WO2020189461A1 - Photosensitive coloring composition, cured product, color filter, solid-state imaging element and image display device - Google Patents

Photosensitive coloring composition, cured product, color filter, solid-state imaging element and image display device Download PDF

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Publication number
WO2020189461A1
WO2020189461A1 PCT/JP2020/010668 JP2020010668W WO2020189461A1 WO 2020189461 A1 WO2020189461 A1 WO 2020189461A1 JP 2020010668 W JP2020010668 W JP 2020010668W WO 2020189461 A1 WO2020189461 A1 WO 2020189461A1
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group
compound
photosensitive composition
colored photosensitive
mass
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PCT/JP2020/010668
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French (fr)
Japanese (ja)
Inventor
雅臣 牧野
泰弘 澤村
宏明 出井
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富士フイルム株式会社
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Priority to JP2021507253A priority Critical patent/JP7163481B2/en
Publication of WO2020189461A1 publication Critical patent/WO2020189461A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/44Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Definitions

  • the present disclosure relates to a colored photosensitive composition, a cured product, a color filter, a solid-state image sensor, and an image display device.
  • Color filters are indispensable components for solid-state image sensors and image display devices.
  • the solid-state image sensor and the image display device may generate noise due to the reflection of visible light. Therefore, it is also practiced to provide a light-shielding film on the solid-state image sensor or the image display device to suppress the generation of noise.
  • a colored composition layer is formed by using a colored photosensitive composition containing a colorant, a polymerizable compound, a photopolymerization initiator, and an alkali-soluble resin. A method of exposing and developing this coloring composition layer to form a pattern is known.
  • the conventional photosensitive composition or coloring composition those described in Patent Documents 1 to 3 are known.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2017-129774
  • Patent Document 2 Japanese Patent Application Laid-Open No. 2016-775739
  • Patent Document 3 International Publication No. 2013/018705
  • An object to be solved by the embodiment according to the present disclosure is to provide a colored photosensitive composition having excellent weight loss inhibitory property of the obtained cured product. Further, another problem to be solved by the embodiment according to the present disclosure is a cured product of the colored photosensitive composition, a color filter including the cured product, or a solid-state image sensor or an image display device including the color filter. Is to provide.
  • a colored photosensitive composition containing compound A, a colorant, a polymerizable compound, and a photopolymerization initiator.
  • the compound A is a compound having at least one structure selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene diimide structure, a pyrazinenoquinoxaline structure, and a fullerene structure.
  • the colored photosensitive composition according to ⁇ 1>.
  • ⁇ 4> The colored photosensitive composition according to ⁇ 1> or ⁇ 2>, wherein the polymerizable group contained in the compound A is a radically polymerizable group or a cationically polymerizable group.
  • the radically polymerizable group is an acrylic group, a methacryl group, a vinyl group, or an allyl group.
  • the cationically polymerizable group is an epoxy group, an oxetanyl group, or an allyl group.
  • R 1 is independently a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a hydroxy group, an acyl group, an acyloxy group, a nitro group, or a cyano group.
  • the C a ⁇ C C each independently represent a ring structure
  • R 2 and R 3 independently represent an electron-attracting group, and the wavy line portion represents a bonding position with the ring structure.
  • R 21 to R 24 are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, aryloxy groups, acyl groups, acyloxy groups, hydroxy groups, amino groups, nitro groups and amide groups.
  • R 21 and R 22 , or R 23 and R 24 may be linked to each other to form a ring, and at least one of R 21 to R 24 may be formed.
  • R 31 to R 34 independently represent a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyl group, an acyloxy group, a hydroxy group, an amino group, a nitro group and an amide group.
  • R 31 and R 32 , or R 33 and R 34 may be linked to each other to form a ring, and at least one of R 31 to R 34 is It is a group having a polymerizable group.
  • ⁇ 10> The colored photosensitivity according to any one of ⁇ 1> to ⁇ 9>, wherein the energy level HOMO of the highest occupied orbital of the compound A is more than -7.0 eV and less than -5.5 eV.
  • Composition. ⁇ 11> The colored photosensitive composition according to any one of ⁇ 1> to ⁇ 10>, wherein the energy level LUMO of the lowest empty orbit of the compound A is more than -5.0 eV and less than -3.5 eV. object.
  • ⁇ 12> The colored photosensitive composition according to any one of ⁇ 1> to ⁇ 11>, wherein the colorant contains a phthalocyanine pigment.
  • ⁇ 13> The colored photosensitive composition according to any one of ⁇ 1> to ⁇ 12>, wherein the photopolymerization initiator contains an oxime compound.
  • ⁇ 14> The colored photosensitive composition according to any one of ⁇ 1> to ⁇ 13>, which further contains a polymer dispersant.
  • ⁇ 15> The colored photosensitive composition according to any one of ⁇ 1> to ⁇ 14>, which further contains an alkali-soluble resin.
  • ⁇ 16> A cured product obtained by curing the colored photosensitive composition according to any one of ⁇ 1> to ⁇ 15> above.
  • ⁇ 17> A color filter comprising the cured product according to ⁇ 16> above.
  • ⁇ 18> A solid-state image sensor having the color filter according to ⁇ 17> above.
  • ⁇ 19> An image display device having the color filter according to ⁇ 17> above.
  • a colored photosensitive composition having excellent weight loss inhibitory property of the obtained cured product. Further, according to another embodiment according to the present disclosure, a cured product of the colored photosensitive composition, a color filter including the cured product, or a solid-state image sensor or an image display device including the color filter is provided.
  • the amount of each component in the composition is the total amount of the plurality of applicable substances present in the composition unless otherwise specified, when a plurality of substances corresponding to each component are present in the composition. Means.
  • the notation that does not describe substitution or non-substitution includes those having no substituent as well as those having a substituent.
  • the "alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
  • the term "process” is included in this term as long as the intended purpose of the process is achieved, not only in an independent process but also in the case where it cannot be clearly distinguished from other processes. Is done.
  • the “total solid content” refers to the total mass of the components excluding the solvent from the total composition of the composition.
  • the “solid content” is a component excluding the solvent as described above, and may be, for example, a solid or a liquid at 25 ° C.
  • “% by mass” and “% by weight” are synonymous, and “parts by mass” and “parts by weight” are synonymous.
  • a combination of two or more preferred embodiments is a more preferred embodiment.
  • the weight average molecular weight (Mw) and the number average molecular weight (Mn) in the present disclosure use columns of TSKgel GMHxL, TSKgel G4000HxL, and TSKgel G2000HxL (all are trade names manufactured by THF Co., Ltd.).
  • the molecular weight is detected by the solvent THF (tetrahydrofuran) and the differential refraction meter by the gel permeation chromatography (GPC) analyzer, and is converted by using polystyrene as a standard substance.
  • THF tetrahydrofuran
  • GPC gel permeation chromatography
  • a first aspect of the colored photosensitive composition according to the present disclosure is compound A, a colorant, a polymerizable compound, which has a polymerizable group and has an energy level LUMO of the lowest empty orbit of less than ⁇ 3.5 eV.
  • the second aspect of the colored photosensitive composition according to the present disclosure is that it has a polymerizable group and has a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, a pyrazinenoquinoxaline structure, and a structure.
  • the term "colored photosensitive composition according to the present disclosure” refers to both the first aspect and the second aspect.
  • the colored photosensitive composition according to the present disclosure tends to be excellent in sensitivity by containing the above-mentioned compound A. Further, the colored photosensitive composition according to the present disclosure has an excellent balance between the polymerization rate and the polymerization terminating ability by containing the above compound A, the residual amount of low molecular weight components is reduced, and at the time of curing It is presumed that the compound A itself can be immobilized in the film, the exposed shape is easily maintained, and the linearity of the obtained pattern is also excellent.
  • Compound A in the first aspect of the colored photosensitive composition according to the present disclosure has a polymerizable group and has an energy level LUMO of the lowest empty orbit of less than ⁇ 3.5 eV.
  • the compound A in the second aspect of the colored photosensitive composition according to the present disclosure has a polymerizable group and has a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, and a pyrazinoquinoxaline. It has a structure and at least one structure selected from the group consisting of fullerene structures.
  • the term "Compound A" refers to both Compound A in the first aspect and Compound A in the second aspect.
  • the energy level LUMO (simply referred to as “LUMO”) of the lowest empty orbit of Compound A in the first aspect of the colored photosensitive composition according to the present disclosure is less than ⁇ 3.5 eV, and the weight loss inhibitory property. From the viewpoint of pattern linearity and sensitivity, it is preferably less than -3.7 eV, and particularly preferably less than -3.9 eV.
  • the LUMO of Compound A in the second aspect of the colored photosensitive composition according to the present disclosure is preferably less than ⁇ 3.5 eV from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, preferably -3.
  • the lower limit of LUMO in Compound A is preferably more than ⁇ 5.0 eV, more preferably -4.8 eV or more, and more preferably ⁇ 4.8 eV or more, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. It is particularly preferably 4.5 eV or more.
  • the LUMO of Compound A and the energy level HOMO of the highest occupied orbit (also simply referred to as "HOMO") in the present disclosure shall be measured according to the following method.
  • the HOMO of each compound is measured as follows.
  • the ionization potential of each 5 mg of each compound is measured by an atmospheric photoelectron spectrometer (AC-3, manufactured by RIKEN Keiki Co., Ltd.), and the value is defined as HOMO.
  • 20 mg of each compound was dissolved in 200 mL of toluene, and toluene was added to 2 mL of this solution to make 50 mL.
  • UV-Vis-NIR ultraviolet-visible near-infrared
  • spectrophotometer model number: Cary5000, Agilent Measurement is performed in the wavelength range of 200 nm to 800 nm using (manufactured by Technology), the absorption edge at the wavelength of 400 nm to 700 nm is calculated, and the value is defined as the S0-S1 transition energy gap (HOMO-LUMO energy difference ⁇ E).
  • the energy level HOMO of the highest occupied orbital of Compound A is preferably -7.5 eV or more and -5.0 eV or less, preferably -7.0 eV, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. It is more preferably more than -5.5 eV, and particularly preferably -6.8 eV or more and -6.0 eV or less.
  • the HOMO-LUMO energy difference ⁇ E (LUMO value-HOMO value) of Compound A is preferably 1.0 eV or more and 4.0 eV or less from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. It is more preferably 1.0 eV or more and 3.0 eV or less, further preferably 1.2 eV or more and 2.8 eV or less, and particularly preferably 1.5 eV or more and 2.6 eV or less.
  • the polymerizable group of Compound A is not particularly limited and may be a known polymerizable group, but from the viewpoint of weight loss inhibitory property, pattern linearity and sensitivity, a radical polymerizable group or a cationically polymerizable group can be used. It is preferably a group, more preferably a radically polymerizable group.
  • an ethylenically unsaturated group is preferable.
  • the ethylenically unsaturated group include an acrylic group, a methacryl group, a vinyl group, a maleimide group, and an allyl group.
  • the radically polymerizable groups include (meth) acryloxy group, (meth) acrylamide group, vinyl ester group, vinyl ether group, and styryl group (vinylphenyl) from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. Group), maleimide group, or (meth) allyl group is preferable.
  • (Meta) acryloxy group is particularly preferable, and acryloxy group is most preferable.
  • the cationically polymerizable group is preferably a cyclic ether group, a cyclic imino ether group, or an ethylenically unsaturated group, and is an epoxy group or an oxetanyl group from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. , Or a (meth) allyl group, more preferably an epoxy group.
  • Compound A preferably has two or more polymerizable groups in one molecule from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity.
  • the upper limit of the number of polymerizable groups in the compound A1 molecule is not particularly limited, but is preferably 6 or less, and more preferably 4 or less.
  • the weight average molecular weight Mw of Compound A is preferably 50 or more, more preferably 150 or more, still more preferably 200 or more, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. , 300 or more is particularly preferable, and 400 or more is most preferable.
  • the lower limit of Mw of compound A is not particularly limited, but is preferably less than 1,500, and more preferably 1,000 or less.
  • the molecular weight of compound A preferably has a distribution.
  • Mw / Mn is preferably 1.01 or more, more preferably 1.05 or more, further preferably 1.1 or more, and particularly preferably 1.1 or more and 2.0 or less.
  • -Chemical structure of compound A- Compound A in the second aspect of the colored photosensitive composition according to the present disclosure is selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, a pyrazinoquinoxaline structure, and a fullerene structure.
  • a quinone structure or a quinodimethane structure it is preferable to have a quinone structure or a quinodimethane structure, and a quinone structure or a tetracyanoquinodimethane.
  • the compound A in the first aspect of the colored photosensitive composition according to the present disclosure has a quinone structure, a quinodimethane structure, a dithiorene structure, and a naphthalene diimide from the viewpoints of weight loss inhibitory property, pattern linearity, sensitivity, and availability.
  • It preferably has at least one structure selected from the group consisting of a structure, a perylene imide structure, a pyrazinoquinoxaline structure, and a fullerene structure, more preferably a quinone structure or a quinodimethane structure, and a quinone structure or a tetracyanoquinodimethane. It is more preferable to have a quinodimethane structure, and particularly preferably to have a tetracyanoquinodimethane structure.
  • the compound A is preferably a compound represented by any of the following formulas (1A) to (1C), and the following formula (1A) or
  • the compound represented by the formula (1B) is more preferable, and the compound represented by the following formula (1A) is particularly preferable.
  • R 1 is independently a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a hydroxy group, an acyl group, an acyloxy group, a nitro group, or a cyano group.
  • the C a ⁇ C C each independently represent a ring structure
  • m is independently 0 or more and represents
  • R 2 and R 3 independently represent an electron-attracting group, and the wavy line portion represents a bonding position with the ring structure.
  • R 1 in the formulas (1A) to (1C) is preferably a halogen atom, an alkyl group, an aryl group, an alkoxy group, an acyloxy group, a nitro group, or a cyano group, and is preferably a fluorine atom or a chlorine atom.
  • Alkoxy group or cyano group is more preferable, and fluorine atom, nitro group, methoxy group or cyano group is particularly preferable.
  • m in the formulas (1A) to (1C) is an integer of 0 to 3 independently.
  • m in the formula (1A) is preferably an integer of 0 to 2, and preferably an integer of 1 or 2.
  • m in the formula (1B) is preferably an integer of 0 to 2, and preferably an integer of 0 or 1.
  • m in the formula (1C) is preferably an integer of 0 to 2.
  • C A to C C in the formulas (1A) to (1C) are preferably independently having a benzene ring structure or a naphthalene ring structure, and more preferably a benzene ring structure.
  • Each Y 1 in the formula (1A) ⁇ formula (1C) is independently an oxygen atom, a sulfur atom, or is preferably NR N, oxygen atom, or, more preferably a sulfur atom, an oxygen atom It is particularly preferable to have.
  • a hydrogen atom, or, preferably an alkyl group, a hydrogen atom, or, more preferably a methyl group, is a hydrogen atom Especially preferable.
  • Ani ⁇ in the formulas (1A) to (1C) preferably has a carboxylic acid anion structure or a sulfonic acid anion structure.
  • Cat + in the formulas (1A) to (1C) preferably has a quaternary ammonium cation structure.
  • L 1 in the formulas (1A) to (1C) is preferably a divalent linking group independently, and more preferably an alkylene group, an alkyleneoxyalkylene group, or a polyalkyleneoxyalkylene group. It is more preferably an alkylene group and particularly preferably an ethylene group.
  • R 2 and R 3 in the above formula (1X) are preferably cyano groups or alkoxycarbonyl groups, respectively, and are particularly preferably cyano groups. Further, it is preferable that R 2 and R 3 in the above formula (1X) have the same group.
  • X 1 and X 2 in the formulas (1A) to (1C) are independently oxygen atoms or groups represented by the above formula (1X), and are oxygen atoms or R 2 and R. 3 is more preferably a group represented by the above formula represents a cyano group (1X), and particularly preferably R 2 and R 3 is a group represented by the formula is a cyano group (1X).
  • a 1 in the formulas (1A) to (1C) is preferably a radically polymerizable group or a cationically polymerizable group from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, and is preferably a radically polymerizable group.
  • N in the formulas (1A) to (1C) is preferably an integer of 1 to 4, more preferably an integer of 1 to 3, and particularly preferably 1 or 2.
  • the above formulas (1A) to (1C) are preferably compounds represented by the following formulas (2) or (3) from the viewpoints of weight loss inhibitory property, pattern linearity, and sensitivity.
  • Compound A is preferably a compound represented by the following formula (2) or formula (3) from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity.
  • R 21 to R 24 are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, aryloxy groups, acyl groups, acyloxy groups, hydroxy groups, amino groups, nitro groups and amide groups. , Or a group having a polymerizable group, and R 21 and R 22 or R 23 and R 24 may be independently linked to each other to form a ring, and at least R 21 to R 24 may be formed.
  • One is a group having a polymerizable group.
  • R 31 to R 34 independently represent a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyl group, an acyloxy group, a hydroxy group, an amino group, a nitro group and an amide group.
  • R 31 and R 32 , or R 33 and R 34 may be independently linked to each other to form a ring, and at least R 31 to R 34 may be formed.
  • One is a group having a polymerizable group.
  • R 21 to R 24 and R 31 to R 34 in the formula (2) or the formula (3) are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, acyloxy groups, nitro groups, or cyano groups. It is preferably a fluorine atom, a chlorine atom, an alkoxy group, or a cyano group, and particularly preferably a fluorine atom, a nitro group, a methoxy group, or a cyano group.
  • the polymerizable group in the formula (2) or the formula (3) has the same meaning as the polymerizable group in the above formulas (1A) to (1C), and the preferred embodiment is also the same.
  • R 21 and R 22 , or R 23 and R 24 , or R 31 and R 32 , or R 33 and R 34 are independently connected to each other to form a ring.
  • the ring to be formed preferably has a benzene ring structure or a naphthalene ring structure, and more preferably a benzene ring structure.
  • the formula (2) or formula (3) preferably has two or more polymerizable groups in one molecule from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity.
  • the upper limit of the number of polymerizable groups in the formula (2) or the formula (3) is not particularly limited, but is preferably 6 or less, and more preferably 4 or less.
  • the solubility of compound A in the solvent used at 25 ° C. is preferably less than 0.5 g / mL, more preferably less than 0.1 g / mL, from the viewpoint of suppressing leaching from the obtained pattern. It is preferably less than 0.05 g / mL, especially preferably less than 0.05 g / mL.
  • the lower limit of the solubility is not particularly limited, and is preferably 0.001 g / mL or more.
  • the lower limit of the solubility in PGMEA is not particularly limited, and is preferably 0.001 g / mL or more.
  • the colored photosensitive composition according to the present disclosure may contain one compound A alone or two or more compounds A.
  • the content of compound A in the colored photosensitive composition according to the present disclosure is 0.01% by mass with respect to the total mass of the colorant from the viewpoints of weight loss inhibitory property, pattern linearity, sensitivity, and spectral characteristics. It is preferably about 20% by mass, more preferably 0.05% by mass to 10% by mass, and particularly preferably 0.1% by mass to 5% by mass.
  • A-1 to A-32 which are specific examples of Compound A, will be shown, but the present invention is not limited thereto.
  • the method for producing the compound A is not particularly limited, and the compound A can be produced by referring to a known method.
  • the method for adding the compound A to the colored photosensitive composition is not particularly limited, and a known addition method and a known mixing method can be used.
  • the colored photosensitive composition according to the present disclosure contains a colorant.
  • the colorant include pigments and dyes, but pigments are preferable.
  • pigments include white pigments, black pigments, chromatic pigments, and near-infrared absorbing pigments.
  • the white pigment includes not only pure white but also a light gray (for example, grayish white, light gray, etc.) pigment close to white.
  • the pigment may be either an inorganic pigment or an organic pigment.
  • an inorganic pigment or a material in which a part of the organic-inorganic pigment is replaced with an organic chromophore can be used.
  • Hue design can be facilitated by replacing inorganic pigments and organic-inorganic pigments with organic chromophores.
  • the pigment preferably has a maximum absorption wavelength in the wavelength range of 400 nm to 2,000 nm, and more preferably has a maximum absorption wavelength in the wavelength range of 400 nm to 700 nm.
  • the colored photosensitive composition according to the present disclosure can be preferably used as a colored photosensitive composition for forming colored pixels in a color filter.
  • the colored pixel include a red pixel, a green pixel, a blue pixel, a magenta color pixel, a cyan color pixel, a yellow color pixel, and the like. Among them, green pixels are preferably mentioned.
  • the average primary particle size of the pigment used in the present disclosure is preferably 1 nm to 200 nm.
  • the lower limit is more preferably 5 nm or more, and particularly preferably 10 nm or more.
  • the upper limit is more preferably 180 nm or less, further preferably 150 nm or less, and even more preferably 100 nm or less.
  • the primary particle size of the pigment can be determined from a photograph obtained by observing the primary particles of the pigment with a transmission electron microscope. Specifically, the projected area of the primary particles of the pigment is obtained, and the corresponding circle-equivalent diameter is calculated as the primary particle diameter of the pigment.
  • the average primary particle diameter in the present disclosure is an arithmetic mean value of the primary particle diameter for the primary particles of 400 pigments. Further, the primary particles of the pigment refer to independent particles without aggregation.
  • the colored photosensitive composition according to the present disclosure preferably contains a green colorant as a colorant, and more preferably contains a green colorant and a yellow colorant, from the viewpoint of more exerting the effects in the present disclosure. .. Further, the colorant preferably contains a phthalocyanine pigment, and more preferably contains a green phthalocyanine pigment, from the viewpoint of sensitivity and spectral characteristics.
  • phthalocyanine compounds such as Color Index (CI) Pigment Green 7, 10, 36, 37, 58, 59, 62, 63, 64 (phthalocyanine), 65 (phthalocyanine), 66 (phthalocyanine) Can be mentioned.
  • zinc halide has an average of 10 to 14 halogen atoms in one molecule, an average of 8 to 12 bromine atoms, and an average of 2 to 5 chlorine atoms.
  • a phthalocyanine compound can also be used. Specific examples thereof include the compound described in International Publication No. 2015/118720, the compound described in Chinese Patent Application Publication No.
  • a phthalocyanine compound having a phosphate ester as a ligand a phthalocyanine compound having a phosphate ester as a ligand
  • Japanese Patent Application Laid-Open No. 2019-038958 The compounds described in the above can also be used.
  • the green pigment the green pigment described in JP-A-2019-8014 or JP-A-2018-180023 may be used.
  • the green colorant may be used alone or in combination of two or more.
  • the content of the green colorant in the total solid content of the colored photosensitive composition is preferably 10% by mass to 80% by mass.
  • the lower limit is more preferably 15% by mass or more, and particularly preferably 20% by mass or more.
  • the upper limit is more preferably 70% by mass or less, and particularly preferably 60% by mass or less.
  • yellow colorant examples include azo compounds, quinophthalone compounds, isoindolinone compounds, isoindoline compounds, anthraquinone compounds and the like. Of these, an isoindoline compound is preferable because it is easy to form a film having spectral characteristics suitable for green pixels.
  • the color index (CI) Pigment Yellow (hereinafter, also simply referred to as “PY”) 1,2,3,4,5,6,10,11,12,13,14,15, 16,17,18,20,24,31,32,34,35,35: 1,36,36: 1,37,37: 1,40,42,43,53,55,60,61,62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166 167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,
  • the pigment described in JP-A-2017-201003 and the pigment described in JP-A-2017-197719 can be used.
  • the yellow pigment at least one anion selected from the group consisting of an azo compound represented by the following formula (Y) and an azo compound having a tautomeric structure thereof, two or more kinds of metal ions, and a melamine compound.
  • Y an azo compound represented by the following formula (Y)
  • azo compound having a tautomeric structure thereof two or more kinds of metal ions
  • a melamine compound a metal azo pigment containing the above can also be used.
  • RY1 and RY2 independently represent -OH or -NR Y5 RY6
  • Y7 independently represents a hydrogen atom or an alkyl group.
  • the number of carbon atoms of the alkyl group represented by RY5 to RY7 is preferably 1 to 10, more preferably 1 to 6, and even more preferably 1 to 4.
  • the alkyl group may be linear, branched or cyclic, and is preferably linear or branched, more preferably linear.
  • the alkyl group may have a substituent. Preferred examples of the substituent include a halogen atom, a hydroxy group, an alkoxy group, a cyano group and an amino group.
  • paragraphs 0011 to 0062, 0139 to 0190, and paragraphs 0010 to 0065 and 0142 to 0222 of JP-A-2017-171915 can be referred to, and these contents are incorporated in the present specification.
  • a quinophthalone dimer represented by the following formula (Q) can also be preferably used.
  • the quinophthalone dimer described in Japanese Patent No. 6443711 can also be preferably used.
  • X 1 to X 16 independently represent a hydrogen atom or a halogen atom, and Z represents an alkylene group having 1 to 3 carbon atoms.
  • the quinophthalone pigments described in the publication can also be preferably used.
  • the quinophthalone compounds described in paragraphs 0011 to 0034 of JP2013-54339, the quinophthalone compounds described in paragraphs 0013 to 0058 of JP2014-26228, and JP-A-2019-8014 are quinophthalone compounds described in Japanese Patent No. 6607427, the compound described in Korean Publication No. 10-2014-0034963, the compound described in JP-A-2017-0950706, Taiwan Patent Application Publication No. 201920495.
  • the compound described in Japanese Patent Application Laid-Open No. 6607427, the compound described in Japanese Patent Publication No. 6607427, and the like can also be used.
  • the compound described in JP-A-2018-62644 can also be used.
  • this compound can also be used as a pigment derivative.
  • C.I. I. Pigment Yellow 129 may be added for the purpose of improving weather resistance.
  • the yellow colorant may be used alone or in combination of two or more.
  • the content of the yellow colorant in the colored photosensitive composition according to the present disclosure is preferably 10 parts by mass to 100 parts by mass with respect to 100 parts by mass of the green colorant.
  • the upper limit is preferably 80 parts by mass or less, more preferably 70 parts by mass or less, and further preferably 50 parts by mass or less.
  • the lower limit is preferably 12.5 parts by mass or more, more preferably 14 parts by mass or more, and further preferably 16 parts by mass or more.
  • chromatic colorants other than green and yellow examples include the following.
  • An aluminum phthalocyanine compound having a phosphorus atom can also be used as the blue pigment.
  • Specific examples include the compounds described in paragraphs 0022 to 0030 of JP2012-247591A and paragraphs 0047 of JP2011-157478A.
  • red pigment a diketopyrrolopyrrole pigment in which at least one bromine atom is substituted in the structure described in JP-A-2017-2013384, and a diketopyrrolopyrrole-based pigment described in paragraphs 0016 to 0022 of Patent No. 6248838.
  • the red pigment described in Japanese Patent No. 6516119, the red pigment described in Japanese Patent No. 6525101, and the like can also be used.
  • red pigment a compound having a structure in which an aromatic ring group having an oxygen atom, a sulfur atom or a nitrogen atom bonded to the aromatic ring is bonded to a diketopyrrolopyrrole skeleton can also be used. It can.
  • a compound represented by the formula (DPP1) is preferable, and a compound represented by the formula (DPP2) is more preferable.
  • R 11 and R 13 each independently represent a substituent
  • R 12 and R 14 each independently represent a hydrogen atom, an alkyl group, an aryl group or a heteroaryl group
  • n 11 and n 13 are independent of each other.
  • X 12 and X 14 independently represent an oxygen atom, a sulfur atom or a nitrogen atom
  • m12 represents 1 and X.
  • m12 represents 2 when X 14 is a nitrogen atom.
  • the substituents represented by R 11 and R 13 include an alkyl group, an aryl group, a halogen atom, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heteroaryloxycarbonyl group, an amide group, a cyano group, a nitro group and a trifluoro group.
  • Preferred specific examples include a methyl group, a sulfoxide group, and a sulfo group.
  • White pigments include titanium oxide, strontium titanate, barium titanate, zinc oxide, magnesium oxide, zirconium oxide, aluminum oxide, barium sulfate, silica, talc, mica, aluminum hydroxide, calcium silicate, aluminum silicate, hollow. Examples include resin particles and zinc sulfide.
  • the white pigment is preferably particles having a titanium atom, and more preferably titanium oxide. Further, the white pigment is preferably particles having a refractive index of 2.10 or more with respect to light having a wavelength of 589 nm. The above-mentioned refractive index is preferably 2.10 to 3.00, and more preferably 2.50 to 2.75.
  • titanium oxide described in "Titanium oxide physical properties and applied technology, by Manabu Kiyono, pp. 13-45, published on June 25, 1991, published by Gihodo Publishing" can also be used.
  • the white pigment is not limited to a single inorganic substance, but particles compounded with another material may be used. For example, particles having vacancies or other materials inside, particles in which a large number of inorganic particles are attached to core particles, core particles composed of core particles composed of polymer particles, and shell composite particles composed of a shell layer composed of inorganic nanoparticles are used. Is preferable.
  • the core and shell composite particles composed of the core particles composed of the polymer particles and the shell layer composed of the inorganic nanoparticles for example, the description in paragraphs 0012 to 0042 of JP2015-047520 can be referred to. The contents are incorporated herein by reference.
  • Hollow inorganic particles can also be used as the white pigment.
  • Hollow inorganic particles are inorganic particles having a structure having cavities inside, and are inorganic particles having cavities surrounded by an outer shell.
  • Examples of the hollow inorganic particles include the hollow inorganic particles described in JP-A-2011-075786, International Publication No. 2013/061621, JP-A-2015-164881, and the like, and the contents thereof are incorporated in the present specification. Is done.
  • the black pigment is not particularly limited, and known ones can be used.
  • carbon black, titanium black, graphite and the like can be mentioned, with carbon black and titanium black being preferable, and titanium black being more preferable.
  • Titanium black is black particles containing a titanium atom, and low-order titanium oxide or titanium oxynitride is preferable.
  • the surface of titanium black can be modified as needed for the purpose of improving dispersibility and suppressing cohesion.
  • the black pigment examples include Color Index (CI) Pigment Black 1, 7 and the like. Titanium black preferably has a small primary particle size and an average primary particle size of each particle. Specifically, the average primary particle size is preferably 10 to 45 nm. Titanium black can also be used as a dispersion. For example, a dispersion containing titanium black particles and silica particles and having a content ratio of Si atoms and Ti atoms in the dispersion adjusted to a range of 0.20 to 0.50 can be mentioned. Regarding the above dispersion, the description in paragraphs 0020 to 0105 of JP2012-169556A can be referred to, and the content thereof is incorporated in the present specification. Examples of commercially available titanium black products include titanium black 10S, 12S, 13R, 13M, 13M-C, 13RN, 13MT (trade name: manufactured by Mitsubishi Materials Corporation), Tilac D ( Product name: Ako Kasei Co., Ltd.)
  • a pigment having an X-ray diffraction pattern by a specific CuK ⁇ ray is preferably mentioned.
  • the phthalocyanine pigment described in Japanese Patent No. 6561862 the diketopyrrolopyrrole pigment described in Japanese Patent No. 6413872, and the azo pigment described in Japanese Patent No. 6281345 (CI Pigment Red269). And so on.
  • dye there are no particular restrictions on the dye, and known dyes can be used.
  • a thiazole compound described in JP2012-158649A an azo compound described in JP2011-184493, an azo compound described in JP2011-145540, and JP-A-2019.
  • the methine dye described in JP-A-073695, the methine dye described in JP-A-2019-073696, the methine dye described in JP-A-2019-073697, and the methine dye described in JP-A-2019-073698 are used. You can also do it.
  • a dye multimer can also be used in the colored photosensitive composition according to the present disclosure.
  • the dye multimer is preferably a dye that is used by dissolving it in a solvent.
  • the dye multimers may form particles.
  • the dye multimer in the particle state can be obtained by, for example, emulsion polymerization, and specific examples thereof include the compounds and production methods described in JP-A-2015-214682.
  • the dye multimer has two or more dye structures in one molecule, and preferably has three or more dye structures. The upper limit is not particularly limited, but may be 100 or less.
  • the plurality of dye structures contained in one molecule may have the same dye structure or different dye structures.
  • the weight average molecular weight (Mw) of the dye multimer is preferably 2,000 to 50,000.
  • the lower limit is more preferably 3,000 or more, and even more preferably 6,000 or more.
  • the upper limit is more preferably 30,000 or less, further preferably 20,000 or less.
  • Dye multimers are described in JP-A-2011-213925, JP-A-2013-041097, JP-A-2015-028144, JP-A-2015-030742, International Publication No. 2016/031442, and the like. Compounds can also be used.
  • the colored photosensitive composition according to the present disclosure may contain one kind of colorant alone or two or more kinds.
  • the content of the colorant in the total solid content of the colored photosensitive composition is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 20% by mass or more. It is particularly preferably 30% by mass or more, and most preferably 40% by mass or more.
  • the upper limit of the content of the colorant is preferably 80% by mass or less, more preferably 70% by mass or less, and further preferably 60% by mass or less.
  • the colored photosensitive composition according to the present disclosure contains a polymerizable compound.
  • the polymerizable compound is a compound other than compound A.
  • the polymerizable compound is preferably a compound having an ethylenically unsaturated group. Examples of the ethylenically unsaturated group include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
  • the polymerizable compound used in the present disclosure is preferably a radically polymerizable compound.
  • the polymerizable compound may be in any chemical form such as a monomer, a prepolymer or an oligomer, but a monomer is preferable.
  • the molecular weight of the polymerizable compound is preferably 100 to 3,000.
  • the upper limit is more preferably 2,000 or less, further preferably 1,500 or less, and particularly preferably 1,000 or less.
  • the lower limit is more preferably 150 or more, and even more preferably 250 or more.
  • the polymerizable compound is preferably a compound containing 3 or more ethylenically unsaturated groups, more preferably a compound containing 3 to 15 ethylenically unsaturated groups, and 3 to 6 ethylenically unsaturated groups. It is more preferable that the compound contains two compounds. Further, the polymerizable compound is preferably a (meth) acrylate compound having 3 to 15 functionalities, and more preferably a (meth) acrylate compound having 3 to 6 functionalities.
  • polymerizable compound examples include paragraphs 0905 to 0108 of JP2009-288705A, paragraphs 0227 of JP2013-209760A, paragraphs 0254 to 0257 of JP2008-292970, and Japanese Patent Application Laid-Open No. 2013-. It is described in paragraphs 0034 to 0038 of Japanese Patent Application Laid-Open No. 253224, paragraphs 0477 of Japanese Patent Application Laid-Open No. 2012-208494, Japanese Patent Application Laid-Open No. 2017-048367, Japanese Patent No. 6057891, Japanese Patent No. 6031807, and Japanese Patent Application Laid-Open No. 2017-194662. These compounds are incorporated herein by reference.
  • the lower limit is more preferably 3 mmol / g or more, further preferably 4 mmol / g or more, and particularly preferably 5 mmol / g or more.
  • the upper limit is more preferably 12 mmol / g or less, further preferably 10 mmol / g or less, and particularly preferably 8 mmol / g or less.
  • dipentaerythritol triacrylate (commercially available KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (commercially available KAYARAD D-320; Nihon Kayaku Co., Ltd.) ), Dipentaerythritol penta (meth) acrylate (commercially available KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (commercially available KAYARAD DPHA; Nippon Kayaku) NK ester A-DPH-12E manufactured by Shin-Nakamura Chemical Industry Co., Ltd., and a structure in which these (meth) acryloyl groups are bonded via ethylene glycol and / or propylene glycol residues.
  • SR454, SR499 commercially available from Sartmer
  • diglycerin EO ethylene oxide modified (meth) acrylate
  • pentaerythritol tetraacrylate manufactured by Shin Nakamura Chemical Industry Co., Ltd.
  • NK ester A-TMMT 1,6-hexanediol diacrylate
  • RP-1040 manufactured by Nihon Kayaku Co., Ltd.
  • Aronix TO-2349 Toa Synthetic Co., Ltd.)
  • NK Oligo UA-7200 Shin Nakamura Chemical Industry Co., Ltd.
  • 8UH-1006, 8UH-1012 Taisei Fine Chemical Co., Ltd.
  • Light Acrylate POB-A0 Korean Chemical Industry Co., Ltd.
  • trimethylolpropane tri (meth) acrylate trimethylolpropane propyleneoxy-modified tri (meth) acrylate, trimethylolpropane ethyleneoxy-modified tri (meth) acrylate, and isocyanurate ethyleneoxy-modified tri (meth) acrylate.
  • a trifunctional (meth) acrylate compound such as pentaerythritol trimethylolpropane (meth) acrylate.
  • Commercially available trifunctional (meth) acrylate compounds include Aronix M-309, M-310, M-321, M-350, M-360, M-313, M-315, M-306, and M-305.
  • M-303, M-452, M-450 manufactured by Toagosei Co., Ltd.
  • a compound having an isocyanurate skeleton can also be used.
  • the solvent resistance of the obtained membrane can be improved.
  • Specific examples of the polymerizable compound having an isocyanurate skeleton include tris isocyanurate (2-acryloyloxyethyl), ⁇ -caprolactone-modified tris- (2-acryloyloxyethyl) isocyanurate, and the like.
  • a compound having an acid group can also be used.
  • the polymerizable compound in the unexposed portion can be easily removed during development, and the generation of development residue can be suppressed.
  • the acid group include a carboxy group, a sulfo group, a phosphoric acid group and the like, and a carboxy group is preferable.
  • Examples of commercially available products of the polymerizable compound having an acid group include Aronix M-305, M-510, M-520, and Aronix TO-2349 (manufactured by Toagosei Co., Ltd.).
  • the preferable acid value of the polymerizable compound having an acid group is 0.1 mgKOH / g to 40 mgKOH / g, and more preferably 5 mgKOH / g to 30 mgKOH / g.
  • the acid value of the polymerizable compound is 0.1 mgKOH / g or more, the solubility in a developing solution is good, and when it is 40 mgKOH / g or less, it is advantageous in production and handling.
  • a compound having a caprolactone structure can also be used.
  • Polymerizable compounds having a caprolactone structure are commercially available from Nippon Kayaku Co., Ltd. as the KAYARAD DPCA series, and examples thereof include DPCA-20, DPCA-30, DPCA-60, and DPCA-120.
  • a polymerizable compound having an alkyleneoxy group can also be used.
  • the polymerizable compound having an alkyleneoxy group is preferably a polymerizable compound having an ethyleneoxy group and / or a propyleneoxy group, more preferably a polymerizable compound having an ethyleneoxy group, and having 4 to 20 ethyleneoxy groups 3 to 3 to A hexafunctional (meth) acrylate compound is more preferred.
  • Commercially available products of the polymerizable compound having an alkyleneoxy group include SR-494, which is a tetrafunctional (meth) acrylate having four ethyleneoxy groups manufactured by Sartomer, and a trifunctional (meth) having three isobutyleneoxy groups. Examples thereof include KAYARAD TPA-330, which is an acrylate.
  • a polymerizable compound having a fluorene skeleton can also be used.
  • examples of commercially available products of the polymerizable compound having a fluorene skeleton include Ogsol EA-0200 and EA-0300 (manufactured by Osaka Gas Chemical Co., Ltd., a (meth) acrylate monomer having a fluorene skeleton).
  • the polymerizable compound it is also preferable to use a compound that does not substantially contain an environmentally regulated substance such as toluene.
  • an environmentally regulated substance such as toluene.
  • examples of commercially available products of such compounds include KAYARAD DPHA LT and KAYARAD DPEA-12 LT (manufactured by Nippon Kayaku Co., Ltd.).
  • the term "substantially free” in the present disclosure means that the content of the colored photosensitive composition in the total solid content is 0.1% by mass or less, and 0.05% by mass or less. Is preferable, and it is more preferable that it is not contained.
  • Examples of the polymerizable compound include urethane acrylates as described in JP-A-48-041708, JP-A-51-0371993, JP-A-02-032293, and JP-A-02-016765.
  • Urethane compounds having an ethylene oxide-based skeleton described in Japanese Patent Publication No. 58-049860, Japanese Patent Publication No. 56-017654, Japanese Patent Publication No. 62-039417, and Japanese Patent Publication No. 62-039418 are also suitable.
  • a polymerizable compound having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-01-105238.
  • the polymerizable compounds are UA-7200 (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, UA-306I, AH-600, Commercially available products such as T-600, AI-600, and LINK-202UA (manufactured by Kyoeisha Chemical Co., Ltd.) can also be used.
  • the content of the polymerizable compound in the total solid content of the colored photosensitive composition is preferably 0.1% by mass to 30% by mass.
  • the lower limit is more preferably 0.5% by mass or more, further preferably 1% by mass or more, particularly preferably 3% by mass or more, and most preferably 5% by mass or more.
  • the upper limit is more preferably 25% by mass or less, further preferably 20% by mass or less, and particularly preferably 15% by mass or less.
  • the polymerizable compound may be used alone or in combination of two or more. When two or more types are used in combination, the total of them is preferably in the above range.
  • the total content of the resin and the polymerizable compound described later in the total solid content of the colored photosensitive composition is preferably 10% by mass to 50% by mass.
  • the lower limit is preferably 15% by mass or more, more preferably 20% by mass or more, and further preferably 25% by mass or more.
  • the upper limit is preferably 45% by mass or less, more preferably 40% by mass or less, and further preferably 35% by mass or less.
  • the content of the polymerizable compound is preferably 10 parts by mass to 2,000 parts by mass with respect to 100 parts by mass of the photopolymerization initiator.
  • the upper limit is preferably 1,800 parts by mass or less, and more preferably 1500 parts by mass or less.
  • the lower limit is preferably 30 parts by mass or more, and more preferably 50 parts by mass or more.
  • the colored photosensitive composition according to the present disclosure contains a photopolymerization initiator.
  • the photopolymerization initiator is not particularly limited and may be appropriately selected from known photopolymerization initiators. For example, a compound having photosensitivity to light rays in the ultraviolet region to the visible region is preferable.
  • the photopolymerization initiator is preferably a photoradical polymerization initiator.
  • photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, compounds having a triazine skeleton, compounds having an oxadiazole skeleton, etc.), acylphosphine compounds, hexaarylbiimidazoles, oxime compounds, organic peroxides, and thio compounds. , Ketone compounds, aromatic onium salts, ⁇ -hydroxyketone compounds, ⁇ -aminoketone compounds and the like.
  • the photopolymerization initiator includes trihalomethyltriazine compound, benzyldimethylketal compound, ⁇ -hydroxyketone compound, ⁇ -aminoketone compound, acylphosphine compound, phosphine oxide compound, metallocene compound, oxime compound, and triarylimidazole. It is preferably a dimer, an onium compound, a benzothiazole compound, a benzophenone compound, an acetophenone compound, a cyclopentadiene-benzene-iron complex, a halomethyloxaziazole compound and a 3-aryl substituted coumarin compound, and an oxime compound and an ⁇ -hydroxyketone compound.
  • photopolymerization initiator examples include compounds described in paragraphs 0065 to 0111 of JP-A-2014-130173 and JP-A-6301489, MATERIAL STAGE 37-60p, vol. 19, No. 3. Peroxide-based photopolymerization initiator described in 2019, photopolymerization initiator described in International Publication No. 2018/221177, photopolymerization initiator described in International Publication No.
  • JP-A-2019-043864 Examples of the photopolymerization initiator described in JP-A, the photopolymerization initiator described in JP-A-2019-044030, and the organic peroxide described in JP-A-2019-167313 are described in the present specification. Be incorporated.
  • Examples of commercially available ⁇ -hydroxyketone compounds include IRGACURE 184, DAROCUR 1173, IRGACURE 500, IRGACURE 2959, and IRGACURE 127 (all manufactured by BASF).
  • Examples of commercially available ⁇ -aminoketone compounds include IRGACURE 907, IRGACURE 369, IRGACURE 379, and IRGACURE 379EG (all manufactured by BASF).
  • Examples of commercially available acylphosphine compounds include IRGACURE 819 and DAROCUR-TPO (all manufactured by BASF).
  • Examples of the oxime compound include the compounds described in JP-A-2001-233842, the compounds described in JP-A-2000-080068, the compounds described in JP-A-2006-342166, and J. Am. C. S. The compound according to Perkin II (1979, pp. 1653-1660), J. Mol. C. S. The compound described in Perkin II (1979, pp. 156-162), the compound described in Journal of Photopolymer Science and Technology (1995, pp. 202-232), the compound described in JP-A-2000-066385.
  • oxime compound examples include 3-benzoyloxyiminobutane-2-one, 3-acetoxyiminovtan-2-one, 3-propionyloxyiminobutane-2-one, 2-acetoxyiminopentane-3-one, 2-acetoxyimino-1-phenylpropane-1-one, 2-benzoyloxyimino-1-phenylpropan-1-one, 3- (4-toluenesulfonyloxy) iminobutane-2-one, and 2-ethoxycarbonyloxy Examples thereof include imino-1-phenylpropane-1-one.
  • IRGACURE-OXE01 IRGACURE-OXE02, IRGACURE-OXE03, IRGACURE-OXE04 (above, manufactured by BASF), TR-PBG-304 (manufactured by Joshu Powerful Electronics New Materials Co., Ltd.), and ADEKA PTOMER N-1919.
  • a photopolymerization initiator 2 manufactured by ADEKA Corporation and described in JP2012-014502A.
  • the oxime compound it is also preferable to use a compound having no coloring property or a compound having high transparency and being hard to discolor.
  • Examples of commercially available products include ADEKA ARKULS NCI-730, NCI-831, and NCI-930 (all manufactured by ADEKA Corporation).
  • an oxime compound having a fluorene ring can also be used.
  • Specific examples of the oxime compound having a fluorene ring include the compounds described in JP-A-2014-137466.
  • an oxime compound having a skeleton in which at least one benzene ring of the carbazole ring is a naphthalene ring can also be used.
  • Specific examples of such an oxime compound include the compounds described in International Publication No. 2013/083505.
  • an oxime compound having a fluorine atom can also be used as the photopolymerization initiator.
  • Specific examples of the oxime compound having a fluorine atom are described in the compounds described in JP-A-2010-262028, the compounds 24, 36-40 described in JP-A-2014-500852, and JP-A-2013-164471. Compound (C-3) and the like.
  • an oxime compound having a nitro group can be used as the photopolymerization initiator.
  • the oxime compound having a nitro group is also preferably a dimer.
  • Specific examples of the oxime compound having a nitro group include the compounds described in paragraphs 0031 to 0047 of JP2013-114249A, paragraphs 0008 to 0012 and 0070 to 0079 of JP2014-137466, and Patents 4223071. Examples thereof include the compounds described in paragraphs 0007 to 0025 of Japanese Patent Publication No. Adeca Arcurus NCI-831 (manufactured by ADEKA Corporation).
  • an oxime compound having a benzofuran skeleton can also be used.
  • Specific examples include OE-01 to OE-75 described in International Publication No. 2015/036910.
  • an oxime compound in which a substituent having a hydroxy group is bonded to the carbazole skeleton can also be used.
  • Examples of such a photopolymerization initiator include the compounds described in International Publication No. 2019/088055.
  • the oxime compound is preferably a compound having a maximum absorption wavelength in the wavelength range of 350 to 500 nm, and more preferably a compound having a maximum absorption wavelength in the wavelength range of 360 to 480 nm.
  • the molar extinction coefficient of the oxime compound at a wavelength of 365 nm or a wavelength of 405 nm is preferably high, more preferably 1,000 to 300,000, and more preferably 2,000 to 300,000 from the viewpoint of sensitivity. Is more preferable, and 5,000 to 200,000 is particularly preferable.
  • the molar extinction coefficient of a compound can be measured using a known method. For example, it is preferable to measure at a concentration of 0.01 g / L using an ethyl acetate solvent with a spectrophotometer (Cary-5 spectrophotometer manufactured by Varian).
  • a bifunctional or trifunctional or higher photoradical polymerization initiator may be used as the photopolymerization initiator.
  • two or more radicals are generated from one molecule of the photoradical polymerization initiator, so that good sensitivity can be obtained.
  • the crystallinity is lowered, the solubility in a solvent or the like is improved, the precipitation is less likely to occur with time, and the stability of the colored photosensitive composition with time is improved.
  • Specific examples of the bifunctional or trifunctional or higher functional photo-radical polymerization initiators include JP-A-2010-527339, JP-A-2011-524436, International Publication No.
  • the content of the photopolymerization initiator in the total solid content of the colored photosensitive composition is preferably 0.1% by mass to 30% by mass.
  • the lower limit is more preferably 0.5% by mass or more, and particularly preferably 1% by mass or more.
  • the upper limit is more preferably 20% by mass or less, and particularly preferably 15% by mass or less. Only one type of photopolymerization initiator may be used, or two or more types may be used. When two or more types are used, it is preferable that the total amount thereof is within the above range.
  • the colored photosensitive composition according to the present disclosure preferably contains a resin.
  • the resin is blended, for example, for the purpose of dispersing particles such as pigments in the composition and for the purpose of a binder.
  • a resin mainly used for dispersing particles such as pigments is also referred to as a dispersant.
  • the resin preferably contains a polymer dispersant described later. Further, the resin preferably contains an alkali-soluble resin described later.
  • the weight average molecular weight (Mw) of the resin is preferably 3,000 to 2,000,000.
  • the upper limit is more preferably 1,000,000 or less, and particularly preferably 500,000 or less.
  • the lower limit is more preferably 4,000 or more, and particularly preferably 5,000 or more.
  • the resin examples include (meth) acrylic resin, ene-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, polyphenylene resin, polyarylene ether phosphine oxide resin, polyimide resin, and polyamideimide resin. , Polyolefin resin, cyclic olefin resin, polyester resin, styrene resin and the like. One of these resins may be used alone, or two or more thereof may be mixed and used. Further, the resin described in paragraphs 0041 to 0060 of JP-A-2017-206689 and the resin described in paragraphs 0153 to 0167 of JP-A-2018-173660 can also be used.
  • a resin having an acid group As the resin, it is preferable to use a resin having an acid group as the resin. According to this aspect, the developability of the colored photosensitive composition can be improved, and it is easy to form pixels having excellent rectangularity.
  • the acid group include a carboxy group, a phosphoric acid group, a sulfo group, a phenolic hydroxy group and the like, and a carboxy group is preferable.
  • the resin having an acid group can be suitably used as, for example, an alkali-soluble resin.
  • the resin having an acid group preferably contains a structural unit having an acid group in the side chain, and more preferably contains 5 mol% to 70 mol% of the structural units having an acid group in the side chain in all the structural units of the resin. ..
  • the upper limit of the content of the repeating unit having an acid group in the side chain is more preferably 50 mol% or less, and particularly preferably 30 mol% or less.
  • the lower limit of the content of the structural unit having an acid group in the side chain is more preferably 10 mol% or more, and particularly preferably 20 mol% or more.
  • the constituent unit when the content of the constituent unit is expressed in mol%, the constituent unit shall be synonymous with the monomer unit.
  • the colored photosensitive composition according to the present disclosure may also contain a resin (polymer dispersant) as a dispersant.
  • the dispersant include an acidic dispersant (acidic resin) and a basic dispersant (basic resin).
  • the acidic dispersant (acidic resin) represents a resin in which the amount of acid groups is larger than the amount of basic groups.
  • the acidic dispersant (acidic resin) is preferably a resin in which the amount of acid groups accounts for 70 mol% or more when the total amount of the amount of acid groups and the amount of basic groups is 100 mol%, and is substantially an acid. A resin consisting only of groups is more preferable.
  • the acid group contained in the acidic dispersant (acidic resin) is preferably a carboxy group.
  • the acid value of the acidic dispersant is preferably 40 mgKOH / g to 105 mgKOH / g, more preferably 50 mgKOH / g to 105 mgKOH / g, and even more preferably 60 mgKOH / g to 105 mgKOH / g.
  • the basic dispersant represents a resin in which the amount of basic groups is larger than the amount of acid groups.
  • the basic dispersant (basic resin) is preferably a resin in which the amount of basic groups exceeds 50 mol% when the total amount of the amount of acid groups and the amount of basic groups is 100 mol%.
  • the basic group contained in the basic dispersant is preferably an amino group.
  • the resin used as the dispersant preferably contains a structural unit having an acid group. Since the resin used as the dispersant contains a repeating unit having an acid group, the generation of development residue can be further suppressed when the pattern is formed by the photolithography method.
  • the resin used as the dispersant is also preferably a graft resin.
  • graft resin the description in paragraphs 0025 to 0094 of JP2012-255128A can be referred to, and the content thereof is incorporated in the present specification.
  • the resin used as the dispersant is a polyimine-based dispersant containing a nitrogen atom in at least one of the main chain and the side chain.
  • the polyimine-based dispersant has a main chain having a partial structure having a functional group of pKa14 or less, a side chain having 40 to 10,000 atoms, and a basic nitrogen atom in at least one of the main chain and the side chain.
  • the resin to have is preferable.
  • the basic nitrogen atom is not particularly limited as long as it is a nitrogen atom exhibiting basicity.
  • the description in paragraphs 0102 to 0166 of JP2012-255128A can be referred to, and the content thereof is incorporated in the present specification.
  • the resin used as the dispersant is also preferably a resin having a structure in which a plurality of polymer chains are bonded to the core portion.
  • resins include dendrimers (including star-shaped polymers).
  • specific examples of the dendrimer include polymer compounds C-1 to C-31 described in paragraphs 0196 to 0209 of JP2013-043962.
  • the above-mentioned resin having an acid group can also be used as a dispersant.
  • the resin used as the dispersant is a resin containing a structural unit having an ethylenically unsaturated group in the side chain.
  • the content of the structural unit having an ethylenically unsaturated group in the side chain is preferably 10 mol% or more, more preferably 10 mol% to 80 mol%, and 20 mol% in all the structural units of the resin. It is more preferably ⁇ 70 mol%.
  • a resin having a structural unit represented by the following formula D1 can be preferably used.
  • R D1 to R D3 independently represent a hydrogen atom or an alkyl group
  • X D1 represents a -COO-, -CONR- or an arylene group
  • R is a hydrogen atom, an alkyl group or an aryl group.
  • R D4 represents a divalent linking group
  • L D1 represents a group represented by the following formula D2 or formula D3
  • R D5 represents (nd + 1) -valent linking group
  • X D2 is , Oxygen atom or -NR DA-
  • R DA represents a hydrogen atom, an alkyl group or an aryl group
  • nd represents an integer of 1 or more.
  • X D3 represents an oxygen atom or -NH-
  • X D4 represents an oxygen atom or -COO-
  • R e1 to Re 3 independently represent a hydrogen atom or an alkyl group.
  • R e1 to R e3 may be bonded to each other to form a ring structure, and * represents a bonding position with another structure.
  • the structural unit represented by the formula 1 preferably includes the structure shown below, but it goes without saying that the structural unit is not limited to these.
  • n represents an integer of 1 or more.
  • Dispersants are also available as commercial products, and specific examples thereof include DISPERBYK series manufactured by BYK Chemie (for example, DISPERBYK-111, 161 etc.) and sparse sparse series manufactured by Nippon Lubrizol Co., Ltd. For example, Solsparse 76500) and the like. Further, the pigment dispersant described in paragraphs 0041 to 0130 of JP2014-130338A can also be used, and the contents thereof are incorporated in the present specification. The resin described as the dispersant can also be used for purposes other than the dispersant. For example, it can also be used as a binder.
  • the content of the resin in the total solid content of the colored photosensitive composition is preferably 5% by mass to 50% by mass.
  • the lower limit is more preferably 10% by mass or more, and particularly preferably 15% by mass or more.
  • the upper limit is more preferably 40% by mass or less, further preferably 35% by mass or less, and particularly preferably 30% by mass or less.
  • the content of the resin having an acid group (alkali-soluble resin) in the total solid content of the colored photosensitive composition is preferably 5% by mass to 50% by mass.
  • the lower limit is more preferably 10% by mass or more, and particularly preferably 15% by mass or more.
  • the upper limit is more preferably 40% by mass or less, further preferably 35% by mass or less, and particularly preferably 30% by mass or less.
  • the content of the resin having an acid group (alkali-soluble resin) in the total amount of the resin is preferably 30% by mass or more, more preferably 50% by mass or more, and more preferably 70% by mass because excellent developability can be easily obtained.
  • the above is more preferable, and 80% by mass or more is particularly preferable.
  • the upper limit can be 100% by mass, 95% by mass, or 90% by mass or less.
  • the colored photosensitive composition according to the present disclosure may contain a pigment derivative.
  • a part of the pigment is a group having an acid group, a basic group, a salt structure, or a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene diimide structure, a pyrazinenoquinoxaline structure or a fullerene. Examples thereof include compounds having a structure substituted with a group having at least one structure selected from the group consisting of structures.
  • a compound represented by the formula (B1) is preferable.
  • P represents a dye structure
  • L represents a single bond or a linking group
  • X represents an acid group, a basic group, a group having a salt structure or a phthalimide methyl group
  • m is an integer of 1 or more.
  • N represents an integer of 1 or more, and when m is 2 or more, the plurality of Ls and Xs may be different from each other, and when n is 2 or more, the plurality of Xs may be different from each other.
  • the pigment structure represented by P includes a pyrolopyrrolop pigment structure, a diketopyrrolopyrrole pigment structure, a quinacridone pigment structure, an anthraquinone pigment structure, a dianthraquinone pigment structure, a benzoisoindole pigment structure, a thiazineindigo pigment structure, an azo pigment structure, and a quinophthalone.
  • examples thereof include pigment structure, phthalocyanine pigment structure, naphthalocyanine pigment structure, dioxazine pigment structure, perylene pigment structure, perinone pigment structure, benzoimidazolone pigment structure, benzothiazole pigment structure, benzoimidazole pigment structure and benzoxazole pigment structure.
  • linking group represented by L examples include a hydrocarbon group, a heterocyclic group, -NR-, -SO 2- , -S-, -O-, -CO-, or a group consisting of a combination thereof.
  • R represents a hydrogen atom, an alkyl group or an aryl group.
  • Examples of the acid group represented by X include a carboxy group, a sulfo group, a carboxylic acid amide group, a sulfonic acid amide group, and an imic acid group.
  • a carboxylic acid amide group a group represented by -NHCOR X1 is preferable.
  • the sulfonic acid amide group preferably a group represented by -NHSO 2 R X2.
  • As the imidic acid group a group represented by -SO 2 NHSO 2 R X3 , -CONHSO 2 R X4 , -CONHCOR X5 or -SO 2 NHCOR X6 is preferable.
  • RX1 to RX6 independently represent a hydrocarbon group or a heterocyclic group.
  • Hydrocarbon group and heterocyclic group R X1 ⁇ R X6 represents may further have a substituent.
  • a halogen atom is preferable, and a fluorine atom is more preferable.
  • the basic group represented by X include an amino group.
  • the salt structure represented by X include the above-mentioned salts of acid groups or basic groups.
  • Examples of the pigment derivative include compounds having the following structures.
  • Japanese Patent Application Laid-Open No. 56-118462 Japanese Patent Application Laid-Open No. 63-264674, Japanese Patent Application Laid-Open No. 1-2170777, Japanese Patent Application Laid-Open No. 3-9961, Japanese Patent Application Laid-Open No. 3-26767, Japanese Patent Application Laid-Open No. 3-153780.
  • Japanese Patent Application Laid-Open No. 3-455662 Japanese Patent Application Laid-Open No. 4-285669, Japanese Patent Application Laid-Open No. 6-145546, Japanese Patent Application Laid-Open No. 6-21208, Japanese Patent Application Laid-Open No. 6-241588, Japanese Patent Application Laid-Open No.
  • JP-A-10-195326 paragraphs 0083 to 098 of International Publication No. 2011/024896, paragraphs 0063 to 0094 of International Publication No. 2012/102399, paragraphs 0083 of International Publication No. 2017/038252, etc. It can also be used and these contents are incorporated herein by reference.
  • pigment derivatives JP-A-2015-172732 (metal salt of a quinophthalone compound having a sulfo group), JP-A-2014-199308, JP-A-2014-85562, JP-A-2014-35351,
  • the compounds described in JP-A-2008-81565 can also be used, and their contents are incorporated in the present specification.
  • the content of the pigment derivative in the total solid content of the colored photosensitive composition is preferably 0.3% by mass to 20% by mass.
  • the lower limit is more preferably 0.6% by mass or more, and particularly preferably 0.9% by mass or more.
  • the upper limit is more preferably 15% by mass or less, further preferably 12.5% by mass or less, and particularly preferably 10% by mass or less.
  • the content of the pigment derivative is preferably 1 part by mass to 30 parts by mass with respect to 100 parts by mass of the pigment.
  • the lower limit is more preferably 2 parts by mass or more, and particularly preferably 3 parts by mass or more.
  • the upper limit is more preferably 25 parts by mass or less, further preferably 20 parts by mass or less, and particularly preferably 15 parts by mass or less. Only one kind of pigment derivative may be used, or two or more kinds may be used in combination. When two or more types are used in combination, the total amount thereof is preferably in the above range.
  • the colored photosensitive composition according to the present disclosure may contain a compound having a cyclic ether group.
  • the cyclic ether group include an epoxy group and an oxetanyl group.
  • the compound having a cyclic ether group is preferably a compound having an epoxy group.
  • the compound having an epoxy group include a compound having one or more epoxy groups in one molecule, and a compound having two or more epoxy groups is preferable. It is preferable to have 1 to 100 epoxy groups in one molecule.
  • the upper limit of the epoxy group may be, for example, 10 or less, or 5 or less.
  • the lower limit of the epoxy group is preferably two or more.
  • the compound having an epoxy group may be a low molecular weight compound (preferably less than 2,000 molecular weight, more preferably less than 1,000 molecular weight) or a macromolecule (for example, a polymer having a molecular weight of 1,000 or more and a polymer). Has a weight average molecular weight of 1,000 or more).
  • the weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, more preferably 500 to 50,000.
  • the upper limit of the weight average molecular weight is preferably 10,000 or less, more preferably 5,000 or less, and even more preferably 3,000 or less.
  • an epoxy resin can be preferably used as the compound having an epoxy group.
  • the epoxy resin include an epoxy resin which is a glycidyl etherified product of a phenol compound, an epoxy resin which is a glycidyl etherified product of various novolak resins, an alicyclic epoxy resin, an aliphatic epoxy resin, a heterocyclic epoxy resin, and a glycidyl ester type.
  • the epoxy equivalent of the epoxy resin is preferably 310 g / eq to 3,300 g / eq, more preferably 310 g / eq to 1,700 g / eq, and more preferably 310 g / eq to 1,000 g / eq. Is more preferable.
  • the content of the compound having a cyclic ether group in the total solid content of the colored photosensitive composition is 0.1% by mass to 20% by mass. Mass% is preferred.
  • the lower limit is more preferably 0.5% by mass or more, and particularly preferably 1% by mass or more.
  • the upper limit is more preferably 15% by mass or less, and particularly preferably 10% by mass or less.
  • the compound having a cyclic ether group may be only one kind or two or more kinds. In the case of two or more types, it is preferable that the total amount thereof is within the above range.
  • the colored photosensitive composition according to the present disclosure may further contain a near infrared absorber.
  • the near-infrared absorber is preferably a compound having a maximum absorption wavelength in the range of more than 700 nm and 1800 nm or less. Also, near infrared absorber, that the ratio A 1 / A 2 between the absorbance A 2 in the absorbance A 1 and the maximum absorption wavelength in the wavelength 500nm is preferably 0.08 or less, 0.04 or less More preferred.
  • Near-infrared absorbers include pyrrolopyrrole compounds, cyanine compounds, squarylium compounds, phthalocyanine compounds, naphthalocyanine compounds, quaterylene compounds, merocyanine compounds, croconium compounds, oxonor compounds, iminium compounds, dithiol compounds, triarylmethane compounds, pyromethene compounds, Examples thereof include azomethine compounds, anthraquinone compounds, dibenzofuranone compounds, metal oxides, and metal boroides.
  • Examples of the pyrrolopyrrole compound include the compounds described in paragraphs 0016 to 0058 of JP2009-263614, the compounds described in paragraphs 0037 to 0052 of JP2011-68831, and paragraphs 0010 of International Publication No. 2015/166783. Examples thereof include the compounds described in ⁇ 0033.
  • Examples of the squarylium compound include the compounds described in paragraphs 0044 to 0049 of JP2011-208101A, the compounds described in paragraphs 0060 to 0061 of Patent No. 6065169A, and paragraphs 0040 of International Publication No. 2016/181987.
  • Examples of the phthalocyanine compound include the compound described in paragraphs 093 of JP2012-77153, the oxytitanium phthalocyanine described in JP2006-343631, and the compound described in paragraphs 0013 to 0029 of JP2013-195480. Can be mentioned.
  • Examples of the naphthalocyanine compound include the compounds described in paragraph 093 of JP2012-77153A.
  • Examples of the metal oxide include indium tin oxide, antimonthine oxide, zinc oxide, Al-doped zinc oxide, fluorine-doped tin dioxide, niobium-doped titanium dioxide, and tungsten oxide.
  • tungsten oxide paragraph 0080 of JP-A-2016-006476 can be referred to, and the contents thereof are incorporated in the present specification.
  • the metal boride include lanthanum hexaboride.
  • examples of commercially available lanthanum hexaboride products include LaB 6- F (manufactured by Nippon Shinkinzoku Co., Ltd.).
  • the compound described in International Publication No. 2017/119394 can also be used.
  • examples of commercially available products of indium tin oxide include F-ITO (manufactured by DOWA Hightech Co., Ltd.).
  • the near-infrared absorber the squarylium compound described in JP-A-2017-197437, the squarylium compound described in paragraphs 0090 to 0107 of International Publication No. 2017/213047, and JP-A-2018-054760.
  • the content of the near-infrared absorber in the total solid content of the colored photosensitive composition is preferably 1% by mass or more. It is more preferably mass% or more, and particularly preferably 10 mass% or more.
  • the upper limit is not particularly limited, but is preferably 70% by mass or less, more preferably 65% by mass or less, and further preferably 60% by mass or less.
  • the colored photosensitive composition according to the present disclosure may be substantially free of a near-infrared absorber.
  • the content of the near-infrared absorber in the total solid content of the colored photosensitive composition according to the present disclosure is 0.1% by mass. It is preferably less than or equal to, more preferably 0.05% by mass or less, and particularly preferably not contained.
  • the colored photosensitive composition according to the present disclosure may contain a silane coupling agent.
  • the silane coupling agent means a silane compound having a hydrolyzable group and other functional groups.
  • the hydrolyzable group refers to a substituent that is directly linked to a silicon atom and can form a siloxane bond by at least one of a hydrolysis reaction and a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, an acyloxy group and the like, and an alkoxy group is preferable.
  • the silane coupling agent is preferably a compound having an alkoxysilyl group.
  • the functional group other than the hydrolyzable group include a vinyl group, a (meth) allyl group, a (meth) acryloyl group, a mercapto group, an epoxy group, an oxetanyl group, an amino group, a ureido group, a sulfide group and an isocyanate group.
  • Phenyl group and the like preferably an amino group, a (meth) acryloyl group and an epoxy group.
  • silane coupling agent examples include the compounds described in paragraphs 0018 to 0036 of JP2009-288703A and the compounds described in paragraphs 0056 to 0066 of JP2009-242604A, and the contents thereof. Is incorporated herein.
  • the content of the silane coupling agent in the total solid content of the colored photosensitive composition is preferably 0.1% by mass to 5% by mass.
  • the upper limit is more preferably 3% by mass or less, and particularly preferably 2% by mass or less.
  • the lower limit is more preferably 0.5% by mass or more, and particularly preferably 1% by mass or more.
  • the silane coupling agent may be only one kind or two or more kinds. In the case of two or more types, the total amount is preferably in the above range.
  • the colored photosensitive composition according to the present disclosure may contain an organic solvent.
  • the organic solvent is basically not particularly limited as long as it satisfies the solubility of each component and the coatability of the colored photosensitive composition.
  • the organic solvent include ester solvents, ketone solvents, alcohol solvents, amide solvents, ether solvents, hydrocarbon solvents and the like.
  • paragraph 0223 of WO 2015/166779 can be referred to, the contents of which are incorporated herein by reference.
  • an ester solvent substituted with a cyclic alkyl group and a ketone solvent substituted with a cyclic alkyl group can also be preferably used.
  • organic solvent examples include polyethylene glycol monomethyl ether, dichloromethane, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2 -Heptanone, cyclohexanone, cyclohexyl acetate, cyclopentanone, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, 3-methoxy-N, N-dimethylpropanamide, 3-butoxy-N , N-Dimethylpropanamide and the like.
  • aromatic hydrocarbons (benzene, toluene, xylene, ethylbenzene, etc.) as organic solvents may need to be reduced for environmental reasons (for example, 50 mass ppm (parts) with respect to the total amount of organic solvent. Per milion) or less, 10 mass ppm or less, or 1 mass ppm or less).
  • the organic solvent it is preferable to use an organic solvent having a low metal content, and the metal content of the organic solvent is preferably, for example, 10 mass ppb (parts per billion) or less. If necessary, an organic solvent at the mass ppt (parts per trillion) level may be used, and such an organic solvent is provided by, for example, Toyo Gosei Co., Ltd. (The Chemical Daily, November 13, 2015). ).
  • Examples of the method for removing impurities such as metals from the organic solvent include distillation (molecular distillation, thin film distillation, etc.) and filtration using a filter.
  • the filter pore diameter of the filter used for filtration is preferably 10 ⁇ m or less, more preferably 5 ⁇ m or less, and even more preferably 3 ⁇ m or less.
  • the filter material is preferably polytetrafluoroethylene, polyethylene or nylon.
  • the organic solvent may contain isomers (compounds having the same number of atoms but different structures). Further, only one kind of isomer may be contained, or a plurality of kinds may be contained.
  • the content of peroxide in the organic solvent is preferably 0.8 mmol / L or less, and more preferably substantially free of peroxide.
  • the content of the organic solvent in the colored photosensitive composition is preferably 10% by mass to 95% by mass, more preferably 20% by mass to 90% by mass, and 30% by mass to 90% by mass. Is even more preferable.
  • the colored photosensitive composition according to the present disclosure does not substantially contain an environmentally regulated substance from the viewpoint of environmental regulation.
  • substantially no environmentally regulated substance means that the content of the environmentally regulated substance in the coloring composition is 50 mass ppm or less, and preferably 30 mass ppm or less. It is more preferably 10 mass ppm or less, and particularly preferably 1 mass ppm or less.
  • the environmentally regulated substance include benzene; alkylbenzenes such as toluene and xylene; and halogenated benzenes such as chlorobenzene.
  • Examples of the method for reducing the environmentally regulated substance include a method of heating or depressurizing the inside of the system to raise the boiling point of the environmentally regulated substance to the boiling point or higher and distilling off the environmentally regulated substance from the system to reduce the amount of the environmentally regulated substance. Further, when distilling off a small amount of an environmentally regulated substance, it is also useful to azeotrope with a solvent having a boiling point equivalent to that of the solvent in order to improve efficiency.
  • a polymerization inhibitor or the like is added and distilled under reduced pressure in order to prevent the radical polymerization reaction from proceeding and cross-linking between molecules during distillation under reduced pressure. You may.
  • distillation methods are performed at the stage of the raw material, the stage of the product obtained by reacting the raw materials (for example, a resin solution after polymerization or a polyfunctional monomer solution), or a colored photosensitive composition prepared by mixing these compounds. It is possible at any stage such as a stage.
  • the colored photosensitive composition according to the present disclosure may contain a polymerization inhibitor.
  • the polymerization inhibitor include hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4'-thiobis (3-methyl-6-tert-butylphenol), and the like. Examples thereof include 2,2'-methylenebis (4-methyl-6-t-butylphenol) and N-nitrosophenylhydroxyamine salts (ammonium salt, primary cerium salt, etc.). Of these, p-methoxyphenol is preferable.
  • the content of the polymerization inhibitor in the total solid content of the coloring composition is preferably 0.0001% by mass to 5% by mass.
  • the colored photosensitive composition according to the present disclosure may contain a surfactant.
  • a surfactant various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicon-based surfactant can be used.
  • paragraphs 0238 to 0245 of International Publication No. 2015/166779 and paragraphs 0253 to 0260 of JP-A-2018-173660 can be referred to, and the contents thereof are incorporated in the present specification.
  • the surfactant is preferably a fluorine-based surfactant.
  • the content of the surfactant in the total solid content of the colored photosensitive composition is preferably 0.001% by mass to 5.0% by mass, more preferably 0.005% by mass to 3.0% by mass.
  • the surfactant may be only one kind or two or more kinds. In the case of two or more types, the total amount is preferably in the above range.
  • the colored photosensitive composition according to the present disclosure may contain an ultraviolet absorber.
  • an ultraviolet absorber a conjugated diene compound, an aminodiene compound, a salicylate compound, a benzophenone compound, a benzotriazole compound, an acrylonitrile compound, a hydroxyphenyltriazine compound, an indol compound, a triazine compound and the like can be used.
  • the description of paragraphs 0052 to 0072 of JP2012-208374A, paragraphs 0317 to 0334 of JP2013-68814, and paragraphs 0061 to 0080 of JP2016-162946 can be referred to. These contents are incorporated herein by reference.
  • the ultraviolet absorber include compounds having the following structures.
  • Examples of commercially available ultraviolet absorbers include UV-503 (manufactured by Daito Chemical Co., Ltd.).
  • Examples of the benzotriazole compound include the MYUA series (The Chemical Daily, February 1, 2016) manufactured by Miyoshi Oil & Fat Co., Ltd.
  • the ultraviolet absorber the compounds described in paragraphs 0049 to 0059 of Japanese Patent No. 6268967 can also be used.
  • the content of the ultraviolet absorber in the total solid content of the colored photosensitive composition is preferably 0.01% by mass to 10% by mass, more preferably 0.01% by mass to 5% by mass. Only one kind of ultraviolet absorber may be used, or two or more kinds may be used. When two or more types are used, the total amount is preferably in the above range.
  • the colored photosensitive composition according to the present disclosure may contain an antioxidant.
  • the antioxidant include phenol compounds, phosphite ester compounds, thioether compounds and the like.
  • the phenol compound any phenol compound known as a phenolic antioxidant can be used.
  • Preferred phenolic compounds include hindered phenolic compounds.
  • a compound having a substituent at a site (ortho position) adjacent to the phenolic hydroxy group is preferable.
  • a substituted or unsubstituted alkyl group having 1 to 22 carbon atoms is preferable.
  • the antioxidant a compound having a phenol group and a phosphite ester group in the same molecule is also preferable.
  • a phosphorus-based antioxidant can also be preferably used.
  • a phosphorus-based antioxidant tris [2-[[2,4,8,10-tetrakis (1,1-dimethylethyl) dibenzo [d, f] [1,3,2] dioxaphosfepine-6 -Il] Oxy] Ethyl] amine, Tris [2-[(4,6,9,11-tetra-tert-butyldibenzo [d, f] [1,3,2] dioxaphosfepin-2-yl] ) Oxy] ethyl] amine, ethylbis phosphite (2,4-di-tert-butyl-6-methylphenyl) and the like.
  • antioxidants include, for example, Adekastab AO-20, Adekastab AO-30, Adekastab AO-40, Adekastab AO-50, Adekastab AO-50F, Adekastab AO-60, Adekastab AO-60G, Adekastab AO-80. , ADEKA STAB AO-330 (above, manufactured by ADEKA Corporation) and the like. Further, as the antioxidant, the compounds described in paragraphs 0023 to 0048 of Japanese Patent No. 6268967, the compounds described in Japanese Patent No. 10-2019-0059371, and the like can also be used.
  • the content of the antioxidant in the total solid content of the colored photosensitive composition is preferably 0.01% by mass to 20% by mass, and more preferably 0.3% by mass to 15% by mass. Only one type of antioxidant may be used, or two or more types may be used. When two or more types are used, the total amount is preferably in the above range.
  • the colored photosensitive composition according to the present disclosure is, if necessary, a sensitizer, a curing accelerator, a filler, a thermosetting accelerator, a plasticizer and other auxiliary agents (for example, conductive particles, a filler, a defoamer). It may contain a foaming agent, a flame retardant, a leveling agent, a peeling accelerator, a fragrance, a surface tension adjusting agent, a chain transfer agent, etc.). By appropriately containing these components, properties such as film physical properties can be adjusted. These components are described in, for example, paragraphs 0183 and later of JP2012-003225A (paragraph 0237 of the corresponding US Patent Application Publication No.
  • the colored photosensitive composition according to the present disclosure may contain a latent antioxidant, if necessary.
  • the latent antioxidant is a compound in which the part that functions as an antioxidant is protected by a protecting group, and is heated at 100 to 250 ° C. or at 80 ° C. to 200 ° C. in the presence of an acid / base catalyst. Examples thereof include compounds in which the protecting group is eliminated by the action and the function functions as an antioxidant. Examples of the latent antioxidant include compounds described in International Publication No. 2014/021023, International Publication No. 2017/030005, and JP-A-2017-008219. Examples of commercially available products include ADEKA ARKULS GPA-5001 (manufactured by ADEKA Corporation) and the like.
  • the colored photosensitive composition according to the present disclosure may contain a metal oxide in order to adjust the refractive index of the obtained film.
  • the metal oxide include TiO 2 , ZrO 2 , Al 2 O 3 , SiO 2 and the like.
  • the primary particle size of the metal oxide is preferably 1 nm to 100 nm, more preferably 3 nm to 70 nm, and particularly preferably 5 nm to 50 nm.
  • the metal oxide may have a core-shell structure, and at this time, the core portion may be hollow.
  • the colored photosensitive composition according to the present disclosure may contain a light resistance improving agent.
  • the light resistance improving agent include the compounds described in paragraphs 0036 to 0037 of JP-A-2017-198787, the compounds described in paragraphs 0029-0034 of JP-A-2017-146350, and paragraphs of JP-A-2017-129774.
  • the viscosity (25 ° C.) of the colored photosensitive composition according to the present disclosure is preferably 1 mPa ⁇ s to 100 mPa ⁇ s, for example, when a film is formed by coating.
  • the lower limit is more preferably 2 mPa ⁇ s or more, and further preferably 3 mPa ⁇ s or more.
  • the upper limit is more preferably 50 mPa ⁇ s or less, further preferably 30 mPa ⁇ s or less, and particularly preferably 15 mPa ⁇ s or less.
  • the colored photosensitive composition according to the present disclosure preferably has a free metal content of 100 ppm or less, more preferably 50 ppm or less, and 10 ppm or less, which is not bonded or coordinated with a pigment or the like. Is more preferable, and it is particularly preferable that the content is substantially not contained.
  • the effects described in the publications and the like can be obtained.
  • the types of free metals include Na, K, Ca, Sc, Ti, Mn, Cu, Zn, Fe, Cr, Fe, Co, Mg, Al, Ti, Sn, Zn, Zr, Ga, Ge, etc. Examples thereof include Ag, Au, Pt, Cs and Bi.
  • the content of free halogen that is not bonded or coordinated with a pigment or the like is preferably 100 ppm or less, more preferably 50 ppm or less, and 10 ppm or less. It is more preferable that it is present, and it is particularly preferable that it is not substantially contained.
  • the method for reducing free metals and halogens in the coloring composition include washing with ion-exchanged water, filtration, ultrafiltration, and purification with an ion-exchange resin.
  • the colored photosensitive composition according to the present disclosure does not substantially contain a terephthalic acid ester.
  • the container for the colored photosensitive composition according to the present disclosure is not particularly limited, and a known container can be used.
  • a multi-layer bottle composed of 6 types and 6 layers of resin and 6 types of resin have a 7-layer structure for the purpose of suppressing impurities from being mixed into raw materials and colored photosensitive compositions. It is also preferable to use a bottle of plastic. Examples of such a container include the container described in JP-A-2015-123351.
  • the colored photosensitive composition according to the present disclosure can be prepared by mixing the above-mentioned components. In preparing the colored photosensitive composition, all the components may be simultaneously dissolved and / or dispersed in an organic solvent to prepare the colored photosensitive composition, and if necessary, two or more components may be appropriately added.
  • a colored photosensitive composition may be prepared by preparing a solution or a dispersion and mixing them at the time of use (at the time of application).
  • the mechanical force used for dispersing the pigment includes compression, squeezing, impact, shearing, cavitation and the like.
  • Specific examples of these processes include bead mills, sand mills, roll mills, ball mills, paint shakers, microfluidizers, high speed impellers, sand grinders, flow jet mixers, high pressure wet atomization, ultrasonic dispersion and the like.
  • the process and disperser for dispersing pigments are "Dispersion Technology Taizen, published by Information Organization Co., Ltd., July 15, 2005" and "Dispersion technology and industrial application centered on suspension (solid / liquid dispersion system)". The process and disperser described in paragraph 0022 of Japanese Patent Application Laid-Open No.
  • the particles may be miniaturized in the salt milling step.
  • the materials, equipment, processing conditions, etc. used in the salt milling step for example, the descriptions in JP-A-2015-194521 and JP-A-2012-046629 can be referred to.
  • any filter conventionally used for filtration or the like can be used without particular limitation.
  • fluororesins such as polytetrafluoroethylene (PTFE), polyamide resins such as nylon (eg, nylon-6, nylon-6,6), and polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultrahigh molecular weight).
  • PTFE polytetrafluoroethylene
  • nylon eg, nylon-6, nylon-6,6)
  • polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultrahigh molecular weight).
  • PP polypropylene
  • nylon high-density polypropylene
  • the pore size of the filter is preferably 0.01 ⁇ m to 7.0 ⁇ m, more preferably 0.01 ⁇ m to 3.0 ⁇ m, and even more preferably 0.05 ⁇ m to 0.5 ⁇ m. If the pore size of the filter is within the above range, fine foreign matter can be removed more reliably.
  • the nominal value of the filter manufacturer can be referred to.
  • various filters provided by Nippon Pole Co., Ltd. (DFA4201NIEY, etc.), Advantech Toyo Co., Ltd., Japan Entegris Co., Ltd. (formerly Japan Microlith Co., Ltd.), KITZ Microfilter Co., Ltd., etc. can be used. it can.
  • fibrous filter medium examples include polypropylene fiber, nylon fiber, glass fiber and the like.
  • examples of commercially available products include SBP type series (SBP008, etc.), TPR type series (TPR002, TPR005, etc.), and SHPX type series (SHPX003, etc.) manufactured by Loki Techno Co., Ltd.
  • filters for example, a first filter and a second filter
  • the filtration with each filter may be performed only once or twice or more.
  • filters having different pore diameters may be combined within the above-mentioned range.
  • the filtration with the first filter may be performed only on the dispersion liquid, and after mixing the other components, the filtration with the second filter may be performed.
  • the cured product according to the present disclosure is a cured product obtained by curing the colored photosensitive composition according to the present disclosure.
  • the cured product according to the present disclosure can be suitably used for a color filter or the like. Specifically, it can be preferably used as a colored layer (pixel) of a color filter, and more specifically, it can be preferably used as a green colored layer (green pixel) of a color filter.
  • the cured product according to the present disclosure is preferably a film-like cured product, and the film thickness thereof can be appropriately adjusted according to the intended purpose.
  • the film thickness is preferably 20 ⁇ m or less, more preferably 10 ⁇ m or less, and even more preferably 5 ⁇ m or less.
  • the lower limit of the film thickness is preferably 0.1 ⁇ m or more, more preferably 0.2 ⁇ m or more, and further preferably 0.3 ⁇ m or more.
  • the color filter according to the present disclosure includes the cured product according to the present disclosure described above. More preferably, the pixel of the color filter has a cured product according to the present disclosure.
  • the color filter according to the present disclosure can be used for a solid-state image sensor such as a CCD (charge coupling element) or CMOS (complementary metal oxide semiconductor), an image display device, or the like.
  • the color filter according to the present disclosure may further have pixels (hereinafter, also referred to as other pixels) different from the cured product (pixels) according to the present disclosure.
  • pixels hereinafter, also referred to as other pixels
  • examples of other pixels include red pixels, blue pixels, yellow pixels, cyan pixels, magenta pixels, transparent pixels, black pixels, near-infrared transmission filter pixels, and the like.
  • the film thickness of the film made of the cured product according to the present disclosure can be appropriately adjusted according to the purpose.
  • the film thickness is preferably 20 ⁇ m or less, more preferably 10 ⁇ m or less, and even more preferably 5 ⁇ m or less.
  • the lower limit of the film thickness is preferably 0.1 ⁇ m or more, more preferably 0.2 ⁇ m or more, and further preferably 0.3 ⁇ m or more.
  • the color filter according to the present disclosure preferably has a pixel width of 0.5 ⁇ m to 20.0 ⁇ m.
  • the lower limit is more preferably 1.0 ⁇ m or more, and particularly preferably 2.0 ⁇ m or more.
  • the upper limit is more preferably 15.0 ⁇ m or less, and particularly preferably 10.0 ⁇ m or less.
  • the Young's modulus of the pixel is preferably 0.5 GPa to 20 GPa, more preferably 2.5 GPa to 15 GPa.
  • each pixel included in the color filter according to the present disclosure has high flatness.
  • the surface roughness Ra of the pixel is preferably 100 nm or less, more preferably 40 nm or less, and further preferably 15 nm or less.
  • the lower limit is not specified, but it is preferably 0.1 nm or more, for example.
  • the surface roughness of the pixels can be measured using, for example, AFM (Atomic Force Microscope) Measurement 3100 manufactured by Veeco.
  • the contact angle of water on the pixel can be appropriately set to a preferable value, but is typically in the range of 50 ° to 110 °.
  • the contact angle can be measured using, for example, a contact angle meter CV-DT ⁇ A type (manufactured by Kyowa Interface Science Co., Ltd.). Further, it is preferable that the volume resistance value of the pixel is high. Specifically, it is preferred that the volume resistivity value of the pixel is 10 9 ⁇ ⁇ cm or more, and more preferably 10 11 ⁇ ⁇ cm or more. The upper limit is not specified, but it is preferably 10 14 ⁇ ⁇ cm or less, for example.
  • the volume resistance value of the pixel can be measured using, for example, an ultra-high resistance meter 5410 (manufactured by Advantest).
  • the color filter according to the present disclosure may be provided with a protective layer on the surface of the cured product according to the present disclosure.
  • a protective layer By providing the protective layer, various functions such as oxygen blocking, low reflection, prohydrophobicity, and shielding of light of a specific wavelength (ultraviolet rays, near infrared rays, etc.) can be imparted.
  • the thickness of the protective layer is preferably 0.01 ⁇ m to 10 ⁇ m, more preferably 0.1 ⁇ m to 5 ⁇ m.
  • Examples of the method for forming the protective layer include a method of applying a resin composition dissolved in an organic solvent to form the protective layer, a chemical vapor deposition method, and a method of attaching the molded resin with an adhesive.
  • the components constituting the protective layer include (meth) acrylic resin, en-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, polyphenylene resin, polyarylene ether phosphine oxide resin, and polyimide.
  • Resin polyamideimide resin, polyolefin resin, cyclic olefin resin, polyester resin, styrene resin, polyol resin, polyvinylidene chloride resin, melamine resin, urethane resin, aramid resin, polyamide resin, alkyd resin, epoxy resin, modified silicone resin, fluorine Examples thereof include resins, polycarbonate resins, polyacrylonitrile resins, cellulose resins, Si, C, W, Al 2 O 3 , Mo, SiO 2 , Si 2 N 4, and the like, and two or more of these components may be contained, for example.
  • the protective layer preferably contains a polyol resin, SiO 2 , and Si 2 N 4 . Further, in the case of a protective layer for the purpose of reducing reflection, the protective layer preferably contains a (meth) acrylic resin or a fluororesin.
  • the resin composition When the resin composition is applied to form the protective layer, a known method such as a spin coating method, a casting method, a screen printing method, or an inkjet method can be used as the application method of the resin composition.
  • a known method such as a spin coating method, a casting method, a screen printing method, or an inkjet method can be used as the application method of the resin composition.
  • a known organic solvent for example, propylene glycol 1-monomethyl ether 2-acetate, cyclopentanone, ethyl lactate, etc.
  • the protective layer is formed by a chemical vapor deposition method
  • the chemical vapor deposition method is a known chemical vapor deposition method (thermochemical vapor deposition method, plasma chemical vapor deposition method, photochemical vapor deposition method). Can be used
  • the protective layer contains organic / inorganic particles, an absorbent of a specific wavelength (for example, ultraviolet rays, near infrared rays, etc.), a refractive index adjuster, an antioxidant, an adhesive, a surfactant, and other additives, if necessary.
  • organic / inorganic particles include polymer particles (eg, silicone resin particles, polystyrene particles, melamine resin microparticles), titanium oxide, zinc oxide, zirconium oxide, indium oxide, aluminum oxide, titanium nitride, and oxynitride. Examples thereof include titanium, magnesium fluoride, hollow silica, silica, calcium carbonate, barium sulfate and the like.
  • a known absorber can be used as the absorber having a specific wavelength.
  • the ultraviolet absorber and the near-infrared absorber include the above-mentioned materials.
  • the content of these additives can be adjusted as appropriate, but is preferably 0.1% by mass to 70% by mass, more preferably 1% by mass to 60% by mass, based on the total weight of the protective layer.
  • the protective layer described in paragraphs 0073 to 0092 of JP-A-2017-151176 can also be used.
  • the color filter according to the present disclosure includes a step of forming a colored photosensitive composition layer on a support using the colored photosensitive composition according to the present disclosure described above, and a colored photosensitive composition by a photolithography method or a dry etching method. It can be manufactured through a step of forming a pattern on a material layer.
  • -Photolithography- Pattern formation by the photolithography method includes a step of forming a colored photosensitive composition layer on a support using the colored photosensitive composition according to the present disclosure, and a step of exposing the colored photosensitive composition layer in a pattern. It is preferable to include a step of developing and removing an unexposed portion of the colored photosensitive composition layer to form a pattern (pixel). If necessary, a step of baking the colored photosensitive composition layer (pre-baking step) and a step of baking the developed pattern (pixels) (post-baking step) may be provided.
  • the colored photosensitive composition layer according to the present disclosure is used to form the colored photosensitive composition layer on the support.
  • the support is not particularly limited and may be appropriately selected depending on the intended use.
  • a glass substrate, a silicon substrate, and the like can be mentioned, and a silicon substrate is preferable.
  • a charge coupling element (CCD), a complementary metal oxide semiconductor (CMOS), a transparent conductive film, or the like may be formed on the silicon substrate.
  • CMOS complementary metal oxide semiconductor
  • a black matrix that separates each pixel may be formed on the silicon substrate.
  • the silicon substrate may be provided with an undercoat layer for improving the adhesion with the upper layer, preventing the diffusion of substances, or flattening the surface of the substrate.
  • a known method can be used as a method for applying the colored photosensitive composition.
  • a dropping method drop casting
  • a slit coating method for example, a spray method; a roll coating method; a rotary coating method (spin coating); a casting coating method; a slit and spin method; a pre-wet method (for example, JP-A-2009-145395).
  • Methods described in the publication Inkjet (for example, on-demand method, piezo method, thermal method), ejection system printing such as nozzle jet, flexographic printing, screen printing, gravure printing, reverse offset printing, metal mask printing, etc.
  • Various printing methods; transfer method using a mold or the like; nanoimprint method and the like can be mentioned.
  • the method of application to an inkjet is not particularly limited, and for example, the method shown in "Expandable / Usable Inkjet-Infinite Possibilities Seen in Patents-, Published in February 2005, Sumi Betechno Research" (especially from page 115) 133), and the methods described in JP-A-2003-262716, JP-A-2003-185831, JP-A-2003-261827, JP-A-2012-126830, JP-A-2006-169325, and the like. Can be mentioned.
  • the description of International Publication No. 2017/030174 and International Publication No. 2017/018419 can be referred to, and these contents are incorporated in the present specification.
  • the colored photosensitive composition layer formed on the support may be dried (prebaked).
  • prebaking may not be performed.
  • the prebaking temperature is preferably 150 ° C. or lower, more preferably 120 ° C. or lower, and even more preferably 110 ° C. or lower.
  • the lower limit can be, for example, 50 ° C. or higher, or 80 ° C. or higher.
  • the prebaking time is preferably 10 seconds to 300 seconds, more preferably 40 seconds to 250 seconds, and even more preferably 80 seconds to 220 seconds. Pre-baking can be performed on a hot plate, an oven, or the like.
  • the colored photosensitive composition layer is exposed in a pattern (exposure step).
  • the colored photosensitive composition layer can be exposed in a pattern by exposing it through a mask having a predetermined mask pattern using a stepper exposure machine, a scanner exposure machine, or the like. As a result, the exposed portion can be cured.
  • Examples of radiation (light) that can be used for exposure include g-line and i-line. Further, light having a wavelength of 300 nm or less (preferably light having a wavelength of 180 to 300 nm) can also be used. Examples of the light having a wavelength of 300 nm or less include KrF line (wavelength 248 nm), ArF line (wavelength 193 nm), and KrF line (wavelength 248 nm) is preferable. Further, a long wave light source having a diameter of 300 nm or more can also be used.
  • pulse exposure is an exposure method of a method in which light irradiation and pause are repeated in a short cycle (for example, millisecond level or less).
  • the pulse width is preferably 100 nanoseconds (ns) or less, more preferably 50 nanoseconds or less, and even more preferably 30 nanoseconds or less.
  • the lower limit of the pulse width is not particularly limited, but may be 1 femtosecond (fs) or more, and may be 10 femtoseconds or more.
  • the frequency is preferably 1 kHz or higher, more preferably 2 kHz or higher, and even more preferably 4 kHz or higher.
  • the upper limit of the frequency is preferably 50 kHz or less, more preferably 20 kHz or less, and further preferably 10 kHz or less.
  • Maximum instantaneous intensity is preferably 50,000,000 W / m 2 or more, more preferably 100 million W / m 2 or more, more preferably 200 million W / m 2 or more.
  • the upper limit of the maximum instantaneous intensity is preferably 1000000000 W / m 2 or less, more preferably 800 million W / m 2 or less, and more preferably 500 million W / m 2 or less.
  • the pulse width is the time during which light is irradiated in the pulse period.
  • the frequency is the number of pulse cycles per second.
  • the maximum instantaneous illuminance is the average illuminance within the time during which the light is irradiated in the pulse period.
  • the pulse cycle is a cycle in which light irradiation and pause in pulse exposure are one cycle.
  • Irradiation dose is preferably 0.03J / cm 2 ⁇ 2.5J / cm 2, 0.05J / cm 2 ⁇ 1.0J / cm 2 is more preferable.
  • the oxygen concentration at the time of exposure can be appropriately selected, and in addition to the operation in the atmosphere, for example, in a low oxygen atmosphere having an oxygen concentration of 19% by volume or less (for example, 15% by volume, 5% by volume, or substantially). It may be exposed in an oxygen-free environment), or may be exposed in a high oxygen atmosphere (for example, 22% by volume, 30% by volume, or 50% by volume) in which the oxygen concentration exceeds 21% by volume.
  • the exposure illuminance can be set as appropriate, preferably 1,000 W / m 2 to 100,000 W / m 2 (for example, 5,000 W / m 2 , 15,000 W / m 2 , or 35, It can be selected from the range of 000 W / m 2 ).
  • Oxygen concentration and exposure illuminance may appropriately combined conditions, for example, illuminance 10,000 W / m 2 at an oxygen concentration of 10 vol%, oxygen concentration of 35 vol% can be such illuminance 20,000W / m 2.
  • the unexposed portion of the colored photosensitive composition layer is developed and removed to form a pattern (pixel).
  • Development and removal of the unexposed portion of the coloring composition layer can be performed using a developing solution.
  • the colored photosensitive composition layer in the unexposed portion in the exposure step is eluted in the developing solution, and only the photocured portion remains.
  • the developing solution an organic alkaline developing solution that does not cause damage to the underlying elements and circuits is preferable.
  • the temperature of the developing solution is preferably 20 ° C. to 30 ° C.
  • the development time is preferably 20 seconds to 180 seconds. Further, in order to improve the residue removability, the steps of shaking off the developing solution every 60 seconds and further supplying a new developing solution may be repeated several times.
  • the developer is preferably an alkaline aqueous solution (alkaline developer) obtained by diluting an alkaline agent with pure water.
  • alkaline agent include ammonia, ethylamine, diethylamine, dimethylethanolamine, diglycolamine, diethanolamine, hydroxyamine, ethylenediamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, and tetrabutylammonium hydroxide.
  • Ethyltrimethylammonium hydroxide Ethyltrimethylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis (2-hydroxyethyl) ammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene and other organic substances.
  • alkaline compounds examples include alkaline compounds and inorganic alkaline compounds such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium silicate and sodium metasilicate.
  • the alkaline agent a compound having a large molecular weight is preferable in terms of environment and safety.
  • the concentration of the alkaline agent in the alkaline aqueous solution is preferably 0.001% by mass to 10% by mass, more preferably 0.01% by mass to 1% by mass.
  • the developer may further contain a surfactant.
  • the surfactant include the above-mentioned surfactants, and nonionic surfactants are preferable.
  • the developer may be once produced as a concentrated solution and diluted to a concentration required for use.
  • the dilution ratio is not particularly limited, but can be set in the range of, for example, 1.5 to 100 times. It is also preferable to wash (rinse) with pure water after development.
  • the rinsing is performed by supplying the rinsing liquid to the developed colored photosensitive composition layer while rotating the support on which the developed colored photosensitive composition layer is formed. It is also preferable to move the nozzle for discharging the rinse liquid from the central portion of the support to the peripheral edge of the support. At this time, when moving the nozzle from the central portion of the support to the peripheral portion, the nozzle may be moved while gradually reducing the moving speed. By rinsing in this way, in-plane variation of rinsing can be suppressed. Further, the same effect can be obtained by gradually reducing the rotation speed of the support while moving the nozzle from the central portion to the peripheral portion of the support.
  • Additional exposure treatment and post-baking are post-development curing treatments to complete the curing.
  • the heating temperature in the post-baking is preferably 100 ° C. to 240 ° C., more preferably 200 ° C. to 240 ° C.
  • Post-baking can be performed on the developed film in a continuous or batch manner by using a heating means such as a hot plate, a convection oven (hot air circulation dryer), or a high frequency heater so as to meet the above conditions. ..
  • the light used for the exposure is preferably light having a wavelength of 400 nm or less. Further, the additional exposure process may be performed by the method described in Korean Patent Publication No. 201701122130.
  • a colored photosensitive composition layer is formed on the support using the colored photosensitive composition according to the present disclosure, and the entire colored photosensitive composition layer is cured to obtain a cured product.
  • the solid-state image sensor according to the present disclosure includes the cured product according to the present disclosure and has the color filter according to the present disclosure.
  • the configuration of the solid-state image sensor according to the present disclosure is not particularly limited as long as it includes the cured product according to the present disclosure and functions as a solid-state image sensor, and examples thereof include the following configurations.
  • a solid-state image sensor CCD (charge coupling element) image sensor, CMOS (complementary metal oxide semiconductor) image sensor, etc.
  • a transfer electrode made of polysilicon or the like.
  • the configuration has a color filter on the device protective film.
  • the color filter may have a structure in which each colored pixel is embedded in a space partitioned by a partition wall, for example, in a grid pattern.
  • the partition wall preferably has a low refractive index for each colored pixel. Examples of the imaging device having such a structure include the devices described in JP-A-2012-227478, JP-A-2014-179757, and International Publication No. 2018/043654.
  • the image pickup device provided with the solid-state image pickup device according to the present disclosure can be used not only for digital cameras and electronic devices having an image pickup function (mobile phones, etc.), but also for in-vehicle cameras and surveillance cameras. Further, as described in Japanese Patent Application Laid-Open No. 2019-21159, the solid-state image sensor according to the present disclosure is provided with an ultraviolet absorbing layer (UV cut filter) in the structure of the solid-state image sensor to withstand the light of a color filter. The sex may be improved.
  • UV cut filter ultraviolet absorbing layer
  • the image display device according to the present disclosure includes the cured product according to the present disclosure and has the color filter according to the present disclosure.
  • the image display device include a liquid crystal display device and an organic electroluminescence display device.
  • electroluminescence display device For details on the definition of image display devices and details of each image display device, see, for example, “Electronic Display Device (Akio Sasaki, Kogyo Chosakai Co., Ltd., published in 1990)”, “Display Device (by Junaki Ibuki, Industrial Books) Co., Ltd. (issued in 1989) ”.
  • liquid crystal display device is described in, for example, "Next Generation Liquid Crystal Display Technology (edited by Tatsuo Uchida, Kogyo Chosakai Co., Ltd., published in 1994)".
  • the liquid crystal display device is not particularly limited, and examples thereof include various types of liquid crystal display devices described in the above-mentioned "next-generation liquid crystal display technology".
  • % and “parts” mean “mass%” and “parts by mass”, respectively, unless otherwise specified.
  • the molecular weight is the weight average molecular weight (Mw), and the ratio of the constituent units is the molar percentage, except for those specified specifically.
  • the weight average molecular weight (Mw) is a value measured as a polystyrene-equivalent value by a gel permeation chromatography (GPC) method.
  • the reaction mixture was crystallized from pure water cooled to 0 ° C., and the obtained powder was recrystallized from diisopropyl ether to 2-((3,6-bis (dicyanomethylene) -4-methoxycyclohexa-1,4. -Diene-1-yl) oxy) ethyl acrylate (A-18) was obtained as 0.56 g (yield 68%) of a red solid.
  • ⁇ Oxidizing agent HOMO-LUMO> The oxidizing agent HOMO-LUMO was measured according to the following method and evaluated according to the following evaluation criteria. The evaluation results are shown in the column of Table 1.
  • the HOMO of each compound was measured as follows. The ionization potential of each 5 mg of each compound was measured by an atmospheric photoelectron spectrometer (AC-3, manufactured by RIKEN Keiki Co., Ltd.), and the value was taken as HOMO. Each 20 mg compound was dissolved in 200 mL of toluene, and toluene was added to 2 mL of this solution to prepare 50 mL.
  • the absorbance of this solution was measured using a Cary5000 UV-Vis-NIR spectrophotometer (manufactured by Azilent Technology) in the wavelength range of 200 nm to 800 nm, the absorption edge at a wavelength of 400 nm to 700 nm was calculated, and the value was S0.
  • the ⁇ S1 transition energy gap (HOMO-LUMO energy difference: ⁇ E) was used.
  • Pigments G pigment (green pigment PG36): 8.29 parts by mass, Y pigment (yellow pigment PY185): 2.07 parts by mass), the following pigment derivative S-1: 0.5 parts by mass, and the following dispersant P -1 30% by mass PGMEA (propylene glycol monomethyl ether acetate) solution: After mixing 30 parts by mass and 71.92 parts by mass of PGMEA, add 230 parts by mass of zirconia beads having a diameter of 0.3 mm to make a paint shaker. The mixture was subjected to a dispersion treatment for 5 hours, and the beads were separated by filtration to produce a green dispersion liquid G-1.
  • G pigment green pigment PG36
  • Y pigment yellow pigment PY185
  • dispersant P -1 30% by mass
  • PGMEA propylene glycol monomethyl ether acetate
  • Green dispersions G-2 to G-12 were produced in the same manner as in the preparation of the green dispersion G-1, except that the components and contents shown in Table 2 were changed.
  • Table 2 the description such as "PG36 PG58 (50/50)" means that PG36 and PG58 were used so as to have a mass ratio of 50:50.
  • Pigment derivatives S-1 to S-3 The following compounds
  • Dispersant P-1 A 30 mass% propylene glycol monomethyl ether acrylate (PGMEA) solution of a resin having the following structure.
  • the numerical value added to the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units.
  • Mw 20,000.
  • Dispersant P-2 A 30% by mass PGMEA solution of a resin having the following structure.
  • the numerical value added to the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units.
  • Dispersant P-3 A 30% by mass PGMEA solution of a resin having the following structure.
  • the numerical value added to the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units. Mw: 22,000.
  • a green dispersion G-13 was prepared in the same manner as in the preparation of the green dispersion G-1, except that 71.92 parts by mass of propylene glycol monomethyl ether (PGME) was used instead of 71.92 parts by mass of PGMEA.
  • PGME propylene glycol monomethyl ether
  • a green dispersion G-14 was prepared in the same manner as in the preparation of the green dispersion G-1, except that 71.92 parts by mass of cyclohexanone (ANON) was used instead of 71.92 parts by mass of PGMEA.
  • ANON cyclohexanone
  • a high-pressure disperser with a decompression mechanism NANO-3000-10 manufactured by Nippon BEE Co., Ltd. was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a red (Red) dispersion liquid R-1.
  • KAYARAD DPHA mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate, manufactured by Nippon Kayaku Co., Ltd.
  • the obtained colored photosensitive composition was spin-coated on a glass substrate so that the film thickness after post-baking was 0.6 ⁇ m, dried on a hot plate at 100 ° C. for 120 seconds, and then hot at 200 ° C.
  • a cured film was formed by heat treatment (post-baking) for 300 seconds using a plate.
  • the following evaluation was performed using the obtained colored photosensitive composition or a cured film. The evaluation results are shown in Table 3 or Table 4.
  • the colored photosensitive composition was applied by a spin coating method, and then heated at 100 ° C. for 2 minutes using a hot plate to obtain a composition layer having a film thickness of 0.5 ⁇ m.
  • An i-line stepper FPA-3000i5 + (manufactured by Canon Inc.) was used for this composition layer, and the i-line was exposed to 100 mJ / cm 2 through a photomask in which a 300 ⁇ m line and space pattern was formed. Irradiated in quantity.
  • the composition layer after exposure was paddle-developed at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide.
  • B The linear width of 300 ⁇ m, 3 ⁇ , was 1 ⁇ m or more and less than 2 ⁇ m.
  • C The linear width of 300 ⁇ m, 3 ⁇ , was 2 ⁇ m or more and less than 5 ⁇ m.
  • D The linear width of 300 ⁇ m, 3 ⁇ , was 5 ⁇ m or more and less than 10 ⁇ m.
  • E The linear width of 300 ⁇ m, 3 ⁇ , was 10 ⁇ m or more.
  • CT-4000 manufactured by Fujifilm Electronics Materials Co., Ltd.
  • the colored photosensitive composition obtained on the silicon wafer with the base layer is applied by a spin coating method, and then heated at 100 ° C. for 2 minutes using a hot plate to obtain a composition layer having a film thickness of 0.5 ⁇ m.
  • an i-line stepper FPA-3000i5 + (manufactured by Canon Inc.) was used, and square pixels having a side of 0.6 ⁇ m were arranged in a 4 mm ⁇ 3 mm region on the substrate via a mask pattern. , irradiated with light of a wavelength of 365 nm, was exposed at 50 mJ / cm 2 intervals at exposure 50mJ / cm 2 ⁇ 2,000mJ / cm 2. The composition layer after exposure was paddle-developed at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide. Then, it was rinsed with water in a spin shower, and further washed with pure water.
  • the optimum exposure amount (mJ / cm 2 ) for resolving the coloring pattern (0.6 ⁇ m square pixel pattern) was determined, and this was used as the sensitivity.
  • Evaluation criteria A, B or C are preferable.
  • the optimum exposure amount was 100 mJ / cm 2 or more and less than 200 mJ / cm 2 .
  • D The optimum exposure amount was 200 mJ / cm 2 or more and less than 500 mJ / cm 2 .
  • E The optimum exposure amount was 500 mJ / cm 2 or more.
  • Example 59 Same as in Example 1 except that the polymerizable compound E2 (KAYARAD TMPTA, manufactured by Nippon Kayaku Co., Ltd., trimethylolpropane triacrylate) was used instead of the polymerizable compound E1 (DPHA) in Example 1. , A colored photosensitive composition and a cured film were prepared. Moreover, it was evaluated in the same manner as in Example 1.
  • the polymerizable compound E2 (KAYARAD TMPTA, manufactured by Nippon Kayaku Co., Ltd., trimethylolpropane triacrylate) was used instead of the polymerizable compound E1 (DPHA) in Example 1.
  • Example 60 Colored photosensitive composition in the same manner as in Example 1 except that 0.32 parts by weight of the polymerizable compound E1 (DPHA) was used instead of 0.54 parts by mass of the polymerizable compound E1 (DPHA) in Example 1. A compound and a cured film were prepared. Moreover, it was evaluated in the same manner as in Example 1.
  • Example 61 Colored photosensitive in the same manner as in Example 1 except that a mixture of the polymerizable compound E1 and the polymerizable compound E4 in a mass ratio of 50/50 was used instead of the polymerizable compound E1 (DPHA) in Example 1. A composition and a cured film were prepared. Moreover, it was evaluated in the same manner as in Example 1.
  • F-1 IRGACURE 369 (manufactured by BASF) (molar extinction coefficient at 365 nm 800 L ⁇ mol -1 ⁇ cm -1 )
  • F-2 IRGACURE 819 (manufactured by BASF) (molar extinction coefficient at 365 nm 500 L ⁇ mol -1 ⁇ cm -1 )
  • F-3 IRGACURE 907 (manufactured by BASF) (molar extinction coefficient at 365 nm 1,100 L ⁇ mol -1 ⁇ cm -1 )
  • F-6 A compound having the following
  • F-1 to F-3 are not oxime compounds, and F-4 to F-6 are oxime compounds.
  • Example 101-Example 161 The Green composition was applied onto a silicon wafer by a spin coating method so that the film thickness after film formation was 1.0 ⁇ m. Then, using a hot plate, it was heated at 100 ° C. for 2 minutes. Next, using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.), exposure was performed at 1,000 mJ / cm 2 through a mask with a 2 ⁇ m square dot pattern. Then, paddle development was carried out at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). Then, it was rinsed with a spin shower and further washed with pure water.
  • TMAH tetramethylammonium hydroxide
  • the Green composition was then patterned on a silicon wafer by heating at 200 ° C. for 5 minutes using a hot plate. Similarly, the Red composition and the Blue composition were sequentially patterned to form red, green and blue coloring patterns (Bayer patterns).
  • the colored photosensitive compositions prepared in Examples 1 to 40 or 53 to 61 are used as the Green composition. used.
  • the colored photosensitive compositions prepared in Examples 41 to 46 were used as the Red composition.
  • the colored photosensitive compositions prepared in Examples 47 to 52 were used as the Blue composition.
  • the Bayer pattern is a red element, two green elements, and one blue element, as disclosed in US Pat. No. 3,971,065. ) This is a pattern in which a 2 ⁇ 2 array of color filter elements having an element is repeated. The obtained color filter was incorporated into a solid-state image sensor according to a known method.
  • the solid-state image sensor is excellent in weight reduction inhibitory property (film loss inhibitory property) in the cured film, and is suitable for image recognition. It was confirmed that a solid-state image sensor with the ability was obtained.
  • the Green composition, Red composition, and Blue composition other than the above-mentioned colored photosensitive composition used in Examples 101 to 161 are as follows.
  • Red pigment dispersion 51.7 parts by mass Resin 4 (40% by mass PGMEA solution): 0.6 parts by mass Polymerizable compound 4: 0.6 parts by mass Photopolymerization initiator 1: 0.3 parts by mass Surfactant 1 : 4.2 parts by mass PGMEA: 42.6 parts by mass
  • Blue pigment dispersion 44.9 parts by mass Resin 4 (40% by mass PGMEA solution): 2.1 parts by mass Polymerizable compound 1: 1.5 parts by mass Polymerizable compound 4: 0.7 parts by mass Photoinitiator 1 : 0.8 parts by mass Surfactant 1: 4.2 parts by mass PGMEA: 45.8 parts by mass
  • the raw materials used for the Red composition and the Blue composition are as follows.
  • a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a Red pigment dispersion.
  • -Polymerizable compound 1 KAYARAD DPHA (mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate, manufactured by Nippon Kayaku Co., Ltd.)
  • -Polymerizable compound 4 The following structure

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Abstract

A photosensitive coloring composition which contains a compound A that has a polymerizable group and a lowest unoccupied molecular orbital energy level LUMO of less than -3.5 eV, a coloring agent, a polymerizable compound and a photopolymerization initiator; a photosensitive coloring composition which contains a compound A that has a polymerizable group and at least one structure that is selected from the group consisting of a quinone structure, a dithiolene structure, a naphthalene diimide structure, a perylene diimide structure, a pyrazinoquinoxaline structure and a fullerene structure, a coloring agent, a polymerizable compound and a photopolymerization initiator; a cured product of either of the above-described photosensitive coloring compositions; a color filter which comprises the above-described cured product; and a solid-state imaging element and an image display device, each of which is provided with the above-described color filter.

Description

着色感光性組成物、硬化物、カラーフィルタ、固体撮像素子及び画像表示装置Colored photosensitive composition, cured product, color filter, solid-state image sensor and image display device
 本開示は、着色感光性組成物、硬化物、カラーフィルタ、固体撮像素子及び画像表示装置に関する。 The present disclosure relates to a colored photosensitive composition, a cured product, a color filter, a solid-state image sensor, and an image display device.
 カラーフィルタは、固体撮像素子や画像表示装置に不可欠な構成部品である。固体撮像素子や画像表示装置は、可視光の反射によってノイズが発生する場合がある。そこで、固体撮像素子や画像表示装置に遮光膜を設けて、ノイズの発生の抑制を図ることも行われている。
 このようなカラーフィルタや遮光膜の製造方法として、着色剤と、重合性化合物と、光重合開始剤と、アルカリ可溶性樹脂とを含む着色感光性組成物を用いて着色組成物層を形成し、この着色組成物層を露光及び現像してパターンを形成する方法が知られている。
 従来の感光性組成物又は着色組成物としては、特許文献1~3に記載のものが知られている。
Color filters are indispensable components for solid-state image sensors and image display devices. The solid-state image sensor and the image display device may generate noise due to the reflection of visible light. Therefore, it is also practiced to provide a light-shielding film on the solid-state image sensor or the image display device to suppress the generation of noise.
As a method for producing such a color filter or a light-shielding film, a colored composition layer is formed by using a colored photosensitive composition containing a colorant, a polymerizable compound, a photopolymerization initiator, and an alkali-soluble resin. A method of exposing and developing this coloring composition layer to form a pattern is known.
As the conventional photosensitive composition or coloring composition, those described in Patent Documents 1 to 3 are known.
  特許文献1:特開2017-129774号公報
  特許文献2:特開2016-75739号公報
  特許文献3:国際公開第2013/018705号
Patent Document 1: Japanese Patent Application Laid-Open No. 2017-129774 Patent Document 2: Japanese Patent Application Laid-Open No. 2016-775739 Patent Document 3: International Publication No. 2013/018705
 本開示に係る実施形態が解決しようとする課題は、得られる硬化物の重量減少抑制性に優れる着色感光性組成物を提供することである。
 また、本開示に係る実施形態が解決しようとする他の課題は、上記着色感光性組成物の硬化物、上記硬化物を備えるカラーフィルタ、又は、上記カラーフィルタを備える固体撮像素子若しくは画像表示装置を提供することである。
An object to be solved by the embodiment according to the present disclosure is to provide a colored photosensitive composition having excellent weight loss inhibitory property of the obtained cured product.
Further, another problem to be solved by the embodiment according to the present disclosure is a cured product of the colored photosensitive composition, a color filter including the cured product, or a solid-state image sensor or an image display device including the color filter. Is to provide.
 上記課題を解決するための手段には、以下の態様が含まれる。
<1> 重合性基を有し、かつ最低空軌道のエネルギー準位LUMOが-3.5eV未満である化合物A、着色剤、重合性化合物、及び、光重合開始剤を含む着色感光性組成物。
<2> 重合性基を有し、かつ、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する化合物A、着色剤、重合性化合物、及び、光重合開始剤を含む着色感光性組成物。
<3> 上記化合物Aが、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する化合物である<1>に記載の着色感光性組成物。
<4> 上記化合物Aが有する上記重合性基が、ラジカル重合性基、又は、カチオン重合性基である、<1>又は<2>に記載の着色感光性組成物。
<5> 上記ラジカル重合性基が、アクリル基、メタクリル基、ビニル基、又は、アリル基である、<4>に記載の着色感光性組成物。
<6> 上記カチオン重合性基が、エポキシ基、オキセタニル基、又は、アリル基である、<4>に記載の着色感光性組成物。
<7> 上記化合物Aが、1分子中に上記重合性基を2以上有する、上記<1>~<6>のいずれか1つに記載の着色感光性組成物。
<8> 上記化合物Aが、下記式(1A)~式(1C)のいずれかで表される化合物である上記<1>~<7>のいずれか1つに記載の着色感光性組成物。
Means for solving the above problems include the following aspects.
<1> A colored photosensitive composition containing a compound A having a polymerizable group and an energy level LUMO of the lowest empty orbit of less than −3.5 eV, a colorant, a polymerizable compound, and a photopolymerization initiator. ..
<2> At least one structure having a polymerizable group and selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, a pyrazinoquinoxaline structure, and a fullerene structure. A colored photosensitive composition containing compound A, a colorant, a polymerizable compound, and a photopolymerization initiator.
<3> The compound A is a compound having at least one structure selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene diimide structure, a pyrazinenoquinoxaline structure, and a fullerene structure. The colored photosensitive composition according to <1>.
<4> The colored photosensitive composition according to <1> or <2>, wherein the polymerizable group contained in the compound A is a radically polymerizable group or a cationically polymerizable group.
<5> The colored photosensitive composition according to <4>, wherein the radically polymerizable group is an acrylic group, a methacryl group, a vinyl group, or an allyl group.
<6> The colored photosensitive composition according to <4>, wherein the cationically polymerizable group is an epoxy group, an oxetanyl group, or an allyl group.
<7> The colored photosensitive composition according to any one of <1> to <6>, wherein the compound A has two or more polymerizable groups in one molecule.
<8> The colored photosensitive composition according to any one of the above <1> to <7>, wherein the compound A is a compound represented by any of the following formulas (1A) to (1C).
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 式(1A)~式(1C)中、Rはそれぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、ヒドロキシ基、アシル基、アシルオキシ基、ニトロ基、又は、シアノ基を表し、C~Cはそれぞれ独立に、環構造を表し、Yはそれぞれ独立に、単結合、酸素原子、硫黄原子、NR、カルボニル基、-OC(=O)-、-C(=O)O-、-C(=O)NH-、-OC(=O)-NH-、-AniCat-、又は、-CatAni-を表し、Rはそれぞれ独立に、水素原子、アルキル基、又は、アリール基を表し、Aniはアニオン構造を表し、Catはカチオン構造を表し、Lはそれぞれ独立に、単結合又は2価の連結基を表し、Aは上記重合性基を有する表し、X及びXはそれぞれ独立に、酸素原子、硫黄原子、又は、下記式(1X)で表される基を表し、nは1以上の整数を表し、mはそれぞれ独立に、0以上かつRが結合可能な環上の置換位置の最大数を表し、pは0又は1を表す。 In formulas (1A) to (1C), R 1 is independently a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a hydroxy group, an acyl group, an acyloxy group, a nitro group, or a cyano group. the expressed, the C a ~ C C each independently represent a ring structure, Y 1 is independently a single bond, an oxygen atom, a sulfur atom, NR N, carbonyl group, -OC (= O) -, - C (= O) O -, - C (= O) NH -, - OC (= O) -NH -, - Ani - Cat + -, or, -Cat + Ani - - represents, R N are each independently , Hydrogen atom, alkyl group, or aryl group, Ani represents an anionic structure, Cat + represents a cation structure, L 1 represents a single bond or a divalent linking group, respectively, and A 1 Represents the above-mentioned polymerizable group, X 1 and X 2 independently represent an oxygen atom, a sulfur atom, or a group represented by the following formula (1X), n represents an integer of 1 or more, and m. each independently, 0 or more and represents the maximum number of substitution positions on R 1 can bind ring, p is 0 or 1.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 式(1X)中、R及びRはそれぞれ独立に、電子求引性基を表し、波線部分は環構造との結合位置を表す。 In the formula (1X), R 2 and R 3 independently represent an electron-attracting group, and the wavy line portion represents a bonding position with the ring structure.
<9> 上記化合物Aが、下記式(2)又は式(3)で表される化合物である、上記<1>~<8>のいずれか1つに記載の着色感光性組成物。 <9> The colored photosensitive composition according to any one of <1> to <8>, wherein the compound A is a compound represented by the following formula (2) or formula (3).
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 式(2)中、R21~R24は、それぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、アシル基、アシルオキシ基、ヒドロキシ基、アミノ基、ニトロ基、アミド基、又は、上記重合性基を有する基を表し、R21及びR22、又は、R23及びR24が互いに連結して、環を形成してもよく、R21~R24の少なくとも一つは、重合性基を有する基である。
 式(3)中、R31~R34は、それぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、アシル基、アシルオキシ基、ヒドロキシ基、アミノ基、ニトロ基、アミド基、又は、重合性基を有する基を表し、R31及びR32、又は、R33及びR34が互いに連結して、環を形成してもよく、R31~R34の少なくとも一つは、重合性基を有する基である。
In the formula (2), R 21 to R 24 are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, aryloxy groups, acyl groups, acyloxy groups, hydroxy groups, amino groups, nitro groups and amide groups. , Or, representing a group having the above-mentioned polymerizable group, R 21 and R 22 , or R 23 and R 24 may be linked to each other to form a ring, and at least one of R 21 to R 24 may be formed. , A group having a polymerizable group.
In the formula (3), R 31 to R 34 independently represent a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyl group, an acyloxy group, a hydroxy group, an amino group, a nitro group and an amide group. , Or a group having a polymerizable group, and R 31 and R 32 , or R 33 and R 34 may be linked to each other to form a ring, and at least one of R 31 to R 34 is It is a group having a polymerizable group.
<10> 上記化合物Aの最高被占軌道のエネルギー準位HOMOが、-7.0eVを超え-5.5eV未満である上記<1>~<9>のいずれか1つに記載の着色感光性組成物。
<11> 上記化合物Aの最低空軌道のエネルギー準位LUMOが、-5.0eVを超え-3.5eV未満である上記<1>~<10>のいずれか1つに記載の着色感光性組成物。
<12> 上記着色剤が、フタロシアニン顔料を含む上記<1>~<11>のいずれか1つに記載の着色感光性組成物。
<13> 上記光重合開始剤が、オキシム化合物を含む上記<1>~<12>のいずれか1つに記載の着色感光性組成物。
<14> 高分子分散剤を更に含む上記<1>~<13>のいずれか1つに記載の着色感光性組成物。
<15> アルカリ可溶性樹脂を更に含む上記<1>~<14>のいずれか1つに記載の着色感光性組成物。
<16> 上記<1>~<15>のいずれか1つに記載の着色感光性組成物を硬化してなる硬化物。
<17> 上記<16>に記載の硬化物を備えるカラーフィルタ。
<18> 上記<17>に記載のカラーフィルタを有する固体撮像素子。
<19> 上記<17>に記載のカラーフィルタを有する画像表示装置。
<10> The colored photosensitivity according to any one of <1> to <9>, wherein the energy level HOMO of the highest occupied orbital of the compound A is more than -7.0 eV and less than -5.5 eV. Composition.
<11> The colored photosensitive composition according to any one of <1> to <10>, wherein the energy level LUMO of the lowest empty orbit of the compound A is more than -5.0 eV and less than -3.5 eV. object.
<12> The colored photosensitive composition according to any one of <1> to <11>, wherein the colorant contains a phthalocyanine pigment.
<13> The colored photosensitive composition according to any one of <1> to <12>, wherein the photopolymerization initiator contains an oxime compound.
<14> The colored photosensitive composition according to any one of <1> to <13>, which further contains a polymer dispersant.
<15> The colored photosensitive composition according to any one of <1> to <14>, which further contains an alkali-soluble resin.
<16> A cured product obtained by curing the colored photosensitive composition according to any one of <1> to <15> above.
<17> A color filter comprising the cured product according to <16> above.
<18> A solid-state image sensor having the color filter according to <17> above.
<19> An image display device having the color filter according to <17> above.
 本開示に係る実施形態によれば、得られる硬化物の重量減少抑制性に優れる着色感光性組成物が提供される。
 また本開示に係る他の実施形態によれば、上記着色感光性組成物の硬化物、上記硬化物を備えるカラーフィルタ、又は、上記カラーフィルタを備える固体撮像素子若しくは画像表示装置が提供される。
According to the embodiment according to the present disclosure, there is provided a colored photosensitive composition having excellent weight loss inhibitory property of the obtained cured product.
Further, according to another embodiment according to the present disclosure, a cured product of the colored photosensitive composition, a color filter including the cured product, or a solid-state image sensor or an image display device including the color filter is provided.
 以下において、本開示の内容について詳細に説明する。以下に記載する構成要件の説明は、本開示の代表的な実施態様に基づいてなされることがあるが、本開示はそのような実施態様に限定されるものではない。
 なお、本開示において、数値範囲を示す「~」とはその前後に記載される数値を下限値及び上限値として含む意味で使用される。
 本開示中に段階的に記載されている数値範囲において、一つの数値範囲で記載された上限値又は下限値は、他の段階的な記載の数値範囲の上限値又は下限値に置き換えてもよい。また、本開示中に記載されている数値範囲において、その数値範囲の上限値又は下限値は、実施例に示されている値に置き換えてもよい。
 更に、本開示において組成物中の各成分の量は、組成物中に各成分に該当する物質が複数存在する場合、特に断らない限り、組成物中に存在する該当する複数の物質の合計量を意味する。
 また、本開示における基(原子団)の表記において、置換及び無置換を記していない表記は、置換基を有さないものと共に置換基を有するものをも包含するものである。例えば「アルキル基」とは、置換基を有さないアルキル基(無置換アルキル基)のみならず、置換基を有するアルキル基(置換アルキル基)をも包含するものである。
 本開示において、特別な記載がない限り、「Me」はメチル基を、「Et」はエチル基を、「Pr」はプロピル基を、「Bu」はブチル基を、「Ph」はフェニル基を、それぞれ表す。
 本開示において、「(メタ)アクリル」は、アクリル及びメタクリルの両方を包含する概念で用いられる語であり、「(メタ)アクリロイル」は、アクリロイル及びメタクリロイルの両方を包含する概念として用いられる語である。
 また、本開示において、「工程」の用語は、独立した工程だけではなく、他の工程と明確に区別できない場合であっても、その工程の所期の目的が達成されれば本用語に含まれる。
 本開示において「全固形分」とは、組成物の全組成から溶剤を除いた成分の総質量をいう。また、「固形分」とは、上述のように、溶剤を除いた成分であり、例えば、25℃において固体であっても、液体であってもよい。
 
 また、本開示において、「質量%」と「重量%」とは同義であり、「質量部」と「重量部」とは同義である。
 更に、本開示において、2以上の好ましい態様の組み合わせは、より好ましい態様である。
 また、本開示における重量平均分子量(Mw)及び数平均分子量(Mn)は、特に断りのない限り、TSKgel GMHxL、TSKgel G4000HxL、TSKgel G2000HxL(何れも東ソー(株)製の商品名)のカラムを使用したゲルパーミエーションクロマトグラフィ(GPC)分析装置により、溶媒THF(テトラヒドロフラン)、示差屈折計により検出し、標準物質としてポリスチレンを用いて換算した分子量である。
 以下、本開示を詳細に説明する。
The contents of the present disclosure will be described in detail below. The description of the constituents described below may be based on the representative embodiments of the present disclosure, but the present disclosure is not limited to such embodiments.
In the present disclosure, "-" indicating a numerical range is used to mean that the numerical values described before and after the numerical range are included as the lower limit value and the upper limit value.
In the numerical range described stepwise in the present disclosure, the upper limit value or the lower limit value described in one numerical range may be replaced with the upper limit value or the lower limit value of another numerical range described stepwise. .. Further, in the numerical range described in the present disclosure, the upper limit value or the lower limit value of the numerical range may be replaced with the value shown in the examples.
Further, in the present disclosure, the amount of each component in the composition is the total amount of the plurality of applicable substances present in the composition unless otherwise specified, when a plurality of substances corresponding to each component are present in the composition. Means.
Further, in the notation of a group (atomic group) in the present disclosure, the notation that does not describe substitution or non-substitution includes those having no substituent as well as those having a substituent. For example, the "alkyl group" includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
In the present disclosure, unless otherwise specified, "Me" is a methyl group, "Et" is an ethyl group, "Pr" is a propyl group, "Bu" is a butyl group, and "Ph" is a phenyl group. , Represent each.
In the present disclosure, "(meth) acrylic" is a term used in a concept that includes both acrylic and methacrylic, and "(meth) acryloyl" is a term that is used as a concept that includes both acryloyl and methacryloyl. is there.
Further, in the present disclosure, the term "process" is included in this term as long as the intended purpose of the process is achieved, not only in an independent process but also in the case where it cannot be clearly distinguished from other processes. Is done.
In the present disclosure, the "total solid content" refers to the total mass of the components excluding the solvent from the total composition of the composition. Further, the "solid content" is a component excluding the solvent as described above, and may be, for example, a solid or a liquid at 25 ° C.

Further, in the present disclosure, "% by mass" and "% by weight" are synonymous, and "parts by mass" and "parts by weight" are synonymous.
Further, in the present disclosure, a combination of two or more preferred embodiments is a more preferred embodiment.
Further, unless otherwise specified, the weight average molecular weight (Mw) and the number average molecular weight (Mn) in the present disclosure use columns of TSKgel GMHxL, TSKgel G4000HxL, and TSKgel G2000HxL (all are trade names manufactured by THF Co., Ltd.). The molecular weight is detected by the solvent THF (tetrahydrofuran) and the differential refraction meter by the gel permeation chromatography (GPC) analyzer, and is converted by using polystyrene as a standard substance.
Hereinafter, the present disclosure will be described in detail.
(着色感光性組成物)
 本開示に係る着色感光性組成物の第一の態様は、重合性基を有し、かつ最低空軌道のエネルギー準位LUMOが-3.5eV未満である化合物A、着色剤、重合性化合物、及び、光重合開始剤を含む着色感光性組成物である。
 また、本開示に係る着色感光性組成物の第二の態様は、重合性基を有し、かつ、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する化合物A、着色剤、重合性化合物、及び、光重合開始剤を含む着色感光性組成物である。
 なお、本明細書において、特に断りなく、単に「本開示に係る着色感光性組成物」という場合は、上記第一の態様及び上記第二の態様の両方について述べるものとする。
(Colored photosensitive composition)
A first aspect of the colored photosensitive composition according to the present disclosure is compound A, a colorant, a polymerizable compound, which has a polymerizable group and has an energy level LUMO of the lowest empty orbit of less than −3.5 eV. A colored photosensitive composition containing a photopolymerization initiator.
The second aspect of the colored photosensitive composition according to the present disclosure is that it has a polymerizable group and has a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, a pyrazinenoquinoxaline structure, and a structure. , A colored photosensitive composition containing compound A having at least one structure selected from the group consisting of a fullerene structure, a colorant, a polymerizable compound, and a photopolymerization initiator.
In the present specification, unless otherwise specified, the term "colored photosensitive composition according to the present disclosure" refers to both the first aspect and the second aspect.
 近年、イメージセンサの高画素化に伴いパターンの微細化及び薄膜化が進んでいる。これに伴い、相対的にカラーフィルタ中の顔料濃度が増え硬化性成分が減少するなかでも、膜減り抑制、すなわち、得られる硬化物における重量減少抑制性が求められている。
 本開示に係る着色感光性組成物を用いることにより、重量減少抑制性に優れる硬化物が得られる。
 上記化合物Aを含有することにより、重合速度と重合停止能とのバランスに優れ、低分子量成分の残留量が少なくなるとともに、上記化合物A自体の揮発性も小さく、得られる硬化物の重量減少抑制性(膜減り抑制性)に優れると推定している。
In recent years, as the number of pixels of an image sensor has increased, the pattern has become finer and thinner. Along with this, while the pigment concentration in the color filter is relatively increased and the curable component is reduced, film reduction suppression, that is, weight reduction suppression in the obtained cured product is required.
By using the colored photosensitive composition according to the present disclosure, a cured product having excellent weight loss inhibitory properties can be obtained.
By containing the above-mentioned compound A, the balance between the polymerization rate and the polymerization terminating ability is excellent, the residual amount of the low molecular weight component is reduced, and the volatility of the above-mentioned compound A itself is small, so that the weight reduction of the obtained cured product is suppressed. It is presumed to have excellent properties (inhibitory of film loss).
 また、本開示に係る着色感光性組成物は、上記化合物Aを含有することにより、感度にも優れやすいと考えられる。
 更に、本開示に係る着色感光性組成物は、上記化合物Aを含有することにより、重合速度と重合停止能とのバランスに優れ、低分子量成分の残留量が少なくなるとともに、また、硬化時において、上記化合物A自体を膜中に固定化することができ、露光された形状の維持性に優れやすく、得られるパターンにおける直線性にも優れやすいと推定している。
Further, it is considered that the colored photosensitive composition according to the present disclosure tends to be excellent in sensitivity by containing the above-mentioned compound A.
Further, the colored photosensitive composition according to the present disclosure has an excellent balance between the polymerization rate and the polymerization terminating ability by containing the above compound A, the residual amount of low molecular weight components is reduced, and at the time of curing It is presumed that the compound A itself can be immobilized in the film, the exposed shape is easily maintained, and the linearity of the obtained pattern is also excellent.
 以下、本開示に係る着色感光性組成物に含まれる各成分の詳細を説明する。上記第一の態様及び第二の態様において、重複する成分は同様であり、好ましい態様も同様である。 The details of each component contained in the colored photosensitive composition according to the present disclosure will be described below. In the first and second aspects described above, the overlapping components are the same, and so are the preferred embodiments.
<化合物A>
 本開示に係る着色感光性組成物の第一の態様における化合物Aは、重合性基を有し、かつ、最低空軌道のエネルギー準位LUMOが-3.5eV未満である。
 また、本開示に係る着色感光性組成物の第二の態様における化合物Aは、重合性基を有し、かつ、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する。
 なお、本明細書において、特に断りなく、単に「化合物A」という場合は、上記第一の態様における化合物A及び上記第二の態様における化合物Aの両方について述べるものとする。
<Compound A>
Compound A in the first aspect of the colored photosensitive composition according to the present disclosure has a polymerizable group and has an energy level LUMO of the lowest empty orbit of less than −3.5 eV.
Further, the compound A in the second aspect of the colored photosensitive composition according to the present disclosure has a polymerizable group and has a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, and a pyrazinoquinoxaline. It has a structure and at least one structure selected from the group consisting of fullerene structures.
In the present specification, unless otherwise specified, the term "Compound A" refers to both Compound A in the first aspect and Compound A in the second aspect.
-化合物Aの最低空軌道のエネルギー準位LUMO-
 本開示に係る着色感光性組成物の第一の態様における化合物Aの最低空軌道のエネルギー準位LUMO(単に「LUMO」ともいう。)は、-3.5eV未満であり、重量減少抑制性、パターン直線性、及び、感度の観点から、-3.7eV未満であることが好ましく、-3.9eV未満であることが特に好ましい。
 本開示に係る着色感光性組成物の第二の態様における化合物AのLUMOは、重量減少抑制性、パターン直線性、及び、感度の観点から、-3.5eV未満であることが好ましく、-3.7eV未満であることがより好ましく、-3.9eV未満であることが特に好ましい。
 また、化合物AにおけるLUMOの下限値は、重量減少抑制性、パターン直線性、及び、感度の観点から、-5.0eVを超えることが好ましく、-4.8eV以上であることがより好ましく、-4.5eV以上であることが特に好ましい。
-Energy level LUMO of the lowest empty orbit of compound A-
The energy level LUMO (simply referred to as “LUMO”) of the lowest empty orbit of Compound A in the first aspect of the colored photosensitive composition according to the present disclosure is less than −3.5 eV, and the weight loss inhibitory property. From the viewpoint of pattern linearity and sensitivity, it is preferably less than -3.7 eV, and particularly preferably less than -3.9 eV.
The LUMO of Compound A in the second aspect of the colored photosensitive composition according to the present disclosure is preferably less than −3.5 eV from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, preferably -3. It is more preferably less than .7 eV, and particularly preferably less than -3.9 eV.
Further, the lower limit of LUMO in Compound A is preferably more than −5.0 eV, more preferably -4.8 eV or more, and more preferably −4.8 eV or more, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. It is particularly preferably 4.5 eV or more.
 本開示における化合物AのLUMO、及び、最高被占軌道のエネルギー準位HOMO(単に「HOMO」ともいう。)は、下記方法に従って測定するものとする。
 各化合物のHOMOは次のようにして測定する。
 5mgの各化合物を大気中光電子分光装置(AC-3、理研計器(株)製)によりイオン化ポテンシャルを測定し、その値をHOMOとする。
 20mgの各化合物をトルエン200mLに溶解させ、この溶液2mLにトルエンを加え、50mLにした調製液の吸光度について、紫外可視近赤外(UV-Vis-NIR)分光光度計(型番:Cary5000、アジレント・テクノロジー社製)を用いて波長200nm~800nmの範囲まで測定し、波長400nm~700nmにおける吸収端を算出し、その値をS0-S1遷移エネルギーギャップ(HOMO-LUMOエネルギー差ΔE)とする。LUMOは下記式により求める。
  LUMO=HOMO+ΔE
The LUMO of Compound A and the energy level HOMO of the highest occupied orbit (also simply referred to as "HOMO") in the present disclosure shall be measured according to the following method.
The HOMO of each compound is measured as follows.
The ionization potential of each 5 mg of each compound is measured by an atmospheric photoelectron spectrometer (AC-3, manufactured by RIKEN Keiki Co., Ltd.), and the value is defined as HOMO.
20 mg of each compound was dissolved in 200 mL of toluene, and toluene was added to 2 mL of this solution to make 50 mL. Regarding the absorbance of the prepared solution, an ultraviolet-visible near-infrared (UV-Vis-NIR) spectrophotometer (model number: Cary5000, Agilent Measurement is performed in the wavelength range of 200 nm to 800 nm using (manufactured by Technology), the absorption edge at the wavelength of 400 nm to 700 nm is calculated, and the value is defined as the S0-S1 transition energy gap (HOMO-LUMO energy difference ΔE). LUMO is calculated by the following formula.
LUMO = HOMO + ΔE
-化合物Aの最高被占軌道のエネルギー準位HOMO-
 化合物Aの最高被占軌道のエネルギー準位HOMOは、重量減少抑制性、パターン直線性、及び、感度の観点から、-7.5eV以上-5.0eV以下であることが好ましく、-7.0eVを超え-5.5eV未満であることがより好ましく、-6.8eV以上-6.0eV以下であることが特に好ましい。
-Energy level HOMO of the highest occupied orbit of compound A-
The energy level HOMO of the highest occupied orbital of Compound A is preferably -7.5 eV or more and -5.0 eV or less, preferably -7.0 eV, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. It is more preferably more than -5.5 eV, and particularly preferably -6.8 eV or more and -6.0 eV or less.
-化合物AのHOMO-LUMOエネルギー差ΔE-
 化合物AのHOMO-LUMOエネルギー差ΔE(LUMOの値-HOMOの値)は、重量減少抑制性、パターン直線性、及び、感度の観点から、1.0eV以上4.0eV以下であることが好ましく、1.0eV以上3.0eV以下であることがより好ましく、1.2eV以上2.8eV以下であることが更に好ましく、1.5eV以上2.6eV以下であることが特に好ましい。
-HOMO-LUMO energy difference ΔE- of compound A
The HOMO-LUMO energy difference ΔE (LUMO value-HOMO value) of Compound A is preferably 1.0 eV or more and 4.0 eV or less from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. It is more preferably 1.0 eV or more and 3.0 eV or less, further preferably 1.2 eV or more and 2.8 eV or less, and particularly preferably 1.5 eV or more and 2.6 eV or less.
-化合物Aの重合性基-
 化合物Aの重合性基としては、特に限定されず公知の重合性基であればよいが、重量減少抑制性、パターン直線性、及び、感度の観点から、ラジカル重合性基、又は、カチオン重合性基であることが好ましく、ラジカル重合性基であることがより好ましい。
-Polymerizable group of compound A-
The polymerizable group of Compound A is not particularly limited and may be a known polymerizable group, but from the viewpoint of weight loss inhibitory property, pattern linearity and sensitivity, a radical polymerizable group or a cationically polymerizable group can be used. It is preferably a group, more preferably a radically polymerizable group.
 ラジカル重合性基としては、エチレン性不飽和基が好ましい。エチレン性不飽和基としては、アクリル基、メタクリル基、ビニル基、マレイミド基、又は、アリル基が好適に挙げられる。
 これらの中でもラジカル重合性基としては、重量減少抑制性、パターン直線性、及び、感度の観点から、(メタ)アクリロキシ基、(メタ)アクリルアミド基、ビニルエステル基、ビニルエーテル基、スチリル基(ビニルフェニル基)、マレイミド基、又は、(メタ)アリル基が好ましく、
(メタ)アクリロキシ基、ビニルエステル基、ビニルエーテル基、又は、スチリル基(ビニルフェニル基)であることがより好ましく、(メタ)アクリロキシ基、又は、スチリル基(ビニルフェニル基)であることが更に好ましく、(メタ)アクリロキシ基であることが特に好ましく、アクリロキシ基であることが最も好ましい。
As the radically polymerizable group, an ethylenically unsaturated group is preferable. Preferable examples of the ethylenically unsaturated group include an acrylic group, a methacryl group, a vinyl group, a maleimide group, and an allyl group.
Among these, the radically polymerizable groups include (meth) acryloxy group, (meth) acrylamide group, vinyl ester group, vinyl ether group, and styryl group (vinylphenyl) from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. Group), maleimide group, or (meth) allyl group is preferable.
It is more preferably a (meth) acryloxy group, a vinyl ester group, a vinyl ether group, or a styryl group (vinylphenyl group), and even more preferably a (meth) acryloxy group or a styryl group (vinylphenyl group). , (Meta) acryloxy group is particularly preferable, and acryloxy group is most preferable.
 カチオン重合性基としては、環状エーテル基、環状イミノエーテル基、又は、エチレン性不飽和基であることが好ましく、重量減少抑制性、パターン直線性、及び、感度の観点から、エポキシ基、オキセタニル基、又は、(メタ)アリル基であることが好ましく、エポキシ基であることがより好ましい。 The cationically polymerizable group is preferably a cyclic ether group, a cyclic imino ether group, or an ethylenically unsaturated group, and is an epoxy group or an oxetanyl group from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. , Or a (meth) allyl group, more preferably an epoxy group.
 化合物Aは、重量減少抑制性、パターン直線性、及び、感度の観点から、1分子中に重合性基を2以上有することが好ましい。化合物A1分子中における重合性基の数の上限値は、特に制限はないが、6以下であることが好ましく、4以下であることがより好ましい。 Compound A preferably has two or more polymerizable groups in one molecule from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. The upper limit of the number of polymerizable groups in the compound A1 molecule is not particularly limited, but is preferably 6 or less, and more preferably 4 or less.
-化合物Aの重量平均分子量Mw-
 化合物Aの重量平均分子量Mwは、重量減少抑制性、パターン直線性、及び、感度の観点から、50以上であることが好ましく、150以上であることがより好ましく、200以上であることが更に好ましく、300以上であることが特に好ましく、400以上であることが最も好ましい。化合物AのMwの下限は、特に限定されないが、1,500未満であることが好ましく、1,000以下であることがより好ましい。
 化合物Aの分子量は、分布を有していることが好ましい。Mw/Mnは、1.01以上であることが好ましく、1.05以上であることがより好ましく、1.1以上が更に好ましく、1.1以上2.0以下であることが特に好ましい。
-Weight average molecular weight of Compound A Mw-
The weight average molecular weight Mw of Compound A is preferably 50 or more, more preferably 150 or more, still more preferably 200 or more, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. , 300 or more is particularly preferable, and 400 or more is most preferable. The lower limit of Mw of compound A is not particularly limited, but is preferably less than 1,500, and more preferably 1,000 or less.
The molecular weight of compound A preferably has a distribution. Mw / Mn is preferably 1.01 or more, more preferably 1.05 or more, further preferably 1.1 or more, and particularly preferably 1.1 or more and 2.0 or less.
-化合物Aの化学構造-
 本開示に係る着色感光性組成物の第二の態様における化合物Aは、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有し、重量減少抑制性、パターン直線性、感度、及び、入手容易性の観点から、キノン構造又はキノジメタン構造を有することが好ましく、キノン構造又はテトラシアノキノジメタン構造を有することがより好ましく、テトラシアノキノジメタン構造を有することが特に好ましい。
 本開示に係る着色感光性組成物の第一の態様における化合物Aは、重量減少抑制性、パターン直線性、感度、及び、入手容易性の観点から、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有することが好ましく、キノン構造又はキノジメタン構造を有することがより好ましく、キノン構造又はテトラシアノキノジメタン構造を有することが更に好ましく、テトラシアノキノジメタン構造を有することが特に好ましい。
-Chemical structure of compound A-
Compound A in the second aspect of the colored photosensitive composition according to the present disclosure is selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene imide structure, a pyrazinoquinoxaline structure, and a fullerene structure. From the viewpoint of weight loss inhibitory property, pattern linearity, sensitivity, and availability, it is preferable to have a quinone structure or a quinodimethane structure, and a quinone structure or a tetracyanoquinodimethane. It is more preferable to have a structure, and it is particularly preferable to have a tetracyanoquinodimethane structure.
The compound A in the first aspect of the colored photosensitive composition according to the present disclosure has a quinone structure, a quinodimethane structure, a dithiorene structure, and a naphthalene diimide from the viewpoints of weight loss inhibitory property, pattern linearity, sensitivity, and availability. It preferably has at least one structure selected from the group consisting of a structure, a perylene imide structure, a pyrazinoquinoxaline structure, and a fullerene structure, more preferably a quinone structure or a quinodimethane structure, and a quinone structure or a tetracyanoquinodimethane. It is more preferable to have a quinodimethane structure, and particularly preferably to have a tetracyanoquinodimethane structure.
 化合物Aは、重量減少抑制性、パターン直線性、及び、感度の観点から、下記式(1A)~式(1C)のいずれかで表される化合物であることが好ましく、下記式(1A)又は式(1B)で表される化合物であることがより好ましく、下記式(1A)で表される化合物であることが特に好ましい。 From the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, the compound A is preferably a compound represented by any of the following formulas (1A) to (1C), and the following formula (1A) or The compound represented by the formula (1B) is more preferable, and the compound represented by the following formula (1A) is particularly preferable.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
 式(1A)~式(1C)中、Rはそれぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、ヒドロキシ基、アシル基、アシルオキシ基、ニトロ基、又は、シアノ基を表し、C~Cはそれぞれ独立に、環構造を表し、Yはそれぞれ独立に、単結合、酸素原子、硫黄原子、NR、カルボニル基、-OC(=O)-、-C(=O)O-、-C(=O)NH-、-OC(=O)-NH-、-AniCat-、又は、-CatAni-を表し、Rはそれぞれ独立に、水素原子、アルキル基、又は、アリール基を表し、Aniはアニオン構造を表し、Catはカチオン構造を表し、Lはそれぞれ独立に、単結合又は2価の連結基を表し、Aは上記重合性基を有する基を表し、X及びXはそれぞれ独立に、酸素原子、硫黄原子、又は、下記式(1X)で表される基を表し、nは1以上の整数を表し、mはそれぞれ独立に、0以上かつRが結合可能な環上の置換位置の最大数を表し、pは0又は1を表す。 In formulas (1A) to (1C), R 1 is independently a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a hydroxy group, an acyl group, an acyloxy group, a nitro group, or a cyano group. the expressed, the C a ~ C C each independently represent a ring structure, Y 1 is independently a single bond, an oxygen atom, a sulfur atom, NR N, carbonyl group, -OC (= O) -, - C (= O) O -, - C (= O) NH -, - OC (= O) -NH -, - Ani - Cat + -, or, -Cat + Ani - - represents, R N are each independently , Hydrogen atom, alkyl group, or aryl group, Ani represents an anionic structure, Cat + represents a cation structure, L 1 represents a single bond or a divalent linking group, respectively, and A 1 Represents the group having the above polymerizable group, X 1 and X 2 each independently represent an oxygen atom, a sulfur atom, or a group represented by the following formula (1X), and n represents an integer of 1 or more. , m is independently 0 or more and represents the maximum number of substitution positions on R 1 can bind ring, p is 0 or 1.
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
 式(1X)中、R及びRはそれぞれ独立に、電子求引性基を表し、波線部分は環構造との結合位置を表す。 In the formula (1X), R 2 and R 3 independently represent an electron-attracting group, and the wavy line portion represents a bonding position with the ring structure.
 式(1A)~式(1C)におけるRはそれぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アシルオキシ基、ニトロ基、又は、シアノ基であることが好ましく、フッ素原子、塩素原子、アルコキシ基、又は、シアノ基であることがより好ましく、フッ素原子、ニトロ基、メトキシ基、又は、シアノ基であることが特に好ましい。
 式(1A)~式(1C)におけるmはそれぞれ独立に、0~3の整数であることが好ましい。
 中でも、重量減少抑制性、パターン直線性、及び、感度の観点から、式(1A)におけるmは、0~2の整数であることが好ましく、1又は2の整数であることが好ましい。
 中でも、重量減少抑制性、パターン直線性、及び、感度の観点から、式(1B)におけるmは、0~2の整数であることが好ましく、0又は1の整数であることが好ましい。
 中でも、重量減少抑制性、パターン直線性、及び、感度の観点から、式(1C)におけるmは、0~2の整数であることが好ましい。
 式(1A)~式(1C)におけるC~Cはそれぞれ独立に、ベンゼン環構造又はナフタレン環構造であることが好ましく、ベンゼン環構造であることがより好ましい。
 式(1A)~式(1C)におけるYはそれぞれ独立に、酸素原子、硫黄原子、又は、NRであることが好ましく、酸素原子、又は、硫黄原子であることがより好ましく、酸素原子であることが特に好ましい。
 式(1A)~式(1C)におけるRはそれぞれ独立に、水素原子、又は、アルキル基であることが好ましく、水素原子、又は、メチル基であることがより好ましく、水素原子であることが特に好ましい。
 式(1A)~式(1C)におけるAniは、カルボン酸アニオン構造又はスルホン酸アニオン構造であることが好ましい。
 式(1A)~式(1C)におけるCatは、第四級アンモニウムカチオン構造であることが好ましい。
 式(1A)~式(1C)におけるLはそれぞれ独立に、2価の連結基であることが好ましく、アルキレン基、アルキレンオキシアルキレン基、又は、ポリアルキレンオキシアルキレン基であることがより好ましく、アルキレン基であることが更に好ましく、エチレン基であることが特に好ましい。
R 1 in the formulas (1A) to (1C) is preferably a halogen atom, an alkyl group, an aryl group, an alkoxy group, an acyloxy group, a nitro group, or a cyano group, and is preferably a fluorine atom or a chlorine atom. , Alkoxy group or cyano group is more preferable, and fluorine atom, nitro group, methoxy group or cyano group is particularly preferable.
It is preferable that m in the formulas (1A) to (1C) is an integer of 0 to 3 independently.
Above all, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, m in the formula (1A) is preferably an integer of 0 to 2, and preferably an integer of 1 or 2.
Above all, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, m in the formula (1B) is preferably an integer of 0 to 2, and preferably an integer of 0 or 1.
Above all, from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, m in the formula (1C) is preferably an integer of 0 to 2.
C A to C C in the formulas (1A) to (1C) are preferably independently having a benzene ring structure or a naphthalene ring structure, and more preferably a benzene ring structure.
Each Y 1 in the formula (1A) ~ formula (1C) is independently an oxygen atom, a sulfur atom, or is preferably NR N, oxygen atom, or, more preferably a sulfur atom, an oxygen atom It is particularly preferable to have.
Are each R N independently in Formula (1A) ~ formula (1C), a hydrogen atom, or, preferably an alkyl group, a hydrogen atom, or, more preferably a methyl group, is a hydrogen atom Especially preferable.
Ani in the formulas (1A) to (1C) preferably has a carboxylic acid anion structure or a sulfonic acid anion structure.
Cat + in the formulas (1A) to (1C) preferably has a quaternary ammonium cation structure.
L 1 in the formulas (1A) to (1C) is preferably a divalent linking group independently, and more preferably an alkylene group, an alkyleneoxyalkylene group, or a polyalkyleneoxyalkylene group. It is more preferably an alkylene group and particularly preferably an ethylene group.
 式(1X)中における電子求引性基としては、-C(=O)OR1Xで表される基(R1Xはアルキル基を表す)、シアノ基、ニトロ基、トリフルオロメチル基等が挙げられる。
 上記式(1X)におけるR及びRはそれぞれ独立に、シアノ基、又は、アルコキシカルボニル基であることが好ましく、シアノ基であることが特に好ましい。
 また、上記式(1X)におけるR及びRは、同じ基であることが好ましい。
Examples of the electron-attracting group in the formula (1X) include a group represented by -C (= O) OR 1X (R 1X represents an alkyl group), a cyano group, a nitro group, a trifluoromethyl group and the like. Be done.
R 2 and R 3 in the above formula (1X) are preferably cyano groups or alkoxycarbonyl groups, respectively, and are particularly preferably cyano groups.
Further, it is preferable that R 2 and R 3 in the above formula (1X) have the same group.
 式(1A)~式(1C)におけるX及びXはそれぞれ独立に、酸素原子、又は、上記式(1X)で表される基であることが好ましく、酸素原子、又は、R及びRがシアノ基である上記式(1X)で表される基であることがより好ましく、R及びRがシアノ基である上記式(1X)で表される基であることが特に好ましい。
 式(1A)~式(1C)におけるAは、重量減少抑制性、パターン直線性、及び、感度の観点から、ラジカル重合性基又はカチオン重合性基であることが好ましく、ラジカル重合性基であることがより好ましく、アクリル基、メタクリル基、ビニル基、又は、アリル基であることがより好ましく、(メタ)アクリロキシ基、(メタ)アクリルアミド基、ビニルエステル基、ビニルエーテル基、スチリル基(ビニルフェニル基)、又は、(メタ)アリル基がより好ましく、(メタ)アクリロキシ基、ビニルエステル基、ビニルエーテル基、又は、スチリル基(ビニルフェニル基)であることがより好ましく、(メタ)アクリロキシ基、又は、スチリル基(ビニルフェニル基)であることが更に好ましく、(メタ)アクリロキシ基であることが特に好ましく、アクリロキシ基であることが最も好ましい。
 式(1A)~式(1C)におけるpは、1であることが好ましい。
It is preferable that X 1 and X 2 in the formulas (1A) to (1C) are independently oxygen atoms or groups represented by the above formula (1X), and are oxygen atoms or R 2 and R. 3 is more preferably a group represented by the above formula represents a cyano group (1X), and particularly preferably R 2 and R 3 is a group represented by the formula is a cyano group (1X).
A 1 in the formulas (1A) to (1C) is preferably a radically polymerizable group or a cationically polymerizable group from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity, and is preferably a radically polymerizable group. It is more preferably an acrylic group, a methacryl group, a vinyl group, or an allyl group, and it is more preferably a (meth) acryloxy group, a (meth) acrylamide group, a vinyl ester group, a vinyl ether group, or a styryl group (vinylphenyl). Group) or (meth) allyl group is more preferred, and (meth) acryloxy group, vinyl ester group, vinyl ether group, or styryl group (vinylphenyl group) is more preferable, and (meth) acryloxy group, or , A styryl group (vinylphenyl group) is more preferable, a (meth) acryloxy group is particularly preferable, and an acryloxy group is most preferable.
It is preferable that p in the formulas (1A) to (1C) is 1.
 式(1A)~式(1C)におけるnは、1~4の整数であることが好ましく、1~3の整数であることがより好ましく、1又は2であることが特に好ましい。 N in the formulas (1A) to (1C) is preferably an integer of 1 to 4, more preferably an integer of 1 to 3, and particularly preferably 1 or 2.
 上記式(1A)~式(1C)は、重量減少抑制性、パターン直線性、及び、感度の観点から、下記式(2)又は式(3)で表される化合物であることが好ましい。 The above formulas (1A) to (1C) are preferably compounds represented by the following formulas (2) or (3) from the viewpoints of weight loss inhibitory property, pattern linearity, and sensitivity.
 化合物Aは、重量減少抑制性、パターン直線性、及び、感度の観点から、下記式(2)又は式(3)で表される化合物であることが好ましい。 Compound A is preferably a compound represented by the following formula (2) or formula (3) from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity.
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
 式(2)中、R21~R24は、それぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、アシル基、アシルオキシ基、ヒドロキシ基、アミノ基、ニトロ基、アミド基、又は、重合性基を有する基を表し、R21及びR22、又は、R23及びR24はそれぞれ独立に、互いに連結して、環を形成してもよく、R21~R24の少なくとも一つは、重合性基を有する基である。
 式(3)中、R31~R34は、それぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、アシル基、アシルオキシ基、ヒドロキシ基、アミノ基、ニトロ基、アミド基、又は、重合性基を有する基を表し、R31及びR32、又は、R33及びR34はそれぞれ独立に、互いに連結して、環を形成してもよく、R31~R34の少なくとも一つは、重合性基を有する基である。
In the formula (2), R 21 to R 24 are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, aryloxy groups, acyl groups, acyloxy groups, hydroxy groups, amino groups, nitro groups and amide groups. , Or a group having a polymerizable group, and R 21 and R 22 or R 23 and R 24 may be independently linked to each other to form a ring, and at least R 21 to R 24 may be formed. One is a group having a polymerizable group.
In the formula (3), R 31 to R 34 independently represent a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyl group, an acyloxy group, a hydroxy group, an amino group, a nitro group and an amide group. , Or a group having a polymerizable group, and R 31 and R 32 , or R 33 and R 34 may be independently linked to each other to form a ring, and at least R 31 to R 34 may be formed. One is a group having a polymerizable group.
 式(2)又は式(3)におけるR21~R24及びR31~R34はそれぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アシルオキシ基、ニトロ基、又は、シアノ基であることが好ましく、フッ素原子、塩素原子、アルコキシ基、又は、シアノ基であることがより好ましく、フッ素原子、ニトロ基、メトキシ基、又は、シアノ基であることが特に好ましい。
 式(2)又は式(3)における重合性基としては、上述の式(1A)~(1C)における重合性基と同義であり、好ましい態様も同様である。
 式(2)又は式(3)において、R21及びR22、若しくは、R23及びR24、又は、R31及びR32、若しくは、R33及びR34がそれぞれ独立に互いに連結して環を形成している場合、形成される環としては、ベンゼン環構造又はナフタレン環構造であることが好ましく、ベンゼン環構造であることがより好ましい。
 式(2)又は式(3)は、重量減少抑制性、パターン直線性、及び、感度の観点から、1分子中に重合性基を2以上有することが好ましい。式(2)又は式(3)における重合性基の数の上限値は、特に制限はないが、6以下であることが好ましく、4以下であることがより好ましい。
R 21 to R 24 and R 31 to R 34 in the formula (2) or the formula (3) are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, acyloxy groups, nitro groups, or cyano groups. It is preferably a fluorine atom, a chlorine atom, an alkoxy group, or a cyano group, and particularly preferably a fluorine atom, a nitro group, a methoxy group, or a cyano group.
The polymerizable group in the formula (2) or the formula (3) has the same meaning as the polymerizable group in the above formulas (1A) to (1C), and the preferred embodiment is also the same.
In formula (2) or formula (3), R 21 and R 22 , or R 23 and R 24 , or R 31 and R 32 , or R 33 and R 34 are independently connected to each other to form a ring. When it is formed, the ring to be formed preferably has a benzene ring structure or a naphthalene ring structure, and more preferably a benzene ring structure.
The formula (2) or formula (3) preferably has two or more polymerizable groups in one molecule from the viewpoint of weight loss inhibitory property, pattern linearity, and sensitivity. The upper limit of the number of polymerizable groups in the formula (2) or the formula (3) is not particularly limited, but is preferably 6 or less, and more preferably 4 or less.
-溶解度-
 化合物Aの使用する溶剤に対する25℃における溶解度は、得られるパターンからの浸み出し抑制性の観点から、0.5g/mL未満であることが好ましく、0.1g/mL未満であることがより好ましく、0.05g/mL未満であることが特に好ましい。上記溶解度の下限は、特に制限されず、0.001g/mL以上であることが好ましい。
 また、化合物Aのプロピレングリコールモノメチルエーテルアセテート(PGMEA)に対する25℃における溶解度は、得られるパターンからの浸み出し抑制性の観点から、0.5g/mL未満であることが好ましく、0.1g/mL未満であることがより好ましく、0.05g/mL未満であることが特に好ましい。上記PGMEAに対する溶解度の下限は、特に制限されず、0.001g/mL以上であることが好ましい。
-solubility-
The solubility of compound A in the solvent used at 25 ° C. is preferably less than 0.5 g / mL, more preferably less than 0.1 g / mL, from the viewpoint of suppressing leaching from the obtained pattern. It is preferably less than 0.05 g / mL, especially preferably less than 0.05 g / mL. The lower limit of the solubility is not particularly limited, and is preferably 0.001 g / mL or more.
The solubility of Compound A in propylene glycol monomethyl ether acetate (PGMEA) at 25 ° C. is preferably less than 0.5 g / mL, preferably 0.1 g / mL, from the viewpoint of suppressing leaching from the obtained pattern. It is more preferably less than mL, and particularly preferably less than 0.05 g / mL. The lower limit of the solubility in PGMEA is not particularly limited, and is preferably 0.001 g / mL or more.
-含有量-
 本開示に係る着色感光性組成物は、化合物Aを1種単独で含んでいても、2種以上を含んでいてもよい。
 本開示に係る着色感光性組成物における化合物Aの含有量は、重量減少抑制性、パターン直線性、感度、及び、分光特性の観点から、着色剤の全質量に対して、0.01質量%~20質量%であることが好ましく、0.05質量%~10質量%であることがより好ましく、0.1質量%~5質量%であることが特に好ましい。
-Content-
The colored photosensitive composition according to the present disclosure may contain one compound A alone or two or more compounds A.
The content of compound A in the colored photosensitive composition according to the present disclosure is 0.01% by mass with respect to the total mass of the colorant from the viewpoints of weight loss inhibitory property, pattern linearity, sensitivity, and spectral characteristics. It is preferably about 20% by mass, more preferably 0.05% by mass to 10% by mass, and particularly preferably 0.1% by mass to 5% by mass.
 以下、化合物Aの具体例であるA-1~A-32を示すが、これに限定されるものではない。 Hereinafter, A-1 to A-32, which are specific examples of Compound A, will be shown, but the present invention is not limited thereto.
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000011
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
-化合物Aの作製方法-
 化合物Aの作製方法としては、特に制限はなく、公知の方法を参照し、作製することができる。
-Method for producing compound A-
The method for producing the compound A is not particularly limited, and the compound A can be produced by referring to a known method.
-化合物Aの添加方法-
 着色感光性組成物への化合物Aの添加方法は、特に制限はされず、公知の添加方法及び公知の混合方法を用いることができる。例えば、顔料とあらかじめ混合(乾式又は湿式)し、乾燥させた化合物A含有複合顔料として使用したり、顔料ミリング時に添加したり、顔料分散時に分散媒とともに添加したり、顔料分散液に添加する方法などが好ましく挙げられる。
-Method of adding compound A-
The method for adding the compound A to the colored photosensitive composition is not particularly limited, and a known addition method and a known mixing method can be used. For example, a method of mixing (dry or wet) with a pigment in advance and using it as a dried compound A-containing composite pigment, adding it at the time of pigment milling, adding it with a dispersion medium at the time of pigment dispersion, or adding it to a pigment dispersion liquid. Etc. are preferably mentioned.
<着色剤>
 本開示に係る着色感光性組成物は、着色剤を含む。
 着色剤としては、顔料、及び、染料が挙げられるが、顔料が好ましい。
 顔料としては、白色顔料、黒色顔料、有彩色顔料、近赤外線吸収顔料が挙げられる。なお、本開示において、白色顔料は純白色のみならず、白に近い明るい灰色(例えば灰白色、薄灰色など)の顔料などを含む。また、顔料は、無機顔料、有機顔料のいずれでもよい。また、顔料には、無機顔料又は有機-無機顔料の一部を有機発色団で置換した材料を用いることもできる。無機顔料や有機-無機顔料を有機発色団で置換することで、色相設計をしやすくできる。また、顔料は、波長400nm~2,000nmの範囲に極大吸収波長を有するものが好ましく、波長400nm~700nmの範囲に極大吸収波長を有するものがより好ましい。
 本開示に係る着色感光性組成物は、カラーフィルタにおける着色画素形成用の着色感光性組成物として好ましく用いることができる。着色画素としては、例えば、赤色画素、緑色画素、青色画素、マゼンタ色画素、シアン色画素、イエロー色画素などが挙げられる。中でも、緑色画素が好ましく挙げられる。
<Colorant>
The colored photosensitive composition according to the present disclosure contains a colorant.
Examples of the colorant include pigments and dyes, but pigments are preferable.
Examples of pigments include white pigments, black pigments, chromatic pigments, and near-infrared absorbing pigments. In the present disclosure, the white pigment includes not only pure white but also a light gray (for example, grayish white, light gray, etc.) pigment close to white. Further, the pigment may be either an inorganic pigment or an organic pigment. Further, as the pigment, an inorganic pigment or a material in which a part of the organic-inorganic pigment is replaced with an organic chromophore can be used. Hue design can be facilitated by replacing inorganic pigments and organic-inorganic pigments with organic chromophores. Further, the pigment preferably has a maximum absorption wavelength in the wavelength range of 400 nm to 2,000 nm, and more preferably has a maximum absorption wavelength in the wavelength range of 400 nm to 700 nm.
The colored photosensitive composition according to the present disclosure can be preferably used as a colored photosensitive composition for forming colored pixels in a color filter. Examples of the colored pixel include a red pixel, a green pixel, a blue pixel, a magenta color pixel, a cyan color pixel, a yellow color pixel, and the like. Among them, green pixels are preferably mentioned.
 本開示に用いられる顔料の平均一次粒子径は、1nm~200nmが好ましい。下限は5nm以上がより好ましく、10nm以上が特に好ましい。上限は、180nm以下がより好ましく、150nm以下が更に好ましく、100nm以下が更特に好ましい。顔料の平均一次粒子径が上記範囲であれば、着色感光性組成物中における顔料の分散性が良好である。なお、本開示において、顔料の一次粒子径は、顔料の一次粒子を透過型電子顕微鏡により観察し、得られた写真から求めることができる。具体的には、顔料の一次粒子の投影面積を求め、それに対応する円相当径を顔料の一次粒子径として算出する。また、本開示における平均一次粒子径は、400個の顔料の一次粒子についての一次粒子径の算術平均値とする。また、顔料の一次粒子とは、凝集のない独立した粒子をいう。 The average primary particle size of the pigment used in the present disclosure is preferably 1 nm to 200 nm. The lower limit is more preferably 5 nm or more, and particularly preferably 10 nm or more. The upper limit is more preferably 180 nm or less, further preferably 150 nm or less, and even more preferably 100 nm or less. When the average primary particle size of the pigment is in the above range, the dispersibility of the pigment in the colored photosensitive composition is good. In the present disclosure, the primary particle size of the pigment can be determined from a photograph obtained by observing the primary particles of the pigment with a transmission electron microscope. Specifically, the projected area of the primary particles of the pigment is obtained, and the corresponding circle-equivalent diameter is calculated as the primary particle diameter of the pigment. Further, the average primary particle diameter in the present disclosure is an arithmetic mean value of the primary particle diameter for the primary particles of 400 pigments. Further, the primary particles of the pigment refer to independent particles without aggregation.
 また、本開示に係る着色感光性組成物は、本開示における効果をより発揮する観点から、着色剤として、緑色着色剤を含むことが好ましく、緑色着色剤及び黄色着色剤を含むことがより好ましい。
 更に、上記着色剤は、感度、及び、分光特性の観点から、フタロシアニン顔料を含むことが好ましく、緑色のフタロシアニン顔料を含むことがより好ましい。
In addition, the colored photosensitive composition according to the present disclosure preferably contains a green colorant as a colorant, and more preferably contains a green colorant and a yellow colorant, from the viewpoint of more exerting the effects in the present disclosure. ..
Further, the colorant preferably contains a phthalocyanine pigment, and more preferably contains a green phthalocyanine pigment, from the viewpoint of sensitivity and spectral characteristics.
-緑色着色剤-
 緑色着色剤としては、公知のものを用いることができる。例えば、カラーインデックス(C.I.)Pigment Green 7,10,36,37,58,59,62,63,64(フタロシアニン系),65(フタロシアニン系),66(フタロシアニン系)等のフタロシアニン化合物が挙げられる。
 また、緑色着色剤としては、1分子中のハロゲン原子数が平均10~14個であり、臭素原子数が平均8~12個であり、塩素原子数が平均2~5個であるハロゲン化亜鉛フタロシアニン化合物を用いることもできる。具体例としては、国際公開第2015/118720号に記載の化合物、中国特許出願公開第106909027号明細書に記載の化合物、リン酸エステルを配位子として有するフタロシアニン化合物、特開2019-038958号公報に記載の化合物などを用いることもできる。
 また、緑色顔料としては、特開2019-8014号公報、又は、特開2018-180023号公報に記載の緑色顔料を使用してもよい。
-Green colorant-
As the green colorant, known ones can be used. For example, phthalocyanine compounds such as Color Index (CI) Pigment Green 7, 10, 36, 37, 58, 59, 62, 63, 64 (phthalocyanine), 65 (phthalocyanine), 66 (phthalocyanine) Can be mentioned.
Further, as a green colorant, zinc halide has an average of 10 to 14 halogen atoms in one molecule, an average of 8 to 12 bromine atoms, and an average of 2 to 5 chlorine atoms. A phthalocyanine compound can also be used. Specific examples thereof include the compound described in International Publication No. 2015/118720, the compound described in Chinese Patent Application Publication No. 1069090227, a phthalocyanine compound having a phosphate ester as a ligand, and Japanese Patent Application Laid-Open No. 2019-038958. The compounds described in the above can also be used.
Further, as the green pigment, the green pigment described in JP-A-2019-8014 or JP-A-2018-180023 may be used.
 緑色着色剤は、1種単独で使用しても、2種以上を併用してもよい。
 着色感光性組成物の全固形分中における緑色着色剤の含有量は、10質量%~80質量%であることが好ましい。下限は、15質量%以上であることがより好ましく、20質量%以上であることが特に好ましい。上限は、70質量%以下であることがより好ましく、60質量%以下であることが特に好ましい。
The green colorant may be used alone or in combination of two or more.
The content of the green colorant in the total solid content of the colored photosensitive composition is preferably 10% by mass to 80% by mass. The lower limit is more preferably 15% by mass or more, and particularly preferably 20% by mass or more. The upper limit is more preferably 70% by mass or less, and particularly preferably 60% by mass or less.
-黄色着色剤-
 黄色着色剤としては、アゾ化合物、キノフタロン化合物、イソインドリノン化合物、イソインドリン化合物、アントラキノン化合物等が挙げられる。中でも、緑色の画素に適した分光特性を有する膜を形成しやすいという理由から、イソインドリン化合物が好ましい。
-Yellow colorant-
Examples of the yellow colorant include azo compounds, quinophthalone compounds, isoindolinone compounds, isoindoline compounds, anthraquinone compounds and the like. Of these, an isoindoline compound is preferable because it is easy to form a film having spectral characteristics suitable for green pixels.
 黄色顔料としては、カラーインデックス(C.I.)Pigment Yellow(以下、単に「PY」ともいう。)1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214,215, (国際公開第2013/098836号に記載された直結型キノフタロン二量体),231,232(メチン系),233(キノリン系),234(アミノケトン系),235(アミノケトン系),236(アミノケトン系)等が挙げられる。 As the yellow pigment, the color index (CI) Pigment Yellow (hereinafter, also simply referred to as “PY”) 1,2,3,4,5,6,10,11,12,13,14,15, 16,17,18,20,24,31,32,34,35,35: 1,36,36: 1,37,37: 1,40,42,43,53,55,60,61,62, 63, 65, 73, 74, 77, 81, 83, 86, 93, 94, 95, 97, 98, 100, 101, 104, 106, 108, 109, 110, 113, 114, 115, 116, 117, 118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166 167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214,215, Directly linked quinophthalone dimer described in Publication No. 2013/098836), 231,232 (methine type), 233 (quinoline type), 234 (aminoketone type), 235 (aminoketone type), 236 (aminoketone type), etc. Can be mentioned.
 また、黄色顔料として、特開2017-201003号公報に記載されている顔料、特開2017-197719号公報に記載されている顔料を用いることができる。また、黄色顔料として、下記式(Y)で表されるアゾ化合物及びその互変異性構造のアゾ化合物よりなる群から選ばれる少なくとも1種のアニオンと、2種以上の金属イオンと、メラミン化合物とを含む金属アゾ顔料を用いることもできる。 Further, as the yellow pigment, the pigment described in JP-A-2017-201003 and the pigment described in JP-A-2017-197719 can be used. Further, as the yellow pigment, at least one anion selected from the group consisting of an azo compound represented by the following formula (Y) and an azo compound having a tautomeric structure thereof, two or more kinds of metal ions, and a melamine compound. A metal azo pigment containing the above can also be used.
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
 式(Y)中、RY1及びRY2はそれぞれ独立に、-OH又は-NRY5Y6を表し、RY3及びRY4はそれぞれ独立に、=O又は=NRY7を表し、RY5~RY7はそれぞれ独立に、水素原子又はアルキル基を表す。
 RY5~RY7が表すアルキル基の炭素数は、1~10が好ましく、1~6がより好ましく、1~4が更に好ましい。上記アルキル基は、直鎖、分岐及び環状のいずれであってもよく、直鎖又は分岐が好ましく、直鎖がより好ましい。上記アルキル基は、置換基を有していてもよい。置換基は、ハロゲン原子、ヒドロキシ基、アルコキシ基、シアノ基及びアミノ基が好ましく挙げられる。
In formula (Y), RY1 and RY2 independently represent -OH or -NR Y5 RY6 , and RY3 and RY4 independently represent = O or = NR Y7 , respectively, RY5 to R. Y7 independently represents a hydrogen atom or an alkyl group.
The number of carbon atoms of the alkyl group represented by RY5 to RY7 is preferably 1 to 10, more preferably 1 to 6, and even more preferably 1 to 4. The alkyl group may be linear, branched or cyclic, and is preferably linear or branched, more preferably linear. The alkyl group may have a substituent. Preferred examples of the substituent include a halogen atom, a hydroxy group, an alkoxy group, a cyano group and an amino group.
 上記の金属アゾ顔料については、特開2017-171912号公報の段落0011~0062、0137~0276、特開2017-171913号公報の段落0010~0062、0138~0295、特開2017-171914号公報の段落0011~0062、0139~0190、特開2017-171915号公報の段落0010~0065、0142~0222の記載を参酌でき、これらの内容は本明細書に組み込まれる。 Regarding the above-mentioned metal azo pigments, paragraphs 0011 to 0062, 0137 to 0276 of JP-A-2017-171912, paragraphs 0010 to 0062, 0138-0295, JP-A-2017-171914 of JP-A-2017-171913, The description of paragraphs 0011 to 0062, 0139 to 0190, and paragraphs 0010 to 0065 and 0142 to 0222 of JP-A-2017-171915 can be referred to, and these contents are incorporated in the present specification.
 また、黄色顔料としては、下記式(Q)で表されるキノフタロン二量体も好適に使用できる。更に、特許第6443711号公報に記載のキノフタロン二量体も好適に使用できる。 Further, as the yellow pigment, a quinophthalone dimer represented by the following formula (Q) can also be preferably used. Further, the quinophthalone dimer described in Japanese Patent No. 6443711 can also be preferably used.
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
 式(Q)中、X~X16はそれぞれ独立に、水素原子又はハロゲン原子を表し、Zは炭素数1~3のアルキレン基を表す。 In the formula (Q), X 1 to X 16 independently represent a hydrogen atom or a halogen atom, and Z represents an alkylene group having 1 to 3 carbon atoms.
 黄色顔料として、特開2018-203798号公報、特開2018-62578号公報、特許第6432077号公報、特許第6432076号公報、特開2018-155881号公報、特開2018-111757号公報、特開2018-40835号公報、特開2017-197640号公報、特開2016-145282号公報、特開2014-85565号公報、特開2014-21139号公報、特開2013-209614号公報、特開2013-209435号公報、特開2013-181015号公報、特開2013-61622号公報、特開2013-54339号公報、特開2013-32486号公報、特開2012-226110号公報、特開2008-74987号公報、特開2008-81565号公報、特開2008-74986号公報、特開2008-74985号公報、特開2008-50420号公報、特開2008-31281号公報、又は、特公昭48-32765号公報に記載のキノフタロン顔料も好適に使用できる。 As yellow pigments, JP-A-2018-203798, JP-A-2018-62578, Patent No. 6432077, Patent No. 6432076, JP-A-2018-155881, JP-A-2018-11757, JP-A. 2018-40835, 2017-197640, 2016-145282, 2014-85565, 2014-21139, 2013-209614, 2013- 209435, 2013-181015, 2013-61622, 2013-54339, 2013-32486, 2012-226110, 2008-74987 Japanese Patent Application Laid-Open No. 2008-81565, Japanese Patent Application Laid-Open No. 2008-79486, Japanese Patent Application Laid-Open No. 2008-74985, Japanese Patent Application Laid-Open No. 2008-50420, Japanese Patent Application Laid-Open No. 2008-31281, or Japanese Patent Application Laid-Open No. 48-32765. The quinophthalone pigments described in the publication can also be preferably used.
 また、黄色着色剤として、特開2013-54339号公報の段落0011~0034に記載のキノフタロン化合物、特開2014-26228号公報の段落0013~0058に記載のキノフタロン化合物、特開2019-8014号公報に記載の黄色顔料、特許第6607427号に記載のキノフタロン化合物、韓国公開特許第10-2014-0034963号公報に記載の化合物、特開2017-095706号公報に記載の化合物、台湾特許出願公開第201920495号公報に記載の化合物、特許第6607427号公報に記載の化合物などを用いることもできる。
 また、黄色着色剤として、特開2018-62644号公報に記載の化合物を用いることもできる。なお、この化合物は、顔料誘導体として用いることもできる。
 更に、特開2018-155881号公報に記載されているように、C.I.Pigment Yellow 129を、耐候性改良の目的で添加してもよい。
Further, as the yellow colorant, the quinophthalone compounds described in paragraphs 0011 to 0034 of JP2013-54339, the quinophthalone compounds described in paragraphs 0013 to 0058 of JP2014-26228, and JP-A-2019-8014. , The quinophthalone compound described in Japanese Patent No. 6607427, the compound described in Korean Publication No. 10-2014-0034963, the compound described in JP-A-2017-0950706, Taiwan Patent Application Publication No. 201920495. The compound described in Japanese Patent Application Laid-Open No. 6607427, the compound described in Japanese Patent Publication No. 6607427, and the like can also be used.
Further, as the yellow colorant, the compound described in JP-A-2018-62644 can also be used. In addition, this compound can also be used as a pigment derivative.
Further, as described in JP-A-2018-155881, C.I. I. Pigment Yellow 129 may be added for the purpose of improving weather resistance.
 黄色着色剤は、1種単独で使用しても、2種以上を併用してもよい。
 本開示に係る着色感光性組成物中における黄色着色剤の含有量は、緑色着色剤の100質量部に対して、10質量部~100質量部であることが好ましい。上限は、80質量部以下であることが好ましく、70質量部以下であることがより好ましく、50質量部以下であることが更に好ましい。下限は、12.5質量部以上であることが好ましく、14質量部以上であることがより好ましく、16質量部以上であることが更に好ましい。
 また、本開示に係る着色感光性組成物を緑色とする場合、緑色着色剤と黄色着色剤の質量比率は、感度、及び、分光特性の観点から、緑色着色剤:黄色着色剤=100:0~50:50が好ましく、95:5~60:40がより好ましく、90:10~70:30が特に好ましい。
The yellow colorant may be used alone or in combination of two or more.
The content of the yellow colorant in the colored photosensitive composition according to the present disclosure is preferably 10 parts by mass to 100 parts by mass with respect to 100 parts by mass of the green colorant. The upper limit is preferably 80 parts by mass or less, more preferably 70 parts by mass or less, and further preferably 50 parts by mass or less. The lower limit is preferably 12.5 parts by mass or more, more preferably 14 parts by mass or more, and further preferably 16 parts by mass or more.
Further, when the colored photosensitive composition according to the present disclosure is green, the mass ratio of the green colorant to the yellow colorant is determined from the viewpoint of sensitivity and spectral characteristics: green colorant: yellow colorant = 100: 0. It is preferably from 50:50, more preferably from 95: 5 to 60:40, and particularly preferably from 90:10 to 70:30.
 緑色及び黄色以外の有彩色着色剤としては、以下が挙げられる。 Examples of chromatic colorants other than green and yellow include the following.
 C.I.Pigment Orange 2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等(以上、オレンジ色顔料)、
 C.I.Pigment Red 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279,294(キサンテン系、Organo Ultramarine、Bluish Red),295(モノアゾ系),296(ジアゾ系),297(アミノケトン系)等(以上、赤色顔料)、
 C.I.Pigment Violet 1,19,23,27,32,37,42,60(トリアリールメタン系),61(キサンテン系)等(以上、紫色顔料)、
 C.I.Pigment Blue 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80,87(モノアゾ系),88(メチン系)等(以上、青色顔料)。
C. I. Pigment Orange 2,5,13,16,17: 1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73, etc. (The above is orange pigment),
C. I. Pigment Red 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48: 1,48: 2,48: 3,48: 4, 49,49: 1,49: 2,52: 1,52: 2,53: 1,57: 1,60: 1,63: 1,66,67,81: 1,81: 2,81: 3, 83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184 185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279,294 (xanthene system) , Organo Ultramarine, Bruish Red), 295 (monoazo type), 296 (diazo type), 297 (aminoketone type), etc. (above, red pigment),
C. I. Pigment Violet 1,19,23,27,32,37,42,60 (triarylmethane type), 61 (xanthene type), etc. (above, purple pigment),
C. I. Pigment Blue 1,2,15,15: 1,15: 2,15: 3,15: 4,15: 6,16,22,60,64,66,79,80,87 (monoazo system), 88 ( Methine type) etc. (above, blue pigment).
 青色顔料として、リン原子を有するアルミニウムフタロシアニン化合物を用いることもできる。具体例としては、特開2012-247591号公報の段落0022~0030、特開2011-157478号公報の段落0047に記載の化合物が挙げられる。 An aluminum phthalocyanine compound having a phosphorus atom can also be used as the blue pigment. Specific examples include the compounds described in paragraphs 0022 to 0030 of JP2012-247591A and paragraphs 0047 of JP2011-157478A.
 赤色顔料として、特開2017-201384号公報に記載の構造中に少なくとも1つ臭素原子が置換したジケトピロロピロール系顔料、特許第6248838号公報の段落0016~0022に記載のジケトピロロピロール系顔料、国際公開第2012/102399号に記載のジケトピロロピロール化合物、国際公開第2012/117965号に記載のジケトピロロピロール化合物、特開2012-229344号公報に記載のナフトールアゾ化合物、特許第6516119号公報に記載の赤色顔料、特許第6525101号公報に記載の赤色顔料などを用いることもできる。また、赤色顔料として、芳香族環に対して、酸素原子、硫黄原子又は窒素原子が結合した基が導入された芳香族環基がジケトピロロピロール骨格に結合した構造を有する化合物を用いることもできる。このような化合物としては、式(DPP1)で表される化合物であることが好ましく、式(DPP2)で表される化合物であることがより好ましい。 As the red pigment, a diketopyrrolopyrrole pigment in which at least one bromine atom is substituted in the structure described in JP-A-2017-2013384, and a diketopyrrolopyrrole-based pigment described in paragraphs 0016 to 0022 of Patent No. 6248838. Pigments, diketopyrrolopyrrole compounds described in WO2012 / 102399, diketopyrrolopyrrole compounds described in WO2012 / 117965, naphtholazo compounds described in JP2012-229344, patent No. The red pigment described in Japanese Patent No. 6516119, the red pigment described in Japanese Patent No. 6525101, and the like can also be used. Further, as the red pigment, a compound having a structure in which an aromatic ring group having an oxygen atom, a sulfur atom or a nitrogen atom bonded to the aromatic ring is bonded to a diketopyrrolopyrrole skeleton can also be used. it can. As such a compound, a compound represented by the formula (DPP1) is preferable, and a compound represented by the formula (DPP2) is more preferable.
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000017
 上記式中、R11及びR13はそれぞれ独立に、置換基を表し、R12及びR14はそれぞれ独立に、水素原子、アルキル基、アリール基又はヘテロアリール基を表し、n11及びn13はそれぞれ独立に、0~4の整数を表し、X12及びX14はそれぞれ独立に、酸素原子、硫黄原子又は窒素原子を表し、X12が酸素原子又は硫黄原子の場合は、m12は1を表し、X12が窒素原子の場合は、m12は2を表し、X14が酸素原子又は硫黄原子の場合は、m14は1を表し、X14が窒素原子の場合は、m14は2を表す。R11及びR13が表す置換基としては、アルキル基、アリール基、ハロゲン原子、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、ヘテロアリールオキシカルボニル基、アミド基、シアノ基、ニトロ基、トリフルオロメチル基、スルホキシド基、スルホ基などが好ましい具体例として挙げられる。 In the above formula, R 11 and R 13 each independently represent a substituent, R 12 and R 14 each independently represent a hydrogen atom, an alkyl group, an aryl group or a heteroaryl group, and n 11 and n 13 are independent of each other. , X 12 and X 14 independently represent an oxygen atom, a sulfur atom or a nitrogen atom, and when X 12 is an oxygen atom or a sulfur atom, m12 represents 1 and X. When 12 is a nitrogen atom, m12 represents 2, m14 represents 1 when X 14 is an oxygen atom or a sulfur atom, and m14 represents 2 when X 14 is a nitrogen atom. The substituents represented by R 11 and R 13 include an alkyl group, an aryl group, a halogen atom, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heteroaryloxycarbonyl group, an amide group, a cyano group, a nitro group and a trifluoro group. Preferred specific examples include a methyl group, a sulfoxide group, and a sulfo group.
 白色顔料としては、酸化チタン、チタン酸ストロンチウム、チタン酸バリウム、酸化亜鉛、酸化マグネシウム、酸化ジルコニウム、酸化アルミニウム、硫酸バリウム、シリカ、タルク、マイカ、水酸化アルミニウム、ケイ酸カルシウム、ケイ酸アルミニウム、中空樹脂粒子、硫化亜鉛などが挙げられる。白色顔料は、チタン原子を有する粒子が好ましく、酸化チタンがより好ましい。また、白色顔料は、波長589nmの光に対する屈折率が2.10以上の粒子であることが好ましい。前述の屈折率は、2.10~3.00であることが好ましく、2.50~2.75であることがより好ましい。 White pigments include titanium oxide, strontium titanate, barium titanate, zinc oxide, magnesium oxide, zirconium oxide, aluminum oxide, barium sulfate, silica, talc, mica, aluminum hydroxide, calcium silicate, aluminum silicate, hollow. Examples include resin particles and zinc sulfide. The white pigment is preferably particles having a titanium atom, and more preferably titanium oxide. Further, the white pigment is preferably particles having a refractive index of 2.10 or more with respect to light having a wavelength of 589 nm. The above-mentioned refractive index is preferably 2.10 to 3.00, and more preferably 2.50 to 2.75.
 また、白色顔料は「酸化チタン 物性と応用技術 清野学著 13~45ページ 1991年6月25日発行、技報堂出版発行」に記載の酸化チタンを用いることもできる。 In addition, as the white pigment, titanium oxide described in "Titanium oxide physical properties and applied technology, by Manabu Kiyono, pp. 13-45, published on June 25, 1991, published by Gihodo Publishing" can also be used.
 白色顔料は、単一の無機物からなるものだけでなく、他の素材と複合させた粒子を用いてもよい。例えば、内部に空孔や他の素材を有する粒子、コア粒子に無機粒子を多数付着させた粒子、ポリマー粒子からなるコア粒子と無機ナノ微粒子からなるシェル層とからなるコア及びシェル複合粒子を用いることが好ましい。上記ポリマー粒子からなるコア粒子と無機ナノ微粒子からなるシェル層とからなるコア及びシェル複合粒子としては、例えば、特開2015-047520号公報の段落0012~0042の記載を参酌することができ、この内容は本明細書に組み込まれる。 The white pigment is not limited to a single inorganic substance, but particles compounded with another material may be used. For example, particles having vacancies or other materials inside, particles in which a large number of inorganic particles are attached to core particles, core particles composed of core particles composed of polymer particles, and shell composite particles composed of a shell layer composed of inorganic nanoparticles are used. Is preferable. As the core and shell composite particles composed of the core particles composed of the polymer particles and the shell layer composed of the inorganic nanoparticles, for example, the description in paragraphs 0012 to 0042 of JP2015-047520 can be referred to. The contents are incorporated herein by reference.
 白色顔料は、中空無機粒子を用いることもできる。中空無機粒子とは、内部に空洞を有する構造の無機粒子であり、外殻に包囲された空洞を有する無機粒子のことを言う。中空無機粒子としては、特開2011-075786号公報、国際公開第2013/061621号、特開2015-164881号公報などに記載された中空無機粒子が挙げられ、これらの内容は本明細書に組み込まれる。 Hollow inorganic particles can also be used as the white pigment. Hollow inorganic particles are inorganic particles having a structure having cavities inside, and are inorganic particles having cavities surrounded by an outer shell. Examples of the hollow inorganic particles include the hollow inorganic particles described in JP-A-2011-075786, International Publication No. 2013/061621, JP-A-2015-164881, and the like, and the contents thereof are incorporated in the present specification. Is done.
 黒色顔料としては特に限定されず、公知のものを用いることができる。例えば、カーボンブラック、チタンブラック、グラファイト等が挙げられ、カーボンブラック、チタンブラックが好ましく、チタンブラックがより好ましい。チタンブラックとは、チタン原子を含有する黒色粒子であり、低次酸化チタンや酸窒化チタンが好ましい。チタンブラックは、分散性向上、凝集性抑制などの目的で必要に応じ、表面を修飾することが可能である。例えば、酸化珪素、酸化チタン、酸化ゲルマニウム、酸化アルミニウム、酸化マグネシウム、又は、酸化ジルコニウムでチタンブラックの表面を被覆することが可能である。また、特開2007-302836号公報に表されるような撥水性物質での処理も可能である。黒色顔料として、カラーインデックス(C.I.)Pigment Black 1,7等が挙げられる。チタンブラックは、個々の粒子の一次粒子径及び平均一次粒子径のいずれもが小さいことが好ましい。具体的には、平均一次粒子径が10~45nmであることが好ましい。チタンブラックは、分散物として用いることもできる。例えば、チタンブラック粒子とシリカ粒子とを含み、分散物中のSi原子とTi原子との含有比が0.20~0.50の範囲に調整した分散物などが挙げられる。上記分散物については、特開2012-169556号公報の段落0020~0105の記載を参酌でき、この内容は本明細書に組み込まれる。チタンブラックの市販品の例としては、チタンブラック10S、12S、13R、13M、13M-C、13R-N、13M-T(商品名:三菱マテリアル(株)製)、ティラック(Tilack)D(商品名:赤穂化成(株)製)などが挙げられる The black pigment is not particularly limited, and known ones can be used. For example, carbon black, titanium black, graphite and the like can be mentioned, with carbon black and titanium black being preferable, and titanium black being more preferable. Titanium black is black particles containing a titanium atom, and low-order titanium oxide or titanium oxynitride is preferable. The surface of titanium black can be modified as needed for the purpose of improving dispersibility and suppressing cohesion. For example, it is possible to coat the surface of titanium black with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconium oxide. Further, it is also possible to treat with a water-repellent substance as shown in Japanese Patent Application Laid-Open No. 2007-302836. Examples of the black pigment include Color Index (CI) Pigment Black 1, 7 and the like. Titanium black preferably has a small primary particle size and an average primary particle size of each particle. Specifically, the average primary particle size is preferably 10 to 45 nm. Titanium black can also be used as a dispersion. For example, a dispersion containing titanium black particles and silica particles and having a content ratio of Si atoms and Ti atoms in the dispersion adjusted to a range of 0.20 to 0.50 can be mentioned. Regarding the above dispersion, the description in paragraphs 0020 to 0105 of JP2012-169556A can be referred to, and the content thereof is incorporated in the present specification. Examples of commercially available titanium black products include titanium black 10S, 12S, 13R, 13M, 13M-C, 13RN, 13MT (trade name: manufactured by Mitsubishi Materials Corporation), Tilac D ( Product name: Ako Kasei Co., Ltd.)
 また、本開示に用いられる顔料としては、特定のCuKα線によるX線回折パターンを有する顔料が好ましく挙げられる。具体的には、例えば、特許第6561862号公報に記載のフタロシアニン顔料、特許第6413872号公報に記載のジケトピロロピロール顔料、特許第6281345号公報に記載のアゾ顔料(C.I.Pigment Red269)などが挙げられる。 Further, as the pigment used in the present disclosure, a pigment having an X-ray diffraction pattern by a specific CuKα ray is preferably mentioned. Specifically, for example, the phthalocyanine pigment described in Japanese Patent No. 6561862, the diketopyrrolopyrrole pigment described in Japanese Patent No. 6413872, and the azo pigment described in Japanese Patent No. 6281345 (CI Pigment Red269). And so on.
 染料としては特に制限はなく、公知の染料が使用できる。ピラゾールアゾ化合物、アニリノアゾ化合物、トリアリールメタン化合物、アントラキノン化合物、アントラピリドン化合物、ベンジリデン化合物、オキソノール化合物、ピラゾロトリアゾールアゾ化合物、ピリドンアゾ化合物、シアニン化合物、フェノチアジン化合物、ピロロピラゾールアゾメチン化合物、キサンテン化合物、フタロシアニン化合物、ベンゾピラン化合物、インジゴ化合物、ピロメテン化合物が挙げられる。 There are no particular restrictions on the dye, and known dyes can be used. Pyrazole azo compound, anilino azo compound, triarylmethane compound, anthraquinone compound, anthrapyridone compound, benzylidene compound, oxonol compound, pyrazorotriazole azo compound, pyridone azo compound, cyanine compound, phenothiazine compound, pyrolopyrazole azomethine compound, xanthene compound, phthalocyanine compound , Bentopylan compounds, indigo compounds, pyromethene compounds.
 また、他の着色剤として、特開2012-158649号公報に記載のチアゾール化合物、特開2011-184493号公報に記載のアゾ化合物、特開2011-145540号公報に記載のアゾ化合物、特開2019-073695号公報に記載のメチン染料、特開2019-073696号公報に記載のメチン染料、特開2019-073697号公報に記載のメチン染料、特開2019-073698号公報に記載のメチン染料を用いることもできる。 Further, as other colorants, a thiazole compound described in JP2012-158649A, an azo compound described in JP2011-184493, an azo compound described in JP2011-145540, and JP-A-2019. The methine dye described in JP-A-073695, the methine dye described in JP-A-2019-073696, the methine dye described in JP-A-2019-073697, and the methine dye described in JP-A-2019-073698 are used. You can also do it.
 本開示に係る着色感光性組成物は、色素多量体を用いることもできる。色素多量体は、溶剤に溶解して用いられる染料であることが好ましい。また、色素多量体は、粒子を形成していてもよい。色素多量体が粒子である場合は通常溶剤に分散した状態で用いられる。粒子状態の色素多量体は、例えば乳化重合によって得ることができ、特開2015-214682号公報に記載されている化合物及び製造方法が具体例として挙げられる。色素多量体は、一分子中に色素構造を2以上有するものであり、色素構造を3以上有することが好ましい。上限は、特に限定はないが、100以下とすることもできる。一分子中に有する複数の色素構造は、同一の色素構造であってもよく、異なる色素構造であってもよい。色素多量体の重量平均分子量(Mw)は、2,000~50,000が好ましい。下限は、3,000以上がより好ましく、6,000以上が更に好ましい。上限は、30,000以下がより好ましく、20,000以下が更に好ましい。色素多量体は、特開2011-213925号公報、特開2013-041097号公報、特開2015-028144号公報、特開2015-030742号公報、国際公開第2016/031442号等に記載されている化合物を用いることもできる。 A dye multimer can also be used in the colored photosensitive composition according to the present disclosure. The dye multimer is preferably a dye that is used by dissolving it in a solvent. In addition, the dye multimers may form particles. When the dye multimer is a particle, it is usually used in a state of being dispersed in a solvent. The dye multimer in the particle state can be obtained by, for example, emulsion polymerization, and specific examples thereof include the compounds and production methods described in JP-A-2015-214682. The dye multimer has two or more dye structures in one molecule, and preferably has three or more dye structures. The upper limit is not particularly limited, but may be 100 or less. The plurality of dye structures contained in one molecule may have the same dye structure or different dye structures. The weight average molecular weight (Mw) of the dye multimer is preferably 2,000 to 50,000. The lower limit is more preferably 3,000 or more, and even more preferably 6,000 or more. The upper limit is more preferably 30,000 or less, further preferably 20,000 or less. Dye multimers are described in JP-A-2011-213925, JP-A-2013-041097, JP-A-2015-028144, JP-A-2015-030742, International Publication No. 2016/031442, and the like. Compounds can also be used.
-着色剤の含有量-
 本開示に係る着色感光性組成物は、着色剤を1種単独で含んでいても、2種以上を含んでいてもよい。
 着色感光性組成物の全固形分中における着色剤の含有量は、5質量%以上であることが好ましく、10質量%以上であることがより好ましく、20質量%以上であることが更に好ましく、30質量%以上であることが特に好ましく、40質量%以上であることが最も好ましい。着色剤の含有量の上限は、80質量%以下であることが好ましく、70質量%以下であることがより好ましく、60質量%以下であることが更に好ましい。
-Colorant content-
The colored photosensitive composition according to the present disclosure may contain one kind of colorant alone or two or more kinds.
The content of the colorant in the total solid content of the colored photosensitive composition is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 20% by mass or more. It is particularly preferably 30% by mass or more, and most preferably 40% by mass or more. The upper limit of the content of the colorant is preferably 80% by mass or less, more preferably 70% by mass or less, and further preferably 60% by mass or less.
<重合性化合物>
 本開示に係る着色感光性組成物は、重合性化合物を含有する。重合性化合物は、化合物A以外の化合物である。
 重合性化合物は、エチレン性不飽和基を有する化合物であることが好ましい。エチレン性不飽和基としては、ビニル基、(メタ)アリル基、(メタ)アクリロイル基などが挙げられる。本開示で用いられる重合性化合物は、ラジカル重合性化合物であることが好ましい。
 重合性化合物としては、モノマー、プレポリマー、オリゴマーなどの化学的形態のいずれであってもよいが、モノマーが好ましい。重合性化合物の分子量は、100~3,000が好ましい。上限は、2,000以下がより好ましく、1,500以下が更に好ましく、1,000以下が特に好ましい。下限は、150以上がより好ましく、250以上が更に好ましい。
<Polymerizable compound>
The colored photosensitive composition according to the present disclosure contains a polymerizable compound. The polymerizable compound is a compound other than compound A.
The polymerizable compound is preferably a compound having an ethylenically unsaturated group. Examples of the ethylenically unsaturated group include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group. The polymerizable compound used in the present disclosure is preferably a radically polymerizable compound.
The polymerizable compound may be in any chemical form such as a monomer, a prepolymer or an oligomer, but a monomer is preferable. The molecular weight of the polymerizable compound is preferably 100 to 3,000. The upper limit is more preferably 2,000 or less, further preferably 1,500 or less, and particularly preferably 1,000 or less. The lower limit is more preferably 150 or more, and even more preferably 250 or more.
 重合性化合物は、エチレン性不飽和基を3個以上含む化合物であることが好ましく、エチレン性不飽和基を3~15個含む化合物であることがより好ましく、エチレン性不飽和基を3~6個含む化合物であることが更に好ましい。また、重合性化合物は、3~15官能の(メタ)アクリレート化合物であることが好ましく、3~6官能の(メタ)アクリレート化合物であることがより好ましい。重合性化合物の具体例としては、特開2009-288705号公報の段落0095~0108、特開2013-029760号公報の段落0227、特開2008-292970号公報の段落0254~0257、特開2013-253224号公報の段落0034~0038、特開2012-208494号公報の段落0477、特開2017-048367号公報、特許第6057891号公報、特許第6031807号公報、特開2017-194662号公報に記載されている化合物が挙げられ、これらの内容は本明細書に組み込まれる。 The polymerizable compound is preferably a compound containing 3 or more ethylenically unsaturated groups, more preferably a compound containing 3 to 15 ethylenically unsaturated groups, and 3 to 6 ethylenically unsaturated groups. It is more preferable that the compound contains two compounds. Further, the polymerizable compound is preferably a (meth) acrylate compound having 3 to 15 functionalities, and more preferably a (meth) acrylate compound having 3 to 6 functionalities. Specific examples of the polymerizable compound include paragraphs 0905 to 0108 of JP2009-288705A, paragraphs 0227 of JP2013-209760A, paragraphs 0254 to 0257 of JP2008-292970, and Japanese Patent Application Laid-Open No. 2013-. It is described in paragraphs 0034 to 0038 of Japanese Patent Application Laid-Open No. 253224, paragraphs 0477 of Japanese Patent Application Laid-Open No. 2012-208494, Japanese Patent Application Laid-Open No. 2017-048367, Japanese Patent No. 6057891, Japanese Patent No. 6031807, and Japanese Patent Application Laid-Open No. 2017-194662. These compounds are incorporated herein by reference.
 重合性化合物のエチレン性不飽和基価(以下、C=C価ともいう。)は、組成物の保存安定性、及び、得られる膜の耐色抜け性などの観点から、2mmol/g~14mmol/gであることが好ましい。下限は、3mmol/g以上であることがより好ましく、4mmol/g以上であることが更に好ましく、5mmol/g以上であることが特に好ましい。上限は12mmol/g以下であることがより好ましく、10mmol/g以下であることが更に好ましく、8mmol/g以下であることが特に好ましい。重合性化合物のC=C価は、重合性化合物の1分子中に含まれるエチレン性不飽和基の数を重合性化合物の分子量で割ることで算出した値である。 The ethylenically unsaturated base value (hereinafter, also referred to as C = C value) of the polymerizable compound is 2 mmol / g to 14 mmol from the viewpoint of storage stability of the composition and color loss resistance of the obtained film. It is preferably / g. The lower limit is more preferably 3 mmol / g or more, further preferably 4 mmol / g or more, and particularly preferably 5 mmol / g or more. The upper limit is more preferably 12 mmol / g or less, further preferably 10 mmol / g or less, and particularly preferably 8 mmol / g or less. The C = C value of the polymerizable compound is a value calculated by dividing the number of ethylenically unsaturated groups contained in one molecule of the polymerizable compound by the molecular weight of the polymerizable compound.
 重合性化合物としては、ジペンタエリスリトールトリアクリレート(市販品としてはKAYARAD D-330;日本化薬(株)製)、ジペンタエリスリトールテトラアクリレート(市販品としてはKAYARAD D-320;日本化薬(株)製)、ジペンタエリスリトールペンタ(メタ)アクリレート(市販品としてはKAYARAD D-310;日本化薬(株)製)、ジペンタエリスリトールヘキサ(メタ)アクリレート(市販品としてはKAYARAD DPHA;日本化薬(株)製、NKエステルA-DPH-12E;新中村化学工業(株)製)、及び、これらの(メタ)アクリロイル基がエチレングリコール及び/又はプロピレングリコール残基を介して結合している構造の化合物(例えば、サートマー社から市販されている、SR454、SR499)が好ましい。また、重合性化合物としては、ジグリセリンEO(エチレンオキシド)変性(メタ)アクリレート(市販品としてはM-460;東亞合成(株)製)、ペンタエリスリトールテトラアクリレート(新中村化学工業(株)製、NKエステルA-TMMT)、1,6-ヘキサンジオールジアクリレート(日本化薬(株)製、KAYARAD HDDA)、RP-1040(日本化薬(株)製)、アロニックスTO-2349(東亞合成(株)製)、NKオリゴUA-7200(新中村化学工業(株)製)、8UH-1006、8UH-1012(大成ファインケミカル(株)製)、ライトアクリレートPOB-A0(共栄社化学(株)製)などを用いることもできる。 As polymerizable compounds, dipentaerythritol triacrylate (commercially available KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (commercially available KAYARAD D-320; Nihon Kayaku Co., Ltd.) ), Dipentaerythritol penta (meth) acrylate (commercially available KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (commercially available KAYARAD DPHA; Nippon Kayaku) NK ester A-DPH-12E manufactured by Shin-Nakamura Chemical Industry Co., Ltd., and a structure in which these (meth) acryloyl groups are bonded via ethylene glycol and / or propylene glycol residues. (For example, SR454, SR499 commercially available from Sartmer) are preferred. As polymerizable compounds, diglycerin EO (ethylene oxide) modified (meth) acrylate (commercially available M-460; manufactured by Toa Synthetic Co., Ltd.), pentaerythritol tetraacrylate (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), NK ester A-TMMT), 1,6-hexanediol diacrylate (manufactured by Nippon Kayaku Co., Ltd., KAYARAD HDDA), RP-1040 (manufactured by Nihon Kayaku Co., Ltd.), Aronix TO-2349 (Toa Synthetic Co., Ltd.) ), NK Oligo UA-7200 (Shin Nakamura Chemical Industry Co., Ltd.), 8UH-1006, 8UH-1012 (Taisei Fine Chemical Co., Ltd.), Light Acrylate POB-A0 (Kyoeisha Chemical Co., Ltd.), etc. Can also be used.
 また、重合性化合物として、トリメチロールプロパントリ(メタ)アクリレート、トリメチロールプロパンプロピレンオキシ変性トリ(メタ)アクリレート、トリメチロールプロパンエチレンオキシ変性トリ(メタ)アクリレート、イソシアヌル酸エチレンオキシ変性トリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレートなどの3官能の(メタ)アクリレート化合物を用いることも好ましい。3官能の(メタ)アクリレート化合物の市販品としては、アロニックスM-309、M-310、M-321、M-350、M-360、M-313、M-315、M-306、M-305、M-303、M-452、M-450(東亞合成(株)製)、NKエステル A9300、A-GLY-9E、A-GLY-20E、A-TMM-3、A-TMM-3L、A-TMM-3LM-N、A-TMPT、TMPT(新中村化学工業(株)製)、KAYARAD GPO-303、TMPTA、THE-330、TPA-330、PET-30(日本化薬(株)製)などが挙げられる。 Further, as the polymerizable compound, trimethylolpropane tri (meth) acrylate, trimethylolpropane propyleneoxy-modified tri (meth) acrylate, trimethylolpropane ethyleneoxy-modified tri (meth) acrylate, and isocyanurate ethyleneoxy-modified tri (meth) acrylate. It is also preferable to use a trifunctional (meth) acrylate compound such as pentaerythritol trimethylolpropane (meth) acrylate. Commercially available trifunctional (meth) acrylate compounds include Aronix M-309, M-310, M-321, M-350, M-360, M-313, M-315, M-306, and M-305. , M-303, M-452, M-450 (manufactured by Toagosei Co., Ltd.), NK ester A9300, A-GLY-9E, A-GLY-20E, A-TMM-3, A-TMM-3L, A -TMM-3LM-N, A-TMPT, TMPT (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), KAYARAD GPO-303, TMPTA, THE-330, TPA-330, PET-30 (manufactured by Nippon Kayaku Co., Ltd.) And so on.
 重合性化合物は、イソシアヌレート骨格を有する化合物を用いることもできる。イソシアヌレート骨格を有する重合性化合物を用いることにより、得られる膜の耐溶剤性を向上させることができる。イソシアヌレート骨格を有する重合性化合物の具体例としては、イソシアヌル酸トリス(2-アクリロイルオキシエチル)、ε-カプロラクトン変性トリス-(2-アクリロキシエチル)イソシアヌレートなどが挙げられる。市販品としては、ファンクリルFA-731A(日立化成(株)製))、NKエステルA9300、A9300-1CL、A9300-3CL(新中村化学工業(株)製)、アロニックスM-315(東亞合成(株)製)等が挙げられる。 As the polymerizable compound, a compound having an isocyanurate skeleton can also be used. By using a polymerizable compound having an isocyanurate skeleton, the solvent resistance of the obtained membrane can be improved. Specific examples of the polymerizable compound having an isocyanurate skeleton include tris isocyanurate (2-acryloyloxyethyl), ε-caprolactone-modified tris- (2-acryloyloxyethyl) isocyanurate, and the like. Commercially available products include Funkrill FA-731A (manufactured by Hitachi Chemical Co., Ltd.), NK Ester A9300, A93001CL, A9300-3CL (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), and Aronix M-315 (Toagosei Co., Ltd.) Co., Ltd.) and the like.
 重合性化合物は、酸基を有する化合物を用いることもできる。酸基を有する重合性化合物を用いることで、現像時に未露光部の重合性化合物が除去されやすく、現像残渣の発生を抑制できる。酸基としては、カルボキシ基、スルホ基、リン酸基等が挙げられ、カルボキシ基が好ましい。酸基を有する重合性化合物の市販品としては、アロニックスM-305、M-510、M-520、アロニックスTO-2349(東亞合成(株)製)等が挙げられる。酸基を有する重合性化合物の好ましい酸価としては、0.1mgKOH/g~40mgKOH/gであり、より好ましくは5mgKOH/g~30mgKOH/gである。重合性化合物の酸価が0.1mgKOH/g以上であれば、現像液に対する溶解性が良好であり、40mgKOH/g以下であれば、製造や取扱い上、有利である。 As the polymerizable compound, a compound having an acid group can also be used. By using a polymerizable compound having an acid group, the polymerizable compound in the unexposed portion can be easily removed during development, and the generation of development residue can be suppressed. Examples of the acid group include a carboxy group, a sulfo group, a phosphoric acid group and the like, and a carboxy group is preferable. Examples of commercially available products of the polymerizable compound having an acid group include Aronix M-305, M-510, M-520, and Aronix TO-2349 (manufactured by Toagosei Co., Ltd.). The preferable acid value of the polymerizable compound having an acid group is 0.1 mgKOH / g to 40 mgKOH / g, and more preferably 5 mgKOH / g to 30 mgKOH / g. When the acid value of the polymerizable compound is 0.1 mgKOH / g or more, the solubility in a developing solution is good, and when it is 40 mgKOH / g or less, it is advantageous in production and handling.
 重合性化合物は、カプロラクトン構造を有する化合物を用いることもできる。カプロラクトン構造を有する重合性化合物は、例えば、日本化薬(株)からKAYARAD DPCAシリーズとして市販されており、DPCA-20、DPCA-30、DPCA-60、DPCA-120等が挙げられる。 As the polymerizable compound, a compound having a caprolactone structure can also be used. Polymerizable compounds having a caprolactone structure are commercially available from Nippon Kayaku Co., Ltd. as the KAYARAD DPCA series, and examples thereof include DPCA-20, DPCA-30, DPCA-60, and DPCA-120.
 重合性化合物は、アルキレンオキシ基を有する重合性化合物を用いることもできる。アルキレンオキシ基を有する重合性化合物は、エチレンオキシ基及び/又はプロピレンオキシ基を有する重合性化合物が好ましく、エチレンオキシ基を有する重合性化合物がより好ましく、エチレンオキシ基を4~20個有する3~6官能(メタ)アクリレート化合物がさらに好ましい。アルキレンオキシ基を有する重合性化合物の市販品としては、例えばサートマー社製のエチレンオキシ基を4個有する4官能(メタ)アクリレートであるSR-494、イソブチレンオキシ基を3個有する3官能(メタ)アクリレートであるKAYARAD TPA-330などが挙げられる。 As the polymerizable compound, a polymerizable compound having an alkyleneoxy group can also be used. The polymerizable compound having an alkyleneoxy group is preferably a polymerizable compound having an ethyleneoxy group and / or a propyleneoxy group, more preferably a polymerizable compound having an ethyleneoxy group, and having 4 to 20 ethyleneoxy groups 3 to 3 to A hexafunctional (meth) acrylate compound is more preferred. Commercially available products of the polymerizable compound having an alkyleneoxy group include SR-494, which is a tetrafunctional (meth) acrylate having four ethyleneoxy groups manufactured by Sartomer, and a trifunctional (meth) having three isobutyleneoxy groups. Examples thereof include KAYARAD TPA-330, which is an acrylate.
 重合性化合物は、フルオレン骨格を有する重合性化合物を用いることもできる。フルオレン骨格を有する重合性化合物の市販品としては、オグソールEA-0200、EA-0300(大阪ガスケミカル(株)製、フルオレン骨格を有する(メタ)アクリレートモノマー)などが挙げられる。 As the polymerizable compound, a polymerizable compound having a fluorene skeleton can also be used. Examples of commercially available products of the polymerizable compound having a fluorene skeleton include Ogsol EA-0200 and EA-0300 (manufactured by Osaka Gas Chemical Co., Ltd., a (meth) acrylate monomer having a fluorene skeleton).
 重合性化合物としては、トルエンなどの環境規制物質を実質的に含まない化合物を用いることも好ましい。このような化合物の市販品としては、KAYARAD DPHA LT、KAYARAD DPEA-12 LT(日本化薬(株)製)などが挙げられる。
 なお、本開示における「実質的に含まない」とは、着色感光性組成物の全固形分中における含有量が0.1質量%以下であることであり、0.05質量%以下であることが好ましく、含有しないことがより好ましい。
As the polymerizable compound, it is also preferable to use a compound that does not substantially contain an environmentally regulated substance such as toluene. Examples of commercially available products of such compounds include KAYARAD DPHA LT and KAYARAD DPEA-12 LT (manufactured by Nippon Kayaku Co., Ltd.).
The term "substantially free" in the present disclosure means that the content of the colored photosensitive composition in the total solid content is 0.1% by mass or less, and 0.05% by mass or less. Is preferable, and it is more preferable that it is not contained.
 重合性化合物としては、特公昭48-041708号公報、特開昭51-037193号公報、特公平02-032293号公報、特公平02-016765号公報に記載されているようなウレタンアクリレート類や、特公昭58-049860号公報、特公昭56-017654号公報、特公昭62-039417号公報、特公昭62-039418号公報に記載されたエチレンオキサイド系骨格を有するウレタン化合物も好適である。また、特開昭63-277653号公報、特開昭63-260909号公報、特開平01-105238号公報に記載された分子内にアミノ構造やスルフィド構造を有する重合性化合物を用いることも好ましい。また、重合性化合物は、UA-7200(新中村化学工業(株)製)、DPHA-40H(日本化薬(株)製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600、LINC-202UA(共栄社化学(株)製)などの市販品を用いることもできる。 Examples of the polymerizable compound include urethane acrylates as described in JP-A-48-041708, JP-A-51-0371993, JP-A-02-032293, and JP-A-02-016765. Urethane compounds having an ethylene oxide-based skeleton described in Japanese Patent Publication No. 58-049860, Japanese Patent Publication No. 56-017654, Japanese Patent Publication No. 62-039417, and Japanese Patent Publication No. 62-039418 are also suitable. Further, it is also preferable to use a polymerizable compound having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-01-105238. The polymerizable compounds are UA-7200 (manufactured by Shin Nakamura Chemical Industry Co., Ltd.), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA-306T, UA-306I, AH-600, Commercially available products such as T-600, AI-600, and LINK-202UA (manufactured by Kyoeisha Chemical Co., Ltd.) can also be used.
 着色感光性組成物の全固形分中における重合性化合物の含有量は、0.1質量%~30質量%であることが好ましい。下限は、0.5質量%以上がより好ましく、1質量%以上が更に好ましく、3質量%以上が特に好ましく、5質量%以上が最も好ましい。上限は、25質量%以下がより好ましく、20質量%以下が更に好ましく、15質量%以下が特に好ましい。重合性化合物は、1種単独であってもよいし、2種以上を併用してもよい。2種以上を併用する場合は、それらの合計が上記範囲となることが好ましい。 The content of the polymerizable compound in the total solid content of the colored photosensitive composition is preferably 0.1% by mass to 30% by mass. The lower limit is more preferably 0.5% by mass or more, further preferably 1% by mass or more, particularly preferably 3% by mass or more, and most preferably 5% by mass or more. The upper limit is more preferably 25% by mass or less, further preferably 20% by mass or less, and particularly preferably 15% by mass or less. The polymerizable compound may be used alone or in combination of two or more. When two or more types are used in combination, the total of them is preferably in the above range.
 また、着色感光性組成物の全固形分中における後述する樹脂と重合性化合物との合計の含有量は、10質量%~50質量%が好ましい。下限は、15質量%以上が好ましく、20質量%以上がより好ましく、25質量%以上が更に好ましい。上限は、45質量%以下が好ましく、40質量%以下がより好ましく、35質量%以下が更に好ましい。 Further, the total content of the resin and the polymerizable compound described later in the total solid content of the colored photosensitive composition is preferably 10% by mass to 50% by mass. The lower limit is preferably 15% by mass or more, more preferably 20% by mass or more, and further preferably 25% by mass or more. The upper limit is preferably 45% by mass or less, more preferably 40% by mass or less, and further preferably 35% by mass or less.
 また、重合性化合物の含有量は、光重合開始剤100質量部に対して10質量部~2,000質量部であることが好ましい。上限は、1,800質量部以下であることが好ましく、1500質量部以下であることがより好ましい。下限は、30質量部以上であることが好ましく、50質量部以上であることがより好ましい。 Further, the content of the polymerizable compound is preferably 10 parts by mass to 2,000 parts by mass with respect to 100 parts by mass of the photopolymerization initiator. The upper limit is preferably 1,800 parts by mass or less, and more preferably 1500 parts by mass or less. The lower limit is preferably 30 parts by mass or more, and more preferably 50 parts by mass or more.
<光重合開始剤>
 本開示に係る着色感光性組成物は、光重合開始剤を含む。
 光重合開始剤としては、特に制限はなく、公知の光重合開始剤の中から適宜選択することができる。例えば、紫外線領域から可視領域の光線に対して感光性を有する化合物が好ましい。光重合開始剤は、光ラジカル重合開始剤であることが好ましい。
<Photopolymerization initiator>
The colored photosensitive composition according to the present disclosure contains a photopolymerization initiator.
The photopolymerization initiator is not particularly limited and may be appropriately selected from known photopolymerization initiators. For example, a compound having photosensitivity to light rays in the ultraviolet region to the visible region is preferable. The photopolymerization initiator is preferably a photoradical polymerization initiator.
 光重合開始剤としては、ハロゲン化炭化水素誘導体(例えば、トリアジン骨格を有する化合物、オキサジアゾール骨格を有する化合物など)、アシルホスフィン化合物、ヘキサアリールビイミダゾール、オキシム化合物、有機過酸化物、チオ化合物、ケトン化合物、芳香族オニウム塩、α-ヒドロキシケトン化合物、α-アミノケトン化合物などが挙げられる。光重合開始剤は、露光感度の観点から、トリハロメチルトリアジン化合物、ベンジルジメチルケタール化合物、α-ヒドロキシケトン化合物、α-アミノケトン化合物、アシルホスフィン化合物、ホスフィンオキサイド化合物、メタロセン化合物、オキシム化合物、トリアリールイミダゾールダイマー、オニウム化合物、ベンゾチアゾール化合物、ベンゾフェノン化合物、アセトフェノン化合物、シクロペンタジエン-ベンゼン-鉄錯体、ハロメチルオキサジアゾール化合物及び3-アリール置換クマリン化合物であることが好ましく、オキシム化合物、α-ヒドロキシケトン化合物、α-アミノケトン化合物、及び、アシルホスフィン化合物から選ばれる化合物であることがより好ましく、オキシム化合物であることが更に好ましい。光重合開始剤としては、特開2014-130173号公報の段落0065~0111、特許第6301489号公報に記載された化合物、MATERIAL STAGE 37~60p,vol.19,No.3,2019に記載されたパーオキサイド系光重合開始剤、国際公開第2018/221177号に記載の光重合開始剤、国際公開第2018/110179号に記載の光重合開始剤、特開2019-043864号公報に記載の光重合開始剤、特開2019-044030号公報に記載の光重合開始剤、特開2019-167313号公報に記載の有機過酸化物が挙げられ、この内容は本明細書に組み込まれる。 Examples of the photopolymerization initiator include halogenated hydrocarbon derivatives (for example, compounds having a triazine skeleton, compounds having an oxadiazole skeleton, etc.), acylphosphine compounds, hexaarylbiimidazoles, oxime compounds, organic peroxides, and thio compounds. , Ketone compounds, aromatic onium salts, α-hydroxyketone compounds, α-aminoketone compounds and the like. From the viewpoint of exposure sensitivity, the photopolymerization initiator includes trihalomethyltriazine compound, benzyldimethylketal compound, α-hydroxyketone compound, α-aminoketone compound, acylphosphine compound, phosphine oxide compound, metallocene compound, oxime compound, and triarylimidazole. It is preferably a dimer, an onium compound, a benzothiazole compound, a benzophenone compound, an acetophenone compound, a cyclopentadiene-benzene-iron complex, a halomethyloxaziazole compound and a 3-aryl substituted coumarin compound, and an oxime compound and an α-hydroxyketone compound. , Α-Aminoketone compound, and acylphosphine compound are more preferable, and an oxime compound is further preferable. Examples of the photopolymerization initiator include compounds described in paragraphs 0065 to 0111 of JP-A-2014-130173 and JP-A-6301489, MATERIAL STAGE 37-60p, vol. 19, No. 3. Peroxide-based photopolymerization initiator described in 2019, photopolymerization initiator described in International Publication No. 2018/221177, photopolymerization initiator described in International Publication No. 2018/110179, JP-A-2019-043864 Examples of the photopolymerization initiator described in JP-A, the photopolymerization initiator described in JP-A-2019-044030, and the organic peroxide described in JP-A-2019-167313 are described in the present specification. Be incorporated.
 α-ヒドロキシケトン化合物の市販品としては、IRGACURE 184、DAROCUR 1173、IRGACURE 500、IRGACURE 2959、IRGACURE 127(以上、BASF社製)などが挙げられる。α-アミノケトン化合物の市販品としては、IRGACURE 907、IRGACURE 369、IRGACURE 379、及び、IRGACURE 379EG(以上、BASF社製)などが挙げられる。アシルホスフィン化合物の市販品としては、IRGACURE 819、DAROCUR-TPO(以上、BASF社製)などが挙げられる。 Examples of commercially available α-hydroxyketone compounds include IRGACURE 184, DAROCUR 1173, IRGACURE 500, IRGACURE 2959, and IRGACURE 127 (all manufactured by BASF). Examples of commercially available α-aminoketone compounds include IRGACURE 907, IRGACURE 369, IRGACURE 379, and IRGACURE 379EG (all manufactured by BASF). Examples of commercially available acylphosphine compounds include IRGACURE 819 and DAROCUR-TPO (all manufactured by BASF).
 オキシム化合物としては、特開2001-233842号公報に記載の化合物、特開2000-080068号公報に記載の化合物、特開2006-342166号公報に記載の化合物、J.C.S.Perkin II(1979年、pp.1653-1660)に記載の化合物、J.C.S.Perkin II(1979年、pp.156-162)に記載の化合物、Journal of Photopolymer Science and Technology(1995年、pp.202-232)に記載の化合物、特開2000-066385号公報に記載の化合物、特開2000-080068号公報に記載の化合物、特表2004-534797号公報に記載の化合物、特開2006-342166号公報に記載の化合物、特開2017-019766号公報に記載の化合物、特許第6065596号公報に記載の化合物、国際公開第2015/152153号に記載の化合物、国際公開第2017/051680号に記載の化合物、特開2017-198865号公報に記載の化合物、国際公開第2017/164127号の段落0025~0038に記載の化合物、国際公開第2013/167515号に記載の化合物などが挙げられる。オキシム化合物の具体例としては、3-ベンゾイルオキシイミノブタン-2-オン、3-アセトキシイミノブタン-2-オン、3-プロピオニルオキシイミノブタン-2-オン、2-アセトキシイミノペンタン-3-オン、2-アセトキシイミノ-1-フェニルプロパン-1-オン、2-ベンゾイルオキシイミノ-1-フェニルプロパン-1-オン、3-(4-トルエンスルホニルオキシ)イミノブタン-2-オン、及び2-エトキシカルボニルオキシイミノ-1-フェニルプロパン-1-オンなどが挙げられる。市販品としては、IRGACURE-OXE01、IRGACURE-OXE02、IRGACURE-OXE03、IRGACURE-OXE04(以上、BASF社製)、TR-PBG-304(常州強力電子新材料有限公司製)、アデカオプトマーN-1919((株)ADEKA製、特開2012-014052号公報に記載の光重合開始剤2)が挙げられる。また、オキシム化合物としては、着色性が無い化合物や、透明性が高く変色し難い化合物を用いることも好ましい。市販品としては、アデカアークルズNCI-730、NCI-831、NCI-930(以上、(株)ADEKA製)などが挙げられる。 Examples of the oxime compound include the compounds described in JP-A-2001-233842, the compounds described in JP-A-2000-080068, the compounds described in JP-A-2006-342166, and J. Am. C. S. The compound according to Perkin II (1979, pp. 1653-1660), J. Mol. C. S. The compound described in Perkin II (1979, pp. 156-162), the compound described in Journal of Photopolymer Science and Technology (1995, pp. 202-232), the compound described in JP-A-2000-066385. Compounds described in JP-A-2000-080068, compounds described in JP-A-2004-534977, compounds described in JP-A-2006-342166, compounds described in JP-A-2017-019766, Patent No. 6065596, the compound described in International Publication No. 2015/152153, the compound described in International Publication No. 2017/051680, the compound described in JP-A-2017-198865, the compound described in International Publication No. 2017/164127. Examples thereof include the compounds described in paragraphs 0025 to 0038 of the issue, and the compounds described in International Publication No. 2013/167515. Specific examples of the oxime compound include 3-benzoyloxyiminobutane-2-one, 3-acetoxyiminovtan-2-one, 3-propionyloxyiminobutane-2-one, 2-acetoxyiminopentane-3-one, 2-acetoxyimino-1-phenylpropane-1-one, 2-benzoyloxyimino-1-phenylpropan-1-one, 3- (4-toluenesulfonyloxy) iminobutane-2-one, and 2-ethoxycarbonyloxy Examples thereof include imino-1-phenylpropane-1-one. Commercially available products include IRGACURE-OXE01, IRGACURE-OXE02, IRGACURE-OXE03, IRGACURE-OXE04 (above, manufactured by BASF), TR-PBG-304 (manufactured by Joshu Powerful Electronics New Materials Co., Ltd.), and ADEKA PTOMER N-1919. (A photopolymerization initiator 2) manufactured by ADEKA Corporation and described in JP2012-014502A. Further, as the oxime compound, it is also preferable to use a compound having no coloring property or a compound having high transparency and being hard to discolor. Examples of commercially available products include ADEKA ARKULS NCI-730, NCI-831, and NCI-930 (all manufactured by ADEKA Corporation).
 光重合開始剤としては、フルオレン環を有するオキシム化合物を用いることもできる。フルオレン環を有するオキシム化合物の具体例としては、特開2014-137466号公報に記載の化合物が挙げられる。 As the photopolymerization initiator, an oxime compound having a fluorene ring can also be used. Specific examples of the oxime compound having a fluorene ring include the compounds described in JP-A-2014-137466.
 また、光重合開始剤として、カルバゾール環の少なくとも1つのベンゼン環がナフタレン環となった骨格を有するオキシム化合物を用いることもできる。そのようなオキシム化合物の具体例としては、国際公開第2013/083505号に記載の化合物が挙げられる。 Further, as the photopolymerization initiator, an oxime compound having a skeleton in which at least one benzene ring of the carbazole ring is a naphthalene ring can also be used. Specific examples of such an oxime compound include the compounds described in International Publication No. 2013/083505.
 本開示において、光重合開始剤として、フッ素原子を有するオキシム化合物を用いることもできる。フッ素原子を有するオキシム化合物の具体例としては、特開2010-262028号公報に記載の化合物、特表2014-500852号公報に記載の化合物24、36~40、特開2013-164471号公報に記載の化合物(C-3)などが挙げられる。 In the present disclosure, an oxime compound having a fluorine atom can also be used as the photopolymerization initiator. Specific examples of the oxime compound having a fluorine atom are described in the compounds described in JP-A-2010-262028, the compounds 24, 36-40 described in JP-A-2014-500852, and JP-A-2013-164471. Compound (C-3) and the like.
 光重合開始剤としては、ニトロ基を有するオキシム化合物を用いることができる。ニトロ基を有するオキシム化合物は、二量体とすることも好ましい。ニトロ基を有するオキシム化合物の具体例としては、特開2013-114249号公報の段落0031~0047、特開2014-137466号公報の段落0008~0012、0070~0079に記載されている化合物、特許4223071号公報の段落0007~0025に記載されている化合物、アデカアークルズNCI-831((株)ADEKA製)が挙げられる。 As the photopolymerization initiator, an oxime compound having a nitro group can be used. The oxime compound having a nitro group is also preferably a dimer. Specific examples of the oxime compound having a nitro group include the compounds described in paragraphs 0031 to 0047 of JP2013-114249A, paragraphs 0008 to 0012 and 0070 to 0079 of JP2014-137466, and Patents 4223071. Examples thereof include the compounds described in paragraphs 0007 to 0025 of Japanese Patent Publication No. Adeca Arcurus NCI-831 (manufactured by ADEKA Corporation).
 光重合開始剤としては、ベンゾフラン骨格を有するオキシム化合物を用いることもできる。具体例としては、国際公開第2015/036910号に記載されるOE-01~OE-75が挙げられる。 As the photopolymerization initiator, an oxime compound having a benzofuran skeleton can also be used. Specific examples include OE-01 to OE-75 described in International Publication No. 2015/036910.
 光重合開始剤としては、カルバゾール骨格にヒドロキシ基を有する置換基が結合したオキシム化合物を用いることもできる。このような光重合開始剤としては国際公開第2019/088055号に記載された化合物などが挙げられる。 As the photopolymerization initiator, an oxime compound in which a substituent having a hydroxy group is bonded to the carbazole skeleton can also be used. Examples of such a photopolymerization initiator include the compounds described in International Publication No. 2019/088055.
 本開示において好ましく使用されるオキシム化合物の具体例を以下に示すが、本開示はこれらに限定されるものではない。 Specific examples of the oxime compound preferably used in the present disclosure are shown below, but the present disclosure is not limited thereto.
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000020
 オキシム化合物は、波長350~500nmの範囲に極大吸収波長を有する化合物が好ましく、波長360~480nmの範囲に極大吸収波長を有する化合物がより好ましい。また、オキシム化合物の波長365nm又は波長405nmにおけるモル吸光係数は、感度の観点から、高いことが好ましく、1,000~300,000であることがより好ましく、2,000~300,000であることが更に好ましく、5,000~200,000であることが特に好ましい。化合物のモル吸光係数は、公知の方法を用いて測定することができる。例えば、分光光度計(Varian社製Cary-5 spectrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。 The oxime compound is preferably a compound having a maximum absorption wavelength in the wavelength range of 350 to 500 nm, and more preferably a compound having a maximum absorption wavelength in the wavelength range of 360 to 480 nm. The molar extinction coefficient of the oxime compound at a wavelength of 365 nm or a wavelength of 405 nm is preferably high, more preferably 1,000 to 300,000, and more preferably 2,000 to 300,000 from the viewpoint of sensitivity. Is more preferable, and 5,000 to 200,000 is particularly preferable. The molar extinction coefficient of a compound can be measured using a known method. For example, it is preferable to measure at a concentration of 0.01 g / L using an ethyl acetate solvent with a spectrophotometer (Cary-5 spectrophotometer manufactured by Varian).
 光重合開始剤として、2官能あるいは3官能以上の光ラジカル重合開始剤を用いてもよい。そのような光ラジカル重合開始剤を用いることにより、光ラジカル重合開始剤の1分子から2つ以上のラジカルが発生するため、良好な感度が得られる。また、非対称構造の化合物を用いた場合においては、結晶性が低下して溶剤などへの溶解性が向上して、経時で析出しにくくなり、着色感光性組成物の経時安定性を向上させることができる。2官能あるいは3官能以上の光ラジカル重合開始剤の具体例としては、特表2010-527339号公報、特表2011-524436号公報、国際公開第2015/004565号公報、特表2016-532675号公報の段落0407~0412、国際公開第2017/033680号公報の段落0039~0055に記載されているオキシム化合物の2量体、特表2013-522445号公報に記載されている化合物(E)及び化合物(G)、国際公開第2016/034963号に記載されているCmpd1~7、特表2017-523465号公報の段落0007に記載されているオキシムエステル類光開始剤、特開2017-167399号公報の段落0020~0033に記載されている光開始剤、特開2017-151342号公報の段落0017~0026に記載されている光重合開始剤(A)、特許第6469669号公報に記載されているオキシムエステル光開始剤などが挙げられる。 As the photopolymerization initiator, a bifunctional or trifunctional or higher photoradical polymerization initiator may be used. By using such a photoradical polymerization initiator, two or more radicals are generated from one molecule of the photoradical polymerization initiator, so that good sensitivity can be obtained. Further, when a compound having an asymmetric structure is used, the crystallinity is lowered, the solubility in a solvent or the like is improved, the precipitation is less likely to occur with time, and the stability of the colored photosensitive composition with time is improved. Can be done. Specific examples of the bifunctional or trifunctional or higher functional photo-radical polymerization initiators include JP-A-2010-527339, JP-A-2011-524436, International Publication No. 2015/004565, and JP-A-2016-532675. The dimer of the oxime compound described in paragraphs 0407 to 0412 of the above, paragraphs 0039 to 0055 of International Publication No. 2017/033680, the compound (E) and the compound (E) described in Japanese Patent Publication No. 2013-522445. G), Cmpd1 to 7 described in International Publication No. 2016/034963, Oxime ester photoinitiator described in paragraph 0007 of JP-A-2017-523465, paragraph of JP-A-2017-167399. Photoinitiators described in 0020 to 0033, photopolymerization initiators (A) described in paragraphs 0017 to 0026 of JP-A-2017-151342, oxime ester light described in Japanese Patent No. 6469669. Initiators and the like can be mentioned.
 着色感光性組成物の全固形分中の光重合開始剤の含有量は、0.1質量%~30質量%が好ましい。下限は、0.5質量%以上がより好ましく、1質量%以上が特に好ましい。上限は、20質量%以下がより好ましく、15質量%以下が特に好ましい。
 光重合開始剤は1種のみを用いてもよく、2種以上を用いてもよい。2種以上を用いる場合は、それらの合計量が上記範囲となることが好ましい。
The content of the photopolymerization initiator in the total solid content of the colored photosensitive composition is preferably 0.1% by mass to 30% by mass. The lower limit is more preferably 0.5% by mass or more, and particularly preferably 1% by mass or more. The upper limit is more preferably 20% by mass or less, and particularly preferably 15% by mass or less.
Only one type of photopolymerization initiator may be used, or two or more types may be used. When two or more types are used, it is preferable that the total amount thereof is within the above range.
<樹脂>
 本開示に係る着色感光性組成物は、樹脂を含有することが好ましい。樹脂は、例えば、顔料などの粒子を組成物中で分散させる用途やバインダーの用途で配合される。なお、主に顔料などの粒子を分散させるために用いられる樹脂を分散剤ともいう。ただし、樹脂のこのような用途は一例であって、このような用途以外の目的で使用することもできる。
 樹脂としては、後述する高分子分散剤を含むことが好ましい。
 また樹脂としては、後述するアルカリ可溶性樹脂を含むことが好ましい。
<Resin>
The colored photosensitive composition according to the present disclosure preferably contains a resin. The resin is blended, for example, for the purpose of dispersing particles such as pigments in the composition and for the purpose of a binder. A resin mainly used for dispersing particles such as pigments is also referred to as a dispersant. However, such an application of the resin is an example, and it can be used for a purpose other than such an application.
The resin preferably contains a polymer dispersant described later.
Further, the resin preferably contains an alkali-soluble resin described later.
 樹脂の重量平均分子量(Mw)は、3,000~2,000,000が好ましい。上限は、1,000,000以下がより好ましく、500,000以下が特に好ましい。下限は、4,000以上がより好ましく、5,000以上が特に好ましい。 The weight average molecular weight (Mw) of the resin is preferably 3,000 to 2,000,000. The upper limit is more preferably 1,000,000 or less, and particularly preferably 500,000 or less. The lower limit is more preferably 4,000 or more, and particularly preferably 5,000 or more.
 樹脂としては、(メタ)アクリル樹脂、エン-チオール樹脂、ポリカーボネート樹脂、ポリエーテル樹脂、ポリアリレート樹脂、ポリスルホン樹脂、ポリエーテルスルホン樹脂、ポリフェニレン樹脂、ポリアリーレンエーテルホスフィンオキシド樹脂、ポリイミド樹脂、ポリアミドイミド樹脂、ポリオレフィン樹脂、環状オレフィン樹脂、ポリエステル樹脂、スチレン樹脂などが挙げられる。これらの樹脂から1種を単独で使用してもよく、2種以上を混合して使用してもよい。また、特開2017-206689号公報の段落0041~0060に記載の樹脂、特開2018-173660号公報の段落0153~0167の記載の樹脂を用いることもできる。 Examples of the resin include (meth) acrylic resin, ene-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, polyphenylene resin, polyarylene ether phosphine oxide resin, polyimide resin, and polyamideimide resin. , Polyolefin resin, cyclic olefin resin, polyester resin, styrene resin and the like. One of these resins may be used alone, or two or more thereof may be mixed and used. Further, the resin described in paragraphs 0041 to 0060 of JP-A-2017-206689 and the resin described in paragraphs 0153 to 0167 of JP-A-2018-173660 can also be used.
 樹脂として酸基を有する樹脂を用いることが好ましい。この態様によれば、着色感光性組成物の現像性を向上させることができ、矩形性に優れた画素を形成しやすい。酸基としては、カルボキシ基、リン酸基、スルホ基、フェノール性ヒドロキシ基などが挙げられ、カルボキシ基が好ましい。酸基を有する樹脂は、例えば、アルカリ可溶性樹脂として好適に用いることができる。 It is preferable to use a resin having an acid group as the resin. According to this aspect, the developability of the colored photosensitive composition can be improved, and it is easy to form pixels having excellent rectangularity. Examples of the acid group include a carboxy group, a phosphoric acid group, a sulfo group, a phenolic hydroxy group and the like, and a carboxy group is preferable. The resin having an acid group can be suitably used as, for example, an alkali-soluble resin.
 酸基を有する樹脂は、酸基を側鎖に有する構成単位を含むことが好ましく、酸基を側鎖に有する構成単位を樹脂の全構成単位中5モル%~70モル%含むことがより好ましい。酸基を側鎖に有する繰り返し単位の含有量の上限は、50モル%以下であることがより好ましく、30モル%以下であることが特に好ましい。酸基を側鎖に有する構成単位の含有量の下限は、10モル%以上であることがより好ましく、20モル%以上であることが特に好ましい。なお、本開示において、構成単位の含有量をモル%で表す場合、構成単位は、モノマー単位と同義であるものとする。 The resin having an acid group preferably contains a structural unit having an acid group in the side chain, and more preferably contains 5 mol% to 70 mol% of the structural units having an acid group in the side chain in all the structural units of the resin. .. The upper limit of the content of the repeating unit having an acid group in the side chain is more preferably 50 mol% or less, and particularly preferably 30 mol% or less. The lower limit of the content of the structural unit having an acid group in the side chain is more preferably 10 mol% or more, and particularly preferably 20 mol% or more. In the present disclosure, when the content of the constituent unit is expressed in mol%, the constituent unit shall be synonymous with the monomer unit.
 本開示に係る着色感光性組成物は、分散剤としての樹脂(高分子分散剤)を含むこともできる。分散剤としては、酸性分散剤(酸性樹脂)、塩基性分散剤(塩基性樹脂)が挙げられる。ここで、酸性分散剤(酸性樹脂)とは、酸基の量が塩基性基の量よりも多い樹脂を表す。酸性分散剤(酸性樹脂)は、酸基の量と塩基性基の量の合計量を100モル%としたときに、酸基の量が70モル%以上を占める樹脂が好ましく、実質的に酸基のみからなる樹脂がより好ましい。酸性分散剤(酸性樹脂)が有する酸基は、カルボキシ基が好ましい。酸性分散剤(酸性樹脂)の酸価は、40mgKOH/g~105mgKOH/gが好ましく、50mgKOH/g~105mgKOH/gがより好ましく、60mgKOH/g~105mgKOH/gが更に好ましい。また、塩基性分散剤(塩基性樹脂)とは、塩基性基の量が酸基の量よりも多い樹脂を表す。塩基性分散剤(塩基性樹脂)は、酸基の量と塩基性基の量の合計量を100モル%としたときに、塩基性基の量が50モル%を超える樹脂が好ましい。塩基性分散剤が有する塩基性基は、アミノ基であることが好ましい。 The colored photosensitive composition according to the present disclosure may also contain a resin (polymer dispersant) as a dispersant. Examples of the dispersant include an acidic dispersant (acidic resin) and a basic dispersant (basic resin). Here, the acidic dispersant (acidic resin) represents a resin in which the amount of acid groups is larger than the amount of basic groups. The acidic dispersant (acidic resin) is preferably a resin in which the amount of acid groups accounts for 70 mol% or more when the total amount of the amount of acid groups and the amount of basic groups is 100 mol%, and is substantially an acid. A resin consisting only of groups is more preferable. The acid group contained in the acidic dispersant (acidic resin) is preferably a carboxy group. The acid value of the acidic dispersant (acidic resin) is preferably 40 mgKOH / g to 105 mgKOH / g, more preferably 50 mgKOH / g to 105 mgKOH / g, and even more preferably 60 mgKOH / g to 105 mgKOH / g. Further, the basic dispersant (basic resin) represents a resin in which the amount of basic groups is larger than the amount of acid groups. The basic dispersant (basic resin) is preferably a resin in which the amount of basic groups exceeds 50 mol% when the total amount of the amount of acid groups and the amount of basic groups is 100 mol%. The basic group contained in the basic dispersant is preferably an amino group.
 分散剤として用いる樹脂は、酸基を有する構成単位を含むことが好ましい。分散剤として用いる樹脂が酸基を有する繰り返し単位を含むことにより、フォトリソグラフィ法によりパターン形成する際、現像残渣の発生をより抑制できる。 The resin used as the dispersant preferably contains a structural unit having an acid group. Since the resin used as the dispersant contains a repeating unit having an acid group, the generation of development residue can be further suppressed when the pattern is formed by the photolithography method.
 分散剤として用いる樹脂は、グラフト樹脂であることも好ましい。グラフト樹脂の詳細は、特開2012-255128号公報の段落0025~0094の記載を参酌でき、この内容は本明細書に組み込まれる。 The resin used as the dispersant is also preferably a graft resin. For details of the graft resin, the description in paragraphs 0025 to 0094 of JP2012-255128A can be referred to, and the content thereof is incorporated in the present specification.
 分散剤として用いる樹脂は、主鎖及び側鎖の少なくとも一方に窒素原子を含むポリイミン系分散剤であることも好ましい。ポリイミン系分散剤としては、pKa14以下の官能基を有する部分構造を有する主鎖と、原子数40~10000の側鎖とを有し、かつ主鎖及び側鎖の少なくとも一方に塩基性窒素原子を有する樹脂が好ましい。塩基性窒素原子とは、塩基性を呈する窒素原子であれば特に制限はない。ポリイミン系分散剤については、特開2012-255128号公報の段落0102~0166の記載を参酌でき、この内容は本明細書に組み込まれる。 It is also preferable that the resin used as the dispersant is a polyimine-based dispersant containing a nitrogen atom in at least one of the main chain and the side chain. The polyimine-based dispersant has a main chain having a partial structure having a functional group of pKa14 or less, a side chain having 40 to 10,000 atoms, and a basic nitrogen atom in at least one of the main chain and the side chain. The resin to have is preferable. The basic nitrogen atom is not particularly limited as long as it is a nitrogen atom exhibiting basicity. Regarding the polyimine-based dispersant, the description in paragraphs 0102 to 0166 of JP2012-255128A can be referred to, and the content thereof is incorporated in the present specification.
 分散剤として用いる樹脂は、コア部に複数個のポリマー鎖が結合した構造の樹脂であることも好ましい。このような樹脂としては、例えばデンドリマー(星型ポリマーを含む)が挙げられる。また、デンドリマーの具体例としては、特開2013-043962号公報の段落0196~0209に記載された高分子化合物C-1~C-31などが挙げられる。
 また、上述した酸基を有する樹脂(アルカリ可溶性樹脂)を分散剤として用いることもできる。
The resin used as the dispersant is also preferably a resin having a structure in which a plurality of polymer chains are bonded to the core portion. Examples of such resins include dendrimers (including star-shaped polymers). Specific examples of the dendrimer include polymer compounds C-1 to C-31 described in paragraphs 0196 to 0209 of JP2013-043962.
Further, the above-mentioned resin having an acid group (alkali-soluble resin) can also be used as a dispersant.
 また、分散剤として用いる樹脂は、エチレン性不飽和基を側鎖に有する構成単位を含む樹脂であることも好ましい。エチレン性不飽和基を側鎖に有する構成単位の含有量は、樹脂の全構成単位中10モル%以上であることが好ましく、10モル%~80モル%であることがより好ましく、20モル%~70モル%であることが更に好ましい。 It is also preferable that the resin used as the dispersant is a resin containing a structural unit having an ethylenically unsaturated group in the side chain. The content of the structural unit having an ethylenically unsaturated group in the side chain is preferably 10 mol% or more, more preferably 10 mol% to 80 mol%, and 20 mol% in all the structural units of the resin. It is more preferably ~ 70 mol%.
 また、分散剤として用いる樹脂としては、下記式D1で表される構成単位を有する樹脂を好適に用いることができる。 Further, as the resin used as the dispersant, a resin having a structural unit represented by the following formula D1 can be preferably used.
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
 式D1中、RD1~RD3はそれぞれ独立に、水素原子又はアルキル基を表し、XD1は、-COO-、-CONR-又はアリーレン基を表し、Rは、水素原子、アルキル基又はアリール基を表し、RD4は、二価の連結基を表し、LD1は、下記式D2又は式D3で表される基を表し、RD5は、(nd+1)価の連結基を表し、XD2は、酸素原子又は-NRDA-を表し、RDAは、水素原子、アルキル基又はアリール基を表し、ndは1以上の整数を表す。 In the formula D1, R D1 to R D3 independently represent a hydrogen atom or an alkyl group, X D1 represents a -COO-, -CONR- or an arylene group, and R is a hydrogen atom, an alkyl group or an aryl group. the stands, R D4 represents a divalent linking group, L D1 represents a group represented by the following formula D2 or formula D3, R D5 represents (nd + 1) -valent linking group, X D2 is , Oxygen atom or -NR DA- , R DA represents a hydrogen atom, an alkyl group or an aryl group, and nd represents an integer of 1 or more.
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
 式D2及び式D3中、XD3は、酸素原子又は-NH-を表し、XD4は、酸素原子又は-COO-を表し、Re1~Re3はそれぞれ独立に、水素原子又はアルキル基を表し、Re1~Re3のうちの少なくとも2つが結合し、環構造を形成していてもよく、*は他の構造との結合位置を表す。 In formulas D2 and D3, X D3 represents an oxygen atom or -NH-, X D4 represents an oxygen atom or -COO-, and R e1 to Re 3 independently represent a hydrogen atom or an alkyl group. , R e1 to R e3 may be bonded to each other to form a ring structure, and * represents a bonding position with another structure.
 式1で表される構成単位としては、以下に示す構造が好ましく挙げられるが、これらに限定されないことは言うまでもない。 The structural unit represented by the formula 1 preferably includes the structure shown below, but it goes without saying that the structural unit is not limited to these.
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
 なお、mは2以上の整数を表し、nは1以上の整数を表す。 Note that m represents an integer of 2 or more, and n represents an integer of 1 or more.
 分散剤は、市販品としても入手可能であり、そのような具体例としては、BYKChemie社製のDISPERBYKシリーズ(例えば、DISPERBYK-111、161など)、日本ルーブリゾール(株)製のソルスパースシリーズ(例えば、ソルスパース76500など)などが挙げられる。また、特開2014-130338号公報の段落0041~0130に記載された顔料分散剤を用いることもでき、この内容は本明細書に組み込まれる。なお、上記分散剤として説明した樹脂は、分散剤以外の用途で使用することもできる。例えば、バインダーとして用いることもできる。 Dispersants are also available as commercial products, and specific examples thereof include DISPERBYK series manufactured by BYK Chemie (for example, DISPERBYK-111, 161 etc.) and sparse sparse series manufactured by Nippon Lubrizol Co., Ltd. For example, Solsparse 76500) and the like. Further, the pigment dispersant described in paragraphs 0041 to 0130 of JP2014-130338A can also be used, and the contents thereof are incorporated in the present specification. The resin described as the dispersant can also be used for purposes other than the dispersant. For example, it can also be used as a binder.
 着色感光性組成物の全固形分中における樹脂の含有量は、5質量%~50質量%が好ましい。下限は、10質量%以上がより好ましく、15質量%以上が特に好ましい。上限は、40質量%以下がより好ましく、35質量%以下が更に好ましく、30質量%以下が特に好ましい。また、着色感光性組成物の全固形分中における酸基を有する樹脂(アルカリ可溶性樹脂)の含有量は、5質量%~50質量%が好ましい。下限は、10質量%以上がより好ましく、15質量%以上が特に好ましい。上限は、40質量%以下がより好ましく、35質量%以下が更に好ましく、30質量%以下が特に好ましい。また、樹脂全量中における酸基を有する樹脂(アルカリ可溶性樹脂)の含有量は、優れた現像性が得られやすいという理由から30質量%以上が好ましく、50質量%以上がより好ましく、70質量%以上が更に好ましく、80質量%以上が特に好ましい。上限は、100質量%とすることができ、95質量%とすることもでき、90質量%以下とすることもできる。 The content of the resin in the total solid content of the colored photosensitive composition is preferably 5% by mass to 50% by mass. The lower limit is more preferably 10% by mass or more, and particularly preferably 15% by mass or more. The upper limit is more preferably 40% by mass or less, further preferably 35% by mass or less, and particularly preferably 30% by mass or less. The content of the resin having an acid group (alkali-soluble resin) in the total solid content of the colored photosensitive composition is preferably 5% by mass to 50% by mass. The lower limit is more preferably 10% by mass or more, and particularly preferably 15% by mass or more. The upper limit is more preferably 40% by mass or less, further preferably 35% by mass or less, and particularly preferably 30% by mass or less. Further, the content of the resin having an acid group (alkali-soluble resin) in the total amount of the resin is preferably 30% by mass or more, more preferably 50% by mass or more, and more preferably 70% by mass because excellent developability can be easily obtained. The above is more preferable, and 80% by mass or more is particularly preferable. The upper limit can be 100% by mass, 95% by mass, or 90% by mass or less.
<顔料誘導体>
 本開示に係る着色感光性組成物は、顔料誘導体を含有することができる。この態様によれば、着色感光性組成物の保存安定性をより向上させることができる。顔料誘導体としては、顔料の一部を、酸基、塩基性基、塩構造を有する基、又は、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造又は及びフラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する基で置換した構造を有する化合物が挙げられる。
 顔料誘導体としては、式(B1)で表される化合物が好ましい。
<Pigment derivative>
The colored photosensitive composition according to the present disclosure may contain a pigment derivative. According to this aspect, the storage stability of the colored photosensitive composition can be further improved. As the pigment derivative, a part of the pigment is a group having an acid group, a basic group, a salt structure, or a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene diimide structure, a pyrazinenoquinoxaline structure or a fullerene. Examples thereof include compounds having a structure substituted with a group having at least one structure selected from the group consisting of structures.
As the pigment derivative, a compound represented by the formula (B1) is preferable.
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
 式(B1)中、Pは色素構造を表し、Lは単結合又は連結基を表し、Xは酸基、塩基性基、塩構造を有する基又はフタルイミドメチル基を表し、mは1以上の整数を表し、nは1以上の整数を表し、mが2以上の場合は複数のL及びXは互いに異なっていてもよく、nが2以上の場合は複数のXは互いに異なっていてもよい。 In formula (B1), P represents a dye structure, L represents a single bond or a linking group, X represents an acid group, a basic group, a group having a salt structure or a phthalimide methyl group, and m is an integer of 1 or more. , N represents an integer of 1 or more, and when m is 2 or more, the plurality of Ls and Xs may be different from each other, and when n is 2 or more, the plurality of Xs may be different from each other.
 Pが表す色素構造としては、ピロロピロール色素構造、ジケトピロロピロール色素構造、キナクリドン色素構造、アントラキノン色素構造、ジアントラキノン色素構造、ベンゾイソインドール色素構造、チアジンインジゴ色素構造、アゾ色素構造、キノフタロン色素構造、フタロシアニン色素構造、ナフタロシアニン色素構造、ジオキサジン色素構造、ペリレン色素構造、ペリノン色素構造、ベンゾイミダゾロン色素構造、ベンゾチアゾール色素構造、ベンゾイミダゾール色素構造及びベンゾオキサゾール色素構造などが挙げられる。 The pigment structure represented by P includes a pyrolopyrrolop pigment structure, a diketopyrrolopyrrole pigment structure, a quinacridone pigment structure, an anthraquinone pigment structure, a dianthraquinone pigment structure, a benzoisoindole pigment structure, a thiazineindigo pigment structure, an azo pigment structure, and a quinophthalone. Examples thereof include pigment structure, phthalocyanine pigment structure, naphthalocyanine pigment structure, dioxazine pigment structure, perylene pigment structure, perinone pigment structure, benzoimidazolone pigment structure, benzothiazole pigment structure, benzoimidazole pigment structure and benzoxazole pigment structure.
 Lが表す連結基としては、炭化水素基、複素環基、-NR-、-SO-、-S-、-O-、-CO-、又は、これらの組み合わせからなる基が挙げられる。Rは水素原子、アルキル基又はアリール基を表す。 Examples of the linking group represented by L include a hydrocarbon group, a heterocyclic group, -NR-, -SO 2- , -S-, -O-, -CO-, or a group consisting of a combination thereof. R represents a hydrogen atom, an alkyl group or an aryl group.
 Xが表す酸基としては、カルボキシ基、スルホ基、カルボン酸アミド基、スルホン酸アミド基、イミド酸基等が挙げられる。カルボン酸アミド基としては、-NHCORX1で表される基が好ましい。スルホン酸アミド基としては、-NHSOX2で表される基が好ましい。イミド酸基としては、-SONHSOX3、-CONHSOX4、-CONHCORX5又は-SONHCORX6で表される基が好ましい。RX1~RX6は、それぞれ独立に、炭化水素基又は複素環基を表す。RX1~RX6が表す炭化水素基及び複素環基は、更に置換基を有してもよい。更なる置換基としては、ハロゲン原子であることが好ましく、フッ素原子であることがより好ましい。Xが表す塩基性基としてはアミノ基が挙げられる。Xが表す塩構造としては、上述した酸基又は塩基性基の塩が挙げられる。 Examples of the acid group represented by X include a carboxy group, a sulfo group, a carboxylic acid amide group, a sulfonic acid amide group, and an imic acid group. As the carboxylic acid amide group, a group represented by -NHCOR X1 is preferable. The sulfonic acid amide group, preferably a group represented by -NHSO 2 R X2. As the imidic acid group, a group represented by -SO 2 NHSO 2 R X3 , -CONHSO 2 R X4 , -CONHCOR X5 or -SO 2 NHCOR X6 is preferable. RX1 to RX6 independently represent a hydrocarbon group or a heterocyclic group. Hydrocarbon group and heterocyclic group R X1 ~ R X6 represents may further have a substituent. As a further substituent, a halogen atom is preferable, and a fluorine atom is more preferable. Examples of the basic group represented by X include an amino group. Examples of the salt structure represented by X include the above-mentioned salts of acid groups or basic groups.
 顔料誘導体としては、下記構造の化合物が挙げられる。また、特開昭56-118462号公報、特開昭63-264674号公報、特開平1-217077号公報、特開平3-9961号公報、特開平3-26767号公報、特開平3-153780号公報、特開平3-45662号公報、特開平4-285669号公報、特開平6-145546号公報、特開平6-212088号公報、特開平6-240158号公報、特開平10-30063号公報、特開平10-195326号公報、国際公開第2011/024896号の段落0086~0098、国際公開第2012/102399号の段落0063~0094、国際公開第2017/038252号の段落0082等に記載の化合物を用いることもでき、これらの内容は本明細書に組み込まれる。
 更に、顔料誘導体としては、特開2015-172732号公報(スルホ基を有するキノフタロン化合物の金属塩)、特開2014-199308号公報、特開2014-85562号公報、特開2014-35351号公報、又は、特開2008-81565号公報に記載の化合物を用いることもでき、これらの内容は本明細書に組み込まれる。
Examples of the pigment derivative include compounds having the following structures. In addition, Japanese Patent Application Laid-Open No. 56-118462, Japanese Patent Application Laid-Open No. 63-264674, Japanese Patent Application Laid-Open No. 1-2170777, Japanese Patent Application Laid-Open No. 3-9961, Japanese Patent Application Laid-Open No. 3-26767, Japanese Patent Application Laid-Open No. 3-153780. Japanese Patent Application Laid-Open No. 3-455662, Japanese Patent Application Laid-Open No. 4-285669, Japanese Patent Application Laid-Open No. 6-145546, Japanese Patent Application Laid-Open No. 6-21208, Japanese Patent Application Laid-Open No. 6-241588, Japanese Patent Application Laid-Open No. 10-30063, The compounds described in JP-A-10-195326, paragraphs 0083 to 098 of International Publication No. 2011/024896, paragraphs 0063 to 0094 of International Publication No. 2012/102399, paragraphs 0083 of International Publication No. 2017/038252, etc. It can also be used and these contents are incorporated herein by reference.
Further, as pigment derivatives, JP-A-2015-172732 (metal salt of a quinophthalone compound having a sulfo group), JP-A-2014-199308, JP-A-2014-85562, JP-A-2014-35351, Alternatively, the compounds described in JP-A-2008-81565 can also be used, and their contents are incorporated in the present specification.
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 着色感光性組成物の全固形分中における顔料誘導体の含有量は、0.3質量%~20質量%であることが好ましい。下限は0.6質量%以上であることがより好ましく、0.9質量%以上であることが特に好ましい。上限は15質量%以下であることがより好ましく、12.5質量%以下であることが更に好ましく、10質量%以下であることが特に好ましい。
 また、顔料誘導体の含有量は、顔料100質量部に対して、1質量部~30質量部であることが好ましい。下限は2質量部以上であることがより好ましく、3質量部以上であることが特に好ましい。上限は、25質量部以下であることがより好ましく、20質量部以下であることが更に好ましく、15質量%以下であることが特に好ましい。
 顔料誘導体は、1種のみを用いてもよいし、2種以上を併用してもよい。2種以上併用する場合はそれらの合計量が上記範囲であることが好ましい。
The content of the pigment derivative in the total solid content of the colored photosensitive composition is preferably 0.3% by mass to 20% by mass. The lower limit is more preferably 0.6% by mass or more, and particularly preferably 0.9% by mass or more. The upper limit is more preferably 15% by mass or less, further preferably 12.5% by mass or less, and particularly preferably 10% by mass or less.
The content of the pigment derivative is preferably 1 part by mass to 30 parts by mass with respect to 100 parts by mass of the pigment. The lower limit is more preferably 2 parts by mass or more, and particularly preferably 3 parts by mass or more. The upper limit is more preferably 25 parts by mass or less, further preferably 20 parts by mass or less, and particularly preferably 15 parts by mass or less.
Only one kind of pigment derivative may be used, or two or more kinds may be used in combination. When two or more types are used in combination, the total amount thereof is preferably in the above range.
<環状エーテル基を有する化合物>
 本開示に係る着色感光性組成物は、環状エーテル基を有する化合物を含有することができる。環状エーテル基としては、エポキシ基、オキセタニル基などが挙げられる。環状エーテル基を有する化合物は、エポキシ基を有する化合物であることが好ましい。エポキシ基を有する化合物としては、1分子内にエポキシ基を1つ以上有する化合物が挙げられ、エポキシ基を2つ以上有する化合物が好ましい。エポキシ基は、1分子内に1~100個有することが好ましい。エポキシ基の上限は、例えば、10個以下とすることもでき、5個以下とすることもできる。エポキシ基の下限は、2個以上が好ましい。エポキシ基を有する化合物としては、特開2013-011869号公報の段落0034~0036、特開2014-043556号公報の段落0147~0156、特開2014-089408号公報の段落0085~0092に記載された化合物、特開2017-179172号公報に記載された化合物を用いることもできる。これらの内容は、本明細書に組み込まれる。
<Compound having a cyclic ether group>
The colored photosensitive composition according to the present disclosure may contain a compound having a cyclic ether group. Examples of the cyclic ether group include an epoxy group and an oxetanyl group. The compound having a cyclic ether group is preferably a compound having an epoxy group. Examples of the compound having an epoxy group include a compound having one or more epoxy groups in one molecule, and a compound having two or more epoxy groups is preferable. It is preferable to have 1 to 100 epoxy groups in one molecule. The upper limit of the epoxy group may be, for example, 10 or less, or 5 or less. The lower limit of the epoxy group is preferably two or more. Examples of the compound having an epoxy group are described in paragraphs 0034 to 0036 of JP2013-011869A, paragraphs 0147 to 0156 of JP2014-043556, and paragraphs 0085 to 0092 of JP2014-089408. Compounds, compounds described in JP-A-2017-179172 can also be used. These contents are incorporated in the present specification.
 エポキシ基を有する化合物は、低分子化合物(好ましくは分子量2,000未満、より好ましくは分子量1,000未満)でもよいし、高分子化合物(macromolecule)(例えば、分子量1,000以上、ポリマーの場合は、重量平均分子量が1,000以上)のいずれでもよい。エポキシ基を有する化合物の重量平均分子量は、200~100,000が好ましく、500~50,000がより好ましい。重量平均分子量の上限は、10,000以下が好ましく、5,000以下がより好ましく、3,000以下が更に好ましい。 The compound having an epoxy group may be a low molecular weight compound (preferably less than 2,000 molecular weight, more preferably less than 1,000 molecular weight) or a macromolecule (for example, a polymer having a molecular weight of 1,000 or more and a polymer). Has a weight average molecular weight of 1,000 or more). The weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, more preferably 500 to 50,000. The upper limit of the weight average molecular weight is preferably 10,000 or less, more preferably 5,000 or less, and even more preferably 3,000 or less.
 エポキシ基を有する化合物としては、エポキシ樹脂を好ましく用いることができる。エポキシ樹脂としては、例えばフェノール化合物のグリシジルエーテル化物であるエポキシ樹脂、各種ノボラック樹脂のグリシジルエーテル化物であるエポキシ樹脂、脂環式エポキシ樹脂、脂肪族系エポキシ樹脂、複素環式エポキシ樹脂、グリシジルエステル系エポキシ樹脂、グリシジルアミン系エポキシ樹脂、ハロゲン化フェノール類をグリシジル化したエポキシ樹脂、エポキシ基をもつケイ素化合物とそれ以外のケイ素化合物との縮合物、エポキシ基を持つ重合性不飽和化合物とそれ以外の他の重合性不飽和化合物との共重合体等が挙げられる。エポキシ樹脂のエポキシ当量は、310g/eq~3,300g/eqであることが好ましく、310g/eq~1,700g/eqであることがより好ましく、310g/eq~1,000g/eqであることが更に好ましい。 As the compound having an epoxy group, an epoxy resin can be preferably used. Examples of the epoxy resin include an epoxy resin which is a glycidyl etherified product of a phenol compound, an epoxy resin which is a glycidyl etherified product of various novolak resins, an alicyclic epoxy resin, an aliphatic epoxy resin, a heterocyclic epoxy resin, and a glycidyl ester type. Epoxy resin, glycidylamine-based epoxy resin, epoxy resin obtained by glycidylizing halogenated phenols, condensate of silicon compound having an epoxy group and other silicon compounds, polymerizable unsaturated compound having an epoxy group and other Examples thereof include a copolymer with another polymerizable unsaturated compound. The epoxy equivalent of the epoxy resin is preferably 310 g / eq to 3,300 g / eq, more preferably 310 g / eq to 1,700 g / eq, and more preferably 310 g / eq to 1,000 g / eq. Is more preferable.
 環状エーテル基を有する化合物の市販品としては、例えば、EHPE3150((株)ダイセル製)、EPICLON N-695(DIC(株)製)、マープルーフG-0150M、G-0105SA、G-0130SP、G-0250SP、G-1005S、G-1005SA、G-1010S、G-2050M、G-01100、G-01758(以上、日油(株)製、エポキシ基含有ポリマー)等が挙げられる。 Commercially available products of compounds having a cyclic ether group include, for example, EHPE3150 (manufactured by Daicel Corporation), EPICLON N-695 (manufactured by DIC Corporation), Marproof G-0150M, G-0105SA, G-0130SP, G. Examples thereof include -0250SP, G-1005S, G-1005SA, G-1010S, G-2050M, G-01100, and G-01758 (all manufactured by NOF CORPORATION, epoxy group-containing polymer).
 本開示に係る着色感光性組成物が環状エーテル基を有する化合物を含有する場合、着色感光性組成物の全固形分中における環状エーテル基を有する化合物の含有量は、0.1質量%~20質量%が好ましい。下限は、0.5質量%以上がより好ましく、1質量%以上が特に好ましい。上限は、15質量%以下がより好ましく、10質量%以下が特に好ましい。環状エーテル基を有する化合物は1種のみでもよく、2種以上でもよい。2種以上の場合は、それらの合計量が上記範囲となることが好ましい。 When the colored photosensitive composition according to the present disclosure contains a compound having a cyclic ether group, the content of the compound having a cyclic ether group in the total solid content of the colored photosensitive composition is 0.1% by mass to 20% by mass. Mass% is preferred. The lower limit is more preferably 0.5% by mass or more, and particularly preferably 1% by mass or more. The upper limit is more preferably 15% by mass or less, and particularly preferably 10% by mass or less. The compound having a cyclic ether group may be only one kind or two or more kinds. In the case of two or more types, it is preferable that the total amount thereof is within the above range.
<近赤外線吸収剤>
 本開示に係る着色感光性組成物は、近赤外線吸収剤を更に含むことができる。近赤外線吸収剤は、波長700nmを超え1,800nm以下の範囲に極大吸収波長を有する化合物であることが好ましい。また、近赤外線吸収剤は、波長500nmにおける吸光度Aと極大吸収波長における吸光度Aとの比率A/Aが、0.08以下であることが好ましく、0.04以下であることがより好ましい。
<Near infrared absorber>
The colored photosensitive composition according to the present disclosure may further contain a near infrared absorber. The near-infrared absorber is preferably a compound having a maximum absorption wavelength in the range of more than 700 nm and 1800 nm or less. Also, near infrared absorber, that the ratio A 1 / A 2 between the absorbance A 2 in the absorbance A 1 and the maximum absorption wavelength in the wavelength 500nm is preferably 0.08 or less, 0.04 or less More preferred.
 近赤外線吸収剤としては、ピロロピロール化合物、シアニン化合物、スクアリリウム化合物、フタロシアニン化合物、ナフタロシアニン化合物、クアテリレン化合物、メロシアニン化合物、クロコニウム化合物、オキソノール化合物、イミニウム化合物、ジチオール化合物、トリアリールメタン化合物、ピロメテン化合物、アゾメチン化合物、アントラキノン化合物、ジベンゾフラノン化合物、金属酸化物、金属ホウ化物等が挙げられる。ピロロピロール化合物としては、特開2009-263614号公報の段落0016~0058に記載の化合物、特開2011-68731号公報の段落0037~0052に記載の化合物、国際公開第2015/166873号の段落0010~0033に記載の化合物などが挙げられる。スクアリリウム化合物としては、特開2011-208101号公報の段落0044~0049に記載の化合物、特許第6065169号公報の段落0060~0061に記載の化合物、国際公開第2016/181987号の段落0040に記載の化合物、特開2015-176046号公報に記載の化合物、国際公開第2016/190162号の段落0072に記載の化合物、特開2016-74649号公報の段落0196~0228に記載の化合物、特開2017-67963号公報の段落0124に記載の化合物、国際公開第2017/135359号に記載の化合物、特開2017-114956号公報に記載の化合物、特許6197940号公報に記載の化合物、国際公開第2016/120166号に記載の化合物などが挙げられる。シアニン化合物としては、特開2009-108267号公報の段落0044~0045に記載の化合物、特開2002-194040号公報の段落0026~0030に記載の化合物、特開2015-172004号公報に記載の化合物、特開2015-172102号公報に記載の化合物、特開2008-88426号公報に記載の化合物、国際公開第2016/190162号の段落0090に記載の化合物などが挙げられる。クロコニウム化合物としては、特開2017-82029号公報に記載の化合物が挙げられる。イミニウム化合物としては、例えば、特表2008-528706号公報に記載の化合物、特開2012-012399号公報に記載の化合物、特開2007-92060号公報に記載の化合物、国際公開第2018/043564号の段落0048~0063に記載の化合物が挙げられる。フタロシアニン化合物としては、特開2012-77153号公報の段落0093に記載の化合物、特開2006-343631号公報に記載のオキシチタニウムフタロシアニン、特開2013-195480号公報の段落0013~0029に記載の化合物が挙げられる。ナフタロシアニン化合物としては、特開2012-77153号公報の段落0093に記載の化合物が挙げられる。金属酸化物としては、例えば、酸化インジウムスズ、酸化アンチモンスズ、酸化亜鉛、Alドープ酸化亜鉛、フッ素ドープ二酸化スズ、ニオブドープ二酸化チタン、酸化タングステンなどが挙げられる。酸化タングステンの詳細については、特開2016-006476号公報の段落0080を参酌でき、この内容は本明細書に組み込まれる。金属ホウ化物としては、ホウ化ランタンなどが挙げられる。ホウ化ランタンの市販品としては、LaB6-F(日本新金属(株)製)などが挙げられる。また、金属ホウ化物としては、国際公開第2017/119394号に記載の化合物を用いることもできる。酸化インジウムスズの市販品としては、F-ITO(DOWAハイテック(株)製)などが挙げられる。 Near-infrared absorbers include pyrrolopyrrole compounds, cyanine compounds, squarylium compounds, phthalocyanine compounds, naphthalocyanine compounds, quaterylene compounds, merocyanine compounds, croconium compounds, oxonor compounds, iminium compounds, dithiol compounds, triarylmethane compounds, pyromethene compounds, Examples thereof include azomethine compounds, anthraquinone compounds, dibenzofuranone compounds, metal oxides, and metal boroides. Examples of the pyrrolopyrrole compound include the compounds described in paragraphs 0016 to 0058 of JP2009-263614, the compounds described in paragraphs 0037 to 0052 of JP2011-68831, and paragraphs 0010 of International Publication No. 2015/166783. Examples thereof include the compounds described in ~ 0033. Examples of the squarylium compound include the compounds described in paragraphs 0044 to 0049 of JP2011-208101A, the compounds described in paragraphs 0060 to 0061 of Patent No. 6065169A, and paragraphs 0040 of International Publication No. 2016/181987. Compounds, compounds described in JP-A-2015-176046, compounds described in paragraph 0072 of International Publication No. 2016/190162, compounds described in paragraphs 0196-0228 of JP-A-2016-74649, JP-A-2017- The compound described in paragraph 0124 of Japanese Patent Application Laid-Open No. 67963, the compound described in International Publication No. 2017/135359, the compound described in JP-A-2017-1149956, the compound described in Japanese Patent Application Laid-Open No. 61979940, the compound described in International Publication No. 2016/120166. Examples thereof include the compounds described in the item. Examples of the cyanine compound include the compounds described in paragraphs 0044 to 0045 of JP2009-108267A, the compounds described in paragraphs 0026 to 0030 of JP2002-194040, and the compounds described in JP2015-172004. , The compound described in JP-A-2015-172102, the compound described in JP-A-2008-88426, the compound described in paragraph 0090 of International Publication No. 2016/190162, and the like. Examples of the croconium compound include the compounds described in JP-A-2017-82029. Examples of the iminium compound include the compounds described in JP-A-2008-528706, the compounds described in JP-A-2012-012399, the compounds described in JP-A-2007-92060, and International Publication No. 2018/043564. The compounds described in paragraphs 0048 to 0063 of the above are mentioned. Examples of the phthalocyanine compound include the compound described in paragraphs 093 of JP2012-77153, the oxytitanium phthalocyanine described in JP2006-343631, and the compound described in paragraphs 0013 to 0029 of JP2013-195480. Can be mentioned. Examples of the naphthalocyanine compound include the compounds described in paragraph 093 of JP2012-77153A. Examples of the metal oxide include indium tin oxide, antimonthine oxide, zinc oxide, Al-doped zinc oxide, fluorine-doped tin dioxide, niobium-doped titanium dioxide, and tungsten oxide. For details of tungsten oxide, paragraph 0080 of JP-A-2016-006476 can be referred to, and the contents thereof are incorporated in the present specification. Examples of the metal boride include lanthanum hexaboride. Examples of commercially available lanthanum hexaboride products include LaB 6- F (manufactured by Nippon Shinkinzoku Co., Ltd.). Further, as the metal boride, the compound described in International Publication No. 2017/119394 can also be used. Examples of commercially available products of indium tin oxide include F-ITO (manufactured by DOWA Hightech Co., Ltd.).
 また、近赤外線吸収剤としては、また、特開2017-197437号公報に記載のスクアリリウム化合物、国際公開第2017/213047号の段落0090~0107に記載のスクアリリウム化合物、特開2018-054760号公報の段落0019~0075に記載のピロール環含有化合物、特開2018-040955号公報の段落0078~0082に記載のピロール環含有化合物、特開2018-002773号公報の段落0043~0069に記載のピロール環含有化合物、特開2018-041047号公報の段落0024~0086に記載のアミドα位に芳香環を有するスクアリリウム化合物、特開2017-179131号公報に記載のアミド連結型スクアリリウム化合物、特開2017-141215号公報に記載のピロールビス型スクアリリウム骨格又はクロコニウム骨格を有する化合物、特開2017-082029号公報に記載されたジヒドロカルバゾールビス型のスクアリリウム化合物、特開2017-068120号公報の段落0027~0114に記載の非対称型の化合物、特開2017-067963号公報に記載されたピロール環含有化合物(カルバゾール型)、特許第6251530号公報に記載されたフタロシアニン化合物などを用いることもできる。 Further, as the near-infrared absorber, the squarylium compound described in JP-A-2017-197437, the squarylium compound described in paragraphs 0090 to 0107 of International Publication No. 2017/213047, and JP-A-2018-054760. Pyrrole ring-containing compounds described in paragraphs 0019 to 0075, pyrrole ring-containing compounds described in paragraphs 0078 to 0082 of JP-A-2018-040955, and pyrrole ring-containing compounds described in paragraphs 0043-0069 of JP-A-2018-002773. Compounds, squarylium compounds having an aromatic ring at the amide α position described in paragraphs 0024 to 0086 of JP-A-2018-041047, amide-linked squarylium compounds described in JP-A-2017-179131, JP-A-2017-141215. A compound having a pyrrole bis-type squalylium skeleton or a croconium skeleton described in JP-A, a dihydrocarbazole bis-type squalylium compound described in JP-A-2017-082029, an asymmetry described in paragraphs 0027-0114 of JP-A-2017-068120. A type compound, a pyrrole ring-containing compound (carbazole type) described in JP-A-2017-066963, a phthalocyanine compound described in Patent No. 6251530, and the like can also be used.
 本開示に係る着色感光性組成物が近赤外線吸収剤を含有する場合、着色感光性組成物の全固形分中における近赤外線吸収剤の含有量は、1質量%以上であることが好ましく、5質量%以上であることがより好ましく、10質量%以上であることが特に好ましい。上限としては特に制限はないが、70質量%以下であることが好ましく、65質量%以下であることがより好ましく、60質量%以下であることが更に好ましい。
 また、本開示に係る着色感光性組成物は近赤外線吸収剤を実質的に含有しないこともできる。本開示に係る着色感光性組成物が近赤外線吸収剤を実質的に含まない場合、本開示に係る着色感光性組成物の全固形分中における近赤外線吸収剤の含有量が0.1質量%以下であることが好ましく、0.05質量%以下であることがより好ましく、含有しないことが特に好ましい。
When the colored photosensitive composition according to the present disclosure contains a near-infrared absorber, the content of the near-infrared absorber in the total solid content of the colored photosensitive composition is preferably 1% by mass or more. It is more preferably mass% or more, and particularly preferably 10 mass% or more. The upper limit is not particularly limited, but is preferably 70% by mass or less, more preferably 65% by mass or less, and further preferably 60% by mass or less.
In addition, the colored photosensitive composition according to the present disclosure may be substantially free of a near-infrared absorber. When the colored photosensitive composition according to the present disclosure does not substantially contain a near-infrared absorber, the content of the near-infrared absorber in the total solid content of the colored photosensitive composition according to the present disclosure is 0.1% by mass. It is preferably less than or equal to, more preferably 0.05% by mass or less, and particularly preferably not contained.
<シランカップリング剤>
 本開示に係る着色感光性組成物は、シランカップリング剤を含有することができる。この態様によれば、得られる膜の支持体との密着性をより向上させることができる。シランカップリング剤は、加水分解性基とそれ以外の官能基とを有するシラン化合物を意味する。また、加水分解性基とは、ケイ素原子に直結し、加水分解反応及び縮合反応の少なくともいずれかによってシロキサン結合を生じ得る置換基をいう。加水分解性基としては、例えば、ハロゲン原子、アルコキシ基、アシルオキシ基などが挙げられ、アルコキシ基が好ましい。すなわち、シランカップリング剤は、アルコキシシリル基を有する化合物が好ましい。また、加水分解性基以外の官能基としては、例えば、ビニル基、(メタ)アリル基、(メタ)アクリロイル基、メルカプト基、エポキシ基、オキセタニル基、アミノ基、ウレイド基、スルフィド基、イソシアネート基、フェニル基などが挙げられ、アミノ基、(メタ)アクリロイル基及びエポキシ基が好ましい。シランカップリング剤の具体例としては、特開2009-288703号公報の段落0018~0036に記載の化合物、特開2009-242604号公報の段落0056~0066に記載の化合物が挙げられ、これらの内容は本明細書に組み込まれる。
<Silane coupling agent>
The colored photosensitive composition according to the present disclosure may contain a silane coupling agent. According to this aspect, the adhesion of the obtained film to the support can be further improved. The silane coupling agent means a silane compound having a hydrolyzable group and other functional groups. Further, the hydrolyzable group refers to a substituent that is directly linked to a silicon atom and can form a siloxane bond by at least one of a hydrolysis reaction and a condensation reaction. Examples of the hydrolyzable group include a halogen atom, an alkoxy group, an acyloxy group and the like, and an alkoxy group is preferable. That is, the silane coupling agent is preferably a compound having an alkoxysilyl group. Examples of the functional group other than the hydrolyzable group include a vinyl group, a (meth) allyl group, a (meth) acryloyl group, a mercapto group, an epoxy group, an oxetanyl group, an amino group, a ureido group, a sulfide group and an isocyanate group. , Phenyl group and the like, preferably an amino group, a (meth) acryloyl group and an epoxy group. Specific examples of the silane coupling agent include the compounds described in paragraphs 0018 to 0036 of JP2009-288703A and the compounds described in paragraphs 0056 to 0066 of JP2009-242604A, and the contents thereof. Is incorporated herein.
 着色感光性組成物の全固形分中におけるシランカップリング剤の含有量は、0.1質量%~5質量%が好ましい。上限は、3質量%以下がより好ましく、2質量%以下が特に好ましい。下限は、0.5質量%以上がより好ましく、1質量%以上が特に好ましい。シランカップリング剤は、1種のみでもよく、2種以上でもよい。2種以上の場合は、合計量が上記範囲となることが好ましい。 The content of the silane coupling agent in the total solid content of the colored photosensitive composition is preferably 0.1% by mass to 5% by mass. The upper limit is more preferably 3% by mass or less, and particularly preferably 2% by mass or less. The lower limit is more preferably 0.5% by mass or more, and particularly preferably 1% by mass or more. The silane coupling agent may be only one kind or two or more kinds. In the case of two or more types, the total amount is preferably in the above range.
<有機溶剤>
 本開示に係る着色感光性組成物は、有機溶剤を含んでいてもよい。有機溶剤としては、各成分の溶解性や着色感光性組成物の塗布性を満足すれば基本的には特に制限はない。有機溶剤としては、エステル系溶剤、ケトン系溶剤、アルコール系溶剤、アミド系溶剤、エーテル系溶剤、炭化水素系溶剤などが挙げられる。これらの詳細については、国際公開第2015/166779号の段落0223を参酌でき、この内容は本明細書に組み込まれる。また、環状アルキル基が置換したエステル系溶剤、環状アルキル基が置換したケトン系溶剤を好ましく用いることもできる。有機溶剤の具体例としては、ポリエチレングリコールモノメチルエーテル、ジクロロメタン、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、エチルセロソルブアセテート、乳酸エチル、ジエチレングリコールジメチルエーテル、酢酸ブチル、3-メトキシプロピオン酸メチル、2-ヘプタノン、シクロヘキサノン、酢酸シクロヘキシル、シクロペンタノン、エチルカルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、3-メトキシ-N,N-ジメチルプロパンアミド、3-ブトキシ-N,N-ジメチルプロパンアミドなどが挙げられる。ただし有機溶剤としての芳香族炭化水素類(ベンゼン、トルエン、キシレン、エチルベンゼン等)は、環境面等の理由により低減したほうがよい場合がある(例えば、有機溶剤全量に対して、50質量ppm(parts per million)以下とすることもでき、10質量ppm以下とすることもでき、1質量ppm以下とすることもできる)。
<Organic solvent>
The colored photosensitive composition according to the present disclosure may contain an organic solvent. The organic solvent is basically not particularly limited as long as it satisfies the solubility of each component and the coatability of the colored photosensitive composition. Examples of the organic solvent include ester solvents, ketone solvents, alcohol solvents, amide solvents, ether solvents, hydrocarbon solvents and the like. For these details, paragraph 0223 of WO 2015/166779 can be referred to, the contents of which are incorporated herein by reference. Further, an ester solvent substituted with a cyclic alkyl group and a ketone solvent substituted with a cyclic alkyl group can also be preferably used. Specific examples of the organic solvent include polyethylene glycol monomethyl ether, dichloromethane, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2 -Heptanone, cyclohexanone, cyclohexyl acetate, cyclopentanone, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, 3-methoxy-N, N-dimethylpropanamide, 3-butoxy-N , N-Dimethylpropanamide and the like. However, aromatic hydrocarbons (benzene, toluene, xylene, ethylbenzene, etc.) as organic solvents may need to be reduced for environmental reasons (for example, 50 mass ppm (parts) with respect to the total amount of organic solvent. Per milion) or less, 10 mass ppm or less, or 1 mass ppm or less).
 有機溶剤としては、金属含有量の少ない有機溶剤を用いることが好ましく、有機溶剤の金属含有量は、例えば10質量ppb(parts per billion)以下であることが好ましい。必要に応じて質量ppt(parts per trillion)レベルの有機溶剤を用いてもよく、そのような有機溶剤は例えば東洋合成工業(株)が提供している(化学工業日報、2015年11月13日)。 As the organic solvent, it is preferable to use an organic solvent having a low metal content, and the metal content of the organic solvent is preferably, for example, 10 mass ppb (parts per billion) or less. If necessary, an organic solvent at the mass ppt (parts per trillion) level may be used, and such an organic solvent is provided by, for example, Toyo Gosei Co., Ltd. (The Chemical Daily, November 13, 2015). ).
 有機溶剤から金属等の不純物を除去する方法としては、例えば、蒸留(分子蒸留や薄膜蒸留等)やフィルタを用いたろ過を挙げることができる。ろ過に用いるフィルタのフィルタ孔径としては、10μm以下が好ましく、5μm以下がより好ましく、3μm以下が更に好ましい。フィルタの材質は、ポリテトラフロロエチレン、ポリエチレン又はナイロンが好ましい。 Examples of the method for removing impurities such as metals from the organic solvent include distillation (molecular distillation, thin film distillation, etc.) and filtration using a filter. The filter pore diameter of the filter used for filtration is preferably 10 μm or less, more preferably 5 μm or less, and even more preferably 3 μm or less. The filter material is preferably polytetrafluoroethylene, polyethylene or nylon.
 有機溶剤は、異性体(原子数が同じであるが構造が異なる化合物)が含まれていてもよい。また、異性体は、1種のみが含まれていてもよいし、複数種含まれていてもよい。 The organic solvent may contain isomers (compounds having the same number of atoms but different structures). Further, only one kind of isomer may be contained, or a plurality of kinds may be contained.
 有機溶剤中の過酸化物の含有率が0.8mmol/L以下であることが好ましく、過酸化物を実質的に含まないことがより好ましい。 The content of peroxide in the organic solvent is preferably 0.8 mmol / L or less, and more preferably substantially free of peroxide.
 着色感光性組成物中における有機溶剤の含有量は、10質量%~95質量%であることが好ましく、20質量%~90質量%であることがより好ましく、30質量%~90質量%であることが更に好ましい。 The content of the organic solvent in the colored photosensitive composition is preferably 10% by mass to 95% by mass, more preferably 20% by mass to 90% by mass, and 30% by mass to 90% by mass. Is even more preferable.
 また、本開示に係る着色感光性組成物は、環境規制の観点から環境規制物質を実質的に含有しないことが好ましい。なお、本開示において、環境規制物質を実質的に含有しないとは、着色組成物中における環境規制物質の含有量が50質量ppm以下であることを意味し、30質量ppm以下であることが好ましく、10質量ppm以下であることが更に好ましく、1質量ppm以下であることが特に好ましい。環境規制物質は、例えばベンゼン;トルエン、キシレン等のアルキルベンゼン類;クロロベンゼン等のハロゲン化ベンゼン類等が挙げられる。これらは、REACH(Registration Evaluation Authorization and Restriction of Chemicals)規則、PRTR(Pollutant Release and Transfer Register)法、VOC(Volatile Organic Compounds)規制等のもとに環境規制物質として登録されており、使用量や取り扱い方法が厳しく規制されている。これらの化合物は、本開示に係る着色感光性組成物に用いられる各成分などを製造する際に溶媒として用いられることがあり、残留溶媒として着色感光性組成物中に混入することがある。人への安全性、環境への配慮の観点よりこれらの物質は可能な限り低減することが好ましい。環境規制物質を低減する方法としては、系中を加熱や減圧して環境規制物質の沸点以上にして系中から環境規制物質を留去して低減する方法が挙げられる。また、少量の環境規制物質を留去する場合においては、効率を上げる為に該当溶媒と同等の沸点を有する溶媒と共沸させることも有用である。また、ラジカル重合性を有する化合物を含有する場合、減圧留去中にラジカル重合反応が進行して分子間で架橋してしまうことを抑制するために重合禁止剤等を添加して減圧留去してもよい。これらの留去方法は、原料の段階、原料を反応させた生成物(例えば重合した後の樹脂溶液や多官能モノマー溶液)の段階、又はこれらの化合物を混ぜて作製した着色感光性組成物の段階などのいずれの段階でも可能である。 Further, it is preferable that the colored photosensitive composition according to the present disclosure does not substantially contain an environmentally regulated substance from the viewpoint of environmental regulation. In the present disclosure, substantially no environmentally regulated substance means that the content of the environmentally regulated substance in the coloring composition is 50 mass ppm or less, and preferably 30 mass ppm or less. It is more preferably 10 mass ppm or less, and particularly preferably 1 mass ppm or less. Examples of the environmentally regulated substance include benzene; alkylbenzenes such as toluene and xylene; and halogenated benzenes such as chlorobenzene. These are registered as environmentally regulated substances under the REACH (Registration Evaluation Authorization and Restriction of Chemicals) regulations, the PRTR (Pollutant Release and Transfer Register) law, and the VOC (Volatile Organic Compounds) regulations, and are used and handled. The method is strictly regulated. These compounds may be used as a solvent when producing each component used in the colored photosensitive composition according to the present disclosure, and may be mixed in the colored photosensitive composition as a residual solvent. From the viewpoint of human safety and consideration for the environment, it is preferable to reduce these substances as much as possible. Examples of the method for reducing the environmentally regulated substance include a method of heating or depressurizing the inside of the system to raise the boiling point of the environmentally regulated substance to the boiling point or higher and distilling off the environmentally regulated substance from the system to reduce the amount of the environmentally regulated substance. Further, when distilling off a small amount of an environmentally regulated substance, it is also useful to azeotrope with a solvent having a boiling point equivalent to that of the solvent in order to improve efficiency. When a compound having radical polymerization property is contained, a polymerization inhibitor or the like is added and distilled under reduced pressure in order to prevent the radical polymerization reaction from proceeding and cross-linking between molecules during distillation under reduced pressure. You may. These distillation methods are performed at the stage of the raw material, the stage of the product obtained by reacting the raw materials (for example, a resin solution after polymerization or a polyfunctional monomer solution), or a colored photosensitive composition prepared by mixing these compounds. It is possible at any stage such as a stage.
<重合禁止剤>
 本開示に係る着色感光性組成物は、重合禁止剤を含むことができる。重合禁止剤としては、ハイドロキノン、p-メトキシフェノール、ジ-tert-ブチル-p-クレゾール、ピロガロール、tert-ブチルカテコール、ベンゾキノン、4,4’-チオビス(3-メチル-6-tert-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン塩(アンモニウム塩、第一セリウム塩等)が挙げられる。中でも、p-メトキシフェノールが好ましい。着色組成物の全固形分中における重合禁止剤の含有量は、0.0001質量%~5質量%が好ましい。
<Polymerization inhibitor>
The colored photosensitive composition according to the present disclosure may contain a polymerization inhibitor. Examples of the polymerization inhibitor include hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4'-thiobis (3-methyl-6-tert-butylphenol), and the like. Examples thereof include 2,2'-methylenebis (4-methyl-6-t-butylphenol) and N-nitrosophenylhydroxyamine salts (ammonium salt, primary cerium salt, etc.). Of these, p-methoxyphenol is preferable. The content of the polymerization inhibitor in the total solid content of the coloring composition is preferably 0.0001% by mass to 5% by mass.
<界面活性剤>
 本開示に係る着色感光性組成物は、界面活性剤を含有することができる。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコン系界面活性剤などの各種界面活性剤を使用することができる。界面活性剤については、国際公開第2015/166779号の段落0238~0245、及び、特開2018-173660号公報段落0253~0260を参酌でき、この内容は本明細書に組み込まれる。
 界面活性剤は、フッ素系界面活性剤であることが好ましい。着色感光性組成物にフッ素系界面活性剤を含有させることで液特性(特に、流動性)がより向上し、省液性をより改善することができる。また、厚みムラの小さい膜を形成することもできる。
<Surfactant>
The colored photosensitive composition according to the present disclosure may contain a surfactant. As the surfactant, various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicon-based surfactant can be used. Regarding surfactants, paragraphs 0238 to 0245 of International Publication No. 2015/166779 and paragraphs 0253 to 0260 of JP-A-2018-173660 can be referred to, and the contents thereof are incorporated in the present specification.
The surfactant is preferably a fluorine-based surfactant. By containing a fluorine-based surfactant in the colored photosensitive composition, the liquid characteristics (particularly, fluidity) can be further improved, and the liquid saving property can be further improved. It is also possible to form a film having a small thickness unevenness.
 着色感光性組成物の全固形分中における界面活性剤の含有量は、0.001質量%~5.0質量%が好ましく、0.005質量%~3.0質量%がより好ましい。界面活性剤は、1種のみでもよく、2種以上でもよい。2種以上の場合は、合計量が上記範囲となることが好ましい。 The content of the surfactant in the total solid content of the colored photosensitive composition is preferably 0.001% by mass to 5.0% by mass, more preferably 0.005% by mass to 3.0% by mass. The surfactant may be only one kind or two or more kinds. In the case of two or more types, the total amount is preferably in the above range.
<紫外線吸収剤>
 本開示に係る着色感光性組成物は、紫外線吸収剤を含有することができる。紫外線吸収剤は、共役ジエン化合物、アミノジエン化合物、サリシレート化合物、ベンゾフェノン化合物、ベンゾトリアゾール化合物、アクリロニトリル化合物、ヒドロキシフェニルトリアジン化合物、インドール化合物、トリアジン化合物などを用いることができる。これらの詳細については、特開2012-208374号公報の段落0052~0072、特開2013-68814号公報の段落0317~0334、特開2016-162946号公報の段落0061~0080の記載を参酌でき、これらの内容は本明細書に組み込まれる。紫外線吸収剤の具体例としては、下記構造の化合物などが挙げられる。紫外線吸収剤の市販品としては、例えば、UV-503(大東化学(株)製)などが挙げられる。また、ベンゾトリアゾール化合物としては、ミヨシ油脂(株)製のMYUAシリーズ(化学工業日報、2016年2月1日)が挙げられる。また、紫外線吸収剤は、特許第6268967号公報の段落0049~0059に記載された化合物を用いることもできる。
<UV absorber>
The colored photosensitive composition according to the present disclosure may contain an ultraviolet absorber. As the ultraviolet absorber, a conjugated diene compound, an aminodiene compound, a salicylate compound, a benzophenone compound, a benzotriazole compound, an acrylonitrile compound, a hydroxyphenyltriazine compound, an indol compound, a triazine compound and the like can be used. For details thereof, the description of paragraphs 0052 to 0072 of JP2012-208374A, paragraphs 0317 to 0334 of JP2013-68814, and paragraphs 0061 to 0080 of JP2016-162946 can be referred to. These contents are incorporated herein by reference. Specific examples of the ultraviolet absorber include compounds having the following structures. Examples of commercially available ultraviolet absorbers include UV-503 (manufactured by Daito Chemical Co., Ltd.). Examples of the benzotriazole compound include the MYUA series (The Chemical Daily, February 1, 2016) manufactured by Miyoshi Oil & Fat Co., Ltd. Further, as the ultraviolet absorber, the compounds described in paragraphs 0049 to 0059 of Japanese Patent No. 6268967 can also be used.
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000027
 着色感光性組成物の全固形分中における紫外線吸収剤の含有量は、0.01質量%~10質量%が好ましく、0.01質量%~5質量%がより好ましい。紫外線吸収剤は1種のみを用いてもよく、2種以上を用いてもよい。2種以上を用いる場合は、合計量が上記範囲となることが好ましい。 The content of the ultraviolet absorber in the total solid content of the colored photosensitive composition is preferably 0.01% by mass to 10% by mass, more preferably 0.01% by mass to 5% by mass. Only one kind of ultraviolet absorber may be used, or two or more kinds may be used. When two or more types are used, the total amount is preferably in the above range.
<酸化防止剤>
 本開示に係る着色感光性組成物は、酸化防止剤を含有することができる。酸化防止剤としては、フェノール化合物、亜リン酸エステル化合物、チオエーテル化合物などが挙げられる。フェノール化合物としては、フェノール系酸化防止剤として知られる任意のフェノール化合物を使用することができる。好ましいフェノール化合物としては、ヒンダードフェノール化合物が挙げられる。フェノール性ヒドロキシ基に隣接する部位(オルト位)に置換基を有する化合物が好ましい。前述の置換基としては炭素数1~22の置換又は無置換のアルキル基が好ましい。また、酸化防止剤は、同一分子内にフェノール基と亜リン酸エステル基を有する化合物も好ましい。また、酸化防止剤は、リン系酸化防止剤も好適に使用することができる。リン系酸化防止剤としてはトリス[2-[[2,4,8,10-テトラキス(1,1-ジメチルエチル)ジベンゾ[d,f][1,3,2]ジオキサホスフェピン-6-イル]オキシ]エチル]アミン、トリス[2-[(4,6,9,11-テトラ-tert-ブチルジベンゾ[d,f][1,3,2]ジオキサホスフェピン-2-イル)オキシ]エチル]アミン、亜リン酸エチルビス(2,4-ジ-tert-ブチル-6-メチルフェニル)などが挙げられる。酸化防止剤の市販品としては、例えば、アデカスタブ AO-20、アデカスタブ AO-30、アデカスタブ AO-40、アデカスタブ AO-50、アデカスタブ AO-50F、アデカスタブ AO-60、アデカスタブ AO-60G、アデカスタブ AO-80、アデカスタブ AO-330(以上、(株)ADEKA製)などが挙げられる。また、酸化防止剤は、特許第6268967号公報の段落0023~0048に記載された化合物、韓国公開特許第10-2019-0059371号公報に記載の化合物等を使用することもできる。
<Antioxidant>
The colored photosensitive composition according to the present disclosure may contain an antioxidant. Examples of the antioxidant include phenol compounds, phosphite ester compounds, thioether compounds and the like. As the phenol compound, any phenol compound known as a phenolic antioxidant can be used. Preferred phenolic compounds include hindered phenolic compounds. A compound having a substituent at a site (ortho position) adjacent to the phenolic hydroxy group is preferable. As the above-mentioned substituent, a substituted or unsubstituted alkyl group having 1 to 22 carbon atoms is preferable. Further, as the antioxidant, a compound having a phenol group and a phosphite ester group in the same molecule is also preferable. Further, as the antioxidant, a phosphorus-based antioxidant can also be preferably used. As a phosphorus-based antioxidant, tris [2-[[2,4,8,10-tetrakis (1,1-dimethylethyl) dibenzo [d, f] [1,3,2] dioxaphosfepine-6 -Il] Oxy] Ethyl] amine, Tris [2-[(4,6,9,11-tetra-tert-butyldibenzo [d, f] [1,3,2] dioxaphosfepin-2-yl] ) Oxy] ethyl] amine, ethylbis phosphite (2,4-di-tert-butyl-6-methylphenyl) and the like. Commercially available antioxidants include, for example, Adekastab AO-20, Adekastab AO-30, Adekastab AO-40, Adekastab AO-50, Adekastab AO-50F, Adekastab AO-60, Adekastab AO-60G, Adekastab AO-80. , ADEKA STAB AO-330 (above, manufactured by ADEKA Corporation) and the like. Further, as the antioxidant, the compounds described in paragraphs 0023 to 0048 of Japanese Patent No. 6268967, the compounds described in Japanese Patent No. 10-2019-0059371, and the like can also be used.
 着色感光性組成物の全固形分中における酸化防止剤の含有量は、0.01質量%~20質量%であることが好ましく、0.3質量%~15質量%であることがより好ましい。酸化防止剤は1種のみを用いてもよく、2種以上を用いてもよい。2種以上を用いる場合は、合計量が上記範囲となることが好ましい。 The content of the antioxidant in the total solid content of the colored photosensitive composition is preferably 0.01% by mass to 20% by mass, and more preferably 0.3% by mass to 15% by mass. Only one type of antioxidant may be used, or two or more types may be used. When two or more types are used, the total amount is preferably in the above range.
<その他成分>
 本開示に係る着色感光性組成物は、必要に応じて、増感剤、硬化促進剤、フィラー、熱硬化促進剤、可塑剤及びその他の助剤類(例えば、導電性粒子、充填剤、消泡剤、難燃剤、レベリング剤、剥離促進剤、香料、表面張力調整剤、連鎖移動剤など)を含有してもよい。これらの成分を適宜含有させることにより、膜物性などの性質を調整することができる。これらの成分は、例えば、特開2012-003225号公報の段落0183以降(対応する米国特許出願公開第2013/0034812号明細書の段落0237)の記載、特開2008-250074号公報の段落0101~0104、0107~0109等の記載を参酌でき、これらの内容は本明細書に組み込まれる。また、本開示に係る着色感光性組成物は、必要に応じて、潜在酸化防止剤を含有してもよい。潜在酸化防止剤としては、酸化防止剤として機能する部位が保護基で保護された化合物であって、100~250℃で加熱するか、又は酸/塩基触媒存在下で80℃~200℃で加熱することにより保護基が脱離して酸化防止剤として機能する化合物が挙げられる。潜在酸化防止剤としては、国際公開第2014/021023号、国際公開第2017/030005号、特開2017-008219号公報に記載された化合物が挙げられる。市販品としては、アデカアークルズGPA-5001((株)ADEKA製)等が挙げられる。
<Other ingredients>
The colored photosensitive composition according to the present disclosure is, if necessary, a sensitizer, a curing accelerator, a filler, a thermosetting accelerator, a plasticizer and other auxiliary agents (for example, conductive particles, a filler, a defoamer). It may contain a foaming agent, a flame retardant, a leveling agent, a peeling accelerator, a fragrance, a surface tension adjusting agent, a chain transfer agent, etc.). By appropriately containing these components, properties such as film physical properties can be adjusted. These components are described in, for example, paragraphs 0183 and later of JP2012-003225A (paragraph 0237 of the corresponding US Patent Application Publication No. 2013/0034812), paragraphs 0101 to JP2008-250074. The descriptions of 0104, 0107 to 0109, etc. can be taken into consideration, and these contents are incorporated in the present specification. In addition, the colored photosensitive composition according to the present disclosure may contain a latent antioxidant, if necessary. The latent antioxidant is a compound in which the part that functions as an antioxidant is protected by a protecting group, and is heated at 100 to 250 ° C. or at 80 ° C. to 200 ° C. in the presence of an acid / base catalyst. Examples thereof include compounds in which the protecting group is eliminated by the action and the function functions as an antioxidant. Examples of the latent antioxidant include compounds described in International Publication No. 2014/021023, International Publication No. 2017/030005, and JP-A-2017-008219. Examples of commercially available products include ADEKA ARKULS GPA-5001 (manufactured by ADEKA Corporation) and the like.
 また、本開示に係る着色感光性組成物は、得られる膜の屈折率を調整するために金属酸化物を含有させてもよい。金属酸化物としては、TiO、ZrO、Al、SiO等が挙げられる。金属酸化物の一次粒子径は、1nm~100nmが好ましく、3nm~70nmがより好ましく、5nm~50nmが特に好ましい。金属酸化物はコア-シェル構造を有していてもよく、この際、コア部が中空状であってもよい。 In addition, the colored photosensitive composition according to the present disclosure may contain a metal oxide in order to adjust the refractive index of the obtained film. Examples of the metal oxide include TiO 2 , ZrO 2 , Al 2 O 3 , SiO 2 and the like. The primary particle size of the metal oxide is preferably 1 nm to 100 nm, more preferably 3 nm to 70 nm, and particularly preferably 5 nm to 50 nm. The metal oxide may have a core-shell structure, and at this time, the core portion may be hollow.
 また、本開示に係る着色感光性組成物は、耐光性改良剤を含んでもよい。耐光性改良剤としては、特開2017-198787号公報の段落0036~0037に記載の化合物、特開2017-146350号公報の段落0029~0034に記載の化合物、特開2017-129774号公報の段落0036~0037、0049~0052に記載の化合物、特開2017-129674号公報の段落0031~0034、0058~0059に記載の化合物、特開2017-122803号公報の段落0036~0037、0051~0054に記載の化合物、国際公開WO17/164127号公報の段落0025~0039に記載の化合物、特開2017-186546号公報の段落0034~0047に記載の化合物、特開2015-25116号公報の段落0019~0041に記載の化合物、特開2012-145604号公報の段落0101~0125に記載の化合物、特開2012-103475号公報の段落0018~0021に記載の化合物、特開2011-257591号公報の段落0015~0018に記載の化合物、特開2011-191483号公報の段落0017~0021に記載の化合物、特開2011-145668号公報の段落0108~0116に記載の化合物、特開2011-253174号公報の段落0103~0153に記載の化合物などが挙げられる。 Further, the colored photosensitive composition according to the present disclosure may contain a light resistance improving agent. Examples of the light resistance improving agent include the compounds described in paragraphs 0036 to 0037 of JP-A-2017-198787, the compounds described in paragraphs 0029-0034 of JP-A-2017-146350, and paragraphs of JP-A-2017-129774. The compounds described in 0036 to 0037 and 0049 to 0052, the compounds described in paragraphs 0031 to 0034 and 0058 to 0059 of JP-A-2017-129674, and paragraphs 0036-0037 and 0051-0054 of JP-A-2017-122803. The compound described, the compound described in paragraphs 0025 to 0039 of WO17 / 164127, the compound described in paragraphs 0034 to 0047 of JP2017-186546A, paragraphs 0019 to 0041 of JP2015-25116A. , The compounds described in paragraphs 0101 to 0125 of JP2012-145604, the compounds described in paragraphs 0018 to 0021 of JP2012-103475A, paragraphs 0015 to JP2011-257591A. The compound described in 0018, the compound described in paragraphs 0017 to 0021 of JP-A-2011-191483, the compound described in paragraphs 0108 to 0116 of JP-A-2011-145668, paragraph 0103 of JP-A-2011-253174. Examples thereof include the compounds described in 0153.
 本開示に係る着色感光性組成物の粘度(25℃)は、例えば、塗布により膜を形成する場合、1mPa・s~100mPa・sであることが好ましい。下限は、2mPa・s以上がより好ましく、3mPa・s以上が更に好ましい。上限は、50mPa・s以下がより好ましく、30mPa・s以下が更に好ましく、15mPa・s以下が特に好ましい。 The viscosity (25 ° C.) of the colored photosensitive composition according to the present disclosure is preferably 1 mPa · s to 100 mPa · s, for example, when a film is formed by coating. The lower limit is more preferably 2 mPa · s or more, and further preferably 3 mPa · s or more. The upper limit is more preferably 50 mPa · s or less, further preferably 30 mPa · s or less, and particularly preferably 15 mPa · s or less.
 本開示に係る着色感光性組成物は、顔料などと結合又は配位していない遊離の金属の含有量が100ppm以下であることが好ましく、50ppm以下であることがより好ましく、10ppm以下であることが更に好ましく、実質的に含有しないことが特に好ましい。この態様によれば、特開2012-153796号公報、特開2000-345085号公報、特開2005-200560号公報、特開平8-43620号公報、特開2004-145078号公報、特開2014-119487号公報、特開2010-083997号公報、特開2017-090930号公報、特開2018-025612号公報、特開2018-025797号公報、特開2017-155228号公報、特開2018-36521号公報などに記載された効果が得られる。上記の遊離の金属の種類としては、Na、K、Ca、Sc、Ti、Mn、Cu、Zn、Fe、Cr、Fe、Co、Mg、Al、Ti、Sn、Zn、Zr、Ga、Ge、Ag、Au、Pt、Cs、Bi等が挙げられる。また、本開示に係る着色感光性組成物は、顔料などと結合又は配位していない遊離のハロゲンの含有量が100ppm以下であることが好ましく、50ppm以下であることがより好ましく、10ppm以下であることが更に好ましく、実質的に含有しないことが特に好ましい。着色組成物中の遊離の金属やハロゲンの低減方法としては、イオン交換水による洗浄、ろ過、限外ろ過、イオン交換樹脂による精製等の方法が挙げられる。 The colored photosensitive composition according to the present disclosure preferably has a free metal content of 100 ppm or less, more preferably 50 ppm or less, and 10 ppm or less, which is not bonded or coordinated with a pigment or the like. Is more preferable, and it is particularly preferable that the content is substantially not contained. According to this aspect, JP-A-2012-153996, JP-A-2000-34585, JP-A-2005-200560, JP-A-8-43620, JP-A-2004-145878, JP-A-2014- 119487, 2010-083997, 2017-090930, 2018-025612, 2018-025797, 2017-155228, 2018-36521. The effects described in the publications and the like can be obtained. Examples of the types of free metals include Na, K, Ca, Sc, Ti, Mn, Cu, Zn, Fe, Cr, Fe, Co, Mg, Al, Ti, Sn, Zn, Zr, Ga, Ge, etc. Examples thereof include Ag, Au, Pt, Cs and Bi. Further, in the colored photosensitive composition according to the present disclosure, the content of free halogen that is not bonded or coordinated with a pigment or the like is preferably 100 ppm or less, more preferably 50 ppm or less, and 10 ppm or less. It is more preferable that it is present, and it is particularly preferable that it is not substantially contained. Examples of the method for reducing free metals and halogens in the coloring composition include washing with ion-exchanged water, filtration, ultrafiltration, and purification with an ion-exchange resin.
 本開示に係る着色感光性組成物は、テレフタル酸エステルを実質的に含まないことも好ましい。 It is also preferable that the colored photosensitive composition according to the present disclosure does not substantially contain a terephthalic acid ester.
<収容容器>
 本開示に係る着色感光性組成物の収容容器としては、特に限定はなく、公知の収容容器を用いることができる。また、収容容器として、原材料や着色感光性組成物中への不純物混入を抑制することを目的に、容器内壁を6種6層の樹脂で構成する多層ボトルや6種の樹脂を7層構造にしたボトルを使用することも好ましい。このような容器としては例えば特開2015-123351号公報に記載の容器が挙げられる。
<Container>
The container for the colored photosensitive composition according to the present disclosure is not particularly limited, and a known container can be used. In addition, as a storage container, a multi-layer bottle composed of 6 types and 6 layers of resin and 6 types of resin have a 7-layer structure for the purpose of suppressing impurities from being mixed into raw materials and colored photosensitive compositions. It is also preferable to use a bottle of plastic. Examples of such a container include the container described in JP-A-2015-123351.
<着色感光性組成物の調製方法>
 本開示に係る着色感光性組成物は、前述の成分を混合して調製できる。着色感光性組成物の調製に際しては、全成分を同時に有機溶剤に溶解及び/又は分散して着色感光性組成物を調製してもよいし、必要に応じて、各成分を適宜2つ以上の溶液又は分散液としておいて、使用時(塗布時)にこれらを混合して着色感光性組成物を調製してもよい。
<Method for preparing colored photosensitive composition>
The colored photosensitive composition according to the present disclosure can be prepared by mixing the above-mentioned components. In preparing the colored photosensitive composition, all the components may be simultaneously dissolved and / or dispersed in an organic solvent to prepare the colored photosensitive composition, and if necessary, two or more components may be appropriately added. A colored photosensitive composition may be prepared by preparing a solution or a dispersion and mixing them at the time of use (at the time of application).
 また、着色感光性組成物の調製に際して、顔料を分散させるプロセスを含むことが好ましい。顔料を分散させるプロセスにおいて、顔料の分散に用いる機械力としては、圧縮、圧搾、衝撃、剪断、キャビテーションなどが挙げられる。これらプロセスの具体例としては、ビーズミル、サンドミル、ロールミル、ボールミル、ペイントシェーカー、マイクロフルイダイザー、高速インペラー、サンドグラインダー、フロージェットミキサー、高圧湿式微粒化、超音波分散などが挙げられる。またサンドミル(ビーズミル)における顔料の粉砕においては、径の小さいビーズを使用する、ビーズの充填率を大きくする事等により粉砕効率を高めた条件で処理することが好ましい。また、粉砕処理後にろ過、遠心分離などで粗粒子を除去することが好ましい。また、顔料を分散させるプロセス及び分散機は、「分散技術大全、株式会社情報機構発行、2005年7月15日」や「サスペンション(固/液分散系)を中心とした分散技術と工業的応用の実際 総合資料集、経営開発センター出版部発行、1978年10月10日」、特開2015-157893号公報の段落0022に記載のプロセス及び分散機を好適に使用出来る。また顔料を分散させるプロセスにおいては、ソルトミリング工程にて粒子の微細化処理を行ってもよい。ソルトミリング工程に用いられる素材、機器、処理条件等は、例えば特開2015-194521号公報、特開2012-046629号公報の記載を参酌できる。 Further, it is preferable to include a process of dispersing the pigment in the preparation of the colored photosensitive composition. In the process of dispersing the pigment, the mechanical force used for dispersing the pigment includes compression, squeezing, impact, shearing, cavitation and the like. Specific examples of these processes include bead mills, sand mills, roll mills, ball mills, paint shakers, microfluidizers, high speed impellers, sand grinders, flow jet mixers, high pressure wet atomization, ultrasonic dispersion and the like. Further, in the pulverization of the pigment in the sand mill (bead mill), it is preferable to use beads having a small diameter and to process the pigment under the condition that the pulverization efficiency is increased by increasing the filling rate of the beads. Further, it is preferable to remove coarse particles by filtration, centrifugation or the like after the pulverization treatment. In addition, the process and disperser for dispersing pigments are "Dispersion Technology Taizen, published by Information Organization Co., Ltd., July 15, 2005" and "Dispersion technology and industrial application centered on suspension (solid / liquid dispersion system)". The process and disperser described in paragraph 0022 of Japanese Patent Application Laid-Open No. 2015-157893, "Practical Data Collection, Published by Management Development Center Publishing Department, October 10, 1978" can be preferably used. Further, in the process of dispersing the pigment, the particles may be miniaturized in the salt milling step. For the materials, equipment, processing conditions, etc. used in the salt milling step, for example, the descriptions in JP-A-2015-194521 and JP-A-2012-046629 can be referred to.
 着色感光性組成物の調製にあたり、異物の除去や欠陥の低減などの目的で、着色感光性組成物をフィルタでろ過することが好ましい。フィルタとしては、従来からろ過用途等に用いられているフィルタであれば特に限定されることなく用いることができる。例えば、ポリテトラフルオロエチレン(PTFE)等のフッ素樹脂、ナイロン(例えばナイロン-6、ナイロン-6,6)等のポリアミド系樹脂、ポリエチレン、ポリプロピレン(PP)等のポリオレフィン樹脂(高密度、超高分子量のポリオレフィン樹脂を含む)等の素材を用いたフィルタが挙げられる。これら素材の中でもポリプロピレン(高密度ポリプロピレンを含む)及びナイロンが好ましい。 In preparing the colored photosensitive composition, it is preferable to filter the colored photosensitive composition with a filter for the purpose of removing foreign substances and reducing defects. As the filter, any filter conventionally used for filtration or the like can be used without particular limitation. For example, fluororesins such as polytetrafluoroethylene (PTFE), polyamide resins such as nylon (eg, nylon-6, nylon-6,6), and polyolefin resins such as polyethylene and polypropylene (PP) (high density, ultrahigh molecular weight). A filter using a material such as (including the polyolefin resin of) is mentioned. Among these materials, polypropylene (including high-density polypropylene) and nylon are preferable.
 フィルタの孔径は、0.01μm~7.0μmが好ましく、0.01μm~3.0μmがより好ましく、0.05μm~0.5μmが更に好ましい。フィルタの孔径が上記範囲であれば、微細な異物をより確実に除去できる。フィルタの孔径値については、フィルタメーカーの公称値を参照することができる。フィルタは、日本ポール(株)(DFA4201NIEYなど)、アドバンテック東洋(株)、日本インテグリス(株)(旧日本マイクロリス(株))及び(株)キッツマイクロフィルタ等が提供する各種フィルタを用いることができる。 The pore size of the filter is preferably 0.01 μm to 7.0 μm, more preferably 0.01 μm to 3.0 μm, and even more preferably 0.05 μm to 0.5 μm. If the pore size of the filter is within the above range, fine foreign matter can be removed more reliably. For the pore size value of the filter, the nominal value of the filter manufacturer can be referred to. As the filter, various filters provided by Nippon Pole Co., Ltd. (DFA4201NIEY, etc.), Advantech Toyo Co., Ltd., Japan Entegris Co., Ltd. (formerly Japan Microlith Co., Ltd.), KITZ Microfilter Co., Ltd., etc. can be used. it can.
 また、フィルタとしてファイバ状のろ材を用いることも好ましい。ファイバ状のろ材としては、例えばポリプロピレンファイバ、ナイロンファイバ、グラスファイバ等が挙げられる。市販品としては、ロキテクノ社製のSBPタイプシリーズ(SBP008など)、TPRタイプシリーズ(TPR002、TPR005など)、SHPXタイプシリーズ(SHPX003など)が挙げられる。 It is also preferable to use a fibrous filter medium as the filter. Examples of the fibrous filter medium include polypropylene fiber, nylon fiber, glass fiber and the like. Examples of commercially available products include SBP type series (SBP008, etc.), TPR type series (TPR002, TPR005, etc.), and SHPX type series (SHPX003, etc.) manufactured by Loki Techno Co., Ltd.
 フィルタを使用する際、異なるフィルタ(例えば、第1のフィルタと第2のフィルタなど)を組み合わせてもよい。その際、各フィルタでのろ過は、1回のみでもよいし、2回以上行ってもよい。また、上述した範囲内で異なる孔径のフィルタを組み合わせてもよい。また、第1のフィルタでのろ過は、分散液のみに対して行い、他の成分を混合した後で、第2のフィルタでろ過を行ってもよい。 When using a filter, different filters (for example, a first filter and a second filter) may be combined. At that time, the filtration with each filter may be performed only once or twice or more. Further, filters having different pore diameters may be combined within the above-mentioned range. Further, the filtration with the first filter may be performed only on the dispersion liquid, and after mixing the other components, the filtration with the second filter may be performed.
(硬化物)
 本開示に係る硬化物は、本開示に係る着色感光性組成物を硬化してなる硬化物である。 本開示に係る硬化物は、カラーフィルタなどに好適に用いることができる。具体的には、カラーフィルタの着色層(画素)として好ましく用いることができ、より具体的には、カラーフィルタの緑色着色層(緑色画素)として好ましく用いることができる。
 本開示に係る硬化物は、膜状の硬化物であることが好ましく、その膜厚は、目的に応じて適宜調整できる。例えば、膜厚は、20μm以下が好ましく、10μm以下がより好ましく、5μm以下が更に好ましい。膜厚の下限は、0.1μm以上が好ましく、0.2μm以上がより好ましく、0.3μm以上が更に好ましい。
(Hardened product)
The cured product according to the present disclosure is a cured product obtained by curing the colored photosensitive composition according to the present disclosure. The cured product according to the present disclosure can be suitably used for a color filter or the like. Specifically, it can be preferably used as a colored layer (pixel) of a color filter, and more specifically, it can be preferably used as a green colored layer (green pixel) of a color filter.
The cured product according to the present disclosure is preferably a film-like cured product, and the film thickness thereof can be appropriately adjusted according to the intended purpose. For example, the film thickness is preferably 20 μm or less, more preferably 10 μm or less, and even more preferably 5 μm or less. The lower limit of the film thickness is preferably 0.1 μm or more, more preferably 0.2 μm or more, and further preferably 0.3 μm or more.
(カラーフィルタ)
 本開示に係るカラーフィルタは、上述した本開示に係る硬化物を備える。より好ましくは、カラーフィルタの画素として、本開示に係る硬化物を有する。本開示に係るカラーフィルタは、CCD(電荷結合素子)やCMOS(相補型金属酸化膜半導体)などの固体撮像素子や画像表示装置などに用いることができる。
(Color filter)
The color filter according to the present disclosure includes the cured product according to the present disclosure described above. More preferably, the pixel of the color filter has a cured product according to the present disclosure. The color filter according to the present disclosure can be used for a solid-state image sensor such as a CCD (charge coupling element) or CMOS (complementary metal oxide semiconductor), an image display device, or the like.
 本開示に係るカラーフィルタは、本開示に係る硬化物(画素)とは異なる画素(以下、他の画素ともいう)を更に有していてもよい。他の画素としては、例えば、赤色画素、青色画素、黄色画素、シアン色画素、マゼンタ色画素、透明画素、黒色画素、近赤外線透過フィルタの画素などが挙げられる。 The color filter according to the present disclosure may further have pixels (hereinafter, also referred to as other pixels) different from the cured product (pixels) according to the present disclosure. Examples of other pixels include red pixels, blue pixels, yellow pixels, cyan pixels, magenta pixels, transparent pixels, black pixels, near-infrared transmission filter pixels, and the like.
 本開示に係るカラーフィルタにおいて本開示に係る硬化物からなる膜の膜厚は、目的に応じて適宜調整できる。膜厚は、20μm以下が好ましく、10μm以下がより好ましく、5μm以下が更に好ましい。膜厚の下限は、0.1μm以上が好ましく、0.2μm以上がより好ましく、0.3μm以上が更に好ましい。 In the color filter according to the present disclosure, the film thickness of the film made of the cured product according to the present disclosure can be appropriately adjusted according to the purpose. The film thickness is preferably 20 μm or less, more preferably 10 μm or less, and even more preferably 5 μm or less. The lower limit of the film thickness is preferably 0.1 μm or more, more preferably 0.2 μm or more, and further preferably 0.3 μm or more.
 本開示に係るカラーフィルタは、画素の幅が0.5μm~20.0μmであることが好ましい。下限は、1.0μm以上であることがより好ましく、2.0μm以上であることが特に好ましい。上限は、15.0μm以下であることがより好ましく、10.0μm以下であることが特に好ましい。また、画素(本開示に係る硬化物)のヤング率が、0.5GPa~20GPaであることが好ましく、2.5GPa~15GPaがより好ましい。 The color filter according to the present disclosure preferably has a pixel width of 0.5 μm to 20.0 μm. The lower limit is more preferably 1.0 μm or more, and particularly preferably 2.0 μm or more. The upper limit is more preferably 15.0 μm or less, and particularly preferably 10.0 μm or less. Further, the Young's modulus of the pixel (the cured product according to the present disclosure) is preferably 0.5 GPa to 20 GPa, more preferably 2.5 GPa to 15 GPa.
 本開示に係るカラーフィルタに含まれる各画素は高い平坦性を有することが好ましい。具体的には、画素の表面粗さRaは、100nm以下であることが好ましく、40nm以下であることがより好ましく、15nm以下であることが更に好ましい。下限は規定されないが、例えば0.1nm以上であることが好ましい。画素の表面粗さは、例えばVeeco社製のAFM(原子間力顕微鏡) Dimension3100を用いて測定することができる。また、画素上の水の接触角は適宜好ましい値に設定することができるが、典型的には、50°~110°の範囲である。接触角は、例えば接触角計CV-DT・A型(協和界面科学(株)製)を用いて測定できる。また、画素の体積抵抗値は高いことが好ましい。具体的には、画素の体積抵抗値は10Ω・cm以上であることが好ましく、1011Ω・cm以上であることがより好ましい。上限は規定されないが、例えば1014Ω・cm以下であることが好ましい。画素の体積抵抗値は、例えば超高抵抗計5410(アドバンテスト社製)を用いて測定することができる。 It is preferable that each pixel included in the color filter according to the present disclosure has high flatness. Specifically, the surface roughness Ra of the pixel is preferably 100 nm or less, more preferably 40 nm or less, and further preferably 15 nm or less. The lower limit is not specified, but it is preferably 0.1 nm or more, for example. The surface roughness of the pixels can be measured using, for example, AFM (Atomic Force Microscope) Measurement 3100 manufactured by Veeco. Further, the contact angle of water on the pixel can be appropriately set to a preferable value, but is typically in the range of 50 ° to 110 °. The contact angle can be measured using, for example, a contact angle meter CV-DT · A type (manufactured by Kyowa Interface Science Co., Ltd.). Further, it is preferable that the volume resistance value of the pixel is high. Specifically, it is preferred that the volume resistivity value of the pixel is 10 9 Ω · cm or more, and more preferably 10 11 Ω · cm or more. The upper limit is not specified, but it is preferably 10 14 Ω · cm or less, for example. The volume resistance value of the pixel can be measured using, for example, an ultra-high resistance meter 5410 (manufactured by Advantest).
 また、本開示に係るカラーフィルタは、本開示に係る硬化物の表面に保護層を設けてもよい。保護層を設けることで、酸素遮断化、低反射化、親疎水化、特定波長の光(紫外線、近赤外線等)の遮蔽等の種々の機能を付与することができる。保護層の厚さとしては、0.01μm~10μmが好ましく、0.1μm~5μmがより好ましい。保護層の形成方法としては、有機溶剤に溶解した樹脂組成物を塗布して形成する方法、化学気相蒸着法、成型した樹脂を接着材で貼りつける方法等が挙げられる。保護層を構成する成分としては、(メタ)アクリル樹脂、エン・チオール樹脂、ポリカーボネート樹脂、ポリエーテル樹脂、ポリアリレート樹脂、ポリスルホン樹脂、ポリエーテルスルホン樹脂、ポリフェニレン樹脂、ポリアリーレンエーテルホスフィンオキシド樹脂、ポリイミド樹脂、ポリアミドイミド樹脂、ポリオレフィン樹脂、環状オレフィン樹脂、ポリエステル樹脂、スチレン樹脂、ポリオール樹脂、ポリ塩化ビニリデン樹脂、メラミン樹脂、ウレタン樹脂、アラミド樹脂、ポリアミド樹脂、アルキド樹脂、エポキシ樹脂、変性シリコーン樹脂、フッ素樹脂、ポリカーボネート樹脂、ポリアクリロニトリル樹脂、セルロース樹脂、Si、C、W、Al、Mo、SiO、Siなどが挙げられ、これらの成分を二種以上含有しても良い例えば、酸素遮断化を目的とした保護層の場合、保護層はポリオール樹脂、SiO、Siを含むことが好ましい。また、低反射化を目的とした保護層の場合、保護層は(メタ)アクリル樹脂、フッ素樹脂を含むことが好ましい。 Further, the color filter according to the present disclosure may be provided with a protective layer on the surface of the cured product according to the present disclosure. By providing the protective layer, various functions such as oxygen blocking, low reflection, prohydrophobicity, and shielding of light of a specific wavelength (ultraviolet rays, near infrared rays, etc.) can be imparted. The thickness of the protective layer is preferably 0.01 μm to 10 μm, more preferably 0.1 μm to 5 μm. Examples of the method for forming the protective layer include a method of applying a resin composition dissolved in an organic solvent to form the protective layer, a chemical vapor deposition method, and a method of attaching the molded resin with an adhesive. The components constituting the protective layer include (meth) acrylic resin, en-thiol resin, polycarbonate resin, polyether resin, polyarylate resin, polysulfone resin, polyethersulfone resin, polyphenylene resin, polyarylene ether phosphine oxide resin, and polyimide. Resin, polyamideimide resin, polyolefin resin, cyclic olefin resin, polyester resin, styrene resin, polyol resin, polyvinylidene chloride resin, melamine resin, urethane resin, aramid resin, polyamide resin, alkyd resin, epoxy resin, modified silicone resin, fluorine Examples thereof include resins, polycarbonate resins, polyacrylonitrile resins, cellulose resins, Si, C, W, Al 2 O 3 , Mo, SiO 2 , Si 2 N 4, and the like, and two or more of these components may be contained, for example. In the case of a protective layer for the purpose of blocking oxygen, the protective layer preferably contains a polyol resin, SiO 2 , and Si 2 N 4 . Further, in the case of a protective layer for the purpose of reducing reflection, the protective layer preferably contains a (meth) acrylic resin or a fluororesin.
 樹脂組成物を塗布して保護層を形成する場合、樹脂組成物の塗布方法としては、スピンコート法、キャスト法、スクリーン印刷法、インクジェット法等の公知の方法を用いることができる。樹脂組成物に含まれる有機溶剤は、公知の有機溶剤(例えば、プロピレングリコール1-モノメチルエーテル2-アセテート、シクロペンタノン、乳酸エチル等)を用いることが出来る。保護層を化学気相蒸着法にて形成する場合、化学気相蒸着法としては、公知の化学気相蒸着法(熱化学気相蒸着法、プラズマ化学気相蒸着法、光化学気相蒸着法)を用いることができる When the resin composition is applied to form the protective layer, a known method such as a spin coating method, a casting method, a screen printing method, or an inkjet method can be used as the application method of the resin composition. As the organic solvent contained in the resin composition, a known organic solvent (for example, propylene glycol 1-monomethyl ether 2-acetate, cyclopentanone, ethyl lactate, etc.) can be used. When the protective layer is formed by a chemical vapor deposition method, the chemical vapor deposition method is a known chemical vapor deposition method (thermochemical vapor deposition method, plasma chemical vapor deposition method, photochemical vapor deposition method). Can be used
 保護層は、必要に応じて、有機・無機粒子、特定波長(例えば、紫外線、近赤外線等)の吸収剤、屈折率調整剤、酸化防止剤、密着剤、界面活性剤等の添加剤を含有しても良い。有機・無機粒子の例としては、例えば、高分子粒子(例えば、シリコーン樹脂粒子、ポリスチレン粒子、メラミン樹脂微子)、酸化チタン、酸化亜鉛、酸化ジルコニウム、酸化インジウム、酸化アルミニウム、窒化チタン、酸窒化チタン、フッ化マグネシウム、中空シリカ、シリカ、炭酸カルシウム、硫酸バリウム等が挙げられる。特定波長の吸収剤は公知の吸収剤を用いることができる。紫外線吸収剤及び近赤外線吸収剤としては、上述した素材が挙げられる。これらの添加剤の含有量は適宜調整できるが、保護層の全重量に対して0.1質量%~70質量%が好ましく、1質量%~60質量%がより好ましい。
 また、保護層としては、特開2017-151176号公報の段落0073~0092に記載の保護層を用いることもできる。
The protective layer contains organic / inorganic particles, an absorbent of a specific wavelength (for example, ultraviolet rays, near infrared rays, etc.), a refractive index adjuster, an antioxidant, an adhesive, a surfactant, and other additives, if necessary. You may. Examples of organic / inorganic particles include polymer particles (eg, silicone resin particles, polystyrene particles, melamine resin microparticles), titanium oxide, zinc oxide, zirconium oxide, indium oxide, aluminum oxide, titanium nitride, and oxynitride. Examples thereof include titanium, magnesium fluoride, hollow silica, silica, calcium carbonate, barium sulfate and the like. A known absorber can be used as the absorber having a specific wavelength. Examples of the ultraviolet absorber and the near-infrared absorber include the above-mentioned materials. The content of these additives can be adjusted as appropriate, but is preferably 0.1% by mass to 70% by mass, more preferably 1% by mass to 60% by mass, based on the total weight of the protective layer.
Further, as the protective layer, the protective layer described in paragraphs 0073 to 0092 of JP-A-2017-151176 can also be used.
<カラーフィルタの製造方法>
 本開示に係るカラーフィルタは、上述した本開示に係る着色感光性組成物を用いて支持体上に着色感光性組成物層を形成する工程と、フォトリソグラフィ法又はドライエッチング法により着色感光性組成物層に対してパターンを形成する工程と、を経て製造できる。
<Manufacturing method of color filter>
The color filter according to the present disclosure includes a step of forming a colored photosensitive composition layer on a support using the colored photosensitive composition according to the present disclosure described above, and a colored photosensitive composition by a photolithography method or a dry etching method. It can be manufactured through a step of forming a pattern on a material layer.
-フォトリソグラフィ法-
 フォトリソグラフィ法によるパターン形成は、本開示に係る着色感光性組成物を用いて支持体上に着色感光性組成物層を形成する工程と、着色感光性組成物層をパターン状に露光する工程と、着色感光性組成物層の未露光部を現像除去してパターン(画素)を形成する工程と、を含むことが好ましい。必要に応じて、着色感光性組成物層をベークする工程(プリベーク工程)、及び、現像されたパターン(画素)をベークする工程(ポストベーク工程)を設けてもよい。
-Photolithography-
Pattern formation by the photolithography method includes a step of forming a colored photosensitive composition layer on a support using the colored photosensitive composition according to the present disclosure, and a step of exposing the colored photosensitive composition layer in a pattern. It is preferable to include a step of developing and removing an unexposed portion of the colored photosensitive composition layer to form a pattern (pixel). If necessary, a step of baking the colored photosensitive composition layer (pre-baking step) and a step of baking the developed pattern (pixels) (post-baking step) may be provided.
 着色感光性組成物層を形成する工程では、本開示に係る着色感光性組成物を用いて、支持体上に着色感光性組成物層を形成する。支持体としては、特に限定は無く、用途に応じて適宜選択できる。例えば、ガラス基板、シリコン基板などが挙げられ、シリコン基板であることが好ましい。また、シリコン基板には、電荷結合素子(CCD)、相補型金属酸化膜半導体(CMOS)、透明導電膜などが形成されていてもよい。また、シリコン基板には、各画素を隔離するブラックマトリクスが形成されている場合もある。また、シリコン基板には、上部の層との密着性改良、物質の拡散防止或いは基板表面の平坦化のために下塗り層が設けられていてもよい。 In the step of forming the colored photosensitive composition layer, the colored photosensitive composition layer according to the present disclosure is used to form the colored photosensitive composition layer on the support. The support is not particularly limited and may be appropriately selected depending on the intended use. For example, a glass substrate, a silicon substrate, and the like can be mentioned, and a silicon substrate is preferable. Further, a charge coupling element (CCD), a complementary metal oxide semiconductor (CMOS), a transparent conductive film, or the like may be formed on the silicon substrate. In addition, a black matrix that separates each pixel may be formed on the silicon substrate. Further, the silicon substrate may be provided with an undercoat layer for improving the adhesion with the upper layer, preventing the diffusion of substances, or flattening the surface of the substrate.
 着色感光性組成物の塗布方法としては、公知の方法を用いることができる。例えば、滴下法(ドロップキャスト);スリットコート法;スプレー法;ロールコート法;回転塗布法(スピンコーティング);流延塗布法;スリットアンドスピン法;プリウェット法(たとえば、特開2009-145395号公報に記載されている方法);インクジェット(例えばオンデマンド方式、ピエゾ方式、サーマル方式)、ノズルジェット等の吐出系印刷、フレキソ印刷、スクリーン印刷、グラビア印刷、反転オフセット印刷、メタルマスク印刷法などの各種印刷法;金型等を用いた転写法;ナノインプリント法などが挙げられる。インクジェットでの適用方法としては、特に限定されず、例えば「広がる・使えるインクジェット-特許に見る無限の可能性-、2005年2月発行、住ベテクノリサーチ」に示された方法(特に115頁~133頁)や、特開2003-262716号公報、特開2003-185831号公報、特開2003-261827号公報、特開2012-126830号公報、特開2006-169325号公報などに記載の方法が挙げられる。また、着色感光性組成物の塗布方法については、国際公開第2017/030174号、国際公開第2017/018419号の記載を参酌でき、これらの内容は本明細書に組み込まれる。 A known method can be used as a method for applying the colored photosensitive composition. For example, a dropping method (drop casting); a slit coating method; a spray method; a roll coating method; a rotary coating method (spin coating); a casting coating method; a slit and spin method; a pre-wet method (for example, JP-A-2009-145395). Methods described in the publication); Inkjet (for example, on-demand method, piezo method, thermal method), ejection system printing such as nozzle jet, flexographic printing, screen printing, gravure printing, reverse offset printing, metal mask printing, etc. Various printing methods; transfer method using a mold or the like; nanoimprint method and the like can be mentioned. The method of application to an inkjet is not particularly limited, and for example, the method shown in "Expandable / Usable Inkjet-Infinite Possibilities Seen in Patents-, Published in February 2005, Sumi Betechno Research" (especially from page 115) 133), and the methods described in JP-A-2003-262716, JP-A-2003-185831, JP-A-2003-261827, JP-A-2012-126830, JP-A-2006-169325, and the like. Can be mentioned. Regarding the method of applying the colored photosensitive composition, the description of International Publication No. 2017/030174 and International Publication No. 2017/018419 can be referred to, and these contents are incorporated in the present specification.
 支持体上に形成した着色感光性組成物層は、乾燥(プリベーク)してもよい。低温プロセスにより膜を製造する場合は、プリベークを行わなくてもよい。プリベークを行う場合、プリベーク温度は、150℃以下が好ましく、120℃以下がより好ましく、110℃以下が更に好ましい。下限は、例えば、50℃以上とすることができ、80℃以上とすることもできる。プリベーク時間は、10秒~300秒が好ましく、40秒~250秒がより好ましく、80秒~220秒が更に好ましい。プリベークは、ホットプレート、オーブン等で行うことができる。 The colored photosensitive composition layer formed on the support may be dried (prebaked). When the film is produced by a low temperature process, prebaking may not be performed. When prebaking is performed, the prebaking temperature is preferably 150 ° C. or lower, more preferably 120 ° C. or lower, and even more preferably 110 ° C. or lower. The lower limit can be, for example, 50 ° C. or higher, or 80 ° C. or higher. The prebaking time is preferably 10 seconds to 300 seconds, more preferably 40 seconds to 250 seconds, and even more preferably 80 seconds to 220 seconds. Pre-baking can be performed on a hot plate, an oven, or the like.
 次に、着色感光性組成物層をパターン状に露光する(露光工程)。例えば、着色感光性組成物層に対し、ステッパー露光機やスキャナ露光機などを用いて、所定のマスクパターンを有するマスクを介して露光することで、パターン状に露光することができる。これにより、露光部分を硬化することができる。 Next, the colored photosensitive composition layer is exposed in a pattern (exposure step). For example, the colored photosensitive composition layer can be exposed in a pattern by exposing it through a mask having a predetermined mask pattern using a stepper exposure machine, a scanner exposure machine, or the like. As a result, the exposed portion can be cured.
 露光に際して用いることができる放射線(光)としては、g線、i線等が挙げられる。また、波長300nm以下の光(好ましくは波長180~300nmの光)を用いることもできる。波長300nm以下の光としては、KrF線(波長248nm)、ArF線(波長193nm)などが挙げられ、KrF線(波長248nm)が好ましい。また、300nm以上の長波な光源も利用できる。 Examples of radiation (light) that can be used for exposure include g-line and i-line. Further, light having a wavelength of 300 nm or less (preferably light having a wavelength of 180 to 300 nm) can also be used. Examples of the light having a wavelength of 300 nm or less include KrF line (wavelength 248 nm), ArF line (wavelength 193 nm), and KrF line (wavelength 248 nm) is preferable. Further, a long wave light source having a diameter of 300 nm or more can also be used.
 また、露光に際して、光を連続的に照射して露光してもよく、パルス的に照射して露光(パルス露光)してもよい。なお、パルス露光とは、短時間(例えば、ミリ秒レベル以下)のサイクルで光の照射と休止を繰り返して露光する方式の露光方法のことである。パルス露光の場合、パルス幅は、100ナノ秒(ns)以下であることが好ましく、50ナノ秒以下であることがより好ましく、30ナノ秒以下であることが更に好ましい。パルス幅の下限は、特に限定はないが、1フェムト秒(fs)以上とすることができ、10フェムト秒以上とすることもできる。周波数は、1kHz以上であることが好ましく、2kHz以上であることがより好ましく、4kHz以上であることが更に好ましい。周波数の上限は50kHz以下であることが好ましく、20kHz以下であることがより好ましく、10kHz以下であることが更に好ましい。最大瞬間照度は、5千万W/m以上であることが好ましく、1億W/m以上であることがより好ましく、2億W/m以上であることが更に好ましい。また、最大瞬間照度の上限は、10億W/m以下であることが好ましく、8億W/m以下であることがより好ましく、5億W/m以下であることが更に好ましい。なお、パルス幅とは、パルス周期における光が照射されている時間のことである。また、周波数とは、1秒あたりのパルス周期の回数のことである。また、最大瞬間照度とは、パルス周期における光が照射されている時間内での平均照度のことである。また、パルス周期とは、パルス露光における光の照射と休止を1サイクルとする周期のことである。 Further, at the time of exposure, light may be continuously irradiated for exposure, or pulsed irradiation may be performed for exposure (pulse exposure). The pulse exposure is an exposure method of a method in which light irradiation and pause are repeated in a short cycle (for example, millisecond level or less). In the case of pulse exposure, the pulse width is preferably 100 nanoseconds (ns) or less, more preferably 50 nanoseconds or less, and even more preferably 30 nanoseconds or less. The lower limit of the pulse width is not particularly limited, but may be 1 femtosecond (fs) or more, and may be 10 femtoseconds or more. The frequency is preferably 1 kHz or higher, more preferably 2 kHz or higher, and even more preferably 4 kHz or higher. The upper limit of the frequency is preferably 50 kHz or less, more preferably 20 kHz or less, and further preferably 10 kHz or less. Maximum instantaneous intensity is preferably 50,000,000 W / m 2 or more, more preferably 100 million W / m 2 or more, more preferably 200 million W / m 2 or more. The upper limit of the maximum instantaneous intensity is preferably 1000000000 W / m 2 or less, more preferably 800 million W / m 2 or less, and more preferably 500 million W / m 2 or less. The pulse width is the time during which light is irradiated in the pulse period. The frequency is the number of pulse cycles per second. Further, the maximum instantaneous illuminance is the average illuminance within the time during which the light is irradiated in the pulse period. The pulse cycle is a cycle in which light irradiation and pause in pulse exposure are one cycle.
 照射量(露光量)は、0.03J/cm~2.5J/cmが好ましく、0.05J/cm~1.0J/cmがより好ましい。露光時における酸素濃度については適宜選択することができ、大気下で行う他に、例えば酸素濃度が19体積%以下の低酸素雰囲気下(例えば、15体積%、5体積%、又は、実質的に無酸素)で露光してもよく、酸素濃度が21体積%を超える高酸素雰囲気下(例えば、22体積%、30体積%、又は、50体積%)で露光してもよい。また、露光照度は適宜設定することが可能であり、好ましくは1,000W/m~100,000W/m(例えば、5,000W/m、15,000W/m、又は、35,000W/m)の範囲から選択することができる。酸素濃度と露光照度は適宜条件を組み合わせてよく、例えば、酸素濃度10体積%で照度10,000W/m、酸素濃度35体積%で照度20,000W/mなどとすることができる。 Irradiation dose (exposure dose) is preferably 0.03J / cm 2 ~ 2.5J / cm 2, 0.05J / cm 2 ~ 1.0J / cm 2 is more preferable. The oxygen concentration at the time of exposure can be appropriately selected, and in addition to the operation in the atmosphere, for example, in a low oxygen atmosphere having an oxygen concentration of 19% by volume or less (for example, 15% by volume, 5% by volume, or substantially). It may be exposed in an oxygen-free environment), or may be exposed in a high oxygen atmosphere (for example, 22% by volume, 30% by volume, or 50% by volume) in which the oxygen concentration exceeds 21% by volume. The exposure illuminance can be set as appropriate, preferably 1,000 W / m 2 to 100,000 W / m 2 (for example, 5,000 W / m 2 , 15,000 W / m 2 , or 35, It can be selected from the range of 000 W / m 2 ). Oxygen concentration and exposure illuminance may appropriately combined conditions, for example, illuminance 10,000 W / m 2 at an oxygen concentration of 10 vol%, oxygen concentration of 35 vol% can be such illuminance 20,000W / m 2.
 次に、着色感光性組成物層の未露光部を現像除去してパターン(画素)を形成する。着色組成物層の未露光部の現像除去は、現像液を用いて行うことができる。これにより、露光工程における未露光部の着色感光性組成物層が現像液に溶出し、光硬化した部分だけが残る。現像液としては、下地の素子や回路などにダメージを起さない有機アルカリ現像液が好ましい。現像液の温度は、20℃~30℃が好ましい。現像時間は、20秒~180秒が好ましい。また、残渣除去性を向上するため、現像液を60秒ごとに振り切り、更に新たに現像液を供給する工程を数回繰り返してもよい。 Next, the unexposed portion of the colored photosensitive composition layer is developed and removed to form a pattern (pixel). Development and removal of the unexposed portion of the coloring composition layer can be performed using a developing solution. As a result, the colored photosensitive composition layer in the unexposed portion in the exposure step is eluted in the developing solution, and only the photocured portion remains. As the developing solution, an organic alkaline developing solution that does not cause damage to the underlying elements and circuits is preferable. The temperature of the developing solution is preferably 20 ° C. to 30 ° C. The development time is preferably 20 seconds to 180 seconds. Further, in order to improve the residue removability, the steps of shaking off the developing solution every 60 seconds and further supplying a new developing solution may be repeated several times.
 現像液は、アルカリ剤を純水で希釈したアルカリ性水溶液(アルカリ現像液)であることが好ましい。アルカリ剤としては、例えば、アンモニア、エチルアミン、ジエチルアミン、ジメチルエタノールアミン、ジグリコールアミン、ジエタノールアミン、ヒドロキシアミン、エチレンジアミン、テトラメチルアンモニウムヒドロキシド、テトラエチルアンモニウムヒドロキシド、テトラプロピルアンモニウムヒドロキシド、テトラブチルアンモニウムヒドロキシド、エチルトリメチルアンモニウムヒドロキシド、ベンジルトリメチルアンモニウムヒドロキシド、ジメチルビス(2-ヒドロキシエチル)アンモニウムヒドロキシド、コリン、ピロール、ピペリジン、1,8-ジアザビシクロ[5.4.0]-7-ウンデセンなどの有機アルカリ性化合物や、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、ケイ酸ナトリウム、メタケイ酸ナトリウムなどの無機アルカリ性化合物が挙げられる。アルカリ剤は、分子量が大きい化合物の方が環境面及び安全面で好ましい。アルカリ性水溶液のアルカリ剤の濃度は、0.001質量%~10質量%が好ましく、0.01質量%~1質量%がより好ましい。また、現像液は、さらに界面活性剤を含有していてもよい。界面活性剤としては、上述した界面活性剤が挙げられ、ノニオン系界面活性剤が好ましい。現像液は、移送や保管の便宜などの観点より、一旦濃縮液として製造し、使用時に必要な濃度に希釈してもよい。希釈倍率は特に限定されないが、例えば1.5倍~100倍の範囲に設定することができる。また、現像後純水で洗浄(リンス)することも好ましい。また、リンスは、現像後の着色感光性組成物層が形成された支持体を回転させつつ、現像後の着色感光性組成物層へリンス液を供給して行うことが好ましい。また、リンス液を吐出させるノズルを支持体の中心部から支持体の周縁部に移動させて行うことも好ましい。この際、ノズルの支持体中心部から周縁部へ移動させるにあたり、ノズルの移動速度を徐々に低下させながら移動させてもよい。このようにしてリンスを行うことで、リンスの面内ばらつきを抑制できる。また、ノズルを支持体中心部から周縁部へ移動させつつ、支持体の回転速度を徐々に低下させても同様の効果が得られる。 The developer is preferably an alkaline aqueous solution (alkaline developer) obtained by diluting an alkaline agent with pure water. Examples of the alkaline agent include ammonia, ethylamine, diethylamine, dimethylethanolamine, diglycolamine, diethanolamine, hydroxyamine, ethylenediamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, and tetrabutylammonium hydroxide. , Ethyltrimethylammonium hydroxide, benzyltrimethylammonium hydroxide, dimethylbis (2-hydroxyethyl) ammonium hydroxide, choline, pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene and other organic substances. Examples thereof include alkaline compounds and inorganic alkaline compounds such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium silicate and sodium metasilicate. As the alkaline agent, a compound having a large molecular weight is preferable in terms of environment and safety. The concentration of the alkaline agent in the alkaline aqueous solution is preferably 0.001% by mass to 10% by mass, more preferably 0.01% by mass to 1% by mass. In addition, the developer may further contain a surfactant. Examples of the surfactant include the above-mentioned surfactants, and nonionic surfactants are preferable. From the viewpoint of convenience of transfer and storage, the developer may be once produced as a concentrated solution and diluted to a concentration required for use. The dilution ratio is not particularly limited, but can be set in the range of, for example, 1.5 to 100 times. It is also preferable to wash (rinse) with pure water after development. Further, it is preferable that the rinsing is performed by supplying the rinsing liquid to the developed colored photosensitive composition layer while rotating the support on which the developed colored photosensitive composition layer is formed. It is also preferable to move the nozzle for discharging the rinse liquid from the central portion of the support to the peripheral edge of the support. At this time, when moving the nozzle from the central portion of the support to the peripheral portion, the nozzle may be moved while gradually reducing the moving speed. By rinsing in this way, in-plane variation of rinsing can be suppressed. Further, the same effect can be obtained by gradually reducing the rotation speed of the support while moving the nozzle from the central portion to the peripheral portion of the support.
 現像後、乾燥を施した後に追加露光処理や加熱処理(ポストベーク)を行うことが好ましい。追加露光処理やポストベークは、硬化を完全なものとするための現像後の硬化処理である。ポストベークにおける加熱温度は、100℃~240℃が好ましく、200℃~240℃がより好ましい。ポストベークは、現像後の膜を、上記条件になるようにホットプレートやコンベクションオーブン(熱風循環式乾燥機)、高周波加熱機等の加熱手段を用いて、連続式あるいはバッチ式で行うことができる。追加露光処理を行う場合、露光に用いられる光は、波長400nm以下の光であることが好ましい。また、追加露光処理は、韓国公開特許第20170122130号公報に記載の方法で行ってもよい。 It is preferable to perform additional exposure treatment or heat treatment (post-baking) after development and drying. Additional exposure treatment and post-baking are post-development curing treatments to complete the curing. The heating temperature in the post-baking is preferably 100 ° C. to 240 ° C., more preferably 200 ° C. to 240 ° C. Post-baking can be performed on the developed film in a continuous or batch manner by using a heating means such as a hot plate, a convection oven (hot air circulation dryer), or a high frequency heater so as to meet the above conditions. .. When the additional exposure process is performed, the light used for the exposure is preferably light having a wavelength of 400 nm or less. Further, the additional exposure process may be performed by the method described in Korean Patent Publication No. 201701122130.
-ドライエッチング法-
 ドライエッチング法でのパターン形成は、本開示に係る着色感光性組成物を用いて支持体上に着色感光性組成物層を形成し、この着色感光性組成物層の全体を硬化させて硬化物層を形成する工程と、この硬化物層上にフォトレジスト層を形成する工程と、フォトレジスト層をパターン状に露光したのち、現像してレジストパターンを形成する工程と、このレジストパターンをマスクとして硬化物層に対してエッチングガスを用いてドライエッチングする工程と、を含むことが好ましい。フォトレジスト層の形成においては、更にプリベーク処理を施すことが好ましい。特に、フォトレジスト層の形成プロセスとしては、露光後の加熱処理、現像後の加熱処理(ポストベーク処理)を実施する形態が望ましい。ドライエッチング法でのパターン形成については、特開2013-064993号公報の段落0010~0067の記載を参酌でき、この内容は本明細書に組み込まれる。
-Dry etching method-
In the pattern formation by the dry etching method, a colored photosensitive composition layer is formed on the support using the colored photosensitive composition according to the present disclosure, and the entire colored photosensitive composition layer is cured to obtain a cured product. A step of forming a layer, a step of forming a photoresist layer on the cured product layer, a step of exposing the photoresist layer in a pattern and then developing to form a resist pattern, and using this resist pattern as a mask. It is preferable to include a step of dry etching the cured product layer with an etching gas. In forming the photoresist layer, it is preferable to further perform a prebaking treatment. In particular, as a process for forming the photoresist layer, it is desirable to carry out a heat treatment after exposure and a heat treatment (post-baking treatment) after development. Regarding the pattern formation by the dry etching method, the description in paragraphs 0010 to 0067 of JP2013-064993A can be referred to, and this content is incorporated in the present specification.
(固体撮像素子)
 本開示に係る固体撮像素子は、本開示に係る硬化物を備え、本開示に係るカラーフィルターを有することが好ましい。本開示に係る固体撮像素子の構成としては、本開示に係る硬化物を備え、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
(Solid image sensor)
It is preferable that the solid-state image sensor according to the present disclosure includes the cured product according to the present disclosure and has the color filter according to the present disclosure. The configuration of the solid-state image sensor according to the present disclosure is not particularly limited as long as it includes the cured product according to the present disclosure and functions as a solid-state image sensor, and examples thereof include the following configurations.
 基板上に、固体撮像素子(CCD(電荷結合素子)イメージセンサ、CMOS(相補型金属酸化膜半導体)イメージセンサ等)の受光エリアを構成する複数のフォトダイオード及びポリシリコン等からなる転送電極を有し、フォトダイオード及び転送電極上にフォトダイオードの受光部のみ開口した遮光膜を有し、遮光膜上に遮光膜全面及びフォトダイオード受光部を覆うように形成された窒化シリコン等からなるデバイス保護膜を有し、デバイス保護膜上に、カラーフィルタを有する構成である。更に、デバイス保護膜上であってカラーフィルタの下(基板に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有する構成や、カラーフィルタ上に集光手段を有する構成等であってもよい。また、カラーフィルタは、隔壁により例えば格子状に仕切られた空間に、各着色画素が埋め込まれた構造を有していてもよい。この場合の隔壁は各着色画素に対して低屈折率であることが好ましい。このような構造を有する撮像装置の例としては、特開2012-227478号公報、特開2014-179577号公報、国際公開第2018/043654号に記載の装置が挙げられる。本開示に係る固体撮像素子を備えた撮像装置は、デジタルカメラや、撮像機能を有する電子機器(携帯電話等)の他、車載カメラや監視カメラ用としても用いることができる。
 また、本開示に係る固体撮像素子は、特開2019-211559号公報に記載されているように、固体撮像素子の構造内に紫外線吸収層(UVカットフィルタ)を設けることにより、カラーフィルタの耐光性を改良してもよい。
On the substrate, there are a plurality of photodiodes constituting the light receiving area of a solid-state image sensor (CCD (charge coupling element) image sensor, CMOS (complementary metal oxide semiconductor) image sensor, etc.) and a transfer electrode made of polysilicon or the like. A device protective film made of silicon nitride or the like formed on the photodiode and the transfer electrode so as to have a light-shielding film in which only the light-receiving part of the photodiode is opened, and to cover the entire surface of the light-shielding film and the light-receiving part of the photodiode. The configuration has a color filter on the device protective film. Further, a configuration having a condensing means (for example, a microlens or the like; the same applies hereinafter) on the device protective film under the color filter (near the substrate), a configuration having a condensing means on the color filter, and the like There may be. Further, the color filter may have a structure in which each colored pixel is embedded in a space partitioned by a partition wall, for example, in a grid pattern. In this case, the partition wall preferably has a low refractive index for each colored pixel. Examples of the imaging device having such a structure include the devices described in JP-A-2012-227478, JP-A-2014-179757, and International Publication No. 2018/043654. The image pickup device provided with the solid-state image pickup device according to the present disclosure can be used not only for digital cameras and electronic devices having an image pickup function (mobile phones, etc.), but also for in-vehicle cameras and surveillance cameras.
Further, as described in Japanese Patent Application Laid-Open No. 2019-21159, the solid-state image sensor according to the present disclosure is provided with an ultraviolet absorbing layer (UV cut filter) in the structure of the solid-state image sensor to withstand the light of a color filter. The sex may be improved.
(画像表示装置)
 本開示に係る画像表示装置は、本開示に係る硬化物を備え、本開示に係るカラーフィルターを有することが好ましい。画像表示装置としては、液晶表示装置や有機エレクトロルミネッセンス表示装置などが挙げられる。画像表示装置の定義や各画像表示装置の詳細については、例えば「電子ディスプレイデバイス(佐々木昭夫著、(株)工業調査会、1990年発行)」、「ディスプレイデバイス(伊吹順章著、産業図書(株)平成元年発行)」などに記載されている。また、液晶表示装置については、例えば「次世代液晶ディスプレイ技術(内田龍男編集、(株)工業調査会、1994年発行)」に記載されている。液晶表示装置としては、特に制限はなく、例えば、上記の「次世代液晶ディスプレイ技術」に記載されている色々な方式の液晶表示装置が挙げられる。
(Image display device)
It is preferable that the image display device according to the present disclosure includes the cured product according to the present disclosure and has the color filter according to the present disclosure. Examples of the image display device include a liquid crystal display device and an organic electroluminescence display device. For details on the definition of image display devices and details of each image display device, see, for example, "Electronic Display Device (Akio Sasaki, Kogyo Chosakai Co., Ltd., published in 1990)", "Display Device (by Junaki Ibuki, Industrial Books) Co., Ltd. (issued in 1989) ”. Further, the liquid crystal display device is described in, for example, "Next Generation Liquid Crystal Display Technology (edited by Tatsuo Uchida, Kogyo Chosakai Co., Ltd., published in 1994)". The liquid crystal display device is not particularly limited, and examples thereof include various types of liquid crystal display devices described in the above-mentioned "next-generation liquid crystal display technology".
 以下、実施例により本開示を詳細に説明するが、本開示はこれらに限定されるものではない。
 本実施例において、「%」、「部」とは、特に断りのない限り、それぞれ「質量%」、「質量部」を意味する。なお、高分子化合物において、特別に規定したもの以外は、分子量は重量平均分子量(Mw)であり、構成単位の比率はモル百分率である。
 重量平均分子量(Mw)は、ゲル浸透クロマトグラフィー(GPC)法によるポリスチレン換算値として測定した値である。
Hereinafter, the present disclosure will be described in detail with reference to Examples, but the present disclosure is not limited thereto.
In this embodiment, "%" and "parts" mean "mass%" and "parts by mass", respectively, unless otherwise specified. In the polymer compound, the molecular weight is the weight average molecular weight (Mw), and the ratio of the constituent units is the molar percentage, except for those specified specifically.
The weight average molecular weight (Mw) is a value measured as a polystyrene-equivalent value by a gel permeation chromatography (GPC) method.
<A-18の合成方法>
-モノマー合成工程-
 3つ口フラスコ中、ジメトキシフェノール12.4gとジブロモエタノール 13.5gをアセトン100mLに溶解した。炭酸カリウム27.6g加え、4時間60℃で加熱還流した。得られた反応液を酢酸エチルで抽出し水洗したのち有機層を硫酸マグネシウムで乾燥した。溶媒を溜去し2-(4-メトキシフェノキシ)エタン-1-オールを14.9g(収率89%)で得た。
<Synthesis method of A-18>
-Monomer synthesis process-
In a three-necked flask, 12.4 g of dimethoxyphenol and 13.5 g of dibromoethanol were dissolved in 100 mL of acetone. 27.6 g of potassium carbonate was added, and the mixture was heated under reflux at 60 ° C. for 4 hours. The obtained reaction solution was extracted with ethyl acetate, washed with water, and then the organic layer was dried over magnesium sulfate. The solvent was distilled off to obtain 14.9 g (yield 89%) of 2- (4-methoxyphenoxy) ethane-1-ol.
 3つ口フラスコ中、2-(4-メトキシフェノキシ)エタン-1-オール8.4gをメタノール100mLに溶解し0℃に冷却した。これに一塩化ヨウ素40gを加えて70℃で4時間撹拌した。再び0℃に冷却して析出した固体をろ取した。メタノールでリスラリー精製して2-(2,5-ジヨード-4-メトキシフェノキシ)エタン-1-オール 15.2g(収率74%)を得た。 In a three-necked flask, 8.4 g of 2- (4-methoxyphenoxy) ethane-1-ol was dissolved in 100 mL of methanol and cooled to 0 ° C. To this, 40 g of iodine monochloride was added, and the mixture was stirred at 70 ° C. for 4 hours. The solid was cooled to 0 ° C. again and the precipitated solid was collected by filtration. Reslurry purification with methanol gave 15.2 g (yield 74%) of 2- (2,5-diiodo-4-methoxyphenoxy) ethane-1-ol.
 3つ口フラスコ中に2-(2,5-ジヨード-4-メトキシフェノキシ)エタン-1-オール5.3g加えテトラヒドロフランに溶解した。フラスコ中を窒素置換したのちナトリウムメトキシド13.5gとジフェニルホスフィノフェロセン0.5gと酢酸パラジウム0.2gを加えた。その後室温(25℃、以下同様。)でマロンニトリル17.3gを30分かけて滴下した。滴下終了後65℃で8時間加熱撹拌したのち、反応液を0℃に冷却した1N(=1mol/L)塩酸水溶液に滴下し晶析させた。得られた固体をろ取して2,2’-(2-(2-ヒドロキシエトキシ)-5-メトキシ-1,4-フェニレン)ジマロノニトリルを4.4g(収率60%)で得た。 5.3 g of 2- (2,5-diiodo-4-methoxyphenoxy) ethane-1-ol was added to a three-necked flask and dissolved in tetrahydrofuran. After replacing the inside of the flask with nitrogen, 13.5 g of sodium methoxide, 0.5 g of diphenylphosphinopherocene and 0.2 g of palladium acetate were added. Then, 17.3 g of marron nitrile was added dropwise at room temperature (25 ° C., the same applies hereinafter) over 30 minutes. After completion of the dropping, the mixture was heated and stirred at 65 ° C. for 8 hours, and then the reaction solution was dropped into a 1N (= 1 mol / L) hydrochloric acid aqueous solution cooled to 0 ° C. for crystallization. The obtained solid was collected by filtration to give 4.4 g (yield 60%) of 2,2'-(2- (2-hydroxyethoxy) -5-methoxy-1,4-phenylene) dimarononitrile.
 3つ口フラスコに2,2’-(2-(2-ヒドロキシエトキシ)-5-メトキシ-1,4-フェニレン)ジマロノニトリル2.2gを仕込み、アセトニトリル50mLと純水5mLに分散させた。これを0℃に冷却したのち臭素2.0g加えて室温で4時間反応させた。得られた固体をろ取し純水で洗浄して2,2’-(2-(2-ヒドロキシエトキシ)-5-メトキシシクロヘキサ-2,5-ジエン-1,4-ジイリデン)ジマロノニトリルを赤色固体として2.0g得た。(収率98%) 2.2 g of 2,2'-(2- (2-hydroxyethoxy) -5-methoxy-1,4-phenylene) dimarononitrile was charged into a three-necked flask and dispersed in 50 mL of acetonitrile and 5 mL of pure water. This was cooled to 0 ° C., 2.0 g of bromine was added, and the mixture was reacted at room temperature for 4 hours. The obtained solid is collected by filtration and washed with pure water to turn 2,2'-(2- (2-hydroxyethoxy) -5-methoxycyclohexa-2,5-diene-1,4-diylidene) dimarononitrile in red. 2.0 g was obtained as a solid. (Yield 98%)
 3つ口フラスコに2,2’-(2-(2-ヒドロキシエトキシ)-5-メトキシシクロヘキサ-2,5-ジエン-1,4-ジイリデン)ジマロノニトリル1.0gをN,N’-ジメチルアセトアミドに溶解させピリジン 0.5g加えた。フラスコ中を窒素置換したのちこれを0℃に冷却してアクリル酸クロリド0.5g加えて室温で1時間撹拌した。反応液を0℃に冷却した純水で晶析させ、得られた粉末をジイソプロピルエーテルで再結晶させて2-((3,6-ビス(ジシアノメチレン)-4-メトキシシクロヘキサ-1,4-ジエン-1-イル)オキシ)エチルアクリレート(A-18)を赤色固体0.56g(収率68%)として得た。 1.0 g of 2,2'-(2- (2-hydroxyethoxy) -5-methoxycyclohexa-2,5-diene-1,4-diylidene) dimarononitrile in a three-necked flask is N, N'-dimethylacetamide. 0.5 g of pyridine was added. After replacing the inside of the flask with nitrogen, the flask was cooled to 0 ° C., 0.5 g of acrylic acid chloride was added, and the mixture was stirred at room temperature for 1 hour. The reaction mixture was crystallized from pure water cooled to 0 ° C., and the obtained powder was recrystallized from diisopropyl ether to 2-((3,6-bis (dicyanomethylene) -4-methoxycyclohexa-1,4. -Diene-1-yl) oxy) ethyl acrylate (A-18) was obtained as 0.56 g (yield 68%) of a red solid.
<A-1~A-17及びA-19~A-39の合成方法>
 A-1~A-17及びA-19~A-39については、上述のA-18と対応する成分を変更する以外の条件は同様にして合成した。
<Synthesis method of A-1 to A-17 and A-19 to A-39>
For A-1 to A-17 and A-19 to A-39, the same conditions were used except for changing the components corresponding to A-18 described above.
<酸化剤のHOMO-LUMO>
 下記方法に従って、酸化剤のHOMO-LUMOを測定し、下記評価基準に従って評価した。評価結果は表1の欄に記載した。
 各化合物のHOMOは次のようにして測定した。
 5mgの各化合物を大気中光電子分光装置(AC-3、理研計器(株)製)によりイオン化ポテンシャルを測定し、その値をHOMOとした。
 20mgの各化合物をトルエン200mLに溶解させ、この溶液2mLにトルエンを加え、50mLに調製した。この溶液の吸光度について、Cary5000 UV-Vis-NIR分光光度計(アジレント・テクノロジー社製)を用いて波長200nm~800nmの範囲まで測定し、波長400nm~700nmにおける吸収端を算出し、その値をS0-S1遷移エネルギーギャップ(HOMO-LUMOエネルギー差:ΔE)とした。LUMOは下記式により求めた。
   LUMO=HOMO+ΔE
<Oxidizing agent HOMO-LUMO>
The oxidizing agent HOMO-LUMO was measured according to the following method and evaluated according to the following evaluation criteria. The evaluation results are shown in the column of Table 1.
The HOMO of each compound was measured as follows.
The ionization potential of each 5 mg of each compound was measured by an atmospheric photoelectron spectrometer (AC-3, manufactured by RIKEN Keiki Co., Ltd.), and the value was taken as HOMO.
Each 20 mg compound was dissolved in 200 mL of toluene, and toluene was added to 2 mL of this solution to prepare 50 mL. The absorbance of this solution was measured using a Cary5000 UV-Vis-NIR spectrophotometer (manufactured by Azilent Technology) in the wavelength range of 200 nm to 800 nm, the absorption edge at a wavelength of 400 nm to 700 nm was calculated, and the value was S0. The −S1 transition energy gap (HOMO-LUMO energy difference: ΔE) was used. LUMO was calculated by the following formula.
LUMO = HOMO + ΔE
Figure JPOXMLDOC01-appb-T000028
Figure JPOXMLDOC01-appb-T000028
<緑色分散液G-1の調製>
 顔料(G顔料(緑色顔料PG36):8.29質量部、Y顔料(黄色顔料PY185):2.07質量部)と、下記顔料誘導体S-1:0.5質量部と、下記分散剤P-1 30質量%PGMEA(プロピレングリコールモノメチルエーテルアセテート)溶液:30質量部と、71.92質量部のPGMEAとを混合したのち、直径0.3mmのジルコニアビーズ230質量部を加えて、ペイントシェーカーを用いて5時間分散処理を行い、ビーズをろ過で分離して緑色(Green)分散液G-1を製造した。
<Preparation of green dispersion G-1>
Pigments (G pigment (green pigment PG36): 8.29 parts by mass, Y pigment (yellow pigment PY185): 2.07 parts by mass), the following pigment derivative S-1: 0.5 parts by mass, and the following dispersant P -1 30% by mass PGMEA (propylene glycol monomethyl ether acetate) solution: After mixing 30 parts by mass and 71.92 parts by mass of PGMEA, add 230 parts by mass of zirconia beads having a diameter of 0.3 mm to make a paint shaker. The mixture was subjected to a dispersion treatment for 5 hours, and the beads were separated by filtration to produce a green dispersion liquid G-1.
<緑色分散液G-2~G-12の調製>
 表2に記載の成分及び含有量に変更した以外は、緑色分散液G-1の調製と同様にして、緑色分散液G-2~G-12をそれぞれ製造した。
 表2中、「PG36 PG58 (50/50)」等の記載は、PG36及びPG58を質量比で50:50となるように使用したことを意味している。
<Preparation of green dispersions G-2 to G-12>
Green dispersions G-2 to G-12 were produced in the same manner as in the preparation of the green dispersion G-1, except that the components and contents shown in Table 2 were changed.
In Table 2, the description such as "PG36 PG58 (50/50)" means that PG36 and PG58 were used so as to have a mass ratio of 50:50.
Figure JPOXMLDOC01-appb-T000029
Figure JPOXMLDOC01-appb-T000029
 以下に、表2に記載の略称の詳細を示す。 The details of the abbreviations shown in Table 2 are shown below.
<緑色顔料(G顔料)>
 PG36:C.I.Pigment Green 36
 PG58:C.I.Pigment Green 58
 PG7:C.I.Pigment Green 7
<Green pigment (G pigment)>
PG36: C.I. I. Pigment Green 36
PG58: C.I. I. Pigment Green 58
PG7: C.I. I. Pigment Green 7
<黄色顔料(Y顔料)>
 PY150:C.I.Pigment Yellow 150
 PY185:C.I.Pigment Yellow 185
<Yellow pigment (Y pigment)>
PY150: C.I. I. Pigment Yellow 150
PY185: C.I. I. Pigment Yellow 185
 顔料誘導体S-1~S-3:下記化合物 Pigment derivatives S-1 to S-3: The following compounds
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000031
 分散剤P-1:下記構造の樹脂の30質量%プロピレングリコールモノメチルエーテルアクリレート(PGMEA)溶液。主鎖に付記した数値はモル比であり、側鎖に付記した数値は繰り返し単位の数である。Mw:20,000。 Dispersant P-1: A 30 mass% propylene glycol monomethyl ether acrylate (PGMEA) solution of a resin having the following structure. The numerical value added to the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units. Mw: 20,000.
Figure JPOXMLDOC01-appb-C000032
Figure JPOXMLDOC01-appb-C000032
 分散剤P-2:下記構造の樹脂の30質量%PGMEA溶液。主鎖に付記した数値はモル比であり、側鎖に付記した数値は繰り返し単位の数である。Mw:28,000。式中、r=15、s=63、t=5、u=17、n=9である。 Dispersant P-2: A 30% by mass PGMEA solution of a resin having the following structure. The numerical value added to the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units. Mw: 28,000. In the formula, r = 15, s = 63, t = 5, u = 17, n = 9.
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000033
 分散剤P-3:下記構造の樹脂の30質量%PGMEA溶液。主鎖に付記した数値はモル比であり、側鎖に付記した数値は繰り返し単位の数である。Mw:22,000。 Dispersant P-3: A 30% by mass PGMEA solution of a resin having the following structure. The numerical value added to the main chain is the molar ratio, and the numerical value added to the side chain is the number of repeating units. Mw: 22,000.
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000034
<緑色分散液G-13の調製>
 PGMEA71.92質量部の代わりにプロピレングリコールモノメチルエーテル(PGME)71.92質量部を用いたこと以外は、緑色分散液G-1の調製と同様にして、緑色分散液G-13を作製した。
<Preparation of green dispersion G-13>
A green dispersion G-13 was prepared in the same manner as in the preparation of the green dispersion G-1, except that 71.92 parts by mass of propylene glycol monomethyl ether (PGME) was used instead of 71.92 parts by mass of PGMEA.
<緑色分散液G-14の調製>
 PGMEA71.92質量部の代わりにシクロヘキサノン(ANON)71.92質量部を用いたこと以外は、緑色分散液G-1の調製と同様にして、緑色分散液G-14を作製した。
<Preparation of green dispersion G-14>
A green dispersion G-14 was prepared in the same manner as in the preparation of the green dispersion G-1, except that 71.92 parts by mass of cyclohexanone (ANON) was used instead of 71.92 parts by mass of PGMEA.
<赤色分散液R-1の調製>
 C.I.Pigment Red 254を9.6質量部、C.I.Pigment Yellow 139を4.3質量部、分散剤(DISPERBYK-161、BYKChemie社製)を6.8質量部、PGMEAを79.3質量部の量で配合した混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間更に混合及び分散した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cmの圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、赤色(Red)分散液R-1を得た。
<Preparation of red dispersion R-1>
C. I. Pigment Red 254 at 9.6 parts by mass, C.I. I. A mixed solution containing 4.3 parts by mass of Pigment Yellow 139, 6.8 parts by mass of a dispersant (DISPERBYK-161, manufactured by BYK Chemie), and 79.3 parts by mass of PGMEA was added to a bead mill (zirconia beads 0. 3 mm diameter) was further mixed and dispersed for 3 hours. After that, a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a red (Red) dispersion liquid R-1.
<青色分散液B-1の調製>
 C.I.Pigment Blue 15:6を9.7質量部、C.I.Pigment Violet 23を2.4質量部、分散剤(Disperbyk-161、BYKChemie社製)を5.5質量部、PGMEAを82.4質量部の量で配合した混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間更に混合及び分散した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cmの圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、青色(Blue)分散液B-1を得た。
<Preparation of blue dispersion B-1>
C. I. Pigment Blue 15: 6 at 9.7 parts by mass, C.I. I. A bead mill (zirconia beads 0. 3 mm diameter) was further mixed and dispersed for 3 hours. After that, a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a blue dispersion liquid B-1.
(実施例1~58、及び、比較例1~3)
<着色感光性組成物の調製>
 以下の原料を混合して着色感光性組成物を製造した。
・表3又は表4に記載の化合物A又は比較化合物:表3又は表4に記載の量
・表3又は表4に記載の分散液:39.4質量部
・樹脂D1:0.58質量部。下記構造の樹脂。主鎖に付記した数値はモル比である。Mw=11,000。
(Examples 1 to 58 and Comparative Examples 1 to 3)
<Preparation of colored photosensitive composition>
The following raw materials were mixed to produce a colored photosensitive composition.
-Compound A or comparative compound shown in Table 3 or Table 4: Amount shown in Table 3 or Table 4-Dispersion solution shown in Table 3 or Table 4: 39.4 parts by mass-Resin D1: 0.58 parts by mass .. Resin with the following structure. The numerical value added to the main chain is the molar ratio. Mw = 11,000.
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000035
・重合性化合物E1(KAYARAD DPHA、日本化薬(株)製):0.54質量部
・表3又は表4に記載の光重合開始剤:表3又は表4に記載の量
・界面活性剤H1:4.17質量部。下記混合物(Mw=14,000)の1質量%PGMEA溶液。下記式中、構成単位の割合を示す%は、モル%である。また、a、b及びcはそれぞれ、各構成単位の繰り返し数を表す。
-Polymerizable compound E1 (KAYARAD DPHA, manufactured by Nippon Kayaku Co., Ltd.): 0.54 parts by mass-Photopolymerization initiator shown in Table 3 or Table 4: Amount shown in Table 3 or Table-Surfactant H1: 4.17 parts by mass. A 1% by mass PGMEA solution of the following mixture (Mw = 14,000). In the following formula,% indicating the ratio of the constituent units is mol%. Further, a, b and c each represent the number of repetitions of each structural unit.
Figure JPOXMLDOC01-appb-C000036
Figure JPOXMLDOC01-appb-C000036
・p-メトキシフェノール:0.0006質量部
・PGMEA:7.66質量部
-P-methoxyphenol: 0.0006 parts by mass-PGMEA: 7.66 parts by mass
・重合性化合物E1:KAYARAD DPHA(ジペンタエリスリトールヘキサアクリレートとジペンタエリスリトールペンタアクリレートとの混合物、日本化薬(株)製) -Polymerizable compound E1: KAYARAD DPHA (mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate, manufactured by Nippon Kayaku Co., Ltd.)
<硬化膜の形成>
 得られた着色感光性組成物を、ポストベーク後の膜厚が0.6μmとなるようにガラス基板上にスピンコートし、100℃、120秒間ホットプレートで乾燥した後、更に、200℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行い、硬化膜を形成した。
 得られた着色感光性組成物、又は、硬化膜を用い、以下の評価を行った。評価結果を表3又は表4に示す。
<Formation of cured film>
The obtained colored photosensitive composition was spin-coated on a glass substrate so that the film thickness after post-baking was 0.6 μm, dried on a hot plate at 100 ° C. for 120 seconds, and then hot at 200 ° C. A cured film was formed by heat treatment (post-baking) for 300 seconds using a plate.
The following evaluation was performed using the obtained colored photosensitive composition or a cured film. The evaluation results are shown in Table 3 or Table 4.
<重量減少抑制性(膜減り抑制性)の評価>
 上記硬化膜の形成における露光後の膜厚とポストベーク後の膜厚とを触針式の膜厚計で測定し、その差から膜厚変化量を以下の評価基準に従い評価した。膜厚変化量が小さいほど、膜減りが抑制されているといえ、評価基準A、B又はCであることが好ましい。
-評価基準-
  A:膜厚変化量が1%未満であった。
  B:膜厚変化量が1%以上2%未満であった。
  C:膜厚変化量が2%以上5%未満であった。
  D:膜厚変化量が5%以上10%未満であった。
  E:膜厚変化量が10%以上であった。
<Evaluation of weight loss inhibitory property (membrane loss inhibitory property)>
The film thickness after exposure and the film thickness after post-baking in the formation of the cured film were measured with a stylus type film thickness meter, and the amount of change in film thickness was evaluated according to the following evaluation criteria from the difference. It can be said that the smaller the amount of change in film thickness, the more the film loss is suppressed, and the evaluation criteria A, B or C are preferable.
-Evaluation criteria-
A: The amount of change in film thickness was less than 1%.
B: The amount of change in film thickness was 1% or more and less than 2%.
C: The amount of change in film thickness was 2% or more and less than 5%.
D: The amount of change in film thickness was 5% or more and less than 10%.
E: The amount of change in film thickness was 10% or more.
<パターン直線性の評価>
 各実施例又は比較例において、着色感光性組成物をスピンコート法により塗布し、その後、ホットプレートを用いて100℃で2分間加熱して、膜厚0.5μmの組成物層を得た。この組成物層に対して、i線ステッパーFPA-3000i5+(キヤノン(株)製)を使用し、300μmのラインアンドスペースパターンが形成されたフォトマスクを介し、i線を、100mJ/cmの露光量で照射した。露光後の組成物層に対し、テトラメチルアンモニウムハイドロオキサイドの0.3質量%水溶液を用い、23℃で60秒間パドル現像を行った。その後、スピンシャワーにて水を用いてリンスを行い、更に純水にて水洗いを行った。その後、水滴を高圧のエアーで飛ばし、シリコンウエハを自然乾燥させたのち、ホットプレートを用いて220℃で300秒間ポストベークを行い、パターンを形成した。
 光学顕微鏡MT-3600LW(FLOVEL社製)を使用して、得られたパターンの線幅を255点測定した。上記255個のデータの3σ(標準偏差の3倍値)を算出し、以下の評価基準で評価した。評価基準A、B又はCであることが好ましい。
-評価基準-
  A:線形300μmの線幅の3σが1μm未満であった。
  B:線形300μmの線幅の3σが1μm以上2μm未満であった。
  C:線形300μmの線幅の3σが2μm以上5μm未満であった。
  D:線形300μmの線幅の3σが5μm以上10μm未満であった。
  E:線形300μmの線幅の3σが10μm以上であった。
<Evaluation of pattern linearity>
In each Example or Comparative Example, the colored photosensitive composition was applied by a spin coating method, and then heated at 100 ° C. for 2 minutes using a hot plate to obtain a composition layer having a film thickness of 0.5 μm. An i-line stepper FPA-3000i5 + (manufactured by Canon Inc.) was used for this composition layer, and the i-line was exposed to 100 mJ / cm 2 through a photomask in which a 300 μm line and space pattern was formed. Irradiated in quantity. The composition layer after exposure was paddle-developed at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide. Then, it was rinsed with water in a spin shower, and further washed with pure water. Then, the water droplets were blown off with high-pressure air, the silicon wafer was naturally dried, and then post-baked at 220 ° C. for 300 seconds using a hot plate to form a pattern.
Using an optical microscope MT-3600LW (manufactured by FLOVEL), the line width of the obtained pattern was measured at 255 points. 3σ (three times the standard deviation) of the above 255 data was calculated and evaluated according to the following evaluation criteria. Evaluation criteria A, B or C are preferable.
-Evaluation criteria-
A: The linear width of 300 μm, 3σ, was less than 1 μm.
B: The linear width of 300 μm, 3σ, was 1 μm or more and less than 2 μm.
C: The linear width of 300 μm, 3σ, was 2 μm or more and less than 5 μm.
D: The linear width of 300 μm, 3σ, was 5 μm or more and less than 10 μm.
E: The linear width of 300 μm, 3σ, was 10 μm or more.
<感度>
 シリコンウエハ上にCT-4000(富士フイルムエレクトロニクスマテリアルズ(株)製)を膜厚が0.1μmとなるようにスピンコート法で塗布し、ホットプレートを用いて220℃で1時間加熱して下地層を形成した。この下地層付きのシリコンウエハ上に得られた着色感光性組成物をスピンコート法で塗布し、その後、ホットプレートを用いて100℃で2分間加熱して、膜厚0.5μmの組成物層を得た。この組成物層に対して、i線ステッパーFPA-3000i5+(キヤノン(株)製)を使用し、一辺0.6μmの正方ピクセルがそれぞれ基板上の4mm×3mmの領域に配列されたマスクパターンを介し、365nmの波長の光を照射し、露光量50mJ/cm~2,000mJ/cmにて50mJ/cm間隔で露光を行った。露光後の組成物層に対し、テトラメチルアンモニウムハイドロオキサイドの0.3質量%水溶液を用い、23℃で60秒間パドル現像を行った。その後、スピンシャワーにて水を用いてリンスを行い、更に純水にて水洗いを行った。その後、水滴を高圧のエアーで飛ばし、シリコンウエハを自然乾燥させたのち、ホットプレートを用いて220℃で300秒間ポストベークを行い、パターンを形成した。
 上記着色パターン(0.6μm角の正方形ピクセルパターン)を解像する最適露光量(mJ/cm)を決定し、これを感度とした。評価基準A、B又はCであることが好ましい。
-評価基準-
  A:上記最適露光量が50mJ/cm未満であった。
  B:上記最適露光量が50mJ/cm以上100mJ/cm未満であった。
  C:上記最適露光量が100mJ/cm以上200mJ/cm未満であった。
  D:上記最適露光量が200mJ/cm以上500mJ/cm未満であった。
  E:上記最適露光量が500mJ/cm以上であった。
<Sensitivity>
CT-4000 (manufactured by Fujifilm Electronics Materials Co., Ltd.) is applied on a silicon wafer by the spin coating method so that the film thickness is 0.1 μm, and heated at 220 ° C. for 1 hour using a hot plate. Formed a stratum. The colored photosensitive composition obtained on the silicon wafer with the base layer is applied by a spin coating method, and then heated at 100 ° C. for 2 minutes using a hot plate to obtain a composition layer having a film thickness of 0.5 μm. Got For this composition layer, an i-line stepper FPA-3000i5 + (manufactured by Canon Inc.) was used, and square pixels having a side of 0.6 μm were arranged in a 4 mm × 3 mm region on the substrate via a mask pattern. , irradiated with light of a wavelength of 365 nm, was exposed at 50 mJ / cm 2 intervals at exposure 50mJ / cm 2 ~ 2,000mJ / cm 2. The composition layer after exposure was paddle-developed at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide. Then, it was rinsed with water in a spin shower, and further washed with pure water. Then, the water droplets were blown off with high-pressure air, the silicon wafer was naturally dried, and then post-baked at 220 ° C. for 300 seconds using a hot plate to form a pattern.
The optimum exposure amount (mJ / cm 2 ) for resolving the coloring pattern (0.6 μm square pixel pattern) was determined, and this was used as the sensitivity. Evaluation criteria A, B or C are preferable.
-Evaluation criteria-
A: The optimum exposure amount was less than 50 mJ / cm 2 .
B: The optimum exposure amount was 50 mJ / cm 2 or more and less than 100 mJ / cm 2 .
C: The optimum exposure amount was 100 mJ / cm 2 or more and less than 200 mJ / cm 2 .
D: The optimum exposure amount was 200 mJ / cm 2 or more and less than 500 mJ / cm 2 .
E: The optimum exposure amount was 500 mJ / cm 2 or more.
(実施例59)
 実施例1において重合性化合物E1(DPHA)の代わりに重合性化合物E2(KAYARAD TMPTA、日本化薬(株)製、トリメチロールプロパントリアクリレート)を用いたこと以外は、実施例1と同様にして、着色感光性組成物及び硬化膜を作製した。また、実施例1と同様に評価した。
(Example 59)
Same as in Example 1 except that the polymerizable compound E2 (KAYARAD TMPTA, manufactured by Nippon Kayaku Co., Ltd., trimethylolpropane triacrylate) was used instead of the polymerizable compound E1 (DPHA) in Example 1. , A colored photosensitive composition and a cured film were prepared. Moreover, it was evaluated in the same manner as in Example 1.
(実施例60)
 実施例1において重合性化合物E1(DPHA)0.54質量部の代わりに重合性化合物E1(DPHA)0.32重量部を用いたこと以外は、実施例1と同様にして、着色感光性組成物及び硬化膜を作製した。また、実施例1と同様に評価した。
(Example 60)
Colored photosensitive composition in the same manner as in Example 1 except that 0.32 parts by weight of the polymerizable compound E1 (DPHA) was used instead of 0.54 parts by mass of the polymerizable compound E1 (DPHA) in Example 1. A compound and a cured film were prepared. Moreover, it was evaluated in the same manner as in Example 1.
(実施例61)
 実施例1において重合性化合物E1(DPHA)の代わりに重合性化合物E1と重合性化合物E4との質量比50/50の混合物を用いたこと以外は、実施例1と同様にして、着色感光性組成物及び硬化膜を作製した。また、実施例1と同様に評価した。
(Example 61)
Colored photosensitive in the same manner as in Example 1 except that a mixture of the polymerizable compound E1 and the polymerizable compound E4 in a mass ratio of 50/50 was used instead of the polymerizable compound E1 (DPHA) in Example 1. A composition and a cured film were prepared. Moreover, it was evaluated in the same manner as in Example 1.
・重合性化合物E4:下記構造の化合物 -Polymerizable compound E4: A compound having the following structure
Figure JPOXMLDOC01-appb-C000037
Figure JPOXMLDOC01-appb-C000037
Figure JPOXMLDOC01-appb-T000038
Figure JPOXMLDOC01-appb-T000038
Figure JPOXMLDOC01-appb-T000039
Figure JPOXMLDOC01-appb-T000039
 表3又は表4に記載の上述した以外の略称の詳細を、以下に示す。 Details of abbreviations other than those described above in Table 3 or Table 4 are shown below.
・比較化合物A’-1:ジクロロジシアノベンゾキノン
・A’-2:6,13-ペンタセンキノン
-Comparative compound A'-1: dichlorodicyanobenzoquinone-A'-2: 6,13-pentacenequinone
Figure JPOXMLDOC01-appb-C000040
Figure JPOXMLDOC01-appb-C000040
<光重合開始剤>
・F-1:IRGACURE 369(BASF社製)(365nmにおけるモル吸光係数 800L・mol-1・cm-1
・F-2:IRGACURE 819(BASF社製)(365nmにおけるモル吸光係数 500L・mol-1・cm-1
・F-3:IRGACURE 907(BASF社製)(365nmにおけるモル吸光係数 1,100L・mol-1・cm-1
・F-4:IRGACURE OXE01(BASF社製)(365nmにおけるモル吸光係数 1,500L・mol-1・cm-1
・F-5:IRGACURE OXE02(BASF社製)(365nmにおけるモル吸光係数 3,500L・mol-1・cm-1
・F-6:下記構造を有する化合物
<Photopolymerization initiator>
F-1: IRGACURE 369 (manufactured by BASF) (molar extinction coefficient at 365 nm 800 L · mol -1 · cm -1 )
F-2: IRGACURE 819 (manufactured by BASF) (molar extinction coefficient at 365 nm 500 L · mol -1 · cm -1 )
F-3: IRGACURE 907 (manufactured by BASF) (molar extinction coefficient at 365 nm 1,100 L · mol -1 · cm -1 )
F-4: IRGACURE OXE01 (manufactured by BASF) (molar extinction coefficient at 365 nm 1,500 L · mol -1 · cm -1 )
F-5: IRGACURE OXE02 (manufactured by BASF) (molar extinction coefficient at 365 nm 3,500 L · mol -1 · cm -1 )
F-6: A compound having the following structure
Figure JPOXMLDOC01-appb-C000041
Figure JPOXMLDOC01-appb-C000041
 なお、F-1~F-3はオキシム化合物ではなく、F-4~F-6はオキシム化合物である。 Note that F-1 to F-3 are not oxime compounds, and F-4 to F-6 are oxime compounds.
(実施例101~実施例161)
 シリコンウェハ上に、Green組成物を製膜後の膜厚が1.0μmになるようにスピンコート法で塗布した。次いで、ホットプレートを用いて、100℃で2分間加熱した。次いで、i線ステッパー露光装置FPA-3000i5+(キヤノン(株)製)を用い、1,000mJ/cmで2μm四方のドットパターンのマスクを介して露光した。次いで、水酸化テトラメチルアンモニウム(TMAH)0.3質量%水溶液を用い、23℃で60秒間パドル現像を行った。その後、スピンシャワーにてリンスを行い、更に純水にて水洗した。次いで、ホットプレートを用いて、200℃で5分間加熱することで、シリコンウェハ上に、Green組成物をパターニングした。同様にRed組成物、Blue組成物を順次パターニングし、赤、緑及び青の着色パターン(Bayerパターン)を形成した。
 実施例101~実施例140、及び、実施例153~実施例161では、Green組成物として、実施例1~実施例40、又は、実施例53~実施例61において調製した着色感光性組成物を使用した。
 実施例141~実施例146では、Red組成物として、実施例41~実施例46において調製した着色感光性組成物を使用した。
 実施例147~実施例152では、Blue組成物として、実施例47~実施例52において調製した着色感光性組成物を使用した。
 Green組成物として、Red組成物又はBlue組成物として、実施例1~実施例61においてそれぞれ調製した着色感光性組成物を用いて固体撮像素子を形成した例が、実施例101~実施例161にそれぞれ該当する。
 Red組成物及びBlue組成物については後述する。
 なお、Bayerパターンとは、米国特許第3,971,065号明細書に開示されているような、一個の赤色(Red)素子と、二個の緑色(Green)素子と、一個の青色(Blue)素子とを有する色フィルタ素子の2×2アレイを繰り返したパターンである。
 得られたカラーフィルタを公知の方法に従い固体撮像素子に組み込んだ。実施例1~実施例61で得られたいずれの着色感光性組成物を使用した場合でも、固体撮像素子は硬化膜における重量減少抑制性(膜減り抑制性)に優れ、また、好適な画像認識能を有する固体撮像素子が得られたことが確認された。
(Example 101-Example 161)
The Green composition was applied onto a silicon wafer by a spin coating method so that the film thickness after film formation was 1.0 μm. Then, using a hot plate, it was heated at 100 ° C. for 2 minutes. Next, using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.), exposure was performed at 1,000 mJ / cm 2 through a mask with a 2 μm square dot pattern. Then, paddle development was carried out at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH). Then, it was rinsed with a spin shower and further washed with pure water. The Green composition was then patterned on a silicon wafer by heating at 200 ° C. for 5 minutes using a hot plate. Similarly, the Red composition and the Blue composition were sequentially patterned to form red, green and blue coloring patterns (Bayer patterns).
In Examples 101 to 140 and Examples 153 to 161, the colored photosensitive compositions prepared in Examples 1 to 40 or 53 to 61 are used as the Green composition. used.
In Examples 141 to 146, the colored photosensitive compositions prepared in Examples 41 to 46 were used as the Red composition.
In Examples 147 to 152, the colored photosensitive compositions prepared in Examples 47 to 52 were used as the Blue composition.
Examples of Examples 101 to 161 in which a solid-state image sensor was formed using the colored photosensitive compositions prepared in Examples 1 to 61 as a Green composition, a Red composition, or a Blue composition, respectively. Each is applicable.
The Red composition and the Blue composition will be described later.
The Bayer pattern is a red element, two green elements, and one blue element, as disclosed in US Pat. No. 3,971,065. ) This is a pattern in which a 2 × 2 array of color filter elements having an element is repeated.
The obtained color filter was incorporated into a solid-state image sensor according to a known method. Regardless of which of the colored photosensitive compositions obtained in Examples 1 to 61 is used, the solid-state image sensor is excellent in weight reduction inhibitory property (film loss inhibitory property) in the cured film, and is suitable for image recognition. It was confirmed that a solid-state image sensor with the ability was obtained.
 実施例101~実施例161で使用した上記着色感光性組成物以外のGreen組成物、Red組成物、及び、Blue組成物は、以下の通りである。 The Green composition, Red composition, and Blue composition other than the above-mentioned colored photosensitive composition used in Examples 101 to 161 are as follows.
-Red組成物-
 下記成分を混合し、撹拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)製)でろ過して、Red組成物を調製した。
 Red顔料分散液:51.7質量部
 樹脂4(40質量%PGMEA溶液):0.6質量部
 重合性化合物4:0.6質量部
 光重合開始剤1:0.3質量部
 界面活性剤1:4.2質量部
 PGMEA:42.6質量部
-Red composition-
The following components were mixed, stirred, and then filtered through a nylon filter (manufactured by Nippon Pole Co., Ltd.) having a pore size of 0.45 μm to prepare a Red composition.
Red pigment dispersion: 51.7 parts by mass Resin 4 (40% by mass PGMEA solution): 0.6 parts by mass Polymerizable compound 4: 0.6 parts by mass Photopolymerization initiator 1: 0.3 parts by mass Surfactant 1 : 4.2 parts by mass PGMEA: 42.6 parts by mass
-Blue組成物-
 下記成分を混合し、撹拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)製)でろ過して、Blue組成物を調製した。
 Blue顔料分散液:44.9質量部
 樹脂4(40質量%PGMEA溶液):2.1質量部
 重合性化合物1:1.5質量部
 重合性化合物4:0.7質量部
 光重合開始剤1:0.8質量部
 界面活性剤1:4.2質量部
 PGMEA:45.8質量部
-Blue composition-
The following components were mixed, stirred, and then filtered through a nylon filter (manufactured by Nippon Pole Co., Ltd.) having a pore size of 0.45 μm to prepare a Blue composition.
Blue pigment dispersion: 44.9 parts by mass Resin 4 (40% by mass PGMEA solution): 2.1 parts by mass Polymerizable compound 1: 1.5 parts by mass Polymerizable compound 4: 0.7 parts by mass Photoinitiator 1 : 0.8 parts by mass Surfactant 1: 4.2 parts by mass PGMEA: 45.8 parts by mass
 Red組成物、及び、Blue組成物に使用した原料は、以下の通りである。 The raw materials used for the Red composition and the Blue composition are as follows.
・Red顔料分散液
 C.I.Pigment Red 254を9.6質量部、C.I.Pigment Yellow 139を4.3質量部、分散剤(DISPERBYK-161、BYKChemie社製)を6.8質量部、PGMEAを79.3質量部とからなる混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間混合及び分散して、顔料分散液を調製した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cmの圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、Red顔料分散液を得た。
-Red pigment dispersion C. I. Pigment Red 254 at 9.6 parts by mass, C.I. I. A mixed solution consisting of 4.3 parts by mass of Pigment Yellow 139, 6.8 parts by mass of a dispersant (DISPERBYK-161, manufactured by BYK Chemie), and 79.3 parts by mass of PGMEA was used in a bead mill (zirconia beads 0.3 mm diameter). ) Was mixed and dispersed for 3 hours to prepare a pigment dispersion. After that, a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a Red pigment dispersion.
・Blue顔料分散液
 C.I.Pigment Blue 15:6を9.7質量部、C.I.Pigment Violet 23を2.4質量部、分散剤(Disperbyk-161、BYKChemie社製)を5.5部、PGMEAを82.4部からなる混合液を、ビーズミル(ジルコニアビーズ0.3mm径)により3時間混合及び分散して、顔料分散液を調製した。その後更に、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2,000kg/cmの圧力下で流量500g/minとして分散処理を行った。この分散処理を10回繰り返し、Blue顔料分散液を得た。
-Blue pigment dispersion C. I. Pigment Blue 15: 6 at 9.7 parts by mass, C.I. I. A mixed solution consisting of 2.4 parts by mass of Pigment Violet 23, 5.5 parts of dispersant (Disperbyk-161, manufactured by BYK Chemie), and 82.4 parts of PGMEA was prepared by a bead mill (zirconia beads 0.3 mm diameter). A pigment dispersion was prepared by time mixing and dispersion. After that, a high-pressure disperser with a decompression mechanism NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) was used to perform dispersion treatment at a flow rate of 500 g / min under a pressure of 2,000 kg / cm 3 . This dispersion treatment was repeated 10 times to obtain a Blue pigment dispersion.
・重合性化合物1:KAYARAD DPHA(ジペンタエリスリトールヘキサアクリレートとジペンタエリスリトールペンタアクリレートとの混合物、日本化薬(株)製)
・重合性化合物4:下記構造
-Polymerizable compound 1: KAYARAD DPHA (mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate, manufactured by Nippon Kayaku Co., Ltd.)
-Polymerizable compound 4: The following structure
Figure JPOXMLDOC01-appb-C000042
Figure JPOXMLDOC01-appb-C000042
・樹脂4:下記構造(酸価:70mgKOH/g、Mw=11,000、各構成単位を示す各括弧の添え字は各構成単位の含有比(モル比)を表す。 Resin 4: The following structure (acid value: 70 mgKOH / g, Mw = 11,000, the subscripts in parentheses indicating each structural unit represent the content ratio (molar ratio) of each structural unit.
Figure JPOXMLDOC01-appb-C000043
Figure JPOXMLDOC01-appb-C000043
・光重合開始剤1:IRGACURE-OXE01(1-[4-(フェニルチオ)フェニル]-1,2-オクタンジオン-2-(o-ベンゾイルオキシム)、BASF社製) -Photopolymerization initiator 1: IRGACURE-OXE01 (1- [4- (phenylthio) phenyl] -1,2-octanedione-2- (o-benzoyl oxime), manufactured by BASF)
・界面活性剤1:下記混合物(Mw=14,000)の1質量%PGMEA溶液。下記の式中、構成単位の割合を示す%(62%及び38%)の単位は、質量%である。 Surfactant 1: 1 mass% PGMEA solution of the following mixture (Mw = 14,000). In the following formula, the unit of% (62% and 38%) indicating the ratio of the constituent units is mass%.
Figure JPOXMLDOC01-appb-C000044
Figure JPOXMLDOC01-appb-C000044
 2019年3月18日に出願された日本国特許出願第2019-050186号の開示は、その全体が参照により本明細書に取り込まれる。
 本明細書に記載された全ての文献、特許出願、及び、技術規格は、個々の文献、特許出願、及び、技術規格が参照により取り込まれることが具体的かつ個々に記された場合と同程度に、本明細書中に参照により取り込まれる。
 
The disclosure of Japanese Patent Application No. 2019-05018, filed March 18, 2019, is incorporated herein by reference in its entirety.
All documents, patent applications, and technical standards described herein are to the same extent as if the individual documents, patent applications, and technical standards were specifically and individually stated to be incorporated by reference. Is incorporated herein by reference.

Claims (19)

  1.  重合性基を有し、かつ最低空軌道のエネルギー準位LUMOが-3.5eV未満である化合物A、
     着色剤、
     重合性化合物、及び、
     光重合開始剤を含む
     着色感光性組成物。
    Compound A, which has a polymerizable group and has an energy level LUMO of the lowest empty orbit of less than -3.5 eV.
    Colorant,
    Polymerizable compounds and
    A colored photosensitive composition containing a photopolymerization initiator.
  2.  重合性基を有し、かつ、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する化合物A、
     着色剤、
     重合性化合物、及び、
     光重合開始剤を含む
     着色感光性組成物。
    A compound having a polymerizable group and having at least one structure selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene imide structure, a perylene imide structure, a pyrazine quinoxaline structure, and a fullerene structure. A,
    Colorant,
    Polymerizable compounds and
    A colored photosensitive composition containing a photopolymerization initiator.
  3.  前記化合物Aが、キノン構造、キノジメタン構造、ジチオレン構造、ナフタレンジイミド構造、ペリレンジイミド構造、ピラジノキノキサリン構造、及び、フラーレン構造よりなる群から選ばれた少なくとも1種の構造を有する化合物である請求項1に記載の着色感光性組成物。 Claim that the compound A is a compound having at least one structure selected from the group consisting of a quinone structure, a quinodimethane structure, a dithiolene structure, a naphthalene diimide structure, a perylene diimide structure, a pyrazinoquinoxaline structure, and a fullerene structure. The colored photosensitive composition according to 1.
  4.  前記化合物Aが有する上記重合性基が、ラジカル重合性基、又は、カチオン重合性基である、請求項1又は請求項2に記載の着色感光性組成物。 The colored photosensitive composition according to claim 1 or 2, wherein the polymerizable group contained in the compound A is a radically polymerizable group or a cationically polymerizable group.
  5.  前記ラジカル重合性基が、アクリル基、メタクリル基、ビニル基、マレイミド基、又は、アリル基である、請求項4に記載の着色感光性組成物。 The colored photosensitive composition according to claim 4, wherein the radically polymerizable group is an acrylic group, a methacryl group, a vinyl group, a maleimide group, or an allyl group.
  6.  前記カチオン重合性基が、エポキシ基、オキセタニル基、又は、アリル基である、請求項4に記載の着色感光性組成物。 The colored photosensitive composition according to claim 4, wherein the cationically polymerizable group is an epoxy group, an oxetanyl group, or an allyl group.
  7.  前記化合物Aが、1分子中に前記重合性基を2以上有する、請求項1~請求項6のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 6, wherein the compound A has two or more polymerizable groups in one molecule.
  8.  前記化合物Aが、下記式(1A)~式(1C)のいずれかで表される化合物である請求項1~請求項7のいずれか1項に記載の着色感光性組成物。
    Figure JPOXMLDOC01-appb-C000001

     式(1A)~式(1C)中、Rはそれぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、ヒドロキシ基、アシル基、アシルオキシ基、ニトロ基、又は、シアノ基を表し、C~Cはそれぞれ独立に、環構造を表し、Yはそれぞれ独立に、単結合、酸素原子、硫黄原子、NR、カルボニル基、-OC(=O)-、-C(=O)O-、-C(=O)NH-、-OC(=O)-NH-、-AniCat-、又は、-CatAni-を表し、Rはそれぞれ独立に、水素原子、アルキル基、又は、アリール基を表し、Aniはアニオン構造を表し、Catはカチオン構造を表し、Lはそれぞれ独立に、単結合又は2価の連結基を表し、Aは前記重合性基を有する表し、X及びXはそれぞれ独立に、酸素原子、硫黄原子、又は、下記式(1X)で表される基を表し、nは1以上の整数を表し、mはそれぞれ独立に、0以上かつRが結合可能な環上の置換位置の最大数を表し、pは0又は1を表す。
    Figure JPOXMLDOC01-appb-C000002

     式(1X)中、R及びRはそれぞれ独立に、電子求引性基を表し、波線部分は環構造との結合位置を表す。
    The colored photosensitive composition according to any one of claims 1 to 7, wherein the compound A is a compound represented by any of the following formulas (1A) to (1C).
    Figure JPOXMLDOC01-appb-C000001

    In formulas (1A) to (1C), R 1 is independently a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, a hydroxy group, an acyl group, an acyloxy group, a nitro group, or a cyano group. the expressed, the C a ~ C C each independently represent a ring structure, Y 1 is independently a single bond, an oxygen atom, a sulfur atom, NR N, carbonyl group, -OC (= O) -, - C (= O) O -, - C (= O) NH -, - OC (= O) -NH -, - Ani - Cat + -, or, -Cat + Ani - - represents, R N are each independently , Hydrogen atom, alkyl group, or aryl group, Ani represents an anionic structure, Cat + represents a cation structure, L 1 represents a single bond or a divalent linking group, respectively, and A 1 Represents the above-mentioned polymerizable group, X 1 and X 2 independently represent an oxygen atom, a sulfur atom, or a group represented by the following formula (1X), n represents an integer of 1 or more, and m. each independently, 0 or more and represents the maximum number of substitution positions on R 1 can bind ring, p is 0 or 1.
    Figure JPOXMLDOC01-appb-C000002

    In the formula (1X), R 2 and R 3 independently represent an electron-attracting group, and the wavy line portion represents a bonding position with the ring structure.
  9.  前記化合物Aが、下記式(2)又は式(3)で表される化合物である、請求項1~請求項8のいずれか1項に記載の着色感光性組成物。
    Figure JPOXMLDOC01-appb-C000003

     式(2)中、R21~R24は、それぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、アシル基、アシルオキシ基、ヒドロキシ基、アミノ基、ニトロ基、アミド基、又は、前記重合性基を有する基を表し、R21及びR22、又は、R23及びR24が互いに連結して、環を形成してもよく、R21~R24の少なくとも一つは、重合性基を有する基である。
     式(3)中、R31~R34は、それぞれ独立に、ハロゲン原子、アルキル基、アリール基、アルコキシ基、アリールオキシ基、アシル基、アシルオキシ基、ヒドロキシ基、アミノ基、ニトロ基、アミド基、又は、重合性基を有する基を表し、R31及びR32、又は、R33及びR34が互いに連結して、環を形成してもよく、R31~R34の少なくとも一つは、重合性基を有する基である。
    The colored photosensitive composition according to any one of claims 1 to 8, wherein the compound A is a compound represented by the following formula (2) or formula (3).
    Figure JPOXMLDOC01-appb-C000003

    In the formula (2), R 21 to R 24 are independently halogen atoms, alkyl groups, aryl groups, alkoxy groups, aryloxy groups, acyl groups, acyloxy groups, hydroxy groups, amino groups, nitro groups and amide groups. , Or the group having a polymerizable group, and R 21 and R 22 , or R 23 and R 24 may be linked to each other to form a ring, and at least one of R 21 to R 24 may be formed. , A group having a polymerizable group.
    In the formula (3), R 31 to R 34 independently represent a halogen atom, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyl group, an acyloxy group, a hydroxy group, an amino group, a nitro group and an amide group. , Or a group having a polymerizable group, and R 31 and R 32 , or R 33 and R 34 may be linked to each other to form a ring, and at least one of R 31 to R 34 is It is a group having a polymerizable group.
  10.  前記化合物Aの最高被占軌道のエネルギー準位HOMOが、-7.0eVを超え-5.5eV未満である請求項1~請求項9のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 9, wherein the energy level HOMO of the highest occupied orbital of the compound A is more than -7.0 eV and less than -5.5 eV.
  11.  前記化合物Aの最低空軌道のエネルギー準位LUMOが、-5.0eVを超え-3.5eV未満である請求項1~請求項10のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 10, wherein the energy level LUMO of the lowest empty orbit of the compound A is more than -5.0 eV and less than -3.5 eV.
  12.  前記着色剤が、フタロシアニン顔料を含む請求項1~請求項11のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 11, wherein the colorant contains a phthalocyanine pigment.
  13.  前記光重合開始剤が、オキシム化合物を含む請求項1~請求項12のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 12, wherein the photopolymerization initiator contains an oxime compound.
  14.  高分子分散剤を更に含む請求項1~請求項13のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 13, further comprising a polymer dispersant.
  15.  アルカリ可溶性樹脂を更に含む請求項1~請求項14のいずれか1項に記載の着色感光性組成物。 The colored photosensitive composition according to any one of claims 1 to 14, further comprising an alkali-soluble resin.
  16.  請求項1~請求項15のいずれか1項に記載の着色感光性組成物を硬化してなる硬化物。 A cured product obtained by curing the colored photosensitive composition according to any one of claims 1 to 15.
  17.  請求項16に記載の硬化物を備えるカラーフィルタ。 A color filter comprising the cured product according to claim 16.
  18.  請求項17に記載のカラーフィルタを有する固体撮像素子。 A solid-state image sensor having the color filter according to claim 17.
  19.  請求項17に記載のカラーフィルタを有する画像表示装置。
     
    An image display device having the color filter according to claim 17.
PCT/JP2020/010668 2019-03-18 2020-03-11 Photosensitive coloring composition, cured product, color filter, solid-state imaging element and image display device WO2020189461A1 (en)

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WO2014150121A1 (en) * 2013-03-19 2014-09-25 Eastman Kodak Company Thiosulfate polymer compositions and articles
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JP2017053978A (en) * 2015-09-09 2017-03-16 東洋インキScホールディングス株式会社 Colored composition for color filter and color filter

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JP2006193543A (en) * 2005-01-11 2006-07-27 Seiko Epson Corp Electroconductive polymer, electroconductive layer, electronic device and electronic equipment
JP2012077154A (en) * 2010-09-30 2012-04-19 Fujifilm Corp Colored composition, color filter and method for producing the same, liquid crystal display device, and solid imaging element
WO2014150121A1 (en) * 2013-03-19 2014-09-25 Eastman Kodak Company Thiosulfate polymer compositions and articles
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