WO2020217779A1 - Glass panel unit and manufacturing method for glass panel unit - Google Patents

Glass panel unit and manufacturing method for glass panel unit Download PDF

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Publication number
WO2020217779A1
WO2020217779A1 PCT/JP2020/011476 JP2020011476W WO2020217779A1 WO 2020217779 A1 WO2020217779 A1 WO 2020217779A1 JP 2020011476 W JP2020011476 W JP 2020011476W WO 2020217779 A1 WO2020217779 A1 WO 2020217779A1
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WO
WIPO (PCT)
Prior art keywords
glass plate
lid
glass
main body
panel unit
Prior art date
Application number
PCT/JP2020/011476
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French (fr)
Japanese (ja)
Inventor
瓜生　英一
阿部　裕之
将 石橋
長谷川　和也
野中　正貴
清水　丈司
治彦 石川
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Priority to JP2021515868A priority Critical patent/JPWO2020217779A1/ja
Publication of WO2020217779A1 publication Critical patent/WO2020217779A1/en

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing

Definitions

  • This disclosure relates to a glass panel unit and a method for manufacturing the glass panel unit. More specifically, the present disclosure relates to a glass panel unit for heat insulation and a method for manufacturing the glass panel unit for heat insulation.
  • Patent Document 1 discloses a low-pressure double glazing in which the distance between two flat glass sheets is held by a titanium spacer.
  • An object of the present disclosure is to provide a glass panel unit and a method for manufacturing the glass panel unit, which can make heat transfer less likely to occur in a vacuum space.
  • the glass panel unit includes a main body, a lid, and a first frame.
  • the main body portion includes a first glass plate, a second glass plate, a second frame body, a vacuum space, a gas adsorbent, and an exhaust hole.
  • the second glass plate faces the first glass plate.
  • the second frame body is located between the first glass plate and the second glass plate, and airtightly joins the first glass plate and the second glass plate.
  • the vacuum space is surrounded by the first glass plate, the second glass plate, and the second frame.
  • the gas adsorbent is in the vacuum space.
  • the exhaust hole is formed in the first glass plate or the second glass plate.
  • the lid is on the outside of the main body.
  • the first frame body surrounds the peripheral edge of the exhaust hole and airtightly joins the main body portion and the lid body.
  • the method for manufacturing a glass panel unit is a method for manufacturing a glass panel unit.
  • the method includes a preparation step, a melting step, an exhaust step, a sealing step, and an activation step.
  • the preparatory step is a step of preparing an assembled product.
  • the assembled product includes a main body, a lid, a first peripheral wall, and a gap.
  • the main body includes a first glass plate, a second glass plate, a second peripheral wall, an internal space, a gas adsorbent, and an exhaust hole.
  • the second glass plate faces the first glass plate.
  • the second peripheral wall has a frame shape and is located between the first glass plate and the second glass plate.
  • the internal space is surrounded by the first glass plate, the second glass plate, and the second peripheral wall.
  • the gas adsorbent is arranged in the internal space.
  • the exhaust hole is formed in one of the first glass plate and the second glass plate.
  • the lid is on the outside of the main body.
  • the first peripheral wall surrounds the peripheral edge of the exhaust hole with a part thereof opened, and is between the main body and the lid.
  • the gap is formed by a portion of the first peripheral wall that is partially open, and connects the internal space and the external space through the exhaust hole.
  • the melting step is a step of melting the second peripheral wall and airtightly joining the first glass plate and the second glass plate.
  • the exhaust step is a step of exhausting the internal space through the gap and the exhaust hole to form a vacuum space.
  • the sealing step is a step of melting the first peripheral wall by local heating to close the gap and airtightly joining the main body and the lid.
  • the activation step is a step of activating the gas adsorb
  • FIG. 1 is a perspective view showing a glass panel unit according to an embodiment.
  • FIG. 2 is a plan view showing the same glass panel unit.
  • FIG. 3 is a cross-sectional view taken along the line AA of FIG.
  • FIG. 4 is a perspective view showing an intermediate stage of the preparation process in the method for manufacturing the glass panel unit according to the embodiment.
  • FIG. 5 is an explanatory diagram of the same preparatory process.
  • FIG. 6 is an explanatory diagram of the same preparatory process.
  • FIG. 7 is an explanatory diagram of the same manufacturing method.
  • FIG. 8 is a plan view showing work-in-process in the same manufacturing method.
  • FIG. 9 is an explanatory diagram of an exhaust process in the same manufacturing method.
  • FIG. 10 is an explanatory diagram of a sealing process in the same manufacturing method.
  • FIG. 11 is an explanatory diagram of an activation step in the same production method.
  • the glass panel unit 100 includes a main body 10, a lid 16, and a first frame 17 (see FIG. 1).
  • the main body 10 includes a first glass plate 1, a second glass plate 2, a second frame body 41, a vacuum space 52, a gas adsorbent 44, and an exhaust hole 50.
  • the second glass plate 2 faces the first glass plate 1.
  • the second frame body 41 is located between the first glass plate 1 and the second glass plate 2, and airtightly joins the first glass plate 1 and the second glass plate 2.
  • the vacuum space 52 is surrounded by the first glass plate 1, the second glass plate 2, and the second frame 41.
  • the gas adsorbent 44 is in the vacuum space 52.
  • the exhaust hole 50 is formed in one of the first glass plate 1 and the second glass plate 2.
  • the lid 16 is on the outside of the main body 10.
  • the first frame body 17 surrounds the peripheral edge of the exhaust hole 50 and airtightly joins the main body portion 10 and the lid body 16.
  • the first frame body 17 since the first frame body 17 is not in the vacuum space 52 between the first glass plate 1 and the second glass plate 2, heat transfer by the first frame body 17 is performed. It does not occur in the vacuum space 52. Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space 52. Further, the first frame body 17 airtightly joins the main body portion 10 and the lid body 16, so that the exhaust hole 50 can be sealed by the first frame body 17 and the lid body 16.
  • FIGS. 1 to 3 schematically shows each configuration of the glass panel unit 100.
  • the dimensional shape of each of the illustrated configurations is different from the actual dimensional shape.
  • the glass panel unit 100 includes a main body portion 10, a lid body 16, and a first frame body 17.
  • the main body portion 10 is a portion constituting the main body (glass panel unit main body) of the glass panel unit 100, and constitutes the main outer shape of the glass panel unit 100. Moreover, the main body portion 10 is a portion other than the lid body 16 and the first frame body 17.
  • a main body 10 includes a first glass plate 1, a second glass plate 2, a second frame body 41, a vacuum space 52, a gas adsorbent 44, an exhaust hole 50, and a plurality of spacers 43. , Equipped with.
  • the plane shape of the main body 10 is larger than that of the lid 16 (see FIG. 2).
  • the first glass plate 1 faces the second glass plate 2 in the thickness direction D1 (see FIG. 3).
  • the first glass plate 1 is parallel to the second glass plate 2. Further, the first glass plate 1 is separated from the second glass plate 2 in the thickness direction D1.
  • a second frame 41 and a vacuum space 52 are formed between the first glass plate 1 and the second glass plate 2. In the vacuum space 52, there are a plurality of spacers 43 and a gas adsorbent 44.
  • an exhaust hole 50 is formed in the first glass plate 1.
  • the exhaust hole 50 is a hole that penetrates the first glass plate 1 in the thickness direction D1 (see FIG. 3). Further, the exhaust hole 50 is a hole used for exhausting in the process of manufacturing the glass panel unit 100 (exhaust step described later).
  • the exhaust hole 50 is preferably located at a position close to the second frame 41 (in the example of FIG. 1, the upper right corner) in a plan view of the glass panel unit 100 in the thickness direction D1. In this case, since the lid 16 is provided so as to overlap the exhaust hole 50 in the plan view in the thickness direction D1, the lid 16 becomes inconspicuous.
  • the exhaust hole 50 is airtightly sealed by the first frame body 17 and the lid body 16.
  • the first glass plate 1 includes a glass panel (first glass plate main body) 15 which is the main body thereof and a low emissivity film 45 laminated on the glass panel 15 (see, for example, FIG. 3).
  • the glass panel 15 is a glass panel having translucency.
  • Examples of the glass panel 15 include soda lime glass, high strain point glass, chemically tempered glass, non-alkali glass, quartz glass, neoceram, and physically tempered glass.
  • the glass panel 15 has a facing surface (first facing surface) 12 facing the second glass plate 2.
  • the low emissivity film 45 is laminated on most of the facing surfaces 12. Specifically, in a plan view of the first glass plate 1 in the thickness direction D1, the low emissivity film 45 is laminated on the facing surface 12 excluding the periphery of each position of the second frame 41 and the exhaust hole 50. ..
  • the low-emissivity film 45 is a film containing a metal such as silver having low radioactivity, and has a function of suppressing heat transfer due to radiation.
  • the low emissivity film 45 is also called an infrared reflective film, and although it has translucency, it has a property of making it difficult for infrared rays to pass through.
  • the second glass plate 2 faces the first glass plate 1 in the thickness direction D1. As shown in FIG. 3, the second glass plate 2 has a facing surface (second facing surface) 22 facing the first glass plate 1.
  • the second glass plate 2 includes a glass panel (second glass plate main body) 25 which is the main body thereof. Examples of the glass panel 25 include soda lime glass, high strain point glass, chemically tempered glass, non-alkali glass, quartz glass, neoceram, and physically tempered glass.
  • the second glass plate 2 may be composed of only the glass panel 25.
  • the second glass plate 2 includes a bottomed recess 2a as shown in FIG.
  • the recess 2a is arranged in the vacuum space 52.
  • the recess 2a is formed so that a part of the facing surface 22 is recessed with respect to the vacuum space 52 toward the side opposite to the first glass plate 1 in the thickness direction D1 (see FIG. 3).
  • the recess 2a is provided in a place where the spacer 43 is not provided.
  • the gas adsorbent 44 is arranged in the recess 2a. Specifically, the gas adsorbent 44 is in contact with the bottom surface of the recess 2a.
  • the second frame body 41 airtightly joins the first peripheral edge portion 13 of the first glass plate 1 and the second peripheral edge portion 23 of the second glass plate 2.
  • the first peripheral edge portion 13 is a frame-shaped portion along the outer peripheral edge of the first glass plate 1.
  • the second peripheral edge portion 23 is a frame-shaped portion along the outer peripheral edge of the second glass plate 2.
  • the second frame body 41 is composed of a second peripheral wall 410, which will be described later, which is a frame-shaped sealing material (second sealing material). Specifically, the second frame 41 is a portion where the second sealing material is melt-hardened.
  • the second sealing material contains a glass frit having a predetermined softening point.
  • the second sealing material consists of, for example, only glass frit.
  • any glass frit can be adopted as long as the first glass plate 1 and the second glass plate 2 can be joined by melt hardening.
  • the glass frit is, for example, a low melting point glass frit.
  • An example of a low melting point glass frit is a V-Te-Ag glass frit.
  • the vacuum space 52 is surrounded by the first glass plate 1, the second glass plate 2, and the second frame 41.
  • the degree of vacuum of the vacuum space 52 is equal to or less than a predetermined value.
  • the degree of vacuum in the vacuum space 52 may be such that the heat insulating property of the glass panel unit 100 is not easily lowered, and the degree of vacuum is not particularly limited.
  • the degree of vacuum of the vacuum space 52 is, for example, 0.1 Pa or less.
  • the plurality of spacers 43 are arranged at a distance from each other. Each of the spacers 43 is interposed between the first glass plate 1 and the second glass plate 2. That is, each of the spacers 43 is in contact with the first glass plate 1 and the second glass plate 2.
  • the plurality of spacers 43 are in the vacuum space 52, and the distance between the first glass plate 1 and the second glass plate 2 is maintained at a predetermined distance. It is preferable that all or a part of the plurality of spacers 43 is made of a resin such as polyimide.
  • the gas adsorbent 44 contains a metal getter material. In this case, since the gas adsorbent 44 can adsorb the gas in the vacuum space 52 by activating the gas adsorbent 44, it is possible to prevent the quality of the vacuum space 52 from being deteriorated. This makes it difficult to reduce the heat insulating property of the glass panel unit 100.
  • the metal getter material is a metal getter material having a metal surface capable of chemically adsorbing gas molecules.
  • the metal getter material include a zirconium-based getter material such as Zr-Al and Zr-V-Fe; and a titanium-based getter material.
  • the metal getter material can adsorb the gas existing in the vacuum space 52. This makes it difficult for heat transfer to occur in the vacuum space 52.
  • the gas in the vacuum space 52 include water vapor, nitrogen, oxygen, hydrogen, and carbon dioxide.
  • the metal getter material may adsorb (chemically adsorb) gas molecules on the metal surface before its activation. Even if gas molecules are adsorbed on the metal surface of the metal getter material in this way, the gas molecules can be diffused inside the metal getter material at the time of activation.
  • the glass panel unit 100 includes a lid 16 as described above.
  • the lid 16 is on the outside of the main body 10. That is, in the thickness direction D1, the main body 10, the first frame 17, and the lid 16 are arranged in this order.
  • the planar shape of the lid 16 is smaller than the first glass plate 1 and larger than the exhaust hole 50 in a plan view of the main body 10 in the thickness direction D1. Therefore, the vacuum space 52 can be reliably sealed by the first frame body 17 airtightly joining the first glass plate 1 and the lid body 16.
  • the lid 16 is formed in a plate shape in the present embodiment (see FIG. 1), the lid body 16 may be formed in any shape such as a hemisphere.
  • the lid body 16 has a lid body main body portion 16a and a joint portion 16b.
  • the lid body 16a and the joint 16b are integrated to form the lid 16.
  • the lid body 16a is a part that constitutes the main outer shape of the lid 16.
  • the lid body 16a has a rigidity capable of sealing the exhaust hole 50. Examples of the material constituting such a lid body 16a include metal and the like.
  • the joint portion 16b is a portion of the lid body 16 that is joined to the first frame body 17.
  • a portion formed by subjecting a surface treatment such as a glass coat to the surface of the lid main body 16a facing the exhaust hole 50 becomes the joint 16b.
  • the joint between the lid body 16 and the first frame body 17 can be strengthened.
  • the exhaust hole 50 can be more reliably sealed between the lid body 16 and the first frame body 17.
  • the joint 16b contains glass.
  • the first frame body 17 contains glass, the first frame body 17 is more likely to be strongly bonded to the joint portion 16b containing glass. As a result, the exhaust hole 50 can be more reliably sealed between the lid body 16 and the first frame body 17.
  • the glass panel unit 100 includes the first frame body 17.
  • the first frame body 17 surrounds the peripheral edge of the exhaust hole 50 and airtightly joins the main body portion 10 (specifically, the first glass plate 1) and the lid body 16.
  • Such a first frame body 17 is composed of a first peripheral wall 170, which will be described later, which is a frame-shaped sealing material (first sealing material). That is, the first frame body 17 is a portion where the first sealing material is melt-hardened.
  • the first sealing material contains a glass frit having a predetermined softening point.
  • the first sealing material consists of, for example, only glass frit. Any glass frit can be adopted as long as the main body 10, specifically the first glass plate 1, and the lid 16 can be joined by melting and curing the glass frit.
  • the glass frit is, for example, a low melting point glass frit.
  • An example of a low melting point glass frit is a V-Te-Ag glass frit.
  • the softening point of the first sealing material is preferably higher than that of the second sealing material. In this case, when the second sealing material is melted in the melting step described later, the first sealing material is less likely to melt, so that the gap 18 described later can be less likely to be closed. As a result, the exhaust hole 50 and the gap 18 described later can be used as an exhaust path for creating the vacuum space 52.
  • the softening point of the first sealing material is preferably higher than the melting temperature Tm described later.
  • the softening point of the first sealing material is, for example, 330 ° C.
  • the first frame body 17 surrounds the peripheral edge of the exhaust hole 50 without interruption in a plan view of the main body 10 in the thickness direction D1 (see FIG. 2).
  • the planar shape of the first frame 17 is annular, but the planar shape of the first frame 17 is not particularly limited as long as it surrounds the peripheral edge of the exhaust hole 50.
  • Other examples of the planar shape of the first frame body 17 include an ellipse and a polygon such as a triangle and a quadrangle.
  • the first frame body 17 may be joined over the entire surface of the surfaces where the joint portion 16b and the main body portion 10 face each other, except for the portion overlapping the exhaust hole 50.
  • the first frame body 17 joins the lid body 16 and the main body portion 10, so that the first frame body 17 is not in the vacuum space 52 formed between the first and second glass plates 1 and 2. Therefore, heat transfer by the first frame body 17 does not occur in the vacuum space 52. Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space 52. Further, the first frame body 17 airtightly joins the main body portion 10 and the lid body 16, so that the exhaust hole 50 can be sealed by the first frame body 17 and the lid body 16.
  • the glass panel unit 100 described above has excellent heat insulating properties and is easy to handle. Therefore, it can be satisfactorily used for window glass and the like. Further, for example, by arranging the glass panel unit 100 on the door portion of the refrigerator or freezer, it becomes possible to check the internal state without interfering with the function of the refrigerator or freezer by utilizing the high heat insulating property. It can be expected to be used for home or business use.
  • a manufacturing method of the glass panel unit 100 according to the present embodiment (hereinafter, may be simply referred to as a manufacturing method (M)) will be described with reference to FIGS. 4 to 11.
  • the manufacturing method (M) is a method for manufacturing the glass panel unit 100. Therefore, for the manufacturing method (M), the description of the glass panel unit 100 can be referred to.
  • the manufacturing method (M) includes a preparation step (see FIGS. 4 to 6), a melting step (see FIG. 7), an exhaust step (see FIGS. 7 to 9), and a sealing step (see FIG. 10). It includes an activation step (see FIG. 11).
  • the preparation process is a process of preparing the assembled product 81 as shown in FIG.
  • Assembly 81 is an intermediate product for making the glass panel unit as shown in FIG.
  • the assembled product 81 includes a main body portion 810, a first peripheral wall 170, a lid body 16, and a gap 18 (see FIG. 6).
  • the main body portion 810 is a part that constitutes the main body (assembled product main body) of the assembled product 81, and constitutes the main outer shape of the assembled product 81. Moreover, the main body portion 810 is a portion other than the lid body 16 and the first peripheral wall 170.
  • a main body 810 includes a first glass plate 1, a second glass plate 2, a second peripheral wall 410, an internal space 510, a plurality of spacers 43, a gas adsorbent 44, and an exhaust hole 50. Be prepared.
  • the plan shape of the main body 810 is larger than that of the lid 16 (see FIG. 6).
  • the assembled product 81 basically has the same structure as the glass panel unit 100. Specifically, in the assembled product 81, the internal space 510 is not exhausted, the first peripheral wall 170 and the second peripheral wall 410 are not melt-hardened, and the gas adsorbent 44 is not activated.
  • the preparation process includes a main body manufacturing step for manufacturing the main body 810.
  • the main body manufacturing step in order to manufacture the main body 810, the first glass plate 1, the second glass plate 2, the exhaust hole 50, the recess 2a, the second peripheral wall 410, and the plurality of spacers 43 are used. This is a step of creating the gas adsorbent 44 and the internal space 510.
  • the main body manufacturing process includes the first to seventh steps. The order of the second to sixth steps may be changed as appropriate.
  • the first step is a step of forming the first glass plate 1 and the second glass plate 2 (glass plate forming step). For example, in the first step, the first glass plate 1 and the second glass plate 2 are manufactured. Further, in the first step, the first glass plate 1 and the second glass plate 2 are washed as needed.
  • the second step is a step of forming the exhaust hole 50 (exhaust hole forming step).
  • exhaust hole forming step As shown in FIG. 4, an exhaust hole 50 is formed in the first glass plate 1. Further, in the second step, the first glass plate 1 is washed if necessary.
  • the third step is a step of forming the recess 2a (recess forming step).
  • a recess 2a is formed in the second glass plate 2.
  • the recess 2a is formed so that a part of the facing surface 22 is recessed in a direction parallel to the thickness direction D1. Further, in the third step, the second glass plate 2 is washed if necessary.
  • the fourth step is a step of forming the spacer 43 (spacer forming step).
  • a plurality of spacers 43 are formed in advance, and the plurality of spacers 43 are arranged at intervals on one surface (opposing surface) 22 of the second glass plate 2 by using a chip mounter or the like. To do.
  • the plurality of spacers 43 are used to maintain the distance between the first and second glass plates 1 and 2 in the glass panel unit 100 as shown in FIG. 1 at a predetermined distance. Examples of the material constituting such a spacer 43 include resin and the like.
  • the spacer 43 is formed in advance and arranged on the second glass plate 2, but a plurality of spacers 43 are formed on the second glass plate 2 by using a well-known thin film forming technique. It may be formed in 2.
  • the spacer 43 contains a resin
  • the plurality of spacers 43 may be formed by using a photolithography technique and an etching technique as a method different from the above-mentioned forming method.
  • the plurality of spacers 43 can be formed by using a photocurable material or the like.
  • Each spacer 43 is a columnar shape having a height substantially equal to the predetermined interval.
  • the spacer 43 has a diameter of 1 mm and a height of 100 ⁇ m.
  • each spacer 43 may have a desired shape such as a prismatic shape or a spherical shape.
  • the fifth step is a step of forming the gas adsorbent 44 (gas adsorbent forming step).
  • the gas adsorbent 44 is arranged in the recess 2a by using a chip mounter or the like.
  • the sixth step is a step of forming the second peripheral wall 410 (second peripheral wall forming step).
  • the second sealing material is applied to the second peripheral edge portion 23 of the second glass plate 2 using a dispenser or the like, and then the second sealing material is dried to form the second peripheral wall 410. (See FIG. 4).
  • the second peripheral wall 410 is an intermediate for producing the second frame body 41.
  • the second glass plate 2 as shown in FIG. 4 can be obtained.
  • the second glass plate 2 is formed with a recess 2a, a second peripheral wall 410, an internal space 510, a plurality of spacers 43, and a gas adsorbent 44.
  • the seventh step is a step (placement step) of arranging the first glass plate 1 and the second glass plate 2.
  • the first glass plate 1 and the second glass plate 2 are arranged so as to be parallel to each other and face each other.
  • an internal space 510 surrounded by the first glass plate 1, the second glass plate 2, and the second peripheral wall 410 is formed.
  • the low emissivity film 45 is opposed to the second glass plate 2 to arrange the first glass plate 1.
  • the main body 810 is obtained by the main body manufacturing process described above. Then, the assembled product 81 is obtained by performing the 8th to 10th steps after the main body manufacturing step. The order of the 8th to 10th steps can be changed as appropriate.
  • the eighth step is a step of forming the lid 16 (lid forming step).
  • the surface of the lid 16 facing the first peripheral wall 170 is subjected to surface treatment such as glass coating.
  • the portion subjected to the surface treatment in this way is referred to as a joint portion 16b.
  • the ninth step is a step of forming the first peripheral wall 170 (first peripheral wall forming step).
  • the first sealing material is applied to the outer surface of the first glass plate 1 by using a dispenser or the like to form the first peripheral wall 170.
  • the first peripheral wall 170 has an annular (for example, C-shaped) shape with a part of opening (see FIG. 5). The portion where this part is opened becomes the gap 18.
  • the first peripheral wall 170 is formed so as to surround the exhaust hole 50 on the outer surface of the first glass plate 1 at a position away from the peripheral edge of the exhaust hole 50.
  • the first peripheral wall 170 is an intermediate for producing the first frame body 17.
  • the tenth step is a step of arranging the lid 16 on the main body 810 (lid arranging step).
  • the lid 16 is arranged so that the joint portion 16b faces the first glass plate 1 and the first peripheral wall 170.
  • the gap 18 connects the external space and the exhaust hole between the main body 810 and the lid 16. Therefore, the gap 18 connects the internal space 510 and the external space via the exhaust hole 50.
  • the assembled product 81 as shown in FIG. 6 can be obtained. After the assembly 81 is manufactured, a melting step, an exhaust step, a sealing step, and an activation step are executed.
  • the melting step is a step of melting the second peripheral wall 410 by heating and airtightly joining the first glass plate 1 and the second glass plate 2. During the melting process, the second sealing material constituting the second peripheral wall 410 is melted. As a result, the molten second peripheral wall 410 is joined to the first glass plate 1 and the second glass plate 2.
  • the temperature (melting temperature) Tm of the melting step is selected to be a temperature equal to or higher than the softening point of the second sealing material.
  • the softening point of the second sealing material is not particularly limited, but is, for example, 260 ° C to 270 ° C.
  • the melting temperature Tm is selected, for example, 300 ° C.
  • the work-in-process 8 is an intermediate for manufacturing the glass panel unit 100. That is, in the manufacturing method (M), the work-in-process 8 is an article obtained in the middle of the process of manufacturing the glass panel unit 100 from the assembled product 81.
  • the work-in-process 8 basically has the same structure as the assembled product 81. In the work-in-process 8 shown in FIG. 8, the exhaust of the internal space 510 is in the middle, the first peripheral wall 170 is not melted, and the gas adsorbent 44 is not activated.
  • an exhaust step and a sealing step are performed.
  • the exhaust step is a step of forming a vacuum space 52 by exhausting the internal space 510 through the gap 18 and the exhaust hole 50.
  • the exhaust step is performed so that, for example, the degree of vacuum in the vacuum space 52 is 0.1 Pa or less.
  • the exhaust step may be started in the middle of the melting step (see FIG. 7).
  • the exhaust step may be started in the middle of cooling the work-in-process 8 from the melting temperature Tm to the temperature (sealing temperature) Ts of the sealing step.
  • Tm melting temperature
  • Ts sealing temperature
  • a sealing step is performed after the vacuum space 52 is formed.
  • the sealing step is performed in the middle of the exhaust step (see FIG. 7).
  • the sealing step is a step of melting the first peripheral wall 170 by local heating to close the gap 18 and airtightly joining the main body portion 810 and the lid body 16.
  • the exhaust step and the sealing step according to the present embodiment are executed by using the devices shown in FIGS. 9 and 10.
  • This device includes a decompression mechanism 71 and a heating mechanism 72.
  • the decompression mechanism 71 includes an internal space 74, a pressing mechanism 73, an exhaust head 75, and a connecting portion 753 connected to the exhaust head 75. Further, the decompression mechanism 71 is configured to decompress the internal space 510 formed in the work-in-process 8 through the gap 18 and the exhaust hole 50, and maintain the decompression state.
  • the internal space 74 opens at the lower end of the exhaust head 75 and a portion connecting the exhaust head 75 and the connection portion 753.
  • the exhaust head 75 has a lid 16 arranged in the internal space 74, and the lid 16 is pressed toward the first glass plate 1 by the pressing mechanism 73, and the main body of the work in process 8, specifically, the first. 1 It is airtightly pressed against the glass plate 1. Then, when the air in the exhaust head 75 is sucked through the connecting portion 753 (see the white arrow in FIG. 9), the internal space 510 is exhausted through the gap 18 and the exhaust hole 50.
  • the connection portion 753 connects between the exhaust head 75 and the vacuum pump.
  • the pressing mechanism 73 is provided in the internal space 74.
  • the pressing mechanism 73 is configured to press the lid 16 toward the first glass plate 1 while the vacuum space 52 is maintained by the decompression mechanism 71. That is, the lid 16 is elastically pressed toward the first glass plate 1 by the pressing mechanism 73.
  • the sealing process is performed by operating the heating mechanism 72.
  • the heating mechanism 72 is arranged on the side opposite to the exhaust head 75 with respect to the work in process 8 in the thickness direction D1 (see FIG. 10).
  • the heating mechanism 72 is configured to heat the first peripheral wall 170 between the lid 16 and the main body of the work-in-process 8 in a non-contact manner.
  • the heating mechanism 72 heats only the first peripheral wall 170 while maintaining the temperature of the work-in-process 8 at the sealing temperature Ts.
  • the sealing temperature Ts is, for example, 250 ° C.
  • the heating mechanism 72 includes an irradiator 720 as shown in FIG.
  • the irradiator 720 is configured to irradiate the first peripheral wall 170 with infrared rays (near infrared rays) via the first and second glass plates 1 and 2.
  • infrared rays near infrared rays
  • the first peripheral wall 170 is heated and melted.
  • the melted first peripheral wall 170 is hardened by heat removal to form the first frame body 17.
  • the gap 18 is closed in the first frame body 17, and the lid body 16 and the main body of the work-in-process 8 are airtightly joined by the first frame body 17.
  • the exhaust hole 50 is sealed by the first frame body 17 and the lid body 16 while the vacuum space 52 is maintained.
  • the vacuum space 52 can be maintained even if the exhaust head 75 is removed.
  • the exhaust hole 50 is sealed with the first frame body 17 and the lid body 16, and then the vacuum pump is stopped to end the exhaust process.
  • the activation step is a step of activating the gas adsorbent 44 by local heating.
  • the temperature of the entire work-in-process 8 excluding the gas adsorbent 44 and its peripheral portion may be about room temperature.
  • the gas adsorbent 44 in the vacuum space 52 is locally heated to a predetermined activation temperature by the local heating mechanism 6 as shown in FIG.
  • the local heating mechanism 6 is arranged on the side opposite to the second glass plate 2 with respect to the gas adsorbent 44 in the thickness direction D1 and outside the first glass plate 1 (see FIG. 11).
  • the local heating mechanism 6 may be arranged on the side opposite to the first glass plate 1 with respect to the gas adsorbent 44 in the thickness direction D1 and outside the second glass plate 2.
  • the activation temperature of the gas adsorbent 44 is arbitrarily set according to the type of metal getter material.
  • the activation temperature is, for example, a temperature higher than the melting temperature Tm.
  • the melting step can be performed by making it difficult for the gas adsorbent 44 to be activated. That is, it is possible to make it difficult for the gas adsorbent 44 to be activated in the melting step. Further, since the gas adsorbent 44 is locally heated during the activation step, the first and second frame bodies 17 and 41 are not remelted.
  • the local heating mechanism 6 includes an irradiator 61.
  • the irradiator 61 is a device configured to emit a laser to the gas adsorbent 44, and includes a light source. As shown in FIG. 11, the irradiator 61 can irradiate the gas adsorbent 44 with a laser via the first glass plate 1. Alternatively, the irradiator 61 may irradiate the gas adsorbent 44 with a laser via the second glass plate 2.
  • the gas adsorbent 44 is locally heated in a non-contact manner.
  • the heating time of the gas adsorbent 44 can be shortened. Therefore, the work efficiency for activating the gas adsorbent 44 can be improved.
  • the metal getter material can adsorb the gas existing in the vacuum space 52 by activating the metal getter material.
  • the gas existing in the vacuum space 52 include water vapor, nitrogen, oxygen, hydrogen, and carbon dioxide.
  • the tablet-type metal getter material is activated by induction heating. Specifically, the tablet-type metal getter material is induced and heated by a laser from the irradiator 61. The gas adsorbent 44 is locally heated by such induction heating of the tablet-type metal getter material.
  • the gas adsorbent 44 may be irradiated with the laser from the irradiator 61 via the first glass plate 1, or the gas adsorbent may be irradiated through the second glass plate 2. 44 may be irradiated.
  • the glass panel unit 100 as shown in FIG. 1 can be obtained.
  • the glass panel unit 100 manufactured by the above manufacturing method (M) has excellent heat insulating properties and is easy to handle. Therefore, the glass panel unit 100 can be satisfactorily used for window glass and the like. Further, for example, the glass panel unit 100 can be arranged at the door portion of the refrigerator or freezer. In this case, it is expected that the glass panel unit 100 will be used for home or business use, for example, the internal state can be confirmed without interfering with the functions of the refrigerator and the freezer by utilizing the high heat insulating property.
  • the plane shape of the glass panel unit 100 is quadrangular, but in the modified example, the glass panel unit 100 may have any plane shape such as a circle.
  • the planar shape of the lid 16 is quadrangular, but in the modified example, the lid 16 may have any planar shape such as a circle.
  • the lid 16 is a plate-shaped member, but in a modified example, the lid 16 may be a member having an arbitrary shape such as a hemisphere.
  • the first glass plate 1 has the same planar shape as the second glass plate 2, but in the modified example, the first glass plate 1 may be different from the planar shape of the second glass plate 2.
  • a plurality of spacers 43 are arranged on the second glass plate 2 in the fourth step, but in the modified example, a plurality of spacers 43 may be arranged on the first glass plate 1, or a plurality of spacers 43 may be arranged on the first glass plate 1. Spacer 43 may be assigned to the first glass plate 1 and the second glass plate 2 and arranged. Therefore, the plurality of spacers 43 can be arranged on at least one of the first glass plate 1 and the second glass plate 2.
  • the gas adsorbent 44 is arranged on the second glass plate 2 in the fifth step, but in the modified example, the gas adsorbent 44 may be arranged on the first glass plate 1. Alternatively, the gas adsorbent 44 may be arranged on both the first glass plate 1 and the second glass plate 2. Therefore, the gas adsorbent 44 can be arranged on at least one of the first glass plate 1 and the second glass plate 2.
  • the first sealing material is applied to the first glass plate 1 to form the first peripheral wall 170 in the ninth step, but in the modified example, the first sealing material is applied to the joint portion 16b. It may be applied to form the first peripheral wall 170.
  • one glass panel unit 100 includes one gas adsorbent 44, but in a modified example, one glass panel unit 100 may include two or more gas adsorbents 44. In this case, all the gas adsorbents 44 are in the vacuum space 52.
  • the exhaust hole 50 is formed in the first glass plate 1, but in the modified example, the exhaust hole 50 may be formed in the second glass plate 2. Therefore, the exhaust hole 50 can be formed in one of the first glass plate 1 and the second glass plate 2.
  • the first aspect is a glass panel unit (100), which includes a main body (10), a lid (16), and a first frame (17).
  • the main body (10) includes a first glass plate (1), a second glass plate (2), a second frame body (41), a vacuum space (52), a gas adsorbent (44), and an exhaust gas. It comprises a hole (50).
  • the second glass plate (2) faces the first glass plate (1).
  • the second frame body (41) is located between the first glass plate (1) and the second glass plate (2), and airtightly joins the first glass plate (1) and the second glass plate (2). ..
  • the vacuum space (52) is surrounded by a first glass plate (1), a second glass plate (2), and a second frame body (41).
  • the gas adsorbent (44) is in the vacuum space (52).
  • the exhaust hole (50) is formed in one of the first glass plate (1) and the second glass plate (2).
  • the lid (16) is on the outside of the main body (10).
  • the first frame body (17) surrounds the peripheral edge of the exhaust hole (50) and airtightly joins the main body portion (10) and the lid body (16).
  • the first frame body (17) since the first frame body (17) is not in the vacuum space (52) between the first glass plate (1) and the second glass plate (2), the first frame body (17) ) Does not occur in the vacuum space (52). Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space (52). Further, the first frame body (17) airtightly joins the main body portion (10) and the lid body (16), so that the exhaust hole (50) is formed between the first frame body (17) and the lid body (16). Can be sealed.
  • the second aspect is the glass panel unit (100) of the first aspect, and the lid body (16) has a lid body main body portion (16a) and a joint portion (16b).
  • the lid body (16a) constitutes the outer shape of the lid (16).
  • the joint portion (16b) is joined to the first frame body (17).
  • the first frame body (17) since the first frame body (17) is not in the vacuum space (52) between the first glass plate (1) and the second glass plate (2), the first frame body (17) ) Does not occur in the vacuum space (52). Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space (52). Further, the first frame body (17) airtightly joins the main body portion (10) and the lid body (16), so that the exhaust hole (50) is formed between the first frame body (17) and the lid body (16). Can be sealed.
  • the third aspect is the glass panel unit (100) of the second aspect, and the joint portion (16b) is surface-treated on the surface of the lid body (16) to be joined with the first frame body (17). It is a part.
  • the joint between the lid body (16) and the first frame body (17) can be strengthened.
  • the exhaust hole (50) can be more reliably sealed between the lid body (16) and the first frame body (17).
  • the fourth aspect is the glass panel unit (100) of the second or third aspect, and the joint portion (16b) includes glass.
  • the joint between the lid body (16) and the first frame body (17) can be strengthened.
  • the exhaust hole (50) can be more reliably sealed between the lid body (16) and the first frame body (17).
  • a fifth aspect is a method for manufacturing the glass panel unit (100), that is, a method for manufacturing the glass panel unit (100), which is a preparation step, a melting step, an exhaust step, a sealing step, and an activation step. And, including.
  • the preparation step is a step of preparing the assembled product (81).
  • the assembled product (81) includes a main body portion (810), a lid body (16), a first peripheral wall (170), and a gap (18).
  • the main body (810) includes a first glass plate (1), a second glass plate (2), a second peripheral wall (410), an internal space (510), a gas adsorbent (44), and an exhaust hole. (50) and.
  • the second glass plate (2) faces the first glass plate (1).
  • the second peripheral wall (410) has a frame shape and is located between the first glass plate (1) and the second glass plate (2).
  • the internal space (510) is surrounded by a first glass plate (1), a second glass plate (2), and a second peripheral wall (410).
  • the gas adsorbent (44) is arranged in the internal space (510).
  • the exhaust hole (50) is formed in one of the first glass plate (1) and the second glass plate (2).
  • the lid (16) is on the outside of the main body (810).
  • the first peripheral wall (170) surrounds the peripheral edge of the exhaust hole (50) with a part thereof opened, and is between the main body portion (810) and the lid (16).
  • the gap (18) is formed by a portion of the first peripheral wall (170) that is partially opened, and connects the internal space (510) and the external space via an exhaust hole (50).
  • the melting step is a step of melting the second peripheral wall (410) and airtightly joining the first glass plate (1) and the second glass plate (2).
  • the exhaust step is a step of exhausting the internal space (510) through the gap (18) and the exhaust hole (50) to form a vacuum space (52).
  • the sealing step is a step of melting the first peripheral wall (170) by local heating to close the gap (18) and airtightly joining the main body portion (810) and the lid (16).
  • the activation step is a step of activating the gas adsorbent (44) by local heating.
  • the first frame body composed of the first peripheral wall (170) is in the vacuum space (52) between the first glass plate (1) and the second glass plate (2). Therefore, heat transfer by the first frame does not occur in the vacuum space (52). Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space (52). Further, the first frame body airtightly joins the main body portion (10) and the lid body (16), so that the exhaust hole (50) is sealed between the first frame body and the lid body (16). be able to.

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  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
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  • Securing Of Glass Panes Or The Like (AREA)

Abstract

The present disclosure provides a glass panel unit that can be configured to cause heat transfer not to easily occur inside a vacuum space. This glass panel unit 100 is provided with a body part 10, a lid 16, and a first frame body 17. The body part 10 is provided with a first glass plate 1, a second glass plate 2, a second frame body 41, a vacuum space 52, a gas adsorption body 44, and an exhaust hole 50. The lid 16 is on an outer portion of the body part 10. The first frame body 17 surrounds the peripheral edge of the discharge hole 50 and airtightly joins the body part 10 and the lid 16.

Description

ガラスパネルユニット、及びガラスパネルユニットの製造方法Glass panel unit and manufacturing method of glass panel unit
　本開示は、ガラスパネルユニット、及びガラスパネルユニットの製造方法に関する。より詳細には、本開示は、断熱用のガラスパネルユニット、及び断熱用のガラスパネルユニットの製造方法に関する。 This disclosure relates to a glass panel unit and a method for manufacturing the glass panel unit. More specifically, the present disclosure relates to a glass panel unit for heat insulation and a method for manufacturing the glass panel unit for heat insulation.
　特許文献１には、２枚の板ガラスの間隔をチタン製スペーサーで保持させた低圧複層ガラスが開示されている。 Patent Document 1 discloses a low-pressure double glazing in which the distance between two flat glass sheets is held by a titanium spacer.
特開平１０－３３０１３４号公報Japanese Unexamined Patent Publication No. 10-330134
　しかし、特許文献１の場合、２枚の板ガラスの間に低圧空間（真空空間）を形成しても、スペーサーにより熱伝達が生じやすい。すなわち、真空空間で熱伝達が生じやすい。 However, in the case of Patent Document 1, even if a low-pressure space (vacuum space) is formed between two flat glass sheets, heat transfer is likely to occur due to the spacer. That is, heat transfer is likely to occur in a vacuum space.
　本開示の課題は、真空空間内で熱伝達を生じにくくすることができる、ガラスパネルユニット、及びガラスパネルユニットの製造方法を提供することである。 An object of the present disclosure is to provide a glass panel unit and a method for manufacturing the glass panel unit, which can make heat transfer less likely to occur in a vacuum space.
　本開示の一態様に係るガラスパネルユニットは、本体部と、蓋体と、第１枠体と、を備える。前記本体部は、第１ガラス板と、第２ガラス板と、第２枠体と、真空空間と、ガス吸着体と、排気孔と、を備える。前記第２ガラス板は、前記第１ガラス板に対向する。前記第２枠体は、前記第１ガラス板と前記第２ガラス板との間にあり、前記第１ガラス板と前記第２ガラス板を気密に接合する。前記真空空間は、前記第１ガラス板と前記第２ガラス板と前記第２枠体とで囲まれている。前記ガス吸着体は、前記真空空間内にある。前記排気孔は、前記第１ガラス板又は前記第２ガラス板に形成されている。前記蓋体は、前記本体部の外側にある。前記第１枠体は、前記排気孔の周縁を囲んで前記本体部と前記蓋体とを気密に接合する。 The glass panel unit according to one aspect of the present disclosure includes a main body, a lid, and a first frame. The main body portion includes a first glass plate, a second glass plate, a second frame body, a vacuum space, a gas adsorbent, and an exhaust hole. The second glass plate faces the first glass plate. The second frame body is located between the first glass plate and the second glass plate, and airtightly joins the first glass plate and the second glass plate. The vacuum space is surrounded by the first glass plate, the second glass plate, and the second frame. The gas adsorbent is in the vacuum space. The exhaust hole is formed in the first glass plate or the second glass plate. The lid is on the outside of the main body. The first frame body surrounds the peripheral edge of the exhaust hole and airtightly joins the main body portion and the lid body.
　本開示の一態様に係るガラスパネルユニットの製造方法は、ガラスパネルユニットを製造する方法である。前記方法は、準備工程と、溶融工程と、排気工程と、封止工程と、活性化工程と、を含む。前記準備工程は、組立て品を用意する工程である。前記組立て品は、本体部と、蓋体と、第１周壁と、隙間と、を備える。前記本体部は、第１ガラス板と、第２ガラス板と、第２周壁と、内部空間と、ガス吸着体と、排気孔と、を備える。前記第２ガラス板は、前記第１ガラス板に対向する。前記第２周壁は、枠状であり、前記第１ガラス板と前記第２ガラス板との間にある。前記内部空間は前記第１ガラス板と前記第２ガラス板と前記第２周壁とで囲まれている。前記ガス吸着体は、前記内部空間内に配置されている。前記排気孔は、前記第１ガラス板及び前記第２ガラス板のうち一方に形成されている。前記蓋体は、前記本体部の外側にある。前記第１周壁は、その一部が開口した状態で、前記排気孔の周縁を囲み、かつ前記本体部と前記蓋体との間にある。前記隙間は、前記第１周壁の一部が開口した部分により構成され、かつ前記排気孔を介して前記内部空間と外部空間とを繋ぐ。前記溶融工程は、前記第２周壁を溶融させて前記第１ガラス板と前記第２ガラス板とを気密に接合させる工程である。前記排気工程は、前記隙間と前記排気孔とを介して前記内部空間を排気させて真空空間とする工程である。前記封止工程は、局所加熱により前記第１周壁を溶融させて前記隙間を塞ぎ、かつ前記本体部と前記蓋体とを気密に接合させる工程である。前記活性化工程は、局所加熱により前記ガス吸着体を活性化させる工程である。 The method for manufacturing a glass panel unit according to one aspect of the present disclosure is a method for manufacturing a glass panel unit. The method includes a preparation step, a melting step, an exhaust step, a sealing step, and an activation step. The preparatory step is a step of preparing an assembled product. The assembled product includes a main body, a lid, a first peripheral wall, and a gap. The main body includes a first glass plate, a second glass plate, a second peripheral wall, an internal space, a gas adsorbent, and an exhaust hole. The second glass plate faces the first glass plate. The second peripheral wall has a frame shape and is located between the first glass plate and the second glass plate. The internal space is surrounded by the first glass plate, the second glass plate, and the second peripheral wall. The gas adsorbent is arranged in the internal space. The exhaust hole is formed in one of the first glass plate and the second glass plate. The lid is on the outside of the main body. The first peripheral wall surrounds the peripheral edge of the exhaust hole with a part thereof opened, and is between the main body and the lid. The gap is formed by a portion of the first peripheral wall that is partially open, and connects the internal space and the external space through the exhaust hole. The melting step is a step of melting the second peripheral wall and airtightly joining the first glass plate and the second glass plate. The exhaust step is a step of exhausting the internal space through the gap and the exhaust hole to form a vacuum space. The sealing step is a step of melting the first peripheral wall by local heating to close the gap and airtightly joining the main body and the lid. The activation step is a step of activating the gas adsorbent by local heating.
図１は、一実施形態に係るガラスパネルユニットを示す斜視図である。FIG. 1 is a perspective view showing a glass panel unit according to an embodiment. 図２は、同上のガラスパネルユニットを示す平面図である。FIG. 2 is a plan view showing the same glass panel unit. 図３は、図２のＡ－Ａ線断面図である。FIG. 3 is a cross-sectional view taken along the line AA of FIG. 図４は、一実施形態に係るガラスパネルユニットの製造方法において、準備工程の途中段階を示す斜視図である。FIG. 4 is a perspective view showing an intermediate stage of the preparation process in the method for manufacturing the glass panel unit according to the embodiment. 図５は、同上の準備工程の説明図である。FIG. 5 is an explanatory diagram of the same preparatory process. 図６は、同上の準備工程の説明図である。FIG. 6 is an explanatory diagram of the same preparatory process. 図７は、同上の製造方法の説明図である。FIG. 7 is an explanatory diagram of the same manufacturing method. 図８は、同上の製造方法における仕掛品を示す平面図である。FIG. 8 is a plan view showing work-in-process in the same manufacturing method. 図９は、同上の製造方法における排気工程の説明図である。FIG. 9 is an explanatory diagram of an exhaust process in the same manufacturing method. 図１０は、同上の製造方法における封止工程の説明図である。FIG. 10 is an explanatory diagram of a sealing process in the same manufacturing method. 図１１は、同上の製造方法における活性化工程の説明図である。FIG. 11 is an explanatory diagram of an activation step in the same production method.
　以下、本開示を実施するための形態を説明する。 Hereinafter, a mode for implementing the present disclosure will be described.
　＜ガラスパネルユニット＞
　まず、一実施形態に係るガラスパネルユニット１００の概要を説明する。 <Glass panel unit>
First, an outline of the glass panel unit 100 according to the embodiment will be described.
　ガラスパネルユニット１００は、本体部１０と、蓋体１６と、第１枠体１７と、を備える（図１参照）。本体部１０は、第１ガラス板１と、第２ガラス板２と、第２枠体４１と、真空空間５２と、ガス吸着体４４と、排気孔５０と、を備える。第２ガラス板２は、第１ガラス板１に対向する。第２枠体４１は、第１ガラス板１と第２ガラス板２との間にあり、第１ガラス板１と第２ガラス板２とを気密に接合する。真空空間５２は、第１ガラス板１と第２ガラス板２と第２枠体４１とで囲まれている。ガス吸着体４４は、真空空間５２内にある。排気孔５０は、第１ガラス板１及び第２ガラス板２のうち一方に形成されている。蓋体１６は、本体部１０の外側にある。第１枠体１７は、排気孔５０の周縁を囲んで本体部１０と蓋体１６とを気密に接合する。 The glass panel unit 100 includes a main body 10, a lid 16, and a first frame 17 (see FIG. 1). The main body 10 includes a first glass plate 1, a second glass plate 2, a second frame body 41, a vacuum space 52, a gas adsorbent 44, and an exhaust hole 50. The second glass plate 2 faces the first glass plate 1. The second frame body 41 is located between the first glass plate 1 and the second glass plate 2, and airtightly joins the first glass plate 1 and the second glass plate 2. The vacuum space 52 is surrounded by the first glass plate 1, the second glass plate 2, and the second frame 41. The gas adsorbent 44 is in the vacuum space 52. The exhaust hole 50 is formed in one of the first glass plate 1 and the second glass plate 2. The lid 16 is on the outside of the main body 10. The first frame body 17 surrounds the peripheral edge of the exhaust hole 50 and airtightly joins the main body portion 10 and the lid body 16.
　このようなガラスパネルユニット１００によれば、第１枠体１７は、第１ガラス板１と第２ガラス板２との間の真空空間５２内にないため、第１枠体１７による熱伝達が真空空間５２内で生じない。このため、真空空間５２内で熱伝達を生じにくくすることができる。また、第１枠体１７が本体部１０と蓋体１６とを気密に接合することで、第１枠体１７と蓋体１６とで排気孔５０を封止することができる。 According to such a glass panel unit 100, since the first frame body 17 is not in the vacuum space 52 between the first glass plate 1 and the second glass plate 2, heat transfer by the first frame body 17 is performed. It does not occur in the vacuum space 52. Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space 52. Further, the first frame body 17 airtightly joins the main body portion 10 and the lid body 16, so that the exhaust hole 50 can be sealed by the first frame body 17 and the lid body 16.
　次に、本実施形態に係るガラスパネルユニット１００を、図１～図３を参照して詳細に説明する。図１～図３の各々は、ガラスパネルユニット１００の各構成を、模式的に示している。図示された各構成の寸法形状は、実際の寸法形状とは相違する。 Next, the glass panel unit 100 according to the present embodiment will be described in detail with reference to FIGS. 1 to 3. Each of FIGS. 1 to 3 schematically shows each configuration of the glass panel unit 100. The dimensional shape of each of the illustrated configurations is different from the actual dimensional shape.
　ガラスパネルユニット１００は、図１のように、本体部１０と、蓋体１６と、第１枠体１７と、を備える。 As shown in FIG. 1, the glass panel unit 100 includes a main body portion 10, a lid body 16, and a first frame body 17.
　本体部１０は、図１のように、ガラスパネルユニット１００の本体（ガラスパネルユニット本体）を構成する部分であって、ガラスパネルユニット１００の主な外形状を構成する。しかも本体部１０は、蓋体１６及び第１枠体１７以外の部分である。このような本体部１０は、第１ガラス板１と、第２ガラス板２と、第２枠体４１と、真空空間５２と、ガス吸着体４４と、排気孔５０と、複数のスペーサ４３と、を備える。本体部１０の厚み方向Ｄ１でガラスパネルユニット１００を見た平面視において、本体部１０の平面形状は、蓋体１６よりも大きい（図２参照）。 As shown in FIG. 1, the main body portion 10 is a portion constituting the main body (glass panel unit main body) of the glass panel unit 100, and constitutes the main outer shape of the glass panel unit 100. Moreover, the main body portion 10 is a portion other than the lid body 16 and the first frame body 17. Such a main body 10 includes a first glass plate 1, a second glass plate 2, a second frame body 41, a vacuum space 52, a gas adsorbent 44, an exhaust hole 50, and a plurality of spacers 43. , Equipped with. When the glass panel unit 100 is viewed in the thickness direction D1 of the main body 10, the plane shape of the main body 10 is larger than that of the lid 16 (see FIG. 2).
　第１ガラス板１は、厚み方向Ｄ１において、第２ガラス板２と対向している（図３参照）。第１ガラス板１は、第２ガラス板２と平行である。また、第１ガラス板１は、厚み方向Ｄ１において、第２ガラス板２と離れている。そして、第１ガラス板１と第２ガラス板２との間に、第２枠体４１と、真空空間５２とが形成されている。真空空間５２内に、複数のスペーサ４３と、ガス吸着体４４とがある。 The first glass plate 1 faces the second glass plate 2 in the thickness direction D1 (see FIG. 3). The first glass plate 1 is parallel to the second glass plate 2. Further, the first glass plate 1 is separated from the second glass plate 2 in the thickness direction D1. A second frame 41 and a vacuum space 52 are formed between the first glass plate 1 and the second glass plate 2. In the vacuum space 52, there are a plurality of spacers 43 and a gas adsorbent 44.
　第１ガラス板１には、図１のように、排気孔５０が形成されている。排気孔５０は、厚み方向Ｄ１に第１ガラス板１を貫通する孔である（図３参照）。また、排気孔５０は、ガラスパネルユニット１００を製造する過程（後述の排気工程）で、排気を行うために用いられる孔である。排気孔５０は、厚み方向Ｄ１でガラスパネルユニット１００を見た平面視において、第２枠体４１に近づけた位置（図１の例では、右上の角）にあることが好ましい。この場合、厚み方向Ｄ１の平面視で、排気孔５０に重ねて蓋体１６が設けられるため、蓋体１６が目立ちにくくなる。 As shown in FIG. 1, an exhaust hole 50 is formed in the first glass plate 1. The exhaust hole 50 is a hole that penetrates the first glass plate 1 in the thickness direction D1 (see FIG. 3). Further, the exhaust hole 50 is a hole used for exhausting in the process of manufacturing the glass panel unit 100 (exhaust step described later). The exhaust hole 50 is preferably located at a position close to the second frame 41 (in the example of FIG. 1, the upper right corner) in a plan view of the glass panel unit 100 in the thickness direction D1. In this case, since the lid 16 is provided so as to overlap the exhaust hole 50 in the plan view in the thickness direction D1, the lid 16 becomes inconspicuous.
　ガラスパネルユニット１００では、図１のように、排気孔５０は第１枠体１７及び蓋体１６によって気密に封止されている。 In the glass panel unit 100, as shown in FIG. 1, the exhaust hole 50 is airtightly sealed by the first frame body 17 and the lid body 16.
　第１ガラス板１は、その本体であるガラスパネル（第１ガラス板本体）１５と、ガラスパネル１５に積層された低放射膜４５を含む（例えば、図３参照）。 The first glass plate 1 includes a glass panel (first glass plate main body) 15 which is the main body thereof and a low emissivity film 45 laminated on the glass panel 15 (see, for example, FIG. 3).
　ガラスパネル１５は、透光性を有するガラス製パネルである。ガラスパネル１５としては、例えば、ソーダライムガラス、高歪点ガラス、化学強化ガラス、無アルカリガラス、石英ガラス、ネオセラム、及び物理強化ガラスが挙げられる。 The glass panel 15 is a glass panel having translucency. Examples of the glass panel 15 include soda lime glass, high strain point glass, chemically tempered glass, non-alkali glass, quartz glass, neoceram, and physically tempered glass.
　ガラスパネル１５は、図３のように、第２ガラス板２と対向する対向面（第１対向面）１２を有する。対向面１２のうち大部分に低放射膜４５が積層されている。具体的には、厚み方向Ｄ１で第１ガラス板１を見た平面視において、第２枠体４１、及び排気孔５０の各位置周辺を除く対向面１２に低放射膜４５が積層されている。低放射膜４５は、低放射性を有する銀等の金属を含有する膜であり、放射による伝熱を抑制する機能を有する。低放射膜４５は、赤外線反射膜とも呼ばれ、透光性を有するものの、赤外線を透過させにくい性質を有する。 As shown in FIG. 3, the glass panel 15 has a facing surface (first facing surface) 12 facing the second glass plate 2. The low emissivity film 45 is laminated on most of the facing surfaces 12. Specifically, in a plan view of the first glass plate 1 in the thickness direction D1, the low emissivity film 45 is laminated on the facing surface 12 excluding the periphery of each position of the second frame 41 and the exhaust hole 50. .. The low-emissivity film 45 is a film containing a metal such as silver having low radioactivity, and has a function of suppressing heat transfer due to radiation. The low emissivity film 45 is also called an infrared reflective film, and although it has translucency, it has a property of making it difficult for infrared rays to pass through.
　第２ガラス板２は、厚み方向Ｄ１において、第１ガラス板１と対向する。この第２ガラス板２は、図３のように、第１ガラス板１と対向する対向面（第２対向面）２２を有する。第２ガラス板２は、その本体であるガラスパネル（第２ガラス板本体）２５を含む。ガラスパネル２５としては、例えば、ソーダライムガラス、高歪点ガラス、化学強化ガラス、無アルカリガラス、石英ガラス、ネオセラム、及び物理強化ガラスが挙げられる。第２ガラス板２は、ガラスパネル２５のみから構成されてもよい。 The second glass plate 2 faces the first glass plate 1 in the thickness direction D1. As shown in FIG. 3, the second glass plate 2 has a facing surface (second facing surface) 22 facing the first glass plate 1. The second glass plate 2 includes a glass panel (second glass plate main body) 25 which is the main body thereof. Examples of the glass panel 25 include soda lime glass, high strain point glass, chemically tempered glass, non-alkali glass, quartz glass, neoceram, and physically tempered glass. The second glass plate 2 may be composed of only the glass panel 25.
　第２ガラス板２は、図３のように有底の凹部２ａを備える。凹部２ａは、真空空間５２内に配置されている。凹部２ａは、厚み方向Ｄ１において、対向面２２の一部が真空空間５２に対して第１ガラス板１とは反対側に向かって凹むようにして形成されている（図３参照）。凹部２ａは、スペーサ４３がない箇所に設けられている。そして、凹部２ａ内に、ガス吸着体４４が配置されている。具体的には、凹部２ａの底面にガス吸着体４４が接している。 The second glass plate 2 includes a bottomed recess 2a as shown in FIG. The recess 2a is arranged in the vacuum space 52. The recess 2a is formed so that a part of the facing surface 22 is recessed with respect to the vacuum space 52 toward the side opposite to the first glass plate 1 in the thickness direction D1 (see FIG. 3). The recess 2a is provided in a place where the spacer 43 is not provided. Then, the gas adsorbent 44 is arranged in the recess 2a. Specifically, the gas adsorbent 44 is in contact with the bottom surface of the recess 2a.
　第２枠体４１は、第１ガラス板１の第１周縁部１３と、第２ガラス板２の第２周縁部２３とを気密に接合している。第１周縁部１３は、第１ガラス板１の外周縁に沿う枠状の部位である。第２周縁部２３は、第２ガラス板２の外周縁に沿う枠状の部位である。 The second frame body 41 airtightly joins the first peripheral edge portion 13 of the first glass plate 1 and the second peripheral edge portion 23 of the second glass plate 2. The first peripheral edge portion 13 is a frame-shaped portion along the outer peripheral edge of the first glass plate 1. The second peripheral edge portion 23 is a frame-shaped portion along the outer peripheral edge of the second glass plate 2.
　第２枠体４１は、枠状の封着材（第２封着材）である後述の第２周壁４１０からなる。具体的には、第２枠体４１は、第２封着材を溶融硬化させた部位である。第２封着材は、所定の軟化点を有するガラスフリットを含有する。第２封着材は、例えば、ガラスフリットのみからなる。ガラスフリットは、溶融硬化することで第１ガラス板１と第２ガラス板２とを接合できればよく、任意のガラスフリットを採用できる。ガラスフリットは、例えば、低融点ガラスフリットである。低融点ガラスフリットの一例は、Ｖ－Ｔｅ－Ａｇ系ガラスフリットである。 The second frame body 41 is composed of a second peripheral wall 410, which will be described later, which is a frame-shaped sealing material (second sealing material). Specifically, the second frame 41 is a portion where the second sealing material is melt-hardened. The second sealing material contains a glass frit having a predetermined softening point. The second sealing material consists of, for example, only glass frit. As the glass frit, any glass frit can be adopted as long as the first glass plate 1 and the second glass plate 2 can be joined by melt hardening. The glass frit is, for example, a low melting point glass frit. An example of a low melting point glass frit is a V-Te-Ag glass frit.
　真空空間５２は、第１ガラス板１と第２ガラス板２と第２枠体４１とで囲まれている。真空空間５２は、その真空度が所定値以下である。真空空間５２の真空度は、ガラスパネルユニット１００の断熱性を低下させにくくできればよく、真空度は特に限定されない。真空空間５２の真空度は、例えば、０．１Ｐａ以下である。 The vacuum space 52 is surrounded by the first glass plate 1, the second glass plate 2, and the second frame 41. The degree of vacuum of the vacuum space 52 is equal to or less than a predetermined value. The degree of vacuum in the vacuum space 52 may be such that the heat insulating property of the glass panel unit 100 is not easily lowered, and the degree of vacuum is not particularly limited. The degree of vacuum of the vacuum space 52 is, for example, 0.1 Pa or less.
　複数のスペーサ４３は、互いに距離をあけて配置されている。スペーサ４３の各々は、第１ガラス板１と第２ガラス板２との間に介在している。すなわち、スペーサ４３の各々は、第１ガラス板１と第２ガラス板２とに接触している。 The plurality of spacers 43 are arranged at a distance from each other. Each of the spacers 43 is interposed between the first glass plate 1 and the second glass plate 2. That is, each of the spacers 43 is in contact with the first glass plate 1 and the second glass plate 2.
　複数のスペーサ４３は、真空空間５２内にあり、第１ガラス板１と第２ガラス板２の間の距離を、所定距離に維持する。複数のスペーサ４３のうち、全部または一部が、ポリイミド等の樹脂で形成されていることが好ましい。 The plurality of spacers 43 are in the vacuum space 52, and the distance between the first glass plate 1 and the second glass plate 2 is maintained at a predetermined distance. It is preferable that all or a part of the plurality of spacers 43 is made of a resin such as polyimide.
　スペーサ４３の材質として樹脂を採用することで、スペーサ４３の熱伝導率を抑えることができるという利点がある。さらに、スペーサ４３の材質としてポリイミドを採用した場合には、耐熱性に優れる（加熱処理過程で形状を維持しやすい）という利点がある。 By using resin as the material of the spacer 43, there is an advantage that the thermal conductivity of the spacer 43 can be suppressed. Further, when polyimide is used as the material of the spacer 43, there is an advantage that the heat resistance is excellent (the shape can be easily maintained in the heat treatment process).
　ガス吸着体４４は、金属ゲッタ材を含有する。この場合、ガス吸着体４４の活性化により、ガス吸着体４４は真空空間５２中の気体を吸着できるため、真空空間５２の品質を低下させにくくできる。これにより、ガラスパネルユニット１００の断熱性を低下させにくくできる。 The gas adsorbent 44 contains a metal getter material. In this case, since the gas adsorbent 44 can adsorb the gas in the vacuum space 52 by activating the gas adsorbent 44, it is possible to prevent the quality of the vacuum space 52 from being deteriorated. This makes it difficult to reduce the heat insulating property of the glass panel unit 100.
　金属ゲッタ材は、気体分子を化学的に吸着することのできる金属表面を有する金属製のゲッタ材である。金属ゲッタ材として、例えば、Ｚｒ－Ａｌ系、及びＺｒ－Ｖ－Ｆｅ等のジルコニウム系ゲッタ材；並びにチタン系ゲッタ材が挙げられる。 The metal getter material is a metal getter material having a metal surface capable of chemically adsorbing gas molecules. Examples of the metal getter material include a zirconium-based getter material such as Zr-Al and Zr-V-Fe; and a titanium-based getter material.
　ガス吸着体４４は金属ゲッタ材を含有しているため、金属ゲッタ材は真空空間５２中に存在する気体を吸着することができる。これにより、真空空間５２内で熱伝達を生じにくくすることができる。真空空間５２中の気体として、例えば、水蒸気、窒素、酸素、水素、及び二酸化炭素が挙げられる。 Since the gas adsorbent 44 contains a metal getter material, the metal getter material can adsorb the gas existing in the vacuum space 52. This makes it difficult for heat transfer to occur in the vacuum space 52. Examples of the gas in the vacuum space 52 include water vapor, nitrogen, oxygen, hydrogen, and carbon dioxide.
　また、金属ゲッタ材は、その活性化前において、金属表面に気体分子を吸着（化学吸着）していてもよい。このように金属ゲッタ材の金属表面に気体分子が吸着されていても、この気体分子を、活性化の際に、金属ゲッタ材の内部に拡散させることができる。 Further, the metal getter material may adsorb (chemically adsorb) gas molecules on the metal surface before its activation. Even if gas molecules are adsorbed on the metal surface of the metal getter material in this way, the gas molecules can be diffused inside the metal getter material at the time of activation.
　ガラスパネルユニット１００は、上記の通り、蓋体１６を備える。蓋体１６は、本体部１０の外側にある。つまり、厚み方向Ｄ１において、本体部１０と、第１枠体１７と、蓋体１６とが、この順で配置されている。蓋体１６の平面形状は、厚み方向Ｄ１で本体部１０を見た平面視において、第１ガラス板１よりも小さく、排気孔５０よりも大きい。このため、第１枠体１７が第１ガラス板１と蓋体１６とを気密に接合することにより、真空空間５２を確実に封止することができる。蓋体１６は、本実施形態では板状に形成されているが（図１参照）、半球状等の任意の形状に形成されていてもよい。 The glass panel unit 100 includes a lid 16 as described above. The lid 16 is on the outside of the main body 10. That is, in the thickness direction D1, the main body 10, the first frame 17, and the lid 16 are arranged in this order. The planar shape of the lid 16 is smaller than the first glass plate 1 and larger than the exhaust hole 50 in a plan view of the main body 10 in the thickness direction D1. Therefore, the vacuum space 52 can be reliably sealed by the first frame body 17 airtightly joining the first glass plate 1 and the lid body 16. Although the lid 16 is formed in a plate shape in the present embodiment (see FIG. 1), the lid body 16 may be formed in any shape such as a hemisphere.
　蓋体１６は、図３のように、蓋体本体部１６ａと、接合部１６ｂとを有する。本実施形態では、蓋体本体部１６ａと接合部１６ｂが一体となって蓋体１６を構成する。 As shown in FIG. 3, the lid body 16 has a lid body main body portion 16a and a joint portion 16b. In the present embodiment, the lid body 16a and the joint 16b are integrated to form the lid 16.
　蓋体本体部１６ａは、蓋体１６の主な外形状を構成する部分である。蓋体本体部１６ａは排気孔５０を封止できる剛性を有する。このような蓋体本体部１６ａを構成する材料として、例えば、金属等が挙げられる。 The lid body 16a is a part that constitutes the main outer shape of the lid 16. The lid body 16a has a rigidity capable of sealing the exhaust hole 50. Examples of the material constituting such a lid body 16a include metal and the like.
　接合部１６ｂは、蓋体１６のうち、第１枠体１７と接合する部分である。蓋体１６と第１枠体１７とを接合させるため、排気孔５０と対向する蓋体本体部１６ａの表面に、ガラスコート等の表面処理を施して形成された部分が接合部１６ｂとなる。蓋体１６が接合部１６ｂを備えることで、蓋体１６と第１枠体１７との接合をより強くすることができる。これにより、蓋体１６と第１枠体１７とで排気孔５０をより確実に封止することができる。 The joint portion 16b is a portion of the lid body 16 that is joined to the first frame body 17. In order to join the lid 16 and the first frame 17, a portion formed by subjecting a surface treatment such as a glass coat to the surface of the lid main body 16a facing the exhaust hole 50 becomes the joint 16b. When the lid body 16 includes the joint portion 16b, the joint between the lid body 16 and the first frame body 17 can be strengthened. As a result, the exhaust hole 50 can be more reliably sealed between the lid body 16 and the first frame body 17.
　また、蓋体本体部１６ａの表面にガラスコートが施されている場合、接合部１６ｂはガラスを含む。第１枠体１７がガラスを含む場合、第１枠体１７は、ガラスを含む接合部１６ｂと、より強く接合しやすい。これにより、蓋体１６と第１枠体１７とで排気孔５０をより確実に封止することができる。 Further, when the surface of the lid body 16a is coated with glass, the joint 16b contains glass. When the first frame body 17 contains glass, the first frame body 17 is more likely to be strongly bonded to the joint portion 16b containing glass. As a result, the exhaust hole 50 can be more reliably sealed between the lid body 16 and the first frame body 17.
　ガラスパネルユニット１００は、上記の通り、第１枠体１７を備える。第１枠体１７は、排気孔５０の周縁を囲んで本体部１０（具体的には、第１ガラス板１）と蓋体１６とを気密に接合する。このような第１枠体１７は、枠状の封着材（第１封着材）である後述の第１周壁１７０からなる。すなわち、第１枠体１７は、第１封着材を溶融硬化させた部位である。第１封着材は、所定の軟化点を有するガラスフリットを含有する。第１封着材は、例えば、ガラスフリットのみからなる。ガラスフリットは溶融硬化することで、本体部１０、具体的には第１ガラス板１と、蓋体１６とを接合できればよく、任意のガラスフリットを採用できる。ガラスフリットは、例えば、低融点ガラスフリットである。低融点ガラスフリットの一例は、Ｖ－Ｔｅ－Ａｇ系ガラスフリットである。第１封着材の軟化点は、第２封着材よりも高いことが好ましい。この場合、後述の溶融工程で第２封着材が溶融する際に、第１封着材は溶融しにくくなるため、後述の隙間１８を塞ぎにくくすることができる。これにより、排気孔５０及び後述の隙間１８を、真空空間５２を作製するための排気路として利用できる。第１封着材の軟化点は、後述の溶融温度Ｔｍよりも高いことが好ましい。第１封着材の軟化点は、例えば、３３０℃である。 As described above, the glass panel unit 100 includes the first frame body 17. The first frame body 17 surrounds the peripheral edge of the exhaust hole 50 and airtightly joins the main body portion 10 (specifically, the first glass plate 1) and the lid body 16. Such a first frame body 17 is composed of a first peripheral wall 170, which will be described later, which is a frame-shaped sealing material (first sealing material). That is, the first frame body 17 is a portion where the first sealing material is melt-hardened. The first sealing material contains a glass frit having a predetermined softening point. The first sealing material consists of, for example, only glass frit. Any glass frit can be adopted as long as the main body 10, specifically the first glass plate 1, and the lid 16 can be joined by melting and curing the glass frit. The glass frit is, for example, a low melting point glass frit. An example of a low melting point glass frit is a V-Te-Ag glass frit. The softening point of the first sealing material is preferably higher than that of the second sealing material. In this case, when the second sealing material is melted in the melting step described later, the first sealing material is less likely to melt, so that the gap 18 described later can be less likely to be closed. As a result, the exhaust hole 50 and the gap 18 described later can be used as an exhaust path for creating the vacuum space 52. The softening point of the first sealing material is preferably higher than the melting temperature Tm described later. The softening point of the first sealing material is, for example, 330 ° C.
　第１枠体１７は、厚み方向Ｄ１で本体部１０を見た平面視で、途切れることなく排気孔５０の周縁を囲んでいる（図２参照）。本実施形態では、第１枠体１７の平面形状は環状であるが、排気孔５０の周縁を囲めば、第１枠体１７の平面形状は特に限定されない。第１枠体１７の平面形状の他例として、楕円形、並びに三角形及び四角形等の多角形が挙げられる。また、第１枠体１７は、接合部１６ｂと本体部１０とが対向し合う面のうち、排気孔５０と重なる部分を除く面同士を全体にわたって接合してもよい。 The first frame body 17 surrounds the peripheral edge of the exhaust hole 50 without interruption in a plan view of the main body 10 in the thickness direction D1 (see FIG. 2). In the present embodiment, the planar shape of the first frame 17 is annular, but the planar shape of the first frame 17 is not particularly limited as long as it surrounds the peripheral edge of the exhaust hole 50. Other examples of the planar shape of the first frame body 17 include an ellipse and a polygon such as a triangle and a quadrangle. Further, the first frame body 17 may be joined over the entire surface of the surfaces where the joint portion 16b and the main body portion 10 face each other, except for the portion overlapping the exhaust hole 50.
　蓋体１６と本体部１０とを第１枠体１７が接合することで、この第１枠体１７は、第１及び第２ガラス板１、２の間に形成された真空空間５２内にないため、第１枠体１７による熱伝達が真空空間５２内で生じない。このため、真空空間５２内で熱伝達を生じにくくすることができる。また、第１枠体１７が本体部１０と蓋体１６とを気密に接合することで、第１枠体１７と蓋体１６とで排気孔５０を封止することができる。 The first frame body 17 joins the lid body 16 and the main body portion 10, so that the first frame body 17 is not in the vacuum space 52 formed between the first and second glass plates 1 and 2. Therefore, heat transfer by the first frame body 17 does not occur in the vacuum space 52. Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space 52. Further, the first frame body 17 airtightly joins the main body portion 10 and the lid body 16, so that the exhaust hole 50 can be sealed by the first frame body 17 and the lid body 16.
　上記説明のガラスパネルユニット１００は、優れた断熱性を有し、かつ、取り扱いが容易である。このため、窓ガラスなどに良好に使用できる。また、例えば、冷蔵庫や冷凍庫の扉部分に、ガラスパネルユニット１００を配置することで、高い断熱性を活かして冷蔵庫や冷凍庫の機能を妨げることなく、内部の状態を確認することができるようになるなど、家庭用もしくは業務用の用途が期待できる。 The glass panel unit 100 described above has excellent heat insulating properties and is easy to handle. Therefore, it can be satisfactorily used for window glass and the like. Further, for example, by arranging the glass panel unit 100 on the door portion of the refrigerator or freezer, it becomes possible to check the internal state without interfering with the function of the refrigerator or freezer by utilizing the high heat insulating property. It can be expected to be used for home or business use.
　＜ガラスパネルユニットの製造方法＞
　次に、本実施形態に係るガラスパネルユニット１００の製造方法（以下、単に製造方法（Ｍ）という場合がある）を図４～図１１を参照して説明する。製造方法（Ｍ）は、ガラスパネルユニット１００を製造するための方法である。このため、製造方法（Ｍ）は、ガラスパネルユニット１００の説明を参照することができる。 <Manufacturing method of glass panel unit>
Next, a manufacturing method of the glass panel unit 100 according to the present embodiment (hereinafter, may be simply referred to as a manufacturing method (M)) will be described with reference to FIGS. 4 to 11. The manufacturing method (M) is a method for manufacturing the glass panel unit 100. Therefore, for the manufacturing method (M), the description of the glass panel unit 100 can be referred to.
　製造方法（Ｍ）は、準備工程（図４～図６参照）と、溶融工程（図７参照）と、排気工程（図７～図９参照）と、封止工程（図１０参照）と、活性化工程（図１１参照）とを含む。 The manufacturing method (M) includes a preparation step (see FIGS. 4 to 6), a melting step (see FIG. 7), an exhaust step (see FIGS. 7 to 9), and a sealing step (see FIG. 10). It includes an activation step (see FIG. 11).
　準備工程は、図６のような組立て品８１を用意する工程である。組立て品８１は、図１のようなガラスパネルユニットを作製するための中間生成物である。 The preparation process is a process of preparing the assembled product 81 as shown in FIG. Assembly 81 is an intermediate product for making the glass panel unit as shown in FIG.
　組立て品８１は、本体部８１０と、第１周壁１７０と、蓋体１６と、隙間１８と、を備える（図６参照）。 The assembled product 81 includes a main body portion 810, a first peripheral wall 170, a lid body 16, and a gap 18 (see FIG. 6).
　本体部８１０は、図６のように組立て品８１の本体（組立て品本体）を構成する部分であって、組立て品８１の主な外形状を構成する。しかも本体部８１０は、蓋体１６及び第１周壁１７０以外の部分である。このような本体部８１０は、第１ガラス板１と、第２ガラス板２と、第２周壁４１０と、内部空間５１０と、複数のスペーサ４３と、ガス吸着体４４と、排気孔５０とを備える。本体部８１０の厚み方向Ｄ１で組立て品８１を見た平面視において、本体部８１０の平面形状は、蓋体１６よりも大きい（図６参照）。 As shown in FIG. 6, the main body portion 810 is a part that constitutes the main body (assembled product main body) of the assembled product 81, and constitutes the main outer shape of the assembled product 81. Moreover, the main body portion 810 is a portion other than the lid body 16 and the first peripheral wall 170. Such a main body 810 includes a first glass plate 1, a second glass plate 2, a second peripheral wall 410, an internal space 510, a plurality of spacers 43, a gas adsorbent 44, and an exhaust hole 50. Be prepared. In a plan view of the assembled product 81 in the thickness direction D1 of the main body 810, the plan shape of the main body 810 is larger than that of the lid 16 (see FIG. 6).
　組立て品８１は、基本的にガラスパネルユニット１００と同じ構造を有する。具体的には、組立て品８１では、内部空間５１０が排気されていなく、第１周壁１７０と第２周壁４１０とが溶融硬化されていなく、ガス吸着体４４が活性化していない。 The assembled product 81 basically has the same structure as the glass panel unit 100. Specifically, in the assembled product 81, the internal space 510 is not exhausted, the first peripheral wall 170 and the second peripheral wall 410 are not melt-hardened, and the gas adsorbent 44 is not activated.
　準備工程は、本体部８１０を作製する本体部作製工程を含む。本体部作製工程は、本体部８１０を作製するために、第１ガラス板１と、第２ガラス板２と、排気孔５０と、凹部２ａと、第２周壁４１０と、複数のスペーサ４３と、ガス吸着体４４と、内部空間５１０と、を作成する工程である。本体部作製工程は、第１～第７工程を有する。なお、第２～第６工程の順番は、適宜変更してもよい。 The preparation process includes a main body manufacturing step for manufacturing the main body 810. In the main body manufacturing step, in order to manufacture the main body 810, the first glass plate 1, the second glass plate 2, the exhaust hole 50, the recess 2a, the second peripheral wall 410, and the plurality of spacers 43 are used. This is a step of creating the gas adsorbent 44 and the internal space 510. The main body manufacturing process includes the first to seventh steps. The order of the second to sixth steps may be changed as appropriate.
　第１工程は、第１ガラス板１及び第２ガラス板２を形成する工程（ガラス板形成工程）である。例えば、第１工程では、第１ガラス板１及び第２ガラス板２を作製する。また、第１工程では、必要に応じて、第１ガラス板１及び第２ガラス板２を洗浄する。 The first step is a step of forming the first glass plate 1 and the second glass plate 2 (glass plate forming step). For example, in the first step, the first glass plate 1 and the second glass plate 2 are manufactured. Further, in the first step, the first glass plate 1 and the second glass plate 2 are washed as needed.
　第２工程は、排気孔５０を形成する工程（排気孔形成工程）である。第２工程では、図４のように、第１ガラス板１に、排気孔５０を形成する。また、第２工程では、必要に応じて、第１ガラス板１を洗浄する。 The second step is a step of forming the exhaust hole 50 (exhaust hole forming step). In the second step, as shown in FIG. 4, an exhaust hole 50 is formed in the first glass plate 1. Further, in the second step, the first glass plate 1 is washed if necessary.
　第３工程は、凹部２ａを形成する工程（凹部形成工程）である。第３工程では、図４のように、第２ガラス板２に凹部２ａを形成する。具体的には凹部２ａは、対向面２２の一部が厚み方向Ｄ１と平行な方向に凹むようにして形成される。また、第３工程では、必要に応じて、第２ガラス板２を洗浄する。 The third step is a step of forming the recess 2a (recess forming step). In the third step, as shown in FIG. 4, a recess 2a is formed in the second glass plate 2. Specifically, the recess 2a is formed so that a part of the facing surface 22 is recessed in a direction parallel to the thickness direction D1. Further, in the third step, the second glass plate 2 is washed if necessary.
　第４工程は、スペーサ４３を形成する工程（スペーサ形成工程）である。第４工程では、複数のスペーサ４３を予め形成しておき、チップマウンタなどを利用して、複数のスペーサ４３を、第２ガラス板２の一表面（対向面）２２において、間隔を空けて配置する。複数のスペーサ４３は、図１のようなガラスパネルユニット１００における第１及び第２ガラス板１，２間の間隔を所定間隔に維持するために用いられる。このようなスペーサ４３を構成する材料として、例えば、樹脂等が挙げられる。 The fourth step is a step of forming the spacer 43 (spacer forming step). In the fourth step, a plurality of spacers 43 are formed in advance, and the plurality of spacers 43 are arranged at intervals on one surface (opposing surface) 22 of the second glass plate 2 by using a chip mounter or the like. To do. The plurality of spacers 43 are used to maintain the distance between the first and second glass plates 1 and 2 in the glass panel unit 100 as shown in FIG. 1 at a predetermined distance. Examples of the material constituting such a spacer 43 include resin and the like.
　本実施形態の第４工程では、上記の通り、スペーサ４３を予め形成して第２ガラス板２に配置しているが、周知の薄膜形成技術を利用して複数のスペーサ４３を第２ガラス板２に形成してもよい。また、スペーサ４３が樹脂を含む場合、複数のスペーサ４３は、上記の形成方法と異なる方法として、フォトリソグラフィ技術及びエッチング技術を利用して形成されていてもよい。この場合、複数のスペーサ４３は、光硬化性材料などを用いて形成することができる。 In the fourth step of the present embodiment, as described above, the spacer 43 is formed in advance and arranged on the second glass plate 2, but a plurality of spacers 43 are formed on the second glass plate 2 by using a well-known thin film forming technique. It may be formed in 2. When the spacer 43 contains a resin, the plurality of spacers 43 may be formed by using a photolithography technique and an etching technique as a method different from the above-mentioned forming method. In this case, the plurality of spacers 43 can be formed by using a photocurable material or the like.
　なお、スペーサ４３の大きさ、スペーサ４３の数、スペーサ４３の間隔、スペーサ４３の配置パターンは、適宜選択することができる。各スペーサ４３は、上記所定間隔とほぼ等しい高さを有する円柱状である。例えば、スペーサ４３は、直径が１ｍｍ、高さが１００μｍである。なお、各スペーサ４３は、角柱状や球状などの所望の形状であってもよい。 The size of the spacer 43, the number of spacers 43, the spacing of the spacers 43, and the arrangement pattern of the spacers 43 can be appropriately selected. Each spacer 43 is a columnar shape having a height substantially equal to the predetermined interval. For example, the spacer 43 has a diameter of 1 mm and a height of 100 μm. In addition, each spacer 43 may have a desired shape such as a prismatic shape or a spherical shape.
　第５工程は、ガス吸着体４４を形成する工程（ガス吸着体形成工程）である。第５工程では、チップマウンタなどを利用して、ガス吸着体４４を凹部２ａ内に配置する。 The fifth step is a step of forming the gas adsorbent 44 (gas adsorbent forming step). In the fifth step, the gas adsorbent 44 is arranged in the recess 2a by using a chip mounter or the like.
　第６工程は、第２周壁４１０を形成する工程（第２周壁形成工程）である。第６工程では、ディスペンサなどを利用して、第２封着材を第２ガラス板２の第２周縁部２３に塗布し、その後第２封着材を乾燥させて第２周壁４１０を形成する（図４参照）。第２周壁４１０は、第２枠体４１を作製するための中間体である。 The sixth step is a step of forming the second peripheral wall 410 (second peripheral wall forming step). In the sixth step, the second sealing material is applied to the second peripheral edge portion 23 of the second glass plate 2 using a dispenser or the like, and then the second sealing material is dried to form the second peripheral wall 410. (See FIG. 4). The second peripheral wall 410 is an intermediate for producing the second frame body 41.
　第１工程から第６工程が終了することで、図４のような第２ガラス板２が得られる。この第２ガラス板２には、凹部２ａと、第２周壁４１０と、内部空間５１０と、複数のスペーサ４３と、ガス吸着体４４とが形成されている。 By completing the first to sixth steps, the second glass plate 2 as shown in FIG. 4 can be obtained. The second glass plate 2 is formed with a recess 2a, a second peripheral wall 410, an internal space 510, a plurality of spacers 43, and a gas adsorbent 44.
　第７工程は、第１ガラス板１と第２ガラス板２とを配置する工程（配置工程）である。第７工程では、図４のように、第１ガラス板１と第２ガラス板２とは、互いに平行かつ対向するように配置される。これにより、第１ガラス板１と第２ガラス板２と第２周壁４１０とで囲まれた内部空間５１０が形成される。なお、第７工程の際、低放射膜４５を第２ガラス板２に対向させて第１ガラス板１を配置させる。 The seventh step is a step (placement step) of arranging the first glass plate 1 and the second glass plate 2. In the seventh step, as shown in FIG. 4, the first glass plate 1 and the second glass plate 2 are arranged so as to be parallel to each other and face each other. As a result, an internal space 510 surrounded by the first glass plate 1, the second glass plate 2, and the second peripheral wall 410 is formed. In the seventh step, the low emissivity film 45 is opposed to the second glass plate 2 to arrange the first glass plate 1.
　上述した本体部作製工程によって、本体部８１０が得られる。そして、本体部作製工程の後に、第８～第１０工程を行うことで、組立て品８１が得られる。なお、第８～第１０工程の順は、適宜変更できる。 The main body 810 is obtained by the main body manufacturing process described above. Then, the assembled product 81 is obtained by performing the 8th to 10th steps after the main body manufacturing step. The order of the 8th to 10th steps can be changed as appropriate.
　第８工程は、蓋体１６を形成する工程（蓋体形成工程）である。第８工程では、蓋体１６のうち、第１周壁１７０に対向する面にガラスコート等の表面処理を施す。このようにして表面処理が施された部分を接合部１６ｂとする。 The eighth step is a step of forming the lid 16 (lid forming step). In the eighth step, the surface of the lid 16 facing the first peripheral wall 170 is subjected to surface treatment such as glass coating. The portion subjected to the surface treatment in this way is referred to as a joint portion 16b.
　第９工程は、第１周壁１７０を形成する工程（第１周壁形成工程）である。第９工程では、ディスペンサなどを利用して、第１封着材を第１ガラス板１の外面に塗布して第１周壁１７０を形成する。この第１周壁１７０は、一部が開口した環状（たとえばＣ字状）の形状を有する（図５参照）。この一部が開口した部分が隙間１８となる。第９工程では、図５のように、第１ガラス板１の外面上で排気孔５０の周縁から離れた位置で排気孔５０を囲むようにして第１周壁１７０が形成される。第１周壁１７０は、第１枠体１７を作製するための中間体である。 The ninth step is a step of forming the first peripheral wall 170 (first peripheral wall forming step). In the ninth step, the first sealing material is applied to the outer surface of the first glass plate 1 by using a dispenser or the like to form the first peripheral wall 170. The first peripheral wall 170 has an annular (for example, C-shaped) shape with a part of opening (see FIG. 5). The portion where this part is opened becomes the gap 18. In the ninth step, as shown in FIG. 5, the first peripheral wall 170 is formed so as to surround the exhaust hole 50 on the outer surface of the first glass plate 1 at a position away from the peripheral edge of the exhaust hole 50. The first peripheral wall 170 is an intermediate for producing the first frame body 17.
　第１０工程は、本体部８１０に蓋体１６を配置させる工程である（蓋体配置工程）。第１０工程では、接合部１６ｂを第１ガラス板１及び第１周壁１７０に対向させて蓋体１６を配置する。これにより、隙間１８は、本体部８１０と蓋体１６との間で、外部空間と排気孔とを繋ぐ。このため、隙間１８は、排気孔５０を介して内部空間５１０と外部空間とを繋ぐ。 The tenth step is a step of arranging the lid 16 on the main body 810 (lid arranging step). In the tenth step, the lid 16 is arranged so that the joint portion 16b faces the first glass plate 1 and the first peripheral wall 170. As a result, the gap 18 connects the external space and the exhaust hole between the main body 810 and the lid 16. Therefore, the gap 18 connects the internal space 510 and the external space via the exhaust hole 50.
　上述した第８～第１０工程を行うことで、図６のような組立て品８１が得られる。組立て品８１の作製後、溶融工程と、排気工程と、封止工程と、活性化工程とが実行される。 By performing the 8th to 10th steps described above, the assembled product 81 as shown in FIG. 6 can be obtained. After the assembly 81 is manufactured, a melting step, an exhaust step, a sealing step, and an activation step are executed.
　溶融工程は、加熱により第２周壁４１０を溶融させて第１ガラス板１と第２ガラス板２とを気密に接合させる工程である。溶融工程中、第２周壁４１０を構成する第２封着材が溶融される。これにより、溶融した第２周壁４１０は第１ガラス板１と第２ガラス板２とに接合する。 The melting step is a step of melting the second peripheral wall 410 by heating and airtightly joining the first glass plate 1 and the second glass plate 2. During the melting process, the second sealing material constituting the second peripheral wall 410 is melted. As a result, the molten second peripheral wall 410 is joined to the first glass plate 1 and the second glass plate 2.
　溶融工程を行うにあたって、溶融工程の温度（溶融温度）Ｔｍは、第２封着材の軟化点以上の温度に選択される。第２封着材の軟化点は、特に限定されないが、例えば、２６０℃～２７０℃である。この場合、溶融温度Ｔｍは、例えば、３００℃に選択される。 In performing the melting step, the temperature (melting temperature) Tm of the melting step is selected to be a temperature equal to or higher than the softening point of the second sealing material. The softening point of the second sealing material is not particularly limited, but is, for example, 260 ° C to 270 ° C. In this case, the melting temperature Tm is selected, for example, 300 ° C.
　第２周壁４１０の溶融後、溶融工程中の温度が第２封着材の軟化点よりも低くなると、溶融した第２周壁４１０が硬化して第２枠体４１が形成される。これにより、図８のような仕掛品８が得られる。仕掛品８は、ガラスパネルユニット１００を作製するための中間体である。すなわち、製造方法（Ｍ）において、仕掛品８は、組立て品８１からガラスパネルユニット１００を製造する過程の途中段階で得られる物品である。仕掛品８は、基本的に組立て品８１と同じ構造を有する。図８に示す仕掛品８では、内部空間５１０の排気が途中であり、第１周壁１７０が溶融しておらず、ガス吸着体４４が活性化されていない。 After the second peripheral wall 410 is melted, when the temperature during the melting process becomes lower than the softening point of the second sealing material, the melted second peripheral wall 410 is hardened to form the second frame 41. As a result, the work-in-process 8 as shown in FIG. 8 is obtained. The work-in-process 8 is an intermediate for manufacturing the glass panel unit 100. That is, in the manufacturing method (M), the work-in-process 8 is an article obtained in the middle of the process of manufacturing the glass panel unit 100 from the assembled product 81. The work-in-process 8 basically has the same structure as the assembled product 81. In the work-in-process 8 shown in FIG. 8, the exhaust of the internal space 510 is in the middle, the first peripheral wall 170 is not melted, and the gas adsorbent 44 is not activated.
　本実施形態では、第２周壁４１０の溶融後、排気工程、及び封止工程が行われる。 In the present embodiment, after melting the second peripheral wall 410, an exhaust step and a sealing step are performed.
　排気工程は、隙間１８及び排気孔５０を介して内部空間５１０を排気することで真空空間５２を形成する工程である。排気工程は、例えば、真空空間５２の真空度が０．１Ｐａ以下となるようにして行われる。 The exhaust step is a step of forming a vacuum space 52 by exhausting the internal space 510 through the gap 18 and the exhaust hole 50. The exhaust step is performed so that, for example, the degree of vacuum in the vacuum space 52 is 0.1 Pa or less.
　また、第２周壁４１０が溶融していれば、溶融工程の途中で排気工程が開始されてもよい（図７参照）。あるいは、仕掛品８を溶融温度Ｔｍから封止工程の温度（封止温度）Ｔｓに冷却する途中で、排気工程が開始されてもよい。溶融温度Ｔｍから封止温度Ｔｓに冷却する際に、溶融した第２周壁４１０は硬化して第２枠体４１となる。 Further, if the second peripheral wall 410 is melted, the exhaust step may be started in the middle of the melting step (see FIG. 7). Alternatively, the exhaust step may be started in the middle of cooling the work-in-process 8 from the melting temperature Tm to the temperature (sealing temperature) Ts of the sealing step. When cooling from the melting temperature Tm to the sealing temperature Ts, the melted second peripheral wall 410 is cured to become the second frame 41.
　製造方法（Ｍ）では、真空空間５２の形成後、封止工程が行われる。この場合、真空空間５２の真空度を維持するために、封止工程は、排気工程の途中で行われる（図７参照）。ここで、封止工程は、局所加熱により第１周壁１７０を溶融させて隙間１８を塞ぎ、かつ本体部８１０と蓋体１６とを気密に接合させる工程である。 In the manufacturing method (M), a sealing step is performed after the vacuum space 52 is formed. In this case, in order to maintain the degree of vacuum in the vacuum space 52, the sealing step is performed in the middle of the exhaust step (see FIG. 7). Here, the sealing step is a step of melting the first peripheral wall 170 by local heating to close the gap 18 and airtightly joining the main body portion 810 and the lid body 16.
　本実施形態に係る排気工程と、封止工程とは、図９及び図１０のような装置を用いて実行される。この装置は、減圧機構７１と、加熱機構７２と、を備える。 The exhaust step and the sealing step according to the present embodiment are executed by using the devices shown in FIGS. 9 and 10. This device includes a decompression mechanism 71 and a heating mechanism 72.
　減圧機構７１は、内部空間７４と、押圧機構７３と、排気ヘッド７５と、排気ヘッド７５に繋がる接続部７５３を備える。また、減圧機構７１は、仕掛品８に形成された内部空間５１０を、隙間１８及び排気孔５０を通じて減圧し、かつ、減圧状態で維持するように構成されている。 The decompression mechanism 71 includes an internal space 74, a pressing mechanism 73, an exhaust head 75, and a connecting portion 753 connected to the exhaust head 75. Further, the decompression mechanism 71 is configured to decompress the internal space 510 formed in the work-in-process 8 through the gap 18 and the exhaust hole 50, and maintain the decompression state.
　内部空間７４は、排気ヘッド７５の下端と、排気ヘッド７５と接続部７５３とを繋ぐ箇所とに開口する。 The internal space 74 opens at the lower end of the exhaust head 75 and a portion connecting the exhaust head 75 and the connection portion 753.
　排気ヘッド７５は、内部空間７４内に蓋体１６を配置し、かつ押圧機構７３により蓋体１６を第１ガラス板１に向かって押し付けた状態で、仕掛品８の本体、具体的には第１ガラス板１に気密に押し当てられる。そして、排気ヘッド７５内の空気を、接続部７５３を通じて吸引すると（図９中の白抜き矢印参照）、隙間１８及び排気孔５０を通じて、内部空間５１０が排気される。なお、接続部７５３は、排気ヘッド７５と真空ポンプとの間を接続する。 The exhaust head 75 has a lid 16 arranged in the internal space 74, and the lid 16 is pressed toward the first glass plate 1 by the pressing mechanism 73, and the main body of the work in process 8, specifically, the first. 1 It is airtightly pressed against the glass plate 1. Then, when the air in the exhaust head 75 is sucked through the connecting portion 753 (see the white arrow in FIG. 9), the internal space 510 is exhausted through the gap 18 and the exhaust hole 50. The connection portion 753 connects between the exhaust head 75 and the vacuum pump.
　押圧機構７３は、内部空間７４に設けられている。押圧機構７３は、減圧機構７１によって真空空間５２を維持した状態で、蓋体１６を第１ガラス板１に向けて押し付けるように構成される。すなわち、蓋体１６は、押圧機構７３により、第１ガラス板１に向けて弾性的に押し付けられる。 The pressing mechanism 73 is provided in the internal space 74. The pressing mechanism 73 is configured to press the lid 16 toward the first glass plate 1 while the vacuum space 52 is maintained by the decompression mechanism 71. That is, the lid 16 is elastically pressed toward the first glass plate 1 by the pressing mechanism 73.
　次に加熱機構７２を作動させることで、封止工程が行われる。加熱機構７２は、厚み方向Ｄ１において、仕掛品８に対して排気ヘッド７５とは反対側に配置される（図１０参照）。加熱機構７２は、蓋体１６と、仕掛品８の本体との間にある第１周壁１７０を非接触で加熱するように構成されている。封止工程の際、仕掛品８の温度を封止温度Ｔｓに維持させながら、加熱機構７２で第１周壁１７０だけを加熱する。これにより、第１周壁１７０が溶融し、その後、押圧機構７３による弾性力により隙間１８を塞ぐと共に、溶融した第１周壁１７０で蓋体１６と仕掛品８の本体とを気密に接合する。封止温度Ｔｓは、例えば２５０℃である。 Next, the sealing process is performed by operating the heating mechanism 72. The heating mechanism 72 is arranged on the side opposite to the exhaust head 75 with respect to the work in process 8 in the thickness direction D1 (see FIG. 10). The heating mechanism 72 is configured to heat the first peripheral wall 170 between the lid 16 and the main body of the work-in-process 8 in a non-contact manner. During the sealing step, the heating mechanism 72 heats only the first peripheral wall 170 while maintaining the temperature of the work-in-process 8 at the sealing temperature Ts. As a result, the first peripheral wall 170 is melted, and then the gap 18 is closed by the elastic force of the pressing mechanism 73, and the lid 16 and the main body of the work-in-process 8 are airtightly joined by the melted first peripheral wall 170. The sealing temperature Ts is, for example, 250 ° C.
　加熱機構７２は、図１０のように照射器７２０を含む。照射器７２０は、第１及び第２ガラス板１、２を介して、第１周壁１７０に赤外線（近赤外線）を照射するように構成されている。第１周壁１７０に赤外線を照射すると、第１周壁１７０は加熱されて溶融する。そして、赤外線の照射を停止すると、溶融した第１周壁１７０が除熱により硬化することで第１枠体１７が形成される。第１枠体１７では隙間１８が塞がっており、蓋体１６と仕掛品８の本体とが第１枠体１７で気密に接合されている。 The heating mechanism 72 includes an irradiator 720 as shown in FIG. The irradiator 720 is configured to irradiate the first peripheral wall 170 with infrared rays (near infrared rays) via the first and second glass plates 1 and 2. When the first peripheral wall 170 is irradiated with infrared rays, the first peripheral wall 170 is heated and melted. Then, when the irradiation of infrared rays is stopped, the melted first peripheral wall 170 is hardened by heat removal to form the first frame body 17. The gap 18 is closed in the first frame body 17, and the lid body 16 and the main body of the work-in-process 8 are airtightly joined by the first frame body 17.
　封止工程中、加熱機構７２と押圧機構７３の両方を実行させることで、真空空間５２が維持されたまま、排気孔５０が第１枠体１７及び蓋体１６により封止される。排気孔５０を封止することで、排気ヘッド７５を取り外しても、真空空間５２を維持させることができる。排気ヘッド７５を取り外すにあたって、排気孔５０を第１枠体１７及び蓋体１６で封止させた後、真空ポンプを停止して排気工程を終了する。 By executing both the heating mechanism 72 and the pressing mechanism 73 during the sealing process, the exhaust hole 50 is sealed by the first frame body 17 and the lid body 16 while the vacuum space 52 is maintained. By sealing the exhaust hole 50, the vacuum space 52 can be maintained even if the exhaust head 75 is removed. When removing the exhaust head 75, the exhaust hole 50 is sealed with the first frame body 17 and the lid body 16, and then the vacuum pump is stopped to end the exhaust process.
　活性化工程は、局所加熱によりガス吸着体４４を活性化させる工程である。活性化工程中、ガス吸着体４４及びその周辺部分を除く仕掛品８全体の温度は、室温程度であってもよい。 The activation step is a step of activating the gas adsorbent 44 by local heating. During the activation step, the temperature of the entire work-in-process 8 excluding the gas adsorbent 44 and its peripheral portion may be about room temperature.
　活性化工程では、真空空間５２内のガス吸着体４４が、図１１のような局所加熱機構６によって、所定の活性化温度に至るまで局所加熱される。局所加熱機構６は、厚み方向Ｄ１において、ガス吸着体４４に対して第２ガラス板２とは反対側で、かつ第１ガラス板１の外側に配置されている（図１１参照）。あるいは、局所加熱機構６は、厚み方向Ｄ１において、ガス吸着体４４に対して第１ガラス板１とは反対側で、かつ第２ガラス板２の外側に配置されていてもよい。 In the activation step, the gas adsorbent 44 in the vacuum space 52 is locally heated to a predetermined activation temperature by the local heating mechanism 6 as shown in FIG. The local heating mechanism 6 is arranged on the side opposite to the second glass plate 2 with respect to the gas adsorbent 44 in the thickness direction D1 and outside the first glass plate 1 (see FIG. 11). Alternatively, the local heating mechanism 6 may be arranged on the side opposite to the first glass plate 1 with respect to the gas adsorbent 44 in the thickness direction D1 and outside the second glass plate 2.
　ガス吸着体４４の活性化温度は、金属ゲッタ材の種類に応じて任意に設定される。活性化温度は、例えば、溶融温度Ｔｍよりも高い温度である。この場合、ガス吸着体４４の活性化を起こしにくくして溶融工程を行うことができる。すなわち、溶融工程でガス吸着体４４の活性化を起こしにくくできる。また、活性化工程中、ガス吸着体４４は局所加熱されるため、第１及び第２枠体１７、４１は再溶融しない。 The activation temperature of the gas adsorbent 44 is arbitrarily set according to the type of metal getter material. The activation temperature is, for example, a temperature higher than the melting temperature Tm. In this case, the melting step can be performed by making it difficult for the gas adsorbent 44 to be activated. That is, it is possible to make it difficult for the gas adsorbent 44 to be activated in the melting step. Further, since the gas adsorbent 44 is locally heated during the activation step, the first and second frame bodies 17 and 41 are not remelted.
　局所加熱機構６は、照射器６１を含む。照射器６１は、ガス吸着体４４にレーザーを出射するように構成された機器であって、光源を含む。照射器６１は、図１１のように、第１ガラス板１を介してガス吸着体４４にレーザーを照射することができる。あるいは、照射器６１は、第２ガラス板２を介してガス吸着体４４にレーザーを照射してもよい。ガス吸着体４４にレーザー照射することで、ガス吸着体４４は非接触で局所加熱される。ガス吸着体４４をレーザー照射で局所加熱することで、ガス吸着体４４の加熱時間を短縮できる。このため、ガス吸着体４４を活性化させるための作業効率を向上させることができる。 The local heating mechanism 6 includes an irradiator 61. The irradiator 61 is a device configured to emit a laser to the gas adsorbent 44, and includes a light source. As shown in FIG. 11, the irradiator 61 can irradiate the gas adsorbent 44 with a laser via the first glass plate 1. Alternatively, the irradiator 61 may irradiate the gas adsorbent 44 with a laser via the second glass plate 2. By irradiating the gas adsorbent 44 with a laser, the gas adsorbent 44 is locally heated in a non-contact manner. By locally heating the gas adsorbent 44 by laser irradiation, the heating time of the gas adsorbent 44 can be shortened. Therefore, the work efficiency for activating the gas adsorbent 44 can be improved.
　ガス吸着体４４は金属ゲッタ材を含有しているため、金属ゲッタ材を活性化させることで、金属ゲッタ材は、真空空間５２内に存在する気体を吸着することができる。真空空間５２内に存在する気体として、例えば、水蒸気、窒素、酸素、水素、及び二酸化炭素が挙げられる。 Since the gas adsorbent 44 contains a metal getter material, the metal getter material can adsorb the gas existing in the vacuum space 52 by activating the metal getter material. Examples of the gas existing in the vacuum space 52 include water vapor, nitrogen, oxygen, hydrogen, and carbon dioxide.
　また、ガス吸着体４４がタブレット型の金属ゲッタ材を含む場合、タブレット型金属ゲッタ材を誘導加熱で活性化させる。具体的には、タブレット型金属ゲッタ材は、照射器６１からのレーザーにより誘導加熱される。このようなタブレット型金属ゲッタ材の誘導加熱により、ガス吸着体４４は局所加熱される。タブレット型金属ゲッタ材を誘導加熱させる際、照射器６１からのレーザーを、第１ガラス板１を介してガス吸着体４４に照射してもよく、あるいは第２ガラス板２を介してガス吸着体４４に照射してもよい。 Further, when the gas adsorbent 44 contains a tablet-type metal getter material, the tablet-type metal getter material is activated by induction heating. Specifically, the tablet-type metal getter material is induced and heated by a laser from the irradiator 61. The gas adsorbent 44 is locally heated by such induction heating of the tablet-type metal getter material. When the tablet type metal getter material is induced and heated, the gas adsorbent 44 may be irradiated with the laser from the irradiator 61 via the first glass plate 1, or the gas adsorbent may be irradiated through the second glass plate 2. 44 may be irradiated.
　上記の活性化工程によりガス吸着体４４を活性化することで、図１のようなガラスパネルユニット１００が得られる。 By activating the gas adsorbent 44 by the above activation step, the glass panel unit 100 as shown in FIG. 1 can be obtained.
　上記の製造方法（Ｍ）によって製造されたガラスパネルユニット１００は、優れた断熱性を有し、かつ、取り扱いが容易である。このため、ガラスパネルユニット１００は窓ガラスなどに良好に使用できる。また、例えば、冷蔵庫や冷凍庫の扉部分にガラスパネルユニット１００を配置することができる。この場合、ガラスパネルユニット１００の高い断熱性を活かして冷蔵庫や冷凍庫の機能を妨げることなく、内部の状態を確認することができるようになるなど、家庭用もしくは業務用の用途が期待できる。 The glass panel unit 100 manufactured by the above manufacturing method (M) has excellent heat insulating properties and is easy to handle. Therefore, the glass panel unit 100 can be satisfactorily used for window glass and the like. Further, for example, the glass panel unit 100 can be arranged at the door portion of the refrigerator or freezer. In this case, it is expected that the glass panel unit 100 will be used for home or business use, for example, the internal state can be confirmed without interfering with the functions of the refrigerator and the freezer by utilizing the high heat insulating property.
　なお、上記したガラスパネルユニット１００の各構成や、ガラスパネルユニット１００を製造するための各工程は、適宜に設計変更が可能である。この設計変更の例を、変形例として以下に列挙する。 The design of each configuration of the above-mentioned glass panel unit 100 and each process for manufacturing the glass panel unit 100 can be appropriately changed. Examples of this design change are listed below as modification examples.
　＜変形例＞
　上記実施形態ではガラスパネルユニット１００の平面形状は四角形であるが、変形例ではガラスパネルユニット１００は円形等の任意の平面形状であってもよい。 <Modification example>
In the above embodiment, the plane shape of the glass panel unit 100 is quadrangular, but in the modified example, the glass panel unit 100 may have any plane shape such as a circle.
　上記実施形態では蓋体１６の平面形状は四角形であるが、変形例では蓋体１６は円形等の任意の平面形状であってもよい。 In the above embodiment, the planar shape of the lid 16 is quadrangular, but in the modified example, the lid 16 may have any planar shape such as a circle.
　上記実施形態では蓋体１６は板状の部材であるが、変形例で蓋体１６は半球状等の任意の形状を有する部材であってもよい。 In the above embodiment, the lid 16 is a plate-shaped member, but in a modified example, the lid 16 may be a member having an arbitrary shape such as a hemisphere.
　上記実施形態では第１ガラス板１は第２ガラス板２の平面形状を同じであるが、変形例では第１ガラス板１は第２ガラス板２の平面形状と異なっていてもよい。 In the above embodiment, the first glass plate 1 has the same planar shape as the second glass plate 2, but in the modified example, the first glass plate 1 may be different from the planar shape of the second glass plate 2.
　上記実施形態では、第４工程の際に複数のスペーサ４３を第２ガラス板２に配置しているが、変形例では複数のスペーサ４３を第１ガラス板１に配置してもよく、あるいは複数のスペーサ４３を第１ガラス板１と第２ガラス板２に割り当てて配置してもよい。したがって、複数のスペーサ４３は、第１ガラス板１と第２ガラス板２との少なくとも一方に配置することができる。 In the above embodiment, a plurality of spacers 43 are arranged on the second glass plate 2 in the fourth step, but in the modified example, a plurality of spacers 43 may be arranged on the first glass plate 1, or a plurality of spacers 43 may be arranged on the first glass plate 1. Spacer 43 may be assigned to the first glass plate 1 and the second glass plate 2 and arranged. Therefore, the plurality of spacers 43 can be arranged on at least one of the first glass plate 1 and the second glass plate 2.
　上記実施形態では、第５工程の際に、第２ガラス板２にガス吸着体４４を配置しているが、変形例では、ガス吸着体４４を第１ガラス板１に配置してもよく、あるいはガス吸着体４４を第１ガラス板１と第２ガラス板２の両方に配置してもよい。したがって、ガス吸着体４４は、第１ガラス板１と第２ガラス板２との少なくとも一方に配置することができる。 In the above embodiment, the gas adsorbent 44 is arranged on the second glass plate 2 in the fifth step, but in the modified example, the gas adsorbent 44 may be arranged on the first glass plate 1. Alternatively, the gas adsorbent 44 may be arranged on both the first glass plate 1 and the second glass plate 2. Therefore, the gas adsorbent 44 can be arranged on at least one of the first glass plate 1 and the second glass plate 2.
　上記実施形態では、第９工程の際に第１ガラス板１に第１封着材を塗布して第１周壁１７０を形成しているが、変形例では接合部１６ｂに第１封着材を塗布して第１周壁１７０を形成してもよい。 In the above embodiment, the first sealing material is applied to the first glass plate 1 to form the first peripheral wall 170 in the ninth step, but in the modified example, the first sealing material is applied to the joint portion 16b. It may be applied to form the first peripheral wall 170.
　上記実施形態では１つのガラスパネルユニット１００が１つのガス吸着体４４を備えているが、変形例では１つのガラスパネルユニット１００が２つ以上のガス吸着体４４を備えてもよい。この場合、全てのガス吸着体４４が真空空間５２内にある。 In the above embodiment, one glass panel unit 100 includes one gas adsorbent 44, but in a modified example, one glass panel unit 100 may include two or more gas adsorbents 44. In this case, all the gas adsorbents 44 are in the vacuum space 52.
　上記実施形態では排気孔５０は第１ガラス板１に形成されているが、変形例では排気孔５０は第２ガラス板２に形成されてもよい。したがって、第１ガラス板１及び第２ガラス板２のうち一方に排気孔５０を形成することができる。 In the above embodiment, the exhaust hole 50 is formed in the first glass plate 1, but in the modified example, the exhaust hole 50 may be formed in the second glass plate 2. Therefore, the exhaust hole 50 can be formed in one of the first glass plate 1 and the second glass plate 2.
　＜まとめ＞
　上記の実施形態及び変形例の通り、本開示は、下記の態様を含む。 <Summary>
As in the above embodiments and modifications, the present disclosure includes the following aspects.
　第１態様は、ガラスパネルユニット（１００）であって、本体部（１０）と、蓋体（１６）と、第１枠体（１７）と、を備える。本体部（１０）は、第１ガラス板（１）と、第２ガラス板（２）と、第２枠体（４１）と、真空空間（５２）と、ガス吸着体（４４）と、排気孔（５０）と、を備える。第２ガラス板（２）は、第１ガラス板（１）に対向する。第２枠体（４１）は、第１ガラス板（１）と第２ガラス板（２）との間にあり、第１ガラス板（１）と第２ガラス板（２）を気密に接合する。真空空間（５２）は、第１ガラス板（１）と第２ガラス板（２）と第２枠体（４１）とで囲まれている。ガス吸着体（４４）は、真空空間（５２）内にある。排気孔（５０）は、第１ガラス板（１）及び第２ガラス板（２）のうち一方に形成されている。蓋体（１６）は、本体部（１０）の外側にある。第１枠体（１７）は、排気孔（５０）の周縁を囲んで本体部（１０）と蓋体（１６）とを気密に接合する。 The first aspect is a glass panel unit (100), which includes a main body (10), a lid (16), and a first frame (17). The main body (10) includes a first glass plate (1), a second glass plate (2), a second frame body (41), a vacuum space (52), a gas adsorbent (44), and an exhaust gas. It comprises a hole (50). The second glass plate (2) faces the first glass plate (1). The second frame body (41) is located between the first glass plate (1) and the second glass plate (2), and airtightly joins the first glass plate (1) and the second glass plate (2). .. The vacuum space (52) is surrounded by a first glass plate (1), a second glass plate (2), and a second frame body (41). The gas adsorbent (44) is in the vacuum space (52). The exhaust hole (50) is formed in one of the first glass plate (1) and the second glass plate (2). The lid (16) is on the outside of the main body (10). The first frame body (17) surrounds the peripheral edge of the exhaust hole (50) and airtightly joins the main body portion (10) and the lid body (16).
　第１態様によれば、第１枠体（１７）は第１ガラス板（１）と第２ガラス板（２）との間の真空空間（５２）内にないため、第１枠体（１７）による熱伝達が真空空間（５２）内で生じない。このため、真空空間（５２）内で熱伝達を生じにくくすることができる。また、第１枠体（１７）が本体部（１０）と蓋体（１６）とを気密に接合することで、第１枠体（１７）と蓋体（１６）とで排気孔（５０）を封止することができる。 According to the first aspect, since the first frame body (17) is not in the vacuum space (52) between the first glass plate (1) and the second glass plate (2), the first frame body (17) ) Does not occur in the vacuum space (52). Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space (52). Further, the first frame body (17) airtightly joins the main body portion (10) and the lid body (16), so that the exhaust hole (50) is formed between the first frame body (17) and the lid body (16). Can be sealed.
　第２態様は、第１態様のガラスパネルユニット（１００）であって、蓋体（１６）は、蓋体本体部（１６ａ）と、接合部（１６ｂ）とを有する。蓋体本体部（１６ａ）は、蓋体（１６）の外形状を構成する。接合部（１６ｂ）は、第１枠体（１７）と接合する。 The second aspect is the glass panel unit (100) of the first aspect, and the lid body (16) has a lid body main body portion (16a) and a joint portion (16b). The lid body (16a) constitutes the outer shape of the lid (16). The joint portion (16b) is joined to the first frame body (17).
　第２態様によれば、第１枠体（１７）は第１ガラス板（１）と第２ガラス板（２）との間の真空空間（５２）内にないため、第１枠体（１７）による熱伝達が真空空間（５２）内で生じない。このため、真空空間（５２）内で熱伝達を生じにくくすることができる。また、第１枠体（１７）が本体部（１０）と蓋体（１６）とを気密に接合することで、第１枠体（１７）と蓋体（１６）とで排気孔（５０）を封止することができる。 According to the second aspect, since the first frame body (17) is not in the vacuum space (52) between the first glass plate (1) and the second glass plate (2), the first frame body (17) ) Does not occur in the vacuum space (52). Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space (52). Further, the first frame body (17) airtightly joins the main body portion (10) and the lid body (16), so that the exhaust hole (50) is formed between the first frame body (17) and the lid body (16). Can be sealed.
　第３態様は、第２態様のガラスパネルユニット（１００）であって、接合部（１６ｂ）は、蓋体（１６）のうち、第１枠体（１７）と接合する表面に表面処理された部分である。 The third aspect is the glass panel unit (100) of the second aspect, and the joint portion (16b) is surface-treated on the surface of the lid body (16) to be joined with the first frame body (17). It is a part.
　第３態様によれば、蓋体（１６）と第１枠体（１７）との接合をより強くすることができる。これにより、蓋体（１６）と第１枠体（１７）とで排気孔（５０）をより確実に封止することができる。 According to the third aspect, the joint between the lid body (16) and the first frame body (17) can be strengthened. As a result, the exhaust hole (50) can be more reliably sealed between the lid body (16) and the first frame body (17).
　第４態様は、第２又は第３態様のガラスパネルユニット（１００）であって、接合部（１６ｂ）は、ガラスを含む。 The fourth aspect is the glass panel unit (100) of the second or third aspect, and the joint portion (16b) includes glass.
　第４態様によれば、蓋体（１６）と第１枠体（１７）との接合をより強くすることができる。これにより、蓋体（１６）と第１枠体（１７）とで排気孔（５０）をより確実に封止することができる。 According to the fourth aspect, the joint between the lid body (16) and the first frame body (17) can be strengthened. As a result, the exhaust hole (50) can be more reliably sealed between the lid body (16) and the first frame body (17).
　第５態様は、ガラスパネルユニット（１００）の製造方法、すなわちガラスパネルユニット（１００）を製造する方法であって、準備工程と、溶融工程と、排気工程と、封止工程と、活性化工程と、を含む。前記準備工程は、組立て品（８１）を用意する工程である。組立て品（８１）は、本体部（８１０）と、蓋体（１６）と、第１周壁（１７０）と、隙間（１８）とを備える。本体部（８１０）は、第１ガラス板（１）と、第２ガラス板（２）と、第２周壁（４１０）と、内部空間（５１０）と、ガス吸着体（４４）と、排気孔（５０）と、を備える。第２ガラス板（２）は、第１ガラス板（１）に対向する。第２周壁（４１０）は、枠状であり、第１ガラス板（１）と第２ガラス板（２）との間にある。内部空間（５１０）は、第１ガラス板（１）と第２ガラス板（２）と第２周壁（４１０）とで囲まれている。ガス吸着体（４４）は、内部空間（５１０）内に配置されている。排気孔（５０）は、第１ガラス板（１）及び第２ガラス板（２）のうち一方に形成されている。蓋体（１６）は、本体部（８１０）の外側にある。第１周壁（１７０）は、その一部が開口した状態で、排気孔（５０）の周縁を囲み、かつ本体部（８１０）と蓋体（１６）との間にある。隙間（１８）は、第１周壁（１７０）の一部が開口した部分により構成され、かつ排気孔（５０）を介して内部空間（５１０）と外部空間とを繋ぐ。前記溶融工程は、第２周壁（４１０）を溶融させて第１ガラス板（１）と第２ガラス板（２）とを気密に接合させる工程である。前記排気工程は、隙間（１８）と排気孔（５０）とを介して内部空間（５１０）を排気させて真空空間（５２）とする工程である。前記封止工程は、局所加熱により第１周壁（１７０）を溶融させて隙間（１８）を塞ぎ、かつ本体部（８１０）と蓋体（１６）とを気密に接合させる工程である。前記活性化工程は、局所加熱によりガス吸着体（４４）を活性化させる工程である。 A fifth aspect is a method for manufacturing the glass panel unit (100), that is, a method for manufacturing the glass panel unit (100), which is a preparation step, a melting step, an exhaust step, a sealing step, and an activation step. And, including. The preparation step is a step of preparing the assembled product (81). The assembled product (81) includes a main body portion (810), a lid body (16), a first peripheral wall (170), and a gap (18). The main body (810) includes a first glass plate (1), a second glass plate (2), a second peripheral wall (410), an internal space (510), a gas adsorbent (44), and an exhaust hole. (50) and. The second glass plate (2) faces the first glass plate (1). The second peripheral wall (410) has a frame shape and is located between the first glass plate (1) and the second glass plate (2). The internal space (510) is surrounded by a first glass plate (1), a second glass plate (2), and a second peripheral wall (410). The gas adsorbent (44) is arranged in the internal space (510). The exhaust hole (50) is formed in one of the first glass plate (1) and the second glass plate (2). The lid (16) is on the outside of the main body (810). The first peripheral wall (170) surrounds the peripheral edge of the exhaust hole (50) with a part thereof opened, and is between the main body portion (810) and the lid (16). The gap (18) is formed by a portion of the first peripheral wall (170) that is partially opened, and connects the internal space (510) and the external space via an exhaust hole (50). The melting step is a step of melting the second peripheral wall (410) and airtightly joining the first glass plate (1) and the second glass plate (2). The exhaust step is a step of exhausting the internal space (510) through the gap (18) and the exhaust hole (50) to form a vacuum space (52). The sealing step is a step of melting the first peripheral wall (170) by local heating to close the gap (18) and airtightly joining the main body portion (810) and the lid (16). The activation step is a step of activating the gas adsorbent (44) by local heating.
　第５態様によれば、活性化工程後、第１周壁（１７０）からなる第１枠体は第１ガラス板（１）と第２ガラス板（２）との間の真空空間（５２）内にないため、前記第１枠体による熱伝達が真空空間（５２）内で生じない。このため、真空空間（５２）内で熱伝達を生じにくくすることができる。また、前記第１枠体が本体部（１０）と蓋体（１６）とを気密に接合することで、前記第１枠体と蓋体（１６）とで排気孔（５０）を封止することができる。 According to the fifth aspect, after the activation step, the first frame body composed of the first peripheral wall (170) is in the vacuum space (52) between the first glass plate (1) and the second glass plate (2). Therefore, heat transfer by the first frame does not occur in the vacuum space (52). Therefore, it is possible to make it difficult for heat transfer to occur in the vacuum space (52). Further, the first frame body airtightly joins the main body portion (10) and the lid body (16), so that the exhaust hole (50) is sealed between the first frame body and the lid body (16). be able to.
　１００　ガラスパネルユニット
　１０　　本体部
　１　　　第１ガラス板
　２　　　第２ガラス板
　１６　　蓋体
　１６ａ　蓋体本体部
　１６ｂ　接合部
　１７　　第１枠体
　１８　　隙間
　４１　　第２枠体
　４４　　ガス吸着体
　５０　　排気孔
　５２　　真空空間
　８１　　組立て品
　８１０　本体部
　１７０　第１周壁
　４１０　第２周壁
　５１０　内部空間

  100 Glass panel unit 10 Main body 1 1st glass plate 2 2nd glass plate 16 Lid body 16a Lid body main body 16b Joint 17 1st frame 18 Gap 41 2nd frame 44 Gas adsorbent 50 Exhaust hole 52 Vacuum space 81 Assembled product 810 Main body 170 1st peripheral wall 410 2nd peripheral wall 510 Internal space

Claims (5)

  1. 　本体部と、蓋体と、第１枠体と、を備え、
    　前記本体部は、
    　第１ガラス板と、
    　前記第１ガラス板に対向する第２ガラス板と、
    　前記第１ガラス板と前記第２ガラス板との間にあり、前記第１ガラス板と前記第２ガラス板を気密に接合する第２枠体と、
    　前記第１ガラス板と前記第２ガラス板と前記第２枠体とで囲まれた真空空間と、
    　前記真空空間内にあるガス吸着体と、
    　前記第１ガラス板及び前記第２ガラス板のうち一方に形成された排気孔と、
    　を備え、
    　前記蓋体は、前記本体部の外側にあり、
    　前記第１枠体は、前記排気孔の周縁を囲んで前記本体部と前記蓋体とを気密に接合する、
    　ガラスパネルユニット。     It includes a main body, a lid, and a first frame.
    The main body
    The first glass plate and
    A second glass plate facing the first glass plate and
    A second frame that is between the first glass plate and the second glass plate and airtightly joins the first glass plate and the second glass plate.
    A vacuum space surrounded by the first glass plate, the second glass plate, and the second frame body,
    The gas adsorbent in the vacuum space and
    An exhaust hole formed in one of the first glass plate and the second glass plate,
    With
    The lid is on the outside of the body and
    The first frame body surrounds the peripheral edge of the exhaust hole and airtightly joins the main body portion and the lid body.
    Glass panel unit.
  2. 　前記蓋体は、前記蓋体の外形状を構成する蓋体本体部と、前記第１枠体と接合する接合部と、を有する、
    　請求項１に記載のガラスパネルユニット。     The lid body has a lid body main body portion that constitutes the outer shape of the lid body, and a joint portion that is joined to the first frame body.
    The glass panel unit according to claim 1.
  3. 　前記接合部は、前記蓋体のうち、前記第１枠体と接合する表面に表面処理された部分である、
    　請求項２に記載のガラスパネルユニット。     The joint portion is a portion of the lid body whose surface is surface-treated to be joined to the first frame body.
    The glass panel unit according to claim 2.
  4. 　前記接合部は、ガラスを含む、
    　請求項２又は３に記載のガラスパネルユニット。     The joint contains glass.
    The glass panel unit according to claim 2 or 3.
  5. 　ガラスパネルユニットを製造する方法であって、
    　準備工程と、溶融工程と、排気工程と、封止工程と、活性化工程と、を含み、
    　前記準備工程は、組立て品を用意する工程であり、
    　前記組立て品は、本体部と、蓋体と、第１周壁と、隙間と、を備え、
    　前記本体部は、
    　第１ガラス板と、
    　前記第１ガラス板に対向する第２ガラス板と、
    　前記第１ガラス板と前記第２ガラス板との間にある枠状の第２周壁と、
    　前記第１ガラス板と前記第２ガラス板と前記第２周壁とで囲まれた内部空間と、
    　前記内部空間内に配置されたガス吸着体と、
    　前記第１ガラス板及び前記第２ガラス板のうち一方に形成された排気孔と、
    　を備え、
    　前記蓋体は、前記本体部の外側にあり、
    　前記第１周壁は、その一部が開口した状態で、前記排気孔の周縁を囲み、かつ前記本体部と前記蓋体との間にあり、
    　前記隙間は、前記第１周壁の一部が開口した部分により構成され、かつ前記排気孔を介して前記内部空間と外部空間とを繋ぎ、
    　前記溶融工程は、前記第２周壁を溶融させて前記第１ガラス板と前記第２ガラス板とを気密に接合させる工程であり、
    　前記排気工程は、前記隙間と前記排気孔とを介して前記内部空間を排気させて真空空間とする工程であり、
    　前記封止工程は、局所加熱により前記第１周壁を溶融させて前記隙間を塞ぎ、かつ前記本体部と前記蓋体とを気密に接合させる工程であり、
    　前記活性化工程は、局所加熱により前記ガス吸着体を活性化させる工程である、
    　ガラスパネルユニットの製造方法。

          It is a method of manufacturing a glass panel unit.
    Including a preparation step, a melting step, an exhaust step, a sealing step, and an activation step,
    The preparatory step is a step of preparing an assembled product.
    The assembled product includes a main body, a lid, a first peripheral wall, and a gap.
    The main body
    The first glass plate and
    A second glass plate facing the first glass plate and
    A frame-shaped second peripheral wall between the first glass plate and the second glass plate,
    An internal space surrounded by the first glass plate, the second glass plate, and the second peripheral wall,
    The gas adsorbent arranged in the internal space and
    An exhaust hole formed in one of the first glass plate and the second glass plate,
    With
    The lid is on the outside of the body and
    The first peripheral wall surrounds the peripheral edge of the exhaust hole with a part thereof opened, and is between the main body and the lid.
    The gap is formed by a portion of the first peripheral wall that is partially open, and connects the internal space and the external space through the exhaust hole.
    The melting step is a step of melting the second peripheral wall and airtightly joining the first glass plate and the second glass plate.
    The exhaust step is a step of exhausting the internal space through the gap and the exhaust hole to form a vacuum space.
    The sealing step is a step of melting the first peripheral wall by local heating to close the gap and airtightly joining the main body and the lid.
    The activation step is a step of activating the gas adsorbent by local heating.
    Manufacturing method of glass panel unit.
PCT/JP2020/011476 2019-04-26 2020-03-16 Glass panel unit and manufacturing method for glass panel unit WO2020217779A1 (en)

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