WO2021189208A1 - Transducteur ultrasonore, système de balayage ultrasonore, et procédé de traitement - Google Patents

Transducteur ultrasonore, système de balayage ultrasonore, et procédé de traitement Download PDF

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Publication number
WO2021189208A1
WO2021189208A1 PCT/CN2020/080739 CN2020080739W WO2021189208A1 WO 2021189208 A1 WO2021189208 A1 WO 2021189208A1 CN 2020080739 W CN2020080739 W CN 2020080739W WO 2021189208 A1 WO2021189208 A1 WO 2021189208A1
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WIPO (PCT)
Prior art keywords
ultrasonic transducer
electrode
ultrasonic
piezoelectric material
different
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PCT/CN2020/080739
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English (en)
Chinese (zh)
Inventor
王红超
沈健
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深圳市汇顶科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 深圳市汇顶科技股份有限公司 filed Critical 深圳市汇顶科技股份有限公司
Priority to CN202080001555.1A priority Critical patent/CN113710379B/zh
Priority to PCT/CN2020/080739 priority patent/WO2021189208A1/fr
Publication of WO2021189208A1 publication Critical patent/WO2021189208A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/10—Image acquisition

Definitions

  • the embodiments of the present application relate to the field of ultrasonic technology, and in particular, to an ultrasonic transducer, an ultrasonic scanning system, and a processing method.
  • ultrasound can be used for detection, for example, using ultrasound to identify fingerprints, using ultrasound to detect distance, using ultrasound to detect the internal tissue of a living body, and so on.
  • various ultrasound products generally set a certain frequency of ultrasound to detect the target object, and the detection range is related to the set frequency, that is, at a certain frequency, only a certain depth range can be detected. Information, therefore, the current ultrasonic testing application range is small, and the adaptability is poor.
  • one of the technical problems solved by the embodiments of the present application is to provide an ultrasonic transducer, an ultrasonic scanning system, and a processing method to overcome the shortcomings of small application range and poor adaptability of ultrasonic testing.
  • an ultrasonic transducer including: a first electrode, a second electrode, and a piezoelectric material;
  • the first electrode, the second electrode and the piezoelectric material form at least one ultrasonic transducer module, and the ultrasonic transducer module includes at least two ultrasonic transducer units;
  • the piezoelectric material is arranged between the first electrode and the second electrode, and the first electrode and the second electrode are used to input or output electrical signals;
  • ultrasonic transducer module there are at least two ultrasonic transducer units with different piezoelectric material thicknesses.
  • the ultrasonic transducer further includes a substrate material
  • the substrate material is arranged under the second electrode, and the upper surface of the substrate material is attached to the lower surface of the piezoelectric material.
  • the upper surface of the substrate material is provided with a groove for accommodating the second electrode.
  • the number of first electrodes is at least one, and one ultrasonic transducer unit includes one first electrode; or one ultrasonic transducer module includes one first electrode.
  • the number of piezoelectric materials is at least one, and one ultrasonic transducer unit includes one piezoelectric material; or one ultrasonic transducer module includes one piezoelectric material.
  • the lower surface of the piezoelectric material is provided with a stepped surface corresponding to the second electrode, and there are at least two stepped surfaces having different distances from the upper surface of the piezoelectric material.
  • the number of ultrasonic transducer modules is at least two, and in the at least two ultrasonic transducer modules, the thickness of the piezoelectric material of the ultrasonic transducer unit corresponding to the position is the same.
  • the lower surface of the first electrode is attached to the upper surface of the piezoelectric material
  • the upper surface of the second electrode is attached to the lower surface of the piezoelectric material
  • the ultrasonic transducer further includes an adhesion layer
  • the adhesion layer is arranged between the first electrode and the piezoelectric material, and adheres the first electrode to the upper surface of the piezoelectric material.
  • an embodiment of the present application provides an ultrasonic scanning system, including an ultrasonic transmitter, an ultrasonic receiver, and a processor;
  • the ultrasonic transmitter is connected to the processor and is used to transmit ultrasonic signals of at least two frequencies;
  • the ultrasonic receiver includes the ultrasonic transducer as described in the first aspect or any one of the embodiments of the first aspect, and the ultrasonic receiver is connected to the processor;
  • the processor is used to receive the electrical signal transmitted by the ultrasonic receiver, and process the electrical signal to generate an image signal.
  • the ultrasonic transmitter and the ultrasonic receiver share an ultrasonic transducer.
  • an embodiment of the present application provides a processing method of an ultrasonic transducer, including:
  • the first electrode, the second electrode and the piezoelectric material form at least one ultrasonic transducer module.
  • the ultrasonic transducer module includes at least two ultrasonic transducer units. In the same ultrasonic transducer module, there are at least two ultrasonic transducers. The thickness of the piezoelectric material of the energy unit is not the same.
  • forming the first electrode on the upper surface of the piezoelectric material includes:
  • the first electrode is made on the upper surface of the piezoelectric material through a manufacturing process of coating, evaporation or sputtering.
  • forming a piezoelectric material on the upper surface of the substrate material includes:
  • the piezoelectric material is formed on the upper surface of the substrate material through a manufacturing process of spin coating, blade coating or vapor deposition.
  • ultrasonic transducer ultrasonic scanning system and processing method of the embodiments of the present application, since the thickness of piezoelectric material of different ultrasonic transducer units is different in the ultrasonic transducer module of the ultrasonic transducer, different ultrasonic transducer units can receive Ultrasonic waves of different frequencies have different penetrating capabilities and can detect information at different depths, making ultrasonic detection applications wider and more adaptable.
  • Figure 1 is a cross-sectional view of a first ultrasonic transducer provided by an embodiment of the application
  • Figure 2 is a cross-sectional view of a second ultrasonic transducer provided by an embodiment of the application
  • Figure 3 is a cross-sectional view of a third ultrasonic transducer provided by an embodiment of the application.
  • Figure 4 is a cross-sectional view of a fourth ultrasonic transducer provided by an embodiment of the application.
  • Figure 5 is a cross-sectional view of a fifth ultrasonic transducer provided by an embodiment of the application.
  • Figure 6 is a cross-sectional view of a sixth ultrasonic transducer provided by an embodiment of the application.
  • FIG. 7 is a schematic diagram of a planar distribution of ultrasonic transducer units in an ultrasonic transducer provided by an embodiment of the application;
  • FIG. 8 is a schematic structural diagram of an ultrasonic scanning system provided by an embodiment of the application.
  • FIG. 9 is an ultrasonic spectrum curve provided by an embodiment of this application.
  • FIG. 10 is another ultrasonic spectrum curve provided by an embodiment of this application.
  • FIG. 11 is a schematic diagram of a continuous ultrasonic pulse provided by an embodiment of the application.
  • FIG. 12 is a flowchart of a processing method of an ultrasonic transducer provided by an embodiment of the application.
  • Fig. 1 is a cross-sectional view of the first ultrasonic transducer provided in the first embodiment of the application; as shown in Fig. 1, the first embodiment of the present application provides an ultrasonic transducer 1, including: a first electrode 1011, a second Electrode 1012 and piezoelectric material 1013;
  • the first electrode 1011, the second electrode 1012, and the piezoelectric material 1013 form at least one ultrasonic transducer module 10, and the ultrasonic transducer module 10 includes at least two ultrasonic transducer units 101;
  • the piezoelectric material 1013 is disposed between the first electrode 1011 and the second electrode 1012, and the first electrode 1011 and the second electrode 1012 are used to input or output electrical signals;
  • ultrasonic transducer module 10 there are at least two ultrasonic transducer units 101 whose piezoelectric materials 1013 have different thicknesses.
  • the first electrode 1011 and the second electrode 1012 may be made of materials such as aluminum, silver, copper, or platinum, which are not limited in this application.
  • the number of the first electrode 1011, the second electrode 1012, and the piezoelectric material 1013 may be one or more.
  • the number of the first electrode 1011 is at least one, and one ultrasonic transducer
  • the unit 101 includes a first electrode 1011; or an ultrasonic transducer module 10 includes a first electrode 1011.
  • the number of piezoelectric materials 1013 is at least one, and one ultrasonic transducer unit 101 includes one piezoelectric material 1013; or one ultrasonic transducer module 10 includes one piezoelectric material 1013. .
  • each ultrasonic transducer unit 101 may include an independent first electrode 1011, a second electrode 1012, and a piezoelectric material 1013, that is, each ultrasonic transducer unit 101 includes a first electrode 1011, a second electrode 1012, and A piezoelectric material 1013, that is, an ultrasonic transducer module 10 includes a plurality of first electrodes 1011, a plurality of second electrodes 1012, and a plurality of piezoelectric materials 1013; for another example, in the same ultrasonic transducer module, at least two Two ultrasonic transducer units can share the same first electrode 1011, that is, one ultrasonic transducer module 10 includes one first electrode 1011, and at least two ultrasonic transducer units can share the same piezoelectric material 1013; for another example, at least One ultrasonic transducer module 10 can share the same first electrode 1011, that is, one ultrasonic transducer 1 includes one first electrode 1011, and at least one ultrasonic transducer module
  • the ultrasonic transducer units in one ultrasonic transducer module share one first electrode 1011 as an example for illustration, which does not mean that the application is limited to this.
  • the ultrasonic transducer unit 101 is described.
  • the area with the same detection frequency (the area with the same piezoelectric material thickness) in the ultrasonic transducer module 10 is defined as one ultrasonic transducer unit 101, At this time, the ultrasonic frequencies detected by different ultrasonic transducer units 101 are not the same; in another implementation manner, according to the manufacturing process or preset division rules, different regions in the ultrasonic transducer module 10 are divided into different.
  • the ultrasonic transducer unit 101 at this time, the ultrasonic frequency detected by different ultrasonic transducer units 101 may be the same or different, but in the same ultrasonic transducer module 10, there are at least two ultrasonic transducer units 10 detecting The frequency of ultrasound is not the same.
  • the ultrasonic transducer unit 10 is only exemplified here, and no matter how it is divided, it belongs to the different implementation manners of the embodiments of the present application.
  • the first electrode 1011 can be ground, and a voltage difference can be generated between the first electrode 1011 and the second electrode 1012 to input or output electrical signals.
  • the piezoelectric material 1013 converts the energy of ultrasonic waves propagating to the surface into electrical signals through piezoelectric effect.
  • the frequency of ultrasonic waves is the same as that of electrical signals.
  • the amplitude of piezoelectric material 1013 reaches its maximum near the resonance frequency, and the conversion efficiency of ultrasonic waves to electrical energy is the highest. Therefore, the frequency at which the ultrasonic waves are received is the resonance frequency.
  • piezoelectric materials 1013 of different thicknesses By arranging piezoelectric materials 1013 of different thicknesses in different ultrasonic transducer units 101, selective reception of ultrasonic waves of different frequencies is achieved. For example, taking receiving ultrasonic waves as an example, when the ultrasonic transducer unit 101 detects ultrasonic waves, the piezoelectric material 1013 vibrates under the action of the ultrasonic waves and generates electrical signals based on the piezoelectric effect, which are output through the first electrode 1011 and the second electrode 1012 The electrical signal; For another example, taking the emission of ultrasonic waves as an example, the second electrode 1012 inputs an electrical signal, and the first electrode 1011 is ground, so the driving voltage is applied to both sides of the piezoelectric material 1013 through the second electrode 1012 and the first electrode 1011, And vibration occurs based on the piezoelectric effect, thereby emitting ultrasonic waves.
  • this is only an exemplary description, which does not mean that the application is limited to this.
  • An ultrasonic transducer module 10 may include at least two ultrasonic transducer units 101, for example, an ultrasonic transducer module 10 may include two or three ultrasonic transducer units 101, and the thickness of the piezoelectric material of each ultrasonic transducer unit 101
  • one ultrasonic transducer module 10 may include 4 ultrasonic transducer units 101, and the piezoelectric material thickness of each ultrasonic transducer unit 101 is different, or, among the 4 ultrasonic transducer units 101, there are The thickness of the piezoelectric material of the two ultrasonic transducer units is the first thickness, and the thickness of the piezoelectric material of the other two ultrasonic transducer units is the second thickness.
  • One ultrasonic transducer module 10 may also include more ultrasonic transducer units 101.
  • one ultrasonic transducer module 10 includes three ultrasonic transducer units 101 as an example. , Does not mean that this application is limited to this.
  • an ultrasonic transducer module 10 includes three ultrasonic transducer units as an example. The three ultrasonic transducer units included are the first ultrasonic transducer unit 111, the second ultrasonic transducer unit 121, and the third ultrasonic transducer unit.
  • the frequency at which the first ultrasonic transducer unit 111 receives ultrasonic waves is f 1
  • the frequency at which the second ultrasonic transducer unit 121 receives ultrasonic waves is f 2
  • the third ultrasonic The frequency at which the transducer unit 111 receives ultrasonic waves is f 3.
  • the ultrasonic detection depth is inversely proportional to the frequency.
  • the higher the ultrasonic frequency the faster the attenuation in the medium, the weaker the penetration ability, and the lower the detection depth (or the shallower the detection area), and the lower the ultrasonic frequency, the penetration The stronger the capability, the deeper the detection depth.
  • the thickness of the piezoelectric material 1013 of different ultrasonic transducer units 101 is different, so that different ultrasonic transducer units 101 can receive ultrasonic waves of different frequencies, and can detect information of different depths, which is more adaptable. Strong, more versatile.
  • Fig. 2 is a cross-sectional view of the second ultrasonic transducer provided in the first embodiment of the application, as shown in Fig. 2.
  • the ultrasonic transducer 1 further includes a substrate material 1014; the substrate material 1014 is disposed under the second electrode 1012.
  • the substrate material plays a supporting role and can increase the stability of the structure.
  • the upper surface of the substrate material 1014 is provided with a groove for accommodating the second electrode 1012, and the upper surface of the groove edge of the substrate material 1014 and the pressure The lower surface of the electrical material 1013 is attached.
  • FIG. 3 is a cross-sectional view of a third ultrasonic transducer provided in Embodiment 1 of the present application.
  • the upper surface of the substrate material 1014 and The bottom surface of the second electrode 1012 is attached.
  • FIG. 2 and FIG. 3 are only exemplary descriptions, and do not mean that the application is limited thereto.
  • the second electrode 1012 is fixed between the substrate material 1014 and the piezoelectric material 1013.
  • the substrate material 1014 may be silicon, glass or other materials.
  • the piezoelectric material 1013 can be an inorganic material, such as PZT (lead zirconate titanate piezoelectric ceramic), ZnO (zinc oxide) and other materials, or a polymer piezoelectric material 1013, such as PVDF (English: Polyvinylidene Fluoride) Vinylidene fluoride), PVDF-TrFE (copolymer of vinylidene fluoride and trifluoroethylene), etc.
  • Fig. 4 is a cross-sectional view of the fourth ultrasonic transducer provided in the first embodiment of the application.
  • the energy module 10 includes a first electrode 1011, that is, in the same ultrasonic transducer module 10, the first electrodes 1011 of at least two ultrasonic transducer units 101 are integrally formed as a common electrode.
  • one ultrasonic transducer module 10 includes one piezoelectric material 1013, that is, in the same ultrasonic transducer module 10, the piezoelectric materials 1013 of at least two ultrasonic transducer units 101 are integrally formed, as shown in FIG. 4 As shown, taking an ultrasonic transducer module 10 in FIG. 4 as an example, the three ultrasonic transducer units included are the first ultrasonic transducer unit 111, the second ultrasonic transducer unit 121, and the third ultrasonic transducer unit 131, respectively.
  • the part of the electrical material 1013 in the first ultrasonic transducer unit 111 is the first piezoelectric material 1113
  • the part of the piezoelectric material 1013 in the second ultrasonic transducer unit 121 is the second piezoelectric material 1213
  • the piezoelectric material 1013 is in the third
  • the part of the ultrasonic transducer unit 131 is the third piezoelectric material 1313.
  • the first piezoelectric material 1113, the second piezoelectric material 1213, and the third piezoelectric material 1313 are three parts of the piezoelectric material 1013 as a whole, but each The thickness of the ultrasonic transducer is different, which makes the first ultrasonic transducer unit 111, the second ultrasonic transducer unit 121, and the third ultrasonic transducer unit 131 detect ultrasonic waves at different frequencies.
  • the ultrasonic transducer module 10 can detect ultrasonic waves of different frequencies.
  • the lower surface of the piezoelectric material 1013 is provided with a stepped surface corresponding to the second electrode 1012, and there are at least two stepped surfaces relative to the upper surface of the piezoelectric material 1013.
  • the distance is different.
  • the distance between each step surface of the piezoelectric material 1013 and the upper surface of the piezoelectric material 1013 is different, and one step surface corresponds to one ultrasonic transducer unit 101 In this way, the thickness of the piezoelectric material of different ultrasonic transducer units is different.
  • FIG. 5 is a cross-sectional view of the fifth ultrasonic transducer provided in Embodiment 1 of the application.
  • one ultrasonic transducer 1 includes one first electrode 1011 That is, in at least one ultrasonic transducer module 10, the first electrodes 1011 of all the ultrasonic transducer modules 10 are integrally formed as a common electrode.
  • one ultrasonic transducer 1 includes a piezoelectric material 1013.
  • all the piezoelectric materials 1013 of the ultrasonic transducer module 10 are integrally formed; the lower surface of the piezoelectric material 1013 is provided There is a stepped surface corresponding to the second electrode 1012, and the distance between every two stepped surfaces of an ultrasonic transducer module 10 relative to the upper surface of the piezoelectric material 1013 is different.
  • the ultrasonic transducer 1 includes a common first electrode 1011 and a piezoelectric material 1013, that is, all ultrasonic transducer modules 10 share a first electrode 1011 and share a piezoelectric material 1013, or in other words, ultrasonic
  • the first electrodes 1011 of all the ultrasonic transducer units in the transducer 1 are connected to form a common electrode, and the piezoelectric material 1013 is connected to form a whole, which increases the stability of the ultrasonic transducer module 10. It can also be understood that the piezoelectric material 1013 is processed into stepped surfaces of different heights.
  • the thickness of the piezoelectric material 1013 in each ultrasonic transducer unit is different, so that the pressure of different ultrasonic transducer units is different.
  • the thickness of electrical materials is different, so ultrasonic waves of different frequencies can be detected. This has been illustrated in Figure 4, and will not be repeated here.
  • each ultrasonic transducer unit 101 may also correspond to a first electrode 1011, a piezoelectric material 1013, and a second electrode 1012. This application does not impose restrictions on this.
  • the lower surface of the first electrode 1011 is attached to the upper surface of the piezoelectric material 1013
  • the upper surface of the second electrode 1012 is attached to the lower surface of the piezoelectric material 1013.
  • FIG. 6 is a cross-sectional view of the sixth ultrasonic transducer provided in the first embodiment of the application, and the ultrasonic transducer 1 further includes an adhesion layer 1015
  • the adhesion layer 1015 is disposed between the first electrode 1011 and the piezoelectric material 1013, and the first electrode 1011 is adhered to the upper surface of the piezoelectric material 1013.
  • an adhesion layer 1015 can also be provided between the upper surface of the second electrode 1012 and the lower surface of the piezoelectric material 1013, and the lower surface of the second electrode 1012 and the upper surface of the substrate material 1014 can also be provided with an adhesion layer.
  • the adhesion layer 1015 mainly plays a role of adhesion.
  • FIG. 6 is only an exemplary illustration, and does not mean that the application is limited to this.
  • ultrasonic transducer of the embodiment of the present application since the thickness of piezoelectric material of different ultrasonic transducer units is different in the ultrasonic transducer module of the ultrasonic transducer, different ultrasonic transducer units can receive ultrasonic waves of different frequencies. Ultrasonic waves have different penetrating capabilities and can detect information at different depths, making ultrasonic detection applications wider and more adaptable.
  • one ultrasound transducer module 10 may correspond to one image pixel, and each pixel corresponds to at least two ultrasound transducer units 101 , That is, each pixel can correspond to multiple frequencies of ultrasonic signals.
  • Fig. 7 is a schematic diagram of the distribution of ultrasonic transducer units provided in the second embodiment of the application; Fig. 7 is to illustrate the distribution of ultrasonic transducer units 101.
  • the first electrode 1011, the second electrode 1012, and the The specific structure of the piezoelectric material 1013 can refer to the description in the first embodiment.
  • the ultrasonic transducer unit in an ultrasonic transducer module shares a first electrode 1011, and the piezoelectric material 1013 of each ultrasonic transducer unit can be one As a whole, I won't repeat it here.
  • an ultrasonic transducer 1 is composed of an array of ultrasonic transducer modules 10.
  • the number of ultrasonic transducer modules 10 is 4 ⁇ 4, and each ultrasonic transducer module 10 corresponds to one pixel.
  • the energy module 10 includes an array of ultrasonic transducer units 101.
  • the number of ultrasonic transducer units 101 in each ultrasonic transducer module 10 is 2 ⁇ 2, that is, each pixel corresponds to 4 kinds of ultrasonic signals with different frequencies.
  • the ultrasonic signal can form a single frequency image.
  • one ultrasonic transducer module 10 may also include two or three ultrasonic transducer units 101, or a larger number of ultrasonic transducer units 101, which is not limited in this application.
  • the ultrasonic transducer units corresponding to piezoelectric materials of different thicknesses can receive ultrasonic signals of different frequencies, that is, areas of different depths can be detected, so as to obtain multiple images of different depths (that is, images of multiple frequencies).
  • Image images with multiple frequencies can be combined to form a 3D image.
  • the detected information is more comprehensive, which can improve the recognition accuracy and efficiency; of course, it can also be separated
  • the recognition accuracy is higher after the images of multiple frequencies are used for recognition.
  • the number of ultrasonic transducer modules 10 is at least two, and in at least two ultrasonic transducer modules 10, the thickness of the piezoelectric material 1013 of the ultrasonic transducer unit 101 corresponding to the position is the same.
  • the number of ultrasonic transducer units 101 included in each ultrasonic transducer module 10 is the same. As shown in FIG. 7, each ultrasonic transducer module 10 has the same structure. Taking one ultrasonic transducer module 10 as an example, it includes a first ultrasonic transducer unit 111, a second ultrasonic transducer unit 121, and a third ultrasonic transducer module.
  • the first ultrasonic transducer unit 111 in the upper left corner receives ultrasonic waves at a frequency f 1
  • the second ultrasonic transducer unit 121 in the lower left corner receives ultrasonic waves at a frequency f 2
  • the frequency at which the third ultrasonic transducer unit 131 receives ultrasonic waves is f 3
  • the frequency at which the fourth ultrasonic transducer unit 141 in the lower right corner receives ultrasonic waves is f 4.
  • ultrasonic transducer units 101 There are a lot of ultrasonic transducer units 101, and (x, y) coordinates can be used to indicate the position of each ultrasonic transducer unit 101 in the ultrasonic transducer module 10, where x represents the row, and y represents the column. There may also be other corresponding ways, for example, the ultrasonic transducer unit 101 in x rows and y columns in the first ultrasonic transducer module 10 corresponds to the ultrasonic transducer unit 101 in y rows and x columns in the second ultrasonic transducer module 10. This application does not restrict this.
  • the third embodiment of the present application provides an ultrasonic scanning system.
  • the ultrasonic scanning system 80 includes an ultrasonic transmitter 801, an ultrasonic receiver 802, and a processor 803. ;
  • the ultrasonic transmitter 801 is connected to the processor 803, and is used to transmit ultrasonic signals of at least two frequencies;
  • the ultrasonic receiver 802 includes the ultrasonic transducer 1 as described in the first aspect or any one of the embodiments of the first aspect, and the ultrasonic receiver 802 is connected to the processor 803;
  • the processor 803 is configured to receive the electrical signal transmitted by the ultrasonic receiver 802, and process the electrical signal to generate an image signal.
  • the transmission frequency of the ultrasonic wave can be selected as a discrete transmission frequency.
  • Fig. 9 is an ultrasonic spectrum curve provided by the third embodiment of the application.
  • F 1 , F 2 ... F n respectively refer to ultrasonic signals with center frequencies at three different frequency points; the three frequency signals It is discrete, and the ultrasonic waves of several frequencies are independent of each other in the transmission pulse; for discrete signals, you can choose to transmit at the same time, or you can choose to transmit pulse signals in a time sequence.
  • continuous ultrasonic signals can also be selected.
  • Figure 10 is another ultrasonic spectrum curve provided in the third embodiment of this application, where Fs 1 , Fs 2 ... Fs n refers to continuous
  • the pulse contains the modulated signal of ultrasonic waves of multiple frequencies.
  • an ultrasonic pulse may contain ultrasonic signals with frequencies Fs 1 , Fs 2 ... and Fs n.
  • the ultrasonic transmitter 801 and the ultrasonic receiver 802 share the ultrasonic transducer 1.
  • the ultrasonic transmitter 801 and the ultrasonic receiver 802 are two independent devices.
  • the ultrasonic transmitter 801 is used to transmit ultrasonic signals of at least two frequencies; the ultrasonic signal passes through the medium to reach the object to be detected, and is reflected back after acting inside the object to be detected;
  • the ultrasonic receiver 802 is configured to receive the reflected ultrasonic signals of at least two frequencies, convert the ultrasonic signals into electrical signals and output them to the processor 803.
  • the processor 803 is used to process the electrical signal converted from the ultrasonic signal of each frequency to generate an image, one image corresponds to the ultrasonic signal of one frequency, and merges the images corresponding to the ultrasonic signals of multiple frequencies to obtain a final synthesis Image; or, respectively, based on the image corresponding to the ultrasonic signal of each frequency for identification.
  • an embodiment of the present application provides a processing method of an ultrasonic transducer, as shown in FIG. 12, which is a diagram of an ultrasonic transducer provided by an embodiment of the present application.
  • the flow chart of the processing method includes the following steps:
  • Step 1201 process stepped surfaces with different heights on the upper surface of the substrate material, and form a second electrode on the stepped surface.
  • Step 1202 forming a piezoelectric material on the upper surface of the substrate material or the upper surface of the second electrode.
  • forming the piezoelectric material on the upper surface of the substrate material includes: forming the piezoelectric material on the upper surface of the substrate material by a manufacturing process of spin coating, blade coating, or vapor deposition .
  • Step 1203 forming a first electrode on the upper surface of the piezoelectric material.
  • the first electrode, the second electrode and the piezoelectric material form at least one ultrasonic transducer module.
  • the ultrasonic transducer module includes at least two ultrasonic transducer units. In the same ultrasonic transducer module, there are at least two ultrasonic transducers. The thickness of the piezoelectric material of the energy unit is not the same.
  • forming the first electrode on the upper surface of the piezoelectric material includes: forming the first electrode on the upper surface of the piezoelectric material through a manufacturing process of coating, evaporation or sputtering. electrode.
  • the improvement of a technology can be clearly distinguished between hardware improvements (for example, improvements in circuit structures such as diodes, transistors, switches, etc.) or software improvements (improvements in method flow).
  • hardware improvements for example, improvements in circuit structures such as diodes, transistors, switches, etc.
  • software improvements improvements in method flow.
  • the improvement of many methods and processes of today can be regarded as a direct improvement of the hardware circuit structure.
  • Designers almost always get the corresponding hardware circuit structure by programming the improved method flow into the hardware circuit. Therefore, it cannot be said that the improvement of a method flow cannot be realized by the hardware entity module.
  • a programmable logic device for example, a Field Programmable Gate Array (Field Programmable Gate Array, FPGA)
  • PLD Programmable Logic Device
  • FPGA Field Programmable Gate Array
  • HDL Hardware Description Language
  • ABEL Advanced Boolean Expression Language
  • AHDL Altera Hardware Description Language
  • HDCal JHDL
  • Lava Lava
  • Lola MyHDL
  • PALASM RHDL
  • VHDL Very-High-Speed Integrated Circuit Hardware Description Language
  • Verilog Verilog
  • the controller can be implemented in any suitable manner.
  • the controller can take the form of, for example, a microprocessor or a processor and a computer-readable medium storing computer-readable program codes (such as software or firmware) executable by the (micro)processor. , Logic gates, switches, application specific integrated circuits (ASICs), programmable logic controllers and embedded microcontrollers. Examples of controllers include but are not limited to the following microcontrollers: ARC625D, Atmel AT91SAM, Microchip PIC18F26K20 and Silicon Labs C8051F320, the memory controller can also be implemented as part of the memory control logic.
  • controllers in addition to implementing the controller in a purely computer-readable program code manner, it is entirely possible to program the method steps to make the controller use logic gates, switches, application specific integrated circuits, programmable logic controllers, and embedded logic.
  • the same function can be realized in the form of a microcontroller or the like. Therefore, such a controller can be regarded as a hardware component, and the devices included in it for realizing various functions can also be regarded as a structure within the hardware component. Or even, the device for realizing various functions can be regarded as both a software module for realizing the method and a structure within a hardware component.

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Abstract

Transducteur ultrasonore, système de balayage ultrasonore, et procédé de traitement. Le transducteur ultrasonore (1) comprend : une première électrode (1011), une seconde électrode (1012), et un matériau piézoélectrique (1013). La première électrode (1011), la seconde électrode (1012), et le matériau piézoélectrique (1013) forment au moins un module de transducteur ultrasonore (10) ; le module de transducteur ultrasonore (10) comprend au moins deux unités de transducteur ultrasonore (101) ; le matériau piézoélectrique (1013) est disposé entre la première électrode (1011) et la seconde électrode (1012) ; la première électrode (1011) et la seconde électrode (1012) sont utilisées pour entrer ou émettre un signal électrique ; dans le même module de transducteur ultrasonore (10), les épaisseurs des matériaux piézoélectriques (1013) de chaque paire d'unités de transducteur ultrasonore (101) sont différentes. Du fait que les épaisseurs des matériaux piézoélectriques (1013) des différentes unités de transducteur ultrasonore (101) sont différentes, des ondes ultrasonores présentant des fréquences différentes peuvent être reçues, des informations de profondeurs différentes peuvent être détectées, la plage d'application des tests ultrasonores s'élargit, et l'adaptation devient plus forte.
PCT/CN2020/080739 2020-03-23 2020-03-23 Transducteur ultrasonore, système de balayage ultrasonore, et procédé de traitement WO2021189208A1 (fr)

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