WO2021058989A3 - Gas cell for high harmonics generation, gas cell assembly comprising the gas cell, as well as kit and method to assemble the gas cell assembly - Google Patents

Gas cell for high harmonics generation, gas cell assembly comprising the gas cell, as well as kit and method to assemble the gas cell assembly Download PDF

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Publication number
WO2021058989A3
WO2021058989A3 PCT/HU2020/050028 HU2020050028W WO2021058989A3 WO 2021058989 A3 WO2021058989 A3 WO 2021058989A3 HU 2020050028 W HU2020050028 W HU 2020050028W WO 2021058989 A3 WO2021058989 A3 WO 2021058989A3
Authority
WO
WIPO (PCT)
Prior art keywords
gas cell
gas
cell assembly
assembly
assemble
Prior art date
Application number
PCT/HU2020/050028
Other languages
French (fr)
Other versions
WO2021058989A2 (en
Inventor
Zoltán FILUS
Tamás CSIZMADIA
Miklós FÜLE
Original Assignee
ELI-HU Nonprofit Kft.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ELI-HU Nonprofit Kft. filed Critical ELI-HU Nonprofit Kft.
Priority to EP20851334.1A priority Critical patent/EP3991524A2/en
Publication of WO2021058989A2 publication Critical patent/WO2021058989A2/en
Publication of WO2021058989A3 publication Critical patent/WO2021058989A3/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Abstract

The invention relates to a gas cell (1) for high harmonics generation. Said gas cell (1) comprises a chamber (10) with a gas inlet (13) for introducing gas into the chamber (10), an opening (12) in each of two opposite sides of the chamber (10) in the gas cell (1) for introducing and leading out light, wherein said openings (12) are arranged coaxially. The gas cell (1) is made of a block of a thermally conductive material. At least one cooling passage (14) is formed in said gas cell (1). The invention also relates to a gas cell assembly comprising the gas cell (1), a base element (2) and a closure element (3), as well as to a kit and a method to assemble the gas cell assembly.
PCT/HU2020/050028 2019-06-30 2020-06-30 Gas cell for high harmonics generation, gas cell assembly comprising the gas cell, as well as kit and method to assemble the gas cell assembly WO2021058989A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20851334.1A EP3991524A2 (en) 2019-06-30 2020-06-30 Gas cell for high harmonics generation, gas cell assembly comprising the gas cell, as well as kit and method to assemble the gas cell assembly

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
HUP1900238 2019-06-30
HUP1900238A HU231453B1 (en) 2019-06-30 2019-06-30 Gas cell and arrangement for high harmonic euv generation and method for assembling the gas cell arrangement

Publications (2)

Publication Number Publication Date
WO2021058989A2 WO2021058989A2 (en) 2021-04-01
WO2021058989A3 true WO2021058989A3 (en) 2021-06-03

Family

ID=89992935

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/HU2020/050028 WO2021058989A2 (en) 2019-06-30 2020-06-30 Gas cell for high harmonics generation, gas cell assembly comprising the gas cell, as well as kit and method to assemble the gas cell assembly

Country Status (3)

Country Link
EP (1) EP3991524A2 (en)
HU (1) HU231453B1 (en)
WO (1) WO2021058989A2 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5495335A (en) * 1989-04-05 1996-02-27 Litton Systems, Inc. Ring laser gyroscope with a non-loss inducing mode suppression mechanism
DE4443811A1 (en) * 1994-12-09 1996-06-13 Kuenzli Franz Ag Universal high speed flame spraying burner
US20070182965A1 (en) * 2005-09-28 2007-08-09 Mks Instruments, Inc. Linked extendable gas observation system for infrared absorption spectroscopy
US20140314210A1 (en) * 2013-04-19 2014-10-23 Raytheon Company X-ray cells and other components having gas cells with thermally-induced density gradients
US20150097107A1 (en) * 2012-03-20 2015-04-09 Fst Inc. Apparatus for generating extreme ultraviolet light using plasma
WO2020210787A1 (en) * 2019-04-12 2020-10-15 Kapteyn Murnane Laboratories, Inc. Processor-controlled high harmonic optimization with optimal gas handling

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5495335A (en) * 1989-04-05 1996-02-27 Litton Systems, Inc. Ring laser gyroscope with a non-loss inducing mode suppression mechanism
DE4443811A1 (en) * 1994-12-09 1996-06-13 Kuenzli Franz Ag Universal high speed flame spraying burner
US20070182965A1 (en) * 2005-09-28 2007-08-09 Mks Instruments, Inc. Linked extendable gas observation system for infrared absorption spectroscopy
US20150097107A1 (en) * 2012-03-20 2015-04-09 Fst Inc. Apparatus for generating extreme ultraviolet light using plasma
US20140314210A1 (en) * 2013-04-19 2014-10-23 Raytheon Company X-ray cells and other components having gas cells with thermally-induced density gradients
WO2020210787A1 (en) * 2019-04-12 2020-10-15 Kapteyn Murnane Laboratories, Inc. Processor-controlled high harmonic optimization with optimal gas handling

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FRANK F ET AL: "Invited Review Article: Technology for Attosecond Science", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 83, no. 7, 1 July 2012 (2012-07-01), pages 71101 - 71101, XP012162432, ISSN: 0034-6748, [retrieved on 20120713], DOI: 10.1063/1.4731658 *
YANG YONG ET AL: "Design and operating characteristics of a transient kinetic analysis catalysis reactor system employing in situ transmission Fourier transform infrared", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, vol. 77, no. 9, 29 September 2006 (2006-09-29), pages 94104 - 094104, XP012093274, ISSN: 0034-6748, DOI: 10.1063/1.2349602 *

Also Published As

Publication number Publication date
HUP1900238A1 (en) 2021-01-28
EP3991524A2 (en) 2022-05-04
HU231453B1 (en) 2023-12-28
WO2021058989A2 (en) 2021-04-01

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