好ましい。線膨張係数を10×10-6/K以上とすることで、必要以上の各種元素の添加による加工性の低下や強度及び靭性の低下を抑制することができることに加え、光学部材と、セラミックやシリコン等からなる材料との線膨張係数が近くなる。また、23×10-6/K以下とすることで、高温環境下(例えば、200℃)での熱膨張に起因する位置ずれを抑制することができる。ここで、より好ましい線膨張係数の範囲は13×10-6~20×10-6/Kであり、最も好ましい線膨張係数の範囲は15×10-6~19×10-6/Kである。 Further, in the aluminum alloy member of the present invention, it is preferable that the coefficient of linear expansion is 10 × 10 -6 to 23 × 10 -6 / K. By setting the coefficient of linear expansion to 10 × 10 -6 / K or more, it is possible to suppress a decrease in workability and strength and toughness due to the addition of various elements more than necessary, as well as optical members and ceramics. The coefficient of linear expansion is close to that of a material made of silicon or the like. Further, by setting the value to 23 × 10 -6 / K or less, it is possible to suppress the displacement due to thermal expansion in a high temperature environment (for example, 200 ° C.). Here, the more preferable range of the coefficient of linear expansion is 13 × 10 -6 to 20 × 10 -6 / K, and the most preferable range of the coefficient of linear expansion is 15 × 10 -6 to 19 × 10 -6 / K. ..
 また、本発明のアルミニウム合金部材においては、200℃の雰囲気下にて100時間保持する加熱処理後のL値と加熱処理前のL値との差が3以下であること、が好ましい。加熱後のL値と加熱前のL値との差が3以下であれば、光学部材が使用される高温環境下での退色を考慮する必要が殆ど無い。ここで、加熱後のL値と加熱前のL値との差が2以下であることがより好ましく、1以下であることが最も好ましい。また、アルミニウム合金部材のL値を60以下とすることで、各種光学部品の光反射を十分に抑制することができる。アルミニウム合金部材のL*値は、50以下であることがより好ましく、45以下であることがさらに好ましい。 In the aluminum alloy of the present invention, the difference between the L * value as before heat treatment L * value after the heat treatment of holding for 100 hours in an atmosphere of 200 ° C. is 3 or less, are preferred. If the difference between the L * value before heating L * value after heating is 3 or less, need hardly consider the fading in a high-temperature environment in which the optical member is used. Here, more preferably the difference between the L * value before heating L * value after heating is 2 or less, and most preferably 1 or less. Further, by setting the L * value of the aluminum alloy member to 60 or less, the light reflection of various optical components can be sufficiently suppressed. The L * value of the aluminum alloy member is more preferably 50 or less, and further preferably 45 or less.
 更に、本発明のアルミニウム合金部材は、光学部材又は光学部材検査装置用部材であること、が好ましい。本発明のアルミニウム合金部材は、高温環境下で高い寸法精度を有すると共に高温環境下でも黒色化された表面が退色し難い、耐熱性に優れたアルミニウム合金部材であることから、光学部材又は光学部材検査装置用部材として好適に使用することができる。ここで、光学部材検査装置としては、CCD・C-MOSイメージセンサ向け検査用光源装置を例示することができる。 Further, it is preferable that the aluminum alloy member of the present invention is an optical member or a member for an optical member inspection device. Since the aluminum alloy member of the present invention is an aluminum alloy member having high dimensional accuracy in a high temperature environment and having a blackened surface that is hard to fade even in a high temperature environment and has excellent heat resistance, it is an optical member or an optical member. It can be suitably used as a member for an inspection device. Here, as the optical member inspection device, an inspection light source device for a CCD / C-MOS image sensor can be exemplified.
 また、本発明は、
 Si含有量が20~40質量%であるアルミニウム合金粉末に加圧成形、焼結及び押出加工を施して、基材を製造する第一工程と、
 前記基材の表面に陽極酸化皮膜を形成する第二工程と、
 金属又は金属塩を含む電解液中で前記基材に電解着色を行い、前記陽極酸化皮膜の空孔に前記金属又は前記金属塩を析出させて、前記基材の表面に電解着色層を形成する第三工程と、を含むこと、
 を特徴とするアルミニウム合金部材の製造方法、も提供する。
In addition, the present invention
The first step of producing a base material by subjecting aluminum alloy powder having a Si content of 20 to 40% by mass to pressure molding, sintering and extrusion processing.
The second step of forming an anodized film on the surface of the base material and
The base material is electrolytically colored in an electrolytic solution containing a metal or a metal salt, and the metal or the metal salt is precipitated in the pores of the anodized film to form an electrolytically colored layer on the surface of the base material. Including the third step,
Also provided is a method for manufacturing an aluminum alloy member.
 アルミニウム合金粉末の焼結体を押出加工することで、Si含有量が20~40質量%であっても均質なアルミニウム合金を得ることができる。また、陽極酸化皮膜を有するアルミニウム合金材に対して金属又は金属塩を含む電解液中で電解着色することで、陽極酸化皮膜の空孔に金属又は金属塩を析出させて黒色化を達成することができる。 By extruding a sintered body of aluminum alloy powder, a homogeneous aluminum alloy can be obtained even if the Si content is 20 to 40% by mass. Further, by electrolytically coloring an aluminum alloy material having an anodized film in an electrolytic solution containing a metal or a metal salt, a metal or a metal salt is precipitated in the pores of the anodized film to achieve blackening. Can be done.
 本発明によれば、比較的安価に製造できる軽量なアルミニウム合金部材であって、高温環境下で高い寸法精度を有すると共に高温環境下でも黒色化された表面が退色し難い、耐熱性に優れたアルミニウム合金部材及びその効率的な製造方法を提供することができる。 According to the present invention, it is a lightweight aluminum alloy member that can be manufactured at a relatively low cost, has high dimensional accuracy in a high temperature environment, and has excellent heat resistance because the blackened surface does not easily fade even in a high temperature environment. It is possible to provide an aluminum alloy member and an efficient manufacturing method thereof.
実施形態のアルミニウム合金部材の概略断面図である。It is the schematic sectional drawing of the aluminum alloy member of an embodiment. 実施形態のアルミニウム合金部材の製造方法の工程図である。It is a process drawing of the manufacturing method of the aluminum alloy member of embodiment.
 以下、図面を参照しながら本発明のアルミニウム合金部材及びその効率的な製造方法についての代表的な実施形態について詳細に説明するが、本発明はこれらのみに限定されるものではない。また、実施形態における構成要素は、一部又は全部を適宜組み合わせることができる。なお、以下の説明では、同一又は相当部分には同一符号を付し、重複する説明は省略する場合がある。また、図面は、本発明を概念的に説明するためのものであるから、表された各構成要素の寸法やそれらの比は実際のものとは異なる場合もある。 Hereinafter, typical embodiments of the aluminum alloy member of the present invention and an efficient manufacturing method thereof will be described in detail with reference to the drawings, but the present invention is not limited to these. In addition, some or all of the components in the embodiment can be combined as appropriate. In the following description, the same or corresponding parts may be designated by the same reference numerals, and duplicate description may be omitted. Moreover, since the drawings are for conceptually explaining the present invention, the dimensions of each component represented and their ratios may differ from the actual ones.
1.アルミニウム合金部材
 図1に本発明のアルミニウム合金部材の概略断面図を示す。アルミニウム合金部材1は、アルミニウム合金基材2の表面に陽極酸化皮膜4が形成されており、陽極酸化皮膜4の空孔に金属又は金属塩が析出した電解着色層6を備えている。
1. 1. Aluminum alloy member FIG. 1 shows a schematic cross-sectional view of the aluminum alloy member of the present invention. The aluminum alloy member 1 has an anodic oxide film 4 formed on the surface of the aluminum alloy base material 2, and includes an electrolytic colored layer 6 in which a metal or a metal salt is deposited in the pores of the anodic oxide film 4.
 アルミニウム合金基材2は、Si:20~40質量%、Mg:0.2~1.2質量%、Cu:0超2質量%以下、Fe:0超2質量%以下、Cr:0超0.4質量%以下であり、残部がAl及び不可避不純物からなるアルミニウム合金粉末焼結体の押出材で構成されており、例えば、7000系(Al-Zn-Mg系)アルミニウム合金、6000系(Al-Mg-Si系)アルミニウム合金及び5000系(Al-Mg系)アルミニウム合金と比較して、低い線膨張係数と高いヤング率を有している。以下、各添加元素の限定理由について説明する。 The aluminum alloy base material 2 contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: more than 0 and 2% by mass or less, Fe: more than 0 and 2% by mass or less, Cr: more than 0 and 0. .4% by mass or less, and the balance is composed of extruded aluminum alloy powder sintered body composed of Al and unavoidable impurities. For example, 7000 series (Al-Zn-Mg series) aluminum alloy and 6000 series (Al). It has a low linear expansion coefficient and a high Young's ratio as compared with the −Mg—Si based) aluminum alloy and the 5000 series (Al—Mg based) aluminum alloy. The reasons for limiting each additive element will be described below.
(1)Si
 SiはAl母相中にSi相として晶出することでヤング率の向上に寄与することに加え、耐摩耗性を向上させると共に熱膨張率を低下させる効果を有している。アルミニウム合金基材2においては、Si含有量を20質量%以上とすることで、高いヤング率、優れた耐摩耗性及び低い線膨張係数を実現し、40質量%以下とすることで、加工性の低下及びSi相の粗大化による強度・靭性の低下を抑制している。なお、より好ましいSi含有量は22~35質量%であり、さらに好ましくは24~30質量%であり、特に好ましくは25~28質量%である。
(1) Si
In addition to contributing to the improvement of Young's modulus by crystallizing Si as the Si phase in the Al matrix phase, it has the effect of improving the wear resistance and lowering the coefficient of thermal expansion. In the aluminum alloy base material 2, a high Young's modulus, excellent abrasion resistance and a low coefficient of linear expansion are realized by setting the Si content to 20% by mass or more, and workability is achieved by setting the Si content to 40% by mass or less. The decrease in strength and toughness due to the decrease in Si phase and the coarsening of the Si phase are suppressed. The Si content is more preferably 22 to 35% by mass, further preferably 24 to 30% by mass, and particularly preferably 25 to 28% by mass.
(2)Mg
 Mgの含有量は、0.2~1.2質量%となっている。Mgの含有量をこの範囲に設定することによって、析出強化による強度向上を図ることができる。(MgSi、AlCuMgによる析出強化)。なお、より好ましいMg含有量は0.55~0.90質量%である。
(2) Mg
The Mg content is 0.2 to 1.2% by mass. By setting the Mg content in this range, it is possible to improve the strength by strengthening precipitation. (Precipitation strengthening with Mg 2 Si and Al 2 Cu Mg). The more preferable Mg content is 0.55 to 0.90% by mass.
(3)Cu
 Cuの含有量は、0超2質量%以下となっている。Cuの含有量をこの範囲に設定することによって、上記のMgと同様に析出強化による強度向上を図ることができる。(MgSi、AlCuMgによる析出強化)。また、ヤング率向上、耐食性向上にも寄与する。2質量%より多くなると、陽極酸化皮膜性が低下する。なお、より好ましいCu含有量は0.11~0.30質量%である。
(3) Cu
The Cu content is more than 0 and 2% by mass or less. By setting the Cu content in this range, it is possible to improve the strength by strengthening precipitation as in the case of Mg described above. (Precipitation strengthening with Mg 2 Si and Al 2 Cu Mg). It also contributes to improving Young's modulus and corrosion resistance. If it is more than 2% by mass, the anodizing film property is lowered. The more preferable Cu content is 0.11 to 0.30% by mass.
(4)Fe
 Feの含有量は、0超2質量%以下となっている。Feの含有量をこの範囲に設定することによって、ヤング率向上、耐食性向上に寄与する。2質量%より多くなると、伸び、熱伝導性、押出が低下する。なお、より好ましいFe含有量は0.7質量%以下である。
(4) Fe
The Fe content is more than 0 and 2% by mass or less. By setting the Fe content in this range, it contributes to the improvement of Young's modulus and the improvement of corrosion resistance. If it is more than 2% by mass, elongation, thermal conductivity, and extrusion decrease. The more preferable Fe content is 0.7% by mass or less.
(5)Cr
 Crの含有量は、0超0.4質量%以下となっている。Crの含有量をこの範囲に設定することによって、結晶を微細化し、靱性の向上に寄与する。なお、より好ましいCr含有量は0.03~0.26質量%である。
(5) Cr
The Cr content is more than 0 and 0.4% by mass or less. By setting the Cr content in this range, the crystal is made finer and contributes to the improvement of toughness. The more preferable Cr content is 0.03 to 0.26% by mass.
(6)Al
 (1)~(5)の成分の他、残部は実質的にAlからなる。また、その他の成分として、不可避不純物が含まれていてもよい。
(6) Al
In addition to the components (1) to (5), the rest is substantially composed of Al. In addition, unavoidable impurities may be contained as other components.
 アルミニウム合金基材2は、線膨張係数が10×10-6~23×10-6/Kであること、が好ましい。線膨張係数を10×10-6/K以上とすることで、必要以上の各種元素の添加による加工性の低下や強度及び靭性の低下を抑制することができることに加え、光学部材と、セラミックやシリコン等からなる材料との線膨張係数が近くなる。また、23×10-6/K以下とすることで、高温環境下(例えば、200℃)での熱膨張に起因する位置ずれを抑制することができる。ここで、より好ましい線膨張係数の範囲は13×10-6~20×10-6/Kであり、最も好ましい線膨張係数の範囲は15×10-6~19×10-6/Kである。 The aluminum alloy base material 2 preferably has a coefficient of linear expansion of 10 × 10 -6 to 23 × 10 -6 / K. By setting the coefficient of linear expansion to 10 × 10 -6 / K or more, it is possible to suppress a decrease in workability and strength and toughness due to the addition of various elements more than necessary, as well as optical members and ceramics. The coefficient of linear expansion is close to that of a material made of silicon or the like. Further, by setting the value to 23 × 10 -6 / K or less, it is possible to suppress the displacement due to thermal expansion in a high temperature environment (for example, 200 ° C.). Here, the more preferable range of the coefficient of linear expansion is 13 × 10 -6 to 20 × 10 -6 / K, and the most preferable range of the coefficient of linear expansion is 15 × 10 -6 to 19 × 10 -6 / K. ..
 陽極酸化皮膜4の膜質等は、本発明の効果を損なわない限りにおいて特に限定されず、従来公知の種々の陽極酸化皮膜を用いることができる。硫酸浴を使用して陽極酸化処理を行ってもよいし、アルミニウム合金基材2をアルカリ性の浴中で陽極酸化処理して形成されたものであってもよい。例えば、硫酸浴を使用して陽極酸化処理を行った場合には、これに起因してアルミニウム合金基材2の表面の陽極酸化皮膜4に硫酸やリン酸等の無機酸が残存してしまう恐れがある。例えば、アルミニウム合金部材1がペリクルフレームの場合、当該無機酸が露光雰囲気中に存在するアンモニア等の塩基性物質と反応して硫酸アンモニウム等の反応生成物(ヘイズ)を生じ、当該反応生成物(ヘイズ)がペリクルにくもりを生じさせてパターン転写像に影響を与えてしまう。これに対し、陽極酸化処理にアルカリ性の浴を用いることで、当該反応生成物(ヘイズ)を形成する無機酸の残存を防止することができる。 The film quality of the anodized film 4 is not particularly limited as long as the effects of the present invention are not impaired, and various conventionally known anodized films can be used. Anodizing treatment may be performed using a sulfuric acid bath, or the aluminum alloy base material 2 may be formed by anodizing treatment in an alkaline bath. For example, when anodizing is performed using a sulfuric acid bath, there is a risk that inorganic acids such as sulfuric acid and phosphoric acid may remain on the anodized film 4 on the surface of the aluminum alloy base material 2 due to this. There is. For example, when the aluminum alloy member 1 is a pellicle frame, the inorganic acid reacts with a basic substance such as ammonia present in the exposed atmosphere to generate a reaction product (haze) such as ammonium sulfate, and the reaction product (haze). ) Causes cloudiness in the pellicle and affects the pattern transfer image. On the other hand, by using an alkaline bath for the anodizing treatment, it is possible to prevent the residual inorganic acid forming the reaction product (haze) from remaining.
 陽極酸化皮膜4の膜厚は本発明の効果を損なわない限りにおいて特に限定されないが、1~15μmとすることが好ましい。膜厚を1μm以上とすることで均質な陽極酸化皮膜4を形成させることができ、15μm以下とすることで、陽極酸化皮膜4の強度低下を抑制することができる。 The film thickness of the anodized film 4 is not particularly limited as long as the effect of the present invention is not impaired, but it is preferably 1 to 15 μm. A homogeneous anodized film 4 can be formed by setting the film thickness to 1 μm or more, and a decrease in strength of the anodized film 4 can be suppressed by setting the film thickness to 15 μm or less.
 電解着色層6に関して、陽極酸化皮膜4の空孔に析出する金属又は金属塩は、Ni、Co、Cu、Sn、Mn、Fe、Pb、Ca、Zn、Mgのうちの少なくとも一つを含むこと、が好ましい。これらの元素を含むことで、表面の黒色化を効率的かつ確実に達成することができる。また、有機染料を用いて黒色化した場合と比較して、高温環境下における退色を確実に低減することができる。これらの元素の中でも、Ni、Co、Cu、Snがより好ましく、Niがさらに好ましい。 With respect to the electrolytic colored layer 6, the metal or metal salt precipitated in the pores of the anodized film 4 contains at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn and Mg. , Are preferred. By including these elements, blackening of the surface can be efficiently and surely achieved. In addition, fading in a high temperature environment can be reliably reduced as compared with the case of blackening with an organic dye. Among these elements, Ni, Co, Cu and Sn are more preferable, and Ni is even more preferable.
 また、アルミニウム合金部材1においては、加熱後のL値と加熱前のL値との差が3以下であること、が好ましい。加熱後のL値と加熱前のL値との差が3以下であれば、光学部材が使用される高温環境下での退色を考慮する必要が殆ど無い。ここで、加熱後のL値と加熱前のL値との差が2以下であることがより好ましく、1以下であることが最も好ましい。また、アルミニウム合金部材1のL値を60以下とすることで、各種光学部品の光反射を十分に抑制することができる。アルミニウム合金部材1のL値は、50以下であることがより好ましく、45以下であることがさらに好ましい。 In the aluminum alloy member 1, the difference between the L * value before heating L * value after heating is 3 or less, are preferred. If the difference between the L * value before heating L * value after heating is 3 or less, need hardly consider the fading in a high-temperature environment in which the optical member is used. Here, more preferably the difference between the L * value before heating L * value after heating is 2 or less, and most preferably 1 or less. Further, by setting the L * value of the aluminum alloy member 1 to 60 or less, the light reflection of various optical components can be sufficiently suppressed. The L * value of the aluminum alloy member 1 is more preferably 50 or less, and further preferably 45 or less.
 更に、アルミニウム合金部材1は、光学部材又は光学部材検査装置用部材であること、が好ましい。本発明のアルミニウム合金部材は、高温環境下で高い寸法精度を有すると共に高温環境下でも黒色化された表面が退色し難い、耐熱性に優れたアルミニウム合金部材であることから、光学部材又は光学部材検査装置用部材として好適に使用することができる。ここで、光学部材検査装置としては、CCD・C-MOSイメージセンサ向け検査用光源装置を例示することができる。また、光学部材としては、例えば、ペリクルフレーム、レンズホルダー、バレル、シェード、リフレクター等が挙げられる。 Further, it is preferable that the aluminum alloy member 1 is an optical member or a member for an optical member inspection device. Since the aluminum alloy member of the present invention is an aluminum alloy member having high dimensional accuracy in a high temperature environment and having a blackened surface that is hard to fade even in a high temperature environment and has excellent heat resistance, it is an optical member or an optical member. It can be suitably used as a member for an inspection device. Here, as the optical member inspection device, an inspection light source device for a CCD / C-MOS image sensor can be exemplified. Examples of the optical member include a pellicle frame, a lens holder, a barrel, a shade, a reflector, and the like.
2.アルミニウム合金部材の製造方法
 図2に示すように、本実施形態のアルミニウム合金部材の製造方法は、基材を製造する第一工程(S01)と、基材の表面に陽極酸化皮膜を形成する第二工程(S02)と、基材の表面に電解着色層を形成する第三工程(S03)と、を含んでいる。以下、任意の工程も含めて各工程等について詳細に説明する。
2. Manufacturing Method of Aluminum Alloy Member As shown in FIG. 2, the manufacturing method of the aluminum alloy member of the present embodiment includes a first step (S01) of manufacturing a base material and a first step of forming an anodized film on the surface of the base material. It includes a second step (S02) and a third step (S03) of forming an electrolytically colored layer on the surface of the base material. Hereinafter, each process and the like including any process will be described in detail.
(1)基材製造工程(第一工程:S01)
 基材製造工程(S01)はSi含有量が20~40質量%であるアルミニウム合金粉末を原料として、加圧成形、焼結及び押出加工を経てアルミニウム合金基材2を製造するための工程である。アルミニウム合金粉末は、Si:20~40質量%、Mg:0.2~1.2質量%、Cu:0超2質量%以下、Fe:0超2質量%以下、Cr:0超0.4質量%以下であり、残部がAl及び不可避不純物からなることが好ましい。
(1) Substrate manufacturing process (first process: S01)
The base material manufacturing step (S01) is a step for manufacturing the aluminum alloy base material 2 through pressure molding, sintering, and extrusion processing using an aluminum alloy powder having a Si content of 20 to 40% by mass as a raw material. .. The aluminum alloy powder contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: more than 0% by mass and less than 2% by mass, Fe: more than 0 and 2% by mass or less, Cr: more than 0 and 0.4% by mass. It is preferably mass% or less, and the balance is preferably composed of Al and unavoidable impurities.
 アルミニウム合金粉末に対する加圧成形の方法は、本発明の効果を損なわない範囲で特に制限されず、従来公知の種々の方法で施すことができ、例えば、プレス法やCIP法等を用いることができる。なお、加圧成形の成形圧は、アルミニウム合金粉末の組成、形状及び粒径等に応じて適宜設定すればよい。 The method of pressure molding on the aluminum alloy powder is not particularly limited as long as the effect of the present invention is not impaired, and various conventionally known methods can be used. For example, a press method, a CIP method, or the like can be used. .. The molding pressure for pressure molding may be appropriately set according to the composition, shape, particle size, etc. of the aluminum alloy powder.
 また、加圧成形体を焼結する条件はアルミニウム合金粉末の組成、粒径及び形状等や、加圧成形体の密度等に応じて適宜調整し、熱間押出によって良好な押出材を得ることができる状態の焼結体が得られる焼結条件を用いればよい。当該焼結条件としては、例えば、加圧成形体を1Torr以下の真空度で炉内温度が100~400℃に制御された真空炉内で0.5~2時間保持した後、真空度を1Torr以下(好ましくは0.1Torr以下)に保ちながら、加圧成形体の温度が520~570℃になるように炉内を昇温し、1~6時間保持すればよい。 Further, the conditions for sintering the pressure molded body are appropriately adjusted according to the composition, particle size and shape of the aluminum alloy powder, the density of the pressure molded body, etc., and a good extruded material is obtained by hot extrusion. The sintering conditions may be used so that a sintered body in a state where it can be obtained can be obtained. As the sintering conditions, for example, the pressure molded body is held in a vacuum furnace having a vacuum degree of 1 Torr or less and a furnace temperature controlled to 100 to 400 ° C. for 0.5 to 2 hours, and then the vacuum degree is 1 Torr. The temperature inside the furnace may be raised to 520 to 570 ° C. and held for 1 to 6 hours while keeping the temperature below (preferably 0.1 Torr or less).
 アルミニウム合金粉末焼結体の押出加工には、熱間押出を用いることが好ましい。熱間押出の方法及び条件は、本発明の効果を損なわない範囲で特に制限されず、従来公知のアルミニウム合金粉末焼結体の熱間押出方法及び条件を用いればよいが、熱間押出の温度は400~500℃程度に設定すればよい。 It is preferable to use hot extrusion for extrusion of aluminum alloy powder sintered body. The hot extrusion method and conditions are not particularly limited as long as the effects of the present invention are not impaired, and conventionally known hot extrusion methods and conditions for aluminum alloy powder sintered bodies may be used, but the hot extrusion temperature. May be set to about 400 to 500 ° C.
 また、熱間押出する場合、金型前方に金属板(例えば、純アルミニウムや5000系のアルミニウム合金等)を押出材料である焼結体の前に配置してもよい。これにより、押出材の表面に金属板組成の薄い皮膜を形成させることができ、Al-Si系材料が最表面にある場合に起こり得るSiとAlの界面における経時的な孔食や全面腐食を抑制することができる。 Further, in the case of hot extrusion, a metal plate (for example, pure aluminum or a 5000 series aluminum alloy) may be placed in front of the sintered body which is an extrusion material in front of the mold. As a result, a thin film having a metal plate composition can be formed on the surface of the extruded material, which causes pitting corrosion and total corrosion over time at the interface between Si and Al, which may occur when the Al—Si material is on the outermost surface. It can be suppressed.
 熱間押出された成形体は、必要に応じて、所望の形状を付与するために鍛造等を行う。この場合、当該鍛造等に先立って、成形体の熱処理を実施してもよい。例えば、200~400℃で0.5~2時間程度の熱処理を施すことにより、熱間押出された成形体の鍛造性を高めることができる。 The hot-extruded molded product is forged or the like to give it a desired shape, if necessary. In this case, the molded product may be heat-treated prior to the forging or the like. For example, the forging property of the hot-extruded molded product can be improved by performing the heat treatment at 200 to 400 ° C. for about 0.5 to 2 hours.
(2)陽極酸化皮膜形成工程(第二工程:S02)
 陽極酸化皮膜形成工程(S02)は、基材製造工程(S01)によって得られたアルミニウム合金基材2の表面に陽極酸化皮膜4を形成するための工程である。陽極酸化処理の条件は本発明の効果を損なわない限りにおいて特に限定されず、従来公知の種々の陽極酸化処理を用いることができる。浴としては、硫酸浴、或いは、水酸化ナトリウム、水酸化カリウム、水酸化リチウム、水酸化カルシウム、水酸化ストロンチウム、及び水酸化ルビジウムからなる群から選ばれたいずれか1種以上の無機アルカリ成分を含んだ無機アルカリ浴、或いは、酒石酸、クエン酸、シュウ酸、及びサリチル酸からなる群から選ばれたいずれか1種以上の有機酸の塩と、水酸化ナトリウム、水酸化カリウム、水酸化リチウム、水酸化カルシウム、水酸化ストロンチウム、及び水酸化ルビジウムからなる群から選ばれたいずれか1種以上の無機アルカリ成分と、を含んだアルカリ混合浴等が好適に使用される。
(2) Anodizing film forming step (second step: S02)
The anodizing film forming step (S02) is a step for forming the anodizing film 4 on the surface of the aluminum alloy base material 2 obtained in the base material manufacturing step (S01). The conditions of the anodizing treatment are not particularly limited as long as the effects of the present invention are not impaired, and various conventionally known anodizing treatments can be used. As the bath, a sulfuric acid bath or any one or more inorganic alkaline components selected from the group consisting of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide, strontium hydroxide, and rubidium hydroxide may be used. An inorganic alkaline bath containing, or a salt of any one or more organic acids selected from the group consisting of tartaric acid, citric acid, oxalic acid, and salicylic acid, and sodium hydroxide, potassium hydroxide, lithium hydroxide, and water. An alkali mixed bath or the like containing any one or more inorganic alkali components selected from the group consisting of calcium oxide, strontium hydroxide, and rubidium hydroxide is preferably used.
(3)電解着色層形成工程(第三工程:S03)
 電解着色層形成工程(S03)は、陽極酸化皮膜形成工程(S02)で形成させた陽極酸化皮膜4の空孔に金属又は金属塩を析出させて、電解着色層6を形成させるための工程である。
(3) Electrolytic colored layer forming step (third step: S03)
The electrolytic colored layer forming step (S03) is a step for precipitating a metal or a metal salt in the pores of the anodic oxide film 4 formed in the anodic oxide film forming step (S02) to form the electrolytic colored layer 6. be.
 陽極酸化皮膜4が形成されたアルミニウム合金基材2を、可溶性金属塩を含む電解処理液に浸漬し、アルミニウム合金基材2を陽極として定電流電解する着色前処理を施し、次いで同じ電解処理液中でアルミニウム合金基材2を陰極として電解着色処理を施してもよいし、着色前処理を省略してもよい。 The aluminum alloy base material 2 on which the anodic oxide film 4 is formed is immersed in an electrolytic treatment liquid containing a soluble metal salt, subjected to a color pretreatment for constant current electrolysis using the aluminum alloy base material 2 as an anode, and then the same electrolytic treatment liquid. Among them, the aluminum alloy base material 2 may be used as a cathode for electrolytic coloring treatment, or the coloring pretreatment may be omitted.
 電解着色処理には、直流電流の外に、プラス成分をもつ矩形波、正弦波、パルス波又はこれらを組み合わせた波形をもつ交番電流を使用することができる。着色前処理を行う場合、プラス成分の電流密度を着色前処理時の電流密度とほぼ等しくすることが好ましく、具体的には電解着色時のカソード電流密度の1/0.6~1/0.95倍の範囲に設定することが好ましい。また、着色前処理時にマイナス成分をもつ交番電流を供給するとき、マイナス成分の最大電流密度の絶対値を好ましくはプラス成分の最大電流密度の絶対値の0.6~0.95倍の範囲に維持する。 For the electrolytic coloring process, in addition to the direct current, a square wave having a positive component, a sine wave, a pulse wave, or an alternating current having a waveform combining these can be used. When performing the coloring pretreatment, it is preferable that the current density of the positive component is substantially equal to the current density at the time of the coloring pretreatment, and specifically, 1 / 0.6 to 1/0 of the cathode current density at the time of electrolytic coloring. It is preferable to set it in the range of 95 times. Further, when an alternating current having a negative component is supplied during the coloring pretreatment, the absolute value of the maximum current density of the negative component is preferably set in the range of 0.6 to 0.95 times the absolute value of the maximum current density of the positive component. maintain.
 更に、均一な濃色系の色調を発現させることを目的に、電解着色処理槽の槽内電位差を4V以下に保ち、電解着色時の電流密度の絶対値を着色前処理時の電流密度の0.7倍程度に維持することが好ましい。 Further, for the purpose of expressing a uniform dark color tone, the potential difference in the electrolytic coloring treatment tank is kept at 4 V or less, and the absolute value of the current density at the time of electrolytic coloring is set to 0 of the current density at the time of pre-coloring treatment. It is preferable to maintain it at about 7 times.
 着色前処理時にアルミニウム合金基材2に流れるアノード電流に対し電解着色時にアルミニウム合金基材2に流れるカソード電流の電流密度を0.6~0.95倍の範囲にある値に設定すると、アノード電流が流れる場合とカソード電流が流れる場合とで電流分布が同一且つ均一になる。その結果、アルミニウム合金基材2の表面全域にわたり一様な電解着色反応が生じ、色調の均一性に優れた着色皮膜が形成される。着色前処理は、後続する着色工程で使用する電解着色処理液と同じ処理液を用い、陽極酸化処理されたアルミニウム合金基材2に施される。着色前処理及び着色処理に同じ処理液を使用するため、着色処理時における電流分布の不均一性が着色前処理によって補正される。これに対し、着色前処理及び着色処理をそれぞれ別の槽、すなわち別の電解槽条件及び浴条件で実施すると、色調の均一化に最適な電流密度比Rdが槽間で異なることから、同一電解槽を用いた場合に比較して色調の均一性が低下する。 When the current density of the cathode current flowing through the aluminum alloy base material 2 during electrolytic coloring is set to a value in the range of 0.6 to 0.95 times the anode current flowing through the aluminum alloy base material 2 during the pre-coloring treatment, the anode current flows. The current distribution is the same and uniform depending on whether the current flows or the cathode current flows. As a result, a uniform electrolytic coloring reaction occurs over the entire surface of the aluminum alloy base material 2, and a colored film having excellent color tone uniformity is formed. The coloring pretreatment is applied to the anodized aluminum alloy base material 2 using the same treatment liquid as the electrolytic coloring treatment liquid used in the subsequent coloring step. Since the same treatment liquid is used for the coloring pretreatment and the coloring treatment, the non-uniformity of the current distribution during the coloring treatment is corrected by the coloring pretreatment. On the other hand, when the coloring pretreatment and the coloring treatment are carried out in different tanks, that is, in different electrolytic cell conditions and bath conditions, the optimum current density ratio Rd for homogenizing the color tone differs between the tanks, so that the same electrolysis is performed. The uniformity of color tone is reduced as compared with the case of using a tank.
 電解着色処理浴は、成分種,濃度等に特別の制約を受けるものではないが、通常は弱酸性から中性の処理浴が使用される。金属塩にはNi、Co、Cu、Sn、Mn、Fe、Pb、Ca、Zn、Mgのうちの少なくとも一つを含む硝酸塩、硫酸塩、リン酸塩、クロム酸塩等の無機酸塩、蓚酸塩、酢酸塩、酒石酸塩等の有機酸塩があり、単独で又は複合して電解着色処理浴に添加される。電解着色法では、同じ電解処理浴を使用しても、印加電圧、電流、時間等の処理条件によって異なる色調が発現する。 The electrolytic coloring treatment bath is not particularly restricted by the component type, concentration, etc., but usually a weakly acidic to neutral treatment bath is used. Metal salts include nitrates containing at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn, and Mg, inorganic acid salts such as sulfates, phosphates, and chromate, and oxalic acid. There are organic acid salts such as salts, acetates and tartrates, which are added to the electrolytic coloring treatment bath alone or in combination. In the electrolytic coloring method, even if the same electrolytic treatment bath is used, different color tones are developed depending on the treatment conditions such as applied voltage, current, and time.
 着色前処理は、これらの電解着色処理液中でバリアー層の厚さのバラツキを解消するため、電圧、電流、温度、時間等の電解条件が設定される。電解条件は、使用する電解着色処理液の種類にもよるが、20~70Vの電圧、10~50A/m2 の電流、10~30℃の温度、100秒以下の処理時間の範囲で適宜選択することが好ましい。電解着色処理は、着色前処理時の電流密度の0.6~0.95倍の電流密度でカソード電解することを条件として、20~70Vの電圧、10~50A/m2 の電流、10~30℃の温度、600秒以下の処理時間の範囲で適宜選択することが好ましい。 In the coloring pretreatment, electrolytic conditions such as voltage, current, temperature, and time are set in order to eliminate variations in the thickness of the barrier layer in these electrolytic coloring treatment liquids. The electrolytic conditions depend on the type of electrolytic coloring treatment liquid to be used, but are appropriately selected within the range of a voltage of 20 to 70 V, a current of 10 to 50 A / m 2 , a temperature of 10 to 30 ° C., and a treatment time of 100 seconds or less. It is preferable to do so. In the electrolytic coloring treatment, a voltage of 20 to 70 V, a current of 10 to 50 A / m 2, and a current of 10 to It is preferable to appropriately select the temperature within the range of 30 ° C. and the treatment time of 600 seconds or less.
 着色前処理及び電解着色処理に使用される電流は、特に波形が制約されるものではない。たとえば、直流、パルス波、矩形波、正弦波、これらに類似する波形及びこれらを組み合わせた波形等を使用することができる。 The waveform of the current used for the coloring pretreatment and the electrolytic coloring treatment is not particularly restricted. For example, a direct current, a pulse wave, a square wave, a sine wave, a waveform similar to these, a waveform obtained by combining these, and the like can be used.
 電解着色処理に矩形波電流等のプラス成分をもつ電流を使用する場合、各部の電流分布を均一化するために、電解着色処理時のプラス成分(アノード電流)を着色前処理時のアノード電流とほぼ等しくすること、或いは電解着色処理時のアノード電流を電解着色前処理時のカソード電流の1/0.6~1/0.95に設定することが有効である。このようにして電解着色処理されたアルミニウム合金基材2は、表面全域にわたって均一化された電流分布で電解着色反応が進行するため、色調の均一性に優れた電解着色層6が形成される。なお、電解着色されたアルミニウム合金基材2には、常法に従って封孔処理等を施すことができる。 When a current having a positive component such as a rectangular wave current is used for the electrolytic coloring process, the positive component (anode current) during the electrolytic coloring process is used as the anode current during the pre-coloring process in order to make the current distribution of each part uniform. It is effective to make them substantially equal, or to set the anode current during the electrolytic coloring treatment to 1 / 0.6 to 1 / 0.95 of the cathode current during the electrolytic coloring pretreatment. In the aluminum alloy base material 2 subjected to the electrolytic coloring treatment in this manner, the electrolytic coloring reaction proceeds with a uniform current distribution over the entire surface, so that the electrolytic coloring layer 6 having excellent color tone uniformity is formed. The electrolytically colored aluminum alloy base material 2 can be sealed or the like according to a conventional method.
 以下、実施例において本発明のアルミニウム合金部材及びその製造方法について更に説明するが、本発明はこれらの実施例に何ら限定されるものではない。 Hereinafter, the aluminum alloy member of the present invention and the method for producing the same will be further described in Examples, but the present invention is not limited to these Examples.
≪実施例1≫
 Si:27質量%、Fe:0.25質量%、Cu:0.25質量%、Mg:0.7質量%、Cr:0.15質量%の組成を有するアルミニウム合金粉末をCIP成形後に565℃真空雰囲気中で4時間保持することで焼結し、かさ密度2.3g/cmの外径250mmの円柱状に成形した。なお、原料として用いたアルミニウム合金粉末の粒度は93%が150μm未満である。
<< Example 1 >>
Aluminum alloy powder having a composition of Si: 27% by mass, Fe: 0.25% by mass, Cu: 0.25% by mass, Mg: 0.7% by mass, Cr: 0.15% by mass is 565 ° C. after CIP molding. It was sintered by holding it in a vacuum atmosphere for 4 hours, and formed into a columnar shape having a bulk density of 2.3 g / cm 3 and an outer diameter of 250 mm. The particle size of the aluminum alloy powder used as a raw material is 93%, which is less than 150 μm.
 次に、得られた焼結体を熱間押出用ビレットとして熱間押出を施した。具体的には、ビレットを450℃で加熱し10インチ押出機のコンテナに挿入し、押出成形によって幅100mm、厚さ8mmの板状の押出材を得た。得られた押し出し材を切削加工し、50×50×10mmのアルミニウム合金基材を製造した。 Next, the obtained sintered body was hot-extruded as a billet for hot extrusion. Specifically, the billet was heated at 450 ° C. and inserted into a container of a 10-inch extruder to obtain a plate-shaped extruder having a width of 100 mm and a thickness of 8 mm by extrusion molding. The obtained extruded material was cut to produce an aluminum alloy base material having a size of 50 × 50 × 10 mm.
 このアルミニウム合金基材に対して、濃度180g/lの硫酸浴を用い、電流密度15mA/cm、処理時間1333秒の条件で陽極酸化皮膜処理を施し、陽極酸化皮膜を形成した。 The aluminum alloy base material was subjected to an anodic oxide film treatment under the conditions of a current density of 15 mA / cm 2 and a treatment time of 1333 seconds using a sulfuric acid bath having a concentration of 180 g / l to form an anodic oxide film.
 陽極酸化皮膜形成後のアルミニウム合金基材を陽極とし、対極としてSUS304極を使用し、電解浴として硫酸ニッケル6水和物:140g/l、ホウ酸:40g/l、及び酒石酸:4g/lの組成を有する電解浴(pH5、温度30℃)中において、陽極電流密度2.5mA/cm及び通電時間5秒間の条件で直流電流を流す着色前処理の後、着色前処理後のアルミニウム合金基材を陰極として、対極(SUS304)との間にパルス電圧を重畳した直流電流を流し、周波数:5Hz、ta/tc比:1/9、波形:矩形波、陰極電流密度:2.5mA/cm、及び電解時間:360秒の条件で電解着色処理を施すことにより、電解着色層を形成させ、実施例1のアルミニウム合金部材を得た。 The aluminum alloy base material after forming the anodic oxide film is used as the anode, SUS304 pole is used as the counter electrode, and nickel sulfate hexahydrate: 140 g / l, boric acid: 40 g / l, and tartrate acid: 4 g / l as the electrolytic bath. Aluminum alloy group after pre-coloring treatment in which a DC current is passed under the conditions of an anode current density of 2.5 mA / cm 2 and an energization time of 5 seconds in an electrolytic bath having a composition (pH 5, temperature 30 ° C.) Using the material as a cathode, a DC current with a pulsed voltage superimposed on the counter electrode (SUS304) is passed, frequency: 5 Hz, ta / tk ratio: 1/9, waveform: rectangular wave, cathode current density: 2.5 mA / cm. 2. The electrolytic coloring layer was formed by performing the electrolytic coloring treatment under the conditions of the electrolytic time: 360 seconds, and the aluminum alloy member of Example 1 was obtained.
≪比較例1≫
 JIS-A5052アルミニウム合金材を切削加工することにより、50×50×10mmのアルミニウム合金基材を製造した。このアルミニウム合金基材を用い、有機染料(奥野製薬製TAC411)を濃度10g/Lで含有した水溶液に入れ、温度55℃にて10分間浸漬する染色処理を施すことで、比較例1のアルミニウム合金部材を得た。
<< Comparative Example 1 >>
A 50 × 50 × 10 mm aluminum alloy base material was produced by cutting a JIS-A5052 aluminum alloy material. Using this aluminum alloy base material, the aluminum alloy of Comparative Example 1 is subjected to a dyeing treatment in which an organic dye (TAC411 manufactured by Okuno Pharmaceutical Co., Ltd.) is placed in an aqueous solution containing a concentration of 10 g / L and immersed at a temperature of 55 ° C. for 10 minutes. Obtained a member.
≪比較例2≫
 実施例1と同様にしてアルミニウム合金基材を製造し、当該アルミニウム合金基材に対して、実施例1と同様にして陽極酸化皮膜を形成した。陽極酸化皮膜の形成後のアルミニウム合金基材に対して、比較例1と同様にして染色処理を施すことで、比較例2のアルミニウム合金部材を得た。
<< Comparative Example 2 >>
An aluminum alloy base material was produced in the same manner as in Example 1, and an anodized film was formed on the aluminum alloy base material in the same manner as in Example 1. The aluminum alloy base material after the formation of the anodized film was dyed in the same manner as in Comparative Example 1 to obtain the aluminum alloy member of Comparative Example 2.
<L値の評価>
 明度測定器(日本電色工業社製、NF777)を用いて、実施例及び比較例で得られた各アルミニウム合金部材の明度指数L*値を測定した。次に、アルミニウム合金部材に対して、200℃の雰囲気下で100時間保持する加熱処理を行い、加熱処理後のアルミニウム合金部材の明度指数L*を測定した。加熱処理前のL値、加熱処理後のL値、及び加熱処理後のL値と加熱処理前のL値との差を表1に示す。
<Evaluation of L * value>
Using a brightness measuring device (manufactured by Nippon Denshoku Kogyo Co., Ltd., NF777), the brightness index L * value of each aluminum alloy member obtained in Examples and Comparative Examples was measured. Next, the aluminum alloy member was heat-treated by holding it in an atmosphere of 200 ° C. for 100 hours, and the brightness index L * of the aluminum alloy member after the heat treatment was measured. Before heat treatment L * values, L * value after the heat treatment, and the difference in the L * value after the heat treatment and the L * value before the heat treatment shown in Table 1.
<線膨張係数の評価>
 JIS Z2285:2003に従い、実施例及び比較例で得られた各アルミニウム合金部材の線膨張係数を測定した。得られた値を表1に示す。
<Evaluation of coefficient of linear expansion>
The coefficient of linear expansion of each aluminum alloy member obtained in Examples and Comparative Examples was measured according to JIS Z2285: 2003. The obtained values are shown in Table 1.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
1・・・アルミニウム合金部材、
2・・・アルミニウム合金基材、
4・・・陽極酸化皮膜、
6・・・電解着色層。
1 ... Aluminum alloy member,
2 ... Aluminum alloy base material,
4 ... Anodized film,
6 ... Electrolytic coloring layer.

Claims (7)

  1.  Si含有量が20~40質量%であるアルミニウム粉末合金の押出材からなり、
     表面に陽極酸化皮膜を有する基材と、
     前記陽極酸化皮膜の空孔に金属又は金属塩を析出させた電解着色層と、を備えること、
     を特徴とするアルミニウム合金部材。
    It consists of an extruded aluminum powder alloy with a Si content of 20-40% by mass.
    A base material with an anodized film on the surface and
    Provided with an electrolytically colored layer in which a metal or a metal salt is precipitated in the pores of the anodized film.
    An aluminum alloy member characterized by.
  2.  前記アルミニウム粉末合金が、Si:20~40質量%、Mg:0.2~1.2質量%、Cu:0超2質量%以下、Fe:0超2質量%以下、Cr:0超0.4質量%以下であり、残部がAl及び不可避不純物からなること、
     を特徴とする請求項1に記載のアルミニウム合金部材。
    The aluminum powder alloy contains Si: 20 to 40% by mass, Mg: 0.2 to 1.2% by mass, Cu: more than 0 and 2% by mass or less, Fe: more than 0 and 2% by mass or less, Cr: more than 0 and 0. 4% by mass or less, the balance consisting of Al and unavoidable impurities,
    The aluminum alloy member according to claim 1.
  3.  前記金属及び前記金属塩がNi、Co、Cu、Sn、Mn、Fe、Pb、Ca、Zn、Mgのうちの少なくとも一つを含むこと、
     を特徴とする請求項1又は2に記載のアルミニウム合金部材。
    The metal and the metal salt contain at least one of Ni, Co, Cu, Sn, Mn, Fe, Pb, Ca, Zn and Mg.
    The aluminum alloy member according to claim 1 or 2.
  4.  線膨張係数が10×10-6~23×10-6/Kであること、
     を特徴とする請求項1~3のうちのいずれかに記載のアルミニウム合金部材。
    The coefficient of linear expansion is 10 × 10 -6 to 23 × 10 -6 / K,
    The aluminum alloy member according to any one of claims 1 to 3.
  5.  200℃の雰囲気下にて100時間保持する加熱処理後のL値と前記加熱処理前のL値との差が3以下であること、
     を特徴とする請求項1~4のうちのいずれかに記載のアルミニウム合金部材。
    Difference in L * value after the heat treatment and L * value before the heat treatment of holding for 100 hours in an atmosphere of 200 ° C. is 3 or less,
    The aluminum alloy member according to any one of claims 1 to 4.
  6.  光学部材又は光学部材検査装置用部材であること、
     を特徴とする請求項1~5のうちのいずれかに記載のアルミニウム合金部材。
    Being an optical member or a member for an optical member inspection device,
    The aluminum alloy member according to any one of claims 1 to 5.
  7.  Si含有量が20~40質量%であるアルミニウム合金粉末に加圧成形、焼結及び押出加工を施して、基材を製造する第一工程と、
     前記基材の表面に陽極酸化皮膜を形成する第二工程と、
     金属又は金属塩を含む電解液中で前記基材に電解着色を行い、前記陽極酸化皮膜の空孔に前記金属又は前記金属塩を析出させて、前記基材の表面に電解着色層を形成する第三工程と、を含むこと、
     を特徴とするアルミニウム合金部材の製造方法。
    The first step of producing a base material by subjecting aluminum alloy powder having a Si content of 20 to 40% by mass to pressure molding, sintering and extrusion processing.
    The second step of forming an anodized film on the surface of the base material and
    The base material is electrolytically colored in an electrolytic solution containing a metal or a metal salt, and the metal or the metal salt is precipitated in the pores of the anodized film to form an electrolytically colored layer on the surface of the base material. Including the third step,
    A method for manufacturing an aluminum alloy member.
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JP2010237282A (en) 2009-03-30 2010-10-21 Nippon Light Metal Co Ltd Method for manufacturing support frame for pellicle, support frame for pellicle, and pellicle
JP2016177120A (en) 2015-03-20 2016-10-06 日本特殊陶業株式会社 Pellicle frame and manufacturing method of pellicle frame
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JP2019105714A (en) * 2017-12-12 2019-06-27 日本軽金属株式会社 Pellicle frame body for fpd (flat panel display) and manufacturing method therefor

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