WO2020233233A1

WO2020233233A1 - Touch display substrate and manufacturing method therefor, and touch display device

Info

Publication number: WO2020233233A1
Application number: PCT/CN2020/082013
Authority: WO
Inventors: 杨盛际; 陈小川; 王辉; 卢鹏程
Original assignee: 京东方科技集团股份有限公司
Priority date: 2019-05-22
Filing date: 2020-03-30
Publication date: 2020-11-26
Also published as: CN110147179A

Abstract

A touch display substrate and a manufacturing method therefor, and a touch display device. The touch display substrate comprises a substrate (10), and pixel units (30) and a pressure touch structure (40) which are provided on the substrate (10). The pixel unit (30) comprises: a micro light emitting diode (31); the pressure touch structure (40) is used for sensing pressure information applied to the touch display substrate and is provided between the pixel units (30). According to the technical solution provided by the present application, by providing the pressure touch structure (40) between the pixel units, three-dimensional touch of a Micro LED display product can be realized, and the application range of the Micro LED display product is further expanded.

Description

Touch display substrate, manufacturing method thereof, and touch display device

Technical field

The embodiments of the present disclosure relate to a touch display substrate, a manufacturing method thereof, and a touch display device.

Background technique

As a new generation of mainstream display technology, Micro Light-Emitting Diode (Micro LED) can be widely used in optoelectronics and microelectronics due to its high luminous efficiency, small size, low power consumption, and long product life. In the fields of, electronic informatics and optics, Micro LED is another display technology that has the advantages of thinness and power saving following Organic Light-Emitting Diode (OLED).

Summary of the invention

In a first aspect, the present application provides a touch display substrate, including: a base substrate, and a pixel unit and a pressure touch structure provided on the base substrate;

Wherein, the pixel unit includes a micro light emitting diode, and the pressure touch structure is used to sense pressure information applied on the touch display substrate, and is arranged between the pixel units.

Optionally, the pressure touch structure includes a multilayer structure, the pixel unit includes a multilayer structure, and at least one layer of the pressure touch structure and at least one layer of the pixel unit are arranged in the same layer.

Optionally, the lowermost layer of the pressure touch structure and at least one layer of the pixel unit are arranged in the same layer.

Optionally, the pixel unit further includes: a thin film transistor, a first connection electrode, a second connection electrode, and a capacitor electrode;

The capacitor electrode is located on the side of the interlayer dielectric layer of the thin film transistor close to the base substrate, and is used to form a capacitor with the gate electrode of the thin film transistor; the first connection electrode is located on the thin film transistor away from the substrate. One side of the base substrate and connected to the drain electrode of the thin film transistor; the second connection electrode and the first connection electrode are arranged in the same layer, and the micro light emitting diode is respectively connected to the first connection electrode and the second connection electrode connection.

Optionally, the pressure touch structure includes: pressure touch units arranged in an array, and each pressure touch unit includes: a first touch electrode and a second touch electrode that are insulated from each other, and the second touch The control electrode is located on a side of the first touch electrode away from the base substrate;

For each pressure touch unit, the orthographic projection of the second touch electrode on the base substrate covers the orthographic projection of the first touch electrode on the base substrate.

Optionally, the pressure touch structure includes: a first touch layer and a second touch layer; the first touch layer and the second touch layer are separated by an insulating layer, and the second touch layer is located in the A side of the first touch layer away from the base substrate, the first touch layer includes a plurality of first touch electrodes, and the second touch layer includes a plurality of second touch electrodes;

The plurality of first touch electrodes and the plurality of second touch electrodes are staggered horizontally and vertically.

Optionally, the first touch layer and the second touch layer are arranged in the same layer.

Optionally, the first touch electrode and the first connection electrode are provided in the same layer, and the second touch electrode is provided on the cover plate.

Optionally, the touch display substrate further includes: a filling layer located between the first touch electrode and the cover plate;

The second touch electrode is located on a side of the cover plate close to the base substrate.

Optionally, the touch display substrate further includes: a frame sealant located between the flat layer of the thin film transistor and the cover plate;

The second touch electrode is located on a side of the cover plate away from the base substrate.

Optionally, the touch display substrate further includes: a first electrode;

The first electrode and the source and drain electrodes of the thin film transistor are arranged in the same layer, and the second connection electrode is connected to the first electrode.

Optionally, the touch display substrate further includes: a second electrode;

The second electrode is connected to the first electrode, and the second electrode is provided in the same layer as the capacitor electrode or the gate electrode of the thin film transistor.

Optionally, the touch display substrate further includes: a third electrode;

The third electrode and the source and drain electrodes of the thin film transistor are arranged in the same layer, and the first touch electrode is connected to the third electrode.

Optionally, the touch display substrate further includes: a fourth electrode;

The fourth electrode is connected to the third electrode, and the fourth electrode is provided in the same layer as the capacitor electrode or the gate electrode of the thin film transistor.

Optionally, the first touch electrode and the second touch electrode are made of transparent conductive material.

Optionally, the touch display substrate according to the embodiment of the present disclosure further includes: a pixel defining layer located on a side of the flat layer away from the base substrate, and located around the first connection electrode and located in the second Around the second connecting electrode, wherein the frame sealant layer and the filling layer are located in the same layer and located in the non-display area of the touch display substrate.

Optionally, the touch display substrate according to the embodiment of the present disclosure further includes: a black matrix layer located on a side of the pixel defining layer away from the base substrate.

Optionally, the touch display substrate according to the embodiment of the present disclosure further includes: a pad, which is arranged between the micro light emitting diode and the first and second connection electrodes.

In a second aspect, the present application also provides a touch display device, including the above-mentioned touch display substrate.

In a third aspect, the present application also provides a manufacturing method of a touch display substrate for manufacturing the above-mentioned touch display substrate. The method includes:

Provide substrate;

A pixel unit and a pressure touch structure are formed on the base substrate, the pixel unit includes: a micro light emitting diode, the pressure touch structure is used to sense pressure information applied on the touch display substrate, and is arranged at Between the pixel units.

Description of the drawings

In order to explain the technical solutions of the embodiments of the present disclosure more clearly, the following will briefly introduce the drawings of the embodiments. Obviously, the drawings in the following description only relate to some embodiments of the present disclosure, rather than limit the present disclosure. .

FIG. 1 is a schematic structural diagram of a touch display substrate provided by an embodiment of the application;

2 is a first cross-sectional view of a touch display substrate provided by an embodiment of the application;

3 is a top view 1 of the pressure touch structure corresponding to FIG. 2;

4 is a top view 2 of the pressure touch structure corresponding to FIG. 2;

5 is a second cross-sectional view of the touch display substrate provided by an embodiment of the application;

FIG. 6A is a first schematic diagram of the connection of the second connection electrode provided by the embodiment of the application;

6B is a second schematic diagram of the connection of the second connection electrode provided by the embodiment of the application;

FIG. 6C is a third schematic diagram of connection of the second connecting electrode provided by the embodiment of the application;

FIG. 7A is a first schematic diagram of the connection of the first touch electrode according to an embodiment of the application;

FIG. 7B is a second schematic diagram of the connection of the first touch electrode provided by the embodiment of the application;

FIG. 7C is the third schematic diagram of the connection of the first touch electrode provided by the embodiment of the application;

8 is a third cross-sectional view of the touch display substrate provided by an embodiment of the application;

FIG. 9 is a top view of the pressure touch structure corresponding to FIG. 8;

10 is a fourth cross-sectional view of the touch display substrate provided by an embodiment of the application;

FIG. 11 is a top view of the pressure touch structure corresponding to FIG. 10;

FIG. 12 is an equivalent circuit diagram of a pixel driving circuit provided by an embodiment of the application;

FIG. 13 is a working timing diagram of the pixel circuit provided in FIG. 12;

14 is a touch sequence diagram 1 of a touch display substrate provided by an embodiment of the application;

15 is a second diagram of a touch sequence of a touch display substrate provided by an embodiment of the application;

FIG. 16 is a flowchart of a manufacturing method of a touch display substrate provided by an embodiment of the application.

Detailed ways

This application describes a number of embodiments, but the description is exemplary rather than restrictive, and it is obvious to a person of ordinary skill in the art that within the scope of the embodiments described in this application, There are more examples and implementation schemes. Although many possible feature combinations are shown in the drawings and discussed in the specific embodiments, many other combinations of the disclosed features are also possible. Unless specifically limited, any feature or element of any embodiment can be used in combination with, or substituted for, any other feature or element in any other embodiment.

This application includes and contemplates combinations with features and elements known to those of ordinary skill in the art. The embodiments, features and elements already disclosed in this application can also be combined with any conventional features or elements to form a unique invention solution defined by the claims. Any feature or element of any embodiment can also be combined with features or elements from other invention solutions to form another unique invention solution defined by the claims. Therefore, it should be understood that any feature shown and/or discussed in this application can be implemented individually or in any appropriate combination. Therefore, the embodiments are not restricted except for the restrictions made according to the appended claims and their equivalents. In addition, various modifications and changes can be made within the protection scope of the appended claims.

In addition, when describing representative embodiments, the specification may have presented the method and/or process as a specific sequence of steps. However, to the extent that the method or process does not depend on the specific order of the steps described herein, the method or process should not be limited to the steps in the specific order described. As those of ordinary skill in the art will understand, other sequence of steps are also possible. Therefore, the specific order of steps set forth in the specification should not be construed as a limitation on the claims. In addition, the claims for the method and/or process should not be limited to executing their steps in the written order. Those skilled in the art can easily understand that these orders can be changed and still remain within the spirit and scope of the embodiments of the present application. Inside.

Unless otherwise defined, the technical or scientific terms disclosed in the embodiments of this application shall have the usual meanings understood by those with ordinary skills in the field to which this application belongs. The "first", "second" and similar words used in the embodiments of the present application do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "include" and other similar words mean that the element or item appearing before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. Similar words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to indicate the relative position relationship. When the absolute position of the described object changes, the relative position relationship may also change accordingly.

With the rapid development of display technology, touch technology has become an essential part of display products. According to the inventor's research, it is found that Micro LED display products in related technologies cannot achieve touch control, which reduces the application scope of Micro LED display products.

Some embodiments of the present application provide a touch display substrate. FIG. 1 is a schematic structural diagram of a touch display substrate provided by an embodiment of the application. As shown in FIG. 1, the touch display substrate provided by an embodiment of the present application includes: a substrate The base substrate 10 and the pixel unit 30 and the pressure touch structure 40 arranged on the base substrate 10; wherein, the pixel unit 30 includes: a micro light emitting diode 31, and the pressure touch structure 40 is used for sensing applied on the touch display substrate The pressure information is set between the pixel units 30.

Optionally, the base substrate 10 may be a rigid substrate or a flexible substrate, wherein the rigid base may be but not limited to one or more of glass and metal sheet; the flexible base may be but not limited to poly-p-phenylene Ethylene dicarboxylate, ethylene terephthalate, polyether ether ketone, polystyrene, polycarbonate, polyarylate, polyarylate, polyimide, polyvinyl chloride, polyethylene , One or more of textile fibers.

For example, in order to realize the flexible foldability of the touch display substrate, the base substrate 10 in the embodiment of the present application is a flexible base, wherein the flexible base includes a plurality of stacked base units, and each base unit includes: polyimide Film and barrier layer. The barrier layer in each base unit is located on the side of the polyimide film close to the pixel unit.

For example, the barrier layer is made of silicon oxide, silicon nitride, or a compound of silicon oxide and silicon nitride, which is used to protect the polyimide film when making pixel units. In addition, the multi-layered base unit can increase contact Control the flexibility of the display substrate.

For example, as shown in FIG. 1, the pixel unit in the embodiment of the present application further includes: a thin film transistor 32, a pixel defining layer 33, a first connection electrode 34, a second connection electrode 35 and a capacitor electrode 36.

Among them, the thin film transistor 32 includes: a buffer layer 321, an active layer 322, a first gate insulating layer 323, a gate electrode 324, a second gate insulating layer 325, an interlayer insulating layer 326, a source electrode 327, a drain electrode 328, and a flat layer. 329. Wherein, the thin film transistor 32 may be a top gate structure or a bottom gate structure. The embodiment of the present application does not make any limitation on this. It should be noted that the embodiment of the present application takes the thin film transistor as the top gate structure as an example. of.

In this embodiment, the capacitor electrode 36 is located on the side of the interlayer insulating layer 326 of the thin film transistor close to the base substrate 10 and is used to form a capacitor with the gate electrode 324 of the thin film transistor.

For example, the pixel defining layer 33 is located on the side of the flat layer 329 away from the base substrate 10, and the pixel defining layer 33 is located around the first connection electrode 34 and the second connection electrode 35 to protect the first connection electrode 34 and the second connection electrode.极35。 Electrode 35.

For example, the first connection electrode 34 is located on the side of the thin film transistor 32 away from the base substrate 10 and is connected to the drain electrode 328 of the thin film transistor. For example, the flat layer 329 is provided with a via hole, and the first connection electrode 33 passes through the flat layer via hole. Connected to the drain electrode 328.

For example, the second connection electrode 35 and the first connection electrode 34 are arranged in the same layer, and the micro light emitting diode 31 is connected to the first connection electrode 34 and the second connection electrode 35 respectively.

For example, the pixel unit further includes a pad 37, which is respectively disposed on the first connection electrode 34 and the second connection electrode 35, and the micro light emitting diode 31 is connected to the first connection electrode 34 and the second connection electrode through the pad 37 35 is connected to realize the transfer of the micro light emitting diode 31. Optionally, the material of the pad can be solder paste.

In this embodiment, the pressure information used by the pressure touch structure 40 to sense the pressure applied on the touch display substrate includes: pressure generation position and pressure magnitude, etc., which can realize the touch function of Micro LED display products. This application The embodiment does not make any limitation on this.

In this embodiment, the pressure touch structure 40 is arranged between the pixel units 30, that is, if the pressure touch structure 40 is arranged in the non-display area, the touch signal will not be shielded by the pixel unit, which can be realized without affecting In the case of display effect, realize the touch function of Micro LED display products. At the same time, the touch display substrate provided by the embodiment of the present application is compatible with the existing process stack of Micro LED display products, and while realizing the touch function, the process cost is not increased.

The touch display substrate provided by the embodiments of the present application includes a base substrate, and a pixel unit and a pressure touch structure disposed on the base substrate; wherein, the pixel unit includes: a micro light emitting diode, and the pressure touch structure is used to sense The pressure information on the touch display substrate is arranged between the pixel units. The embodiment of the present application can realize the touch function of the Micro LED display product by providing a pressure touch structure between the pixel units, thereby expanding the application range of the Micro LED display product, and greatly improving the added value of the Micro LED display product.

For example, in an embodiment of the present disclosure, the pressure touch combination and the pixel unit are both disposed in the display area of the touch display substrate, the pressure touch structure may include a multilayer structure, and the pixel unit includes In a multi-layer structure, at least one layer of the pressure touch structure and at least one layer of the pixel unit are arranged in the same layer.

For example, the lowermost layer of the pressure touch structure and at least one layer of the pixel unit are arranged in the same layer.

Optionally, as an implementation manner, FIG. 2 is a cross-sectional view 1 of the touch display substrate provided by an embodiment of the application, FIG. 3 is a top view 1 of the pressure touch structure corresponding to FIG. 2, and FIG. 4 is a corresponding view of FIG. 2. The second top view of the pressure touch structure, as shown in FIGS. 2 to 4, the pressure touch structure in the touch display substrate provided by the embodiment of the present application includes: pressure touch units 400 arranged in an array, and each pressure touch unit 400 includes ：The first touch electrode 410 and the second touch electrode 420 are insulated from each other. The second touch electrode 420 is located on the side of the first touch electrode 410 away from the base substrate 10; for each pressure touch unit, the second The orthographic projection of the touch electrode 420 on the base substrate 10 covers the orthographic projection of the first touch electrode 410 on the base substrate 10.

For example, as shown in FIG. 2, the touch electrode of the pressure touch structure located on one side of the base substrate and the first connection electrode and the second connection electrode of the pixel unit are arranged in the same layer.

Optionally, as shown in FIG. 2, the touch display substrate provided by the embodiment of the present application includes: a cover plate 20, wherein the cover plate 20 is located on a side of the pixel unit 30 away from the base substrate 10.

Optionally, the number of pressure touch units is specifically limited according to the precision of the pressure-sensitive touch required by the display product, which is not limited in the embodiment of the present application.

In this embodiment, in order to improve touch accuracy, the first touch electrode is used as a sensing electrode, and the second touch electrode is used as a driving electrode.

Optionally, as shown in FIG. 3, the first touch electrode 410 in each pressure touch unit includes: first sub-electrodes 411 arranged in an array, wherein all the first sub-electrodes are independent of each other, and each first sub-electrode The electrodes can be connected by separate touch electrode wires, or all the first sub-electrodes 411 are connected to each other and connected to one touch electrode wire. It should be noted that FIG. 3 is an example where all the first sub-electrodes 411 are independent of each other. To illustrate.

Optionally, as shown in FIG. 4, the second touch electrode in each pressure touch unit may be connected by a plurality of connected sub-electrodes, or may be a planar electrode, as long as the second touch electrode is on the base substrate The above orthographic projection just covers the orthographic projection of the first touch electrode on the base substrate. It should be noted that, as shown in FIG. 4, all the second touch electrodes are planar electrodes as an example. The example does not make any restrictions on this. Specifically, in the embodiment of the present application, adjacent second touch electrodes are separated by a barrier wall.

In this embodiment, as shown in FIG. 2, the first touch electrode 410 is arranged in the same layer as the first connection electrode 34 and the second connection electrode 35, and the second touch electrode 420 is arranged on the cover 20. It should be noted that the second touch electrode 420 may be arranged on the side of the cover plate 20 close to the base substrate 10, and may also be arranged on the side of the cover plate 20 away from the base substrate 10, depending on the specific structure of the touch display substrate. limited.

As shown in FIG. 2, the touch display substrate provided by the embodiment of the present application further includes: a filling layer 50 located between the first touch electrode 410 and the cover plate 20. At this time, the second touch electrode 420 is located on the cover plate 20. Close to the side of the base substrate 10.

Optionally, the material of the filling layer 50 is a flexible filling material, which may be resin or other flexible materials, which is not limited in the embodiment of the present application.

The filling layer 50 provided in the embodiment of the present application not only functions to fix the first touch electrode 410, but also functions to support the cover plate 20.

5 is a second cross-sectional view of the touch display substrate provided by the embodiment of the application. As shown in FIG. 5, the touch display substrate provided by the embodiment of the application further includes: located between the flat layer 329 of the thin film transistor and the cover 20 At this time, the second touch electrode 42 may be located on the side of the cover plate 20 facing the base substrate 10. Or the second touch electrode 42 may be located on the side of the cover 20 away from the base substrate 10, and the corresponding drawings are not shown.

The frame sealing glue 60 provided in the embodiment of the present application functions to support the cover plate 20.

In the embodiment of the present application, when the touch display substrate includes the filling layer 50, the second touch electrode 42 is located on the side of the cover 20 close to the base substrate 10. When the touch display substrate includes the frame sealant 60, the second touch electrode 42 is The touch electrode 42 may be disposed on a side of the cover plate 20 away from the base substrate 10.

Optionally, in this embodiment, there are three connection modes for the second connection electrode 35 in the touch display substrate provided in the embodiment of the present application. FIG. 6A is a schematic diagram of the connection of the second connection electrode provided in the embodiment of the present application. 1. FIG. 6B is a schematic diagram of the second connection electrode provided by an embodiment of the application; FIG. 6C is a schematic diagram of the second connection electrode provided by an embodiment of the application; specifically, as shown in FIG. 6A, the implementation of the application The touch display substrate provided by the example includes: a first electrode 71, wherein the first electrode 71 and the drain electrode 328 of the thin film transistor are arranged in the same layer, and the second connecting electrode 35 is connected to the first electrode 71. Specifically, the flat layer 329 includes Via hole, the second connection electrode 35 is connected to the first electrode 71 through a planar layer via hole.

The first electrode 71 provides a signal to the second connecting electrode 35. Optionally, in order to make the micro light emitting diode emit light, the signal provided by the first electrode 71 is different from that of the drain electrode 328 in the thin film transistor when the thin film transistor is in the on state. signal.

As shown in FIG. 6B, the touch display substrate provided by the embodiment of the present application further includes: a second electrode 72, the second electrode 72 is connected to the first electrode 71, and the second electrode 72 and the gate electrode 324 of the thin film transistor are arranged in the same layer. Specifically, the interlayer insulating layer and the second gate insulating layer have via holes, and the first electrode 71 is connected to the second electrode 72 through the via holes of the interlayer insulating layer and the second gate insulating layer.

Specifically, in the connection manner provided in FIG. 6B, the first electrode 71 is equivalent to a wire, and only serves to connect the second electrode 72 and the second connection electrode 35. The second electrode 72 provides a signal to the second connection electrode 35. Optionally, the signal of the second electrode 72 may be the same signal as the signal of the gate electrode of the thin film transistor.

As shown in FIG. 6C, in the touch display substrate provided by the embodiment of the present application, the second electrode 72 is connected to the first electrode 71, and the second electrode 72 and the capacitor electrode 36 are provided in the same layer. Specifically, there are via holes in the interlayer insulating layer, and the first electrode 71 is connected to the second electrode 72 through the via holes in the interlayer insulating layer.

For example, in the connection manner provided in FIG. 6C, the first electrode 71 is equivalent to a wire, the first electrode 71 only serves to connect the second electrode 72 and the second connection electrode 35, and the second electrode 72 is connected to the second connection electrode 35. Provide a signal. Optionally, the signal of the second electrode 72 and the signal of the capacitor electrode 36 may be the same signal.

Optionally, in this embodiment, there are three connection modes for the first touch electrode in the touch display substrate provided by the embodiment of the application. FIG. 7A is the connection of the first touch electrode provided by the embodiment of the application. Diagram 1, FIG. 7B is a schematic diagram of the connection of the first touch electrode provided in an embodiment of the application, and FIG. 7C is a schematic diagram of the connection of the first touch electrode provided in an embodiment of the application, specifically, as shown in FIG. 7A, The touch display substrate provided by the embodiment of the present application includes a third electrode 73, the third electrode 73 and the drain electrode 328 of the thin film transistor are arranged in the same layer, and the first touch electrode 410 is connected to the third electrode 73. Specifically, the flat layer 329 includes a via hole, and the first touch electrode 410 is connected to the third electrode 73 through the flat layer via hole.

Wherein, the third electrode 73 provides a signal to the first touch electrode 410. Optionally, in order to enable touch display, the signal provided by the third electrode 73 is different from the signal of the second touch electrode 420.

As shown in FIG. 7B, the touch display substrate provided by the embodiment of the present application further includes: a fourth electrode 74, the fourth electrode 74 is connected to the third electrode 73, and the fourth electrode 74 and the gate electrode 324 of the thin film transistor are arranged in the same layer. Specifically, the interlayer insulating layer and the second gate insulating layer have via holes, and the third electrode 73 is connected to the fourth electrode 74 through the via holes of the interlayer insulating layer and the second gate insulating layer.

For example, in the connection manner provided in FIG. 7B, the third electrode 73 is equivalent to a wire, and only serves to connect the fourth electrode 74 and the first touch electrode 410. The fourth electrode 74 provides a signal to the first touch electrode 41. Optionally, the signal of the fourth electrode 74 and the signal of the gate electrode of the thin film transistor may be the same signal.

As shown in FIG. 7C, in the touch display substrate provided by the embodiment of the present application, the fourth electrode 74 is connected to the third electrode 73, and the fourth electrode 74 and the capacitor electrode 36 are provided in the same layer. For example, a via hole exists in the interlayer insulating layer, and the third electrode 73 is connected to the fourth electrode 74 through the via hole of the interlayer insulating layer.

For example, in the connection provided in FIG. 7C, the third electrode 73 is equivalent to a wire, the third electrode 73 only serves to connect the fourth electrode 74 and the first touch electrode 410, and the fourth electrode 74 is connected to the first touch The electrode 410 provides a signal. Optionally, the signal of the fourth electrode 74 and the signal of the capacitor electrode 36 may be the same signal.

It should be noted that there is no direct relationship between the connection mode of the second connection electrode 35 and the connection mode of the first touch electrode 410 in the embodiment of the present application, that is, when the second connection electrode 35 is connected to the first electrode 71 The first touch electrode 410 can be connected to the third electrode 73, and can also be connected to the fourth electrode 74 through the third electrode 73. The fourth electrode 74 can be arranged in the same layer as the gate electrode or the capacitor electrode. When 410 is connected to the third electrode 73, the second connection electrode 35 can be connected to the first electrode 71, and can also be connected to the second electrode 72 through the first electrode 71, and the second electrode 72 can be arranged in the same layer as the gate electrode or the capacitor electrode. The embodiment of the present application does not specifically limit the connection manner of the second connection electrode 35 and the first touch electrode 410, and is specifically determined according to actual requirements.

In addition, FIGS. 6A to 6C and FIGS. 7A to 7C are all described by taking the touch display substrate including the filling layer 50 as an example. The touch display substrate may also be a structure including a sealant, and the embodiment of the present application does not do anything about this limited.

Optionally, as another implementation manner, FIG. 8 is a cross-sectional view 3 of the touch display substrate provided by an embodiment of the application, FIG. 9 is a top view of the pressure touch structure corresponding to FIG. 8, and FIG. 10 is an embodiment of the application Section 4 of the provided touch display substrate. FIG. 11 is a top view of the pressure touch structure corresponding to FIG. 10. As shown in FIGS. 8-11, the pressure touch structure includes: a first touch layer 41 and a second touch The second touch layer 42 is located on the side of the first touch layer 41 away from the base substrate 10, the first touch layer 41 includes a plurality of first touch electrodes 410, and the second touch layer 42 includes a plurality of The second touch electrodes 420, the plurality of first touch electrodes 410 and the plurality of second touch electrodes 420 are staggered horizontally and vertically.

It should be noted that the included angle between the plurality of first touch electrodes 410 and the plurality of second touch electrodes 420 may be a right angle or other angles, as long as they are staggered horizontally and vertically. There are no restrictions.

In this embodiment, the first touch electrode can be used as the sensing electrode, and the second touch electrode can be used as the driving electrode. The first touch electrode can also be used as the driving electrode, and the second electrode can be used as the sensing electrode. The embodiment does not make any limitation on this. It should be noted that in this embodiment, the pressure touch structure is a mutual capacitive touch structure.

Wherein, each first touch electrode 410 is connected to a touch electrode line, and each second touch electrode 420 is connected to a touch electrode line.

Specifically, as shown in FIGS. 8 and 10, in the embodiment of the present application, the first touch layer 41 is disposed in the same layer as the first connection electrode 34 and the second connection electrode 35, that is, the first touch electrode 410 is connected to the first connection electrode. The electrode 34 and the second connecting electrode 35 are arranged in the same layer.

Optionally, in this embodiment, the first touch layer and the second touch layer in the touch display substrate include two arrangements. The first arrangement is that the second touch layer 42 is arranged on the cover 20. Above, it should be noted that FIG. 8 takes the second touch layer 42 provided on the cover 20 as an example for description. The second setting method is that the first touch layer 41 and the second touch layer 42 are in the same layer. Setting, FIG. 10 uses the same layer arrangement of the first touch layer 41 and the second touch layer 42 as an example for illustration.

In the embodiment of the present application, for example, when the first touch layer 42 is disposed on the cover 20, when the touch display substrate includes the frame sealant 60, the second touch electrode 42 is the cover 20 away from the substrate. On one side of the substrate 10, it should be noted that FIG. 8 illustrates an example in which the touch display substrate includes the sealant 60. When the touch display substrate includes the filling layer 50 between the first touch electrode 410 and the cover plate 20, the second touch electrode 420 is located on the side of the cover plate 20 close to the base substrate 10. It should be noted that the figure 10 is described by taking the touch display substrate including the filling layer 50 as an example.

In the embodiment of the present application, specifically, in the case where the first touch layer and the second touch layer are provided in the same layer, the touch display substrate may include a filling layer 50 or a sealant 60, which is not described in the embodiment of the present application. Any restrictions.

In this embodiment, the connection mode of the second connection electrode in the touch display substrate provided by the embodiment of the application is the same as the connection mode of the second connection electrode in FIGS. 6A to 6C, and the connection of the first touch electrode 410 The manner is the same as the connection manner of the first touch electrode 410 in FIGS. 7A to 7C, which is not repeated in the embodiment of the present application.

For example, in order not to affect the display effect of the touch display substrate, the first touch electrode and the second touch electrode in the touch display substrate provided in the embodiments of the present application are made of transparent conductive materials, optionally, transparent conductive materials. The materials include indium tin oxide, zinc tin oxide and other materials, which are not limited in the embodiments of the present application.

Optionally, the touch display substrate provided by the embodiment of the present application further includes: a black matrix layer, wherein the black matrix layer is located on the side of the pixel defining layer away from the first substrate, and is used to irradiate the light of the Micro LED to the pixel defining layer The reflection out improves the light utilization rate of the touch display substrate.

The touch display substrate provided by the embodiment of the present application further includes a processor, which is connected to the pressure touch structure, and is used for confirming pressure information according to a signal of the pressure touch structure.

The pressure touch structure in the above two implementations of the embodiments of the present application is provided with two mutually insulated first touch electrodes and second touch electrodes. When a finger presses the touch display substrate, the touch display substrate will occur. Due to the deformation, the capacitance between the two touch electrodes at the place where the finger is pressed will change. At this time, the processor senses the pressure of the finger according to the change trend of the capacitance at the place where the finger is pressed, so as to achieve the touch effect. For example, a change in the capacitance between two electrodes pressed by the finger will change the charging time of the pressure touch structure, and the change trend of the capacitance at the pressing position of the finger can be sensed by the way of time integration.

For example, taking the first touch electrode as the driving electrode as an example, when the touch signal is input to the first touch electrode, due to the RC load between the first touch electrode and the second touch electrode, when there is no pressing , The charging time of the pressure touch structure is T1, when the finger presses the touch display substrate, the coupling capacitance between the first touch electrode and the second touch electrode increases, and the charging time of the pressure touch structure changes to T2, according to Charge change time to analyze pressure and realize touch control.

The touch display substrate provided by the embodiment of the application further includes: a pixel circuit for driving the Micro LED to emit light. FIG. 12 is an equivalent circuit diagram of the pixel driving circuit provided by the embodiment of the application, as shown in FIG. 12, the embodiment of the application The pixel driving circuit provided includes: a current control sub-circuit, a time length control sub-circuit and a light-emitting element. The current control sub-circuit is connected to the time-length control sub-circuit for outputting the compensated driving current, the time-length control sub-circuit, and the light-emitting element. The element connection is used to control the supply of driving current to the light-emitting element, specifically, to further control the gray-scale brightness of the light-emitting element by means of time integration.

Optionally, the light-emitting element is a Micro LED.

As shown in FIG. 12, the current control sub-circuit includes: a first transistor T1, a second transistor T2, a third transistor T3, a fourth transistor T4, a fifth transistor T5, a sixth transistor T6, and a first capacitor C1. The control electrode of a transistor T1 is connected to the reset signal terminal RST, the first electrode of the first transistor T1 is connected to the initial signal terminal Vint, the second electrode of the first transistor T1 is connected to the first node N1, and the first electrode of the first capacitor C1 The terminal is connected to the first node N1, the second terminal of the first capacitor C2 is connected to the first power terminal VDD, the control electrode of the second transistor T2 is connected to the first scan terminal Gate1, and the first electrode of the second transistor T2 is connected to the data signal Terminal Data is connected, the second electrode of the second transistor T2 is connected to the second node N2, the control electrode of the third transistor T3 is connected to the first scan terminal Gate1, the first electrode of the third transistor T3 is connected to the first node N1, The second electrode of the three transistor T3 is connected to the third node N3, the control electrode of the fourth transistor T4 is connected to the first node N1, the control electrode of the fourth transistor T4 is connected to the first node N1, and the first electrode of the fourth transistor T4 Connected to the second node N2, the second electrode of the fourth transistor T4 is connected to the third node N3, the control electrode of the fifth transistor T5 is connected to the control signal terminal EM, and the first electrode of the fifth transistor T5 is connected to the first power terminal VDD The second electrode of the fifth transistor T5 is connected to the second node N2, the control electrode of the sixth transistor T6 is connected to the control signal terminal EM, the first electrode of the sixth transistor T6 is connected to the third node N3, and the sixth transistor T6 The second pole of is connected to the duration control sub-circuit.

As shown in FIG. 12, the duration control sub-circuit includes: a seventh transistor T7, an eighth transistor T8, and a second capacitor C2. The control electrode of the seventh transistor T7 is connected to the second scan terminal Gate2, and the first transistor T7 One pole is connected to the duration data terminal Data_T, the second pole of the seventh transistor T7 is connected to the fourth node N4, the first terminal of the second capacitor C2 is connected to the fourth node N4, and the second terminal of the second capacitor C2 is connected to the first The power terminal VDD is connected, the control electrode of the eighth transistor T8 is connected to the fourth node N4, the first electrode of the eighth transistor T8 is connected to the second electrode of the sixth transistor T6, and the second electrode of the eighth transistor T8 is connected to the light emitting element The anode is connected, and the cathode of the light-emitting element is connected to the second power terminal VSS.

Optionally, the fourth transistor T4 is a driving transistor.

Taking the transistors T1 to T8 as P-type thin film transistors as an example, FIG. 13 is a working timing diagram of the pixel circuit provided in FIG. 12. As shown in FIGS. 12 and 13, the pixel circuit involved in the embodiment of the present application includes: 8 transistors (T1 to T8), 2 capacitor units (C1 to C2), 7 input terminals (Gate1, Gate2, Data_T, Data , RST, EM and Vin) and 2 power supply terminals (VDD and VSS).

For example, the first power terminal VDD continuously provides a high-level signal, and the second power terminal VSS continuously provides a low-level signal.

For example, the working sequence of the pixel circuit includes:

In the first stage S1, the reset stage, the input signals of the reset signal terminal RST and the initial signal terminal Vint are low-level signals, and the first transistor T1 is turned on to provide the signal of the initial signal terminal Vint to the first node N1. A capacitor C1 is charged.

In the second stage S2, the input signal of the reset signal terminal RST is a high-level signal, the first transistor T1 is turned off, the input signal of the first scanning terminal Gate1 is a low-level signal, the second transistor T2 and the third transistor T3 are turned on, Provide the second node N2 with the signal of the data signal terminal Data, the first node N1 and the third node N3 are connected, and the first capacitor C1 is discharged to the first node N1 until the potential of the first node N1 is equal to the signal potential of the data signal terminal Data The sum of the threshold voltage of the fourth transistor T4. At this time, the fourth transistor T4 is turned on.

In the third stage S3, the input signal of the second scanning terminal Gate2 is a low-level signal, the seventh transistor T7 is turned on, and the fourth node N4 is provided with a signal of the duration data terminal Data_T, and the eighth transistor T8 is turned on.

In the fourth stage S4, the input signal of the control signal terminal EM is a low-level signal. The fifth transistor T5 and the sixth transistor T6 are turned on. Since the fourth transistor T4 is turned on, the fourth transistor T4 provides a drive to the third node. In addition, because the eighth transistor T8 is still conducting under the action of the second capacitor C2, the light-emitting element emits light at this time.

Since in the second stage S2, the voltage of the control electrode of the fourth transistor T4 is maintained at the potential of the first node N1 equal to the sum of the signal potential of the data signal terminal Data and the threshold voltage of the fourth transistor T4. It can be obtained from the current formula that the driving current flowing through the light-emitting element in the pixel circuit provided by the embodiment of the application is independent of the threshold voltage of the fourth transistor, thereby eliminating the influence of the threshold voltage of the driving transistor DTFT on the driving current, thereby ensuring the touch display The display brightness of the substrate is uniform, thereby improving the display effect.

The touch display substrate provided by the embodiment of the present application includes: a touch phase and a display phase. In the display phase, the pixel circuit works and drives the Micro LED to emit light. Specifically, in this embodiment, the touch phase and the display phase are driven in time , That is, no display during the touch phase, and no touch during the display phase.

It should be noted that, in the touch phase, in order not to affect the display effect of the touch display panel, the control signal terminal EM in the pixel driving circuit provides a signal for turning the sixth transistor M6 off, and the reset signal terminal RST provides for the first Signal that the transistor M1 is in the off state.

Regarding the touch display substrates provided in FIGS. 2-7, a pressure touch structure including: N pressure touch units is taken as an example. FIG. 14 is a touch sequence diagram 1 of the touch display substrate provided by an embodiment of the application. The touch timing diagram provided by 14 is the timing diagram corresponding to the touch display substrate provided in FIGS. 2-7, wherein, in the touch phase, the touch signal of the first touch electrode in the i-th pressure touch unit Is RXi, the touch signal TXi of the second touch electrode in the i-th pressure touch unit, where 1≤i≤N, as shown in Fig. 14, the pressure in the touch display substrate provided in Figs. 2-7 The touch structure adopts a synchronous driving method, that is, a touch signal is provided to the first touch electrode and the second touch electrode at the same time.

In the embodiments of the present application, the synchronous driving method is adopted, which not only cancels the influence of other conductive layers located on the side of the pressure touch electrode close to the base substrate on the first touch electrode in the voltage-force touch structure, but also saves scanning time. , It also maximizes the accuracy of pressure-sensitive touch.

Regarding the touch display substrate provided in FIGS. 8-11, the pressure touch structure includes: 3 columns of first touch electrodes and 3 rows of second touch electrodes as an example. FIG. 15 is a touch display substrate provided by an embodiment of the application. The touch timing diagram of FIG. 15 is the timing diagram corresponding to the touch display substrate provided in FIGS. 8-11, where the first touch electrodes of the three columns are RX1, RX2 and RX3, 3 Rows of second touch electrodes are TX1, TX2, and TX3 respectively. As shown in FIG. 15, when the touch display substrate provided in FIGS. 8 to 11 starts to touch, the second touch electrodes start scanning row by row, and each column A touch electrode collects signals sequentially.

Based on the inventive concept of the above-mentioned embodiments, some embodiments of the present application also provide a method for manufacturing a touch display substrate, which is used to manufacture the touch display substrate provided in the foregoing embodiments. The flow chart of the manufacturing method of the display substrate is shown in FIG. 16. The manufacturing method of the touch display substrate provided by the embodiment of the present application may include the following steps:

Step 100: Provide a base substrate.

Optionally, the substrate may be a rigid substrate or a flexible substrate, wherein the rigid substrate may be but not limited to one or more of glass and metal sheet; the flexible substrate may be but not limited to polyethylene terephthalate Glycol ester, ethylene terephthalate, polyether ether ketone, polystyrene, polycarbonate, polyarylate, polyarylate, polyimide, polyvinyl chloride, polyethylene, textile fiber One or more of. Preferably, in order to realize the flexible foldability of the touch display substrate, the base is a flexible substrate.

Optionally, the base substrate may be a multilayer polyimide structure.

Step 200, forming a pixel unit and a pressure touch structure on a base substrate.

For example, the pixel unit includes: miniature light emitting diodes, and the pressure touch structure is used to sense pressure information applied on the touch display substrate, and is arranged between the pixel units.

Among them, the manufacturing method of the touch display substrate provided by the embodiments of the present application is used to manufacture the touch display substrate provided in the foregoing embodiments, and the implementation principles and effects are similar, and will not be repeated here.

Optionally, as an embodiment, step 200 includes: forming a pixel unit on a base substrate, forming a pixel defining layer on the pixel unit, and forming a first connecting electrode, a second connecting electrode, and a second connecting electrode between the pixel defining layer. A touch electrode, forming pads on the first connecting electrode and the second connecting electrode, transferring the Micro LED onto the pads, forming a filling layer or forming a sealant, providing a cover plate, and forming a second on the cover plate For the touch electrode, a cover plate with a second touch electrode formed on the filling layer or the sealant is provided.

Optionally, as another embodiment, step 200 includes: forming a pixel unit on a base substrate, forming a pixel defining layer on the pixel unit, and forming a first connecting electrode, a second connecting electrode, The first touch electrode and the second touch electrode, the pads are formed on the first connection electrode and the second connection electrode, and the Micro LED is transferred to the pads to form a filling layer or a frame sealant. In the filling layer or A cover plate is set on the frame sealing glue.

For example, forming a pixel unit on a base substrate includes: forming a buffer layer on the base substrate, an active layer on the buffer layer, forming a first gate insulating layer on the active layer, and forming a gate on the first gate insulating layer. An electrode, a second gate insulating layer is formed on the gate electrode, a capacitor electrode is formed on the second gate insulating layer, an interlayer insulating layer is formed on the capacitor electrode, a source and drain electrode is formed on the interlayer insulating layer, and a source and drain electrode is formed on the source and drain electrode. Form a flat layer.

Optionally, the touch display substrate further includes a first electrode and/or a third electrode, and forming the pixel unit on the base substrate further includes: forming the first electrode and/or the third electrode on the interlayer insulating layer, wherein This step can be formed by the same process as forming the source and drain electrodes on the interlayer insulating layer.

Optionally, the touch display substrate further includes a second electrode and/or a fourth electrode. As an embodiment, forming the pixel unit on the base substrate further includes: forming a second electrode and/or a fourth electrode on the first gate insulating layer. /Or the fourth electrode, wherein this step can be formed by the same process as forming the gate electrode on the first gate insulating layer.

Optionally, as another implementation manner, forming the pixel unit on the base substrate further includes: forming a second electrode and/or a fourth electrode on the second gate insulating layer, wherein this step may be the same as that in the second gate insulating layer. The capacitor electrode is formed on the gate insulating layer by a unified process.

Based on the inventive concept of the above-mentioned embodiments, some embodiments of the present application further provide a touch display device. The touch display device includes a touch display substrate.

Optionally, the touch display device may be any product or component with a display function such as a mobile phone, a tablet computer, a TV, a monitor, a notebook computer, a digital photo frame, a navigator, etc. The comparison of the embodiments of this application does not make any limitation.

Among them, the touch display substrate is the touch display substrate provided in the foregoing embodiment, and its implementation principles and effects are similar, and will not be repeated here.

The present application provides a touch display substrate, a manufacturing method thereof, and a touch display device. The touch display substrate includes: a base substrate, and a pixel unit and a pressure touch structure provided on the base substrate; wherein the pixel unit It includes: miniature light-emitting diodes. The pressure touch structure is used to sense pressure information applied on the touch display substrate and is arranged between the pixel units. The embodiment of the present application can realize the touch function of the Micro LED display product by providing a pressure touch structure between the pixel units, thereby expanding the application range of the Micro LED display product.

The following points need to be explained:

(1) The drawings of the embodiments of the present disclosure only refer to the structures related to the embodiments of the present disclosure, and other structures can refer to the usual design.

(2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is enlarged or reduced, that is, these drawings are not drawn according to actual scale. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element can be "directly" on or "under" the other element or There may be intermediate elements.

(3) In the case of no conflict, the embodiments of the present disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

The above are only specific implementations of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and the protection scope of the present disclosure should be subject to the protection scope of the claims.

For clarity, in the drawings used to describe the embodiments of the present application, the thickness and size of layers or microstructures are exaggerated. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element can be "directly" on or "under" the other element. Or there may be intermediate elements.

This application claims the priority of the Chinese patent application No. 201910428099.8 filed on May 22, 2019, and the contents of the above-mentioned Chinese patent application are cited here in full as a part of this application.

Claims

A touch display substrate, including:

Base substrate; and

The pixel unit and the pressure touch structure are arranged on the base substrate;

Wherein, the pixel unit includes a micro light emitting diode, and the pressure touch structure is used to sense pressure information applied on the touch display substrate, and is arranged between the pixel units.
The touch display substrate according to claim 1, wherein the pressure touch structure includes a multilayer structure, the pixel unit includes a multilayer structure, and at least one layer of the pressure touch structure and at least one of the pixel unit Set up on the same floor.
3. The touch display substrate according to claim 2, wherein the lowermost layer of the pressure touch structure and at least one layer of the pixel unit are arranged in the same layer.
The touch display substrate according to any one of claims 1 to 3, wherein the pixel unit further comprises: a thin film transistor, a first connection electrode, a second connection electrode and a capacitor electrode;

The capacitor electrode is located on the side of the interlayer dielectric layer of the thin film transistor close to the base substrate, and is used to form a capacitor with the gate electrode of the thin film transistor; the first connection electrode is located on the thin film transistor away from the base substrate And connected to the drain electrode of the thin film transistor; the second connection electrode and the first connection electrode are arranged in the same layer, and the micro light emitting diodes are respectively connected to the first connection electrode and the second connection electrode;

The touch display substrate further includes a cover plate located on a side of the pixel unit away from the base substrate.
The touch display substrate according to claim 4, wherein the pressure touch structure comprises: pressure touch units arranged in an array, and each pressure touch unit comprises: a first touch electrode and a second touch electrode that are insulated from each other. Touch electrodes, the second touch electrodes are located on a side of the first touch electrodes away from the base substrate;

For each pressure touch unit, the orthographic projection of the second touch electrode on the base substrate covers the orthographic projection of the first touch electrode on the base substrate.
The touch display substrate of claim 4, wherein the pressure touch structure comprises: a first touch layer and a second touch layer; the first touch layer and the second touch layer are separated by an insulating layer, so The second touch layer is located on a side of the first touch layer away from the base substrate, the first touch layer includes a plurality of first touch electrodes, and the second touch layer includes a plurality of Second touch electrode;

The plurality of first touch electrodes and the plurality of second touch electrodes are staggered horizontally and vertically.
4. The touch display substrate of claim 4, wherein the pressure touch structure comprises: a first touch layer and a second touch layer; the first touch layer and the second touch layer are in the same layer It is provided that the first touch layer includes a plurality of first touch electrodes, and the second touch layer includes a plurality of second touch electrodes;

The plurality of first touch electrodes and the plurality of second touch electrodes are staggered and insulated from each other.
7. The touch display substrate according to any one of claims 5-7, wherein the first touch electrode and the first connection electrode are arranged in the same layer, and the second touch electrode is arranged on the cover On the board.
8. The touch display substrate according to claim 8, wherein the touch display substrate further comprises: a filling layer between the first touch electrode and the cover plate;

The second touch electrode is located on a side of the cover plate close to the base substrate.
8. The touch display substrate according to claim 8, wherein the touch display substrate further comprises: a frame sealant located between the flat layer of the thin film transistor and the cover plate;

The second touch electrode is located on a side of the cover plate away from the base substrate.
10. The touch display substrate according to any one of claims 4-10, wherein the touch display substrate further comprises: a first electrode;

The first electrode and the source and drain electrodes of the thin film transistor are arranged in the same layer, and the second connection electrode is connected to the first electrode.
11. The touch display substrate of claim 11, wherein the touch display substrate further comprises: a second electrode;

The second electrode is connected to the first electrode, and the second electrode is provided in the same layer as the capacitor electrode or the gate electrode of the thin film transistor.
7. The touch display substrate according to any one of claims 5-7, wherein the touch display substrate further comprises: a third electrode;

The third electrode and the source and drain electrodes of the thin film transistor are arranged in the same layer, and the first touch electrode is connected to the third electrode.
The touch display substrate according to claim 13, wherein the touch display substrate further comprises: a fourth electrode;

The fourth electrode is connected to the third electrode, and the fourth electrode is provided in the same layer as the capacitor electrode or the gate electrode of the thin film transistor.
7. The touch display substrate according to any one of claims 5-7, wherein the first touch electrode and the second touch electrode are made of transparent conductive material.
The touch display substrate according to claim 10, further comprising:

A pixel defining layer located on the side of the flat layer away from the base substrate, and located around the first connection electrode and around the second connection electrode,

The frame sealant layer and the filling layer are located in the same layer and located in the non-display area of the touch display substrate.
The touch display substrate of claim 16, further comprising:

The black matrix layer is located on the side of the pixel defining layer away from the base substrate.
The touch display substrate of claim 4, further comprising:

The pad is arranged between the micro light emitting diode and the first and second connecting electrodes.
A touch display device, comprising: the touch display substrate according to any one of claims 1-18.
A method for manufacturing a touch display substrate for manufacturing the touch display substrate according to any one of claims 1-18, the method comprising:

Provide substrate;

A pixel unit and a pressure touch structure are formed on the base substrate, the pixel unit includes: a micro light emitting diode, the pressure touch structure is used to sense pressure information applied on the touch display substrate, and is arranged at Between the pixel units.