WO2020220168A1 - 透明或半透明材料曲面轮廓检测系统 - Google Patents

透明或半透明材料曲面轮廓检测系统 Download PDF

Info

Publication number
WO2020220168A1
WO2020220168A1 PCT/CN2019/084845 CN2019084845W WO2020220168A1 WO 2020220168 A1 WO2020220168 A1 WO 2020220168A1 CN 2019084845 W CN2019084845 W CN 2019084845W WO 2020220168 A1 WO2020220168 A1 WO 2020220168A1
Authority
WO
WIPO (PCT)
Prior art keywords
transparent
semi
curved surface
scanning positions
detection system
Prior art date
Application number
PCT/CN2019/084845
Other languages
English (en)
French (fr)
Inventor
王星泽
闫静
何良雨
Original Assignee
合刃科技（深圳）有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 合刃科技（深圳）有限公司 filed Critical 合刃科技（深圳）有限公司
Priority to PCT/CN2019/084845 priority Critical patent/WO2020220168A1/zh
Priority to CN201980005539.7A priority patent/CN111406197A/zh
Publication of WO2020220168A1 publication Critical patent/WO2020220168A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

Definitions

  • the invention relates to the technical field of industrial detection, in particular to a detection system for the curved surface profile of a transparent or semi-transparent material.
  • 3D curved glass screens With the aim of narrower frame, larger screen-to-body ratio and better visual experience, more intelligent terminal manufacturers have begun to adopt 3D curved glass screens in product design.
  • the production process of 3D curved glass is similar to the 2D and 2.5D production methods, all of which need to go through the cutting, carving, polishing, coating and other process steps of the glass substrate, but in addition, the production process of the 3D curved glass screen needs to be added later
  • the hot bending forming process that is, bending the edges of a flat 2D glass plate into a 3D curved glass screen.
  • the chamfering angle is not processed accurately during the chamfering process of the 3D curved glass screen, the chamfer will not be parallel to the bottom surface of the 3D glass after the hot bending process, and it will be subsequently attached to the mobile phone shell. , Due to the small contact area at the joint, the joint is not tight, which affects the overall performance of the phone.
  • the traditional laser triangulation method is relatively transparent/semi-transparent.
  • the measured object is transparent, most of the laser light is transmitted, and the light signal reflected back to the sensor is very weak.
  • the sensor cannot detect the reflected light spot and therefore cannot measure the light spot offset to calculate the three-dimensional information of the product, which makes the detection accuracy of the 3D glass contour more accurate low.
  • a surface profile detection system for transparent or semi-transparent materials including:
  • Illumination device used to emit a wide-spectrum illuminating beam
  • the dispersive objective lens located in the light exit direction of the illuminating light beam is used to decompose the illuminating light beam dispersion into a collection of monochromatic light beams whose converging points and wavelengths correspond;
  • the inspection material support is used to fix the transparent or semi-transparent curved inspection material, and the collection of the monochromatic light beams irradiates the transparent or semi-transparent curved inspection material to a scanning position, and two spots are generated on the upper surface and the lower surface of the scanning position Sub-reflection, forming the upper surface reflected light and the lower surface reflected light;
  • Spectral analysis device used to receive the upper surface reflected light and the lower surface reflected light, and detect the spectral color difference of the upper surface reflected light and the lower surface reflected light;
  • the processor is configured to receive the spectral chromatic aberration, obtain the thickness of the scanning position according to the spectral chromatic aberration, and determine the contour of the transparent or semi-transparent curved sample according to the thickness of two or more scanning positions.
  • the inspection material support includes a movement mechanism
  • the movement mechanism includes an X-axis movement assembly and a Y-axis movement assembly
  • the movement mechanism is used to drive the transparent or semi-transparent curved surface inspection material in X Axis direction movement and/or Y axis direction movement to change the scanning position.
  • the motion mechanism further includes a rotating component for rotating the transparent or semi-transparent curved surface inspection material by a predetermined angle
  • the scanning positions include at least two groups, and each group of scanning positions corresponds to a rotation angle of the rotating assembly, and the processor is configured to obtain the respective thicknesses of the respective scanning positions in the at least two groups of scanning positions, and generate the same thickness as the at least two groups of scanning positions.
  • At least two partial contours corresponding to the positions, and the at least two partial contours respectively correspond to corresponding rotation angles.
  • the processor is configured to control the rotation component to rotate at a first angle, and at the first angle, control the X-axis movement component and the Y-axis movement component to drive the transparent or semi-transparent curved surface Moving the inspection material to generate a first set of scanning positions corresponding to the first angle, the first set of scanning positions corresponding to the curved surface portion of the transparent or semi-transparent curved inspection material;
  • the thickness of each of the first group of scanning positions is acquired, and a contour corresponding to the first group of scanning positions is generated.
  • the processor is configured to control the rotation of the rotating component to maintain the level of the transparent or semi-transparent curved surface, and control the X-axis movement component and the Y-axis movement component to drive the transparent or semi-transparent curved surface Moving the inspection material to generate a second set of scanning positions, the second set of scanning positions corresponding to the flat part of the transparent or semi-transparent curved inspection material;
  • the processor is configured to combine the respective corresponding rotation angles to perform point cloud fusion of the at least two partial contours to obtain contour information of the transparent or semi-transparent curved surface inspection material.
  • the motion mechanism further includes a Z-axis motion component, which is used to adjust the distance between the transparent or semi-transparent curved specimen and the dispersive objective lens.
  • the transparent or semi-transparent material curved surface profile detection system further includes an optical coupling device, the optical coupling device reflects the illumination beam to the dispersive objective lens, and transmits the beam reflected by the sample Enter the spectrum analysis device.
  • the lighting device is an LED light source with a spectral range from 245 nm to 780 nm or a xenon lamp light source with a spectral range from 200 nm to 2500 nm.
  • the processor is further configured to identify at least one of a chamfer angle defect, a left-right bend inconsistency defect, or a curved surface bend angle defect according to the contour of the transparent or semi-transparent curved surface inspection material.
  • spectral confocal technology can be used to decompose the upper and lower surfaces of the transparent or translucent specimens after the dispersion of the chromatic dispersion objective lens.
  • the relationship between the spectral chromatic aberration of light and the thickness of the upper and lower surfaces can measure the thickness of multiple scanning positions to obtain the outline of a transparent or semi-transparent sample.
  • the contour detection system is not affected by the light transmittance of the sample material.
  • contour detection it can quickly identify whether the curved surface profile of transparent or semi-transparent specimens has defects such as chamfering angle deviation, left and right bends not level, curved arc inconsistency, etc., so that transparent or semi-transparent curved surfaces can be inspected accurately and quickly The defects are detected.
  • Fig. 1 is a schematic diagram of a system for detecting the curved surface profile of a transparent or semi-transparent material in an embodiment of the present invention
  • Figure 2 is a schematic diagram of distance measurement using spectral confocal technology
  • Figure 3 is a schematic diagram of distance measurement using spectral confocal technology
  • FIG. 4 is a schematic diagram of the process of scanning by region and synthesizing the region contour into the overall contour of the inspection material in an embodiment
  • FIG. 5 is a schematic diagram of the structure of a four-stage series-connected dispersion objective lens in an embodiment
  • Fig. 6 is a schematic diagram of the main defects that may occur in the 3D curved glass inspection material in an embodiment.
  • Material curved surface profile detection system including:
  • the illuminating device 102 is used for emitting a wide-spectrum illuminating beam.
  • the lighting device 102 is preferably an LED light source with a spectral range from 245 nm to 780 nm or a xenon light source with a spectral range from 200 nm to 2500 nm.
  • the dispersive objective lens 104 located in the light exit direction of the illumination beam is used for dispersively decomposing the transmitted illumination beam into a collection of monochromatic light beams with a convergence point and a wavelength.
  • the inspection material support 106 is used to fix a transparent or semi-transparent curved inspection material.
  • the collection of the monochromatic light beams irradiates the transparent or semi-transparent curved inspection material to a scanning position, and generates on the upper surface and the lower surface of the scanning position Two reflections form the upper surface reflected light and the lower surface reflected light.
  • the spectrum analysis device 108 is configured to receive the upper surface reflected light and the lower surface reflected light, and detect the spectral color difference of the upper surface reflected light and the lower surface reflected light.
  • the processor 110 is configured to receive the spectral chromatic aberration, obtain the thickness of the scanning position according to the spectral chromatic aberration, and determine the contour of the transparent or semi-transparent curved surface inspection material according to the thickness of two or more scanning positions.
  • the processor 110 may be a computer system based on the Von Neumann system, such as a terminal computer or a server device, which is executed by a computer program.
  • the transparent or semi-transparent material curved surface profile detection system further includes an optical coupling device 112, which reflects the illumination beam to the dispersive objective lens and transmits the The light beam reflected by the sample enters the spectrum analysis device.
  • the relative positions of the lighting device 102 and the spectrum analysis device 108 can be set accordingly according to the characteristics of the optical coupling device.
  • the invention adopts the spectral confocal technology, so it has higher resolution and is insensitive to factors such as the surface texture, tilt and stray light of the surrounding environment. And because the light emitting and receiving are in the same optical path, the laser triangulation optical path will not be easily blocked or the surface of the measured target is too smooth to receive the reflected light of the target, which is highly adaptable to the measured target.
  • This system can realize precise measurement of distance, thickness of transparent/translucent objects and three-dimensional object shape.
  • the principle of spectral confocal technology can be referred to as shown in Figure 2 and Figure 3.
  • the illuminating beam emitted by the wide-spectrum light source of the white light lamp is dispersively decomposed into multiple convergent monochromatic beams after passing through the dispersive objective lens.
  • the convergent points are all located on the optical axis of the dispersive objective lens, but because the refractive index of the dispersive objective lens for the monochromatic beam changes linearly with the change of wavelength, the convergent point of each monochromatic beam is in accordance with the single
  • the wavelengths of the colored light beams are arranged on the optical axis of the dispersive objective lens, where the short wavelength has a short focus distance and is close to the dispersive objective lens, and the long wavelength has a long focus distance and is far from the dispersive objective lens.
  • the spectrometer S in FIG. 2 is the spectrum analyzer 108 in FIG. 1.
  • the object to be measured is transparent/translucent, there will be two different wavelengths of light focused on the upper and lower surfaces, and the two wavelengths of light will return to Spectral analysis device 108, and image in the spectrum analysis device 108, analyze the spectrum at the center of the imaging, you can get the spectrum ⁇ above of the monochromatic light converging on the upper surface and the spectrum ⁇ of the monochromatic light converging on the lower surface Below , combined with the above formula, calculate the difference between the focus positions, you can get the distance between the upper and lower surfaces:
  • the measurement range ⁇ L max of the system is the distance difference between the focal position of the monochromatic light image point of the maximum wavelength and the minimum wavelength.
  • the spectral chromatic aberration of the reflected light from the upper and lower surfaces can be detected by the above-mentioned spectral confocal technique, so as to obtain the thickness value of the position. Then, only by scanning, collecting the thickness values of multiple scanning positions on the transparent or semi-transparent curved surface inspection material, the contour of the transparent or semi-transparent curved surface inspection material can be obtained.
  • the inspection material support 106 includes a motion mechanism, which includes an X-axis motion component and a Y-axis motion component.
  • the motion mechanism 106 is used to drive the transparent or semi-transparent curved surface inspection material to move in the X-axis direction. / Or move in the Y-axis direction to change the scanning position.
  • the plane formed by the X-axis direction and the Y-axis direction is a plane perpendicular to the optical axis of the dispersive objective lens. As shown in Fig. 1, both the X-axis movement component and the Y-axis movement component are provided with slide rails in this plane, so that the sample support 106
  • the inspection material can be driven to move in the X axis direction or the Y axis direction, and the inspection material support 106 can fix the inspection material by a clamp.
  • the spectral analysis device 108 collects the color difference of the reflected light at the scanning position, which is calculated by the processor 110 The thickness value of the scanning position is also recorded. After scanning multiple scanning positions on the surface of the sample, the contour of the sample can be obtained, and the distance between the scanning positions is the horizontal resolution of the scan.
  • the motion mechanism further includes a rotating component, which is used to rotate the transparent or semi-transparent curved surface inspection material by a preset angle.
  • the scanning positions include at least two groups, and each group of scanning positions corresponds to a rotation angle of a rotating component.
  • the processor is used to obtain the respective thickness of each scanning position in the at least two groups of scanning positions, and generate corresponding scanning positions corresponding to the at least two groups.
  • At least two parts of the profile, at least two parts of the profile each correspond to the corresponding rotation angle.
  • the 3D curved glass inspection material can be divided into three detection areas: the left arc area, the flat area and the right arc area, each detection area That corresponds to a set of corresponding scanning positions.
  • the plane area must include part of the left arc area and part of the right arc area, so as to facilitate the subsequent synthesis of the contours of the three areas into the complete contour of the 3D curved glass inspection material, which can be carried out in the following manner:
  • Detection of the arc area on the left Rotate the 3D glass to the right by a first angle relative to the horizontal direction through the rotation axis (this angle can be determined according to the actual curvature of the 3D glass edge), and the X axis drives the product to move x1mm, Collect the thickness of a group of scanning positions (multiple) within the range of X axis direction x1mm, so as to obtain the contour of the left arc surface area. And it is necessary to record the first angle corresponding to the contour of the left arc area.
  • Flat area detection Move the 3D glass back to the horizontal position through the rotation axis, the X axis drives the product to move x2mm, and collect the thickness of a set of scanning positions (multiple) within the X axis direction x2mm to obtain the contour of the flat area.
  • Detection of the arc area on the right Rotate the 3D glass to the right by a second angle relative to the horizontal through the rotation axis, drive the product to move x3mm through the X axis, and collect a set of scanning positions (multiple ) Thickness to get the contour of the arc surface on the right. And it is necessary to record the second angle corresponding to the contour of the arc area on the right side.
  • the processor 110 can control the rotation of the rotating assembly, and record the corresponding first and second angles. which is:
  • the processor 110 may be used to control the rotation component to rotate at a first angle, and at the first angle, control the X-axis movement component and the Y-axis movement component to drive the transparent or semi-transparent curved surface inspection material to move, and generate a The first group of scanning positions corresponding to the first angle, the first group of scanning positions corresponding to the curved surface portion of the transparent or semi-transparent curved surface inspection material; the respective thicknesses of the first group of scanning positions are acquired, and the A set of contours corresponding to scanning positions.
  • the processor 110 may be used to control the rotation component to rotate to keep the transparent or semi-transparent curved surface inspection material level, control the X-axis movement component and the Y-axis motion component to drive the transparent or semi-transparent curved surface inspection material to move, and generate a second Group scanning positions, the second group of scanning positions corresponding to the plane part of the transparent or semi-transparent curved surface inspection material; acquiring the respective thicknesses of the second group of scanning positions, and generating contours corresponding to the second group of scanning positions.
  • the way that the processor obtains the contour of the arc area on the right can refer to the method of collecting the contour of the arc area on the left. Only the rotation angle is different and the other parts are the same.
  • the processor 110 can combine the respective corresponding rotation angles to perform point cloud fusion of at least two parts of the contour to obtain the contour information of the transparent or semi-transparent curved surface inspection material, which can combine the first angle and the second angle to convert the left arc
  • the contour of the surface area, the contour of the flat area and the contour of the arc area on the right are combined to obtain the overall contour of the 3D curved glass inspection material.
  • the contours of different parts can be expressed as two or more sets of point cloud data in different coordinate systems.
  • Each point cloud data is the thickness value of a scanning position in a set of scanning positions corresponding to the part of the contour.
  • the device 110 can unify two or more sets of point cloud data in different coordinate systems into the same reference coordinate system through a certain rotation and translation transformation.
  • T [t x t y t z ] T
  • V [v x v y v z ]
  • A represents the rotation matrix
  • T represents the translation vector
  • V represents the perspective transformation vector
  • S represents the overall scale factor
  • mapping transformation H can be simply expressed as a rigid body transformation with constant length and angle.
  • the transformed rigid body transformation matrix H can be expressed by the following formula:
  • ⁇ , ⁇ , ⁇ represent the rotation angle of the point along the x, y, and z axes
  • t x , t y , and t z represent the translation of the point along the x, y, and z axes, respectively.
  • the first angle corresponding to the contour of the arc area on the left, the angle 0 corresponding to the plane area, and the second angle corresponding to the contour of the right arc area are substituted into the ⁇ value of the above formula (Y axis and The Z axis is not rotated), and substituting x1, x2, and x3 into the t x value of the above formula, the image registration and contour synthesis of the point cloud data of multiple sets of scanning positions can be realized.
  • the rotating component can be rotated at any angle in space, and the angle is the rotation angle of the x, y, and z axes.
  • the components of can be ⁇ , ⁇ , and ⁇ , and the sample can be scanned by moving arbitrarily in space, and the components of the spatial translation on the x, y, and z axes are t x , t y , and t z respectively . Substituting this data into the above formula can still achieve image registration and contour synthesis of point cloud data of multiple sets of scanning positions.
  • the movement mechanism further includes a Z-axis movement component, which is used to adjust the distance between the transparent or semi-transparent curved specimen and the dispersive objective lens.
  • the measurement range of the dispersive objective lens is between f( ⁇ min ) and f( ⁇ max ). Too far away from the dispersive objective lens, beyond the range of f( ⁇ max ), or too close, less than the range of f( ⁇ min ), will cause the situation that the thickness cannot be accurately measured due to the exceeding of the measurement range.
  • the distance from the sample to the dispersive objective lens can be controlled by the Z-axis motion component, so that the sample material is in the best measurement range of the dispersive objective lens and the accuracy is improved.
  • the dispersive objective lens may be a four-stage series structure.
  • the vertical resolution of a transparent or semi-transparent material curved surface profile detection system is usually evaluated by the spectral bandwidth.
  • the spectral bandwidth refers to the wavelength interval between two points when the light intensity drops to half of the peak light intensity, and the smaller the spectral bandwidth is The higher the vertical resolution.
  • the short-wavelength focusing position is close to the dispersive objective lens and its object side numerical aperture is large, while the long-wavelength focusing position is farther away from the dispersive objective lens and its object side numerical aperture is small. Therefore, the vertical resolution is related to the numerical aperture of the dispersive objective lens. The larger the numerical aperture of the dispersive objective lens, the higher the vertical resolution. If the four-stage series connection of multiple materials is used, or the optical structure in which the refraction element and the diffraction element are combined, the measurement range of the dispersive objective lens can be increased.
  • the processor 110 after the processor 110 detects the contour of the transparent or semi-transparent curved surface, it can detect the chamfer angle defect, the left and right bending inconsistency defect, or the arc surface bending angle defect.
  • the above-mentioned chamfering angle defects, left-right bend inconsistency defects, or arc-curved angle defects are the main defects that affect the assembly of 3D curved glass screens.
  • the processor 110 can quickly and accurately identify the above-mentioned defects by performing image processing on the contour image, thereby preventing the defective 3D curved glass screen from affecting the overall assembly and structural performance.
  • spectral confocal technology can be used to decompose the upper and lower surfaces of the transparent or translucent specimens after the dispersion of the chromatic dispersion objective lens.
  • the relationship between the spectral chromatic aberration of light and the thickness of the upper and lower surfaces can measure the thickness of multiple scanning positions to obtain the outline of a transparent or semi-transparent sample.
  • the contour detection system is not affected by the light transmittance of the sample material.
  • contour detection it can quickly identify whether the curved surface profile of transparent or semi-transparent specimens has defects such as chamfering angle deviation, left and right bends not level, curved arc inconsistency, etc., so that transparent or semi-transparent curved surfaces can be inspected accurately and quickly The defects are detected.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明公开了一种透明或半透明材料曲面轮廓检测系统，包括：照明装置，用于出射宽谱段的照明光束；位于所述照明光束的出光方向上的色散物镜，用于将透射的照明光束色散分解为汇聚点与波长对应的单色光束的集合；检材支撑件，用于固定透明或半透明曲面检材；光谱分析装置，用于接收所述上表面反射光和下表面反射光，检测所述上表面反射光和下表面反射光的光谱色差；处理器，用于接收所述光谱色差，根据所述光谱色差得到所述扫描位置的厚度，根据两个或两个以上的扫描位置的厚度确定所述透明或半透明曲面检材的轮廓。上述系统能够不受检材透光性的影响，准确检测轮廓。

Description

透明或半透明材料曲面轮廓检测系统 技术领域
本发明涉及工业检测技术领域，特别涉及一种透明或半透明材料曲面轮廓检测系统。
背景技术
随着，为了更窄的边框、更大的屏占比和更好的视觉感受，目前较多的智能终端厂商开始在产品设计上开始采用3D曲面玻璃屏幕。3D曲面玻璃的生产流程与2D和2.5D生产方法类似，均需要经过对玻璃基板的切割、精雕、抛光、镀膜等工艺环节，但额外的，3D曲面玻璃屏幕的生产工艺还需要在之后增加热弯成型流程，即将平面的2D玻璃板的边缘热弯成型为3D曲面玻璃屏幕。
然而，若在3D曲面玻璃屏幕的加工倒角的过程中，倒角的角度没有加工准确，则经过热弯工艺后倒角与3D玻璃底面会不平行，在后续与手机壳体进行贴合时，由于贴合处接触面积少导致贴合不紧密，影响手机的整体性能。
而对于3D曲面屏幕的曲面轮廓是否合格，则需要测量曲面玻璃的弯曲弧度及倒角的平整度，但由于3D曲面屏幕为玻璃等透明或半透明材质，传统的激光三角测量方法对于透明/半透明被测物体，大部分激光被透射，反射回传感器的光信号非常弱，造成传感器无法检测出反射光斑故无法测量光斑偏移从而计算产品三维信息，使得对3D玻璃的轮廓的检测准确度较低。
发明内容
基于此，为解决传统技术中激光三角测量方法对于透明/半透明的曲面玻璃的弯曲弧度及倒角的平整度的检测准确度较低的问题，特提出了一种透明或半透明材料曲面轮廓检测系统。
一种透明或半透明材料曲面轮廓检测系统，包括：
照明装置，用于出射宽谱段的照明光束；
位于所述照明光束的出光方向上的色散物镜，用于将照明光束色散分解为汇聚点与波长对应的单色光束的集合；
检材支撑件，用于固定透明或半透明曲面检材，所述单色光束的集合照射所述透明或半透明曲面检材一扫描位置，在所述扫描位置的上表面和下表面产生两次反射，形成上表面反射光和下表面反射光；
光谱分析装置，用于接收所述上表面反射光和下表面反射光，检测所述上表面反射光和下表面反射光的光谱色差；
处理器，用于接收所述光谱色差，根据所述光谱色差得到所述扫描位置的厚度，根据两个或两个以上的扫描位置的厚度确定所述透明或半透明曲面检材的轮廓。
在其中一个实施例中，所述检材支撑件包括运动机构，所述运动机构包括X轴运动组件和Y轴运动组件，所述运动机构用于带动所述透明或半透明曲面检材在X轴方向移动和/或Y轴方向移动，以变换扫描位置。
在其中一个实施例中，所述运动机构还包括旋转组件，所述旋转组件用于将所述透明或半透明曲面检材旋转预设角度；
所述扫描位置包括至少两组，每组扫描位置对应一所述旋转组件的旋转角度，所述处理器用于获取至少两组扫描位置中各扫描位置各自的厚度，生成与所述至少两组扫描位置对应的至少两部分轮廓，所述至少两部分轮廓各自对应相应的旋转角度。
在其中一个实施例中，所述处理器用于控制所述旋转组件旋转第一角度，在所述第一角度下，控制所述X轴运动组件和Y轴运动组件带动所述透明或半透明曲面检材移动，产生与所述第一角度对应的第一组扫描位置，所述第一组扫描位置对应所述透明或半透明曲面检材的曲面部分；
获取所述第一组扫描位置各自的厚度，生成与所述第一组扫描位置对应的轮廓。
在其中一个实施例中，所述处理器用于控制所述旋转组件旋转保持所述透明或半透明曲面检材水平，控制所述X轴运动组件和Y轴运动组件带动所述透明或半透明曲面检材移动，产生第二组扫描位置，所述第二组扫描位置对应 所述透明或半透明曲面检材的平面部分；
获取所述第二组扫描位置各自的厚度，生成与所述第二组扫描位置对应的轮廓。
在其中一个实施例中，所述处理器用于结合各自对应的旋转角度，将所述至少两部分轮廓进行点云融合，得到所述透明或半透明曲面检材的轮廓信息。
在其中一个实施例中，所述运动机构还包括Z轴运动组件，用于调节所述透明或半透明曲面检材与所述色散物镜的距离。
在其中一个实施例中，所述透明或半透明材料曲面轮廓检测系统还包括光耦合器件，所述光耦合器件反射所述照明光束射向所述色散物镜，并透射所述检材反射的光束进入所述光谱分析装置。
在其中一个实施例中，所述照明装置为光谱范围属于245nm至780nm区间的LED光源或光谱范围属于200nm至2500nm区间的氙灯光源。
在其中一个实施例中，所述处理器还用于根据所述透明或半透明曲面检材的轮廓识别倒角角度缺陷，左右弯曲不一致缺陷或弧面弯曲角度缺陷中的至少一种。
实施本发明实施例，将具有如下有益效果：
采用了上述透明或半透明材料曲面轮廓检测系统之后，对于透明或半透明检材的曲面轮廓，可通过光谱共焦技术，利用色散物镜色散分解后，透明或半透明检材的上下表面的反射光的光谱色差与上下表面的厚度值的关系，可测量多个扫描位置的厚度，从而得到透明或半透明检材的轮廓。该轮廓检测系统对于检材轮廓的检测不受检材透光性的影响。且通过轮廓检测，可快速识别透明或半透明检材的曲面轮廓是否存在倒角角度偏差、左右弯曲不水平、曲面弯曲弧度不一致等缺陷，从而可准确且快速地对透明或半透明曲面检材的缺陷进行检测。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施 例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
其中：
图1为本发明实施例中一种透明或半透明材料曲面轮廓检测系统的示意图；
图2为光谱共焦技术测距的原理图；
图3为光谱共焦技术测距的原理图；
图4为一个实施例中分区域扫描并将区域轮廓合成为检材整体轮廓的过程示意图；
图5为一个实施例中四级串联结构色散物镜的结构示意图；
图6为一个实施例中3D曲面玻璃检材可能出现的主要缺陷的示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
为解决传统技术中激光三角测量方法对于透明/半透明的曲面玻璃的弯曲弧度及倒角的平整度的检测准确度较低的问题，如图1所示，特提出了一种透明或半透明材料曲面轮廓检测系统，包括：
照明装置102，用于出射宽谱段的照明光束。照明装置102优选为光谱范围属于245nm至780nm区间的LED光源或光谱范围属于200nm至2500nm区间的氙灯光源。
位于所述照明光束的出光方向上的色散物镜104，用于将透射的照明光束色散分解为汇聚点与波长对应的单色光束的集合。
检材支撑件106，用于固定透明或半透明曲面检材，所述单色光束的集合 照射所述透明或半透明曲面检材一扫描位置，在所述扫描位置的上表面和下表面产生两次反射，形成上表面反射光和下表面反射光。
光谱分析装置108，用于接收所述上表面反射光和下表面反射光，检测所述上表面反射光和下表面反射光的光谱色差。
处理器110，用于接收所述光谱色差，根据所述光谱色差得到所述扫描位置的厚度，根据两个或两个以上的扫描位置的厚度确定所述透明或半透明曲面检材的轮廓。处理器110可以是依赖于计算机程序执行的，基于冯诺依曼体系的计算机系统，例如，终端电脑或服务器设备。
在本实施例中，如图1所示，该透明或半透明材料曲面轮廓检测系统还包括光耦合器件112，所述光耦合器件反射所述照明光束射向所述色散物镜，并透射所述检材反射的光束进入所述光谱分析装置。照明装置102和光谱分析装置108的相对位置则可根据光耦合器件的特性相应设置。
本发明采用了光谱共焦技术，因此具有更高的分辨力，而且对被测物表面纹理、倾斜和周围环境的杂散光等因素不敏感。并且由于光发射和接收同光路，不会出现激光三角法光路容易被遮挡或被测目标表面过于光滑而接收不到目标反射光的情况，对被测目标适应性强。本系统可以实现对距离、透明/半透明物体厚度和三维物体形貌等的精密测量。
光谱共焦技术的原理可参考图2和图3所示，白光灯宽谱段光源发出的照明光束，经过色散物镜后，被色散分解为多束会聚的单色光束，这些单色光束各自的会聚点(或称为成像点)均位于所述色散物镜的光轴上，但由于色散物镜对单色光束的折射率随着波长的变化而线性变化，使得各单色光束的会聚点按照单色光束的波长的大小在所述色散物镜的光轴上排列，其中短波长的聚焦距离短，离色散物镜近，长波长的聚焦距离长，离色散物镜远。
即波长和聚焦位置之间应该满足一种线性关系，则波长λ i和其聚焦位置f(λ i)之间的关系可以表示为：
f(λ i)＝z+kλ i
图2中的光谱仪S即为图1的光谱分析装置108，当被测物透明/半透明时，会有两个不同波长的光分别聚焦在上下两个表面，这两种波长的光返回到光谱分析装置108，并在光谱分析装置108中成像，对成像中圆心位置的光谱进行分析，即可得到会聚在上表面的单色光的光谱λ above和会聚在下表面的单色光的光谱λ below，再结合上述公式，计算聚焦位置之间的差值，即可得到上下两个表面的距离值：
ΔL＝f(λ above)-f(λ below)＝k(λ above-λ below)
当照明装置发出的宽谱段照明光束的谱段范围为λ min至λ max的范围时，系统的测量范围ΔL max即为最大波长和最小波长单色光像点聚焦位置之间的距离差，用公式表示为：
ΔL max＝f(λ max)-f(λ min)
也就是说，对于透明或半透明曲面检材上任意一个位置而言，均可通过上述光谱共焦技术检测其上下表面反射光的光谱色差，从而得到该位置的厚度值。那么，只需要通过扫描，采集该透明或半透明曲面检材上多个扫描位置的厚度值，即可得到该透明或半透明曲面检材的轮廓。
具体的，如图1所示，检材支撑件106包括运动机构，运动机构包括X轴运动组件和Y轴运动组件，运动机构106用于带动透明或半透明曲面检材在X轴方向移动和/或Y轴方向移动，以变换扫描位置。
X轴方向和Y轴方向构成的平面为垂直于色散物镜光轴的平面，如图1中，X轴运动组件和Y轴运动组件在该平面内均设置有滑轨，使得检材支撑件106可以在X轴方向上或Y轴方向上带动检材移动，检材支撑件106可通过一夹具固定检材。通过在X轴方向上或Y轴方向上带动检材移动，每移动到一扫描位置(x，y)则通过光谱分析装置108采集该扫描位置的反射光的色差，从而由处理器110计算得到该扫描位置的厚度值并记录，当扫描了检材表面多个扫描位置后，即可得到检材的轮廓，而扫描位置之间的距离即为扫描的水平分辨率。
进一步的，如图1所示，运动机构还包括旋转组件，旋转组件用于将所述 透明或半透明曲面检材旋转预设角度。
在本实施例中，扫描位置包括至少两组，每组扫描位置对应一旋转组件的旋转角度，处理器用于获取至少两组扫描位置中各扫描位置各自的厚度，生成与至少两组扫描位置对应的至少两部分轮廓，至少两部分轮廓各自对应相应的旋转角度。
如图4所示，以3D曲面玻璃屏幕的轮廓检测为例，可将3D曲面玻璃检材分为三个检测区域：左侧弧面区域，平面区域和右侧弧面区域，每个检测区域即对应一组相应的扫描位置。其中平面区域必须包含部分左侧弧面区域和部分右侧弧面区域，以方便后续将三部分区域的轮廓合成为3D曲面玻璃检材的完整轮廓，具体可按照下述方式进行：
左侧弧面区域的检测：通过旋转轴将3D玻璃向右旋转一个相对于水平方向的第一角度(该角度可根据3D玻璃边缘的实际弯曲弧度来确定)，通过X轴带动产品移动x1mm，在X轴方向x1mm的范围内采集一组扫描位置(多个)的厚度，从而得到左侧弧面区域轮廓。且需要记录该左侧弧面区域轮廓对应的第一角度。
平面区域的检测：通过旋转轴将3D玻璃运动回水平位置，X轴带动产品移动x2mm，在X轴方向x2mm的范围内采集一组扫描位置(多个)的厚度，从而得到平面区域的轮廓。
右侧弧面区域的检测：通过旋转轴将3D玻璃向右旋转一个相对于水平方向的第二角度，通过X轴带动产品移动x3mm，在X轴方向x2mm的范围内采集一组扫描位置(多个)的厚度，从而得到右侧弧面区域轮廓。且需要记录该右侧弧面区域轮廓对应的第二角度。
在本实施例中，可通过处理器110控制旋转组件旋转，并记录相应的第一角度和第二角度。即：
处理器110可用于控制所述旋转组件旋转第一角度，在所述第一角度下，控制所述X轴运动组件和Y轴运动组件带动所述透明或半透明曲面检材移动，产生与所述第一角度对应的第一组扫描位置，所述第一组扫描位置对应所述透明或半透明曲面检材的曲面部分；获取所述第一组扫描位置各自的厚度，生成 与所述第一组扫描位置对应的轮廓。
处理器110可用于控制所述旋转组件旋转保持所述透明或半透明曲面检材水平，控制所述X轴运动组件和Y轴运动组件带动所述透明或半透明曲面检材移动，产生第二组扫描位置，所述第二组扫描位置对应所述透明或半透明曲面检材的平面部分；获取所述第二组扫描位置各自的厚度，生成与所述第二组扫描位置对应的轮廓。
处理器得到右侧弧面区域轮廓的方式则可参考采集左侧弧面区域轮廓的方式，仅旋转角度不同，其他部分一致。
然后处理器110可结合各自对应的旋转角度，将至少两部分轮廓进行点云融合，得到所述透明或半透明曲面检材的轮廓信息，即可结合第一角度和第二角度将左侧弧面区域的轮廓，平面区域的轮廓和右侧弧面区域的轮廓进行合并，即可得到3D曲面玻璃检材的整体的轮廓。
具体的，不同部分的轮廓可表示为不同坐标系下的两组或多组点云数据，每个点云数据即为该部分轮廓对应的一组扫描位置中的一扫描位置的厚度值，处理器110可通过一定的旋转和平移变换将不同坐标系下的两组或多组点云数据，统一到相同的参考坐标系下。
在这个过程中，可借助一组映射变换来实现。假设该映射变换为H，则H可以用下面公式表示：
Figure PCTCN2019084845-appb-000001
且，
Figure PCTCN2019084845-appb-000002
T＝[t x t y t z] T，V＝[v x v y v z]
其中A代表旋转矩阵；T代表平移向量，V代表透视变换向量，S则代表整体的比例因子。
因处理器110得到的点云数据只存在旋转和平移错位，而不存在变形，故该映射变换H又可以简单表示为长度和角度不变的刚体变换。变换后的刚体变换矩阵H可用下面公式表示：
Figure PCTCN2019084845-appb-000003
且，
Figure PCTCN2019084845-appb-000004
T 3*1＝[t x t y t z] T
其中α、β、γ分别表示点沿x、y、z轴的旋转角度，t x、t y、t z分别表示点沿x、y、z轴的平移量。
在上例中，分别将对应左侧弧面区域的轮廓的第一角度、对应平面区域的角度0，对应右侧弧面区域的轮廓的第二角度，代入上述公式的α值(Y轴和Z轴没有旋转)，并将x1、x2和x3代入上述公式的t x值，即可实现多组扫描位置的点云数据的图像配准以及轮廓的合成。
在其他非针对3D曲面玻璃的轮廓检测的实施例中，例如对于自由曲面镜的轮廓检测的实施例中，旋转组件可在空间任意旋转一角度，该角度沿x、y、z轴的旋转角度的分量可分别为α、β、γ，并在空间任意移动扫描该检材，且空间平移量在x、y、z轴的分量分别为t x、t y、t z。将此数据代入上述公式，仍然能实现多组扫描位置的点云数据的图像配准以及轮廓的合成。
在一个实施例中，运动机构还包括Z轴运动组件，用于调节透明或半透明曲面检材与所述色散物镜的距离。
参考图1、图2和图3所示，并同时参考前述的光谱共焦技术的原理，色散物镜的测量范围即为f(λ min)到f(λ max)之间，若检材的位置距离色散物镜过远，超出了f(λ max)的范围，或者过近，小于f(λ min)的范围，均会造成因超出测量范围而无法准确测量厚度的情况。而设置了Z轴运动组件之后，即可通过Z轴运动组件控制检材到色散物镜的距离，从而使得检材处于色散物镜最佳的测量范围，提高准确度。
在一个实施例中，参考图5所示，色散物镜可以是四级串联结构。透明或半透明材料曲面轮廓检测系统的垂直分辨率通常用光谱带宽来评价，光谱带宽指的是光强下降到峰值光强一半时的两点所对应的波长间隔，并且光谱带宽越 小系统的垂直分辨率越高。短波长聚焦的位置离色散物镜近，其物方数值孔径大，而长波长聚焦位置离色散物镜距离远，其物方数值孔径小。因此垂直分辨率与色散物镜的物方数值孔径大小有关，色散物镜的物方数值孔径越大，垂直分辨率越高。若采用多种材料组合四级串联，或采用折射元件与衍射元件结合的方式的光学结构，则可增大色散物镜的测量范围。
在本实施例中，参考图6所示，处理器110在检测得到透明或半透明曲面检材的轮廓之后，即可对倒角角度缺陷，左右弯曲不一致缺陷或弧面弯曲角度缺陷进行检测，对于3D曲面玻璃屏幕，上述倒角角度缺陷，左右弯曲不一致缺陷或弧面弯曲角度缺陷进行检测即为影响3D曲面玻璃屏幕装配的主要缺陷。处理器110通过对轮廓图像进行图像处理，即可快速准确地识别出上述缺陷，从而避免有缺陷的3D曲面玻璃屏幕影响整体的装配和结构性能。
本发明实施例，将具有如下有益效果：
采用了上述透明或半透明材料曲面轮廓检测系统之后，对于透明或半透明检材的曲面轮廓，可通过光谱共焦技术，利用色散物镜色散分解后，透明或半透明检材的上下表面的反射光的光谱色差与上下表面的厚度值的关系，可测量多个扫描位置的厚度，从而得到透明或半透明检材的轮廓。该轮廓检测系统对于检材轮廓的检测不受检材透光性的影响。且通过轮廓检测，可快速识别透明或半透明检材的曲面轮廓是否存在倒角角度偏差、左右弯曲不水平、曲面弯曲弧度不一致等缺陷，从而可准确且快速地对透明或半透明曲面检材的缺陷进行检测。
以上所揭示的仅为本发明较佳实施例而已，当然不能以此来限定本发明之权利范围，因此依本发明权利要求所作的等同变化，仍属本发明所涵盖的范围。

Claims (10)

  1. 一种透明或半透明材料曲面轮廓检测系统，其特征在于，包括：
    照明装置，用于出射宽谱段的照明光束；
    位于所述照明光束的出光方向上的色散物镜，用于将透射的照明光束色散分解为汇聚点与波长对应的单色光束的集合；
    检材支撑件，用于固定透明或半透明曲面检材，所述单色光束的集合照射所述透明或半透明曲面检材一扫描位置，在所述扫描位置的上表面和下表面产生两次反射，形成上表面反射光和下表面反射光；
    光谱分析装置，用于接收所述上表面反射光和下表面反射光，检测所述上表面反射光和下表面反射光的光谱色差；
    处理器，用于接收所述光谱色差，根据所述光谱色差得到所述扫描位置的厚度，根据两个或两个以上的扫描位置的厚度确定所述透明或半透明曲面检材的轮廓。
  2. 根据权利要求1所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述检材支撑件包括运动机构，所述运动机构包括X轴运动组件和Y轴运动组件，所述运动机构用于带动所述透明或半透明曲面检材在X轴方向移动和/或Y轴方向移动，以变换扫描位置。
  3. 根据权利要求2所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述运动机构还包括旋转组件，所述旋转组件用于将所述透明或半透明曲面检材旋转预设角度；
    所述扫描位置包括至少两组，每组扫描位置对应一所述旋转组件的旋转角度，所述处理器用于获取至少两组扫描位置中各扫描位置各自的厚度，生成与所述至少两组扫描位置对应的至少两部分轮廓，所述至少两部分轮廓各自对应相应的旋转角度。
  4. 根据权利要求3所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述处理器用于控制所述旋转组件旋转第一角度，在所述第一角度下，控制所述X轴运动组件和Y轴运动组件带动所述透明或半透明曲面检材移动， 产生与所述第一角度对应的第一组扫描位置，所述第一组扫描位置对应所述透明或半透明曲面检材的曲面部分；
    获取所述第一组扫描位置各自的厚度，生成与所述第一组扫描位置对应的轮廓。
  5. 根据权利要求4所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述处理器用于控制所述旋转组件旋转保持所述透明或半透明曲面检材水平，控制所述X轴运动组件和Y轴运动组件带动所述透明或半透明曲面检材移动，产生第二组扫描位置，所述第二组扫描位置对应所述透明或半透明曲面检材的平面部分；
    获取所述第二组扫描位置各自的厚度，生成与所述第二组扫描位置对应的轮廓。
  6. 根据权利要求3至5任一项所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述处理器用于结合各自对应的旋转角度，将所述至少两部分轮廓进行点云融合，得到所述透明或半透明曲面检材的轮廓信息。
  7. 根据权利要求2至6任一项所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述运动机构还包括Z轴运动组件，用于调节所述透明或半透明曲面检材与所述色散物镜的距离。
  8. 根据权利要求2至6任一项所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述透明或半透明材料曲面轮廓检测系统还包括光耦合器件，所述光耦合器件反射所述照明光束射向所述色散物镜，并透射所述检材反射的光束进入所述光谱分析装置光耦合器件。
  9. 根据权利要求2至6任一项所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述照明装置为光谱范围属于245nm至780nm区间的LED光源或光谱范围属于200nm至2500nm区间的氙灯光源。
  10. 根据权利要求2至6任一项所述的透明或半透明材料曲面轮廓检测系统，其特征在于，所述处理器还用于根据所述透明或半透明曲面检材的轮廓识别倒角角度缺陷，左右弯曲不一致缺陷或弧面弯曲角度缺陷中的至少一种。
PCT/CN2019/084845 2019-04-28 2019-04-28 透明或半透明材料曲面轮廓检测系统 WO2020220168A1 (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/CN2019/084845 WO2020220168A1 (zh) 2019-04-28 2019-04-28 透明或半透明材料曲面轮廓检测系统
CN201980005539.7A CN111406197A (zh) 2019-04-28 2019-04-28 透明或半透明材料曲面轮廓检测系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2019/084845 WO2020220168A1 (zh) 2019-04-28 2019-04-28 透明或半透明材料曲面轮廓检测系统

Publications (1)

Publication Number Publication Date
WO2020220168A1 true WO2020220168A1 (zh) 2020-11-05

Family

ID=71433856

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/084845 WO2020220168A1 (zh) 2019-04-28 2019-04-28 透明或半透明材料曲面轮廓检测系统

Country Status (2)

Country Link
CN (1) CN111406197A (zh)
WO (1) WO2020220168A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112097690B (zh) * 2020-09-17 2022-04-29 深圳技术大学 一种基于多波长光线追迹的透明物体重建方法及系统
CN112304249B (zh) * 2020-09-22 2022-03-18 江苏大学 一种透明材料三维表面及厚度分布同时检测系统及方法
CN113639661B (zh) * 2021-08-11 2022-10-14 中国科学院长春光学精密机械与物理研究所 形貌检测系统及形貌检测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10325942A1 (de) * 2003-06-07 2005-01-05 Jurca Optoelektronik Gmbh & Co. Kg Vorrichtung und Verfahren zur Dickenmessung transparanter Körper
CN1657872A (zh) * 2005-02-25 2005-08-24 中国海洋大学 回转式扫描测量仪
CN202748008U (zh) * 2012-09-19 2013-02-20 佛山华国光学器材有限公司 一种非接触测量光学透镜中心厚度的测量装置
CN104061867A (zh) * 2014-07-09 2014-09-24 西安工业大学 一种光谱共焦式透镜中心厚度测量方法及装置
CN106871798A (zh) * 2017-03-09 2017-06-20 广东工业大学 一种薄膜厚度和折射率的测量方法及系统

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206037950U (zh) * 2016-08-15 2017-03-22 深圳市和兴盛光电有限公司 非接触式厚度测量仪

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10325942A1 (de) * 2003-06-07 2005-01-05 Jurca Optoelektronik Gmbh & Co. Kg Vorrichtung und Verfahren zur Dickenmessung transparanter Körper
CN1657872A (zh) * 2005-02-25 2005-08-24 中国海洋大学 回转式扫描测量仪
CN202748008U (zh) * 2012-09-19 2013-02-20 佛山华国光学器材有限公司 一种非接触测量光学透镜中心厚度的测量装置
CN104061867A (zh) * 2014-07-09 2014-09-24 西安工业大学 一种光谱共焦式透镜中心厚度测量方法及装置
CN106871798A (zh) * 2017-03-09 2017-06-20 广东工业大学 一种薄膜厚度和折射率的测量方法及系统

Also Published As

Publication number Publication date
CN111406197A (zh) 2020-07-10

Similar Documents

Publication Publication Date Title
CN111220090A (zh) 一种线聚焦差动彩色共焦三维表面形貌测量系统及方法
US9618329B2 (en) Optical inspection probe
US6750974B2 (en) Method and system for 3D imaging of target regions
CN102818528B (zh) 用于在增强景深的情形下检查物体的装置和方法
US20130010286A1 (en) Method and device of differential confocal and interference measurement for multiple parameters of an element
WO2020220168A1 (zh) 透明或半透明材料曲面轮廓检测系统
US8654352B1 (en) Chromatic confocal scanning apparatus
KR101808388B1 (ko) 프로브 장치 및 프로브 방법
CN109916909A (zh) 光学元件表面形貌及亚表面缺陷信息的检测方法及其装置
CN104515469A (zh) 用于检查微观样本的光显微镜和显微镜学方法
CN211876977U (zh) 一种线聚焦差动彩色共焦三维表面形貌测量系统
JPH01239404A (ja) 対象物のエッジ検出方法及びその装置
CA2897751C (en) A method and apparatus for quantitative measurement of surface accuracy of an area
JP2022527609A (ja) 光シート顕微鏡および試料空間内の物体の屈折率を特定するための方法
CN116380912A (zh) 一种基于激光线扫双目成像的光学检测装置及检测方法
US20210310799A1 (en) Apparatus, measurement system and method for capturing an at least partially reflective surface using two reflection patterns
JP2001147174A (ja) 干渉測定機
CN101881607A (zh) 一种检测平面误差系统
CN114076579A (zh) 一种基于偏振成像的三维粗糙度检测装置及方法
CN111220094A (zh) 一种基于光电自准直仪的三维姿态测量方法
CN213956279U (zh) 一种简易的斜照明式彩色共聚焦测量系统
JP7289780B2 (ja) 偏芯計測方法および偏芯計測装置
TWI708040B (zh) 外反射式三維形貌測量儀
CN117849073A (zh) 基于oct系统的透光介质样品的缺陷和厚度测量方法与装置
JP5430473B2 (ja) 面形状計測装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19927050

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19927050

Country of ref document: EP

Kind code of ref document: A1

32PN Ep: public notification in the ep bulletin as address of the adressee cannot be established

Free format text: NOTING OF LOSS OF RIGHTS PURSUANT TO RULE 112(1) EPC (EPO FORM 1205A DATED 21/03/2022)

122 Ep: pct application non-entry in european phase

Ref document number: 19927050

Country of ref document: EP

Kind code of ref document: A1