WO2021192699A1 - Article inspection device and article inspection method - Google Patents

Article inspection device and article inspection method Download PDF

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Publication number
WO2021192699A1
WO2021192699A1 PCT/JP2021/005091 JP2021005091W WO2021192699A1 WO 2021192699 A1 WO2021192699 A1 WO 2021192699A1 JP 2021005091 W JP2021005091 W JP 2021005091W WO 2021192699 A1 WO2021192699 A1 WO 2021192699A1
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WO
WIPO (PCT)
Prior art keywords
inspected
ray
delay
delay time
article inspection
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PCT/JP2021/005091
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French (fr)
Japanese (ja)
Inventor
大橋　正
Original Assignee
アンリツ株式会社
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Priority claimed from JP2020054856A external-priority patent/JP7530193B2/en
Priority claimed from JP2020054857A external-priority patent/JP7530194B2/en
Application filed by アンリツ株式会社 filed Critical アンリツ株式会社
Publication of WO2021192699A1 publication Critical patent/WO2021192699A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/12—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the material being a flowing fluid or a flowing granular solid

Definitions

  • the present invention relates to an article inspection device and an article inspection method for inspecting an object to be inspected using electromagnetic waves such as X-rays.
  • the article inspection device irradiates an object to be inspected such as raw meat, fish, processed food, and medicine with electromagnetic waves such as X-rays, and based on the amount of electromagnetic waves transmitted through the object to be inspected, the presence or absence of foreign matter and a seal. It is a device that performs various inspections such as the presence or absence of defective parts and the presence or absence of missing parts.
  • Patent Document 1 As a conventional article inspection device of this type, the one described in Patent Document 1 is known.
  • the article inspection apparatus described in Patent Document 1 includes a prism or a half mirror that divides an output image of an X-ray image intensifier into three, and three cameras having a time-delayed integrated CCD image sensor. By taking the divided output images with three cameras and making the delay time (charge transfer speed of the CCD image sensor) in the time delay integration different for each of the three cameras, three images with different delay times are acquired. It has become.
  • this article inspection device a plurality of foreign substances exist at different positions in the thickness direction in the object to be inspected, and the apparent speed of the foreign substances depends on the position in the thickness direction due to the expansion of the X-ray of the point light source. Even if they are different, it is possible to acquire multiple images synchronized with the speed at multiple positions in the thickness direction, and it is possible to detect foreign matter without image blur in any of the multiple images. Can be improved.
  • the output image is optically divided by a prism or a half mirror, and a plurality of cameras according to the number of divisions are required, so that there is no foreign matter.
  • the number of acquired multiple images to be inspected, such as, has been greatly restricted.
  • the number of delay times set cannot be changed flexibly.
  • the present invention has been made to solve the above-mentioned conventional problems, and it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral and improve the inspection accuracy. It is an object of the present invention to provide an inspection device and an article inspection method.
  • the article inspection device is an article inspection device that uses a time-delayed integration process for inspecting an object to be inspected, and includes an irradiation unit (11) that irradiates a moving object (W) with electromagnetic waves, and the subject.
  • a detection unit (15) that detects the electromagnetic wave affected by the object to be inspected by a plurality of detection elements (15a) arranged in the main scanning direction orthogonal to the movement direction of the inspection object and the movement direction, and predetermined
  • a delay time setting unit (36) that sets a plurality of delay times (2t, 3t, ...) Based on the reference delay time (t) of the above, and a plurality of the delay times of the detection data detected by the detection unit. It is characterized in that it includes a TDI image generation unit (36) that performs a time delay integration process of adding using the data and generates a plurality of TDI images according to the delay time.
  • TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
  • the irradiation unit may irradiate the moving object to be inspected with electromagnetic waves that spread radially.
  • the irradiation unit may irradiate the object to be inspected, which is composed of a moving fluid, with an electromagnetic wave.
  • the TDI image corresponding to a plurality of positions in the height direction of the inspected object W is affected by the non-uniformity of the velocity distribution (image blur). ) Can be avoided and the foreign matter can be obtained in a clearly reflected state, so that the inspection accuracy can be improved.
  • the article inspection device is characterized in that the delay time setting unit sets a plurality of the delay times by multiplying a predetermined reference delay time by a natural number (n times).
  • the article inspection method is an article inspection method that uses a time-delayed integration process for inspecting an object to be inspected, and includes an irradiation step of irradiating a moving object (W) with an electromagnetic wave (X-ray) and the above-mentioned.
  • a time delay integration process for adding the detection data detected in the detection step using the plurality of delay times. Is performed, and the TDI image generation step of generating a plurality of TDI images according to the plurality of delay times is provided.
  • TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
  • the moving object to be inspected may be irradiated with electromagnetic waves that spread radially in the irradiation step.
  • the object to be inspected composed of a moving fluid may be irradiated with electromagnetic waves in the irradiation step.
  • the TDI image corresponding to a plurality of positions in the height direction of the inspected object W is affected by the non-uniformity of the velocity distribution (image blur). ) Can be avoided and the foreign matter can be obtained in a clearly reflected state, so that the inspection accuracy can be improved.
  • the present invention can provide an article inspection device and an article inspection method capable of suppressing the limitation of the delay time used for the calculation of the time delay integral and improving the inspection accuracy.
  • This embodiment illustrates a case where the present invention is applied to an X-ray inspection device as an article inspection device.
  • the X-ray inspection apparatus according to the present embodiment is incorporated into, for example, a part of a transport line, and irradiates an object (article) to be inspected sequentially transported from the upstream side with X-rays as electromagnetic waves. Based on the amount of X-rays transmitted through the object to be inspected, various inspections such as the presence or absence of foreign matter, the presence or absence of defective seals, and the presence or absence of missing items are performed and the product is carried out to the downstream side.
  • X-rays are used as electromagnetic waves in the present embodiment, the present invention is not limited to X-rays, and other electromagnetic waves such as radio waves, microwaves, visible light, and infrared light can be used. ..
  • the X-ray inspection device 1 of the present embodiment includes a transport unit 2, an X-ray irradiation unit 3, and an X-ray detection unit 4.
  • the transport unit 2 transports the object W to be inspected on the transport path.
  • the transport unit 2 is composed of a belt conveyor (see FIG. 3) having a transport belt 2a arranged horizontally with respect to the main body of the apparatus, or a pipe 5 through which an inspected object W made of a fluid flows.
  • the transport unit 2 includes a transport belt 2a made of a material (an element other than an element having a large atomic weight) that easily transmits X-rays, and is not shown when the object W to be inspected is inspected.
  • the transport belt 2a is driven at a preset transport speed by the rotation of the drive motor based on the control of the transport control unit.
  • the object W to be inspected carried in from the carry-in inlet is conveyed toward the carry-out outlet side in the transport direction (direction indicated by the arrow X).
  • the transport direction is the moving direction of the object W to be inspected.
  • the X-ray irradiation unit 3 includes a housing that constitutes an X-ray irradiation side unit provided on the upper side of the transport path of the object W to be inspected, and an X-ray irradiation unit 11 and a collimator 13 are provided in the housing. There is.
  • An irradiation opening window 3b for irradiating X-rays from the X-ray irradiation unit 11 toward the X-ray line sensor 15 described later is formed on the bottom surface of the housing of the X-ray irradiation unit 3.
  • the irradiation opening window 3b is formed, for example, in a rectangular shape in a width direction (direction indicated by an arrow Y) orthogonal to the transport direction on a plane in the transport direction.
  • the X-ray inspection device 1 of the present embodiment is provided with a goodwill-shaped shielding curtain 3a on the carry-in entrance side and the carry-out exit side of the lower part of the housing of the X-ray irradiation unit 3. This makes it possible to reliably prevent the leakage of X-rays from the device to the outside.
  • the X-ray irradiation unit 11 irradiates the object W to be inspected, which is transported on the transport path in the transport direction from the carry-in inlet to the carry-out port, with X-rays, and targets electrons accelerated by applying a voltage. It is made to collide and X-rays are generated.
  • the X-ray irradiation unit 11 has a configuration in which a cylindrical X-ray tube 11b provided inside a metal box body 11a forming a substantially rectangular parallelepiped is immersed in insulating oil.
  • the X-ray tube 11b is provided with its longitudinal direction on a plane in the transport direction of the object W to be inspected in the transport direction (or a direction orthogonal to the transport direction).
  • the X-ray tube 11b is composed of a cathode 11c and an anode target 11e supported by a support 11d arranged so as to face each other at a predetermined distance, and an electron beam from the cathode 11c is irradiated to the anode target 11e. Generating X-rays.
  • the X-rays generated by the anode target 11e as the X-ray generation source spread radially around the anode target 11e. This X-ray is emitted from the emission window 11f via the collimator 13 toward the X-ray line sensor 15 described later in a screen shape.
  • the exit window 11f is formed, for example, in a rectangular shape in a direction orthogonal to the transport direction on a plane in the transport direction of the object W to be inspected.
  • the collimeter 13 is provided below the X-ray irradiation unit 11, and irradiates the X-ray irradiation region on the X-ray line sensor 15, which will be described later, in other words, from the X-ray tube 11b toward the X-ray line sensor 15. It has, for example, a rectangular slit 13a for limiting the path of the X-rays to be generated. In this way, the X-ray irradiation unit 3 irradiates the object W to be inspected with a part of X-rays (electromagnetic waves) that spread radially.
  • the X-ray detection unit 4 includes a housing constituting an X-ray detection side unit provided on the lower side of the transport surface of the object W to be inspected so as to face the X-ray irradiation unit 3 at a predetermined distance in the height direction.
  • An X-ray line sensor 15 is provided in the housing.
  • the X-ray line sensor 15 uses a row of detection elements in which a plurality of detection elements 15a are arranged in a straight line in a direction (Y direction) orthogonal to the transport direction on a plane in the transport direction of the object W to be inspected in the transport direction (X direction). ) Are arranged in multiple stages (multiple rows).
  • the direction (Y direction) orthogonal to the transport direction of the object W to be inspected is the main scanning direction of the X-ray line sensor 15.
  • the X-ray line sensor 15 is configured as a multi-stage X-ray line sensor having a plurality of stages of detection element trains.
  • the multi-stage X-ray sensor for example, a TDI (Time Delayed Integration) type X-ray sensor or a TDS (Time Delay Summation) type X-ray sensor can be used.
  • the X-ray line sensor 15 detects the X-rays transmitted through the inspected object W and the conveying belt 2a by the plurality of detection elements 15a, and repeatedly outputs the detected detection data as the inspected object W is conveyed.
  • the output of the X-ray line sensor 15 is used for various inspections such as the presence / absence of foreign matter mixed in the object W to be inspected, the presence / absence of defective seals, and the presence / absence of missing parts.
  • the X-ray line sensor 15 faces the X-ray irradiation unit 11 with the transport belt 2a interposed therebetween.
  • each detection element is composed of a scintillator (not shown) and a light receiving element such as a photodiode in close contact with each other.
  • X-rays are converted into light by a scintillator, and this light is received by the light receiving element and converted into an electric signal.
  • it is designed to be output as X-ray transmission data.
  • each detection element may use a semiconductor such as cadmium telluride (CdTe) to directly and efficiently convert X-rays into electric signals by a photon counting method.
  • a semiconductor such as cadmium telluride (CdTe) to directly and efficiently convert X-rays into electric signals by a photon counting method.
  • CdTe cadmium telluride
  • At least one of the X-ray tube 11b, the collimator 13 and the X-ray line sensor 15 may be movably configured so that the X-ray irradiation area for the X-ray line sensor 15 can be adjusted.
  • the X-rays detected by the X-ray line sensor 15 are not limited to the X-rays that have passed through the object W to be inspected.
  • the detection target of the X-ray line sensor 15 is not only the X-ray transmitted through the inspected object W and attenuated, but also the X-ray reflected by the X-ray inspected object W or the X-ray generated by interacting with the inspected object W. Also includes new electromagnetic waves.
  • the new electromagnetic wave generated by interaction is, for example, fluorescence generated by an object to be inspected.
  • the X-ray line sensor 15 detects an electromagnetic wave affected by the object W to be inspected.
  • a sensor for example, a photodetector
  • a case where X-rays transmitted through the object W to be inspected is detected and the object W to be inspected is inspected based on the amount of the X-ray transmission is illustrated.
  • the X-ray inspection device 1 is provided with a touch panel 35.
  • the touch panel 35 displays an image of the detection data of the object W to be inspected, an inspection result, and the like. Further, on the touch panel 35, the user performs an input operation of various set values and the like, a function selection operation, and the like.
  • the X-ray inspection device 1 includes a control circuit 36, and the control circuit 36 controls the operation of the X-ray inspection device 1.
  • the control contents of the control circuit 36 include an image processing operation such as foreign matter emphasis on the detection data output by the X-ray line sensor 15, an operation of determining the inspection result of the object W to be inspected, and a display content of the touch panel 35. The operation etc. are included.
  • the operation of the control circuit 36 includes a delay time setting operation (see FIG. 8) and a measurement operation (see FIG. 9), which will be described later.
  • the X-ray line sensor 15 When the element size and element pitch of the detection element 15a of the X-ray line sensor 15 is D and the moving speed (conveying speed) of the object W to be inspected is v, the X-ray line sensor 15 is used for the time delay integration (TDI) calculation.
  • the X-ray inspection device 1 can perform the time delay integration in synchronization with the moving speed of the object W to be inspected and the foreign matter in it, which is equivalent to the case where the exposure time is increased. A clear TDI image can be obtained, and foreign matter can be detected accurately.
  • the TDI image is an image generated by a time delay integration process in which detection data of a plurality of detection elements 15a of the X-ray line sensor 15 are added using a plurality of delay times.
  • the X-ray inspection apparatus 1 generates a plurality of TDI images according to a plurality of delay times.
  • the magnified imaging will be explained. Since the X-ray inspection apparatus 1 irradiates the X-ray to be inspected with X-rays spreading radially instead of parallel X-rays, a state of magnified imaging occurs as shown in FIG. In the magnified imaging, the foreign matter m2 existing at the bottom of the object W to be inspected is detected in the actual size with the apparent moving speed from the X-ray line sensor 15 equal to the transport speed. The foreign matter m1 existing in the upper part of the above is in a state where the apparent moving speed is high and the foreign matter m1 is magnified and detected.
  • the foreign matter m1 has a size magnified ⁇ times. Detected.
  • the apparent moving speed of the foreign matter m1 from the X-ray line sensor 15 is ⁇ v, which is a value obtained by multiplying the actual moving speed v of the transport belt 2a and the object W to be inspected by the enlargement ratio ⁇ .
  • ⁇ v is a value obtained by multiplying the actual moving speed v of the transport belt 2a and the object W to be inspected by the enlargement ratio ⁇ .
  • the apparent moving speed of the foreign matter in the inspected object W is non-uniform, and the moving speed is increased toward the upper part in the inspected object W.
  • Magnified imaging can be an advantage in that foreign matter can be magnified and detected. For example, by intentionally bringing the object W to be inspected close to the X-ray irradiation unit 11, it is possible to magnify and detect a foreign substance smaller than the detection element 15a.
  • the delay time of the time delay integration so as to match the position of the foreign matter to be detected, the foreign matter can be detected satisfactorily while maintaining the advantages of magnified imaging.
  • the X-ray inspection device 1 as the article inspection device includes the X-ray irradiation unit 11 that irradiates the moving object W with X-rays as electromagnetic waves that spread radially, and the X-ray irradiation unit 11 to be inspected.
  • An X-ray line that detects X-rays affected by the object W to be inspected by a plurality of detection elements 15a arranged in the main scanning direction (Y direction) and the movement direction orthogonal to the moving direction (X direction) of the object W. It includes a sensor 15.
  • the X-ray inspection device 1 includes a delay time setting unit and a control circuit 36 as a TDI image generation unit.
  • the control circuit 36 sets a plurality of delay times based on a predetermined reference delay time t, and performs a time delay integration process of adding the detection data detected by the X-ray line sensor 15 using the plurality of delay times. Generate a plurality of TDI images according to a plurality of delay times.
  • TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
  • control circuit 36 as the delay time setting unit sets a plurality of delay times by multiplying the predetermined reference delay time t by a natural number (n times).
  • the X-ray inspection apparatus 1 has an irradiation step of irradiating the moving object W with electromagnetic waves that spread radially, and a main scanning direction and a moving direction orthogonal to the moving direction of the object W to be inspected.
  • a detection step of detecting an electromagnetic wave affected by the object W to be inspected by a plurality of arranged detection elements is performed.
  • the X-ray inspection device 1 uses the delay time setting step of setting a plurality of delay times based on a predetermined reference delay time by the control circuit 36, and the detection data detected in the detection step using the plurality of delay times.
  • a time delay integration process for adding is performed, and a TDI image generation step of generating a plurality of TDI images corresponding to a plurality of delay times is performed.
  • TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
  • the detection of foreign matter in the fluid flowing through the piping will be described.
  • a case where the inspected object W, which is a fluid, moves in the pipe 5 is examined.
  • the moving speed (flow velocity) of each part of the object W to be inspected is non-uniform.
  • the moving speed of the object W to be inspected becomes maximum in the central portion of the flow path, and becomes 0 in the vicinity of the inner wall of the pipe 5 due to the viscosity of the fluid. Therefore, even if the X-ray is parallel light instead of radial light, the same problem of image blurring as in magnified imaging occurs.
  • the moving speed of each part of the object W to be inspected can be calculated from a mathematical formula.
  • the maximum value of the moving speed is u (max)
  • the pipe length is L
  • the height from the bottom of the pipe is s
  • the diameter is 2a
  • u (max) can be calculated from the viscosity coefficient of the object W to be inspected and the flow path pressure gradient ( ⁇ P / ⁇ L), where P is the pressure in the pipe 5.
  • the influence of the magnified imaging is also exerted when the fluid object W to be inspected moves in the pipe 5, the actual moving speed of the foreign matter in consideration of the influence of the magnified imaging is non-uniform as shown in FIG. 5C.
  • the maximum value exists at a higher position than in FIG. 5B.
  • the case where the fluid moves in the closed flow path in the pipe 5 is illustrated, but the flow path in which the fluid moves is not limited to the pipe 5.
  • a fluid that moves in a flow path having an open portion such as a tub or a U-shaped groove, or a fluid that does not have a wall surface forming a flow path around it such as a liquid that freely falls in the air also rubs against air.
  • the moving speed of each part in the fluid is non-uniform depending on the presence or absence of the fluid, and the present invention can be applied to the case where these fluids are to be inspected.
  • the method of simplifying the delay time will be explained.
  • a combination process of holding and addition can be used.
  • the reference known delay time By holding the detection data before the calculation of the time delay integration and adding it to the detection data after the reference known delay time (reference delay time t), the reference known delay time (reference delay time t) can be obtained.
  • Detection data corresponding to a delay time of 2t, 3t, etc. multiplied by a natural number can be calculated, and these detection data can be used for actual inspection.
  • This method has the limitation that the delay time is limited to a natural number of times the reference delay time, but it is possible to easily perform the combination processing of retention and addition for the detected data of the digital value, and it is suitable for the photon counting method. Suitable.
  • FIG. 6 shows a case where two values are added from the upper detection data when the delay time is the reference delay time t to obtain the lower detection data with the delay time of 2t.
  • the delay time after the natural number of times depends on what value is used as the reference delay time t.
  • the delay time that can actually be used to calculate the time delay integration is determined.
  • the velocity range of the foreign matter to be detected is a range between the known minimum velocity Vmin and the maximum velocity Vmax, and a plurality of delay time setting methods suitable for Vmin and Vmax will be examined.
  • the pitch of the detection element is D and the natural number is n
  • the delay time setting operation by the X-ray inspection device 1 will be described.
  • the delay time setting operation is an operation of determining a reference delay time used for setting a plurality of delay times.
  • the control circuit 36 sets the speed range in step S11.
  • the control circuit 36 specifies a speed range based on the known minimum speed Vmin and maximum speed Vmax.
  • the minimum speed Vmin and the maximum speed Vmax a value input by the user from the touch panel 35 or a value estimated by the control circuit 36 is used.
  • the control circuit 36 can calculate the estimated values of the minimum speed Vmin and the maximum speed Vmax based on the enlargement ratio ⁇ , the height of the object W to be inspected, the average flow velocity, the pressure loss, and the like.
  • the control circuit 36 may perform estimation with respect to the minimum speed, the maximum speed, and the values on which the estimation is based by using the values stored in advance for each type of the object W to be inspected.
  • control circuit 36 sets the reference delay time in step S12.
  • control circuit 36 sets the reference delay time by a predetermined calculation formula.
  • the measurement operation by the X-ray inspection device 1 will be described.
  • the measurement operation is an operation in which a plurality of delay times are set, time delay integration is executed using the delay times, and a plurality of TDI images to be inspected are calculated from the detected data.
  • the control circuit 36 measures with the reference delay time t in step S21.
  • the control circuit 36 generates delay times 2t, 3t, ... By multiplying the reference delay time t by a natural number in step S22, and generates a plurality of TDI images corresponding to each of these delay times.
  • the TDI image created in step S22 is used as a target for quality determination such as the presence or absence of foreign matter, and the determination result is displayed on the touch panel 35.
  • the plurality of TDI images generated in step S22 are images in which foreign matter at a position corresponding to the delay time used is clearly captured, and the sharpness is different for each of the plurality of TDI images, so that an advantageous TDI image can be obtained. It can be used to make a pass / fail judgment. Further, since the number of delay times and the number of TDI images are not restricted by the device configuration, they can be flexibly changed.
  • the X-ray inspection device 1 as the article inspection device moves the X-ray irradiation unit 11 that irradiates the inspected object W made of moving fluid with electromagnetic waves and the inspected object W.
  • An X-ray line sensor 15 that detects X-rays affected by the object W to be inspected by a plurality of detection elements 15a arranged in the main scanning direction (Y direction) and the moving direction orthogonal to the direction (X direction). It has.
  • the X-ray inspection device 1 includes a delay time setting unit and a control circuit 36 as a TDI image generation unit.
  • the control circuit 36 sets a plurality of delay times based on a predetermined reference delay time t, and performs a time delay integration process of adding the detection data detected by the X-ray line sensor 15 using the plurality of delay times. Generate a plurality of TDI images according to a plurality of delay times.
  • TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
  • control circuit 36 as the delay time setting unit sets a plurality of delay times by multiplying the predetermined reference delay time t by a natural number (n times).
  • the X-ray inspection apparatus 1 has an irradiation step of irradiating an object W made of a moving fluid with an electromagnetic wave, and a main scanning direction and a moving direction orthogonal to the moving direction of the object W to be inspected.
  • a detection step of detecting an electromagnetic wave affected by the object W to be inspected by a plurality of arranged detection elements is performed.
  • the X-ray inspection device 1 uses the delay time setting step of setting a plurality of delay times based on a predetermined reference delay time by the control circuit 36, and the detection data detected in the detection step using the plurality of delay times.
  • a time delay integration process for adding is performed, and a TDI image generation step of generating a plurality of TDI images corresponding to a plurality of delay times is performed.
  • TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.

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Abstract

An X-ray inspection device 1 as this article inspection device is provided with: an X-ray irradiation unit 11 that irradiates a moving article W to be inspected with an X-ray which is an electromagnetic wave; and an X-ray line sensor 15 that detects an X-ray affected by the article W to be inspected by means of a plurality of detection elements 15a arranged in a main scanning direction (Y direction) orthogonal to the moving direction (X direction) of the article W to be inspected and in the moving direction. The X-ray inspection device 1 is provided with a control circuit 36 that serves as a delay time setting unit and a TDI image generation unit. The control circuit 36 sets a plurality of delay times on the basis of a prescribed reference delay time t, executes a time delay integration process for adding detection data detected by the X-ray line sensor 15 by using the delay times, and generates a plurality of TDI images corresponding to the delay times.

Description

物品検査装置および物品検査方法Article inspection equipment and article inspection method
　本発明は、Ｘ線等の電磁波を用いて被検査物の検査を行う物品検査装置および物品検査方法に関する。 The present invention relates to an article inspection device and an article inspection method for inspecting an object to be inspected using electromagnetic waves such as X-rays.
　物品検査装置は、例えば、生肉、魚、加工食品、医薬などの被検査物にＸ線等の電磁波を照射し、被検査物を透過する電磁波の透過量等に基づいて異物混入の有無、シール部不良の有無、欠品の有無などの各種検査を行う装置である。 The article inspection device irradiates an object to be inspected such as raw meat, fish, processed food, and medicine with electromagnetic waves such as X-rays, and based on the amount of electromagnetic waves transmitted through the object to be inspected, the presence or absence of foreign matter and a seal. It is a device that performs various inspections such as the presence or absence of defective parts and the presence or absence of missing parts.
　従来のこの種の物品検査装置として特許文献１に記載されたものが知られている。特許文献１に記載の物品検査装置は、Ｘ線イメージインテンシファイアーの出力画像を３分割するプリズムまたはハーフミラーと、時間遅延積分型のＣＣＤ撮像素子を有する３つのカメラとを備えており、３分割された出力画像を３つのカメラで撮影し、時間遅延積分における遅延時間（ＣＣＤ撮像素子の電荷転送速度）を３つのカメラごとに異ならせることにより、遅延時間の異なる３つの画像を取得するようになっている。 As a conventional article inspection device of this type, the one described in Patent Document 1 is known. The article inspection apparatus described in Patent Document 1 includes a prism or a half mirror that divides an output image of an X-ray image intensifier into three, and three cameras having a time-delayed integrated CCD image sensor. By taking the divided output images with three cameras and making the delay time (charge transfer speed of the CCD image sensor) in the time delay integration different for each of the three cameras, three images with different delay times are acquired. It has become.
　この物品検査装置によれば、被検査物中の厚み方向の異なる位置に複数の異物が存在し、点光源のＸ線が拡大することにより異物の見かけ上の速度がその厚み方向の位置に応じて異なる場合であっても、厚み方向の複数の位置での速度に同期した複数の画像を取得でき、複数の画像の何れかで画像ぼけのない異物を検出可能になるため、異物検出精度を向上することができる。 According to this article inspection device, a plurality of foreign substances exist at different positions in the thickness direction in the object to be inspected, and the apparent speed of the foreign substances depends on the position in the thickness direction due to the expansion of the X-ray of the point light source. Even if they are different, it is possible to acquire multiple images synchronized with the speed at multiple positions in the thickness direction, and it is possible to detect foreign matter without image blur in any of the multiple images. Can be improved.
特許第３６７８７３０号公報Japanese Patent No. 3678730
　しかしながら、特許文献１に記載の物品検査装置にあっては、出力画像をプリズムまたはハーフミラーによって光学的に分割しており、かつ、分割数に応じた複数のカメラが必要なため、異物の有無等の検査対象となる複数の画像の取得数が大きく制約されてしまっていた。また、遅延時間の設定個数も柔軟に変更することができなかった。 However, in the article inspection device described in Patent Document 1, the output image is optically divided by a prism or a half mirror, and a plurality of cameras according to the number of divisions are required, so that there is no foreign matter. The number of acquired multiple images to be inspected, such as, has been greatly restricted. In addition, the number of delay times set cannot be changed flexibly.
　そこで、本発明は、前述のような従来の問題を解決するためになされたもので、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる物品検査装置および物品検査方法を提供することを目的とする。 Therefore, the present invention has been made to solve the above-mentioned conventional problems, and it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral and improve the inspection accuracy. It is an object of the present invention to provide an inspection device and an article inspection method.
　本発明に係る物品検査装置は、被検査物の検査に時間遅延積分処理を用いる物品検査装置であって、移動する被検査物（Ｗ）に電磁波を照射する照射部（１１）と、前記被検査物の移動方向に直交する主走査方向と前記移動方向とに配列された複数の検出素子（１５ａ）により前記被検査物の影響を受けた前記電磁波を検出する検出部（１５）と、所定の基準遅延時間（ｔ）に基づいて複数の遅延時間（２ｔ、３ｔ、・・・）を設定する遅延時間設定部（３６）と、前記検出部が検出した検出データを複数の前記遅延時間を用いて加算する時間遅延積分処理を実施し、複数の前記遅延時間に応じた複数のＴＤＩ画像を生成するＴＤＩ画像生成部（３６）と、を備えることを特徴とする。 The article inspection device according to the present invention is an article inspection device that uses a time-delayed integration process for inspecting an object to be inspected, and includes an irradiation unit (11) that irradiates a moving object (W) with electromagnetic waves, and the subject. A detection unit (15) that detects the electromagnetic wave affected by the object to be inspected by a plurality of detection elements (15a) arranged in the main scanning direction orthogonal to the movement direction of the inspection object and the movement direction, and predetermined A delay time setting unit (36) that sets a plurality of delay times (2t, 3t, ...) Based on the reference delay time (t) of the above, and a plurality of the delay times of the detection data detected by the detection unit. It is characterized in that it includes a TDI image generation unit (36) that performs a time delay integration process of adding using the data and generates a plurality of TDI images according to the delay time.
　これにより、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。また、複数の遅延時間を用いた時間遅延積分により複数のＴＤＩ画像を取得しており、Ｘ線出力画像をプリズム等により光学的に分割する必要がないため、時間遅延積分の演算に用いる遅延時間の値や数が制約されることを抑制できる。この結果、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる。 As a result, TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
　本発明に係る物品検査装置において、前記照射部は、移動する前記被検査物に放射状に広がる電磁波を照射してもよい。 In the article inspection device according to the present invention, the irradiation unit may irradiate the moving object to be inspected with electromagnetic waves that spread radially.
　これにより、異物を拡大して検出できる。また、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。 This makes it possible to magnify and detect foreign matter. Further, since the TDI image corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where the foreign matter is clearly reflected while avoiding the influence of the enlargement of the X-ray, the inspection accuracy can be improved. can.
　本発明に係る物品検査装置において、前記照射部は、移動する流体からなる前記被検査物に電磁波を照射してもよい。 In the article inspection device according to the present invention, the irradiation unit may irradiate the object to be inspected, which is composed of a moving fluid, with an electromagnetic wave.
　被検査物Ｗが非一様の速度分布を有する流体であっても、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、速度分布の非一様性による影響（画像ボケ）の影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。 Even if the inspected object W is a fluid having a non-uniform velocity distribution, the TDI image corresponding to a plurality of positions in the height direction of the inspected object W is affected by the non-uniformity of the velocity distribution (image blur). ) Can be avoided and the foreign matter can be obtained in a clearly reflected state, so that the inspection accuracy can be improved.
　本発明に係る物品検査装置は、前記遅延時間設定部は、所定の基準遅延時間を自然数倍（ｎ倍）することにより複数の前記遅延時間を設定することを特徴とする。 The article inspection device according to the present invention is characterized in that the delay time setting unit sets a plurality of the delay times by multiplying a predetermined reference delay time by a natural number (n times).
　これにより、基準遅延時間から複数の遅延時間を算出する演算をデジタルデータ上で容易に行うことができる。 As a result, the calculation of calculating a plurality of delay times from the reference delay time can be easily performed on the digital data.
　本発明に係る物品検査方法は、被検査物の検査に時間遅延積分処理を用いる物品検査方法であって、移動する被検査物（Ｗ）に電磁波（Ｘ線）を照射する照射ステップと、前記被検査物の移動方向に直交する主走査方向と前記移動方向とに配列された複数の検出素子により前記被検査物の影響を受けた前記電磁波を検出する検出ステップと、所定の基準遅延時間（ｔ）に基づいて複数の遅延時間（２ｔ、３ｔ、・・・）を設定する遅延時間設定ステップと、前記検出ステップで検出した検出データを複数の前記遅延時間を用いて加算する時間遅延積分処理を実施し、複数の前記遅延時間に応じた複数のＴＤＩ画像を生成するＴＤＩ画像生成ステップと、を備えることを特徴とする。 The article inspection method according to the present invention is an article inspection method that uses a time-delayed integration process for inspecting an object to be inspected, and includes an irradiation step of irradiating a moving object (W) with an electromagnetic wave (X-ray) and the above-mentioned. A detection step of detecting the electromagnetic wave affected by the object to be inspected by a plurality of detection elements arranged in the main scanning direction orthogonal to the moving direction of the object to be inspected and a predetermined reference delay time ( A delay time setting step for setting a plurality of delay times (2t, 3t, ...) Based on t), and a time delay integration process for adding the detection data detected in the detection step using the plurality of delay times. Is performed, and the TDI image generation step of generating a plurality of TDI images according to the plurality of delay times is provided.
　これにより、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。また、複数の遅延時間を用いた時間遅延積分により複数のＴＤＩ画像を取得しており、Ｘ線出力画像をプリズム等により光学的に分割する必要がないため、時間遅延積分の演算に用いる遅延時間の値や数が制約されることを抑制できる。この結果、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる。 As a result, TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
　本発明に係る物品検査方法は、前記照射ステップにおいて、移動する前記被検査物に放射状に広がる電磁波を照射してもよい。 In the article inspection method according to the present invention, the moving object to be inspected may be irradiated with electromagnetic waves that spread radially in the irradiation step.
　これにより、異物を拡大して検出できる。また、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。 This makes it possible to magnify and detect foreign matter. Further, since the TDI image corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where the foreign matter is clearly reflected while avoiding the influence of the enlargement of the X-ray, the inspection accuracy can be improved. can.
　本発明に係る物品検査方法は、前記照射ステップにおいて、移動する流体からなる前記被検査物に電磁波を照射してもよい。 In the article inspection method according to the present invention, the object to be inspected composed of a moving fluid may be irradiated with electromagnetic waves in the irradiation step.
　被検査物Ｗが非一様の速度分布を有する流体であっても、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、速度分布の非一様性による影響（画像ボケ）の影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。 Even if the inspected object W is a fluid having a non-uniform velocity distribution, the TDI image corresponding to a plurality of positions in the height direction of the inspected object W is affected by the non-uniformity of the velocity distribution (image blur). ) Can be avoided and the foreign matter can be obtained in a clearly reflected state, so that the inspection accuracy can be improved.
　本発明は、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる物品検査装置および物品検査方法を提供することができる。 The present invention can provide an article inspection device and an article inspection method capable of suppressing the limitation of the delay time used for the calculation of the time delay integral and improving the inspection accuracy.
本発明の一実施の形態に係る物品検査装置の概略を示す構成図である。It is a block diagram which shows the outline of the article inspection apparatus which concerns on one Embodiment of this invention. 本発明の一実施の形態に係る物品検査装置のＸ線ラインセンサの検出態様を示す斜視図である。It is a perspective view which shows the detection mode of the X-ray line sensor of the article inspection apparatus which concerns on one Embodiment of this invention. 本発明の一実施の形態に係る物品検査装置において、Ｘ線の拡大により速度分布が非一様のときのＸ線ラインセンサの検出態様を示す図である。It is a figure which shows the detection mode of the X-ray line sensor when the velocity distribution is non-uniform by the expansion of X-ray in the article inspection apparatus which concerns on one Embodiment of this invention. 本発明の一実施の形態に係る物品検査装置において、配管を流れる流体の速度分布が非一様のときのＸ線ラインセンサの検出態様を示す図である。It is a figure which shows the detection mode of the X-ray line sensor when the velocity distribution of the fluid flowing through a pipe is non-uniform in the article inspection apparatus which concerns on one Embodiment of this invention. 被検査物中の厚み方向の位置による速度分布を示す図である。It is a figure which shows the velocity distribution by the position in the thickness direction in an object to be inspected. 配管を流れる被検査物の粘性に基づく速度分布を示す図である。It is a figure which shows the velocity distribution based on the viscosity of the object to be inspected flowing through a pipe. 被検査物中の厚み方向の位置と粘性による速度分布を示す図である。It is a figure which shows the position in the thickness direction in an object to be inspected, and the velocity distribution by viscosity. 本発明の一実施の形態に係る物品検査装置において複数の遅延時間による測定を簡略化する手法を示す図である。It is a figure which shows the method which simplifies the measurement by a plurality of delay times in the article inspection apparatus which concerns on one Embodiment of this invention. 本発明の一実施の形態に係る物品検査装置において複数の遅延時間を設定する第１の手法を示す図である。It is a figure which shows the 1st method of setting a plurality of delay times in the article inspection apparatus which concerns on one Embodiment of this invention. 複数の遅延時間を設定する第２の手法を示す図である。It is a figure which shows the 2nd method of setting a plurality of delay times. 本発明の一実施の形態に係る物品検査装置の遅延時間設定動作を示すフローチャートである。It is a flowchart which shows the delay time setting operation of the article inspection apparatus which concerns on one Embodiment of this invention. 本発明の一実施の形態に係る物品検査装置の測定動作を示すフローチャートである。It is a flowchart which shows the measurement operation of the article inspection apparatus which concerns on one Embodiment of this invention.
　以下、本発明を実施するための形態について図面を参照しながら詳細に説明する。 Hereinafter, a mode for carrying out the present invention will be described in detail with reference to the drawings.
　本実施の形態は、物品検査装置としてのＸ線検査装置に本発明を適用した場合を例示している。本実施の形態に係るＸ線検査装置は、例えば搬送ラインの一部に組み込まれ、上流側から順次搬送されてくる被検査物（物品）に対して電磁波としてのＸ線を照射し、そのときに被検査物を透過するＸ線透過量等に基づいて異物混入の有無、シール部不良の有無、欠品の有無などの各種検査を行って下流側に搬出するものである。なお、本実施の形態では電磁波としてＸ線を用いているが、本発明はＸ線に限定されるものではなく、電波、マイクロ波、可視光、赤外光など他の電磁波を用いることができる。 This embodiment illustrates a case where the present invention is applied to an X-ray inspection device as an article inspection device. The X-ray inspection apparatus according to the present embodiment is incorporated into, for example, a part of a transport line, and irradiates an object (article) to be inspected sequentially transported from the upstream side with X-rays as electromagnetic waves. Based on the amount of X-rays transmitted through the object to be inspected, various inspections such as the presence or absence of foreign matter, the presence or absence of defective seals, and the presence or absence of missing items are performed and the product is carried out to the downstream side. Although X-rays are used as electromagnetic waves in the present embodiment, the present invention is not limited to X-rays, and other electromagnetic waves such as radio waves, microwaves, visible light, and infrared light can be used. ..
　図１に示すように、本実施の形態のＸ線検査装置１は、搬送部２、Ｘ線照射ユニット３、Ｘ線検出ユニット４を備えている。 As shown in FIG. 1, the X-ray inspection device 1 of the present embodiment includes a transport unit 2, an X-ray irradiation unit 3, and an X-ray detection unit 4.
　搬送部２は、検査対象の被検査物Ｗを搬送路上に搬送する。搬送部２は、装置本体に対して水平に配置された搬送ベルト２ａを有するベルトコンベア（図３参照）、または流体からなる被検査物Ｗが流れる配管５から構成されている。 The transport unit 2 transports the object W to be inspected on the transport path. The transport unit 2 is composed of a belt conveyor (see FIG. 3) having a transport belt 2a arranged horizontally with respect to the main body of the apparatus, or a pipe 5 through which an inspected object W made of a fluid flows.
　図２、図３において、搬送部２は、Ｘ線を透過しやすい材料（原子量の大きい元素以外の元素）からなる搬送ベルト２ａを備え、被検査物Ｗの検査を行うときに、不図示の搬送制御部の制御に基づく駆動モータの回転により予め設定される搬送速度で搬送ベルト２ａを駆動する。これにより、搬入口から搬入された被検査物Ｗは搬出口側に向けて、搬送方向（矢印Ｘで示す方向）に搬送される。搬送方向は被検査物Ｗの移動方向である。 In FIGS. 2 and 3, the transport unit 2 includes a transport belt 2a made of a material (an element other than an element having a large atomic weight) that easily transmits X-rays, and is not shown when the object W to be inspected is inspected. The transport belt 2a is driven at a preset transport speed by the rotation of the drive motor based on the control of the transport control unit. As a result, the object W to be inspected carried in from the carry-in inlet is conveyed toward the carry-out outlet side in the transport direction (direction indicated by the arrow X). The transport direction is the moving direction of the object W to be inspected.
　Ｘ線照射ユニット３は、被検査物Ｗの搬送路の上部側に設けられるＸ線照射側のユニットを構成する筐体を備え、筐体内にはＸ線照射部１１、コリメータ１３が設けられている。 The X-ray irradiation unit 3 includes a housing that constitutes an X-ray irradiation side unit provided on the upper side of the transport path of the object W to be inspected, and an X-ray irradiation unit 11 and a collimator 13 are provided in the housing. There is.
　Ｘ線照射ユニット３の筐体底面には、Ｘ線照射部１１からのＸ線を後述するＸ線ラインセンサ１５に向けて照射するための照射開口窓３ｂが形成されている。この照射開口窓３ｂは、搬送方向の平面上で搬送方向と直交する幅方向（矢印Ｙで示す方向）に例えば矩形状に形成される。 An irradiation opening window 3b for irradiating X-rays from the X-ray irradiation unit 11 toward the X-ray line sensor 15 described later is formed on the bottom surface of the housing of the X-ray irradiation unit 3. The irradiation opening window 3b is formed, for example, in a rectangular shape in a width direction (direction indicated by an arrow Y) orthogonal to the transport direction on a plane in the transport direction.
　なお、本実施の形態のＸ線検査装置１は、のれん状の遮蔽カーテン３ａをＸ線照射ユニット３の筐体下部の搬入口側と搬出口側に備えている。これにより、装置から外部へのＸ線の漏洩を確実に防止することができる。 The X-ray inspection device 1 of the present embodiment is provided with a goodwill-shaped shielding curtain 3a on the carry-in entrance side and the carry-out exit side of the lower part of the housing of the X-ray irradiation unit 3. This makes it possible to reliably prevent the leakage of X-rays from the device to the outside.
　Ｘ線照射部１１は、搬入口から搬出口に向かって搬送方向に搬送路上を搬送される被検査物ＷにＸ線を照射するものであり、電圧を印加して加速させた電子をターゲットに射突させてＸ線を発生させている。 The X-ray irradiation unit 11 irradiates the object W to be inspected, which is transported on the transport path in the transport direction from the carry-in inlet to the carry-out port, with X-rays, and targets electrons accelerated by applying a voltage. It is made to collide and X-rays are generated.
　詳しくは、Ｘ線照射部１１は、略直方体をなす金属製の箱体１１ａの内部に設けられる円筒状のＸ線管１１ｂを絶縁油により浸漬した構成である。Ｘ線管１１ｂは、その長手方向が被検査物Ｗの搬送方向の平面上で搬送方向（又は搬送方向と直交する方向）に設けられている。 Specifically, the X-ray irradiation unit 11 has a configuration in which a cylindrical X-ray tube 11b provided inside a metal box body 11a forming a substantially rectangular parallelepiped is immersed in insulating oil. The X-ray tube 11b is provided with its longitudinal direction on a plane in the transport direction of the object W to be inspected in the transport direction (or a direction orthogonal to the transport direction).
　Ｘ線管１１ｂは、陰極１１ｃと支持体１１ｄに支持された陽極ターゲット１１ｅとを所定距離をおいて対向配置したものから構成されており、陰極１１ｃからの電子ビームを陽極ターゲット１１ｅに照射させてＸ線を生成している。 The X-ray tube 11b is composed of a cathode 11c and an anode target 11e supported by a support 11d arranged so as to face each other at a predetermined distance, and an electron beam from the cathode 11c is irradiated to the anode target 11e. Generating X-rays.
　Ｘ線発生源としての陽極ターゲット１１ｅが生成したＸ線は、陽極ターゲット１１ｅを中心として放射状に広がる。このＸ線は、コリメータ１３を介して出射窓１１ｆから後述するＸ線ラインセンサ１５に向けてスクリーン状にして照射される。なお、出射窓１１ｆは、被検査物Ｗの搬送方向の平面上で搬送方向と直交する方向に例えば矩形状に形成される。 The X-rays generated by the anode target 11e as the X-ray generation source spread radially around the anode target 11e. This X-ray is emitted from the emission window 11f via the collimator 13 toward the X-ray line sensor 15 described later in a screen shape. The exit window 11f is formed, for example, in a rectangular shape in a direction orthogonal to the transport direction on a plane in the transport direction of the object W to be inspected.
　コリメータ１３は、Ｘ線照射部１１の下方に位置して設けられ、後述するＸ線ラインセンサ１５上のＸ線の照射領域、言い換えれば、Ｘ線管１１ｂからＸ線ラインセンサ１５に向かって照射されるＸ線の進路を制限するための例えば矩形状のスリット１３ａを有している。このように、Ｘ線照射ユニット３は、放射状に広がるＸ線（電磁波）の一部を被検査物Ｗに照射している。 The collimeter 13 is provided below the X-ray irradiation unit 11, and irradiates the X-ray irradiation region on the X-ray line sensor 15, which will be described later, in other words, from the X-ray tube 11b toward the X-ray line sensor 15. It has, for example, a rectangular slit 13a for limiting the path of the X-rays to be generated. In this way, the X-ray irradiation unit 3 irradiates the object W to be inspected with a part of X-rays (electromagnetic waves) that spread radially.
　Ｘ線検出ユニット４は、被検査物Ｗの搬送面の下部側にＸ線照射ユニット３と高さ方向に所定距離離れて対向して設けられるＸ線検出側のユニットを構成する筐体を備えており、筐体内にはＸ線ラインセンサ１５が設けられている。 The X-ray detection unit 4 includes a housing constituting an X-ray detection side unit provided on the lower side of the transport surface of the object W to be inspected so as to face the X-ray irradiation unit 3 at a predetermined distance in the height direction. An X-ray line sensor 15 is provided in the housing.
　Ｘ線ラインセンサ１５は、被検査物Ｗの搬送方向の平面上で搬送方向と直交する方向（Ｙ方向）に複数の検出素子１５ａを一直線上に配置した検出素子列を、搬送方向（Ｘ方向）に複数段（複数列）配置したものである。ここで、被検査物Ｗの搬送方向と直交する方向（Ｙ方向）は、Ｘ線ラインセンサ１５の主走査方向である。 The X-ray line sensor 15 uses a row of detection elements in which a plurality of detection elements 15a are arranged in a straight line in a direction (Y direction) orthogonal to the transport direction on a plane in the transport direction of the object W to be inspected in the transport direction (X direction). ) Are arranged in multiple stages (multiple rows). Here, the direction (Y direction) orthogonal to the transport direction of the object W to be inspected is the main scanning direction of the X-ray line sensor 15.
　このように、Ｘ線ラインセンサ１５は、検出素子列を複数段有する多段式のＸ線ラインセンサとして構成されている。多段式のＸ線ラインセンサとしては、例えば、ＴＤＩ（Time Delayed Integration：時間遅延積分）式またはＴＤＳ（Time Delay Summation）式のＸ線センサを用いることができる。 As described above, the X-ray line sensor 15 is configured as a multi-stage X-ray line sensor having a plurality of stages of detection element trains. As the multi-stage X-ray sensor, for example, a TDI (Time Delayed Integration) type X-ray sensor or a TDS (Time Delay Summation) type X-ray sensor can be used.
　Ｘ線ラインセンサ１５は、複数の検出素子１５ａによって被検査物Ｗおよび搬送ベルト２ａを透過するＸ線を検出し、この検出した検出データを被検査物Ｗの搬送に伴って繰り返し出力する。 The X-ray line sensor 15 detects the X-rays transmitted through the inspected object W and the conveying belt 2a by the plurality of detection elements 15a, and repeatedly outputs the detected detection data as the inspected object W is conveyed.
　このＸ線ラインセンサ１５の出力は、被検査物Ｗの異物混入の有無、シール部不良の有無、欠品の有無などの各種検査を行う際に用いられる。Ｘ線ラインセンサ１５は、搬送ベルト２ａを挟んでＸ線照射部１１と対向している。 The output of the X-ray line sensor 15 is used for various inspections such as the presence / absence of foreign matter mixed in the object W to be inspected, the presence / absence of defective seals, and the presence / absence of missing parts. The X-ray line sensor 15 faces the X-ray irradiation unit 11 with the transport belt 2a interposed therebetween.
　一例として、各検出素子は、図示しないシンチレータとフォトダイオード等の受光素子とを密着したものから構成され、Ｘ線をシンチレータで光に変換し、この光を受光素子で受光して電気信号に変換し、Ｘ線透過データとして出力するようになっている。 As an example, each detection element is composed of a scintillator (not shown) and a light receiving element such as a photodiode in close contact with each other. X-rays are converted into light by a scintillator, and this light is received by the light receiving element and converted into an electric signal. However, it is designed to be output as X-ray transmission data.
　他の例として、各検出素子は、テルル化カドミウム（ＣｄＴｅ）等の半導体を用いて、フォトンカウンティングの手法によりＸ線を直接的に効率良く電気信号に変換するようになっていてもよい。 As another example, each detection element may use a semiconductor such as cadmium telluride (CdTe) to directly and efficiently convert X-rays into electric signals by a photon counting method.
　Ｘ線ラインセンサ１５に対するＸ線の照射領域を調整できるようにするため、Ｘ線管１１ｂ、コリメータ１３およびＸ線ラインセンサ１５の少なくとも１つを移動可能に構成してもよい。なお、Ｘ線ラインセンサ１５が検出するＸ線は、被検査物Ｗを透過したＸ線に限定されない。Ｘ線ラインセンサ１５の検出対象には、被検査物Ｗを透過して減衰したＸ線だけでなく、Ｘ線被検査物Ｗを反射したＸ線、または被検査物Ｗと相互作用して発生する新たな電磁波も含まれる。相互作用して発生する新たな電磁波とは、例えば被検査物が発生させる蛍光である。言い換えれば、Ｘ線ラインセンサ１５は、被検査物Ｗの影響を受けた電磁波を検出するものである。被検査物Ｗの影響を受けた電磁波がＸ線でない場合（例えば蛍光）は、その電磁波に対応するセンサ（例えば光検出器）を用いることができる。本実施例では、被検査物Ｗを透過したＸ線を検出してそのＸ線透過量に基づいて被検査物Ｗを検査する場合を例示している。 At least one of the X-ray tube 11b, the collimator 13 and the X-ray line sensor 15 may be movably configured so that the X-ray irradiation area for the X-ray line sensor 15 can be adjusted. The X-rays detected by the X-ray line sensor 15 are not limited to the X-rays that have passed through the object W to be inspected. The detection target of the X-ray line sensor 15 is not only the X-ray transmitted through the inspected object W and attenuated, but also the X-ray reflected by the X-ray inspected object W or the X-ray generated by interacting with the inspected object W. Also includes new electromagnetic waves. The new electromagnetic wave generated by interaction is, for example, fluorescence generated by an object to be inspected. In other words, the X-ray line sensor 15 detects an electromagnetic wave affected by the object W to be inspected. When the electromagnetic wave affected by the object W to be inspected is not X-ray (for example, fluorescence), a sensor (for example, a photodetector) corresponding to the electromagnetic wave can be used. In this embodiment, a case where X-rays transmitted through the object W to be inspected is detected and the object W to be inspected is inspected based on the amount of the X-ray transmission is illustrated.
　Ｘ線検査装置１はタッチパネル３５を備えている。タッチパネル３５は、被検査物Ｗの検出データの画像、検査結果等を表示する。また、タッチパネル３５には、ユーザにより各種の設定値等の入力操作や、機能の選択操作等が行われる。 The X-ray inspection device 1 is provided with a touch panel 35. The touch panel 35 displays an image of the detection data of the object W to be inspected, an inspection result, and the like. Further, on the touch panel 35, the user performs an input operation of various set values and the like, a function selection operation, and the like.
　Ｘ線検査装置１は制御回路３６を備えており、制御回路３６は、Ｘ線検査装置１の動作を制御する。制御回路３６の制御内容には、Ｘ線ラインセンサ１５が出力した検出データに対する異物強調等の画像処理動作と、被検査物Ｗの検査結果を判定する動作と、タッチパネル３５の表示内容を生成する動作等が含まれている。また、制御回路３６の動作には、後述する遅延時間設定動作（図８参照）および測定動作（図９参照）が含まれている。 The X-ray inspection device 1 includes a control circuit 36, and the control circuit 36 controls the operation of the X-ray inspection device 1. The control contents of the control circuit 36 include an image processing operation such as foreign matter emphasis on the detection data output by the X-ray line sensor 15, an operation of determining the inspection result of the object W to be inspected, and a display content of the touch panel 35. The operation etc. are included. The operation of the control circuit 36 includes a delay time setting operation (see FIG. 8) and a measurement operation (see FIG. 9), which will be described later.
　Ｘ線ラインセンサ１５の検出素子１５ａの素子サイズおよび素子ピッチをＤ、被検査物Ｗの移動速度（搬送速度）をｖとしたとき、Ｘ線ラインセンサ１５において時間遅延積分（ＴＤＩ）演算に用いる最適な遅延時間τは、τ＝Ｄ／ｖの数式から求めることができる。最適な遅延時間τを用いることにより、Ｘ線検査装置１が被検査物Ｗおよびその中の異物の移動速度と同期して時間遅延積分を行うことができるため、露光時間を増やした場合と同等の明瞭なＴＤＩ画像を取得でき、異物を精度よく検出できる。ここで、ＴＤＩ画像とは、Ｘ線ラインセンサ１５の複数の検出素子１５ａの検出データを複数の遅延時間を用いて加算する時間遅延積分処理によって生成した画像である。Ｘ線検査装置１は、複数の遅延時間に応じた複数のＴＤＩ画像を生成する。 When the element size and element pitch of the detection element 15a of the X-ray line sensor 15 is D and the moving speed (conveying speed) of the object W to be inspected is v, the X-ray line sensor 15 is used for the time delay integration (TDI) calculation. The optimum delay time τ can be obtained from the formula of τ = D / v. By using the optimum delay time τ, the X-ray inspection device 1 can perform the time delay integration in synchronization with the moving speed of the object W to be inspected and the foreign matter in it, which is equivalent to the case where the exposure time is increased. A clear TDI image can be obtained, and foreign matter can be detected accurately. Here, the TDI image is an image generated by a time delay integration process in which detection data of a plurality of detection elements 15a of the X-ray line sensor 15 are added using a plurality of delay times. The X-ray inspection apparatus 1 generates a plurality of TDI images according to a plurality of delay times.
　拡大撮像について説明する。Ｘ線検査装置１は、平行Ｘ線ではなく、放射状に広がるＸ線を被検査物Ｗに照射しているため、図３に示すように、拡大撮像の状態が発生する。拡大撮像とは、被検査物Ｗの中の底部に存在する異物ｍ２はＸ線ラインセンサ１５からの見かけ上の移動速度が搬送速度と等しく実寸方で検出されるが、被検査物Ｗの中の上部に存在する異物ｍ１は見かけ上の移動速度が速くかつ拡大して検出される状態である。例えば、Ｘ線照射部１１と異物ｍ１との距離をｒとし、Ｘ線照射部１１とＸ線ラインセンサ１５との距離Ｒをαｒと表したとき、異物ｍ１はα倍に拡大した大きさで検出される。このときの拡大率αはα＝Ｒ／ｒの数式から求めることができる。 The magnified imaging will be explained. Since the X-ray inspection apparatus 1 irradiates the X-ray to be inspected with X-rays spreading radially instead of parallel X-rays, a state of magnified imaging occurs as shown in FIG. In the magnified imaging, the foreign matter m2 existing at the bottom of the object W to be inspected is detected in the actual size with the apparent moving speed from the X-ray line sensor 15 equal to the transport speed. The foreign matter m1 existing in the upper part of the above is in a state where the apparent moving speed is high and the foreign matter m1 is magnified and detected. For example, when the distance between the X-ray irradiation unit 11 and the foreign matter m1 is r and the distance R between the X-ray irradiation unit 11 and the X-ray line sensor 15 is αr, the foreign matter m1 has a size magnified α times. Detected. The enlargement ratio α at this time can be obtained from the mathematical formula of α = R / r.
　また、Ｘ線ラインセンサ１５からの異物ｍ１の見かけ上の移動速度はαｖとなり、搬送ベルト２ａおよび被検査物Ｗの実際の移動速度ｖに拡大率αを乗算した値となる。このように、被検査物Ｗ中の異物の見かけ上の移動速度は非一様であり、被検査物Ｗ中の上部ほど移動速度が拡大される。 Further, the apparent moving speed of the foreign matter m1 from the X-ray line sensor 15 is αv, which is a value obtained by multiplying the actual moving speed v of the transport belt 2a and the object W to be inspected by the enlargement ratio α. As described above, the apparent moving speed of the foreign matter in the inspected object W is non-uniform, and the moving speed is increased toward the upper part in the inspected object W.
　拡大撮像は、異物を拡大して検出できる点で利点となり得る。例えば、意図的に被検査物ＷをＸ線照射部１１に近接させることにより、検出素子１５ａよりも小さな異物を拡大して検出することが可能となる。 Magnified imaging can be an advantage in that foreign matter can be magnified and detected. For example, by intentionally bringing the object W to be inspected close to the X-ray irradiation unit 11, it is possible to magnify and detect a foreign substance smaller than the detection element 15a.
　一方、時間遅延積分の演算に用いる遅延時間が高さ方向（Ｚ方向）の異物の位置に適合していない検査画像は、画像中の異物がぼけた状態となり、異物検出精度を損なってしまう。 On the other hand, in the inspection image in which the delay time used for the calculation of the time delay integration does not match the position of the foreign matter in the height direction (Z direction), the foreign matter in the image becomes blurred and the foreign matter detection accuracy is impaired.
　したがって、拡大撮像の状態においては、拡大率αに応じてＸ線ラインセンサ１５のスキャンレート（遅延時間の逆数）を増やす必要がある。また、時間遅延積分の演算に用いる遅延時間も変更する必要がある。 Therefore, in the state of magnified imaging, it is necessary to increase the scan rate (reciprocal of the delay time) of the X-ray line sensor 15 according to the magnifying power α. It is also necessary to change the delay time used in the calculation of the time delay integral.
　ここで、被検査物Ｗの底面での拡大率αは、Ｘ線照射部１１と被検査物Ｗの底面との距離をｒ'としたとき、α＝Ｒ／ｒ'の数式から求めることができる。また、被検査物Ｗの上面での拡大率αは、被検査物Ｗの高さをｈとしたとき、α＝Ｒ／（ｒ'－ｈ）の数式から求めることができる。 Here, the magnification α on the bottom surface of the object W to be inspected can be obtained from the mathematical formula α = R / r'when the distance between the X-ray irradiation unit 11 and the bottom surface of the object W to be inspected is r'. can. Further, the enlargement ratio α on the upper surface of the inspected object W can be obtained from the mathematical formula of α = R / (r'−h), where h is the height of the inspected object W.
　また、異物の高さ方向（Ｚ方向）におけるＸ線ラインセンサ１５からの距離をｚとしたとき、高さ方向（ｚ方向）における拡大率分布α（ｚ）は、α（ｚ）＝Ｒ／（Ｒ－ｚ）の数式から求めることができる。また、高さ方向での速度分布ｖ（ｚ）は、ｖ（ｚ）＝ｖα（ｚ）の数式から求めることができる。 Further, when the distance from the X-ray line sensor 15 in the height direction (Z direction) of the foreign matter is z, the enlargement ratio distribution α (z) in the height direction (z direction) is α (z) = R /. It can be obtained from the mathematical formula (Rz). Further, the velocity distribution v (z) in the height direction can be obtained from the mathematical formula of v (z) = vα (z).
　したがって、検出対象の異物位置に適合するように時間遅延積分の遅延時間を設定することにより、拡大撮像の利点を保ったまま、異物を良好に検出できる。 Therefore, by setting the delay time of the time delay integration so as to match the position of the foreign matter to be detected, the foreign matter can be detected satisfactorily while maintaining the advantages of magnified imaging.
　以上説明したように、本実施例では、物品検査装置としてのＸ線検査装置１は、移動する被検査物Ｗに放射状に広がる電磁波としてのＸ線を照射するＸ線照射部１１と、被検査物Ｗの移動方向（Ｘ方向）に直交する主走査方向（Ｙ方向）と移動方向とに配列された複数の検出素子１５ａにより被検査物Ｗの影響を受けたＸ線を検出するＸ線ラインセンサ１５と、を備えている。そして、Ｘ線検査装置１は遅延時間設定部およびＴＤＩ画像生成部としての制御回路３６を備えている。制御回路３６は、所定の基準遅延時間ｔに基づいて複数の遅延時間を設定し、Ｘ線ラインセンサ１５が検出した検出データを複数の遅延時間を用いて加算する時間遅延積分処理を実施し、複数の遅延時間に応じた複数のＴＤＩ画像を生成する。 As described above, in the present embodiment, the X-ray inspection device 1 as the article inspection device includes the X-ray irradiation unit 11 that irradiates the moving object W with X-rays as electromagnetic waves that spread radially, and the X-ray irradiation unit 11 to be inspected. An X-ray line that detects X-rays affected by the object W to be inspected by a plurality of detection elements 15a arranged in the main scanning direction (Y direction) and the movement direction orthogonal to the moving direction (X direction) of the object W. It includes a sensor 15. The X-ray inspection device 1 includes a delay time setting unit and a control circuit 36 as a TDI image generation unit. The control circuit 36 sets a plurality of delay times based on a predetermined reference delay time t, and performs a time delay integration process of adding the detection data detected by the X-ray line sensor 15 using the plurality of delay times. Generate a plurality of TDI images according to a plurality of delay times.
　これにより、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。また、複数の遅延時間を用いた時間遅延積分により複数のＴＤＩ画像を取得しており、Ｘ線出力画像をプリズム等により光学的に分割する必要がないため、時間遅延積分の演算に用いる遅延時間の値や数が制約されることを抑制できる。この結果、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる。 As a result, TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
　また、本実施例において、遅延時間設定部としての制御回路３６は、所定の基準遅延時間ｔを自然数倍（ｎ倍）することにより複数の遅延時間を設定している。 Further, in the present embodiment, the control circuit 36 as the delay time setting unit sets a plurality of delay times by multiplying the predetermined reference delay time t by a natural number (n times).
　これにより、基準遅延時間から複数の遅延時間を算出する演算をデジタルデータ上で容易に行うことができる。 As a result, the calculation of calculating a plurality of delay times from the reference delay time can be easily performed on the digital data.
　また、本実施例では、Ｘ線検査装置１は、移動する被検査物Ｗに放射状に広がる電磁波を照射する照射ステップと、被検査物Ｗの移動方向に直交する主走査方向と移動方向とに配列された複数の検出素子により被検査物Ｗの影響を受けた電磁波を検出する検出ステップと、を実施する。そして、Ｘ線検査装置１は、制御回路３６によって、所定の基準遅延時間に基づいて複数の遅延時間を設定する遅延時間設定ステップと、検出ステップで検出した検出データを複数の遅延時間を用いて加算する時間遅延積分処理を実施し、複数の遅延時間に応じた複数のＴＤＩ画像を生成するＴＤＩ画像生成ステップと、を実施する。 Further, in the present embodiment, the X-ray inspection apparatus 1 has an irradiation step of irradiating the moving object W with electromagnetic waves that spread radially, and a main scanning direction and a moving direction orthogonal to the moving direction of the object W to be inspected. A detection step of detecting an electromagnetic wave affected by the object W to be inspected by a plurality of arranged detection elements is performed. Then, the X-ray inspection device 1 uses the delay time setting step of setting a plurality of delay times based on a predetermined reference delay time by the control circuit 36, and the detection data detected in the detection step using the plurality of delay times. A time delay integration process for adding is performed, and a TDI image generation step of generating a plurality of TDI images corresponding to a plurality of delay times is performed.
　これにより、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。また、複数の遅延時間を用いた時間遅延積分により複数のＴＤＩ画像を取得しており、Ｘ線出力画像をプリズム等により光学的に分割する必要がないため、時間遅延積分の演算に用いる遅延時間の値や数が制約されることを抑制できる。この結果、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる。 As a result, TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
　次に、配管を流れる流体中の異物検出について説明する。図４に示すように、配管５の中を流体である被検査物Ｗが移動する場合を検討する。この場合、被検査物Ｗの各部の移動速度（流速）は、非一様である。被検査物Ｗの移動速度は、流路の中央部において最大となり、配管５の内壁の近傍では流体の粘性によって０となる。このため、仮にＸ線が放射状光でなく平行光であった場合でも、拡大撮像と同様の画像ボケの問題が生じる。 Next, the detection of foreign matter in the fluid flowing through the piping will be described. As shown in FIG. 4, a case where the inspected object W, which is a fluid, moves in the pipe 5 is examined. In this case, the moving speed (flow velocity) of each part of the object W to be inspected is non-uniform. The moving speed of the object W to be inspected becomes maximum in the central portion of the flow path, and becomes 0 in the vicinity of the inner wall of the pipe 5 due to the viscosity of the fluid. Therefore, even if the X-ray is parallel light instead of radial light, the same problem of image blurring as in magnified imaging occurs.
　被検査物Ｗの各部の移動速度は数式から求めることができる。一例として、移動速度の最大値をｕ（ｍａｘ）、配管の管路長をＬ、管路内最下部からの高さをｓ、直径を２ａとしたとき、被検査物Ｗの速度分布ｕ（ｓ）は、ｕ（ｓ）＝ｕ（ｍａｘ）ｓ（２ａ－ｓ）／ａ＾２の数式から求めることができる（＾２は二乗を表す）。また、ｕ（ｍａｘ）は、配管５内の圧力をＰとしたとき、被検査物Ｗの粘性係数と流路圧力勾配（ΔＰ／ΔＬ）とから算出できる。前述の拡大撮像による影響は、配管５の中を被検査物Ｗが移動する場合にも及ぶ。 The moving speed of each part of the object W to be inspected can be calculated from a mathematical formula. As an example, when the maximum value of the moving speed is u (max), the pipe length is L, the height from the bottom of the pipe is s, and the diameter is 2a, the speed distribution u ( s) can be obtained from the formula u (s) = u (max) s (2as) / a ^ 2 (^ 2 represents the square). Further, u (max) can be calculated from the viscosity coefficient of the object W to be inspected and the flow path pressure gradient (ΔP / ΔL), where P is the pressure in the pipe 5. The effect of the above-mentioned magnified imaging extends to the case where the object W to be inspected moves in the pipe 5.
　速度分布について説明する。図３に示すように搬送ベルト２ａからなる搬送経路を固体の被検査物Ｗが移動する場合の異物の移動速度は、図５Ａに示すように非一様であり、高さｚが大きいほど速くなる。また、図４に示すように配管５からなる搬送経路を流体の被検査物Ｗが移動する場合の異物の移動速度は、図５Ｂに示すように非一様であり、高さｚが配管５の中央部の高さのときに最大となり、配管５の内壁の近傍で０となる。さらに、配管５内を流体の被検査物Ｗが移動する場合にも拡大撮像の影響が及ぶため、拡大撮像の影響を考慮した実際の異物の移動速度は、図５Ｃに示すように非一様の分布となり、図５Ｂと比較してより高い位置に最大値が存在している。なお、本実施例では配管５内の閉じられた流路を流体が移動する場合を例示しているが、流体が移動する流路は配管５に限定されるものではない。例えば、桶やＵ字溝のように開放部を有する流路を移動する流体や、空中を自由落下する液体のように周囲に流路を構成する壁面がない状態の流体も、空気との摩擦の有無により流体中の各部の移動速度が非一様であり、これらの流体を検査対象とする場合にも本発明は適用できる。 Explain the velocity distribution. As shown in FIG. 3, when the solid object W moves along the transport path including the transport belt 2a, the moving speed of the foreign matter is non-uniform as shown in FIG. 5A, and the larger the height z, the faster the moving speed. Become. Further, as shown in FIG. 4, the moving speed of the foreign matter when the fluid to be inspected W moves along the transport path including the pipe 5 is non-uniform as shown in FIG. 5B, and the height z is the pipe 5. It becomes maximum at the height of the central part of the pipe 5, and becomes 0 near the inner wall of the pipe 5. Further, since the influence of the magnified imaging is also exerted when the fluid object W to be inspected moves in the pipe 5, the actual moving speed of the foreign matter in consideration of the influence of the magnified imaging is non-uniform as shown in FIG. 5C. The maximum value exists at a higher position than in FIG. 5B. In this embodiment, the case where the fluid moves in the closed flow path in the pipe 5 is illustrated, but the flow path in which the fluid moves is not limited to the pipe 5. For example, a fluid that moves in a flow path having an open portion such as a tub or a U-shaped groove, or a fluid that does not have a wall surface forming a flow path around it such as a liquid that freely falls in the air also rubs against air. The moving speed of each part in the fluid is non-uniform depending on the presence or absence of the fluid, and the present invention can be applied to the case where these fluids are to be inspected.
　遅延時間の簡略化の手法について説明する。複数の遅延時間を非一様の速度分布に適合するように設定する手法として、図６に示すように、保持と加算の組み合わせ処理を用いることができる。時間遅延積分の演算前の検出データを保持し、基準となる既知の遅延時間（基準遅延時間ｔ）後の検出データに加算することにより、基準となる既知の遅延時間（基準遅延時間ｔ）を自然数倍した２ｔ、３ｔ等の遅延時間に相当する検出データを算出し、これらの検出データを実際の検査に用いることができる。この手法は、遅延時間が基準遅延時間の自然数倍に制限されるという制約があるが、デジタル値の検出データに対して保持と加算の組み合わせ処理を容易に行うことができ、フォトンカウンティング方式に好適である。図６は、遅延時間が基準遅延時間ｔであるときの上段の検出データから２つの値を足し合わせして、遅延時間が２ｔの下段の検出データを得る場合を表している。 The method of simplifying the delay time will be explained. As a method of setting a plurality of delay times so as to match a non-uniform velocity distribution, as shown in FIG. 6, a combination process of holding and addition can be used. By holding the detection data before the calculation of the time delay integration and adding it to the detection data after the reference known delay time (reference delay time t), the reference known delay time (reference delay time t) can be obtained. Detection data corresponding to a delay time of 2t, 3t, etc. multiplied by a natural number can be calculated, and these detection data can be used for actual inspection. This method has the limitation that the delay time is limited to a natural number of times the reference delay time, but it is possible to easily perform the combination processing of retention and addition for the detected data of the digital value, and it is suitable for the photon counting method. Suitable. FIG. 6 shows a case where two values are added from the upper detection data when the delay time is the reference delay time t to obtain the lower detection data with the delay time of 2t.
　複数の遅延時間の設定手法について説明する。上述したように基準遅延時間ｔを自然数倍（２ｔ、３ｔ、等）した遅延時間を設定する場合、基準遅延時間ｔとしてどのような値を用いるかにより、自然数倍後の遅延時間のうち実際に時間遅延積分の演算に使用可能な遅延時間が決定される。以下では、検出対象の異物の速度範囲がいずれも既知の最小速度Ｖｍｉｎから最大速度Ｖｍａｘの間の範囲であり、ＶｍｉｎおよびＶｍａｘに適合する複数の遅延時間の設定手法を検討する。検出素子のピッチをＤ、自然数をｎとするとき、対応可能な速度はｖ＝Ｄ／ｎｔであり、自然数ｎの逆数に比例する。また、自然数ｎの逆数は、ｎ＝１のとき（１／１）とｎ＝２のとき（１／２）との間が特別に間隔が広い。そのため、図７Ａに示すように、Ｖｍａｘ＝Ｄ／ｔに設定することで使用可能な複数の遅延時間を無駄なく設定できる。一方、この場合、使用しない速度領域も広くなり、使用可能な遅延時間の個数が少なくなる。使用可能な遅延時間の個数が少ないと、画像ボケのない異物が表されたＴＤＩ画像の取得数が少なくなってしまう。 Explain how to set multiple delay times. When setting a delay time obtained by multiplying the reference delay time t by a natural number (2t, 3t, etc.) as described above, the delay time after the natural number of times depends on what value is used as the reference delay time t. The delay time that can actually be used to calculate the time delay integration is determined. In the following, the velocity range of the foreign matter to be detected is a range between the known minimum velocity Vmin and the maximum velocity Vmax, and a plurality of delay time setting methods suitable for Vmin and Vmax will be examined. When the pitch of the detection element is D and the natural number is n, the corresponding speed is v = D / nt, which is proportional to the reciprocal of the natural number n. Further, the reciprocal of the natural number n has a particularly wide interval between when n = 1 (1/1) and when n = 2 (1/2). Therefore, as shown in FIG. 7A, a plurality of usable delay times can be set without waste by setting Vmax = D / t. On the other hand, in this case, the unused speed range is widened, and the number of available delay times is reduced. If the number of available delay times is small, the number of acquired TDI images showing foreign matter without image blurring will be small.
　そこで、図７Ｂに示すように、Ｖｍａｘ＝Ｄ／２ｔに設定することで、ＶｍｉｎとＶｍａｘとの範囲内により多くの遅延時間を比較的均一間隔で設定することができる。なお、図７Ｂに示す例では、基準遅延時間ｔのときのＴＤＩ画像（Ｄ／ｔの画像）は、ＶｍｉｎとＶｍａｘとの範囲外のため使用しない。 Therefore, as shown in FIG. 7B, by setting Vmax = D / 2t, a larger delay time can be set within the range of Vmin and Vmax at relatively uniform intervals. In the example shown in FIG. 7B, the TDI image (D / t image) at the reference delay time t is not used because it is out of the range of Vmin and Vmax.
　Ｘ線検査装置１による遅延時間設定動作について説明する。遅延時間設定動作は、複数の遅延時間の設定に用いる基準遅延時間を決定する動作である。 The delay time setting operation by the X-ray inspection device 1 will be described. The delay time setting operation is an operation of determining a reference delay time used for setting a plurality of delay times.
　図８において、制御回路３６は、ステップＳ１１で速度範囲を設定する。ここでは、制御回路３６は、既知の最小速度Ｖｍｉｎおよび最大速度Ｖｍａｘに基づいて速度範囲を指定する。最小速度Ｖｍｉｎおよび最大速度Ｖｍａｘは、ユーザがタッチパネル３５から入力した値または制御回路３６が推定した値が用いられる。制御回路３６は、拡大率α、被検査物Ｗの高さ、平均流速、圧力損失等に基づいて、最小速度Ｖｍｉｎおよび最大速度Ｖｍａｘの推定値を演算することができる。制御回路３６は、最小速度、最大速度およびその推定の基となる値について、被検査物Ｗの種類ごとに予め記憶されている値を用いることで推定を実施してもよい。 In FIG. 8, the control circuit 36 sets the speed range in step S11. Here, the control circuit 36 specifies a speed range based on the known minimum speed Vmin and maximum speed Vmax. As the minimum speed Vmin and the maximum speed Vmax, a value input by the user from the touch panel 35 or a value estimated by the control circuit 36 is used. The control circuit 36 can calculate the estimated values of the minimum speed Vmin and the maximum speed Vmax based on the enlargement ratio α, the height of the object W to be inspected, the average flow velocity, the pressure loss, and the like. The control circuit 36 may perform estimation with respect to the minimum speed, the maximum speed, and the values on which the estimation is based by using the values stored in advance for each type of the object W to be inspected.
　次いで、制御回路３６は、ステップＳ１２で基準遅延時間を設定する。ここでは、制御回路３６は、所定の計算式により基準遅延時間を設定する。 Next, the control circuit 36 sets the reference delay time in step S12. Here, the control circuit 36 sets the reference delay time by a predetermined calculation formula.
　Ｘ線検査装置１による測定動作について説明する。測定動作は、複数の遅延時間を設定し、その遅延時間を用いて時間遅延積分を実行し、検出データから検査対象の複数のＴＤＩ画像を演算する動作である。 The measurement operation by the X-ray inspection device 1 will be described. The measurement operation is an operation in which a plurality of delay times are set, time delay integration is executed using the delay times, and a plurality of TDI images to be inspected are calculated from the detected data.
　図９において、制御回路３６は、ステップＳ２１で基準遅延時間ｔにより測定を行う。次いで、制御回路３６は、ステップＳ２２で基準遅延時間ｔを自然数倍した遅延時間２ｔ、３ｔ、・・・を生成し、これらの遅延時間にそれぞれ応じた複数のＴＤＩ画像を生成する。ステップＳ２２で作成されたＴＤＩ画像は異物の有無等の良否判定の対象として用いられ、判定結果がタッチパネル３５に表示される。ステップＳ２２で生成された複数のＴＤＩ画像は、使用した遅延時間に対応する位置の異物が鮮明に写された画像であり、複数のＴＤＩ画像ごとに鮮明度が異なっており、有利なＴＤＩ画像を用いて良否判定を行うことができる。また、遅延時間の数およびＴＤＩ画像の数は、装置構成による制約を受けないため、柔軟に変更することができる。 In FIG. 9, the control circuit 36 measures with the reference delay time t in step S21. Next, the control circuit 36 generates delay times 2t, 3t, ... By multiplying the reference delay time t by a natural number in step S22, and generates a plurality of TDI images corresponding to each of these delay times. The TDI image created in step S22 is used as a target for quality determination such as the presence or absence of foreign matter, and the determination result is displayed on the touch panel 35. The plurality of TDI images generated in step S22 are images in which foreign matter at a position corresponding to the delay time used is clearly captured, and the sharpness is different for each of the plurality of TDI images, so that an advantageous TDI image can be obtained. It can be used to make a pass / fail judgment. Further, since the number of delay times and the number of TDI images are not restricted by the device configuration, they can be flexibly changed.
　以上説明したように、本実施例では、物品検査装置としてのＸ線検査装置１は、移動する流体からなる被検査物Ｗに電磁波を照射するＸ線照射部１１と、被検査物Ｗの移動方向（Ｘ方向）に直交する主走査方向（Ｙ方向）と移動方向とに配列された複数の検出素子１５ａにより被検査物Ｗの影響を受けたＸ線を検出するＸ線ラインセンサ１５と、を備えている。そして、Ｘ線検査装置１は遅延時間設定部およびＴＤＩ画像生成部としての制御回路３６を備えている。制御回路３６は、所定の基準遅延時間ｔに基づいて複数の遅延時間を設定し、Ｘ線ラインセンサ１５が検出した検出データを複数の遅延時間を用いて加算する時間遅延積分処理を実施し、複数の遅延時間に応じた複数のＴＤＩ画像を生成する。 As described above, in the present embodiment, the X-ray inspection device 1 as the article inspection device moves the X-ray irradiation unit 11 that irradiates the inspected object W made of moving fluid with electromagnetic waves and the inspected object W. An X-ray line sensor 15 that detects X-rays affected by the object W to be inspected by a plurality of detection elements 15a arranged in the main scanning direction (Y direction) and the moving direction orthogonal to the direction (X direction). It has. The X-ray inspection device 1 includes a delay time setting unit and a control circuit 36 as a TDI image generation unit. The control circuit 36 sets a plurality of delay times based on a predetermined reference delay time t, and performs a time delay integration process of adding the detection data detected by the X-ray line sensor 15 using the plurality of delay times. Generate a plurality of TDI images according to a plurality of delay times.
　これにより、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。また、複数の遅延時間を用いた時間遅延積分により複数のＴＤＩ画像を取得しており、Ｘ線出力画像をプリズム等により光学的に分割する必要がないため、時間遅延積分の演算に用いる遅延時間の値や数が制約されることを抑制できる。この結果、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる。 As a result, TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
　また、本実施例において、遅延時間設定部としての制御回路３６は、所定の基準遅延時間ｔを自然数倍（ｎ倍）することにより複数の遅延時間を設定している。 Further, in the present embodiment, the control circuit 36 as the delay time setting unit sets a plurality of delay times by multiplying the predetermined reference delay time t by a natural number (n times).
　これにより、基準遅延時間から複数の遅延時間を算出する演算をデジタルデータ上で容易に行うことができる。 As a result, the calculation of calculating a plurality of delay times from the reference delay time can be easily performed on the digital data.
　また、本実施例では、Ｘ線検査装置１は、移動する流体からなる被検査物Ｗに電磁波を照射する照射ステップと、被検査物Ｗの移動方向に直交する主走査方向と移動方向とに配列された複数の検出素子により被検査物Ｗの影響を受けた電磁波を検出する検出ステップと、を実施する。そして、Ｘ線検査装置１は、制御回路３６によって、所定の基準遅延時間に基づいて複数の遅延時間を設定する遅延時間設定ステップと、検出ステップで検出した検出データを複数の遅延時間を用いて加算する時間遅延積分処理を実施し、複数の遅延時間に応じた複数のＴＤＩ画像を生成するＴＤＩ画像生成ステップと、を実施する。 Further, in the present embodiment, the X-ray inspection apparatus 1 has an irradiation step of irradiating an object W made of a moving fluid with an electromagnetic wave, and a main scanning direction and a moving direction orthogonal to the moving direction of the object W to be inspected. A detection step of detecting an electromagnetic wave affected by the object W to be inspected by a plurality of arranged detection elements is performed. Then, the X-ray inspection device 1 uses the delay time setting step of setting a plurality of delay times based on a predetermined reference delay time by the control circuit 36, and the detection data detected in the detection step using the plurality of delay times. A time delay integration process for adding is performed, and a TDI image generation step of generating a plurality of TDI images corresponding to a plurality of delay times is performed.
　これにより、被検査物Ｗの高さ方向の複数の位置に対応するＴＤＩ画像を、Ｘ線の拡大による影響を回避して異物が鮮明に映った状態で取得できるので、検査精度を向上させることができる。また、複数の遅延時間を用いた時間遅延積分により複数のＴＤＩ画像を取得しており、Ｘ線出力画像をプリズム等により光学的に分割する必要がないため、時間遅延積分の演算に用いる遅延時間の値や数が制約されることを抑制できる。この結果、時間遅延積分の演算に用いる遅延時間が制約されることを抑制でき、検査精度を向上させることができる。 As a result, TDI images corresponding to a plurality of positions in the height direction of the object W to be inspected can be acquired in a state where foreign matter is clearly reflected while avoiding the influence of X-ray enlargement, so that the inspection accuracy can be improved. Can be done. Further, since a plurality of TDI images are acquired by time delay integration using a plurality of delay times and it is not necessary to optically divide the X-ray output image by a prism or the like, the delay time used for the calculation of the time delay integration is performed. It is possible to suppress the restriction of the value and number of. As a result, it is possible to suppress the limitation of the delay time used in the calculation of the time delay integral, and it is possible to improve the inspection accuracy.
　以上、最良の形態について説明したが、この形態による記述及び図面により本発明が限定されることはない。すなわち、この形態に基づいて当業者等によりなされる他の形態、実施例及び運用技術などはすべて本発明の範疇に含まれることは勿論である。 Although the best form has been described above, the present invention is not limited by the description and drawings in this form. That is, it goes without saying that all other forms, examples, operational techniques, and the like made by those skilled in the art based on this form are included in the scope of the present invention.
１　Ｘ線検査装置（物品検査装置）
５　配管
１１　Ｘ線照射部（照射部）
１５　Ｘ線ラインセンサ（検出部）
１５ａ　検出素子
３６　制御回路（遅延時間設定部、ＴＤＩ画像生成部）
Ｗ　被検査物
  1 X-ray inspection equipment (article inspection equipment)
5 Piping 11 X-ray irradiation part (irradiation part)
15 X-ray line sensor (detector)
15a Detection element 36 Control circuit (delay time setting unit, TDI image generation unit)
W Inspected object

Claims (7)

  1. 　被検査物の検査に時間遅延積分処理を用いる物品検査装置であって、
    　移動する被検査物に電磁波を照射する照射部と、
    　前記被検査物の移動方向に直交する主走査方向と前記移動方向とに配列された複数の検出素子により前記被検査物の影響を受けた前記電磁波を検出する検出部と、
    　所定の基準遅延時間に基づいて複数の遅延時間を設定する遅延時間設定部と、
    　前記検出部が検出した検出データを複数の前記遅延時間を用いて加算する時間遅延積分処理を実施し、複数の前記遅延時間に応じた複数のＴＤＩ画像を生成するＴＤＩ画像生成部と、を備えることを特徴とする物品検査装置。     An article inspection device that uses time-delayed integration processing to inspect the object to be inspected.
    An irradiation part that irradiates a moving object to be inspected with electromagnetic waves,
    A detection unit that detects the electromagnetic wave affected by the inspected object by a plurality of detection elements arranged in the main scanning direction orthogonal to the moving direction of the inspected object and the moving direction.
    A delay time setting unit that sets multiple delay times based on a predetermined reference delay time,
    A TDI image generation unit is provided, which performs a time delay integration process of adding the detection data detected by the detection unit using a plurality of the delay times, and generates a plurality of TDI images according to the plurality of delay times. An article inspection device characterized by the fact that.
  2. 　前記照射部は、移動する前記被検査物に放射状に広がる電磁波を照射することを特徴とする請求項１に記載の物品検査装置。 The article inspection device according to claim 1, wherein the irradiation unit irradiates the moving object to be inspected with electromagnetic waves that spread radially.
  3. 　前記照射部は、移動する流体からなる前記被検査物に電磁波を照射することを特徴とする請求項１または請求項２に記載の物品検査装置。 The article inspection device according to claim 1 or 2, wherein the irradiation unit irradiates the object to be inspected, which is made of a moving fluid, with an electromagnetic wave.
  4. 　前記遅延時間設定部は、所定の基準遅延時間を自然数倍することにより複数の前記遅延時間を設定することを特徴とする請求項１～３のいずれか一項に記載の物品検査装置。 The article inspection device according to any one of claims 1 to 3, wherein the delay time setting unit sets a plurality of the delay times by multiplying a predetermined reference delay time by a natural number.
  5. 　被検査物の検査に時間遅延積分処理を用いる物品検査方法であって、
    　移動する被検査物に電磁波を照射する照射ステップと、
    前記被検査物の移動方向に直交する主走査方向と前記移動方向とに配列された複数の検出素子により前記被検査物の影響を受けた前記電磁波を検出する検出ステップと、
    　所定の基準遅延時間に基づいて複数の遅延時間を設定する遅延時間設定ステップと、
    　前記検出ステップで検出した検出データを複数の前記遅延時間を用いて加算する時間遅延積分処理を実施し、複数の前記遅延時間に応じた複数のＴＤＩ画像を生成するＴＤＩ画像生成ステップと、を備えることを特徴とする物品検査方法。     This is an article inspection method that uses time delay integration processing to inspect the object to be inspected.
    An irradiation step that irradiates a moving object to be inspected with electromagnetic waves,
    A detection step of detecting the electromagnetic wave affected by the inspected object by a plurality of detection elements arranged in the main scanning direction orthogonal to the moving direction of the inspected object and the moving direction.
    A delay time setting step that sets multiple delay times based on a predetermined reference delay time, and
    It includes a TDI image generation step of performing a time delay integration process of adding the detection data detected in the detection step using a plurality of the delay times and generating a plurality of TDI images according to the plurality of the delay times. An article inspection method characterized by the fact that.
  6. 　前記照射ステップにおいて、移動する前記被検査物に放射状に広がる電磁波を照射することを特徴とする請求項５に記載の物品検査方法。 The article inspection method according to claim 5, wherein in the irradiation step, the moving object to be inspected is irradiated with electromagnetic waves that spread radially.
  7. 　前記照射ステップにおいて、移動する流体からなる前記被検査物に電磁波を照射することを特徴とする請求項５または請求項６に記載の物品検査方法。
          The article inspection method according to claim 5 or 6, wherein in the irradiation step, the object to be inspected composed of a moving fluid is irradiated with an electromagnetic wave.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627249A (en) * 1992-07-13 1994-02-04 Toshiba Corp Radiation detector
JP2006170713A (en) * 2004-12-14 2006-06-29 Anritsu Sanki System Co Ltd X-rays foreign matter detecting apparatus
JP2015190940A (en) * 2014-03-28 2015-11-02 アンリツ産機システム株式会社 X-ray inspection apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627249A (en) * 1992-07-13 1994-02-04 Toshiba Corp Radiation detector
JP2006170713A (en) * 2004-12-14 2006-06-29 Anritsu Sanki System Co Ltd X-rays foreign matter detecting apparatus
JP2015190940A (en) * 2014-03-28 2015-11-02 アンリツ産機システム株式会社 X-ray inspection apparatus

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