WO2021178438A1 - Integrated sensor for multi-dimensional signal analysis - Google Patents

Integrated sensor for multi-dimensional signal analysis Download PDF

Info

Publication number
WO2021178438A1
WO2021178438A1 PCT/US2021/020521 US2021020521W WO2021178438A1 WO 2021178438 A1 WO2021178438 A1 WO 2021178438A1 US 2021020521 W US2021020521 W US 2021020521W WO 2021178438 A1 WO2021178438 A1 WO 2021178438A1
Authority
WO
WIPO (PCT)
Prior art keywords
information
integrated circuit
sample
wavelength
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2021/020521
Other languages
English (en)
French (fr)
Inventor
Gerard Schmid
Dajiang Yang
Eric A.G. Webster
Xin Wang
Todd Rearick
Changhoon Choi
Ali KABIRI
Kyle Preston
Brian Reed
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Quantum Si Inc
Original Assignee
Quantum Si Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quantum Si Inc filed Critical Quantum Si Inc
Priority to KR1020227034235A priority Critical patent/KR20220148273A/ko
Priority to EP21717265.9A priority patent/EP4111178A1/en
Priority to JP2022552603A priority patent/JP2023515682A/ja
Publication of WO2021178438A1 publication Critical patent/WO2021178438A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6408Fluorescence; Phosphorescence with measurement of decay time, time resolved fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • G01N21/6454Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/648Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6428Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N2021/6439Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks
    • G01N2021/6441Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" with indicators, stains, dyes, tags, labels, marks with two or more labels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N2021/6463Optics
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N2021/6463Optics
    • G01N2021/6471Special filters, filter wheel

Definitions

  • Some aspects of the disclosure relate to an integrated circuit, comprising: at least one photodetection region configured to generate charge carriers responsive to incident photons emitted from a sample; at least one charge storage region configured to receive the charge carriers from the photodetection region; and at least one component configured to obtain information about the incident photons, the information comprising at least four members selected from s group comprising wavelength information, luminescence lifetime information, intensity information, pulse duration information, and interpulse duration information.
  • Some aspects of the disclosure relate to a method, comprising: exciting a sample with excitation light; determining interpulse duration characteristics of light emitted by the sample in response to the excitation light; and determining at least one member selected from a group comprising wavelength, intensity, lifetime, and pulse duration characteristics of the light emitted by the sample in response to the excitation light.
  • time-gating techniques may be used to obtain measurements of fluorescence lifetime, pulse width/duration, and/or interpulse duration of an emission from a sample under analysis.
  • one or more measurements for intensity of emission light are obtained by collecting and quantifying charge carriers generated by incident photons in one or more charge storage regions.
  • the inventors have recognized that such fluorescence lifetime, pulse duration, interpulse duration, and/or intensity information may be used as degrees of discrimination in some embodiments of 2-D, 3-D, 4-D and/or 5-D discrimination sample analysis techniques in addition or alternative to wavelength information.
  • FIG. 1-lC is a circuit diagram of pixel 1-112 of FIG. 1-lB, according to some embodiments.
  • photodetection region PPD is coupled to multiple storage regions SDO and SD1.
  • Storage region SD1 and transfer gate TGI may be configured in the manner described for storage region SDO and transfer gate TGO.
  • Pixel 1-112 may be configured such that only one of storage regions SDO and SD1 receive charge carriers from photodetection region PPD at a given time.
  • FIG. 1-2A plots two different fluorescent emission probability curves (A and B), which can be representative of fluorescent emission from two different fluorescent molecules, for example.
  • curve A dashed line
  • a probability pA(t) of a fluorescent emission from a first molecule may decay with time, as depicted.
  • signals that are read out can provide a histogram of bins that are representative of the fluorescent emission decay characteristics, for example.
  • An example process is illustrated in FIG. 1-2D and FIG. 1-2E, for which two charge-storage regions are used to acquire fluorescent emission from the reaction chambers.
  • the histogram’s bins can indicate a number of photons detected during each time interval after excitation of the fluorophore(s) in a reaction chamber.
  • signals for the bins will be accumulated following a large number of excitation pulses, as depicted in FIG. 1-2D.
  • the excitation pulses can occur at times tei, t e 2, t e 3, ...
  • a depth of charge storage region SDO and/or a depth of charge storage region SD1 may be configured such that each charge storage region predominantly collects incident photons having a particular wavelength and/or range of wavelengths.
  • the difference in depth between charge storage region(s) SDO and/or SD1 and photodetection region PPD may be configured such that each charge storage region predominantly collects incident photons having a particular wavelength and/or range of wavelengths.
  • the higher wavelength photons of the above example may have a wavelength greater than 600nm, and the lower wavelength photons may have a wavelength less than 600 nm. In some embodiments, the higher wavelength photons of the above example may have a wavelength greater than 600nm, and the lower wavelength photons may have a wavelength less than 550 nm. In some embodiments, the higher wavelength photons of the above example may have a wavelength greater than 550nm, and the lower wavelength photons may have a wavelength less than 550 nm. In some embodiments, pixels described herein may have an area less than or equal to 40 square microns.
  • FIG. 2-2 is a side view of pixel 2-212, which may have a time-gated charge storage region and a direct-excitation charge storage region configured to receive incident photons from a light source via a photodetection region, according to some embodiments.
  • Pixel 2-212 may be configured in the manner described for pixel 2-112. For instance, as shown in FIG. 2-2, pixel 2-212 includes photodetection region PPD, charge storage regions SD0 and SD1, and transfer gate TG0.
  • FIG. 2-2 may alternatively or additionally include one or more barriers such as metal layer M0, and/or the barrier illustrated extending from metal layer M0 into the pixel.
  • FIG. 2-4 is a side view of pixel 2-412 having two photodetection regions of different depths and two time-gated charge storage regions, according to some embodiments.
  • Pixel 2-412 may be configured in the manner described for pixel 2-112 in connection with FIG. 2-1.
  • pixel 2-412 includes photodetection region PPDO, charge storage regions SDO and SD1, and transfer gate TGO.
  • pixel 2-412 may include regions of different depths.
  • pixel 2-412 may include photodetection region PPD1 and transfer gate TGI, and photodetection regions PPDO and PPD1 are shown having different depths.
  • one or more charge storage regions may be positioned between adjacent ones of the photodetection regions.
  • pixel 2-512 may include one or more barriers 2-502 (e.g., p-doped barriers “Pwell”) positioned between adjacent photodetection regions PD.
  • barriers 2-502 may be doped with an opposite conductivity type than photodetection regions PPDO, PPD1, PPD2, such as being p-type doped when photodetection regions PPDO, PPD1, and PPD2 are n-type doped.
  • some (or all) of the photodetection regions may have a same depth.
  • the charge storage regions may have different depths. By including more regions of different depths, such as illustrated in FIG. 2-5, more timing and/or spectral information of the incident light may be obtained for processing.
  • charge storage regions SD2 and SD3 may have a same depth and may be configured to receive charge carriers from photodetection region PPD1 via charge transfer channels having a same depth.
  • charge storage regions SDO and SD3 may be configured substantially identically to one another, and charge storage regions SD1 and SD2 may be configured substantially identically to one another.
  • charge storage regions SDO and SD2 may be configured substantially identically to one another, and charge storage regions SD1 and SD3 may be configured substantially identically to one another. It should be appreciated that slight differences, such as due to inconsistencies in manufacturing pixel 3-112, may result in greater differences between substantially identically configured charge storage regions.
  • charge storage regions of pixel 3-112 may be configured differently from one another, such has having different depths from one another.
  • FIG. 4-2 is a side view of pixel 4-212, which may have an optical sorting element, two photodetection regions, and two time-gated charge storage regions, according to some embodiments.
  • Pixel 4-212 may be configured in the manner described for pixel 4-112 in connection with FIG. 4-1.
  • pixel 4-212 is shown in FIG. 4-2 having photodetection regions PPDO and PPD1, charge storage regions SDO and SD1, and transfer gates TG0 and TGI.
  • pixel 4-212 includes one or more barriers positioned at least partially between photodetection regions PPDO and PPD1 and respective charge storage regions SDO and SD1. Also shown in FIG.
  • a two-dimensional discrimination technique for identifying a sample of interest is based on wavelength information and lifetime information of emission light associated with the sample.
  • a three-dimensional discrimination technique may identify a sample of interest based on information of any three of lifetime, wavelength, pulse duration, interpulse duration, and intensity of emission light associated with the sample.
  • a three-dimensional discrimination technique for identifying a sample of interest is based on lifetime information, wavelength information, and intensity information of emission light associated with the sample.
  • a three-dimensional discrimination technique for identifying a sample of interest is based on any two of wavelength information, lifetime information, and intensity information, and any one of pulse duration information and interpulse duration information of emission light associated with the sample.
  • the excitation source 5-106 may be configured to provide excitation light to the integrated device 5-102. As illustrated schematically in FIG. 5-1A, the integrated device 5- 102 has a plurality of pixels 5-112, where at least a portion of pixels may perform independent analysis of a sample of interest. Such pixels 5-112 may be referred to as “passive source pixels” since a pixel receives excitation light from a source 5-106 separate from the pixel, where excitation light from the source excites some or all of the pixels 5-112. Excitation source 5-106 may be any suitable light source. Examples of suitable excitation sources are described in U.S. Pat. Application No.
  • the output pulses 5-122 from a pulsed optical source can be coupled into one or more optical waveguides 5-312 on a bio-optoelectronic chip 5-140, for example.
  • the optical pulses can be coupled to one or more waveguides via a grating coupler 5-310, though coupling to an end of one or more optical waveguides on the optoelectronic chip can be used in some embodiments.
  • a quad detector 5-320 can be located on a semiconductor substrate 5-305 (e.g., a silicon substrate) for aiding in alignment of the beam of optical pulses 5-122 to a grating coupler 5-310.
  • the one or more waveguides 5-312 and reaction chambers or reaction chambers 5-330 can be integrated on the same semiconductor substrate with intervening dielectric layers (e.g., silicon dioxide layers) between the substrate, waveguide, reaction chambers, and photodetectors 5-322.
  • a second bin can accumulate carriers produced during an interval between times h and t 3
  • a third bin can accumulate carriers produced during an interval between times t 3 and U.
  • the relative positions of amino acids in a protein are determined using a series of amino acid labeling and cleavage steps.
  • the multi dimensional discrimination techniques described herein may be implemented with the protein sequencing methods described in U.S. Pat. Application No. 16/686,028 titled “METHODS AND COMPOSITIONS FOR PROTEIN SEQUENCING,” filed November 15, 2019 under Attorney Docket No. R0708.70042US02 and PCT Application No. PCT/US 19/61831 titled “METHODS AND COMPOSITIONS FOR PROTEIN SEQUENCING,” filed November 15, 2019 under Attorney Docket No. R0708.70042WO00, both which are hereby incorporated by reference in their entireties
  • the phrase “at least one,” in reference to a list of one or more elements, should be understood to mean at least one element selected from any one or more of the elements in the list of elements, but not necessarily including at least one of each and every element specifically listed within the list of elements and not excluding any combinations of elements in the list of elements.
  • This definition also allows that elements may optionally be present other than the elements specifically identified within the list of elements to which the phrase “at least one” refers, whether related or unrelated to those elements specifically identified.

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Measuring Cells (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
PCT/US2021/020521 2020-03-02 2021-03-02 Integrated sensor for multi-dimensional signal analysis Ceased WO2021178438A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020227034235A KR20220148273A (ko) 2020-03-02 2021-03-02 다차원 신호 분석을 위한 통합 센서
EP21717265.9A EP4111178A1 (en) 2020-03-02 2021-03-02 Integrated sensor for multi-dimensional signal analysis
JP2022552603A JP2023515682A (ja) 2020-03-02 2021-03-02 多次元信号解析用集積センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202062984229P 2020-03-02 2020-03-02
US62/984,229 2020-03-02

Publications (1)

Publication Number Publication Date
WO2021178438A1 true WO2021178438A1 (en) 2021-09-10

Family

ID=75426675

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2021/020521 Ceased WO2021178438A1 (en) 2020-03-02 2021-03-02 Integrated sensor for multi-dimensional signal analysis

Country Status (6)

Country Link
US (2) US11719639B2 (https=)
EP (1) EP4111178A1 (https=)
JP (1) JP2023515682A (https=)
KR (1) KR20220148273A (https=)
TW (1) TW202147591A (https=)
WO (1) WO2021178438A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112020000799A2 (pt) * 2017-07-24 2020-07-14 Quantum-Si Incorporated estruturas fotônicas de rejeição óptica
AU2021208557A1 (en) 2020-01-14 2022-09-01 Quantum-Si Incorporated Sensor for lifetime plus spectral characterization
EP3936856A1 (en) * 2020-07-10 2022-01-12 Vrije Universiteit Brussel Circuit and method for fluorescence lifetime imaging

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160133668A1 (en) * 2014-08-08 2016-05-12 Quantum-Si Incorporated Integrated device for temporal binning of received photons
US20190237160A1 (en) * 2018-01-26 2019-08-01 Quantum-Si Incorporated Machine learning enabled pulse and base calling for sequencing devices

Family Cites Families (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814565A (en) 1995-02-23 1998-09-29 University Of Utah Research Foundation Integrated optic waveguide immunosensor
DE19748211A1 (de) 1997-10-31 1999-05-06 Zeiss Carl Fa Optisches Array-System und Reader für Mikrotiterplatten
US6787308B2 (en) 1998-07-30 2004-09-07 Solexa Ltd. Arrayed biomolecules and their use in sequencing
EP1285290A1 (en) 2000-04-28 2003-02-26 Edgelight Biosciences, Inc. Micro-array evanescent wave fluorescence detection device
US6917726B2 (en) 2001-09-27 2005-07-12 Cornell Research Foundation, Inc. Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes
FR2813121A1 (fr) 2000-08-21 2002-02-22 Claude Weisbuch Dispositif perfectionne de support d'elements chromophores
US6924887B2 (en) 2002-03-27 2005-08-02 Sarnoff Corporation Method and apparatus for generating charge from a light pulse
US7738086B2 (en) 2005-05-09 2010-06-15 The Trustees Of Columbia University In The City Of New York Active CMOS biosensor chip for fluorescent-based detection
US7426322B2 (en) 2005-07-20 2008-09-16 Searete Llc. Plasmon photocatalysis
US8975216B2 (en) 2006-03-30 2015-03-10 Pacific Biosciences Of California Articles having localized molecules disposed thereon and methods of producing same
US8207509B2 (en) 2006-09-01 2012-06-26 Pacific Biosciences Of California, Inc. Substrates, systems and methods for analyzing materials
WO2008028160A2 (en) 2006-09-01 2008-03-06 Pacific Biosciences Of California, Inc. Substrates, systems and methods for analyzing materials
FR2908888B1 (fr) 2006-11-21 2012-08-03 Centre Nat Rech Scient Dispositif pour la detection exaltee de l'emission d'une particule cible
WO2009082706A1 (en) 2007-12-21 2009-07-02 The Trustees Of Columbia University In The City Of New York Active cmos sensor array for electrochemical biomolecular detection
US8760549B2 (en) 2008-08-28 2014-06-24 Mesa Imaging Ag Demodulation pixel with daisy chain charge storage sites and method of operation therefor
EP2331934B1 (en) 2008-09-16 2020-01-01 Pacific Biosciences of California, Inc. Analytic device including a zero mode waveguide substrate
EP2182523B1 (en) 2008-10-31 2013-01-09 CSEM Centre Suisse d'Electronique et de Microtechnique SA -Recherche et Développement Charge sampling device and method based on a MOS-transmission line
US8338248B2 (en) 2008-12-25 2012-12-25 National University Corporation Shizuoka University Semiconductor element and solid-state imaging device
JP5569153B2 (ja) 2009-09-02 2014-08-13 ソニー株式会社 固体撮像装置およびその製造方法
JP5648922B2 (ja) 2009-10-05 2015-01-07 国立大学法人静岡大学 半導体素子及び固体撮像装置
US8278728B2 (en) 2009-10-17 2012-10-02 Florida Institute Of Technology Array of concentric CMOS photodiodes for detection and de-multiplexing of spatially modulated optical channels
EP3460458B1 (en) 2010-02-19 2021-08-11 Pacific Biosciences of California, Inc. A method for nucleic acid sequencing
US8865078B2 (en) 2010-06-11 2014-10-21 Industrial Technology Research Institute Apparatus for single-molecule detection
US8618459B2 (en) 2011-04-27 2013-12-31 Aptina Imaging Corporation Image sensor array for the back side illumination with junction gate photodiode pixels
JP5794068B2 (ja) 2011-09-16 2015-10-14 ソニー株式会社 固体撮像素子および製造方法、並びに電子機器
EP3305400A3 (en) 2011-10-28 2018-06-06 Illumina, Inc. Microarray fabrication system and method
US9606060B2 (en) 2012-01-13 2017-03-28 California Institute Of Technology Filterless time-domain detection of one or more fluorophores
US9372308B1 (en) 2012-06-17 2016-06-21 Pacific Biosciences Of California, Inc. Arrays of integrated analytical devices and methods for production
US9041081B2 (en) 2012-09-20 2015-05-26 Semiconductor Components Industries, Llc Image sensors having buried light shields with antireflective coating
EP2936222B1 (en) 2012-12-18 2019-07-03 Pacific Biosciences Of California, Inc. An optical analytical device
WO2015074001A1 (en) 2013-11-17 2015-05-21 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
JP6274567B2 (ja) 2014-03-14 2018-02-07 キヤノン株式会社 固体撮像装置及び撮像システム
US9765395B2 (en) 2014-04-28 2017-09-19 Nanomedical Diagnostics, Inc. System and method for DNA sequencing and blood chemistry analysis
CA2957543A1 (en) 2014-08-08 2016-02-11 Quantum-Si Incorporated Optical system and assay chip for probing, detecting and analyzing molecules
EP4421188A3 (en) 2014-08-08 2024-10-23 Quantum-Si Incorporated Integrated device with external light source for probing, detecting, and analyzing molecules
CA3208970A1 (en) 2014-09-15 2016-05-06 Board Of Regents, The University Of Texas System Improved single molecule peptide sequencing
US9871065B2 (en) 2014-12-22 2018-01-16 Google Inc. RGBZ pixel unit cell with first and second Z transfer gates
US9666748B2 (en) 2015-01-14 2017-05-30 International Business Machines Corporation Integrated on chip detector and zero waveguide module structure for use in DNA sequencing
WO2016128198A1 (de) 2015-02-09 2016-08-18 Espros Photonics Ag Tof entfernungssensor
EP3271762B1 (en) 2015-03-16 2023-01-04 Pacific Biosciences of California, Inc. Analytical system comprising integrated devices and systems for free-space optical coupling
WO2016187580A1 (en) 2015-05-20 2016-11-24 Quantum-Si Incorporated Method of determining the sequence of a nuclear acid using time resolved luminescence
US10246742B2 (en) 2015-05-20 2019-04-02 Quantum-Si Incorporated Pulsed laser and bioanalytic system
TWI755400B (zh) 2016-06-01 2022-02-21 美商寬騰矽公司 脈衝命名器及基質命名器、識別核苷酸之方法、校準定序儀器之方法、識別發生核苷酸併入事件之時間的方法、非暫時性電腦可讀儲存媒體、及定序儀器
EP3483938B1 (en) 2016-07-06 2020-11-25 Sony Semiconductor Solutions Corporation Imaging element, method for producing imaging element, and electronic device
JP6926450B2 (ja) 2016-11-22 2021-08-25 ソニーグループ株式会社 撮像素子、積層型撮像素子及び固体撮像装置
CA3047133A1 (en) 2016-12-16 2018-06-21 Quantum-Si Incorporated Compact mode-locked laser module
CN116466494A (zh) 2016-12-16 2023-07-21 宽腾矽公司 紧密的光束整形及操纵总成
AU2017377057B2 (en) 2016-12-16 2022-11-17 Quantum-Si Incorporated Optical coupler and waveguide system
CA3047826A1 (en) 2016-12-22 2018-06-28 Quantum-Si Incorporated Integrated photodetector with direct binning pixel
BR112020000799A2 (pt) 2017-07-24 2020-07-14 Quantum-Si Incorporated estruturas fotônicas de rejeição óptica
CN119364214A (zh) 2018-06-22 2025-01-24 宽腾矽公司 具有不同检测时间的电荷存储仓的集成光电检测器
AU2019330042A1 (en) 2018-08-29 2021-03-11 Quantum-Si Incorporated System and methods for detecting lifetime using photon counting photodetectors
AU2019380606B2 (en) 2018-11-15 2026-04-23 Quantum-Si Incorporated Methods and compositions for protein sequencing
JP7746169B2 (ja) 2019-06-28 2025-09-30 クアンタム-エスアイ インコーポレイテッド 光学的および電気的な二次経路の除去
AU2021208557A1 (en) 2020-01-14 2022-09-01 Quantum-Si Incorporated Sensor for lifetime plus spectral characterization
WO2021146473A1 (en) 2020-01-14 2021-07-22 Quantum-Si Incorporated Integrated sensor for lifetime characterization

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160133668A1 (en) * 2014-08-08 2016-05-12 Quantum-Si Incorporated Integrated device for temporal binning of received photons
US20190237160A1 (en) * 2018-01-26 2019-08-01 Quantum-Si Incorporated Machine learning enabled pulse and base calling for sequencing devices

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HAMAGUCHI ET AL., ANALYTICAL BIOCHEMISTRY, vol. 294, 2001, pages 126 - 131
SWAMINATHAN ET AL., PLOS COMPUT BIOL, vol. II, no. 2, 2015, pages eI004080
YAO ET AL., PHYS. BIOL., vol. 12, no. 5, 2015, pages 055003

Also Published As

Publication number Publication date
US20240003811A1 (en) 2024-01-04
EP4111178A1 (en) 2023-01-04
US20210270740A1 (en) 2021-09-02
TW202147591A (zh) 2021-12-16
JP2023515682A (ja) 2023-04-13
KR20220148273A (ko) 2022-11-04
US11719639B2 (en) 2023-08-08

Similar Documents

Publication Publication Date Title
US12477845B2 (en) Optical and electrical secondary path rejection
US12300711B2 (en) Integrated sensor for lifetime characterization
US12203855B2 (en) Sensor for lifetime plus spectral characterization
US20240003811A1 (en) Integrated sensor for multi-dimensional signal analysis
US12514005B2 (en) Integrated sensor
US20210318238A1 (en) Integrated sensor with reduced skew
US20250267967A1 (en) Backside illuminated structures with parallel charge transfer
WO2023137056A2 (en) Techniques for sequencing

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21717265

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2022552603

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20227034235

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 2021717265

Country of ref document: EP

Effective date: 20220930

WWW Wipo information: withdrawn in national office

Ref document number: 2021717265

Country of ref document: EP

WWW Wipo information: withdrawn in national office

Ref document number: 1020227034235

Country of ref document: KR