WO2020140171A1 - 一种陀螺仪 - Google Patents

一种陀螺仪 Download PDF

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Publication number
WO2020140171A1
WO2020140171A1 PCT/CN2018/125936 CN2018125936W WO2020140171A1 WO 2020140171 A1 WO2020140171 A1 WO 2020140171A1 CN 2018125936 W CN2018125936 W CN 2018125936W WO 2020140171 A1 WO2020140171 A1 WO 2020140171A1
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Prior art keywords
gyroscope
frame
vibration unit
mass
plate
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PCT/CN2018/125936
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English (en)
French (fr)
Inventor
孟珍奎
刘雨微
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AAC Technologies Holdings Shenzhen Co Ltd
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AAC Acoustic Technologies Shenzhen Co Ltd
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Priority to PCT/CN2018/125936 priority Critical patent/WO2020140171A1/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Definitions

  • the present invention relates to a rotation-sensitive device using a vibrating component, such as a Coriolis force-based vibration angular velocity sensor (G01C19/56), and relates to a gyroscope.
  • a vibrating component such as a Coriolis force-based vibration angular velocity sensor (G01C19/56)
  • G01C19/56 Coriolis force-based vibration angular velocity sensor
  • MEMS gyroscope is a micro-electromechanical gyroscope.
  • MEMS Micro-Electro-Mechanical Systems
  • MEMS refers to a complete micro-electromechanical system that integrates mechanical elements, micro sensors, micro actuators, signal processing and control circuits, interface circuits, communications and power supplies. .
  • An object of the present invention is to provide a gyroscope, which can improve the measurement of the rotation accuracy of the gyroscope.
  • a gyroscope including a fixed frame and a vibration unit housed in the fixed frame, the vibration unit includes a mass block and a connecting frame surrounding the mass block , The gyroscope further includes a first connector connecting the vibration unit and the fixed frame, and a second connector connecting the mass and the connection frame, so that the vibration unit is centered on the first connector
  • the shaft rotates, and the mass rotates with the second connecting member as the central axis.
  • the opposite sides of the vibration unit are fixed to the fixing frame through the first connector, and the opposite sides of the mass are fixed to the connecting frame through the second connector.
  • both the first connector and the second connector are elastic members.
  • the extending direction of the first connector is perpendicular to the extending direction of the second connector.
  • the vibration unit includes a first connecting plate extending from the mass in parallel with an extension direction of the second connecting member, and the first connecting plate is provided with a plurality of first moving electrodes Plate, the vibration unit further includes a first static electrode plate extending from the connecting frame and arranged in parallel with the first moving electrode plate in a one-to-one correspondence.
  • a first connecting plate and a first moving electrode plate are provided on both sides of the second connecting member, and the first moving electrode plate is comb-shaped.
  • the gyroscope includes a second connecting plate extending from the connecting frame in a direction parallel to the extending direction of the first connecting member, and the second connecting plate is provided with a plurality of second moving electrodes
  • the gyroscope further includes a second stationary electrode plate extending from the fixed frame and corresponding to the second movable electrode plate in parallel with each other.
  • a second connecting plate and a second moving electrode plate are provided on both sides of the first connecting member, and the second moving electrode plate is comb-shaped.
  • the mass is a square mass.
  • the shape of the connecting frame is rectangular, and the longitudinal direction of the long side of the connecting frame is the same as the longitudinal direction of the second elastic member, and the shape of the fixing frame is a square.
  • the beneficial effect of the present invention is that the structure of the present invention enables the gyroscope to rotate at a large rotation angle during rotation detection, thereby making the vibration amplitude stronger and ultimately the signal output strong.
  • the arrangement of the electrode pieces on the moving block enables the gyroscope to set more electrode pieces in a certain space, so that the output signal of the gyroscope can be enhanced.
  • Figure 1 is a front view of the gyroscope of the present invention
  • FIG. 2 is a schematic diagram of a three-dimensional structure of the gyroscope of the present invention.
  • FIG. 3 is an enlarged view of the structure at A in FIG. 2.
  • a gyroscope As shown in FIG. 1, FIG. 2 and FIG. 3, a gyroscope according to an embodiment of the present invention includes a fixed frame 1 and a vibration unit housed in the fixed frame 1.
  • the vibration unit includes a mass 3 and surrounding the A connecting frame 2 of a mass 3, the gyroscope further includes a first connecting piece 4 connecting the vibration unit and the fixed frame 1, and a second connecting piece 5 connecting the mass 3 and the connecting frame 2,
  • the vibration unit rotates around the first connecting member 4 as the central axis, and the mass 3 rotates around the second connecting member 5 as the central axis.
  • the extending direction of the first connecting member 4 is perpendicular to the extending direction of the second connecting member 5.
  • opposite sides of the vibration unit are fixed to the fixing frame 1 through the first connecting member 4, and opposite sides of the mass 3 are fixed to the connecting frame through the second connecting member 5 2.
  • the above-mentioned structure enables the mass 3 to have a smaller turning resistance when turning; thus, it can have a larger turning angle.
  • the structure rotates it is generally divided into two directions of rotation, one is based on the straight line where the first connector 4 is located as the axis of rotation, and the other is based on the straight line where the second connector 5 is located as the axis of rotation Turn. Since between the mass 3 and the connecting frame 2, the connecting frame 2 and the fixed frame 1 are connected by a connecting member in one direction, so that the degree of freedom in the other direction of rotation is relatively large.
  • it is preferable to set the connecting member as an elastic member or an elastic beam, but in addition to the connection method of the elastic member and the elastic beam, it can be other types that can realize automatic rotation between the connecting frame 2 and the fixed frame 1 member.
  • the vibration unit includes several second connections extending from both sides of the connection frame 2 parallel to the extension direction of the first connection member 4
  • the plate 21 extends from the side of the second connecting plate 21 to form a second movable electrode plate 22 arranged in a comb-teeth shape
  • the vibration unit further includes a second movable electrode plate 22 extending from the fixed frame 1
  • One-to-one corresponds to the second stationary electrode plates 7 arranged in parallel.
  • a second connecting plate 21 and a second moving electrode plate 22 are provided on both sides of the first connecting member 4.
  • the vibration unit includes a first connecting plate 31 extending from one side of the mass 3, and a first movable electrode plate 32 arranged in a comb-tooth shape is formed extending from one side of the first connecting plate 31.
  • the electrode plate 32 is parallel to the extending direction of the second connector 5.
  • the vibration unit further includes a first static electrode plate 6 that extends from the connection frame 2 and is parallel to the first movable electrode plate 32 and is arranged in a one-to-one correspondence.
  • a first connecting plate 31 and a first moving electrode plate 32 are provided on both sides of the second connecting member 5.
  • the position of the second static electrode plate 7 and the first static electrode plate 6 may be directly set at the corresponding fixed frame 1, or one part may be set at the fixed frame 1, and the other part may be connected to the moving electrode through other components.
  • the position is relatively fixed.
  • the specific implementation structure is shown in FIG. 2, in which the second movable electrode plate 22 is rectangular and parallel to the length direction of the second connector 5, and the first movable electrode plate 32 is square and parallel to the length of the first connector 4
  • the direction is parallel; the purpose of this setting is to be completed according to its structure, so that in a certain space, more electrode pieces can be included.
  • the moving pole piece mentioned in this embodiment is named because it can follow the movement of the mass 3.
  • the second movable electrode plate 22 and the first movable electrode plate 32 are directly or indirectly connected to the mass 3 and the connecting frame 2 Connect.
  • the mass 3 and the connecting frame 2 will generate a rotation, it will drive the first movable electrode plate 32 and the second movable electrode plate 22 to move relative to the first stationary electrode plate 6 and the second stationary electrode plate 7
  • the static electrode plates of the gyroscope are relatively fixed, the relative area between the second movable electrode plate 22 and the second static electrode plate 7 changes, that is, the capacitance area of the peripheral capacitor plate changes. Thereby outputting a power change.
  • the relative area between the first movable electrode plate 32 and the first static electrode plate 6 changes, that is, the change in the area of the capacitance around the mass 3, so that a change in the amount of power is also output.
  • the rotation of the gyroscope can be calculated by obtaining the changes of these two power quantities.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

一种陀螺仪，包括固定框架（1）以及收容于固定框架（1）内的振动单元，振动单元包括质量块（3）及环绕质量块（3）的连接框架（2），该陀螺仪还包括连接振动单元与固定框架（1）的第一连接件（4）以及连接质量块（3）与连接框架（2）的第二连接件（5），使得振动单元以第一连接件（4）为中心轴转动，质量块（3）以第二连接件（5）为中心轴转动。该陀螺仪在转动检测的时候，转动角度大，使得振动幅度较强，最终使得信号输出强。

Description

一种陀螺仪 【技术领域】
本发明涉及使用振动部件的转动敏感装置，例如基于科里奥利力的振动角速度传感器(G01C19/56)的技术领域，具有涉及一种陀螺仪。
【背景技术】
MEMS陀螺仪即微机电陀螺仪，MEMS(Micro-Electro-Mechanical Systems)是指集机械元素、微型传感器、微型执行器以及信号处理和控制电路、接口电路、通信和电源于一体的完整微型机电系统。
并且现有的陀螺仪结构在转动检测方面精度还不够高，因此，有必要提供一种能够进行高精度转动测量的陀螺仪。
【发明内容】
本发明的目的在于提供一种陀螺仪，其能提高陀螺仪转动精度的测量。
本发明的目的之一技术方案如下：一种陀螺仪，所述陀螺仪包括固定框架以及收容于所述固定框架内的振动单元，所述振动单元包括质量块及环绕所述质量块的连接框架，所述陀螺仪还包括连接所述振动单元与所述固定框架的第一连接件以及连接所述质量块与所述连接框架第二连接件，使得所述振动单元以第一连接件为中心轴转动，所述质量块以第二连接件为中心轴转动。
作为本发明的优选，所述振动单元的相对两侧通过所述第一连接件固定于所述固定框架，所述质量块的相对两侧通过所述第二连接件固定于所述连接框架。
作为本发明的优选，所述第一连接件和所述第二连接件均为弹性件。
作为本发明的优选，所述第一连接件的延伸方向与第二连接件的延伸方向垂直。
作为本发明的优选，所述振动单元包括自所述质量块沿平行于所述第 二连接件的延伸方向延伸出来的第一连接板，所述第一连接板上设有若干第一动电极板，所述振动单元还包括自所述连接框架延伸出来的与所述第一动电极板一一对应平行设置的第一静电极板。
作为本发明的优选，所述第二连接件的两侧均设有第一连接板及第一动电极板，所述第一动电极板呈梳齿状。
作为本发明的优选，所述陀螺仪包括自所述连接框架沿平行于所述第一连接件的延伸方向延伸出来的第二连接板，所述第二连接板上设有若干第二动电极板，所述陀螺仪还包括自所述固定框架延伸出来的与所述第二动电极板一一对应平行设置的第二静电极板。
作为本发明的优选，所述第一连接件的两侧均设有第二连接板及第二动电极板，所述第二动电极板呈梳齿状。
作为本发明的优选，所述质量块为正方形质量块。
作为本发明的优选，所述连接框架的形状为长方形，且连接框架的长边长度方向与第二弹性件的长度方向相同，所述固定框架的形状为正方形。
本发明的有益效果在于：本发明的结构能够使得陀螺仪在转动检测的时候，转动角度大，从而使得振动幅度较强，最终使得信号输出强。
并且通过电极片布置在移动块上使得该陀螺仪能够在一定空间内设置更多的电极片，从而能够使得陀螺仪的输出信号增强。
【附图说明】
图1为本发明的陀螺仪的主视图；
图2为本发明的陀螺仪的立体结构示意图；
图3为图2中A处的结构放大图。
其中，1、固定框架；2、连接框架；21、第二连接板；22、第二动电极板；3、质量块；31、第一连接板；32、第一动电极板；4、第一连接件；5、第二连接件；6、第一静电极板；7、第二静电极板。
【具体实施方式】
下面结合附图和实施方式对本发明作进一步说明。
如图1、图2和图3所示，依照本发明一实施例的陀螺仪包括固定框 架1以及收容于所述固定框架1内的振动单元，所述振动单元包括质量块3及环绕所述质量块3的连接框架2，所述陀螺仪还包括连接所述振动单元与所述固定框架1的第一连接件4以及连接所述质量块3与所述连接框架2第二连接件5，使得所述振动单元以第一连接件4为中心轴转动、所述质量块3以第二连接件5为中心轴转动。所述第一连接件4的延伸方向与第二连接件5的延伸方向垂直。优选地，所述振动单元的相对两侧通过所述第一连接件4固定于所述固定框架1，所述质量块3的相对两侧通过所述第二连接件5固定于所述连接框架2。上述这种结构能够使得质量块3在转动的时候转动阻力更小；从而可以有更大的转动角度。当该结构发生转动的时候，其一般会分为两个方向的转动，一个是以第一连接件4所在直线为旋转轴进行转动，另一个是以第二连接件5所在直线为旋转轴进行转动。由于在质量块3和连接框架2之间，连接框架2和固定框架1之间均通过一个方向的连接件进行连接，使得其另一个转动方向的自由度相对较大。在本实施例中优选地将连接件设置为弹性件或者弹性梁，但是除了弹性件和弹性梁的连接方式外，还可以是其他的能够实现连接框架2和固定框架1之间实现自动转动的构件。
在本实施例中电极片的排列安装具体如下：如图2所示，所述振动单元包括从连接框架2的两侧分别延伸若干平行于所述第一连接件4的延伸方向的第二连接板21，从第二连接板21一侧延伸形成呈梳齿状设置的第二动电极板22，所述振动单元还包括自所述固定框架1延伸出来的与所述第二动电极板22一一对应平行设置的第二静电极板7。所述第一连接件4的两侧均设有第二连接板21及第二动电极板22。
所述振动单元包括由质量块3的一侧延伸设置第一连接板31，从第一连接板31的一侧延伸形成设置呈梳齿状设置的第一动电极板32，所述第一动电极板32平行于所述第二连接件5的延伸方向。所述振动单元还包括自所述连接框架2延伸出来的与所述第一动电极板32一一对应平行设置的第一静电极板6。所述第二连接件5的两侧均设有第一连接板31及第一动电极板32。第二静电极板7和第一静电极板6的位置设置可以是直接设置 在对应的固定框架1处，还可以是一个部分设置在固定框架1处，另一部分通过其他的部件与动电极的位置相对固定。具体实施结构，如图2所示，其中第二动电极板22设置为长方形并与第二连接件5的长度方向平行，第一动电极板32设置为正方形并与第一连接件4的长度方向平行；这样设置的目的要依据其结构来进行完成的，使得在一定空间内，能够囊括更多的电极片。并且在本实施例中所提到的动极片，是因为其可以跟随质量块3的运动而命名的。
当陀螺仪发生不规则转动的时候，也即是在两个转动方向上都有转动时，由于第二动电极板22和第一动电极板32直接或者间接的与质量块3和连接框架2相接。此时由于质量块3和连接框架2都会产生一个转动，从而会带动第一动电极板32和第二动电极板22相对于第一静电极板6和第二静电极板7发生相对的移动，由于该陀螺仪的各静电极板相对固定不动的，此时第二动电极板22和第二静电极板7之间相对面积改变，也即是外围的电容片的电容面积有改变，从而输出一个电量变化。第一动电极板32和第一静电极板6之间相对面积改变，也即是质量块3周围的电容面积之间的改变，从而也输出一个电量的变化。通过获取这两个电量的变化可计算得到陀螺仪转动的情况。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (10)

  1. 一种陀螺仪，其特征在于，所述陀螺仪包括固定框架以及收容于所述固定框架内的振动单元，所述振动单元包括质量块及环绕所述质量块的连接框架，所述陀螺仪还包括连接所述振动单元与所述固定框架的第一连接件以及连接所述质量块与所述连接框架第二连接件，使得所述振动单元以第一连接件为中心轴转动、所述质量块以第二连接件为中心轴转动。
  2. 根据权利要求1所述的陀螺仪，其特征在于：所述振动单元的相对两侧通过所述第一连接件固定于所述固定框架，所述质量块的相对两侧通过所述第二连接件固定于所述连接框架。
  3. 根据权利要求1所述的陀螺仪，其特征在于：所述第一连接件和所述第二连接件均为弹性件。
  4. 根据权利要求1所述的陀螺仪，其特征在于：所述第一连接件的延伸方向与第二连接件的延伸方向垂直。
  5. 根据权利要求1所述的陀螺仪，其特征在于：所述振动单元包括自所述质量块沿平行于所述第二连接件的延伸方向延伸出来的第一连接板，所述第一连接板上设有若干第一动电极板，所述振动单元还包括自所述连接框架延伸出来的与所述第一动电极板一一对应平行设置的第一静电极板。
  6. 根据权利要求5所述的陀螺仪，其特征在于：所述第二连接件的两侧均设有第一连接板及第一动电极板，所述第一动电极板呈梳齿状。
  7. 根据权利要求1所述的陀螺仪，其特征在于：所述陀螺仪包括自所述连接框架沿平行于所述第一连接件的延伸方向延伸出来的第二连接板，所述第二连接板上设有若干第二动电极板，所述陀螺仪还包括自所述固定框架延伸出来的与所述第二动电极板一一对应平行设置的第二静电极板。
  8. 根据权利要求7所述的陀螺仪，其特征在于：所述第一连接件的两侧均设有第二连接板及第二动电极板，所述第二动电极板呈梳齿状。
  9. 根据权利要求1-8中任意一项所述的陀螺仪，其特征在于：所述质 量块为正方形质量块。
  10. 根据权利要求8所述的陀螺仪，其特征在于：所述连接框架的形状为长方形，且连接框架的长边方向与第二连接件的长度方向相同，所述固定框架的形状为正方形。
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CN1904553A (zh) * 2005-07-28 2007-01-31 富士通媒体部品株式会社 角速度传感器
CN101563616A (zh) * 2006-12-19 2009-10-21 罗伯特·博世有限公司 具有梳形电极的加速度传感器
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US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
CN1467521A (zh) * 2002-06-11 2004-01-14 富士通株式会社 微镜单元及其制作方法
US20040232107A1 (en) * 2002-10-24 2004-11-25 Fujitsu Limited Method for manufacturing microstructure
CN1904553A (zh) * 2005-07-28 2007-01-31 富士通媒体部品株式会社 角速度传感器
CN101563616A (zh) * 2006-12-19 2009-10-21 罗伯特·博世有限公司 具有梳形电极的加速度传感器
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