WO2020172994A1 - Display panel and detection method therefor - Google Patents

Display panel and detection method therefor Download PDF

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Publication number
WO2020172994A1
WO2020172994A1 PCT/CN2019/085632 CN2019085632W WO2020172994A1 WO 2020172994 A1 WO2020172994 A1 WO 2020172994A1 CN 2019085632 W CN2019085632 W CN 2019085632W WO 2020172994 A1 WO2020172994 A1 WO 2020172994A1
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Prior art keywords
layer
disposed
display panel
transparent electrode
substrate
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PCT/CN2019/085632
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French (fr)
Chinese (zh)
Inventor
蒙艳红
江志雄
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深圳市华星光电半导体显示技术有限公司
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Publication of WO2020172994A1 publication Critical patent/WO2020172994A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device

Definitions

  • the present invention relates to a display panel, in particular to a display panel with a high aperture ratio.
  • the common bottom grid structure (Bottom gate) thin-film transistor and color filter The process of on array, TFT+COA) is shown in Figure 1.
  • the color film (CF) 20' including color resistance (R/G/B) is digged to form an opening (shown by the arrow in Figure 1).
  • the usual color film (CF) 20' has an opening (shown by the arrow in Figure 1).
  • the size shown) is 30um*30um. Such a large opening greatly reduces the aperture ratio in the panel design.
  • the present invention provides a display panel, which includes: an array substrate; a color resist (RGB) layer disposed on the substrate; a buffer layer disposed on the color resist layer; a thin film Transistor (thin-film transistor, TFT), configured on the buffer layer; a passivation (PV) layer, configured on the thin film transistor and the passivation layer has an opening; a first transparent electrode layer, configured On the passivation layer, conformally cover the sidewalls and bottom of the opening of the passivation layer, wherein the thin film transistor and the first transparent electrode layer are electrically connected through the opening
  • a liquid-crystal display (LCD) layer is disposed on the first transparent electrode layer; and a color filter (CF) substrate is disposed on the liquid crystal layer.
  • LCD liquid-crystal display
  • CF color filter
  • the thin film transistor includes: a gate (G) is disposed on the array substrate; a gate insulating (gate insulating, IG) layer disposed on the gate and the array substrate; a semiconductor layer disposed on the gate insulating layer; and a source drain (source The drain (SD) layer includes a source (S) and a drain (Drain, D), and the source and the drain cover both ends of the semiconductor layer.
  • the display panel further includes: a second transparent electrode layer disposed under the color filter substrate.
  • the display panel further includes: a black matrix (BM) layer disposed between the color filter substrate and the second transparent electrode layer.
  • BM black matrix
  • the array substrate and the color filter substrate are each independently a glass substrate.
  • the buffer layer includes at least one of silicon oxide and silicon nitride.
  • the display panel further includes: an etch stop layer (ESL) disposed on the thin film transistor, and the opening further penetrates the etch stop layer.
  • ESL etch stop layer
  • the size of the opening is 10um*10um to 8um*8um, preferably 8um*8um to 6um*6um, most preferably 6um*6um.
  • the first transparent electrode layer and the second transparent electrode each independently include at least one of the following: indium tin oxide (ITO), indium zinc oxide (IZO), Indium gallium oxide (IGO), indium gallium zinc oxide (IGZO), tin oxide (TiO2), zinc oxide (ZnO), indium oxide (In2O3), and gallium oxide (Ga2O3).
  • ITO indium tin oxide
  • IZO indium zinc oxide
  • IGO Indium gallium oxide
  • IGZO indium gallium zinc oxide
  • TiO2 tin oxide
  • ZnO zinc oxide
  • In2O3 indium oxide
  • Ga2O3 gallium oxide
  • the display panel further includes: a photo spacer (PS) disposed between the array substrate and the color filter substrate.
  • PS photo spacer
  • the semiconductor layer includes an amorphous silicon (a-Si).
  • the purpose of the present invention is to provide a display panel with a high aperture ratio.
  • a new type of array on CF backplane manufacturing method it avoids the problem of color resistance (R/G/B).
  • the color film (CF) adopts a large hole design to increase the aperture ratio.
  • Figure 1 is a schematic diagram of a conventional display panel.
  • FIG. 2 is a schematic diagram of a display panel according to an embodiment of the invention.
  • the present invention provides a display panel with a high aperture ratio.
  • the array on the color film CF) backplane manufacturing method avoids the use of large-cut holes on the color film (CF) including color resist (R/G/B), thereby increasing the aperture ratio.
  • FIG. 2 is a schematic diagram of a display panel according to an embodiment of the invention.
  • the present invention provides a display panel 2, an array substrate 10; a color resist (RGB) layer 20 disposed on the array substrate 10; a buffer layer 30 disposed on the color On the resist layer 20; a thin-film transistor (TFT) 40 is disposed on the buffer layer 30; a passivation (PV) layer 50 is disposed on the thin-film transistor 40 and
  • the passivation layer 50 has an opening (shown by the thick arrow in FIG. 2); a first transparent electrode layer 60 is disposed on the passivation layer 50 to conformally cover the passivation layer 50 The side walls and bottom of the opening (shown by the thick arrow in FIG.
  • a liquid crystal (liquid-crystal display, LCD) layer 70 is configured on the first transparent electrode layer 60; and a color filter (CF) substrate 80 is configured on the liquid crystal layer 70.
  • the transparent electrode layer for example When the ITO
  • the drain are overlapped, there is no need to pass through the color resist layer 20, but only by etching the passivation layer 50. Therefore, in the layout design of the panel, the design space for the opening of the excellent barrier layer can be saved, thereby greatly improving the opening ratio of the panel, which is of great significance for the development of high-resolution panels.
  • the opening can be reduced to 10um*10um to 8um*8um, preferably 8um*8um to 6um*6um, more preferably 6um*6um.
  • the thin film transistor 40 has a bottom gate (Bottom Gate) structure, and includes: a gate (G) G is disposed on the array substrate 10; An insulating (gate insulating, IG) layer IG is disposed on the gate G and the array substrate 10; a semiconductor layer 40a is disposed on the gate insulating layer IG; and a source drain (source The drain (SD) layer includes a source (S) S and a drain (D) D. The source S and the drain D cover both ends of the semiconductor layer 40a.
  • the thin film transistor may also have a top gate structure.
  • the display panel 1 further includes: a second transparent electrode layer 90 disposed under the color filter substrate 80; and a light shielding (black matrix, BM) layer BM is disposed 90 between the color filter substrate 80 and the second transparent electrode layer.
  • a light shielding (black matrix, BM) layer BM is disposed 90 between the color filter substrate 80 and the second transparent electrode layer.
  • the array substrate and the substrate 80 are each independently a glass substrate.
  • the buffer layer 20 includes at least one of silicon oxide and silicon nitride.
  • the buffer layer 30 can realize the transition between the color group 20 and the thin film transistor 40.
  • the thickness of the buffer layer 20 is 2000 ⁇ to 3000 ⁇ , preferably 1000 ⁇ to 2000 ⁇ .
  • the display panel 1 may further include: an etch stop layer (ESL) 100, which is disposed on the thin film transistor 40, and the opening (shown by the thick arrow in FIG. 2) is more through Through the etch stop layer 100.
  • ESL etch stop layer
  • the first transparent electrode layer and the second transparent electrode each independently include at least one of the following: indium tin oxide (ITO), indium zinc oxide (IZO), Indium gallium oxide (IGO), indium gallium zinc oxide (IGZO), tin oxide (TiO2), zinc oxide (ZnO), indium oxide (In2O3), and gallium oxide (Ga2O3).
  • ITO indium tin oxide
  • IZO indium zinc oxide
  • IGO Indium gallium oxide
  • IGZO indium gallium zinc oxide
  • TiO2 tin oxide
  • ZnO zinc oxide
  • In2O3 indium oxide
  • Ga2O3 gallium oxide
  • the display panel further includes: a photo spacer (PS) 110 disposed between the array substrate 10 and the color filter substrate 80.
  • PS photo spacer
  • the semiconductor layer includes an amorphous silicon (a-Si).
  • the present invention provides a display panel with a high aperture ratio, with a novel color film array (array On CF) backplane manufacturing method, avoiding the use of large digging design on color film (CF) including color resistance (R/G/B), thereby increasing the aperture ratio.

Abstract

Provided is a display panel, comprising: an array substrate (10); a color resist layer (20) arranged above the substrate (10); a buffer layer (30) arranged above the color resist layer (20); a thin-film transistor (40) arranged above the buffer layer (30); a passivation layer (50) arranged above the thin-film transistor (40), wherein the passivation layer (50) is provided with an opening; a first transparent electrode layer (60) arranged above the passivation layer (50) and conformally covering the side wall and the bottom of the opening of the passivation layer (50), wherein the thin-film transistor (40) is electrically connected to the first transparent electrode layer (60) by means of the opening; a liquid crystal layer (70) arranged above the first transparent electrode layer (60); and a color filter substrate (80) arranged above the liquid crystal layer (70). The design of a large excavated hole on a color filter comprising a color resist is avoided, thereby improving the aperture ratio.

Description

显示面板及其检测方式Display panel and its detection method 技术领域Technical field
本发明涉及一种显示面板,尤其涉及一种具有高开口率的显示面板。The present invention relates to a display panel, in particular to a display panel with a high aperture ratio.
背景技术Background technique
目前,常见的底栅结构(Bottom gate)的薄膜晶体管及数组上彩膜(thin-film transistor and color filter on array, TFT+COA)的制程如图1所示。在图1所示的常规的显示面板1的示意图中,在玻璃基板10’的显示面板1上,为了实现透明电极(ITO)60’和源极漏极(S/D)的搭接,需要在包括色阻(R/G/B)的彩膜(CF)20’上进行挖孔形成开口(图1箭号所示),通常的彩膜(CF)20’开口(图1箭号所示)的大小为30um*30um,如此大的开孔在面板设计上极大的降低了开口率。At present, the common bottom grid structure (Bottom gate) thin-film transistor and color filter The process of on array, TFT+COA) is shown in Figure 1. In the schematic diagram of the conventional display panel 1 shown in FIG. 1, on the display panel 1 of the glass substrate 10', in order to realize the overlap between the transparent electrode (ITO) 60' and the source drain (S/D), The color film (CF) 20' including color resistance (R/G/B) is digged to form an opening (shown by the arrow in Figure 1). The usual color film (CF) 20' has an opening (shown by the arrow in Figure 1). The size shown) is 30um*30um. Such a large opening greatly reduces the aperture ratio in the panel design.
技术问题technical problem
为了解决现有技术所存在的问题,急需一种具有高开口率的显示面板,藉由新型的彩膜上数组(array on CF)的背板制作方法,避免在包括色阻(R/G/B)的彩膜(CF)上采用大挖孔设计,从而提高开口率。In order to solve the problems in the prior art, there is an urgent need for a display panel with a high aperture ratio. By using a new type of array on CF backplane manufacturing method, avoiding the problem of color resistance (R/G/ B) The color film (CF) adopts a large hole design to increase the aperture ratio.
技术解决方案Technical solutions
为了实现上述目的,本发明提供一种显示面板,包括;一数组基板;一色阻(RGB)层,配置于所述基板之上;一缓冲层,配置于所述色阻层之上;一薄膜晶体管(thin-film transistor, TFT),配置于所述缓冲层之上;一钝化(passivation, PV)层,配置于所述薄膜晶体管之上且所述钝化层具有一开口;一第一透明电极层,配置于所述钝化层之上,保形地覆盖所述钝化层之所述开口的侧壁及底部,其中所述薄膜晶体管与所述第一透明电极层藉由所述开口电性相接;一液晶(liquid-crystal display, LCD)层,配置于所述第一透明电极层之上;以及一彩膜(color filter, CF)基板,配置于所述液晶层之上。In order to achieve the above objective, the present invention provides a display panel, which includes: an array substrate; a color resist (RGB) layer disposed on the substrate; a buffer layer disposed on the color resist layer; a thin film Transistor (thin-film transistor, TFT), configured on the buffer layer; a passivation (PV) layer, configured on the thin film transistor and the passivation layer has an opening; a first transparent electrode layer, configured On the passivation layer, conformally cover the sidewalls and bottom of the opening of the passivation layer, wherein the thin film transistor and the first transparent electrode layer are electrically connected through the opening A liquid-crystal display (LCD) layer is disposed on the first transparent electrode layer; and a color filter (CF) substrate is disposed on the liquid crystal layer.
依据本发明的一实施例,在所述显示面板中,所述薄膜晶体管包括:一栅极(gate, G)配置于所述数组基板上;一栅极绝缘(gate insulating, IG)层,配置于所述栅极及所述数组基板上;一半导体层,配置于所述栅极绝缘层之上;以及一源极漏极(source drain, SD)层,包括一源极 (source, S)以及一漏极(drain, D),所述源极与所述漏极覆盖于所述半导体层的两端。According to an embodiment of the present invention, in the display panel, the thin film transistor includes: a gate (G) is disposed on the array substrate; a gate insulating (gate insulating, IG) layer disposed on the gate and the array substrate; a semiconductor layer disposed on the gate insulating layer; and a source drain (source The drain (SD) layer includes a source (S) and a drain (Drain, D), and the source and the drain cover both ends of the semiconductor layer.
依据本发明的一实施例,所述显示面板更包括:一第二透明电极层,配置于所述彩膜基板下。According to an embodiment of the present invention, the display panel further includes: a second transparent electrode layer disposed under the color filter substrate.
依据本发明的一实施例,所述显示面板更包括:一遮光(black matrix, BM)层,配置于所述彩膜基板及所述第二透明电极层之间。According to an embodiment of the present invention, the display panel further includes: a black matrix (BM) layer disposed between the color filter substrate and the second transparent electrode layer.
依据本发明的一实施例,在所述显示面板中,所述数组基板及所述彩膜基板各自独立地为一玻璃基板。According to an embodiment of the present invention, in the display panel, the array substrate and the color filter substrate are each independently a glass substrate.
依据本发明的一实施例,在所述显示面板中,所述缓冲层包括氧化硅及氮化硅中至少一者。According to an embodiment of the present invention, in the display panel, the buffer layer includes at least one of silicon oxide and silicon nitride.
依据本发明的一实施例,所述显示面板更包括:一蚀刻停止层(etch stop layer, ESL),配置于所述薄膜晶体管上,且所述开口更穿过所述蚀刻停止层。According to an embodiment of the present invention, the display panel further includes: an etch stop layer (ESL) disposed on the thin film transistor, and the opening further penetrates the etch stop layer.
依据本发明的一实施例,在所述显示面板中,所述开口大小为10um*10um至8um*8um,较佳为8um*8um至6um*6um,最佳为6um*6um。According to an embodiment of the present invention, in the display panel, the size of the opening is 10um*10um to 8um*8um, preferably 8um*8um to 6um*6um, most preferably 6um*6um.
依据本发明的一实施例,在所述显示面板中,所述第一透明电极层及第二透明电极各自独立地包括下列至少一者:氧化铟锡(ITO)、氧化铟锌(IZO)、氧化铟镓(IGO)、氧化铟镓锌(IGZO)、氧化锡(TiO2)、氧化锌(ZnO)、氧化铟(In2O3)、以及氧化镓(Ga2O3)。According to an embodiment of the present invention, in the display panel, the first transparent electrode layer and the second transparent electrode each independently include at least one of the following: indium tin oxide (ITO), indium zinc oxide (IZO), Indium gallium oxide (IGO), indium gallium zinc oxide (IGZO), tin oxide (TiO2), zinc oxide (ZnO), indium oxide (In2O3), and gallium oxide (Ga2O3).
依据本发明的一实施例,所述的显示面板更包括:一光阻(photo spacer, PS)配置于所述数组基板与所述彩膜基板之间。According to an embodiment of the present invention, the display panel further includes: a photo spacer (PS) disposed between the array substrate and the color filter substrate.
依据本发明的一实施例,在所述显示面板中,所述半导体层包括一非晶硅(a-Si)。According to an embodiment of the present invention, in the display panel, the semiconductor layer includes an amorphous silicon (a-Si).
有益效果Beneficial effect
基于上述,本发明的目的在于提供了一种具有高开口率的显示面板,藉由新型的彩膜上数组(array on CF)的背板制作方法,避免在包括色阻(R/G/B)的彩膜(CF)上采用大挖孔设计,从而提高开口率。Based on the above, the purpose of the present invention is to provide a display panel with a high aperture ratio. By using a new type of array on CF backplane manufacturing method, it avoids the problem of color resistance (R/G/B). ) The color film (CF) adopts a large hole design to increase the aperture ratio.
附图说明Description of the drawings
为了更清楚地说明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单介绍,显而易见地,下面描述中的附图仅仅是发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are merely inventions For some embodiments, those of ordinary skill in the art can obtain other drawings based on these drawings without creative work.
图1为一个常规的显示面板示意图。Figure 1 is a schematic diagram of a conventional display panel.
图2为依据本发明一实施例之显示面板的示意图。FIG. 2 is a schematic diagram of a display panel according to an embodiment of the invention.
本发明的最佳实施方式The best mode of the invention
以下各实施例的说明是参考附加的图示,用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语,例如[纵向]、[横向]、[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等,仅是参考附加图式的方向。因此,使用的方向用语是用以说明及理解本发明,而非用以限制本发明。在图中,结构相似的单元是用以相同标号表示。The description of the following embodiments refers to the attached drawings to illustrate specific embodiments that the present invention can be implemented. The directional terms mentioned in the present invention, such as [vertical], [horizontal], [top], [bottom], [front], [back], [left], [right], [inside], [outside], [Side], etc., only refer to the direction of the attached drawings. Therefore, the directional terms used are used to describe and understand the present invention, rather than to limit the present invention. In the figure, units with similar structures are indicated by the same reference numerals.
本发明提供了一种具有高开口率的显示面板,藉由新型的彩膜上数组(array on CF)的背板制作方法,避免在包括色阻(R/G/B)的彩膜(CF)上采用大挖孔设计,从而提高开口率。The present invention provides a display panel with a high aperture ratio. The array on the color film CF) backplane manufacturing method avoids the use of large-cut holes on the color film (CF) including color resist (R/G/B), thereby increasing the aperture ratio.
图2为依据本发明的一实施例之显示面板的示意图。具体的,如图2所示,本发明提供一显示面板2,一数组基板10;一色阻(RGB)层20,配置于所述数组基板10之上;一缓冲层30,配置于所述色阻层20之上;一薄膜晶体管(thin-film transistor, TFT) 40,配置于所述缓冲层30之上;一钝化(passivation, PV)层50,配置于所述薄膜晶体管 40之上且所述钝化层50具有一开口(图2粗箭号所示);一第一透明电极层60,配置于所述钝化层50之上,保形地覆盖所述钝化层50之所述开口(图2粗箭号所示)的侧壁及底部,其中所述薄膜晶体管 40与所述第一透明电极层60藉由所述开口(图2粗箭号所示)电性相接;一液晶(liquid-crystal display, LCD)层70,配置于所述第一透明电极层60之上;以及一彩膜(color filter, CF)基板80,配置于所述液晶层70之上。FIG. 2 is a schematic diagram of a display panel according to an embodiment of the invention. Specifically, as shown in FIG. 2, the present invention provides a display panel 2, an array substrate 10; a color resist (RGB) layer 20 disposed on the array substrate 10; a buffer layer 30 disposed on the color On the resist layer 20; a thin-film transistor (TFT) 40 is disposed on the buffer layer 30; a passivation (PV) layer 50 is disposed on the thin-film transistor 40 and The passivation layer 50 has an opening (shown by the thick arrow in FIG. 2); a first transparent electrode layer 60 is disposed on the passivation layer 50 to conformally cover the passivation layer 50 The side walls and bottom of the opening (shown by the thick arrow in FIG. 2), wherein the thin film transistor 40 and the first transparent electrode layer 60 are electrically connected through the opening (shown by the thick arrow in FIG. 2) A liquid crystal (liquid-crystal display, LCD) layer 70 is configured on the first transparent electrode layer 60; and a color filter (CF) substrate 80 is configured on the liquid crystal layer 70.
与图1所示的传统COA制程相比,在图2所示的新制程方法中,由于在制程第一步时首先完成了色阻(RGB)层20的制作,所以在透明电极层(例如ITO)与漏极的搭接时,无需通过色阻层20,只需通过对钝化层50的蚀刻即可实现。所以在面板的布局设计上,可以省出色阻层开口的设计空间,从而极大提高了面板的开口率,这对高分辨率的面板开发是具有极大意义的。Compared with the traditional COA process shown in FIG. 1, in the new process method shown in FIG. 2, since the production of the color resist (RGB) layer 20 is completed in the first step of the process, the transparent electrode layer (for example When the ITO) and the drain are overlapped, there is no need to pass through the color resist layer 20, but only by etching the passivation layer 50. Therefore, in the layout design of the panel, the design space for the opening of the excellent barrier layer can be saved, thereby greatly improving the opening ratio of the panel, which is of great significance for the development of high-resolution panels.
与图1传统COA制程的30um*30um彩膜(CF)开口相比,在图2的显示面板2中,藉由新型的彩膜上数组(array on CF) 制程,可将所述开口缩减至10um*10um至8um*8um,优选为8um*8um至6um*6um,更优选为6um*6um。Compared with the 30um*30um color film (CF) opening of the traditional COA process in Figure 1, in the display panel 2 of Figure 2, a new type of color film on the array (array on CF) process, the opening can be reduced to 10um*10um to 8um*8um, preferably 8um*8um to 6um*6um, more preferably 6um*6um.
在一实施例中,如图2所示,所述薄膜晶体管 40具有下闸极(Bottom Gate)结构,包括:一栅极(gate, G) G配置于所述数组基板10上;一栅极绝缘(gate insulating, IG)层IG,配置于所述栅极G及所述数组基板10上;一半导体层40a,配置于所述栅极绝缘层IG之上;以及一源极漏极(source drain, SD)层,包括一源极(source, S) S以及一漏极(drain, D) D,所述源极S与所述漏极D覆盖于所述半导体层40a的两端。在其他实施例中,所述薄膜晶体管也可具有上闸极(Top Gate)结构。In one embodiment, as shown in FIG. 2, the thin film transistor 40 has a bottom gate (Bottom Gate) structure, and includes: a gate (G) G is disposed on the array substrate 10; An insulating (gate insulating, IG) layer IG is disposed on the gate G and the array substrate 10; a semiconductor layer 40a is disposed on the gate insulating layer IG; and a source drain (source The drain (SD) layer includes a source (S) S and a drain (D) D. The source S and the drain D cover both ends of the semiconductor layer 40a. In other embodiments, the thin film transistor may also have a top gate structure.
如图2所示,依据本发明的一实施例,所述显示面板1更包括:一第二透明电极层90,配置于所述彩膜基板80下;以及一遮光(black matrix, BM)层BM,配置于所述彩膜基板80及所述第二透明电极层之间90。As shown in FIG. 2, according to an embodiment of the present invention, the display panel 1 further includes: a second transparent electrode layer 90 disposed under the color filter substrate 80; and a light shielding (black matrix, BM) layer BM is disposed 90 between the color filter substrate 80 and the second transparent electrode layer.
依据本发明的一实施例,在所述显示面板中,所述数组基板及所述基板80各自独立地为一玻璃基板。According to an embodiment of the present invention, in the display panel, the array substrate and the substrate 80 are each independently a glass substrate.
依据本发明的一实施例,在所述显示面板中,所述缓冲层20包括氧化硅及氮化硅中至少一者。缓冲层30可实现色组20与薄膜晶体管 40之间的过渡。缓冲层20的厚度为2000Å至3000Å,优选为1000Å至2000Å。According to an embodiment of the present invention, in the display panel, the buffer layer 20 includes at least one of silicon oxide and silicon nitride. The buffer layer 30 can realize the transition between the color group 20 and the thin film transistor 40. The thickness of the buffer layer 20 is 2000Å to 3000Å, preferably 1000Å to 2000Å.
参见图2,所述显示面板1可更包括:一蚀刻停止层(etch stop layer, ESL)100,配置于所述薄膜晶体管 40上,且所述开口(图2粗箭号所示)更穿过所述蚀刻停止层100。Referring to FIG. 2, the display panel 1 may further include: an etch stop layer (ESL) 100, which is disposed on the thin film transistor 40, and the opening (shown by the thick arrow in FIG. 2) is more through Through the etch stop layer 100.
依据本发明的一实施例,在所述显示面板中,所述第一透明电极层及第二透明电极各自独立地包括下列至少一者:氧化铟锡(ITO)、氧化铟锌(IZO)、氧化铟镓(IGO)、氧化铟镓锌(IGZO)、氧化锡(TiO2)、氧化锌(ZnO)、氧化铟(In2O3)、以及氧化镓(Ga2O3)。According to an embodiment of the present invention, in the display panel, the first transparent electrode layer and the second transparent electrode each independently include at least one of the following: indium tin oxide (ITO), indium zinc oxide (IZO), Indium gallium oxide (IGO), indium gallium zinc oxide (IGZO), tin oxide (TiO2), zinc oxide (ZnO), indium oxide (In2O3), and gallium oxide (Ga2O3).
参见图2,依据本发明的一实施例,所述的显示面板更包括:一间隙子(photo spacer, PS)110配置于所述数组基板10与所述彩膜基板80之间。2, according to an embodiment of the present invention, the display panel further includes: a photo spacer (PS) 110 disposed between the array substrate 10 and the color filter substrate 80.
依据本发明的一实施例,在所述显示面板中,所述半导体层包括一非晶硅(a-Si)。According to an embodiment of the present invention, in the display panel, the semiconductor layer includes an amorphous silicon (a-Si).
由以上可知,本发明提供了一种具有高开口率的显示面板,藉由新型的彩膜上数组(array on CF)的背板制作方法,避免在包括色阻(R/G/B)的彩膜(CF)上采用大挖孔设计,从而提高开口率。It can be seen from the above that the present invention provides a display panel with a high aperture ratio, with a novel color film array (array On CF) backplane manufacturing method, avoiding the use of large digging design on color film (CF) including color resistance (R/G/B), thereby increasing the aperture ratio.
综上所述,虽然本发明已以优选实施例揭露如上,但上述优选实施例并非用以限制本发明,本领域的普通技术人员,在不脱离本发明的精神和范围内,均可作各种更动与润饰,因此本发明的保护范围以权利要求界定的范围为准。In summary, although the present invention has been disclosed as above in preferred embodiments, the above-mentioned preferred embodiments are not intended to limit the present invention. Those of ordinary skill in the art can make various modifications without departing from the spirit and scope of the present invention. Such changes and modifications, therefore, the protection scope of the present invention is subject to the scope defined by the claims.

Claims (18)

  1. 一种显示面板,包括;A display panel, including;
    一数组基板;An array of substrates;
    一色阻(RGB)层,配置于所述基板之上;A color resist (RGB) layer disposed on the substrate;
    一缓冲层,配置于所述色阻层之上,其中所述缓冲层包括氧化硅及氮化硅中至少一者;A buffer layer disposed on the color resist layer, wherein the buffer layer includes at least one of silicon oxide and silicon nitride;
    一薄膜晶体管(thin-film transistor, TFT),配置于所述缓冲层之上;A thin-film transistor (TFT) disposed on the buffer layer;
    一钝化(passivation, PV)层,配置于所述薄膜晶体管之上且所述钝化层具有一开口,其中所述开口大小为10um*10um至6um*6um;A passivation (passivation, The PV) layer is disposed on the thin film transistor and the passivation layer has an opening, wherein the size of the opening is 10um*10um to 6um*6um;
    一第一透明电极层,配置于所述钝化层之上,保形地覆盖所述钝化层之所述开口的侧壁及底部,其中所述薄膜晶体管与所述第一透明电极层藉由所述开口电性相接;A first transparent electrode layer is disposed on the passivation layer to conformally cover the sidewall and bottom of the opening of the passivation layer, wherein the thin film transistor and the first transparent electrode layer Electrically connected by the opening;
    一蚀刻停止层(etch stop layer, ESL),配置于所述薄膜晶体管上,且所述开口更穿过所述蚀刻停止层;An etch stop layer (ESL) is disposed on the thin film transistor, and the opening further penetrates the etch stop layer;
    一液晶(liquid-crystal display, LCD)层,配置于所述第一透明电极层之上;以及A liquid crystal (liquid-crystal display, LCD) layer, disposed on the first transparent electrode layer; and
    一彩膜(color filter, CF)基板,配置于所述液晶层之上。Color film filter, CF) substrate, arranged on the liquid crystal layer.
  2. 根据权利要求1所述的显示面板,其中所述薄膜晶体管包括:The display panel according to claim 1, wherein the thin film transistor comprises:
    一栅极(gate, G)配置于所述数组基板上;A gate (gate, G) Disposing on the array substrate;
    一栅极绝缘(gate insulating, IG)层,配置于所述栅极及所述数组基板上;A gate insulating (IG) layer disposed on the gate and the array substrate;
    一半导体层,配置于所述栅极绝缘层之上;以及A semiconductor layer disposed on the gate insulating layer; and
    一源极漏极(source drain, SD)层,包括一源极 (source, S)以及一漏极(drain, D),所述源极与所述漏极覆盖于所述半导体层的两端。A source drain (SD) layer includes a source (S) and a drain (D), the source and the drain cover both ends of the semiconductor layer .
  3. 根据权利要求1所述的显示面板,更包括:The display panel according to claim 1, further comprising:
    一第二透明电极层,配置于所述彩膜基板下。A second transparent electrode layer is disposed under the color filter substrate.
  4. 根据权利要求7所述的显示面板,更包括:The display panel according to claim 7, further comprising:
    一遮光(black matrix, BM)层,配置于所述彩膜基板及所述第二透明电极层之间。Black matrix, BM) layer, disposed between the color filter substrate and the second transparent electrode layer.
  5. 根据权利要求1所述的显示面板,其中所述数组基板及所述彩膜基板各自独立地为一玻璃基板。4. The display panel of claim 1, wherein the array substrate and the color filter substrate are each independently a glass substrate.
  6. 根据权利要求1所述的显示面板,更包括:The display panel according to claim 1, further comprising:
    一蚀刻停止层(etch stop layer, ESL),配置于所述薄膜晶体管上,且所述开口更穿过所述蚀刻停止层。An etch stop layer (ESL) is disposed on the thin film transistor, and the opening further penetrates the etch stop layer.
  7. 根据权利要求1所述的显示面板,其中所述第一透明电极层包括下列至少一者:氧化铟锡(ITO)、氧化铟锌(IZO)、氧化铟镓(IGO)、氧化铟镓锌(IGZO)、氧化锡(TiO 2)、氧化锌(ZnO)、氧化铟(In 2O 3)、以及氧化镓(Ga 2O 3)。 The display panel of claim 1, wherein the first transparent electrode layer comprises at least one of the following: indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium oxide (IGO), indium gallium zinc oxide ( IGZO), tin oxide (TiO 2 ), zinc oxide (ZnO), indium oxide (In 2 O 3 ), and gallium oxide (Ga 2 O 3 ).
  8. 根据权利要求1所述的显示面板,更包括:一光阻(photo spacer, PS)配置于所述数组基板与所述彩膜基板之间。2. The display panel of claim 1, further comprising: a photo spacer (PS) disposed between the array substrate and the color filter substrate.
  9. 一种显示面板,包括;A display panel, including;
    一数组基板;An array of substrates;
    一色阻(RGB)层,配置于所述基板之上;A color resist (RGB) layer disposed on the substrate;
    一缓冲层,配置于所述色阻层之上;A buffer layer disposed on the color resist layer;
    一薄膜晶体管(thin-film transistor, TFT),配置于所述缓冲层之上;A thin-film transistor (TFT) disposed on the buffer layer;
    一钝化(passivation, PV)层,配置于所述薄膜晶体管之上且所述钝化层具有一开口;A passivation (passivation, The PV) layer is disposed on the thin film transistor and the passivation layer has an opening;
    一第一透明电极层,配置于所述钝化层之上,保形地覆盖所述钝化层之所述开口的侧壁及底部,其中所述薄膜晶体管与所述第一透明电极层藉由所述开口电性相接;A first transparent electrode layer is disposed on the passivation layer to conformally cover the sidewall and bottom of the opening of the passivation layer, wherein the thin film transistor and the first transparent electrode layer Electrically connected by the opening;
    一液晶(liquid-crystal display, LCD)层,配置于所述第一透明电极层之上;以及A liquid crystal (liquid-crystal display, LCD) layer, disposed on the first transparent electrode layer; and
    一彩膜(color filter, CF)基板,配置于所述液晶层之上。Color film filter, CF) substrate, arranged on the liquid crystal layer.
  10. 根据权利要求9所述的显示面板,其中所述薄膜晶体管包括:9. The display panel of claim 9, wherein the thin film transistor comprises:
    一栅极(gate, G)配置于所述数组基板上;A gate (gate, G) Disposing on the array substrate;
    一栅极绝缘(gate insulating, IG)层,配置于所述栅极及所述数组基板上;A gate insulating (IG) layer disposed on the gate and the array substrate;
    一半导体层,配置于所述栅极绝缘层之上;以及A semiconductor layer disposed on the gate insulating layer; and
    一源极漏极(source drain, SD)层,包括一源极 (source, S)以及一漏极(drain, D),所述源极与所述漏极覆盖于所述半导体层的两端。A source drain (SD) layer includes a source (S) and a drain (D), the source and the drain cover both ends of the semiconductor layer .
  11. 根据权利要求9所述的显示面板,更包括:9. The display panel of claim 9, further comprising:
    一第二透明电极层,配置于所述彩膜基板下。A second transparent electrode layer is disposed under the color filter substrate.
  12. 根据权利要求11所述的显示面板,更包括:The display panel according to claim 11, further comprising:
    一遮光(black matrix, BM)层,配置于所述彩膜基板及所述第二透明电极层之间。Black matrix, BM) layer, disposed between the color filter substrate and the second transparent electrode layer.
  13. 根据权利要求9所述的显示面板,其中所述数组基板及所述彩膜基板各自独立地为一玻璃基板。9. The display panel of claim 9, wherein the array substrate and the color filter substrate are each independently a glass substrate.
  14. 根据权利要求9所述的显示面板,其中所述缓冲层包括氧化硅及氮化硅中至少一者。9. The display panel of claim 9, wherein the buffer layer includes at least one of silicon oxide and silicon nitride.
  15. 根据权利要求9所述的显示面板,更包括:9. The display panel of claim 9, further comprising:
    一蚀刻停止层(etch stop layer, ESL),配置于所述薄膜晶体管上,且所述开口更穿过所述蚀刻停止层。An etch stop layer (ESL) is disposed on the thin film transistor, and the opening further penetrates the etch stop layer.
  16. 根据权利要求9所述的显示面板,其中所述沟槽的开口大小为10um*10um至6um*6um。9. The display panel of claim 9, wherein the opening size of the groove is 10um*10um to 6um*6um.
  17. 根据权利要求9所述的显示面板,其中所述第一透明电极层包括下列至少一者:氧化铟锡(ITO)、氧化铟锌(IZO)、氧化铟镓(IGO)、氧化铟镓锌(IGZO)、氧化锡(TiO 2)、氧化锌(ZnO)、氧化铟(In 2O 3)、以及氧化镓(Ga 2O 3)。 The display panel of claim 9, wherein the first transparent electrode layer comprises at least one of the following: indium tin oxide (ITO), indium zinc oxide (IZO), indium gallium oxide (IGO), indium gallium zinc oxide ( IGZO), tin oxide (TiO 2 ), zinc oxide (ZnO), indium oxide (In 2 O 3 ), and gallium oxide (Ga 2 O 3 ).
  18. 根据权利要求9所述的显示面板,更包括:一光阻(photo spacer, PS)配置于所述数组基板与所述彩膜基板之间。9. The display panel of claim 9, further comprising: a photo spacer (PS) disposed between the array substrate and the color filter substrate.
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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109709734A (en) * 2019-02-27 2019-05-03 深圳市华星光电半导体显示技术有限公司 Display panel and its detection mode
CN113066802B (en) * 2021-03-19 2023-04-18 合肥京东方显示技术有限公司 Preparation method of display substrate, display substrate and display device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050015026A (en) * 2003-08-01 2005-02-21 비오이 하이디스 테크놀로지 주식회사 High aperture ratio color liquid crystal display
TW201044056A (en) * 2009-06-03 2010-12-16 Chi Mei Optoelectronics Corp Color filter on array substrate and method for manufacturing the same and liquid crystal display panel and liquid crystal display device using the same
CN102385196A (en) * 2011-10-25 2012-03-21 深圳市华星光电技术有限公司 Liquid crystal display (LCD) panel and formation method thereof
CN104698713A (en) * 2015-04-07 2015-06-10 深圳市华星光电技术有限公司 Liquid crystal display panel and liquid crystal display device
CN104965336A (en) * 2015-07-30 2015-10-07 深圳市华星光电技术有限公司 COA array substrate and liquid crystal display panel
CN106353944A (en) * 2016-11-04 2017-01-25 京东方科技集团股份有限公司 Array base plate, manufacturing method of array base plate, display panel and display device
CN106646969A (en) * 2016-11-22 2017-05-10 深圳市华星光电技术有限公司 COA type liquid crystal panel and manufacturing method thereof
CN109709734A (en) * 2019-02-27 2019-05-03 深圳市华星光电半导体显示技术有限公司 Display panel and its detection mode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5707960B2 (en) * 2011-01-20 2015-04-30 凸版印刷株式会社 Color filter layer defect correcting method and color liquid crystal display element
CN104503127B (en) * 2014-12-01 2017-10-13 深圳市华星光电技术有限公司 Array base palte and preparation method thereof
CN205564747U (en) * 2016-05-05 2016-09-07 鄂尔多斯市源盛光电有限责任公司 Array substrate, display panel and display device
CN107037657A (en) * 2017-06-12 2017-08-11 京东方科技集团股份有限公司 A kind of COA substrates and preparation method thereof, display panel, display device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050015026A (en) * 2003-08-01 2005-02-21 비오이 하이디스 테크놀로지 주식회사 High aperture ratio color liquid crystal display
TW201044056A (en) * 2009-06-03 2010-12-16 Chi Mei Optoelectronics Corp Color filter on array substrate and method for manufacturing the same and liquid crystal display panel and liquid crystal display device using the same
CN102385196A (en) * 2011-10-25 2012-03-21 深圳市华星光电技术有限公司 Liquid crystal display (LCD) panel and formation method thereof
CN104698713A (en) * 2015-04-07 2015-06-10 深圳市华星光电技术有限公司 Liquid crystal display panel and liquid crystal display device
CN104965336A (en) * 2015-07-30 2015-10-07 深圳市华星光电技术有限公司 COA array substrate and liquid crystal display panel
CN106353944A (en) * 2016-11-04 2017-01-25 京东方科技集团股份有限公司 Array base plate, manufacturing method of array base plate, display panel and display device
CN106646969A (en) * 2016-11-22 2017-05-10 深圳市华星光电技术有限公司 COA type liquid crystal panel and manufacturing method thereof
CN109709734A (en) * 2019-02-27 2019-05-03 深圳市华星光电半导体显示技术有限公司 Display panel and its detection mode

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