WO2020253104A1 - Carbon nano tube preparation device and method - Google Patents

Carbon nano tube preparation device and method Download PDF

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Publication number
WO2020253104A1
WO2020253104A1 PCT/CN2019/120827 CN2019120827W WO2020253104A1 WO 2020253104 A1 WO2020253104 A1 WO 2020253104A1 CN 2019120827 W CN2019120827 W CN 2019120827W WO 2020253104 A1 WO2020253104 A1 WO 2020253104A1
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catalyst
chamber
gas
chemical vapor
vapor deposition
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PCT/CN2019/120827
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French (fr)
Chinese (zh)
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陈名海
袁鑫鑫
阮超
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江西铜业技术研究院有限公司
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Priority to JP2021529513A priority Critical patent/JP7178494B2/en
Priority to KR1020217000292A priority patent/KR102535679B1/en
Publication of WO2020253104A1 publication Critical patent/WO2020253104A1/en

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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • C01B32/162Preparation characterised by catalysts

Definitions

  • the invention belongs to the technical field of new materials, and relates to a nano carbon material, in particular to a carbon nano tube preparation device and method.
  • Carbon nanotubes are tubular nanomaterials composed of sp 2 hybrid carbon-carbon covalent bonds. They have a series of advantages such as light weight, high strength, high thermal conductivity, large surface area, and stable structure. They have been widely used since their birth. Attention, leading the hot spot of nano-material technology, has broad application prospects in the fields of structural composite materials, energy, catalysis and functional devices.
  • the preparation methods of carbon nanotubes mainly include: chemical vapor deposition, arc ablation, laser, plasma, etc., of which chemical vapor deposition is a relatively mature process route and has been industrialized.
  • chemical vapor deposition due to the inherent low reaction temperature of the chemical vapor deposition method, the low degree of crystallization of carbon nanotubes caused by the chemical vapor deposition method results in a high defect content of carbon nanotubes prepared by the chemical vapor deposition method.
  • the surface defects are high, which causes their electrical conductivity to be greatly restricted and cannot be compared with carbon nanotubes prepared by high-temperature methods.
  • Chinese invention patent CN200710098478.2 discloses a method and device for the continuous production of carbon nanotubes, which adopts a multi-stage countercurrent reactor and utilizes a fluidized bed chemical vapor deposition process to achieve continuous production of carbon nanotubes.
  • Chinese invention patent 201010234322.4 discloses a method for preparing single-walled carbon nanotubes with a controllable diameter, which uses a high-temperature arc ablation method to fill carbon powder and a metal catalyst into a carbon electrode, and prepare carbon nanotubes by direct ablation of the arc.
  • Chinese invention patent 201110315452.5 discloses a method for preparing carbon nanotubes.
  • a metal salt solution is loaded on a molybdenum or zirconium substrate and placed on a deposition table in the cavity of a DC plasma jet chemical vapor deposition equipment.
  • the DC arc forms high temperature plasma
  • the metal salt is used to decompose and reduce to generate a Ni/MgO catalyst, and then the hydrocarbon gas is passed in for high-temperature cracking to form carbon nanotubes.
  • the main purpose of the present invention is to provide a carbon nanotube preparation device and method to overcome the shortcomings in the prior art.
  • a carbon nanotube preparation device which includes a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber.
  • the device passes the catalyst evaporation chamber through The pipeline chemical vapor deposition chamber is sealed and connected to realize the combination of high-temperature physical evaporation and chemical vapor deposition, so that the catalyst enters the chemical vapor deposition chamber directly through the connecting channel, and the gas path system separates the carrier gas and carbon source gas from the catalyst evaporation chamber and chemical vapor deposition chamber.
  • the deposition chamber is opened to make the catalyst react with the high-temperature cracked organic carbon source to generate carbon nanotubes, which are then separated and collected through the gas-solid separation chamber.
  • the structure of the carbon nanotube preparation device is as follows: the catalyst evaporation chamber, the chemical vapor deposition chamber and the gas-solid separation chamber are sealed and connected in sequence from left to right;
  • An organic carbon source mixed gas inlet is provided at the junction of the catalyst evaporation chamber and the chemical vapor deposition chamber; the other end of the catalyst evaporation chamber is provided with a carrier gas inlet and a high temperature evaporation spray gun;
  • the vacuum system is connected to the gas-solid separation chamber; the gas path system is connected to the organic carbon source mixed gas inlet and the carrier gas inlet respectively; the cooling system is arranged on the side wall of the chemical vapor deposition chamber, and the power supply system provides power supply.
  • the catalyst evaporation chamber is a high-temperature physical evaporation method
  • the high-temperature physical evaporation method is a high-temperature arc, a high-temperature radio frequency plasma or a high-temperature microwave plasma
  • the catalyst evaporation chamber is a double-layer water-cooled stainless steel lined with a high-temperature heat insulation layer
  • the shell is lined with a high temperature insulation layer made of porous ceramics, ceramic fiber felt, graphite or graphite felt.
  • the chemical vapor deposition chamber is a quartz tube furnace.
  • the separation method adopted in the gas-solid separation chamber is any one of centrifugal separation, cyclone separation and filtration separation.
  • Another object of the present invention is to provide a method for preparing carbon nanotubes by using the above-mentioned carbon nanotube preparation device.
  • the method specifically includes the following steps:
  • the catalyst in S1) is a metal catalyst, and the metal catalyst includes any one or more of iron, cobalt, and nickel; and the carrier gas is any one of nitrogen, argon, and helium.
  • the temperature in S2) is 500-1500°C.
  • the maximum temperature of the high-temperature evaporation spray gun in S3) is >2000°C, and the power is >10kW.
  • the organic carbon source gas mixture in S4) includes organic carbon source gas, inert carrier gas and hydrogen; wherein the volume of the organic carbon source gas is 5-80%; the volume of hydrogen is 0.1-10%, and the rest It is an inert carrier gas.
  • the organic carbon source gas is one or more of methane, ethane, ethylene, ethanol, and methanol.
  • the advantages of the present invention include:
  • the catalyst is prepared by high-temperature physical evaporation process, so that the metal is directly evaporated in a gaseous state, and ultra-fine-scale catalyst particles can be obtained, which is beneficial to the effective preparation of ultra-fine diameter carbon nanotubes and even single-walled carbon nanotubes;
  • the whole set of equipment integrates catalyst preparation, carbon nanotube preparation and separation and collection functions, which can realize continuous preparation, and has the characteristics of high production efficiency and simple process.
  • Fig. 1 is a schematic structural diagram of a carbon nanotube preparation device of the present invention.
  • Example 2 is a schematic diagram of a scanning electron microscope of the carbon nanotube product prepared in Example 1 of the method of the present invention.
  • Example 3 is a schematic diagram of a scanning electron microscope of a carbon nanotube product prepared in Example 2 of the method of the present invention.
  • Catalyst evaporation chamber 1.
  • Carrier gas inlet 3.
  • High temperature evaporation spray gun 4.
  • Catalyst 5.
  • Organic carbon source mixed gas inlet 6.
  • Chemical vapor deposition chamber 7. Gas-solid separation chamber.
  • a carbon nanotube preparation device of the present invention includes a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber.
  • the device seals the catalyst evaporation chamber through a pipeline chemical vapor deposition chamber.
  • the gas path system passes the carrier gas and carbon source gas into the catalyst evaporation chamber and the chemical vapor deposition chamber respectively, so that The catalyst reacts with the high-temperature cracked organic carbon source to generate carbon nanotubes, which are then separated and collected through a gas-solid separation chamber.
  • the structure of the carbon nanotube preparation device is as follows: the catalyst evaporation chamber, the chemical vapor deposition chamber and the gas-solid separation chamber are sealed and connected in sequence from left to right;
  • An organic carbon source mixed gas inlet is provided at the junction of the catalyst evaporation chamber and the chemical vapor deposition chamber; the other end of the catalyst evaporation chamber is provided with a carrier gas inlet and a high temperature evaporation spray gun;
  • the vacuum system is connected to the gas-solid separation chamber; the gas path system is connected to the organic carbon source mixed gas inlet and the carrier gas inlet respectively; the cooling system is arranged on the side wall of the chemical vapor deposition chamber, and the power supply system provides power supply.
  • the catalyst evaporation chamber is a high-temperature physical evaporation method
  • the high-temperature physical evaporation method is a high-temperature arc, a high-temperature radio frequency plasma or a high-temperature microwave plasma
  • the catalyst evaporation chamber is a double-layer water-cooled stainless steel lined with a high-temperature heat insulation layer
  • the shell is lined with a high temperature insulation layer made of porous ceramics, ceramic fiber felt, graphite or graphite felt.
  • the chemical vapor deposition chamber is a quartz tube furnace.
  • the separation method adopted in the gas-solid separation chamber is any one of centrifugal separation, cyclone separation and filtration separation.
  • Another object of the present invention is to provide a process method for preparing carbon nanotubes by using the above-mentioned carbon nanotube preparation device.
  • the method specifically includes the following steps:
  • the catalyst in S1) is a metal catalyst, and the metal catalyst includes any one or more of iron, cobalt, and nickel; and the carrier gas is any one of nitrogen, argon, and helium.
  • the temperature in S2) is 500-1500°C.
  • the maximum temperature of the high-temperature evaporation spray gun in S3) is >2000°C, and the power is >10kW.
  • the organic carbon source gas mixture in S4) includes organic carbon source gas, inert carrier gas and hydrogen; wherein the volume of the organic carbon source gas is 5-80%; the volume of hydrogen is 0.1-10%, and the rest It is an inert carrier gas.
  • the organic carbon source gas is one or more of methane, ethane, ethylene, ethanol, and methanol.
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature arc device with a power of 20kW.
  • the outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition;
  • the chemical vapor deposition chamber is a quartz tube furnace;
  • the gas-solid separation chamber is a cyclone separation device. With iron as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after evacuating to remove air, the inert gas carrier gas helium is switched.
  • the chemical vapor deposition chamber is heated to 1200° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium gas is passed into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixed gas is methane (45%), helium (50%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixed gas inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes at a high temperature, and the back end is connected to a cyclone separation device for gas-solid separation to achieve continuous preparation and collection, and the morphology of the carbon nanotube product scanned by an electron microscope is obtained (as shown in Figure 2).
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature radio frequency plasma with a power of 25kW.
  • the outer layer is made of double-layer water-cooled stainless steel lined with a porous ceramic high-temperature insulation layer The shell is composed; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. Using iron as the metal catalyst, first put the catalyst in the catalyst evaporation chamber, evacuating vacuum to remove air, then switch to inert gas carrier gas argon.
  • the chemical vapor deposition chamber is heated to 1300°C, and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and then the carrier gas argon gas is passed into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 1300°C, and the organic carbon source mixed gas is ethylene (5%), argon (85%) and hydrogen (10%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixed gas inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes at high temperature, and the back end is connected to a cyclone separation device for gas-solid separation to achieve continuous preparation and collection, and the morphology of the carbon nanotube product through electron microscope scanning is obtained (as shown in Figure 3)
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature microwave plasma with a power of 25kW.
  • the outer layer is double-layer water-cooled with a ceramic fiber felt high-temperature insulation layer. It is composed of a stainless steel shell; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. With iron as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after evacuating to remove air, the inert gas carrier gas helium is switched.
  • the chemical vapor deposition chamber is heated to 500° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and pass the carrier gas helium into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 500°C, and the organic carbon source mixed gas is methanol (80%), nitrogen (15%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixed gas inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature arc device with a power of 20kW.
  • the outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition;
  • the chemical vapor deposition chamber is a quartz tube furnace;
  • the gas-solid separation chamber is a cyclone separation device. With iron as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after evacuating to remove air, the inert gas carrier gas helium is switched.
  • the chemical vapor deposition chamber is heated to 1500° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium is passed into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 1500°C, and the organic carbon source mixture is ethanol (45%), helium (54.9%) and hydrogen (0.1%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature arc device with a power of 20kW.
  • the outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition;
  • the chemical vapor deposition chamber is a quartz tube furnace;
  • the gas-solid separation chamber is a cyclone separation device.
  • the chemical vapor deposition chamber is heated to 1200° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium gas is passed into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixture is ethane (45%), helium (45%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a filter device for gas-solid separation to realize continuous preparation and collection.
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature arc device with a power of 50kW.
  • the outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition;
  • the chemical vapor deposition chamber is a quartz tube furnace;
  • the gas-solid separation chamber is a cyclone separation device.
  • the chemical vapor deposition chamber is heated to 1200° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium gas is passed into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixture is methane (45%), helium (45%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes at high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
  • the carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series.
  • the catalyst evaporation chamber is a high-temperature arc device with a power of 50kW.
  • the outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition;
  • the chemical vapor deposition chamber is a quartz tube furnace;
  • the gas-solid separation chamber is a cyclone separation device.
  • iron and cobalt as metal catalysts, the catalyst is first placed in the catalyst evaporation chamber, and after vacuuming to remove air, the inert gas carrier gas helium is switched.
  • the chemical vapor deposition chamber is heated to 1200°C, and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium is passed into the chemical vapor deposition chamber through the pipeline.
  • the temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixture is methane (45%), helium (45%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet.
  • the carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.

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Abstract

Provided are a nano carbon material, specially a carbon nano tube preparation device and method, which belong to the technical field of novel materials, wherein the device is formed by connecting a catalyst evaporation chamber (1), a chemical vapor deposition chamber (6) and a gas-solid separation chamber (7) in series, by using the high temperature and impact generated by an arc flame, a catalyst (4) in the catalyst evaporation chamber (1) is directly evaporated into an ultra-fine catalyst, which enters the chemical vapor deposition chamber (6) through a connection channel. Meanwhile, carrier gas and carbon source gas are respectively introduced by the catalyst evaporation chamber (1) and the chemical vapor deposition chamber (6), and the catalyst (4) reacts with a high-temperature cracked organic carbon source to generate a carbon nano tube, which is then separated and collected by the gas-solid separation device. The method can keep the catalyst generated by the arc high-temperature evaporation to enter a chemical vapor growth interval in an ultra-fine scale or even in an atomic state, have high activity and small scale, and is an effective way to prepare high-crystallinity single-walled carbon nano tubes. Moreover, the device is simple, can realize continuous preparation, and has a great industrialization value.

Description

一种碳纳米管制备装置及方法Device and method for preparing carbon nanotube 技术领域Technical field
本发明属于新材料技术领域,涉及一种纳米碳材料,特别涉及一种碳纳米管制备装置及方法。The invention belongs to the technical field of new materials, and relates to a nano carbon material, in particular to a carbon nano tube preparation device and method.
背景技术Background technique
碳纳米管是由sp 2杂化碳-碳共价键构成的管状纳米材料,具有轻质、高强、高热导率、大表面积、结构稳定等一系列优点,自其诞生以来一直受到人们的广泛关注,引领了纳米材料科技的热点,在结构复合材料、能源、催化及功能器件领域具有广阔应用前景。 Carbon nanotubes are tubular nanomaterials composed of sp 2 hybrid carbon-carbon covalent bonds. They have a series of advantages such as light weight, high strength, high thermal conductivity, large surface area, and stable structure. They have been widely used since their birth. Attention, leading the hot spot of nano-material technology, has broad application prospects in the fields of structural composite materials, energy, catalysis and functional devices.
目前,碳纳米管的制备方法主要有:化学气相沉积法、电弧烧蚀法、激光法、等离子体法等,其中化学气相沉积法是相对成熟的工艺路线,已经获得产业化应用。但化学气相沉积法由于固有的反应温度低,带来的碳纳米管结晶程度低的不足,导致化学气相沉积法制备碳纳米管缺陷含量高。尤其在制备细管径碳纳米管及单壁碳纳米管时,表面缺陷高,导致其导电性受极大限制,无法与高温方法制备的碳纳米管相比。传统化学气相沉积法由于反应温度低,碳-碳在重构过程中不能很好地跨越其成键势垒,往往形成大量非完整sp2结构,造成碳纳米管内部缺陷,严重阻碍了电子传输,降低其导电性。因此,提高催化剂活性或提升反应温度是制备细管径碳纳米管的关键要素。At present, the preparation methods of carbon nanotubes mainly include: chemical vapor deposition, arc ablation, laser, plasma, etc., of which chemical vapor deposition is a relatively mature process route and has been industrialized. However, due to the inherent low reaction temperature of the chemical vapor deposition method, the low degree of crystallization of carbon nanotubes caused by the chemical vapor deposition method results in a high defect content of carbon nanotubes prepared by the chemical vapor deposition method. Especially in the preparation of fine-diameter carbon nanotubes and single-walled carbon nanotubes, the surface defects are high, which causes their electrical conductivity to be greatly restricted and cannot be compared with carbon nanotubes prepared by high-temperature methods. Due to the low reaction temperature of the traditional chemical vapor deposition method, the carbon-carbon bonding barrier cannot be crossed well during the reconstruction process, and a large number of incomplete sp2 structures are often formed, causing internal defects in the carbon nanotubes, which seriously hinder electron transport. Reduce its conductivity. Therefore, increasing the catalyst activity or increasing the reaction temperature is a key element for the preparation of fine-diameter carbon nanotubes.
中国发明专利CN200710098478.2公开了一种连续化生产碳纳米管的方法及装置,采用多级逆流反应器,利用流化床化学气相沉积工艺实现碳纳米管的连续制备。中国发明专利201010234322.4公开了一种直径可控单壁碳纳米管的制备方法,采用高温电弧烧蚀的方法,将碳粉和金属催化剂填充入碳电极中,通过电弧直接烧蚀制备碳纳米管。中国发明专利201110315452.5公开了一种碳纳米管的制备方法,将金属盐溶液负载在钼或锆基底上,置于直流等离子体喷射化学气相沉积设备腔内的沉积台上,直流电弧形成高温等离子体使用金属盐分解还原后生成Ni/MgO催化剂,随后通入碳氢化合物气体高温裂解形成碳纳米管。但实现对催化剂颗粒尺寸及活性的可控制备,从而制备得到细管径碳纳米管乃至单壁碳纳米管,依然是一项具有挑战性的工作。Chinese invention patent CN200710098478.2 discloses a method and device for the continuous production of carbon nanotubes, which adopts a multi-stage countercurrent reactor and utilizes a fluidized bed chemical vapor deposition process to achieve continuous production of carbon nanotubes. Chinese invention patent 201010234322.4 discloses a method for preparing single-walled carbon nanotubes with a controllable diameter, which uses a high-temperature arc ablation method to fill carbon powder and a metal catalyst into a carbon electrode, and prepare carbon nanotubes by direct ablation of the arc. Chinese invention patent 201110315452.5 discloses a method for preparing carbon nanotubes. A metal salt solution is loaded on a molybdenum or zirconium substrate and placed on a deposition table in the cavity of a DC plasma jet chemical vapor deposition equipment. The DC arc forms high temperature plasma The metal salt is used to decompose and reduce to generate a Ni/MgO catalyst, and then the hydrocarbon gas is passed in for high-temperature cracking to form carbon nanotubes. However, it is still a challenging task to realize the controllable preparation of the catalyst particle size and activity, so as to prepare fine-diameter carbon nanotubes and even single-wall carbon nanotubes.
发明内容Summary of the invention
本发明的主要目的在于提供一种碳纳米管制备装置及方法,以克服现有技术中的不足。The main purpose of the present invention is to provide a carbon nanotube preparation device and method to overcome the shortcomings in the prior art.
为实现前述发明目的,本发明采用的技术方案为:一种碳纳米管制备装置,所述碳纳米管制备装置包括催化剂蒸发腔、化学气相沉积腔和气固分离腔,该装置将催化剂蒸发腔通过管道化学气相沉积腔密封连接,实现高温物理蒸发与化学气相沉积联用,使催化剂直接通过连接通道进入化学气相沉积腔,同时气路系统将载气和碳源气分别由催化剂蒸发腔和化学气相沉积腔通入,使催化剂与高温裂解的有机碳源发生反应,生成碳纳米管,进而通过气固分离腔分离收集。In order to achieve the aforementioned object of the invention, the technical solution adopted by the present invention is: a carbon nanotube preparation device, which includes a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber. The device passes the catalyst evaporation chamber through The pipeline chemical vapor deposition chamber is sealed and connected to realize the combination of high-temperature physical evaporation and chemical vapor deposition, so that the catalyst enters the chemical vapor deposition chamber directly through the connecting channel, and the gas path system separates the carrier gas and carbon source gas from the catalyst evaporation chamber and chemical vapor deposition chamber. The deposition chamber is opened to make the catalyst react with the high-temperature cracked organic carbon source to generate carbon nanotubes, which are then separated and collected through the gas-solid separation chamber.
进一步,所述的碳纳米管制备装置结构为:所述催化剂蒸发腔、化学气相沉积腔和气固分离腔从左到右依次密封连接;Further, the structure of the carbon nanotube preparation device is as follows: the catalyst evaporation chamber, the chemical vapor deposition chamber and the gas-solid separation chamber are sealed and connected in sequence from left to right;
所述催化剂蒸发腔和化学气相沉积腔的连接处设置有有机碳源混合气入口;所述催化剂蒸发腔另一端设有载气入口和高温蒸发喷枪;An organic carbon source mixed gas inlet is provided at the junction of the catalyst evaporation chamber and the chemical vapor deposition chamber; the other end of the catalyst evaporation chamber is provided with a carrier gas inlet and a high temperature evaporation spray gun;
真空系统与所述气固分离腔连接;所述气路系统分别与所述有机碳源混合气入口和载气入口连接;冷却系统设置在所述化学气相沉积腔的侧壁上,电源系统提供电源。The vacuum system is connected to the gas-solid separation chamber; the gas path system is connected to the organic carbon source mixed gas inlet and the carrier gas inlet respectively; the cooling system is arranged on the side wall of the chemical vapor deposition chamber, and the power supply system provides power supply.
进一步:所述催化剂蒸发腔为高温物理蒸发方式;所述高温物理蒸发方式为高温电弧、高温射频等离子体或高温微波等离子体;所述催化剂蒸发腔为内衬高温隔热层的双层水冷不锈钢壳体,内衬高温保温层为多孔陶瓷、陶瓷纤维毡、石墨或石墨毡。Further: the catalyst evaporation chamber is a high-temperature physical evaporation method; the high-temperature physical evaporation method is a high-temperature arc, a high-temperature radio frequency plasma or a high-temperature microwave plasma; the catalyst evaporation chamber is a double-layer water-cooled stainless steel lined with a high-temperature heat insulation layer The shell is lined with a high temperature insulation layer made of porous ceramics, ceramic fiber felt, graphite or graphite felt.
进一步:所述化学气相沉积腔为石英管式炉。Further: the chemical vapor deposition chamber is a quartz tube furnace.
进一步:所述气固分离腔采用的分离方式为:离心分离、旋风分离和过滤分离方式的任意一种。Further: the separation method adopted in the gas-solid separation chamber is any one of centrifugal separation, cyclone separation and filtration separation.
本发明的另一目的提供一种采用上述的碳纳米管制备装置制备碳纳米管的方法,所述方法具体包括以下步骤:Another object of the present invention is to provide a method for preparing carbon nanotubes by using the above-mentioned carbon nanotube preparation device. The method specifically includes the following steps:
S1)将催化剂置于催化剂蒸发腔内,启动真空系统将催化剂蒸发腔内的空气排出后,启动气路系统切换通入惰性气体载气;S1) Put the catalyst in the catalyst evaporation chamber, start the vacuum system to exhaust the air in the catalyst evaporation chamber, start the gas path system to switch and pass the inert gas carrier gas;
S2)开启化学气相沉积腔加热升温,将温度升至指定温度;S2) Turn on the chemical vapor deposition chamber to heat up and increase the temperature to the specified temperature;
S3)随后开启高温蒸发喷枪将催化剂蒸发腔内的催化剂蒸发出来,通过管路连接随载气进入化学气相沉积腔;S3) Then turn on the high-temperature evaporation spray gun to evaporate the catalyst in the catalyst evaporation chamber, and enter the chemical vapor deposition chamber with the carrier gas through the pipeline connection;
S4)接着在化学气相沉积腔中引入有机碳源气体混合气,生成的产物通过连接管道,随载气进入气固分离腔,分离后获得最终产物。S4) Then the organic carbon source gas mixture is introduced into the chemical vapor deposition chamber, and the resulting product enters the gas-solid separation chamber with the carrier gas through the connecting pipe, and the final product is obtained after separation.
进一步:所述S1)中催化剂为金属催化剂,所述金属催化剂包括铁、钴、镍的任意一种或多种;所述载气是氮气、氩气和氦气的任意一种。Further: the catalyst in S1) is a metal catalyst, and the metal catalyst includes any one or more of iron, cobalt, and nickel; and the carrier gas is any one of nitrogen, argon, and helium.
进一步:所述S2)中的温度为500-1500℃。Further: the temperature in S2) is 500-1500°C.
进一步:所述S3)中的高温蒸发喷枪最高温度>2000℃,功率>10kW。Further: the maximum temperature of the high-temperature evaporation spray gun in S3) is >2000°C, and the power is >10kW.
进一步:所述S4)中有机碳源气体混合气包括机碳源气体、惰性载气和氢气;其中,所述机碳源气体的体积为5-80%;氢气体积为0.1-10%,其余为惰性载气。Further: the organic carbon source gas mixture in S4) includes organic carbon source gas, inert carrier gas and hydrogen; wherein the volume of the organic carbon source gas is 5-80%; the volume of hydrogen is 0.1-10%, and the rest It is an inert carrier gas.
进一步:所述有机碳源气体为甲烷、乙烷、乙烯、乙醇、甲醇中的一种或多种。Further: the organic carbon source gas is one or more of methane, ethane, ethylene, ethanol, and methanol.
与现有技术相比,本发明的优点包括:Compared with the prior art, the advantages of the present invention include:
(1)采用高温物理蒸发工艺与化学气相沉积联用的装置,使催化剂制备与碳纳米管生长连续进行,有效保证了催化剂的活性,避免间歇制备催化剂氧化和聚集带来的催化剂失效,有利于提高后续化学气相沉积的催化效率;(1) The use of a high-temperature physical evaporation process combined with a chemical vapor deposition device enables continuous catalyst preparation and carbon nanotube growth, effectively ensuring the activity of the catalyst, and avoiding catalyst failure caused by oxidation and aggregation of the intermittently prepared catalyst, which is beneficial Improve the catalytic efficiency of subsequent chemical vapor deposition;
(2)采用高温物理蒸发工艺制备催化剂,使金属直接呈气态蒸发出来,能够获得超细尺度的催化剂颗粒,有利于超细管径碳纳米管乃至单壁碳纳米管的有效制备;(2) The catalyst is prepared by high-temperature physical evaporation process, so that the metal is directly evaporated in a gaseous state, and ultra-fine-scale catalyst particles can be obtained, which is beneficial to the effective preparation of ultra-fine diameter carbon nanotubes and even single-walled carbon nanotubes;
(3)整套装置集催化剂制备、碳纳米管制备及分离收集功能于一体,可实现连续化制备,具有生产效率高、工艺简便等特点。(3) The whole set of equipment integrates catalyst preparation, carbon nanotube preparation and separation and collection functions, which can realize continuous preparation, and has the characteristics of high production efficiency and simple process.
附图说明Description of the drawings
图1为本发明的一种碳纳米管制备装置的结构示意图。Fig. 1 is a schematic structural diagram of a carbon nanotube preparation device of the present invention.
图2为本发明方法的实施例1制备的碳纳米管产物扫描电子显微镜示意图。2 is a schematic diagram of a scanning electron microscope of the carbon nanotube product prepared in Example 1 of the method of the present invention.
图3为本发明方法的实施例2制备的碳纳米管产物扫描电子显微镜示意图。3 is a schematic diagram of a scanning electron microscope of a carbon nanotube product prepared in Example 2 of the method of the present invention.
图中:In the figure:
1.催化剂蒸发腔;2.载气入口;3.高温蒸发喷枪;4.催化剂;5.有机碳源混合 气入口;6.化学气相沉积腔;7.气固分离腔。1. Catalyst evaporation chamber; 2. Carrier gas inlet; 3. High temperature evaporation spray gun; 4. Catalyst; 5. Organic carbon source mixed gas inlet; 6. Chemical vapor deposition chamber; 7. Gas-solid separation chamber.
具体实施方式Detailed ways
下面结合附图和具体实施例对本发明的技术方案做进一步说明。The technical solution of the present invention will be further described below in conjunction with the drawings and specific embodiments.
如图1所示,本发明一种碳纳米管制备装置,所述碳纳米管制备装置包括催化剂蒸发腔、化学气相沉积腔和气固分离腔,该装置将催化剂蒸发腔通过管道化学气相沉积腔密封连接,实现高温物理蒸发与化学气相沉积联用,使催化剂直接通过连接通道进入化学气相沉积腔,同时气路系统将载气和碳源气分别由催化剂蒸发腔和化学气相沉积腔通入,使催化剂与高温裂解的有机碳源发生反应,生成碳纳米管,进而通过气固分离腔分离收集。As shown in Figure 1, a carbon nanotube preparation device of the present invention includes a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber. The device seals the catalyst evaporation chamber through a pipeline chemical vapor deposition chamber. Connected to realize the combined use of high-temperature physical evaporation and chemical vapor deposition, so that the catalyst directly enters the chemical vapor deposition chamber through the connecting channel, and the gas path system passes the carrier gas and carbon source gas into the catalyst evaporation chamber and the chemical vapor deposition chamber respectively, so that The catalyst reacts with the high-temperature cracked organic carbon source to generate carbon nanotubes, which are then separated and collected through a gas-solid separation chamber.
进一步,所述的碳纳米管制备装置结构为:所述催化剂蒸发腔、化学气相沉积腔和气固分离腔从左到右依次密封连接;Further, the structure of the carbon nanotube preparation device is as follows: the catalyst evaporation chamber, the chemical vapor deposition chamber and the gas-solid separation chamber are sealed and connected in sequence from left to right;
所述催化剂蒸发腔和化学气相沉积腔的连接处设置有有机碳源混合气入口;所述催化剂蒸发腔另一端设有载气入口和高温蒸发喷枪;An organic carbon source mixed gas inlet is provided at the junction of the catalyst evaporation chamber and the chemical vapor deposition chamber; the other end of the catalyst evaporation chamber is provided with a carrier gas inlet and a high temperature evaporation spray gun;
真空系统与所述气固分离腔连接;所述气路系统分别与所述有机碳源混合气入口和载气入口连接;冷却系统设置在所述化学气相沉积腔的侧壁上,电源系统提供电源。The vacuum system is connected to the gas-solid separation chamber; the gas path system is connected to the organic carbon source mixed gas inlet and the carrier gas inlet respectively; the cooling system is arranged on the side wall of the chemical vapor deposition chamber, and the power supply system provides power supply.
进一步:所述催化剂蒸发腔为高温物理蒸发方式;所述高温物理蒸发方式为高温电弧、高温射频等离子体或高温微波等离子体;所述催化剂蒸发腔为内衬高温隔热层的双层水冷不锈钢壳体,内衬高温保温层为多孔陶瓷、陶瓷纤维毡、石墨或石墨毡。Further: the catalyst evaporation chamber is a high-temperature physical evaporation method; the high-temperature physical evaporation method is a high-temperature arc, a high-temperature radio frequency plasma or a high-temperature microwave plasma; the catalyst evaporation chamber is a double-layer water-cooled stainless steel lined with a high-temperature heat insulation layer The shell is lined with a high temperature insulation layer made of porous ceramics, ceramic fiber felt, graphite or graphite felt.
进一步:所述化学气相沉积腔为石英管式炉。Further: the chemical vapor deposition chamber is a quartz tube furnace.
进一步:所述气固分离腔采用的分离方式为:离心分离、旋风分离和过滤分离方式的任意一种。Further: the separation method adopted in the gas-solid separation chamber is any one of centrifugal separation, cyclone separation and filtration separation.
本发明的另一目的提供一种采用上述的碳纳米管制备装置制备碳纳米管的工艺方法,所述方法具体包括以下步骤:Another object of the present invention is to provide a process method for preparing carbon nanotubes by using the above-mentioned carbon nanotube preparation device. The method specifically includes the following steps:
S1)将催化剂置于催化剂蒸发腔内,启动真空系统将催化剂蒸发腔内的空气排出后,启动气路系统切换通入惰性气体载气;S1) Put the catalyst in the catalyst evaporation chamber, start the vacuum system to exhaust the air in the catalyst evaporation chamber, start the gas path system to switch and pass the inert gas carrier gas;
S2)开启化学气相沉积腔加热升温,将温度升至指定温度;S2) Turn on the chemical vapor deposition chamber to heat up and increase the temperature to the specified temperature;
S3)随后开启高温蒸发喷枪将催化剂蒸发腔内的催化剂蒸发出来,通过管路 连接随载气进入化学气相沉积腔;S3) Then turn on the high-temperature evaporation spray gun to evaporate the catalyst in the catalyst evaporation chamber, and enter the chemical vapor deposition chamber with the carrier gas through the pipeline connection;
S4)接着在化学气相沉积腔中引入有机碳源气体混合气,生成的产物通过连接管道,随载气进入气固分离腔,分离后获得最终产物。S4) Then the organic carbon source gas mixture is introduced into the chemical vapor deposition chamber, and the resulting product enters the gas-solid separation chamber with the carrier gas through the connecting pipe, and the final product is obtained after separation.
进一步:所述S1)中催化剂为金属催化剂,所述金属催化剂包括铁、钴、镍的任意一种或多种;所述载气是氮气、氩气和氦气的任意一种。Further: the catalyst in S1) is a metal catalyst, and the metal catalyst includes any one or more of iron, cobalt, and nickel; and the carrier gas is any one of nitrogen, argon, and helium.
进一步:所述S2)中的温度为500-1500℃。Further: the temperature in S2) is 500-1500°C.
进一步:所述S3)中的高温蒸发喷枪最高温度>2000℃,功率>10kW。Further: the maximum temperature of the high-temperature evaporation spray gun in S3) is >2000°C, and the power is >10kW.
进一步:所述S4)中有机碳源气体混合气包括机碳源气体、惰性载气和氢气;其中,所述机碳源气体的体积为5-80%;氢气体积为0.1-10%,其余为惰性载气。Further: the organic carbon source gas mixture in S4) includes organic carbon source gas, inert carrier gas and hydrogen; wherein the volume of the organic carbon source gas is 5-80%; the volume of hydrogen is 0.1-10%, and the rest It is an inert carrier gas.
进一步:所述有机碳源气体为甲烷、乙烷、乙烯、乙醇、甲醇中的一种或多种。Further: the organic carbon source gas is one or more of methane, ethane, ethylene, ethanol, and methanol.
实施例1Example 1
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温电弧装置,功率20kW,外层由内衬石墨高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以铁作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真空排除空气后,切换通入惰性气体载气氦气。同时,将化学气相沉积腔升温至1200℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氦气经管路通至化学气相沉积腔内。化学气相沉积腔温度控制在1200℃,有机碳源混合气为甲烷(45%)、氦气(50%)和氢气(5%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接旋风分离装置进行气固分离实现连续制备收集,得到碳纳米管产物进过电子显微镜扫描的形貌(如图2所示)。The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature arc device with a power of 20kW. The outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. With iron as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after evacuating to remove air, the inert gas carrier gas helium is switched. At the same time, the chemical vapor deposition chamber is heated to 1200° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium gas is passed into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixed gas is methane (45%), helium (50%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixed gas inlet. The carbon source is catalytically cracked to grow carbon nanotubes at a high temperature, and the back end is connected to a cyclone separation device for gas-solid separation to achieve continuous preparation and collection, and the morphology of the carbon nanotube product scanned by an electron microscope is obtained (as shown in Figure 2).
实施例2Example 2
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温射频等离子体,功率25kW,外层由内衬多孔陶瓷高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以铁作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真 空排除空气后,切换通入惰性气体载气氩气。同时,将化学气相沉积腔升温至1300℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氩气经管路通至化学气相沉积腔内。化学气相沉积腔温度控制在1300℃,有机碳源混合气为乙烯(5%)、氩气(85%)和氢气(10%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接旋风分离装置进行气固分离实现连续制备收集,得到碳纳米管产物进过电子显微镜扫描的形貌(如图3所示)The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature radio frequency plasma with a power of 25kW. The outer layer is made of double-layer water-cooled stainless steel lined with a porous ceramic high-temperature insulation layer The shell is composed; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. Using iron as the metal catalyst, first put the catalyst in the catalyst evaporation chamber, evacuating vacuum to remove air, then switch to inert gas carrier gas argon. At the same time, the chemical vapor deposition chamber is heated to 1300°C, and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and then the carrier gas argon gas is passed into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 1300°C, and the organic carbon source mixed gas is ethylene (5%), argon (85%) and hydrogen (10%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixed gas inlet. The carbon source is catalytically cracked to grow carbon nanotubes at high temperature, and the back end is connected to a cyclone separation device for gas-solid separation to achieve continuous preparation and collection, and the morphology of the carbon nanotube product through electron microscope scanning is obtained (as shown in Figure 3)
实施例3Example 3
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温微波等离子体,功率25kW,外层由内衬陶瓷纤维毡高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以铁作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真空排除空气后,切换通入惰性气体载气氦气。同时,将化学气相沉积腔升温至500℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氦气经管路通至化学气相沉积腔内。化学气相沉积腔温度控制在500℃,有机碳源混合气为甲醇(80%)、氮气(15%)和氢气(5%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接旋风分离装置进行气固分离实现连续制备收集。The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature microwave plasma with a power of 25kW. The outer layer is double-layer water-cooled with a ceramic fiber felt high-temperature insulation layer. It is composed of a stainless steel shell; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. With iron as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after evacuating to remove air, the inert gas carrier gas helium is switched. At the same time, the chemical vapor deposition chamber is heated to 500° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and pass the carrier gas helium into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 500°C, and the organic carbon source mixed gas is methanol (80%), nitrogen (15%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixed gas inlet. The carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
实施例4Example 4
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温电弧装置,功率20kW,外层由内衬石墨高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以铁作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真空排除空气后,切换通入惰性气体载气氦气。同时,将化学气相沉积腔升温至1500℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氦气经管路通至化学气相沉积腔内。化学气相沉积腔温度控制在1500℃,有机碳源混合气为乙醇(45%)、氦气(54.9%)和氢气(0.1%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接旋风分离装置进行气固分离实现连续制备收集。The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature arc device with a power of 20kW. The outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. With iron as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after evacuating to remove air, the inert gas carrier gas helium is switched. At the same time, the chemical vapor deposition chamber is heated to 1500° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium is passed into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 1500°C, and the organic carbon source mixture is ethanol (45%), helium (54.9%) and hydrogen (0.1%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet. The carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
实施例5Example 5
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温电弧装置,功率20kW,外层由内衬石墨高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以钴作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真空排除空气后,切换通入惰性气体载气氦气。同时,将化学气相沉积腔升温至1200℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氦气经管路通至化学气相沉积腔内。化学气相沉积腔温度控制在1200℃,有机碳源混合气为乙烷(45%)、氦气(45%)和氢气(5%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接过滤装置进行气固分离实现连续制备收集。The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature arc device with a power of 20kW. The outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. With cobalt as the metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, after vacuuming to remove air, the inert gas carrier gas helium is switched. At the same time, the chemical vapor deposition chamber is heated to 1200° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium gas is passed into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixture is ethane (45%), helium (45%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet. The carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a filter device for gas-solid separation to realize continuous preparation and collection.
实施例6Example 6
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温电弧装置,功率50kW,外层由内衬石墨高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以镍作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真空排除空气后,切换通入惰性气体载气氦气。同时,将化学气相沉积腔升温至1200℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氦气经管路通至化学气相沉积腔内。化学气相沉积腔温度控制在1200℃,有机碳源混合气为甲烷(45%)、氦气(45%)和氢气(5%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接旋风分离装置进行气固分离实现连续制备收集。The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature arc device with a power of 50kW. The outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. When nickel is used as a metal catalyst, the catalyst is first placed in the catalyst evaporation chamber, and after vacuuming to remove air, the inert gas carrier gas helium is switched. At the same time, the chemical vapor deposition chamber is heated to 1200° C., and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium gas is passed into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixture is methane (45%), helium (45%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet. The carbon source is catalytically cracked to grow carbon nanotubes at high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
实施例7Example 7
碳纳米管制备装置,由催化剂蒸发腔、化学气相沉积腔和气固分离腔串联,其中催化剂蒸发腔为高温电弧装置,功率50kW,外层由内衬石墨高温隔热层的双层水冷不锈钢壳体组成;化学气相沉积腔由石英管式炉;气固分离腔为旋风分离装置。以铁、钴作为金属催化剂,首先将催化剂置于催化剂蒸发腔,抽真空排除空气后,切换通入惰性气体载气氦气。同时,将化学气相沉积腔升温至1200℃,随后开启电弧装置产生的高温电弧,将铁原子气化后由载气氦气经管路通至化学 气相沉积腔内。化学气相沉积腔温度控制在1200℃,有机碳源混合气为甲烷(45%)、氦气(45%)和氢气(5%),经有机碳源混合气入口注入化学气相沉积腔。碳源在高温下经催化剂催化裂解生长碳纳米管,后端接旋风分离装置进行气固分离实现连续制备收集。The carbon nanotube preparation device consists of a catalyst evaporation chamber, a chemical vapor deposition chamber and a gas-solid separation chamber in series. The catalyst evaporation chamber is a high-temperature arc device with a power of 50kW. The outer layer is made of a double-layer water-cooled stainless steel shell lined with a graphite high-temperature heat insulation layer Composition; the chemical vapor deposition chamber is a quartz tube furnace; the gas-solid separation chamber is a cyclone separation device. Using iron and cobalt as metal catalysts, the catalyst is first placed in the catalyst evaporation chamber, and after vacuuming to remove air, the inert gas carrier gas helium is switched. At the same time, the chemical vapor deposition chamber is heated to 1200°C, and then the high-temperature arc generated by the arc device is turned on to vaporize the iron atoms and the carrier gas helium is passed into the chemical vapor deposition chamber through the pipeline. The temperature of the chemical vapor deposition chamber is controlled at 1200°C, and the organic carbon source mixture is methane (45%), helium (45%) and hydrogen (5%), which are injected into the chemical vapor deposition chamber through the organic carbon source mixture inlet. The carbon source is catalytically cracked to grow carbon nanotubes under high temperature, and the back end is connected with a cyclone separation device for gas-solid separation to realize continuous preparation and collection.
鉴于现有技术中的不足,本案发明人经长期研究和大量实践,得以提出本发明的技术方案,如下将对该技术方案、其实施过程及原理等作进一步的解释说明。In view of the deficiencies in the prior art, the inventor of the present case has been able to propose the technical solution of the present invention after long-term research and extensive practice. The technical solution, its implementation process and principles will be further explained as follows.

Claims (10)

  1. 一种碳纳米管制备装置,所述碳纳米管制备装置包括催化剂蒸发腔、化学气相沉积腔和气固分离腔,其特征在于,该装置将催化剂蒸发腔通过管道化学气相沉积腔密封连接,实现高温物理蒸发与化学气相沉积联用,使催化剂直接通过连接通道进入化学气相沉积腔,同时气路系统将载气和碳源气分别由催化剂蒸发腔和化学气相沉积腔通入,使催化剂与高温裂解的有机碳源发生反应,生成碳纳米管,进而通过气固分离腔分离收集。A carbon nanotube preparation device. The carbon nanotube preparation device includes a catalyst evaporation chamber, a chemical vapor deposition chamber, and a gas-solid separation chamber. The device is characterized in that the device seals the catalyst evaporation chamber through the pipeline chemical vapor deposition chamber to achieve high temperature. Physical evaporation and chemical vapor deposition are combined to make the catalyst directly enter the chemical vapor deposition chamber through the connecting channel. At the same time, the gas path system passes the carrier gas and carbon source gas into the catalyst vaporization chamber and the chemical vapor deposition chamber respectively to make the catalyst and high temperature cracking The organic carbon source reacts to produce carbon nanotubes, which are then separated and collected through the gas-solid separation chamber.
  2. 根据权利要求1所述的碳纳米管制备装置,其特征在于,所述的碳纳米管制备装置结构为:所述催化剂蒸发腔、化学气相沉积腔和气固分离腔从左到右依次密封连接;The carbon nanotube preparation device according to claim 1, wherein the structure of the carbon nanotube preparation device is: the catalyst evaporation chamber, the chemical vapor deposition chamber, and the gas-solid separation chamber are sealed and connected in sequence from left to right;
    所述催化剂蒸发腔和化学气相沉积腔的连接处设置有有机碳源混合气入口;所述催化剂蒸发腔另一端设有载气入口和高温蒸发喷枪;An organic carbon source mixed gas inlet is provided at the junction of the catalyst evaporation chamber and the chemical vapor deposition chamber; the other end of the catalyst evaporation chamber is provided with a carrier gas inlet and a high temperature evaporation spray gun;
    真空系统与所述气固分离腔连接;所述气路系统分别与所述有机碳源混合气入口和载气入口连接;冷却系统设置在所述化学气相沉积腔的侧壁上,电源系统提供电源。The vacuum system is connected to the gas-solid separation chamber; the gas path system is connected to the organic carbon source mixed gas inlet and the carrier gas inlet respectively; the cooling system is arranged on the side wall of the chemical vapor deposition chamber, and the power supply system provides power supply.
  3. 根据权利要求2所述的碳纳米管制备装置,其特征在于,所述催化剂蒸发腔为高温物理蒸发方式;所述高温物理蒸发方式为高温电弧、高温射频等离子体或高温微波等离子体;所述催化剂蒸发腔为内衬高温隔热层的双层水冷不锈钢壳体,内衬高温保温层为多孔陶瓷、陶瓷纤维毡、石墨或石墨毡。The carbon nanotube preparation device according to claim 2, wherein the catalyst evaporation chamber is a high-temperature physical evaporation method; the high-temperature physical evaporation method is a high-temperature arc, a high-temperature radio frequency plasma, or a high-temperature microwave plasma; The catalyst evaporation chamber is a double-layer water-cooled stainless steel shell lined with a high-temperature heat insulation layer, and the high-temperature heat insulation layer is lined with porous ceramics, ceramic fiber felt, graphite or graphite felt.
  4. 根据权利要求2所述的装置,其特征在于:所述化学气相沉积腔为石英管式炉;所述气固分离腔采用的分离方式为:离心分离、旋风分离和过滤分离方式的任意一种。The device according to claim 2, wherein the chemical vapor deposition chamber is a quartz tube furnace; the separation method used in the gas-solid separation chamber is any one of centrifugal separation, cyclone separation and filtration separation .
  5. 一种采用如权利要求1-4任意一项所述的碳纳米管制备装置制备碳纳米管的方法,其特征在于:所述方法具体包括以下步骤:A method for preparing carbon nanotubes by using the carbon nanotube preparation device according to any one of claims 1 to 4, wherein the method specifically includes the following steps:
    S1)将催化剂置于催化剂蒸发腔内,启动真空系统将催化剂蒸发腔内的空气排出后,启动气路系统切换通入惰性气体载气;S1) Put the catalyst in the catalyst evaporation chamber, start the vacuum system to exhaust the air in the catalyst evaporation chamber, start the gas path system to switch and pass the inert gas carrier gas;
    S2)开启化学气相沉积腔加热升温,将温度升至指定温度;S2) Turn on the chemical vapor deposition chamber to heat up and increase the temperature to the specified temperature;
    S3)随后开启高温蒸发喷枪将催化剂蒸发腔内的催化剂蒸发出来,通过管路连接随载气进入化学气相沉积腔;S3) Then turn on the high-temperature evaporation spray gun to evaporate the catalyst in the catalyst evaporation chamber, and enter the chemical vapor deposition chamber with the carrier gas through the pipeline connection;
    S4)接着在化学气相沉积腔中引入有机碳源气体混合气,生成的产物通过连 接管道,随载气进入气固分离腔,分离后获得最终产物。S4) Then, the organic carbon source gas mixture is introduced into the chemical vapor deposition chamber, and the resulting product enters the gas-solid separation chamber with the carrier gas through the connecting pipe, and the final product is obtained after separation.
  6. 根据权利要求5所述的方法,其特征在于:所述S1)中催化剂为金属催化剂,所述金属催化剂包括铁、钴、镍的任意一种或多种;所述载气是氮气、氩气和氦气的任意一种。The method according to claim 5, wherein the catalyst in S1) is a metal catalyst, and the metal catalyst includes any one or more of iron, cobalt, and nickel; and the carrier gas is nitrogen or argon. And helium.
  7. 根据权利要求5所述的方法,其特征在于:所述S2)中的温度为500-1500℃。The method according to claim 5, wherein the temperature in S2) is 500-1500°C.
  8. 根据权利要求5所述的方法,其特征在于:所述S3)中的高温蒸发喷枪最高温度>2000℃,功率>10kW。The method according to claim 5, characterized in that the highest temperature of the high-temperature evaporation spray gun in S3) is >2000°C and the power is >10kW.
  9. 根据权利要求5所述的方法,其特征在于:所述S4)中有机碳源气体混合气包括机碳源气体、惰性载气和氢气;其中,所述机碳源气体的体积为5-80%;氢气体积为0.1-10%,其余为惰性载气。The method according to claim 5, wherein the organic carbon source gas mixture in S4) includes organic carbon source gas, inert carrier gas and hydrogen; wherein the volume of the organic carbon source gas is 5-80 %; The volume of hydrogen is 0.1-10%, and the rest is inert carrier gas.
  10. 根据权利要求9所述的方法,其特征在于:所述有机碳源气体为甲烷、乙烷、乙烯、乙醇、甲醇中的一种或多种。The method according to claim 9, wherein the organic carbon source gas is one or more of methane, ethane, ethylene, ethanol, and methanol.
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