WO2020228484A1 - Array substrate and manufacturing method therefor, and display panel - Google Patents

Array substrate and manufacturing method therefor, and display panel Download PDF

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Publication number
WO2020228484A1
WO2020228484A1 PCT/CN2020/085435 CN2020085435W WO2020228484A1 WO 2020228484 A1 WO2020228484 A1 WO 2020228484A1 CN 2020085435 W CN2020085435 W CN 2020085435W WO 2020228484 A1 WO2020228484 A1 WO 2020228484A1
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Prior art keywords
electrode
substrate
thin film
film transistor
light emitting
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PCT/CN2020/085435
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French (fr)
Chinese (zh)
Inventor
冯伟
周纪登
吕凤珍
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京东方科技集团股份有限公司
合肥鑫晟光电科技有限公司
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Publication of WO2020228484A1 publication Critical patent/WO2020228484A1/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/38Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]

Definitions

  • the present disclosure relates to an array substrate, a manufacturing method thereof, and a display panel.
  • TFT-LCD Thin Film Transistor-Liquid Crystal Display
  • AMOLED Active Matrix Organic Light Emitting Diode
  • the application provides an array substrate, a manufacturing method thereof, and a display panel.
  • the present disclosure provides an array substrate including: a first substrate; and thin film transistors and light emitting devices disposed on the first substrate, wherein: the first substrate has a display area and a non-display area; The light emitting device is located in a non-display area, and the light emitting device is connected to a thin film transistor and a low level signal terminal and is configured to emit light under the control of the low level signal terminal and the thin film transistor in a conductive state.
  • the light-emitting device is further configured to not emit light under the control of the low-level signal terminal and the thin film transistor in an off state.
  • the light emitting device includes a first electrode, a second electrode and an organic light emitting layer; the first electrode is located on a side of the organic light emitting layer close to the first substrate; the second electrode is located The organic light-emitting layer is far away from the first substrate; the first electrode and the second electrode are configured to apply an electric field to the organic light-emitting layer; and the organic light-emitting layer is configured to be in the electric field Glows under the effect of light.
  • the orthographic projection of the thin film transistor on the first substrate covers the orthographic projection of the light emitting device on the first substrate.
  • the first substrate further includes a pixel electrode; the light-emitting device is located on a side of the thin film transistor away from the first substrate; the first electrode and the pixel electrode are formed by the same process, and Connected to the drain electrode of the thin film transistor; the second electrode is connected to the low-level signal terminal; the first electrode is a transmissive electrode; and the second electrode is a reflective electrode.
  • the first electrode and the gate electrode of the thin film transistor are formed by the same process and are connected to the low-level signal terminal; the second electrode and the source and drain electrodes of the thin film transistor are formed by the same process and are formed by the same process as the thin film transistor.
  • the drain electrode of the transistor is connected; the first electrode is a reflective electrode; and the second electrode is a transmissive electrode.
  • the size of the first electrode, the second electrode and the organic light emitting layer is smaller than the size of the gate electrode of the thin film transistor.
  • the first electrode and the source and drain electrodes of the thin film transistor are formed by the same process and are connected with the drain electrode of the thin film transistor; the second electrode and the pixel electrode are formed by the same process and are connected with the low-level signal Terminal connection; the first electrode is a reflective electrode; and the second electrode is a transmissive electrode.
  • the first electrode is located on the side of the passivation layer of the thin film transistor away from the first substrate, and is connected to the gate electrode or the drain electrode of the thin film transistor; the second electrode and the pixel electrode are formed by the same process, And connected to a low-level signal terminal; the first electrode is a reflective electrode; and the second electrode is a transmissive electrode.
  • the array substrate is used in a thin film transistor liquid crystal display, and wherein the light emitting device is also located in the display area.
  • the present disclosure provides a display panel, including: an array substrate as described above; and a color filter substrate disposed opposite to the array substrate.
  • the color filter substrate includes a second substrate, and a black matrix layer and a protective layer disposed on the second substrate; the protective layer is located on the side of the black matrix layer close to the first substrate And the orthographic projection of the black matrix layer on the first substrate covers the orthographic projection of the light-emitting device on the first substrate.
  • the present disclosure provides a method for manufacturing an array substrate, including: providing a first substrate, wherein the first substrate has a display area and a non-display area; and forming a thin film on the first substrate A transistor and a light emitting device, wherein the light emitting device is located in a non-display area, and wherein the light emitting device is connected to a thin film transistor and a low-level signal terminal and is configured as a thin film transistor at the low-level signal terminal and in a conductive state Glowing under the control.
  • the forming a thin film transistor and a light emitting device on the first substrate includes: forming a thin film transistor on the first substrate; and sequentially forming a first electrode and an organic light emitting device on the side of the thin film transistor away from the first substrate. Layer and second electrode to form a light emitting device.
  • the forming the thin film transistor and the light-emitting device on the first substrate includes: forming a gate electrode and a first electrode on the first substrate using the same process; and sequentially forming the gate electrode on the side away from the first substrate.
  • the forming a thin film transistor and a light emitting device on the first substrate includes: forming a gate electrode on the first substrate; and sequentially forming a gate insulating layer and an active layer on the side of the gate electrode away from the first substrate.
  • the source and drain electrodes and the first electrode are formed by the same process on the side of the active layer away from the first substrate; the passivation layer is formed on the side of the source and drain electrodes away from the first substrate; the first electrode is away from the first substrate.
  • An organic light-emitting layer is formed on the side; and the pixel electrode and the second electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate.
  • the forming a thin film transistor and a light emitting device on the first substrate includes: forming a gate electrode on the first substrate; and sequentially forming a gate insulating layer and an active layer on the side of the gate electrode away from the first substrate.
  • Source and drain electrodes and passivation layer; the first electrode and the organic light-emitting layer are formed in sequence on the side of the passivation layer away from the first substrate; the pixel electrode and the first electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate Two electrodes.
  • the array substrate is used in a thin film transistor liquid crystal display, and wherein the light emitting device is also located in the display area.
  • FIG. 1 is a top view of an array substrate provided by an embodiment of the application
  • Figure 2 is a cross-sectional view corresponding to Figure 1;
  • FIG. 3 is a top view of an array substrate provided by an embodiment of the application.
  • Figure 4 is a cross-sectional view corresponding to Figure 3;
  • FIG. 5 is a schematic structural diagram of a light emitting device provided by an embodiment of the application.
  • FIG. 6 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • FIG. 7 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • FIG. 8 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • FIG. 9 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • FIG. 10A is a schematic structural diagram corresponding to FIG. 9;
  • FIG. 10B is a schematic structural diagram corresponding to FIG. 9;
  • FIG. 11 is a flowchart of a manufacturing method of an array substrate provided by an embodiment of the application.
  • FIG. 12 is a schematic structural diagram of a display panel provided by an embodiment of the application.
  • the specification may have presented the method and/or process as a specific sequence of steps. However, to the extent that the method or process does not depend on the specific order of the steps described herein, the method or process should not be limited to the steps in the specific order described. As those of ordinary skill in the art will understand, other sequence of steps are also possible. Therefore, the specific order of steps set forth in the specification should not be construed as a limitation on the claims. In addition, the claims for the method and/or process should not be limited to executing their steps in the written order. Those skilled in the art can easily understand that these orders can be changed and still remain within the spirit and scope of the embodiments of the present application. Inside.
  • the thin film transistors used in all the embodiments of the present application may be P-type thin film transistors or N-type thin film transistors, and the thin film transistors used in the embodiments of the present invention may be oxide semiconductor transistors.
  • the thin film transistor for example, a thin film transistor with a bottom gate structure or a top gate structure can be selected, as long as the switching function can be realized.
  • the purpose of this application is to provide an array substrate, a manufacturing method thereof, and a display panel, which can increase the on-state current of the thin film transistor, which not only prolongs the service life of the array substrate, but also improves the stability and display quality of the array substrate.
  • FIG. 1 is a top view 1 of the array substrate provided by an embodiment of the application
  • FIG. 2 is a cross-sectional view corresponding to FIG. 1
  • FIG. 3 is a top view 2 of the array substrate provided by an embodiment of the application.
  • Fig. 4 is a cross-sectional view corresponding to Fig. 3.
  • the array substrate provided by the embodiment of the present application includes: a first substrate 100 and a thin film transistor 10 and a light emitting device 20 disposed on the first substrate 100.
  • the first substrate 100 includes a display area and a non-display area.
  • the light emitting device 20 is located in the non-display area.
  • the light emitting device 20 is connected to the thin film transistor 10 and the low-level signal terminal VGL and is configured to emit light under the control of the low-level signal terminal VGL and the thin film transistor 10 in an on state.
  • the first substrate 100 may be a rigid substrate or a flexible substrate.
  • the rigid substrate can be, but is not limited to, one or more of glass and metal sheet.
  • the flexible substrate can be, but is not limited to, polyethylene terephthalate, ethylene terephthalate, polyetheretherketone, polystyrene, polycarbonate, polyarylate, polyarylate, One or more of polyimide, polyvinyl chloride, polyethylene, and textile fibers.
  • the thin film transistors 10 can be N-type thin film transistors or P-type thin film transistors, which can unify the process flow, reduce the process process, and help improve the yield of products.
  • all transistors in the embodiments of the present invention are low-temperature polysilicon thin film transistors.
  • a thin film transistor with a bottom gate structure or a thin film transistor with a top gate structure can be selected, as long as the switching function can be realized.
  • the low-level signal terminal VGL is used to continuously provide a low-level signal. It should be noted that, in order to ensure that the light-emitting device can emit light normally, there is a voltage difference between the voltage value of the signal of the low-level signal terminal VGL and the voltage value of the signal of the drain electrode of the thin film transistor in the ON state.
  • the thin film transistor includes a gate electrode 12, a gate insulating layer, an active layer, a source electrode 15 and a drain electrode 16.
  • the light emitting device 20 may be connected to the gate electrode or the drain electrode of the thin film transistor 10, for example.
  • FIG. 1 illustrates the connection between the light-emitting device 20 and the drain electrode 16 in the thin film transistor as an example
  • FIG. 3 illustrates the connection between the light-emitting device and the gate electrode in the thin film transistor as an example. The example does not make any restrictions on this.
  • the array substrate in this embodiment can be used for thin film transistor liquid crystal displays, and can also be used for organic light emitting diode displays.
  • the light emitting device 20 may be located in the non-display area, and may also be located in the display area and the non-display area.
  • the light emitting device 20 is only located in the non-display area and is used to provide light to the thin film transistor in the gate driving circuit.
  • the light emitting device 20 and the thin film transistor 10 connected to the light emitting device 20 are located in the same area, and are used to provide light to the thin film transistor 10 connected to the light emitting device 20. That is, when the thin film transistor 10 connected to the light emitting device 20 is located in the display area, the light emitting device 20 is located in the display area, and when the thin film transistor 10 connected to the light emitting device 20 is located in the non-display area, the light emitting device 20 is located in the non-display area.
  • the embodiment of the present application improves the on-state current of the thin film transistor through the light emitting device. On the one hand, it improves the transmittance of the display area of the array substrate. On the other hand, when the thin film transistor is manufactured, the thin film transistor can be appropriately reduced. The channel ratio is reduced to reduce the size of the thin film transistor, thereby realizing the narrow frame of the array substrate.
  • the array substrate provided by the embodiment of the present application includes: a first substrate, and thin film transistors and light emitting devices arranged on the first substrate.
  • the first substrate includes a display area and a non-display area.
  • the light emitting device is located in the non-display area.
  • the light emitting device is connected to the thin film transistor and the low level signal terminal and is configured to emit light under the control of the low level signal terminal and the thin film transistor in a conductive state.
  • the light-emitting device is provided on the first substrate, and the on-state current of the thin film transistor is increased by emitting light from the light-emitting device, which not only prolongs the service life of the array substrate, but also improves the stability and display quality of the array substrate.
  • the light emitting device 20 is also used to not emit light under the control of the low level signal terminal VGL and the thin film transistor 10 in the off state.
  • the voltage value of the signal of the low-level signal terminal VGL is equal to the voltage value of the signal of the drain electrode of the thin film transistor in the off state.
  • FIG. 5 is a schematic structural diagram of a light emitting device provided by an embodiment of the application.
  • the light-emitting device 20 provided by the embodiment of the present application includes: a first electrode 21, an organic light-emitting layer 22 and a second electrode 23.
  • the first electrode 21 is located on the side of the organic light emitting layer 22 close to the first substrate, and the second electrode 23 is located on the side of the organic light emitting layer 22 away from the first substrate.
  • the first electrode 21 and the second electrode 23 are used to connect the organic light emitting layer 22 An electric field is applied, and the organic light emitting layer 22 is used to emit light under the action of the electric field.
  • the size of the first electrode, the second electrode and the organic light-emitting layer may be slightly smaller than the size of the gate electrode of the thin film transistor. Considering the alignment deviation of the manufacturing process, it will not affect other regions.
  • the organic light emitting layer 22 can convert electrical energy into light energy.
  • the organic light emitting layer 22 includes: a hole injection layer 221, a hole transport layer 222, a light emitting layer 223, an electron transport layer 224 and an electron injection layer 225.
  • the holes and electrons injected by the two electrodes 23 recombine in the organic light-emitting layer to generate excitons to realize light emission.
  • the host material of the hole injection layer 221 includes molybdenum trioxide, tungsten trioxide, or vanadium pentoxide, and the embodiment of the present application is not limited thereto.
  • the host material of the hole transport layer 222 may be polyparaphenylene vinylenes, polythiophenes, polysilanes, triphenylmethanes, triarylamines, hydrazones, pyrazolines, and azoles. , Carbazoles, butadienes or other similar materials with hole transport properties, the embodiments of the present application are not limited thereto.
  • the host material of the light-emitting layer 223 includes 4-(dinitrile methyl)-2-butyl-6-(1,1,7,7-tetramethyljulonidine-9-vinyl) -4H-pyran (DCJTB), 9,10-bis( ⁇ -naphthyl)anthracene (ADN), 4,4'-bis(9-ethyl-3-carbazole vinyl)-1,1'- Biphenyl (BCzVBi) or 8-hydroxyquinoline aluminum, the embodiments of the present application are not limited thereto.
  • the thickness of the electron transport layer 224 is 40 to 80 nanometers
  • the host material of the electron transport layer includes 4,7-diphenyl-1,10-phenanthroline (Bphen), 1,2,4-tri Azole derivatives or 1,3,5-tris(1-phenyl-1H-benzimidazol-2-yl)benzene (TPBi)
  • the material of the electron transport layer is high electron mobility and can effectively conduct electrons
  • the embodiments of this application are not limited thereto.
  • the host material of the electron injection layer 225 includes cesium carbonate, cesium fluoride, cesium azide, or lithium fluoride.
  • each layer of the organic light-emitting layer can be made by an evaporation process.
  • the array substrate provided by the embodiment of the present application further includes a pixel electrode disposed in the display area, and the pixel electrode is located in the display area and connected to the drain electrode of the thin film transistor located in the display area.
  • the first position relationship is that the orthographic projection of the thin film transistor on the first substrate covers the orthographic projection of the light emitting device on the first substrate, that is, The light emitting device is located on the side of the thin film transistor away from the first substrate.
  • the second positional relationship is that there is no overlap between the orthographic projection of the thin film transistor on the first substrate and the orthographic projection of the light emitting device on the first substrate, that is, the light emitting device is located on the thin film.
  • the side surface of the transistor is not limited in the embodiment of the present application. It should be noted that FIG. 1 uses the second position relationship as an example for description, and FIG. 3 uses the first position relationship as an example for description, which is not limited in the embodiment of the present application.
  • FIG. 6 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • the light emitting device 20 when the thin film transistor 10 and the light emitting device 20 are in the first positional relationship, in the array substrate provided by the embodiment of the present application, the light emitting device 20 is located on the side of the thin film transistor 10 away from the first substrate 100, wherein, The first electrode 21 and the pixel electrode are formed by the same manufacturing process, and are connected to the drain electrode 16 of the thin film transistor 10, and the second electrode 23 is connected to a low-level signal terminal (not shown in the figure).
  • the first electrode 21 is a transmissive electrode
  • the second electrode 23 is a reflective electrode
  • the first electrode 21 is used to make the organic light-emitting layer 22 emit light.
  • the light is transmitted to the thin film transistor
  • the second electrode 23 is used to reflect the light emitted from the organic light-emitting layer to the second electrode 23 to increase the utilization rate of the light.
  • the thin film transistor includes: a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16, and a passivation layer 17, wherein the passivation layer 17 is provided with a via hole.
  • the electrode 21 is connected to the drain electrode 16 of the thin film transistor through a passivation layer via.
  • the thickness of the first electrode 21 is 400-1500 angstroms, and the material of the first electrode 21 is a transparent conductive material, such as indium tin oxide, zinc tin oxide Etc., the embodiments of this application do not make any limitation on this.
  • the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
  • the material of the second electrode 23 is silver or aluminum, and the thickness of the second electrode 23 is 400-1500 angstroms.
  • the working principle of the array substrate provided in FIG. 6 includes: providing the first electrode 21 with the signal of the drain electrode of the thin film transistor, and providing the second electrode 23 with the low-level signal of the low-level signal terminal VGL, when When the thin film transistor is turned on, the signal of the first electrode 21 is a high-level signal, and the signal of the second electrode 23 is a low-level signal.
  • the light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%.
  • the signal of the first electrode 21 is pulled down to a low level signal, and the signal of the second electrode 23 is still a low level signal. At this time, there is no voltage difference between the first electrode and the second electrode.
  • the organic light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
  • FIG. 7 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • the first electrode 21 and the gate electrode 12 of the thin film transistor are formed by the same manufacturing process, and The low-level signal terminal (not shown in the figure) is connected, the second electrode 23 and the source and drain electrodes of the thin film transistor are formed by the same process, and the drain electrode 16 of the thin film transistor is connected.
  • the first electrode 21 is a reflective electrode
  • the second electrode 23 is a transmissive electrode
  • the first electrode 21 is used to irradiate the organic light-emitting layer toward the first electrode.
  • the light from one electrode 21 is reflected back, and the second electrode 23 is used to make the light emitted by the organic light-emitting layer 22 transmit to the color film substrate and be reflected by the color film substrate to the thin film transistor to increase the utilization rate of light.
  • the thin film transistor includes a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16 and a passivation layer 17.
  • the thickness of the first electrode 21 is 400-1500 angstroms, and the gate electrode 12 and the first electrode 21 of the thin film transistor are made of silver or aluminum, which is not limited in the embodiment of the present application.
  • the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
  • the thickness of the second electrode 23 is 400-1500 angstroms
  • the source electrode 15 and the drain electrode 16 and the second electrode 23 of the thin film transistor can be made of transparent conductive materials, such as indium tin oxide, zinc tin oxide, etc. , Can also be metal materials.
  • the second electrode 23 when the material of the second electrode 23 is a transparent conductive material, the second electrode 23 is a planar electrode; when the material of the second electrode 23 is metal, the second electrode 23 includes a plurality of strip electrodes And the connecting electrode, the connecting electrode is used to connect a plurality of strip electrodes, and also used to connect the drain electrode of the thin film transistor. It should be noted that FIG. 7 is illustrated by taking the manufacturing material of the second electrode as a metal as an example, which is not limited in the embodiment of the present application.
  • the light-emitting device provided by the embodiment of the present application further includes: a first insulating layer 24, wherein the first insulating layer 24 and the passivation layer 17 of the thin film transistor are formed by the same process and are the same film layer, wherein ,
  • the orthographic projection of the first insulating layer 24 on the first substrate 100 covers the orthographic projection of the organic light-emitting layer 22 on the first substrate 100.
  • the working principle of the array substrate provided in FIG. 7 includes: providing the first electrode 21 with the low-level signal of the low-level signal terminal VGL, and providing the second electrode 23 with the signal of the drain electrode of the thin film transistor, when When the thin film transistor is turned on, the signal of the first electrode 21 is a low-level signal, and the signal of the second electrode 23 is a high-level signal. At this time, there is a voltage difference between the first electrode 21 and the second electrode 23. When the difference is greater than 20 volts, the organic light-emitting layer 22 emits light under the action of the pressure difference, and generates light with a light intensity greater than 8000 nits.
  • the light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%.
  • the signal of the first electrode 21 is still a low-level signal, and the signal of the second electrode 23 is pulled down to a low-level signal.
  • the light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
  • FIG. 8 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • the first electrode 21 and the source and drain electrodes of the thin film transistor are formed by the same manufacturing process, and
  • the drain electrode 16 of the thin film transistor is connected, and the second electrode 23 and the pixel electrode are formed by the same process, and are connected to a low-level signal terminal (not shown in the figure).
  • the first electrode 21 is a reflective electrode
  • the second electrode 23 is a transmissive electrode
  • the first electrode 21 is used to irradiate the organic light-emitting layer toward the first electrode.
  • the light from one electrode 21 is reflected back, and the second electrode 23 is used to make the light emitted by the organic light-emitting layer 22 transmit to the color film substrate and be reflected by the color film substrate to the thin film transistor to increase the utilization rate of light.
  • the thin film transistor includes a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16 and a passivation layer 17.
  • the thickness of the first electrode 21 is 400-1500 angstroms, and the source and drain electrodes of the thin film transistor and the first electrode 21 are made of silver or aluminum, which is not limited in the embodiment of the present application.
  • the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
  • the thickness of the second electrode 23 is 400 to 1500 angstroms, and the pixel electrode and the second electrode 23 can be made of transparent conductive materials, such as indium tin oxide, zinc tin oxide, etc. This embodiment of the application does not do this Any restrictions.
  • the light-emitting device provided by the embodiment of the present application further includes: a second insulating layer 25, wherein the second insulating layer 25 and the gate insulating layer 13 of the thin film transistor are formed by the same process and are the same film layer, wherein ,
  • the orthographic projection of the second insulating layer 25 on the first substrate 100 covers the orthographic projection of the organic light-emitting layer 22 on the first substrate 100.
  • the working principle of the array substrate provided in FIG. 8 includes: providing the first electrode 21 with the signal of the drain electrode of the thin film transistor, and providing the second electrode 23 with the low-level signal of the low-level signal terminal VGL, when When the thin film transistor is turned on, the signal of the first electrode 21 is a high-level signal, and the signal of the second electrode 23 is a low-level signal. At this time, there is a voltage difference between the first electrode 21 and the second electrode 23. When the difference is greater than 20 volts, the organic light-emitting layer 22 emits light under the action of the pressure difference, and generates light with a light intensity greater than 8000 nits.
  • the light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%.
  • the signal of the first electrode 21 is pulled down to a low level signal, and the signal of the second electrode 23 is still a low level signal.
  • the light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
  • FIG. 9 is a schematic structural diagram of an array substrate provided by an embodiment of the application.
  • the first electrode 21 is located on the passivation layer 17 of the thin film transistor away from the first substrate. It is connected to the gate electrode or the drain electrode of the thin film transistor.
  • the second electrode 23 and the pixel electrode are formed by the same manufacturing process, and are connected to a low-level signal terminal (not shown in the figure).
  • the first electrode 21 is a reflective electrode
  • the second electrode 23 is a transmissive electrode
  • the first electrode 21 is used to irradiate the organic light-emitting layer toward the first electrode.
  • the light from one electrode 21 is reflected back, and the second electrode 23 is used to make the light emitted by the organic light-emitting layer 22 transmit to the color film substrate and be reflected by the color film substrate to the thin film transistor to increase the utilization rate of light.
  • the thin film transistor includes a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16 and a passivation layer 17.
  • the thickness of the first electrode 21 is 400-1500 angstroms, and the source and drain electrodes of the thin film transistor and the first electrode 21 are made of silver or aluminum, which is not limited in the embodiment of the present application.
  • the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
  • the thickness of the second electrode 23 is 400 to 1500 angstroms, and the pixel electrode and the second electrode 23 can be made of transparent conductive materials, such as indium tin oxide, zinc tin oxide, etc. This embodiment of the application does not do this Any restrictions.
  • the light emitting device provided by the embodiment of the present application further includes: a first insulating layer 24 and a second insulating layer 25 located on the side of the first electrode close to the first substrate, and the second insulating layer 25 is located in the first insulating layer.
  • the layer 24 is close to the side of the first substrate 100, wherein the first insulating layer 24 and the passivation layer 17 of the thin film transistor are formed by the same process and are the same film layer.
  • the second insulating layer 25 is the same as the gate insulating layer 13 of the thin film transistor. It is formed by the same process and is the same film layer.
  • the working principle of the array substrate provided in FIG. 9 includes: providing the first electrode 21 with the signal of the gate electrode or the drain electrode of the thin film transistor, and providing the second electrode 23 with the low level of the low-level signal terminal VGL Signal.
  • the signal of the first electrode 21 is a high-level signal
  • the signal of the second electrode 23 is a low-level signal.
  • there is a voltage difference between the first electrode 21 and the second electrode 23 Generally, the pressure difference is greater than 20 volts, and the organic light-emitting layer 22 emits light under the action of the pressure difference to generate light with a light intensity greater than 8000 nits.
  • This light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%.
  • the signal of the first electrode 21 is pulled down to a low level signal, and the signal of the second electrode 23 is still a low level signal. At this time, there is no voltage between the first electrode and the second electrode. Poorly, the organic light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
  • FIG. 10A is a schematic structural diagram corresponding to FIG. 9, and FIG. 10B is a schematic structural diagram corresponding to FIG. 9.
  • the first electrode is connected to the gate electrode of the thin film transistor.
  • the light emitting device provided by the embodiment of the present application further includes: a third electrode 26.
  • the third electrode 26 and the gate electrode 12 of the thin film transistor are formed by the same process, and
  • the third electrode 26 is connected to the gate electrode 12 of the thin film transistor.
  • the first insulating layer 24 and the second insulating layer 25 are provided with via holes.
  • the first electrode 21 passes through the first insulating layer 24, the second insulating layer 25 and the third electrode 26. It is connected to the gate electrode 12 of the thin film transistor.
  • FIG. 10A the first electrode is connected to the gate electrode of the thin film transistor.
  • the first electrode is connected to the drain electrode of the thin film transistor.
  • the light emitting device provided by the embodiment of the present application further includes: a fourth electrode 27.
  • the fourth electrode 27 and the drain electrode 16 of the thin film transistor are formed by the same process, and
  • the fourth electrode 27 is connected to the source and drain electrodes of the thin film transistor, the first insulating layer 24 is provided with a via hole, and the first electrode 21 is connected to the drain electrode 16 of the thin film transistor through the first insulating layer 24 and the fourth electrode 27.
  • FIGS. 6 to 9 illustrate the thin film transistor as an example with a bottom gate structure.
  • the thin film transistor in the embodiment of the present application may also have a bottom gate structure, which is not limited in the embodiment of the present application.
  • FIG. 11 is a flowchart of a manufacturing method of an array substrate provided by an embodiment of the application. As shown in FIG. 11, the manufacturing method of the array substrate provided by the embodiment of the present application includes the following steps:
  • step S1 a first substrate is provided.
  • the first substrate includes a display area and a non-display area.
  • step S2 a thin film transistor and a light emitting device are formed on the first substrate.
  • the light emitting device is located in the non-display area.
  • the light-emitting device is connected to the thin film transistor and the low-level signal terminal and is configured to emit light under the control of the low-level signal terminal and the thin film transistor in a conductive state.
  • the manufacturing method of the array substrate includes: providing a first substrate, the first substrate including: a display area and a non-display area, forming a thin film transistor and a light-emitting device on the first substrate, and the light-emitting device is located in the non-display area;
  • the light-emitting device is connected to the thin film transistor and the low-level signal terminal and is configured to emit light under the control of the low-level signal terminal and the thin film transistor in a conductive state.
  • the light-emitting device is provided on the first substrate, and the on-state current of the thin film transistor is increased by emitting light from the light-emitting device, which not only prolongs the service life of the array substrate, but also improves the stability and display quality of the array substrate.
  • step S2 includes, for example, forming a thin film transistor on a first substrate; and sequentially forming a first electrode, an organic light emitting layer, and a second electrode on a side of the thin film transistor away from the first substrate to form a light emitting device.
  • the first electrode is connected to the drain electrode of the thin film transistor, and the second electrode is connected to the low-level signal terminal.
  • step S2 includes, for example, forming a gate electrode and a first electrode on the first substrate using the same process; forming a gate insulating layer and an active layer in sequence on the side of the gate electrode away from the first substrate; An organic light-emitting layer is formed on the side of an electrode away from the first substrate; the source and drain electrodes and the second electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate.
  • the first electrode is connected to the low-level signal terminal, and the second electrode is connected to the drain electrode of the thin film transistor.
  • the manufacturing method of the array substrate provided by the embodiment of the present application further includes: The passivation layer and the first insulating layer are formed by the same process on one side of the substrate.
  • a gate electrode is formed on the first substrate; a gate insulating layer and an active layer are sequentially formed on the side of the gate electrode away from the first substrate; the same process is used on the side of the active layer away from the first substrate Forming source and drain electrodes and first electrodes; forming a passivation layer on the side of the source and drain electrodes away from the first substrate; forming an organic light-emitting layer on the side of the first electrode away from the first substrate; forming the organic light-emitting layer away from the first substrate
  • One side adopts the same manufacturing process to form the pixel electrode and the second electrode.
  • the first electrode is connected to the drain electrode of the thin film transistor, and the second electrode is connected to the low-level signal terminal.
  • the manufacturing method of the array substrate provided by the embodiment of the present application further includes: forming a second insulating layer on the first substrate, wherein the second insulating layer is formed on the first substrate and the gate electrode is away from the first substrate. The same process is used to form the gate insulating layer on one side.
  • step S2 includes, for example, forming a gate electrode on the first substrate; sequentially forming a gate insulating layer, an active layer, a source and drain electrode, and a passivation layer on the side of the gate electrode away from the first substrate; The side of the passivation layer away from the first substrate is formed to sequentially form a first electrode and an organic light-emitting layer; on the side of the organic light-emitting layer away from the first substrate, the pixel electrode and the second electrode are formed by the same process.
  • the first electrode is connected to the gate electrode or the drain electrode of the thin film transistor, and the second electrode is connected to the low-level signal terminal.
  • the manufacturing method of the array substrate provided by the embodiment of the present application further includes: forming a second insulating layer on the first substrate, and forming a first insulating layer on the second insulating layer, wherein The second insulating layer and the formation of the gate insulating layer on the side of the gate electrode away from the first substrate use the same process, and the formation of the first insulating layer on the second insulating layer and the passivation layer on the source and drain electrodes use the same process.
  • the method for manufacturing the array substrate before forming the second insulating layer on the first substrate, further includes: forming a third electrode on the first substrate, wherein the third electrode is formed on the first substrate.
  • the electrode and the gate electrode are formed on the first substrate using the same process, or, before the passivation layer is formed, further comprising: forming a fourth electrode on the second insulating layer, wherein the fourth electrode and the gate electrode are formed on the second insulating layer The same process is used to form the source and drain electrodes.
  • an embodiment of the present application provides a display panel.
  • the display panel provided by the embodiment of the present application further includes: an array substrate and a color filter substrate.
  • the array substrate is the array substrate provided by the embodiments of the application, and its implementation principles and effects are similar, and will not be repeated here.
  • FIG. 12 is a schematic structural diagram of a display panel provided by an embodiment of the application.
  • the color filter substrate includes a second substrate 200 and a black matrix layer 30 and a protective layer 40 provided on the second substrate 200.
  • the protective layer 40 is located on the side of the black matrix layer 30 close to the first substrate 100, and the orthographic projection of the black matrix layer 30 on the first substrate 100 covers the orthographic projection of the light emitting device 20 on the first substrate 100.
  • the orthographic projection of the light-emitting device on the first substrate is covered by the orthographic projection of the black matrix layer on the first substrate, which can ensure that the light emitted by the light-emitting device for increasing the on-state current of the thin film transistor does not affect the performance of the array substrate. display.
  • the display panel described in the embodiments of the present application may be in a twisted nematic (TN) mode, a vertical (Vertical Alignment, VA) mode, and a plane switching technology (In-plane Switching, IPS for short). ) Mode, Advanced Super Dimension Switch (ADS) mode, or High Aperture Rate and Advanced Super Dimension Switch (HADS) mode.
  • TN twisted nematic
  • VA Vertical Alignment
  • IPS plane switching technology
  • ADS Advanced Super Dimension Switch
  • HADS High Aperture Rate and Advanced Super Dimension Switch

Abstract

An array substrate and a manufacturing method therefor, and a display panel. The array substrate comprises: a first substrate, and a thin film transistor and a light-emitting device arranged on the first substrate, wherein the first substrate is provided with a display region and a non-display region; the light-emitting device is located in the non-display region; and the light-emitting device is connected to the thin film transistor and a low-level signal end and is configured to emit light under the control of the low-level signal end and the thin film transistor, which is in a conductive state.

Description

阵列基板及其制作方法、显示面板Array substrate, manufacturing method thereof, and display panel
本申请要求于2019年5月14日递交的题为“一种阵列基板及其制作方法、显示面板”的中国专利申请201910399463.2的优先权。This application claims the priority of the Chinese patent application 201910399463.2 entitled "An array substrate, a manufacturing method thereof, and a display panel" filed on May 14, 2019.
技术领域Technical field
本公开涉及阵列基板及其制作方法、显示面板。The present disclosure relates to an array substrate, a manufacturing method thereof, and a display panel.
背景技术Background technique
近年来,如薄膜晶体管液晶显示器(Thin Film Transistor-Liquid Crystal Display,简称TFT-LCD)和有源矩阵有机发光二极管显示器(Active Matrix Organic Light Emitting Diode,简称AMOLED)的平板显示器由于具有重量轻,厚度薄以及低功耗等优点,因而被广泛应用于电视、手机等电子产品中。随着科技的进步,高分辨率、窄边框的阵列基板成为发展的趋势,阵列基板的显示区域和非显示区域中均包括薄膜晶体管,位于非显示区域的薄膜晶体管用于构成栅极驱动电路以提供栅极驱动信号,位于显示区域的薄膜晶体管用于向像素单元提供数据信号。In recent years, flat panel displays such as Thin Film Transistor-Liquid Crystal Display (TFT-LCD) and Active Matrix Organic Light Emitting Diode (AMOLED) have light weight and thickness. The advantages of thinness and low power consumption make it widely used in electronic products such as TVs and mobile phones. With the advancement of science and technology, array substrates with high resolution and narrow borders have become a trend of development. Both the display area and the non-display area of the array substrate include thin film transistors. The thin film transistors located in the non-display area are used to form a gate drive circuit. The gate drive signal is provided, and the thin film transistor located in the display area is used to provide the data signal to the pixel unit.
当前存在对改进的阵列基板继而改进的平板显示器的需求。There is currently a need for improved array substrates and then improved flat panel displays.
发明内容Summary of the invention
本申请提供了一种阵列基板及其制作方法、显示面板。The application provides an array substrate, a manufacturing method thereof, and a display panel.
根据一个方面,本公开提供了一种阵列基板,包括:第一基板;以及设置在所述第一基板上的薄膜晶体管和发光器件,其中:所述第一基板具有显示区域和非显示区域;所述发光器件位于非显示区域中,并且所述发光器件与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。According to one aspect, the present disclosure provides an array substrate including: a first substrate; and thin film transistors and light emitting devices disposed on the first substrate, wherein: the first substrate has a display area and a non-display area; The light emitting device is located in a non-display area, and the light emitting device is connected to a thin film transistor and a low level signal terminal and is configured to emit light under the control of the low level signal terminal and the thin film transistor in a conductive state.
在一个示例中,所述发光器件还被配置为在低电平信号端和处于截止状态的薄膜晶体管的控制下不发光。In an example, the light-emitting device is further configured to not emit light under the control of the low-level signal terminal and the thin film transistor in an off state.
在一个示例中,所述发光器件包括第一电极、第二电极和有机发光层;所述第一电极位于所述有机发光层靠近所述第一基板的一侧;所述第二电极位于所述有机发光层远离所述第一基板的一侧;所述第一电极和所述第二电极被配置为向所述有机发光层施加电场; 以及所述有机发光层被配置为在所述电场的作用下发光。In an example, the light emitting device includes a first electrode, a second electrode and an organic light emitting layer; the first electrode is located on a side of the organic light emitting layer close to the first substrate; the second electrode is located The organic light-emitting layer is far away from the first substrate; the first electrode and the second electrode are configured to apply an electric field to the organic light-emitting layer; and the organic light-emitting layer is configured to be in the electric field Glows under the effect of light.
在一个示例中,所述薄膜晶体管在所述第一基板上的正投影覆盖所述发光器件在所述第一基板上的正投影。In one example, the orthographic projection of the thin film transistor on the first substrate covers the orthographic projection of the light emitting device on the first substrate.
在一个示例中,所述第一基板还包括像素电极;所述发光器件位于所述薄膜晶体管远离所述第一基板的一侧;所述第一电极与所述像素电极采用同一制程形成,且与薄膜晶体管的漏电极连接;所述第二电极与低电平信号端连接;所述第一电极为透射电极;以及所述第二电极为反射电极。In an example, the first substrate further includes a pixel electrode; the light-emitting device is located on a side of the thin film transistor away from the first substrate; the first electrode and the pixel electrode are formed by the same process, and Connected to the drain electrode of the thin film transistor; the second electrode is connected to the low-level signal terminal; the first electrode is a transmissive electrode; and the second electrode is a reflective electrode.
在一个示例中,所述薄膜晶体管在所述第一基板上的正投影与所述发光器件在所述第一基板上的正投影不存在重叠区域。In an example, there is no overlap area between the orthographic projection of the thin film transistor on the first substrate and the orthographic projection of the light emitting device on the first substrate.
在一个示例中,所述第一电极与薄膜晶体管的栅电极采用同一制程形成,且与低电平信号端连接;所述第二电极与薄膜晶体管的源漏电极采用同一制程形成,且与薄膜晶体管的漏电极连接;所述第一电极为反射电极;以及所述第二电极为透射电极。In one example, the first electrode and the gate electrode of the thin film transistor are formed by the same process and are connected to the low-level signal terminal; the second electrode and the source and drain electrodes of the thin film transistor are formed by the same process and are formed by the same process as the thin film transistor. The drain electrode of the transistor is connected; the first electrode is a reflective electrode; and the second electrode is a transmissive electrode.
在一个示例中,所述第一电极、第二电极和所述有机发光层的尺寸比薄膜晶体管的栅电极的尺寸小。In one example, the size of the first electrode, the second electrode and the organic light emitting layer is smaller than the size of the gate electrode of the thin film transistor.
在一个示例中,所述第一电极与薄膜晶体管的源漏电极采用同一制程形成,且与薄膜晶体管的漏电极连接;所述第二电极与像素电极采用同一制程形成,且与低电平信号端连接;所述第一电极为反射电极;以及所述第二电极为透射电极。In an example, the first electrode and the source and drain electrodes of the thin film transistor are formed by the same process and are connected with the drain electrode of the thin film transistor; the second electrode and the pixel electrode are formed by the same process and are connected with the low-level signal Terminal connection; the first electrode is a reflective electrode; and the second electrode is a transmissive electrode.
在一个示例中,所述第一电极位于薄膜晶体管的钝化层远离第一基板的一侧,且与薄膜晶体管的栅电极或者漏电极连接;所述第二电极与像素电极采用同一制程形成,且与低电平信号端连接;所述第一电极为反射电极;以及所述第二电极为透射电极。In an example, the first electrode is located on the side of the passivation layer of the thin film transistor away from the first substrate, and is connected to the gate electrode or the drain electrode of the thin film transistor; the second electrode and the pixel electrode are formed by the same process, And connected to a low-level signal terminal; the first electrode is a reflective electrode; and the second electrode is a transmissive electrode.
在一个示例中,所述阵列基板用于薄膜晶体管液晶显示器,并且其中所述发光器件还位于显示区域中。In an example, the array substrate is used in a thin film transistor liquid crystal display, and wherein the light emitting device is also located in the display area.
根据另一方面,本公开提供了一种显示面板,包括:如以上所述的阵列基板;和与阵列基板相对设置的彩膜基板。According to another aspect, the present disclosure provides a display panel, including: an array substrate as described above; and a color filter substrate disposed opposite to the array substrate.
在一个示例中,所述彩膜基板包括第二基板以及设置在所述第二基板上的黑矩阵层和保护层;所述保护层位于所述黑矩阵层靠近所述第一基板的一侧;以及所述黑矩阵层在所述第一基板上的正投影覆盖所述发光器件在所述第一基板上的正投影。In an example, the color filter substrate includes a second substrate, and a black matrix layer and a protective layer disposed on the second substrate; the protective layer is located on the side of the black matrix layer close to the first substrate And the orthographic projection of the black matrix layer on the first substrate covers the orthographic projection of the light-emitting device on the first substrate.
根据又一方面,本公开提供了一种用于制作阵列基板的方法,包括:提供第一基板,其中所述第一基板具有显示区域和非显示区域;以及在所述第一基板上形成薄膜晶体管和发光器件,其中所述发光器件位于非显示区域中,并且其中所述发光器件与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。According to yet another aspect, the present disclosure provides a method for manufacturing an array substrate, including: providing a first substrate, wherein the first substrate has a display area and a non-display area; and forming a thin film on the first substrate A transistor and a light emitting device, wherein the light emitting device is located in a non-display area, and wherein the light emitting device is connected to a thin film transistor and a low-level signal terminal and is configured as a thin film transistor at the low-level signal terminal and in a conductive state Glowing under the control.
在一个示例中,所述在所述第一基板上形成薄膜晶体管和发光器件包括:在第一基板上形成薄膜晶体管;以及在薄膜晶体管远离第一基板的一侧依次形成第一电极、有机发光层和第二电极以形成发光器件。In an example, the forming a thin film transistor and a light emitting device on the first substrate includes: forming a thin film transistor on the first substrate; and sequentially forming a first electrode and an organic light emitting device on the side of the thin film transistor away from the first substrate. Layer and second electrode to form a light emitting device.
在一个示例中,所述在所述第一基板上形成薄膜晶体管和发光器件包括:在第一基板上采用同一制程形成栅电极和第一电极;在栅电极远离第一基板的一侧依次形成栅绝缘层和有源层;在第一电极远离第一基板的一侧形成有机发光层;以及在有机发光层远离第一基板的一侧采用同一制程形成源漏电极和第二电极。In an example, the forming the thin film transistor and the light-emitting device on the first substrate includes: forming a gate electrode and a first electrode on the first substrate using the same process; and sequentially forming the gate electrode on the side away from the first substrate. A gate insulating layer and an active layer; an organic light emitting layer is formed on the side of the first electrode away from the first substrate; and the source and drain electrodes and the second electrode are formed by the same process on the side of the organic light emitting layer away from the first substrate.
在一个示例中,所述在所述第一基板上形成薄膜晶体管和发光器件包括:在第一基板上形成栅电极;在栅电极远离第一基板的一侧依次形成栅绝缘层和有源层;在有源层远离第一基板的一侧采用同一制程形成源漏电极和第一电极;在源漏电极远离第一基板的一侧形成钝化层;在第一电极远离第一基板的一侧形成有机发光层;以及在有机发光层远离第一基板的一侧采用同一制程形成像素电极和第二电极。In an example, the forming a thin film transistor and a light emitting device on the first substrate includes: forming a gate electrode on the first substrate; and sequentially forming a gate insulating layer and an active layer on the side of the gate electrode away from the first substrate The source and drain electrodes and the first electrode are formed by the same process on the side of the active layer away from the first substrate; the passivation layer is formed on the side of the source and drain electrodes away from the first substrate; the first electrode is away from the first substrate. An organic light-emitting layer is formed on the side; and the pixel electrode and the second electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate.
在一个示例中,所述在所述第一基板上形成薄膜晶体管和发光器件包括:在第一基板上形成栅电极;在栅电极远离第一基板的一侧依次形成栅绝缘层、有源层、源漏电极和钝化层;在钝化层远离第一基板的一侧形成依次形成第一电极和有机发光层;在有机发光层远离第一基板的一侧采用同一制程形成像素电极和第二电极。In an example, the forming a thin film transistor and a light emitting device on the first substrate includes: forming a gate electrode on the first substrate; and sequentially forming a gate insulating layer and an active layer on the side of the gate electrode away from the first substrate. , Source and drain electrodes and passivation layer; the first electrode and the organic light-emitting layer are formed in sequence on the side of the passivation layer away from the first substrate; the pixel electrode and the first electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate Two electrodes.
在一个示例中,所述阵列基板用于薄膜晶体管液晶显示器,并且其中所述发光器件还位于显示区域中。In an example, the array substrate is used in a thin film transistor liquid crystal display, and wherein the light emitting device is also located in the display area.
本申请的其它特征和优点将在随后的说明书中阐述,并且,部分地从说明书中变得显而易见,或者通过实施本申请而了解。本申请的其他优点可通过在说明书、权利要求书以及附图中所描述的方案来实现和获得。Other features and advantages of the present application will be described in the following description, and partly become obvious from the description, or understood by implementing the present application. Other advantages of the application can be realized and obtained through the solutions described in the specification, claims and drawings.
附图说明Description of the drawings
附图用来提供对本申请技术方案的理解,并且构成说明书的一部分,与本申请的实施例一起用于解释本申请的技术方案,并不构成对本申请技术方案的限制。The accompanying drawings are used to provide an understanding of the technical solution of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the technical solution of the present application, and do not constitute a limitation to the technical solution of the present application.
图1为本申请实施例提供的阵列基板的俯视图;FIG. 1 is a top view of an array substrate provided by an embodiment of the application;
图2为图1对应的截面图;Figure 2 is a cross-sectional view corresponding to Figure 1;
图3为本申请实施例提供的阵列基板的俯视图;FIG. 3 is a top view of an array substrate provided by an embodiment of the application;
图4为图3对应的截面图;Figure 4 is a cross-sectional view corresponding to Figure 3;
图5为本申请实施例提供的发光器件的结构示意图;5 is a schematic structural diagram of a light emitting device provided by an embodiment of the application;
图6为本申请实施例提供的阵列基板的结构示意图;FIG. 6 is a schematic structural diagram of an array substrate provided by an embodiment of the application;
图7为本申请实施例提供的阵列基板的结构示意图;FIG. 7 is a schematic structural diagram of an array substrate provided by an embodiment of the application;
图8为本申请实施例提供的阵列基板的结构示意图;FIG. 8 is a schematic structural diagram of an array substrate provided by an embodiment of the application;
图9为本申请实施例提供的阵列基板的结构示意图;FIG. 9 is a schematic structural diagram of an array substrate provided by an embodiment of the application;
图10A为图9对应的结构示意图;FIG. 10A is a schematic structural diagram corresponding to FIG. 9;
图10B为图9对应的结构示意图;10B is a schematic structural diagram corresponding to FIG. 9;
图11为本申请实施例提供的阵列基板的制作方法的流程图;以及FIG. 11 is a flowchart of a manufacturing method of an array substrate provided by an embodiment of the application; and
图12为本申请实施例提供的显示面板的结构示意图。FIG. 12 is a schematic structural diagram of a display panel provided by an embodiment of the application.
具体实施方式Detailed ways
本申请描述了多个实施例,但是该描述是示例性的,而不是限制性的,并且对于本领域的普通技术人员来说显而易见的是,在本申请所描述的实施例包含的范围内可以有更多的实施例和实现方案。尽管在附图中示出了许多可能的特征组合,并在具体实施方式中进行了讨论,但是所公开的特征的许多其它组合方式也是可能的。除非特意加以限制的情况以外,任何实施例的任何特征或元件可以与任何其它实施例中的任何其他特征或元件结合使用,或可以替代任何其它实施例中的任何其他特征或元件。This application describes a number of embodiments, but the description is exemplary rather than restrictive, and it is obvious to a person of ordinary skill in the art that within the scope of the embodiments described in this application, There are more examples and implementation schemes. Although many possible feature combinations are shown in the drawings and discussed in the specific embodiments, many other combinations of the disclosed features are also possible. Unless specifically limited, any feature or element of any embodiment can be used in combination with, or substituted for, any other feature or element in any other embodiment.
本申请包括并设想了与本领域普通技术人员已知的特征和元件的组合。本申请已经公开的实施例、特征和元件也可以与任何常规特征或元件组合,以形成由权利要求限定的独特的发明方案。任何实施例的任何特征或元件也可以与来自其它发明方案的特征或元件组合,以形成另一个由权利要求限定的独特的发明方案。因此,应当理解,在本申请中示出和/或讨论的任何特征可以单独地或以任何适当的组合来实现。因此,除了根据所附权利要求及其等同替换所做的限制以外,实施例不受其它限制。此外,可以在所附权利要求的保 护范围内进行各种修改和改变。This application includes and contemplates combinations with features and elements known to those of ordinary skill in the art. The embodiments, features and elements already disclosed in this application can also be combined with any conventional features or elements to form a unique invention solution defined by the claims. Any feature or element of any embodiment can also be combined with features or elements from other invention solutions to form another unique invention solution defined by the claims. Therefore, it should be understood that any feature shown and/or discussed in this application can be implemented individually or in any appropriate combination. Therefore, the embodiments are not restricted except for the restrictions made according to the appended claims and their equivalents. In addition, various modifications and changes can be made within the protection scope of the appended claims.
此外,在描述具有代表性的实施例时,说明书可能已经将方法和/或过程呈现为特定的步骤序列。然而,在该方法或过程不依赖于本文所述步骤的特定顺序的程度上,该方法或过程不应限于所述的特定顺序的步骤。如本领域普通技术人员将理解的,其它的步骤顺序也是可能的。因此,说明书中阐述的步骤的特定顺序不应被解释为对权利要求的限制。此外,针对该方法和/或过程的权利要求不应限于按照所写顺序执行它们的步骤,本领域技术人员可以容易地理解,这些顺序可以变化,并且仍然保持在本申请实施例的精神和范围内。In addition, when describing representative embodiments, the specification may have presented the method and/or process as a specific sequence of steps. However, to the extent that the method or process does not depend on the specific order of the steps described herein, the method or process should not be limited to the steps in the specific order described. As those of ordinary skill in the art will understand, other sequence of steps are also possible. Therefore, the specific order of steps set forth in the specification should not be construed as a limitation on the claims. In addition, the claims for the method and/or process should not be limited to executing their steps in the written order. Those skilled in the art can easily understand that these orders can be changed and still remain within the spirit and scope of the embodiments of the present application. Inside.
除非另外定义,本发明实施例公开使用的技术术语或者科学术语应当为本发明所属领域内具有一般技能的人士所理解的通常意义。本发明实施例中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或物件涵盖出现在该词后面列举的元件或者物件及其等同,而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系,当被描述的对象的绝对位置改变后,则该相对位置关系也可能相应地改变。Unless otherwise defined, the technical or scientific terms disclosed in the embodiments of the present invention shall have the usual meanings understood by those with ordinary skills in the field to which the present invention belongs. The "first", "second" and similar words used in the embodiments of the present invention do not indicate any order, quantity, or importance, but are only used to distinguish different components. "Include" or "include" and other similar words mean that the element or item appearing before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. Similar words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to indicate the relative position relationship. When the absolute position of the described object changes, the relative position relationship may also change accordingly.
本领域技术人员可以理解,本申请所有实施例中采用的薄膜晶体管可以为P型薄膜晶体管还可以为N型薄膜晶体管,本发明实施例中使用的薄膜晶体管可以是氧化物半导体晶体管。薄膜晶体管例如可以选择底栅结构的薄膜晶体管或者顶栅结构的,只要能够实现开关功能即可。Those skilled in the art can understand that the thin film transistors used in all the embodiments of the present application may be P-type thin film transistors or N-type thin film transistors, and the thin film transistors used in the embodiments of the present invention may be oxide semiconductor transistors. For the thin film transistor, for example, a thin film transistor with a bottom gate structure or a top gate structure can be selected, as long as the switching function can be realized.
经研究发现,在低温或者高温环境下,位于阵列基板中的薄膜晶体管特性会发生漂移导致薄膜晶体管的开态电流下降,进而使得阵列基板的充电率较低,不仅降低了阵列基板的使用寿命和稳定性,还影响了阵列基板的显示品质。Research has found that under low temperature or high temperature environments, the characteristics of the thin film transistors in the array substrate will drift, resulting in a decrease in the on-state current of the thin film transistor, which in turn makes the charging rate of the array substrate lower, which not only reduces the service life and Stability also affects the display quality of the array substrate.
本申请的目的在于,提供了阵列基板及其制作方法、显示面板,能够提高薄膜晶体管的开态电流,不仅延长了阵列基板的使用寿命,还提升了阵列基板的稳定性和显示品质。The purpose of this application is to provide an array substrate, a manufacturing method thereof, and a display panel, which can increase the on-state current of the thin film transistor, which not only prolongs the service life of the array substrate, but also improves the stability and display quality of the array substrate.
本申请实施例提供一种阵列基板,图1为本申请实施例提供的阵列基板的俯视图一,图2为图1对应的截面图,图3为本申请实施例提供的阵列基板的俯视图二,图4为图3对应的截面图。An embodiment of the application provides an array substrate. FIG. 1 is a top view 1 of the array substrate provided by an embodiment of the application, FIG. 2 is a cross-sectional view corresponding to FIG. 1, and FIG. 3 is a top view 2 of the array substrate provided by an embodiment of the application. Fig. 4 is a cross-sectional view corresponding to Fig. 3.
如图1~4所示,本申请实施例提供的阵列基板,包括:第一基板100以及设置在第一基板100上的薄膜晶体管10和发光器件20。第一基板100包括:显示区域和非显示区域。 发光器件20位于非显示区域中。发光器件20与薄膜晶体管10和低电平信号端VGL连接并且被配置为在低电平信号端VGL和处于导通状态的薄膜晶体管10的控制下发光。As shown in FIGS. 1 to 4, the array substrate provided by the embodiment of the present application includes: a first substrate 100 and a thin film transistor 10 and a light emitting device 20 disposed on the first substrate 100. The first substrate 100 includes a display area and a non-display area. The light emitting device 20 is located in the non-display area. The light emitting device 20 is connected to the thin film transistor 10 and the low-level signal terminal VGL and is configured to emit light under the control of the low-level signal terminal VGL and the thin film transistor 10 in an on state.
在一个示例中,第一基板100可以为刚性衬底或柔性衬底。刚性衬底可以为但不限于玻璃、金属萡片中的一种或多种。柔性衬底可以为但不限于聚对苯二甲酸乙二醇酯、对苯二甲酸乙二醇酯、聚醚醚酮、聚苯乙烯、聚碳酸酯、聚芳基酸酯、聚芳酯、聚酰亚胺、聚氯乙烯、聚乙烯、纺织纤维中的一种或多种。In an example, the first substrate 100 may be a rigid substrate or a flexible substrate. The rigid substrate can be, but is not limited to, one or more of glass and metal sheet. The flexible substrate can be, but is not limited to, polyethylene terephthalate, ethylene terephthalate, polyetheretherketone, polystyrene, polycarbonate, polyarylate, polyarylate, One or more of polyimide, polyvinyl chloride, polyethylene, and textile fibers.
在一个示例中,在本申请实施例中,薄膜晶体管10均可以为N型薄膜晶体管或P型薄膜晶体管,可以统一工艺流程,能够减少工艺制程,有助于提高产品的良率。此外,考虑到低温多晶硅薄膜晶体管的漏电流较小,因此,本发明实施例所有晶体管为低温多晶硅薄膜晶体管。薄膜晶体管例如可以选择底栅结构的薄膜晶体管或者顶栅结构的薄膜晶体管,只要能够实现开关功能即可。In one example, in the embodiment of the present application, the thin film transistors 10 can be N-type thin film transistors or P-type thin film transistors, which can unify the process flow, reduce the process process, and help improve the yield of products. In addition, considering that the leakage current of low-temperature polysilicon thin film transistors is relatively small, all transistors in the embodiments of the present invention are low-temperature polysilicon thin film transistors. For the thin film transistor, for example, a thin film transistor with a bottom gate structure or a thin film transistor with a top gate structure can be selected, as long as the switching function can be realized.
在一个示例中,低电平信号端VGL用于持续提供低电平信号。需要说明的是,为了保证发光器件能够正常发光,低电平信号端VGL的信号的电压值与处于导通状态的薄膜晶体管的漏电极的信号的电压值之间存在压差。In an example, the low-level signal terminal VGL is used to continuously provide a low-level signal. It should be noted that, in order to ensure that the light-emitting device can emit light normally, there is a voltage difference between the voltage value of the signal of the low-level signal terminal VGL and the voltage value of the signal of the drain electrode of the thin film transistor in the ON state.
例如,薄膜晶体管包括:栅电极12、栅绝缘层、有源层、源电极15和漏电极16。本申请实施例中,发光器件20例如可以与薄膜晶体管10的栅电极或者漏电极连接。需要说明的是,图1是以发光器件20与薄膜晶体管中的漏电极16连接为例进行说明的,而图3是以发光器件与薄膜晶体管中栅电极连接为例进行说明的,本申请实施例对此不作任何限定。For example, the thin film transistor includes a gate electrode 12, a gate insulating layer, an active layer, a source electrode 15 and a drain electrode 16. In the embodiment of the present application, the light emitting device 20 may be connected to the gate electrode or the drain electrode of the thin film transistor 10, for example. It should be noted that FIG. 1 illustrates the connection between the light-emitting device 20 and the drain electrode 16 in the thin film transistor as an example, and FIG. 3 illustrates the connection between the light-emitting device and the gate electrode in the thin film transistor as an example. The example does not make any restrictions on this.
本实施例中的阵列基板可以用于薄膜晶体管液晶显示器,还可以用于有机发光二极管显示器。当阵列基板用于薄膜晶体管液晶显示器时,发光器件20可以位于非显示区域,还可以位于显示区域和非显示区域中。当阵列基板用于有机发光二极管显示器时,发光器件20仅位于非显示区域,用于向栅极驱动电路中的薄膜晶体管提供光线。The array substrate in this embodiment can be used for thin film transistor liquid crystal displays, and can also be used for organic light emitting diode displays. When the array substrate is used in a thin film transistor liquid crystal display, the light emitting device 20 may be located in the non-display area, and may also be located in the display area and the non-display area. When the array substrate is used in an organic light emitting diode display, the light emitting device 20 is only located in the non-display area and is used to provide light to the thin film transistor in the gate driving circuit.
在一个示例中,发光器件20与发光器件20连接的薄膜晶体管10位于同一区域,用于向发光器件20连接的薄膜晶体管10提供光线。也就是说,当发光器件20连接的薄膜晶体管10位于显示区域,则发光器件20位于显示区域,而当发光器件20连接的薄膜晶体管10位于非显示区域,则发光器件20位于非显示区域。In one example, the light emitting device 20 and the thin film transistor 10 connected to the light emitting device 20 are located in the same area, and are used to provide light to the thin film transistor 10 connected to the light emitting device 20. That is, when the thin film transistor 10 connected to the light emitting device 20 is located in the display area, the light emitting device 20 is located in the display area, and when the thin film transistor 10 connected to the light emitting device 20 is located in the non-display area, the light emitting device 20 is located in the non-display area.
另外,本申请实施例通过发光器件提高了薄膜晶体管的开态电流,一方面,提高了阵列基板的显示区域的透过率,另一方面,在制作薄膜晶体管时,可以适当的减小薄膜晶体 管的沟道比,以降低薄膜晶体管的尺寸,进而实现阵列基板的窄边框。In addition, the embodiment of the present application improves the on-state current of the thin film transistor through the light emitting device. On the one hand, it improves the transmittance of the display area of the array substrate. On the other hand, when the thin film transistor is manufactured, the thin film transistor can be appropriately reduced. The channel ratio is reduced to reduce the size of the thin film transistor, thereby realizing the narrow frame of the array substrate.
本申请实施例提供的阵列基板包括:第一基板以及设置在第一基板上的薄膜晶体管和发光器件。第一基板包括:显示区域和非显示区域。发光器件位于非显示区域中。发光器件与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。本申请实施例通过在第一基板上设置发光器件,通过发光器件发光来提高薄膜晶体管的开态电流,不仅延长了阵列基板的使用寿命,还提升了阵列基板的稳定性和显示品质。The array substrate provided by the embodiment of the present application includes: a first substrate, and thin film transistors and light emitting devices arranged on the first substrate. The first substrate includes a display area and a non-display area. The light emitting device is located in the non-display area. The light emitting device is connected to the thin film transistor and the low level signal terminal and is configured to emit light under the control of the low level signal terminal and the thin film transistor in a conductive state. In the embodiments of the present application, the light-emitting device is provided on the first substrate, and the on-state current of the thin film transistor is increased by emitting light from the light-emitting device, which not only prolongs the service life of the array substrate, but also improves the stability and display quality of the array substrate.
进一步地,为了在提升薄膜晶体管的开态电流的同时不影响薄膜晶体管的漏电流,发光器件20还用于在低电平信号端VGL和处于截止状态的薄膜晶体管10的控制下不发光。Further, in order to increase the on-state current of the thin film transistor without affecting the leakage current of the thin film transistor, the light emitting device 20 is also used to not emit light under the control of the low level signal terminal VGL and the thin film transistor 10 in the off state.
在一个示例中,低电平信号端VGL的信号的电压值与处于截止状态的薄膜晶体管的漏电极的信号的电压值相等。In an example, the voltage value of the signal of the low-level signal terminal VGL is equal to the voltage value of the signal of the drain electrode of the thin film transistor in the off state.
进一步地,图5为本申请实施例提供的发光器件的结构示意图。如图5所示,本申请实施例提供的发光器件20包括:第一电极21、有机发光层22和第二电极23。Further, FIG. 5 is a schematic structural diagram of a light emitting device provided by an embodiment of the application. As shown in FIG. 5, the light-emitting device 20 provided by the embodiment of the present application includes: a first electrode 21, an organic light-emitting layer 22 and a second electrode 23.
第一电极21位于有机发光层22靠近第一基板的一侧,第二电极23位于有机发光层22远离第一基板的一侧,第一电极21和第二电极23用于向有机发光层22施加电场,有机发光层22用于在电场的作用下发光。The first electrode 21 is located on the side of the organic light emitting layer 22 close to the first substrate, and the second electrode 23 is located on the side of the organic light emitting layer 22 away from the first substrate. The first electrode 21 and the second electrode 23 are used to connect the organic light emitting layer 22 An electric field is applied, and the organic light emitting layer 22 is used to emit light under the action of the electric field.
本申请实施例中,第一电极,第二电极和有机发光层的尺寸可以比薄膜晶体管的栅电极尺寸稍小,考虑工艺制作对位偏差,不会对其他区域造成影响。In the embodiments of the present application, the size of the first electrode, the second electrode and the organic light-emitting layer may be slightly smaller than the size of the gate electrode of the thin film transistor. Considering the alignment deviation of the manufacturing process, it will not affect other regions.
例如,有机发光层22能够将电能转化为光能。如图5所示,有机发光层22包括:空穴注入层221、空穴传输层222,发光层223,电子传输层224和电子注入层225,其发光原理是分别从第一电极21和第二电极23注入的空穴和电子在有机发光层中复合产生激子从而实现发光。For example, the organic light emitting layer 22 can convert electrical energy into light energy. As shown in FIG. 5, the organic light emitting layer 22 includes: a hole injection layer 221, a hole transport layer 222, a light emitting layer 223, an electron transport layer 224 and an electron injection layer 225. The holes and electrons injected by the two electrodes 23 recombine in the organic light-emitting layer to generate excitons to realize light emission.
在一个示例中,空穴注入层221的主体材料包括:三氧化钼、三氧化钨或五氧化二钒,本申请实施例并不以此为限。In an example, the host material of the hole injection layer 221 includes molybdenum trioxide, tungsten trioxide, or vanadium pentoxide, and the embodiment of the present application is not limited thereto.
在一个示例中,空穴传输层222的主体材料可以为聚对苯撑乙烯类、聚噻吩类、聚硅烷类、三苯甲烷类、三芳胺类、腙类、吡唑啉类、嚼唑类、咔唑类、丁二烯类或其他类似具有空穴传输性质的材料,本申请实施例并不以此为限。In an example, the host material of the hole transport layer 222 may be polyparaphenylene vinylenes, polythiophenes, polysilanes, triphenylmethanes, triarylamines, hydrazones, pyrazolines, and azoles. , Carbazoles, butadienes or other similar materials with hole transport properties, the embodiments of the present application are not limited thereto.
在一个示例中,发光层223的主体材料包括4-(二腈甲基)-2-丁基-6-(1,1,7,7-四甲基久洛呢啶-9-乙烯基)-4H-吡喃(DCJTB)、9,10-二(β-萘基)蒽(ADN)、4,4’- 双(9-乙基-3-咔唑乙烯基)-1,1’-联苯(BCzVBi)或8-羟基喹啉铝,本申请实施例并不以此为限。In one example, the host material of the light-emitting layer 223 includes 4-(dinitrile methyl)-2-butyl-6-(1,1,7,7-tetramethyljulonidine-9-vinyl) -4H-pyran (DCJTB), 9,10-bis(β-naphthyl)anthracene (ADN), 4,4'-bis(9-ethyl-3-carbazole vinyl)-1,1'- Biphenyl (BCzVBi) or 8-hydroxyquinoline aluminum, the embodiments of the present application are not limited thereto.
在一个示例中,电子传输层224的厚度为40~80纳米,电子传输层的主体材料包括4,7-二苯基-1,10-菲罗啉(Bphen)、1,2,4-三唑衍生物或1,3,5-三(1-苯基-1H-苯并咪唑-2-基)苯(TPBi),电子传输层的材质为具有较高的电子迁移率、能有效传导电子的有机分子材料,本申请实施例并不以此为限。In an example, the thickness of the electron transport layer 224 is 40 to 80 nanometers, and the host material of the electron transport layer includes 4,7-diphenyl-1,10-phenanthroline (Bphen), 1,2,4-tri Azole derivatives or 1,3,5-tris(1-phenyl-1H-benzimidazol-2-yl)benzene (TPBi), the material of the electron transport layer is high electron mobility and can effectively conduct electrons For organic molecular materials, the embodiments of this application are not limited thereto.
在一个示例中,电子注入层225的主体材料包括:碳酸铯、氟化铯、叠氮铯或氟化锂。In an example, the host material of the electron injection layer 225 includes cesium carbonate, cesium fluoride, cesium azide, or lithium fluoride.
需要说明的是,有机发光层的各个膜层可以通过蒸镀工艺制成。It should be noted that each layer of the organic light-emitting layer can be made by an evaporation process.
例如,本申请实施例提供的阵列基板还包括设置在显示区域的像素电极,像素电极位于显示区域,且与位于显示区域的薄膜晶体管的漏电极连接。For example, the array substrate provided by the embodiment of the present application further includes a pixel electrode disposed in the display area, and the pixel electrode is located in the display area and connected to the drain electrode of the thin film transistor located in the display area.
本申请实施例提供的阵列基板中,薄膜晶体管与发光器件存在两种位置关系,第一种位置关系为薄膜晶体管在第一基板上的正投影覆盖发光器件在第一基板上的正投影,即发光器件位于薄膜晶体管远离第一基板的一侧,第二种位置关系为薄膜晶体管在第一基板上的正投影与发光器件在第一基板上的正投影不存在重叠区域,即发光器件位于薄膜晶体管的侧面,本申请实施例对此不作任何限定。需要说明的是,图1是以第二种位置关系为例进行说明的,图3是以第一种位置关系为例进行说明的,本申请实施例对此不作任何限定。In the array substrate provided by the embodiment of the application, there are two positional relationships between the thin film transistor and the light emitting device. The first position relationship is that the orthographic projection of the thin film transistor on the first substrate covers the orthographic projection of the light emitting device on the first substrate, that is, The light emitting device is located on the side of the thin film transistor away from the first substrate. The second positional relationship is that there is no overlap between the orthographic projection of the thin film transistor on the first substrate and the orthographic projection of the light emitting device on the first substrate, that is, the light emitting device is located on the thin film. The side surface of the transistor is not limited in the embodiment of the present application. It should be noted that FIG. 1 uses the second position relationship as an example for description, and FIG. 3 uses the first position relationship as an example for description, which is not limited in the embodiment of the present application.
在一个示例中,图6为本申请实施例提供的阵列基板的结构示意图。如图6所示,当薄膜晶体管10与发光器件20为第一种位置关系时,本申请实施例提供的阵列基板中,发光器件20位于薄膜晶体管10远离第一基板100的一侧,其中,第一电极21与像素电极采用同一制程形成,且与薄膜晶体管10的漏电极16连接,第二电极23与低电平信号端(图中未示出)连接。In an example, FIG. 6 is a schematic structural diagram of an array substrate provided by an embodiment of the application. As shown in FIG. 6, when the thin film transistor 10 and the light emitting device 20 are in the first positional relationship, in the array substrate provided by the embodiment of the present application, the light emitting device 20 is located on the side of the thin film transistor 10 away from the first substrate 100, wherein, The first electrode 21 and the pixel electrode are formed by the same manufacturing process, and are connected to the drain electrode 16 of the thin film transistor 10, and the second electrode 23 is connected to a low-level signal terminal (not shown in the figure).
例如,为了保证发光器件发射的光线尽可能多的照射到连接的薄膜晶体管上,第一电极21为透射电极,第二电极23为反射电极,第一电极21用于使得有机发光层22发射的光线透射到薄膜晶体管上,第二电极23用于将有机发光层射向第二电极23的光线反射回去,以增加光线的利用率。For example, in order to ensure that the light emitted by the light-emitting device is irradiated to the connected thin film transistor as much as possible, the first electrode 21 is a transmissive electrode, the second electrode 23 is a reflective electrode, and the first electrode 21 is used to make the organic light-emitting layer 22 emit light. The light is transmitted to the thin film transistor, and the second electrode 23 is used to reflect the light emitted from the organic light-emitting layer to the second electrode 23 to increase the utilization rate of the light.
如图6所示,薄膜晶体管包括:栅电极12、栅绝缘层13、有源层14、源电极15、漏电极16和钝化层17,其中,钝化层17设置有过孔,第一电极21通过钝化层过孔与薄膜晶体管的漏电极16连接。As shown in FIG. 6, the thin film transistor includes: a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16, and a passivation layer 17, wherein the passivation layer 17 is provided with a via hole. The electrode 21 is connected to the drain electrode 16 of the thin film transistor through a passivation layer via.
在一个示例中,由于第一电极21与像素电极采用同一制程形成,第一电极21的厚度 为400~1500埃,第一电极21的制作材料为透明导电材料,例如氧化铟锡,氧化锌锡等,本申请实施例对此不作任何限定。In one example, since the first electrode 21 and the pixel electrode are formed by the same process, the thickness of the first electrode 21 is 400-1500 angstroms, and the material of the first electrode 21 is a transparent conductive material, such as indium tin oxide, zinc tin oxide Etc., the embodiments of this application do not make any limitation on this.
在一个示例中,有机发光层22的厚度为4000~9000埃。In an example, the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
在一个示例中,第二电极23的制作材料为银或铝,第二电极23的厚度为400~1500埃。In an example, the material of the second electrode 23 is silver or aluminum, and the thickness of the second electrode 23 is 400-1500 angstroms.
本申请实施例中,图6提供的阵列基板的工作原理包括:向第一电极21提供薄膜晶体管的漏电极的信号,向第二电极23提供低电平信号端VGL的低电平信号,当薄膜晶体管导通时,第一电极21的信号为高电平信号,第二电极23的信号为低电平信号,此时,第一电极21和第二电极23之间存在压差(一般压差大于20伏特),有机发光层22在压差的作用下发光,产生光线强度大于8000尼特的光线,该光线射入薄膜晶体管上,使得薄膜晶体管的开态电流提升70%以上,当薄膜晶体管处于截止状态时,第一电极21的信号被拉低至低电平信号,第二电极23的信号仍为低电平信号,此时,第一电极和第二电极之间无压差,有机发光层22不会发光,因此不会影响薄膜晶体管的漏电流。In the embodiment of the present application, the working principle of the array substrate provided in FIG. 6 includes: providing the first electrode 21 with the signal of the drain electrode of the thin film transistor, and providing the second electrode 23 with the low-level signal of the low-level signal terminal VGL, when When the thin film transistor is turned on, the signal of the first electrode 21 is a high-level signal, and the signal of the second electrode 23 is a low-level signal. At this time, there is a voltage difference (general voltage) between the first electrode 21 and the second electrode 23. The difference is greater than 20 volts), the organic light-emitting layer 22 emits light under the action of the pressure difference, and generates light with a light intensity greater than 8000 nits. The light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%. When the transistor is in the off state, the signal of the first electrode 21 is pulled down to a low level signal, and the signal of the second electrode 23 is still a low level signal. At this time, there is no voltage difference between the first electrode and the second electrode. The organic light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
在一个示例中,图7为本申请实施例提供的阵列基板的结构示意图。如图7所示,当薄膜晶体管10与发光器件20为第二种位置关系时,本申请实施例提供的阵列基板中,第一电极21与薄膜晶体管的栅电极12采用同一制程形成,且与低电平信号端(图中未示出)连接,第二电极23与薄膜晶体管的源漏电极采用同一制程形成,且薄膜晶体管的漏电极16连接。In an example, FIG. 7 is a schematic structural diagram of an array substrate provided by an embodiment of the application. As shown in FIG. 7, when the thin film transistor 10 and the light emitting device 20 are in the second positional relationship, in the array substrate provided by the embodiment of the present application, the first electrode 21 and the gate electrode 12 of the thin film transistor are formed by the same manufacturing process, and The low-level signal terminal (not shown in the figure) is connected, the second electrode 23 and the source and drain electrodes of the thin film transistor are formed by the same process, and the drain electrode 16 of the thin film transistor is connected.
例如,为了保证发光器件发射的光线尽可能多的照射到连接的薄膜晶体管上,第一电极21为反射电极,第二电极23为透射电极,第一电极21用于将有机发光层射向第一电极21的光线反射回去,第二电极23用于使得有机发光层22发射的光线透射到彩膜基板上通过彩膜基板的反射射向薄膜晶体管,以增加光线的利用率。For example, in order to ensure that the light emitted by the light-emitting device is irradiated to the connected thin film transistor as much as possible, the first electrode 21 is a reflective electrode, the second electrode 23 is a transmissive electrode, and the first electrode 21 is used to irradiate the organic light-emitting layer toward the first electrode. The light from one electrode 21 is reflected back, and the second electrode 23 is used to make the light emitted by the organic light-emitting layer 22 transmit to the color film substrate and be reflected by the color film substrate to the thin film transistor to increase the utilization rate of light.
如图7所示,薄膜晶体管包括:栅电极12、栅绝缘层13、有源层14、源电极15、漏电极16和钝化层17。As shown in FIG. 7, the thin film transistor includes a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16 and a passivation layer 17.
在一个示例中,第一电极21的厚度为400~1500埃,薄膜晶体管的栅电极12和第一电极21的制作材料均为银或铝,本申请实施例对此不作任何限定。In an example, the thickness of the first electrode 21 is 400-1500 angstroms, and the gate electrode 12 and the first electrode 21 of the thin film transistor are made of silver or aluminum, which is not limited in the embodiment of the present application.
在一个示例中,有机发光层22的厚度为4000~9000埃。In an example, the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
在一个示例中,第二电极23的厚度为400~1500埃,薄膜晶体管的源电极15以及漏电极16与第二电极23的制作材料可以为透明导电材料,例如氧化铟锡,氧化锌锡等,还 可以为金属材料。In an example, the thickness of the second electrode 23 is 400-1500 angstroms, and the source electrode 15 and the drain electrode 16 and the second electrode 23 of the thin film transistor can be made of transparent conductive materials, such as indium tin oxide, zinc tin oxide, etc. , Can also be metal materials.
需要说明的是,当第二电极23的制作材料为透明导电材料时,第二电极23为面状电极;当第二电极23的制作材料为金属时,第二电极23包括多个条状电极和连接电极,连接电极用于连接多个条状电极,还用于连接薄膜晶体管的漏电极。需要说明的是,图7是以第二电极的制作材料为金属为例进行说明的,本申请实施例对此不作任何限定。It should be noted that when the material of the second electrode 23 is a transparent conductive material, the second electrode 23 is a planar electrode; when the material of the second electrode 23 is metal, the second electrode 23 includes a plurality of strip electrodes And the connecting electrode, the connecting electrode is used to connect a plurality of strip electrodes, and also used to connect the drain electrode of the thin film transistor. It should be noted that FIG. 7 is illustrated by taking the manufacturing material of the second electrode as a metal as an example, which is not limited in the embodiment of the present application.
如图7所示,本申请实施例提供的发光器件还包括:第一绝缘层24,其中,第一绝缘层24与薄膜晶体管的钝化层17采用同一制程形成,且为同一膜层,其中,第一绝缘层24在第一基板100上的正投影覆盖有机发光层22在第一基板100上的正投影。As shown in FIG. 7, the light-emitting device provided by the embodiment of the present application further includes: a first insulating layer 24, wherein the first insulating layer 24 and the passivation layer 17 of the thin film transistor are formed by the same process and are the same film layer, wherein , The orthographic projection of the first insulating layer 24 on the first substrate 100 covers the orthographic projection of the organic light-emitting layer 22 on the first substrate 100.
本申请实施例中,图7提供的阵列基板的工作原理包括:向第一电极21提供低电平信号端VGL的低电平信号,向第二电极23提供薄膜晶体管的漏电极的信号,当薄膜晶体管导通时,第一电极21的信号为低电平信号,第二电极23的信号为高电平信号,此时,第一电极21和第二电极23之间存在压差,一般压差大于20伏特,有机发光层22在压差的作用下发光,产生光线强度大于8000尼特的光线,该光线射入薄膜晶体管上,使得薄膜晶体管的开态电流提升70%以上,当薄膜晶体管处于截止状态时,第一电极21的信号仍为低电平信号,第二电极23的信号被拉低至低电平信号,此时,第一电极和第二电极之间无压差,有机发光层22不会发光,因此不会影响薄膜晶体管的漏电流。In the embodiment of the present application, the working principle of the array substrate provided in FIG. 7 includes: providing the first electrode 21 with the low-level signal of the low-level signal terminal VGL, and providing the second electrode 23 with the signal of the drain electrode of the thin film transistor, when When the thin film transistor is turned on, the signal of the first electrode 21 is a low-level signal, and the signal of the second electrode 23 is a high-level signal. At this time, there is a voltage difference between the first electrode 21 and the second electrode 23. When the difference is greater than 20 volts, the organic light-emitting layer 22 emits light under the action of the pressure difference, and generates light with a light intensity greater than 8000 nits. The light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%. When in the off state, the signal of the first electrode 21 is still a low-level signal, and the signal of the second electrode 23 is pulled down to a low-level signal. At this time, there is no voltage difference between the first electrode and the second electrode. The light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
在一个示例中,图8为本申请实施例提供的阵列基板的结构示意图。如图8所示,当薄膜晶体管10与发光器件20为第二种位置关系时,本申请实施例提供的阵列基板中,第一电极21与薄膜晶体管的源漏电极采用同一制程形成,且与薄膜晶体管的漏电极16连接,第二电极23与像素电极采用同一制程形成,且与低电平信号端(图中未示出)连接。In an example, FIG. 8 is a schematic structural diagram of an array substrate provided by an embodiment of the application. As shown in FIG. 8, when the thin film transistor 10 and the light emitting device 20 are in the second positional relationship, in the array substrate provided by the embodiment of the present application, the first electrode 21 and the source and drain electrodes of the thin film transistor are formed by the same manufacturing process, and The drain electrode 16 of the thin film transistor is connected, and the second electrode 23 and the pixel electrode are formed by the same process, and are connected to a low-level signal terminal (not shown in the figure).
例如,为了保证发光器件发射的光线尽可能多的照射到连接的薄膜晶体管上,第一电极21为反射电极,第二电极23为透射电极,第一电极21用于将有机发光层射向第一电极21的光线反射回去,第二电极23用于使得有机发光层22发射的光线透射到彩膜基板上通过彩膜基板的反射射向薄膜晶体管,以增加光线的利用率。For example, in order to ensure that the light emitted by the light-emitting device is irradiated to the connected thin film transistor as much as possible, the first electrode 21 is a reflective electrode, the second electrode 23 is a transmissive electrode, and the first electrode 21 is used to irradiate the organic light-emitting layer toward the first electrode. The light from one electrode 21 is reflected back, and the second electrode 23 is used to make the light emitted by the organic light-emitting layer 22 transmit to the color film substrate and be reflected by the color film substrate to the thin film transistor to increase the utilization rate of light.
如图8所示,薄膜晶体管包括:栅电极12、栅绝缘层13、有源层14、源电极15、漏电极16和钝化层17。As shown in FIG. 8, the thin film transistor includes a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16 and a passivation layer 17.
在一个示例中,第一电极21的厚度为400~1500埃,薄膜晶体管的源漏电极和第一电极21的制作材料均为银或铝,本申请实施例对此不作任何限定。In an example, the thickness of the first electrode 21 is 400-1500 angstroms, and the source and drain electrodes of the thin film transistor and the first electrode 21 are made of silver or aluminum, which is not limited in the embodiment of the present application.
在一个示例中,有机发光层22的厚度为4000~9000埃。In an example, the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
在一个示例中,第二电极23的厚度为400~1500埃,像素电极与第二电极23的制作材料可以为透明导电材料,例如氧化铟锡,氧化锌锡等,本申请实施例对此不作任何限定。In an example, the thickness of the second electrode 23 is 400 to 1500 angstroms, and the pixel electrode and the second electrode 23 can be made of transparent conductive materials, such as indium tin oxide, zinc tin oxide, etc. This embodiment of the application does not do this Any restrictions.
如图8所示,本申请实施例提供的发光器件还包括:第二绝缘层25,其中,第二绝缘层25与薄膜晶体管的栅绝缘层13采用同一制程形成,且为同一膜层,其中,第二绝缘层25在第一基板100上的正投影覆盖有机发光层22在第一基板100上的正投影。As shown in FIG. 8, the light-emitting device provided by the embodiment of the present application further includes: a second insulating layer 25, wherein the second insulating layer 25 and the gate insulating layer 13 of the thin film transistor are formed by the same process and are the same film layer, wherein , The orthographic projection of the second insulating layer 25 on the first substrate 100 covers the orthographic projection of the organic light-emitting layer 22 on the first substrate 100.
本申请实施例中,图8提供的阵列基板的工作原理包括:向第一电极21提供薄膜晶体管的漏电极的信号,向第二电极23提供低电平信号端VGL的低电平信号,当薄膜晶体管导通时,第一电极21的信号为高电平信号,第二电极23的信号为低电平信号,此时,第一电极21和第二电极23之间存在压差,一般压差大于20伏特,有机发光层22在压差的作用下发光,产生光线强度大于8000尼特的光线,该光线射入薄膜晶体管上,使得薄膜晶体管的开态电流提升70%以上,当薄膜晶体管处于截止状态时,第一电极21的信号被拉低至低电平信号,第二电极23的信号仍为低电平信号,此时,第一电极和第二电极之间无压差,有机发光层22不会发光,因此不会影响薄膜晶体管的漏电流。In the embodiment of the present application, the working principle of the array substrate provided in FIG. 8 includes: providing the first electrode 21 with the signal of the drain electrode of the thin film transistor, and providing the second electrode 23 with the low-level signal of the low-level signal terminal VGL, when When the thin film transistor is turned on, the signal of the first electrode 21 is a high-level signal, and the signal of the second electrode 23 is a low-level signal. At this time, there is a voltage difference between the first electrode 21 and the second electrode 23. When the difference is greater than 20 volts, the organic light-emitting layer 22 emits light under the action of the pressure difference, and generates light with a light intensity greater than 8000 nits. The light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%. When in the off state, the signal of the first electrode 21 is pulled down to a low level signal, and the signal of the second electrode 23 is still a low level signal. At this time, there is no voltage difference between the first electrode and the second electrode. The light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
在一个示例中,图9为本申请实施例提供的阵列基板的结构示意图。如图9所示,当薄膜晶体管10与发光器件20为第二种位置关系时,本申请实施例提供的阵列基板中,第一电极21位于薄膜晶体管的钝化层17远离第一基板的一侧,且与薄膜晶体管的栅电极或者漏电极连接,第二电极23与像素电极采用同一制程形成,且与低电平信号端(图中未示出)连接。In an example, FIG. 9 is a schematic structural diagram of an array substrate provided by an embodiment of the application. As shown in FIG. 9, when the thin film transistor 10 and the light emitting device 20 are in the second positional relationship, in the array substrate provided by the embodiment of the present application, the first electrode 21 is located on the passivation layer 17 of the thin film transistor away from the first substrate. It is connected to the gate electrode or the drain electrode of the thin film transistor. The second electrode 23 and the pixel electrode are formed by the same manufacturing process, and are connected to a low-level signal terminal (not shown in the figure).
例如,为了保证发光器件发射的光线尽可能多的照射到连接的薄膜晶体管上,第一电极21为反射电极,第二电极23为透射电极,第一电极21用于将有机发光层射向第一电极21的光线反射回去,第二电极23用于使得有机发光层22发射的光线透射到彩膜基板上通过彩膜基板的反射射向薄膜晶体管,以增加光线的利用率。For example, in order to ensure that the light emitted by the light-emitting device is irradiated to the connected thin film transistor as much as possible, the first electrode 21 is a reflective electrode, the second electrode 23 is a transmissive electrode, and the first electrode 21 is used to irradiate the organic light-emitting layer toward the first electrode. The light from one electrode 21 is reflected back, and the second electrode 23 is used to make the light emitted by the organic light-emitting layer 22 transmit to the color film substrate and be reflected by the color film substrate to the thin film transistor to increase the utilization rate of light.
如图9所示,薄膜晶体管包括:栅电极12、栅绝缘层13、有源层14、源电极15、漏电极16和钝化层17。As shown in FIG. 9, the thin film transistor includes a gate electrode 12, a gate insulating layer 13, an active layer 14, a source electrode 15, a drain electrode 16 and a passivation layer 17.
在一个示例中,第一电极21的厚度为400~1500埃,薄膜晶体管的源漏电极和第一电极21的制作材料均为银或铝,本申请实施例对此不作任何限定。In an example, the thickness of the first electrode 21 is 400-1500 angstroms, and the source and drain electrodes of the thin film transistor and the first electrode 21 are made of silver or aluminum, which is not limited in the embodiment of the present application.
在一个示例中,有机发光层22的厚度为4000~9000埃。In an example, the thickness of the organic light-emitting layer 22 is 4000-9000 angstroms.
在一个示例中,第二电极23的厚度为400~1500埃,像素电极与第二电极23的制作材料可以为透明导电材料,例如氧化铟锡,氧化锌锡等,本申请实施例对此不作任何限定。In an example, the thickness of the second electrode 23 is 400 to 1500 angstroms, and the pixel electrode and the second electrode 23 can be made of transparent conductive materials, such as indium tin oxide, zinc tin oxide, etc. This embodiment of the application does not do this Any restrictions.
如图9所示,本申请实施例提供的发光器件还包括:位于第一电极靠近第一基板的一侧的第一绝缘层24和第二绝缘层25,第二绝缘层25位于第一绝缘层24靠近第一基板100的一侧,其中,第一绝缘层24与薄膜晶体管的钝化层17采用同一制程形成,且为同一膜层,第二绝缘层25与薄膜晶体管的栅绝缘层13采用同一制程形成,且为同一膜层。As shown in FIG. 9, the light emitting device provided by the embodiment of the present application further includes: a first insulating layer 24 and a second insulating layer 25 located on the side of the first electrode close to the first substrate, and the second insulating layer 25 is located in the first insulating layer. The layer 24 is close to the side of the first substrate 100, wherein the first insulating layer 24 and the passivation layer 17 of the thin film transistor are formed by the same process and are the same film layer. The second insulating layer 25 is the same as the gate insulating layer 13 of the thin film transistor. It is formed by the same process and is the same film layer.
本申请实施例中,图9提供的阵列基板的工作原理包括:向第一电极21提供薄膜晶体管的栅电极或者漏电极的信号,向第二电极23提供低电平信号端VGL的低电平信号,当薄膜晶体管导通时,第一电极21的信号为高电平信号,第二电极23的信号为低电平信号,此时,第一电极21和第二电极23之间存在压差,一般压差大于20伏特,有机发光层22在压差的作用下发光,产生光线强度大于8000尼特的光线,该光线射入薄膜晶体管上,使得薄膜晶体管的开态电流提升70%以上,当薄膜晶体管处于截止状态时,第一电极21的信号被拉低至低电平信号,第二电极23的信号仍为低电平信号,此时,第一电极和第二电极之间无压差,有机发光层22不会发光,因此不会影响薄膜晶体管的漏电流。In the embodiment of the present application, the working principle of the array substrate provided in FIG. 9 includes: providing the first electrode 21 with the signal of the gate electrode or the drain electrode of the thin film transistor, and providing the second electrode 23 with the low level of the low-level signal terminal VGL Signal. When the thin film transistor is turned on, the signal of the first electrode 21 is a high-level signal, and the signal of the second electrode 23 is a low-level signal. At this time, there is a voltage difference between the first electrode 21 and the second electrode 23 Generally, the pressure difference is greater than 20 volts, and the organic light-emitting layer 22 emits light under the action of the pressure difference to generate light with a light intensity greater than 8000 nits. This light is incident on the thin film transistor, which increases the on-state current of the thin film transistor by more than 70%. When the thin film transistor is in the off state, the signal of the first electrode 21 is pulled down to a low level signal, and the signal of the second electrode 23 is still a low level signal. At this time, there is no voltage between the first electrode and the second electrode. Poorly, the organic light emitting layer 22 does not emit light, and therefore does not affect the leakage current of the thin film transistor.
图10A为图9对应的结构示意图,图10B为图9对应的结构示意图。如图10A所示,第一电极与薄膜晶体管的栅电极连接,本申请实施例提供的发光器件还包括:第三电极26,第三电极26与薄膜晶体管的栅电极12采用同一制程形成,且第三电极26与薄膜晶体管的栅电极12相连,第一绝缘层24和第二绝缘层25设置有过孔,第一电极21通过第一绝缘层24、第二绝缘层25和第三电极26与薄膜晶体管的栅电极12连接。如图10B所示,第一电极与薄膜晶体管的漏电极连接,本申请实施例提供的发光器件还包括:第四电极27,第四电极27与薄膜晶体管的漏电极16采用同一制程形成,且第四电极27与薄膜晶体管的源漏电极相连,第一绝缘层24设置有过孔,第一电极21通过第一绝缘层24和第四电极27与薄膜晶体管的漏电极16连接。FIG. 10A is a schematic structural diagram corresponding to FIG. 9, and FIG. 10B is a schematic structural diagram corresponding to FIG. 9. As shown in FIG. 10A, the first electrode is connected to the gate electrode of the thin film transistor. The light emitting device provided by the embodiment of the present application further includes: a third electrode 26. The third electrode 26 and the gate electrode 12 of the thin film transistor are formed by the same process, and The third electrode 26 is connected to the gate electrode 12 of the thin film transistor. The first insulating layer 24 and the second insulating layer 25 are provided with via holes. The first electrode 21 passes through the first insulating layer 24, the second insulating layer 25 and the third electrode 26. It is connected to the gate electrode 12 of the thin film transistor. As shown in FIG. 10B, the first electrode is connected to the drain electrode of the thin film transistor. The light emitting device provided by the embodiment of the present application further includes: a fourth electrode 27. The fourth electrode 27 and the drain electrode 16 of the thin film transistor are formed by the same process, and The fourth electrode 27 is connected to the source and drain electrodes of the thin film transistor, the first insulating layer 24 is provided with a via hole, and the first electrode 21 is connected to the drain electrode 16 of the thin film transistor through the first insulating layer 24 and the fourth electrode 27.
需要说明的是,图6~图9是以薄膜晶体管为底栅结构为例进行说明的,本申请实施例中的薄膜晶体管还可以为底栅结构,本申请实施例对此不作任何限定。It should be noted that FIGS. 6 to 9 illustrate the thin film transistor as an example with a bottom gate structure. The thin film transistor in the embodiment of the present application may also have a bottom gate structure, which is not limited in the embodiment of the present application.
基于上述实施例的发明构思,本申请实施例提供一种阵列基板的制作方法,用于制作先前所述的阵列基板。图11为本申请实施例提供的阵列基板的制作方法的流程图。如图11所示,本申请实施例提供的阵列基板的制作方法包括以下步骤:Based on the inventive concept of the foregoing embodiment, an embodiment of the present application provides a manufacturing method of an array substrate for manufacturing the aforementioned array substrate. FIG. 11 is a flowchart of a manufacturing method of an array substrate provided by an embodiment of the application. As shown in FIG. 11, the manufacturing method of the array substrate provided by the embodiment of the present application includes the following steps:
在步骤S1,提供第一基板。In step S1, a first substrate is provided.
例如,第一基板包括显示区域和非显示区域。For example, the first substrate includes a display area and a non-display area.
在步骤S2,在第一基板上形成薄膜晶体管和发光器件。In step S2, a thin film transistor and a light emitting device are formed on the first substrate.
例如,发光器件位于非显示区域中。发光器件,与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。For example, the light emitting device is located in the non-display area. The light-emitting device is connected to the thin film transistor and the low-level signal terminal and is configured to emit light under the control of the low-level signal terminal and the thin film transistor in a conductive state.
本申请实施例提供的阵列基板的制作方法包括:提供第一基板,第一基板包括:显示区域和非显示区域,在第一基板上形成薄膜晶体管和发光器件,发光器件位于非显示区域中;发光器件,与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。本申请实施例通过在第一基板上设置发光器件,通过发光器件发光来提高薄膜晶体管的开态电流,不仅延长了阵列基板的使用寿命,还提升了阵列基板的稳定性和显示品质。The manufacturing method of the array substrate provided by the embodiment of the present application includes: providing a first substrate, the first substrate including: a display area and a non-display area, forming a thin film transistor and a light-emitting device on the first substrate, and the light-emitting device is located in the non-display area; The light-emitting device is connected to the thin film transistor and the low-level signal terminal and is configured to emit light under the control of the low-level signal terminal and the thin film transistor in a conductive state. In the embodiments of the present application, the light-emitting device is provided on the first substrate, and the on-state current of the thin film transistor is increased by emitting light from the light-emitting device, which not only prolongs the service life of the array substrate, but also improves the stability and display quality of the array substrate.
作为一种实施方式,步骤S2例如包括:在第一基板上形成薄膜晶体管;在薄膜晶体管远离第一基板的一侧依次形成第一电极、有机发光层和第二电极,以形成发光器件。As an embodiment, step S2 includes, for example, forming a thin film transistor on a first substrate; and sequentially forming a first electrode, an organic light emitting layer, and a second electrode on a side of the thin film transistor away from the first substrate to form a light emitting device.
在该种实施方式中,第一电极与薄膜晶体管的漏电极连接,第二电极与低电平信号端连接。In this embodiment, the first electrode is connected to the drain electrode of the thin film transistor, and the second electrode is connected to the low-level signal terminal.
作为另一种实施方式,步骤S2例如包括:在第一基板上采用同一制程形成栅电极和第一电极;在栅电极远离第一基板的一侧依次形成栅绝缘层和有源层;在第一电极远离第一基板的一侧形成有机发光层;在有机发光层远离第一基板的一侧采用同一制程形成源漏电极和第二电极。As another embodiment, step S2 includes, for example, forming a gate electrode and a first electrode on the first substrate using the same process; forming a gate insulating layer and an active layer in sequence on the side of the gate electrode away from the first substrate; An organic light-emitting layer is formed on the side of an electrode away from the first substrate; the source and drain electrodes and the second electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate.
在该种实施方式中,第一电极与低电平信号端连接,第二电极为薄膜晶体管的漏电极连接。In this embodiment, the first electrode is connected to the low-level signal terminal, and the second electrode is connected to the drain electrode of the thin film transistor.
在一个示例中,在有机发光层远离第一基板的一侧采用同一制程形成源漏电极和第二电极之后,本申请实施例提供的阵列基板的制作方法还包括:在源漏电极远离第一基板的一侧采用同一制程形成钝化层和第一绝缘层。In an example, after the source and drain electrodes and the second electrode are formed by the same process on the side of the organic light-emitting layer away from the first substrate, the manufacturing method of the array substrate provided by the embodiment of the present application further includes: The passivation layer and the first insulating layer are formed by the same process on one side of the substrate.
作为又一种实施方式,在第一基板上形成栅电极;在栅电极远离第一基板的一侧依次形成栅绝缘层和有源层;在有源层远离第一基板的一侧采用同一制程形成源漏电极和第一电极;在源漏电极远离第一基板的一侧形成钝化层;在第一电极远离第一基板的一侧形成有机发光层;在有机发光层远离第一基板的一侧采用同一制程形成像素电极和第二电极。As yet another embodiment, a gate electrode is formed on the first substrate; a gate insulating layer and an active layer are sequentially formed on the side of the gate electrode away from the first substrate; the same process is used on the side of the active layer away from the first substrate Forming source and drain electrodes and first electrodes; forming a passivation layer on the side of the source and drain electrodes away from the first substrate; forming an organic light-emitting layer on the side of the first electrode away from the first substrate; forming the organic light-emitting layer away from the first substrate One side adopts the same manufacturing process to form the pixel electrode and the second electrode.
在该种实施方式中,第一电极与薄膜晶体管的漏电极连接,第二电极与低电平信号端连接。In this embodiment, the first electrode is connected to the drain electrode of the thin film transistor, and the second electrode is connected to the low-level signal terminal.
在一个示例中,本申请实施例提供的阵列基板的制作方法还包括:在第一基板上形成第二绝缘层,其中,在第一基板上形成第二绝缘层与在栅电极远离第一基板的一侧形成栅 绝缘层采用同一制程。In an example, the manufacturing method of the array substrate provided by the embodiment of the present application further includes: forming a second insulating layer on the first substrate, wherein the second insulating layer is formed on the first substrate and the gate electrode is away from the first substrate. The same process is used to form the gate insulating layer on one side.
作为再一种实施方式,步骤S2例如包括:在第一基板上形成栅电极;在栅电极远离第一基板的一侧依次形成栅绝缘层、有源层、源漏电极和钝化层;在钝化层远离第一基板的一侧形成依次形成第一电极和有机发光层;在有机发光层远离第一基板的一侧采用同一制程形成像素电极和第二电极。As another embodiment, step S2 includes, for example, forming a gate electrode on the first substrate; sequentially forming a gate insulating layer, an active layer, a source and drain electrode, and a passivation layer on the side of the gate electrode away from the first substrate; The side of the passivation layer away from the first substrate is formed to sequentially form a first electrode and an organic light-emitting layer; on the side of the organic light-emitting layer away from the first substrate, the pixel electrode and the second electrode are formed by the same process.
在该种实施方式中,第一电极与薄膜晶体管的栅电极或者漏电极连接,第二电极与低电平信号端连接。In this embodiment, the first electrode is connected to the gate electrode or the drain electrode of the thin film transistor, and the second electrode is connected to the low-level signal terminal.
在一个示例中,本申请实施例提供的阵列基板的制作方法还包括:在第一基板上形成第二绝缘层,在第二绝缘层上形成第一绝缘层,其中,在第一基板上形成第二绝缘层与在栅电极远离第一基板的一侧形成栅绝缘层采用同一制程,在第二绝缘层上形成第一绝缘层与在源漏电极上形成钝化层采用同一制程。In an example, the manufacturing method of the array substrate provided by the embodiment of the present application further includes: forming a second insulating layer on the first substrate, and forming a first insulating layer on the second insulating layer, wherein The second insulating layer and the formation of the gate insulating layer on the side of the gate electrode away from the first substrate use the same process, and the formation of the first insulating layer on the second insulating layer and the passivation layer on the source and drain electrodes use the same process.
在一个示例中,本申请实施例提供的阵列基板的制作方法在第一基板上形成第二绝缘层之前还包括:在第一基板上形成第三电极,其中,在第一基板上形成第三电极与在第一基板上形成栅电极采用同一制程,或者,在形成钝化层之前,还包括:在第二绝缘层上形成第四电极,其中,在第二绝缘层上形成第四电极与形成源漏电极采用同一制程。In an example, before forming the second insulating layer on the first substrate, the method for manufacturing the array substrate provided by the embodiment of the present application further includes: forming a third electrode on the first substrate, wherein the third electrode is formed on the first substrate. The electrode and the gate electrode are formed on the first substrate using the same process, or, before the passivation layer is formed, further comprising: forming a fourth electrode on the second insulating layer, wherein the fourth electrode and the gate electrode are formed on the second insulating layer The same process is used to form the source and drain electrodes.
基于上述实施例的发明构思,本申请实施例提供一种显示面板。本申请实施例提供的显示面板还包括:阵列基板和彩膜基板。Based on the inventive concept of the foregoing embodiment, an embodiment of the present application provides a display panel. The display panel provided by the embodiment of the present application further includes: an array substrate and a color filter substrate.
阵列基板为本申请实施例提供的阵列基板,其实现原理和实现效果类似,在此不再赘述。The array substrate is the array substrate provided by the embodiments of the application, and its implementation principles and effects are similar, and will not be repeated here.
在一个示例中,图12为本申请实施例提供的显示面板的结构示意图。如图12所示,彩膜基板包括第二基板200以及设置在第二基板200上的黑矩阵层30和保护层40。In an example, FIG. 12 is a schematic structural diagram of a display panel provided by an embodiment of the application. As shown in FIG. 12, the color filter substrate includes a second substrate 200 and a black matrix layer 30 and a protective layer 40 provided on the second substrate 200.
例如,保护层40位于黑矩阵层30靠近第一基板100的一侧,并且黑矩阵层30在第一基板100上的正投影覆盖发光器件20在第一基板100上的正投影。For example, the protective layer 40 is located on the side of the black matrix layer 30 close to the first substrate 100, and the orthographic projection of the black matrix layer 30 on the first substrate 100 covers the orthographic projection of the light emitting device 20 on the first substrate 100.
本实施例通过黑矩阵层在第一基板上的正投影覆盖发光器件在第一基板上的正投影,能够保证用于增大薄膜晶体管的开态电流的发光器件发射的光线不影响阵列基板的显示。In this embodiment, the orthographic projection of the light-emitting device on the first substrate is covered by the orthographic projection of the black matrix layer on the first substrate, which can ensure that the light emitted by the light-emitting device for increasing the on-state current of the thin film transistor does not affect the performance of the array substrate. display.
需要说明的是,本申请实施例中所述的显示面板可以为扭曲向列(Twisted Nematic,简称TN)模式、垂直(Vertical Alignment,简称VA)模式、平面转换技术(In-plane Switching,简称IPS)模式、高级超维场转换技术(Advance super Dimension Switch,简称ADS)模式或高开口率且高级超维场转换技术(HighAdvance super Dimension Switch, 简称HADS)模式,本申请实施例对此不做任何限定。It should be noted that the display panel described in the embodiments of the present application may be in a twisted nematic (TN) mode, a vertical (Vertical Alignment, VA) mode, and a plane switching technology (In-plane Switching, IPS for short). ) Mode, Advanced Super Dimension Switch (ADS) mode, or High Aperture Rate and Advanced Super Dimension Switch (HADS) mode. The embodiment of this application does not do anything about this limited.
本申请实施例附图只涉及本申请实施例涉及到的结构,其他结构可参考通常设计。The drawings of the embodiments of the present application only refer to the structures involved in the embodiments of the present application, and other structures can refer to common designs.
为了清晰起见,在用于描述本发明的实施例的附图中,层或微结构的厚度和尺寸被放大。可以理解,当诸如层、膜、区域或基板之类的元件被称作位于另一元件“上”或“下”时,该元件可以“直接”位于另一元件“上”或“下”,或者可以存在中间元件。For clarity, in the drawings used to describe the embodiments of the present invention, the thickness and size of layers or microstructures are exaggerated. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element can be "directly" on or "under" the other element. Or there may be intermediate elements.
虽然本发明所揭露的实施方式如上,但所述的内容仅为便于理解本发明而采用的实施方式,并非用以限定本发明。任何本发明所属领域内的技术人员,在不脱离本发明所揭露的精神和范围的前提下,可以在实施的形式及细节上进行任何的修改与变化,但本发明的专利保护范围,仍须以所附的权利要求书所界定的范围为准。Although the embodiments disclosed in the present invention are as above, the content described is only the embodiments used to facilitate the understanding of the present invention, and is not intended to limit the present invention. Any person skilled in the art of the present invention can make any modifications and changes in the implementation form and details without departing from the spirit and scope of the present invention. However, the patent protection scope of the present invention still requires The scope defined by the appended claims shall prevail.

Claims (19)

  1. 一种阵列基板,包括:An array substrate, including:
    第一基板;以及The first substrate; and
    设置在所述第一基板上的薄膜晶体管和发光器件,其中:The thin film transistor and the light emitting device arranged on the first substrate, wherein:
    所述第一基板具有显示区域和非显示区域;The first substrate has a display area and a non-display area;
    所述发光器件位于非显示区域中,并且所述发光器件与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。The light emitting device is located in a non-display area, and the light emitting device is connected to a thin film transistor and a low level signal terminal and is configured to emit light under the control of the low level signal terminal and the thin film transistor in a conductive state.
  2. 根据权利要求1所述的阵列基板,其中所述发光器件还被配置为在低电平信号端和处于截止状态的薄膜晶体管的控制下不发光。The array substrate according to claim 1, wherein the light-emitting device is further configured to not emit light under the control of a low-level signal terminal and a thin film transistor in an off state.
  3. 根据权利要求1或2所述的阵列基板,其中:The array substrate according to claim 1 or 2, wherein:
    所述发光器件包括第一电极、第二电极和有机发光层;The light emitting device includes a first electrode, a second electrode, and an organic light emitting layer;
    所述第一电极位于所述有机发光层靠近所述第一基板的一侧;The first electrode is located on a side of the organic light-emitting layer close to the first substrate;
    所述第二电极位于所述有机发光层远离所述第一基板的一侧;The second electrode is located on a side of the organic light emitting layer away from the first substrate;
    所述第一电极和所述第二电极被配置为向所述有机发光层施加电场;以及The first electrode and the second electrode are configured to apply an electric field to the organic light emitting layer; and
    所述有机发光层被配置为在所述电场的作用下发光。The organic light emitting layer is configured to emit light under the action of the electric field.
  4. 根据权利要求3所述的阵列基板,其中所述薄膜晶体管在所述第一基板上的正投影覆盖所述发光器件在所述第一基板上的正投影。3. The array substrate according to claim 3, wherein the orthographic projection of the thin film transistor on the first substrate covers the orthographic projection of the light emitting device on the first substrate.
  5. 根据权利要求4所述的阵列基板,其中:The array substrate of claim 4, wherein:
    所述第一基板还包括像素电极;The first substrate further includes pixel electrodes;
    所述发光器件位于所述薄膜晶体管远离所述第一基板的一侧;The light emitting device is located on a side of the thin film transistor away from the first substrate;
    所述第一电极与所述像素电极采用同一制程形成,且与薄膜晶体管的漏电极连接;The first electrode and the pixel electrode are formed by the same manufacturing process, and are connected to the drain electrode of the thin film transistor;
    所述第二电极与低电平信号端连接;The second electrode is connected to a low-level signal terminal;
    所述第一电极为透射电极;以及The first electrode is a transmissive electrode; and
    所述第二电极为反射电极。The second electrode is a reflective electrode.
  6. 根据权利要求3所述的阵列基板,其中所述薄膜晶体管在所述第一基板上的正投影与所述发光器件在所述第一基板上的正投影不存在重叠区域。3. The array substrate according to claim 3, wherein the orthographic projection of the thin film transistor on the first substrate and the orthographic projection of the light emitting device on the first substrate do not have an overlapping area.
  7. 根据权利要求6所述的阵列基板,其中:The array substrate according to claim 6, wherein:
    所述第一电极与薄膜晶体管的栅电极采用同一制程形成,且与低电平信号端连接;The first electrode and the gate electrode of the thin film transistor are formed by the same manufacturing process, and are connected to the low-level signal terminal;
    所述第二电极与薄膜晶体管的源漏电极采用同一制程形成,且与薄膜晶体管的漏电极连接;The second electrode and the source and drain electrodes of the thin film transistor are formed by the same manufacturing process, and are connected to the drain electrode of the thin film transistor;
    所述第一电极为反射电极;以及The first electrode is a reflective electrode; and
    所述第二电极为透射电极。The second electrode is a transmissive electrode.
  8. 根据权利要求7所述的阵列基板,其中:The array substrate according to claim 7, wherein:
    所述第一电极、第二电极和所述有机发光层的尺寸比薄膜晶体管的栅电极的尺寸小。The size of the first electrode, the second electrode and the organic light emitting layer is smaller than the size of the gate electrode of the thin film transistor.
  9. 根据权利要求6所述的阵列基板,其中:The array substrate according to claim 6, wherein:
    所述第一电极与薄膜晶体管的源漏电极采用同一制程形成,且与薄膜晶体管的漏电极连接;The first electrode and the source and drain electrodes of the thin film transistor are formed by the same process and are connected to the drain electrode of the thin film transistor;
    所述第二电极与像素电极采用同一制程形成,且与低电平信号端连接;The second electrode and the pixel electrode are formed by the same manufacturing process, and are connected to the low-level signal terminal;
    所述第一电极为反射电极;以及The first electrode is a reflective electrode; and
    所述第二电极为透射电极。The second electrode is a transmissive electrode.
  10. 根据权利要求6所述的阵列基板,其中:The array substrate according to claim 6, wherein:
    所述第一电极位于薄膜晶体管的钝化层远离第一基板的一侧,且与薄膜晶体管的栅电极或者漏电极连接;The first electrode is located on a side of the passivation layer of the thin film transistor away from the first substrate, and is connected to the gate electrode or the drain electrode of the thin film transistor;
    所述第二电极与像素电极采用同一制程形成,且与低电平信号端连接;The second electrode and the pixel electrode are formed by the same manufacturing process, and are connected to the low-level signal terminal;
    所述第一电极为反射电极;以及The first electrode is a reflective electrode; and
    所述第二电极为透射电极。The second electrode is a transmissive electrode.
  11. 根据权利要求1所述的阵列基板,其中所述阵列基板用于薄膜晶体管液晶显示器,并且其中所述发光器件还位于显示区域中。The array substrate according to claim 1, wherein the array substrate is used in a thin film transistor liquid crystal display, and wherein the light emitting device is also located in a display area.
  12. 一种显示面板,包括:A display panel including:
    如权利要求1~11任一项所述的阵列基板;和The array substrate according to any one of claims 1-11; and
    与阵列基板相对设置的彩膜基板。A color filter substrate arranged opposite to the array substrate.
  13. 根据权利要求12所述的显示面板,其中:The display panel of claim 12, wherein:
    所述彩膜基板包括第二基板以及设置在所述第二基板上的黑矩阵层和保护层;The color filter substrate includes a second substrate, and a black matrix layer and a protective layer disposed on the second substrate;
    所述保护层位于所述黑矩阵层靠近所述第一基板的一侧;以及The protective layer is located on a side of the black matrix layer close to the first substrate; and
    所述黑矩阵层在所述第一基板上的正投影覆盖所述发光器件在所述第一基板上的正投影。The orthographic projection of the black matrix layer on the first substrate covers the orthographic projection of the light-emitting device on the first substrate.
  14. 一种用于制作阵列基板的方法,包括:A method for manufacturing an array substrate includes:
    提供第一基板,其中所述第一基板具有显示区域和非显示区域;以及Providing a first substrate, wherein the first substrate has a display area and a non-display area; and
    在所述第一基板上形成薄膜晶体管和发光器件,其中所述发光器件位于非显示区域中,并且其中所述发光器件与薄膜晶体管和低电平信号端连接并且被配置为在低电平信号端和处于导通状态的薄膜晶体管的控制下发光。A thin film transistor and a light emitting device are formed on the first substrate, wherein the light emitting device is located in a non-display area, and wherein the light emitting device is connected to the thin film transistor and a low-level signal terminal and is configured to be The terminal and the thin film transistor in the on state emit light under the control.
  15. 根据权利要求14所述的方法,其中所述在所述第一基板上形成薄膜晶体管和发光器件包括:The method of claim 14, wherein said forming a thin film transistor and a light emitting device on the first substrate comprises:
    在第一基板上形成薄膜晶体管;以及Forming a thin film transistor on the first substrate; and
    在薄膜晶体管远离第一基板的一侧依次形成第一电极、有机发光层和第二电极以形成发光器件。A first electrode, an organic light emitting layer, and a second electrode are sequentially formed on the side of the thin film transistor away from the first substrate to form a light emitting device.
  16. 根据权利要求14所述的方法,其中所述在所述第一基板上形成薄膜晶体管和发光器件包括:The method of claim 14, wherein said forming a thin film transistor and a light emitting device on the first substrate comprises:
    在第一基板上采用同一制程形成栅电极和第一电极;Forming the gate electrode and the first electrode on the first substrate using the same manufacturing process;
    在栅电极远离第一基板的一侧依次形成栅绝缘层和有源层;Sequentially forming a gate insulating layer and an active layer on the side of the gate electrode away from the first substrate;
    在第一电极远离第一基板的一侧形成有机发光层;以及Forming an organic light-emitting layer on the side of the first electrode away from the first substrate; and
    在有机发光层远离第一基板的一侧采用同一制程形成源漏电极和第二电极。The source and drain electrodes and the second electrode are formed on the side of the organic light emitting layer away from the first substrate using the same process.
  17. 根据权利要求14所述的方法,其中所述在所述第一基板上形成薄膜晶体管和发光器件包括:The method of claim 14, wherein said forming a thin film transistor and a light emitting device on the first substrate comprises:
    在第一基板上形成栅电极;Forming a gate electrode on the first substrate;
    在栅电极远离第一基板的一侧依次形成栅绝缘层和有源层;Sequentially forming a gate insulating layer and an active layer on the side of the gate electrode away from the first substrate;
    在有源层远离第一基板的一侧采用同一制程形成源漏电极和第一电极;The source and drain electrodes and the first electrode are formed by the same process on the side of the active layer away from the first substrate;
    在源漏电极远离第一基板的一侧形成钝化层;Forming a passivation layer on the side of the source and drain electrodes away from the first substrate;
    在第一电极远离第一基板的一侧形成有机发光层;以及Forming an organic light-emitting layer on the side of the first electrode away from the first substrate; and
    在有机发光层远离第一基板的一侧采用同一制程形成像素电极和第二电极。The pixel electrode and the second electrode are formed by the same manufacturing process on the side of the organic light-emitting layer away from the first substrate.
  18. 根据权利要求14所述的方法,其中所述在所述第一基板上形成薄膜晶体管和发光器件包括:The method of claim 14, wherein said forming a thin film transistor and a light emitting device on the first substrate comprises:
    在第一基板上形成栅电极;Forming a gate electrode on the first substrate;
    在栅电极远离第一基板的一侧依次形成栅绝缘层、有源层、源漏电极和钝化层;Forming a gate insulating layer, an active layer, a source drain electrode and a passivation layer in sequence on the side of the gate electrode away from the first substrate;
    在钝化层远离第一基板的一侧形成依次形成第一电极和有机发光层;Forming a first electrode and an organic light emitting layer on the side of the passivation layer away from the first substrate;
    在有机发光层远离第一基板的一侧采用同一制程形成像素电极和第二电极。The pixel electrode and the second electrode are formed on the side of the organic light-emitting layer away from the first substrate using the same process.
  19. 根据权利要求14所述的方法,其中所述阵列基板用于薄膜晶体管液晶显示器,并且其中所述发光器件还位于显示区域中。The method according to claim 14, wherein the array substrate is used in a thin film transistor liquid crystal display, and wherein the light emitting device is also located in a display area.
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Publication number Priority date Publication date Assignee Title
CN110071165B (en) * 2019-05-14 2022-05-13 京东方科技集团股份有限公司 Array substrate, manufacturing method thereof and display panel
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9142597B2 (en) * 2013-04-26 2015-09-22 Samsung Display Co., Ltd. Organic light emitting diode display
CN105070741A (en) * 2015-09-02 2015-11-18 京东方科技集团股份有限公司 Array substrate, OLED display panel and display device
CN105355646A (en) * 2015-11-13 2016-02-24 京东方科技集团股份有限公司 Array substrate and preparation method thereof and display device
CN107039487A (en) * 2015-11-11 2017-08-11 三星显示有限公司 Display device
CN109616495A (en) * 2018-11-15 2019-04-12 武汉华星光电半导体显示技术有限公司 Active matrix organic LED panel structure
CN110071165A (en) * 2019-05-14 2019-07-30 京东方科技集团股份有限公司 Array substrate, manufacturing method thereof and display panel

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101339000B1 (en) * 2011-12-14 2013-12-09 엘지디스플레이 주식회사 Organic light emitting display device and method of fabricating thereof
CN107068727A (en) * 2017-05-05 2017-08-18 京东方科技集团股份有限公司 Display base plate and display device
CN107195660B (en) * 2017-05-27 2020-01-07 上海天马有机发光显示技术有限公司 Organic light emitting display panel and display device
CN107845645B (en) * 2017-09-28 2020-03-13 上海天马微电子有限公司 Display panel and display device
CN107681063A (en) * 2017-10-11 2018-02-09 京东方科技集团股份有限公司 Array base palte and preparation method thereof, display device
CN108336109B (en) * 2018-01-02 2021-02-02 厦门天马微电子有限公司 Organic light emitting display panel, display device and organic light emitting display mother board
CN112164715A (en) * 2018-11-28 2021-01-01 上海天马微电子有限公司 Display panel and display device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9142597B2 (en) * 2013-04-26 2015-09-22 Samsung Display Co., Ltd. Organic light emitting diode display
CN105070741A (en) * 2015-09-02 2015-11-18 京东方科技集团股份有限公司 Array substrate, OLED display panel and display device
CN107039487A (en) * 2015-11-11 2017-08-11 三星显示有限公司 Display device
CN105355646A (en) * 2015-11-13 2016-02-24 京东方科技集团股份有限公司 Array substrate and preparation method thereof and display device
CN109616495A (en) * 2018-11-15 2019-04-12 武汉华星光电半导体显示技术有限公司 Active matrix organic LED panel structure
CN110071165A (en) * 2019-05-14 2019-07-30 京东方科技集团股份有限公司 Array substrate, manufacturing method thereof and display panel

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