WO2020098967A1 - Article revêtu présentant une haute résistance à la corrosion et à l'érosion comprenant une couche de nitrure d'aluminium - Google Patents

Article revêtu présentant une haute résistance à la corrosion et à l'érosion comprenant une couche de nitrure d'aluminium Download PDF

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WO2020098967A1
WO2020098967A1 PCT/EP2019/000311 EP2019000311W WO2020098967A1 WO 2020098967 A1 WO2020098967 A1 WO 2020098967A1 EP 2019000311 W EP2019000311 W EP 2019000311W WO 2020098967 A1 WO2020098967 A1 WO 2020098967A1
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coating
layer
ain
aluminum nitride
substrate
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PCT/EP2019/000311
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English (en)
Inventor
Lin SHANG
Juergen Ramm
Beno Widrig
Mirjam Arndt
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Oerlikon Surface Solutions Ag, Pfäffikon
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Publication of WO2020098967A1 publication Critical patent/WO2020098967A1/fr

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0617AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01DNON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12Blades
    • F01D5/28Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288Protective coatings for blades
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/10Metals, alloys or intermetallic compounds
    • F05D2300/17Alloys
    • F05D2300/175Superalloys
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/20Oxide or non-oxide ceramics
    • F05D2300/22Non-oxide ceramics
    • F05D2300/228Nitrides
    • F05D2300/2281Nitrides of aluminium

Definitions

  • Coated article exhibiting high corrosion and erosion resistance including AIN- layer
  • the present invention relates to a stainless steel or superalloy article having an oxidation, corrosion and erosion resistant coating thereon. More particularly, the invention relates to a high chromium containing steel article and to titanium alloys, such as the ones employed in the gas turbine engine for land-based and aero gas turbines, and to steam turbine engines, and exposed to oxidising, corrosive and erosive environment at moderated to elevated service temperature, having an inventive oxidation, corrosion and erosion resistant coating thereon.
  • the present invention relates to a PVD method, particularly a cathodic arc deposition method, to apply the inventive coating to the article.
  • Industrial gas turbines are frequently operated in regions which require different protection with respect to corrosion, such as those near chemical or petrochemical plants, where various chemical species may be found in the intake air, or those at or near ocean coastlines or other saltwater environments where various sea salts may be present in the intake air, or combinations of the above, or in other applications where the inlet air contains corrosive chemical species.
  • CONFir!MATiOM COPY Water droplet exposure can result from use of on-line water washing, fogging and evaporative cooling, or various combinations of these processes, to enhance compressor efficiency.
  • various ionic species which reach the surface of turbine components by water droplets, are Cl-, Br, F ‘ , S2 among others.
  • Electrochemically induced corrosion and erosion phenomena occurring at the leading edge can in turn result in cracking and even breaking of the airfoils thus bringing huge damage and economic loss to the whole engine.
  • oxidation may occur in hot steam or in ambient at higher temperatures.
  • stainless steel turbine compressor components such as e.g. airfoils
  • industrial gas turbines have shown susceptibility to water droplet erosion and corrosion fatigue of the airfoil surfaces.
  • nickel-based or cobalt-based superalloys instead of stainless steel for the components can improve the corrosion resistance, however this may not solve the water droplet erosion problem, since the metallic materials are ductile and susceptible to erosion.
  • a redesigning process of the turbine components would be needed due to their different metallurgical and mechanical properties.
  • the mentioned substrate materials may not be able to withstand the elevated temperatures occurring at later stages of an industrial gas turbine.
  • the application temperature for titanium alloys is limited to around 540°C.
  • Compressor blades of land based gas turbines are often made of 12% chromium containing martensitic stainless steel. Chromium is the key ingredient for the corrosion resistance of stainless steels, this kind of martensitic stainless steel is designed for service in high temperature applications up to 650° C, e.g. for turbine blades. However higher temperatures occur in some parts of an industrial gas turbine. Special austenitic stainless steels and nickel-based alloys are capable of a better performance, but at much higher cost.
  • a coating preferably a thin-film coating
  • a well-established substrate material e.g. on a stainless steel substrate
  • components of industrial gas turbines such as e.g. airfoils
  • Standard substrate materials of components of industrial gas turbine compressors, e.g. blades include stainless steel, chromium-based alloys, nickel-based alloys and titanium-based alloys.
  • this method needs no redesigning of the components, since a thin-film coating is deposited in a way, such that the dimensions of the components are changed only on the level of micrometers.
  • Gas turbine components are often protected by environmental or overlay coatings, which inhibit environmental damage. Different types of coatings providing protection on various components may be employed depending upon factors, such as whether the application involves exposure to air or combustion gas, and temperature exposure.
  • the coating consists of at least two different individual layers, which have been applied in a multiply alternating manner to a surface of a component, which is to be coated.
  • the described coating system comprises a ceramic main layer, which is deposited directly onto the substrate, and a quasi-ductile, non-metallic intermediate layer. Thereby the quasi-ductile, non- metallic intermediate layer is configured in such a way, that the energy is withdrawn from cracks, which grow in the direction of the substrate material, by crack branching.
  • a sacrificial and erosion-resistant turbine compressor airfoil coating is described by Lipkin et al in US20100226783A1.
  • the airfoils which are to be coated can be made of various types of stainless steel, such as 300 series, 400 series and type 450 stainless steel, and superalloys.
  • the coating system described in this document consists of at least two different kinds of layers, one of which is erosion resistant, the other one is corrosion resistant, whereas the sacrificial coating is more anodic with reference to the airfoil surface than the erosion resistant coating.
  • the materials are Al, Cr, Zn, Al-based alloys, Cr-based alloys, and many more.
  • the erosion resistant coating may comprise metal nitrides such as AIN, TiN, TiAIN, TiAICrN, and many more. According to this patent, either the sacrificial coating or the erosion-resistant coating can be applied directly to the surface of the stainless steel component. If the sacrificial coating is deposited directly on the surface of the stainless steel substrate, the erosion resistant coating is deposited on the sacrificial coating, and vice versa.
  • the sacrificial layer may be disposed as a thin film or thick film layer by any suitable application or deposition method, including chemical vapour deposition (CVD) and physical vapour deposition (PVD), for example filtered arc deposition and more typically by sputtering.
  • CVD chemical vapour deposition
  • PVD physical vapour deposition
  • the coating system provides enhanced water droplet erosion protection, enhanced galvanic and crevice corrosion resistance, and improved surface finish and antifouling capability for turbine compressor airfoil applications.
  • some materials mentioned in the description of said text such as the group of metal nitrides including AIN, TiN, TiAIN, TiAICrN, and many more, exhibit different properties for erosion and corrosion resistance.
  • Hazel et al disclose in EP1595977B1 a superalloy article having oxidation and corrosion resistant coating thereon.
  • the invention particularly relates to a superalloy article, such as one employed in the turbine and compressor sections of a gas turbine engine, and exposed to oxidising and corrosive environments at moderate to elevated service temperatures, having an oxidation and corrosion resistant coating thereon.
  • Significant advances in high temperature capabilities have been achieved through the formulation of nickel- and cobalt-based superalloys.
  • the components of a gas turbine engine are often simultaneously exposed to an oxidative/corrosive environment and elevated temperatures. In order to avoid damage of the turbine engine components, some of the components are protected by environmental or overlay coatings, which inhibit environmental damage.
  • the type of coating that is chosen for a specific application or component depends on various factors such as if the application involves exposure to air or combustion gas, and temperature exposure.
  • Turbine and compressor disks and seal elements for use at the highest operating temperatures are made of nickel-based superalloys selected for good elevated temperature toughness and fatigue resistance. These superalloys have adequate resistance to oxidation and corrosion damage, but that resistance may not be sufficient to protect these components at the operating temperatures now being reached. It has been shown that application of an aluminum nitride overlay coating to turbine disks, rotors and other components exposed to similar temperature and environment provides an effective environmentally protective coating towards ingested salts and sulfates.
  • the overlay coating typically has good adhesion, minimal diffusion into the base substrate and limited or no debit on low fatigue properties.
  • the overlay coating may oxidise to form a stable metal oxide on the surface of the coating providing further improved oxidation and corrosion resistance.
  • the protective coating can also be readily reconditioned and repaired if necessary.
  • the use of a superalloy article can have some disadvantages, such as the ones previously mentioned.
  • Corrosion processes on metallic surfaces can be very complex.
  • reactions with Cl and S are the ionic species, which predominantly influence the corrosion resistance of metallic surfaces.
  • Reactions of said kind are also depending on and varying with the humidity.
  • the kinetics of said chemical reactions is also highly dependent on the temperature. If a coating is to be applied in order to increase the corrosion resistance, all of these processes have to be taken into account. Applying an erosion resistant coating to a metal substrate could otherwise lead to increased erosion resistance, but could be disadvantageous for the corrosion resistance of the so coated substrate material.
  • a sacrificial layer can be formed at steel substrates, if the interface substrate/coating provides a sufficiently high aluminum (Al) content.
  • Al aluminum
  • the formation of said sacrificial layer on the basis of aluminum (Al) is sufficient to protect e.g. a component in a certain application, but only if applied to substrates, which need protection against iron corrosion. This is the case for e.g. high chromium containing steels, such as the ones commonly used for compressors of industrial gas turbines.
  • the formation of a sacrificial layer made of aluminum (Al) might not be sufficient to ensure an appropriate corrosion resistance of turbine blades. Factors such as sulfur containing air or elevated service temperatures can have a negative impact on said aluminum (Al) sacrificial layers. Improved control mechanisms of interface reactions in combination with an enhanced corrosion resistance is therefore the main goal of the present invention.
  • Diffusion processes are boosted by chemical processes and elevated temperatures, and often driven by specific elements comprised in the substrate material, which is the case for e.g. chromium (Cr) and nickel (Ni) comprising substrates.
  • chromium (Cr) and nickel (Ni) comprising substrates.
  • providing a dedicated interface can reduce corrosion as well as diffusion processes.
  • Particularly advantageous is the use of PVD for elements which additionally have a high melting point. This is due to the fact that high melting point materials usually form amorphous phases when the metallic vapour is condensing at the substrate surface during the deposition.
  • Another advantage of using PVD, especially cathodic arc deposition to produce said coating is that the amount of droplets in the coating is decreased in comparison to other low melting point materials. The coating generated accordingly, is therefore denser and shows less defects than other state of the art coatings, which leads to a suppression of corrosion processes.
  • the present invention aims to provide a coating system for a stainless steel, titanium or titanium aluminide article, and for cobalt-based, nickel-based or iron based superalloys, particularly for gas turbine or steam turbine compressor components, which shows enhanced corrosion and erosion resistance compared to state of the art coatings, and which is deposited preferably on a steel substrate by a physical vapour deposition (PVD) method, particularly by cathodic arc deposition.
  • PVD physical vapour deposition
  • Another aim of the present invention is to disclose a physical vapour deposition (PVD) method, particularly a cathodic arc deposition method, to deposit the inventive coating system on a substrate.
  • PVD physical vapour deposition
  • the present invention discloses a coating system for enhanced corrosion and erosion resistance of gas turbine engine components at moderate to elevated service temperatures, whereas these components are made of e.g. stainless steel or superalloys.
  • the inventive coating system comprises an optional metallic interlayer, an intermediate layer deposited either directly on the surface, or on the metallic interlayer, consisting of aluminum nitride (AIN), and a top layer, which can consist of either a monolayer or a multilayer system of oxides or nitrides. It could be shown in various standardized corrosion tests, that the inventive coating exhibits an enhanced corrosion resistance compared to previous coating systems which are known from the state of the art. Furthermore the inventive coating system also shows improved erosion resistance in various standardized tests.
  • the present invention furthermore relates to a physical vapour deposition (PVD) method, particularly to a cathodic arc deposition method, for depositing an inventive coating system.
  • PVD physical vapour deposition
  • FIG. 1 Schematic illustration of one possibility to form the inventive
  • Figure 7 Mass loss of an uncoated 1.4313 stainless steel substrate, a standard slurry coating on a 1.4313 stainless steel substrate and an aluminum nitride (AIN) coating on a 1.4313 stainless steel substrate in a cavitation test.
  • AIN aluminum nitride
  • FIG. 8 Schematic illustration of one possibility to form the inventive coating system.
  • FIG. 10 Schematic illustration of an inventive multilayer coating
  • AIN aluminum nitride
  • TiAIN titanium aluminum nitride
  • FIG 11 Schematic illustration of an aluminum nitride (AIN) monolayer, deposited on a metallic interlayer, which is deposited on the substrate.
  • AIN aluminum nitride
  • FIG 12 Schematic illustration of an inventive coating system, with an aluminum nitride (AIN) monolayer deposited on a substrate, a metallic interlayer deposited between the substrate and the aluminum nitride (AIN), and a titanium aluminum nitride (TiAIN) monolayer on top of the aluminum nitride (AIN) layer.
  • Figure 13 Schematic illustration of an inventive coating system, consisting of a multilayer system on top, and a metallic interface between the substrate and the top layer.
  • FIG. 14 Schematic representation of one embodiment of the inventive coating system
  • FIG. 15 Schematic illustration of a cathodic arc evaporation set-up to
  • a coating system on a substrate consisting of an optional metallic interlayer containing but is not limited to e.g. niobium (Nb), chromium (Cr), zirconium (Zr), hafnium (Hf) or molybdenum (Mo), or any combinations thereof, which is deposited directly on the substrate material, and a layer system which is either a monolayer or a multilayer system.
  • the layer system includes at least one intermediate layer of aluminum nitride (AIN), which is deposited either directly on the substrate, or on the metallic interlayer.
  • the layer system optionally includes one or more nitride layers, which are deposited on the aluminum nitride layer (AIN).
  • Aluminum nitride (AIN) has a very low oxidation rate and forms a protective oxide layer.
  • the coating thickness of the aluminum nitride (AIN) comprising coating of the inventive coating system ranges from 0.5 pm to 50 pm, but is preferably chosen to be between 1 pm and 30 pm, most preferably between 1 pm and 15 pm . If the said layer consists of solely aluminum nitride (AIN), this layer exhibits a hexagonal Wurtzite (w-AIN) crystal structure with (002) texture, as can be seen in the XRD diffractogram provided in Figure 1.
  • the composition of this stoichiometric compound is preferably chosen to be Al: 50 ⁇ 2 at%, N: 50 ⁇ 5 at%, but is not limited to this composition.
  • the indentation hardness was measured to be 24 ⁇ 1 GPa.
  • the indentation modulus was measured to be 281 ⁇ 7 GPa.
  • the coating hardness of aluminum nitride (AIN) was measured using an instrumented indentation test with a Vickers indenter and a maximum measuring force of 100 mN inside a calo grind. The listed results are average values of 20 single measurements.
  • the hardness values were evaluated according to the Oliver and Pharr method.
  • the indentation depth is less than 10% of the coating thickness to minimize substrate interference.
  • AIN aluminum nitride
  • AIN aluminum nitride
  • Various temperatures and thicknesses were chosen in order to test different variants. All samples coated with an aluminum nitride (AIN) layer at temperatures between 300-500 °C showed excellent corrosion resistance in neutral salt spray test (NSST) according to DIN EN ISO 9227 for 2000 h, i.e. no corrosion.
  • NST neutral salt spray test
  • NST neutral salt spray tests
  • AIN aluminum nitride coated samples, for which the aluminum nitride (AIN) was scratched, so that the substrate was not covered anymore by aluminum nitride (AIN) and therefore exposed to the salt fog.
  • the aluminum nitride (AIN) coatings showed very good resistance against solid particle erosion.
  • a 1.4313 stainless steel substrate was coated with an aluminum nitride (AIN) monolayer and a solid particle erosion test was performed with the so coated sample at 20° and 90° impact angles.
  • the mass loss of the aluminum nitride (AIN) coating is 25 times smaller than that of the uncoated 1.4313 stainless steel sample, and 170 times smaller than that of the 1.4313 stainless steel substrate coated with a standard slurry coating known from the state of the art.
  • the mass loss of the aluminum nitride (AIN) coating is 15 times smaller than that of the uncoated 1.4313 stainless steel sample, and 30 times smaller than that of the 1.4313 stainless steel substrate coated with a standard slurry coating known from the state of the art.
  • the anisotropic behavior of the erosion protection is a result of the configuration of the cathodic arc source and can be modified by the source parameters, e.g. by the modification of the source magnetic field.
  • the resistance of aluminum nitride (AIN) coatings against cavitation shows excellent results.
  • a 1.4313 stainless steel substrate was coated with an aluminum nitride (AIN) monolayer and a cavitation test was performed by immersing the sample in 25° C water. Shockwaves at the immersed sample surface were generated using a sonotrode with a frequency of 20 kHz and a peak to peak amplitude of 50 pm. The test duration was 20 h.
  • the mass loss of the aluminum nitride (AIN) coating is 45 times smaller than the one of a uncoated 1.4313 stainless steel substrate, and 80 times smaller than that of a 1.4313 stainless steel substrate coated with a standard slurry coating known from the state of the art.
  • the aluminum nitride (AIN) monolayer was applied by cathodic arc deposition, using aluminum (Al) targets with a purity of 99.5%.
  • the arc current for the at least one aluminum (Al) target is chosen to be between 130 A and 180 A.
  • N2 pressure leads to the formation of both, aluminum (Al) and Wurtzite aluminum nitride (w-AIN) phases.
  • the aluminum nitride coating exhibits highly desirable properties, especially regarding corrosion resistance, single particle erosion and cavitation, which can be even further improved, by depositing at least one oxide or nitride layer, e.g. titanium aluminum nitride (TiAIN) on top of the aluminum nitride (AIN) layer.
  • TiAIN titanium aluminum nitride
  • FIG 8. A schematic illustration of this embodiment of the inventive coating system is shown in Figure 8. It is commonly known that nitrides and oxides generally exhibit a high hardness and good erosion resistance. However, depositing one or even more nitride layers on or in combination with at least one aluminum nitride (AIN) layer, leads to an exceptional enhancement of the corrosion and erosion resistance of the so coated sample.
  • TiAIN titanium aluminum nitride
  • TiAIN titanium aluminum nitride
  • the coating thickness can range from 1 pm to 50 pm and is preferably chosen to be between 1 pm and 25 pm.
  • the composition is preferably chosen to be Ti: 23 ⁇ 2 at%, Al: 22 ⁇ 2 at%, N: 55 ⁇ 4 at%, but is not limited to this specific composition.
  • the indentation hardness was measured to be 30 ⁇ 2 GPa.
  • the indentation modulus was measured to be 385 ⁇ 12 GPa.
  • the coating hardness was measured using an instrumented indentation test with a Vickers Indenter and a maximum measuring force of 100 mN inside a calo grind. The listed results are average values of 20 single measurements. The hardness values were evaluated according to the Oliver and Pharr method. The indentation depth is less than 10% of the coating thickness to minimise substrate interference.
  • the above described example is however not limiting.
  • the ratio of aluminum (Al) to titanium (Ti) could as well be chosen differently.
  • a ratio within the range of Al: 70 at%, Ti: 30 at% and Al: 90 at%, Ti: 10 at% leads to a cubic titanium aluminum nitride (TiAIN) and hexagonal Wurtzite aluminum nitride (w-AIN) formation, for this two- phase-coating preferably a ratio of Al: 80 at%, Ti: 20 at% is chosen.
  • w-AIN hexagonal Wurtzite aluminum nitride
  • the corrosion and erosion resistance of nitride layers can be varied according to the ratio of e.g. aluminum (Al) to titanium (Ti) and nitrogen (N). This offers a possibility to adjust the coating to a specific
  • a multilayer system including at least one aluminum nitride (AIN) layer, and at least one nitride layer, preferably a titanium aluminum nitride (TiAIN) layer, is especially beneficial.
  • AIN aluminum nitride
  • TiAIN titanium aluminum nitride
  • An example of an inventive multilayer system is shown in Figure 10. Since a change of the ratio of the metals in the at least one nitride layer, e.g.
  • a change of the ratio of aluminum (Al) to titanium (Ti) in a titanium aluminum nitride (TiAIN) layer can lead to different phases, a high flexibility is offered by this coating system.
  • aluminum nitride (AIN) also forms different phases depending on the nitrogen (N2) gas flow.
  • N2 nitrogen
  • Combining especially aluminum nitride (AIN) and titanium aluminum nitride (TiAIN) thus offers a broad range of parameters to adjust the properties of the inventive coating system in order to fulfill the requirements of a specified environment.
  • an optional metallic interlayer can be deposited directly on the base material.
  • the metallic interface can be sacrificial or non-sacrificial.
  • the deposition of a metallic interface containing niobium (Nb), chromium (Cr), zirconium (Zr), hafnium (Hf) or molybdenum (Mo), preferably consisting of said metals, or any combinations thereof, leads to improved adhesion between the substrate and the coating, as well to an improved corrosion resistance of the so coated substrate.
  • an inventive coating system is to deposit an aluminum nitride (AIN) layer on a substrate, deposit a metallic interlayer between the substrate and the aluminum nitride (AIN), and apply a titanium aluminum nitride (TiAIN) coating on top of the aluminum nitride (AIN) coating, such as is shown in Figure 12.
  • AIN aluminum nitride
  • TiAIN titanium aluminum nitride
  • a metallic interlayer can also be applied, if a multilayer system according to the present invention is to be deposited on a substrate, an example of which is shown in Figure 13.
  • the substrate materials to be coated include but are not limited to stainless steel, superalloys and titanium alloys.
  • the inventive coating is especially suitable to be applied on substrate materials such as high-chromium (9-18 wt%) containing steel, e.g. 1.4313 stainless steel, 1.4938 stainless steel, titanium, titanium alloy,
  • intermetallics such as titanium aluminide (TiAI) and iron-based, cobalt-based and nickel-based superalloys.
  • a multilayer system consisting of alternating layers of TiAIN/AIN, AIN, and TiAIN is deposited on the substrate material.
  • the coating system shown in Figure 14, as well as the arc deposition method described below, and shown in Figure 15, are to be seen as only one example but are not limited to this variant.
  • a TiAIN/AIN layer is deposited directly on the substrate.
  • An aluminum nitride (AIN) layer is deposited on the TiAIN/AIN layer, followed by another TiAIN/AIN.
  • TiAIN titanium aluminum nitride
  • TiAIN titanium aluminum nitride
  • the said coating system is deposited on a sample (4) using an arc deposition method.
  • a sample (4) is placed in a vacuum coating chamber (1 ).
  • the substrate (4) is placed rotatable in the center of said vacuum chamber on a carousel (2).
  • the inventive coating system can be deposited on the sample (4) by using a different amount of targets functioning as cathodes, such as for example two, four or even more targets.
  • the order and number of the targets can be of any desired kind.
  • the set-up shown in this particular example ( Figure 15) contains four targets, all of them set up in a way as to work as cathodes.
  • the targets are mounted at the walls of the vacuum coating chamber.
  • cathodes A and B are targets comprising aluminum (Al) as main component
  • cathodes C and D are targets comprising titanium aluminum (TiAI) as main component.
  • the target positions are to be seen as only one example of the present invention and are not limiting.
  • N2 nitrogen
  • a non-zero amount of N2 is inserted into the vacuum chamber through the gas inlet.
  • the N2 pressure was set to 3.2e-2 mbar.
  • an argon (Ar) gas inlet is installed as well, in order to use argon as a work gas.
  • the coating temperature is chosen within a range between 300-500°C.
  • Magnets which are not shown in this figure, are located behind the targets, and the magnetic field can be adjusted in order to influence the coating.
  • Shutters (3) can be installed in front of the targets (A, B, C, D), to allow different coating layers, but are not compulsory.
  • the coating thickness of the individual layers of the multilayer system described herein can be chosen to be typically between 0.01 pm and 5 pm.
  • One example of said coating system produced by said method was deposited on a substrate sample, exhibiting a coating thickness of 11 pm.
  • a metallic interlayer (10) for example consisting of niobium (Nb) or chromium (Cr) is deposited directly on the substrate (9).
  • a top layer (12) containing either oxides or nitrides or both, e.g. consisting of titanium aluminum nitride (TiAIN) is then deposited on top of the aluminum nitride (AIN) layer.
  • an aluminum nitride (AIN) monolayer preferably with the composition Al: 50 ⁇ 2 at%, N: 50 ⁇ 2 at%, is deposited directly on a substrate material, such as for example 1.4313 stainless steel.
  • the monolayer is preferably deposited on the 1.4313 stainless steel at 300° C with a coating thickness of 8 pm and exhibits an extraordinary corrosion resistance.
  • the aluminum nitride (AIN) if exposed to oxidising ambient, forms a native oxide at the surface. In general, this oxidation can also be performed in the vacuum system by controlled plasma oxidation. This again improves the oxidation and corrosion resistance of aluminum nitride (AIN).
  • a Coating system for enhanced corrosion and erosion resistance of a gas turbine engine component is disclosed, whereas the component is preferably made of stainless steel and/or superalloys and the coating system comprises a layer, the layer is consisting of aluminum nitride (AIN).
  • the AIN layer can be an intermediate layer and the coating system comprises a top layer, where the intermediate layer is positioned between a surface of the component and the top layer consists of either a monolayer or a multilayer system.
  • the intermediate coating can be either directly coated on the surface of the
  • the top layer can comprise a monolayer or a multilayer system of oxides or nitrides and preferably consists of a monolayer or a multilayer system of oxides or nitrides.
  • the top layer can comprises for example a TiAIN layer.
  • the top layer can comprise for example at least one TiAIN/AIN layer system.
  • the layer consisting of aluminum nitride can comprise hexagonal structure as can be measured by XRD.
  • the layer consisting of AIN can comprise metallic Al droplets.
  • Droplets are particles created by the Arc deposition PVD process. In the case of reactive arc deposition such particles are in most cases not fully reacted through, therefore having an outer shell of reacted material and an inner core of metal.

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  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
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  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
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Abstract

La présente invention concerne un système de revêtement permettant d'améliorer la résistance à la corrosion et à l'érosion d'un composant de moteur à turbine à gaz, le composant étant de préférence fait d'acier inoxydable et/ou de superalliages et le système de revêtement comprenant une couche, la couche étant constituée de nitrure d'aluminium (AIN).
PCT/EP2019/000311 2018-11-13 2019-11-12 Article revêtu présentant une haute résistance à la corrosion et à l'érosion comprenant une couche de nitrure d'aluminium WO2020098967A1 (fr)

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WO2022174973A3 (fr) * 2021-02-17 2022-09-29 Oerlikon Surface Solutions Ag, Pfäffikon Article revêtu combinant une résistance élevée à la corrosion et à l'érosion

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