WO2021089551A1 - Système de mesure de position - Google Patents

Système de mesure de position Download PDF

Info

Publication number
WO2021089551A1
WO2021089551A1 PCT/EP2020/080828 EP2020080828W WO2021089551A1 WO 2021089551 A1 WO2021089551 A1 WO 2021089551A1 EP 2020080828 W EP2020080828 W EP 2020080828W WO 2021089551 A1 WO2021089551 A1 WO 2021089551A1
Authority
WO
WIPO (PCT)
Prior art keywords
permanent magnet
measuring section
magnetic field
measuring system
section
Prior art date
Application number
PCT/EP2020/080828
Other languages
German (de)
English (en)
Inventor
Werner Wallrafen
Original Assignee
Vitesco Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vitesco Technologies GmbH filed Critical Vitesco Technologies GmbH
Publication of WO2021089551A1 publication Critical patent/WO2021089551A1/fr

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/40Position sensors comprising arrangements for concentrating or redirecting magnetic flux

Definitions

  • the present invention relates to a position measuring system, comprising a permanent magnet and a magnetic field sensor arranged movably along a measuring section running laterally next to the permanent magnet, in order to be able to determine a position of the magnetic field sensor along the measuring section using a direction of the magnetic field determined by means of the magnetic field sensor.
  • the determination of the position of the magnetic field sensor or a component provided with the magnetic field sensor can be provided along a straight measuring section provided.
  • z. B. a curved measuring section can be provided, for. B. a circular arc curved measuring section.
  • the function of such a "magnetic" position measuring system is based on the fact that the magnetic field of a permanent magnet is location-dependent and thus a direction of the magnetic field determined for a specific location by means of a magnetic field sensor is a representative value for the corresponding position (of the magnetic field sensor relative to the permanent magnet) represents or can be inferred from the result of a measurement of the direction of the magnetic field on this position. It goes without saying that the position, the movability and the movement of the magnetic field sensor along the measuring section are to be understood here and also within the scope of the invention as the relative position or relative mobility or relative movement of the magnetic field sensor relative to the permanent magnet.
  • the disadvantage of the position measuring systems known from the prior art is that they are more or less susceptible to an impairment of the measurement result due to any possible in the installation environment magnetic interference fields occurring in the system.
  • known systems often have the disadvantage that, due to the properties of a magnetic field, which are predetermined in principle, the dependency of the magnetic field of the permanent magnet on the position of the magnetic field sensor along the measurement path is caused by the construction (e.g. through the shape and magnetization of the permanent magnet, and the course of the Measuring distance relative to the permanent magnet) can be influenced, but cannot be specified as desired.
  • Another disadvantage of known systems is the sensitivity of the measurement to mechanical tolerances such. B. Manufacturing and assembly tolerances and mechanical play. In particular, changes in the position of the magnetic field sensor caused by play at right angles to the direction of the magnetic field to be measured cause considerable measurement uncertainty.
  • the invention is intended to enable a position measuring system of the type mentioned at the outset that is less susceptible to interference and in which the dependence of the magnetic field on the position along the measuring section can be specified more flexibly.
  • the position measuring system according to the invention is characterized in that it furthermore has (at least) one ferromagnetic flux guiding piece, which extends below or above the measuring section in the form of a plate on the one hand in the direction of the measuring section and following at least part of the measuring section and on the other hand in the lateral direction.
  • the (at least one) ferromagnetic flux guide piece can advantageously at least partially screen any magnetic interference fields that may occur. Therefore, the influence of interference fields on the measurement result is reduced.
  • the shielding effect depends on the spatial arrangement and extent of the ferromagnetic material and can thus be advantageously adapted to the specific application through the design. The shielding effect proves to be particularly favorable if ferromagnetic flux guide pieces extending below and above the measuring section are attached.
  • the terms used here in the description of the position measuring system to define relative spatial arrangements and spatial directions, such as B. "below”, “below”, “above”, “above”, “vertical”, “laterally” or “lateral”, “horizontal” serve only to simplify the description of the position measuring system.
  • the terms define, so to speak, a spatial coordinate system of the position measuring system as such, but were chosen arbitrarily insofar as, ultimately, only in the situation where the position measuring system is used, for. B. determines where is up and where is down.
  • the (at least one) ferromagnetic flux guide piece can be used to influence and thus modify the dependency of the direction of the magnetic field of the permanent magnet on the position of the magnetic field sensor along the measurement path.
  • the dependence of the magnetic field on the position of the magnetic field sensor can be influenced not only by the shape and magnetization of the permanent magnet and the course of the measuring path relative to the permanent magnet, but also advantageously by the specific arrangement and shape of the flux guide (s).
  • linearization means that the relationship between the direction of the magnetic field (or the corresponding sensor signal) on the one hand and the position to be determined on the other hand can be described more precisely by a relatively simple mathematical function, in particular a linear function, than without the inventive use of a or several flux guide pieces would be the case.
  • Yet another advantage of the invention is that a dependence of the direction of the magnetic field on, which is relatively insensitive with regard to any tolerances the position of the magnetic field sensor can be achieved.
  • mechanical play of the magnetic field sensor with regard to its arrangement on the measuring section and / or when it is guided along the measuring section can be advantageously compensated.
  • the measuring section runs laterally next to the (at least one) permanent magnet along the permanent magnet.
  • the measuring section is provided to run in a straight line.
  • a non-rectilinear measuring section can also be provided, in particular z. B. a curved measuring section, z. B. a circular arc curved measuring section.
  • a curved measuring section can, for. B. correspond to an arc angle of at least 20 °, in particular at least 40 ° and / or a maximum of 180 °, in particular a maximum of 120 °.
  • the course of the measuring section can in this case, in particular, for. B. parallel (i.e.
  • the magnetic field sensor retains its orientation with respect to the (local) orientation of the measuring section during its movement along the measuring section (i.e. relative to the permanent magnet).
  • the permanent magnet is designed as an annularly closed body.
  • the measuring section can also run in a closed ring laterally next to the permanent magnet along the permanent magnet.
  • closed, concentric courses of the permanent magnet and the measuring section which are curved in the shape of an arc of a circle can be provided, so that the course of the measuring section corresponds to an arc angle of 360 °.
  • the magnetic field sensor z. B. along a laterally next to the two permanent magnets (that is, viewed in the lateral direction between the two permanent magnets) along both permanent magnets can be arranged movable measuring section.
  • the magnetic field sensors are provided, in particular z. B. at least two magnetic field sensors, both of which are arranged movably along the measuring section running laterally next to the (at least one) permanent magnet along the same, but offset from one another in the course of the measuring section. In this case, a position along the measurement path can be determined using the multiple magnetic fields (measured by multiple magnetic field sensors).
  • the permanent magnet is formed from a piece of a hard magnetic material, in particular, for. B. an alloy containing iron (z. B. ferrite) and z. B. cobalt and / or nickel.
  • the permanent magnet z. B. be formed from a composite material, such as. B. a plastic matrix with embedded particles of magnetic material. The latter magnets can, for. B. be produced by pressing or spraying.
  • the permanent magnet is designed as an elongated profile.
  • the permanent magnet has a uniform cross-section (profile cross-section) over its length (profile).
  • profile cross-section can in particular, for. B. a rectangular, z. B. approximately square, or z. B. have an approximately trapezoidal shape.
  • a profile axis of the profile runs in a straight line.
  • the permanent magnet can, for. B. a prismatic, e.g. B. have cuboid shape.
  • a profile axis of the profile is curved.
  • a profile axis curved in the shape of a circular arc can be provided.
  • the permanent magnet is designed as an elongated profile and the measuring section running laterally next to the permanent magnet along the same runs parallel to a profile axis of the profile.
  • parallel should be understood independently of whether the profile axis and the measuring section both run in a straight line or both run in a curved manner.
  • the profile axis and the measuring section both run in a straight line, laterally spaced from one another, parallel to one another, or that the profile axis and the measuring section z. B. with respective curvatures, laterally spaced from each other, run parallel to each other (for example on respective arcs of two concentric circles).
  • the permanent magnet is designed as an elongated body with a cross section that varies over its length (course).
  • cross-section is to be understood in such a way that the cross-section is determined by its shape (cross-sectional shape) as well as its size
  • Cross-sectional area is determined.
  • a cross-section that varies over the length of the permanent magnet can result due to a variation in the cross-sectional shape and / or a variation in the cross-sectional area content.
  • the permanent magnet is designed as an elongated body with a uniform (not varying) cross-sectional area over its length.
  • the permanent magnet is designed as an elongated body with a cross-sectional shape that varies over its length.
  • z For this purpose, it can be provided that the cross section has the shape of a square (z. B. shape of a trapezoid), in which the orientation of a side of the square facing the measuring section varies over the length of the permanent magnet.
  • the mentioned side of the square runs vertically at a central point along the length of the permanent magnet (and the cross-section there is at least approximately rectangular, for example), but increases with increasing distance from the central point runs obliquely (with respect to the vertical).
  • the mentioned side of the quadrilateral extends at an angle with respect to the vertical which varies monotonically, in particular strictly monotonically, in particular proportionally to the position in the course of this length over the course of the length of the permanent magnet.
  • the angle with respect to the vertical varies overall (over the full length of the permanent magnet) by an angular amount of at least 10 °, in particular at least 30 ° or at least 60 °.
  • this angular amount is a maximum of 120 °, in particular a maximum of 90 °.
  • the cross-section of the permanent magnet has a uniform (not varying) cross-sectional area over the length of the same.
  • said square is a trapezoid in which two parallel trapezoid sides run at least approximately in the lateral direction of the position measuring system and one side of the trapezoid facing away from the measuring section runs at least approximately in the vertical direction of the position measuring system.
  • the permanent magnet is designed as an annular (z. B. circular) closed body, wherein the measuring path z. B. also ring-shaped (z. B. circular ring) closed radially outside of the permanent magnet.
  • an annularly closed permanent magnet requires the configuration described above, in which "the mentioned side of the quadrangle runs vertically at a central point along the length of the permanent magnet (and the cross-section there, for example, is at least approximately rectangular). , but with increasing distance from the middle point runs increasingly obliquely (with respect to the vertical) ", a modification.
  • a modified configuration provides that said side of the quadrilateral at (at least) a certain first point in the course of the permanent magnet runs vertically (and the cross-section there, for example, is at least approximately rectangular) and with increasing distance from this first point to (at least) a second point runs increasingly obliquely (with respect to the vertical), but after each such point is exceeded In the second place the side of the square is again decreasing diagonally (with respect to the vertical).
  • the configuration described above requires a modification in which "the mentioned side of the quadrangle extends at an angle with respect to the vertical which is monotonous, in particular strictly monotonous, in particular proportional, over the length of the permanent magnet to the position in the course of this length ", whereby in a preferred development” the angle with respect to the vertical varies here overall (over the full length of the permanent magnet) by an angular amount of at least 10 °, in particular at least 30 ° or at least 60 ° ".
  • a modified embodiment provides that the mentioned side of the quadrilateral extends at an angle with respect to the vertical that is monotonous in sections, in particular strictly monotonous, in particular proportional to the course of the circumference of the permanent magnet Position varies over the course of this circumference, at least a portion of the circumference with a monotonic increase and at least a portion of the circumference with a monotonic decrease is provided, in a preferred development the angle with respect to the vertical over the full circumference of the permanent magnet and / or each of the mentioned Sections varied by an angular amount of at least 10 °, in particular at least 30 ° or at least 60 ° (and varied, for example, by a maximum of 120 °, in particular by a maximum of 90 °).
  • the permanent magnet is magnetized homogeneously, in this case the Permanent magnet, for example, designed as an elongated profile and, in particular, can be magnetized orthogonally to a profile axis of the profile (e.g. vertically).
  • a magnetization direction oriented at least approximately orthogonally to a course of the permanent magnet is preferably provided, in particular z.
  • Homogeneous magnetization in the direction of the profile axis of the profile, or generally in the direction of the length of the permanent magnet, should not, however, be excluded within the scope of the invention.
  • the arrangement and / or shape of the flux guide piece (s), viewed over the length of the permanent magnet is so uneven that as a result, the dependence of the magnetic field on the position of the magnetic field sensor along the measurement path and thus the measuring system characteristic is significantly modified, or that this dependency is even caused in the first place.
  • the permanent magnet is magnetized homogeneously with a magnetization direction oriented essentially orthogonally to a course of the permanent magnet, in particular with an essentially vertically oriented magnetization direction, with a lower and an upper flux guide being provided, which extend laterally over the entire course of the measuring section Viewed in direction, each extend up to the permanent magnet and lie against the permanent magnet (and e.g. end flush with the permanent magnet), and each at one point in the course of the measuring section, viewed in a lateral direction, up to the measuring section or beyond the measuring section extend and have a varying lateral extent over at least part of the course of the measuring section.
  • the contours (viewed from above or below) of the two flux guide pieces can in particular, for. B. run mirror images of each other, based on a mirror plane extending vertically in a central region of the measuring section.
  • a longitudinal center line of the permanent magnet can be straight or curved.
  • the permanent magnet is magnetized inhomogeneously, wherein in this case too the permanent magnet can be designed, for example, as an elongated profile, and where in particular, for. B. a "helical" along a profile axis of the profile, or more generally along the length of the permanent magnet, varying magnetization can be provided.
  • Such a helical variation can in particular be provided such that a (local) direction of magnetization depends essentially exclusively on the position along the profile axis of the profile (generally: along the length of the permanent magnet).
  • an inhomogeneous magnetization of the permanent magnet it is preferably at least approximately orthogonal to a course of the permanent magnet oriented and in the course of the permanent magnet varying direction of magnetization provided.
  • each of two flux guide pieces arranged below or above the measuring section can each be designed as a plate, which extends below or above the measuring section on the one hand in the direction of the measuring section and here the measuring section over its entire length and on the other hand in the lateral direction with constant extension ( e.g. plate width).
  • the inhomogeneous (e.g. helical) magnetization there is advantageously a high shielding effect with regard to interference fields and, furthermore, a certain quantitative modification of the measuring system characteristics can advantageously be achieved by amplifying and homogenizing the magnetic field in the area of the measuring section.
  • the arrangement and / or shape of the flux guide piece (s) over the length of the permanent magnet is uneven, in order to modify the dependency of the magnetic field on the position of the magnetic field sensor along the measurement section modify the measuring system characteristics in a desired way (e.g. linearization).
  • a permanent magnet which is designed as an elongated (e.g. linear) profile and is magnetized inhomogeneously, orthogonally to its profile axis, "helically", a qualitatively simple and quantitative result is obtained along a measurement section that runs parallel to the profile axis Relatively strong dependence of the magnetic field on the position along the measuring section.
  • the inventive use of one or more flux guide pieces can then, for. B. serve primarily to shield interference fields.
  • the measuring system characteristics can advantageously be modified (e.g. linearized) through a targeted non-uniformity of the arrangement and / or shape of the flux guide piece (s) considered over the length of the permanent magnet.
  • the flux guide or z. B. each of two flux guide pieces arranged below or above the measuring section can each be designed as a plate that extends below or above the measuring section on the one hand in the direction of the measuring section and here the measuring section z. B. following over the entire length and on the other hand in the lateral direction with uneven extension (z. B. plate width).
  • the permanent magnet is inhomogeneously magnetized with a magnetization direction oriented essentially orthogonally to a course of the permanent magnet and varying in the course of the permanent magnet, a lower and an upper flux guide being provided, which are viewed in the lateral direction over the entire course of the measuring section on the one hand extend up to the permanent magnet and bear against the permanent magnet and on the other hand each extend up to the measuring section or beyond the measuring section.
  • the permanent magnet can here, for. B. be designed as an elongated body with a varying cross-section over its length, in particular wherein the cross-section has the shape of a square, in which the orientation of a side of the square facing the measuring section varies over the length of the permanent magnet.
  • the direction of magnetization which varies in the course of the permanent magnet, can be provided as a ("helical") rotation of the direction of magnetization, with z. B. can result in a twist angle which is at least 10 °, in particular at least 20 °. On the other hand, it is sufficient in many cases if this angle of rotation is a maximum of 120 °, in particular a maximum of 90 °.
  • a longitudinal center line of the permanent magnet can be straight or curved.
  • the permanent magnet can be designed as an annularly closed body (e.g. profile).
  • the configurations described above with homogeneous or inhomogeneous magnetization can advantageously be provided if, with regard to the terminology, it is noted that “along the length (of the permanent magnet)” then means “along the circumference” and “a full length (of the Permanent magnets) "then z. B. "a full 360 ° circumference / revolution” can mean, and the restriction is observed that a magnetization (in amount and direction) at a certain point after progressing along the Must be reproduced every 360 ° (at the latest). The term “in the lateral direction” is then to be understood as “in the radial direction”.
  • a periodically changing direction of magnetization is provided along the circumference, with only one period or several periods (e.g. 2, 3, 4 or more periods) of a circumferential angle-dependent curve viewed over the full circumference (360 °) the direction of magnetization can be provided.
  • the position measuring system has (at least) one lower ferromagnetic flux guiding piece, which extends below the measuring section in the form of a plate on the one hand in the direction of the measuring section and following at least part of the measuring section and on the other hand in a lateral direction, and (at least) one of the position measuring system upper ferromagnetic flux guiding piece, which extends above the measuring section in the form of a plate on the one hand in the direction of the measuring section and following at least part of the measuring section and on the other hand in the lateral direction.
  • this description can be related to one or more or all of these flux guide pieces in the case of the presence of several flow guide pieces, for example a lower and an upper flow guide piece as mentioned above.
  • the flux guide piece is formed from a soft magnetic material, in particular a metal or a metal alloy.
  • the material of the flux guide piece it can in particular be e.g. B. iron or a metal alloy containing iron (z. B. iron-nickel alloy) act.
  • the flux guide piece is designed as a solid sheet (“flux guide sheet”), in particular as a sheet of uniform thickness.
  • Suitable sheets can, for. B. be designed or manufactured as a stamped sheet.
  • a thickness (or a thickness averaged over a sheet metal surface) is at least 0.05 times, in particular at least 0.1 times, a (possibly maximum) extension of the Permanent magnets in the vertical direction, and / or this thickness is a maximum of 0.5 times, in particular a maximum of 0.4 times this extension.
  • the flux guiding piece has the shape of a flat plate, a plate plane on the one hand being able to extend at least approximately parallel to the measuring section (below or above the same) and on the other hand in the lateral direction, in particular at least approximately in the horizontal direction.
  • the flux guiding piece extends at least at one point in the course of the measurement path as far as the permanent magnet when viewed in the lateral direction (e.g. extends horizontally), in particular rests against the permanent magnet.
  • a flux guide arranged below the measuring section with a front edge or with part of its upper flat side rest on the permanent magnet whereas a flux guide arranged above the measurement section can rest with a front edge or with part of its lower flat side on the permanent magnet.
  • a flat contact of the (plate-shaped extending) flux guide piece on a corresponding contact surface of the permanent magnet is preferably provided.
  • the contact surface can, for. B. be designed as a flat surface.
  • the contact surface can, for. B. represent a lower or an upper end surface of the permanent magnet, in which case it is preferred that the flux guide piece in question is in full contact with this contact surface.
  • the contact surface can, for. B. be oriented horizontally.
  • the flux guiding piece extends at least at one point in the course of the measuring section viewed in the lateral direction up to the measuring section or beyond the measuring section.
  • the flux guiding piece extends over the entire course of the measuring section viewed in the lateral direction up to the measuring section or beyond the measuring section.
  • this z. B. be provided a flux guide with a rectangular contour.
  • annular (z. B. circular) closed measuring section this can be, for. B. a flux guide with a uniformly wide annular or with a circular contour can be provided.
  • the flux guide piece extends as far as the permanent magnet and rests on the permanent magnet in the entire course of the measuring section viewed in the lateral direction, and on the other hand extends to the measuring section or beyond the measuring section.
  • the flux guide piece has a varying lateral extent over at least part of the course of the measuring section.
  • the part of the flux guide piece facing away from the permanent magnet varies, whereas the part of the flux guide piece facing the permanent magnet has a uniform lateral extension and z. B. with an end face or (preferably) a part of the flat side rests on the permanent magnet.
  • the flux guiding piece has a varying lateral extent over the entire course of the measuring section. In this case too, only the lateral extent of the part of the flux guide piece facing away from the permanent magnet preferably varies. In the case of a rectilinear measuring section, this z. B. be provided a flux guide with a trapezoidal contour.
  • the permanent magnet can be designed as a ring-shaped (for example circular ring-shaped) body (for example profile) running in a closed manner.
  • the above-described configurations of the flux guide piece can advantageously be provided, in particular, for. B. also with (at least) one annularly closed flux guide.
  • the restriction that the cross-section of the flux guide must be reproduced at a certain point after progressing along the circumference (at the latest) every 360 °.
  • the term “in the lateral direction” is then to be understood as “in the radial direction”.
  • the restriction is e.g. B. fulfilled when the or each flux guide has a uniform cross section over the circumference.
  • the flux guide piece has a non-uniform cross-section in the course of the circumference (in particular, for example, a non-uniform lateral or radial extension, e.g. on its (radially outer) side facing the measuring section).
  • a periodically changing radial extension of the flux guide piece is provided along the circumference, with only one extending over the full circumference (360 °) of the system Period or several periods (for example 2, 3, 4 or more periods) of a circumferential angle-dependent course of this radial extension can be provided.
  • the magnetic field is measured at the location of the magnetic field sensor to determine a direction of the magnetic field, in order to determine the position of the magnetic field sensor along the measuring section next to the permanent magnet based on the determination of this direction of the magnetic field.
  • the magnetic field sensor is designed to provide (at least) one analog sensor signal (e.g. voltage signal).
  • one analog sensor signal e.g. voltage signal
  • the magnetic field sensor is designed to provide (at least) one digital sensor signal (data signal).
  • magnetic field sensor is to be understood broadly in the sense of the invention insofar as it is usually neither necessary nor expedient for this measurement to completely cover the magnetic field vector at the location of the magnetic field sensor, i. H. in terms of amount and direction.
  • the magnetic field sensor is designed to measure at least two magnetic field components of the magnetic field and to provide a sensor signal that is dependent on the direction of the magnetic field.
  • the latter sensor signal can in particular, for. B. be representative of an angle or angle of rotation by which the direction of the magnetic field deviates from a direction defined by the magnetic field sensor or is rotated.
  • Such magnetic field sensors are commercially available in diverse designs and can advantageously be used in the invention.
  • the magnetic field sensor is designed as a magnetoresistive sensor, e.g. B. as a so-called XMR sensor, so z. B. as AMR ("anisotropic magneto-resistive") sensor, GMR ("giant magneto-resistive") sensor or TMR ("tunneling magneto-resistive") sensor.
  • the Magnetic field sensor z. B. as a Hall sensor such as in particular z. B. a 2D Hall sensor or 3D Hall sensor.
  • the magnetic field sensor is designed to transmit a sensor signal (e.g. analogue sensor signal) representative of an angle of rotation by which the direction of the magnetic field is rotated from a direction defined by the magnetic field sensor and its arrangement in the position measuring system Voltage signal or digital data signal).
  • a sensor signal e.g. analogue sensor signal
  • the direction defined in this way can in particular be a lateral direction of the position measuring system, i. H. a horizontal direction orthogonal to the direction of the measurement section, wherein as the angle of rotation to be measured in particular z. B. the angle of rotation resulting in a plane orthogonal to the direction of the measurement section can be provided.
  • a magnetic field sensor that measures an angle of rotation of the magnetic field
  • the latter is designed to measure the angle of rotation in an angle of rotation range of at least 10 °, in particular at least 20 ° (e.g. +/- 10 °).
  • the measurable angle of rotation range is a maximum of 90 ° (e.g. +/- 45 °).
  • a position dependency of a rotation angle of the magnetic field determined by means of the measurement of the magnetic field sensor along the measurement path can be described at least in sections by an at least approximately linear function or by an at least approximately sinusoidal function. If the course of the measuring section is not closed in a ring shape, an at least approximately linear function is preferred in many cases, whereas if the measuring section is closed in a ring shape, an at least approximately sinusoidal function is preferred in many cases.
  • the measuring system has a device for characteristic curve compensation, which is designed to modify (at least) one measuring signal generated by the magnetic field sensor as a function of the magnetic field in a predetermined manner and thus a modified sensor signal (for further use or further processing).
  • the device for characteristic curve compensation is formed by a circuit arrangement for signal processing, which is an integral part of the magnetic field sensor.
  • the device for characteristic curve compensation or at least part of a circuit arrangement for signal processing which forms it can also be provided structurally separate from the magnetic field sensor.
  • the position measuring system can have an evaluation device (e.g. program-controlled electronic evaluation device) to which a sensor signal generated by the magnetic field sensor is supplied and which is designed to carry out the characteristic curve compensation (or at least part of it) in order to achieve the modified Provide sensor signal.
  • the device for characteristic curve compensation is designed as a digital signal processing device to which (at least) one sensor signal generated by the magnetic field sensor in the form of a digital data signal is fed.
  • a digital signal processing device to which (at least) one sensor signal generated by the magnetic field sensor in the form of a digital data signal is fed.
  • z Alternatively, it can be provided that (at least) one digital data signal is fed to the digital data processing device, which was obtained by analog / digital conversion from a sensor signal provided in analog form by the magnetic field sensor.
  • the device for characteristic curve compensation is designed to implement a modification of the measuring system characteristic in such a way that the relationship between on the one hand the value (analog or digital) of a signal provided by the magnetic field sensor, such as e.g. B. a sensor signal representative of an angle of rotation of the magnetic field, and on the other hand the position (along the measurement path) can be described more precisely by a relatively simple mathematical function, in particular a linear function (“linearization”), than without the use of characteristic curve compensation would be the case.
  • a linear function linearization
  • the device for characteristic curve compensation is designed to carry out what is known as a "multipoint calibration" in which the relevant sensor signal is within the relevant value range (e.g. +/- 45%) is calibrated (modified) using a compensation curve, this compensation curve being defined for this value range by several interpolation points.
  • the support points or data representing them
  • the device can use the support points or a compensation curve determined therewith to carry out the corresponding compensation (e.g. by multiplying the value represented by the sensor signal with a correction factor resulting from the compensation curve for this value).
  • a tilting of a course of the measuring section with respect to a (horizontal) course of the permanent magnet and / or one or more flux guide pieces is provided in such a way that the (vertical) positions of the two ends of the measuring section differ significantly from one another , so that the measuring section between the two ends is inclined (with respect to the course of the permanent magnet or the flux guide, or with respect to the horizontal) from one end to the other end.
  • a uniform angle of inclination of the inclined course of the measuring section with respect to the course of the permanent magnet and / or a flux guide piece, viewed over the length of the measuring section can be provided.
  • the tilting leads to a corresponding modification of the measuring system characteristics. It has been shown to be particularly advantageous that with the defined tilting the magnetic field sensor can be guided along the measuring section in a more homogeneous field and thus a reduction in the sensitivity of the measuring system characteristics or the measuring accuracy to mechanical tolerances (e.g. play in horizontal and / or vertical direction, as well as e.g. manufacturing and / or assembly tolerances) can be achieved.
  • the above-mentioned angle of inclination (or, in the case of a non-uniform angle of inclination, its value averaged over the course of the measurement section) is at least 1 °, in particular at least 2 °. On the other hand, in many cases a value of a maximum of 10 °, in particular a maximum of 5 °, is appropriate.
  • a position measuring system of the type described here as a linear position measuring device or an angular position measuring device on a linearly adjustable component or rotationally adjustable component of a vehicle is proposed.
  • a rotatable component comes z.
  • FIG. 1 shows a position measuring system according to a first exemplary embodiment
  • FIG. 2 shows a diagram to illustrate an ideal and a real position dependency of the magnetic field using the example of the position measuring system shown in FIG. 1, FIG.
  • FIG. 3 shows a magnetic field sensor that can be used in a position measuring system
  • FIG. 5 shows a representation to illustrate the magnetic field for the position measuring system shown in FIG. 4,
  • FIG. 6 shows a position measuring system according to a further exemplary embodiment
  • FIG. 9 shows a representation to illustrate a characteristic curve compensation in a position measuring system
  • 10 shows a block diagram of a magnetic field sensor of a position measuring system according to an exemplary embodiment
  • FIG. 11 shows a position measuring system according to a further exemplary embodiment, in a top view
  • FIG. 12 shows the position measuring system from FIG. 11 in several cross-sectional views
  • FIG. 13 shows a position measuring system according to a further exemplary embodiment, in a top view
  • FIG. 14 shows the position measuring system from FIG. 11 in several cross-sectional views
  • FIG. 15 shows a position measuring system according to a further exemplary embodiment, in a top view
  • 16 and 17 show exemplary courses of magnetic field angles determined by means of magnetic field sensors in the position measuring system of FIG.
  • FIG. 1 shows a first exemplary embodiment of a position measuring system 10, having a permanent magnet 12 and a magnetic field sensor 16 which is movably arranged along a measuring section 14 running laterally next to the permanent magnet 12.
  • a position of the magnetic field sensor 16 along the measuring section 14 can be determined on the basis of a direction of the magnetic field determined by means of the magnetic field sensor 16. It is irrelevant here whether the permanent magnet is fixedly mounted and the magnetic field sensor is moved in this installation environment in the practical use of the position measuring system in a certain installation environment (technical facility, e.g. vehicle) or, conversely, whether the magnetic field sensor is fixedly mounted and the permanent magnet (including flux guide pieces described below) is moved. In this respect, only the relative position or relative movement of the magnetic field sensor relative to the permanent magnet is important for the measurement.
  • the three arrows 18 drawn in in FIG. 1 illustrate the direction of the respective magnetic field present there for three different positions along the measuring section 14.
  • the permanent magnet 12 is made of a hard magnetic metal alloy and is designed as an elongated profile.
  • the permanent magnet 12 has a uniform cross-section (profile cross-section) of rectangular shape over its length (profile) and is designed with a profile axis running in a straight line.
  • the measuring section 14 running laterally next to the permanent magnet 12 is also provided to run in a straight line in the example shown and here runs parallel to the profile axis of the profile of the permanent magnet 12.
  • the measuring section 14 thus runs parallel to the permanent magnet when viewed in a lateral direction of the position measuring system 10 at a certain distance 12 or its profile axis.
  • the position measuring system 10 is therefore particularly suitable for linear position detection on a component (for example the plunger of an electromechanical actuator or the like) which is arranged displaceably in a technical device (for example a vehicle).
  • a component for example the plunger of an electromechanical actuator or the like
  • a technical device for example a vehicle
  • the permanent magnet 12 is magnetized homogeneously, one direction of magnetization being oriented vertically, i. H. orthogonal to the profile axis and orthogonal to the lateral direction of the position measuring system 10.
  • the position measuring system 10 also has two ferromagnetic flux guiding pieces 20-1, 20-2, namely a lower ferromagnetic flux guiding piece 20-1, which follows a plate-like shape below the measuring section 14 on the one hand in the direction of the measuring section 14 and the measuring section 14 and on the other hand in lateral direction (lateral direction), and an upper ferromagnetic flux guide piece 20-2, which extends above the measuring section 14 in the form of a plate on the one hand in the direction of the measuring section 14 and the measuring section 14 and on the other hand in the lateral direction.
  • the flux guide pieces 20-1, 20-2 extend on the one hand (on the left in FIG. 1) as far as the permanent magnet 12 and rest there, so that the relevant side edges of the flux guide pieces 20-1, 20- 2 are flush with the permanent magnet 12.
  • the flux guide pieces 20-1, 20-2 viewed in the lateral direction, each extend at one of their longitudinal ends in the course of the measuring section 14 well beyond the measuring section 14, but each have a lateral extent that continuously decreases over the course of the measuring section 14, so that the flux guide pieces 20-1, 20-2 end at their respective other longitudinal end in the area of the permanent magnet 12 and thus Do not protrude beyond the permanent magnet 12 in the lateral direction.
  • the contours (viewed from above or below) of the two flux guide pieces 20-1, 20-2 run in mirror image to one another, based on a mirror plane extending vertically in the center of the measuring section 14.
  • the named dependency can advantageously be brought about and even qualitatively adjusted to a certain extent in the desired manner.
  • the right-hand side edges of the flux guide pieces 20-1, 20-2 in FIG. 1, for example curved and / or angled courses could be provided in such a way that the dependence of the magnetic field on the position along the measuring section 14 is modified accordingly.
  • FIG. 2 shows an exemplary dependence of the direction of the magnetic field on the position, shown here for the exemplary embodiment from FIG. 1.
  • the solid line in FIG. 2 shows the real position dependency of the angle "ang”, whereas the dashed line in FIG. 2 represents a dependency that is mostly ideal in practice, in which the angle "ang” is linear with the position " pos "changed.
  • the position dependency of the magnetic field can be advantageously influenced in the invention, for example in order to achieve the ideal dependency explained above or at least approximate.
  • FIG. 3 shows again in isolation the magnetic field sensor 16 used in the exemplary embodiment of FIG. 1, which provides a sensor signal which is dependent on the direction of the magnetic field and which is representative of the angle or angle of rotation "ang" by which the direction of the magnetic field passes through the direction defined by the magnetic field sensor is rotated.
  • Fig. 3 also illustrates the angle measurement range of the magnetic field sensor 16, which in this example is z. B. extends over a range of +/- 45 °.
  • the angle of rotation “ang” to be measured lies in a plane orthogonal to the direction of the measuring section 14.
  • Fig. 4 shows a further embodiment of a position measuring system 10a, which, as can be seen from the following explanation, differs in two aspects from the example of Fig. 1: On the one hand, the position measuring system 10a has an inhomogeneously magnetized permanent magnet, and on the other hand, are uniform shaped flux guide pieces used.
  • the position measuring system 10a shown in FIG. 4 has, as in the example of FIG. 1, a permanent magnet 12a designed as an elongated profile with a rectangular profile cross-section and with a straight profile axis, to which a measuring section 14a runs laterally offset along which a magnetic field sensor 16a can be moved.
  • the permanent magnet 12a is, however, inhomogeneously magnetized, whereby in the example shown a magnetization is provided which is oriented orthogonally to the profile axis of the permanent magnet 12a and varies “helically” along the profile axis.
  • a (local) direction of magnetization depends only on the position along the profile axis of the permanent magnet 12a.
  • the position measuring system 10a also comprises a lower ferromagnetic flux guide piece 20-1, which extends in a plate-like manner below a measuring section 14a on the one hand in the direction of and following the measuring section 14a and on the other hand in the lateral direction, and an upper one ferromagnetic flux guide piece 20a-2, which extends over the measuring section 14a in a plate-like manner on the one hand in the direction of the measuring section 14a and following it and on the other hand in the lateral direction.
  • a lower ferromagnetic flux guide piece 20-1 which extends in a plate-like manner below a measuring section 14a on the one hand in the direction of and following the measuring section 14a and on the other hand in the lateral direction
  • an upper one ferromagnetic flux guide piece 20a-2 which extends over the measuring section 14a in a plate-like manner on the one hand in the direction of the measuring section 14a and following it and on the other hand in the lateral direction.
  • the arrangement and shape of the flux guide pieces 20a-1, 20a-2, viewed over the length of the permanent magnet 12a, is uniform to the extent that the flux guide pieces 20a-1, 20a-2 each extend with a constant extension (plate width) in the lateral direction. extend.
  • there is advantageously a high shielding effect with regard to interference fields and, furthermore, a certain amplification of the magnetic field is advantageously achieved in the area of the measuring section 14a.
  • the flux guide pieces 20a-1, 20a-2 each have a rectangular contour.
  • the arrangement and / or the shape of the flux guide pieces 20a-1, 20a-2, viewed over the length of the permanent magnet 12a, could be modified in order to modify the dependence of the magnetic field on the position of the magnetic field sensor 16a along the measuring section 14a accomplish.
  • the straight courses of the right-hand side edges of the flux guide pieces 20-1, 20-2 in FIG. 4 could be replaced by curved and / or angled courses.
  • FIG. 5 exemplarily illustrates an embodiment modified compared to the examples in FIGS. 1 and 4, which consists in the fact that the course of the measuring section is tilted with respect to a horizontal course of one or more flux guide pieces, in such a way that the vertical positions of the two ends of the Noticeably differ from each other.
  • This modification can be seen in FIG.
  • a reduction in the sensitivity of the measurement system characteristics and thus the measurement accuracy to mechanical play and mechanical manufacturing and assembly tolerances can advantageously be achieved, since the magnetic field sensor 16a is moved in an area in which a more homogeneous magnetic field prevails.
  • FIG. 6 shows a further exemplary embodiment of a position measuring system 10b, which differs from the position measuring system 10a shown in FIG. 4 in that a profile axis of a permanent magnet 12b and, accordingly, a measuring section 14b running parallel to it are not straight, but curved in a circular arc.
  • the arc angle a shown in FIG. 6 is approximately 45 °, but can also assume other values adapted to the specific application. In particular, deviating from FIG. 6, an arc angle ⁇ of 360 ° could also be provided.
  • the permanent magnet would be designed as a circularly closed profile, in which the measuring section can also extend in particular also circularly closed around the permanent magnet (radially outside the same), with a "helical” magnetization varying along the profile axis as it progresses along the Circumference (at the latest) must be reproduced every 360 ° (exemplary embodiments for this are explained below with reference to FIGS. 11 and 12 as well as FIGS. 13 and 14).
  • the position measuring system 10b is therefore suitable, for. B. for detecting the angle of rotation on a rotatably mounted component (e.g. rotary shaft on a turbocharger flap or on a valve flap) of a technical device (e.g. vehicle).
  • a rotatably mounted component e.g. rotary shaft on a turbocharger flap or on a valve flap
  • a technical device e.g. vehicle.
  • the arrangement formed from permanent magnet 12b and flux guide pieces 20b-1, 20b-2 can be attached to a relevant rotating shaft so that it rotates with a rotation of the rotating shaft, whereas a magnetic field sensor 16b is fixed stationary at the corresponding lateral distance can.
  • the magnetic field sensor 16b then moves relative to the permanent magnet 12b along the measuring section 14b.
  • the position measuring system 10 described with reference to FIG. 1 can also be curved according to a modification, in particular curved in the shape of a circular arc, be it with an arc angle of less than 360 ° or with an arc angle of 360 ° (ie closed in a ring).
  • the possible details and configurations described for the position measuring system 10 (or 10a) with reference to the length of the permanent magnet or the measuring section and with reference to the lateral direction can also be used for curved modifications.
  • the length is then curved and therefore there is no longer a uniform lateral direction of the system, but the lateral direction varies over the length (the lateral direction then runs orthogonally at each point to the orientation of the longitudinal direction at this point and can then also be used as a radial direction are designated).
  • FIG. 7 shows a further exemplary embodiment of a position measuring system 10c, which differs from the position measuring system 10a shown in FIG. 4 in that a permanent magnet 12c is designed as an elongated body with a cross section that varies over its length (course).
  • the permanent magnet 12c is designed with a cross-sectional area that is uniform (not varying) over its length.
  • the cross-sectional shape varies.
  • the cross section has the shape of a square, in which the orientation of a side of the square facing the measuring section 14c varies over the length of the permanent magnet 12c. Said side of the square runs vertically in the middle of the course of the length of the permanent magnet, and the cross-section there is rectangular. However, as the distance from the center increases, the side runs increasingly obliquely with respect to the vertical.
  • the side of the square runs at an angle with respect to the vertical which is strictly monotonous and in particular z. B. varies proportionally to the position in the course of this length.
  • the angle with respect to the vertical varies overall (over the full length of the permanent magnet 12c) by an angular amount of 90 °.
  • the permanent magnet 12c is magnetized inhomogeneously as in the example of FIG. 4, one being orthogonal to the profile axis of the Permanent magnets 12c oriented, "helically" varying magnetization along the profile axis is provided.
  • the angle by which the magnetization rotates in the course of the permanent magnet 12c is at least approximately equal to that angle (e.g. with a deviation of a maximum of 20 °, in particular a maximum of 10 °) by which the Course of the permanent magnet 12c rotates the orientation of said square side. This is the case in the example of FIG. 7, in which the direction of magnetization rotates by 90 ° in the course of the permanent magnet 12c.
  • FIG. 8 shows a further exemplary embodiment of a position measuring system 10d, which differs from the position measuring system 10c shown in FIG run curved in a circular arc. Otherwise, the example of FIG. 8 corresponds in structure and function to the example of FIG. 7.
  • the position measuring system 10d is therefore suitable (like, for example, the position measuring system 10b shown in FIG. 6), for example, for detecting the angle of rotation on a rotatably mounted component of a technical device (e.g., vehicle).
  • a technical device e.g., vehicle
  • the position measuring system 10d described with reference to FIG. 8 can, according to a modification, be designed in a ring-shaped (for example, circular-ring-shaped) closed manner.
  • a modification z. B. in providing the variation of the cross section and the magnetization shown in Fig. 8 for a first 180 ° partial circumference and inverted for a subsequent second 180 ° partial circumference (so that the cross section and magnetization at the end of the second 180 ° - Circumference correspond to those at the beginning of the first 180 ° partial circumference).
  • a variation in cross section and magnetization such as the variation in cross section and magnetization shown in FIG.
  • ETC. 9 illustrates a characteristic curve compensation which can be optionally used in every position measuring system of the type described here and which serves to modify (at least) one measurement signal generated by the (at least one) magnetic field sensor as a function of the magnetic field in a predetermined manner and thus a modified sensor signal (for further use or further processing).
  • the relative error "err” to be eliminated or at least reduced by means of the characteristic curve compensation can in principle be freely defined as the ratio between the "real" value represented by the sensor signal (e.g. digital value) and a (arbitrary) predetermined one "ideal” value.
  • a value that varies linearly with the position is usually desirable as an ideal value (linearization).
  • a different mathematical function for describing an “ideal” measuring system characteristic could also be desirable in the specific application.
  • the relative error "err” or its position-dependent course “err (pos)” can e.g. B. be determined empirically. Then a z. B. digital representation of this course in a device for characteristic compensation, z. B. a (in particular e.g. program-controlled) digital signal processing device can be stored, in particular as an error curve defined by several interpolation points (see Fig. 9 above), which is then used as a compensation curve (or to determine a compensation curve) during operation of the relevant position measuring system. can be used.
  • each measured value generated by the magnetic field sensor during its magnetic field measurement can then be modified (corrected) using the previously stored support points or a compensation curve resulting therefrom so that the modified value corresponds exactly to the "ideal" value.
  • z. B. each value represented by the original sensor signal can be multiplied by a correction factor resulting from a compensation curve for this value.
  • FIG. 9 shows an exemplary plot of the relative error “err” for a (corrected) sensor signal modified in this way as a function of the normalized position parameter “pos”.
  • the relative error has advantageously been drastically reduced.
  • the characteristic curve compensation is carried out entirely or at least partially by the magnetic field sensor, which in this case is equipped with appropriate electronics, in particular z. B. is equipped with digital signal processing electronics.
  • the characteristic curve compensation can also take place in an evaluation device (e.g. program-controlled electronic) used separately from the magnetic field sensor, to which (at least) one sensor signal generated by the magnetic field sensor (and e.g. representative of an angle of the magnetic field direction) is supplied and which generates the correspondingly modified sensor signal and, if necessary, z. B. further evaluates (depending on the purpose of the position measurement).
  • the magnetic field sensor 16 has two magnetoresistive sensor units 30-1 and 30-2, which are designed to measure two magnetic field components of the magnetic field that are assigned to two orthogonally oriented directions, ie two analog electrical signals "x" and "y” each representing one of these components. provide.
  • the signals x and y are each amplified by means of one of two amplifiers 32-1 and 32-2 and converted into digital signals by means of a respective A / D converter 34-1 or 34-2.
  • the digital signals are fed to an angle calculation unit 36 in which the direction (angle) of the magnetic field is calculated from the two component signals.
  • the angle of the magnetic field calculated by the angle calculation unit 36 is corrected by means of a characteristic curve compensation unit 38, and the angle thus corrected is output via an interface unit 40.
  • the angle calculation unit 36 and the characteristic curve compensation unit 38 can in particular, for. B. implemented as functional parts of a computing unit, which is designed in the form of a program-controlled electronic computing device (z. B. microcontroller).
  • the data required for the characteristic curve compensation can be stored beforehand in a memory unit 42, which the characteristic curve compensation unit 38 accesses when correcting the angle.
  • the magnetic field sensor 16 shown in FIG. 10 is designed to measure two magnetic field components of the magnetic field and to provide therefrom a sensor signal that is dependent on the direction of the magnetic field but is advantageously linearized in this case.
  • FIGS. 11 to 17 show exemplary embodiments of position measuring systems 10e (FIGS. 11 and 12), 10f (FIGS. 13 and 14) and 10g (FIGS. 15 to 17) to illustrate the embodiment of interest within the scope of the invention for certain applications, at which is a ring-shaped, here circularly closed course of a measuring section radially outside of a permanent magnet 12e, 12f or 12g which runs parallel to it and here also circularly closed.
  • Another advantageous common feature of these exemplary embodiments is that both a lower (first) flux guide piece 20e-1, 20f-1 or 20g-1 extending below the measuring section and an upper (second) flux guide piece extending above the measuring section 20e-2, 20f-2 or 20g-2 is provided, these flux guide pieces each terminating radially on the inside flush with an inner circumference of the permanent magnet.
  • 11 and 12 show an embodiment in which the flux guide pieces 20e-1, 20e-2 have a uniform lateral (radial) extension over the entire course (circumference) of the measuring section and, as shown, extend in this radial direction, for example. B. can each extend somewhat radially outward beyond the measuring section.
  • the flux guide pieces 20e-1, 20e-2 are therefore each circular ring-shaped with a uniform width.
  • a direction of magnetization varies over a full circumference (360 °) z. B. at least approximately sinusoidal in a range of +/- 15 ° (deviation from the vertical).
  • a period of a circumferential angle-dependent course of the magnetization direction is provided over the full circumference (360 °).
  • several periods e.g. 2, 3, 4 or more
  • FIG. 13 and 14 show an embodiment in which the flux guide pieces 20f-1, 20f-2, viewed over the course (circumference) of the measuring section, have a non-uniform lateral (radial) extension.
  • B. extend radially outward over part of its circumference slightly beyond the measuring section and over another part of its circumference less far than the measuring section.
  • the dependency of the direction of the magnetic field of the permanent magnet 12f on the position (circumferential position or circumferential angular position) of a magnetic field sensor 16f (Fig.
  • the permanent magnet (12f) could be magnetized homogeneously, in particular with an at least approximately vertically oriented direction of magnetization.
  • FIG. 15 shows an embodiment in which a permanent magnet 12g and flux guide pieces 20g-1, 20g-2 as well as for the example of FIGS. 11 and 12 are designed.
  • the permanent magnet 12g and the flux guide pieces 20g-1, 20g-2 could, however, also be designed differently.
  • two magnetic field sensors 16g-1 and 16g-2 are advantageously used, each of which is movably arranged along the measuring section running laterally (radially) next to the permanent magnet 12g, but in the course of the measuring section by 90 ° to each other are offset.
  • the determination of the position along the measurement section can advantageously be implemented using the magnetic fields measured by the two magnetic field sensors 16g-1 and 16g-2.
  • 16 and 17 show exemplary courses of the angles "ang1" and “ang2" of the magnetic field direction determined by means of the magnetic field sensors 16g-1 and 16g-2 with respect to the vertical as a function of a position (circumferential angular position) along the measuring section.
  • the angle "ang1" varies at least approximately sinusoidally in the example shown, as can be seen from FIG. 16, whereas the angle "ang2" varies at least approximately cosine-shaped as can be seen from FIG.
  • the position can advantageously be determined unambiguously from the two simultaneously determined values of "ang1" and "ang2".
  • the real position dependency of the angles "ang1" and “ang2” can be modified by a suitably adapted shape of the flux guide pieces and / or by using a characteristic curve compensation (as already described above) so that the position dependency is more exact by a desired mathematical function, here.
  • a sine or cosine function is described than would be the case without characteristic curve compensation.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

La présente invention concerne un système de mesure de position (10) comprenant un aimant permanent (12) et un capteur de champ magnétique (16) disposé de manière à pouvoir se déplacer le long d'une section de mesure (14) s'étendant latéralement de manière adjacente à l'aimant permanent (12) et le long de l'aimant permanent (12) pour permettre la détermination d'une position du capteur de champ magnétique (16) le long de la section de mesure (14) sur la base d'une direction du champ magnétique déterminée au moyen du capteur de champ magnétique (16). Le système de mesure de position (10) de l'invention comprend en outre au moins un composant ferromagnétique conducteur de flux (20-1, 20-2) qui s'étend au-dessous ou au-dessus de la section de mesure (14) de manière plane, d'une part dans la direction de la section de mesure (14) et après au moins une partie de la section de mesure (14), et d'autre part dans une direction latérale, pour réduire le sensibilité du système de mesure de position (10) aux interférences en rapport avec des champs d'interférence et pour permettre une spécification plus flexible de la dépendance de la direction du champ magnétique sur la position le long de la section de mesure (14) et de pouvoir réduire les effets néfastes sur la précision de la mesure résultant de tolérances mécaniques ou de n'importe quel jeu mécanique.
PCT/EP2020/080828 2019-11-05 2020-11-03 Système de mesure de position WO2021089551A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019216988.0A DE102019216988A1 (de) 2019-11-05 2019-11-05 Positionsmesssystem
DE102019216988.0 2019-11-05

Publications (1)

Publication Number Publication Date
WO2021089551A1 true WO2021089551A1 (fr) 2021-05-14

Family

ID=73059926

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2020/080828 WO2021089551A1 (fr) 2019-11-05 2020-11-03 Système de mesure de position

Country Status (2)

Country Link
DE (1) DE102019216988A1 (fr)
WO (1) WO2021089551A1 (fr)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0612974A2 (fr) * 1993-02-25 1994-08-31 Siemens Aktiengesellschaft Indicateur magnétique d'angle
DE19910636A1 (de) 1999-03-10 2000-09-14 Inst Mikrostrukturtechnologie Längenmeßsystem, bestehend aus einem oder mehreren magnetischen Maßstäben
DE19926738A1 (de) * 1999-06-11 2000-12-21 Ruf Electronics Gmbh Wegaufnehmer
EP0979988B1 (fr) 1998-08-13 2003-06-25 FESTO AG & Co Procédé de mesure des mouvements linéaires entre aimants et capteurs
EP1989505B1 (fr) 2006-03-02 2010-07-21 Moving Magnet Technologies "M.M.T." Capteur de position a direction d'aimantation variable et procede de realisation
DE102009014880A1 (de) * 2009-03-25 2010-09-30 Paragon Ag Messvorrichtung zur Erfassung der Position eines beweglichen Bauteils
WO2011012511A2 (fr) * 2009-07-28 2011-02-03 Mahle International Gmbh Capteur de position et actionneur linéaire
WO2011135063A2 (fr) 2010-04-30 2011-11-03 Continental Automotive Gmbh Système de mesure de longueur magnétique, procédé de mesure de longueur ainsi que procédé de fabrication d'un système de mesure de longueur magnétique
DE102016102978A1 (de) * 2016-02-19 2017-08-24 Infineon Technologies Ag Magnetischer Positionssensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0686883B2 (ja) * 1990-02-20 1994-11-02 日機装株式会社 軸受監視装置
JP4985730B2 (ja) * 2009-01-29 2012-07-25 株式会社デンソー ストロークセンサおよび回転角センサ
DE102012000939A1 (de) * 2012-01-19 2013-07-25 Robert Bosch Gmbh Sensoreinheit und Verfahren zur Bestimmung einer Wegstrecke

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0612974A2 (fr) * 1993-02-25 1994-08-31 Siemens Aktiengesellschaft Indicateur magnétique d'angle
EP0979988B1 (fr) 1998-08-13 2003-06-25 FESTO AG & Co Procédé de mesure des mouvements linéaires entre aimants et capteurs
DE19910636A1 (de) 1999-03-10 2000-09-14 Inst Mikrostrukturtechnologie Längenmeßsystem, bestehend aus einem oder mehreren magnetischen Maßstäben
DE19926738A1 (de) * 1999-06-11 2000-12-21 Ruf Electronics Gmbh Wegaufnehmer
EP1989505B1 (fr) 2006-03-02 2010-07-21 Moving Magnet Technologies "M.M.T." Capteur de position a direction d'aimantation variable et procede de realisation
US20100231205A1 (en) * 2006-03-02 2010-09-16 Moving Magnet Technologies (Mmt) Position sensor with variable direction of magnetization and method of production
DE102009014880A1 (de) * 2009-03-25 2010-09-30 Paragon Ag Messvorrichtung zur Erfassung der Position eines beweglichen Bauteils
WO2011012511A2 (fr) * 2009-07-28 2011-02-03 Mahle International Gmbh Capteur de position et actionneur linéaire
WO2011135063A2 (fr) 2010-04-30 2011-11-03 Continental Automotive Gmbh Système de mesure de longueur magnétique, procédé de mesure de longueur ainsi que procédé de fabrication d'un système de mesure de longueur magnétique
DE102016102978A1 (de) * 2016-02-19 2017-08-24 Infineon Technologies Ag Magnetischer Positionssensor

Also Published As

Publication number Publication date
DE102019216988A1 (de) 2021-05-06

Similar Documents

Publication Publication Date Title
EP2122303B1 (fr) Configuration et procédé pour la détermination absolue de la position linéaire ou de la position rotative exprimée par un angle
DE69818256T2 (de) Magnetischer positionsgeber
EP2225142B1 (fr) Arrangement de detection de l'angle de direction a mesure absolue
EP2158453B1 (fr) Dispositif de balayage d'une échelle linéaire ou circulaire en un matériau ferromagnétique
EP2553400B1 (fr) Capteur de rotation magnétique
DE102010025170B4 (de) Vorrichtung zum Erzeugen eines Sensorsignals und Verfahren zur Bestimmung der Position eines Gebers
WO2009121193A1 (fr) Ensemble capteur linéaire magnétique
DE112009000497T5 (de) Ursprungspositions-Signaldetektor
DE112010005022T5 (de) Relativwinkel-Detektionsvorrichtung, Drehwinkel-Detektionsvorrichtung, Relativwinkel-Detektionsverfahren und Drehwinkel-Detektionsverfahren
EP2236990A2 (fr) Système de mesure de position/trajectoire
DE10138908B4 (de) Magnetische Erfassungsvorrichtung
WO2015039655A1 (fr) Composant, dispositif et procédé de mesure d'une tension matérielle par magnétostriction
EP2169356B1 (fr) Dispositif de détermination de la position axiale du rotor d'un moteur linéaire
EP2370790A1 (fr) Encodeur magnétique
EP1698861B1 (fr) Procédé et dispositif destinés à la détermination de la position d'au moins un point de mesure dans un champ magnétique permanent
DE102013226887A1 (de) Induktive Sensoranordnung sowie Verfahren zur Detektion der Position wenigstens eines Targets
WO2021089551A1 (fr) Système de mesure de position
DE102021108741A1 (de) Winkelerfassungsvorrichtung, winkelerfassungssystem,parksperrsystem, pedalsystem und magnetfelderzeugungsmodul
EP3583388B1 (fr) Dispositif de détection
DE102019122188A1 (de) Winkelsensorsystem
DE10140710A1 (de) Winkelaufnehmer mit magneto-resistiven Sensorelementen
DE10161541A1 (de) Sensoranordnung und Funktionseinheit mit Sensoranordnung
WO2017194560A1 (fr) Capteur de champ magnétique et procédé pour mesurer un champ magnétique externe
DE102006052692B3 (de) Sensorauswerteanordnung und Verfahren zum Betreiben einer Sensoranordnung
DE29814211U1 (de) Anordnung zur Ermittlung der Position einer sich im wesentlichen linear bewegenden Einrichtung sowie Ventileinrichtung eines Verbrennungsmotors mit einer solchen Anordnung

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20800908

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20800908

Country of ref document: EP

Kind code of ref document: A1