WO2021016863A1 - 用于半导体元件的导电浆料及其制备方法和 perc 太阳能电池 - Google Patents

用于半导体元件的导电浆料及其制备方法和 perc 太阳能电池 Download PDF

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WO2021016863A1
WO2021016863A1 PCT/CN2019/098380 CN2019098380W WO2021016863A1 WO 2021016863 A1 WO2021016863 A1 WO 2021016863A1 CN 2019098380 W CN2019098380 W CN 2019098380W WO 2021016863 A1 WO2021016863 A1 WO 2021016863A1
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oxide etchant
conductive paste
solar cell
crystalline silicon
parts
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PCT/CN2019/098380
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English (en)
French (fr)
Inventor
刘小丽
徐诚
李德林
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深圳市首骋新材料科技有限公司
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Priority to CN201980001328.6A priority Critical patent/CN112585765B/zh
Priority to PCT/CN2019/098380 priority patent/WO2021016863A1/zh
Publication of WO2021016863A1 publication Critical patent/WO2021016863A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes

Definitions

  • the invention belongs to the technical field of solar cells, and particularly relates to a conductive paste used for semiconductor elements, a preparation method thereof, and a PERC solar cell.
  • Solar energy is an inexhaustible clean energy source. With the increasing depletion of non-renewable energy sources such as coal and oil, the development and utilization of solar energy has become a major focus.
  • the solar cell developed based on this idea is an important means of using solar energy. At present, the industrialized crystalline silicon solar cell has become a model of solar cell application.
  • the core component of the crystalline silicon solar cell solar cells need to make an electrode on the front and back sides of the solar cell in order to collect and export the current generated under light.
  • the conductive paste is coated on the silicon wafer by screen printing, and the front electrode is formed on the front surface of the silicon wafer by sintering.
  • the front electrode of the sintered crystalline silicon solar cell needs to be firmly attached to the silicon wafer, the grid line is narrow and high, the shading area is small, and it is easy to weld.
  • the conductive paste for the front electrode of the silicon solar cell must be capable of penetrating silicon nitride during the sintering process The ability of the anti-reflection film to form a good ohmic contact with the silicon cell.
  • the common conductive paste on the front of crystalline silicon solar cells is composed of silver powder, glass powder, and organic carrier.
  • the conductive paste is printed on the surface of the cell by screen printing.
  • the glass powder in the conductive paste etches and penetrates the anti-reflection insulating layer on the front or light side of the crystalline silicon solar cell, such as silicon nitride, aluminum oxide, silicon oxide, silicon oxide, or titanium oxide, so that the silver powder and The substrate of the crystalline silicon solar cell contacts to form the front electrode.
  • Passivated Emitter and Rear Cell Passivated Emitter and Rear Cell, referred to as PERC
  • PERC Passivated Emitter and Rear Cell
  • the conversion efficiency of its PERC monocrystalline cells has reached 21.9%, which is significantly higher than the efficiency of conventional polycrystalline cells (about 18.7%), which greatly reduces the production cost of solar cells.
  • PERC technology improves the conversion efficiency by adding a dielectric passivation layer, laser slotting and high square resistance on the back of the battery.
  • the PERC battery maximizes the potential gradient across the PN junction, which allows a more stable flow of electrons, reduces electron recombination, and a higher efficiency level.
  • Conventional crystalline silicon cells are sintered at a temperature of about 780°C to prepare electrodes. Due to the unique structure of PERC monocrystalline cells, the cells are more fragile. They must be sintered at a lower temperature than conventional crystalline silicon cells, and compared to conventional cells.
  • the wafer adds a passivation layer of Al 2 O 3 (see Figure 3 and Figure 4 301), and the front conductive paste must not only have the performance of sintering at a lower temperature, but also have better contact performance with the silicon wafer And better adhesion performance.
  • the traditional front-side conductive paste and the glass powder used cannot etch the anti-reflection insulating layer and passivation layer on the surface of PERC single crystal cells well during low-temperature sintering, and the formed front electrode has high contact resistance with the surface of the silicon chip.
  • the adhesion is low, which affects the photoelectric conversion efficiency and reliability of PERC cells.
  • the technical problem to be solved by the present invention is to provide a conductive paste for semiconductor components and a preparation method thereof, so as to solve the problem that the existing front conductive paste cannot effectively affect the surface of PERC single crystal cells under a low-temperature sintering environment.
  • the passivation layer is etched, which leads to an increase in the resistance value of the front electrode and the surface of the silicon wafer and a decrease in adhesion, which ultimately leads to problems such as low photoelectric conversion efficiency and low reliability of the cell.
  • the present invention also provides a method for manufacturing the front electrode of a PERC crystalline silicon solar cell and a PERC solar cell.
  • a conductive paste for semiconductor components includes the following raw material components:
  • the oxide etchant contains at least Fe 2 O 3 , SiO 2 and Na 2 O;
  • the molar ratio of Fe 2 O 3 to SiO 2 is 0.1:40 to 25:10 ; the molar ratio of Na 2 O to SiO 2 is 0.1:40 ⁇ 10:10.
  • a method for preparing a conductive paste for semiconductor components includes the following steps:
  • Step S01 The oxide etchant raw material components are melted to obtain an oxide etchant melt, and the oxide etchant melt is quenched to obtain oxide etchant particles, which are crushed to obtain a particle size Oxide etchant powder in (0.1 ⁇ 5.0) ⁇ m;
  • Step S02. Place the organic carrier material in an environment of (40 ⁇ 100)°C for mixing treatment to obtain an organic carrier;
  • Step S03. The metal powder, the oxide etchant powder obtained in step S01, and the organic carrier obtained in step S02 are mixed and crushed to obtain a PERC crystalline silicon solar cell front conductive paste.
  • a method for manufacturing the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the conductive paste for the semiconductor element is printed on the surface of the insulating film of the crystalline silicon conductive element by screen printing, followed by drying, sintering, and cooling in sequence to obtain the front electrode of the crystalline silicon solar cell.
  • the front electrode of the PERC crystalline silicon solar cell is the front electrode of the PERC crystalline silicon solar cell as described above.
  • the conductive paste for semiconductor devices provided by the present invention has at least Fe 2 O 3 , SiO 2 , and Na 2 O contained in the oxide etchant, and the oxide etchant contains
  • the molar ratio of Fe 2 O 3 to SiO 2 is 0.1:40 ⁇ 25:10, and the molar ratio of Na 2 O to SiO 2 is 0.1:40 ⁇ 10:10.
  • the oxide etchant When sintered at a temperature lower than 700°C, the oxide etchant exhibits excellent etching performance, so that the oxide etchant can dissolve enough silver during the low-temperature sintering process, and a part of the oxide etchant melt that dissolves silver is used It wets the metal powder and promotes its sintering, and the other part flows to the surface of the PERC crystalline silicon solar cell to react with the anti-reflection layer, which can effectively etch the anti-reflection layer of the PERC crystalline silicon solar cell and dissolve in the oxide during cooling.
  • the silver in the etchant melt is precipitated to form tiny nano-silver particles, so that the metal powder and silicon form a good ohmic contact, which greatly reduces the resistance of the front electrode, and finally obtains a low contact resistance, good conductivity, and strong adhesion Front electrode.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste provided by the invention has simple process conditions, and the obtained front conductive paste has uniform components and good performance, and is suitable for industrial large-scale production.
  • the PERC crystalline silicon solar cell provided by the present invention adopts the above-mentioned PERC crystalline silicon solar cell front electrode structure, the PERC crystalline silicon solar cell structure shows good adhesion, and the silver electrode and the silicon wafer have good ohmic contact, so that The conversion efficiency of solar cells has been improved, and the reliability of PERC crystalline silicon solar cells has also been greatly improved.
  • FIG. 1 is a schematic diagram of the process flow of the method for preparing conductive paste for semiconductor components provided by the present invention
  • FIG. 2 is a schematic diagram of the process flow of the method for manufacturing the front electrode of the PERC crystalline silicon solar cell provided by the present invention
  • FIG. 3 is a schematic diagram of a PERC crystalline silicon semiconductor element with an insulating film and a passivation layer on the surface provided by the present invention printed with the front conductive paste of the present invention;
  • FIG. 4 is a schematic diagram of the PERC crystalline silicon semiconductor device printed with the front and back surface conductive pastes in FIG. 3 after sintering;
  • Figure 5 is a schematic diagram of 180° tensile test
  • 100-crystalline silicon cell 200-P/N junction (phosphorus doped layer); 300-insulating film, 301-Al 2 O 3 passivation layer; 400-printed front conductive paste, 401-metal powder , 402-organic carrier, 403-oxide etchant; 500-printed back silver paste; 600-printed back aluminum paste; 700-front electrode; 800-welding tape; 900-stretching machine; 901-stretching The first fixing bolt of the machine sample; 902-The second fixing bolt of the tensile machine sample; F-the direction of tension.
  • both crystalline silicon and silicon crystal have the same meaning.
  • a conductive paste for semiconductor components includes the following raw material components:
  • the oxide etchant contains at least Fe 2 O 3 , SiO 2 and Na 2 O; based on 100 mole parts of the oxide etchant, the molar ratio of Fe 2 O 3 to SiO 2 is 0.1:40-25:10; the molar ratio of Na 2 O to SiO 2 is 0.1:40-10:10.
  • the oxide etchant includes the following components:
  • the oxide etchant also contains oxides of additional elements, the content of which is 0 to 10.0%.
  • the additive element in the oxide of the additive element is titanium, aluminum, silver, chromium, scandium, copper, niobium, vanadium, tantalum, strontium, bromine, cobalt, hafnium, lanthanum, ytterbium, barium, manganese, nickel, One or two or more of tin, arsenic, zirconium, potassium, thallium, phosphorus, indium, gallium, germanium, zinc, etc.
  • the raw materials of the oxide etchant of the present invention include not only oxides made by chemical methods and oxides obtained after high-temperature treatment, but also carbonates, phosphates, fluorides, etc. containing cations, such as the Li
  • the raw materials of 2 O include Li 2 O and Li 2 CO 3
  • the raw materials Fe 2 O 3 include FeO, FeO 2 , Fe 2 O 3 , Fe 3 O 4 and R x FeO 3, etc., wherein R x FeO 3 R is one of the elements Li, Na, K, Ru, Cs, Be, Mg, Ca, Sr, and Ba, and x in R x is the number of elements; when zinc oxide is used as an oxide of additional elements,
  • the raw material of the oxide of the additive element includes ZnO, Zn 3 (PO 4 ) 2 and the like.
  • the oxide etchant may be crystalline, amorphous, or a mixture of amorphous and crystalline.
  • the oxide etchant includes the following components:
  • the oxide etchant includes the following components:
  • the oxide etchant includes the following components:
  • the oxide etchant includes the following components:
  • the oxide etchant includes the following components:
  • the metal powder is at least one of silver, gold, platinum, copper, iron, nickel, zinc, titanium, cobalt, chromium, aluminum, manganese, palladium, and rhodium.
  • the metal powder is at least one of silver-coated copper, iron, nickel, zinc, titanium, cobalt, chromium, aluminum, and manganese, wherein the thickness of the silver coating layer is (10-50) nm.
  • the metal powder is a mixture of non-silver-coated metal powder and silver-coated metal powder, wherein the weight ratio of the non-silver-coated metal powder to the silver-coated metal powder is 5/ 95 ⁇ 95/5, the non-silver-coated metal powder is at least one of silver, gold, platinum, copper, iron, nickel, zinc, titanium, cobalt, chromium, aluminum, manganese, palladium, and rhodium; silver-coated The metal powder is at least one of copper, iron, nickel, zinc, titanium, cobalt, chromium, aluminum, and manganese, and the thickness of the silver coating layer is (10-200) nm.
  • the organic vehicle in the present invention includes organic solvents, polymers, wetting and dispersing agents, thixotropic agents, and other functional additives.
  • the organic vehicle Based on the weight of the organic vehicle as 100 parts, it includes the following components:
  • the organic solvent is selected from the group consisting of terpineol, ethylene glycol butyl ether acetate, ethylene glycol ethyl ether acetate, lauryl ester, diethylene glycol butyl ether, triethylene glycol butyl ether, tripropylene glycol methyl ether , At least one of high boiling point solvents such as terpenes.
  • the wetting and dispersing agent is selected from fatty acids (oleic acid, stearic acid, etc.), fatty acid amide derivatives (oleic acid amide, stearamide, etc.), fatty acid ester derivatives, polyethylene wax, polyethylene glycol One or more of them are mainly used to help the dispersion of oxide etchant and metal powder in the organic carrier.
  • the thixotropic agent is selected from one or more of hydrogenated castor oil derivatives, polyamide wax, polyurea, and fumed silica, and is mainly used to improve the thixotropy of the paste during the printing process to make the conductive paste.
  • the consistency becomes smaller, which makes it easier to screen print.
  • the cutting is stopped, the consistency increases again to ensure that the front electrode has an excellent aspect ratio.
  • the other functional additives are selected from polymethylphenylsiloxane, polyphenylsiloxane, phthalate esters (such as diethyl phthalate, dibutyl phthalate) Etc.), microcrystalline wax, polydimethylsiloxane, polyvinyl butyral (PVB), polyether polyester modified organosiloxane, alkyl modified organosiloxane, organopolysilazane One or two or more of them.
  • the functional additives can be optionally added as required, such as adding microcrystalline wax to reduce surface tension; adding dibutyl phthalate (DBP) to improve the flexibility of the slurry; adding polyvinyl butyral ( PVB), etc.
  • adding organopolysilazane can improve the printing performance of the paste, making it print a finer secondary grid on a screen with a narrower opening.
  • the added organopolysilazane is 0.1-20 parts by weight.
  • the present invention also provides a method for preparing a conductive paste for semiconductor elements.
  • the method for preparing a conductive paste for a semiconductor element includes the following steps:
  • Step S01 The oxide etchant raw material components are melted to obtain an oxide etchant melt, and the oxide etchant melt is quenched to obtain oxide etchant particles, which are crushed to obtain a particle size Oxide etchant powder in (0.1 ⁇ 5.0) ⁇ m;
  • Step S02. Place the organic carrier material in an environment of (40 ⁇ 100)°C for mixing treatment to obtain an organic carrier;
  • Step S03. The metal powder, the oxide etchant powder obtained in step S01, and the organic carrier obtained in step S02 are mixed and crushed to obtain a PERC crystalline silicon solar cell front conductive paste.
  • the method of melting the raw materials of the oxide etchant is to mix the raw materials of the oxide etchant, heat to (900 ⁇ 1200)°C, keep for (60 ⁇ 180) min, and then perform cooling treatment to obtain oxide etching Granules are placed in (60 ⁇ 80)°C for drying, and then crushed.
  • the oxide etchant powder placed in (80 ⁇ The drying process is performed at 100)°C.
  • the quenching treatment method of the above-mentioned oxide etchant melt can be rapid cooling in deionized water at (5-25)°C, or cooling in flowing air, and the temperature of the air is not higher than 25°C.
  • the preparation method of the conductive paste for semiconductor components of the present invention also has the following alternative methods:
  • the oxide etchant and the metal powder are mixed first to obtain the first mixture, and then the first mixture is mixed with the organic carrier, and the grinding process is performed to obtain the conductive paste for semiconductor devices.
  • the above-mentioned oxide etchant and the organic carrier are mixed to obtain a first mixture, and then metal powder is added to the first mixture, and the mixture is mixed and ground to obtain a conductive material for semiconductor components. Slurry.
  • the metal powder and the organic carrier are first mixed to obtain a first mixture, and then an oxide etchant is added to the first mixture, and the materials are mixed and polished to obtain a conductive paste for semiconductor components material.
  • the second mixture is obtained, and then the first mixture and the second mixture are mixed and subjected to grinding treatment to obtain a conductive paste for semiconductor elements.
  • the conductive paste for semiconductor components obtained by the above preparation method is the PERC crystalline silicon solar cell front surface paste.
  • the present invention also provides a method for manufacturing the front electrode of a PERC crystalline silicon solar cell.
  • the manufacturing method relates to a PERC crystalline silicon semiconductor element with an insulating film and an Al 2 O 3 passivation layer laminated on the surface.
  • the structure of the PERC crystalline silicon semiconductor element is shown in FIG. 3, 100 is a crystalline silicon cell with opposite first and second surfaces, and a P/N junction 200 is stacked on the first surface.
  • An insulating film 300 is stacked on the surface of 200, and an Al 2 O 3 passivation layer 301 is stacked on the surface of the insulating film 300; a back silver paste 500 and an insulating film 300 are printed on the second surface, and the insulating film 300 is stacked on the surface Al 2 O 3 passivation layer 301, and the Al 2 O 3 passivation layer 301 is laminated with a back surface aluminum paste 600, wherein the insulating film 300 and the Al 2 O 3 passivation layer 301, the insulating film 300 may be At least one of a silicon nitride film, a titanium oxide film, an aluminum oxide film, and a silicon oxide film.
  • the manufacturing method of the front electrode of the PERC crystalline silicon solar cell includes the following steps:
  • Step S04. Provide a PERC single crystal cell with an insulating film 300 and an Al 2 O 3 passivation layer 301 stacked on the surface;
  • Step S05 Print the PERC crystalline silicon solar cell front conductive paste 400 (where 401 is a metal powder, 402 is an organic carrier, and 403 is an oxide etchant) as described in any of the above schemes by means of screen printing.
  • 401 is a metal powder
  • 402 is an organic carrier
  • 403 is an oxide etchant
  • Step S06 The crystalline silicon semiconductor element PERC single crystal cell processed in Step S05 is sequentially dried, sintered, and cooled to obtain a PERC crystalline silicon solar cell front electrode 700, as shown in FIG. 4 in detail.
  • the drying temperature is 80-400°C
  • the sintering temperature is not higher than 700°C
  • the cooling condition is natural cooling.
  • the present invention further provides a PERC crystalline silicon solar cell, the front electrode of the PERC crystalline silicon solar cell is the front electrode of the PERC crystalline silicon solar cell described above.
  • a conductive paste for semiconductor components and front electrodes and PERC crystalline silicon solar cells is provided.
  • the total weight of the conductive paste for semiconductor components is calculated as 100 parts, including the raw material components in the following proportions: 88.5 parts of silver powder; 9.0 parts of organic carrier; 2.5 parts of oxide etchant.
  • the oxide etchant based on the total molar amount of the oxide etchant as 100%, it includes the following raw material components:
  • the preparation method of the oxide etchant is as follows: weigh the oxide etchant raw materials according to the above-mentioned molar content and mix them; place the mixed oxide etchant raw materials in a heating furnace and heat to 1000 °C, and kept at 1000 °C for 120 min, to obtain an oxide etchant melt; pour the oxide etchant melt into water at 25° C. to cool to obtain oxide etchant particles; etch the oxide The etchant particles are dried in a drying box at 80°C, then placed in a ball mill for grinding and sieving to obtain oxide etchant powder with a particle size of 0.1 ⁇ 5.0 ⁇ m, and then placed in a drying box to dry at 100°C A dry oxide etchant powder is obtained.
  • the organic carrier based on the total weight of the organic carrier as 100%, it includes the following weight components:
  • the organic carrier contains the following components: 65% of a mixture of terpineol, lauryl esters, and terpenes; ethyl cellulose 10%, methyl silicone oil 5%, rosin resin 15%, and polyamide wax 5% , Organopolysilazane 5%.
  • the preparation method of the organic carrier is as follows: Weigh the organic carrier raw materials according to the above-mentioned ratio, mix and stir at 60° C. for 100 min to obtain the organic carrier.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste includes the following steps:
  • a method for manufacturing the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the PERC crystalline silicon solar cell front conductive paste in Example 1 was printed on the front surface of the PERC monocrystalline silicon solar cell with insulating film and Al 2 O 3 passivation film.
  • the back silver and back aluminum were screen printed, and then sintered at 695°C to obtain the front electrode of PERC crystalline silicon solar cell.
  • a conductive paste for semiconductor components and front electrodes and PERC crystalline silicon solar cells is provided.
  • the total weight of the conductive paste for semiconductor components is calculated as 100 parts, including the raw material components in the following proportions: 88.5 parts of silver powder; 9.0 parts of organic carrier; 2.5 parts of oxide etchant.
  • the oxide etchant based on the total molar amount of the oxide etchant as 100%, it includes the following raw material components:
  • the preparation method of the oxide etchant is as follows: weigh the oxide etchant raw materials according to the above-mentioned molar content and mix them; place the mixed oxide etchant raw materials in a heating furnace and heat to 1000 °C, and kept at 1000 °C for 120 min, to obtain an oxide etchant melt; pour the oxide etchant melt into water at 25° C. to cool to obtain oxide etchant particles; etch the oxide The etchant particles are dried in a drying box at 80°C, then placed in a ball mill for grinding and sieving to obtain oxide etchant powder with a particle size of 0.1 ⁇ 5.0 ⁇ m, and then placed in a drying box to dry at 100°C A dry oxide etchant powder is obtained.
  • the organic carrier based on the total weight of the organic carrier as 100%, it includes the following weight components:
  • the organic carrier contains the following components: 65% of a mixture of terpineol, lauryl esters, and terpenes; ethyl cellulose 10%, methyl silicone oil 5%, rosin resin 15%, and polyamide wax 5% , Organopolysilazane 5%.
  • the preparation method of the organic carrier is as follows: Weigh the organic carrier raw materials according to the above-mentioned ratio, mix and stir at 60° C. for 100 min to obtain the organic carrier.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste includes the following steps:
  • a method for manufacturing the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the PERC crystalline silicon solar cell front conductive paste in Example 2 was printed on the front surface of the PERC monocrystalline silicon solar cell with insulating film and Al 2 O 3 passivation film, and the back of the solar cell was silk-screened.
  • the back silver and back aluminum were screen printed, and then sintered at 695°C to obtain the front electrode of PERC crystalline silicon solar cell.
  • a conductive paste for semiconductor components and front electrodes and PERC crystalline silicon solar cells is provided.
  • the total weight of the conductive paste for semiconductor components is calculated as 100 parts, including the raw material components in the following proportions: 88.5 parts of silver powder; 9.0 parts of organic carrier; 2.5 parts of oxide etchant.
  • the oxide etchant based on the total molar amount of the oxide etchant as 100%, it includes the following raw material components:
  • the preparation method of the oxide etchant is as follows: weigh the oxide etchant raw materials according to the above-mentioned molar content and mix them; place the mixed oxide etchant raw materials in a heating furnace and heat to 1000 °C, and kept at 1000 °C for 120 min, to obtain an oxide etchant melt; pour the oxide etchant melt into water at 25° C. to cool to obtain oxide etchant particles; etch the oxide The etchant particles are dried in a drying box at 80°C, then placed in a ball mill for grinding and sieving to obtain oxide etchant powder with a particle size of 0.1 ⁇ 5.0 ⁇ m, and then placed in a drying box to dry at 100°C A dry oxide etchant powder is obtained.
  • the organic carrier based on the total weight of the organic carrier as 100%, it includes the following weight components:
  • the organic carrier contains the following components: 65% of a mixture of terpineol, lauryl esters, and terpenes; ethyl cellulose 10%, methyl silicone oil 5%, rosin resin 15%, and polyamide wax 5% , Organopolysilazane 5%.
  • the preparation method of the organic carrier is as follows: Weigh the organic carrier raw materials according to the above-mentioned ratio, mix and stir at 60° C. for 100 min to obtain the organic carrier.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste includes the following steps:
  • a method for manufacturing the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the PERC crystalline silicon solar cell front conductive paste in Example 3 was printed on the front of the PERC monocrystalline silicon solar cell with insulating film and Al 2 O 3 passivation film.
  • the back silver and back aluminum were screen printed, and then sintered at 695°C to obtain the front electrode of PERC crystalline silicon solar cell.
  • a conductive paste for semiconductor components and front electrodes and PERC crystalline silicon solar cells is provided.
  • the total weight of the conductive paste for semiconductor components is calculated as 100 parts, including the raw material components in the following proportions: 88.5 parts of silver powder; 9.0 parts of organic carrier; 2.5 parts of oxide etchant.
  • the oxide etchant based on the total molar amount of the oxide etchant as 100%, it includes the following raw material components:
  • the preparation method of the oxide etchant is as follows: weigh the oxide etchant raw materials according to the above-mentioned molar content and mix them; place the mixed oxide etchant raw materials in a heating furnace and heat to 1000 °C, and kept at 1000 °C for 120 min, to obtain an oxide etchant melt; pour the oxide etchant melt into water at 25° C. to cool to obtain oxide etchant particles; etch the oxide The etchant particles are dried in a drying box at 80°C, then placed in a ball mill for grinding and sieving to obtain oxide etchant powder with a particle size of 0.1 ⁇ 5.0 ⁇ m, and then placed in a drying box to dry at 100°C A dry oxide etchant powder is obtained.
  • the organic carrier based on the total weight of the organic carrier as 100%, it includes the following weight components:
  • the organic carrier contains the following components: 65% of a mixture of terpineol, lauryl esters, and terpenes; ethyl cellulose 10%, methyl silicone oil 5%, rosin resin 15%, and polyamide wax 5% , Organopolysilazane 5%.
  • the preparation method of the organic carrier is as follows: Weigh the organic carrier raw materials according to the above-mentioned ratio, mix and stir at 60° C. for 100 min to obtain the organic carrier.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste includes the following steps:
  • a manufacturing method of the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the PERC crystalline silicon solar cell front conductive paste in Example 4 was printed on the front surface of the PERC monocrystalline silicon solar cell with insulating film and Al 2 O 3 passivation film.
  • the back silver and back aluminum were screen printed, and then sintered at 695°C to obtain the front electrode of PERC crystalline silicon solar cell.
  • a conductive paste for semiconductor components and front electrodes and PERC crystalline silicon solar cells is provided.
  • the total weight of the conductive paste for semiconductor components is calculated as 100 parts, including the raw material components in the following proportions: 88.5 parts of silver powder; 9.0 parts of organic carrier; 2.5 parts of oxide etchant.
  • the oxide etchant based on the total molar amount of the oxide etchant as 100%, it includes the following raw material components:
  • the preparation method of the oxide etchant is as follows: weigh the oxide etchant raw materials according to the above-mentioned molar content and mix them; place the mixed oxide etchant raw materials in a heating furnace and heat to 1000 °C, and kept at 1000 °C for 120 min, to obtain an oxide etchant melt; pour the oxide etchant melt into water at 25° C. to cool to obtain oxide etchant particles; etch the oxide The etchant particles are dried in a drying box at 80°C, then placed in a ball mill for grinding and sieving to obtain oxide etchant powder with a particle size of 0.1 ⁇ 5.0 ⁇ m, and then placed in a drying box to dry at 100°C A dry oxide etchant powder is obtained.
  • the organic carrier based on the total weight of the organic carrier as 100%, it includes the following weight components:
  • the organic carrier contains the following components: 65% of a mixture of terpineol, lauryl esters, and terpenes; ethyl cellulose 10%, methyl silicone oil 5%, rosin resin 15%, and polyamide wax 5% , Organopolysilazane 5%.
  • the preparation method of the organic carrier is as follows: Weigh the organic carrier raw materials according to the above-mentioned ratio, mix and stir at 60° C. for 100 min to obtain the organic carrier.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste includes the following steps:
  • a manufacturing method of the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the PERC crystalline silicon solar cell front conductive paste in Example 5 was printed on the front surface of the PERC monocrystalline silicon solar cell with insulating film and Al 2 O 3 passivation film by means of screen printing.
  • the back silver and back aluminum were screen printed, and then sintered at 695°C to obtain the front electrode of PERC crystalline silicon solar cell.
  • a conductive paste for semiconductor components and front electrodes and PERC crystalline silicon solar cells is provided.
  • the total weight of the conductive paste for semiconductor components is calculated as 100 parts, including the raw material components in the following proportions: 88.5 parts of silver powder; 9.0 parts of organic carrier; 2.5 parts of oxide etchant.
  • the oxide etchant based on the total molar amount of the oxide etchant as 100%, it includes the following raw material components:
  • the preparation method of the oxide etchant is as follows: weigh the oxide etchant raw materials according to the above-mentioned molar content and mix them; place the mixed oxide etchant raw materials in a heating furnace and heat to 1000 °C, and kept at 1000 °C for 120 min, to obtain an oxide etchant melt; pour the oxide etchant melt into water at 25° C. to cool to obtain oxide etchant particles; etch the oxide The etchant particles are dried in a drying box at 80°C, then placed in a ball mill for grinding and sieving to obtain oxide etchant powder with a particle size of 0.1 ⁇ 5.0 ⁇ m, and then placed in a drying box to dry at 100°C A dry oxide etchant powder is obtained.
  • the organic carrier based on the total weight of the organic carrier as 100%, it includes the following weight components:
  • the organic carrier contains the following components: 65% of a mixture of terpineol, lauryl esters, and terpenes; ethyl cellulose 10%, methyl silicone oil 5%, rosin resin 15%, and polyamide wax 5% , Organopolysilazane 5%.
  • the preparation method of the organic carrier is as follows: Weigh the organic carrier raw materials according to the above-mentioned ratio, mix and stir at 60° C. for 100 min to obtain the organic carrier.
  • the preparation method of the PERC crystalline silicon solar cell front conductive paste includes the following steps:
  • a manufacturing method of the front electrode of a PERC crystalline silicon solar cell includes the following steps:
  • the PERC crystalline silicon solar cell front conductive paste in Example 6 was printed on the front surface of the PERC monocrystalline silicon solar cell with insulating film and Al 2 O 3 passivation film.
  • the back silver and back aluminum were screen printed, and then sintered at 695°C to obtain the front electrode of PERC crystalline silicon solar cell.
  • the conductive pastes for semiconductor components and the front electrodes provided in Examples 7 to 15 and the oxide etchant involved in PERC crystalline silicon solar cells are listed in Table 1.
  • the composition and preparation of the conductive paste The method, the corresponding front electrode and the preparation method of the PERC crystalline silicon solar cell are also the same as in Examples 1 to 5.
  • the back silver and back aluminum were prepared and then heated to 695°C for sintering.
  • the above-mentioned front electrode performance and the obtained cell efficiency were tested, and the results are summarized in Table 2.
  • FIG. 5 is a schematic diagram of a 180° tensile test. Specifically, the welding tape 800 is first welded to the surface of the main grid. The welding machine is set to a temperature of 340°C, and then the crystalline silicon cell is connected by the first fixing bolt 901 and the second fixing bolt 902 100 is fixed on the tensile machine 900, and the tensile test is performed in the direction of the tensile force F. The tensile test results are shown in Table 2.
  • Example 1 3.29 20 pcs 0.6759 10.190 2.18 1873 80.49 0.046 22.123
  • Example 2 3.19 20 pcs 0.6757 10.213 2.13 1873 80.46 0.045 22.024
  • Example 3 3.26 20 pcs 0.6780 10.184 2.20 2359 80.44 0.042 22.015
  • Example 4 3.21 20 pcs 0.6773 10.188 2.14 1981 80.49 0.045 22.105
  • Example 5 3.46 20pcs 0.6783 10.180 2.190 2354 80.48 0.043 22.036
  • Example 6 3.51 20pcs 0.6775 10.185 2.136 1988 80.53 0.047 22.175
  • Example 7 1.82 20 pcs 0.6726 10.182 3.04 1069 80.30 0.053 21.810
  • Example 8 1.71 20 pcs 0.6738 10.189 3.01 1255 80.24 0.050 21.715
  • Example 2 3.19 20 pcs 0.6757 10.213 2.13 1873 80.46 0.0
  • the solar cells of Examples 1-6 have the advantages of high conversion rate, low R s , and high tensile force, indicating that the oxide etchant used in Examples 1-6 is superior It not only effectively wets and sinters the silver powder, but also effectively etches the insulating film on the surface of the PERC crystalline silicon solar cell, so that the silver electrode and the surface of the solar cell form a good ohmic contact, so that the solar cell
  • the cell has the characteristics of high conversion efficiency, low contact resistance R s , and high tensile force.
  • the oxide etching etchant used in Examples 1-6 contains Fe 2 O 3 , SiO 2 , Na 2 O, and Li 2 O, and the molar ratio of Fe 2 O 3 and SiO 2 is 0.1:40-25:10, The molar ratio of Na 2 O and SiO 2 is 0.1:40-10:10, the molar ratio of Fe 2 O 3 and Li 2 O is 0.1:30-25:10; the molar ratio of Na 2 O and Li 2 O The ratio is 0.1:30 ⁇ 10:10.
  • the oxide etchant can dissolve enough silver during the sintering process at a temperature of 695°C to fully etch the insulating layer on the surface of the battery.
  • the PERC crystalline silicon cell is not excessively corroded, so that the silver electrode and the silicon chip not only form a good ohmic contact, but also have good adhesion.
  • the conversion rate of the PERC crystalline silicon solar cell of Examples 7-12 is lower than that of Examples 1-6, and its series resistance (R S ) is significantly higher than that of Examples 1-6, because of the oxide etching used.
  • the different proportions of the etchant components result in that the content of Fe 2 O 3 , SiO 2 and Na 2 O oxides in the oxide etchant of Examples 7-12 are not within the optimal concentration range of the present invention; similarly, the examples Among the oxide etchants 13-15, since one of Fe 2 O 3 , SiO 2 and Na 2 O oxides is not within the specific scope of the present invention, its adhesion and conversion efficiency are less than the corresponding ones of the present invention. Performance, and the series resistance (R S ) is greater than the series resistance of the present invention.

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Abstract

一种用于半导体元件的导电浆料及其制备方法和太阳能电池。按重量为100份计，该导电浆料包括如下原料组分：金属粉80.0~93.0份；有机载体6.0~15.0份；氧化物刻蚀剂0.5~5.0份；氧化物刻蚀剂含有Fe2O3、SiO 2和Na 2O；以氧化物刻蚀剂摩尔份为100计，Fe 2O 3：SiO 2=0.1:40~25:10；Na 2O：SiO 2=0.1:40~10:10。该导电浆料≤700℃的温度烧结时表现出优异的刻蚀性能，使金属粉与PERC晶硅太阳能电池表面的硅形成良好的欧姆接触，从而降低正面电极的电阻，获得接触电阻低、导电性能好、附着力强的正面电极。由此得到的PERC晶硅太阳能电池性能有大幅度提高。

Description

用于半导体元件的导电浆料及其制备方法和PERC太阳能电池 技术领域
本发明属于太阳能电池技术领域，特别涉及一种用于半导体元件的导电浆料及其制备方法和PERC太阳能电池。
 背景技术
太阳能是一种取之不尽，用之不竭的清洁型能源。随着煤炭、石油等不可再生能源的日益枯竭，开发并利用太阳能成为大热点。基于这种思路开发的太阳能电池就是利用太阳能的一种重要手段。目前，实现产业化的晶硅太阳能电池已经成为太阳能电池应用的典范。
电池片作为晶硅太阳能电池的核心组成部分，为了将光照下产生的电流收集并导出，需要在电池片的正面及背面上分别制作一个电极。制造电极的方法多种多样，其中丝网印刷及共烧是目前最为普遍的一种生产工艺。如正面电极的制造中，采用丝网印刷的方式将导电浆料涂覆于硅片上，并通过烧结在硅片正面上形成正面电极。烧结后的晶硅太阳能电池正面电极需要在硅片上附着牢固，栅线窄而高，遮光面积小，易于焊接，硅太阳能电池正面电极用导电浆料要具备在烧结过程中穿透氮化硅减反射膜的能力，与硅电池片形成良好的欧姆接触。
常见的晶硅太阳能电池正面导电浆料由银粉、玻璃粉、有机载体组成，导电浆料被使用丝网印刷的方式印刷到电池片表面。在烧结过程中，导电浆料中的玻璃粉刻蚀并穿透晶硅太阳能电池正面或光照面的减反射绝缘层如氮化硅、氧化铝、氧化硅、氧化硅或者氧化钛，使银粉与晶硅太阳能电池基体接触，形成正面电极。
钝化发射极及背局域接触电池(Passivated Emitter and Rear Cell，简称：PERC)，最早由澳大利亚科学家Martin Green在1983年提出。PERC电池近年来效率记录不断被刷新，将成为未来最具性价比的太阳能电池技术。其PERC单晶电池的转化效率已经达到21.9%，比常规多晶电池效率(18.7%左右)大幅提高，使太阳能电池的生产成本大幅下降。PERC技术通过在电池的背面添加一个电介质钝化层和激光开槽以及高方阻来提高转换效率。PERC电池最大化跨越了P-N结的电势梯度，这使得电子更稳定的流动，减少电子重组，以及更高的效率水平。常规晶硅电池片在大约780℃温度下烧结制备电极，由于PERC单晶电池独特的结构使其电池片更为脆弱，必须在比常规晶硅电池更低的温度下烧结，加之其比常规电池片增加了一层Al 2O 3钝化层(见图3和图4的301)，要求其正面导电浆料不仅必须具备在较低温烧结的性能，同时要与硅片有更好的接触性能和更好的附着力性能。传统的正面导电浆料以及使用的玻璃粉在低温烧结时不能很好的刻蚀PERC单晶电池片表面的减反射绝缘层和钝化层，其形成的正面电极与硅片表面接触电阻高，附着力低，从而影响了PERC电池片的光电转化效率和可靠性。
技术问题
本发明所要解决的技术问题是：提供一种用于半导体元件的导电浆料及其制备方法，以解决现有正面导电浆料存在的在低温烧结环境下不能有效对PERC单晶电池片的表面的钝化层进行刻蚀，从而导致正面电极与硅片表面接触的电阻值升高以及附着力降低，最终使得电池片光电转化效率低和可靠性低等问题。
进一步地，本发明还提供一种PERC晶硅太阳能电池正面电极的制作方法及PERC太阳能电池。
 技术解决方案
为了实现上述发明目的，本发明采用的技术方案如下：
一种用于半导体元件的导电浆料，按照总重量为100份计，包括如下原料组分：
金属粉       80.0~93.0份；
有机载体     6.0~15.0份；
氧化物刻蚀剂0.5~5.0份；
其中，所述氧化物刻蚀剂至少含有Fe 2O 3、SiO 2和Na 2O；
以所述氧化物刻蚀剂摩尔份为100计，所述Fe 2O 3与SiO 2的摩尔比例为0.1:40~25:10；所述Na 2O与SiO 2的摩尔比例为0.1:40~10:10。
相应地，一种用于半导体元件的导电浆料的制备方法，包括以下步骤：
步骤S01.将氧化物刻蚀剂原料组分进行熔融得到氧化物刻蚀剂熔液，对所述氧化物刻蚀剂熔液进行骤冷处理，得到氧化物刻蚀剂颗粒，经破碎获得粒径在(0.1~5.0)μm的氧化物刻蚀剂粉末；
步骤S02.将有机载体原料置于(40~100)℃环境中进行混合处理，得到有机载体；
步骤S03.将金属粉与步骤S01得到的氧化物刻蚀剂粉末、步骤S02得到的有机载体三者进行混料破碎处理，获得PERC晶硅太阳能电池正面导电浆料。
相应地，一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
提供表面具有绝缘膜的PERC晶硅半导体元件；
以丝网印刷的方式将上述用于半导体元件的导电浆料印制于所述晶体硅导电元件的绝缘膜表面，随后依次进行干燥、烧结、冷却处理，得到晶硅太阳能电池正面电极。
以及，一种PERC晶硅太阳能电池，所述PERC晶硅太阳能电池的正面电极为如上所述的PERC晶硅太阳能电池正面电极。
 有益效果
相对于现有技术，本发明提供的用于半导体元件的导电浆料，由于氧化物刻蚀剂中至少含有Fe 2O 3、SiO 2、和Na 2O，而且所述氧化物刻蚀剂中Fe 2O 3与SiO 2的摩尔比例为0.1:40~25:10、Na 2O与SiO 2的摩尔比例为0.1:40~10:10，这些特定比例的组分能使其氧化物刻蚀剂在低于700℃的温度烧结时表现出优异的刻蚀性能，使得氧化物刻蚀剂在低温烧结过程中能够溶解足够的银，溶解了银的所述氧化物刻蚀剂熔液一部分用于润湿金属粉并促使其烧结，另一部分则流动至PERC晶硅太阳能电池表面与减反射层反应，能够有效的刻蚀PERC晶硅太阳能电池的减反射层，在冷却过程中溶解在氧化物刻蚀剂熔液中的银析出形成微小的纳米银颗粒，使金属粉与硅形成良好的欧姆接触，极大的降低正面电极的电阻，最终获得接触电阻低、导电性能好、附着力强的正面电极。
本发明提供的PERC晶硅太阳能电池正面导电浆料的制备方法，工艺条件简单，获得的正面导电浆料组分均匀且性能良好，适用于工业大规模生产。
本发明提供的PERC晶硅太阳能电池，由于采用了上述的PERC晶硅太阳能电池正面电极结构，PERC晶硅太阳能电池结构表现出良好的附着力，同时银电极和硅片具有良好的欧姆接触，使得太阳能电池的转换效率得到提高，PERC晶硅太阳能电池的可靠性也大幅度提高。
 附图说明
图1为本发明提供的用于半导体元件的导电浆料的制备方法工艺流程示意图；
图2为本发明提供的PERC晶硅太阳能电池正面电极的制作方法工艺流程示意图；
图3为本发明提供的在表面具有绝缘膜和钝化层的PERC晶硅半导体元件上印刷了本发明所述的正面导电浆料的示意图；
图4为本发明图3中印刷了正面和背面正面导电浆料的PERC晶硅半导体元件烧结后的示意图；
图5为180°拉伸测试示意图；
其中，100-晶体硅电池片；200-P/N结(磷掺杂层)；300-绝缘膜，301-Al 2O 3钝化层；400-印刷的正面导电浆料，401-金属粉，402-有机载体，403-氧化物刻蚀剂；500-印刷的背面银浆；600-印刷的背面铝浆；700-正面电极；800-焊带；900-拉伸机；901-拉伸机样品第一固定螺栓；902-拉伸机样品第二固定螺栓；F-拉力方向。
本发明的实施方式
为了使本发明要解决的技术问题、技术方案及有益效果更加清楚明白，以下结合实施例和附图，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
在本发明中，晶体硅、硅晶均表示相同的意思。
本发明采用的技术方案如下：
一种用于半导体元件的导电浆料，按照总重量为100份计，包括如下原料组分：
金属粉       80.0~93.0份；
有机载体     6.0~15.0份；
氧化物刻蚀剂 0.5~5.0份；
其中，所述氧化物刻蚀剂至少含有Fe 2O 3、SiO 2和Na 2O；以所述氧化物刻蚀剂摩尔份为100计，所述Fe 2O 3与SiO 2的摩尔比例为0.1:40~25:10；所述Na 2O与SiO 2的摩尔比例为0.1:40~10:10。
更为具体地，以所述氧化物刻蚀剂摩尔总量为100%计，所述氧化物刻蚀剂包括以下组分：
PbO           10.0~25.0%；
TeO 2           15.0~35.0%；
Li 2O           10.0~30.0%；
SiO 2           10.0~40.0%；
B 2O 3           0.1~6.0%；
Bi 2O 3          5.0~10.0%；
ZnO           0.1~5.0%；
WO 3           2.0~10.0%；
Fe 2O 3          0.1~25.0%；
Na 2O          0.1~10.0%；
此外，所述氧化物刻蚀剂中还含有添加元素的氧化物，其含量为0~10.0%。
优选地，添加元素的氧化物中添加元素为钛、铝、银、铬、钪、铜、铌、钒、钽、锶、溴、钴、铪、镧、钇、镱、钡、锰、镍、锡、砷、锆、钾、铊、磷、铟、镓、锗、锌等中的一种或者两种及以上。
本发明氧化物刻蚀剂的原料不仅包括使用化学方法制成的氧化物和经过高温处理后得到的氧化物，还包括其含有阳离子的碳酸盐、磷酸盐、氟化物等，例如所述Li 2O的原料包括Li 2O和Li 2CO 3等，所述的原料Fe 2O 3包括FeO、FeO 2、Fe 2O 3、Fe 3O 4和R xFeO 3等，其中R xFeO 3中的R是元素Li、Na、K、Ru、Cs、Be、Mg、Ca、Sr和Ba中的一种，R x中的x是元素数量；锌的氧化物作为添加元素的氧化物时，该添加元素的氧化物的原料包括ZnO和Zn 3(PO 4) 2等。
优选地，氧化物刻蚀剂可以为晶体、非晶体或者非晶体与晶体的混合物。
上述氧化物刻蚀剂中，优选地，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 0.1~0.4%；Na 2O 0.1~10.0%，Fe 2O 3摩尔含量在0.1~0.4%范围内得到的PERC晶硅太阳能电池中，其正面电极的结合力达到3.0N以上。
另一优选方案，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 2.0~5.0%；Na 2O 0.1~10.0%，Fe 2O 3摩尔含量在2.0~5.0%范围内得到的PERC晶硅太阳能电池中，其正面电极的结合力达到3.0N以上。
又一优选方案中，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 23~25%；Na 2O 0.1~10.0%，Fe 2O 3摩尔含量在23~25%范围内得到的PERC晶硅太阳能电池中，正面电极的串联电阻低至2.13mΩ及以下，其正面电极的结合力达到3.0N以上。
又一优选方案中，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 2.0~5.0%；Na 2O 0.1~0.5%，Fe 2O 3和Na 2O的摩尔含量同时在2.0~5.0%、0.1~0.5%范围内得到的PERC晶硅太阳能电池中，正面电极的附着力达到3.29N及以上，且串联电阻低至2.18mΩ及以下，太阳能电池的转换效率达到22.123%以上。
又一优选方案中，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~15.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 8.0~12%；Na 2O 0.1~0.5%，SiO 2、Fe 2O 3和Na 2O的摩尔含量同时在10.0~15.0%、2.0~5.0%、0.1~0.5%范围内得到的PERC晶硅太阳能电池中，正面电极的附着力达到3.21N及以上，且串联电阻低至2.14mΩ及以下，太阳能电池的转换效率达到22.105%以上。
优选地，所述金属粉为银、金、铂、铜、铁、镍、锌、钛、钴、铬、铝、锰、钯、铑中的至少一种。
进一步优选地，所述金属粉为银包覆的铜、铁、镍、锌、钛、钴、铬、铝、锰中的至少一种，其中，银包覆层的厚度为(10~50)nm。
优选地，所述金属粉为非银包覆的金属粉和银包覆的金属粉的混合体，其中，所述非银包覆的金属粉与银包覆的金属粉的重量比为5/95~95/5，非银包覆的金属粉为银、金、铂、铜、铁、镍、锌、钛、钴、铬、铝、锰、钯、铑中的至少一种；银包覆的金属粉为铜、铁、镍、锌、钛、钴、铬、铝、锰中的至少一种，所述银包覆层的厚度为(10~200)nm。
本发明中所述有机载体包括有机溶剂、聚合物、润湿分散剂、触变剂及其他功能助剂等。
以所述有机载体重量为100份计，包括以下组分：
有机溶剂50~95份；聚合物1~40份；润湿分散剂0.1~10份；触变剂1~20份；其他功能助剂0.1~25。
其中，所述有机溶剂选自松油醇、乙二醇丁醚醋酸酯、乙二醇乙醚醋酸酯、十二醇酯、二乙二醇丁醚、三乙二醇丁醚、三丙二醇甲醚、萜烯类等高沸点溶剂中的至少一种。
所述润湿分散剂选自脂肪酸(油酸、硬酯酸等)、脂肪酸的酰胺衍生物(油酸酰胺、硬脂酰胺等)、脂肪酸的酯类衍生物、聚乙烯蜡、聚乙二醇中的一种或者两种以上，主要用于帮助氧化物刻蚀剂和金属粉等在有机载体中的分散。
所述触变剂选自氢化蓖麻油衍生物、聚酰胺蜡、聚脲、气相二氧化硅中的一种或者两种以上，主要用于提高浆料在印刷过程中的触变性，使导电浆料在印刷过程中受到剪切时，稠度变小，容易丝网印刷，停止剪切时，稠度又增加，以保证正面电极有优异的高宽比。
进一步地，所述其他功能助剂选自聚甲基苯基硅氧烷、聚苯基硅氧烷、邻苯二甲酸酯类(如邻苯二甲酸二乙酯、邻苯二甲酸二丁酯等)、微晶蜡、聚二甲基硅氧烷、聚乙烯醇缩丁醛(PVB)、聚醚聚酯改性有机硅氧烷、烷基改性有机硅氧烷、有机聚硅氮烷中的一种或者两种以上。所述功能助剂可根据需要选择添加，如加入微晶蜡等以降低表面张力；加入邻苯二甲酸二丁酯(DBP)等以改善浆料的柔韧性；加入聚乙烯醇缩丁醛(PVB)等改善黏附力；加入有机聚硅氮烷可以改善浆料的印刷性能，使其在更窄开口的网版上印刷出更细的副栅。优选地，加入的机聚硅氮烷重量份为0.1~20份。
相应地，本发明还提供用于半导体元件的导电浆料的制备方法。
如图1所示，在一个实施例中，用于半导体元件的导电浆料的制备方法包括以下步骤：
步骤S01.将氧化物刻蚀剂原料组分进行熔融得到氧化物刻蚀剂熔液，对所述氧化物刻蚀剂熔液进行骤冷处理，得到氧化物刻蚀剂颗粒，经破碎获得粒径在(0.1~5.0)μm的氧化物刻蚀剂粉末；
步骤S02.将有机载体原料置于(40~100)℃环境中进行混合处理，得到有机载体；
步骤S03.将金属粉与步骤S01得到的氧化物刻蚀剂粉末、步骤S02得到的有机载体三者进行混料破碎处理，获得PERC晶硅太阳能电池正面导电浆料。
下面对所述晶硅太阳能电池正面导电银浆的制备方法做更加详细的解释说明。
其中，氧化物刻蚀剂原料的熔融方法为将氧化物刻蚀剂原料混匀后，加热至(900~1200)℃，保温(60~180)min，随后进行冷却处理，得到氧化物刻蚀颗粒，并将其置于(60~80)℃中进行烘干，再破碎处理。破碎时可以使用球磨方式进行研磨，也可以使用其他可以使得氧化物刻蚀颗粒破碎至粒径为(0.1~5.0)μm的粉料，破碎后将氧化物刻蚀剂粉料置于(80~100)℃中进行干燥处理。
上述氧化物刻蚀剂熔液的骤冷处理方式为可以是在(5~25)℃的去离子水中快速冷却，也可以在流动的空气中冷却，空气的温度不高于25℃。
本发明所述用于半导体元件的导电浆料的制备方法还有如下替换方法：
在一个实施方案中，先将氧化物刻蚀剂和金属粉进行混合，得到第一混合物，再将该第一混合物与有机载体进行混合、研磨处理，得到用于半导体元件的导电浆料。
在另一个实施方案中，先将上述氧化物刻蚀剂和有机载体进行混合，得到第一混合物，再往该第一混合物中加入金属粉，混料、研磨处理，得到用于半导体元件的导电浆料。
在又一个实施方案中，先将金属粉和有机载体进行混合，得到第一混合物，再向该第一混合物中加入氧化物刻蚀剂，混料、研磨处理，得到用于半导体元件的导电浆料。
在再一个实施方案中，先按照配方比例分别称取重量份的金属粉、有机载体、氧化物刻蚀剂，随后按照称取的金属粉、有机载体、氧化物刻蚀剂各自按照重量份为100计，先将20~60重量份的金属粉和20~60重量份的有机载体进行混合，得到第一混合物；再将40~80重量份氧化物刻蚀剂和部分的有机载体进行混合，得到第二混合物，然后再将该第一混合物和第二混合物进行混合，研磨处理，得到用于半导体元件的导电浆料。上述制备方法得到的用于半导体元件的导电浆料即为PERC晶硅太阳能电池正面浆料。
请参考图2、图3及图4，本发明还提供一种PERC晶硅太阳能电池正面电极的制作方法。
所述制作方法涉及表面叠设有绝缘膜和Al 2O 3钝化层的PERC晶硅半导体元件。
所述PERC晶硅半导体元件的结构如图3所示，100为具有相对第一表面和第二表面的晶体硅电池片，在第一表面叠设有P/N结200，在P/N结200表面叠设有绝缘膜300，在绝缘膜300表面叠设有Al 2O 3钝化层301；在第二表面上印刷有背面银浆500和绝缘膜300，且绝缘膜300表面叠设有Al 2O 3钝化层301，并且所述Al 2O 3钝化层301表面叠设有背面铝浆600，其中，绝缘膜300，和Al 2O 3钝化层301，绝缘膜300可以是氮化硅膜、氧化钛膜、氧化铝膜、氧化硅膜中的至少一种。
具体地，所述PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
步骤S04.提供表面叠设有绝缘膜300和Al 2O 3钝化层301的PERC晶硅半导体元件PERC单晶电池；
步骤S05.通过丝网印刷的方式将如上任一种方案所述的PERC晶硅太阳能电池正面导电浆料400(其中，401为金属粉、402为有机载体、403为氧化物刻蚀剂)印制于第一表面一侧的所述绝缘膜300表面或者Al 2O 3钝化层301；
步骤S06.对步骤S05处理后的晶硅半导体元件PERC单晶电池依次进行干燥、烧结、冷却处理，得到PERC晶硅太阳能电池正面电极700，具体如图4所示。
具体地，干燥温度为80~400℃，烧结温度不高于700℃，冷却条件为自然冷却。
本发明还进一步地提供一种PERC晶硅太阳能电池，所述PERC晶硅太阳能电池的正面电极为上所述的PERC晶硅太阳能电池正面电极。
为了更好的说明本发明实施例提供的用于半导体元件的导电浆料及其制备方法，下面通过多个实施例进一步解释说明。
实施例1
一种用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池。
以该用于半导体元件的导电浆料总重量为100份计算，包括如下比例的原料组分：银粉88.5份；有机载体9.0份；氧化物刻蚀剂2.5份。
其中，以所述氧化物刻蚀剂摩尔总量为100%计，包括以下原料组分：
PbO 24%、TeO 2 15%、Li 2O 10%、SiO 2 21%、B 2O 3 6%、Bi 2O 3 5%、ZnO 5%、WO 3 10%、Fe 2O 3 3.5%、Na 2O 0.4%、Al 2O 3 0.1%。
所述氧化物刻蚀剂的制备方法为：按照以上所述的摩尔含量称取氧化物刻蚀剂原料并混匀；将混匀的所述氧化物刻蚀剂原料置于加热炉加热至1000℃，并在1000℃下保温120min，得到氧化物刻蚀剂熔液；将所述氧化物刻蚀剂熔液倒入25℃的水中冷却得到氧化物刻蚀剂颗粒；将所述氧化物刻蚀剂颗粒置于干燥箱中在80℃烘干，随后置于球磨机中进行研磨、过筛得到粒径为0.1~5.0μm的氧化物刻蚀剂粉，然后置于干燥箱中100℃烘干得到干燥的氧化物刻蚀剂粉。
其中，以所述有机载体重量总量为100%计，包括以下重量组分：
所述有机载体含有以下组分：松油醇、十二醇酯、萜烯三者的混合物65%；乙基纤维素10%、甲基硅油5%、松香树脂15%、聚酰胺蜡5%、有机聚硅氮烷5%。
所述有机载体的制备方法为：按照以上所述的比例称取有机载体原料，在60℃混合搅拌100min，得到有机载体。
所述PERC晶硅太阳能电池正面导电浆料的制备方法包括以下步骤：
按照以上所述配方重量比例称取银粉88.5份，有机载体9.0份和所述氧化物刻蚀剂粉2.5份，混匀并研磨处理，得到所述PERC晶硅太阳能电池正面导电浆料。
一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
通过丝网印制的方式，将实施例1中PERC晶硅太阳能电池正面导电浆料印制在具有绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后于695℃进行烧结，得到PERC晶硅太阳能电池正面电极。
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
实施例2
一种用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池。
以该用于半导体元件的导电浆料总重量为100份计算，包括如下比例的原料组分：银粉88.5份；有机载体9.0份；氧化物刻蚀剂2.5份。
其中，以所述氧化物刻蚀剂摩尔总量为100%计，包括以下原料组分：
PbO 17%、TeO 2 20%、Li 2O 12%、SiO 2 12%、B 2O 3 0.1%、Bi 2O 3 6%、ZnO 3.1%、WO 3 3%、Fe 2O 3 24.1%、Na 2O 2.2%、TiO 2 0.5%。
所述氧化物刻蚀剂的制备方法为：按照以上所述的摩尔含量称取氧化物刻蚀剂原料并混匀；将混匀的所述氧化物刻蚀剂原料置于加热炉加热至1000℃，并在1000℃下保温120min，得到氧化物刻蚀剂熔液；将所述氧化物刻蚀剂熔液倒入25℃的水中冷却得到氧化物刻蚀剂颗粒；将所述氧化物刻蚀剂颗粒置于干燥箱中在80℃烘干，随后置于球磨机中进行研磨、过筛得到粒径为0.1~5.0μm的氧化物刻蚀剂粉，然后置于干燥箱中100℃烘干得到干燥的氧化物刻蚀剂粉。
其中，以所述有机载体重量总量为100%计，包括以下重量组分：
所述有机载体含有以下组分：松油醇、十二醇酯、萜烯三者的混合物65%；乙基纤维素10%、甲基硅油5%、松香树脂15%、聚酰胺蜡5%、有机聚硅氮烷5%。
所述有机载体的制备方法为：按照以上所述的比例称取有机载体原料，在60℃下混合搅拌100min，得到有机载体。
所述PERC晶硅太阳能电池正面导电浆料的制备方法包括以下步骤：
按照以上所述配方重量比例称取银粉88.5份，有机载体9.0份和所述氧化物刻蚀剂粉2.5份，混匀并研磨处理，得到所述PERC晶硅太阳能电池正面导电浆料。
一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
通过丝网印制的方式，将实施例2中PERC晶硅太阳能电池正面导电浆料印制在具有绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后于695℃进行烧结，得到PERC晶硅太阳能电池正面电极。
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
实施例3
一种用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池。
以该用于半导体元件的导电浆料总重量为100份计算，包括如下比例的原料组分：银粉88.5份；有机载体9.0份；氧化物刻蚀剂2.5份。
其中，以所述氧化物刻蚀剂摩尔总量为100%计，包括以下原料组分：
PbO 11.1%、TeO 2 16%、Li 2O 12%、SiO 2 40%、B 2O 3 2%、Bi 2O 3 8%、ZnO 4.5%、WO 3 1%、Fe 2O 3 0.3%、Na 2O 5%、Cr 2O 3 0.1%。
所述氧化物刻蚀剂的制备方法为：按照以上所述的摩尔含量称取氧化物刻蚀剂原料并混匀；将混匀的所述氧化物刻蚀剂原料置于加热炉加热至1000℃，并在1000℃下保温120min，得到氧化物刻蚀剂熔液；将所述氧化物刻蚀剂熔液倒入25℃的水中冷却得到氧化物刻蚀剂颗粒；将所述氧化物刻蚀剂颗粒置于干燥箱中在80℃烘干，随后置于球磨机中进行研磨、过筛得到粒径为0.1~5.0μm的氧化物刻蚀剂粉，然后置于干燥箱中100℃烘干得到干燥的氧化物刻蚀剂粉。
其中，以所述有机载体重量总量为100%计，包括以下重量组分：
所述有机载体含有以下组分：松油醇、十二醇酯、萜烯三者的混合物65%；乙基纤维素10%、甲基硅油5%、松香树脂15%、聚酰胺蜡5%、有机聚硅氮烷5%。
所述有机载体的制备方法为：按照以上所述的比例称取有机载体原料，在60℃混合搅拌100min，得到有机载体。
所述PERC晶硅太阳能电池正面导电浆料的制备方法包括以下步骤：
按照以上所述配方重量比例称取银粉88.5份，有机载体9.0份和所述氧化物刻蚀剂粉2.5份，混匀并研磨处理，得到所述PERC晶硅太阳能电池正面导电浆料。
一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
通过丝网印制的方式，将实施例3中PERC晶硅太阳能电池正面导电浆料印制在具有绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后于695℃进行烧结，得到PERC晶硅太阳能电池正面电极。
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
实施例4
一种用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池。
以该用于半导体元件的导电浆料总重量为100份计算，包括如下比例的原料组分：银粉88.5份；有机载体9.0份；氧化物刻蚀剂2.5份。
其中，以所述氧化物刻蚀剂摩尔总量为100%计，包括以下原料组分：
PbO 16%、TeO 2 32%、Li 2O 22.2%、SiO 2 10%、B 2O 3 0.3%、Bi 2O 3 6.1%、ZnO 0.2%、WO 3 3%、Fe 2O 3 10%、Na 2O 0.2%。
所述氧化物刻蚀剂的制备方法为：按照以上所述的摩尔含量称取氧化物刻蚀剂原料并混匀；将混匀的所述氧化物刻蚀剂原料置于加热炉加热至1000℃，并在1000℃下保温120min，得到氧化物刻蚀剂熔液；将所述氧化物刻蚀剂熔液倒入25℃的水中冷却得到氧化物刻蚀剂颗粒；将所述氧化物刻蚀剂颗粒置于干燥箱中在80℃烘干，随后置于球磨机中进行研磨、过筛得到粒径为0.1~5.0μm的氧化物刻蚀剂粉，然后置于干燥箱中100℃烘干得到干燥的氧化物刻蚀剂粉。
其中，以所述有机载体重量总量为100%计，包括以下重量组分：
所述有机载体含有以下组分：松油醇、十二醇酯、萜烯三者的混合物65%；乙基纤维素10%、甲基硅油5%、松香树脂15%、聚酰胺蜡5%、有机聚硅氮烷5%。
所述有机载体的制备方法为：按照以上所述的比例称取有机载体原料，在60℃混合搅拌100min，得到有机载体。
所述PERC晶硅太阳能电池正面导电浆料的制备方法包括以下步骤：
按照以上所述配方重量比例称取银粉88.5份，有机载体9.0份和所述氧化物刻蚀剂粉2.5份，混匀并研磨处理，得到所述PERC晶硅太阳能电池正面导电浆料。
一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
通过丝网印制的方式，将实施例4中PERC晶硅太阳能电池正面导电浆料印制在具有绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后于695℃进行烧结，得到PERC晶硅太阳能电池正面电极。
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
实施例5
一种用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池。
以该用于半导体元件的导电浆料总重量为100份计算，包括如下比例的原料组分：银粉88.5份；有机载体9.0份；氧化物刻蚀剂2.5份。
其中，以所述氧化物刻蚀剂摩尔总量为100%计，包括以下原料组分：
PbO 16%、TeO 2 16%、Li 2O 22.2%、SiO 2 11.1%、B 2O 3 0.3%、Bi 2O 3 6.1%、ZnO 0.2%、WO 3 3%、Na 2O 0.1%、Fe 2O 3 25%。
所述氧化物刻蚀剂的制备方法为：按照以上所述的摩尔含量称取氧化物刻蚀剂原料并混匀；将混匀的所述氧化物刻蚀剂原料置于加热炉加热至1000℃，并在1000℃下保温120min，得到氧化物刻蚀剂熔液；将所述氧化物刻蚀剂熔液倒入25℃的水中冷却得到氧化物刻蚀剂颗粒；将所述氧化物刻蚀剂颗粒置于干燥箱中在80℃烘干，随后置于球磨机中进行研磨、过筛得到粒径为0.1~5.0μm的氧化物刻蚀剂粉，然后置于干燥箱中100℃烘干得到干燥的氧化物刻蚀剂粉。
其中，以所述有机载体重量总量为100%计，包括以下重量组分：
所述有机载体含有以下组分：松油醇、十二醇酯、萜烯三者的混合物65%；乙基纤维素10%、甲基硅油5%、松香树脂15%、聚酰胺蜡5%、有机聚硅氮烷5%。
所述有机载体的制备方法为：按照以上所述的比例称取有机载体原料，在60℃下混合搅拌100min，得到有机载体。
所述PERC晶硅太阳能电池正面导电浆料的制备方法包括以下步骤：
按照以上所述配方重量比例称取银粉88.5份，有机载体9.0份和所述氧化物刻蚀剂粉2.5份，混匀并研磨处理，得到所述PERC晶硅太阳能电池正面导电浆料。
一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
通过丝网印制的方式，将实施例5中PERC晶硅太阳能电池正面导电浆料印制在具有绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后于695℃进行烧结，得到PERC晶硅太阳能电池正面电极。
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
实施例6
一种用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池。
以该用于半导体元件的导电浆料总重量为100份计算，包括如下比例的原料组分：银粉88.5份；有机载体9.0份；氧化物刻蚀剂2.5份。
其中，以所述氧化物刻蚀剂摩尔总量为100%计，包括以下原料组分：
PbO 16%、TeO 2 32%、Li 2O 122.2%、SiO 2 10.1%、B 2O 3 0.3%、Bi 2O 3 6.1%、ZnO 0.2%、WO 3 3%、Fe 2O 3 0.1%、Na 2O 10%。
所述氧化物刻蚀剂的制备方法为：按照以上所述的摩尔含量称取氧化物刻蚀剂原料并混匀；将混匀的所述氧化物刻蚀剂原料置于加热炉加热至1000℃，并在1000℃下保温120min，得到氧化物刻蚀剂熔液；将所述氧化物刻蚀剂熔液倒入25℃的水中冷却得到氧化物刻蚀剂颗粒；将所述氧化物刻蚀剂颗粒置于干燥箱中在80℃烘干，随后置于球磨机中进行研磨、过筛得到粒径为0.1~5.0μm的氧化物刻蚀剂粉，然后置于干燥箱中100℃烘干得到干燥的氧化物刻蚀剂粉。
其中，以所述有机载体重量总量为100%计，包括以下重量组分：
所述有机载体含有以下组分：松油醇、十二醇酯、萜烯三者的混合物65%；乙基纤维素10%、甲基硅油5%、松香树脂15%、聚酰胺蜡5%、有机聚硅氮烷5%。
所述有机载体的制备方法为：按照以上所述的比例称取有机载体原料，在60℃下混合搅拌100min，得到有机载体。
所述PERC晶硅太阳能电池正面导电浆料的制备方法包括以下步骤：
按照以上所述配方重量比例称取银粉88.5份，有机载体9.0份和所述氧化物刻蚀剂粉2.5份，混匀并研磨处理，得到所述PERC晶硅太阳能电池正面导电浆料。
一种PERC晶硅太阳能电池正面电极的制作方法，包括以下步骤：
通过丝网印制的方式，将实施例6中PERC晶硅太阳能电池正面导电浆料印制在具有绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后于695℃进行烧结，得到PERC晶硅太阳能电池正面电极。
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
实施例7~15
为节约篇幅将实施例7~15提供的用于半导体元件的导电浆料及正面电极和PERC晶硅太阳能电池中涉及的氧化物刻蚀剂列于表1中，导电浆料的组分和制备方法、对应的正面电极及PERC晶硅太阳能电池的制备方法也与实施例1~5相同。
表1 实施例7~15的氧化物刻蚀剂组分统计(摩尔含量%)
组分 PbO TeO 2 Li 2O SiO 2 B 2O 3 Bi 2O 3 ZnO WO 3 Fe 2O 3 Na 2O
例7 17 20 16.6 9.54 0.1 5 3.2 3 25.5 10.7
例8 10 15 10 40.44 2 6 4.5 1.3 0.06 10.7
例9 17 20 16.6 9.12 0.1 5 3.2 3 25.9 0.08
例10 17 20 16.6 9.35 0.1 5 3.2 3 25.7 0.05
例11 10 15 10 40.25 2 6 4.5 1.3 0.05 10.9
例12 10 15 10 40.61 2 6 4.5 1.3 0.09 10.5
例13 16 16 22.2 9.2 0.3 5.1 0.2 3 20 8
例14 12 15 20 10.5 0.3 5.2 0.2 3.3 25.5 8
例15 12 18 19.6 10.5 0.3 5.1 0.2 3.3 20 11
对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
对比例
一种晶硅太阳能电池正面导电浆料9651A，丝网印制在和实施例具有完全相同的绝缘膜和Al 2O 3钝化膜的PERC单晶硅太阳能电池正面，其太阳能电池背面丝网印制了背银和背铝，然后加热到695℃进行烧结。对上述正面电极性能和得到的电池片效率进行测试，结果汇总在表2中。
表2 实施例1~15及对比例获得的晶硅太阳能电池性能测试数据统计
性能测试：
(1)I-V测试
将实施例1~15的电池片和对比例的电池片在HALM IV测试仪上进行了I-V测试，测试结果如表2所示。
(2)拉力测试
将焊带焊接到主栅上180°拉伸测试拉力，主栅宽度是0.7mm，将0.9mm宽的焊带焊接到主栅上，焊带宽度为0.9mm，厚度为0.23mm，焊带材料是96.5%Sn3.5%Ag。图5是180°拉伸测试示意图，具体是先将焊带800焊接于主栅表面，焊机的设置温度是340℃，然后通过第一固定螺栓901和第二固定螺栓902将晶体硅电池片100固定于拉伸机900上，按照拉力F的方向进行拉力测试。拉力测试结果如表2所示。
表2 实施例1~15及对比例的正面电极及PERC晶硅太阳能电池测试数据统计
方案 拉力(N) 数量 VOC(N) ISC(A) RS(mΩ) RSH(Ω) FF% IREV2 ETA(%)
实施例1 3.29 20 pcs 0.6759 10.190 2.18 1873 80.49 0.046 22.123
实施例2 3.19 20 pcs 0.6757 10.213 2.13 1873 80.46 0.045 22.024
实施例3 3.26 20 pcs 0.6780 10.184 2.20 2359 80.44 0.042 22.015
实施例4 3.21 20 pcs 0.6773 10.188 2.14 1981 80.49 0.045 22.105
实施例5 3.46 20pcs 0.6783 10.180 2.190 2354 80.48 0.043 22.036
实施例6 3.51 20pcs 0.6775 10.185 2.136 1988 80.53 0.047 22.175
实施例7 1.82 20 pcs 0.6726 10.182 3.04 1069 80.30 0.053 21.810
实施例8 1.71 20 pcs 0.6738 10.189 3.01 1255 80.24 0.050 21.715
实施例9 1.35 20 pcs 0.6716 9.989 3.210 1145 79.84 0.070 21.415
实施例10 1.86 20 pcs 0.6725 10.019 3.350 1139 79.56 0.090 21.215
实施例11 1.09 20 pcs 0.6710 9.936 3.050 1032 80.01 0.087 21.322
实施例12 1.24 20 pcs 0.6715 9.956 3.023 1089 80.40 0.078 21.512
实施例13 1.931 20 pcs 0.6721 9.916 3.225 1125 80.64 0.075 21.255
实施例14 1.756 20 pcs 0.6718 9.954 3.426 1151 80.41 0.084 21.357
实施例15 2.223 20 pcs 0.6733 9.988 3.351 1193 80.22 0.079 21.676
对比例 1.43 20 pcs 0.6744 10.191 3.62 1224 80.14 0.058 21.607
从表2可以看出与对比例相比较，实施例1-6的太阳能电池片具有转化率高，R s低，拉力高的优点，说明实施例1-6使用的氧化物刻蚀剂具有优越的刻蚀性能，它不但有效的润湿烧结了银粉，而且有效的刻蚀掉了PERC晶硅太阳能电池片表面的绝缘膜，使银电极和太阳能电池片表面形成良好的欧姆接触，从而使太阳能电池片具有转换效率高，接触电阻R s低，拉力高的特点。实施例1-6使用的氧化物刻蚀刻剂中含有Fe 2O 3、SiO 2、Na 2O，Li 2O，并且Fe 2O 3和SiO 2的摩尔比例为0.1:40~25:10，Na 2O和SiO 2的摩尔比例为0.1:40~10:10，所述Fe 2O 3和Li 2O的摩尔比例0.1:30~25:10；所述Na 2O和Li 2O的摩尔比例0.1:30~10:10，在这独特的氧化物组分比例使得其氧化物刻蚀剂在695℃的温度烧结过程中能够溶解足够的银，能够充分刻蚀透电池片表面的绝缘层但是又不过分腐蚀PERC晶硅电池片，使得银电极和硅片不但形成很好的欧姆接触，同时具有很好的附着力。实施例7-12的PERC晶硅太阳能电池片转换率低于实施例1-6的转换率，其串联电阻(R S)明显高于实施例1-6，这是因为其使用的氧化物刻蚀剂成分比例不同导致，实施例7-12的氧化物刻蚀剂中Fe 2O 3、SiO 2和Na 2O氧化物的含量均不在本发明的最佳浓度范围内；同样地，实施例13-15的氧化物刻蚀剂中，由于Fe 2O 3、SiO 2和Na 2O氧化物中有一种氧化物不在本发明的特定范围内，其附着力、转换效率均小于本发明的对应性能，而串联电阻(R S)则大于本发明的串联电阻。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (21)

  1. 一种用于半导体元件的导电浆料，其特征在于，按照总重量为100份计，包括如下原料组分：
    金属粉       80.0~93.0份；
    有机载体     6.0~15.0份；
    氧化物刻蚀剂 0.5~5.0份；
    其中，所述氧化物刻蚀剂至少含有Fe 2O 3、SiO 2和Na 2O；
    以所述氧化物刻蚀剂摩尔份为100计，所述Fe 2O 3与SiO 2的摩尔比例为0.1:40~25:10；所述Na 2O与SiO 2的摩尔比例为0.1:40~10:10。
  2. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，以所述氧化物刻蚀剂摩尔总量为100%计，所述氧化物刻蚀剂包括以下组分：
    PbO           10.0~25.0%；
    TeO 2           15.0~35.0%；
    Li 2O           10.0~30.0%；
    SiO 2           10.0~40.0%；
    B 2O 3           0.1~6.0%；
    Bi 2O 3          5.0~10.0%；
    ZnO           0.1~5.0%；
    WO 3           2.0~10.0%；
    Fe 2O 3          0.1~25.0%；
    Na 2O          0.1~10.0%。
  3. 如权利要求2所述的用于半导体元件的导电浆料，其特征在于，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
    PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 0.1~0.4%；Na 2O 0.1~10.0%。
  4. 如权利要求2所述的用于半导体元件的导电浆料，其特征在于，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
    PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 2.0~5.0%；Na 2O 0.1~10.0%。
  5. 如权利要求2所述的用于半导体元件的导电浆料，其特征在于，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
    PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 23~25%；Na 2O 0.1~10.0%。
  6. 如权利要求2所述的用于半导体元件的导电浆料，其特征在于，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
    PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~40.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 2.0~5.0%；Na 2O 0.1~0.5%。
  7. 如权利要求2所述的用于半导体元件的导电浆料，其特征在于，以氧化物刻蚀剂摩尔量为100%计，所述氧化物刻蚀剂包括以下组分：
    PbO 10.0~25.0%；TeO 2 15.0~35.0%；Li 2O 10.0~30.0%；SiO 2 10.0~15.0%；B 2O 3 0.1~6.0%；Bi 2O 3 5.0~10.0%；ZnO 0.1~5.0%；WO 3 2.0~10.0%；Fe 2O 3 8.0~12%；Na 2O 0.1~0.5%。
  8. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，所述氧化物刻蚀剂中还含有添加元素的氧化物，其含量为0~10.0%。
  9. 如权利要求8所述的用于半导体元件的导电浆料，其特征在于，添加元素的氧化物中添加元素为钛、铝、银、铬、钪、铜、铌、钒、钽、锶、溴、钴、铪、镧、钇、镱、钡、锰、镍、锡、砷、锆、钾、铊、磷、铟、镓、锗、锌中的一种或者两种及以上。
  10. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，所述氧化物刻蚀剂为晶体、非晶体或者晶体和非晶体的混合物。
  11. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，所述金属粉为银、金、铂、铜、铁、镍、锌、钛、钴、铬、铝、锰、钯、铑中的至少一种。
  12. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，所述金属粉为银包覆的铜、铁、镍、锌、钛、钴、铬、铝、锰中的至少一种，其中，银包覆层的厚度为(10~50)nm。
  13. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，所述金属粉为非银包覆的金属粉和银包覆的金属粉的混合体，其中，所述非银包覆的金属粉与银包覆的金属粉的重量比为5/95~95/5，非银包覆的金属粉为银、金、铂、铜、铁、镍、锌、钛、钴、铬、铝、锰、钯、铑中的至少一种；银包覆的金属粉为铜、铁、镍、锌、钛、钴、铬、铝、锰中的至少一种，所述银包覆层的厚度为(10~200)nm。
  14. 如权利要求1所述的用于半导体元件的导电浆料，其特征在于，以所述有机载体重量为100份计，包括以下组分：
    有机溶剂50~95份；聚合物1~40份；润湿分散剂0.1~10份；触变剂1~20份；其他功能助剂0.1~25。
  15. 如权利要求14所述的用于半导体元件的导电浆料，其特征在于，所述有机溶剂选自松油醇、乙二醇丁醚醋酸酯、乙二醇乙醚醋酸酯、十二醇酯、二乙二醇丁醚、三乙二醇丁醚、三丙二醇甲醚、萜烯类中的至少一种；
    所述润湿分散剂选自脂肪酸、脂肪酸的酰胺衍生物、脂肪酸的酯类衍生物、聚乙烯蜡、聚乙二醇中的一种或者两种以上；
    所述触变剂选自氢化蓖麻油衍生物、聚酰胺蜡、聚脲、气相二氧化硅中的一种或者两种以上；
    所述其他功能助剂选自聚甲基苯基硅氧烷、聚苯基硅氧烷、邻苯二甲酸酯类、微晶蜡、聚二甲基硅氧烷、聚乙烯醇缩丁醛、聚醚聚酯改性有机硅氧烷、烷基改性有机硅氧烷、有机聚硅氮烷中的一种或者两种以上。
  16. 如权利要求1所述的用于半导体元件的导电浆料的制备方法，其特征在于，包括以下步骤：
    步骤S01.将氧化物刻蚀剂原料组分进行熔融得到氧化物刻蚀剂熔液，对所述氧化物刻蚀剂熔液进行骤冷处理，得到氧化物刻蚀剂颗粒，经破碎获得粒径在(0.1~5.0)μm的氧化物刻蚀剂粉末；
    步骤S02.将有机载体原料置于(40~100)℃环境中进行混合处理，得到有机载体；
    步骤S03.将金属粉与步骤S01得到的氧化物刻蚀剂粉末、步骤S02得到的有机载体三者进行混料破碎处理，获得PERC晶硅太阳能电池正面导电浆料。
  17. 如权利要求16所述的用于半导体元件的导电浆料的制备方法，其特征在于，所述冷却处理为水冷处理或者冷空气处理。
  18. 一种PERC晶硅太阳能电池正面电极的制作方法，其特征在于，包括以下步骤：
    提供表面具有绝缘膜的PERC晶硅半导体元件；
    以丝网印刷的方式将权利要求1所述的用于半导体元件的导电浆料印制于所述晶体硅导电元件的绝缘膜表面，随后依次进行干燥、烧结、冷却处理，得到晶硅太阳能电池正面电极。
  19. 如权利要求18所述的PERC晶硅太阳能电池正面电极的制作方法，其特征在于，所述烧结温度低于700℃；和/或所述干燥温度为80~400℃。
  20. 如权利要求18所述的PERC晶硅太阳能电池正面电极的制作方法，其特征在于，所述绝缘膜选自氮化硅膜、氧化钛膜、氧化铝膜、氧化硅膜中的至少一种。
  21. 一种PERC晶硅太阳能电池，其特征在于，所述PERC晶硅太阳能电池的正面电极为权利要求18所述的PERC晶硅太阳能电池正面电极的制作方法制作得到的正面电极。
PCT/CN2019/098380 2019-07-30 2019-07-30 用于半导体元件的导电浆料及其制备方法和 perc 太阳能电池 WO2021016863A1 (zh)

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