WO2021176517A1

WO2021176517A1 - Actuator and actuator device

Info

Publication number: WO2021176517A1
Application number: PCT/JP2020/008693
Authority: WO
Inventors: 俊平林; 亮戸田
Original assignee: 株式会社神戸製鋼所
Priority date: 2020-03-02
Filing date: 2020-03-02
Publication date: 2021-09-10

Abstract

A first mobile element (13) is movably attached to a first stator (11) and is driven with respect to the first stator. A second mobile element (23) is movably attached to a second stator (21) and is driven with respect to the second stator. A stator connection part (30) connects the first stator and the second stator such that the second stator can move with respect to the first stator. When the first mobile element is driven with respect to the first stator, the second stator is moved with respect to the first stator. When the second mobile element is driven with respect to the second stator, the first stator is moved with respect to the second stator.

Description

Actuators and actuator devices

The present invention relates to an actuator and an actuator device.

For example, Patent Document 1 describes a conventional actuator. In the technique described in FIG. 9 of the same document, an output unit for outputting the driving force (electric artificial muscle in the same document) and an input unit for inputting the driving force (foot part in the same document) are provided.

Japanese Patent No. 3976129

In the technology described in the same document, the output unit and the input unit are configured separately (independently). Therefore, there is a limit to the miniaturization of each part, and further miniaturization is desired.

Therefore, an object of the present invention is to provide an actuator and an actuator device that can be made smaller than before.

The actuator includes a first stator, a first mover, a second stator, a second mover, and a stator connection portion. The first mover is movably attached to the first stator and driven with respect to the first stator. The second mover is movably attached to the second stator and driven with respect to the second stator. The stator connecting portion connects the first stator and the second stator so that the second stator can move with respect to the first stator. The first stator moves the second stator with respect to the first stator when driven with respect to the first stator. The second stator moves the first stator with respect to the second stator when driven with respect to the second stator.

With the above configuration, the actuator can be made smaller than before.

It is a figure which shows the actuator 1a of 1st Embodiment. It is a figure which shows the 1st drive part 10 shown in FIG. 1A, and is the figure in the case where the 1st mover 13 is an armature 15. It is a figure which shows the 1st drive part 10 shown in FIG. 1A, and is the figure in the case where the 1st mover 13 is a magnetic monopole 17. It is a figure which shows the operation of the actuator 1a shown in FIG. 1A. It is a figure which shows the bent state of the actuator 1a shown in FIG. 1A. It is a figure which shows the actuator 201a of 2nd Embodiment. It is a figure which shows the bent state of the actuator 201a shown in FIG. 2A. It is a figure which shows the actuator 301a of 3rd Embodiment. It is a figure which shows the operation of the actuator 301a shown in FIG. 3A. It is a figure which shows the bent state of the actuator 301a shown in FIG. 3A. It is a figure which shows the state which the actuator 301a shown in FIG. 3C is bent in the direction opposite to the direction shown in FIG. 3C. It is a figure which shows the actuator 401a of 4th Embodiment. It is a figure which shows the bent state of the actuator 401a shown in FIG. 4A. It is a figure which shows the actuator device 501 of the 5th Embodiment. It is a figure which shows the 1st drive part 10 shown in FIG. 5A, and is the figure in the case where the 1st mover 13 is an armature 15. It is a figure which shows the 1st drive part 10 shown in FIG. 5A, and is the figure in the case where the 1st mover 13 is a magnetic monopole 17. It is a figure which shows the bent state of the actuator device 501 shown in FIG. 5A. It is a figure which shows the actuator device 601 of the 6th Embodiment. It is a figure which looked at the actuator device 701 of 7th Embodiment from the X1 direction. It is a figure which looked at the actuator device 701B of the modification of 7th Embodiment from the X1 direction. It is a figure which shows the actuator device 801 of 8th Embodiment. It is an arrow view of F8B of FIG. 8A. FIG. 8B is a diagram corresponding to FIG. 8B showing an actuator device 801B of a modified example of the eighth embodiment. It is a figure which shows the bent state of the actuator device 801 shown in FIG. 8A. It is a perspective view which shows the actuator device 901 of the 9th Embodiment. 9A is a view of the actuator device 901 shown in FIG. 9A as viewed from the X1 direction, and is a view taken along the line F9B of FIG. 9A. It is a figure which shows the actuator device 1001 of a tenth embodiment. It is a figure which shows the state which the actuator device 1001 shown in FIG. 10A is extended. It is a figure which shows the actuator device 1101 of 11th Embodiment. It is a figure which shows the actuator device 1201A of the twelfth embodiment. It is a figure which shows the actuator device 1201B of the modification of the twelfth embodiment. It is a figure which shows the actuator device 1201C of the modification of the twelfth embodiment. It is a figure which shows the actuator device 1301 of the thirteenth embodiment. It is a figure which shows the actuator device 1401 of 14th Embodiment.

(First Embodiment)
The actuator 1a of the first embodiment will be described with reference to FIGS. 1A to 1E.

As shown in FIG. 1A, the actuator 1a is a device that moves the second drive unit 20 with respect to the first drive unit 10. The actuator 1a may be used, for example, in a robot or a manipulator of a robot. Actuator 1a may be used, for example, in a drone or in a biomimetic drone (for example, a drone that flaps like a bird or an insect, for example, a drone that moves fins like a dolphin or a ray). Actuator 1a may be used in industrial machines and other machines. The actuator 1a includes a first drive unit 10, a second drive unit 20, a stator connection unit 30, and a mover transmission unit 40.

The first drive unit 10 drives the first mover 13 with respect to the first stator 11. The first drive unit 10 is, for example, an electric actuator.

The first stator 11 movably supports the first mover 13. The first stator 11 has a shape having a longitudinal direction, and may be, for example, a rod shape, a columnar shape, or a rectangular parallelepiped shape (the first stator 13, the second stator 21, and the second stator 23 also have a shape. Similarly). The first stator 11 does not have to have a shape having a longitudinal direction.

The first stator 13 is movably attached to the first stator 11 and is driven with respect to the first stator 11. The first mover 13 can move linearly with respect to the first stator 11 (the first drive unit 10 is a linear motor). The first stator 13 is guided by the first stator 11. The first mover 13 can move, for example, in the longitudinal direction of the first stator 11. The first stator 13 is configured to be driven by an electromagnetic force with respect to the first stator 11. Specifically, as shown in FIG. 1B, the first drive unit 10 includes an armature 15 and a magnetic pole element 17.

The armature 15 has a coil 15c. The monopole 17 may include a permanent magnet or a cage conductor (not shown). The magnetic flux line M passes through the armature 15 and the magnetic pole element 17. The patterns shown in FIGS. 1B and 1C can be considered for the combination of the armature 15, the magnetic monopole 17, the first stator 11, and the first mover 13. In the pattern shown in FIG. 1B, the first stator 11 is a magnetic monopole 17 and the first mover 13 is an armature 15. In this case, the first drive unit 10 is, for example, a DC motor or the like. In this case, power is supplied to the armature 15 using a brush (not shown). The pattern shown in FIG. 1B is more effective than the pattern shown in FIG. 1C when it is desired to simplify the power supply and control, or when it is desired to configure the structure at low cost. In the pattern shown in FIG. 1C, the first stator 11 is the armature 15 and the first mover 13 is the magnetic monopole 17. In FIG. 1C, the coil 15c (see FIG. 1B) is omitted. In this case, the first drive unit 10 is, for example, a brushless motor or an induction motor. When the first drive unit 10 is a brushless motor, maintainability can be improved as compared with the case where a brush is used.

As shown in FIG. 1A, the second drive unit 20 is configured in the same manner as the first drive unit 10. The second drive unit 20 includes a second stator 21 and a second mover 23. The second stator 23 is movably attached to the second stator 21 and is driven with respect to the second stator 21. If the first stator 11 and the second stator 21 are considered as one stator, one stator drives a plurality of movers (first mover 13 and second mover 23) (so to speak, multi). It will be driven). When considered in this way, the actuator 1a is, for example, a so-called multi-drive linear motor.

The stator connecting portion 30 connects the first stator 11 and the second stator 21 so that the second stator 21 can move with respect to the first stator 11. The stator connecting portion 30 connects the first stator 11 and the second stator 21 with one or more degrees of freedom. [Connection Example 1] The stator connection portion 30 connects the first stator 11 and the second stator 21 so that the second stator 21 can rotate with respect to the first stator 11 (1). The stator connection 30 is a joint). In this case, the first stator 11 and the second stator 21 are rotational pairs. The number of rotation axes A of the second stator 21 with respect to the first stator 11 is 1 in the example shown in FIG. 1A, and may be 2 or more (see, for example, the stator connection portion 1030 shown in FIG. 10A). The stator connection portion 30 may be, for example, a universal joint (universal joint), a pillow ball, or a spherical joint. [Connection Example 2] The stator connection portion 30 connects the first stator 11 and the second stator 21 so that the second stator 21 can move linearly with respect to the first stator 11. (See, for example, the stator connection 1030 shown in FIG. 10B). In this case, the first stator 11 and the second stator 21 are sliding pairs. [Connection Example 3] The stator connection portion 30 has a first stator 11 and a second stator 21 so that the second stator 21 can rotate and move linearly with respect to the first stator 11. May be connected with. In this case, the first stator 11 and the second stator 21 are a rotating pair and a sliding pair. The stator connecting portion 30 may connect the first stator 11 and the second stator 21 by an elastic member (for example, a spring or rubber). Hereinafter, a case where the second stator 21 is rotatable with respect to the first stator 11 will be mainly described.

(direction)
The moving direction of the first mover 13 with respect to the first stator 11 is the X1 direction. In the X1 direction, the side from the first stator 11 toward the stator connecting portion 30 is the X1a side, and the opposite side is the X1b side. The moving direction of the second mover 23 with respect to the second stator 21 is the X2 direction. In the X2 direction, the side from the second stator 21 toward the stator connecting portion 30 is the X2a side, and the opposite side is the X2b side. The direction in which the rotation axis A of the second stator 21 extends with respect to the first stator 11 is defined as the Y direction. The direction orthogonal to each of the X1 direction and the Y direction is defined as the Z direction. In the Z direction, the side from the rotation axis A (more specifically, the position of the rotation axis A in the Z direction) to the first mover 13 (more specifically, the position of the first mover 13 in the Z direction) is the Za side. The opposite side is the Zb side. The rotation direction around the rotation axis A is the R2 direction. The second drive unit when the second drive unit 20 rotates so as to move from the state in which the X1a side and the X2b side are oriented in the same direction (as shown in FIG. 1A) to the Za side with the rotation axis A as the center. The direction of rotation of 20 is the R2a side in the R2 direction. In the R2 direction, the side opposite to the R2a side is the R2b side. For convenience of explanation, the rotation direction (R2 direction) around the rotation axis A is also referred to as the R1 direction, the R2a side is also referred to as the R1b side, and the R2b side is also referred to as the R1a side.

The mover transmission unit 40 transmits a force between the first mover 13 and the second mover 23. When the first stator 13 moves with respect to the first stator 11, the mover transmission unit 40 moves the second stator 21 with respect to the first stator 11 (rotational movement in the present embodiment). .. When the second stator 23 moves with respect to the second stator 21, the mover transmission unit 40 moves the first stator 11 with respect to the second stator 21 (rotational movement in the present embodiment). .. The mover transmission unit 40 is arranged on the Za side of the stator connection unit 30. The mover transmission portion 40 includes a base portion 40b, a first contact portion 41, and a second contact portion 42.

The base portion 40b has a triangular shape when viewed from the Y direction. As shown in FIG. 1D, the base portion 40b is rotatable about the rotation axis A with respect to the first stator 11 and the second stator 21. The base portion 40b is connected to the stator connecting portion 30. The base portion 40b may be fixed to the stator connection portion 30 or may be rotatably connected to the stator connection portion 30.

The first contact portion 41 can contact the first mover 13. The first contact portion 41 is a portion (surface) of the base portion 40b facing the first mover 13 side. The first contact portion 41 is not connected to the first mover 13 and can be separated from the first mover 13. The second contact portion 42 can contact the second mover 23. The relationship between the second contact portion 42 and the second mover 23 is the same as the relationship between the first contact portion 41 and the first mover 13.

(Operation)
The actuator 1a shown in FIG. 1A is configured to operate as follows. In the following, a state in which the X1a side and the X2b side are in the same direction will be described as an initial state (the same applies to the description of the operation in the other embodiments below). It is not necessary to start the operation of the actuator 1a from the state where the X1a side and the X2b side are in the same direction.

The first drive unit 10 shown in FIG. 1D is driven as follows. The first mover 13 moves toward the X1a side with respect to the first stator 11, comes into contact with the first contact portion 41, and pushes the mover transmission portion 40 toward the X1a side. Then, the mover transmission unit 40 rotates toward R2b. Then, the second contact portion 42 pushes the second mover 23 toward R2b. Then, the second drive unit 20 rotates toward R2b. Therefore, as shown in FIG. 1E, the entire actuator 1a is deformed (driven) about the rotation axis A, and more specifically, is bent (bent) about the rotation axis A.

The second drive unit 20 shown in FIG. 1D is driven as follows. Similar to the first drive unit 10, when the second mover 23 moves to the X2a side with respect to the second stator 21, the first drive unit 10 rotates to the R1b side. When the first drive unit 10 and the second drive unit 20 are driven, the actuator 1a can be driven with a larger force (thrust) than when only one of them is driven.

(Combined use of input and output)
The first drive unit 10 shown in FIG. 1A also serves as an output unit and an input unit. The details are as follows. When the first drive unit 10 is driven, the first mover 13 is driven with respect to the first stator 11, and this driving force is transmitted to the second stator 21, and the second stator with respect to the first stator 11. 21 moves (for example, rotates). Therefore, the first drive unit 10 is an output unit that outputs a driving force to the second drive unit 20. Further, when the second drive unit 20 is driven, the first stator 11 (a part of the first drive unit 10) moves (for example, rotates) with respect to the second stator 21. Therefore, the first drive unit 10 is also an input unit into which the driving force of the second drive unit 20 is input. Therefore, the first drive unit 10 also serves as an output unit and an input unit. Therefore, the actuator 1a can be downsized as compared with the case where the output unit and the input unit cannot be combined in the first drive unit 10. As a result of being able to reduce the size of the actuator 1a, the weight of the actuator 1a can be reduced. Further, like the first drive unit 10, the second drive unit 20 also serves as an output unit and an input unit. Therefore, the actuator 1a can be further miniaturized. Further, it can be said that the first drive unit 10 is a support mechanism that supports the second drive unit 20 via the stator connection unit 30. In this case, the first drive unit 10 also serves as a support mechanism, an output unit, and an input unit.

(Miniaturization of actuator 1a, etc.)
As described above, when the first drive unit 10 and the second drive unit 20 are driven, the actuator 1a can be driven with a larger force than when only one of them is driven. When the first drive unit 10 and the second drive unit 20 are driven, the required driving force of each of the first drive unit 10 and the second drive unit 20 is smaller than that when only one of them is driven. can. Therefore, each of the first drive unit 10 and the second drive unit 20 can be miniaturized. Therefore, the actuator 1a can be miniaturized.

In general, in order to increase the force (output) generated in the system (actuator 1a in this case), it is necessary to increase the area of the surface that generates the force (the area of the portion that contributes to the generation of the force). Since the actuator 1a is provided with the first drive unit 10 and the second drive unit 20, it is possible to widen the surface for generating force as compared with the case where only one of them is provided. On the other hand, the surface that generates the force is restricted by the outer shape of the system. Therefore, there is a limit to the size of the surface that generates force. Therefore, if the first drive unit 10 and the second drive unit 20 are configured to be flat, the surface for generating force can be increased without increasing the volume as much as possible. As a result, the generated force per volume of the actuator 1a can be increased. Therefore, when at least one of the first drive unit 10 and the second drive unit 20 is configured to be flat, the actuator 1a can be further miniaturized. The dimension of the first drive unit 10 in the other direction is larger than the dimension (thickness) of the first drive unit 10 in the direction in which the first stator 11 and the first mover 13 face each other (for example, the Z direction). When it is large, the first drive unit 10 is flat (the same applies to the second drive unit 20).

When the actuator 1a is used, for example, in a personal robot or a collaborative robot that collaborates with a person, the actuator 1a is made small so that the robot can be arranged in a narrow space and in order to prevent injury to the person. Is especially desired. Therefore, the actuator 1a is particularly advantageous when used in these robots.

In the technique described in FIG. 9 of Patent Document 1, the driving unit (foot portion in the same document) for moving the lower portion (foot portion in the same document) with respect to the upper portion above the joint portion (heel portion). The electric artificial muscle in the same document) is provided only above the joint portion. Therefore, there is a problem that a surface for generating force cannot be sufficiently secured. On the other hand, in the present embodiment, drive units (first drive unit 10 and second drive unit 20) are provided on both sides (left and right in FIG. 1A) of the stator connection unit 30. Therefore, the surface for generating the force can be made wider than before, which is advantageous for miniaturization of the actuator 1a.

(Comparison with bending the link with a rotary motor)
In the above embodiment, the actuator 1a is bent by using a linear motor. On the other hand, a rotary motor is arranged at or near the joint portion (stator connection portion 30 in this embodiment), and the link (first stator 11 and second stator 21 in this embodiment) is used by using this rotary motor. Consider the case of bending. In order to obtain a larger force with a rotary motor, it is necessary to increase the size of the motor. When a speed reducer is used, it is necessary to further increase the size of the speed reducer. Therefore, the joint portion or a portion in the vicinity thereof may become large. In addition, when a configuration that bends a link using a rotary motor is used for, for example, a personal robot or a collaborative robot, back drivability (ability to detect and respond to the influence of disturbance such as hitting a person) is required. Therefore, a speed reducer is often not provided. If a speed reducer is not provided, it is necessary to output the force required for driving only with the rotary motor. Therefore, it is necessary to increase the size of the motor as compared with the case where the speed reducer is provided. On the other hand, in the present embodiment, it is not necessary to provide a rotary motor in the stator connection portion 30 and its peripheral portion (joint portion). Therefore, the joint portion can be miniaturized. Further, the size of the joint portion does not limit the size of the drive unit (first drive unit 10, second drive unit 20) (it is not necessary to reduce the size of the drive unit for the purpose of reducing the size of the joint portion). .. Therefore, in the present embodiment, the drive unit (first drive unit 10, second drive unit 20) can be made larger than in the case where the size of the drive unit (rotary motor) is restricted by the size of the joint portion. Therefore, the magnitude of the force that can be generated by the actuator 1a can be increased. In this embodiment, only a part of the above-mentioned effects may be obtained.

(Power generation drive)
The first drive unit 10 and the second drive unit 20 may be driven not only as an electric motor but also as a generator. In the first drive unit 10, it is sufficient that the first mover 13 can be driven with respect to the first stator 11, and the purpose is not to drive the first mover 13 with respect to the first stator 11. It may be good (the same applies to the second drive unit 20). More specifically, as described above, the actuator 1a causes the second stator 21 to move with respect to the first stator 11 when the first mover 13 is driven with respect to the first stator 11. It is composed. In this configuration, when the second stator 21 is moved with respect to the first stator 11, the first mover 13 moves with respect to the first stator 11. Then, the first drive unit 10 can generate electricity. Similarly, the second drive unit 20 can also generate electricity. When the actuator 1a is driven as a generator, the actuator 1a may be used as a generator that generates electricity by, for example, wind power or lift. Further, the actuator 1a may be used as a vibration damping device that detects the electric power generated by the actuator 1a and performs vibration damping using the detected value.

(Effect of the first invention)
The effects of the actuator 1a shown in FIG. 1A are as follows. The actuator 1a includes a first stator 11, a first stator 13, a second stator 21, a second stator 23, and a stator connecting portion 30.

[Structure 1-1] The first stator 13 is movably attached to the first stator 11 and driven with respect to the first stator 11.

[Structure 1-2] The second stator 23 is movably attached to the second stator 21 and driven with respect to the second stator 21.

[Structure 1-3] The stator connecting portion 30 connects the first stator 11 and the second stator 21 so that the second stator 21 can move with respect to the first stator 11.

[Structure 1-4] When the first stator 13 is driven with respect to the first stator 11, the second stator 21 is moved with respect to the first stator 11.

[Structure 1-5] When the second stator 23 is driven with respect to the second stator 21, the first stator 11 is moved with respect to the second stator 21.

In the above [Structure 1-1], the first stator 11 and the first mover 13 (first drive unit 10) function as output units that output the generated force. In the above [Structure 1-2], the second stator 21 and the second mover 23 (second drive unit 20) function as output units that output the generated force. In the above [Structure 1-3] and [Structure 1-4], the second stator 21 (a part of the second drive unit 20) is the first stator 11 and the first mover 13 (first drive unit 10). ). Therefore, the second drive unit 20 functions as an input unit to which the force generated by the first drive unit 10 is input. Similarly, according to the above [Structure 1-3] and [Structure 1-5], the first drive unit 10 functions as an input unit to which the force generated by the second drive unit 20 is input. Therefore, the first drive unit 10 serves as both an output unit and an input unit, and the second drive unit 20 also serves as an output unit and an input unit. Therefore, the actuator 1a can be downsized as compared with the case where the output unit and the input unit are provided separately. As a result of being able to reduce the size of the actuator 1a, the weight of the actuator 1a may be reduced.

(Effect of the second invention)
[Structure 2] The stator connecting portion 30 connects the first stator 11 and the second stator 21 to the first stator 11 so that the second stator 21 can rotate.

In the above [configuration 2], the actuator 1a in which the second stator 21 can rotate with respect to the first stator 11 can be miniaturized. Specifically, for example, the actuator 1a is used as compared with the case where it is necessary to provide a motor (rotating motor or the like) in the stator connection portion 30 in order to rotate the second stator 21 with respect to the first stator 11. It can be miniaturized (details are as above).

(Second Embodiment)
The difference between the actuator 201a of the second embodiment and the actuator 1a of the first embodiment (see FIG. 1A) will be described with reference to FIGS. 2A to 2B. Of the actuators 201a, the common points with the first embodiment are designated by the same reference numerals as those of the first embodiment, and the description thereof has been omitted. The same applies to the description of other embodiments described later in that the description of the common points is omitted. The difference is the shape of the base portion 240b of the mover transmission portion 40.

In the example shown in FIG. 1A, the base portion 40b had a triangular shape when viewed from the Y direction. On the other hand, the base portion 240b shown in FIG. 2A is T-shaped when viewed from the Y direction. The shape of the base portion 240b does not have to be triangular or T-shaped.

(Third Embodiment)
The difference between the actuator 301a of the third embodiment and that of the first embodiment will be described with reference to FIGS. 3A to 3D. As shown in FIG. 3A, the actuator 301a of the present embodiment includes a mover connecting portion 350 instead of the mover transmitting portion 40 (see FIG. 1A). The actuator 301a may include a connecting portion connecting portion 360.

The mover connection unit 350 connects the first mover 13 and the second mover 23 so that a force can be transmitted between the first mover 13 and the second mover 23. The mover connecting portion 350 moves the second stator 21 with respect to the first stator 11 (rotational movement in the present embodiment) when the first mover 13 is driven with respect to the first stator 11. .. Further, the mover connecting portion 350 moves the first stator 11 with respect to the second stator 21 when the second mover 23 is driven with respect to the second stator 21 (rotational movement in the present embodiment). ). The mover connection unit 350 has more restrictions on the movement of the first mover 13 and the second mover 23 than the mover transmission unit 40 (see FIG. 1A) of the first embodiment. The mover connecting portion 350 connects the first mover 13 and the second mover 23 with one or more degrees of freedom. The mover connecting portion 350 connects the first mover 13 and the second mover 23 so that the first mover 13 can pull the second mover 23. The mover connecting portion 350 connects the first mover 13 and the second mover 23 so that the second mover 23 can pull the first mover 13. The movable element connecting portion 350 includes a movable element connecting link portion 351 and a movable element connecting joint portion 353.

The mover connection link portion 351 is a member that connects the first mover 13 and the second mover 23 via the mover connection joint portion 353. In the example shown in FIG. 3A, the mover connection link portion 351 is substantially linear (for example, rod-shaped, plate-shaped, etc.) when viewed from the Y direction, and does not have to be substantially linear. The mover connection link portion 351 may be rotatably connected to the first mover 13 (the same applies to the second mover 23), or may be fixed to the first mover 13. (The same applies to the second mover 23). The movable element connecting joint portion 353 is a member that makes the movable element connecting link portion 351 bendable. The number of bending rotation axes of the mover connection link portion 351 is 1 in the example shown in FIG. 3C, but may be 2 or more. The direction of the rotation axis of the bending of the mover connection link portion 351 shown in FIG. 3A (the direction of at least one rotation axis when there are a plurality of rotation axes) is the Y direction.

The connecting portion connecting portion 360 connects the stator connecting portion 30 and the movable element connecting joint portion 353. The connecting portion connecting portion 360 connects the stator connecting portion 30 and the movable element connecting joint portion 353 so that the movable element connecting joint portion 353 can rotate around the rotation axis A.

(Operation)
The differences in the operation of the actuator 301a with respect to the actuator 1a (see FIG. 1A) of the first embodiment are as follows. As shown in FIG. 3B, when the first mover 13 moves to the X1a side, the first mover 13 pushes the mover connection joint portion 353 to the X1a side via the mover connection link portion 351. Then, the movable element connecting joint portion 353 rotates about the rotation axis A toward the R1a side (R2b side), and pushes the second movable element 23 toward the R2b side via the movable element connecting link portion 351. Then, the second stator 21 rotates toward R2b. Therefore, as shown in FIG. 3C, the entire actuator 301a is deformed (bent) about the rotation axis A. Similarly, when the second stator 23 moves to the X2a side, the first stator 11 rotates to the R1b side.

When the first mover 13 shown in FIG. 3D moves to the X1b side, the first mover 13 pulls the second mover 23 to the X2a side via the mover connection portion 350. Then, the second stator 21 rotates toward R2a. Similarly, when the second stator 23 moves to the X2b side, the second stator 21 rotates to the R1a side. In this way, the actuator 301a can be deformed by using the force that the first mover 13 pulls the second mover 23 and the force that the second mover 23 pulls the first mover 13.

(Effect of the third invention)
The effects of the actuator 301a shown in FIG. 3A are as follows.

[Structure 3] The actuator 301a includes a mover connecting portion 350. The mover connecting portion 350 connects the first mover 13 and the second mover 23 so that a force can be transmitted between the first mover 13 and the second mover 23.

According to the above [configuration 3], a force can be transmitted from the first mover 13 to the second drive unit 20 via the mover connecting part 350. Further, the force can be transmitted from the second mover 23 to the first drive unit 10 via the mover connecting part 350. Therefore, as compared with the case where the first mover 13 and the second mover 23 are not connected (see, for example, FIG. 1A), it is possible to increase the direction in which the second drive unit 20 can move (drive) with respect to the first drive unit 10. can.

(Fourth Embodiment)
The difference between the actuator 401a of the fourth embodiment and the actuator 1a of the first embodiment (see FIG. 1A) will be described with reference to FIGS. 4A and 4B. As shown in FIG. 4A, the actuator 401a of the fourth embodiment does not include the mover transmission unit 40 (see FIG. 1A) but includes a guide unit 460.

The guide unit 460 guides the movement (position) of the first mover 13. The guide portion 460 imposes restrictions on the movement of the first mover 13. The guide portion 460 includes, for example, a pin 461 and a rail 463. The pin 461 is provided on the first mover 13. The pin 461 projects outward from the first mover 13 in the Y direction, for example. The rail 463 may be fixed to the outside (frame, etc.) of the actuator 401a, for example, or may be fixed to the second stator 21, for example. The rail 463 is fixed to the second stator 21 via, for example, the rail connecting portion 463a. The rail 463 is configured to support the pin 461. The rail 463 guides the movement of the pin 461, for example, the pin 461 is moved along the inner surface of the rail 463.

(Operation)
The difference between the operation of the actuator 1a of the first embodiment and the operation of the actuator 401a of the present embodiment is as follows. As shown in FIG. 4B, the first stator 13 moves with respect to the first stator 11 while being guided by the guide portion 460. As a result, the first stator 13 rotates the first stator 11 with respect to the second stator 21. Specifically, for example, as the first mover 13 moves to the X1b side, the first mover 13 rotates to the R1b side. As the first stator 13 rotates toward R1b, the first stator 11 also rotates toward R1b. Here, the rotation of the first stator 11 to the R1b side with respect to the second stator 21 is considered to be the rotation of the second stator 21 to the R2b side with respect to the first stator 11 when the first stator 11 is fixed. It is a rotation. Therefore, it can be said that the second stator 21 rotates with respect to the first stator 11 by moving the first mover 13 with respect to the first stator 11.

The second drive unit 20 uses the same guide unit 460-2 (pin 461-2 and rail 463-2) as the guide unit 460 to rotate the first stator 11 with respect to the second stator 21. May be good. Further, the second drive unit 20 may rotate the first stator 11 with respect to the second stator 21 in the same configuration as shown in FIGS. 1A and 2A.

(Fifth Embodiment)
With reference to FIGS. 5A to 5D, the difference between the actuator device 501 of the fifth embodiment and the actuator 301a of the third embodiment will be described. As shown in FIG. 5A, the actuator device 501 includes a plurality of actuators 501a. Further, the movable element connecting portion 550 has a configuration different from that of the movable element connecting portion 350 (see FIG. 3A).

The number of actuators 501a provided in the actuator device 501 is 2 in the example shown in FIG. 5A, and may be 3 or more (see FIG. 9A and the like). The actuator device 501 includes a first actuator 501a1 and a second actuator 501a2. The Z direction and the R2 direction shown in FIG. 5A are the Z direction and the R2 direction in the first actuator 501a1. In the following, the Z direction and the R2 direction will be the directions in the first actuator 501a1. The directions from the first stator 11 to the first mover 13 are opposite to each other for the first actuator 501a1 and the second actuator 501a2 (the left and right directions are opposite in FIG. 5A), and even if they are not opposite to each other. good. Hereinafter, a case where the directions from the first stator 11 to the first mover 13 are opposite to each other in the first actuator 501a1 and the second actuator 501a2 will be described.

The first drive unit 10 of the plurality of actuators 501a is configured as follows. The first stators 11 of the plurality of actuators 501a are connected to each other. The first stators 11 of the plurality of actuators 501a may be directly connected (including the case where they are integrally configured) as in the example shown in FIG. 5A, or indirectly via a member (not shown). May be connected. The moving directions (X1 directions) of the first movers 13 of the plurality of actuators 501a are parallel to each other. The first mover 13 of the plurality of actuators 501a constitutes a so-called parallel link mechanism. FIG. 5B shows an example in which the first stator 11 is a magnetic pole element 17 and the first mover 13 is an armature 15. FIG. 5C shows an example in which the first stator 11 is the armature 15 and the first mover 13 is the magnetic pole element 17. In FIGS. 5B and 5C, the coil 15c of the armature 15 (see FIG. 1B) is omitted.

As shown in FIG. 5A, the second drive unit 20 of the plurality of actuators 501a is configured as follows. The second stators 21 are connected to each other. The moving directions of the second movers 23 of the plurality of actuators 501a are parallel to each other.

As shown in FIG. 5D, the mover connection portion 550 is rotatable with respect to each of the first mover 13 and the second mover 23. The movable element connecting portion 550 may be configured to be bendable at a position between the first movable element 13 and the second movable element 23, similarly to the movable element connecting portion 350 (see FIG. 3A). It may be configured as impossible. As shown in FIG. 5D, the stator connection portion 30 may be shared by a plurality of actuators 501a, or may be separately provided for each of the plurality of actuators 501a (not shown).

When a plurality of actuators 501a are provided, the mover connecting portion 550 may function as the stator connecting portion 30. More specifically, the mover connection portion 550 is a first stator so that the second stator 21 can move with respect to the first stator 11 via the first mover 13 and the second mover 23. 11 and the second stator 21 are connected. Therefore, for example, even if the stator connecting portion 30 shown in FIG. 5D is not provided, the first stator 11 and the second stator 21 are connected by the mover connecting portion 550. For example, in the example shown in FIG. 14, the mover connecting portion 550 and the stator connecting portion 30 are also used.

(Operation)
The differences in the operation of the actuator device 501 shown in FIG. 5D of the present embodiment with respect to the operation of the actuator 301a shown in FIG. 3A are as follows. In the first actuator 501a1, the first mover 13 moves to the X1b side, and the second mover 23 moves to the X2b side. Further, in the second actuator 501a2, the first mover 13 moves to the X1a side (opposite to the movement of the first mover 13 of the first actuator 501a1), and the second mover 23 moves to the X2a side (second actuator 501a2). Moves to the opposite side of the movement of the second actuator 23). Then, the second stator 21 rotates toward R2a.

In the actuator device 501, the second stator 21 is moved (for example, rotated) with respect to the first stator 11 by driving a plurality of actuators 501a. Therefore, in the actuator device 501, the surface for generating a force can be widened as compared with the case where only one actuator 501a is provided. Therefore, the second stator 21 is moved with a larger force with respect to the first stator 11 as compared with the case where the second stator 21 is moved with respect to the first stator 11 by driving only one actuator 501a. Can be done. Therefore, as a result of reducing the required driving force of each of the first drive unit 10 and the second drive unit 20, each actuator 501a can be further miniaturized. A part of the actuators 501a among the plurality of actuators 501a may be driven by the other actuators 501a.

(Effect of Fourth Invention)
The effects of the actuator device 501 shown in FIG. 5A are as follows.

[Structure 4] The actuator device 501 includes a plurality of actuators 501a. A plurality of first stators 11 are connected to each other.

According to the above [configuration 4], when a plurality of actuators 501a are provided, the actuator device 501 can be downsized as compared with the case where the plurality of first stators 11 are not connected to each other.

(Sixth Embodiment)
The difference between the actuator device 601 of the sixth embodiment and the actuator device 501 of the fifth embodiment (see FIG. 5D) will be described with reference to FIG. In the actuator device 501 shown in FIG. 5D, the second stators 21 of the plurality of actuators 501a are connected to each other. On the other hand, as shown in FIG. 6, in the actuator device 601 of the present embodiment, the second stators 21 of the plurality of actuators 501a are not connected to each other. Therefore, the second stator 21 of the first actuator 501a1 and the second stator 21 of the second actuator 501a2 can be moved (for example, rotated) in different directions.

(7th Embodiment)
The difference between the actuator device 701 of the seventh embodiment and the actuator device 501 of the fifth embodiment (see FIG. 5A) will be described with reference to FIGS. 7A and 7B.

As shown in FIG. 7A, the actuator device 701 includes three actuators 501a. The actuator device 701 includes a first actuator 501a1, a second actuator 501a2, and a third actuator 501a3. The directions of the actuators 501a from the first stator 11 to the second mover 23 are different from each other.

The first stator 11 of each actuator 501a shares the yoke 711a. The yoke 711a is configured to allow the magnetic flux of each actuator 501a (see magnetic flux line M) to pass through. The first stator 11 of each actuator 501a may be integrated with each other or may be connected to each other via a member (not shown) capable of passing magnetic flux. The yoke 711a is columnar. The yoke 711a extends in the longitudinal direction (for example, the X1 direction) of the first stator 11. The yoke 711a includes a hole 711a1 (more specifically, the inner surface of the hole). The hole 711a1 is formed in the central portion of the yoke 711a. The "central portion of the yoke 711a" is the central portion of the yoke 711a seen from the longitudinal direction (for example, the X1 direction) of the first stator 11. The hole 711a1 extends in the longitudinal direction (for example, the X1 direction) of the first stator 11. Since magnetic flux (see magnetic flux line M) does not pass through the central portion of the yoke 711a, the magnetic force can be secured even if the hole 711a1 is provided in the central portion of the yoke 711a. By forming the hole 711a1 in the yoke 711a, the weight of the yoke 711a can be reduced. Further, for example, by configuring the actuator device 701 so that a person or the like can enter the hole 711a1, the actuator device 701 can be used for a powered suit or the like. When viewed from the X1 direction, the yoke 711a has a triangular shape (including a substantially triangular shape) in the example shown in FIG. 7A, may have a polygonal shape other than a triangle (including a substantially triangular shape), and has a circular shape (substantially circular shape). Includes).

(Details of magnetic flux)
FIG. 7B shows an actuator device 701B in which the yokes 711aB of the first stator 11 of each actuator 501a are not connected to each other. In the electric actuator 501a, a propulsive force is obtained by the interaction of magnetic flux between the first stator 11 and the first mover 13. In the actuator device 701B, the magnetic flux of the first actuator 501a1 passes through the first stator 11 and the first mover 13 of the first actuator 501a1 (see magnetic flux line M), and passes through the second actuator 501a2 and the third actuator 501a3. No. Here, in order to make the actuator 501a as small as possible, it is necessary to make the yoke 711aB as small (thin) as possible. However, if the yoke 711aB is too thin, magnetic saturation occurs, so that the force generated by the actuator 501a (the force that can be generated) decreases. On the other hand, when trying to secure the force generated by the actuator 501a, the yoke 711aB becomes large (miniaturization is restricted). Therefore, as shown in FIG. 7A, in the actuator device 701, the first stator 11 of each actuator 501a shares the yoke 711a. Therefore, the magnetic flux of the first actuator 501a1 passes through the first stator 11 (yoke 711a) of the actuator 501a (the second actuator 501a2 and the third actuator 501a3) different from the first actuator 501a1. As a result, magnetic saturation can be reduced as compared with the case where the yoke 711aB is provided for each first stator 11 of each actuator 501a as shown in FIG. 7B. Therefore, the yoke 711a shown in FIG. 7A can be miniaturized, and the force generated by the actuator 501a can be secured.

When the yoke 711a of the first stator 11 of each actuator 501a is shared, the second stator 21 (see FIG. 5A) may be configured in the same manner as the first stator 11, and may be configured in the same manner as the first stator 11. The configuration may be different from that of the child 11. As a modification, as shown in FIG. 7B, the yokes 711aB of the first stator 11 may not be connected to each other.

(Effect of the fifth invention)
The effects of the actuator device 701 shown in FIG. 7A are as follows.

[Structure 5-1] Each of the plurality of first movers 13 is configured to be driven by an electromagnetic force with respect to the first stator 11. The plurality of first stators 11 share the yoke 711a.

[Structure 5-2] The yoke 711a is columnar and includes a hole 711a1 formed in the central portion of the yoke 711a.

The actuator device 701 includes the above [configuration 5-1]. Therefore, the magnetic flux passing through the first stator 11 and the first mover 13 of a certain actuator 501a (for example, the first actuator 501a1) passes through the first stator 11 of another actuator 501a (for example, the second actuator 501a2). Can be done. Therefore, the yoke 711a can be miniaturized as compared with the case where each of the plurality of actuators 501a has an individual yoke 711aB (see FIG. 7B). Therefore, the actuator device 701 can be made smaller. Further, the yoke 711a can be further reduced in weight by the hole 711a1 of the above [Structure 5-2]. Therefore, the actuator device 701 can be made lighter.

(8th Embodiment)
With reference to FIGS. 8A to 8D, the difference between the actuator device 801 of the eighth embodiment and the actuator device 501 of the fifth embodiment shown mainly in FIG. 5A will be described. The arrangement of the plurality of actuators 501a of the actuator device 801 of the present embodiment shown in FIG. 8A is different from the arrangement of the plurality of actuators 501a of the actuator device 501 of the fifth embodiment.

As shown in FIG. 8B, each of the first movers 13 of the plurality of actuators 501a is arranged in the area B surrounded by the plurality of first stators 11. The region B may be a region surrounded by three first stators 11 or may be a region surrounded by four first stators 11 as shown in FIG. 8C, and may be surrounded by five or more first stators 11. It may be a region (not shown) or a region sandwiched between two first stators 11 (not shown). When viewed from the X1 direction, the plurality of first stators 11 forming the region B are arranged in a C shape in the example shown in FIG. 8B, arranged in a square shape in the example shown in FIG. 8C, and have other shapes. It may be arranged. The plurality of first stators 11 forming the region B may be directly connected (integrally formed) or indirectly (via a member).

By arranging the first mover 13 in the area B, the first mover 13 is not exposed to the outside of the first stator 11, or the exposure can be suppressed. As a result, it is possible to prevent an object outside the first stator 11 from interfering with the first stator 11. For example, it is possible to prevent an object outside the first stator 11 from being caught in the first stator 11 or being sandwiched between a member other than the first stator 11 and the first stator 11. Further, as a result of the first mover 13 being arranged in the area B, a portion (driving part) for moving the first mover 13 with respect to the first stator 11 is covered with a plurality of first stators 11. Or it can be covered roughly. Therefore, the dustproof property and the waterproof property of the driving portion of the first mover 13 with respect to the first stator 11 can be improved. As a result, the first drive unit 10 can be easily protected, and each actuator 501a can be easily protected. In addition to the first stator 11, an object (covering portion) that covers the first mover 13 may be provided. Even when the cover portion is provided, the cover portion can be reduced by arranging the first mover 13 in the area B.

When the first mover 13 is arranged in the area B surrounded by the first stator 11, the second mover is placed in the area surrounded by the second stator 21 as shown in FIG. 8A. 23 may or may not be arranged. Further, FIG. 8D shows a bent state of the actuator device 801. In FIG. 8D, the third actuator 501a3 (see FIG. 8A) is omitted.

(Effect of the sixth invention)
The effects of the actuator device 801 shown in FIG. 8B are as follows.

[Structure 6] Each of the plurality of first stators 13 is arranged in the area B surrounded by the plurality of first stators 11.

According to the above [Structure 6], the first mover 13 can be prevented from being exposed to the outside of the first stator 11, or can be made difficult to be exposed. Therefore, the object (covering portion) that covers the first stator 13 does not have to be provided separately from the first stator 11, or the covering portion can be reduced. Therefore, the actuator device 801 can be further miniaturized.

(9th Embodiment)
With reference to FIGS. 9A and 9B, the difference between the actuator device 901 of the ninth embodiment and the actuator device 501 of the fifth embodiment (see FIG. 5A) will be described.

As shown in FIG. 9A, the actuator device 901 includes a plurality of actuators 501a. In the example shown in FIG. 9A, the actuator device 901 includes six devices similar to the actuator device 501 of the fifth embodiment, and 12 actuators 501a. The number of actuators 501a included in the actuator device 901 may be 11 or less or 13 or more. Of the plurality of actuators 501a constituting the actuator device 901, at least a part of the actuators 501a may form an integrally configured device (such as a device similar to the actuator device 501 of the fifth embodiment). Each of the plurality of actuators 501a constituting the actuator device 901 may be provided separately (not shown). As the number of actuators 501a constituting the actuator device 901 is increased, the surface for generating the force can be widened and a large force can be obtained. On the other hand, as the number of actuators 501a is increased, the actuator device 901 becomes larger. Therefore, a configuration including a large number of actuators 501a is easy to use for a large machine or the like. Specifically, in the above-mentioned "large machine or the like", specifically, the outer shape of the system in which the actuator device 901 is provided is relatively large with respect to the size (thickness) of the permanent magnets constituting one first drive unit 10. Things and so on.

As shown in FIG. 9B, the plurality of first movers 13 are arranged (arranged) so as to be arranged in a circumferential shape. The plurality of first movers 13 are arranged so as to be arranged in a circumferential shape when viewed from the X1 direction. The above-mentioned "circumferential shape" may be a circumferential shape (including a substantially circumferential shape), an elliptical circumference shape (including a substantially elliptical circumference shape), or a polygonal shape. The actuator device 701 shown in FIG. 7A and the actuator device 801 shown in FIG. 8B are also arranged so that a plurality of first movers 13 are arranged in a circumferential shape. As shown in FIG. 9B, similarly to the plurality of first movers 13, the plurality of first stators 11 are also arranged so as to be arranged in a circumferential shape. In the example shown in FIG. 9B, when viewed from the X1 direction, the plurality of first stators 11 are arranged at positions intersecting the virtual line L extending radially from the center position C of the actuator device 901. The first stator 11 is arranged radially, so to speak. As shown in FIG. 9A, the first mover 13 of each actuator 501a is arranged parallel to or substantially parallel to each other (the same applies to the first stator 11). The second stator 21 and the second mover 23 of each actuator 501a may be configured (arranged) in the same manner as the first stator 11 and the first mover 13 of each actuator 501a, and are configured in the same manner. It does not have to be.

(Effect of the seventh invention)
The effects of the actuator device 901 shown in FIG. 9B are as follows.

[Structure 7] The plurality of first movers 13 are arranged so as to be arranged in a circumferential shape.

According to the above [Structure 7], the size (outer shape) of the entire plurality of first movers 13 can be reduced as compared with the case where the first movers 13 of each actuator 501a are arranged so as to be arranged in a straight line. Therefore, the actuator device 901 can be miniaturized.

(10th Embodiment)
With reference to FIGS. 10A and 10B, the differences between the actuator device 1001 of the tenth embodiment and the actuator device 501 of the fifth embodiment (see FIG. 5A) will be described. The stator connection portion 1030 shown in FIG. 10A is different from the stator connection portion 30 shown in FIG. 5A. In addition, in FIG. 10A and FIG. 10B, the range of the stator connecting portion 1030 is shown by surrounding the stator connecting portion 1030 with a two-dot chain line.

The stator connecting portion 1030 connects the second stator 21 to the first stator 11 shown in FIG. 10A so as to be linearly movable. The stator connecting portion 1030 connects the second stator 21 to the first stator 11 so as to be movable in, for example, the X1 direction. The stator connection portion 1030 may be provided with a slidable link, or may be made of an elastic member (spring, rubber, or the like). In the actuator device 1001, the first stator 11 and the second stator 21 are sliding pairs. The stator connecting portion 1030 connects the second stator 21 to the first stator 11 so as to be rotatable and movable, similarly to the stator connecting portion 30 of the first embodiment. The rotating shaft A of the stator connecting portion 1030 may be provided on each of the first stator 11 side and the second stator 21 side, or only one may be provided (the stator connecting portion 30 in FIG. 1A). (See), may be provided in 3 or more (not shown).

When the stator connecting portion 1030 connects the second stator 21 to the first stator 11 so as to be linearly movable and rotatable, the first stator 11 and the second stator 21 slide. It becomes paired pair and rotating paired pair. In this case, the degree of freedom of the second stator 21 with respect to the first stator 11 is higher than that of the case where the second stator 21 can only move linearly or only rotate with respect to the first stator 11. The degree is high. Therefore, an indirect force (for example, stator connection portion 1030, mover connection portion 550) is applied to the second stator 21 in a direction in which the second stator 21 cannot move with respect to the first stator 11. Damage (for example, destruction) can be suppressed. Further, it is easy to reproduce, for example, an animal joint by using the actuator device 1001. The rotation shaft A may not be provided. More specifically, the stator connecting portion 1030 may connect the second stator 21 to the first stator 11 so as to be linearly movable and non-rotatable.

(Operation)
The differences in the operation of the actuator device 1001 of the present embodiment with respect to the operation of the actuator device 501 (see FIG. 5A) of the fifth embodiment are as follows. As shown in FIG. 10B, the first mover 13 moves to the X1a side. At this time, if the first stator 13 is fixed and considered, the first stator 11 will move to the X1b side. Therefore, the first stator 11 moves toward the X1b side with respect to the second stator 21 (away from the second stator 21). As a result, the actuator device 1001 is stretched. Here, the distance between the first mover 13 and the second mover 23 is constant. The actuator device 1001 contracts due to an operation opposite to the above operation. Similarly, when the second mover 23 moves in the X2 direction, the second stator 21 moves in the X2 direction with respect to the first stator 11, and the actuator device 1001 expands and contracts.

(11th Embodiment)
With reference to FIG. 11, the difference between the actuator device 1101 of the eleventh embodiment and the actuator device 1001 of the tenth embodiment (see FIG. 10A) will be described.

The actuator device 1101 is configured to be able to regulate the rotation of the second stator 21 with respect to the first stator 11. Specifically, the first stator 11 and the second stator 21 are sandwiched between the two first stators 13 to regulate the rotation of the second stator 21 with respect to the first stator 11. .. By restricting the rotation of the second stator 21 with respect to the first stator 11, it becomes easy to hold the position of the second stator 21 with respect to the first stator 11.

(Operation)
The differences in the operation of the actuator device 1101 with respect to the operation of the actuator device 1001 (see FIG. 10A) of the tenth embodiment are as follows. The first mover 13 moves from the first stator 11 to the side (X1a side) toward the stator connection portion 1030. The second mover 23 moves from the stator connection portion 1030 to the side toward the second stator 21 (X2b side). At this time, since the X1 direction and the X2 direction are the same direction, the first mover 13 and the second mover 23 move in the same direction. This operation is performed by the first actuator 501a1 and the second actuator 501a2. Then, the first stator 11 and the second stator 21 (and the stator connecting portion 1030) are sandwiched between the two first stators 13, so that the second stator 21 with respect to the first stator 11 Rotation is regulated. In this way, the rotation of the second stator 21 with respect to the first stator 11 can be regulated by using the two first stators 13. Therefore, in order to regulate the rotation of the second stator 21 with respect to the first stator 11, the actuator device 1101 is smaller than the case where a member different from the first drive unit 10 (or the second drive unit 20) is used. Can be changed.

The first stator 11 and the second stator 21 (and the stator connection portion 1030) are sandwiched between the two second movers 23 by the operation opposite to the above. Also in this case, the rotation of the second stator 21 with respect to the first stator 11 is restricted. Further, at least one rotation shaft A of the stator connection portion 1030 is provided. When the restriction on the rotation of the second stator 21 with respect to the first stator 11 is lifted, the second stator 21 can rotate with respect to the first stator 11 (for example, the actuator device 501 shown in FIG. 5A). Similarly).

(12th Embodiment)
With reference to FIGS. 12A to 12C, the differences between the actuator device 1201A and the like of the twelfth embodiment and the actuator device 501 of the fifth embodiment (see FIG. 5A) will be described.

The actuator device 1201A (see FIG. 12A) is configured as follows. As shown in FIG. 12A, the first stator 11 (stator integrally or connected to each other) of the first actuator 501a1 and the second actuator 501a2 is referred to as the first stator 1211. In the first stator 1211, the X1 direction of the second actuator 501a2 is tilted with respect to the X1 direction of the first actuator 501a1 (the moving direction of the first mover 13). The two first movers 13 sandwiching the first stator 1211 are inclined (not arranged in parallel) with each other. In the example shown in FIG. 12A, the width of the first stator 1211 in the Z direction becomes wider toward the X1b side. In the example shown in FIG. 12A, in the initial state, the X1 direction is tilted with respect to the X2 direction in each of the first actuator 501a1 and the second actuator 501a2.

In the actuator device 1201A, in at least a part of the actuators 501a among the plurality of actuators 501a, the first mover 13 and the second mover 23 can be arranged so as to be inclined (not aligned with each other). As a result, for example, the second stator 21 may easily rotate with respect to the first stator 11. Further, depending on the arrangement of objects around the actuator device 1201A (mounting requirements), it may be necessary to provide an inclination between the two first movers 13 sandwiching the first stator 11. In such a case. Actuator device 1201A can be used.

The differences between the actuator device 1201A and the actuator device 1201B of the modified example shown in FIG. 12B are as follows. The width of the first stator 1211 in the Z direction becomes narrower toward the X1b side.

The differences between the actuator device 1201A (see FIG. 12A) and the actuator device 1201C of the modified example shown in FIG. 12C are as follows. In the initial state, in the first actuator 501a1, the X1 direction and the X2 direction are the same direction, and in the second actuator 501a2, the X1 direction is inclined with respect to the X2 direction.

(13th Embodiment)
With reference to FIG. 13, the difference between the actuator device 1301 of the thirteenth embodiment and the actuator device 501 of the fifth embodiment (see FIG. 5A) will be described. The magnitudes (forces generated) of the plurality of actuators 501a provided in the actuator device 1301 are not uniform. For example, in the example shown in FIG. 13, the size of the first actuator 501a1 is different from the size of the second actuator 501a2 (it is non-uniform) and smaller than that of the second actuator 501a2.

For example, the force required to be generated by the actuator 501a may differ for each actuator 501a depending on the direction of gravity (own weight) acting on the actuator device 1301 and the range of motion of the stator connection portion 30. Further, for example, the mounting spaces of the plurality of actuators 501a may be different (non-uniform) from each other. In such a case, the actuator device 1301 having different sizes of the plurality of actuators 501a can be used. In the same way that the sizes of the plurality of actuators 501a are different, the sizes of the first drive unit 10 and the second drive unit 20 may be different.

(14th Embodiment)
With reference to FIG. 14, the difference between the actuator device 1401 of the 14th embodiment and the actuator device 501 of the 5th embodiment (see FIG. 5A) and the like will be described. The actuator device 1401 includes, for example, three actuators 501a (not necessarily three). The actuator device 1401 is used for a robot that imitates an animal. For example, the actuator device 1401 can be used to drive a bird's wing (wing) or a fish fin (not shown). Further, the actuator device 1401 may be used for a morphing blade (deformable blade) (not shown) or the like. The actuator device 1401 may be used for a device that imitates an animal joint, an arm, or the like.

(Modification example)
The above embodiment may be variously modified. For example, the components of different embodiments may be combined. For example, the arrangement and shape of each component may be changed. For example, the number of components may be changed, and some of the components may not be provided. For example, fixing or connecting components may be direct or indirect. For example, what has been described as a plurality of components different from each other may be regarded as one member or part. For example, what has been described as one member or part may be provided separately for a plurality of different members or parts.

For example, the type of joint (linearly movable, rotationally movable, twistable), the number of actuators 501a, the difference in the direction and size of a plurality of actuators 501a, and the direction between the first drive unit 10 and the second drive unit 20. And the difference in size may be changed in various ways. For example, the first drive unit 10 (first stator 11 and first mover 13) and the second drive unit 20 (second stator 21 and second mover 23) in the above description may be read as replacements. The matters described as relating to the first drive unit 10 may be applied to the second drive unit 20 (and vice versa). The mover transmission unit 40 (see FIG. 1A) and the mover connection unit 350 (may be the mover connection unit 550) may be combined. Specifically, for example, as shown in FIG. 1A, the first mover 13 can contact the mover transmission unit 40, and as shown in FIG. 3A, the second mover 23 is connected to the mover connection unit 350. May be done.

Although various embodiments have been described above with reference to the drawings, it goes without saying that the present invention is not limited to such examples. It is clear that a person skilled in the art can come up with various modifications or modifications within the scope of the claims, which naturally belong to the technical scope of the present invention. Understood. Further, each component in the above-described embodiment may be arbitrarily combined as long as the gist of the invention is not deviated.

Note that this application is based on the Japanese patent application (Japanese Patent Application No. 2018-166284) filed on September 5, 2018, the contents of which are incorporated herein by reference.

1a, 201a, 301a, 401a, 501a

Actuator

11, 1211 1st stator 13 1st mover 21 2nd stator 23

2nd mover

30, 1030

Stator connection

350, 550

Movable connection

501, 601 701, 701B, 801, 801B, 901, 1001, 1101, 1201A, 1201B, 1201C, 1301, 1401 Actuator device 711a York B area

Claims

With the first stator,
A first mover movably attached to the first stator and driven with respect to the first stator,
With the second stator,
A second mover movably attached to the second stator and driven with respect to the second stator,
A stator connecting portion that connects the first stator and the second stator so that the second stator can move with respect to the first stator.
With
When the first stator is driven with respect to the first stator, the first stator moves the second stator with respect to the first stator.
The second stator moves the first stator with respect to the second stator when driven with respect to the second stator.
Actuator.
The actuator according to claim 1.
The stator connecting portion connects the first stator and the second stator to the first stator so that the second stator can rotate.
Actuator.
The actuator according to claim 1.
A movable element connecting portion for connecting the first movable element and the second movable element is provided so that a force can be transmitted between the first movable element and the second movable element.
Actuator.
The actuator according to claim 1 is provided with a plurality of the actuators.
A plurality of the first stators are connected to each other,
Actuator device.
The actuator device according to claim 4.
Each of the plurality of first movers is configured to be driven by an electromagnetic force with respect to the first stator.
The plurality of first stators share a yoke and
The yoke is columnar and has a hole formed in the center of the yoke.
Actuator device.
The actuator device according to claim 4.
Each of the plurality of first movers is arranged in an area surrounded by the plurality of first stators.
Actuator device.
The actuator device according to claim 4.
The plurality of first movers are arranged so as to be arranged in a circumferential shape.
Actuator device.