WO2020258606A1 - 一种反相双高压三环结构安全射流装置 - Google Patents

一种反相双高压三环结构安全射流装置 Download PDF

Info

Publication number
WO2020258606A1
WO2020258606A1 PCT/CN2019/112076 CN2019112076W WO2020258606A1 WO 2020258606 A1 WO2020258606 A1 WO 2020258606A1 CN 2019112076 W CN2019112076 W CN 2019112076W WO 2020258606 A1 WO2020258606 A1 WO 2020258606A1
Authority
WO
WIPO (PCT)
Prior art keywords
voltage
electrode
output
distance
jet device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2019/112076
Other languages
English (en)
French (fr)
Inventor
许德晖
冯蕊
李兵
李乔松
孔刚玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xian Jiaotong University
Original Assignee
Xian Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Jiaotong University filed Critical Xian Jiaotong University
Publication of WO2020258606A1 publication Critical patent/WO2020258606A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

Definitions

  • the invention belongs to the new technical field of electrical engineering and relates to a device for generating a low-temperature plasma jet.
  • Plasma is defined as the fourth state in which matter exists in addition to solids, liquids, and gases.
  • Plasma is an ionized gas composed of positive and negative electrons and charged ions, which is electrically neutral as a whole; according to the temperature of the plasma It can be divided into high temperature plasma (10 9 K) and low temperature plasma ( ⁇ 10 6 K).
  • High-temperature plasma generally refers to nuclear fusion plasma, including the solar corona, magnetic confinement fusion or inertial confinement fusion. They are characterized by extremely high particle temperature and very high plasma density, which is difficult to generate in the laboratory (requires large-scale equipment, such as support Carmack). Compared with high-temperature plasma, low-temperature plasma has a much lower particle temperature and a much lower density.
  • the high and low temperature are mainly used to distinguish plasma generated by ordinary discharge from fusion plasma.
  • the research scope of low-temperature plasma is relatively wide, and the application is also relatively wide.
  • the laboratory is generally generated by gas discharge, which is easier to obtain and maintain.
  • atmospheric pressure arc plasma, arc plasma torch, welding plasma, etc. are all thermal plasmas. (The temperature ranges from several thousand K to tens of thousands K).
  • the macroscopic temperature of cold plasma, or the temperature of heavy particles is relatively low, while the temperature of electrons can be very high.
  • Low-temperature plasma has become a research hotspot in applications such as biomedicine, pollution treatment, and chip processing because of its material temperature close to room temperature, easy preparation in the laboratory, no harm to the human body, and active particles produced by discharge that can catalyze most reactions. From laboratory technology to practical application, how to generate plasma stably and safely has become an urgent problem to be solved. Laboratories generally use dielectric barrier discharge, creeping discharge, sliding arc discharge and jet discharge devices to generate plasma.
  • jet discharge devices are generally used, especially for some cases with deep lesions or small treatment sizes; jet discharge devices mainly use "needle ring structure", as shown in Figure 1, high-voltage needle electrodes are inserted into quartz The glass tube is connected to the positive end of the high-voltage power supply (hot wire); the ring-shaped ground electrode is set on the outer wall of the quartz glass tube and connected to the negative end (zero line) of the high-voltage power supply to realize the plasma flowing between the high-voltage needle electrode and the ring-shaped ground electrode The source discharges normally.
  • the input is 220V AC voltage (one end is 0 potential point, the other end is sinusoidal AC voltage) or DC voltage; the ideal output is an AC high voltage above 7kV (One end is 0 potential point, and the other end is sinusoidal AC high voltage).
  • inverted dual high voltage output can be achieved temporarily, that is, one of the two output terminals outputs high voltage, and the other outputs an inverted high voltage with a phase difference of 180 degrees (the actual product is due to the voltage amplitude of working conditions, errors, etc.)
  • This will cause the lack of a ground electrode in the actual discharge device, which is prone to risk of electric shock. Therefore, it is usually necessary to specially configure a boost circuit module to obtain an output terminal with a potential of 0, so the corresponding high-voltage power supply module is often relatively large. Therefore, such small high-voltage modules are usually not used in biomedical applications.
  • the purpose of the present invention is to reduce the volume of the low-temperature plasma jet generating device and improve its safety.
  • the present invention proposes a safety jet device with an inverted double high voltage three-ring structure, which can be applied to a miniaturized power supply module with 220V mains input.
  • the equipment is simple and portable, and is convenient to use in various occasions.
  • a safety jet device with an inverted double high-pressure three-ring structure comprising a tubular cavity and a high-voltage power supply module; one end of the tubular cavity is provided with an air inlet, and the other end is used as a low-temperature plasma jet outlet; its special features are:
  • the high-voltage power supply module is a power supply module with inverted dual high-voltage outputs; the outer wall of the tubular cavity wraps three sections of ring electrodes in sequence along the axial direction, and the directions from the air inlet to the low-temperature plasma jet outlet are respectively marked as the first copper
  • the second copper foil, the second copper foil, and the third copper foil are respectively connected to the output terminal 1 of the high-voltage power supply module, the output terminal 2 of the high-voltage power supply module and the ground terminal; the distance h 12 between the first copper foil and the second copper foil is the first The distance h 23 between the second copper foil and the third copper foil is 1.5 to 2.5 times.
  • Both the distance h 12 and the distance h 23 are positively correlated with the output voltage amplitude of the high-voltage power module; the inner diameter of the tubular cavity is 1mm-3mm, The ratio of the outer diameter is negatively related to the output voltage amplitude of the high-voltage power supply module.
  • the three sections of ring-shaped copper foil have the same width.
  • the three sections of ring-shaped copper foil are not equal, it is also achievable.
  • each section of ring-shaped copper foil is preferably 3 mm to 5 mm.
  • the distance between the third copper foil and the low-temperature plasma jet outlet is preferably 0.5 cm to 1.5 cm.
  • tubular cavity is preferably a quartz glass tube.
  • the distance h 12 between the first copper foil and the second copper foil is preferably 2-3 cm, and the distance h 23 between the second copper foil and the third copper foil is preferably 0.5-1 cm.
  • the output voltage values of the output 1 end of the high-voltage power supply module and the output 2 end of the high-voltage power supply module are respectively 2kv-4kV. A slight difference in amplitude between the two output terminals is allowed.
  • the high-voltage power supply module adopts a three-phase plug, the ground terminal is connected to the upper port of the three-phase plug, and the other two ports of the three-phase plug are respectively connected to the 220V inlet end of the high-voltage power supply module.
  • changing the conventional two-phase plug to a three-phase plug to fit the three-section ring-shaped copper foil is more conducive to avoiding "virtual ground”.
  • the invention cleverly takes advantage of the "shortcomings" of the current small high-voltage modules on the market that the two output terminals are inverted high voltages to construct a three-ring discharge structure to generate stable jet plasma, and at the same time can reduce the jet voltage at the outlet of the glass tube to the ground electrode In the same way, the danger of downward development of the high-voltage electrode is avoided, and the electric field will not affect the experiment.
  • the invention can be applied to the miniaturized power supply module with 220V mains input in the current market, and there are no components in the glass tube, the equipment is simple and portable, and it is convenient to use in various occasions.
  • Fig. 1 is a schematic diagram of the existing discharge structure; in the figure, 101-air inlet; 102-quartz glass tube; 103-high voltage needle electrode; 104-ring ground electrode.
  • Figure 2 is a schematic diagram of the three-ring discharge structure of the present invention; in the figure, 101-air inlet; 102-quartz glass tube; 103-first ring electrode; 104-second ring electrode; 105-third ring electrode (Ground electrode).
  • Figure 3 shows the output voltage waveform of the high-voltage module A.
  • Figure 4 shows the output voltage waveform of the high-voltage module B.
  • Figure 5 shows the output voltage waveform of the high-voltage module C at a rated DC 12V input.
  • Figure 6 shows the output voltage waveform of the high-voltage module D.
  • Fig. 7 is a physical diagram of the jet flow generated in the first embodiment.
  • Figure 8 is a physical diagram of the jet generated in the second embodiment.
  • the present invention adopts a small power module with inverted dual high voltage output.
  • the corresponding inverted dual high voltage three-ring structure is shown in Figure 2.
  • the upper end of the plasma source is a buckle for sealing the air inlet hose, and the lower end of the air inlet is connected
  • the quartz glass tube with an outer diameter of 6mm and an inner diameter of 2mm is tightly connected to the upper air intake hose to ensure sealing.
  • the outside of the quartz glass tube is wrapped with three sections of copper foil (ring electrodes) with a width of 5mm, and the high-voltage module outputs
  • the first end, the second end of the high-voltage module, and the ground end are respectively connected to the three sections of copper foil.
  • High voltage module A The size is 50mm ⁇ 85mm ⁇ 30mm, the input voltage is 220V, 50Hz AC voltage, the output is sine-like wave, the waveform is sawtooth, one end has an output peak-to-peak value of 3.1kV, and the other end has an output peak-to-peak value of 2.9kV , The output frequency at both ends is the same, about 15kHz, in opposite directions.
  • the basic conditions of the high-voltage module meet the basic discharge requirements of the device.
  • High voltage module B The size is 120mm ⁇ 50mm ⁇ 40mm, the rated input voltage is DC 12V, and the output is sine-like wave. There will be a slight delay when the voltage crosses zero, and it will become sine wave after a short period of time near the zero point. , The peak-to-peak output of one end is 1.3kV, and the peak-to-peak output of the other end is 1.14kV, the output frequency at both ends is the same, about 16.2kHz, and the direction is opposite.
  • the high voltage electrode can be regarded as A high-voltage, high-frequency power supply with a frequency of 16.2kHz and a peak-to-peak value of 2.44kV, with a waveform similar to a sine wave, is connected. Due to the low peak-to-peak output of the power supply, under this voltage condition, the device cannot discharge in a helium atmosphere.
  • High voltage module C size is 110mm ⁇ 40mm ⁇ 50mm, rated input voltage is DC 12V, output is standard sine wave, single-ended output peak-to-peak value is 1.9kV, output frequency at both ends is the same, about 15.6kHz, the direction is opposite, if Regarding the potential of the ground electrode as zero potential, the high-voltage electrode can be regarded as a high-voltage high-frequency power supply with a frequency of 15.6kHz and a peak-to-peak value of 3.8kV; when the module changes the voltage value of the DC input in a small range, The output voltage value does not change much.
  • the output is a standard sine wave
  • the peak-to-peak single-ended output reaches 3.0kV
  • the output frequency at both ends is the same, about 15.8kHz, and the direction is opposite.
  • the potential of the ground electrode is always regarded as zero potential
  • the high-voltage electrode can be regarded as a high-voltage high-frequency power supply with a frequency of 15.8kHz and a peak-to-peak value of 6.0kV.
  • the waveform is similar to a sine wave.
  • High voltage module D The size is 110mm ⁇ 50mm ⁇ 40mm, the input voltage is AC 220V, 50Hz, the output is standard sine wave, one end has an output peak-to-peak value of 3.0kV, the other end has an output peak-to-peak value of 4.1kV, and the output frequency is the same at both ends. About 15kHz, the opposite direction, if the potential of the ground electrode is always regarded as zero potential, then the high-voltage electrode can be regarded as a standard sine wave high-voltage high-frequency power supply with a frequency of 15kHz and a peak-to-peak value of 7.1kV.
  • the same product of high-voltage module D is selected, and the output voltage peak value is slightly different due to different batches.
  • the terminal with a peak-to-peak output voltage of 3.84kV is recorded as the output terminal of the high-voltage module
  • the terminal with a peak-to-peak output voltage of the high-voltage module of 3.68kV and a phase difference of 180 degrees from terminal 1 is recorded as the terminal of the high-voltage module output 2.
  • the voltage difference between terminal 1 and terminal 2 of the high-voltage module is 7.52kV
  • the voltage difference between terminal 2 of the high-voltage module and the ground terminal is 3.68kV.
  • the port closest to the glass nozzle is called the ground electrode port.
  • the distance between the first ring electrode 103 (corresponding to the high voltage module 1 end) and the second ring electrode 104 (corresponding to the high voltage module 2 end) is about
  • the distance between the second ring electrode 104 and the third ring electrode (ground electrode) 105 is 7.52/3.68 times.
  • the distance between the ground electrode and the end of the high voltage module 2 is 1 cm
  • the distance between the end of the high voltage module 1 and the end of the high voltage module 2 is 2 cm.
  • the ground electrode of the plasma source is connected to the upper port of the 220V three-phase plug, and the other two ports of the three-phase plug are respectively connected to the 220V inlet end of the high voltage module.
  • the above embodiments 2 to 4 can also obtain a stable plasma jet, similar to the results of the first embodiment.
  • the outer diameter R of the quartz glass tube remains unchanged at 6mm, and only the inner diameter r is adjusted to 2mm, 3mm, 4mm, 5mm, respectively.
  • the distance h 12 must be at least 1.5 times greater than the distance h 23 ; the distance h 12 and the distance h 23 are positively correlated with the output voltage amplitude of the high-voltage module; the inner and outer diameter of the lumen and the output
  • the voltage amplitude is also related. The higher the voltage, the lower the ratio of inner and outer diameters. For example, when the single-ended voltage peak value is around 3.5kV, the ratio of the inner and outer diameters is 1/3.
  • the preferred parameter value range is: the width of each ring-shaped copper foil is 3mm ⁇ 5mm; the distance between the ground electrode and the outlet of the low-temperature plasma jet is 0.5cm ⁇ 1.5cm; the outer diameter R of the quartz glass tube is 5 -8mm, the inner diameter r is 1-3mm; the spacing h 12 is 2-3 cm, and the spacing h 23 is 0.5-1 cm; the output voltage values of the output 1 end of the high-voltage power supply module and the output 2 end of the high-voltage power supply module are 2kv ⁇ 4kV respectively.
  • the applicant tried to adjust the material and wall thickness of the tubular cavity and the inner diameter (inner/outer diameter of the tube) of the annular copper foil appropriately, and optimized and matched other parameters accordingly.
  • the experimental results showed that the same A stable plasma jet can be obtained.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

一种反相双高压三环结构安全射流装置，采用反相双高压输出的电源模块，管状腔体的外壁沿轴向依次包裹三段环状铜箔，自进气口(101)至低温等离子体射流出口的方向分别记为第一铜箔、第二铜箔、第三铜箔，相应分别与高压电源模块的输出1端、高压电源模块的输出2端和地端连接；第一铜箔与第二铜箔的间距h 12为第二铜箔与第三铜箔的间距h 23的1.5～2.5倍。该装置适用于220V市电输入的小型化电源模块，设备简单便携，方便在各种场合使用。

Description

一种反相双高压三环结构安全射流装置 技术领域
本发明属于电气工程新技术领域，涉及一种产生低温等离子射流的装置。
背景技术
在物理学上将等离子体定义为除固体、液体、气体外物质存在的第四种状态，等离子体是由正负电子和带电离子组成的整体呈电中性的电离气体；根据等离子体的温度可将其分为高温等离子体(10 9K)和低温等离子体(<10 6K)。高温等离子体一般指核聚变等离子体，包括太阳日冕，磁约束聚变或惯性约束聚变，它们的特点是粒子温度极高，等离子体密度非常大，实验室难以产生(需要大型装置才行，比如托卡马克)。而低温等离子体相比高温等离子体，粒子温度要低的多，密度也低的多。
这里的高、低温主要是用于区分普通放电产生的等离子体与聚变等离子体。低温等离子体的研究范围比较广，用途也比较广，实验室一般用气体放电产生，较容易获得和维持。而低温等离子体中又分为两种，一个是冷等离子体，另一个是热等离子体。它们根据粒子的热力学平衡状态来区分，热等离子体中包括电子在内的所有粒子温度都很高，比如大气压电弧等离子体，电弧等离子体炬，焊接等离子体等这类等离子体均属于热等离子体(温度从几千K到上万K不等)，与此相反，冷等离子体的宏观温度，或者说重粒子温度相对较低，而电子温度可以很高。
低温等离子体因其物质温度接近室温、在实验室制备容易、对人体没有伤害、放电产生的活性粒子能够催化多数反应而成为了在生物医学、污染处理、芯片加工等应用领域的研究热点。从实验室技术到实际应用，如何稳定安全地产生等离子体成为了一个急需解决的问题。实验室普遍采用介质阻挡放电、沿面放电、滑动电弧放电和射流放电装置来产生等离子体。
目前在生物医学应用领域，尤其是针对一些病灶较深或治疗尺寸较小的情况一般采用射流放电装置；射流放电装置主要采用“针环结构”，如图1所示，高压针状电极插入石英玻璃管，接高压电源正端(火线)；环状地电极设置于石英玻璃管外壁，接高压电源负端(零线)，实现流经高压针状电极与环状地电极之间的等离子体源正常放电。
该针环结构的射流放电装置在工作时，若操作者手持或靠近射流放电装置，石英玻璃管内、外电极之间的放电容易导致环状地电极附近区域的生物组织放电，发生危险。
而且，由于220V市电达不到放电电压要求，因此需要配置电源模块将电压从220V提高到能使等离子体源正常放电的高压。目前，市面上能够满足放电所需高压的小型高压电源模块，其输入是220V交流电压(其中一端为0电位点，另外一端为正弦交流电压)或直流电压；理想的输出是7kV以上的交流高压(其中一端为0电位点，另外一端为正弦交流高压)。但是由于技术原因，暂时只能做到反相双高压输出，即两个输出端中一个输出高压，另一个输出与其相位相差180度的反相高压(实际产品因工作条件、误差等电压幅值可能有波动，并不严格相等)，而不是通常期望的0电位。这会造成在实际放电装置中缺乏地电极，容易发生触电危险。所以，通常就需要专门配置升压电路模块，才能得到0电位的一个输出端，这样相应的高压电源模块往往体积较大。也因此，在生物医学应用领域通常并不采用这样的小型高压模块。
发明内容
本发明的目的是减小低温等离子射流产生装置的体积，并提高其安全性。
为此，本发明提出一种反相双高压三环结构安全射流装置，可适用于220V市电输入的小型化电源模块，设备简单便携，方便在各种场合使用。
本发明解决其技术问题所采用的技术方案是：
一种反相双高压三环结构安全射流装置，包括管状腔体和高压电源模块；所述管状腔体的一端设置进气口，另一端作为低温等离子体射流出口；其特殊之处在于：所述高压电源模块为反相双高压输出的电源模块；所述管状腔体的外壁沿轴向依次包裹三段环状电极，自进气口至低温等离子体射流出口的方向分别记为第一铜箔、第二铜箔、第三铜箔，相应分别与高压电源模块的输出1端、高压电源模块的输出2端和地端连接；第一铜箔与第二铜箔的间距h 12为第二铜箔与第三铜箔的间距h 23的1.5～2.5倍，间距h 12和间距h 23均与高压电源模块的输出电压幅值为正相关；管状腔体的内径为1mm-3mm，内、外径的比值与高压电源模块的输出电压幅值为负相关。
进一步地，三段环状铜箔最好宽度相等。当然，三段环状铜箔若不相等，也是可以实现的。
进一步地，每一段环状铜箔的宽度宜为3mm～5mm。
进一步地，第三铜箔与低温等离子体射流出口的距离宜为0.5cm～1.5cm。
进一步地，所述管状腔体优选石英玻璃管。
进一步地，石英玻璃管的尺寸宜为：外径R＝5-8mm、内径r＝1-3mm。
进一步地，第一铜箔与第二铜箔的间距h 12宜为2-3cm，第二铜箔与第三铜箔的间距h 23宜为0.5-1cm。
进一步地，高压电源模块的输出1端、高压电源模块的输出2端的输出电压值分别为2kv～4kV。允许两输出端的幅值略有差异。
进一步地，所述高压电源模块采用三相插头，所述地端接在三相插头的上端口，三相插头的另外两个端口分别接高压电源模块的220V进线端。如此，将常规的两相插头改为三相插头适配三段环状铜箔，更有利于避免“虚地”。
本发明具有以下有益效果：
本发明巧妙利用目前市场上小型高压模块两输出端为反相高压的“缺点”， 构建一种三环放电结构产生稳定射流等离子体，同时能够将玻璃管出口处的射流电压降低到与地电极相同，避免了高压电极向下发展放电发生危险，且电场不会对实验产生影响。
本发明可适用于目前市场上220V市电输入的小型化电源模块，且玻璃管内不存在任何元器件，设备简单便携，方便在各种场合使用。
附图说明
图1为现有的放电结构示意图；图中，101-进气口；102-石英玻璃管；103-高压针状电极；104-环状地电极。
图2为本发明的三环放电结构示意图；图中，101-进气口；102-石英玻璃管；103-第一环状电极；104-第二环状电极；105-第三环状电极(地电极)。
图3为高压模块A的输出电压波形。
图4为高压模块B的输出电压波形。
图5为高压模块C在额定直流12V输入时的输出电压波形。
图6为高压模块D的输出电压波形。
图7为实施例一产生射流的实物图。
图8为实施例二产生射流的实物图。
具体实施方式
下面结合附图通过实施例对本发明做进一步的详细说明。
本发明采用反相双高压输出的小型电源模块，相应的反相双高压三环结构如图2所示，等离子体源的上端是一个用于密封进气胶管的卡扣，进气口下端连接外径为6mm、内径为2mm的石英玻璃管，通过卡扣和上方的进气软管紧密连接保证密封，石英玻璃管外侧包裹三段宽度为5mm的铜箔(环状电极)，高压模块输出1端、高压模块2端和地端分别与这三段铜箔相接。
目前，市面上反相双高压输出的小型高压电源模块有很多款。下面列举集中不同型号高压模块的参数及其工作特点：
高压模块A：尺寸大小为50mm×85mm×30mm，输入电压为220V，50Hz的交流电压，输出为类正弦波，波形呈锯齿状，一端输出峰峰值为3.1kV，另一端输出峰峰值为2.9kV，两端输出频率相同，约为15kHz，方向相反。该高压模块的基本条件满足本装置的基本放电要求。
高压模块B：尺寸大小为120mm×50mm×40mm，额定输入电压为直流12V，输出为类正弦波，在电压过零时会有略微延迟，保持在零点附近一小段时间才会再变成正弦波，一端输出峰峰值为1.3kV，另一端输出峰峰值为1.14kV，两端输出频率相同，约为16.2kHz，方向相反，如果将地电极的电势一直看做零电势，那么高压电极可以看做接入了一个频率为16.2kHz，峰峰值为2.44kV的，波形类似正弦波的高压高频电源。由于该电源输出峰峰值较低，在该电压条件下，本装置在氦气气氛中不能发生放电。
高压模块C：尺寸大小为110mm×40mm×50mm，额定输入电压为直流12V，输出为标准正弦波，单端输出峰峰值为1.9kV，两端输出频率相同，约为15.6kHz，方向相反，如果将地电极的电势一直看做零电势，那么高压电极可以看做接入了一个频率为15.6kHz，峰峰值为3.8kV的高压高频电源；该模块在小范围改变直流输入的电压值时，输出端电压值变化不大。当较大超额18V直流输入时，输出为标准正弦波，单端输出峰峰值达到3.0kV，两端输出频率相同，约为15.8kHz，方向相反，如果将地电极的电势一直看做零电势，那么高压电极可以看做接入了一个频率为15.8kHz，峰峰值为6.0kV的高压高频电源波形类似正弦波的高压高频电源。
高压模块D：尺寸大小为110mm×50mm×40mm，输入电压为交流220V，50Hz，输出为标准正弦波，一端输出峰峰值为3.0kV，另一端输出峰峰值为4.1kV， 两端输出频率相同，约为15kHz，方向相反，如果将地电极的电势一直看做零电势，那么高压电极可以看做接入了一个频率为15kHz，峰峰值为7.1kV的，波形为标准正弦波高压高频电源。
下表1中列出的四个实施例分别选择上述高压模块A、高压模块D及其同款产品，并采用外径为6mm、内径为2mm的石英玻璃管。
表1
  电源选择 单端输出电压 铜箔宽度 间距h 12 间距h 23
实施例一 高压模块D* +3.84kV/-3.68kV 5mm 3cm 1cm
实施例二 高压模块A +3.1kV/-2.90kV 3mm 2cm 0.5cm
实施例三 高压模块D +3.0kV/-4.10kV 4mm 2.5cm 1cm
实施例四 高压模块D* +3.52kV/-3.60kV 5mm 2.3cm 0.5cm
以实施例一详细说明：
实施例一选择高压模块D的同款产品，由于不同批次，输出电压峰值略有不同。将输出电压峰峰值为3.84kV的端子记为高压模块输出1端，将高压模块的输出电压峰峰值为3.68kV且与1端相位相差180度的端子记为高压模块输出2端，则高压模块1端和高压模块2端间的电压差为7.52kV，高压模块2端与地端之间的电压差为3.68kV。离玻璃管口最近的端口称为地电极端口。放电时将高压模块的两个输出端接在远离处理物的两个环电极上，将地电极接在玻璃管出口处，达到保护处理物，避免高压极向下发展放电的目的，从而产生稳定地射流等离子体。
考虑到三环结构中环和环之间的均压问题，第一环状电极103(对应于高压模块1端)与第二环状电极104(对应于高压模块2端)之间的距离约为第二环状电极104到第三环状电极(地电极)105之间距离的7.52/3.68倍。本装置中采用地电极和高压模块2端间的距离为1cm，高压模块1端和高压模块 2端的距离为2cm。等离子体源的地电极接在220V三相插头的上端口，三相插头的另外两端口分别接高压模块的220V进线端。
固定好三环放电结构的等离子体射流源，插好三相插头，并连接气体流量计，打开氦气，选择气流量为3000sccm。打开插座的开关按钮，如图7所示，产生了稳定的低温等离子体射流。
以上实施例二至实施例四也均能得到稳定的等离子体射流，类似实施例一的结果。
基于实施例一，在石英玻璃管的外径R保持6mm不变，仅调整其内径r分别为2mm、3mm、4mm、5mm，实验结果表明仅当r＝2mm时能够产生吹出管口的射流。
经大量实验，申请人得出以下结论：间距h 12必须1.5倍以上大于间距h 23；间距h 12、间距h 23与高压模块的输出电压幅值有正关联；管腔内、外径与输出电压幅值也有关系，电压越高，则内、外径比值越低。例如，单端电压峰值在3.5kV左右时，内、外径比值取1/3为佳。
通常需求情况下，较佳的参数取值范围为：每一段环状铜箔的宽度为3mm～5mm；地电极距离低温等离子体射流出口0.5cm～1.5cm；石英玻璃管的外径R为5-8mm、内径r为1-3mm；间距h 12为2-3cm，间距h 23为0.5-1cm；高压电源模块的输出1端、高压电源模块的输出2端的输出电压值分别为2kv～4kV。
按照以上规律，申请人尝试对管状腔体的材质以及壁厚、环状铜箔的内径(管的内/外径)也作适当调整，并相应对其他参数作优化匹配，实验结果表明，同样能够取得稳定的等离子体射流。

Claims (9)

  1. 一种反相双高压三环结构安全射流装置，包括管状腔体和高压电源模块；所述管状腔体的一端设置进气口，另一端作为低温等离子体射流出口；其特征在于：所述高压电源模块为反相双高压输出的电源模块；所述管状腔体的外壁沿轴向依次包裹三段环状电极，自进气口至低温等离子体射流出口的方向分别记为第一电极、第二电极、第三电极，相应分别与高压电源模块的输出1端、高压电源模块的输出2端和地端连接；第一电极与第二电极的间距h 12为第二电极与第三电极的间距h 23的1.5～2.5倍，间距h 12和间距h 23均与高压电源模块的输出电压幅值为正相关；管状腔体的内径为1mm-3mm，内、外径的比值与高压电源模块的输出电压幅值为负相关。
  2. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在于：三段环状电极的宽度相等。
  3. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在于：每一段环状电极的宽度为3mm～5mm。
  4. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在于：第三电极距离低温等离子体射流出口0.5cm～1.5cm。
  5. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在于：所述管状腔体为石英玻璃管。
  6. 根据权利要求5所述的反相双高压三环结构安全射流装置，其特征在于：石英玻璃管的外径R为5-8mm、内径r为1-3mm。
  7. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在于：第一电极与第二电极的间距h 12为2-3cm，第二电极与第三电极的间距h 23为0.5-1cm。
  8. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在 于：高压电源模块的输出1端、高压电源模块的输出2端的输出电压值分别为2kv～4kV。
  9. 根据权利要求1所述的反相双高压三环结构安全射流装置，其特征在于：所述高压电源模块采用三相插头，所述地端接在三相插头的上端口，三相插头的另外两个端口分别接高压电源模块的220V进线端。
PCT/CN2019/112076 2019-06-28 2019-10-21 一种反相双高压三环结构安全射流装置 Ceased WO2020258606A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910577114.5A CN110392478B (zh) 2019-06-28 2019-06-28 一种反相双高压三环结构安全射流装置
CN201910577114.5 2019-06-28

Publications (1)

Publication Number Publication Date
WO2020258606A1 true WO2020258606A1 (zh) 2020-12-30

Family

ID=68285823

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/112076 Ceased WO2020258606A1 (zh) 2019-06-28 2019-10-21 一种反相双高压三环结构安全射流装置

Country Status (2)

Country Link
CN (1) CN110392478B (zh)
WO (1) WO2020258606A1 (zh)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3951557B2 (ja) * 2000-05-26 2007-08-01 松下電工株式会社 プラズマ処理装置及びプラズマ処理方法
CN102254774A (zh) * 2011-05-27 2011-11-23 中国科学院物理研究所 一种活性气体流的发生装置及其产生活性气体流的方法
CN104918402A (zh) * 2015-06-01 2015-09-16 东华大学 一种常压高压协同射频辉光射流放电的装置及其放电方法
KR20150146253A (ko) * 2014-06-23 2015-12-31 광운대학교 산학협력단 전기적 안전성 및 방열 기능을 구비한 플라즈마 제트 장치
CN108566714A (zh) * 2018-06-09 2018-09-21 贵州电网有限责任公司 一种等离子体射流装置
CN208462122U (zh) * 2018-08-02 2019-02-01 王诗君 基于压电陶瓷变压器的冷等离子体射流系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474973B1 (ko) * 2013-02-08 2014-12-22 한국기계연구원 분사형 플라즈마 발생기
CN108834298A (zh) * 2018-08-16 2018-11-16 东华大学 一种通过辅助放电控制射频射流长度的装置与方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3951557B2 (ja) * 2000-05-26 2007-08-01 松下電工株式会社 プラズマ処理装置及びプラズマ処理方法
CN102254774A (zh) * 2011-05-27 2011-11-23 中国科学院物理研究所 一种活性气体流的发生装置及其产生活性气体流的方法
KR20150146253A (ko) * 2014-06-23 2015-12-31 광운대학교 산학협력단 전기적 안전성 및 방열 기능을 구비한 플라즈마 제트 장치
CN104918402A (zh) * 2015-06-01 2015-09-16 东华大学 一种常压高压协同射频辉光射流放电的装置及其放电方法
CN108566714A (zh) * 2018-06-09 2018-09-21 贵州电网有限责任公司 一种等离子体射流装置
CN208462122U (zh) * 2018-08-02 2019-02-01 王诗君 基于压电陶瓷变压器的冷等离子体射流系统

Also Published As

Publication number Publication date
CN110392478B (zh) 2021-10-15
CN110392478A (zh) 2019-10-29

Similar Documents

Publication Publication Date Title
CN102625557A (zh) 大气压裸电极冷等离子体射流发生装置
CN203761669U (zh) 一种可用于伤口愈合的常压冷等离子体发生装置
CN106714435B (zh) 一种大面积大气压等离子体射流产生装置
CN103781271A (zh) 一种可用于伤口愈合的常压冷等离子体发生装置
CN103179772B (zh) 产生大气压直流辉光放电的方法及其专用装置
CN106879155B (zh) 一种微秒脉冲等离子体射流一体机装置及其使用方法
CN102595757A (zh) 产生大体积大气压等离子体的三电极放电装置
CN107029644A (zh) 一种网孔形沿面放电等离子体产生氧活性物质的装置
CN109496048B (zh) 一种高活性粒子浓度的等离子活化油生成装置
CN109769335A (zh) 一种射频微放电长尺度等离子体产生装置及方法
CN108322983A (zh) 浮动电极增强介质阻挡放电弥散等离子体射流发生装置
CN105792495A (zh) 一种产生大气压均匀等离子体刷的装置和方法
CN105338723B (zh) 一种高压高频源驱动的dbd等离子体放电装置
Fang et al. Compact microsecond pulsed power generator driven by solar energy for dielectric barrier discharge applications
CN103220874A (zh) 一种基于介质阻挡放电的等离子体阵列
CN101848595A (zh) 大气压下单极射频电容耦合低温等离子体发生方法及装置
CN112004304B (zh) 一种电晕复合介质阻挡放电等离子体射流发生装置
CN106998617A (zh) 基于微等离子体喷枪产生大尺度大气压辉光放电的装置及方法
CN201518555U (zh) 等离子体针装置
WO2020258606A1 (zh) 一种反相双高压三环结构安全射流装置
CN111246651A (zh) 一种利用喷枪阵列产生大尺度等离子体羽的装置及方法
CN208001395U (zh) 浮动电极增强介质阻挡放电弥散等离子体射流发生装置
CN104994673B (zh) 一种产生空气环境中大气压下均匀等离子体刷的装置和方法
CN203554774U (zh) 一种环隙式介质阻挡放电等离子体发生装置
CN111867225B (zh) 一种基于等离子体的电场分离装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19935344

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19935344

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 19935344

Country of ref document: EP

Kind code of ref document: A1

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 12.09.2022)

122 Ep: pct application non-entry in european phase

Ref document number: 19935344

Country of ref document: EP

Kind code of ref document: A1