WO2020133532A1 - 光栅弯曲装置及其弯曲光栅系统 - Google Patents

光栅弯曲装置及其弯曲光栅系统 Download PDF

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Publication number
WO2020133532A1
WO2020133532A1 PCT/CN2018/125860 CN2018125860W WO2020133532A1 WO 2020133532 A1 WO2020133532 A1 WO 2020133532A1 CN 2018125860 W CN2018125860 W CN 2018125860W WO 2020133532 A1 WO2020133532 A1 WO 2020133532A1
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WIPO (PCT)
Prior art keywords
grating
clamping
pressing member
bending
bending device
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Ceased
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PCT/CN2018/125860
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English (en)
French (fr)
Inventor
李冀
雷耀虎
黄建衡
刘鑫
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Shenzhen University
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Shenzhen University
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Priority to PCT/CN2018/125860 priority Critical patent/WO2020133532A1/zh
Publication of WO2020133532A1 publication Critical patent/WO2020133532A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D11/00—Bending not restricted to forms of material mentioned in only one of groups B21D5/00, B21D7/00, B21D9/00; Bending not provided for in groups B21D5/00 - B21D9/00; Twisting
    • B21D11/10—Bending specially adapted to produce specific articles, e.g. leaf springs
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators

Definitions

  • the invention belongs to the technical field of gratings, and relates to a grating bending device and a bending grating system.
  • phase-contrast imaging Since 2006, grating-based X-ray phase-contrast imaging technology has developed to a great extent. The obtained phase-contrast images and dark-field images can make up for the inadequacy of ordinary X-ray absorption images on the imaging of weakly absorbing substances, which can present More complete material internal information. At present, X-ray phase-contrast imaging has completed some work on biological organ tissue imaging and material detection in the laboratory, and is gradually transitioning from the experimental research and development stage to the application stage.
  • the size of the imaging field of view greatly affects the application field of the technology.
  • the field of view of the imaging system needs to be large enough to examine large organs and tissues in the human body.
  • the X-rays pass through no more than 1 grating period in the transverse direction (ie, the direction of the grating plane perpendicular to the grating strip) in the vicinity of the optical axis, and at the edge of the grating, The X-ray beam is divergent and its lateral penetration depth is greater than 1 cycle, so the grating cannot fully restrain the X-rays.
  • the grating strip should be adapted to the X-ray propagation direction, that is, a curved grating needs to be made.
  • a cylindrical curved grating needs to be fabricated.
  • planar gratings are produced.
  • LIGA Li thographie, G alvanoformung, A bformung three words German abbreviation
  • silicon wafer to the substrate
  • the thickness of several tens micrometers to cover the titanium substrate
  • Planar gratings are made using LIGA technology.
  • all silicon substrates need to be etched away, thus forming a thin layer of titanium-based gratings, which are more flexible than silicon substrates, so It can be made into a curved grating.
  • titanium has the following problems: the planar grating manufacturing is mainly based on LIGA technology, which is not easy to implement in ordinary laboratories, and the cost is relatively high.
  • the technical problem to be solved by the present invention is to provide a grating bending device based on silicon based on the defects of the prior art, which can change a planar grating into a curved grating.
  • a further problem to be solved by the present invention is to provide a curved grating system that can adjust the curvature of the grating, has a simple structure, and is easy to manufacture.
  • a grating bending device includes a bracket and a clamping mechanism for clamping the grating.
  • the clamping mechanism is fixed on the bracket by a bending adjustment mechanism;
  • the clamping mechanism includes a clamp that is arranged in pairs and clamps the edge of the grating
  • Two pairs of the clamping members are arranged oppositely, and the centers of the two acting on the grating are on a straight line passing through the center of the grating, and the bending adjustment mechanism drives the clamping member to move toward the center of the grating to adjust the bending of the grating degree.
  • the clamping member is provided with a clamping groove for clamping the edge of the grating; the shape of the clamping groove matches the shape of the edge of the grating.
  • the bending adjustment mechanism includes a pressing member, and the pressing member is disposed at the rear of the clamping member;
  • the pressing member is separated from the clamping member, and the pressing member presses against the rear of the clamping member;
  • the bracket is provided with a through hole, the pressing member is inserted into the through hole, and a lock is provided between the pressing member and the bracket Pieces, locking the moving pressing pieces in the through holes;
  • bracket is provided with screw holes, and the pressing member is screwed into the screw holes;
  • the pressing member is a cam, and is rotatably connected to the bracket.
  • the bending adjustment mechanism includes a pressing member, the pressing member and the clamping member are juxtaposed or sleeved together, the pressing member is fixed on the bracket, and the top A positioning member for locking the mutual position between the pressing member and the clamping member is provided.
  • the positioning member is a holding brake fixed at the front end or the rear end of the pressing member, the holding brake holds the clamping member to lock it, and the holding brake is under the action of external force
  • the expansion causes the clamping member to move relative to the pressing member to adjust the curvature of the grating.
  • the grating bending device it is preferable to provide a guide mechanism on at least one side of the bending adjustment mechanism.
  • the guide mechanism includes a guide member and a guide rail, the guide rail is fixed on the bracket and parallel to the moving direction of the pressing member, the guide member is fixed on the side of the clamping member, and Match the movement on the guide rail.
  • a curved grating system includes a grating and the above grating bending device.
  • the clamping member in the grating bending device is relatively clamped on both sides of the grating, and the clamping member is driven by the bending adjustment mechanism to move toward the center of the grating to adjust the curvature of the grating .
  • the grating is a silicon-based planar grating, a groove with a high aspect ratio is etched on the silicon-based substrate of the grating, and the groove is filled with metal or alloy;
  • the grating is a planar grating with a thin layer of metal as the substrate.
  • the grating bending device of the present invention clamps both sides of the grating through the clamping mechanism, and then applies relative pressure through the bending adjustment mechanism to squeeze and deform the planar grating into a curved grating with a certain degree of curvature.
  • the curvature of the grating can be adjusted according to the requirements of the X-ray grating phase contrast imaging system, that is, the radius of curvature can be determined by the distance that the clamping mechanism advances toward the middle.
  • the device of the invention has a simple structure and is easy to operate. It is not only suitable for the bending of high-aspect-ratio silicon-based gratings, but also suitable for the bending of thin-layer metal-based gratings.
  • the planar grating is first selected, and the grating is clamped by the bending device to squeeze the grating, and the grating is bent.
  • the grating can be a silicon-based grating or a metal-based grating.
  • the grating system of the present invention can adapt to the direction of X-ray propagation, especially at the edge of the grating to adapt to the divergent X-rays, so that the X-rays do not penetrate more than 1 grating period, the phase information of the grating edge is no longer missing, and the field of view is incomplete Restricted.
  • the planar grating has a positioning edge structure, the positioning edge is parallel to the direction of the clamping groove of the clamping member, and the positioning edge of the grating can be fixed in the clamping member to which it fits, so as to realize stable positioning and bend the grating.
  • FIG. 1 is a schematic structural diagram of Embodiment 1 of the present invention.
  • Example 2 is a schematic structural view of the stent of Example 1 of the present invention.
  • FIG. 3 is a schematic structural diagram of the cooperation of the first group of clamping mechanisms and the bending adjustment mechanism in Embodiment 1 of the present invention
  • FIG. 4 is a schematic structural diagram of a second group of clamping mechanisms and a bending adjustment mechanism of Embodiment 1 of the present invention.
  • Example 5 is a schematic structural diagram of a second implementation manner in which a clamping mechanism and a bending adjustment mechanism cooperate in Example 1 of the present invention
  • Example 6 is a schematic structural diagram of a third implementation manner in which a clamping mechanism and a bending adjustment mechanism cooperate in Example 1 of the present invention
  • FIG. 7 is a schematic diagram of the structure of the bending device and the planar grating in the bending grating system according to Embodiment 2 of the present invention.
  • FIG. 8 is a schematic diagram of the structure of the curved grating system in Embodiment 2 of the present invention after the grating is bent;
  • Example 9 is a schematic diagram of the side structure of the grating of Example 2 of the present invention.
  • FIG. 10 is a schematic diagram of the grating appearance of Embodiment 2 of the present invention.
  • a grating bending device includes a bracket 100 and a clamping mechanism 200 for clamping the grating 600.
  • the clamping mechanism 200 is fixed on the bracket 100 by a bending adjustment mechanism 300;
  • the clamping mechanism 200 includes a pair of clamping members 210 arranged and clamping the edge of the grating 600, two pairs of the clamping members 210 are oppositely arranged, and the center of the two forces acting on the grating is the same through the center of the grating
  • the bending adjustment mechanism 300 drives the clamping member 210 to move toward the center to adjust the bending degree of the grating 600.
  • the two clamping members 210 can squeeze the grating relatively, deforming the planar grating into a curved grating with a certain degree of curvature.
  • the curvature of the grating can be determined according to X
  • the requirements adjustment of the ray grating phase contrast imaging system, that is, the radius of curvature can be determined by the distance that the clamping mechanism advances toward the middle.
  • the bracket 100 is used for the installation of the clamping mechanism 200 and the bending adjustment mechanism 300.
  • the grating 600 is a sheet-like structure.
  • the curved structure needs to be curved on opposite sides of the grating 600. Therefore, the bracket 100 needs to be provided with left and right or upper and lower sides structures.
  • the grating 600 is set in the middle position, and the structure of the bracket 100 is not used.
  • the limitation may be any shape and structure that meets the above conditions, such as a shear structure with two opposing clamping arms, a four-sided frame structure, etc.
  • the bracket 100 is a frame composed of a four-sided frame, a four-sided frame
  • the structure refers to: a frame structure surrounded by frames in four directions of up, down, left and right, and its shape may be a quadrilateral frame, a round frame, an oval frame or other quadrilateral frame structures suitable for the present invention.
  • a quadrilateral frame is used, preferably a square frame.
  • the quadrilateral frame includes two oppositely arranged first side frames 110 for setting the bending adjustment mechanism 300, and two second side frames 120 connecting the two first side frames 110.
  • the first side frames 110 and the second The shape of the side frame 120 may be a plate, column, bar, tube, etc.
  • the cross-sectional shape is not limited, and may be any shape.
  • a tube structure or a light material is preferred, or the first side frame 110 A hole is formed with the second side frame 120.
  • the material of the first side frame 110 and the second side frame 120 may be any hard material that can withstand radial external forces, such as stainless steel, aluminum alloy, and polymer materials.
  • the clamping member 210 is used to clamp the grating 600. Since the grating 600 has a sheet structure, the grating 600 should be clamped by the clamping member 210. In order to form a bending point, the grating When the 600 is bent, relative to the applied pressure, the two clamping members 210 are arranged symmetrically, preferably the center line of the two clamping members 210 passes through the center of the grating 600, that is, the centers of the two clamping members 210 are both located through the grating A straight line at the center of 600. In this way, relative force can be achieved, bending it.
  • the clamping member 210 is provided with a clamping slot 230 for clamping the edge of the grating 600.
  • the clamping slot 230 may be capable of clamping the edge of the grating 600, preferably the width of the clamping slot 230 and the grating The thickness of the 600 edge is matched, and the grating 600 does not move after being stuck.
  • the shape of the groove 230 matches the shape of the edge of the grating 600. The consistent shape increases the contact area between the clamping member 210 and the grating 600, and the clamping is more stable reliable.
  • the edge of the grating 600 is curved, and the shape of the groove 230 is also an arc.
  • the shape of the groove 230 is a straight groove.
  • the straight edge is the positioning edge of the grating 600, and the positioning edge is parallel to the direction of the clamping slot 230 of the clamping member.
  • the positioning edge of the grating 600 can be fixed in the clamping member attached thereto to achieve stable positioning and bend the grating. Since the silicon-based grating 600 and the clamping member 210 are both hard materials, it is preferable that a spacer or an elastic member is provided in the clamping slot 230 to avoid damaging the grating 600 during the bending process.
  • the shape and structure of the outside of the clamping member 210 are not limited, and may be any shape and structure suitable for the present invention.
  • the connection between the clamping member 210 and the bending adjustment mechanism 300 may be provided separately, or may be an integral structure or the two are fixedly connected together, such as various ways such as movable connection, snap connection, and set.
  • the bending adjustment mechanisms 300 are respectively fixed on opposite sides of the bracket 100. Specifically fixed on the two first side frames 110, the bending adjustment mechanism 300 is used to apply relative pressure to the grating 600 on both sides and adjust the required bending degree of the grating 600.
  • the bending adjustment mechanism 300 includes a pressing member 310 disposed at the rear of the clamping member 210.
  • the connection between the pressing member 310 and the clamping member 210 is divided into three embodiments.
  • the first one is a separate arrangement as shown in FIGS. 1-4.
  • the pressing member 310 is pressed against the rear of the clamping member 210.
  • the front end of the pressing member 310 presses the rear of the clamping member 210.
  • the rear of the clamping member 210 is preferably provided with a pressing groove 220.
  • the front end of the pressing member 310 presses in the pressing groove 220 to facilitate the pressing member 310
  • the front end is positioned to ensure that the pressing portion deviates from the straight line, and the clamping member 210 is adjusted to move to the center of the bracket 100; based on this function, the bending adjustment mechanism 300 has a variety of separate implementation structures:
  • the pressing member 310 and the clamping member 210 are provided separately.
  • the through holes 140 preferably the through holes 140 of the two first side frames 110 are on the same straight line, so that the opposing forces of the two pressing members 310 are on a straight line, and the pressing members 310 and the through holes 140 With a clearance fit or a sliding fit, the pressing member 310 can move freely along the through hole 140.
  • the locking member is disposed on the bracket 100, specifically on the first side frame 110, and the moving direction of the pressing member 310 is perpendicular or substantially perpendicular to the first side frame 110.
  • the locking member may have various structures, for example, the locking member is along
  • the plug provided on the first side frame 110 is provided with a plurality of blind holes on the side wall of the top pressing member 310 continuously.
  • the movement direction of the pin is perpendicular to the top pressing member 310.
  • the plug is inserted into a blind hole to lock the position of the top pressing member 310.
  • the locking member may also be an elastic structure, that is, along the first side frame 110, a locking member that is elastically compressed is provided.
  • One locking member may be provided, or one on each side of the top pressing member 310.
  • the locking member Under the action of elastic force, the side wall of the top pressing member 310 is compressed, and a shallow groove is preferably provided on the side wall of the top pressing member 310, and the shallow groove may be continuously provided in the axial direction of the top pressing member 310.
  • the front end of the locking member elastically pushes into the shallow groove to lock the pressing member 310.
  • the locking member is removed, and the top pressing member 310 is freely adjusted. Withdrawing the external force, the elastic force of the locking member is restored to press the top pressing member 310.
  • the locking member may also be connected to the first side frame 110 by turning, turning to the top pressing member 310, hooking and locking the top pressing member 310, and rotating the locking member in reverse to release the lock.
  • the pressing member 310 is separated from the clamping member 210 by a second implementation structure: the bracket 100 is provided with a through hole 140, the pressing member 310 is inserted into the through hole 140, and the bracket 100 is provided with Some through holes 140 are screw holes, and the pressing member 310 is screwed into the screw hole; the pressing member 310 rotates to adjust the extension distance of the pressing member 310 to form a curvature of the grating 600 by pressing.
  • a third implementation structure is provided for the pressing member 310 and the clamping member 210 separately:
  • the pressing member 310 is a cam, and is rotatably connected to the bracket 100.
  • the pressing member 310 is a cam with a spiral structure whose curvature gradually increases, and rotates at different positions to press the pressing member 310 forward or backward to adjust the curvature.
  • the second embodiment of the connection between the pressing member 310 and the clamping member 210 is shown in FIG. 5: the two have an integrated structure or the two are fixedly connected together.
  • the pressing member 310 can be connected It is directly arranged at the rear of the clamping member 210, and the pressing member 310 drives the clamping member 210 to move, which is the same as the structure of the first embodiment of the separation arrangement, that is, the bracket 100 is provided with a through hole 140, and the pressing member 310 Installed in the through hole 140, a locking member 400 is provided between the rear end and the bracket 100, and the moved pressing member 310 is locked in the through hole 140.
  • the specific structure of the locking member 400 is also the same as above. This will not be repeated here.
  • the third embodiment of the connection between the pressing member 310 and the clamping member 210 is: the pressing member 310 and the clamping member 210 are juxtaposed or sleeved together, and the pressing member 310 is fixed on the bracket 100 Above, a positioning member for locking the mutual position between the pressing member 310 and the clamping member 210 is provided. As shown in FIG. 6, the rear part of the clamping member 210 is sheathed in the pressing member 310, and the pressing member is fixed on the bracket 100, and a positioning member may be provided between the two for positioning.
  • the positioning member is a holding brake 700 fixed at the front or rear end of the pressing member 310, the holding brake 700 holds the clamping member 210 to lock it, and the holding brake 700 expands to make the clamping member 210 under the action of external force Relative to the pressing member 310 moves to adjust the curvature of the grating.
  • the positioning member may also be a movable joint fixed to the top pressing member 310, and the clamping member 210 is provided with a screw thread, and the position of the clamping member 210 relative to the top pressing member 310 is adjusted by rotating the joint.
  • guide mechanisms 500 are provided on the left and right sides of the bracket 100.
  • the guide mechanism 500 for example: a guide tube perpendicular to the first side frame 110, the pressing member 310 is sleeved in the guide tube, the front end of the guide tube extends from the guide tube, and the middle and rear portions are limited by the guide tube Linear motion.
  • the embodiment adopted in this embodiment is: the guide mechanism 500 includes a guide 510 and a guide rail 520, the guide rail 520 is disposed on the bracket 100 and is parallel to the moving direction of the pressing member 310, and the guide rail 520 is preferably disposed on the second side frame 120.
  • the second side frame 120 is parallel to the moving direction of the pressing member 310.
  • the guide member 510 is fixed to the side of the clamping member 210 and moves in the guide rail 520.
  • the guide rail 520 may be a single opening groove that opens toward one side of the clamping member 210, or may be a through-groove that opens at both sides.
  • the guide member 510 is inserted into the guide rail 520 and moves along the guide rail 520.
  • a curved grating system includes a grating 600 and the grating bending device for bending grating 600 of Embodiment 1.
  • FIG. 7 is a schematic structural diagram of the grating without bending
  • FIG. 8 is a schematic structural diagram of the grating after bending.
  • the curved grating system of the present invention is based on a planar grating, which is bent by a grating bending device to form a curved grating system, which solves the problem that a silicon-based grating is difficult to form a curved shape.
  • the clamping member 210 in the clamping mechanism 200 of the bending device clamps the grating 600 toward each other, and the bending adjustment mechanism 300 pushes the clamping member 210 of the clamping mechanism 200 to move toward each other to press the grating toward the center of the grating 600 600, forcing the grating 600 to bend to one side to form a curved grating.
  • the curved grating adapts to the X-ray propagation direction, especially at the edge of the grating 600, which can accommodate divergent X-rays, so that the X-rays penetrate laterally within 1 grating period, the phase information of the edge of the grating 600 is no longer missing, and the field of view is not limited. .
  • Figure 9-10 shows a planar grating structure that forms a curved grating.
  • the grating 600 is a silicon-based planar grating, or the grating 600 is a planar grating based on a thin layer of metal.
  • Planar gratings with a thin-layer metal substrate can use existing products, and only planar gratings with a thin-layer metal substrate that meet the requirements of the present invention can be used in the present invention.
  • the grating 600 of this embodiment is described by taking a silicon-based planar grating as an example:
  • a silicon-based microstructure is made on the silicon substrate.
  • This silicon-based microstructure is firstly etched into one-dimensional or two-dimensional on the n-type (100) silicon substrate using photo-assisted electrochemical etching technology.
  • the high-aspect-ratio groove of the dimensional structure is used to modify the surface of the silicon-based microstructure, that is, the grating substrate.
  • the surface of the grating substrate 1 and the inner wall surface are obtained with a layer of silicon dioxide film 2, which is then infiltrated, and the infiltration material is attached to the inner wall of the grating substrate The surface forms the wetting layer 4.
  • the infiltrating material is an X-ray strong absorption heavy metal salt
  • the X-ray strong absorption heavy metal salt is preferably a bismuth salt, a lead salt or a gold salt.
  • the high aspect ratio groove is filled with metal 3, that is, the grating substrate 1 is immersed in molten X-rays to strongly absorb heavy metals, preferably metal bismuth, gold or lead.
  • Such a grating 600 has grooves with a high aspect ratio, and the grooves are filled with metal. This manufacturing method improves the bending performance of the silicon-based grating.
  • the silicon-based grating is not limited by the structure, and is applicable to the present invention.
  • the high-aspect-ratio silicon-based microstructure is particularly suitable for the curved grating of the present invention.

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Abstract

一种光栅弯曲装置及其弯曲光栅系统，弯曲装置包括支架（100）、用于夹持光栅（600）的夹持机构（200），夹持机构（200）通过弯曲调节机构（300）固定在支架（100）上；夹持机构（200）包括成对设置并贴合光栅（600）边缘的夹持件（210），两个夹持件（210）相对设置来夹持光栅（600），弯曲调节机构（300）驱动夹持件（210）向中心移动调整光栅（600）的弯曲度。弯曲光栅系统包括弯曲光栅（600）、和弯曲装置。光栅弯曲装置能将平面光栅变为弯曲光栅（600），弯曲光栅系统可以调节光栅弯曲度、结构简单、制造方便。

Description

光栅弯曲装置及其弯曲光栅系统 技术领域
本发明属于光栅技术领域，涉及一种光栅弯曲装置及其弯曲光栅系统。
 背景技术
自2006年以来，基于光栅的X射线相衬成像技术得到了很大程度的发展，获得的相衬图像及暗场图像能够弥补普通X射线吸收图像对弱吸收物质成像的不足，从而能够呈现出更完整的物质内部信息。目前，X射线相衬成像已在实验室完成了一些生物器官组织成像、材料检测等方面的工作，正逐步由实验研发阶段向应用阶段过渡。
实际应用中，成像视场的大小很大程度上影响着该技术的应用领域，如在医学领域，为检查人体中的较大器官组织，需要成像系统的视场足够大。在普遍使用的锥束X射线的前提下，在光轴附近，X射线在行进中横向（即光栅面上垂直于光栅条带的方向）穿透不超过1个光栅周期，而在光栅边缘，X射线束呈发散状，其横向穿透深度大于1个周期，则光栅对X射线不能起到完全约束作用，因此，该处的相位信息缺失，造成视场受限现象。因此，应使光栅条带适应X射线的传播方向，即需要制作弯曲光栅。对于一维的X射线相衬成像系统，需要制作柱状弯曲光栅。
 技术问题
由于硅片质地较脆，硅基光栅很难进行弯曲，现有技术没有直接通过将硅片弯曲制成硅基的弯曲光栅。
    现有技术中，弯曲光栅的制作主要是采用以下方式：首先制作平面光栅。现有技术中主流平面光栅的制作上采用LIGA（ Lithographie， Galvanoformung， Abformung三个德文单词缩写）技术，以硅片为基底，将厚度几十微米的钛覆盖到基底上，然后再实施LIGA技术制成平面光栅，平面光栅制作完成后，为便于光栅弯曲，需要将硅基底全部腐蚀掉，这样便形成了以一薄层钛为基底的光栅，其柔韧性比硅基底强，因此可以再将其制作成弯曲光栅。但是钛作基底存在以下问题：平面光栅制造是以LIGA技术为主，不便于在普通实验室展开实施，且成本较高。
技术解决方案
本发明要解决的技术问题在于，针对现有技术的缺陷，提供一种基于硅基的光栅弯曲装置，该装置能将平面光栅变为弯曲光栅。
本发明进一步要解决的问题是，提供一种可以调节光栅弯曲度、结构简单、制造方便的弯曲光栅系统。
本发明解决其技术问题所采用的技术方案是：
一种光栅弯曲装置，包括支架、用于夹持光栅的夹持机构，所述夹持机构通过弯曲调节机构固定在支架上；所述夹持机构包括成对设置并夹持光栅边缘的夹持件，成对的两个所述夹持件相对设置且二者对光栅作用力的中心同在通过光栅中心的一条直线上，所述弯曲调节机构驱动夹持件向光栅中心移动调整光栅的弯曲度。
进一步地，所述的光栅弯曲装置中，优选所述夹持件设有用于夹持光栅边缘的卡槽；所述卡槽形状与光栅边缘形状配合。
进一步地，所述的光栅弯曲装置中，优选所述弯曲调节机构包括顶压件，所述顶压件设置在夹持件后部；
所述顶压件与夹持件分离设置，所述顶压件顶压在所述夹持件后部；
或者所述顶压件与夹持件一体结构或者二者固定连接在一起；
或者所述顶压件与夹持件转动连接；
进一步地，所述的光栅弯曲装置中，优选所述支架上设有穿过孔，所述顶压件穿装在所述穿过孔中，且所述顶压件与支架之间设有锁定件，将移动后的顶压件锁定在穿过孔中；
或者所述支架上设有螺孔，所述顶压件螺接在所述螺孔中；
或者所述顶压件为凸轮，并转动连接在支架上。
进一步地，所述的光栅弯曲装置中，优选所述弯曲调节机构包括顶压件，所述顶压件与夹持件并列或套装在一起，所述顶压件固定在支架上，所述顶压件与夹持件之间设有用于锁定二者之间相互位置的定位件。
进一步地，所述的光栅弯曲装置中，优选所述定位件为固定在顶压件前端或后端的抱闸，所述抱闸抱紧夹持件将其锁定，在外力作用下所述抱闸张开使得夹持件相对于顶压件移动来调整光栅弯曲度。
进一步地，所述的光栅弯曲装置中，优选在弯曲调节机构的至少一侧设有导向机构。
进一步地，所述的光栅弯曲装置中，优选所述导向机构包括导向件、导轨，所述导轨固定在支架上并与顶压件运动方向平行，所述导向件固定在夹持件侧面，且配合在导轨上运动。
一种弯曲光栅系统，包括光栅和上述光栅弯曲装置，所述光栅弯曲装置中的夹持件相对夹持在光栅两侧，并通过弯曲调节机构驱动夹持件向光栅中心移动调整光栅的弯曲度。
进一步地，所述的弯曲光栅系统中，优选所述光栅为硅基平面光栅，所述光栅的硅基基底上蚀刻有高深宽比的槽，所述槽内填充有金属或合金；
或者所述光栅为薄层金属为基底的平面光栅。
 有益效果
本发明的光栅弯曲装置通过夹持机构夹持光栅两侧，再通过弯曲调节机构相对施加压力，将平面光栅挤压变形成为具有一定弯曲度的弯曲光栅。光栅的弯曲度可根据X射线光栅相衬成像系统的要求调节，即曲率半径可由夹持机构向中间推进的距离决定。本发明装置结构简单、易于操作，不仅适用于高深宽比硅基光栅的弯曲，还适用于以薄层金属为基底的光栅的弯曲。
    本发明的弯曲光栅系统中，不是像现有技术中直接采用弯曲光栅，而是先选用平面光栅，通过弯曲装置夹持光栅相向挤压，将光栅弯曲，光栅的弯曲度可调，整个装置稳定，光栅可以采用硅基光栅、金属基底的光栅。本发明的光栅系统能适应X射线的传播方向，特别是在光栅边缘能适应发散的X射线，使得X射线横向穿透不超过1个光栅周期，光栅边缘相位信息不再缺失，视场完整不受限。另外，由于平面光栅具有定位边结构，该定位边与夹持件的卡槽方向平行，可以将光栅的定位边固定于与其贴合的夹持件中，实现稳定定位并弯曲光栅。
 附图说明
下面将结合附图及实施例对本发明作进一步说明，附图中：
图1是本发明实施例1的结构示意图；
图2是本发明实施例1支架的结构示意图；
图3是本发明实施例1的第一组夹持机构与弯曲调节机构配合的结构示意图；
图4是本发明实施例1的第二组夹持机构与弯曲调节机构配合的结构示意图；
图5是本发明实施例1的夹持机构与弯曲调节机构配合第二种实施方式的结构示意图；
图6是本发明实施例1的夹持机构与弯曲调节机构配合第三种实施方式的结构示意图；
图7是本发明实施例2的弯曲光栅系统中弯曲装置与平面光栅配合结构示意图；
图8是本发明实施例2的弯曲光栅系统中光栅弯曲后的结构示意图；
图9是本发明实施例2的光栅侧面结构示意图；
图10是本发明实施例2的光栅形貌示意图。
 本发明的最佳实施方式
为了对本发明的技术特征、目的和效果有更加清楚的理解，现对照附图详细说明本发明的具体实施方式。
实施例1，如图1所示，一种光栅弯曲装置，包括支架100、用于夹持光栅600的夹持机构200，所述夹持机构200通过弯曲调节机构300固定在支架100上；所述夹持机构200包括成对设置并夹持光栅600边缘的夹持件210，成对的两个所述夹持件210相对设置且二者对光栅作用力的中心同在通过光栅中心的一条直线上，所述弯曲调节机构300驱动夹持件210向中心移动调整光栅600的弯曲度。由于夹持件210对光栅的作用点在一条直线上，使得两个夹持件210能相对挤压光栅，将平面光栅挤压变形成为具有一定弯曲度的弯曲光栅，光栅的弯曲度可根据X射线光栅相衬成像系统的要求调节，即曲率半径可由夹持机构向中间推进的距离决定。
如图1-2所示，作为弯曲装置基础结构，支架100用于夹持机构200、弯曲调节机构300的设置。光栅600作为一个片状结构，弯曲结构需要在光栅600相对的两侧对其进行弯曲，因此，支架100需要设有左右或上下两侧结构，将光栅600设置在中间位置，支架100的结构不作限定，可以是满足上述条件的任意形状和结构，例如带有相对两个夹持臂的剪状结构、四边框架结构等，本实施例优选所述支架100为四边框架组成的架体，四边框架结构指：在上下左右四个方向上设置框架围蔽成的框架结构，其形状可以是四边形框架、圆形框架、椭圆形框架或其他适合本发明的四边框架结构。本实施例中，采用四边形框架，优选方形框架。四边形框架中，包括两个相对设置的用于设置弯曲调节机构300的第一侧边框110、以及连接两个第一侧边框110的两个第二侧边框120，第一侧边框110与第二侧边框120的形状可以是板状、柱状、条状、管状等，横截面形状不作限定，可以是任意形状，为了减轻整个装置重量，优选管状结构或轻质材料，或者在第一侧边框110与第二侧边框120开有孔洞。第一侧边框110和第二侧边框120的材质可以是任何能承受径向外力的硬质材料，例如：不锈钢、铝合金、高分子材料等。
如图1、3-4所示，所述夹持件210用于夹持光栅600，由于光栅600为片状结构，要通过夹持件210夹持光栅600，为形成弯曲的着力点，光栅600弯曲时，相对施加压力，则两个夹持件210对称设置，优选两个夹持件210的中心连线通过光栅600的中心，即两个所述夹持件210的中心都位于通过光栅600中心的一条直线上。这样就能实现相对施力，将其弯曲。同样由于光栅600为片状结构，则优选夹持件210设有用于夹持光栅600边缘的卡槽230，卡槽230可以是能将光栅600边缘卡入即可，优选卡槽230宽度与光栅600边缘厚度配合，光栅600卡入后无移动，优选所述卡槽230形状与光栅600边缘形状配合，形状配合一致加大了夹持件210与光栅600之间的接触面积，夹持更加稳定可靠。例如光栅600边缘为弧形，则卡槽230的槽内形状也为弧形，如果夹持光栅600边缘为直边，则卡槽230的槽内形状为直槽。该直边为光栅600的定位边，该定位边与夹持件卡槽230的方向平行，可以将光栅600的定位边固定于与其贴合的夹持件中，实现稳定定位并弯曲光栅。由于硅基光栅600和夹持件210都是硬质材料，优选卡槽230内设有垫片或弹性件，避免在弯曲过程中，损坏光栅600。夹持件210外部的形状和结构不作限定，可以是适合本发明的任意形状和结构。夹持件210与弯曲调节机构300的连接可以是分离设置，也可以是一体结构或者二者固定连接在一起，例如活动连接、卡接、套装等各种方式。
弯曲调节机构300分别固定在支架100的相对两侧。具体固定在两个第一侧边框110上，弯曲调节机构300用于对光栅600在两侧施加相对的压力，并对光栅600需要的弯曲度进行调节。弯曲调节机构300包括顶压件310，所述顶压件310设置在夹持件210后部。
顶压件310与夹持件210连接分为三种实施方式，第一种是如图1-4所示的分离设置，所述顶压件310顶压在所述夹持件210后部。
所述顶压件310前端顶压夹持件210后部，夹持件210后部优选设有顶压槽220，顶压件310前端顶压在顶压槽220中，以利于顶压件310前端定位，保证顶压部偏离直线，调整夹持件210向支架100中心移动；基于这个功能，则弯曲调节机构300有多种分离设置实施结构：
顶压件310与夹持件210分离设置第一种实施结构：支架100上设有穿过孔140，所述顶压件310穿装在所述穿过孔140中，其后端与支架100之间设有锁定件，将移动后的顶压件310锁定在穿过孔140中；具体地，顶压件310为杆状结构或柱状结构，支架100的两个第一侧边框110开有穿过孔140，优选两个第一侧边框110的穿过孔140在同一条直线上，使得两个顶压件310相对的作用力在一条直线上，顶压件310和穿过孔140之间间隙配合或滑动配合，顶压件310可以沿穿过孔140中自由活动。锁定件设置在支架100上，具体设置在第一侧边框110上，顶压件310的运动方向与第一侧边框110垂直或基本垂直，锁定件可以是多种结构，例如：锁定件为沿第一侧边框110设置的插销，在顶压件310侧壁上连续设置多个盲孔，插销运动方向与顶压件310垂直，插销插入一个盲孔中即锁定顶压件310位置。
锁定件还可以是弹性结构，即沿第一侧边框110设有被弹性压紧的锁定件，锁定件可以设置一个，也可以在顶压件310两侧各设置一个，自由状态下，锁定件在弹力作用下，压紧顶压件310侧壁，优选在顶压件310侧壁上设有浅槽，浅槽可以连续在顶压件310轴向设置。锁定件前端弹性顶入浅槽，将顶压件310锁定。外力后撤锁定件，顶压件310自由活动调节，撤出外力，锁定件弹力恢复压紧顶压件310。
锁定件还可以是转动连接在第一侧边框110上，转向顶压件310，将顶压件310钩挂锁定，反向旋转锁定件，解除锁定。
顶压件310与夹持件210分离设置第二种实施结构：支架100上设有穿过孔140，所述顶压件310穿装在所述穿过孔140中，所述支架100上设有的穿过孔140为螺孔，所述顶压件310螺接在所述螺孔中；顶压件310旋转，调整顶压件310伸出距离，以顶压形成光栅600弯曲度。
顶压件310与夹持件210分离设置第三种实施结构： 所述顶压件310为凸轮，并转动连接在支架100上。顶压件310为曲率逐渐增大的螺线形结构的凸轮，旋转不同位置压紧顶压件310前进或后退，以调整弯曲度。
所述顶压件310与夹持件210连接的第二种实施方式为如图5所示：二者一体结构或者二者固定连接在一起，这两种固定方式中，可以将顶压件310直接设置在夹持件210的后部，顶压件310带动夹持件210运动，同分离设置的第一种实施结构相同，即支架100上设有穿过孔140，所述顶压件310穿装在所述穿过孔140中，其后端与支架100之间设有锁定件400，将移动后的顶压件310锁定在穿过孔140中，锁定件400具体结构也同上，在此不再赘述。
弯曲调节机构中，顶压件310与夹持件210连接的第三种实施方式为：所述顶压件310与夹持件210并列或套装在一起，所述顶压件310固定在支架100上，所述顶压件310与夹持件210之间设有用于锁定二者之间相互位置的定位件。如图6所示，夹持件210后部套装在顶压件310内，顶压件固定在支架100上，二者之间可以设有定位件进行定位。所述定位件为固定在顶压件310前端或后端的抱闸700，所述抱闸700抱紧夹持件210将其锁定，在外力作用下所述抱闸700张开使得夹持件210相对于顶压件310移动来调整光栅弯曲度。
定位件还可以为限位固定在顶压件310上的活接头，夹持件210外设有螺纹，转动活接头调整夹持件210相对于顶压件310的位置。
为了进一步保证顶压件310运动是直线的，在所述支架100左右两侧设有导向机构500。导向机构500有多种技术方案，例如：垂直于第一侧边框110的导向管，顶压件310套装在导向管中，其前端从导向管中伸出，中后部被导向管限定只能直线运动。如图1-2所示，本实施例采用的实施方式为：所述导向机构500包括导向件510、导轨520，所述导轨520设置在支架100上并与顶压件310运动方向平行，导轨520优选设置在第二侧边框120上，第二侧边框120与顶压件310的运动方向平行，所述导向件510固定在夹持件210侧面，并在导轨520中运动。导轨520可以是朝向夹持件210一侧开口的单开口槽，也可以是两侧开口的贯通槽，导向件510穿装在导轨520中，沿导轨520运动。
实施例2，如图7-8所示，一种弯曲光栅系统，包括光栅600和实施例1的用于弯曲光栅600的光栅弯曲装置。其中图7所示的是光栅未进行弯曲的结构示意图，图8是光栅弯曲后的结构示意图。本发明的弯曲光栅系统是以平面光栅为基础，通过光栅弯曲装置将其弯曲，制成弯曲光栅系统，解决了硅基光栅难以制成弯曲形状的问题。
如图8所示，弯曲装置的夹持机构200中的夹持件210相向夹持光栅600，弯曲调节机构300推动夹持机构200的夹持件210相向移动，以向光栅600中心挤压光栅600，迫使光栅600向一侧面发生弯曲，形成弯曲光栅。弯曲光栅适应X射线的传播方向，特别是在光栅600边缘能适应发散的X射线，使得X射线横向穿透不超过1个光栅周期，光栅600边缘相位信息不再缺失，视场完整不受限。
   如图9-10所示是形成弯曲光栅的平面光栅结构。所述光栅600为硅基平面光栅，或者所述光栅600为以薄层金属为基底的平面光栅。薄层金属为基底的平面光栅可以采用现有的产品，只需符合本发明需要的薄层金属基底的平面光栅都可以用于本发明。
本实施例的光栅600是以硅基平面光栅为例进行说明：
基于微铸造光栅制作技术，在硅基上制成硅基微结构，这种硅基微结构首先采用光助电化学刻蚀技术在n型（100）的硅基上刻蚀出一维或二维结构的高深宽比槽，对硅基微结构即光栅基底进行表面改性处理，光栅基底1表面及内壁表面都得到一层二氧化硅薄膜2，再进行浸润，浸润材料附着在光栅基底内壁表面形成浸润层4。浸润材料为X射线强吸收重金属盐，X射线强吸收重金属盐优选为铋盐、铅盐或金盐。再向高深宽比槽内填充金属3，即将光栅基底1浸入熔化的X射线强吸收重金属，优选金属铋、金或铅。这种光栅600具有高深宽比槽，并且在槽中填充金属，该制作方法使得硅基光栅的弯曲性能提高。
硅基光栅不受结构限制，都适用本发明，高深宽比的硅基微结构，尤其适应于本发明的弯曲光栅。 

Claims (10)

  1. 一种光栅弯曲装置，其特征在于，包括支架、用于夹持光栅的夹持机构，所述夹持机构通过弯曲调节机构固定在支架上；所述夹持机构包括成对设置并夹持光栅边缘的夹持件，成对的两个所述夹持件相对设置且二者对光栅作用力的中心同在通过光栅中心的一条直线上，所述弯曲调节机构驱动夹持件向光栅中心移动调整光栅的弯曲度。
  2. 根据权利要求1所述的光栅弯曲装置，其特征在于，所述夹持件设有用于夹持光栅边缘的卡槽；所述卡槽形状与光栅边缘形状配合。
  3. 根据权利要求1所述的光栅弯曲装置，其特征在于，所述弯曲调节机构包括顶压件，所述顶压件设置在夹持件后部；
    所述顶压件与夹持件分离设置，所述顶压件顶压在所述夹持件后部；
    或者所述顶压件与夹持件一体结构或者二者固定连接在一起；
    或者所述顶压件与夹持件转动连接。
  4. 根据权利要求3所述的光栅弯曲装置，其特征在于，所述支架上设有穿过孔，所述顶压件穿装在所述穿过孔中，且所述顶压件与支架之间设有锁定件，将移动后的顶压件锁定在穿过孔中；
    或者所述支架上设有螺孔，所述顶压件螺接在所述螺孔中；
    或者所述顶压件为凸轮，并转动连接在支架上。
  5. 根据权利要求1所述的光栅弯曲装置，其特征在于，所述弯曲调节机构包括顶压件，所述顶压件与夹持件并列或套装在一起，所述顶压件固定在支架上，所述顶压件与夹持件之间设有用于锁定二者之间相互位置的定位件。
  6. 根据权利要求5所述的光栅弯曲装置，其特征在于，所述定位件为固定在顶压件前端或后端的抱闸，所述抱闸抱紧夹持件将其锁定，在外力作用下所述抱闸张开使得夹持件相对于顶压件移动来调整光栅弯曲度。
  7. 根据权利要求1所述的光栅弯曲装置，其特征在于，在弯曲调节机构的至少一侧设有导向机构。
  8. 根据权利要求7所述的光栅弯曲装置，其特征在于，所述导向机构包括导向件、导轨，所述导轨固定在支架上并与顶压件运动方向平行，所述导向件固定在夹持件侧面，且配合在导轨上运动。
  9. 一种弯曲光栅系统，其特征在于，包括光栅和权利要求1-8的光栅弯曲装置，所述光栅弯曲装置中的夹持件相对夹持在光栅两侧，并通过弯曲调节机构驱动夹持件向光栅中心移动调整光栅的弯曲度。
  10. 根据权利要求9所述的弯曲光栅系统，其特征在于，所述光栅为硅基平面光栅，所述光栅的硅基基底上蚀刻有高深宽比的槽，所述槽内填充有金属或合金；
    或者所述光栅为薄层金属为基底的平面光栅。
PCT/CN2018/125860 2018-12-29 2018-12-29 光栅弯曲装置及其弯曲光栅系统 Ceased WO2020133532A1 (zh)

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JPH08211214A (ja) * 1995-02-07 1996-08-20 Olympus Optical Co Ltd 曲面グレーティングの製造方法
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CN104237987A (zh) * 2014-08-27 2014-12-24 中国科学院长春光学精密机械与物理研究所 一种光栅刻线弯曲自动控制校正方法
CN105074512A (zh) * 2013-03-19 2015-11-18 株式会社日立高新技术 曲面衍射光栅、其制造方法以及光学装置
CN206805056U (zh) * 2017-05-31 2017-12-26 陕西理工大学 一种曲面的弧度可调的液晶显示面板

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JPH08211214A (ja) * 1995-02-07 1996-08-20 Olympus Optical Co Ltd 曲面グレーティングの製造方法
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CN105074512A (zh) * 2013-03-19 2015-11-18 株式会社日立高新技术 曲面衍射光栅、其制造方法以及光学装置
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