WO2020177350A1 - 微型fp腔窄带滤波器 - Google Patents

微型fp腔窄带滤波器 Download PDF

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Publication number
WO2020177350A1
WO2020177350A1 PCT/CN2019/114050 CN2019114050W WO2020177350A1 WO 2020177350 A1 WO2020177350 A1 WO 2020177350A1 CN 2019114050 W CN2019114050 W CN 2019114050W WO 2020177350 A1 WO2020177350 A1 WO 2020177350A1
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cavity
miniature
optical fiber
collimator
package
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English (en)
French (fr)
Inventor
廖胜凯
李杨
徐凭
印娟
任继刚
曹蕾
彭承志
潘建伟
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements

Definitions

  • the present disclosure belongs to the field of optical filtering, and relates to a miniature FP cavity narrowband filter.
  • the FP cavity is generally composed of a glass plate coated with a high reflective film on the inner surface and an antireflection film on the outer surface.
  • the incident beam can produce multi-beam interference effects in the cavity, and the light waves that meet the phase matching conditions produce constructive interference to form a filtered output; The light waves that do not meet the phase conditions produce destructive interference and are reflected and output by the FP cavity.
  • By optimizing the parameter design of the FP cavity it is possible to realize the FP cavity narrowband filter with high transmittance and narrow line width. Compared with other filters based on atomic filter, coherent filter, grating filter, etc., FP cavity filter can realize the advantages of wide working filter range, tunable center wavelength, narrower filter line width, higher optical efficiency, etc. Application scenarios.
  • the existing narrowband filters based on the FP cavity are relatively large in volume and size, have poor corresponding performance, are easily affected by external environmental factors, and have poor reliability and stability.
  • the present disclosure provides a miniature FP cavity narrowband filter to at least partially solve the technical problems mentioned above.
  • a miniature FP cavity narrowband filter which includes a miniature package filter structure that integrates internal components into the same miniature package body 6 through an optical micromachining process.
  • the device includes: FP cavity 1, which is used for narrow-band filtering of the input optical signal; semiconductor refrigerator 3, the FP cavity 1 is integrated on the semiconductor refrigerator 3, and the semiconductor refrigerator 3 is used to control the ambient temperature of the FP cavity ; Thermistor 2, integrated on the semiconductor refrigerator 3, used to collect the ambient temperature of the FP cavity 1.
  • the micro package filter structure is a package filter structure with one-way input and one-way output
  • the internal device further includes: a first optical fiber 51 partially encapsulated in the micro package 6; A collimator 41 connected to the first optical fiber 51; a second optical fiber 52 partially encapsulated in the micro package 6; and a second collimator 42 connected to the second optical fiber 52;
  • the external optical signal is input to the first collimator 41 through the first optical fiber 51, and the first collimator 41 expands the optical signal input from the first optical fiber 51 and transmits it to the FP cavity 1 through the free space. 1. After performing narrowband filtering on the input optical signal after beam expansion, it is transmitted through free space.
  • the second collimator 42 receives the optical signal transmitted from the FP cavity 1 after narrowband filtering, and couples it into the second optical fiber 52 for output.
  • the micro-packaged filter structure is a single-port bidirectional input-output packaged filter structure
  • the internal device further includes: an optical fiber 5, which is partially packaged in the micro-package 6; and a collimator 4, Connected to the optical fiber 5; and a reflector 8 arranged in the optical path where the FP cavity 1 is located;
  • the external optical signal is input to the collimator 4 through the optical fiber 5.
  • the collimator 4 expands the optical signal input from the optical fiber 5 and transmits it to the FP cavity 1 through free space.
  • the FP cavity 1 responds to the expanded light input After the signal is narrow-band filtered, it is transmitted through free space to the mirror 8.
  • the mirror 8 reflects the optical signal after the narrow-band filtering of the FP cavity 1 back to the FP cavity 1 and then passes through the FP cavity 1 for secondary filtering. After the secondary filtering
  • the optical signal is received by the collimator 4 and then coupled into the optical fiber 5 for output.
  • the reflector 8 is coated with a high-reflection film; and/or, the reflector 8 is a right-angle prism reflector.
  • the first collimator 41, the second collimator 42, and the collimator 4 are G-lens fiber collimators; and/or, the first optical fiber 51, the second optical fiber 52, and the The optical fiber 5 is a single-mode optical fiber.
  • pins 7 are provided on the micro package body 6.
  • both the semiconductor refrigerator 3 and the thermistor 2 are connected to the pins 7 on the miniature package body 6, and the working temperature of the FP cavity 1 can be adjusted by controlling the semiconductor refrigerator 3 and the thermistor 2. Make adjustments to change the filter center wavelength of the micro-package filter structure to achieve tuning.
  • the semiconductor refrigerator 3 is a semiconductor refrigerator based on the Peltier effect.
  • the thermistor 2 is a thermistor with a negative temperature coefficient.
  • the external dimension of the miniature FP cavity narrowband filter is not greater than 4cm*1.2cm*0.8cm.
  • the package filter structure Since the FP cavity, thermistor, semiconductor cooler and other devices are integrated into the same miniature package through the optical micromachining process, it can achieve high-efficiency optical coupling, small size, and high integration. Above, a high-performance FP cavity filter with narrow line width and high efficiency can be realized. Among them, the packaged micro FP cavity is less affected by the external environment, and the thermistor and FP cavity are integrated on the semiconductor cooler, which can achieve stable control of the FP cavity temperature, and further improve the FP cavity based The reliability and stability of the micro-package filter structure are not easily affected by the external environment.
  • the thermistor and semiconductor cooler inside the micro package can be connected to the outside through the pins, and the working temperature of the FP cavity can be adjusted by controlling the semiconductor cooler and thermistor, thereby changing the filtering of the micro package filter structure
  • the center wavelength realizes the tuning of the micro FP cavity narrowband filter, which is convenient for integrated control.
  • the first is a package filter structure with unidirectional input and unidirectional output.
  • the micro FP cavity narrowband filter of this structure can finally achieve a line width of 10 pm and an efficiency better than 70%, typically, in an example, the size of the miniature FP cavity narrowband filter is 4cm*1.2cm*0.8cm, the volume and size are small, and it can be applied to various complex application environments with small size and integration
  • the second is a single-port bidirectional input and output package filter structure.
  • the micro FP cavity narrowband filter of this structure can achieve narrower linewidth filtering, but the efficiency will be to a certain extent Reduction, for example, the final line width can be 7 pm, and the efficiency is better than 60%.
  • the external dimension of the miniature FP cavity narrowband filter is 2.5cm*1.2cm*0.8cm, which achieves the size and volume Further simplification and further narrowing of the line width.
  • Fig. 1 is a schematic structural diagram of a miniature FP cavity narrowband filter according to a first embodiment of the present disclosure.
  • Fig. 2 is a schematic structural diagram of a miniature FP cavity narrowband filter according to a second embodiment of the present disclosure.
  • narrowband filters based on FP cavities mostly adopt discrete component solutions, which use optical fibers to expand the beam through a collimator, filter through the FP cavity, and then couple with the collimator to output using optical fibers.
  • the FP cavity filter based on discrete devices has relatively large volume and size, resulting in poor performance and low integration. At the same time, it is easily affected by external environmental factors and has poor reliability and stability.
  • this application integrates optical fiber, collimator, FP cavity, thermistor, semi-conductor cooler and other devices into the same miniature package body through optical micromachining process to form a miniature package filter structure, the outer dimension of which is no more than 4cm *1.2cm*0.8cm, with the advantages of small size, high integration and strong stability.
  • a high-performance FP cavity filter with narrow line width and high efficiency can be realized.
  • each device has a closer connection, which is conducive to the optimization of coupling efficiency.
  • the miniaturized setting also makes the thermistor and the semiconductor cooler have the advantage of high temperature sensing accuracy, thereby improving the performance of the device , Enabling the device to achieve high-efficiency optical coupling, the packaged micro FP cavity is less affected by the external environment, and the thermistor and FP cavity are integrated on the semiconductor refrigerator, which can achieve stable control of the FP cavity temperature. It further improves the reliability and stability of the package filter structure based on the FP cavity, and has the comprehensive performance of narrow line width, high efficiency, small size, high integration, better reliability and stability.
  • the miniature FP cavity narrowband filter of the present disclosure includes a miniature package filter structure.
  • the miniature package filter structure integrates internal devices into the same miniature package body through an optical micromachining process.
  • the internal devices include: an FP cavity for input Narrow-band filtering of the optical signal; semiconductor refrigerator, FP cavity is integrated on the semiconductor refrigerator, the semiconductor refrigerator is used to control the ambient temperature of the FP cavity; thermistor, integrated on the semiconductor refrigerator, used to collect the FP The ambient temperature of the cavity; for the one-way input and one-way output package filter structure, the internal device also includes: input fiber (first fiber), output fiber (second fiber), input collimator (first collimator) For single-port bidirectional input and output packaged filter structure, the internal device also includes: optical fiber for input and output, and collimator for input and output And a mirror for the reversal of the optical path.
  • pins are provided on the miniature package.
  • the semiconductor cooler and thermistor are both connected to the pins on the package body, and the working temperature of the FP cavity is adjusted by controlling the semiconductor cooler and thermistor, thereby changing the filter center wavelength of the package filter structure to achieve Tuning.
  • Integrating the internal components of the micro package filter structure into the same micro package body can achieve high-efficiency optical coupling, small size and high integration. On this basis, a high-performance FP cavity filter with narrow line width and high efficiency can be realized .
  • the packaged micro FP cavity is less affected by the external environment, and the thermistor and FP cavity are integrated on the semiconductor cooler, which can achieve stable control of the FP cavity temperature, and further improve the FP cavity based The reliability and stability of the package filter structure.
  • the thermistor and semiconductor cooler inside the package can be connected to the outside through the pins, and the working temperature of the FP cavity can be adjusted by controlling the semiconductor cooler and thermistor, thereby changing the filter center wavelength of the package filter structure , Realize the tuning of the micro FP cavity narrowband filter, which is convenient for integrated control.
  • the micro-packaged filter structure is a packaged filter structure with unidirectional input and unidirectional output, for example, as shown in the first embodiment.
  • the micro-packaged filter structure is a single-port bidirectional input-output packaged filter structure, and its input and output ends are the same port, for example, as shown in the second embodiment.
  • the term “external” in the term “external optical signal” refers to the inside of the micro-package filter structure.
  • the external optical signal is input into the micro-package filter structure through an optical fiber and is referred to as the input optical signal or optical signal.
  • the expressions "input optical signal” and “optical signal” existing in the optical path are all conventional concepts understood by those skilled in the art.
  • a miniature FP cavity narrowband filter is provided.
  • Fig. 1 is a schematic structural diagram of a miniature FP cavity narrowband filter according to a first embodiment of the present disclosure.
  • the miniature FP cavity narrowband filter of this embodiment includes: a miniature package filter structure that integrates internal components into the same miniature package 6 through an optical micromachining process.
  • the miniature package The body 6 is packaged with the following components (that is, the internal components include): FP cavity 1, thermistor 2, semiconductor refrigerator 3, first collimator 41, first optical fiber 51, second collimator 42, and first Two optical fiber 52.
  • the micro package body 6 is provided with pins 7.
  • the package filter structure corresponding to this embodiment is a package filter structure with one-way input and one-way output.
  • the input end is connected to the first optical fiber 51
  • the output end is connected to the second optical fiber 52.
  • Part of the first optical fiber 51 and the second optical fiber 52 are encapsulated inside the micro package body 6, and the remaining part is located outside the micro package body for receiving external light signals and transmitting them to the inside of the micro package filter structure.
  • the FP cavity 1 is integrated on the semiconductor refrigerator 3 for narrow-band filtering of the input optical signal; the thermistor 2 is integrated on the semiconductor refrigerator 3 for collecting the ambient temperature of the FP cavity 1 .
  • the first collimator 41 is connected to the first optical fiber 51; the second collimator 42 is connected to the second optical fiber 52.
  • the first optical fiber 51 is an input optical fiber for inputting optical signals into the first collimator 41 for input;
  • the second optical fiber 52 is an output optical fiber for performing optical signals output from the second collimator 42 Coupled output.
  • the first optical fiber 51 is used to input an external optical signal to the first collimator 41.
  • the first collimator 41 is used to expand the beam of the optical signal input from the first optical fiber 51 and then transmit it through free space.
  • the FP cavity 1 is used to narrow-band filter the optical signal transmitted from the first collimator 41 and then transmit it through free space.
  • the second collimator 42 is used to receive the optical signal transmitted from the FP cavity 1 after narrowband filtering, and couple it into the second optical fiber 52.
  • the second optical fiber 52 is used to couple out the narrow-band filtered optical signal.
  • the FP cavity 1 is integrated on a semiconductor refrigerator 3 (TEC), and the TEC 3 is used to control the temperature of the FP cavity 1.
  • TEC semiconductor refrigerator 3
  • the thermistor 2 is integrated on the TEC 3, and the thermistor 2 is used to collect the ambient temperature of the FP cavity 1.
  • the miniature package 6 is used to combine the first optical fiber (input optical fiber) 51, the second optical fiber (output optical fiber) 52, the TEC 3, the thermistor 2, the FP cavity 1, the first collimator (input collimator) 41 And the second collimator (output collimator) 42 is installed and integrated together, and plays the role of installing, fixing, sealing, protecting the chip and enhancing the electrothermal performance.
  • Pin 7 is used to connect the contacts of the integrated chip in the miniature package 6 to the package shell through wires (such as gold wires). Both the TEC 3 and thermistor 2 inside the package can be connected to the outside through pin 7 , To achieve integrated control, with the advantage of convenient control.
  • the external optical signal (the optical path is not shown in the figure) is input to the first collimator 41 through the first optical fiber 51, and the first collimator 41 expands the optical signal input from the first optical fiber 51 Then it is transmitted to the FP cavity 1 through the free space.
  • the FP cavity 1 performs narrow-band filtering on the input optical signal after beam expansion and then transmits it through the free space.
  • the second collimator 42 receives the optical signal transmitted from the FP cavity 1 after narrow-band filtering. And couple it into the second optical fiber 52 to output.
  • the semiconductor refrigerator 3 and the thermistor 2 are both connected to the pin 7 on the micro package body 6, and the operating temperature of the FP cavity 1 is adjusted by controlling the semiconductor refrigerator 3 and the thermistor 2, thereby changing the micro package
  • the filter center wavelength of the filter structure realizes tuning.
  • the semiconductor refrigerator 3 is a semiconductor refrigerator based on the Peltier effect.
  • the thermistor 2 is a thermistor with a negative temperature coefficient.
  • the optical signal can work in the 1550nm band
  • the input fiber can be but not limited to a 1550nm single-mode fiber.
  • the first collimator 41 and the second collimator 42 may be, but not limited to, G-lens optical fiber collimators.
  • the micro-package filter structure combines the FP cavity 1, the thermistor 2, the semiconductor refrigerator 3, the first collimator 41, the first optical fiber 51, the second collimator 42, and the second collimator through an optical micromachining process. Internal components such as the two optical fibers 52 are integrated and packaged in the miniature package 6.
  • the optimization process of the micro FP cavity narrowband filter is as follows: For a single FP cavity, by optimizing the parameter design of the FP cavity, in the 1550nm band, the transmittance can be greater than 90% and the line width is about 10pm FP cavity product, the optimized setting is used as the FP cavity setting in the micro FP cavity narrowband filter; through the optical micromachining process, the first optical fiber, the first collimator, the second collimator and the second optical fiber Optimized settings of the parameters can achieve a coupling efficiency better than 80%. On the basis of the first two optimizations mentioned above, by integrating the optimized FP cavity with the TEC, the thermistor and the TEC are integrated, and the optical fiber and collimator form a filter optical path.
  • the size of the miniature FP cavity narrowband filter is 4cm*1.2cm*0.8cm, and the volume and size are small, so it can be applied to various complex application environments.
  • the miniature FP cavity narrowband filter of this embodiment has the advantages of small size, high integration, high efficiency, and high stability.
  • a miniature FP cavity narrowband filter is provided.
  • Fig. 2 is a schematic structural diagram of a miniature FP cavity narrowband filter according to a second embodiment of the present disclosure.
  • the micro FP cavity narrowband filter of this embodiment has the same other components, the difference is that: the micro package filter structure of this embodiment is a single-port bidirectional input and output package The filter structure has the same input and output ports.
  • the miniature FP cavity narrowband filter of this embodiment includes: a miniature package filter structure that integrates internal components into the same miniature package 6 through an optical micromachining process.
  • the following components are packaged inside (that is, the internal components include): FP cavity 1, thermistor 2, semiconductor refrigerator 3, collimator 4, optical fiber 5, and reflector 8.
  • the micro package body 6 is provided with pins 7.
  • the thermistor 2, the semiconductor refrigerator 3, the miniature package body 6, and the pins 7 are basically the same as the first embodiment in their functions, arrangement, and specific component forms, and will not be repeated here. Other components are described in detail as follows.
  • the collimator 4 and the optical fiber 5 are used as input and output ports at the same time, and the optical fiber 5 is used to input an external optical signal to the collimator 4 (input path) or to output a narrowband filtered optical signal (output Path); the collimator 4 is used to expand the optical signal input by the optical fiber 5 and then transmit it through free space (input path) or to receive the optical signal transmitted from the FP cavity 1 after narrowband filtering (secondary filtering) ( Output path) and couple it into the optical fiber 5 for output.
  • the optical fiber 5 is used to input an external optical signal to the collimator 4 (input path) or to output a narrowband filtered optical signal (output Path); the collimator 4 is used to expand the optical signal input by the optical fiber 5 and then transmit it through free space (input path) or to receive the optical signal transmitted from the FP cavity 1 after narrowband filtering (secondary filtering) ( Output path) and couple it into the optical fiber 5 for output.
  • the reflector 8 is used to reflect the optical signal after the narrowband filtering of the FP cavity 1 back into the FP cavity and pass the FP cavity 1 for secondary filtering again.
  • the reflector 8 is a reflector product with high reflectivity, for example, the reflector 8 is coated with a high-reflection film; and/or, the reflector 8 is a right-angle prism reflector.
  • the optical fiber 5 may be, but not limited to, a 1550 nm single-mode optical fiber.
  • the collimator 4 may be, but is not limited to, a planar (G-lens) fiber collimator.
  • the external optical signal is input to the collimator 4 through the optical fiber 5.
  • the collimator 4 expands the optical signal input from the optical fiber 5 and transmits it to the FP cavity 1 through free space.
  • the FP cavity 1 expands the beam.
  • the input optical signal is narrow-band filtered and transmitted to the mirror 8 through free space.
  • the mirror 8 reflects the optical signal after the narrow-band filtering of the FP cavity 1 back to the FP cavity 1 and then passes through the FP cavity 1 for secondary filtering.
  • the sub-filtered optical signal is received by the collimator 4 and then coupled into the optical fiber 5 for output.
  • the reflector 8 is a right-angle prism reflector; the reflector 8 is coated with a high-reflection film.
  • the optimization process of the micro FP cavity narrowband filter is as follows: For a single FP cavity, by optimizing the parameter design of the FP cavity, in the 1550nm band, the transmittance can be greater than 90% and the line width is about FP cavity product at 10pm. Through the optical micro-machining process, the parameters of the optical fiber and the collimator are optimized to achieve a coupling efficiency better than 80%. Since the optical signal passes through the FP cavity twice, the actual transmittance is better than 80% and the line width is about 7 pm. On the basis of the above two optimizations, by integrating the optimized performance of the FP cavity with the TEC, the thermistor and the TEC are integrated, and the optical fiber and collimator form a filter optical path.
  • the size of the miniature FP cavity narrowband filter is 2.5cm*1.2cm*0.8cm, and the volume and size are small, and it can be applied to various complex application environments.
  • the optical signal in the micro FP cavity narrowband filter of the second embodiment passes through the FP cavity twice, which can achieve narrower linewidth filtering.
  • the input and output uses the same optical fiber and collimation It can further simplify the volume and size of the miniature FP cavity narrowband filter, that is, further simplify the size and volume and further narrow the line width, but the efficiency will be reduced to a certain extent.
  • the present disclosure provides a miniature FP cavity narrowband filter, which integrates FP cavity, thermistor, semiconductor cooler, collimator, optical fiber and other devices in the same miniature package through optical micromachining processes, for example.
  • FP cavity narrowband filter which integrates FP cavity, thermistor, semiconductor cooler, collimator, optical fiber and other devices in the same miniature package through optical micromachining processes, for example.
  • the packaged micro FP cavity is less affected by the external environment, and the thermistor and FP cavity are integrated on the semiconductor cooler, which can achieve stable control of the FP cavity temperature, and further improve the FP cavity based
  • the reliability and stability of the micro-package filter structure are not easily affected by the external environment, and it has the comprehensive performance of narrow line width, high efficiency, small size, high integration, better reliability and stability.

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Abstract

一种微型FP腔窄带滤波器，包括一微型封装滤波结构，通过光学微加工工艺将内部器件集成于同一微型封装体内部，内部器件包括：半导体制冷器、FP腔、热敏电阻、光纤和准直器，有的实施例包括反射镜；其中FP腔和热敏电阻集成于半导体制冷器上。该微型封装滤波结构为单向输入、单向输出或者单端口双向输入输出的封装滤波结构。通过将FP腔、热敏电阻、半导体制冷器等器件集成在同一个微型封装体内，能够实现高效率的光学耦合，封装后的FP腔受到外界环境的影响较小；同时热敏电阻和FP腔均集成于半导体制冷器上，实现对FP腔温度的稳定控制。微型FP腔窄带滤波器具有窄线宽、高效率、体积小、集成度高、较好的可靠性和稳定性的综合性能。

Description

微型FP腔窄带滤波器 技术领域
本公开属于光学滤波领域，涉及一种微型FP腔窄带滤波器。
背景技术
法布里-珀罗腔FP腔，Fabry-Perot腔滤波器是现代光纤通信和光纤传感等领域中的重要器件之一。FP腔一般是由内表面镀高反射膜、外表面镀增透膜的玻璃板构成，入射光束在腔内可发生多光束干涉效应，满足相位匹配条件的光波产生相长干涉，形成滤波输出；而不满足相位条件的光波产生相消干涉，被FP腔一侧反射输出。通过优化FP腔的参数设计，可以实现高透过率、窄线宽的FP腔窄带滤波器。与其它基于原子滤波、相干滤波片、光栅滤波的滤波器等相比，FP腔滤波器可以实现工作滤波段范围广、中心波长可调谐、滤波线宽较窄、光学效率较高等优点，具备广泛的应用场景。
但是现有的基于FP腔的窄带滤波器的体积、尺寸比较大，对应的性能较差，容易受到外界环境因素的影响，可靠性和稳定性较差。
发明内容
本公开提供了一种微型FP腔窄带滤波器，以至少部分解决以上所提出的技术问题。
根据本公开的一个方面，提供了一种微型FP腔窄带滤波器，包括一微型封装滤波结构，该微型封装滤波结构通过光学微加工工艺将内部器件集成于同一微型封装体6内部，所述内部器件包括：FP腔1，其用于对输入的光信号进行窄带滤波；半导体制冷器3，该FP腔1集成于该半导体制冷器3上，该半导体制冷器3用于控制FP腔的环境温度；热敏电阻2，集成于该半导体制冷器3上，用于采集该FP腔1的环境温度。
在本公开的一些实施例中，该微型封装滤波结构为单向输入、单向输出的封装滤波结构，所述内部器件还包括：第一光纤51，其部分封装于微型封装体6内部；第一准直器41，与第一光纤51连接；第二光纤52，其 部分封装于微型封装体6内部；以及第二准直器42，与第二光纤52连接；
其中，外部光信号通过该第一光纤51输入至第一准直器41，第一准直器41将第一光纤51输入的光信号进行扩束后经自由空间传输至FP腔1，FP腔1对扩束后输入的光信号进行窄带滤波后经过自由空间传输，第二准直器42接收FP腔1进行窄带滤波后传输过来的光信号，并将其耦合进第二光纤52输出。
在本公开的一些实施例中，该微型封装滤波结构为单端口双向输入输出的封装滤波结构，所述内部器件还包括：光纤5，其部分封装于微型封装体6内部；准直器4，与光纤5连接；以及反射镜8，设置于FP腔1所在光路；
其中，外部光信号通过该光纤5输入至准直器4，准直器4将光纤5输入的光信号进行扩束后经自由空间传输至FP腔1，FP腔1对扩束后输入的光信号进行窄带滤波后经过自由空间传输至反射镜8，反射镜8将经过FP腔1进行窄带滤波后的光信号反射回FP腔1中再次经过该FP腔1进行二次滤波，二次滤波后的光信号经过准直器4接收后耦合进光纤5输出。
在本公开的一些实施例中，反射镜8上镀有高反膜；和/或，反射镜8为直角棱镜反射镜。
在本公开的一些实施例中，第一准直器41、第二准直器42和准直器4为G-lens光纤准直器；和/或，第一光纤51、第二光纤52和光纤5为单模光纤。
在本公开的一些实施例中，微型封装体6上设置有管脚7。
在本公开的一些实施例中，半导体制冷器3和热敏电阻2均与微型封装体6上的管脚7相连，通过控制半导体制冷器3和热敏电阻2来对FP腔1的工作温度进行调节，从而改变微型封装滤波结构的滤波中心波长，实现调谐。
在本公开的一些实施例中，半导体制冷器3为基于帕尔帖效应的半导体制冷器。
在本公开的一些实施例中，热敏电阻2为负温度系数的热敏电阻。
在本公开的一些实施例中，微型FP腔窄带滤波器的外形尺寸不大于 4cm*1.2cm*0.8cm。
从上述技术方案可以看出，本公开实施例提供的微型FP腔窄带滤波器，至少具有以下有益效果：
1、封装滤波结构由于将FP腔、热敏电阻、半导体制冷器等器件通过光学微加工工艺集成在同一个微型封装体内，能够实现高效率的光学耦合，体积小、集成度高，在此基础上，能够实现窄线宽、高效率的高性能FP腔滤波器。其中，封装后的微型FP腔受到外界环境的影响较小，同时热敏电阻和FP腔均集成于半导体制冷器上，能够实现对FP腔温度的稳定控制，更进一步的提高了基于FP腔的微型封装滤波结构的可靠性和稳定性，不易受到外界环境的影响。
2、微型封装体内部的热敏电阻和半导体制冷器都能通过管脚对外进行连接，通过控制半导体制冷器和热敏电阻来对FP腔的工作温度进行调节，从而改变微型封装滤波结构的滤波中心波长，实现对该微型FP腔窄带滤波器的调谐，便于集成控制。
3、在实施例中提出两种微型封装滤波结构，第一种为单向输入、单向输出的封装滤波结构，该结构的微型FP腔窄带滤波器最终能实现线宽为10pm、效率优于70％，典型地，在一实例中，微型FP腔窄带滤波器的外形尺寸为4cm*1.2cm*0.8cm，体积和尺寸较小，可以适用于各种复杂的应用环境，具有体积小、集成度高、高效率、高稳定的优点；第二种为单端口双向输入输出的封装滤波结构，该结构的微型FP腔窄带滤波器能实现更窄线宽的滤波，但是效率会有一定程度的降低，例如最终能实现线宽为7pm、效率优于60％，典型地，在一实例中，微型FP腔窄带滤波器的外形尺寸为2.5cm*1.2cm*0.8cm，实现对于尺寸和体积的进一步简化以及线宽的进一步压窄。
附图说明
图1为根据本公开第一实施例所示的微型FP腔窄带滤波器的结构示意图。
图2为根据本公开第二实施例所示的微型FP腔窄带滤波器的结构示意图。
【符号说明】
1-FP腔；                        2-热敏电阻；
3-半导体制冷器；                4-准直器；
41-第一准直器；                 42-第二准直器；
51-第一光纤；                   52-第二光纤；
5-光纤；                        6-微型封装体；
7-管脚；                        8-反射镜。
具体实施方式
目前，基于FP腔的窄带滤波器多采用分立器件的方案，使用光纤经过准直器扩束后，经过FP腔进行滤波，再经过准直器耦合后使用光纤输出。这种基于分立器件的FP腔滤波器，体积、尺寸比较大，导致其性能较差、集成度较低，同时容易受到外界环境因素的影响，可靠性和稳定性较差。
因此，本申请通过光学微加工工艺将光纤、准直器、FP腔、热敏电阻、半导体制冷器等器件集成于同一个微型封装体内部，形成一微型封装滤波结构，其外形尺寸不大于4cm*1.2cm*0.8cm，具有体积小、集成度高、稳定性强的优点，在此基础上，可以实现窄线宽、高效率的高性能FP腔滤波器。其中，通过集成使得各个器件之间具有更紧密的联系，有利于实现耦合效率的优化，微型化的设置也使得热敏电阻和半导体制冷器具有温度传感精度高的优势，从而改善了器件性能，使得器件能够实现高效率的光学耦合，封装后的微型FP腔受到外界环境的影响较小，同时热敏电阻和FP腔均集成于半导体制冷器上，能够实现对FP腔温度的稳定控制，更进一步的提高了基于FP腔的封装滤波结构的可靠性和稳定性，具有窄线宽、高效率、体积小、集成度高、较好的可靠性和稳定性的综合性能。
本公开的微型FP腔窄带滤波器，包括一微型封装滤波结构，该微型封装滤波结构通过光学微加工工艺将内部器件集成于同一微型封装体内部，该内部器件包括：FP腔，用于对输入的光信号进行窄带滤波；半导体制冷器，FP腔集成于该半导体制冷器上，该半导体制冷器用于控制FP腔的环境温度；热敏电阻，集成于该半导体制冷器上，用于采集该FP腔 的环境温度；对于单向输入、单向输出的封装滤波结构来说，该内部器件还包括：输入光纤(第一光纤)、输出光纤(第二光纤)、输入准直器(第一准直器)和输出准直器(第二准直器)，对于单端口双向输入输出的封装滤波结构来说，该内部器件还包括：用于输入输出的光纤、用于输入输出的准直器和用于光路反向的反射镜。
在本公开的一些实施例中，微型封装体上设置有管脚。优选的，半导体制冷器和热敏电阻均与封装体上的管脚相连，通过控制半导体制冷器和热敏电阻来对FP腔的工作温度进行调节，从而改变封装滤波结构的滤波中心波长，实现调谐。
将微型封装滤波结构内部器件集成于同一个微型封装体内，能够实现高效率的光学耦合，体积小、集成度高，在此基础上，可以实现窄线宽、高效率的高性能FP腔滤波器。其中，封装后的微型FP腔受到外界环境的影响较小，同时热敏电阻和FP腔均集成于半导体制冷器上，能够实现对FP腔温度的稳定控制，更进一步的提高了基于FP腔的封装滤波结构的可靠性和稳定性。
此外，封装体内部的热敏电阻和半导体制冷器都能通过管脚对外进行连接，通过控制半导体制冷器和热敏电阻来对FP腔的工作温度进行调节，从而改变封装滤波结构的滤波中心波长，实现对该微型FP腔窄带滤波器的调谐，便于集成控制。
在本公开的一些实施例中，该微型封装滤波结构为单向输入、单向输出的封装滤波结构，例如第一实施例中所示。
在本公开的一些实施例中，该微型封装滤波结构为单端口双向输入输出的封装滤波结构，其输入输出端为同一端口，例如第二实施例所示。
为使本公开的目的、技术方案和优点更加清楚明白，以下结合具体实施例，并参照附图，对本公开进一步详细说明。本公开中，术语“外部光信号”中的“外部”是相对于微型封装滤波结构内部而言的，该外部光信号通过光纤输入至微型封装滤波结构中后称为输入的光信号或者光信号，在光路中存在的表述“输入的光信号”、以及“光信号”均为本领域技术人员所能理解的常规概念。
第一实施例
在本公开的第一个示例性实施例中，提供了一种微型FP腔窄带滤波器。
图1为根据本公开第一实施例所示的微型FP腔窄带滤波器的结构示意图。
参照图1所示，本实施例的微型FP腔窄带滤波器，包括：一微型封装滤波结构，该微型封装滤波结构通过光学微加工工艺将内部器件集成于同一微型封装体6内部，该微型封装体6的内部封装有如下器件(即内部器件包括)：FP腔1、热敏电阻2、半导体制冷器3、第一准直器41、第一光纤51、第二准直器42、以及第二光纤52。该微型封装体6上设置有管脚7。
本实施例对应的封装滤波结构为单向输入、单向输出的封装滤波结构，其输入端与第一光纤51相连，其输出端与第二光纤52相连。其中，第一光纤51和第二光纤52的部分封装于微型封装体6内部，剩下的部分位于微型封装体之外，用于接收外部光信号将之传输至微型封装滤波结构的内部。
下面结合附图对本实施例中微型FP腔窄带滤波器的各个部分进行详细介绍。
本实施例中，FP腔1，集成于半导体制冷器3上，用于对输入的光信号进行窄带滤波；热敏电阻2，集成于半导体制冷器3上，用于采集FP腔1的环境温度。
本实施例中，第一准直器41，与第一光纤51连接；第二准直器42，与第二光纤52连接。其中，第一光纤51为输入光纤，用于将光信号输入到第一准直器41中进行输入；第二光纤52为输出光纤，用于将第二准直器42中输出的光信号进行耦合输出。
其中，第一光纤51用于将外部光信号输入到第一准直器41。
第一准直器41用于将第一光纤51输入的光信号扩束后经自由空间传输。
FP腔1用于将第一准直器41传输过来的光信号进行窄带滤波后经过自由空间传输。
第二准直器42用于接收FP腔1进行窄带滤波后传输过来的光信号， 并将其耦合进第二光纤52。
第二光纤52用于将窄带滤波后的光信号耦合输出。
FP腔1集成于半导体制冷器3(TEC)上，TEC 3用于对FP腔1的温度进行控制。
热敏电阻2集成于TEC 3上，热敏电阻2用于采集FP腔1的环境温度。
微型封装体6，用于将第一光纤(输入光纤)51、第二光纤(输出光纤)52、TEC 3、热敏电阻2、FP腔1、第一准直器(输入准直器)41以及第二准直器(输出准直器)42安装集成在一起，起着安装、固定、密封、保护芯片及增强电热性能等方面的作用。
管脚7，用于将微型封装体6内的集成芯片的接点通过导线(例如金线)连接到封装的外壳上，封装内部的TEC 3和热敏电阻2都可以通过管脚7对外进行连接，实现集成控制，具有控制方便的优点。
参照图1所示，外部光信号(图中并未示意光路)通过该第一光纤51输入至第一准直器41，第一准直器41将第一光纤51输入的光信号进行扩束后经自由空间传输至FP腔1，FP腔1对扩束后输入的光信号进行窄带滤波后经过自由空间传输，第二准直器42接收FP腔1进行窄带滤波后传输过来的光信号，并将其耦合进第二光纤52输出。
其中，半导体制冷器3和热敏电阻2均与微型封装体6上的管脚7相连，通过控制半导体制冷器3和热敏电阻2来对FP腔1的工作温度进行调节，从而改变微型封装滤波结构的滤波中心波长，实现调谐。
优选的，半导体制冷器3为基于帕尔帖效应的半导体制冷器。
优选的，热敏电阻2为负温度系数的热敏电阻。
典型地，光信号可以工作在1550nm波段，输入光纤可以但不限于为1550nm的单模光纤。典型地，第一准直器41、第二准直器42可以但不限于是平面型(G-lens)光纤准直器。
本实施例中，微型封装滤波结构通过光学微加工工艺将FP腔1、热敏电阻2、半导体制冷器3、第一准直器41、第一光纤51、第二准直器42、以及第二光纤52等内部器件集成封装在微型封装体6中。
在一实例中，该微型FP腔窄带滤波器的优化设置过程如下：对于单 独的FP腔来说，通过优化FP腔的参数设计，在1550nm波段，可以实现透过率大于90％、线宽约10pm的FP腔产品，将该优化设置作为微型FP腔窄带滤波器中的FP腔的设置；通过光学微加工工艺，将第一光纤、第一准直器、第二准直器和第二光纤的参数进行优化设置，可以实现优于80％的耦合效率。在上述前两个优化基础上，通过将性能优化的FP腔与TEC集成，将热敏电阻与TEC集成，与光纤、准直器形成滤波光路，最终可以实现线宽约10pm、效率优于70％(90％×80％＝72％)的高性能FP腔窄带滤波器。典型地，该微型FP腔窄带滤波器的外形尺寸为4cm*1.2cm*0.8cm，体积和尺寸较小，可以适用于各种复杂的应用环境中。
本实施例的微型FP腔窄带滤波器具有体积小、集成度高、高效率、高稳定的优点。
第二实施例
在本公开的第二个示例性实施例中，提供了一种微型FP腔窄带滤波器。
图2为根据本公开第二实施例所示的微型FP腔窄带滤波器的结构示意图。
参照图2所示，本实施例的微型FP腔窄带滤波器与第一个实施例相比，其他部件相同，区别之处在于：本实施例的微型封装滤波结构为单端口双向输入输出的封装滤波结构，其输入输出端为同一端口。
具体的，本实施例的微型FP腔窄带滤波器，包括：一微型封装滤波结构，该微型封装滤波结构通过光学微加工工艺将内部器件集成于同一微型封装体6内部，该微型封装体6的内部封装有如下器件(即内部器件包括)：FP腔1、热敏电阻2、半导体制冷器3、准直器4、光纤5、以及反射镜8。该微型封装体6上设置有管脚7。
热敏电阻2、半导体制冷器3、微型封装体6、和管脚7的作用、设置方式、以及具体部件形式等与第一个实施例基本相同，这里不再赘述，其他部件详细说明如下。
本实施例中，准直器4和光纤5同时作为输入输出端口，光纤5用于将外部光信号输入到准直器4(输入路径)或者用于将窄带滤波后的光信号进行输出(输出路径)；准直器4用于将光纤5输入的光信号进行扩束 后经自由空间传输(输入路径)或者用于接收FP腔1进行窄带滤波后(二次滤波)传输过来的光信号(输出路径)，并将其耦合进光纤5进行输出。
本实施例中，反射镜8用于将经过FP腔1进行窄带滤波后的光信号反射回FP腔中再次经过该FP腔1进行二次滤波。
优选的，反射镜8选择具有高反射率的反射镜产品，例如，该反射镜8上镀有高反膜；和/或，该反射镜8选用直角棱镜反射镜。
典型地，光纤5可以但不限于为1550nm的单模光纤。典型地，准直器4可以但不限于是平面型(G-lens)光纤准直器。
参照图2所示，外部光信号通过光纤5输入至准直器4，准直器4将光纤5输入的光信号进行扩束后经自由空间传输至FP腔1，FP腔1对扩束后输入的光信号进行窄带滤波后经过自由空间传输至反射镜8，反射镜8将经过FP腔1进行窄带滤波后的光信号反射回FP腔1中再次经过该FP腔1进行二次滤波，二次滤波后的光信号经过准直器4接收后耦合进光纤5输出。
在本公开的一些实施例中，反射镜8选用直角棱镜反射镜；反射镜8上镀有高反膜。
在一实例中，该微型FP腔窄带滤波器的优化设置过程如下：对于单独的FP腔来说，通过优化FP腔的参数设计，在1550nm波段，可以实现透过率大于90％、线宽约10pm的FP腔产品。通过光学微加工工艺，将光纤和准直器的参数进行优化设置，可以实现优于80％的耦合效率。由于光信号两次经过FP腔，实际的透过率优于80％、线宽约7pm。在上述前两个优化基础上，通过将性能优化的FP腔与TEC集成，将热敏电阻与TEC集成，与光纤、准直器形成滤波光路，最终可以实现线宽约7pm、效率优于60％(90％×90％×80％＝64％)的高性能FP腔窄带滤波器。典型地，该微型FP腔窄带滤波器的外形尺寸为2.5cm*1.2cm*0.8cm，体积和尺寸较小，可以适用于各种复杂的应用环境中。
与第一实施例相比，第二实施例的微型FP腔窄带滤波器中光信号两次通过FP腔，可以实现更窄线宽的滤波，同时，由于输入输出使用了同一根光纤和准直器，可以进一步简化该微型FP腔窄带滤波器的体积和尺寸，即能够实现对于尺寸和体积的进一步简化以及线宽的进一步压窄，但 是效率会有一定程度的降低。
综上所述，本公开提供了一种微型FP腔窄带滤波器，将FP腔、热敏电阻、半导体制冷器、准直器、光纤等器件通过例如光学微加工工艺集成在同一个微型封装体内，能够实现高效率的光学耦合，体积小、集成度高，在此基础上，可以实现窄线宽、高效率的高性能FP腔滤波器。其中，封装后的微型FP腔受到外界环境的影响较小，同时热敏电阻和FP腔均集成于半导体制冷器上，能够实现对FP腔温度的稳定控制，更进一步的提高了基于FP腔的微型封装滤波结构的可靠性和稳定性，不易受到外界环境的影响，具有窄线宽、高效率、体积小、集成度高、较好的可靠性和稳定性的综合性能。
贯穿附图，相同的元素由相同或相近的附图标记来表示。在可能导致对本公开的理解造成混淆时，将省略常规结构或构造。并且图中各部件的形状和尺寸不反映真实大小和比例，而仅示意本公开实施例的内容。另外，在权利要求中，不应将位于括号之间的任何参考符号构造成对权利要求的限制。
另外，为实现图面整洁的目的，一些习知惯用的结构与组件在附图可能会以简单示意的方式绘示之。另外，本案的附图中部分的特征可能会略为放大或改变其比例或尺寸，以达到便于理解与观看本公开的技术特征的目的，但这并非用于限定本公开。依照本公开的内容所制造的产品的实际尺寸与规格应是可依据生产时的需求、产品本身的特性、及搭配本公开的内容据以调整，于此先进行声明。
除非有所知名为相反之意，本说明书及所附权利要求中的数值参数是近似值，能够根据通过本公开的内容所得的所需特性改变。具体而言，所有使用于说明书及权利要求中表示组成的含量、反应条件等等的数字，应理解为在所有情况中是受到“约”的用语所修饰。一般情况下，其表达的含义是指包含由特定数量在一些实施例中±10％的变化、在一些实施例中±5％的变化、在一些实施例中±1％的变化、在一些实施例中±0.5％的变化。
说明书与权利要求中所使用的序数例如“第一”、“第二”、“第三”等的用词，以修饰相应的元件，其本身并不意味着该元件有任何的序数，也 不代表某一元件与另一元件的顺序、或是制造方法上的顺序，该些序数的使用仅用来使具有某命名的一元件得以和另一具有相同命名的元件能做出清楚区分。
再者，单词“包含”不排除存在未列在权利要求中的元件或步骤。位于元件之前的单词“一”或“一个”不排除存在多个这样的元件。
除非存在技术障碍或矛盾，本公开的上述各种实施方式可以自由组合以形成另外的实施例，这些另外的实施例均在本公开的保护范围中。
以上所述的具体实施例，对本公开的目的、技术方案和有益效果进行了进一步详细说明，所应理解的是，以上所述仅为本公开的具体实施例而已，并不用于限制本公开，凡在本公开的精神和原则之内，所做的任何修改、等同替换、改进等，均应包含在本公开的保护范围之内。

Claims (10)

  1. 一种微型FP腔窄带滤波器，其特征在于，包括一微型封装滤波结构，该微型封装滤波结构通过光学微加工工艺将内部器件集成于同一微型封装体(6)内部，所述内部器件包括：
    FP腔(1)，其用于对输入的光信号进行窄带滤波；
    半导体制冷器(3)，该FP腔(1)集成于该半导体制冷器(3)上，该半导体制冷器(3)用于控制该FP腔(1)的环境温度；
    热敏电阻(2)，集成于该半导体制冷器(3)上，用于采集该FP腔(1)的环境温度。
  2. 根据权利要求1所述的微型FP腔窄带滤波器，其特征在于，该微型封装滤波结构为单向输入、单向输出的封装滤波结构，所述内部器件还包括：第一光纤(51)，其部分封装于微型封装体(6)内部；第一准直器(41)，与第一光纤(51)连接；第二光纤(52)，其部分封装于微型封装体(6)内部；以及第二准直器(42)，与第二光纤(52)连接；
    其中，外部光信号通过该第一光纤(51)输入至第一准直器(41)，第一准直器(41)将第一光纤(51)输入的光信号进行扩束后经自由空间传输至FP腔(1)，FP腔(1)对扩束后输入的光信号进行窄带滤波后经过自由空间传输，第二准直器(42)接收FP腔(1)进行窄带滤波后传输过来的光信号，并将其耦合进第二光纤(52)输出。
  3. 根据权利要求1所述的微型FP腔窄带滤波器，其特征在于，该微型封装滤波结构为单端口双向输入输出的封装滤波结构，所述内部器件还包括：光纤(5)，其部分封装于微型封装体(6)内部；准直器(4)，与光纤(5)连接；以及反射镜(8)，设置于FP腔(1)所在光路；
    其中，外部光信号通过该光纤(5)输入至准直器(4)，准直器(4)将光纤(5)输入的光信号进行扩束后经自由空间传输至FP腔(1)，FP腔(1)对扩束后输入的光信号进行窄带滤波后经过自由空间传输至反射镜(8)，反射镜(8)将经过FP腔(1)进行窄带滤波后的光信号反射回FP腔(1)中再次经过该FP腔(1)进行二次滤波，二次滤波后的光信号经过准直器(4)接收后耦合进光纤(5)输出。
  4. 根据权利要求3所述的微型FP腔窄带滤波器，其特征在于，
    所述反射镜(8)上镀有高反膜；和/或，
    所述反射镜(8)为直角棱镜反射镜。
  5. 根据权利要求2或3所述的微型FP腔窄带滤波器，其特征在于，
    所述第一准直器(41)、第二准直器(42)和准直器(4)为平面光纤准直器；和/或，
    所述第一光纤(51)、第二光纤(52)和光纤(5)为单模光纤。
  6. 根据权利要求1至3中任一项所述的微型FP腔窄带滤波器，其特征在于，
    所述微型封装体(6)上设置有管脚(7)。
  7. 根据权利要求6所述的微型FP腔窄带滤波器，其特征在于，
    所述半导体制冷器(3)和热敏电阻(2)均与微型封装体(6)上的管脚(7)相连，通过控制半导体制冷器(3)和热敏电阻(2)来对FP腔(1)的工作温度进行调节，从而改变微型封装滤波结构的滤波中心波长，实现调谐。
  8. 根据权利要求1所述的微型FP腔窄带滤波器，其特征在于，所述半导体制冷器(3)为基于帕尔帖效应的半导体制冷器。
  9. 根据权利要求1所述的微型FP腔窄带滤波器，其特征在于，所述热敏电阻(2)为负温度系数的热敏电阻。
  10. 根据权利要求1所述的微型FP腔窄带滤波器，其特征在于，所述微型FP腔窄带滤波器的外形尺寸不大于4cm*1.2cm*0.8cm。
PCT/CN2019/114050 2019-03-05 2019-10-29 微型fp腔窄带滤波器 Ceased WO2020177350A1 (zh)

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