WO2021110317A3 - Gas quality optimization for enhanced co2 drive laser performance - Google Patents

Gas quality optimization for enhanced co2 drive laser performance Download PDF

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Publication number
WO2021110317A3
WO2021110317A3 PCT/EP2020/079455 EP2020079455W WO2021110317A3 WO 2021110317 A3 WO2021110317 A3 WO 2021110317A3 EP 2020079455 W EP2020079455 W EP 2020079455W WO 2021110317 A3 WO2021110317 A3 WO 2021110317A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
catalyst
gas laser
coupled
gas
Prior art date
Application number
PCT/EP2020/079455
Other languages
French (fr)
Other versions
WO2021110317A2 (en
Inventor
Fei Liu
Zhuangxiong HUANG
Han Xia
Umesh Prasad GOMES
Lukasz Urbanski
Igor Vladimirovich FOMENKOV
Yin TAO
Original Assignee
Asml Netherlands B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands B.V. filed Critical Asml Netherlands B.V.
Priority to CN202080084189.0A priority Critical patent/CN114788101A/en
Priority to KR1020227018794A priority patent/KR20220106142A/en
Publication of WO2021110317A2 publication Critical patent/WO2021110317A2/en
Publication of WO2021110317A3 publication Critical patent/WO2021110317A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lasers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

A power amplifier includes a gas laser chamber, a gas laser power source, a catalyst chamber, a feedback apparatus, and a processor. The gas laser chamber is configured to house a flowing gas mixture. The gas laser power source is coupled to the gas laser chamber and is configured to supply energy to the flowing gas mixture to output a laser beam. The catalyst chamber is coupled to the gas laser chamber and includes a catalyst configured to reoxidize dissociated molecules in the flowing gas mixture. The feedback apparatus is coupled to the gas laser chamber and/or the laser beam and is configured to measure a characteristic of the power amplifier. The processor is coupled to the catalyst chamber and the feedback apparatus. The processor is configured to adjust exposure of the flowing gas mixture to the catalyst in the catalyst chamber based on the measured characteristic.
PCT/EP2020/079455 2019-12-03 2020-10-20 Gas quality optimization for enhanced co2 drive laser performance WO2021110317A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202080084189.0A CN114788101A (en) 2019-12-03 2020-10-20 For enhancing CO2Gas quality optimization of drive laser performance
KR1020227018794A KR20220106142A (en) 2019-12-03 2020-10-20 Optimizing gas quality to improve the performance of CO2 drive lasers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962942789P 2019-12-03 2019-12-03
US62/942,789 2019-12-03

Publications (2)

Publication Number Publication Date
WO2021110317A2 WO2021110317A2 (en) 2021-06-10
WO2021110317A3 true WO2021110317A3 (en) 2021-07-22

Family

ID=72964708

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2020/079455 WO2021110317A2 (en) 2019-12-03 2020-10-20 Gas quality optimization for enhanced co2 drive laser performance

Country Status (4)

Country Link
KR (1) KR20220106142A (en)
CN (1) CN114788101A (en)
TW (1) TW202139548A (en)
WO (1) WO2021110317A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117791288B (en) * 2024-02-27 2024-05-07 深圳市智鼎自动化技术有限公司 Method for stabilizing energy and direction of laser light path

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102889A (en) * 1989-09-18 1991-04-30 Toshiba Corp Carbon dioxide laser device
US20120087388A1 (en) * 2010-10-08 2012-04-12 Cohn David B Catalyst Module for High Repetition Rate CO2 Lasers
US20150222083A1 (en) * 2014-01-31 2015-08-06 Asml Netherlands B.V. Catalytic conversion of an optical amplifier gas medium

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102889A (en) * 1989-09-18 1991-04-30 Toshiba Corp Carbon dioxide laser device
US20120087388A1 (en) * 2010-10-08 2012-04-12 Cohn David B Catalyst Module for High Repetition Rate CO2 Lasers
US20150222083A1 (en) * 2014-01-31 2015-08-06 Asml Netherlands B.V. Catalytic conversion of an optical amplifier gas medium

Also Published As

Publication number Publication date
WO2021110317A2 (en) 2021-06-10
CN114788101A (en) 2022-07-22
KR20220106142A (en) 2022-07-28
TW202139548A (en) 2021-10-16

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