热线型气体传感器芯片、传感器及传感器的制备方法Hot wire type gas sensor chip, sensor and preparation method of sensor
技术领域Technical field
本发明涉及电子器件制造技术领域,尤其涉及一种热线型气体传感器芯片、传感器及其制备方法。The invention relates to the technical field of electronic device manufacturing, in particular to a hot wire gas sensor chip, a sensor and a preparation method thereof.
背景技术Background technique
目前气体传感器种类繁多,应用范围广泛,其中,热线型气体传感器由检测元件和补偿元件组成,以半导体金属氧化物为敏感材料,保留了传统半导体金属氧化物灵敏度高的优点,同时利用补偿元件对环境温湿度变化进行补偿,使得气体传感器具有较好的环境温湿度稳定性。At present, there are many types of gas sensors and a wide range of applications. Among them, hot-wire gas sensors are composed of detection elements and compensation elements. They use semiconductor metal oxides as sensitive materials to retain the advantages of traditional semiconductor metal oxides with high sensitivity. The environmental temperature and humidity changes are compensated, so that the gas sensor has better environmental temperature and humidity stability.
热线型半导体气体传感器目前基本由手工制备,主要流程为:将铂丝手工绕制成特定长度的微型线圈,然后将气体敏感材料和气体不敏感材料分别手工涂抹于铂丝线圈上,经过干燥烧结后,得到对气体敏感的检测元件和对气体无敏感活性的补偿元件,两个元件组成热线型半导体气体传感器。铂丝线圈在这类传感器中既作为加热线圈,又作为检测信号电极,这也是热线型名称的由来。但热线型半导体气体传感器基本是由手工制备,自动化程度不高,导致产品良品率较低,一致性不好,并且传感器功耗较大,这些都限制了此类传感器的发展与普及。Hot-wire semiconductor gas sensors are basically prepared by hand at present. The main process is: manually winding the platinum wire into a micro-coil with a specific length, and then manually applying the gas-sensitive material and the gas-insensitive material on the platinum wire coil and drying and sintering. Then, a gas-sensitive detection element and a gas-insensitive compensation element are obtained. The two elements form a hot-wire semiconductor gas sensor. The platinum wire coil is used as both a heating coil and a detection signal electrode in this type of sensor. This is also the origin of the name of the hot wire type. However, the hot-wire semiconductor gas sensor is basically prepared by hand, and the degree of automation is not high, resulting in low product yield, poor consistency, and high power consumption of the sensor, which limit the development and popularization of this type of sensor.
发明内容Summary of the invention
本发明的目的在于提供一种热线型气体传感器芯片、传感器及其制备方法。The purpose of the present invention is to provide a hot-wire type gas sensor chip, a sensor and a preparation method thereof.
为实现上述发明目的,本发明一实施方式提供一种热线型气体传感器芯片,包括:硅基底,包括相对设置的第一表面及第二表面;所述硅基底包括中心加热区及外围支撑区,所述中心加热区包括贯穿所述第一表面以及所述第二表面的空气绝热腔;加热电阻膜,设于第一表面上;加热电极,设于所述第一表面上并部分覆盖所述加热电阻 膜;功能层,设于所述加热电阻膜上方并位于所述中心加热区,所述功能层为气体敏感层或环境补偿层。In order to achieve the above-mentioned object of the invention, an embodiment of the present invention provides a hot-wire gas sensor chip, including: a silicon substrate, including a first surface and a second surface disposed oppositely; the silicon substrate including a central heating zone and a peripheral support zone, The central heating zone includes an air insulation cavity penetrating through the first surface and the second surface; a heating resistor film is provided on the first surface; a heating electrode is provided on the first surface and partially covers the A heating resistor film; a functional layer, arranged above the heating resistor film and located in the central heating zone, the functional layer being a gas sensitive layer or an environmental compensation layer.
作为本发明的进一步改进,所述功能层为气体敏感层,所述气体敏感层由设于所述加热电阻膜表面的气体敏感浆料烧结而形成。As a further improvement of the present invention, the functional layer is a gas sensitive layer, and the gas sensitive layer is formed by sintering a gas sensitive slurry provided on the surface of the heating resistor film.
作为本发明的进一步改进,所述气体敏感浆料的材料包括二氧化锡、氧化锌、氧化铟或者氧化钨中的一种或者几种,以及贵金属催化剂和催化助剂。As a further improvement of the present invention, the material of the gas-sensitive slurry includes one or more of tin dioxide, zinc oxide, indium oxide or tungsten oxide, as well as precious metal catalysts and catalytic promoters.
作为本发明的进一步改进,所述功能层为环境补偿层,所述环境补偿层由设于所述加热电阻膜表面的环境补偿浆料烧结而形成。As a further improvement of the present invention, the functional layer is an environmental compensation layer, and the environmental compensation layer is formed by sintering an environmental compensation slurry provided on the surface of the heating resistor film.
作为本发明的进一步改进,所述环境补偿浆料的材料包括二氧化锡、二氧化钍、二氧化钛、二氧化锆、二氧化铈、氧化铟、氧化镧、氧化钙、氧化钡、氧化铝、二氧化硅、氧化镁、二氧化铪、氧化铜、氧化锌、氧化钨中的一种或几种。As a further improvement of the present invention, the material of the environmental compensation slurry includes tin dioxide, thorium dioxide, titanium dioxide, zirconium dioxide, ceria, indium oxide, lanthanum oxide, calcium oxide, barium oxide, aluminum oxide, two One or more of silicon oxide, magnesium oxide, hafnium dioxide, copper oxide, zinc oxide, and tungsten oxide.
作为本发明的进一步改进,所述环境补偿层的阻值不小于10MΩ。As a further improvement of the present invention, the resistance value of the environmental compensation layer is not less than 10MΩ.
作为本发明的进一步改进,所述功能层的厚度为0.001um~20um。As a further improvement of the present invention, the thickness of the functional layer is 0.001um-20um.
作为本发明的进一步改进,所述加热电阻膜的阻值为10Ω~500Ω。As a further improvement of the present invention, the resistance value of the heating resistor film is 10Ω˜500Ω.
作为本发明的进一步改进,所述加热电极由设于所述第一表面的设定金属导电浆料烧结而形成。As a further improvement of the present invention, the heating electrode is formed by sintering a set metal conductive paste provided on the first surface.
作为本发明的进一步改进,所述加热电阻膜包括至少一个第一支撑部,所述加热电极包括至少一个覆盖所述第一支撑部的第二支撑部,所述第一支撑部与所述第二支撑部的形状相同,所述第一支撑部由所述加热电阻膜位于所述中心加热区的部分向所述外围支撑区延伸而形成,所述第二支撑部由所述加热电极位于所述外围支撑区的部分向所述中心加热区延伸。As a further improvement of the present invention, the heating resistor film includes at least one first support portion, the heating electrode includes at least one second support portion covering the first support portion, and the first support portion and the first support portion The shape of the two supporting parts is the same. The first supporting part is formed by extending the part of the heating resistance film in the central heating zone to the peripheral supporting zone. The part of the peripheral support zone extends toward the central heating zone.
作为本发明的进一步改进,所述第二支撑部的宽度小于或等于所述第一支撑部的宽度。As a further improvement of the present invention, the width of the second supporting portion is less than or equal to the width of the first supporting portion.
本发明另一方面提供一种热线型气体传感器,包括封装外壳及设于所述封装外壳内的至少两个如上任意一项所述的热线型气体传感器芯片;所述封装外壳包括基座,设于基座上方的开口及设于所述基座内的电连接件;每个所述热线型气体传感器芯片均通过所述电连接件与所述基座电性连接。Another aspect of the present invention provides a hot-wire gas sensor, including a packaging shell and at least two hot-wire gas sensor chips according to any one of the above arranged in the packaging shell; the packaging shell includes a base, and An opening above the base and an electrical connector arranged in the base; each of the hot-wire gas sensor chips is electrically connected to the base through the electrical connector.
作为本发明的进一步改进,所述热线型气体传感器包括两个热线型气体传感器芯片,分别为检测元件芯片及补偿元件芯片,所述检测元件芯片的功能层为气体敏感层,所述补偿元件芯片的功能层为环境补偿层。As a further improvement of the present invention, the hot-wire gas sensor includes two hot-wire gas sensor chips, which are a detection element chip and a compensation element chip. The functional layer of the detection element chip is a gas sensitive layer, and the compensation element chip The functional layer is the environmental compensation layer.
作为本发明的进一步改进,所述热线型气体传感器还包括覆盖所述开口的防爆防尘透气膜,所述防爆防尘透气膜上还设有防水透气膜。As a further improvement of the present invention, the hot wire gas sensor further includes an explosion-proof, dust-proof and breathable membrane covering the opening, and the explosion-proof, dust-proof and breathable membrane is also provided with a waterproof and breathable membrane.
本发明另一方面提供一种热线型气体传感器的制备方法,所述方法包括如下步骤:将导电金属氧化物粉体及有机载体配制成陶瓷浆料,印刷或涂布在硅基底上,以形成加热电阻膜;将加热电极浆料分别印刷或涂布在硅基底上,以形成加热电极;通过刻蚀技术在硅基底上形成绝热空气腔,得到微热板;重复上述步骤以制作另一个微热板;将气体敏感浆料印刷或涂布在其中一个所述微热板上,以形成气体敏感层;将环境补偿浆料印刷或涂布在另一个所述微热板上,以形成环境补偿层;将两个微热板分别烘干烧结并切割,得到检测元件芯片和补偿元件芯片;将检测元件芯片和补充元件芯片封装在管壳中,并在管壳的开口处贴装防爆防尘透气膜和防水透气膜。Another aspect of the present invention provides a method for preparing a hot wire gas sensor. The method includes the following steps: preparing a conductive metal oxide powder and an organic carrier into a ceramic paste, and printing or coating it on a silicon substrate to form Heating resistance film; printing or coating the heating electrode paste on the silicon substrate to form heating electrodes; forming an insulating air cavity on the silicon substrate by etching technology to obtain a micro hot plate; repeat the above steps to make another micro Hot plate; printing or coating a gas sensitive paste on one of the micro hot plates to form a gas sensitive layer; printing or coating an environment compensation paste on the other micro hot plate to form an environment Compensation layer; the two micro hot plates are respectively dried, sintered and cut to obtain the detection element chip and the compensation element chip; the detection element chip and the supplementary element chip are packaged in the shell, and the explosion-proof and anti-explosion protection are mounted on the opening of the shell Dust breathable membrane and waterproof breathable membrane.
与现有技术相比,本发明公开的热线型气体传感器芯片,传感器及传感器的制作方法,通过在硅基底上设置加热电极,加热电阻膜及功能层,并将功能层设为气体敏感层或环境补偿层,可制作两个具有不同功能层的热线型传感器芯片,并将两个芯片封装起来,从而可工业化制作热线型气体传感器芯片及传感器;并且,所制备的热线型气体传感器采用具有气体敏感层的芯片作为检测元件,采用具有环境补偿层的芯片作为补偿元件,能够抵消环境温湿度变化所带来的影响,使得传感器的信号值更加稳 定。Compared with the prior art, the hot wire gas sensor chip, sensor and sensor manufacturing method disclosed in the present invention are achieved by arranging a heating electrode, heating resistance film and functional layer on a silicon substrate, and setting the functional layer as a gas sensitive layer or The environmental compensation layer can make two hot-wire sensor chips with different functional layers, and package the two chips, so that the hot-wire gas sensor chip and sensor can be manufactured industrially; and the prepared hot-wire gas sensor adopts gas The chip of the sensitive layer is used as the detection element, and the chip with the environmental compensation layer is used as the compensation element, which can offset the influence of environmental temperature and humidity changes, and make the signal value of the sensor more stable.
附图说明Description of the drawings
图1是本发明一实施方式中热线型气体传感器芯片的剖面结构示意图;1 is a schematic diagram of a cross-sectional structure of a hot wire gas sensor chip in an embodiment of the present invention;
图2a是本发明一实施方式中检测元件芯片的剖面结构示意图;2a is a schematic diagram of a cross-sectional structure of a detection element chip in an embodiment of the present invention;
图2b是本发明一实施方式中补偿元件芯片的剖面结构示意图;2b is a schematic cross-sectional structure diagram of a compensation element chip in an embodiment of the present invention;
图3是本发明一实施方式中热线型气体传感器芯片的俯视结构示意图;3 is a schematic diagram of a top view structure of a hot wire gas sensor chip in an embodiment of the present invention;
图4a是本发明一实施方式中检测元件芯片的俯视结构示意图;FIG. 4a is a schematic top view of the structure of a detection element chip in an embodiment of the present invention;
图4b是本发明一实施方式中补偿元件芯片的俯视结构示意图;4b is a schematic top view of the structure of the compensation element chip in an embodiment of the present invention;
图5是本发明一实施方式中热线型气体传感器的剖面结构示意图;5 is a schematic diagram of a cross-sectional structure of a hot wire gas sensor in an embodiment of the present invention;
图6是本发明另一实施方式中热线型气体传感器的剖面结构示意图;6 is a schematic diagram of a cross-sectional structure of a hot wire gas sensor in another embodiment of the present invention;
图7是本发明一实施方式中热线型气体传感器的制备方法的流程示意图;FIG. 7 is a schematic flowchart of a method for preparing a hot wire gas sensor in an embodiment of the present invention;
图8是本发明一实施方式中热线型气体传感器对甲烷的响应曲线图。Fig. 8 is a graph showing the response curve of a hot wire gas sensor to methane in an embodiment of the present invention.
具体实施方式Detailed ways
以下将结合附图所示的具体实施方式对本发明进行详细描述。但这些实施方式并不限制本发明,本领域的普通技术人员根据这些实施方式所做出的结构、方法、或功能上的变换均包含在本发明的保护范围内。The present invention will be described in detail below in conjunction with the specific embodiments shown in the drawings. However, these embodiments do not limit the present invention, and the structural, method, or functional changes made by those skilled in the art based on these embodiments are all included in the protection scope of the present invention.
应该理解,本文使用的例如“上”、“上方”、“下”、“下方”等表示空间相对位置的术语是出于便于说明的目的来描述如附图中所示的一个单元或特征相对于另一个单元或特征的关系。空间相对位置的术语可以旨在包括设备在使用或工作中除了图中所示方位以外的不同方位。It should be understood that terms such as "upper", "above", "below", "below" and the like used herein to indicate a relative position in space are for the purpose of facilitating explanation to describe a unit or feature as shown in the accompanying drawings. Relationship to another unit or feature. The term of the relative position in space may be intended to include different orientations of the device in use or operation other than those shown in the figures.
如图1-4所示,本发明一实施方式公开了一种热线型气体传感器芯片,包括:硅基底11,加热电极12,加热电阻膜14及功能层15。所述硅基底11包括相对设置的第一表面111及第二表面112。所述硅基底11包括中心加热区A及外围支撑区B,所述中 心加热区A包括贯穿所述第一表面111以及所述第二表面112的空气绝热腔13。加热电阻膜14设于第一表面111上,加热电极12设于所述第一表面111上并部分覆盖所述加热电阻膜14。功能层设于所述加热电阻膜14上方并位于所述中心加热区,功能层15为气体敏感层或环境补偿层。As shown in FIGS. 1-4, an embodiment of the present invention discloses a hot wire gas sensor chip, which includes a silicon substrate 11, a heating electrode 12, a heating resistance film 14 and a functional layer 15. The silicon substrate 11 includes a first surface 111 and a second surface 112 opposite to each other. The silicon substrate 11 includes a central heating area A and a peripheral support area B. The central heating area A includes an air insulation cavity 13 penetrating through the first surface 111 and the second surface 112. The heating resistor film 14 is disposed on the first surface 111, and the heating electrode 12 is disposed on the first surface 111 and partially covers the heating resistor film 14. The functional layer is arranged above the heating resistor film 14 and located in the central heating zone, and the functional layer 15 is a gas sensitive layer or an environmental compensation layer.
本发明公开的热线型气体传感器芯片,传感器及传感器的制作方法,通过在硅基底上设置加热电极,加热电阻膜及功能层,并将功能层设为气体敏感层或环境补偿层,可制作两个具有不同功能层的热线型传感器芯片,并将两个芯片封装起来,从而可工业化制作热线型气体传感器芯片及传感器;并且,所制备的热线型气体传感器采用具有气体敏感层的芯片作为检测元件,采用具有环境补偿层的芯片作为补偿元件,能够抵消环境温湿度变化所带来的影响,使得传感器的信号值更加稳定。The hot wire type gas sensor chip, sensor and sensor manufacturing method disclosed in the present invention can be fabricated by arranging heating electrodes, heating resistance films and functional layers on a silicon substrate, and setting the functional layers as a gas sensitive layer or an environmental compensation layer. A hot-wire sensor chip with different functional layers, and the two chips are encapsulated, so that a hot-wire gas sensor chip and sensor can be manufactured industrially; and the prepared hot-wire gas sensor uses a chip with a gas sensitive layer as the detection element , Using a chip with an environmental compensation layer as a compensation element can offset the impact of environmental temperature and humidity changes, making the signal value of the sensor more stable.
优选的,硅基底11选自双面氧化、单面氧化或者未氧化的单晶硅片或者多晶硅片,单晶硅片的晶向为100或者111,硅基底11的厚度为100um~700um,包括端点值。Preferably, the silicon substrate 11 is selected from double-sided oxidized, single-sided oxidized or unoxidized single crystal silicon wafers or polycrystalline silicon wafers, the crystal orientation of the single crystal silicon wafers is 100 or 111, and the thickness of the silicon substrate 11 is 100 um to 700 um, including Endpoint value.
进一步地,所述加热电阻膜14包括至少一个第一支撑部141,所述加热电极12包括至少一个覆盖所述第一支撑部141的第二支撑部121,所述第一支撑部与所述第二支撑部121的形状相同,所述第一支撑部141由所述加热电阻膜14位于所述中心加热区A的部分向所述外围支撑区B延伸,所述第二支撑部121由所述加热电极位于所述外围支撑区B的部分向所述中心加热区A延伸。Further, the heating resistor film 14 includes at least one first supporting portion 141, and the heating electrode 12 includes at least one second supporting portion 121 covering the first supporting portion 141, and the first supporting portion is connected to the The second supporting portion 121 has the same shape. The first supporting portion 141 extends from the portion of the heating resistor film 14 in the central heating area A to the peripheral supporting area B. The second supporting portion 121 is formed by The portion of the heating electrode located in the peripheral support area B extends toward the central heating area A.
进一步地,所述第二支撑部121的宽度小于或等于所述第一支撑部141的宽度。具体地,在本发明实施方式中,所述第二支撑部121的形状及尺寸与第一支撑部的形状及尺寸完全相同。Further, the width of the second supporting portion 121 is less than or equal to the width of the first supporting portion 141. Specifically, in the embodiment of the present invention, the shape and size of the second supporting portion 121 are completely the same as the shape and size of the first supporting portion.
具体地,功能层15覆盖于所述加热电阻膜14的表面。加热电极12的第二支撑部121覆盖加热电阻膜14的第一支撑部141,从而将加热电阻膜14与硅基底11连接起来。加热电阻膜14在导电的同时还为功能层15提供支撑作用。空气绝热腔13贯穿硅 基底11并环绕于加热电极12、加热电阻膜14、功能层15和第一支撑部141及第二支撑部121之间。Specifically, the functional layer 15 covers the surface of the heating resistor film 14. The second support portion 121 of the heating electrode 12 covers the first support portion 141 of the heating resistance film 14, thereby connecting the heating resistance film 14 and the silicon substrate 11. The heating resistor film 14 provides support for the functional layer 15 while conducting electricity. The air insulation cavity 13 penetrates the silicon substrate 11 and surrounds the heating electrode 12, the heating resistance film 14, the functional layer 15, and the first supporting portion 141 and the second supporting portion 121.
具体地,所述功能层15的厚度可以为0.001um~20um,包括端点值。Specifically, the thickness of the functional layer 15 may be 0.001 um to 20 um, including the endpoint value.
进一步地,如图2a所示,所述功能层15为气体敏感层151,所述气体敏感层151由设于所述加热电阻膜14表面的气体敏感浆料烧结而形成。气体敏感浆料为对目标气体有敏感活性的材料制成。具体地,所述气体敏感浆料的材料包括二氧化锡、氧化锌、氧化铟或者氧化钨中的一种或者几种,以及贵金属催化剂和催化助剂。Furthermore, as shown in FIG. 2a, the functional layer 15 is a gas sensitive layer 151, which is formed by sintering a gas sensitive paste provided on the surface of the heating resistor film 14. The gas-sensitive slurry is made of materials that are sensitive to the target gas. Specifically, the material of the gas-sensitive slurry includes one or more of tin dioxide, zinc oxide, indium oxide, or tungsten oxide, as well as precious metal catalysts and catalytic promoters.
具体地,贵金属催化剂是催化反应的主要参与者,有银、金、铂、钯、钌、铱、铑、铕等,包括但不限于此。催化助剂是稀土氧化物及其他能够改善催化活性的金属氧化物,如二氧化钍(ThO2)、二氧化钛(TiO2)、二氧化锆(ZrO2)、二氧化铈(CeO2)、氧化锑(Sb2O3)、氧化镧(La2O3)、氧化钙(CaO)、氧化钡(BaO)、氧化铝(Al2O3)、二氧化硅(SiO2)、氧化镁(MgO)、二氧化铪(HfO2)、氧化铜(CuO)等,包括但不限于此。通过调控催化助剂的掺杂比例,使得气体敏感层151在特定工作温度下的阻值为5KΩ~500KΩ中的某一特定阻值。Specifically, noble metal catalysts are the main participants in the catalytic reaction, including silver, gold, platinum, palladium, ruthenium, iridium, rhodium, europium, etc., including but not limited to these. Catalytic promoters are rare earth oxides and other metal oxides that can improve catalytic activity, such as thorium dioxide (ThO2), titanium dioxide (TiO2), zirconium dioxide (ZrO2), ceria (CeO2), antimony oxide (Sb2O3) , Lanthanum oxide (La2O3), calcium oxide (CaO), barium oxide (BaO), aluminum oxide (Al2O3), silicon dioxide (SiO2), magnesium oxide (MgO), hafnium dioxide (HfO2), copper oxide (CuO) Etc., including but not limited to this. By adjusting the doping ratio of the catalytic promoter, the resistance of the gas sensitive layer 151 at a specific working temperature is a specific resistance value from 5KΩ to 500KΩ.
进一步地,如图2b所示,所述功能层为环境补偿层152,所述环境补偿层152由设于所述加热电阻膜14表面的环境补偿浆料烧结而形成。环境补偿浆料由对目标气体无敏感活性的材料制成。具体地,所述环境补偿浆料的材料包括二氧化锡、二氧化钍、二氧化钛、二氧化锆、二氧化铈、氧化铟、氧化镧、氧化钙、氧化钡、氧化铝、二氧化硅、氧化镁、二氧化铪、氧化铜、氧化锌、氧化钨中的一种或几种。Furthermore, as shown in FIG. 2b, the functional layer is an environmental compensation layer 152, and the environmental compensation layer 152 is formed by sintering the environmental compensation paste provided on the surface of the heating resistor film 14. The environmental compensation slurry is made of materials that are not sensitive to the target gas. Specifically, the material of the environment compensation slurry includes tin dioxide, thorium dioxide, titanium dioxide, zirconium dioxide, ceria, indium oxide, lanthanum oxide, calcium oxide, barium oxide, aluminum oxide, silicon dioxide, oxide One or more of magnesium, hafnium dioxide, copper oxide, zinc oxide, and tungsten oxide.
在本发明实施方式中,所述环境补偿层152的阻值不小于10MΩ。In the embodiment of the present invention, the resistance value of the environmental compensation layer 152 is not less than 10 MΩ.
进一步地,所述加热电阻膜14的制备材料为锑锡氧化物、铟锡氧化物、氟掺杂二氧化锡、氟磷共掺杂二氧化锡、铝掺杂氧化锌、二氧化钌、二氧化钌/银复合材料、二氧化钌/银钯复合材料中的任意一种。优选地,所述加热电阻膜14的形状为长方形、正 方形或者圆形中的一种或多种的组合。优选的,所述加热电阻膜14的阻值可以为10Ω~500Ω,包括端点值。所述加热电阻膜14的厚度可以为1um~50um,包括端点值。Further, the heating resistance film 14 is made of antimony tin oxide, indium tin oxide, fluorine-doped tin dioxide, fluorine-phosphorus co-doped tin dioxide, aluminum-doped zinc oxide, ruthenium dioxide, two Any one of ruthenium oxide/silver composite material and ruthenium dioxide/silver palladium composite material. Preferably, the shape of the heating resistor film 14 is one or a combination of a rectangle, a square or a circle. Preferably, the resistance value of the heating resistor film 14 may be 10Ω˜500Ω, including the endpoint value. The thickness of the heating resistor film 14 may be 1um-50um, including the endpoint value.
具体来说,加热电阻膜14是通过丝网印刷导电金属氧化物浆料并通过高温烧结制备而成,加热电极是通过丝网印刷电极浆料并通过高温烧结制备而成。优选地,所述加热电极12由设于述第一表面的设定金属导电浆料烧结而形成。此时,加热电极12为具有一定面积的导电焊盘,外界电路可以通过压焊、球焊、点焊等焊接方式与加热电极12进行电性连接,加热电极12主要为微热板提供外界施加的电信号;加热电阻膜14采用导电金属氧化物浆料制备,通过调控不同的比例,使得加热电阻膜14具有特定的电阻,加热电阻膜14为气体传感器的主要发热元件,当外界的电流通过加热电极12传输到加热电阻膜14时,加热电阻膜14产生焦耳热,进而为热线型气体传感器提供热源。Specifically, the heating resistor film 14 is prepared by screen printing conductive metal oxide paste and high temperature sintering, and the heating electrode is prepared by screen printing electrode paste and high temperature sintering. Preferably, the heating electrode 12 is formed by sintering a set metal conductive paste provided on the first surface. At this time, the heating electrode 12 is a conductive pad with a certain area, and the external circuit can be electrically connected to the heating electrode 12 through welding methods such as pressure welding, ball welding, spot welding, etc. The heating electrode 12 mainly provides external application for the micro hot plate. The heating resistor film 14 is made of conductive metal oxide paste. By adjusting different ratios, the heating resistor film 14 has a specific resistance. The heating resistor film 14 is the main heating element of the gas sensor. When the external current passes When the heating electrode 12 is transferred to the heating resistance film 14, the heating resistance film 14 generates Joule heat, which in turn provides a heat source for the hot wire gas sensor.
为了使热线型气体传感器具有更小的热容,更快的热响应,将加热电阻膜14设置成悬膜,并通过第一支撑部141与加热电极12的第二支撑部121相连接,第一支撑部141及第二支撑部121起到支撑和固定加热电阻膜14的作用,并与加热电阻膜14形成电性连接。通过刻蚀技术,将硅基底11上中心加热区的硅刻蚀掉,形成空气绝热腔13,由于空气具有较低的热导率,具有很好的绝热性。采用深硅刻蚀技术形成空气绝热腔13,可以通过物理方法或是化学方法刻蚀所述中心加热区A对应的硅基底11,形成所述空气绝热腔。加热电阻膜14的形状根据加热层的需求做适当调整,但无论为何种形状,加热电极12与加热电阻膜14均电性连接,加热电阻膜14根据需要设置成特定的形状,加热后为气体传感器的工作提供特定的温度。In order to make the hot wire gas sensor have a smaller heat capacity and a faster thermal response, the heating resistor film 14 is arranged as a suspension film, and is connected to the second support portion 121 of the heating electrode 12 through the first support portion 141. A supporting portion 141 and a second supporting portion 121 function to support and fix the heating resistor film 14 and form an electrical connection with the heating resistor film 14. Through the etching technology, the silicon in the central heating zone on the silicon substrate 11 is etched away to form an air insulation cavity 13. Since air has a low thermal conductivity, it has good thermal insulation. The deep silicon etching technology is used to form the air insulation cavity 13, and the silicon substrate 11 corresponding to the central heating zone A can be etched by physical or chemical methods to form the air insulation cavity. The shape of the heating resistor film 14 is appropriately adjusted according to the requirements of the heating layer, but no matter what shape it is, the heating electrode 12 and the heating resistor film 14 are electrically connected, and the heating resistor film 14 is set into a specific shape as required, and it becomes a gas after heating. The sensor works to provide a specific temperature.
优选的,所述加热电极12的厚度为1um~50um,包括端点值,所述加热电极12选自Pt、Au、Ag、Cu、Al、Ni、W、Ag/Pd、Pt/Au中的任意一种。Preferably, the thickness of the heating electrode 12 is 1um-50um, including the endpoint value, and the heating electrode 12 is selected from any of Pt, Au, Ag, Cu, Al, Ni, W, Ag/Pd, Pt/Au One kind.
如图5所示,本发明一实施方式中还公开了一种热线型气体传感器20,包括封装 外壳200及设于所述封装外壳200内的至少两个如上所述的热线型气体传感器芯片。所述封装外壳200包括基座203,设于基座203上方的开口204,覆盖所述开口204的防爆防尘透气膜201及设于所述基座203内的电连接件27。每个所述热线型气体传感器芯片均通过所述电连接件27与所述基座203电性连接。As shown in FIG. 5, an embodiment of the present invention also discloses a hot wire gas sensor 20, which includes a packaging shell 200 and at least two hot wire gas sensor chips as described above arranged in the packaging shell 200. The packaging housing 200 includes a base 203, an opening 204 provided above the base 203, an explosion-proof, dust-proof and breathable membrane 201 covering the opening 204, and an electrical connector 27 provided in the base 203. Each of the hot-wire gas sensor chips is electrically connected to the base 203 through the electrical connector 27.
进一步地,所述热线型气体传感器20包括两个热线型气体传感器芯片,分别为检测元件芯片210及补偿元件芯片220,所述检测元件芯片210的功能层为气体敏感层211,所述补偿元件芯片220的功能层为环境补偿层221。Further, the hot wire gas sensor 20 includes two hot wire gas sensor chips, which are a detection element chip 210 and a compensation element chip 220, respectively. The functional layer of the detection element chip 210 is a gas sensitive layer 211, and the compensation element The functional layer of the chip 220 is the environment compensation layer 221.
封装外壳200,不仅起着安放、固定、保护芯片和增强导热性能的作用,而且还是沟通芯片内部世界与外部电路的桥梁。检测元件芯片210和补偿元件芯片220上的加热电极分别用导线27连接到封装外壳200的引脚28上,这些引脚28又通过印刷电路板上的导线与其他器件建立连接。优选的,封装外壳200可以为陶瓷封装管壳、塑料封装管壳、PCB封装管壳中的任意一种。在封装外壳200上设置的防爆防尘透气膜201,方便外界气体能够顺利进入热线型气体传感器20。具体地,防爆防尘透气膜201由多孔的不锈钢粉末烧结体或者多孔金属片组成,具有防尘防爆且透气的功能。优选地,所述防爆防尘透气膜201上还设有防水透气膜202。防水透气膜可防止水汽进入热线型气体传感器,以免影响传感器的准确性。The packaging shell 200 not only plays a role in placing, fixing, protecting the chip and enhancing the thermal conductivity, but also serves as a bridge between the internal world of the chip and the external circuit. The heating electrodes on the detection element chip 210 and the compensation element chip 220 are respectively connected to the pins 28 of the package housing 200 by wires 27, and these pins 28 are connected to other devices through wires on the printed circuit board. Preferably, the package housing 200 may be any one of a ceramic package package, a plastic package package, and a PCB package package. The explosion-proof, dust-proof and gas-permeable membrane 201 provided on the packaging shell 200 facilitates the smooth entry of outside air into the hot wire gas sensor 20. Specifically, the explosion-proof and dust-proof breathable membrane 201 is composed of porous stainless steel powder sintered body or porous metal sheet, and has the functions of dustproof, explosion-proof and breathable. Preferably, the explosion-proof, dust-proof and breathable membrane 201 is further provided with a waterproof and breathable membrane 202. The waterproof and breathable membrane can prevent water vapor from entering the hot wire gas sensor, so as not to affect the accuracy of the sensor.
如图6所示,为本发明另一实施方式中的热线型气体传感器的结构示意图。在本实施方式中,热线型气体传感器30同样包括封装壳体300,检测元件芯片36和补偿元件芯片37。检测芯片36包括硅基底31a,加热电极32a及加热电阻膜34,补偿元件芯片包括硅基底31b,加热电极32b及加热电阻膜35。在本实施方式中,因功能层的厚度远小于加热电阻膜34(或加热电阻膜35)的厚度,加热电阻膜34(或加热电阻膜35)在结构上近似为单一加热膜,但在功能上仍然不同。具体来说,加热电阻膜34同时负担加热和气体检测功能,当周围有目标气体时,加热电阻膜34的阻值会发生变化, 从而加热电阻膜34和加热电极32a构成检测元件。另外,加热电阻膜35同时负担加热和环境补偿功能,当周围有目标气体时,加热电阻膜35的阻值不会发生变化,从而加热电阻膜35和加热电极32b构成补偿元件。As shown in FIG. 6, it is a schematic structural diagram of a hot wire gas sensor in another embodiment of the present invention. In this embodiment, the hot-wire gas sensor 30 also includes a package housing 300, a detection element chip 36 and a compensation element chip 37. The detection chip 36 includes a silicon substrate 31 a, a heating electrode 32 a and a heating resistance film 34, and the compensation element chip includes a silicon substrate 31 b, a heating electrode 32 b and a heating resistance film 35. In this embodiment, since the thickness of the functional layer is much smaller than the thickness of the heating resistance film 34 (or heating resistance film 35), the heating resistance film 34 (or heating resistance film 35) is similar in structure to a single heating film, but in terms of function The above is still different. Specifically, the heating resistor film 34 simultaneously bears heating and gas detection functions. When there is a target gas around, the resistance value of the heating resistor film 34 will change, so that the heating resistor film 34 and the heating electrode 32a constitute a detection element. In addition, the heating resistor film 35 bears both heating and environmental compensation functions. When the target gas is around, the resistance value of the heating resistor film 35 will not change, so the heating resistor film 35 and the heating electrode 32b constitute a compensation element.
结合参考图1-6,在本发明实施方式中,热线型气体传感器的检测原理是:将检测元件芯片和补偿元件芯片的加热电阻膜的电阻均设为R
0,将检测元件芯片的气体敏感层的电阻设为R
1,将补偿元件芯片的环境补偿层的电阻设为R
2。则根据串并联电路原理,因两个加热电阻膜与两个功能膜均为并联,则检测元件芯片中的加热电阻膜与气体敏感层的总电阻为
补偿元件芯片中的加热电阻膜与环境补偿层的总电阻
环境补偿层的电阻R
2的阻值大于10MΩ,电阻值很大,并且环境中存在目标气体时,环境补偿层的电阻R
2不会变化,因此补偿元件芯片中的电阻R
C≈R
0。而检测元件芯片的电阻R
D是由加热电阻R
0和气体敏感功能层电阻R
1并联得到,当周围环境存在目标气体时,气体敏感层的电阻R
1发生变化,使得检测元件芯片中的电阻R
D发生变化。将检测元件芯片和补偿元件芯片串联接入惠斯通电桥中,能够检测出目标气体的浓度,而且当环境温湿度发生变化时,补偿元件芯片和检测元件芯片的电阻会发生同步变化,使得电桥输出信号保持稳定。本发明实施方式所述的热线型气体传感器采用检测元件芯片和补偿元件芯片来抵消环境温湿度的影响,同时利用气体敏感层和加热电阻层的并联关系达到检测目标气体浓度的目的,是一种新型的热线型气体传感器。
With reference to Figures 1-6, in the embodiment of the present invention, the detection principle of the hot wire gas sensor is: set the resistance of the heating resistance film of the detection element chip and the compensation element chip to R 0 , and set the gas sensitivity of the detection element chip The resistance of the layer is set to R 1 , and the resistance of the environmental compensation layer of the compensation element chip is set to R 2 . According to the principle of series-parallel circuit, since the two heating resistor films and the two functional films are in parallel, the total resistance of the heating resistor film and the gas sensitive layer in the detection element chip is The total resistance of the heating resistor film and the environmental compensation layer in the compensation element chip The resistance value of the resistance R 2 of the environmental compensation layer is greater than 10 MΩ, the resistance value is very large, and when there is a target gas in the environment, the resistance R 2 of the environmental compensation layer will not change, so the resistance R C ≈R 0 in the compensation element chip. The resistance R D of the detection element chip is obtained by connecting the heating resistor R 0 and the resistance R 1 of the gas-sensitive functional layer in parallel. When the target gas exists in the surrounding environment, the resistance R 1 of the gas-sensitive layer changes, making the resistance in the detection element chip R D changes. Connecting the detection element chip and the compensation element chip in series to the Wheatstone bridge can detect the concentration of the target gas, and when the ambient temperature and humidity changes, the resistance of the compensation element chip and the detection element chip will change synchronously, making the electricity The bridge output signal remains stable. The hot-wire gas sensor according to the embodiment of the present invention uses a detection element chip and a compensation element chip to offset the influence of environmental temperature and humidity, and at the same time uses the parallel relationship between the gas sensitive layer and the heating resistance layer to achieve the purpose of detecting the target gas concentration. A new type of hot wire gas sensor.
本发明实施方式所述技术方案中,采用设定金属氧化物加热电阻浆料通过厚膜印刷技术在硅基底表面成膜后,通过设定温度的高温烧结可以形成设定目标特性的加热电阻膜,同样通过厚膜印刷技术形成设定的加热电极,并通过形成第一支撑部及第二支撑部来使得加热电阻膜成为悬膜。加热电极和加热电阻悬膜通过高温烧结而成,并 且采用厚膜技术,具有较好的稳定性和可靠性,并具有优秀的绝热性能和较好的力学性能。加热电阻膜不仅负担传感器的加热功能,还承担功能层的支撑层,为功能层提供支撑作用。和本领域现有技术相比,本发明实施方式中热线型气体传感器没有多余的绝热层或者支撑层进行支撑加热电阻膜,简化了结构和制备工艺。加热电阻膜采用低成本的厚膜印刷工艺形成,能够实现连续自动化批量生产,而且无需采用昂贵的物理气相沉积或者化学气象沉积设备,更加利于产品成本的降低。In the technical solution described in the embodiment of the present invention, a predetermined metal oxide heating resistor paste is used to form a film on the surface of a silicon substrate by thick film printing technology, and then a heating resistor film with set target characteristics can be formed through high temperature sintering at a set temperature. In the same way, the set heating electrode is formed by thick film printing technology, and the heating resistance film becomes a suspension film by forming the first support portion and the second support portion. The heating electrode and heating resistor suspension film are made by high temperature sintering, and adopt thick film technology, which has good stability and reliability, and has excellent thermal insulation performance and good mechanical properties. The heating resistor film not only bears the heating function of the sensor, but also bears the support layer of the functional layer, and provides a supporting role for the functional layer. Compared with the prior art in the field, the hot-wire gas sensor in the embodiment of the present invention has no redundant heat insulation layer or support layer to support the heating resistance film, which simplifies the structure and the manufacturing process. The heating resistor film is formed by a low-cost thick film printing process, which can realize continuous automated mass production, and does not need to use expensive physical vapor deposition or chemical weather deposition equipment, which is more conducive to reducing product costs.
如图7所示,本发明还公开了一种热线型气体传感器的制作方法,所述方法包括:As shown in FIG. 7, the present invention also discloses a method for manufacturing a hot wire gas sensor, the method including:
S1,将导电金属氧化物粉体及有机载体配制成陶瓷浆料,印刷或涂布在硅基底11上,以形成加热电阻膜14。In S1, the conductive metal oxide powder and the organic carrier are prepared into ceramic paste, which is printed or coated on the silicon substrate 11 to form the heating resistance film 14.
首先,硅基底11为一双面氧化的,具有100晶向的单晶硅基底,硅基底11需要用丙酮超声清洗10min,再用异丙醇超声清洗5min,再用去离子水清洗5min,并用氮气吹干。接着,选用合适规格的导电金属氧化物粉体,添加有机载体,配制成陶瓷浆料,采用印刷或者涂布的方式制备在硅基底11上,并在一定温度下烘干烧结,以形成加热电阻膜14。具体来说,可以通过丝网印刷、平板印刷、凹版印刷、凸版印刷、流延、刮涂、喷涂等成膜方式中的任意一种方式,形成具有特定图形的加热电阻膜。First, the silicon substrate 11 is a double-sided oxidized single crystal silicon substrate with 100 crystal orientations. The silicon substrate 11 needs to be ultrasonically cleaned with acetone for 10 minutes, then with isopropanol for 5 minutes, and then with deionized water for 5 minutes, and used Blow dry with nitrogen. Next, select conductive metal oxide powder of appropriate specifications, add an organic carrier, and prepare a ceramic paste, which is prepared on the silicon substrate 11 by printing or coating, and dried and sintered at a certain temperature to form a heating resistor膜14。 Film 14. Specifically, the heating resistance film with a specific pattern can be formed by any one of film forming methods such as screen printing, lithography, gravure printing, relief printing, casting, blade coating, and spray coating.
S2,将加热电极浆料分别印刷或涂布在硅基底11上,以形成加热电极12。S2, printing or coating the heating electrode paste on the silicon substrate 11 to form the heating electrode 12 respectively.
将加热电极浆料采用印刷或者涂布的方式制备在硅基底11上,并进行烘干和烧结,得到加热电极12。具体来说,可以通过丝网印刷、平板印刷、凹版印刷、凸版印刷、流延、刮涂、喷涂等成膜方式中的任意一种方式,形成具有特定图形的加热电极。The heating electrode paste is prepared on the silicon substrate 11 by printing or coating, and dried and sintered to obtain the heating electrode 12. Specifically, a heating electrode with a specific pattern can be formed by any one of film forming methods such as screen printing, lithography, gravure printing, relief printing, casting, doctor coating, and spray coating.
S3,通过刻蚀技术在硅基底上形成绝热空气腔,得到微热板。S3, forming an adiabatic air cavity on the silicon substrate by etching technology to obtain a micro hot plate.
在基底正面和背面旋涂光刻胶,在热台上烘干,并将基底背面的光刻胶进行图形化曝光和图形化显影,通过反应离子刻蚀技术,将背面的二氧化硅去掉,然后通过深硅刻蚀技术,将光刻胶未保护的硅刻蚀掉,形成绝热空气腔13,得到气体传感器的微 热板。The photoresist is spin-coated on the front and back of the substrate, dried on a hot stage, and the photoresist on the back of the substrate is patterned exposed and patterned. The silicon dioxide on the back is removed by reactive ion etching technology. Then, through the deep silicon etching technology, the unprotected silicon of the photoresist is etched away to form an adiabatic air cavity 13 to obtain the micro hot plate of the gas sensor.
S4,重复上述步骤S1至S3以制作另一个微热板。S4, repeat the above steps S1 to S3 to make another micro hot plate.
制作出两个微热板,以便分别承载两个不同的功能层。Two micro hot plates are made to carry two different functional layers respectively.
S5,将气体敏感浆料印刷或涂布在其中一个所述微热板上,以形成气体敏感层。S5, printing or coating the gas sensitive paste on one of the micro hot plates to form a gas sensitive layer.
配制气体敏感浆料,并采用印刷或者涂布的方式制备在上述微热板上,以形成气体敏感层。可以通过丝网印刷、平板印刷、凹版印刷、凸版印刷、流延、刮涂、喷涂等成膜方式中的任意一种方式,形成气体敏感层。A gas-sensitive paste is prepared and prepared on the above-mentioned micro hot plate by printing or coating to form a gas-sensitive layer. The gas sensitive layer can be formed by any one of film forming methods such as screen printing, offset printing, gravure printing, relief printing, casting, squeegee coating, and spray coating.
S6,将环境补偿浆料印刷或涂布在另一个所述微热板上,以形成环境补偿层。S6, printing or coating the environmental compensation paste on the other micro hot plate to form an environmental compensation layer.
配制环境补偿浆料,并采用印刷或者涂布的方式制备在上述另一个微热板上,以形成环境补偿层。可以通过丝网印刷、平板印刷、凹版印刷、凸版印刷、流延、刮涂、喷涂等成膜方式中的任意一种方式,形成环境补偿层。An environment compensation paste is prepared and printed or coated on the above-mentioned another micro hot plate to form an environment compensation layer. The environmental compensation layer can be formed by any one of film forming methods such as screen printing, offset printing, gravure printing, relief printing, casting, squeegee coating, and spray coating.
S7,将两个微热板分别烘干烧结并切割,得到检测元件芯片和补偿元件芯片。S7, drying, sintering and cutting the two micro hot plates respectively to obtain the detection element chip and the compensation element chip.
在本发明实施例所述制备方法中,可以通过大尺寸晶圆同时制备多个热线型气体传感器芯片,然后通过切割工艺,分割为多个单粒的检测元件芯片和补偿元件芯片,切割后每个芯片均是具有硅基底11、加热电极12、加热电阻膜14和功能层15。In the preparation method described in the embodiment of the present invention, multiple hot-wire gas sensor chips can be prepared at the same time from a large-size wafer, and then divided into multiple single detection element chips and compensation element chips through a cutting process. Each chip has a silicon substrate 11, a heating electrode 12, a heating resistance film 14, and a functional layer 15.
S8,将检测元件芯片和补充元件芯片封装在封装外壳中,并在封装外壳的开口处贴装防爆防尘透气膜和防水透气膜。S8, the detection element chip and the supplementary element chip are packaged in a packaging shell, and an explosion-proof, dust-proof and breathable membrane and a waterproof and breathable membrane are attached to the opening of the packaging shell.
具体地,上述烘干温度为40—200℃之间的某一温度,烧结温度为400—1200℃之间的某一温度。Specifically, the above-mentioned drying temperature is a certain temperature between 40-200°C, and the sintering temperature is a certain temperature between 400-1200°C.
为了更好的阐述本发明,以下提供一些热线型气体传感器的制备方法的具体实施例。In order to better illustrate the present invention, some specific examples of the preparation method of the hot wire gas sensor are provided below.
实施例1:提供一双面抛光双面氧化的,具有100晶向的4英寸单晶硅晶圆,然后用丙酮超声清洗15min,再用异丙醇超声清洗5min,再用去离子水清洗5min,并用氮 气吹干;选用合适规格的导电金属氧化物粉体,添加有机载体,配制成加热电阻膜浆料,在晶圆上采用丝网印刷的方式印刷长宽为300um×300um的正方形加热电阻膜,并在120℃下烘干10min;然后再将导电浆料印刷在晶圆上,并在120℃下烘干10min;将烘干好的晶圆放入马弗炉中,在1000℃烧结30min,得到10um厚的加热电阻膜和电极电极,并且加热电阻膜的电阻值为100Ω;在基底正面和背面旋涂正光刻胶,在100℃烘干5min固化,并将背面的光刻胶进行图形化曝光和图形化显影,得到厚度10um,长宽为500um×500um的光刻胶未保护的区域,通过反应离子刻蚀技术,将未保护区域的二氧化硅去掉,然后通过深硅刻蚀技术,将光刻胶未保护的硅刻蚀掉,形成绝热空气腔,得到带有第一支撑部的加热电阻悬膜;配制功能层浆料,并分别采用丝网印刷工艺,将功能层制备在加热电阻膜上,150℃烘干10min,并在800℃烧结60min,得到厚度为10um的气体敏感层和环境补偿层,后通过激光切割技术,得到长宽都为1.0mm×1.0mm检测元件芯片和补偿元件芯片;将检测元件芯片和补偿元件芯片封装在陶瓷管壳中,陶瓷管壳贴装防爆防尘透气膜和防水透气膜,得到热线型气体传感器,所得到热线型气体传感器对甲烷的响应曲线如图8所示。Example 1: Provide a 4-inch monocrystalline silicon wafer with 100 crystal orientations with double-sided polishing and double-sided oxidation, and then ultrasonic cleaning with acetone for 15 minutes, then ultrasonic cleaning with isopropanol for 5 minutes, and then cleaning with deionized water for 5 minutes , And blow dry with nitrogen; select appropriate specifications of conductive metal oxide powder, add organic carrier, and prepare heating resistor film paste, and use screen printing to print a square heating resistor with a length of 300um×300um on the wafer Film and dry at 120℃ for 10min; then print the conductive paste on the wafer and dry it at 120℃ for 10min; put the dried wafer in a muffle furnace and sinter at 1000℃ 30min, get 10um thick heating resistance film and electrode electrode, and the resistance value of heating resistance film is 100Ω; spin-coated positive photoresist on the front and back of the substrate, bake it at 100℃ for 5min to cure, and pattern the photoresist on the back Chemical exposure and pattern development to obtain the unprotected area of the photoresist with a thickness of 10um and a length and width of 500um×500um. The silicon dioxide in the unprotected area is removed by reactive ion etching technology, and then deep silicon etching technology , The unprotected silicon of the photoresist is etched away to form an adiabatic air cavity to obtain a heating resistance suspension film with a first support part; the functional layer paste is prepared, and the screen printing process is used to prepare the functional layer in On the heating resistor film, bake at 150°C for 10 minutes, and sinter at 800°C for 60 minutes to obtain a gas-sensitive layer and an environmental compensation layer with a thickness of 10um, and then use laser cutting technology to obtain a detection element chip of 1.0mm×1.0mm in length and width. And the compensation component chip; the detection component chip and the compensation component chip are packaged in a ceramic tube shell, and the ceramic tube shell is mounted with an explosion-proof, dust-proof, breathable membrane and a waterproof breathable membrane to obtain a hot wire gas sensor. The obtained hot wire gas sensor The response curve is shown in Figure 8.
实施例2:提供一双面抛光单品氧化的,具有100晶向的6英寸单晶硅晶圆,然后用丙酮超声清洗10min,再用异丙醇超声清洗10min,再用去离子水清洗5min,并用氮气吹干;选用合适规格的导电金属氧化物粉体,添加有机载体,配制成加热电阻膜浆料,在晶圆单面氧化层上采用丝网印刷的方式印刷长宽为300um×400um的长方形加热电阻膜,并在100℃下烘干10min;然后再将导电浆料印刷在晶圆上,并在100℃下烘干10min;将烘干好的晶圆放入马弗炉中,在1200℃烧结20min,得到20um厚的加热电阻膜和电极电极,并且加热电阻膜的电阻值为80Ω;在基底正面和背面旋涂正光刻胶,在110℃烘干5min固化,并将背面的光刻胶进行图形化曝光和图形化显影,得到厚度8um,长宽为500um×500um的光刻胶未保护的区域,通过反应离子刻蚀技术, 将未保护区域的二氧化硅去掉,然后通过深硅刻蚀技术,将光刻胶未保护的硅刻蚀掉,形成绝热空气腔,得到带有第一支撑部的加热电阻膜,其为一悬膜结构;配制功能层浆料,并分别采用丝网印刷工艺,将功能层制备在加热电阻膜上,120℃烘干10min,并在900℃烧结40min,得到厚度为5um的气体敏感层和环境补偿层,后通过激光切割技术,得到长宽都为1.0mm×1.0mm检测元件芯片和补偿元件芯片;将检测元件芯片和补偿元件芯片封装在陶瓷管壳中,陶瓷管壳贴装防爆防尘透气膜和防水透气膜,得到热线型气体传感器。Example 2: Provide a double-sided polished single-product oxidized 6-inch single crystal silicon wafer with 100 crystal orientation, then ultrasonically cleaned with acetone for 10 minutes, then ultrasonically cleaned with isopropanol for 10 minutes, and then cleaned with deionized water for 5 minutes , And blow dry with nitrogen; select appropriate specifications of conductive metal oxide powder, add organic carrier, prepare heating resistance film paste, and use screen printing on the single-sided oxide layer of the wafer to print the length and width of 300um×400um Rectangular heating resistor film, and dried at 100℃ for 10min; then the conductive paste is printed on the wafer and dried at 100℃ for 10min; put the dried wafer into the muffle furnace, After sintering at 1200℃ for 20 minutes, a 20um thick heating resistor film and electrode electrodes are obtained, and the resistance value of the heating resistor film is 80Ω; the positive photoresist is spin-coated on the front and back of the substrate, and dried at 110℃ for 5 minutes to cure, and the light on the back The resist is subjected to patterned exposure and patterned development to obtain an unprotected area of the photoresist with a thickness of 8um and a length and width of 500um×500um. The silicon dioxide in the unprotected area is removed by reactive ion etching technology, and then the The silicon etching technology etches away the unprotected silicon of the photoresist to form an adiabatic air cavity to obtain a heating resistance film with a first support part, which is a suspension film structure; prepare the functional layer slurry and use them separately Screen printing process, the functional layer is prepared on the heating resistor film, dried at 120°C for 10 minutes, and sintered at 900°C for 40 minutes to obtain a gas sensitive layer and an environmental compensation layer with a thickness of 5um, and then use laser cutting technology to obtain the length and width Both are 1.0mm×1.0mm detection element chip and compensation element chip; the detection element chip and compensation element chip are packaged in a ceramic shell, and the ceramic shell is mounted with an explosion-proof, dust-proof and breathable membrane to obtain a hot wire gas sensor .
实施例3:提供一双面抛光双面氧化的,具有100晶向的2英寸单晶硅晶圆,然后用丙酮超声清洗10min,再用异丙醇超声清洗10min,再用去离子水清洗5min,并用氮气吹干;选用合适规格的导电金属氧化物粉体,添加有机载体,配制成加热电阻膜浆料,在晶圆上采用刮涂的方式印刷长宽为400um×400um的正方形加热电阻膜,并在150℃下烘干10min;然后再将导电浆料印刷在晶圆上,并在150℃下烘干10min;将烘干好的晶圆放入马弗炉中,在1100℃烧结30min,得到15um厚的加热电阻膜和电极电极,并且加热电阻膜的电阻值为60Ω;在基底正面和背面旋涂正光刻胶,在100℃烘干5min固化,并将背面的光刻胶进行图形化曝光和图形化显影,得到厚度7um,长宽为600um×600um的光刻胶未保护的区域,通过反应离子刻蚀技术,将未保护区域的二氧化硅去掉,然后通过深硅刻蚀技术,将光刻胶未保护的硅刻蚀掉,形成绝热空气腔,得到带有第一支撑部的加热电阻膜,其为一悬膜结构;配制功能层浆料,并分别采用浸涂工艺,将功能层制备在加热电阻膜上,150℃烘干10min,并在1000℃烧结60min,得到厚度为0.05um的气体敏感层和环境补偿层,后通过激光切割技术,得到长宽都为1.0mm×1.0mm检测元件芯片和补偿元件芯片;将检测元件芯片和补偿元件芯片封装在陶瓷管壳中,陶瓷管壳贴装防爆防尘透气膜和防水透气膜,得到热线型气体传感器。Example 3: Provide a 2-inch monocrystalline silicon wafer with 100 crystal orientations that is polished on both sides and oxidized on both sides, then ultrasonically cleaned with acetone for 10 minutes, then ultrasonically cleaned with isopropanol for 10 minutes, and then cleaned with deionized water for 5 minutes , And blow dry with nitrogen; select the appropriate specifications of conductive metal oxide powder, add organic carrier, prepare heating resistance film paste, and print a square heating resistance film with a length and width of 400um×400um on the wafer , And dry it at 150℃ for 10min; then print the conductive paste on the wafer and dry it at 150℃ for 10min; put the dried wafer in the muffle furnace and sinter it at 1100℃ for 30min , Get 15um thick heating resistor film and electrode electrode, and the resistance value of the heating resistor film is 60Ω; spin-coated positive photoresist on the front and back of the substrate, bake it at 100℃ for 5min to cure, and pattern the photoresist on the back Exposure and pattern development, to obtain the unprotected area of the photoresist with a thickness of 7um and a length and width of 600um×600um. The silicon dioxide in the unprotected area is removed by the reactive ion etching technology, and then the deep silicon etching technology is used. The unprotected silicon of the photoresist is etched away to form an adiabatic air cavity to obtain a heating resistance film with a first support part, which is a suspension film structure; the functional layer slurry is prepared and the dip coating process is used to The functional layer is prepared on the heating resistor film, baked at 150°C for 10 minutes, and sintered at 1000°C for 60 minutes to obtain a gas-sensitive layer and an environmental compensation layer with a thickness of 0.05um, and then use laser cutting technology to obtain a length and width of 1.0mm× 1.0mm detection element chip and compensation element chip; the detection element chip and the compensation element chip are packaged in a ceramic tube shell, and the ceramic tube shell is mounted with an explosion-proof, dust-proof and breathable membrane to obtain a hot wire gas sensor.
实施例4:提供一双面抛光双面氧化的,具有100晶向的8英寸单晶硅晶圆,然后 用丙酮超声清洗10min,再用异丙醇超声清洗5min,再用去离子水清洗5min,并用氮气吹干;选用合适规格的导电金属氧化物粉体,添加有机载体,配制成加热电阻膜浆料,在晶圆上采用凹版印刷的方式印刷直径为500um的圆形加热电阻膜,并在120℃下烘干10min;然后再将导电浆料印刷在晶圆上,并在120℃下烘干10min;将烘干好的晶圆放入马弗炉中,在900℃烧结30min,得到25um厚的加热电阻膜和电极电极,并且加热电阻膜的电阻值为40Ω;在基底正面和背面旋涂正光刻胶,在100℃烘干5min固化,并将背面的光刻胶进行图形化曝光和图形化显影,得到厚度10um,长宽为700um×700um的光刻胶未保护的区域,通过反应离子刻蚀技术,将未保护区域的二氧化硅去掉,然后通过深硅刻蚀技术,将光刻胶未保护的硅刻蚀掉,形成绝热空气腔,得到带有第一支撑部的加热电阻膜,其为一悬膜结构;配制功能层浆料,并分别采用喷涂工艺,将功能层制备在加热电阻膜上,150℃烘干10min,并在1100℃烧结15min,得到厚度为1um的气体敏感层和环境补偿层,后通过激光切割技术,得到长宽都为1.2mm×1.2mm检测元件芯片和补偿元件芯片;将检测元件芯片和补偿元件芯片封装在陶瓷管壳中,陶瓷管壳贴装防爆防尘透气膜和防水透气膜,得到热线型气体传感器。Example 4: Provide a double-sided polished and double-sided oxidized 8-inch single crystal silicon wafer with 100 crystal orientation, then ultrasonically cleaned with acetone for 10 minutes, then ultrasonically cleaned with isopropanol for 5 minutes, and then cleaned with deionized water for 5 minutes , And blow dry with nitrogen; select the appropriate specifications of conductive metal oxide powder, add organic carrier, prepare heating resistance film paste, use gravure printing to print a circular heating resistance film with a diameter of 500um on the wafer, and Dry at 120℃ for 10min; then print the conductive paste on the wafer and dry it at 120℃ for 10min; put the dried wafer in a muffle furnace and sinter it at 900℃ for 30min to obtain 25um thick heating resistor film and electrode electrodes, and the resistance value of the heating resistor film is 40Ω; spin-coated positive photoresist on the front and back of the substrate, bake it at 100°C for 5 minutes, and perform patterning exposure and patterning of the photoresist on the back Graphically developed to obtain the unprotected area of the photoresist with a thickness of 10um and a length and width of 700um×700um. The silicon dioxide in the unprotected area is removed by reactive ion etching technology, and then the light is removed by deep silicon etching technology. The unprotected silicon of the resist is etched away to form an adiabatic air cavity to obtain a heating resistance film with a first support part, which is a suspension film structure; prepare functional layer slurry, and respectively use a spraying process to prepare the functional layer On the heating resistor film, bake at 150°C for 10 minutes, and sinter at 1100°C for 15 minutes to obtain a gas-sensitive layer and an environmental compensation layer with a thickness of 1um, and then use laser cutting technology to obtain a detection element of 1.2mm×1.2mm in length and width. Chips and compensation element chips; the detection element chip and the compensation element chip are packaged in a ceramic tube shell, and the ceramic tube shell is mounted with an explosion-proof, dust-proof, breathable membrane and a waterproof breathable membrane to obtain a hot-wire gas sensor.
应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施方式中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。It should be understood that although this specification is described in accordance with the implementation manners, not each implementation manner only includes an independent technical solution. This narration in the specification is only for clarity, and those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
上文所列出的一系列的详细说明仅仅是针对本发明的可行性实施方式的具体说明,它们并非用以限制本发明的保护范围,凡未脱离本发明技艺精神所作的等效实施方式或变更均应包含在本发明的保护范围之内。The series of detailed descriptions listed above are only specific descriptions of feasible implementations of the present invention. They are not intended to limit the scope of protection of the present invention. Any equivalent implementations or implementations made without departing from the technical spirit of the present invention All changes shall be included in the protection scope of the present invention.