WO2020079836A1 - Rotary transformer for ultrasonic flaw detector and ultrasonic flaw detector - Google Patents

Rotary transformer for ultrasonic flaw detector and ultrasonic flaw detector Download PDF

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Publication number
WO2020079836A1
WO2020079836A1 PCT/JP2018/039039 JP2018039039W WO2020079836A1 WO 2020079836 A1 WO2020079836 A1 WO 2020079836A1 JP 2018039039 W JP2018039039 W JP 2018039039W WO 2020079836 A1 WO2020079836 A1 WO 2020079836A1
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WO
WIPO (PCT)
Prior art keywords
holding member
conductor
substrate
floating conductor
rotary transformer
Prior art date
Application number
PCT/JP2018/039039
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French (fr)
Japanese (ja)
Inventor
拓真 西村
秀憲 湯川
智英 西川
俊明 鴨居
Original Assignee
三菱電機株式会社
菱電湘南エレクトロニクス株式会社
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Application filed by 三菱電機株式会社, 菱電湘南エレクトロニクス株式会社 filed Critical 三菱電機株式会社
Priority to PCT/JP2018/039039 priority Critical patent/WO2020079836A1/en
Priority to JP2019529659A priority patent/JP6669313B1/en
Publication of WO2020079836A1 publication Critical patent/WO2020079836A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F38/00—Adaptations of transformers or inductances for specific applications or functions
    • H01F38/18—Rotary transformers

Definitions

  • the present invention relates to a rotary transformer for an ultrasonic flaw detector, which includes a fixed body and a rotating body.
  • the present invention also relates to an ultrasonic flaw detector equipped with a rotary transformer.
  • Patent Document 1 discloses a rotary transformer for an ultrasonic flaw detector, which includes a fixed body and a rotating body.
  • the fixed body includes a substrate on which a plurality of one-turn coils (hereinafter, referred to as “first one-turn coil”) are concentrically formed (hereinafter, referred to as “first substrate”) and a first substrate.
  • a holding member (hereinafter, referred to as “first holding member”) that holds the holding member.
  • the rotating body is a substrate (hereinafter, referred to as “second unit”) in which the same number of one-turn coils (hereinafter, referred to as “second one-turn coil”) formed in the fixed unit are concentrically formed.
  • second holding member that holds the second substrate (hereinafter, referred to as “second holding member”). Air is present between the first substrate and the first holding member included in the fixed body. Further, air is present between the second substrate and the second holding member included in the rotating body.
  • the first and second holding members are formed of a conductor. Therefore, when an electric signal flows through the first and second one-turn coils, an electromagnetic induction phenomenon may cause eddy current loss or hysteresis loss in the first and second holding members. Since the eddy current loss, the hysteresis loss, and the like are generated in the first and second holding members, the transmission characteristics of the electric signal are deteriorated, and thus the flaw detection accuracy of the inspected material is deteriorated. The air between the first and second substrates and the first and second holding members acts to reduce the influence of the electromagnetic induction phenomenon.
  • the present invention has been made to solve the above-described problems, and in order to eliminate the influence of the electromagnetic induction phenomenon, the first and second substrates and the first and second holding members are provided between the first and second substrates.
  • An object of the present invention is to obtain a rotary transformer for an ultrasonic flaw detector and an ultrasonic flaw detector that can eliminate the influence of an electromagnetic induction phenomenon without increasing the distance.
  • a plurality of first one-turn coils are concentrically formed on a first plane, and a first floating conductor is formed on a second plane.
  • a fixed body having a first substrate and a first holding member that holds the first substrate so as to surround the first floating conductor, and to face each of the plurality of first one-turn coils.
  • the second holding member and the plurality of ultrasonic probes include a rotating body that rotates around the material to be inspected. Those were Unishi.
  • the fixed body has the first holding member that holds the first substrate so as to surround the first floating conductor, and the rotating body surrounds the second floating conductor. It has the 2nd holding member holding the 2nd substrate. Therefore, in the rotary transformer for the ultrasonic flaw detector according to the present invention, in order to eliminate the influence of the electromagnetic induction phenomenon, the distance between the first and second substrates and the first and second holding members is reduced. The effect of the electromagnetic induction phenomenon can be eliminated without increasing the length.
  • FIG. 3 is a cross-sectional view showing a C-C ′ cross section of the outer ring 10 shown in FIG. 2. It is a plan view of the inner ring 20 from the x 2 direction in FIG. 1 in the rotating transformer 1 for ultrasonic flaw detection apparatus.
  • FIG. 5 is a cross-sectional view showing a D-D ′ cross section of the inner ring 20 shown in FIG. 4. It is explanatory drawing which shows a part of 1st conductor 16 and the columnar conductor 17 currently formed in the 1st plane 11a.
  • FIG. 3 is a cross-sectional view showing a C-C ′ cross section of the outer ring 10 shown in FIG. 2.
  • FIG. 5 is a cross-sectional view showing a D-D ′ cross section of the inner ring 20 shown in FIG. 4.
  • FIG. 6 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1.
  • FIG. 7 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector, viewed from the x 2 direction in FIG. 1.
  • FIG. 6 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1.
  • FIG. 15 is a cross-sectional view showing a C-C ′ cross section of the outer ring 10 shown in FIG. 14.
  • FIG. 7 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector, viewed from the x 2 direction in FIG. 1.
  • FIG. 17 is a cross-sectional view showing a D-D ′ cross section of the inner ring 20 shown in FIG. 16. It is explanatory drawing which shows the rotary transformer 1 provided with four outer rings and four inner rings.
  • FIG. 1 is a configuration diagram showing an ultrasonic flaw detector according to the first embodiment.
  • FIG. 2 is a plan view of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as viewed from the x 1 direction in FIG.
  • FIG. 3 is a cross-sectional view showing a CC ′ cross section of the outer ring 10 shown in FIG.
  • FIG. 4 is a plan view of the inner ring 20 in the rotary transformer 1 for an ultrasonic flaw detector as viewed from the x 2 direction in FIG. 1.
  • FIG. 5 is a sectional view showing a DD ′ section of the inner ring 20 shown in FIG.
  • the rotary transformer 1 includes a fixed body 5 and a rotary body 6.
  • the outer frame 2 is a housing of the rotary transformer 1 and holds the fixed body 5.
  • the inner wall 3 is in contact with the outer frame 2 via the rotation mechanism 4.
  • the inner wall 3 holds the inner ring 20 so that the inner ring 20 faces the outer ring 10.
  • the rotation mechanism 4 is a mechanism that relatively rotates the inner wall 3 with respect to the outer frame 2. As the inner wall 3 rotates, the inner ring 20 and the ultrasonic probes 32a, 32b, 32c, 32d rotate around the inspected material 7.
  • the inspected material 7 is an inspection target of the ultrasonic flaw detector.
  • the fixed body 5 includes an outer ring 10.
  • the outer ring 10 is attached to the outer frame 2 and has a first substrate 11 and a first holding member 14.
  • First 1-turn coils 12a, 12b, 12c, 12d are concentrically formed on the first plane 11a of the first substrate 11.
  • One end of each of the first one-turn coils 12a, 12b, 12c, 12d is connected to one end of each of the stationary signal lines 43a, 43b, 43c, 43d, and the other end is connected to the ground.
  • the first floating conductor 13 is formed on the second plane 11 b of the first substrate 11.
  • the first floating conductor 13 is a non-magnetic metal such as copper.
  • the first holding member 14 holds the first substrate 11 in a non-contact state with the first floating conductor 13 so as to surround the first floating conductor 13.
  • the first holding member 14 is a metal such as iron or aluminum and is grounded.
  • the first holding member 14 may be non-metallic, but when the first holding member 14 is non-metallic, the first floating conductor 13 needs to be grounded.
  • the first conductor 16 and the first floating conductor 13 are electrically connected, and the first conductor 16 is grounded.
  • the inside of the first holding member 14 is air 15.
  • the inside of the first holding member 14 may be an insulator having a relative magnetic permeability substantially equal to 1 instead of the air 15.
  • the first conductor 16 is provided between the first 1-turn coil 12a and the first 1-turn coil 12b and between the first 1-turn coil 12b and the first 1-turn coil 12c on the first plane 11a. And the first 1-turn coil 12c and the first 1-turn coil 12d, respectively.
  • the first conductor 16 is grounded.
  • the columnar conductor 17 is, for example, a via, and the columnar conductor 17 electrically connects the first conductor 16 and the first floating conductor 13.
  • FIG. 6 is an explanatory diagram showing a part of the first conductors 16 and the columnar conductors 17 formed on the first plane 11a. In the example of FIG. 6, the first conductor 16 is electrically connected to the first floating conductor 13 by the two columnar conductors 17.
  • the through hole 18 is a hole into which the inspection target material 7 to be inspected is inserted.
  • the rotating body 6 includes an inner ring 20 and ultrasonic probes 32a, 32b, 32c, 32d and the like.
  • the inner ring 20, the ultrasonic probes 32a, 32b, 32c, 32d, etc. are rotated around the inspection target material 7 by the rotating mechanism 4.
  • the inner ring 20 is attached to the inner wall 3, and includes a second substrate 21 and a second holding member 24.
  • Second one-turn coils 22a, 22b, 22c, 22d are concentrically formed on the third plane 21a of the second substrate 21.
  • One end of each of the second one-turn coils 22a, 22b, 22c, 22d is connected to one end of each of the rotation-side signal lines 33a, 33b, 33c, 33d, and the other end is connected to the ground.
  • the second floating conductor 23 is formed on the fourth plane 21 b of the second substrate 21.
  • the second floating conductor 23 is a non-magnetic metal such as copper.
  • the second holding member 24 holds the second substrate 21 in a non-contact state with the second floating conductor 23 so as to surround the second floating conductor 23.
  • the second holding member 24 is a metal such as iron or aluminum and is grounded.
  • the second holding member 24 may be non-metallic, but when the second holding member 24 is non-metallic, the second floating conductor 23 needs to be grounded.
  • the second conductor 26 and the second floating conductor 23 are electrically connected, and the second conductor 26 is grounded.
  • the inside of the second holding member 24 is air 25.
  • the inside of the second holding member 24 may be an insulator having a relative magnetic permeability substantially equal to 1 instead of the air 25.
  • the second conductor 26 is provided between the second 1-turn coil 22a and the second 1-turn coil 22b and between the second 1-turn coil 22b and the second 1-turn coil 22c on the third plane 21a. And the second 1-turn coil 22c and the second 1-turn coil 22d, respectively.
  • the second conductor 26 is grounded.
  • the columnar conductor 27 is, for example, a via similar to the columnar conductor 17.
  • the columnar conductor 27 electrically connects the second conductor 26 and the second floating conductor 23.
  • the through hole 28 is a hole into which the inspection target material 7 to be inspected is inserted.
  • the ultrasonic probe holder 31 holds the ultrasonic probes 32a, 32b, 32c, 32d, and is rotated together with the inner wall 3.
  • the ultrasonic probe 32a is connected to the second one-turn coil 22a via the rotation-side signal line 33a.
  • the ultrasonic probe 32b is connected to the second one-turn coil 22b via the rotation-side signal line 33b.
  • the ultrasonic probe 32c is connected to the second one-turn coil 22c via the rotation-side signal line 33c.
  • the ultrasonic probe 32d is connected to the second one-turn coil 22d via the rotation-side signal line 33d.
  • the rotation-side signal lines 33a, 33b, 33c, 33d are signal lines for transmitting electric signals.
  • One end of each of the rotation-side signal lines 33a, 33b, 33c, 33d is connected to one end of each of the second one-turn coils 22a, 22b, 22c, 22d.
  • the other end of each of the rotation side signal lines 33a, 33b, 33c, 33d is connected to each of the ultrasonic probes 32a, 32b, 32c, 32d.
  • Each of the ultrasonic probes 32a, 32b, 32c, 32d receives an electric signal from each of the second one-turn coils 22a, 22b, 22c, 22d via the rotation side signal lines 33a, 33b, 33c, 33d. Then, the ultrasonic wave corresponding to the electric signal is emitted to the inspection object 7.
  • each of the ultrasonic probes 32a, 32b, 32c, 32d receives the ultrasonic wave reflected by the material 7 to be inspected, it receives the ultrasonic wave through the rotation side signal lines 33a, 33b, 33c, 33d. The corresponding electric signal is output to the second one-turn coils 22a, 22b, 22c, 22d.
  • the signal input / output unit 40 includes transmitting units 41a, 41b, 41c, 41d and receiving units 42a, 42b, 42c, 42d, and outputs an electric signal to the first 1-turn coils 12a, 12b, 12c, 12d. Input and output.
  • Each of the transmitter 41a and the receiver 42a is connected to the first one-turn coil 12a via the stationary signal line 43a.
  • Each of the transmitter 41b and the receiver 42b is connected to the first one-turn coil 12b via the stationary signal line 43b.
  • Each of the transmitter 41c and the receiver 42c is connected to the first one-turn coil 12c via the stationary signal line 43c.
  • Each of the transmitter 41d and the receiver 42d is connected to the first one-turn coil 12d via the stationary side signal line 43d.
  • the stationary signal lines 43a, 43b, 43c, 43d are signal lines for transmitting electric signals.
  • One end of each of the stationary signal lines 43a, 43b, 43c, 43d is connected to one end of each of the first one-turn coils 12a, 12b, 12c, 12d.
  • the other end of each of the stationary-side signal lines 43a, 43b, 43c, 43d is connected to each of the transmitters 41a, 41b, 41c, 41d and each of the receivers 42a, 42b, 42c, 42d. There is.
  • each of the transmitters 41a, 41b, 41c, 41d receives the control signal for instructing the transmission of the electric signal from the flaw detector 44
  • the transmitter 41a, 41b, 41c, 41d transmits the electric signal to the first via the stationary side signal lines 43a, 43b, 43c, 43d. 1 turn coil 12a, 12b, 12c, 12d.
  • each of the transmission units 41 a, 41 b, 41 c, 41 d outputs the same electric signal as the above electric signal to the flaw detection unit 44.
  • Each of the receivers 42a, 42b, 42c, 42d receives the electric signal output from the first one-turn coil 12a, 12b, 12c, 12d via the stationary side signal lines 43a, 43b, 43c, 43d. , And outputs an electrical signal to the flaw detection unit 44.
  • the flaw detection unit 44 is realized by dedicated hardware such as a flaw detection circuit.
  • the flaw detection circuit is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a combination thereof. To do.
  • the flaw detection unit 44 outputs a control signal instructing the transmission of the electric signal to each of the transmission units 41a, 41b, 41c, 41d.
  • the flaw detection unit 44 detects a flaw on the inspected material 7 based on the electric signals output from the transmission units 41a, 41b, 41c, 41d and the electric signals output from the reception units 42a, 42b, 42c, 42d.
  • the flaw detection circuit is not limited to being realized by dedicated hardware, but may be realized by software, firmware, or a combination of software and firmware.
  • the rotation mechanism 4 rotates the inner wall 3 relative to the outer frame 2 when detecting the material to be inspected 7.
  • the inner ring 20 and the ultrasonic probes 32a, 32b, 32c, 32d rotate around the inspected material 7.
  • the flaw detection unit 44 outputs a control signal instructing the transmission of the electric signal to each of the transmission units 41a, 41b, 41c, 41d.
  • each of the transmission units 41a, 41b, 41c, 41d Upon receiving the control signal from the flaw detection unit 44, each of the transmission units 41a, 41b, 41c, 41d sends a pulse signal, for example, as a first electric signal via the stationary signal lines 43a, 43b, 43c, 43d. It transmits to 1 turn coil 12a, 12b, 12c, 12d.
  • each of the transmission units 41 a, 41 b, 41 c, 41 d outputs the same electric signal as the above electric signal to the flaw detection unit 44.
  • the first 1-turn coil 12a is arranged so as to face the second 1-turn coil 22a, and the first 1-turn coil 12b is connected to the second 1-turn coil 22b. It is arranged to face each other.
  • the first 1-turn coil 12c is arranged so as to face the second 1-turn coil 22c, and the first 1-turn coil 12d is arranged so as to face the second 1-turn coil 22d.
  • FIG. 7 is an explanatory diagram showing non-contact transmission between the first 1-turn coils 12a, 12b, 12c, 12d and the second 1-turn coils 22a, 22b, 22c, 22d.
  • the electric signal flowing through the first 1-turn coil 12a is contactlessly transmitted to the second 1-turn coil 22a, and the electric signal flowing through the first 1-turn coil 12b is not transmitted to the second 1-turn coil 22b.
  • Contact is transmitted.
  • the electric signal flowing through the first 1-turn coil 12c is contactlessly transmitted to the second 1-turn coil 22c, and the electric signal flowing through the first 1-turn coil 12d is not transmitted to the second 1-turn coil 22d.
  • Contact is transmitted.
  • the contactless transmission of the electric signal is transmitted, for example, by capacitive coupling between the first 1-turn coils 12a, 12b, 12c, 12d and the second 1-turn coils 22a, 22b, 22c, 22d. It is a thing.
  • the electric signal transmitted to the second 1-turn coil 22a in a non-contact manner is transmitted to the ultrasonic probe 32a via the rotation-side signal line 33a and transmitted to the second 1-turn coil 22b in a non-contact manner.
  • the signal is transmitted to the ultrasonic probe 32b via the rotation-side signal line 33b.
  • the electric signal non-contactly transmitted to the second one-turn coil 22c is transmitted to the ultrasonic probe 32c via the rotation side signal line 33c, and the non-contact electric signal is transmitted to the second one-turn coil 22d.
  • the signal is transmitted to the ultrasonic probe 32d via the rotation side signal line 33d.
  • Each of the ultrasonic probes 32a, 32b, 32c, 32d converts the transmitted electric signal into an ultrasonic wave and radiates the ultrasonic wave to the inspection object 7. Since each of the ultrasonic probes 32a, 32b, 32c, 32d rotates around the inspected material 7, the emission position of the ultrasonic wave with respect to the inspected material 7 changes with the passage of time. The ultrasonic waves emitted from each of the ultrasonic probes 32a, 32b, 32c, 32d are reflected by the inspection object 7. The echo height of the ultrasonic wave reflected by the material 7 to be inspected changes depending on whether the ultrasonic wave is radiated or not.
  • each of the ultrasonic probes 32a, 32b, 32c, 32d When each of the ultrasonic probes 32a, 32b, 32c, 32d receives the ultrasonic wave reflected by the inspected material 7, it converts the received ultrasonic wave into an electric signal. Each of the ultrasonic probes 32a, 32b, 32c, 32d outputs the electric signal to the second one-turn coils 22a, 22b, 22c, 22d via the rotation side signal lines 33a, 33b, 33c, 33d. To do.
  • the electrical signal transmitted to the second 1-turn coil 22a is contactlessly transmitted to the first 1-turn coil 12a, and the electrical signal transmitted to the second 1-turn coil 22b is It is transmitted in a non-contact manner to the first one-turn coil 12b.
  • the electric signal transmitted to the second one-turn coil 22c is contactlessly transmitted to the first one-turn coil 12c, and the electric signal transmitted to the second one-turn coil 22d is the first one-turn coil. It is transmitted to the coil 12d in a non-contact manner.
  • Each of the electric signals transmitted to the first one-turn coil 12a, 12b, 12c, 12d in a non-contact manner is transmitted to the receivers 42a, 42b, 42c, 42d via the stationary signal lines 43a, 43b, 43c, 43d. Is transmitted.
  • Each of the receivers 42a, 42b, 42c, 42d receives the electrical signal output from the first one-turn coil 12a, 12b, 12c, 12d and outputs the electrical signal to the flaw detector 44.
  • the flaw detection unit 44 detects a flaw on the inspected material 7 based on the electric signals output from the transmission units 41a, 41b, 41c, 41d and the electric signals output from the reception units 42a, 42b, 42c, 42d. To do.
  • the method of detecting a flaw in the material 7 to be inspected is a known technique, and thus detailed description thereof will be omitted.
  • the flaw detection unit 44 can use the following detection method. [Detection method]
  • the presence or absence of scratches at the ultrasonic wave radiation position is detected from the difference.
  • the flaw detection unit 44 is configured such that the rotation speed of the inner wall 3 by the rotation mechanism 4 and the time interval of the pulse signal which is the electric signal transmitted from the transmission units 41a, 41b, 41c, 41d. In, it is known. Therefore, in the flaw detection unit 44, the position where the ultrasonic waves are radiated from the ultrasonic probes 32a, 32b, 32c, 32d to the inspection object 7 is known.
  • the distance between the first and second substrates and the first and second holding members is It secures 5 to 10 times the gap between one 1-turn coil and the second 1-turn coil.
  • the first floating conductor 13 is formed on the second plane 11b of the first substrate 11, and the second floating conductor 23 is formed on the fourth plane 21b of the second substrate 21. Has been formed.
  • the first floating conductor 13 acts so as to shield the magnetic flux between the first one-turn coil 12a, 12b, 12c, 12d and the first holding member 14.
  • the second floating conductor 23 acts so as to shield the magnetic flux between the second one-turn coils 22a, 22b, 22c, 22d and the second holding member 24. Therefore, even if an electric signal flows through the first one-turn coils 12a, 12b, 12c, and 12d to generate magnetic flux, the magnetic flux almost reaches the first holding member 14 due to the shield effect of the first floating conductor 13. Will not do. Since the magnetic flux hardly reaches the first holding member 14, the eddy current loss, the hysteresis loss, and the like generated in the first holding member 14 are significantly suppressed.
  • the magnetic flux almost reaches the second holding member 24 due to the shield effect of the second floating conductor 23. Will not do. Since the magnetic flux hardly reaches the second holding member 24, the eddy current loss or the hysteresis loss generated in the second holding member 24 is significantly suppressed.
  • the distance W between the second flat surface 11b of the first substrate 11 and the first holding member 14 is between the first one-turn coil 12a and the second one-turn coil 22a. Even if the gap is shorter than 5 to 10 times, the influence of the electromagnetic induction phenomenon can be eliminated. Therefore, in the rotary transformer 1 shown in FIG. 1, the outer ring 10 can be made thinner than the rotary transformer disclosed in Patent Document 1. Further, the distance W between the fourth flat surface 21b of the second substrate 21 and the second holding member 24 is the gap between the first 1-turn coil 12a and the second 1-turn coil 22a. Even if it is shorter than 5 to 10 times, it is possible to eliminate the influence of the electromagnetic induction phenomenon. Therefore, in the rotary transformer 1 shown in FIG. 1, the inner ring 20 can be made thinner than the rotary transformer disclosed in Patent Document 1. By making the outer ring 10 thinner and the inner ring 20 thinner, the physical strength of the rotary transformer 1 is increased.
  • FIG. 8 is an explanatory diagram showing the occurrence of crosstalk.
  • 51 is the crosstalk that the electric signal output from the second 1-turn coil 22d exerts on the second 1-turn coil 22c
  • 52 is the output from the second 1-turn coil 22d. This is the crosstalk that the electric signal exerts on the first one-turn coil 12c.
  • the electric signal output from the second one-turn coil 22d serves as a crosstalk generation source.
  • FIG. 9 is an explanatory diagram showing suppression of crosstalk.
  • x indicates that the crosstalks 51 and 52 are suppressed.
  • the fixed body 5 has the first holding member 14 that holds the first substrate 11 so as to surround the first floating conductor 13, and the rotating body 6 is the second holding member 14.
  • the rotary transformer 1 is configured so as to have the second holding member 24 that holds the second substrate 21 so as to surround the floating conductor 23. Therefore, the rotary transformer 1 includes the distance W between the first substrate 11 and the first holding member 14 and the second substrate 21 and the second holding member 24 in order to eliminate the influence of the electromagnetic induction phenomenon. It is possible to eliminate the influence of the electromagnetic induction phenomenon without increasing each of the distances W between them. Therefore, in comparison with the rotary transformer disclosed in Patent Document 1, the rotary transformer 1 has a distance W between the first substrate 11 and the first holding member 14, and the second substrate 21 and the second holding member 14. Each of the distances W with the holding member 24 becomes shorter, and the thickness of each of the fixed body 5 and the rotating body 6 becomes thinner.
  • the first conductor 16 and the first floating conductor 13 are electrically connected, and the second conductor 26 and the second floating conductor 23 are electrically connected,
  • the rotary transformer 1 is configured such that the first conductor 16 and the second conductor 26 are grounded. Therefore, each of the first floating conductor 13 and the second floating conductor 23 is electrically grounded without individually electrically grounding each of the first floating conductor 13 and the second floating conductor 23. It will be in a state of being.
  • the first holding member 14 holds the first substrate 11 in a state of not contacting the first floating conductor 13 so as to surround the first floating conductor 13.
  • the second holding member 24 holds the second substrate 21 in a state of not contacting the second floating conductor 23 so as to surround the second floating conductor 23.
  • FIG. 10 is a cross-sectional view showing a CC ′ cross section of the outer ring 10 shown in FIG. Further, in the inner ring 20, as shown in FIG. 11, the second floating conductor 23 is formed on the entire surface of the fourth plane 21b, and the second holding member 24 contacts the second floating conductor 23. You may make it hold
  • FIG. 11 is a sectional view showing a DD ′ section of the inner ring 20 shown in FIG.
  • the shield effect of the first floating conductor 13 can be enhanced more than in the case where the first substrate 11 is held in a state of not being in contact with the floating conductor 13.
  • the second holding member 24 holds the second substrate 21 in a state where the second holding member 24 is in contact with the second floating conductor 23 formed on the entire surface of the fourth flat surface 21b.
  • the shield effect of the second floating conductor 23 can be enhanced more than in the case where the second substrate 21 is held in a state of not being in contact with the floating conductor 23.
  • the first conductor 16 is grounded, but the grounding method of the first conductor 16 is not specified.
  • the conductor 61 whose one end is connected to the first holding member 14 is connected to the first plane 11a of the first substrate 11 as shown in FIG.
  • the plurality of first conductors 16 may be connected to the conductor 61.
  • one ends of the first one-turn coils 12 a, 12 b, 12 c, 12 d are also connected to the conductor 61.
  • FIG. 12 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1.
  • FIG. 13 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector as seen from the x 2 direction in FIG. 1.
  • the outer ring 10 shown in FIG. 2 has a structure in which a part of the first holding member 14 is visible when the outer ring 10 is viewed from the x 1 direction in FIG.
  • the inner ring 20 shown in FIG. 4 has a structure in which a part of the second holding member 24 is visible when the inner ring 20 is viewed from the x 2 direction in FIG.
  • FIGS. 14 and 15 when the outer ring 10 is viewed from the x 1 direction in FIG. 1, the first holding member 14 is not visible. It may be a structure.
  • FIG. 14 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1.
  • FIG. 14 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1.
  • FIG. 14 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultras
  • FIG. 15 is a sectional view showing a CC ′ section of the outer ring 10 shown in FIG.
  • the inner ring 20 may have a structure in which the second holding member 24 is not visible when the inner ring 20 is viewed from the x 2 direction in FIG. 1.
  • FIG. 16 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector as seen from the x 2 direction in FIG. 1.
  • FIG. 17 is a sectional view showing a DD ′ section of the inner ring 20 shown in FIG.
  • each of the other ends of the first one-turn coils 12a, 12b, 12c, 12d is connected to the ground. Further, each of the other ends of the second one-turn coils 22a, 22b, 22c, 22d is connected to the ground.
  • the present invention is not limited to this, and the other ends of the first 1-turn coils 12a, 12b, 12c, 12d are opened, and the other ends of the second 1-turn coils 22a, 22b, 22c, 22d are opened. It may be open.
  • each of the transmitters 41a, 41b, 41c, 41d transmits an electric signal to the stationary side signal lines 43a, 43b, 43c, 43d, the first one-turn coil 12a, A voltage is applied to 12b, 12c and 12d.
  • a voltage is applied to the first 1-turn coils 12a, 12b, 12c, 12d
  • a voltage is applied to the second 1-turn coils 22a, 22b, 22c, 22d by capacitive coupling, and the rotation-side signal line 33a
  • Electrical signals are transmitted to the ultrasonic probes 32a, 32b, 32c, 32d via 33b, 33c, 33d.
  • the second 1-turn coils 22a, 22b, 22c, 22d output the signals. Is applied with a voltage.
  • the voltage is applied to the second one-turn coils 22a, 22b, 22c, 22d
  • the voltage is applied to the first one-turn coils 12a, 12b, 12c, 12d by capacitive coupling, and the stationary side signal line 43a
  • An electric signal is transmitted to the receiving units 42a, 42b, 42c, 42d via 43b, 43c, 43d.
  • Embodiment 2 In the ultrasonic flaw detector shown in FIG. 1, the rotary transformer 1 includes one outer ring 10 and one inner ring 20. In the second embodiment, an ultrasonic flaw detector will be described in which the rotary transformer 1 includes a plurality of outer rings and a plurality of inner rings.
  • the ultrasonic flaw detector may be equipped with a large number of ultrasonic probes 32a and the like in order to enable flaw detection at many points on the material 7 to be inspected at the same time.
  • the ultrasonic flaw detector mounts more ultrasonic probes 32a than the number of second one-turn coils 22a, 22b, 22c, 22d formed on one inner ring 20, the rotary transformer 1
  • FIG. 18 is an explanatory diagram showing the rotary transformer 1 including four outer rings and four inner rings.
  • FIG. 18 illustrates an example in which the rotary transformer 1 includes four outer rings and four inner rings. However, this is only an example, and the rotary transformer 1 may be provided with two or three outer rings and two or three inner rings. Further, the rotary transformer 1 may include five or more outer rings and five or more inner rings.
  • the outer frame 2, the inner wall 3, the rotation mechanism 4, the ultrasonic probe holder 31, the ultrasonic probes 32a, 32b, 32c, 32d and the rotation side signal lines 33a, 33b. , 33c, 33d, etc. are omitted. 18, the same reference numerals as those in FIG. 3 and FIG.
  • the outer ring 10 is an outer ring having the same configuration as the outer ring 10 shown in FIG.
  • the outer ring 10 a includes two outer rings corresponding to the outer ring 10.
  • the first holding member 14a holds the two first substrates 11 so that the respective second planes 11b of the two first substrates 11 face each other.
  • the inner ring 20a includes two inner rings corresponding to the inner ring 20.
  • the second holding member 24a holds the two second substrates 21 so that the respective fourth planes 21b of the two second substrates 21 face each other.
  • each outer ring is thinned and each inner ring is thin similarly to the rotary transformer 1 of the first embodiment. Can be realized.
  • the present invention is suitable for a rotary transformer for an ultrasonic flaw detector that includes a fixed body and a rotating body. Further, the present invention is suitable for an ultrasonic flaw detector equipped with a rotary transformer.

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Abstract

A rotary transformer (1) is configured to include: a fixed body (5) having a first substrate (11) in which first one-turn coils (12a) to (12d) are formed concentrically on a first plane (11a), and a first floating conductor (13) is formed on a second plane (11b), and a first holding member (14) holding the first substrate (11) so as to surround the first floating conductor (13); and a rotating body (6) that has a second substrate (21) in which second one-turn coils (22a) to (22d) are formed concentrically on a third plane (21a) so as to face the first one-turn coils (12a) to (12d), respectively, and a second floating conductor (23) is formed on a fourth plane (21b), a second holding member (24) that holds the second substrate (21) so as to surround the second floating conductor (23), and ultrasonic probes (32a) to (32d) connected to the second one-turn coils (22a) to (22d), respectively, and the second substrate (21), the second holding member (24), and the ultrasonic probes (32a) to (32d) rotate around a material to be inspected (7).

Description

超音波探傷装置用の回転トランス及び超音波探傷装置Rotary transformer and ultrasonic flaw detector for ultrasonic flaw detector
　この発明は、固定体及び回転体を備える超音波探傷装置用の回転トランスに関するものである。
　また、この発明は、回転トランスを備える超音波探傷装置に関するものである。 The present invention relates to a rotary transformer for an ultrasonic flaw detector, which includes a fixed body and a rotating body.
The present invention also relates to an ultrasonic flaw detector equipped with a rotary transformer.
　以下の特許文献１には、固定体及び回転体を備える超音波探傷装置用の回転トランスが開示されている。
　固定体は、複数の１ターンコイル（以下、「第１の１ターンコイル」と称する）が同心円状に形成された基板（以下、「第１の基板」と称する）と、第１の基板を保持している保持部材（以下、「第１の保持部材」と称する）とを備えている。
　回転体は、固定体に形成された第１の１ターンコイルと同数の１ターンコイル（以下、「第２の１ターンコイル」と称する）が同心円状に形成された基板（以下、「第２の基板」と称する）と、第２の基板を保持している保持部材（以下、「第２の保持部材」と称する）とを備えている。
　固定体が備える第１の基板と第１の保持部材との間には、空気が介在している。
　また、回転体が備える第２の基板と第２の保持部材との間には、空気が介在している。 The following Patent Document 1 discloses a rotary transformer for an ultrasonic flaw detector, which includes a fixed body and a rotating body.
The fixed body includes a substrate on which a plurality of one-turn coils (hereinafter, referred to as “first one-turn coil”) are concentrically formed (hereinafter, referred to as “first substrate”) and a first substrate. A holding member (hereinafter, referred to as “first holding member”) that holds the holding member.
The rotating body is a substrate (hereinafter, referred to as “second unit”) in which the same number of one-turn coils (hereinafter, referred to as “second one-turn coil”) formed in the fixed unit are concentrically formed. And a holding member that holds the second substrate (hereinafter, referred to as “second holding member”).
Air is present between the first substrate and the first holding member included in the fixed body.
Further, air is present between the second substrate and the second holding member included in the rotating body.
国際公開第２０１２／１４１２７９号International Publication No. 2012/141279
　特許文献１に開示されている回転トランスは、第１及び第２の保持部材が導電体によって形成されている。したがって、第１及び第２の１ターンコイルに電気信号が流れると、電磁誘導現象によって、渦電流損又はヒステリシス損などが第１及び第２の保持部材に生じることがある。渦電流損又はヒステリシス損などが第１及び第２の保持部材に生じることで、電気信号の伝送特性が劣化するため、被検査材の探傷精度が劣化する。
　第１及び第２の基板と、第１及び第２の保持部材との間の空気は、電磁誘導現象の影響を軽減するように作用する。特許文献１に開示されている回転トランスでは、電磁誘導現象の影響を解消するため、第１及び第２の基板と、第１及び第２の保持部材との間の距離として、第１の１ターンコイルと第２の１ターンコイルとの間のギャップの５～１０倍を確保している。
　したがって、第１及び第２の基板と、第１及び第２の保持部材との間の距離が長くなるため、固定体及び回転体のそれぞれの厚さが厚くなり、回転トランスが大型化してしまうという課題があった。 In the rotary transformer disclosed in Patent Document 1, the first and second holding members are formed of a conductor. Therefore, when an electric signal flows through the first and second one-turn coils, an electromagnetic induction phenomenon may cause eddy current loss or hysteresis loss in the first and second holding members. Since the eddy current loss, the hysteresis loss, and the like are generated in the first and second holding members, the transmission characteristics of the electric signal are deteriorated, and thus the flaw detection accuracy of the inspected material is deteriorated.
The air between the first and second substrates and the first and second holding members acts to reduce the influence of the electromagnetic induction phenomenon. In the rotary transformer disclosed in Patent Document 1, in order to eliminate the influence of the electromagnetic induction phenomenon, the distance between the first and second substrates and the first and second holding members is set to the first 5 to 10 times the gap between the turn coil and the second one turn coil is secured.
Therefore, since the distance between the first and second substrates and the first and second holding members becomes long, the thickness of each of the fixed body and the rotating body becomes large, and the rotary transformer becomes large. There was a problem.
　この発明は上記のような課題を解決するためになされたもので、電磁誘導現象の影響を解消するために、第１及び第２の基板と、第１及び第２の保持部材との間の距離を長くすることなく、電磁誘導現象の影響を解消することができる超音波探傷装置用の回転トランス及び超音波探傷装置を得ることを目的とする。 The present invention has been made to solve the above-described problems, and in order to eliminate the influence of the electromagnetic induction phenomenon, the first and second substrates and the first and second holding members are provided between the first and second substrates. An object of the present invention is to obtain a rotary transformer for an ultrasonic flaw detector and an ultrasonic flaw detector that can eliminate the influence of an electromagnetic induction phenomenon without increasing the distance.
　この発明に係る超音波探傷装置用の回転トランスは、複数の第１の１ターンコイルが第１の平面に同心円状に形成され、第１の浮遊導体が第２の平面に形成されている第１の基板と、第１の浮遊導体を取り囲むように第１の基板を保持している第１の保持部材とを有する固定体と、複数の第１の１ターンコイルのそれぞれと対向するように、複数の第２の１ターンコイルが第３の平面に同心円状に形成され、第２の浮遊導体が第４の平面に形成されている第２の基板と、第２の浮遊導体を取り囲むように第２の基板を保持している第２の保持部材と、複数の第２の１ターンコイルのそれぞれと接続されている複数の超音波探触子とを有し、第２の基板と第２の保持部材と複数の超音波探触子とが被検査材の周りを回転する回転体とを備えるようにしたものである。 In a rotary transformer for an ultrasonic flaw detector according to the present invention, a plurality of first one-turn coils are concentrically formed on a first plane, and a first floating conductor is formed on a second plane. A fixed body having a first substrate and a first holding member that holds the first substrate so as to surround the first floating conductor, and to face each of the plurality of first one-turn coils. , A second substrate on which a plurality of second one-turn coils are concentrically formed on a third plane, and a second floating conductor is formed on a fourth plane, and to surround the second floating conductor. A second holding member holding the second substrate, and a plurality of ultrasonic probes connected to the plurality of second one-turn coils, respectively. The second holding member and the plurality of ultrasonic probes include a rotating body that rotates around the material to be inspected. Those were Unishi.
　この発明によれば、固定体が、第１の浮遊導体を取り囲むように第１の基板を保持している第１の保持部材を有し、回転体が、第２の浮遊導体を取り囲むように第２の基板を保持している第２の保持部材を有している。したがって、この発明に係る超音波探傷装置用の回転トランスは、電磁誘導現象の影響を解消するために、第１及び第２の基板と、第１及び第２の保持部材との間の距離を長くすることなく、電磁誘導現象の影響を解消することができる。 According to this invention, the fixed body has the first holding member that holds the first substrate so as to surround the first floating conductor, and the rotating body surrounds the second floating conductor. It has the 2nd holding member holding the 2nd substrate. Therefore, in the rotary transformer for the ultrasonic flaw detector according to the present invention, in order to eliminate the influence of the electromagnetic induction phenomenon, the distance between the first and second substrates and the first and second holding members is reduced. The effect of the electromagnetic induction phenomenon can be eliminated without increasing the length.
実施の形態１に係る超音波探傷装置を示す構成図である。It is a block diagram which shows the ultrasonic flaw detector according to Embodiment 1. 超音波探傷装置用の回転トランス１におけるアウターリング１０を図１のｘ１方向から見た平面図である。The outer ring 10 of the rotary transformer 1 for ultrasonic flaw detector is a plan view from x 1 direction in FIG. 図２に示すアウターリング１０のＣ－Ｃ’断面を示す断面図である。FIG. 3 is a cross-sectional view showing a C-C ′ cross section of the outer ring 10 shown in FIG. 2. 超音波探傷装置用の回転トランス１におけるインナーリング２０を図１のｘ２方向から見た平面図である。It is a plan view of the inner ring 20 from the x 2 direction in FIG. 1 in the rotating transformer 1 for ultrasonic flaw detection apparatus. 図４に示すインナーリング２０のＤ－Ｄ’断面を示す断面図である。FIG. 5 is a cross-sectional view showing a D-D ′ cross section of the inner ring 20 shown in FIG. 4. 第１の平面１１ａに形成されている一部の第１の導体１６と柱状導体１７とを示す説明図である。It is explanatory drawing which shows a part of 1st conductor 16 and the columnar conductor 17 currently formed in the 1st plane 11a. 第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄと、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄとの間の非接触伝送を示す説明図である。It is explanatory drawing which shows the non-contact transmission between the 1st 1 turn coil 12a, 12b, 12c, 12d and the 2nd 1 turn coil 22a, 22b, 22c, 22d. クロストークの発生を示す説明図である。It is explanatory drawing which shows generation | occurrence | production of crosstalk. クロストークの抑圧を示す説明図である。It is explanatory drawing which shows the suppression of crosstalk. 図２に示すアウターリング１０のＣ－Ｃ’断面を示す断面図である。FIG. 3 is a cross-sectional view showing a C-C ′ cross section of the outer ring 10 shown in FIG. 2. 図４に示すインナーリング２０のＤ－Ｄ’断面を示す断面図である。FIG. 5 is a cross-sectional view showing a D-D ′ cross section of the inner ring 20 shown in FIG. 4. 超音波探傷装置用の回転トランス１におけるアウターリング１０の他の例を図１のｘ１方向から見た平面図である。FIG. 6 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1. 超音波探傷装置用の回転トランス１におけるインナーリング２０の他の例を図１のｘ２方向から見た平面図である。FIG. 7 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector, viewed from the x 2 direction in FIG. 1. 超音波探傷装置用の回転トランス１におけるアウターリング１０の他の例を図１のｘ１方向から見た平面図である。FIG. 6 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1. 図１４に示すアウターリング１０のＣ－Ｃ’断面を示す断面図である。FIG. 15 is a cross-sectional view showing a C-C ′ cross section of the outer ring 10 shown in FIG. 14. 超音波探傷装置用の回転トランス１におけるインナーリング２０の他の例を図１のｘ２方向から見た平面図である。FIG. 7 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector, viewed from the x 2 direction in FIG. 1. 図１６に示すインナーリング２０のＤ－Ｄ’断面を示す断面図である。FIG. 17 is a cross-sectional view showing a D-D ′ cross section of the inner ring 20 shown in FIG. 16. ４つのアウターリング及び４つのインナーリングを備える回転トランス１を示す説明図である。It is explanatory drawing which shows the rotary transformer 1 provided with four outer rings and four inner rings.
　以下、この発明をより詳細に説明するために、この発明を実施するための形態について、添付の図面に従って説明する。 Hereinafter, in order to explain the present invention in more detail, modes for carrying out the present invention will be described with reference to the accompanying drawings.
実施の形態１．
　図１は、実施の形態１に係る超音波探傷装置を示す構成図である。
　図２は、超音波探傷装置用の回転トランス１におけるアウターリング１０を図１のｘ１方向から見た平面図である。図３は、図２に示すアウターリング１０のＣ－Ｃ’断面を示す断面図である。
　図４は、超音波探傷装置用の回転トランス１におけるインナーリング２０を図１のｘ２方向から見た平面図である。図５は、図４に示すインナーリング２０のＤ－Ｄ’断面を示す断面図である。 Embodiment 1.
FIG. 1 is a configuration diagram showing an ultrasonic flaw detector according to the first embodiment.
FIG. 2 is a plan view of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as viewed from the x 1 direction in FIG. FIG. 3 is a cross-sectional view showing a CC ′ cross section of the outer ring 10 shown in FIG.
FIG. 4 is a plan view of the inner ring 20 in the rotary transformer 1 for an ultrasonic flaw detector as viewed from the x 2 direction in FIG. 1. FIG. 5 is a sectional view showing a DD ′ section of the inner ring 20 shown in FIG.
　図１から図５において、回転トランス１は、固定体５及び回転体６を備えている。
　外枠２は、回転トランス１の筐体であり、固定体５を保持している。
　内壁３は、回転機構４を介して、外枠２と接している。内壁３は、インナーリング２０がアウターリング１０と対向するように、インナーリング２０を保持している。
　回転機構４は、外枠２に対して、内壁３を相対的に回転させる機構である。
　内壁３が回転することで、インナーリング２０及び超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄが、被検査材７の周りを回転する。被検査材７は、超音波探傷装置の検査対象である。 1 to 5, the rotary transformer 1 includes a fixed body 5 and a rotary body 6.
The outer frame 2 is a housing of the rotary transformer 1 and holds the fixed body 5.
The inner wall 3 is in contact with the outer frame 2 via the rotation mechanism 4. The inner wall 3 holds the inner ring 20 so that the inner ring 20 faces the outer ring 10.
The rotation mechanism 4 is a mechanism that relatively rotates the inner wall 3 with respect to the outer frame 2.
As the inner wall 3 rotates, the inner ring 20 and the ultrasonic probes 32a, 32b, 32c, 32d rotate around the inspected material 7. The inspected material 7 is an inspection target of the ultrasonic flaw detector.
　固定体５は、アウターリング１０を備えている。
　アウターリング１０は、外枠２に取り付けられており、第１の基板１１及び第１の保持部材１４などを有している。
　第１の基板１１の第１の平面１１ａには、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄが同心円状に形成されている。
　第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄのそれぞれは、一端が静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄにおけるそれぞれの一端と接続されており、他端がグランドと接続されている。
　第１の基板１１の第２の平面１１ｂには、第１の浮遊導体１３が形成されている。
　第１の浮遊導体１３は、銅などの非磁性金属である。 The fixed body 5 includes an outer ring 10.
The outer ring 10 is attached to the outer frame 2 and has a first substrate 11 and a first holding member 14.
First 1- turn coils 12a, 12b, 12c, 12d are concentrically formed on the first plane 11a of the first substrate 11.
One end of each of the first one- turn coils 12a, 12b, 12c, 12d is connected to one end of each of the stationary signal lines 43a, 43b, 43c, 43d, and the other end is connected to the ground.
The first floating conductor 13 is formed on the second plane 11 b of the first substrate 11.
The first floating conductor 13 is a non-magnetic metal such as copper.
　第１の保持部材１４は、第１の浮遊導体１３を取り囲むように、第１の浮遊導体１３と非接触の状態で、第１の基板１１を保持している。
　第１の保持部材１４は、鉄又はアルミニウムのような金属であり、接地されている。
　なお、第１の保持部材１４は、非金属であってもよいが、第１の保持部材１４が非金属である場合、第１の浮遊導体１３が接地されている必要がある。図３に示すアウターリング１０では、第１の導体１６と第１の浮遊導体１３とが電気的に接続され、第１の導体１６が接地されている。
　第１の保持部材１４の内部は、空気１５である。第１の保持部材１４の内部は、空気１５ではなく、比透磁率がほぼ１に等しい絶縁体であってもよい。 The first holding member 14 holds the first substrate 11 in a non-contact state with the first floating conductor 13 so as to surround the first floating conductor 13.
The first holding member 14 is a metal such as iron or aluminum and is grounded.
The first holding member 14 may be non-metallic, but when the first holding member 14 is non-metallic, the first floating conductor 13 needs to be grounded. In the outer ring 10 shown in FIG. 3, the first conductor 16 and the first floating conductor 13 are electrically connected, and the first conductor 16 is grounded.
The inside of the first holding member 14 is air 15. The inside of the first holding member 14 may be an insulator having a relative magnetic permeability substantially equal to 1 instead of the air 15.
　第１の導体１６は、第１の平面１１ａにおいて、第１の１ターンコイル１２ａと第１の１ターンコイル１２ｂとの間、第１の１ターンコイル１２ｂと第１の１ターンコイル１２ｃとの間及び第１の１ターンコイル１２ｃと第１の１ターンコイル１２ｄとの間のそれぞれに形成されている。第１の導体１６は、接地されている。
　柱状導体１７は、例えば、ビアであり、柱状導体１７は、第１の導体１６と第１の浮遊導体１３とを電気的に接続している。
　図６は、第１の平面１１ａに形成されている一部の第１の導体１６と柱状導体１７とを示す説明図である。
　図６の例では、２つの柱状導体１７によって、第１の導体１６が第１の浮遊導体１３と電気的に接続されている。
　貫通穴１８は、検査対象の被検査材７が挿入される穴である。 The first conductor 16 is provided between the first 1-turn coil 12a and the first 1-turn coil 12b and between the first 1-turn coil 12b and the first 1-turn coil 12c on the first plane 11a. And the first 1-turn coil 12c and the first 1-turn coil 12d, respectively. The first conductor 16 is grounded.
The columnar conductor 17 is, for example, a via, and the columnar conductor 17 electrically connects the first conductor 16 and the first floating conductor 13.
FIG. 6 is an explanatory diagram showing a part of the first conductors 16 and the columnar conductors 17 formed on the first plane 11a.
In the example of FIG. 6, the first conductor 16 is electrically connected to the first floating conductor 13 by the two columnar conductors 17.
The through hole 18 is a hole into which the inspection target material 7 to be inspected is inserted.
　回転体６は、インナーリング２０及び超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄなどを備えている。インナーリング２０及び超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄなどは、回転機構４によって被検査材７の周りを回転される。
　インナーリング２０は、内壁３に取り付けられており、第２の基板２１及び第２の保持部材２４などを有している。
　第２の基板２１の第３の平面２１ａには、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄが同心円状に形成されている。
　第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄのそれぞれは、一端が回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄにおけるそれぞれの一端と接続されており、他端がグランドと接続されている。
　第２の基板２１の第４の平面２１ｂには、第２の浮遊導体２３が形成されている。
　第２の浮遊導体２３は、銅などの非磁性金属である。 The rotating body 6 includes an inner ring 20 and ultrasonic probes 32a, 32b, 32c, 32d and the like. The inner ring 20, the ultrasonic probes 32a, 32b, 32c, 32d, etc. are rotated around the inspection target material 7 by the rotating mechanism 4.
The inner ring 20 is attached to the inner wall 3, and includes a second substrate 21 and a second holding member 24.
Second one- turn coils 22a, 22b, 22c, 22d are concentrically formed on the third plane 21a of the second substrate 21.
One end of each of the second one- turn coils 22a, 22b, 22c, 22d is connected to one end of each of the rotation- side signal lines 33a, 33b, 33c, 33d, and the other end is connected to the ground.
The second floating conductor 23 is formed on the fourth plane 21 b of the second substrate 21.
The second floating conductor 23 is a non-magnetic metal such as copper.
　第２の保持部材２４は、第２の浮遊導体２３を取り囲むように、第２の浮遊導体２３と非接触の状態で、第２の基板２１を保持している。
　第２の保持部材２４は、鉄又はアルミニウムのような金属であり、接地されている。
　なお、第２の保持部材２４は、非金属であってもよいが、第２の保持部材２４が非金属である場合、第２の浮遊導体２３が接地されている必要がある。図５に示すインナーリング２０では、第２の導体２６と第２の浮遊導体２３とが電気的に接続され、第２の導体２６が接地されている。
　第２の保持部材２４の内部は、空気２５である。第２の保持部材２４の内部は、空気２５ではなく、比透磁率がほぼ１に等しい絶縁体であってもよい。 The second holding member 24 holds the second substrate 21 in a non-contact state with the second floating conductor 23 so as to surround the second floating conductor 23.
The second holding member 24 is a metal such as iron or aluminum and is grounded.
The second holding member 24 may be non-metallic, but when the second holding member 24 is non-metallic, the second floating conductor 23 needs to be grounded. In the inner ring 20 shown in FIG. 5, the second conductor 26 and the second floating conductor 23 are electrically connected, and the second conductor 26 is grounded.
The inside of the second holding member 24 is air 25. The inside of the second holding member 24 may be an insulator having a relative magnetic permeability substantially equal to 1 instead of the air 25.
　第２の導体２６は、第３の平面２１ａにおいて、第２の１ターンコイル２２ａと第２の１ターンコイル２２ｂとの間、第２の１ターンコイル２２ｂと第２の１ターンコイル２２ｃとの間及び第２の１ターンコイル２２ｃと第２の１ターンコイル２２ｄとの間のそれぞれに形成されている。第２の導体２６は、接地されている。
　柱状導体２７は、例えば、柱状導体１７と同様のビアである。
　柱状導体２７は、第２の導体２６と第２の浮遊導体２３とを電気的に接続している。
　貫通穴２８は、検査対象の被検査材７が挿入される穴である。 The second conductor 26 is provided between the second 1-turn coil 22a and the second 1-turn coil 22b and between the second 1-turn coil 22b and the second 1-turn coil 22c on the third plane 21a. And the second 1-turn coil 22c and the second 1-turn coil 22d, respectively. The second conductor 26 is grounded.
The columnar conductor 27 is, for example, a via similar to the columnar conductor 17.
The columnar conductor 27 electrically connects the second conductor 26 and the second floating conductor 23.
The through hole 28 is a hole into which the inspection target material 7 to be inspected is inserted.
　超音波探触子ホルダ３１は、超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄを保持しており、内壁３と一緒に回転される。
　超音波探触子３２ａは、回転側信号ライン３３ａを介して、第２の１ターンコイル２２ａと接続されている。
　超音波探触子３２ｂは、回転側信号ライン３３ｂを介して、第２の１ターンコイル２２ｂと接続されている。
　超音波探触子３２ｃは、回転側信号ライン３３ｃを介して、第２の１ターンコイル２２ｃと接続されている。
　超音波探触子３２ｄは、回転側信号ライン３３ｄを介して、第２の１ターンコイル２２ｄと接続されている。
　回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄは、電気信号を伝送する信号線である。
　回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄのそれぞれの一端は、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄにおけるそれぞれの一端と接続されている。回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄのそれぞれの他端は、超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれと接続されている。 The ultrasonic probe holder 31 holds the ultrasonic probes 32a, 32b, 32c, 32d, and is rotated together with the inner wall 3.
The ultrasonic probe 32a is connected to the second one-turn coil 22a via the rotation-side signal line 33a.
The ultrasonic probe 32b is connected to the second one-turn coil 22b via the rotation-side signal line 33b.
The ultrasonic probe 32c is connected to the second one-turn coil 22c via the rotation-side signal line 33c.
The ultrasonic probe 32d is connected to the second one-turn coil 22d via the rotation-side signal line 33d.
The rotation- side signal lines 33a, 33b, 33c, 33d are signal lines for transmitting electric signals.
One end of each of the rotation- side signal lines 33a, 33b, 33c, 33d is connected to one end of each of the second one- turn coils 22a, 22b, 22c, 22d. The other end of each of the rotation side signal lines 33a, 33b, 33c, 33d is connected to each of the ultrasonic probes 32a, 32b, 32c, 32d.
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれは、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄのそれぞれから回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄを介して電気信号を受けると、電気信号に対応する超音波を被検査材７に放射する。
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれは、被検査材７に反射された超音波を受けると、回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄを介して、受けた超音波に対応する電気信号を第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄに出力する。 Each of the ultrasonic probes 32a, 32b, 32c, 32d receives an electric signal from each of the second one- turn coils 22a, 22b, 22c, 22d via the rotation side signal lines 33a, 33b, 33c, 33d. Then, the ultrasonic wave corresponding to the electric signal is emitted to the inspection object 7.
When each of the ultrasonic probes 32a, 32b, 32c, 32d receives the ultrasonic wave reflected by the material 7 to be inspected, it receives the ultrasonic wave through the rotation side signal lines 33a, 33b, 33c, 33d. The corresponding electric signal is output to the second one- turn coils 22a, 22b, 22c, 22d.
　信号入出力部４０は、送信部４１ａ，４１ｂ，４１ｃ，４１ｄ及び受信部４２ａ，４２ｂ，４２ｃ，４２ｄを備えており、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに対して電気信号を入出力する。
　送信部４１ａ及び受信部４２ａのそれぞれは、静止側信号ライン４３ａを介して、第１の１ターンコイル１２ａと接続されている。
　送信部４１ｂ及び受信部４２ｂのそれぞれは、静止側信号ライン４３ｂを介して、第１の１ターンコイル１２ｂと接続されている。
　送信部４１ｃ及び受信部４２ｃのそれぞれは、静止側信号ライン４３ｃを介して、第１の１ターンコイル１２ｃと接続されている。
　送信部４１ｄ及び受信部４２ｄのそれぞれは、静止側信号ライン４３ｄを介して、第１の１ターンコイル１２ｄと接続されている。
　静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄは、電気信号を伝送する信号線である。
　静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄのそれぞれの一端は、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄにおけるそれぞれの一端と接続されている。静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄのそれぞれの他端は、送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれと接続され、かつ、受信部４２ａ，４２ｂ，４２ｃ，４２ｄのそれぞれと接続されている。 The signal input / output unit 40 includes transmitting units 41a, 41b, 41c, 41d and receiving units 42a, 42b, 42c, 42d, and outputs an electric signal to the first 1- turn coils 12a, 12b, 12c, 12d. Input and output.
Each of the transmitter 41a and the receiver 42a is connected to the first one-turn coil 12a via the stationary signal line 43a.
Each of the transmitter 41b and the receiver 42b is connected to the first one-turn coil 12b via the stationary signal line 43b.
Each of the transmitter 41c and the receiver 42c is connected to the first one-turn coil 12c via the stationary signal line 43c.
Each of the transmitter 41d and the receiver 42d is connected to the first one-turn coil 12d via the stationary side signal line 43d.
The stationary signal lines 43a, 43b, 43c, 43d are signal lines for transmitting electric signals.
One end of each of the stationary signal lines 43a, 43b, 43c, 43d is connected to one end of each of the first one- turn coils 12a, 12b, 12c, 12d. The other end of each of the stationary- side signal lines 43a, 43b, 43c, 43d is connected to each of the transmitters 41a, 41b, 41c, 41d and each of the receivers 42a, 42b, 42c, 42d. There is.
　送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれは、探傷部４４から電気信号の送信を指示する制御信号を受けると、静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄを介して、電気信号を第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに送信する。
　また、送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれは、上記の電気信号と同じ電気信号を探傷部４４に出力する。
　受信部４２ａ，４２ｂ，４２ｃ，４２ｄのそれぞれは、静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄを介して、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄから出力された電気信号を受信し、電気信号を探傷部４４に出力する。 When each of the transmitters 41a, 41b, 41c, 41d receives the control signal for instructing the transmission of the electric signal from the flaw detector 44, the transmitter 41a, 41b, 41c, 41d transmits the electric signal to the first via the stationary side signal lines 43a, 43b, 43c, 43d. 1 turn coil 12a, 12b, 12c, 12d.
In addition, each of the transmission units 41 a, 41 b, 41 c, 41 d outputs the same electric signal as the above electric signal to the flaw detection unit 44.
Each of the receivers 42a, 42b, 42c, 42d receives the electric signal output from the first one- turn coil 12a, 12b, 12c, 12d via the stationary side signal lines 43a, 43b, 43c, 43d. , And outputs an electrical signal to the flaw detection unit 44.
　探傷部４４は、探傷回路などの専用のハードウェアによって実現される。探傷回路は、例えば、単一回路、複合回路、プログラム化したプロセッサ、並列プログラム化したプロセッサ、ＡＳＩＣ（Ａｐｐｌｉｃａｔｉｏｎ　Ｓｐｅｃｉｆｉｃ　Ｉｎｔｅｇｒａｔｅｄ　Ｃｉｒｃｕｉｔ）、ＦＰＧＡ（Ｆｉｅｌｄ－Ｐｒｏｇｒａｍｍａｂｌｅ　Ｇａｔｅ　Ａｒｒａｙ）、又は、これらを組み合わせたものが該当する。
　探傷部４４は、電気信号の送信を指示する制御信号を送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれに出力する。
　探傷部４４は、送信部４１ａ，４１ｂ，４１ｃ，４１ｄから出力された電気信号と、受信部４２ａ，４２ｂ，４２ｃ，４２ｄから出力された電気信号とに基づいて、被検査材７の傷を探知する。
　なお、探傷回路は、専用のハードウェアで実現されるものに限るものではなく、ソフトウェア、ファームウェア、又は、ソフトウェアとファームウェアとの組み合わせで実現されるものであってもよい。 The flaw detection unit 44 is realized by dedicated hardware such as a flaw detection circuit. The flaw detection circuit is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a combination thereof. To do.
The flaw detection unit 44 outputs a control signal instructing the transmission of the electric signal to each of the transmission units 41a, 41b, 41c, 41d.
The flaw detection unit 44 detects a flaw on the inspected material 7 based on the electric signals output from the transmission units 41a, 41b, 41c, 41d and the electric signals output from the reception units 42a, 42b, 42c, 42d. To do.
The flaw detection circuit is not limited to being realized by dedicated hardware, but may be realized by software, firmware, or a combination of software and firmware.
　次に、図１に示す超音波探傷装置の動作について説明する。
　まず、回転機構４は、被検査材７を探傷する際、外枠２に対して、内壁３を相対的に回転させる。
　内壁３が回転することで、インナーリング２０及び超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄが、被検査材７の周りを回転する。 Next, the operation of the ultrasonic flaw detector shown in FIG. 1 will be described.
First, the rotation mechanism 4 rotates the inner wall 3 relative to the outer frame 2 when detecting the material to be inspected 7.
As the inner wall 3 rotates, the inner ring 20 and the ultrasonic probes 32a, 32b, 32c, 32d rotate around the inspected material 7.
　探傷部４４は、電気信号の送信を指示する制御信号を送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれに出力する。
　送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれは、探傷部４４から制御信号を受けると、静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄを介して、電気信号として、例えば、パルス信号を第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに送信する。
　また、送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれは、上記の電気信号と同じ電気信号を探傷部４４に出力する。 The flaw detection unit 44 outputs a control signal instructing the transmission of the electric signal to each of the transmission units 41a, 41b, 41c, 41d.
Upon receiving the control signal from the flaw detection unit 44, each of the transmission units 41a, 41b, 41c, 41d sends a pulse signal, for example, as a first electric signal via the stationary signal lines 43a, 43b, 43c, 43d. It transmits to 1 turn coil 12a, 12b, 12c, 12d.
In addition, each of the transmission units 41 a, 41 b, 41 c, 41 d outputs the same electric signal as the above electric signal to the flaw detection unit 44.
　図７に示すように、第１の１ターンコイル１２ａは、第２の１ターンコイル２２ａと対向するように配置されており、第１の１ターンコイル１２ｂは、第２の１ターンコイル２２ｂと対向するように配置されている。
　また、第１の１ターンコイル１２ｃは、第２の１ターンコイル２２ｃと対向するように配置されており、第１の１ターンコイル１２ｄは、第２の１ターンコイル２２ｄと対向するように配置されている。
　図７は、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄと、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄとの間の非接触伝送を示す説明図である。
　したがって、第１の１ターンコイル１２ａを流れる電気信号は、第２の１ターンコイル２２ａに非接触伝送され、第１の１ターンコイル１２ｂを流れる電気信号は、第２の１ターンコイル２２ｂに非接触伝送される。
　また、第１の１ターンコイル１２ｃを流れる電気信号は、第２の１ターンコイル２２ｃに非接触伝送され、第１の１ターンコイル１２ｄを流れる電気信号は、第２の１ターンコイル２２ｄに非接触伝送される。
　なお、電気信号の非接触伝送は、例えば、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄと、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄとの間の容量結合によって伝送されるものである。 As shown in FIG. 7, the first 1-turn coil 12a is arranged so as to face the second 1-turn coil 22a, and the first 1-turn coil 12b is connected to the second 1-turn coil 22b. It is arranged to face each other.
The first 1-turn coil 12c is arranged so as to face the second 1-turn coil 22c, and the first 1-turn coil 12d is arranged so as to face the second 1-turn coil 22d. Has been done.
FIG. 7 is an explanatory diagram showing non-contact transmission between the first 1- turn coils 12a, 12b, 12c, 12d and the second 1- turn coils 22a, 22b, 22c, 22d.
Therefore, the electric signal flowing through the first 1-turn coil 12a is contactlessly transmitted to the second 1-turn coil 22a, and the electric signal flowing through the first 1-turn coil 12b is not transmitted to the second 1-turn coil 22b. Contact is transmitted.
Further, the electric signal flowing through the first 1-turn coil 12c is contactlessly transmitted to the second 1-turn coil 22c, and the electric signal flowing through the first 1-turn coil 12d is not transmitted to the second 1-turn coil 22d. Contact is transmitted.
The contactless transmission of the electric signal is transmitted, for example, by capacitive coupling between the first 1- turn coils 12a, 12b, 12c, 12d and the second 1- turn coils 22a, 22b, 22c, 22d. It is a thing.
　第２の１ターンコイル２２ａに非接触伝送された電気信号は、回転側信号ライン３３ａを介して、超音波探触子３２ａに伝送され、第２の１ターンコイル２２ｂに非接触伝送された電気信号は、回転側信号ライン３３ｂを介して、超音波探触子３２ｂに伝送される。
　第２の１ターンコイル２２ｃに非接触伝送された電気信号は、回転側信号ライン３３ｃを介して、超音波探触子３２ｃに伝送され、第２の１ターンコイル２２ｄに非接触伝送された電気信号は、回転側信号ライン３３ｄを介して、超音波探触子３２ｄに伝送される。 The electric signal transmitted to the second 1-turn coil 22a in a non-contact manner is transmitted to the ultrasonic probe 32a via the rotation-side signal line 33a and transmitted to the second 1-turn coil 22b in a non-contact manner. The signal is transmitted to the ultrasonic probe 32b via the rotation-side signal line 33b.
The electric signal non-contactly transmitted to the second one-turn coil 22c is transmitted to the ultrasonic probe 32c via the rotation side signal line 33c, and the non-contact electric signal is transmitted to the second one-turn coil 22d. The signal is transmitted to the ultrasonic probe 32d via the rotation side signal line 33d.
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれは、伝送された電気信号を超音波に変換し、超音波を被検査材７に放射する。
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれは、被検査材７の周りを回転しているので、被検査材７に対する超音波の放射位置が時間の経過に伴って変化する。
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれから放射された超音波は、被検査材７に反射される。
　超音波が放射された位置に傷がある場合と、傷がない場合とでは、被検査材７に反射された超音波のエコー高さが変化する。
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれは、被検査材７に反射された超音波を受けると、受けた超音波を電気信号に変換する。
　超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれは、回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄを介して、当該電気信号を第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄに出力する。 Each of the ultrasonic probes 32a, 32b, 32c, 32d converts the transmitted electric signal into an ultrasonic wave and radiates the ultrasonic wave to the inspection object 7.
Since each of the ultrasonic probes 32a, 32b, 32c, 32d rotates around the inspected material 7, the emission position of the ultrasonic wave with respect to the inspected material 7 changes with the passage of time.
The ultrasonic waves emitted from each of the ultrasonic probes 32a, 32b, 32c, 32d are reflected by the inspection object 7.
The echo height of the ultrasonic wave reflected by the material 7 to be inspected changes depending on whether the ultrasonic wave is radiated or not.
When each of the ultrasonic probes 32a, 32b, 32c, 32d receives the ultrasonic wave reflected by the inspected material 7, it converts the received ultrasonic wave into an electric signal.
Each of the ultrasonic probes 32a, 32b, 32c, 32d outputs the electric signal to the second one- turn coils 22a, 22b, 22c, 22d via the rotation side signal lines 33a, 33b, 33c, 33d. To do.
　図７に示すように、第２の１ターンコイル２２ａに伝送された電気信号は、第１の１ターンコイル１２ａに非接触伝送され、第２の１ターンコイル２２ｂに伝送された電気信号は、第１の１ターンコイル１２ｂに非接触伝送される。
　また、第２の１ターンコイル２２ｃに伝送された電気信号は、第１の１ターンコイル１２ｃに非接触伝送され、第２の１ターンコイル２２ｄに伝送された電気信号は、第１の１ターンコイル１２ｄに非接触伝送される。 As shown in FIG. 7, the electrical signal transmitted to the second 1-turn coil 22a is contactlessly transmitted to the first 1-turn coil 12a, and the electrical signal transmitted to the second 1-turn coil 22b is It is transmitted in a non-contact manner to the first one-turn coil 12b.
The electric signal transmitted to the second one-turn coil 22c is contactlessly transmitted to the first one-turn coil 12c, and the electric signal transmitted to the second one-turn coil 22d is the first one-turn coil. It is transmitted to the coil 12d in a non-contact manner.
　第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに非接触伝送された電気信号のそれぞれは、静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄを介して、受信部４２ａ，４２ｂ，４２ｃ，４２ｄに伝送される。
　受信部４２ａ，４２ｂ，４２ｃ，４２ｄのそれぞれは、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄから出力された電気信号を受信し、電気信号を探傷部４４に出力する。 Each of the electric signals transmitted to the first one- turn coil 12a, 12b, 12c, 12d in a non-contact manner is transmitted to the receivers 42a, 42b, 42c, 42d via the stationary signal lines 43a, 43b, 43c, 43d. Is transmitted.
Each of the receivers 42a, 42b, 42c, 42d receives the electrical signal output from the first one- turn coil 12a, 12b, 12c, 12d and outputs the electrical signal to the flaw detector 44.
　探傷部４４は、送信部４１ａ，４１ｂ，４１ｃ，４１ｄから出力された電気信号と、受信部４２ａ，４２ｂ，４２ｃ，４２ｄから出力された電気信号とに基づいて、被検査材７の傷を探知する。
　被検査材７の傷の探知方法自体は、公知の技術であるため詳細な説明を省略するが、探傷部４４は、以下に示すような探知方法を用いることができる。
［探知方法］
　送信部４１ａ，４１ｂ，４１ｃ，４１ｄから出力された電気信号に対応する超音波のエコー高さと、受信部４２ａ，４２ｂ，４２ｃ，４２ｄから出力された電気信号に対応する超音波のエコー高さとの違いから、超音波の放射位置における傷の有無等を検出する。 The flaw detection unit 44 detects a flaw on the inspected material 7 based on the electric signals output from the transmission units 41a, 41b, 41c, 41d and the electric signals output from the reception units 42a, 42b, 42c, 42d. To do.
The method of detecting a flaw in the material 7 to be inspected is a known technique, and thus detailed description thereof will be omitted. However, the flaw detection unit 44 can use the following detection method.
[Detection method]
The echo heights of ultrasonic waves corresponding to the electric signals output from the transmission units 41a, 41b, 41c, 41d and the echo heights of ultrasonic waves corresponding to the electric signals output from the reception units 42a, 42b, 42c, 42d. The presence or absence of scratches at the ultrasonic wave radiation position is detected from the difference.
　図１に示す超音波探傷装置では、回転機構４のよる内壁３の回転速度と、送信部４１ａ，４１ｂ，４１ｃ，４１ｄから送信される電気信号であるパルス信号の時間間隔とが、探傷部４４において、既知である。
　したがって、探傷部４４は、超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄから被検査材７に超音波が放射される位置は、既知である。 In the ultrasonic flaw detector shown in FIG. 1, the flaw detection unit 44 is configured such that the rotation speed of the inner wall 3 by the rotation mechanism 4 and the time interval of the pulse signal which is the electric signal transmitted from the transmission units 41a, 41b, 41c, 41d. In, it is known.
Therefore, in the flaw detection unit 44, the position where the ultrasonic waves are radiated from the ultrasonic probes 32a, 32b, 32c, 32d to the inspection object 7 is known.
　ここで、特許文献１に開示されている回転トランスは、電磁誘導現象による影響を解消するため、第１及び第２の基板と、第１及び第２の保持部材との間の距離として、第１の１ターンコイルと第２の１ターンコイルとの間のギャップの５～１０倍を確保している。
　図１に示す回転トランス１は、第１の浮遊導体１３が第１の基板１１の第２の平面１１ｂに形成され、第２の浮遊導体２３が第２の基板２１の第４の平面２１ｂに形成されている。
　第１の浮遊導体１３は、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄと、第１の保持部材１４との間の磁束をシールドするように作用する。第２の浮遊導体２３は、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄと第２の保持部材２４との間の磁束をシールドするように作用する。
　したがって、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに電気信号が流れて磁束が生じても、第１の浮遊導体１３のシールド効果によって、当該磁束が第１の保持部材１４にほとんど到達しなくなる。磁束が第１の保持部材１４にほとんど到達しなくなることで、第１の保持部材１４で生じる渦電流損又はヒステリシス損などが大幅に抑圧される。
　また、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄに電気信号が流れて磁束が生じても、第２の浮遊導体２３のシールド効果によって、当該磁束が第２の保持部材２４にほとんど到達しなくなる。磁束が第２の保持部材２４にほとんど到達しなくなることで、第２の保持部材２４で生じる渦電流損又はヒステリシス損などが大幅に抑圧される。 Here, in the rotary transformer disclosed in Patent Document 1, in order to eliminate the influence of the electromagnetic induction phenomenon, the distance between the first and second substrates and the first and second holding members is It secures 5 to 10 times the gap between one 1-turn coil and the second 1-turn coil.
In the rotary transformer 1 shown in FIG. 1, the first floating conductor 13 is formed on the second plane 11b of the first substrate 11, and the second floating conductor 23 is formed on the fourth plane 21b of the second substrate 21. Has been formed.
The first floating conductor 13 acts so as to shield the magnetic flux between the first one- turn coil 12a, 12b, 12c, 12d and the first holding member 14. The second floating conductor 23 acts so as to shield the magnetic flux between the second one- turn coils 22a, 22b, 22c, 22d and the second holding member 24.
Therefore, even if an electric signal flows through the first one- turn coils 12a, 12b, 12c, and 12d to generate magnetic flux, the magnetic flux almost reaches the first holding member 14 due to the shield effect of the first floating conductor 13. Will not do. Since the magnetic flux hardly reaches the first holding member 14, the eddy current loss, the hysteresis loss, and the like generated in the first holding member 14 are significantly suppressed.
Further, even if an electric signal flows through the second one- turn coils 22a, 22b, 22c, 22d to generate a magnetic flux, the magnetic flux almost reaches the second holding member 24 due to the shield effect of the second floating conductor 23. Will not do. Since the magnetic flux hardly reaches the second holding member 24, the eddy current loss or the hysteresis loss generated in the second holding member 24 is significantly suppressed.
　以上より、第１の基板１１の第２の平面１１ｂと第１の保持部材１４との間の距離Ｗが、第１の１ターンコイル１２ａ等と第２の１ターンコイル２２ａ等との間のギャップの５～１０倍よりも短くても、電磁誘導現象による影響を解消することができる。したがって、図１に示す回転トランス１は、特許文献１に開示されている回転トランスよりもアウターリング１０の薄型化を図ることができる。
　また、第２の基板２１の第４の平面２１ｂと第２の保持部材２４との間の距離Ｗが、第１の１ターンコイル１２ａ等と第２の１ターンコイル２２ａ等との間のギャップの５～１０倍よりも短くても、電磁誘導現象による影響を解消することができる。したがって、図１に示す回転トランス１は、特許文献１に開示されている回転トランスよりもインナーリング２０の薄型化を図ることができる。
　アウターリング１０の薄型化及びインナーリング２０の薄型化を図ることで、回転トランス１の物理的強度が高まる。 From the above, the distance W between the second flat surface 11b of the first substrate 11 and the first holding member 14 is between the first one-turn coil 12a and the second one-turn coil 22a. Even if the gap is shorter than 5 to 10 times, the influence of the electromagnetic induction phenomenon can be eliminated. Therefore, in the rotary transformer 1 shown in FIG. 1, the outer ring 10 can be made thinner than the rotary transformer disclosed in Patent Document 1.
Further, the distance W between the fourth flat surface 21b of the second substrate 21 and the second holding member 24 is the gap between the first 1-turn coil 12a and the second 1-turn coil 22a. Even if it is shorter than 5 to 10 times, it is possible to eliminate the influence of the electromagnetic induction phenomenon. Therefore, in the rotary transformer 1 shown in FIG. 1, the inner ring 20 can be made thinner than the rotary transformer disclosed in Patent Document 1.
By making the outer ring 10 thinner and the inner ring 20 thinner, the physical strength of the rotary transformer 1 is increased.
　特許文献１に開示されている回転トランスは、図１に示す回転トランス１と異なり、第１の導体１６及び第２の導体２６を備えていない。
　回転トランスが、第１の導体１６及び第２の導体２６を備えていない場合、図８に示すように、複数の１ターンコイルの間で電気的な信号干渉（以下、「クロストーク」を称する）を生じることがある。
　図８は、クロストークの発生を示す説明図である。
　図８において、５１は、第２の１ターンコイル２２ｄから出力された電気信号が、第２の１ターンコイル２２ｃに及ぼしているクロストーク、５２は、第２の１ターンコイル２２ｄから出力された電気信号が、第１の１ターンコイル１２ｃに及ぼしているクロストークである。
　図８では、第２の１ターンコイル２２ｄから出力された電気信号が、クロストークの発生源となっている。しかし、これは一例に過ぎず、第２の１ターンコイル２２ａ～２２ｃから出力された電気信号、又は、第１の１ターンコイル１２ａ～１２ｄから出力された電気信号が、クロストークの発生源となることがある。 Unlike the rotary transformer 1 shown in FIG. 1, the rotary transformer disclosed in Patent Document 1 does not include the first conductor 16 and the second conductor 26.
When the rotary transformer does not include the first conductor 16 and the second conductor 26, electrical signal interference (hereinafter referred to as “crosstalk”) between the plurality of one-turn coils, as shown in FIG. ) May occur.
FIG. 8 is an explanatory diagram showing the occurrence of crosstalk.
In FIG. 8, 51 is the crosstalk that the electric signal output from the second 1-turn coil 22d exerts on the second 1- turn coil 22c, and 52 is the output from the second 1-turn coil 22d. This is the crosstalk that the electric signal exerts on the first one-turn coil 12c.
In FIG. 8, the electric signal output from the second one-turn coil 22d serves as a crosstalk generation source. However, this is only an example, and the electric signals output from the second one-turn coils 22a to 22c or the electric signals output from the first one-turn coils 12a to 12d are considered to be sources of crosstalk. May be.
　クロストーク５１を抑圧するには、第２の１ターンコイル２２ｃと第２の１ターンコイル２２ｄとの距離を大きくする必要がある。
　クロストーク５２を抑圧するには、第１の１ターンコイル１２ｃと第１の１ターンコイル１２ｄとの距離を大きくする、あるいは、アウターリング１０とインナーリング２０との距離を大きくする必要がある。アウターリング１０とインナーリング２０との距離を大きくした場合、電気信号の伝送特性が劣化することがある。
　回転トランス１が備えている第１の導体１６及び第２の導体２６は、クロストークを電気的にシールドするように作用する。
　したがって、クロストーク５１，５２は、図９に示すように、大幅に抑圧される。
　図９は、クロストークの抑圧を示す説明図である。図９において、×は、クロストーク５１，５２が抑圧されている旨を示している。 In order to suppress the crosstalk 51, it is necessary to increase the distance between the second one-turn coil 22c and the second one-turn coil 22d.
In order to suppress the crosstalk 52, it is necessary to increase the distance between the first 1-turn coil 12c and the first 1-turn coil 12d or increase the distance between the outer ring 10 and the inner ring 20. When the distance between the outer ring 10 and the inner ring 20 is increased, the transmission characteristics of electric signals may deteriorate.
The first conductor 16 and the second conductor 26 included in the rotary transformer 1 act to electrically shield crosstalk.
Therefore, the crosstalks 51 and 52 are significantly suppressed as shown in FIG.
FIG. 9 is an explanatory diagram showing suppression of crosstalk. In FIG. 9, x indicates that the crosstalks 51 and 52 are suppressed.
　以上の実施の形態１は、固定体５が、第１の浮遊導体１３を取り囲むように第１の基板１１を保持している第１の保持部材１４を有し、回転体６が、第２の浮遊導体２３を取り囲むように第２の基板２１を保持している第２の保持部材２４を有するように、回転トランス１を構成した。したがって、回転トランス１は、電磁誘導現象の影響を解消するために、第１の基板１１と第１の保持部材１４との間の距離Ｗ及び第２の基板２１と第２の保持部材２４との間の距離Ｗのそれぞれを長くすることなく、電磁誘導現象の影響を解消することができる。
　よって、回転トランス１は、特許文献１に開示されている回転トランスと比べて、第１の基板１１と第１の保持部材１４との間の距離Ｗ、及び第２の基板２１と第２の保持部材２４との間の距離Ｗのそれぞれが短くなり、固定体５及び回転体６のそれぞれの厚さが薄くなる。 In the first embodiment described above, the fixed body 5 has the first holding member 14 that holds the first substrate 11 so as to surround the first floating conductor 13, and the rotating body 6 is the second holding member 14. The rotary transformer 1 is configured so as to have the second holding member 24 that holds the second substrate 21 so as to surround the floating conductor 23. Therefore, the rotary transformer 1 includes the distance W between the first substrate 11 and the first holding member 14 and the second substrate 21 and the second holding member 24 in order to eliminate the influence of the electromagnetic induction phenomenon. It is possible to eliminate the influence of the electromagnetic induction phenomenon without increasing each of the distances W between them.
Therefore, in comparison with the rotary transformer disclosed in Patent Document 1, the rotary transformer 1 has a distance W between the first substrate 11 and the first holding member 14, and the second substrate 21 and the second holding member 14. Each of the distances W with the holding member 24 becomes shorter, and the thickness of each of the fixed body 5 and the rotating body 6 becomes thinner.
　以上の実施の形態１は、第１の導体１６と第１の浮遊導体１３とが電気的に接続され、第２の導体２６と第２の浮遊導体２３とが電気的に接続されており、第１の導体１６及び第２の導体２６のそれぞれが接地されているように、回転トランス１を構成した。したがって、第１の浮遊導体１３及び第２の浮遊導体２３のそれぞれを単体で電気的に接地することなく、第１の浮遊導体１３及び第２の浮遊導体２３のそれぞれが、電気的に接地された状態になる。 In the first embodiment described above, the first conductor 16 and the first floating conductor 13 are electrically connected, and the second conductor 26 and the second floating conductor 23 are electrically connected, The rotary transformer 1 is configured such that the first conductor 16 and the second conductor 26 are grounded. Therefore, each of the first floating conductor 13 and the second floating conductor 23 is electrically grounded without individually electrically grounding each of the first floating conductor 13 and the second floating conductor 23. It will be in a state of being.
　図３に示すアウターリング１０では、第１の保持部材１４が、第１の浮遊導体１３を取り囲むように、第１の浮遊導体１３と非接触の状態で、第１の基板１１を保持している。
　また、図５に示すインナーリング２０では、第２の保持部材２４が、第２の浮遊導体２３を取り囲むように、第２の浮遊導体２３と非接触の状態で、第２の基板２１を保持している。
　しかし、これは一例に過ぎず、アウターリング１０では、図１０に示すように、第１の浮遊導体１３が第２の平面１１ｂの全面に形成されており、第１の保持部材１４が、第１の浮遊導体１３と接触している状態で、第１の基板１１を保持するようにしてもよい。図１０は、図２に示すアウターリング１０のＣ－Ｃ’断面を示す断面図である。
　また、インナーリング２０では、図１１に示すように、第２の浮遊導体２３が第４の平面２１ｂの全面に形成されており、第２の保持部材２４が、第２の浮遊導体２３と接触している状態で、第２の基板２１を保持するようにしてもよい。図１１は、図４に示すインナーリング２０のＤ－Ｄ’断面を示す断面図である。 In the outer ring 10 shown in FIG. 3, the first holding member 14 holds the first substrate 11 in a state of not contacting the first floating conductor 13 so as to surround the first floating conductor 13. There is.
Further, in the inner ring 20 shown in FIG. 5, the second holding member 24 holds the second substrate 21 in a state of not contacting the second floating conductor 23 so as to surround the second floating conductor 23. are doing.
However, this is merely an example, and in the outer ring 10, as shown in FIG. 10, the first floating conductor 13 is formed on the entire surface of the second flat surface 11b, and the first holding member 14 is The first substrate 11 may be held while being in contact with the first floating conductor 13. FIG. 10 is a cross-sectional view showing a CC ′ cross section of the outer ring 10 shown in FIG.
Further, in the inner ring 20, as shown in FIG. 11, the second floating conductor 23 is formed on the entire surface of the fourth plane 21b, and the second holding member 24 contacts the second floating conductor 23. You may make it hold | maintain the 2nd board | substrate 21 in the state currently operating. FIG. 11 is a sectional view showing a DD ′ section of the inner ring 20 shown in FIG.
　第１の保持部材１４が、第２の平面１１ｂの全面に形成されている第１の浮遊導体１３と接触している状態で、第１の基板１１を保持していることで、第１の浮遊導体１３と非接触の状態で、第１の基板１１を保持している場合よりも、第１の浮遊導体１３のシールド効果を高めることができる。
　第２の保持部材２４が、第４の平面２１ｂの全面に形成されている第２の浮遊導体２３と接触している状態で、第２の基板２１を保持していることで、第２の浮遊導体２３と非接触の状態で、第２の基板２１を保持している場合よりも、第２の浮遊導体２３のシールド効果を高めることができる。 By holding the first substrate 11 while the first holding member 14 is in contact with the first floating conductor 13 formed on the entire surface of the second flat surface 11b, The shield effect of the first floating conductor 13 can be enhanced more than in the case where the first substrate 11 is held in a state of not being in contact with the floating conductor 13.
The second holding member 24 holds the second substrate 21 in a state where the second holding member 24 is in contact with the second floating conductor 23 formed on the entire surface of the fourth flat surface 21b. The shield effect of the second floating conductor 23 can be enhanced more than in the case where the second substrate 21 is held in a state of not being in contact with the floating conductor 23.
　図２に示すアウターリング１０では、第１の導体１６が接地されているが、第１の導体１６の接地方法を明示していない。
　例えば、金属の第１の保持部材１４を接地した上で、図１２に示すように、一端が第１の保持部材１４と接続されている導体６１を第１の基板１１の第１の平面１１ａに形成し、複数の第１の導体１６を導体６１と接続するようにしてもよい。
　図１２では、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄの一端も、導体６１と接続している。
　図１２は、超音波探傷装置用の回転トランス１におけるアウターリング１０の他の例を図１のｘ１方向から見た平面図である。 In the outer ring 10 shown in FIG. 2, the first conductor 16 is grounded, but the grounding method of the first conductor 16 is not specified.
For example, after the metal first holding member 14 is grounded, the conductor 61 whose one end is connected to the first holding member 14 is connected to the first plane 11a of the first substrate 11 as shown in FIG. Alternatively, the plurality of first conductors 16 may be connected to the conductor 61.
In FIG. 12, one ends of the first one-turn coils 12 a, 12 b, 12 c, 12 d are also connected to the conductor 61.
FIG. 12 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1.
　図４に示すインナーリング２０では、第２の導体２６が接地されているが、第２の導体２６の接地方法を明示していない。
　例えば、金属の第２の保持部材２４を接地した上で、図１３に示すように、一端が第２の保持部材２４と接続されている導体６２を第２の基板２１の第３の平面２１ａに形成し、複数の第２の導体２６を導体６２と接続するようにしてもよい。
　図１３では、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄの一端も、導体６２と接続している。
　図１３は、超音波探傷装置用の回転トランス１におけるインナーリング２０の他の例を図１のｘ２方向から見た平面図である。 In the inner ring 20 shown in FIG. 4, the second conductor 26 is grounded, but the grounding method of the second conductor 26 is not clearly shown.
For example, after the metal second holding member 24 is grounded, as shown in FIG. 13, the conductor 62 whose one end is connected to the second holding member 24 is connected to the third flat surface 21 a of the second substrate 21. The second conductors 26 may be formed to be connected to the conductor 62.
In FIG. 13, one ends of the second one- turn coils 22a, 22b, 22c, 22d are also connected to the conductor 62.
FIG. 13 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector as seen from the x 2 direction in FIG. 1.
　図２に示すアウターリング１０は、図１のｘ１方向からアウターリング１０を見たときに、第１の保持部材１４の一部が見えている構造である。
　また、図４に示すインナーリング２０は、図１のｘ２方向からインナーリング２０を見たときに、第２の保持部材２４の一部が見えている構造である。
　しかし、これは一例に過ぎず、アウターリング１０は、図１４及び図１５に示すように、図１のｘ１方向からアウターリング１０を見たときに、第１の保持部材１４が見えていない構造であってもよい。
　図１４は、超音波探傷装置用の回転トランス１におけるアウターリング１０の他の例を図１のｘ１方向から見た平面図である。図１５は、図１４に示すアウターリング１０のＣ－Ｃ’断面を示す断面図である。
　また、インナーリング２０は、図１６及び図１７に示すように、図１のｘ２方向からインナーリング２０を見たときに、第２の保持部材２４が見えていない構造であってもよい。
　図１６は、超音波探傷装置用の回転トランス１におけるインナーリング２０の他の例を図１のｘ２方向から見た平面図である。図１７は、図１６に示すインナーリング２０のＤ－Ｄ’断面を示す断面図である。 The outer ring 10 shown in FIG. 2 has a structure in which a part of the first holding member 14 is visible when the outer ring 10 is viewed from the x 1 direction in FIG.
The inner ring 20 shown in FIG. 4 has a structure in which a part of the second holding member 24 is visible when the inner ring 20 is viewed from the x 2 direction in FIG.
However, this is only an example, and as shown in FIGS. 14 and 15, when the outer ring 10 is viewed from the x 1 direction in FIG. 1, the first holding member 14 is not visible. It may be a structure.
FIG. 14 is a plan view of another example of the outer ring 10 in the rotary transformer 1 for an ultrasonic flaw detector as seen from the x 1 direction in FIG. 1. FIG. 15 is a sectional view showing a CC ′ section of the outer ring 10 shown in FIG.
Further, as shown in FIGS. 16 and 17, the inner ring 20 may have a structure in which the second holding member 24 is not visible when the inner ring 20 is viewed from the x 2 direction in FIG. 1.
FIG. 16 is a plan view of another example of the inner ring 20 in the rotary transformer 1 for the ultrasonic flaw detector as seen from the x 2 direction in FIG. 1. FIG. 17 is a sectional view showing a DD ′ section of the inner ring 20 shown in FIG.
　実施の形態１の回転トランス１は、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄの他端のそれぞれがグランドと接続されている。また、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄの他端のそれぞれがグランドと接続されている。
　しかし、これに限るものではなく、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄの他端のそれぞれが開放され、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄの他端のそれぞれが開放されていてもよい。
　それぞれの他端が開放されている場合、送信部４１ａ，４１ｂ，４１ｃ，４１ｄのそれぞれが、電気信号を静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄに送信すると、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄには、電圧が印加される。
　第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに電圧が印加されると、容量結合によって、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄに電圧が印加され、回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄを介して、超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄに電気信号が伝送される。
　一方、超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄのそれぞれが、電気信号を回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄに出力すると、第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄには、電圧が印加される。
　第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄに電圧が印加されると、容量結合によって、第１の１ターンコイル１２ａ，１２ｂ，１２ｃ，１２ｄに電圧が印加され、静止側信号ライン４３ａ，４３ｂ，４３ｃ，４３ｄを介して、受信部４２ａ，４２ｂ，４２ｃ，４２ｄに電気信号が伝送される。 In the rotary transformer 1 of the first embodiment, each of the other ends of the first one- turn coils 12a, 12b, 12c, 12d is connected to the ground. Further, each of the other ends of the second one- turn coils 22a, 22b, 22c, 22d is connected to the ground.
However, the present invention is not limited to this, and the other ends of the first 1- turn coils 12a, 12b, 12c, 12d are opened, and the other ends of the second 1- turn coils 22a, 22b, 22c, 22d are opened. It may be open.
When the other end of each is opened, when each of the transmitters 41a, 41b, 41c, 41d transmits an electric signal to the stationary side signal lines 43a, 43b, 43c, 43d, the first one-turn coil 12a, A voltage is applied to 12b, 12c and 12d.
When a voltage is applied to the first 1- turn coils 12a, 12b, 12c, 12d, a voltage is applied to the second 1- turn coils 22a, 22b, 22c, 22d by capacitive coupling, and the rotation-side signal line 33a, Electrical signals are transmitted to the ultrasonic probes 32a, 32b, 32c, 32d via 33b, 33c, 33d.
On the other hand, when each of the ultrasonic probes 32a, 32b, 32c, 32d outputs an electric signal to the rotation- side signal lines 33a, 33b, 33c, 33d, the second 1- turn coils 22a, 22b, 22c, 22d output the signals. Is applied with a voltage.
When the voltage is applied to the second one- turn coils 22a, 22b, 22c, 22d, the voltage is applied to the first one- turn coils 12a, 12b, 12c, 12d by capacitive coupling, and the stationary side signal line 43a, An electric signal is transmitted to the receiving units 42a, 42b, 42c, 42d via 43b, 43c, 43d.
実施の形態２．
　図１に示す超音波探傷装置では、回転トランス１が、１つのアウターリング１０と、１つのインナーリング２０とを備えている。
　実施の形態２では、回転トランス１が、複数のアウターリングと、複数のインナーリングとを備えている超音波探傷装置について説明する。 Embodiment 2.
In the ultrasonic flaw detector shown in FIG. 1, the rotary transformer 1 includes one outer ring 10 and one inner ring 20.
In the second embodiment, an ultrasonic flaw detector will be described in which the rotary transformer 1 includes a plurality of outer rings and a plurality of inner rings.
　超音波探傷装置は、被検査材７における多くの箇所を同時に探傷できるようにするために多数の超音波探触子３２ａ等を実装することがある。
　超音波探傷装置が、１つのインナーリング２０に形成されている第２の１ターンコイル２２ａ，２２ｂ，２２ｃ，２２ｄの数よりも多くの超音波探触子３２ａ等を実装する場合、回転トランス１が、複数のアウターリングと、複数のインナーリングとを備える必要がある。 The ultrasonic flaw detector may be equipped with a large number of ultrasonic probes 32a and the like in order to enable flaw detection at many points on the material 7 to be inspected at the same time.
When the ultrasonic flaw detector mounts more ultrasonic probes 32a than the number of second one- turn coils 22a, 22b, 22c, 22d formed on one inner ring 20, the rotary transformer 1 However, it is necessary to provide a plurality of outer rings and a plurality of inner rings.
　図１８は、４つのアウターリング及び４つのインナーリングを備える回転トランス１を示す説明図である。
　図１８では、回転トランス１が、４つのアウターリング及び４つのインナーリングを備える例を示している。しかし、これは一例に過ぎず、回転トランス１が、２つ又は３つのアウターリングと、２つ又は３つのインナーリングとを備えているものであってもよい。また、回転トランス１が、５つ以上のアウターリングと、５つ以上のインナーリングとを備えているものであってもよい。
　図１８では、説明の簡単化のため、外枠２、内壁３、回転機構４、超音波探触子ホルダ３１、超音波探触子３２ａ，３２ｂ，３２ｃ，３２ｄ及び回転側信号ライン３３ａ，３３ｂ，３３ｃ，３３ｄなどの記載を省略している。
　図１８において、図３及び図５と同一符号は同一又は相当部分を示すので説明を省略する。
　アウターリング１０は、図３に示すアウターリング１０と同一構成のアウターリングである。 FIG. 18 is an explanatory diagram showing the rotary transformer 1 including four outer rings and four inner rings.
FIG. 18 illustrates an example in which the rotary transformer 1 includes four outer rings and four inner rings. However, this is only an example, and the rotary transformer 1 may be provided with two or three outer rings and two or three inner rings. Further, the rotary transformer 1 may include five or more outer rings and five or more inner rings.
In FIG. 18, for simplification of description, the outer frame 2, the inner wall 3, the rotation mechanism 4, the ultrasonic probe holder 31, the ultrasonic probes 32a, 32b, 32c, 32d and the rotation side signal lines 33a, 33b. , 33c, 33d, etc. are omitted.
18, the same reference numerals as those in FIG. 3 and FIG.
The outer ring 10 is an outer ring having the same configuration as the outer ring 10 shown in FIG.
　アウターリング１０ａは、アウターリング１０に相当するアウターリングを２つ備えている。
　第１の保持部材１４ａは、２つの第１の基板１１におけるそれぞれの第２の平面１１ｂが対向するように、２つの第１の基板１１を保持している。
　インナーリング２０ａは、インナーリング２０に相当するインナーリングを２つ備えている。
　第２の保持部材２４ａは、２つの第２の基板２１におけるそれぞれの第４の平面２１ｂが対向するように、２つの第２の基板２１を保持している。 The outer ring 10 a includes two outer rings corresponding to the outer ring 10.
The first holding member 14a holds the two first substrates 11 so that the respective second planes 11b of the two first substrates 11 face each other.
The inner ring 20a includes two inner rings corresponding to the inner ring 20.
The second holding member 24a holds the two second substrates 21 so that the respective fourth planes 21b of the two second substrates 21 face each other.
　回転トランス１が、複数のアウターリングと、複数のインナーリングとを備えるものであっても、実施の形態１の回転トランス１と同様に、それぞれのアウターリングの薄型化及びそれぞれのインナーリングの薄型化を図ることができる。 Even if the rotary transformer 1 includes a plurality of outer rings and a plurality of inner rings, each outer ring is thinned and each inner ring is thin similarly to the rotary transformer 1 of the first embodiment. Can be realized.
　なお、本願発明はその発明の範囲内において、各実施の形態の自由な組み合わせ、あるいは各実施の形態の任意の構成要素の変形、もしくは各実施の形態において任意の構成要素の省略が可能である。 In the invention of the present application, it is possible to freely combine the respective embodiments, modify any of the constituent elements of each of the embodiments, or omit any of the constituent elements of each of the embodiments within the scope of the invention. .
　この発明は、固定体及び回転体を備える超音波探傷装置用の回転トランスに適している。
　また、この発明は、回転トランスを備える超音波探傷装置に適している。 INDUSTRIAL APPLICABILITY The present invention is suitable for a rotary transformer for an ultrasonic flaw detector that includes a fixed body and a rotating body.
Further, the present invention is suitable for an ultrasonic flaw detector equipped with a rotary transformer.
　１　回転トランス、２　外枠、３　内壁、４　回転機構、５　固定体、６　回転体、７　被検査材、１０，１０ａ　アウターリング、１１　第１の基板、１１ａ　第１の平面、１１ｂ　第２の平面、１２ａ，１２ｂ，１２ｃ，１２ｄ　第１の１ターンコイル、１３　第１の浮遊導体、１４，１４ａ　第１の保持部材、１５　空気、１６　第１の導体、１７　柱状導体、１８　貫通穴、２０，２０ａ　インナーリング、２１　第２の基板、２１ａ　第３の平面、２１ｂ　第４の平面、２２ａ，２２ｂ，２２ｃ，２２ｄ　第２の１ターンコイル、２３　第２の浮遊導体、２４，２４ａ　第２の保持部材、２５　空気、２６　第２の導体、２７　柱状導体、２８　貫通穴、３１　超音波探触子ホルダ、３２ａ，３２ｂ，３２ｃ，３２ｄ　超音波探触子、３３ａ，３３ｂ，３３ｃ，３３ｄ　回転側信号ライン、４０　信号入出力部、４１ａ，４１ｂ，４１ｃ，４１ｄ　送信部、４２ａ，４２ｂ，４２ｃ，４２ｄ　受信部、４３ａ，４３ｂ，４３ｃ，４３ｄ　静止側信号ライン、４４　探傷部、５１，５２　クロストーク、６１，６２　導体。 1 rotating transformer, 2 outer frame, 3 inner wall, 4 rotating mechanism, 5 fixed body, 6 rotating body, 7 inspected material, 10, 10a outer ring, 11 1st substrate, 11a 1st plane, 11b 2nd Plane, 12a, 12b, 12c, 12d 1st 1 turn coil, 13 1st floating conductor, 14 14a 1st holding member, 15 air, 16 1st conductor, 17 columnar conductor, 18 through hole, 20 , 20a inner ring, 21 second substrate, 21a third plane, 21b fourth plane, 22a, 22b, 22c, 22d second one-turn coil, 23 second floating conductor, 24, 24a second Holding member, 25 air, 26 second conductor, 27 columnar conductor, 28 through hole, 31 ultrasonic probe holder, 32a, 32b, 32c, 32d ultrasonic probe Child, 33a, 33b, 33c, 33d Rotating side signal line, 40 signal input / output section, 41a, 41b, 41c, 41d transmitting section, 42a, 42b, 42c, 42d receiving section, 43a, 43b, 43c, 43d stationary side signal Line, 44 flaw detection section, 51, 52 crosstalk, 61, 62 conductor.

Claims (10)

  1. 　複数の第１の１ターンコイルが第１の平面に同心円状に形成され、第１の浮遊導体が第２の平面に形成されている第１の基板と、前記第１の浮遊導体を取り囲むように前記第１の基板を保持している第１の保持部材とを有する固定体と、
    　前記複数の第１の１ターンコイルのそれぞれと対向するように、複数の第２の１ターンコイルが第３の平面に同心円状に形成され、第２の浮遊導体が第４の平面に形成されている第２の基板と、前記第２の浮遊導体を取り囲むように前記第２の基板を保持している第２の保持部材と、前記複数の第２の１ターンコイルのそれぞれと接続されている複数の超音波探触子とを有し、前記第２の基板と前記第２の保持部材と前記複数の超音波探触子とが被検査材の周りを回転する回転体と
    　を備えた超音波探傷装置用の回転トランス。     A plurality of first one-turn coils are concentrically formed on a first plane, and a first substrate on which a first floating conductor is formed on a second plane, and to surround the first floating conductor. A fixed body having a first holding member holding the first substrate,
    A plurality of second one-turn coils are formed concentrically on a third plane and a second floating conductor is formed on a fourth plane so as to face each of the plurality of first one-turn coils. Connected to the second substrate, the second holding member that holds the second substrate so as to surround the second floating conductor, and each of the plurality of second one-turn coils. A plurality of ultrasonic probes, the second substrate, the second holding member, and a rotating body in which the plurality of ultrasonic probes rotate around a material to be inspected. Rotating transformer for ultrasonic flaw detector.
  2. 　前記固定体は、前記第１の平面において、前記複数の第１の１ターンコイルのそれぞれの間に形成されている第１の導体を有し、
    　前記回転体は、前記第３の平面において、前記複数の第２の１ターンコイルのそれぞれの間に形成されている第２の導体を有し、
    　前記第１の導体と前記第１の浮遊導体とが電気的に接続され、前記第２の導体と前記第２の浮遊導体とが電気的に接続されており、前記第１の導体及び前記第２の導体のそれぞれが接地されていることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。     The fixed body has a first conductor formed between each of the plurality of first one-turn coils in the first plane,
    The rotating body has a second conductor formed between each of the plurality of second one-turn coils in the third plane,
    The first conductor and the first floating conductor are electrically connected, the second conductor and the second floating conductor are electrically connected, and the first conductor and the first floating conductor are electrically connected to each other. The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein each of the two conductors is grounded.
  3. 　前記第１の導体と前記第１の浮遊導体とが柱状導体によって電気的に接続され、前記第２の導体と前記第２の浮遊導体とが柱状導体によって電気的に接続されていることを特徴とする請求項２記載の超音波探傷装置用の回転トランス。 The first conductor and the first floating conductor are electrically connected by a columnar conductor, and the second conductor and the second floating conductor are electrically connected by a columnar conductor. The rotary transformer for the ultrasonic flaw detector according to claim 2.
  4. 　前記第１の浮遊導体及び前記第２の浮遊導体のそれぞれは、非磁性金属であることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。 The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein each of the first floating conductor and the second floating conductor is made of a non-magnetic metal.
  5. 　前記第１の保持部材及び前記第２の保持部材のそれぞれは、非金属であることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。 The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein each of the first holding member and the second holding member is made of non-metal.
  6. 　前記第１の保持部材及び前記第２の保持部材のそれぞれは、金属であり、
    　前記第１の保持部材及び前記第２の保持部材のそれぞれは、接地されていることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。     Each of the first holding member and the second holding member is a metal,
    The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein each of the first holding member and the second holding member is grounded.
  7. 　前記第１の保持部材は、前記第１の浮遊導体と非接触の状態で、前記第１の基板を保持し、
    　前記第２の保持部材は、前記第２の浮遊導体と非接触の状態で、前記第２の基板を保持していることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。     The first holding member holds the first substrate in a non-contact state with the first floating conductor,
    The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein the second holding member holds the second substrate in a state of not contacting the second floating conductor.
  8. 　前記第１の浮遊導体が前記第２の平面の全面に形成され、前記第２の浮遊導体が前記第４の平面の全面に形成されており、
    　前記第１の保持部材は、前記第１の浮遊導体と接触している状態で、前記第１の基板を保持し、
    　前記第２の保持部材は、前記第２の浮遊導体と接触している状態で、前記第２の基板を保持していることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。     The first floating conductor is formed on the entire surface of the second plane, and the second floating conductor is formed on the entire surface of the fourth plane;
    The first holding member holds the first substrate in a state of being in contact with the first floating conductor,
    The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein the second holding member holds the second substrate while being in contact with the second floating conductor. .
  9. 　前記固定体は、
    　前記第１の基板を２つ有しており、
    　前記第１の保持部材は、
    　前記２つの第１の基板におけるそれぞれの第２の平面が対向するように、前記２つの第１の基板を保持し、
    　前記回転体は、
    　前記第２の基板を２つ有しており、
    　前記第２の保持部材は、
    　前記２つの第２の基板におけるそれぞれの第４の平面が対向するように、前記２つの第２の基板を保持していることを特徴とする請求項１記載の超音波探傷装置用の回転トランス。     The fixed body is
    It has two said 1st board | substrates,
    The first holding member,
    Holding the two first substrates such that the respective second planes of the two first substrates face each other,
    The rotating body is
    It has two said 2nd board | substrates,
    The second holding member is
    The rotary transformer for an ultrasonic flaw detector according to claim 1, wherein the two second substrates are held so that respective fourth planes of the two second substrates face each other. .
  10. 　複数の第１の１ターンコイルが第１の平面に同心円状に形成され、第１の浮遊導体が第２の平面に形成されている第１の基板と、前記第１の浮遊導体を取り囲むように前記第１の基板を保持している第１の保持部材とを有する固定体と、
    　前記複数の第１の１ターンコイルのそれぞれと対向するように、複数の第２の１ターンコイルが第３の平面に同心円状に形成され、第２の浮遊導体が第４の平面に形成されている第２の基板と、前記第２の浮遊導体を取り囲むように前記第２の基板を保持している第２の保持部材と、前記複数の第２の１ターンコイルのそれぞれと接続されている複数の超音波探触子とを有し、前記第２の基板と前記第２の保持部材と前記複数の超音波探触子とが被検査材の周りを回転する回転体と、
    　前記複数の第１の１ターンコイルのそれぞれと接続されており、前記第１の１ターンコイルに対して電気信号を入出力する信号入出力部と、
    　前記信号入出力部により入出力された電気信号に基づいて前記被検査材の傷を探知する探傷部と
    　を備えた超音波探傷装置。     A plurality of first one-turn coils are concentrically formed on a first plane, and a first substrate on which a first floating conductor is formed on a second plane, and to surround the first floating conductor. A fixed body having a first holding member holding the first substrate,
    A plurality of second one-turn coils are formed concentrically on a third plane and a second floating conductor is formed on a fourth plane so as to face each of the plurality of first one-turn coils. Connected to the second substrate, the second holding member that holds the second substrate so as to surround the second floating conductor, and each of the plurality of second one-turn coils. A plurality of ultrasonic probes, wherein the second substrate, the second holding member, and the plurality of ultrasonic probes rotate around a material to be inspected,
    A signal input / output unit that is connected to each of the plurality of first one-turn coils and that inputs and outputs an electrical signal to and from the first one-turn coil;
    An ultrasonic flaw detection device comprising: a flaw detection unit that detects a flaw in the material to be inspected based on an electric signal input and output by the signal input / output unit.
PCT/JP2018/039039 2018-10-19 2018-10-19 Rotary transformer for ultrasonic flaw detector and ultrasonic flaw detector WO2020079836A1 (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472423A (en) * 1977-11-21 1979-06-09 Mitsubishi Electric Corp Rotary transformer
JPS599906A (en) * 1982-07-09 1984-01-19 Trio Kenwood Corp Rotary transformer
JPS59143012U (en) * 1983-03-14 1984-09-25 日本フエライト株式会社 rotary transformer
JPH01158707A (en) * 1987-12-15 1989-06-21 Toshiba Corp Rotary transformer and manufacture thereof
JPH01154615U (en) * 1988-04-15 1989-10-24
JP2002301081A (en) * 2001-04-06 2002-10-15 Matsushita Electric Ind Co Ltd Ultrasonic oscillator driving motor and ultrasonic diagnostic apparatus using the motor
WO2012141279A1 (en) * 2011-04-15 2012-10-18 新日本製鐵株式會社 Rotary transformer for rotary ultrasonic flaw detection device and rotary ultrasonic flaw detection device using same
US20150145626A1 (en) * 2012-05-10 2015-05-28 Hispano-Suiza Magnetically shielded three phase rotary transformer having three magnetic cores

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472423A (en) * 1977-11-21 1979-06-09 Mitsubishi Electric Corp Rotary transformer
JPS599906A (en) * 1982-07-09 1984-01-19 Trio Kenwood Corp Rotary transformer
JPS59143012U (en) * 1983-03-14 1984-09-25 日本フエライト株式会社 rotary transformer
JPH01158707A (en) * 1987-12-15 1989-06-21 Toshiba Corp Rotary transformer and manufacture thereof
JPH01154615U (en) * 1988-04-15 1989-10-24
JP2002301081A (en) * 2001-04-06 2002-10-15 Matsushita Electric Ind Co Ltd Ultrasonic oscillator driving motor and ultrasonic diagnostic apparatus using the motor
WO2012141279A1 (en) * 2011-04-15 2012-10-18 新日本製鐵株式會社 Rotary transformer for rotary ultrasonic flaw detection device and rotary ultrasonic flaw detection device using same
US20150145626A1 (en) * 2012-05-10 2015-05-28 Hispano-Suiza Magnetically shielded three phase rotary transformer having three magnetic cores

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