WO2020048559A1

WO2020048559A1 - Module for a display device and/or operating device, display device and/or operating device, method for producing a module and means of transportation

Info

Publication number: WO2020048559A1
Application number: PCT/DE2019/100684
Authority: WO
Inventors: Michael Schneider; Daniel Platz; Ulrich Schmid; Thomas Tille; Florian MIEDL
Original assignee: Bayerische Motoren Werke Aktiengesellschaft
Priority date: 2018-09-05
Filing date: 2019-07-24
Publication date: 2020-03-12
Also published as: DE102018215083A1

Abstract

The invention relates to a module (1) for a display device and/or operating device, wherein the module (1) comprises: - a first transparent electrode (3) with a first matrix of a number of electrode pads; - a transparent piezoelectric layer (2) having a first and a second surface; - a second transparent electrode (4); and - a transparent substrate (12), wherein the transparent substrate (12) is coated with the second transparent electrode (4) and the second transparent electrode (4) is arranged between the transparent substrate (12) and the transparent piezoelectric layer (2), and the first surface is coated with the first transparent electrode (3) and the second surface is coated with the second transparent electrode (4); and the electrode pads are arranged spaced apart from one another on the first surface of the transparent piezoelectric material (2).

Description

Module for a display and / or control device, display and / or control device, method for producing a module and means of transportation

description

The invention relates to a module for a display and / or operating device, a method for producing a module, a display device and a

Means of transportation.

A haptic feedback of a display device to a user can currently be realized, in particular by a vibration when touched by the user, by means of piezo actuators or by the movement of the display or the surface by means of a magnet or an electric motor. However, the piezo actuators with mechanical coupling elements, which are generally not transparent, must be arranged in the edge area of the display, since the piezo actuators and the mechanical coupling elements otherwise restrict the view of the display.

US 2012/0313874 A1 and US 2012/0313766 A1 disclose piezo actuators which are attached to the edge of a display device. The piezo actuators are completely coated on two sides with continuous electrodes. If an object such as a finger touches the display, a potential is applied to the electrodes. As a result, the piezo actuators are excited to vibrate via the piezoelectric effect and the object which touches the display device receives haptic feedback or feedback. However, the haptic feedback takes place simultaneously on the entire display. This means that sections of the display cannot be individually stimulated for haptic feedback. By the arrangement of the piezo actuators in the edge area of the display, additional mechanical coupling elements are also required here.

It is therefore an object of the present invention to enable position-selective haptic feedback on a display and / or operating device and to overcome the disadvantages of the aforementioned prior art.

The object is achieved by the independent claims.

According to a first aspect, the present invention relates to a module for a display and / or operating device (e.g. for a display device). In this context, a “module” is understood to mean a component which, in particular, on the area of a display and / or operating device, which is a graphic

Represents display content and / or enables a direct interaction with the graphic display content, for example a touch screen. Furthermore, a “display device” can also comprise a decorative surface. The module can focus on such an area

Display and / or control device are glued. The module is transparent due to the features described below. “Transparency” here means in particular a colorless transparency, such as that of a window glass. However, the term of transparency used here at least requires that the graphically represented contents of a display of a display and / or operating device must be recognizable or visible for an observer through the module.

The module comprises a transparent substrate which is coated with a second transparent electrode. The second transparent

Electrode material is in turn coated on the other side with a second surface of a transparent piezoelectric material. Thus, the second electrode is between the substrate and the transparent one

Piezoelectric material "sandwiched" arranged. Furthermore, a first surface of the transparent piezoelectric material has a first

coated transparent electrode. For example, the first and the run second surface of the transparent piezoelectric layer in parallel. In other words, the electrodes are arranged on opposite surfaces of the transparent piezoelectric layer. The first transparent electrode here comprises a first matrix of electrode islands. In other words, a transparent electrode layer, which comprises a two-dimensional pattern, that is to say a first matrix of electrode islands, is on the

transparent piezoelectric material available. Electrode islands are to be understood as components of the first matrix which are insulated from one another (which are in particular arranged at a distance from one another). The matrix, which is formed by the electrode islands, can be configured, for example, in the form of a “V”, a “W”, a “checkerboard pattern” and / or a cross. It is particularly provided here that the electrode islands are spaced apart from one another. Each electrode island can be connected to a voltage source. So electrode islands can be understood as individual layers of the transparent material (e.g. indium tin oxide) of the first electrode, which do not touch each other and which are arranged as a two-dimensional pattern on the first surface of the transparent piezoelectric layer. These layers can be both polygonal, in particular rectangular, and elliptical. For example, an electrode island can be arranged at a distance from the edge of the second surface. This means that the electrode island does not touch the edge of the first surface. In this case, the electrode island can be supplied with current via a connection, preferably via a thin conductor track, with an electrode pad which is arranged outside the first surface and has a path to a voltage source. Thus, by applying a potential between the first and the second electrode, between which the transparent piezoelectric material is located, one can use the piezoelectric effect

Movement, in particular a vibration, of the piezoelectric material are excited, which in turn sets the transparent substrate in vibration. If the electrode island is spaced from the edge of the first surface, a haptic can be created at any position of the module

Feedback caused by the vibration of the transparent substrate. Thus, for a user who has the surface of the module touched, haptic feedback is caused at every point on this surface. Location selectivity can be achieved by varying the vibration of the entire plate depending on the finger position. Furthermore, it is possible, by targeted control of the electrode islands, to cause a location-selective haptic feedback that is independent of other surface areas by means of location-selective vibration of the transparent substrate.

The first and / or the second electrode can be, for example, graphene and / or indium tin oxide (ITO) and / or silver nanowires and / or carbon nanotubes (CNT) and / or conductive polymers and / or Al-doped ZnO and / or nitrogen-doped diamond-like carbon and / or have carbon nanowires.

The layer thickness of the electrodes, in particular the electrode islands, is, for example, at least 0.5 nm to e.g. 400 nm

Haptic feedback is no longer sufficiently perceptible in the layer thicknesses of the electrodes, in particular the electrode islands. If the layer thickness of the electrodes, in particular the

Electrode islands, the transparency of the electrode material is no longer available.

In particular, lead zirconate titanate (Pb (Zr _x Tii _x ) 0 ₃ ) and / or lead titanate (PbTi0 ₃ ) and / or barium titanate (BaTi0 ₃ ) and / or sodium iniobate (NaNb0 ₃ ) and / or come as transparent piezoelectric materials for the piezoelectric layer Potassium niobate (KNb0 ₃ ) is a lithium-doped potassium niobate (K, Na) i- _x Li _x Nb0 ₃ and / or scandium aluminum nitride (AIScN), in question. The layer thickness of the piezoelectric material for the piezoelectric layer is in particular 150 to 1500 nm. With smaller layer thicknesses, it may not be possible to apply sufficiently high voltages to the piezoelectric layer, while with excessive layer thicknesses problems regarding mechanical layer stresses and reduced transparency can occur. The electrode islands can in particular have side lengths and / or diameters from 20 gm to 500 gm. With smaller side lengths and / or

Diameters can lead to unfavorable space losses in favor of wiring.

Thus, the module for a display and / or control device can on the part of the display and / or control device on which the graphic

Display contents are displayed and / or offered for interaction (i.e. the display). For example, the free side, ie the uncoated side of the substrate, can be applied directly to the display of the display and / or operating device. Due to the spatially immediately adjacent arrangement of the transparent electrodes relative to the piezoelectric material, additional mechanical coupling interfaces can be dispensed with, which makes the module easier and cheaper to manufacture. In addition, by spacing at least one electrode island of the first matrix from the edge of the first surface, any position on the

transparent module can be used for selective haptic feedback by exciting the piezoelectric material. In addition, the transparent module according to the invention can be used to reduce the distortion of graphic display content, which occurs, for example, in the known non-transparent piezo actuators.

The subclaims show advantageous developments of the invention.

In an advantageous development of the module according to the invention, the first and the second surface of the transparent piezoelectric layer are parallel to one another. In other words, the first and second electrodes are mounted on opposite sides of the transparent piezoelectric layer. In this way, an ideal arrangement for achieving haptic feedback can be achieved.

According to another advantageous development of the module according to the invention, at least one of the electrode islands is arranged at a distance from an edge of the first surface. The electrode island can be placed on the middle and / or arranged arbitrarily on a quadrant of the piezoelectric layer. Furthermore, two or more electrode islands can be arranged at a distance from the edge of the first surface. All electrode islands are particularly advantageously arranged at a distance from the edge. Here, the electrodes spaced from the edge can have a line which carries the

Connects electrode islands with an electrode pad, which can be arranged on the edge or outside of the transparent piezoelectric layer. Due to the arrangement of the spaced from the edge of the first surface

A haptic feedback can be generated at any desired position of the module on electrode islands.

In a further advantageous embodiment of the module according to the invention, at least one of the electrode islands has its own independent voltage path to a voltage source. In other words, there is a separate and independent circuit path for at least one of the electrode islands of the first matrix, which is set up to electrically connect the electrode island to a voltage source. This can be, for example, a conductor track which is connected with one as described above

Electrode pad is connected. This circuit path also includes

for example a transistor and / or a switch and / or a relay, which connects the current path to a voltage source independently of the

Switching paths of the other electrode islands closes. A small region of the module according to the invention can thus be selectively controlled individually and independently. Furthermore, at least two and in particular all of the electrode islands can also have their own independent ones

Have circuit path to its own independent voltage source.

In a further advantageous embodiment, the electrode island comprises an elliptical and / or a polygonal, in particular a square, shape. For example, a circular shape can also fall under the elliptical shape. Punctiform electrode islands are also conceivable. For example, in the case of quadrangular shapes of the islands, a lamella structure of the first matrix can also be formed. According to another development, the second transparent electrode comprises a second matrix with a plurality of electrode islands. To avoid

Repetitions are all features, effects and advantages, which apply to the first electrode with the first matrix, are also related to the second electrode with the second matrix. In particular, by using a second matrix comprising a plurality of electrode islands compared to one

Full coating of the layer stress can be reduced within the module according to the invention.

In a preferred embodiment, the electrode islands of the first matrix and the second matrix are arranged congruently with one another. In this way, spatially optimized excitation of the piezoelectric layer can take place.

The following aspects of the invention include the advantageous ones

Refinements and developments as well as the general advantages of the device according to the invention and the technical effects associated therewith accordingly.

According to a second aspect, the present invention relates to a method for producing a module according to the first aspect of the invention. A transparent substrate, e.g. a glass plate and / or a transparent plastic, coated with the second transparent electrode. This can be done, for example, by applying physical vapor deposition, e.g. via sputtering and / or vapor deposition (comprising, for example, sputtering on indium tin oxide). You can then use a dry etching process or a

The electrode is structured using a lithography process. The transparent piezoelectric material (for example lead zirconate titanate and / or doped and / or undoped aluminum nitride) is then deposited on the second transparent electrode. This can be done using a conventional sputtering method, for example. Alternatively, for example, a conventional sol-gel process is also possible. In the case of the sol-gel process, in particular a further drying step can take place. In a further step, the transparent piezoelectric material on its first surface with a first Matrix coated by electrode islands. As already described above, this can be done by sputtering. The conductor tracks, which

preferably comprise metal components, are in particular also applied using a physical gas deposition process. The coating technology used here corresponds to the technology used for coating the substrate. The coatings can be structured, for example, by means of a lithography process and / or a dry etching process. Here, physical processes (e.g. through argon ion bombardment) and / or chemical processes, e.g. Etching with chlorine-containing gases (especially when structuring AIN or ScAIN) is conceivable using an etching mask. The structuring can also be carried out using LASER techniques. In particular, the structure of the conductor track or the piezo material and in particular the electrode islands can be defined.

According to a third aspect, the invention relates to a display and / or operating device comprising a module according to the first aspect. The module is arranged as a transparent module on the display area or the display of the display and / or control device. Furthermore, the display and / or operating device can be an evaluation unit, e.g. a CPU and / or a microcontroller. In addition, the display and / or

Operating device a sensor, e.g. a camera and / or one

Touch sensor (e.g. a sensor glass) included. In addition, the display and / or operating device can comprise a voltage source. The first and second transparent electrodes, in particular the electrode islands of the first and / or second matrix, can be connected to the voltage source.

The evaluation unit is set up to close the circuit with the two transparent electrodes and the voltage source via the control of switches and / or transistors and / or relays and thus to ensure that a potential is present at the transparent electrodes for exciting the piezoelectric material. The evaluation unit can thus also cause a potential to be present at individual electrode islands in order to excite the transparent piezoelectric layer at the position of the respective electrode island and thus provide haptic feedback to one to effect any position of the transparent module. The

Motion sensor and / or the camera can also be used with the

Evaluation unit to be connected. Should an object, for example under

When the surface of the module is touched by the sensor, the evaluation unit can be set up to apply a potential at this point by connecting the electrodes accordingly.

According to a fourth aspect, the invention relates to a means of transportation comprising a display and / or operating device according to the third aspect. Here, the display and / or control device is fixed in the

Means of transportation installed and not designed as a portable device. For example, automobiles, in particular cars and / or trucks and / or planes and / or ships and / or motorcycles, are suitable as means of transportation in the sense of the invention.

Further details, features and advantages of the invention result from the following description and the figures. Show it:

FIG. 1 a shows an embodiment of a module according to the invention,

Figure 1 b shows an embodiment of the display and / or

Operating device,

FIG. 2 shows an embodiment of the module according to the invention,

Figure 3 shows an embodiment of an inventive

Means of transportation, and

Figure 4 is a flow diagram of an embodiment of the invention

Procedure.

FIG. 1 a shows an embodiment of a module 1 according to the invention. Here, the electrode islands 3a, 3b, 3c are a first matrix of a first

transparent electrode 3 arranged in a "W shape". A potential can be connected to the electrode islands 3a, 3b, 3c independently and separately using the lines 5 and the first electrode pads 6 and a circuit arranged thereon be created. Furthermore, the transparent piezoelectric layer 2 (for example AIScN) is coated with electrode islands 3a, 3b, 3c, which have indium tin oxide, for example. In addition, the dashed circular line shows the second transparent electrode 4, which has, for example, indium tin oxide. The second transparent electrode 4 can be connected or connected to a second electrode pad 7, which is likewise arranged beneath the piezoelectric material 2 and is only shown for illustrative purposes. Furthermore, the second transparent electrode 4 (below the transparent piezoelectric material 2) is arranged on a transparent substrate 12, for example glass.

FIG. 1 b shows an embodiment of the display and / or control device 10 according to the invention. Here, a cross section A-A of the module 1 according to the invention is shown. In addition to the module 1 according to the invention, a display 9, which serves to display the display contents and for interaction by a user, and a sensor 11, in particular a sensor glass, are shown here. The sensor 11 can, for example, detect the finger 23 of a user who wants to interact with the content of the display 9 by touching it. After this has been recognized by the sensor 11, a time-varying potential is applied between the respective electrode island 3a, 3b, 3c and the second transparent electrode 4. This will create a

Vibration of the transparent piezoelectric layer 2 generated on one or more specific first electrode islands 3a, whereby the transparent substrate 12 is vibrated. As a result, the user experiences the vibration or a haptic feedback at the position of his finger 23.

FIG. 2 shows an embodiment of the module 1 according to the invention in order to illustrate the independent and separate switching paths of the electrode islands 3a, 3b, 3c. Here are the second transparent electrode 4 and the

Electrode islands 3a, 3b, 3c can be selectively connected to a voltage source 13. Furthermore, it is possible for each pair of electrodes comprising electrode island 3a, 3b, 3c and second transparent electrode 4 to have an individual voltage source. By closing one of the switches S1, S2, S3, one of the electrode islands 3a, 3b, 3c can be controlled separately. Should be a potential can only be applied to a first electrode island 3a, the first switch S1 can be closed. If this is to be done for the first and third electrode islands 3a, 3c, the first and third switches S1, S3 can be closed, etc. The closing and opening of switches S1, S2, S3 can be controlled by means of an evaluation unit 8.

Figure 3 shows an embodiment of an inventive

Means of transportation 20 (in the form of an automobile) comprising one

display and / or control device 10 according to the invention. By means of a sensor 11, e.g. By means of a capacitive sensor, touching of the module 1 can be recognized by the user. A vibration at a position of the electrode island 3a, 3b, 3c can be excited via the evaluation unit 8.

FIG. 4 shows a flowchart of an embodiment of the method according to the invention for setting a module 1 for a display and / or

Operating device 10. In a first step 100, the transparent substrate 12 is coated with a second transparent electrode 4, e.g. Indium tin oxide, via a physical gas deposition process. In a second step 200, the second transparent is structured

Electrode 4. In a third step 300, the second transparent electrode 4 is coated with a transparent piezoelectric material (e.g. AIScN or PZT); For example, by sputtering and / or a sol-gel process. This is followed in a fourth step 400 by drying in the case of a sol-gel process. In the fifth step 500, the transparent piezoelectric layer 2 is coated by means of physical gas deposition (for example with indium tin oxide and metals, for example silver for the conductor tracks) around a matrix with electrode islands 3a, 3b, 3c, i.e. a first transparent electrode 3 on the transparent one to form piezoelectric layer 2. In a sixth step 600, the matrix and the conductor tracks are structured in order to obtain the module 1 according to the invention.

For a better understanding, the invention is explained using an application example. ITO is deposited on a transparent substrate by means of sputter deposition. Subsequent structuring is carried out using lithography and dry etching. Then a sputter deposition of ScAIN onto the existing layer and a subsequent structuring takes place

Lithography and dry etching. In the next step, ITO is deposited using sputter deposition and then structured using lithography and dry etching. Finally, the entire surface is coated with a passivation layer (e.g. by means of low pressure chemical vapor deposition (LPCVD) and / or plasma-enhanced chemical vapor deposition (PECVD) and / or sputtering), followed by an opening of the passivation layer at the points to them the two

Electrodes are electrically contacted to the control by lithography and dry etching.

Reference symbol list:

1 module

2 transparent piezoelectric layer

3 first transparent electrode

3a first electrode island

3b second electrode island

3c third electrode island

4 second transparent electrode

5 line

6 first electrode pad

7 second electrode pad

8 evaluation unit

9 display

10 display and / or control device 1 1 sensor

12 transparent substrate

13 voltage source

20 means of transportation

23 fingers

A-A cross section

51 first switch

52 second switch

53 third switch

100-600 process steps

Claims

Claims:

1. Module (1) for a display and / or operating device (10), the module (1)

• a first transparent electrode (3) with a first matrix of a plurality of electrode islands (3a, 3b, 3c);

• a transparent piezoelectric layer (2) with a first and a second surface;

• a second transparent electrode (4); and

• comprises a transparent substrate (12), wherein

the transparent substrate (12) is coated with the second transparent electrode (4) and the second transparent electrode (4) is arranged between the transparent substrate and the transparent piezoelectric layer (2), and

the first surface is coated with the first transparent electrode (3) and the second surface is coated with the second transparent electrode (4); and the electrode islands (3a, 3b, 3c) electrically insulated from one another on the first surface of the transparent

piezoelectric material (2) are arranged.

2. Module (1) according to claim 1, wherein the first and the second surface are parallel to each other.

3. Module (1) according to claim 1 or 2, wherein at least one of the

Electrode islands (3a, 3b, 3c) of the first matrix are arranged spaced from an edge of the first surface.

4. Module (1) according to one of the preceding claims, wherein at least one of the electrode islands (3a, 3b, 3c) of the first matrix has its own

independent circuit path to its own independent

Has voltage source (13).

5. Module (1) according to any one of the preceding claims, wherein the

Electrode islands (3a, 3b, 3c) have a square and / or an elliptical shape.

6. Module (1) according to any one of the preceding claims, wherein the second

transparent electrode (4) comprises a second matrix with a plurality of electrode islands.

7. Module (1) according to claim 6, wherein the electrode islands (3a, 3b, 3c) of the first and the second matrix are arranged congruently to one another.

8. The method for producing a module (1) according to one of claims 1 to 7, comprising the steps:

• coating (100) a second surface of a transparent substrate (12) with a second transparent electrode (4);

• coating (300) the second electrode (4) with a transparent piezoelectric layer (2); and

• coating (500) a first surface of the transparent

Piezoelectric layer (2) with a first transparent electrode (3) in the form of a first matrix comprising electrode islands (3a, 3b, 3c) arranged electrically insulated from one another.

9. display and / or control device (10) comprising a module (1) according to one of claims 1 to 7, wherein the module (1) as a transparent module on a display (9) of the display and / or control device (10) is arranged.

10. Means of transportation (20) comprising a display and / or

Operating device (10) according to claim 9, wherein the display and / or operating device (10) is permanently installed in the means of transportation (20).