WO2020031540A1 - Torque sensor - Google Patents

Torque sensor Download PDF

Info

Publication number
WO2020031540A1
WO2020031540A1 PCT/JP2019/025563 JP2019025563W WO2020031540A1 WO 2020031540 A1 WO2020031540 A1 WO 2020031540A1 JP 2019025563 W JP2019025563 W JP 2019025563W WO 2020031540 A1 WO2020031540 A1 WO 2020031540A1
Authority
WO
WIPO (PCT)
Prior art keywords
strain
torque sensor
fixing portion
torque
connecting portion
Prior art date
Application number
PCT/JP2019/025563
Other languages
French (fr)
Japanese (ja)
Inventor
伸児 平野
進一 西村
隆 中井
Original Assignee
アルプスアルパイン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アルプスアルパイン株式会社 filed Critical アルプスアルパイン株式会社
Publication of WO2020031540A1 publication Critical patent/WO2020031540A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft

Definitions

  • the present invention relates to a torque sensor.
  • a torque sensor having a disk-shaped strain body and a strain gauge has been used in a joint part of a robot or the like.
  • a strain body having an annular outer fixed portion, an inner fixed portion disposed inside the outer fixed portion, and a connecting portion connecting the outer fixed portion and the inner fixed portion.
  • the flexure element is arranged perpendicular to the rotation axis, and the rotation element (rotation axis, robot arm, etc.) is fixed to the outer fixed part and the inner fixed part, respectively, and the connection generated by the rotation of the rotation element
  • the torque applied to the flexure element is detected by detecting the distortion of the portion using a strain gauge.
  • the connecting portion of the conventional flexure element extends in the radial direction of the flexure element. For this reason, the distortion of the connecting portion caused by the rotation of the rotating body became maximum on the side surface of the connecting portion.
  • it is necessary to dispose a strain gauge on the side surface of the connecting portion and it becomes difficult to assemble the torque sensor. Further, if the strain gauge is arranged on the surface of the connecting portion, the assembly of the torque sensor becomes easy, but there is a problem that the accuracy of detecting the torque is reduced.
  • the present invention has been made in view of the above problems, and has as its object to provide a torque sensor that can be easily assembled and that can accurately detect torque.
  • the torque sensor includes an annular first fixing part, a second fixing part sharing a center with the first fixing part, and a plurality of coupling parts connecting the first fixing part and the second fixing part. And a plurality of strain gauges provided on the strain body, wherein the connection portion is disposed between the first fixed portion and the second fixed portion. Both ends are connected to the inner periphery of the first fixed portion, and the center portion is connected to the outer periphery of the second fixed portion.
  • FIG. 2 is a plan view showing an example of a torque sensor.
  • FIG. 2 is an exploded perspective view of the torque sensor.
  • FIG. 4 illustrates an example of a circuit configuration over an insulating layer.
  • FIG. 10 is a perspective view showing a second modification of the flexure element.
  • FIG. 7 is an external perspective view of a torque sensor according to another embodiment.
  • FIG. 7 is an exploded perspective view of a torque sensor according to another embodiment.
  • FIG. 9 is an external perspective view of a torque sensor (in a state where a circuit board is removed) according to another embodiment.
  • FIG. 9 is a plan view of a strain body provided in a torque sensor according to another embodiment.
  • FIG. 9 is a bottom view of the torque sensor according to another embodiment.
  • the torque sensor 100 according to one embodiment will be described with reference to FIGS.
  • the torque sensor 100 according to the present embodiment is a disk-shaped sensor that detects torque.
  • the torque sensor 100 is mounted on a joint part of the robot or the like perpendicular to the rotation axis.
  • FIG. 1 is a plan view showing an example of the torque sensor 100.
  • FIG. FIG. 2 is an exploded perspective view of the torque sensor 100.
  • FIG. 3 is a plan view of the flexure element 1.
  • the X1 and X2 directions are collectively referred to as an X direction, the Y1 and Y2 directions as a Y direction, and the Z1 and Z2 directions as a Z direction. Further, the Z1 direction and the Z2 direction may be referred to as upper and lower directions. Note that the X, Y, and Z directions are orthogonal to each other.
  • the torque sensor 100 includes a strain body 1, an insulating layer 2, and strain gauges 3a to 3h.
  • strain gauges 3a to 3h are referred to as strain gauges 3. The same applies to other configurations.
  • the strain body 1 is a disk-shaped member to which torque is applied by rotation of the rotating body.
  • the strain body 1 is formed of, for example, a metal.
  • the torque sensor 100 detects the strain applied to the flexure element 1 by detecting the distortion of the flexure element 1 using the strain gauge 3.
  • the strain body 1 has a first fixing part 11, a second fixing part 12, and four connecting parts 13a to 13d.
  • the broken line in FIG. 3 shows the boundary of the 1st fixing part 11, the 2nd fixing part 12, and the connection part 13 for convenience.
  • the first fixing portion 11 is a substantially annular portion located outside the strain body 1.
  • substantially annular used herein includes an annular shape, a shape in which a part of an annular shape is cut out, and a shape in which a part of an annular shape is protruded.
  • the first fixing portion 11 is used to fix, by bolts, a transmission member (rotating body) that transmits a driving force from a driving source, or an operating body (rotating body) that receives a driving force through the strain body 1. It has a plurality of openings 14.
  • the center of the first fixing portion 11 is referred to as a center C.
  • the second fixing portion 12 is a substantially annular portion located inside the strain body 1.
  • the second fixing portion 12 shares the center C with the first fixing portion 11, and has an outer radius (radius of the outer periphery) smaller than the inner radius (radius of the inner periphery) of the first fixing portion 11.
  • the second fixing portion 12 has a plurality of openings 15 for fixing, by bolts, a transmission member for transmitting the driving force from the driving source or an operating body to which the driving force is transmitted via the strain body 1.
  • the first fixing part 11 is fixed to the operating body.
  • the first fixing part 11 is fixed to the transmitting member. Is done.
  • the transmission member and the operating body are arranged on different surfaces in the Z direction.
  • the second fixing portion 12 may be formed in a substantially circular shape.
  • the substantially circular shape here includes a circular shape, a shape in which a part of a circle is cut out, and a shape in which a part of a circle is protruded.
  • the connecting portion 13 is a substantially rectangular portion that connects the first fixing portion 11 and the second fixing portion 12 and extends from the outer periphery of the second fixing portion 12 in a tangential direction of the outer periphery.
  • the substantially rectangular shape here includes a rectangular shape, a shape in which a part of the rectangle is cut out, and a shape in which a part of the rectangle is protruded.
  • the connecting portion 13 is disposed between the inner periphery of the first fixing portion 11 and the outer periphery of the second fixing portion 12, both ends are connected to the inner periphery of the first fixing portion 11, and the center portion is the second fixing portion. 12 is connected to the outer periphery.
  • both ends of the connecting portion 13 are not connected to the outer periphery of the second fixing portion 12, and the center portion is not connected to the inner periphery of the first fixing portion 11. Therefore, an opening 16 is formed between both ends of the connecting portion 13 and the outer periphery of the second fixing portion 12, and an opening is formed between the central portion of the connecting portion 13 and the inner periphery of the first fixing portion 11.
  • the part 17 is formed.
  • the connecting portion 13a is a substantially rectangular portion extending in the Y direction, the Y1 side end is connected to the X2Y1 side portion of the inner periphery of the first fixing portion 11, and the Y2 side end is the first fixing portion.
  • the inner portion of the portion 11 is connected to the X2Y2 side portion, and the central portion is connected to the outer portion of the second fixing portion 12 on the X2 side.
  • An opening 16a is formed between the Y1 side end of the connecting portion 13a and the outer periphery of the second fixing portion 12, and between the Y2 side end of the connecting portion 13a and the outer periphery of the second fixing portion 12.
  • An opening 17d is formed between the central portion of the connecting portion 13a and the inner periphery of the first fixing portion 11.
  • the connecting portion 13b is a substantially rectangular portion extending in the X direction, the X1 side end is connected to the X1Y1 side portion of the inner periphery of the first fixing portion 11, and the X2 side end is the inner periphery of the first fixing portion 11. , And the central portion is connected to the Y1 side portion of the outer periphery of the second fixed portion 12.
  • An opening 16b is formed between the X1 end of the connecting portion 13b and the outer periphery of the second fixing portion 12, and an opening 16b is formed between the X2 end of the connecting portion 13b and the outer periphery of the second fixing portion 12.
  • An opening 16a is formed, and an opening 17b is formed between the central portion of the connecting portion 13b and the inner periphery of the first fixing portion 11.
  • the connecting portion 13c is a substantially rectangular portion extending in the Y direction.
  • the Y1 side end is connected to the X1Y1 side portion of the inner periphery of the first fixed portion 11, and the Y2 side end is the inner periphery of the first fixed portion 11.
  • a central portion thereof is connected to the X1 side portion of the outer periphery of the second fixing portion 12.
  • An opening 16b is formed between the Y1 side end of the connecting portion 13c and the outer periphery of the second fixing portion 12, and between the Y2 side end of the connecting portion 13c and the outer periphery of the second fixing portion 12.
  • An opening 16c is formed, and an opening 17c is formed between the central portion of the connecting portion 13c and the inner periphery of the first fixing portion 11.
  • the connecting portion 13d is a substantially rectangular portion extending in the X direction, and the X1 side end is connected to the X1Y2 side portion of the inner periphery of the first fixing portion 11, and the X2 side end is the inner periphery of the first fixing portion 11. , And a central portion thereof is connected to the Y2 side portion of the outer periphery of the second fixing portion 12.
  • An opening 16c is formed between the X1 end of the connecting portion 13d and the outer periphery of the second fixing portion 12, and an opening 16c is formed between the X2 end of the connecting portion 13d and the outer periphery of the second fixing portion 12.
  • An opening 17d is formed between the center of the connecting portion 13d and the inner periphery of the first fixing portion 11.
  • the connecting portion 13 is distorted according to the torque.
  • the distortion of the connecting portion 13 is caused not by the side surface (the surface parallel to the Z direction) of the connecting portion 13 but by the surfaces at both ends of the connecting portion 13 (the surface perpendicular to the Z direction) (the first surface).
  • the surface mentioned here includes an upper surface and a lower surface.
  • the torque sensor 100 can accurately output the torque. Can be detected. Further, since it is easy to dispose the strain gauges 3 on the surfaces of both ends of the connecting portion 13, the torque sensor 100 can be easily assembled.
  • the four connecting portions 13 are arranged in a square around the second fixing portion 12. In other words, the four connecting portions 13 are arranged at equal intervals around the second fixing portion 12.
  • the distortion of each connecting portion 13 can be made uniform, and the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased.
  • the strain body 1 may have two, three, or four or more connecting portions 13.
  • the connecting portions 13 may have a curved shape or may be arranged at unequal intervals.
  • the first fixing portion 11 and the second fixing portion 12 may be made of a material that does not deform. In that case, another member is integrated so that both behave integrally.
  • the strain body 1 is formed.
  • the insulating layer 2 is an insulating layer provided on the strain body 1 and has a printed wiring formed on the surface.
  • the insulating layer 2 is disposed on the flexure element 1 so as to cover at least the connecting portion 13.
  • the insulating layer 2 is assumed to be a printed circuit board fixed to the strain body 1 with an adhesive, but an oxide film, a nitride film, or a resin film formed on the strain body 1 is assumed. It may be an insulating film.
  • Printed circuit boards include flexible boards and rigid boards. In any case, the insulating layer 2 is fixed to the connecting part 13 so as to be distorted in accordance with the distortion of the connecting part 13.
  • the strain body 1 since it is sufficient that at least the surface of the strain body 1 is insulative and the strain gauge 3 can be arranged without shorting, the strain body 1 itself may be formed of a printed board or a synthetic resin. In this case, the strain body 1 plays the role of the insulating layer 2.
  • the insulating layer 2 is preferably formed so as to cover the entire area between the first fixing part 11 and the second fixing part 12, as in the example of FIG. As a result, the area of the insulating layer 2 increases, so that the degree of freedom in circuit design can be improved.
  • the rotating body is fixed to the second fixing portion 12 on the surface on which the insulating layer 2 is arranged by a bolt.
  • the strain gauge 3 is an element whose resistance value changes according to deformation.
  • the strain gauges 3 are mounted on the insulating layer 2 and arranged at positions corresponding to both ends of the connecting portion 13 in the insulating layer 2. That is, the strain gauges 3 are arranged at both ends of the connecting portion 13. Specifically, the strain gauge 3a is disposed at the Y1 end of the connecting portion 13a, the strain gauge 3b is disposed at the X2 end of the connecting portion 13b, and the strain gauge 3c is disposed at the X1 end of the connecting portion 13b.
  • the strain gauge 3d is arranged at the Y1 end of the connecting portion 13c, the strain gauge 3e is arranged at the Y2 end of the connecting portion 13c, and the strain gauge 3f is arranged at the X1 end of the connecting portion 13d.
  • the strain gauge 3g is arranged at the X2 end of the connecting part 13d, and the strain gauge 3h is arranged at the Y2 end of the connecting part 13a.
  • the torque sensor 100 can detect the torque based on the change in the resistance value.
  • FIG. 4 is a diagram showing an example of a circuit configuration in which the strain gauge 3 on the insulating layer 2 is connected to a circuit component (not shown).
  • the circuit includes strain gauges 3a to 3h, fixed resistors Ra to Rh, a switch circuit 21, an amplifier circuit 22, an AD converter 23, and a determination circuit 24.
  • the strain gauge 3a and the fixed resistor Ra are connected in series between the power supply and the ground. The same applies to the strain gauges 3b to 3h and the fixed resistors Rb to Rh. As shown in FIG. 4, the strain gauge 3a functions as a variable resistor.
  • the switch circuit 21 receives a voltage between the strain gauge 3 and the fixed resistor R, and outputs any one of the input voltages.
  • the voltage output from the switch circuit 21 is controlled by a channel switching instruction input from the AD converter 23.
  • the voltage output from the switch circuit 21 is input to the amplifier circuit 22.
  • the amplifier circuit 22 amplifies and outputs the voltage input from the switch circuit 21.
  • the voltage output from the amplifier circuit 22 is input to the AD converter 23.
  • the AD converter 23 AD-converts the voltage input from the amplifier circuit 22 and outputs the obtained voltage value V (digital value). Further, the AD converter 23 outputs to the switch circuit 21 a channel switching instruction for supporting the switching of the output voltage. The voltage value V output from the AD converter 23 is input to the determination circuit 24.
  • the determination circuit 24 determines (detects) the torque applied to the flexure element 1 based on the voltage value V input from the AD converter 23.
  • the voltage values Va to Vh corresponding to the resistance values of the strain gauges 3a to 3h are sequentially input from the AD converter 23 to the determination circuit 24.
  • the determination circuit 24 can calculate the torque based on the voltage values Va to Vh. For example, the torque is calculated by the following equation.
  • ⁇ T k ⁇ ⁇ (Va ⁇ Vh) + (Vc ⁇ Vb) + (Ve ⁇ Vd) + (Vg ⁇ Vf) ⁇ (1)
  • T is a torque
  • k is a preset coefficient.
  • the differences between the voltage values Vb, Vd, Vf and Vh corresponding to the arranged strain gauges 3b, 3d, 3f and 3h are totaled. The reason is as follows.
  • both ends of the connecting portion 13 are distorted in the opposite direction. That is, one end of the connecting portion 13 contracts, and at the same time, the other end extends. For this reason, when torque is applied to the flexure element 1, one of the voltage values V corresponding to the two strain gauges 3 arranged at both ends of the same connecting portion 13 increases, and the other decreases. Therefore, when the voltage values V corresponding to the two strain gauges 3 arranged on the same connecting portion 13 are summed, a change in the voltage value V according to the torque is canceled.
  • the strain gauges 3a, 3c, 3e, and 3g disposed on one side in the rotation direction in each connecting portion 13 so that the change in the voltage value V according to the torque is not offset.
  • the differences between the voltage values Va, Vc, Ve, Vg and the voltage values Vb, Vd, Vf, Vh corresponding to the strain gauges 3b, 3d, 3f, 3h arranged on the other side in the rotation direction are totaled. .
  • the amounts of change in the voltage values Va to Vh according to the torque are summed, and the torque according to the sum of the changes can be calculated.
  • the determination circuit 24 determines whether the force applied to the flexure element 1 is a torque or any other force (a torsional load or a load in the rotation axis direction) based on the voltage values Va to Vh. May be. For example, when the difference between the voltage values Va, Vc, Ve, and Vg corresponding to the four strain gauges 3a, 3c, 3e, and 3g arranged in every other direction in the rotation direction is within a predetermined range, It is determined that the force applied to the flexure element 1 is torque, and if the difference is out of the predetermined range, it may be determined that the force applied to the flexure element 1 is not torque. By making such a determination, the determination circuit 24 can calculate and output the torque only when it is determined that the force applied to the flexure element 1 is a torque.
  • the strain gauge 3, the fixed resistor R, the switch circuit 21, the amplifier circuit 22, the AD converter 23, and the determination circuit 24 may be mounted on the insulating layer 2.
  • both ends of the connecting portion 13 are connected to the inner periphery of the first fixing portion 11, and the center portion is connected to the outer periphery of the second fixing portion 12.
  • the opening portions 16 and 17 form the substantially rod-shaped connecting portion 13 having a long length in the circumferential direction to which the rotational force is applied. Is added, and the force is measured by the strain gauge 3. Therefore, compared to a conventional connecting portion formed so as to extend in the radial direction and apply a force to the side surface in that direction, the amount of deformation of the connecting portion 13 can be reduced, and a large torque can be measured. Thus, the strain body 1 can be reduced in size, weight, and thickness.
  • the connecting portion 13 provided with the strain gauge 3 is formed in the circumferential direction, the diameter can be reduced as compared with the conventional example formed in the radial direction.
  • FIG. 5 is a plan view showing a first modification of the flexure element 1.
  • both end portions of the connecting portion 13 are formed thinner than the central portion.
  • the connecting portions 13a and 13c extending in the Y direction are formed such that the X-direction dimensions at both ends are smaller than the X-direction dimensions at the central portion.
  • the connecting portions 13b and 13d extending in the X direction are formed such that the dimension in the Y direction at both ends is smaller than the dimension in the Y direction at the central portion.
  • FIG. 6 is a perspective view showing a second modification of the flexure element 1.
  • the connecting portion 13 is formed thinner than the first fixing portion 11 and the second fixing portion 12. That is, the connecting portion 13 is formed such that the dimension in the Z direction is smaller than the dimension of the first fixing portion 11 and the second fixing portion 12 in the Z direction.
  • the connecting portion 13 is made thinner by lowering the surface of the connecting portion 13 on the Z1 side, but the connecting portion 13 is made higher by increasing the surface of the connecting portion 13 on the Z2 side. 13 may be made thinner.
  • the connecting portion 13 may be thinned by lowering the surface of the connecting portion 13 on the Z1 side and increasing the height of the connecting portion 13 on the Z2 side.
  • FIG. 7 is a plan view showing a third modification of the flexure element 1.
  • eight connecting portions 13a to 13h are provided on the strain body 1.
  • the eight connecting portions 13 are arranged in a regular octagon around the second fixing portion 12.
  • the eight connecting portions 13 are arranged at equal intervals around the second fixing portion 12.
  • the strain body 1 has two connecting portions 13
  • the two connecting portions 13 may be arranged at equal intervals so that the two connecting portions 13 are parallel at opposing positions.
  • the distortion of each connecting portion 13 can be made uniform, and the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased.
  • the present invention is not limited to the configuration shown here, such as a combination of the configuration described in the above embodiment with other elements. These points can be changed without departing from the spirit of the present invention, and can be appropriately determined according to the application form.
  • a torque sensor 100 ⁇ / b> A includes a plurality of strain gauges 122 ⁇ / b> D provided on the upper surface side of the strain body 110 and a plurality of strain gauges 124 ⁇ / b> D provided on the lower surface side of the strain body 110. That is, in the torque sensor 100 ⁇ / b> A according to another embodiment, a plurality of strain gauges are provided double on the upper surface side and the lower surface side of the strain body 110.
  • the torque sensor 100A can detect the torque applied to the flexure element 110 by detecting the strain of the flexure element 110 using the plurality of strain gauges 122D and 124D.
  • FIG. 8 is an external perspective view of a torque sensor 100A according to another embodiment.
  • FIG. 9 is an exploded perspective view of a torque sensor 100A according to another embodiment.
  • FIG. 10 is an external perspective view of a torque sensor 100A (in a state where the circuit board 130 is removed) according to another embodiment.
  • FIG. 11 is a plan view of a strain body 110 provided in a torque sensor 100A according to another embodiment. In FIG. 11, the plurality of strain gauges 122 ⁇ / b> D are superimposed on the upper surface of the flexure element 110 to indicate the arrangement positions of the plurality of strain gauges 122 ⁇ / b> D on the upper face of the flexure element 110.
  • FIG. 12 is a bottom view of a torque sensor 100A according to another embodiment. In FIG. 12, a plurality of strain gauges 124D are superimposed on the lower surface of the flexure element 110 to indicate the arrangement positions of the plurality of strain gauges 124D on the lower face of the flexure element 110.
  • the torque sensor 100A includes a circuit board 130, a sensor board 122, a strain body 110, and a sensor board 124 in this order from the top.
  • the strain body 110 is a disk-shaped member to which torque is applied by rotation of the rotating body.
  • the strain body 110 is formed of, for example, a metal such as aluminum.
  • the flexure element 110 has a first fixing part 111, a second fixing part 112, and a plurality of connecting parts 113.
  • the first fixing portion 111 is an annular portion located on the outermost side of the strain body 110.
  • the second fixing part 112 is a circular part located inside the first fixing part 111.
  • the second fixing part 112 shares the center C with the first fixing part 111 and has an outer diameter smaller than the inner diameter of the first fixing part 111.
  • a transmission member for transmitting a driving force from a driving source is fixed to one of the first fixing portion 111 and the second fixing portion 112 by a bolt.
  • An operating body to which the driving force is transmitted via the strain body 110 is fixed to the other of the first fixing portion 111 and the second fixing portion 112 by a bolt.
  • the plurality of connecting portions 113 are provided side by side on the same circumference between the first fixing portion 111 and the second fixing portion 112, and connect the first fixing portion 111 and the second fixing portion 112.
  • Each of the plurality of connecting portions 113 includes an overhang portion 113a and a beam portion 113b.
  • the overhang portion 113a is a portion extending in the radial direction from the first fixing portion 111 to the second fixing portion 112 side.
  • the overhang portion 113a has a shape whose width gradually decreases from both end portions toward the middle portion.
  • the beam 113b is a portion extending in the circumferential direction from the end of the overhang 113 on the second fixing portion 112 side.
  • the beam portion 113b is connected to the outer periphery of the second fixing portion 112 at a portion facing the second fixing portion 112 in the middle.
  • An opening 117 corresponding to the opening 17 of the above-described embodiment is formed on the first fixing portion 111 side in the middle of the beam 113b.
  • an opening 116 corresponding to the opening 16 of the above-described embodiment is formed between two adjacent beam portions 113b and the second fixing portion 112. That is, the connecting portion 113 in the other embodiment is different from the first embodiment in that the overhang portion 113a is provided and functions as a part of the first fixing portion 111.
  • the overhang portion 113a is formed by integrating the ends of the two adjacent connection portions 113.
  • the connecting portion 113 is branched from the overhang portion 113a into two branch paths at the end on the second fixing portion 112 side, and has a substantially Y-shape.
  • strain gauges 122D provided on the sensor substrate 122 are disposed on the upper surfaces of both ends of the beam 113b.
  • strain gauges 124D provided on the sensor substrate 124 are disposed on the lower surfaces of both ends of the beam 113b.
  • the torque sensor 100A can more accurately detect the torque applied to the strain body 110 by detecting the strain of the beam 113b by the strain gauges 122D and 124D.
  • the connecting portion 113 has the same shape in the thickness direction (Z-axis direction), and since the strain gauges 122D and 124D are arranged at opposing positions on the upper and lower surfaces, when the torque is applied to the torque sensor 100A, they oppose each other. The same strain is applied to the strain gauges 122D and 124D at the positions.
  • the sensor boards 122 and 124 are film-like members on which the plurality of strain gauges 122D and 124D are mounted.
  • the sensor substrate 122 is an example of a “first sensor substrate”, and is provided so as to overlap the upper surface of the strain body 110 (an example of “one surface”).
  • the sensor substrate 124 is an example of a “second sensor substrate”, and is provided on the lower surface of the strain body 110 (an example of the “other surface”).
  • As the sensor substrates 122 and 124 for example, flexible substrates are used.
  • the sensor substrates 122 and 124 are attached to the strain body 110 with an adhesive.
  • the sensor board 122 has a main body 122A, a connecting part 122B, and a connecting part 122C.
  • the main body 122A is an annular portion in plan view.
  • the main body portion 122A is arranged on the upper surface of the strain body 110 and outside the second fixing portion 112 so as to overlap with the above-described beam portion 113b of each of the plurality of connecting portions 113.
  • a plurality of strain gauges 122D are provided side by side on the same circumference on the main body 122A.
  • Each of the plurality of strain gauges 122D is arranged at a position overlapping with the above-described beam portion 113b of the connecting portion 113 in plan view.
  • twelve connecting portions 113 that is, twelve beam portions 113 b
  • 24 strain gauges 122D are provided in the main body 122A.
  • connection portions 122B and 122C extend linearly outward from the outer peripheral edge of the main body 122A.
  • the connecting portions 122B and 122C are provided at 180 ° intervals on the outer peripheral edge of the main body 122A.
  • the connection portions 122B and 122C are provided with a plurality of wires connected to the plurality of strain gauges 122D. After extending along the lower surface of the circuit board 130, the connecting portions 122B and 122C are bent upward and inward at the end of the circuit board 130. After the connection portions 122B and 122C extend along the upper surface of the circuit board 130, their distal ends are connected to the connector 132 provided on the upper surface of the circuit board 130. Thereby, the connection parts 122B and 122C can supply the detection signals of the plurality of strain gauges 122D to the electric circuit formed on the circuit board 130.
  • the sensor board 124 has a main body 124A, a connecting part 124B, and a connecting part 124C.
  • the main body 124A is an annular portion in plan view.
  • the main body portion 124A is disposed on the lower surface of the strain body 110 and outside the second fixing portion 112 so as to overlap with the above-described beam portion 113b of each of the plurality of connecting portions 113.
  • a plurality of strain gauges 124D are provided side by side on the same circumference on the main body 124A.
  • Each of the plurality of strain gauges 124D is arranged at a position overlapping with each of the above-described beam portions 113b of the connecting portion 113 in plan view.
  • twelve connecting portions 113 that is, twelve beam portions 113 b
  • 24 strain gauges 124D are provided in the main body 124A.
  • connection portions 124B and 124C are provided to extend linearly outward from the outer peripheral edge of the main body portion 124A.
  • the connection parts 124B and 124C are provided at 180 ° intervals on the outer peripheral edge of the main body part 124A.
  • the connection portions 124B and 124C are provided with a plurality of wires connected to the plurality of strain gauges 124D.
  • the connection portions 124B and 124C pass through the strain body 110 and are drawn from the lower surface side to the upper surface side of the strain body 110 (see FIG. 10). Then, the connecting portions 124B and 124C extend along the lower surface of the circuit board 130, and are bent upward and inward at an end of the circuit board 130.
  • connection portions 124B and 124C extend along the upper surface of the circuit board 130, the distal ends thereof are connected to the connectors 132 provided on the upper surface of the circuit board 130. Thereby, the connection parts 124B and 124C can supply the detection signals of the plurality of strain gauges 124D to the electric circuit formed on the circuit board 130.
  • the sensor substrates 122 and 124 have the same shape and the same configuration as each other. For this reason, according to the torque sensor 100A according to the present embodiment, since the sensor substrates 122 and 124 need only be manufactured without distinction, the manufacturing cost of the sensor substrates 122 and 124 can be reduced.
  • the circuit board 130 is a flat member attached to the upper surface of the first fixing portion 111 of the strain body 110.
  • a plurality of connectors 132 and ICs (Integrated Circuits) 134A and 134B are mounted on the upper surface of the circuit board 130.
  • the IC 134A is electrically connected to a plurality of strain gauges 122D provided on the main body 122A via the connector 132 and the connecting portions 122B and 122C.
  • the IC 134A performs various processes (for example, a process of determining the torque applied to the strain body 110, a process of outputting the detected values of the plurality of strain gauges 122D to the outside, etc.) based on the detected values of the plurality of strain gauges 122D. Do.
  • the IC 134B is electrically connected to a plurality of strain gauges 124D provided on the main body 124A via the connector 132 and the connecting portions 124B and 124C.
  • the IC 134B performs various arithmetic processing based on the detected values of the plurality of strain gauges 124D (for example, a process of determining the torque applied to the strain body 110, a process of outputting the detected values of the plurality of strain gauges 124D, and the like). I do.
  • the processing based on the detected values of the plurality of strain gauges 122D and the processing based on the detected values of the plurality of strain gauges 124D are performed by the two ICs 134A and 134B provided on the circuit board 130.
  • a process based on the detected values of the plurality of strain gauges 122D and a process based on the detected values of the plurality of strain gauges 124D may be performed by one IC provided on the circuit board 130.
  • the torque sensor 100 ⁇ / b> A includes a plurality of strain gauges 122 ⁇ / b> D arranged on the upper surface side of the plurality of connecting portions 113 when each of the plurality of connecting portions 113 is distorted by rotation of the rotating body.
  • Each of the plurality of strain gauges 124D arranged on the lower surface side of the plurality of connecting portions 113 is deformed, and the resistance value of each of the plurality of strain gauges 122D and 124D changes. Therefore, the torque sensor 100A can detect the torque based on the change in the resistance value of each of the plurality of strain gauges 122D and 124D.
  • the torque sensor 100A has a configuration in which the plurality of strain gauges 122D and 124D are arranged on the upper surface side and the lower surface side of the strain body 110, respectively. Compared with a configuration in which only strain gauges are arranged, the number of strain gauges to be installed can be easily increased without changing the shape of the strain body 110. Therefore, according to the torque sensor 100A according to another embodiment, assembly is easy and torque can be accurately detected.
  • the torque sensor 100A according to another embodiment can, for example, independently perform the detection of the torque based on the output of the plurality of strain gauges 122D and the detection of the torque based on the output of the plurality of strain gauges 124D. .
  • the torque sensor 100A according to another embodiment can detect the torque by the other detection system, for example, even when a failure occurs in one of the detection systems.
  • the strain on the upper surface of the plurality of connecting portions 113 of the strain body 110 is substantially the same as the distortion on the lower surface of the plurality of connecting portions 113 of the strain body 110.
  • the detection value can be output.
  • the torque sensor 100A includes, for example, an output value of a strain gauge 122D provided on an upper surface side and an output value of a strain gauge 124D provided on a lower surface side for each beam portion 113b of the connecting portion 113.
  • the torque sensor 100A suppresses the detection value from being buried in noise even when a slight distortion occurs in the branch path of the connecting portion 113, for example. it can.
  • the sensor substrate 122 and the sensor substrate 124 may be connected to each other, and may be integrally formed by one flexible substrate.
  • strain body 2 insulating layer 3: strain gauge 11: first fixing part 12: second fixing part 13: connecting parts 14 to 17: opening 21: switch circuit 22: amplifier circuit 23: AD converter 24: judgment Circuit 100: Torque sensor R: Fixed resistance 100A: Torque sensor 110: Strain element 111: First fixing part 112: Second fixing part 113: Connecting part 122: Sensor board (first sensor board) 122A: body part 122B: connection part 122C: connection part 122D: strain gauge 124: sensor board (second sensor board) 124A: body part 124B: connecting part 124C: connecting part 124D: strain gauge 130: circuit board 132: connector 134A: IC 134B: IC

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)

Abstract

A torque sensor according to an embodiment of the present invention is provided with: a strain body having an annular first affixation section, a second affixation section which shares the center with the first affixation section, and a plurality of linking sections which link the first affixation section and the second affixation section; and a plurality of strain gauges provided on the strain body. Each of the linking sections is arranged between the first affixation section and the second affixation section, has opposite ends connected to the inner periphery of the first affixation section, and has a center section connected to the outer periphery of the second affixation section.

Description

トルクセンサTorque sensor
　本発明は、トルクセンサに関する。 The present invention relates to a torque sensor.
　近年、円盤状の起歪体と歪ゲージとを備えたトルクセンサが、ロボットの関節部分などで用いられている。起歪体として、環状の外側固定部と、外側固定部の内側に配置された内側固定部と、外側固定部及び内側固定部を連結する連結部と、を有するものが知られている。このようなトルクセンサでは、起歪体を回転軸と垂直に配置し、外側固定部及び内側固定部にそれぞれ回転体（回転軸やロボットアームなど）を固定し、回転体の回転により生じた連結部の歪みを歪ゲージにより検出することにより、起歪体に加わったトルクを検出する。 In recent years, a torque sensor having a disk-shaped strain body and a strain gauge has been used in a joint part of a robot or the like. There is known a strain body having an annular outer fixed portion, an inner fixed portion disposed inside the outer fixed portion, and a connecting portion connecting the outer fixed portion and the inner fixed portion. In such a torque sensor, the flexure element is arranged perpendicular to the rotation axis, and the rotation element (rotation axis, robot arm, etc.) is fixed to the outer fixed part and the inner fixed part, respectively, and the connection generated by the rotation of the rotation element The torque applied to the flexure element is detected by detecting the distortion of the portion using a strain gauge.
特開２００１－３０４９８５号公報JP 2001-304985 A 特開２０１３－１１５６７号公報JP 2013-11567 A 特開２０１５－４９２０９号公報JP-A-2015-49209 特開２００３－８３８２４号公報JP 2003-83824 A
　ところで、従来の起歪体の連結部は、起歪体の径方向に延びていた。このため、回転体の回転により生じる連結部の歪みは、連結部の側面で最大となった。この結果、トルクを精度よく検出するためには、連結部の側面に歪ゲージを配置しなければならず、トルクセンサの組み立てが困難になった。また、歪ゲージを連結部の表面に配置すれば、トルクセンサの組み立ては容易になるが、トルクの検出精度が低下するという問題があった。 By the way, the connecting portion of the conventional flexure element extends in the radial direction of the flexure element. For this reason, the distortion of the connecting portion caused by the rotation of the rotating body became maximum on the side surface of the connecting portion. As a result, in order to accurately detect the torque, it is necessary to dispose a strain gauge on the side surface of the connecting portion, and it becomes difficult to assemble the torque sensor. Further, if the strain gauge is arranged on the surface of the connecting portion, the assembly of the torque sensor becomes easy, but there is a problem that the accuracy of detecting the torque is reduced.
　本発明は、上記の課題に鑑みてなされたものであり、組み立てが容易であり、かつ、トルクを精度よく検出できるトルクセンサを提供することを目的とする。 The present invention has been made in view of the above problems, and has as its object to provide a torque sensor that can be easily assembled and that can accurately detect torque.
　一実施形態に係るトルクセンサは、環状の第１固定部と、前記第１固定部と中心を共有する第２固定部と、前記第１固定部と前記第２固定部とを連結する複数の連結部と、を有する起歪体と、前記起歪体上に設けられた複数の歪ゲージと、を備え、前記連結部は、前記第１固定部と前記第２固定部との間に配置され、両端部が前記第１固定部の内周に接続され、中央部が前記第２固定部の外周に接続される。 The torque sensor according to one embodiment includes an annular first fixing part, a second fixing part sharing a center with the first fixing part, and a plurality of coupling parts connecting the first fixing part and the second fixing part. And a plurality of strain gauges provided on the strain body, wherein the connection portion is disposed between the first fixed portion and the second fixed portion. Both ends are connected to the inner periphery of the first fixed portion, and the center portion is connected to the outer periphery of the second fixed portion.
　本発明の各実施形態によれば、組み立てが容易であり、かつ、トルクを精度よく検出できるトルクセンサを提供できる。 According to each embodiment of the present invention, it is possible to provide a torque sensor that can be easily assembled and that can accurately detect torque.
トルクセンサの一例を示す平面図。FIG. 2 is a plan view showing an example of a torque sensor. トルクセンサの分解斜視図。FIG. 2 is an exploded perspective view of the torque sensor. 起歪体の平面図。The top view of a strain body. 絶縁層上の回路構成の一例を示す図。FIG. 4 illustrates an example of a circuit configuration over an insulating layer. 起歪体の第１の変形例を示す平面図。The top view which shows the 1st modification of a strain body. 起歪体の第２の変形例を示す斜視図。FIG. 10 is a perspective view showing a second modification of the flexure element. 起歪体の第３の変形例を示す平面図。The top view which shows the 3rd modification of a strain body. 他の実施形態に係るトルクセンサの外観斜視図。FIG. 7 is an external perspective view of a torque sensor according to another embodiment. 他の実施形態に係るトルクセンサの分解斜視図。FIG. 7 is an exploded perspective view of a torque sensor according to another embodiment. 他の実施形態に係るトルクセンサ（回路基板が取り外された状態）の外観斜視図。FIG. 9 is an external perspective view of a torque sensor (in a state where a circuit board is removed) according to another embodiment. 他の実施形態に係るトルクセンサが備える起歪体の平面図。FIG. 9 is a plan view of a strain body provided in a torque sensor according to another embodiment. 他の実施形態に係るトルクセンサの底面図。FIG. 9 is a bottom view of the torque sensor according to another embodiment.
　以下、本発明の各実施形態について、添付の図面を参照しながら説明する。なお、各実施形態に係る明細書及び図面の記載に関して、実質的に同一の機能構成を有する構成要素については、同一の符号を付することにより重畳した説明を省略する。 Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the description of the specification and the drawings according to the embodiments, components having substantially the same function and configuration are denoted by the same reference numerals, and overlapping descriptions will be omitted.
　一実施形態に係るトルクセンサ１００について、図１～図７を参照して説明する。本実施形態に係るトルクセンサ１００は、トルクを検出する円盤状のセンサである。トルクセンサ１００は、ロボットの関節部分などに、回転軸と垂直に搭載される。 ト ル ク The torque sensor 100 according to one embodiment will be described with reference to FIGS. The torque sensor 100 according to the present embodiment is a disk-shaped sensor that detects torque. The torque sensor 100 is mounted on a joint part of the robot or the like perpendicular to the rotation axis.
　図１は、トルクセンサ１００の一例を示す平面図である。図２は、トルクセンサ１００の分解斜視図である。図３は、起歪体１の平面図である。以下、図に示す方向（Ｘ１，Ｘ２，Ｙ１，Ｙ２，Ｚ１，Ｚ２方向）を基準としてトルクセンサ１００について説明する。Ｘ１，Ｘ２方向をＸ方向、Ｙ１，Ｙ２方向をＹ方向、Ｚ１，Ｚ２方向をＺ方向と総称する。また、Ｚ１方向及びＺ２方向を上方及び下方と称する場合がある。なお、Ｘ，Ｙ，Ｚ方向は互いに直交する。 FIG. 1 is a plan view showing an example of the torque sensor 100. FIG. FIG. 2 is an exploded perspective view of the torque sensor 100. FIG. 3 is a plan view of the flexure element 1. Hereinafter, the torque sensor 100 will be described with reference to the directions (X1, X2, Y1, Y2, Z1, Z2 directions) shown in the figure. The X1 and X2 directions are collectively referred to as an X direction, the Y1 and Y2 directions as a Y direction, and the Z1 and Z2 directions as a Z direction. Further, the Z1 direction and the Z2 direction may be referred to as upper and lower directions. Note that the X, Y, and Z directions are orthogonal to each other.
　図１に示すように、トルクセンサ１００は、起歪体１と、絶縁層２と、歪ゲージ３ａ～３ｈと、を備える。以下、歪ゲージ３ａ～３ｈを区別しない場合、歪ゲージ３と称する。他の構成についても同様である。 As shown in FIG. 1, the torque sensor 100 includes a strain body 1, an insulating layer 2, and strain gauges 3a to 3h. Hereinafter, when the strain gauges 3a to 3h are not distinguished, they are referred to as strain gauges 3. The same applies to other configurations.
　起歪体１は、回転体の回転によりトルクを加えられる円盤状部材である。起歪体１は、例えば、金属により形成される。トルクセンサ１００は、歪ゲージ３を利用して起歪体１の歪みを検出することにより、起歪体１に加えられたトルクを検出する。図３に示すように、起歪体１は、第１固定部１１と、第２固定部１２と、４つの連結部１３ａ～１３ｄと、を有する。なお、図３における破線は、第１固定部１１、第２固定部１２、及び連結部１３の境界を便宜的に示したものである。 The strain body 1 is a disk-shaped member to which torque is applied by rotation of the rotating body. The strain body 1 is formed of, for example, a metal. The torque sensor 100 detects the strain applied to the flexure element 1 by detecting the distortion of the flexure element 1 using the strain gauge 3. As shown in FIG. 3, the strain body 1 has a first fixing part 11, a second fixing part 12, and four connecting parts 13a to 13d. In addition, the broken line in FIG. 3 shows the boundary of the 1st fixing part 11, the 2nd fixing part 12, and the connection part 13 for convenience.
　第１固定部１１は、起歪体１の外側に位置する略環状の部分である。ここでいう略環状は、環状、環状の一部を切り欠いた形状、及び環状の一部を突出させた形状を含む。第１固定部１１は、駆動源からの駆動力を伝達する伝達部材（回転体）、又は起歪体１を介して駆動力を伝達される操作体（回転体）をボルトにより固定するための複数の開口部１４を有する。以下、第１固定部１１の中心を中心Ｃと称する。 The first fixing portion 11 is a substantially annular portion located outside the strain body 1. The term “substantially annular” used herein includes an annular shape, a shape in which a part of an annular shape is cut out, and a shape in which a part of an annular shape is protruded. The first fixing portion 11 is used to fix, by bolts, a transmission member (rotating body) that transmits a driving force from a driving source, or an operating body (rotating body) that receives a driving force through the strain body 1. It has a plurality of openings 14. Hereinafter, the center of the first fixing portion 11 is referred to as a center C.
　第２固定部１２は、起歪体１の内側に位置する略環状の部分である。第２固定部１２は、第１固定部１１と中心Ｃを共有し、第１固定部１１の内半径（内周の半径）より小さい外半径（外周の半径）を有する。第２固定部１２は、駆動源からの駆動力を伝達する伝達部材、又は起歪体１を介して駆動力を伝達される操作体をボルトにより固定するための複数の開口部１５を有する。第２固定部１２が伝達部材に固定された場合、第１固定部１１は操作体に固定され、第２固定部１２が操作体に固定された場合、第１固定部１１は伝達部材に固定される。また、伝達部材と操作体はＺ方向の異なる面に配置される。なお、第２固定部１２は、略円形に形成されてもよい。ここでいう略円形は、円形、円形の一部を切り欠いた形状、及び円形の一部が突出した形状を含む。 The second fixing portion 12 is a substantially annular portion located inside the strain body 1. The second fixing portion 12 shares the center C with the first fixing portion 11, and has an outer radius (radius of the outer periphery) smaller than the inner radius (radius of the inner periphery) of the first fixing portion 11. The second fixing portion 12 has a plurality of openings 15 for fixing, by bolts, a transmission member for transmitting the driving force from the driving source or an operating body to which the driving force is transmitted via the strain body 1. When the second fixing part 12 is fixed to the transmission member, the first fixing part 11 is fixed to the operating body. When the second fixing part 12 is fixed to the operating body, the first fixing part 11 is fixed to the transmitting member. Is done. The transmission member and the operating body are arranged on different surfaces in the Z direction. Note that the second fixing portion 12 may be formed in a substantially circular shape. The substantially circular shape here includes a circular shape, a shape in which a part of a circle is cut out, and a shape in which a part of a circle is protruded.
　連結部１３は、第１固定部１１と第２固定部１２とを連結する、第２固定部１２の外周から当該外周の接線方向に延びる略矩形の部分である。ここでいう略矩形は、矩形、矩形の一部を切り欠いた形状、及び矩形の一部が突出した形状を含む。連結部１３は、第１固定部１１の内周と第２固定部１２の外周との間に配置され、両端部が第１固定部１１の内周に接続され、中央部が第２固定部１２の外周に接続される。言い換えると、連結部１３は、両端部が第２固定部１２の外周と接続されず、中央部が第１固定部１１の内周と接続されない。このため、連結部１３の両端部と第２固定部１２の外周との間には開口部１６が形成され、連結部１３の中央部と第１固定部１１の内周との間には開口部１７が形成される。 The connecting portion 13 is a substantially rectangular portion that connects the first fixing portion 11 and the second fixing portion 12 and extends from the outer periphery of the second fixing portion 12 in a tangential direction of the outer periphery. The substantially rectangular shape here includes a rectangular shape, a shape in which a part of the rectangle is cut out, and a shape in which a part of the rectangle is protruded. The connecting portion 13 is disposed between the inner periphery of the first fixing portion 11 and the outer periphery of the second fixing portion 12, both ends are connected to the inner periphery of the first fixing portion 11, and the center portion is the second fixing portion. 12 is connected to the outer periphery. In other words, both ends of the connecting portion 13 are not connected to the outer periphery of the second fixing portion 12, and the center portion is not connected to the inner periphery of the first fixing portion 11. Therefore, an opening 16 is formed between both ends of the connecting portion 13 and the outer periphery of the second fixing portion 12, and an opening is formed between the central portion of the connecting portion 13 and the inner periphery of the first fixing portion 11. The part 17 is formed.
　具体的には、連結部１３ａは、Ｙ方向に延びる略矩形の部分であり、Ｙ１側端部が第１固定部１１の内周のＸ２Ｙ１側部分に接続され、Ｙ２側端部が第１固定部１１の内周のＸ２Ｙ２側部分に接続され、中央部が第２固定部１２の外周のＸ２側部分に接続される。連結部１３ａのＹ１側端部と第２固定部１２の外周との間には、開口部１６ａが形成され、連結部１３ａのＹ２側端部と第２固定部１２の外周との間には、開口部１６ｄが形成され、連結部１３ａの中央部と第１固定部１１の内周との間には、開口部１７ａが形成される。 Specifically, the connecting portion 13a is a substantially rectangular portion extending in the Y direction, the Y1 side end is connected to the X2Y1 side portion of the inner periphery of the first fixing portion 11, and the Y2 side end is the first fixing portion. The inner portion of the portion 11 is connected to the X2Y2 side portion, and the central portion is connected to the outer portion of the second fixing portion 12 on the X2 side. An opening 16a is formed between the Y1 side end of the connecting portion 13a and the outer periphery of the second fixing portion 12, and between the Y2 side end of the connecting portion 13a and the outer periphery of the second fixing portion 12. An opening 17d is formed between the central portion of the connecting portion 13a and the inner periphery of the first fixing portion 11.
　連結部１３ｂは、Ｘ方向に延びる略矩形の部分であり、Ｘ１側端部が第１固定部１１の内周のＸ１Ｙ１側部分に接続され、Ｘ２側端部が第１固定部１１の内周のＸ２Ｙ１側部分に接続され、中央部が第２固定部１２の外周のＹ１側部分に接続される。連結部１３ｂのＸ１側端部と第２固定部１２の外周との間には、開口部１６ｂが形成され、連結部１３ｂのＸ２側端部と第２固定部１２の外周との間には、開口部１６ａが形成され、連結部１３ｂの中央部と第１固定部１１の内周との間には、開口部１７ｂが形成される。 The connecting portion 13b is a substantially rectangular portion extending in the X direction, the X1 side end is connected to the X1Y1 side portion of the inner periphery of the first fixing portion 11, and the X2 side end is the inner periphery of the first fixing portion 11. , And the central portion is connected to the Y1 side portion of the outer periphery of the second fixed portion 12. An opening 16b is formed between the X1 end of the connecting portion 13b and the outer periphery of the second fixing portion 12, and an opening 16b is formed between the X2 end of the connecting portion 13b and the outer periphery of the second fixing portion 12. , An opening 16a is formed, and an opening 17b is formed between the central portion of the connecting portion 13b and the inner periphery of the first fixing portion 11.
　連結部１３ｃは、Ｙ方向に延びる略矩形の部分であり、Ｙ１側端部が第１固定部１１の内周のＸ１Ｙ１側部分に接続され、Ｙ２側端部が第１固定部１１の内周のＸ１Ｙ２側部分に接続され、中央部が第２固定部１２の外周のＸ１側部分に接続される。連結部１３ｃのＹ１側端部と第２固定部１２の外周との間には、開口部１６ｂが形成され、連結部１３ｃのＹ２側端部と第２固定部１２の外周との間には、開口部１６ｃが形成され、連結部１３ｃの中央部と第１固定部１１の内周との間には、開口部１７ｃが形成される。 The connecting portion 13c is a substantially rectangular portion extending in the Y direction. The Y1 side end is connected to the X1Y1 side portion of the inner periphery of the first fixed portion 11, and the Y2 side end is the inner periphery of the first fixed portion 11. , And a central portion thereof is connected to the X1 side portion of the outer periphery of the second fixing portion 12. An opening 16b is formed between the Y1 side end of the connecting portion 13c and the outer periphery of the second fixing portion 12, and between the Y2 side end of the connecting portion 13c and the outer periphery of the second fixing portion 12. , An opening 16c is formed, and an opening 17c is formed between the central portion of the connecting portion 13c and the inner periphery of the first fixing portion 11.
　連結部１３ｄは、Ｘ方向に延びる略矩形の部分であり、Ｘ１側端部が第１固定部１１の内周のＸ１Ｙ２側部分に接続され、Ｘ２側端部が第１固定部１１の内周のＸ２Ｙ２側部分に接続され、中央部が第２固定部１２の外周のＹ２側部分に接続される。連結部１３ｄのＸ１側端部と第２固定部１２の外周との間には、開口部１６ｃが形成され、連結部１３ｄのＸ２側端部と第２固定部１２の外周との間には、開口部１６ｄが形成され、連結部１３ｄの中央部と第１固定部１１の内周との間には、開口部１７ｄが形成される。 The connecting portion 13d is a substantially rectangular portion extending in the X direction, and the X1 side end is connected to the X1Y2 side portion of the inner periphery of the first fixing portion 11, and the X2 side end is the inner periphery of the first fixing portion 11. , And a central portion thereof is connected to the Y2 side portion of the outer periphery of the second fixing portion 12. An opening 16c is formed between the X1 end of the connecting portion 13d and the outer periphery of the second fixing portion 12, and an opening 16c is formed between the X2 end of the connecting portion 13d and the outer periphery of the second fixing portion 12. An opening 17d is formed between the center of the connecting portion 13d and the inner periphery of the first fixing portion 11.
　第１固定部１１又は第２固定部１２に固定された伝達部材（回転体）が回転すると、当該回転により起歪体１を介して操作体（回転体）も回転し、回転体間に加わるトルクに応じて連結部１３が歪む。本実施形態によれば、連結部１３の歪みは、連結部１３の側面（Ｚ方向と平行な面）ではなく、連結部１３の両端部の表面（Ｚ方向と垂直な面）（第１面）で最大となる。ここでいう表面は、上面及び下面を含む。 When the transmission member (rotary body) fixed to the first fixed part 11 or the second fixed part 12 rotates, the rotation also rotates the operation body (rotary body) via the strain generating element 1 and is applied between the rotary bodies. The connecting portion 13 is distorted according to the torque. According to the present embodiment, the distortion of the connecting portion 13 is caused not by the side surface (the surface parallel to the Z direction) of the connecting portion 13 but by the surfaces at both ends of the connecting portion 13 (the surface perpendicular to the Z direction) (the first surface). ). The surface mentioned here includes an upper surface and a lower surface.
　したがって、本実施形態によれば、連結部１３の両端部の表面に歪ゲージ３を配置し、当該歪ゲージ３により連結部１３の歪みを検出することにより、トルクセンサ１００は、精度よくトルクを検出することができる。また、歪ゲージ３を連結部１３の両端部の表面に配置することは容易であるため、トルクセンサ１００を容易に組み立てることができる。 Therefore, according to the present embodiment, by disposing the strain gauges 3 on the surfaces of both ends of the connecting portion 13 and detecting the strain of the connecting portion 13 by the strain gauges 3, the torque sensor 100 can accurately output the torque. Can be detected. Further, since it is easy to dispose the strain gauges 3 on the surfaces of both ends of the connecting portion 13, the torque sensor 100 can be easily assembled.
　また、本実施形態によれば、図３に示すように、４つの連結部１３は、第２固定部１２の周囲に正方形状に配置されている。言い換えると、４つの連結部１３は、第２固定部１２の周囲に等間隔に配置されている。このように、４つの連結部１３を等間隔に配置することにより、各連結部１３の歪みを均一化し、連結部１３の歪みに基づくトルクの検出精度をさらに高めることができる。 According to the present embodiment, as shown in FIG. 3, the four connecting portions 13 are arranged in a square around the second fixing portion 12. In other words, the four connecting portions 13 are arranged at equal intervals around the second fixing portion 12. Thus, by arranging the four connecting portions 13 at equal intervals, the distortion of each connecting portion 13 can be made uniform, and the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased.
　なお、連結部１３の数、形状、及び配置は、図３の例に限られない。例えば、起歪体１は、２つ、３つ、又は４つ以上の連結部１３を有してもよい。また、連結部１３は、湾曲した形状を有してもよいし、非等間隔に配置されてもよい。また、連結部１３が変形可能であれば、第１固定部１１及び第２固定部１２は変形しない材質でもよく、その場合には両者が一体的に挙動するように別の部材を一体化して起歪体１を形成する。 数 Note that the number, shape, and arrangement of the connecting portions 13 are not limited to the example of FIG. For example, the strain body 1 may have two, three, or four or more connecting portions 13. In addition, the connecting portions 13 may have a curved shape or may be arranged at unequal intervals. Further, if the connecting portion 13 is deformable, the first fixing portion 11 and the second fixing portion 12 may be made of a material that does not deform. In that case, another member is integrated so that both behave integrally. The strain body 1 is formed.
　絶縁層２は、起歪体１上に設けられた絶縁性の層であり、表面にプリント配線を形成される。絶縁層２は、起歪体１上に、少なくとも連結部１３を覆うように配置される。図１の例では、絶縁層２は、接着剤により起歪体１に固定されたプリント基板を想定しているが、起歪体１上に形成された酸化膜、窒化膜、又は樹脂製の絶縁膜であってもよい。プリント基板は、フレキシブル基板及びリジッド基板を含む。いずれの場合も、絶縁層２は、連結部１３の歪みに応じて歪むように、連結部１３に固定される。また、起歪体１は少なくとも、その表面が絶縁性であって歪ゲージ３がショーティングせずに配置できれば足りるので、起歪体１自体がプリント基板又は合成樹脂により形成されてもよい。この場合、起歪体１が絶縁層２の役割を果たす。なお、絶縁層２は、図１の例のように、第１固定部１１と第２固定部１２との間の全体を覆うように形成されるのが好ましい。これにより、絶縁層２の面積が大きくなるため、回路設計の自由度を向上させることができる。絶縁層２が配置される面の第２固定部１２にボルトにより回転体が固定される。 The insulating layer 2 is an insulating layer provided on the strain body 1 and has a printed wiring formed on the surface. The insulating layer 2 is disposed on the flexure element 1 so as to cover at least the connecting portion 13. In the example of FIG. 1, the insulating layer 2 is assumed to be a printed circuit board fixed to the strain body 1 with an adhesive, but an oxide film, a nitride film, or a resin film formed on the strain body 1 is assumed. It may be an insulating film. Printed circuit boards include flexible boards and rigid boards. In any case, the insulating layer 2 is fixed to the connecting part 13 so as to be distorted in accordance with the distortion of the connecting part 13. Further, since it is sufficient that at least the surface of the strain body 1 is insulative and the strain gauge 3 can be arranged without shorting, the strain body 1 itself may be formed of a printed board or a synthetic resin. In this case, the strain body 1 plays the role of the insulating layer 2. Note that the insulating layer 2 is preferably formed so as to cover the entire area between the first fixing part 11 and the second fixing part 12, as in the example of FIG. As a result, the area of the insulating layer 2 increases, so that the degree of freedom in circuit design can be improved. The rotating body is fixed to the second fixing portion 12 on the surface on which the insulating layer 2 is arranged by a bolt.
　歪ゲージ３は、変形に応じて抵抗値が変化する素子である。歪ゲージ３は、絶縁層２上に実装され、絶縁層２における連結部１３の両端部に対応する位置に配置される。すなわち、歪ゲージ３は、連結部１３の両端部に配置される。具体的には、歪ゲージ３ａは連結部１３ａのＹ１側端部に配置され、歪ゲージ３ｂは連結部１３ｂのＸ２側端部に配置され、歪ゲージ３ｃは連結部１３ｂのＸ１側端部に配置され、歪ゲージ３ｄは連結部１３ｃのＹ１側端部に配置され、歪ゲージ３ｅは連結部１３ｃのＹ２側端部に配置され、歪ゲージ３ｆは連結部１３ｄのＸ１側端部に配置され、歪ゲージ３ｇは連結部１３ｄのＸ２側端部に配置され、歪ゲージ３ｈは連結部１３ａのＹ２側端部に配置される。 The strain gauge 3 is an element whose resistance value changes according to deformation. The strain gauges 3 are mounted on the insulating layer 2 and arranged at positions corresponding to both ends of the connecting portion 13 in the insulating layer 2. That is, the strain gauges 3 are arranged at both ends of the connecting portion 13. Specifically, the strain gauge 3a is disposed at the Y1 end of the connecting portion 13a, the strain gauge 3b is disposed at the X2 end of the connecting portion 13b, and the strain gauge 3c is disposed at the X1 end of the connecting portion 13b. The strain gauge 3d is arranged at the Y1 end of the connecting portion 13c, the strain gauge 3e is arranged at the Y2 end of the connecting portion 13c, and the strain gauge 3f is arranged at the X1 end of the connecting portion 13d. The strain gauge 3g is arranged at the X2 end of the connecting part 13d, and the strain gauge 3h is arranged at the Y2 end of the connecting part 13a.
　このような構成により、回転体の回転により連結部１３が歪むと、絶縁層２が歪み、歪ゲージ３が変形し、歪ゲージ３の抵抗値が変化する。トルクセンサ１００は、当該抵抗値の変化に基づいて、トルクを検出することができる。 に よ り With such a configuration, when the connecting portion 13 is distorted by rotation of the rotating body, the insulating layer 2 is distorted, the strain gauge 3 is deformed, and the resistance value of the strain gauge 3 changes. The torque sensor 100 can detect the torque based on the change in the resistance value.
　ここで、絶縁層２上に形成される歪ゲージ３の回路構成について、図４を参照して説明する。図４は、絶縁層２上の歪ゲージ３を回路部品（図示省略）に接続した回路構成の一例を示す図である。図４に示すように、該回路は、歪ゲージ３ａ～３ｈと、固定抵抗Ｒａ～Ｒｈと、スイッチ回路２１と、増幅回路２２と、ＡＤコンバータ２３と、判定回路２４と、を備える。 Here, the circuit configuration of the strain gauge 3 formed on the insulating layer 2 will be described with reference to FIG. FIG. 4 is a diagram showing an example of a circuit configuration in which the strain gauge 3 on the insulating layer 2 is connected to a circuit component (not shown). As shown in FIG. 4, the circuit includes strain gauges 3a to 3h, fixed resistors Ra to Rh, a switch circuit 21, an amplifier circuit 22, an AD converter 23, and a determination circuit 24.
　歪ゲージ３ａと固定抵抗Ｒａとは、電源とグラウンドとの間に直列に接続される。歪ゲージ３ｂ～３ｈ及び固定抵抗Ｒｂ～Ｒｈについても同様である。図４に示すように、歪ゲージ３ａは、可変抵抗として機能する。 The strain gauge 3a and the fixed resistor Ra are connected in series between the power supply and the ground. The same applies to the strain gauges 3b to 3h and the fixed resistors Rb to Rh. As shown in FIG. 4, the strain gauge 3a functions as a variable resistor.
　スイッチ回路２１は、歪ゲージ３と固定抵抗Ｒとの間の電圧をそれぞれ入力され、入力された電圧のいずれか１つを出力する。スイッチ回路２１が出力する電圧は、ＡＤコンバータ２３から入力されるチャネル切替指示により制御される。スイッチ回路２１が出力した電圧は、増幅回路２２に入力される。 The switch circuit 21 receives a voltage between the strain gauge 3 and the fixed resistor R, and outputs any one of the input voltages. The voltage output from the switch circuit 21 is controlled by a channel switching instruction input from the AD converter 23. The voltage output from the switch circuit 21 is input to the amplifier circuit 22.
　増幅回路２２は、スイッチ回路２１から入力された電圧を増幅して出力する。増幅回路２２が出力した電圧は、ＡＤコンバータ２３に入力される。 (4) The amplifier circuit 22 amplifies and outputs the voltage input from the switch circuit 21. The voltage output from the amplifier circuit 22 is input to the AD converter 23.
　ＡＤコンバータ２３は、増幅回路２２から入力された電圧をＡＤ変換し、得られた電圧値Ｖ（デジタル値）を出力する。また、ＡＤコンバータ２３は、スイッチ回路２１に出力電圧の切り替えを支持するチャネル切替指示を出力する。ＡＤコンバータ２３が出力した電圧値Ｖは判定回路２４に入力される。 The AD converter 23 AD-converts the voltage input from the amplifier circuit 22 and outputs the obtained voltage value V (digital value). Further, the AD converter 23 outputs to the switch circuit 21 a channel switching instruction for supporting the switching of the output voltage. The voltage value V output from the AD converter 23 is input to the determination circuit 24.
　判定回路２４は、ＡＤコンバータ２３から入力された電圧値Ｖに基づいて、起歪体１に加わったトルクを判定（検出）する。判定回路２４には、ＡＤコンバータ２３から、歪ゲージ３ａ～３ｈの抵抗値にそれぞれ対応する電圧値Ｖａ～Ｖｈが順次入力される。判定回路２４は、電圧値Ｖａ～Ｖｈに基づいて、トルクを算出することができる。例えば、トルクは、以下の式により算出される。 The determination circuit 24 determines (detects) the torque applied to the flexure element 1 based on the voltage value V input from the AD converter 23. The voltage values Va to Vh corresponding to the resistance values of the strain gauges 3a to 3h are sequentially input from the AD converter 23 to the determination circuit 24. The determination circuit 24 can calculate the torque based on the voltage values Va to Vh. For example, the torque is calculated by the following equation.
　Ｔ＝ｋ×｛（Ｖａ－Ｖｈ）＋（Ｖｃ－Ｖｂ）＋（Ｖｅ－Ｖｄ）＋（Ｖｇ－Ｖｆ）｝・・・（１） {T = k × {(Va−Vh) + (Vc−Vb) + (Ve−Vd) + (Vg−Vf)} (1)
　式（１）において、Ｔはトルク、ｋは予め設定された係数である。式（１）では、各連結部１３における、回転方向の一方側に配置された歪ゲージ３ａ，３ｃ，３ｅ，３ｇに対応する電圧値Ｖａ，Ｖｃ，Ｖｅ，Ｖｇと、回転方向の他方側に配置された歪ゲージ３ｂ，３ｄ，３ｆ，３ｈに対応する電圧値Ｖｂ，Ｖｄ，Ｖｆ，Ｖｈと、の差を合計している。理由は、以下の通りである。 In equation (1), T is a torque, and k is a preset coefficient. In the equation (1), the voltage values Va, Vc, Ve, and Vg corresponding to the strain gauges 3a, 3c, 3e, and 3g disposed on one side in the rotation direction of each connecting portion 13 and the voltage values Va, Vc, Ve, and Vg on the other side in the rotation direction. The differences between the voltage values Vb, Vd, Vf and Vh corresponding to the arranged strain gauges 3b, 3d, 3f and 3h are totaled. The reason is as follows.
　本実施形態では、起歪体１にトルクが加わると、連結部１３の両端部が逆向きに歪む。すなわち、連結部１３は、一方の端部が縮むと同時に、他方の端部が伸びる。このため、起歪体１にトルクが加わると、同じ連結部１３の両端部に配置された２つの歪ゲージ３に対応する電圧値Ｖは、一方が大きくなり、他方が小さくなる。したがって、同じ連結部１３に配置された２つの歪ゲージ３に対応する電圧値Ｖを合計すると、トルクに応じた電圧値Ｖの変化が相殺されてしまう。そこで、式（１）では、トルクに応じた電圧値Ｖの変化が相殺されないように、各連結部１３における、回転方向の一方側に配置された歪ゲージ３ａ，３ｃ，３ｅ，３ｇに対応する電圧値Ｖａ，Ｖｃ，Ｖｅ，Ｖｇと、回転方向の他方側に配置された歪ゲージ３ｂ，３ｄ，３ｆ，３ｈに対応する電圧値Ｖｂ，Ｖｄ，Ｖｆ，Ｖｈと、の差を合計している。これにより、トルクに応じた電圧値Ｖａ～Ｖｈの変化量を合計し、当該変化量を合計に応じたトルクを算出することができる。 In the present embodiment, when torque is applied to the flexure element 1, both ends of the connecting portion 13 are distorted in the opposite direction. That is, one end of the connecting portion 13 contracts, and at the same time, the other end extends. For this reason, when torque is applied to the flexure element 1, one of the voltage values V corresponding to the two strain gauges 3 arranged at both ends of the same connecting portion 13 increases, and the other decreases. Therefore, when the voltage values V corresponding to the two strain gauges 3 arranged on the same connecting portion 13 are summed, a change in the voltage value V according to the torque is canceled. Therefore, in the equation (1), the strain gauges 3a, 3c, 3e, and 3g disposed on one side in the rotation direction in each connecting portion 13 so that the change in the voltage value V according to the torque is not offset. The differences between the voltage values Va, Vc, Ve, Vg and the voltage values Vb, Vd, Vf, Vh corresponding to the strain gauges 3b, 3d, 3f, 3h arranged on the other side in the rotation direction are totaled. . Thus, the amounts of change in the voltage values Va to Vh according to the torque are summed, and the torque according to the sum of the changes can be calculated.
　また、判定回路２４は、電圧値Ｖａ～Ｖｈに基づいて、起歪体１に加わった力がトルクであるか、それ以外の力（ねじれ荷重や回転軸方向の荷重）であるか、を判定してもよい。例えば、判定回路２４は、回転方向に１つおきに配置された４つの歪ゲージ３ａ，３ｃ，３ｅ，３ｇに対応する電圧値Ｖａ，Ｖｃ，Ｖｅ，Ｖｇの差が所定範囲内である場合、起歪体１に加わった力がトルクであると判定し、当該差異が所定範囲外である場合、起歪体１に加わった力がトルクでないと判定すればよい。このような判定を行うことにより、判定回路２４は、起歪体１に加わった力がトルクであると判定した場合のみ、トルクを算出し、出力することができる。 Further, the determination circuit 24 determines whether the force applied to the flexure element 1 is a torque or any other force (a torsional load or a load in the rotation axis direction) based on the voltage values Va to Vh. May be. For example, when the difference between the voltage values Va, Vc, Ve, and Vg corresponding to the four strain gauges 3a, 3c, 3e, and 3g arranged in every other direction in the rotation direction is within a predetermined range, It is determined that the force applied to the flexure element 1 is torque, and if the difference is out of the predetermined range, it may be determined that the force applied to the flexure element 1 is not torque. By making such a determination, the determination circuit 24 can calculate and output the torque only when it is determined that the force applied to the flexure element 1 is a torque.
　なお、絶縁層２上に、歪ゲージ３、固定抵抗Ｒ、スイッチ回路２１、増幅回路２２、ＡＤコンバータ２３、及び判定回路２４が実装されても良い。 The strain gauge 3, the fixed resistor R, the switch circuit 21, the amplifier circuit 22, the AD converter 23, and the determination circuit 24 may be mounted on the insulating layer 2.
　以上説明した通り、本実施形態によれば、連結部１３は、両端部が第１固定部１１の内周に接続され、中央部が第２固定部１２の外周に接続される。このような構成により、起歪体１にトルクが加わった際に、連結部１３の両端部の表面で歪みが最大となるようにすることができる。したがって、連結部１３の両端部の表面に歪ゲージ３を配置することにより、トルクを精度よく検出可能なトルクセンサ１００を実現できる。また、歪ゲージ３を連結部１３の両端部の表面に配置することは容易であるため、組み立てが容易なトルクセンサ１００を実現できる。結果として、組み立てが容易であり、かつ、トルクを精度よく検出できるトルクセンサ１００を実現できる。 As described above, according to the present embodiment, both ends of the connecting portion 13 are connected to the inner periphery of the first fixing portion 11, and the center portion is connected to the outer periphery of the second fixing portion 12. With such a configuration, when a torque is applied to the flexure element 1, it is possible to maximize the distortion on the surfaces of both ends of the connecting portion 13. Therefore, by arranging the strain gauges 3 on the surfaces of both ends of the connecting portion 13, it is possible to realize the torque sensor 100 capable of accurately detecting torque. Further, since it is easy to dispose the strain gauges 3 on the surfaces of both ends of the connecting portion 13, the torque sensor 100 that can be easily assembled can be realized. As a result, the torque sensor 100 that is easy to assemble and that can accurately detect the torque can be realized.
　また、本実施形態によれば、開口部１６，１７によって、回転力が加わる周方向に長さが長い略棒状の連結部１３が形成されて、その形成方向に伸ばす力と圧縮するの力とが加わり、当該力を歪ゲージ３で測定することとなる。よって、径方向に延びて形成されて、その方向の側面に力が加わる従来の連結部に比べて、連結部１３の変形量を少なくし、大きなトルクを測定することができる。これにより、起歪体１を小型化、軽量化、及び薄型化することができる。なお、歪ゲージ３が設けられる連結部１３が周方向に形成されるので、径方向に形成される従来例に比べて、径寸法を抑えることもできる。 Further, according to the present embodiment, the opening portions 16 and 17 form the substantially rod-shaped connecting portion 13 having a long length in the circumferential direction to which the rotational force is applied. Is added, and the force is measured by the strain gauge 3. Therefore, compared to a conventional connecting portion formed so as to extend in the radial direction and apply a force to the side surface in that direction, the amount of deformation of the connecting portion 13 can be reduced, and a large torque can be measured. Thus, the strain body 1 can be reduced in size, weight, and thickness. In addition, since the connecting portion 13 provided with the strain gauge 3 is formed in the circumferential direction, the diameter can be reduced as compared with the conventional example formed in the radial direction.
　ここで、図５は、起歪体１の第１の変形例を示す平面図である。第１の変形例では、連結部１３の両端部が中央部より細く形成されている。具体的には、Ｙ方向に延びる連結部１３ａ，１３ｃは、両端部のＸ方向の寸法が、中央部のＸ方向の寸法より小さく形成されている。また、Ｘ方向に延びる連結部１３ｂ，１３ｄは、両端部のＹ方向の寸法が、中央部のＹ方向の寸法より小さく形成されている。このような構成により、連結部１３の歪みが、より両端部に集中するため、トルクに応じた連結部１３の両端部の歪みが大きくなる。したがって、連結部１３の歪みに基づくトルクの検出精度をさらに高めることができる。 Here, FIG. 5 is a plan view showing a first modification of the flexure element 1. In the first modification, both end portions of the connecting portion 13 are formed thinner than the central portion. Specifically, the connecting portions 13a and 13c extending in the Y direction are formed such that the X-direction dimensions at both ends are smaller than the X-direction dimensions at the central portion. The connecting portions 13b and 13d extending in the X direction are formed such that the dimension in the Y direction at both ends is smaller than the dimension in the Y direction at the central portion. With such a configuration, since the distortion of the connecting portion 13 is more concentrated on both ends, the distortion of both ends of the connecting portion 13 according to the torque increases. Therefore, the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased.
　図６は、起歪体１の第２の変形例を示す斜視図である。第２の変形例では、連結部１３は、第１固定部１１及び第２固定部１２より薄く形成されている。すなわち、連結部１３は、Ｚ方向の寸法が、第１固定部１１及び第２固定部１２のＺ方向の寸法より小さく形成されている。このような構成により、トルクに応じた連結部１３の歪みがより大きくなる。したがって、連結部１３の歪みに基づくトルクの検出精度をさらに高めることができる。なお、図６の例では、連結部１３のＺ１側の面を低くすることにより連結部１３を薄くする場合を想定しているが、連結部１３のＺ２側の面を高くすることにより連結部１３を薄くしてもよい。また、連結部１３のＺ１側の面を低くし、連結部１３のＺ２側の面を高くすることにより、連結部１３を薄くしてもよい。 FIG. 6 is a perspective view showing a second modification of the flexure element 1. In the second modification, the connecting portion 13 is formed thinner than the first fixing portion 11 and the second fixing portion 12. That is, the connecting portion 13 is formed such that the dimension in the Z direction is smaller than the dimension of the first fixing portion 11 and the second fixing portion 12 in the Z direction. With such a configuration, the distortion of the connecting portion 13 according to the torque is further increased. Therefore, the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased. In the example of FIG. 6, it is assumed that the connecting portion 13 is made thinner by lowering the surface of the connecting portion 13 on the Z1 side, but the connecting portion 13 is made higher by increasing the surface of the connecting portion 13 on the Z2 side. 13 may be made thinner. Alternatively, the connecting portion 13 may be thinned by lowering the surface of the connecting portion 13 on the Z1 side and increasing the height of the connecting portion 13 on the Z2 side.
　図７は、起歪体１の第３の変形例を示す平面図である。第３の変形例では、起歪体１に８つの連結部１３ａ～１３ｈが設けられている。８つの連結部１３は、第２固定部１２の周囲に正八角形状に配置されている。言い換えると、８つの連結部１３は、第２固定部１２の周囲に等間隔に配置されている。このように、８つの連結部１３を等間隔に配置することにより、各連結部１３の歪みを均一化し、連結部１３の歪みに基づくトルクの検出精度をさらに高めることができる。なお、起歪体１がＮ個（Ｎ≧３）の連結部１３を有する場合、Ｎ個の連結部１３が正Ｎ角形状（正多角形状）となるように、Ｎ個の連結部１３を等間隔に配置すればよい。また、起歪体１が２つの連結部１３を有する場合、２つの連結部１３が対向した位置で平行になるように、２つの連結部１３を等間隔に配置すればよい。いずれの場合も、各連結部１３の歪みを均一化し、連結部１３の歪みに基づくトルクの検出精度をさらに高めることができる。 FIG. 7 is a plan view showing a third modification of the flexure element 1. In the third modification, eight connecting portions 13a to 13h are provided on the strain body 1. The eight connecting portions 13 are arranged in a regular octagon around the second fixing portion 12. In other words, the eight connecting portions 13 are arranged at equal intervals around the second fixing portion 12. By arranging the eight connecting portions 13 at equal intervals in this manner, the distortion of each connecting portion 13 can be made uniform, and the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased. When the flexure element 1 has N (N ≧ 3) connecting portions 13, the N connecting portions 13 are formed such that the N connecting portions 13 have a regular N-gon shape (regular polygonal shape). What is necessary is just to arrange | position at equal intervals. In addition, when the strain body 1 has two connecting portions 13, the two connecting portions 13 may be arranged at equal intervals so that the two connecting portions 13 are parallel at opposing positions. In any case, the distortion of each connecting portion 13 can be made uniform, and the accuracy of torque detection based on the distortion of the connecting portion 13 can be further increased.
　また、上記実施形態に挙げた構成等に、その他の要素との組み合わせなど、ここで示した構成に本発明が限定されるものではない。これらの点に関しては、本発明の趣旨を逸脱しない範囲で変更可能であり、その応用形態に応じて適切に定めることができる。 The present invention is not limited to the configuration shown here, such as a combination of the configuration described in the above embodiment with other elements. These points can be changed without departing from the spirit of the present invention, and can be appropriately determined according to the application form.
　（他の実施形態）
　他の実施形態に係るトルクセンサ１００Ａは、起歪体１１０の上面側に設けられた複数の歪ゲージ１２２Ｄと、起歪体１１０の下面側に設けられた複数の歪ゲージ１２４Ｄとを備える。すなわち、他の実施形態に係るトルクセンサ１００Ａは、複数の歪ゲージが、起歪体１１０の上面側と下面側とに二重に設けられている。トルクセンサ１００Ａは、複数の歪ゲージ１２２Ｄ，１２４Ｄを利用して起歪体１１０の歪みを検出することにより、起歪体１１０に加えられたトルクを検出することができる。 (Other embodiments)
A torque sensor 100 </ b> A according to another embodiment includes a plurality of strain gauges 122 </ b> D provided on the upper surface side of the strain body 110 and a plurality of strain gauges 124 </ b> D provided on the lower surface side of the strain body 110. That is, in the torque sensor 100 </ b> A according to another embodiment, a plurality of strain gauges are provided double on the upper surface side and the lower surface side of the strain body 110. The torque sensor 100A can detect the torque applied to the flexure element 110 by detecting the strain of the flexure element 110 using the plurality of strain gauges 122D and 124D.
　図８は、他の実施形態に係るトルクセンサ１００Ａの外観斜視図である。図９は、他の実施形態に係るトルクセンサ１００Ａの分解斜視図である。図１０は、他の実施形態に係るトルクセンサ１００Ａ（回路基板１３０が取り外された状態）の外観斜視図である。図１１は、他の実施形態に係るトルクセンサ１００Ａが備える起歪体１１０の平面図である。図１１では、起歪体１１０の上面に対して、複数の歪ゲージ１２２Ｄを重ねて示すことで、起歪体１１０の上面における複数の歪ゲージ１２２Ｄの配置位置を表している。図１２は、他の実施形態に係るトルクセンサ１００Ａの底面図である。図１２では、起歪体１１０の下面に対して、複数の歪ゲージ１２４Ｄを重ねて示すことで、起歪体１１０の下面における複数の歪ゲージ１２４Ｄの配置位置を表している。 FIG. 8 is an external perspective view of a torque sensor 100A according to another embodiment. FIG. 9 is an exploded perspective view of a torque sensor 100A according to another embodiment. FIG. 10 is an external perspective view of a torque sensor 100A (in a state where the circuit board 130 is removed) according to another embodiment. FIG. 11 is a plan view of a strain body 110 provided in a torque sensor 100A according to another embodiment. In FIG. 11, the plurality of strain gauges 122 </ b> D are superimposed on the upper surface of the flexure element 110 to indicate the arrangement positions of the plurality of strain gauges 122 </ b> D on the upper face of the flexure element 110. FIG. 12 is a bottom view of a torque sensor 100A according to another embodiment. In FIG. 12, a plurality of strain gauges 124D are superimposed on the lower surface of the flexure element 110 to indicate the arrangement positions of the plurality of strain gauges 124D on the lower face of the flexure element 110.
　図９に示すように、トルクセンサ１００Ａは、上方から順に、回路基板１３０、センサ基板１２２、起歪体１１０、およびセンサ基板１２４を備えて構成されている。 As shown in FIG. 9, the torque sensor 100A includes a circuit board 130, a sensor board 122, a strain body 110, and a sensor board 124 in this order from the top.
　起歪体１１０は、回転体の回転によりトルクが加えられる円盤状の部材である。起歪体１１０は、例えば、アルミなどの金属により形成される。図１１に示すように、起歪体１１０は、第１固定部１１１、第２固定部１１２、および複数の連結部１１３を有する。 The strain body 110 is a disk-shaped member to which torque is applied by rotation of the rotating body. The strain body 110 is formed of, for example, a metal such as aluminum. As shown in FIG. 11, the flexure element 110 has a first fixing part 111, a second fixing part 112, and a plurality of connecting parts 113.
　第１固定部１１１は、起歪体１１０の最も外側に位置する環状の部分である。第２固定部１１２は、第１固定部１１１の内側に位置する円形状の部分である。第２固定部１１２は、第１固定部１１１と中心Ｃを共有し、第１固定部１１１の内径よりも小さい外径を有する。 The first fixing portion 111 is an annular portion located on the outermost side of the strain body 110. The second fixing part 112 is a circular part located inside the first fixing part 111. The second fixing part 112 shares the center C with the first fixing part 111 and has an outer diameter smaller than the inner diameter of the first fixing part 111.
　第１固定部１１１および第２固定部１１２の一方には、駆動源からの駆動力を伝達する伝達部材がボルトによって固定される。第１固定部１１１および第２固定部１１２の他方には、起歪体１１０を介して駆動力が伝達される操作体がボルトによって固定される。 伝 達 A transmission member for transmitting a driving force from a driving source is fixed to one of the first fixing portion 111 and the second fixing portion 112 by a bolt. An operating body to which the driving force is transmitted via the strain body 110 is fixed to the other of the first fixing portion 111 and the second fixing portion 112 by a bolt.
　複数の連結部１１３は、第１固定部１１１と第２固定部１１２との間において、同一円周上に並べて設けられており、第１固定部１１１と第２固定部１１２とを連結する。複数の連結部１１３の各々は、張出し部１１３ａおよび梁部１１３ｂを有して構成されている。 The plurality of connecting portions 113 are provided side by side on the same circumference between the first fixing portion 111 and the second fixing portion 112, and connect the first fixing portion 111 and the second fixing portion 112. Each of the plurality of connecting portions 113 includes an overhang portion 113a and a beam portion 113b.
　張出し部１１３ａは、第１固定部１１１から第２固定部１１２側に半径方向に延びる部分である。張出し部１１３ａは、両端部から中間部分に向って徐々に幅が狭まる形状を有している。 The overhang portion 113a is a portion extending in the radial direction from the first fixing portion 111 to the second fixing portion 112 side. The overhang portion 113a has a shape whose width gradually decreases from both end portions toward the middle portion.
　梁部１１３ｂは、張出し部１１３の第２固定部１１２側の端部から、周方向に延びる部分である。梁部１１３ｂは、その中間の第２固定部１１２に対向する部分において、第２固定部１１２の外周と繋がっている。梁部１１３ｂの中間部における第１固定部１１１側には、前述した一実施形態の開口部１７に相当する開口部１１７が形成される。 The beam 113b is a portion extending in the circumferential direction from the end of the overhang 113 on the second fixing portion 112 side. The beam portion 113b is connected to the outer periphery of the second fixing portion 112 at a portion facing the second fixing portion 112 in the middle. An opening 117 corresponding to the opening 17 of the above-described embodiment is formed on the first fixing portion 111 side in the middle of the beam 113b.
　また、隣り合う２つの梁部１１３ｂと第２固定部１１２との間には、前述した一実施形態の開口部１６に相当する開口部１１６が形成される。すなわち、他の実施形態における連結部１１３は、張出し部１１３ａが設けられていて、第１固定部１１１の一部として機能する点が、前述した一の実施形態と異なる。 開口 Also, an opening 116 corresponding to the opening 16 of the above-described embodiment is formed between two adjacent beam portions 113b and the second fixing portion 112. That is, the connecting portion 113 in the other embodiment is different from the first embodiment in that the overhang portion 113a is provided and functions as a part of the first fixing portion 111.
　なお、隣り合う２つの連結部１１３の端部を一体化して張出し部１１３ａが形成されていると見る事もできる。そして、連結部１１３は張出し部１１３ａから第２固定部１１２側の端部で、２つの分岐路に分岐して、略Ｙ字形状を有している。 In addition, it can be seen that the overhang portion 113a is formed by integrating the ends of the two adjacent connection portions 113. The connecting portion 113 is branched from the overhang portion 113a into two branch paths at the end on the second fixing portion 112 side, and has a substantially Y-shape.
　そして、図１１に示すように、梁部１１３ｂの両端部の各々の上面には、センサ基板１２２に設けられた歪ゲージ１２２Ｄが配置される。また、図１２に示すように、梁部１１３ｂの両端部の各々の下面には、センサ基板１２４に設けられた歪ゲージ１２４Ｄが配置される。連結部１１３において、梁部１１３ｂは、その他の部分よりも幅が狭くなっているため、その他の部分よりも歪みが生じ易くなっている。このため、他の実施形態に係るトルクセンサ１００Ａは、歪ゲージ１２２Ｄ，１２４Ｄによって梁部１１３ｂの歪みを検出することで、起歪体１１０に加わったトルクをより高精度に検出することができる。なお、起歪体１１０に対して一の回転方向にトルクが加わったとき、梁部１１３ｂのうちの一方は、伸びる方向に歪みが生じ、他方は、縮む方向に歪みが生じる。したがって、梁部１１３ｂ一方の端部に設けられた歪みゲージと、他方の端部に設けられた歪みゲージとでは、検出値の極性が異なるものとなる。連結部１１３は、厚さ方向（Ｚ軸方向）では同じ形状であり、歪ゲージ１２２Ｄ，１２４Ｄは、上下面の対向する位置に配置されているので、トルクをトルクセンサ１００Ａに加えると、対向する位置の歪ゲージ１２２Ｄ，１２４Ｄには同じ歪みが加わる。 Then, as shown in FIG. 11, strain gauges 122D provided on the sensor substrate 122 are disposed on the upper surfaces of both ends of the beam 113b. As shown in FIG. 12, strain gauges 124D provided on the sensor substrate 124 are disposed on the lower surfaces of both ends of the beam 113b. In the connecting portion 113, since the width of the beam portion 113b is smaller than that of the other portion, the beam portion 113b is more likely to be distorted than the other portion. For this reason, the torque sensor 100A according to another embodiment can more accurately detect the torque applied to the strain body 110 by detecting the strain of the beam 113b by the strain gauges 122D and 124D. When a torque is applied to the flexure element 110 in one rotation direction, one of the beam portions 113b is distorted in the direction of extension, and the other is distorted in the direction of contraction. Therefore, the polarity of the detected value is different between the strain gauge provided at one end of the beam 113b and the strain gauge provided at the other end. The connecting portion 113 has the same shape in the thickness direction (Z-axis direction), and since the strain gauges 122D and 124D are arranged at opposing positions on the upper and lower surfaces, when the torque is applied to the torque sensor 100A, they oppose each other. The same strain is applied to the strain gauges 122D and 124D at the positions.
　センサ基板１２２，１２４は、複数の歪ゲージ１２２Ｄ，１２４Ｄが実装されるフィルム状の部材である。センサ基板１２２は、「第１のセンサ基板」の一例であり、起歪体１１０の上面（「一方の面」の一例）に重ねて設けられる。センサ基板１２４は、「第２のセンサ基板」の一例であり、起歪体１１０の下面（「他方の面」の一例）に重ねて設けられる。センサ基板１２２，１２４としては、例えば、フレキシブル基板が用いられる。センサ基板１２２，１２４は、接着剤により、起歪体１１０に貼り付けられる。 The sensor boards 122 and 124 are film-like members on which the plurality of strain gauges 122D and 124D are mounted. The sensor substrate 122 is an example of a “first sensor substrate”, and is provided so as to overlap the upper surface of the strain body 110 (an example of “one surface”). The sensor substrate 124 is an example of a “second sensor substrate”, and is provided on the lower surface of the strain body 110 (an example of the “other surface”). As the sensor substrates 122 and 124, for example, flexible substrates are used. The sensor substrates 122 and 124 are attached to the strain body 110 with an adhesive.
　センサ基板１２２は、本体部１２２Ａ、接続部１２２Ｂ、および接続部１２２Ｃを有する。本体部１２２Ａは、平面視において円環状の部分である。本体部１２２Ａは、起歪体１１０の上面、且つ、第２固定部１１２の外側において、複数の連結部１１３の各々の上記した梁部１１３ｂと重なるように配置される。本体部１２２Ａには、複数の歪ゲージ１２２Ｄが同一円周上に並べて設けられている。複数の歪ゲージ１２２Ｄの各々は、平面視において連結部１１３の上記した梁部１１３ｂと重なる位置に配置されている。図１１および図１２に示すように、本実施形態では、１２本の連結部１１３（すなわち、１２本の梁部１１３ｂ）が、起歪体１１０に形成されている。このため、本実施形態では、２４個の歪ゲージ１２２Ｄが、本体部１２２Ａに設けられている。 The sensor board 122 has a main body 122A, a connecting part 122B, and a connecting part 122C. The main body 122A is an annular portion in plan view. The main body portion 122A is arranged on the upper surface of the strain body 110 and outside the second fixing portion 112 so as to overlap with the above-described beam portion 113b of each of the plurality of connecting portions 113. A plurality of strain gauges 122D are provided side by side on the same circumference on the main body 122A. Each of the plurality of strain gauges 122D is arranged at a position overlapping with the above-described beam portion 113b of the connecting portion 113 in plan view. As shown in FIGS. 11 and 12, in the present embodiment, twelve connecting portions 113 (that is, twelve beam portions 113 b) are formed in the strain body 110. For this reason, in this embodiment, 24 strain gauges 122D are provided in the main body 122A.
　接続部１２２Ｂ，１２２Ｃは、本体部１２２Ａの外周縁部から外側に直線状に延在して設けられている。接続部１２２Ｂ，１２２Ｃは、本体部１２２Ａの外周縁部において、１８０°間隔で設けられている。接続部１２２Ｂ，１２２Ｃには、複数の歪ゲージ１２２Ｄに繋がる複数の配線が設けられている。接続部１２２Ｂ，１２２Ｃは、回路基板１３０の下面に沿って延在した後、回路基板１３０の端部において上方且つ内側に折り曲げられる。そして、接続部１２２Ｂ，１２２Ｃは、回路基板１３０の上面に沿って延在した後、その先端部分が、回路基板１３０上面に設けられたコネクタ１３２に接続される。これにより、接続部１２２Ｂ，１２２Ｃは、複数の歪ゲージ１２２Ｄの検出信号を、回路基板１３０上に形成される電気回路に供給することができる。 The connection portions 122B and 122C extend linearly outward from the outer peripheral edge of the main body 122A. The connecting portions 122B and 122C are provided at 180 ° intervals on the outer peripheral edge of the main body 122A. The connection portions 122B and 122C are provided with a plurality of wires connected to the plurality of strain gauges 122D. After extending along the lower surface of the circuit board 130, the connecting portions 122B and 122C are bent upward and inward at the end of the circuit board 130. After the connection portions 122B and 122C extend along the upper surface of the circuit board 130, their distal ends are connected to the connector 132 provided on the upper surface of the circuit board 130. Thereby, the connection parts 122B and 122C can supply the detection signals of the plurality of strain gauges 122D to the electric circuit formed on the circuit board 130.
　センサ基板１２４は、本体部１２４Ａ、接続部１２４Ｂ、および接続部１２４Ｃを有する。本体部１２４Ａは、平面視において円環状の部分である。本体部１２４Ａは、起歪体１１０の下面、且つ、第２固定部１１２の外側において、複数の連結部１１３の各々の上記した梁部１１３ｂと重なるように配置される。本体部１２４Ａには、複数の歪ゲージ１２４Ｄが同一円周上に並べて設けられている。複数の歪ゲージ１２４Ｄの各々は、平面視において連結部１１３の上記した各梁部１１３ｂと重なる位置に配置されている。図１１および図１２に示すように、本実施形態では、１２本の連結部１１３（すなわち、１２本の梁部１１３ｂ）が、起歪体１１０に形成されている。このため、本実施形態では、２４個の歪ゲージ１２４Ｄが、本体部１２４Ａに設けられている。 The sensor board 124 has a main body 124A, a connecting part 124B, and a connecting part 124C. The main body 124A is an annular portion in plan view. The main body portion 124A is disposed on the lower surface of the strain body 110 and outside the second fixing portion 112 so as to overlap with the above-described beam portion 113b of each of the plurality of connecting portions 113. A plurality of strain gauges 124D are provided side by side on the same circumference on the main body 124A. Each of the plurality of strain gauges 124D is arranged at a position overlapping with each of the above-described beam portions 113b of the connecting portion 113 in plan view. As shown in FIGS. 11 and 12, in the present embodiment, twelve connecting portions 113 (that is, twelve beam portions 113 b) are formed in the strain body 110. For this reason, in this embodiment, 24 strain gauges 124D are provided in the main body 124A.
　接続部１２４Ｂ，１２４Ｃは、本体部１２４Ａの外周縁部から外側に直線状に延在して設けられている。接続部１２４Ｂ，１２４Ｃは、本体部１２４Ａの外周縁部において、１８０°間隔で設けられている。接続部１２４Ｂ，１２４Ｃには、複数の歪ゲージ１２４Ｄに繋がる複数の配線が設けられている。接続部１２４Ｂ，１２４Ｃは、起歪体１１０を貫通して、起歪体１１０の下面側から上面側へと引き出される（図１０参照）。そして、接続部１２４Ｂ，１２４Ｃは、回路基板１３０の下面に沿って延在した後、回路基板１３０の端部において上方且つ内側に折り曲げられる。さらに、接続部１２４Ｂ，１２４Ｃは、回路基板１３０の上面に沿って延在した後、その先端部分が、回路基板１３０上面に設けられたコネクタ１３２に接続される。これにより、接続部１２４Ｂ，１２４Ｃは、複数の歪ゲージ１２４Ｄの検出信号を、回路基板１３０上に形成される電気回路に供給することができる。 The connection portions 124B and 124C are provided to extend linearly outward from the outer peripheral edge of the main body portion 124A. The connection parts 124B and 124C are provided at 180 ° intervals on the outer peripheral edge of the main body part 124A. The connection portions 124B and 124C are provided with a plurality of wires connected to the plurality of strain gauges 124D. The connection portions 124B and 124C pass through the strain body 110 and are drawn from the lower surface side to the upper surface side of the strain body 110 (see FIG. 10). Then, the connecting portions 124B and 124C extend along the lower surface of the circuit board 130, and are bent upward and inward at an end of the circuit board 130. Further, after the connection portions 124B and 124C extend along the upper surface of the circuit board 130, the distal ends thereof are connected to the connectors 132 provided on the upper surface of the circuit board 130. Thereby, the connection parts 124B and 124C can supply the detection signals of the plurality of strain gauges 124D to the electric circuit formed on the circuit board 130.
　なお、本実施形態では、センサ基板１２２と、センサ基板１２４とで、互いに同一形状および同一構成のセンサ基板を用いている。このため、本実施形態に係るトルクセンサ１００Ａによれば、センサ基板１２２，１２４を区別なく製造すればよいため、センサ基板１２２，１２４の製造コストを削減することができる。 In the present embodiment, the sensor substrates 122 and 124 have the same shape and the same configuration as each other. For this reason, according to the torque sensor 100A according to the present embodiment, since the sensor substrates 122 and 124 need only be manufactured without distinction, the manufacturing cost of the sensor substrates 122 and 124 can be reduced.
　回路基板１３０は、起歪体１１０の第１固定部１１１の上面に取り付けられる平板状の部材である。回路基板１３０の上面には、複数のコネクタ１３２と、ＩＣ（Integrated Circuit）１３４Ａ，１３４Ｂとが実装される。ＩＣ１３４Ａは、コネクタ１３２、接続部１２２Ｂ，１２２Ｃを介して、本体部１２２Ａに設けられている複数の歪ゲージ１２２Ｄと電気的に接続されている。ＩＣ１３４Ａは、複数の歪ゲージ１２２Ｄの検出値に基づいて、各種処理（例えば、起歪体１１０に加わったトルクを判定する処理、複数の歪ゲージ１２２Ｄの検出値を外部へ出力する処理等）を行う。ＩＣ１３４Ｂは、コネクタ１３２、接続部１２４Ｂ，１２４Ｃを介して、本体部１２４Ａに設けられている複数の歪ゲージ１２４Ｄと電気的に接続されている。ＩＣ１３４Ｂは、複数の歪ゲージ１２４Ｄの検出値に基づいて、各種演算処理（例えば、起歪体１１０に加わったトルクを判定する処理、複数の歪ゲージ１２４Ｄの検出値を外部へ出力する処理等）を行う。 The circuit board 130 is a flat member attached to the upper surface of the first fixing portion 111 of the strain body 110. On the upper surface of the circuit board 130, a plurality of connectors 132 and ICs (Integrated Circuits) 134A and 134B are mounted. The IC 134A is electrically connected to a plurality of strain gauges 122D provided on the main body 122A via the connector 132 and the connecting portions 122B and 122C. The IC 134A performs various processes (for example, a process of determining the torque applied to the strain body 110, a process of outputting the detected values of the plurality of strain gauges 122D to the outside, etc.) based on the detected values of the plurality of strain gauges 122D. Do. The IC 134B is electrically connected to a plurality of strain gauges 124D provided on the main body 124A via the connector 132 and the connecting portions 124B and 124C. The IC 134B performs various arithmetic processing based on the detected values of the plurality of strain gauges 124D (for example, a process of determining the torque applied to the strain body 110, a process of outputting the detected values of the plurality of strain gauges 124D, and the like). I do.
　なお、本実施形態では、回路基板１３０に設けられた２つのＩＣ１３４Ａ，１３４Ｂによって、複数の歪ゲージ１２２Ｄの検出値に基づく処理と、複数の歪ゲージ１２４Ｄの検出値に基づく処理とを行っているが、これに限らない。例えば、回路基板１３０に設けられた１つのＩＣによって、複数の歪ゲージ１２２Ｄの検出値に基づく処理と、複数の歪ゲージ１２４Ｄの検出値に基づく処理とを行うようにしてもよい。 In the present embodiment, the processing based on the detected values of the plurality of strain gauges 122D and the processing based on the detected values of the plurality of strain gauges 124D are performed by the two ICs 134A and 134B provided on the circuit board 130. However, it is not limited to this. For example, a process based on the detected values of the plurality of strain gauges 122D and a process based on the detected values of the plurality of strain gauges 124D may be performed by one IC provided on the circuit board 130.
　他の実施形態に係るトルクセンサ１００Ａは、回転体の回転により複数の連結部１１３の各々に歪みが生じると、複数の連結部１１３の上面側に配置された複数の歪ゲージ１２２Ｄの各々と、複数の連結部１１３の下面側に配置された複数の歪ゲージ１２４Ｄの各々とが変形し、これら複数の歪ゲージ１２２Ｄ，１２４Ｄの各々の抵抗値が変化する。このため、トルクセンサ１００Ａは、これら複数の歪ゲージ１２２Ｄ，１２４Ｄの各々の抵抗値の変化に基づいて、トルクを検出することができる。 The torque sensor 100 </ b> A according to another embodiment includes a plurality of strain gauges 122 </ b> D arranged on the upper surface side of the plurality of connecting portions 113 when each of the plurality of connecting portions 113 is distorted by rotation of the rotating body. Each of the plurality of strain gauges 124D arranged on the lower surface side of the plurality of connecting portions 113 is deformed, and the resistance value of each of the plurality of strain gauges 122D and 124D changes. Therefore, the torque sensor 100A can detect the torque based on the change in the resistance value of each of the plurality of strain gauges 122D and 124D.
　特に、他の実施形態に係るトルクセンサ１００Ａは、起歪体１１０の上面側と下面側との各々に複数の歪ゲージ１２２Ｄ，１２４Ｄを配置する構成としたため、起歪体１１０の一方の面にのみ歪ゲージを配置する構成と比較して、起歪体１１０の形状を変更することなく、歪ゲージの設置数を容易に増やすことができる。したがって、他の実施形態に係るトルクセンサ１００Ａによれば、組み立てが容易であり、かつ、トルクを精度よく検出できる。 In particular, the torque sensor 100A according to another embodiment has a configuration in which the plurality of strain gauges 122D and 124D are arranged on the upper surface side and the lower surface side of the strain body 110, respectively. Compared with a configuration in which only strain gauges are arranged, the number of strain gauges to be installed can be easily increased without changing the shape of the strain body 110. Therefore, according to the torque sensor 100A according to another embodiment, assembly is easy and torque can be accurately detected.
　また、他の実施形態に係るトルクセンサ１００Ａは、例えば、複数の歪ゲージ１２２Ｄの出力によるトルクの検出と、複数の歪ゲージ１２４Ｄの出力によるトルクの検出とを、互いに独立して行うことができる。このため、他の実施形態に係るトルクセンサ１００Ａは、例えば、一方の検出系統に不具合が生じた場合であっても、他方の検出系統によってトルクを検出することができる。この場合、起歪体１１０の複数の連結部１１３の上面における歪みと、起歪体１１０の複数の連結部１１３の下面における歪みとは略同じであるから、不具合が生じる前後で、略同一の検出値を出力することができる。 Further, the torque sensor 100A according to another embodiment can, for example, independently perform the detection of the torque based on the output of the plurality of strain gauges 122D and the detection of the torque based on the output of the plurality of strain gauges 124D. . For this reason, the torque sensor 100A according to another embodiment can detect the torque by the other detection system, for example, even when a failure occurs in one of the detection systems. In this case, the strain on the upper surface of the plurality of connecting portions 113 of the strain body 110 is substantially the same as the distortion on the lower surface of the plurality of connecting portions 113 of the strain body 110. The detection value can be output.
　また、他の実施形態に係るトルクセンサ１００Ａは、例えば、連結部１１３の梁部１１３ｂ毎に、上面側に設けられた歪ゲージ１２２Ｄの出力値と、下面側に設けられた歪ゲージ１２４Ｄの出力値とを足し合わせることにより、当該分岐路における歪みの検出値の値を大きくすることができる。これにより、他の実施形態に係るトルクセンサ１００Ａは、例えば、連結部１１３の分岐路に僅かな歪が生じた場合であっても、その検出値がノイズに埋もれてしまうことを抑制することができる。 Further, the torque sensor 100A according to another embodiment includes, for example, an output value of a strain gauge 122D provided on an upper surface side and an output value of a strain gauge 124D provided on a lower surface side for each beam portion 113b of the connecting portion 113. By adding the values, the value of the detected value of the distortion in the branch road can be increased. Thereby, the torque sensor 100A according to another embodiment suppresses the detection value from being buried in noise even when a slight distortion occurs in the branch path of the connecting portion 113, for example. it can.
　なお、他の実施形態に係るトルクセンサ１００Ａにおいて、センサ基板１２２およびのセンサ基板１２４は、互いに連結されており、且つ、１枚のフレキシブル基板によって一体的に形成されてもよい。 In the torque sensor 100A according to another embodiment, the sensor substrate 122 and the sensor substrate 124 may be connected to each other, and may be integrally formed by one flexible substrate.
　本国際出願は、２０１８年８月１０日に出願した日本国特許出願第２０１８－１５２０２４号に基づく優先権を主張するものであり、当該出願の全内容を本国際出願に援用する。 This international application claims priority based on Japanese Patent Application No. 2018-152024 filed on August 10, 2018, the entire contents of which are incorporated herein by reference.
１：起歪体
２：絶縁層
３：歪ゲージ
１１：第１固定部
１２：第２固定部
１３：連結部
１４～１７：開口部
２１：スイッチ回路
２２：増幅回路
２３：ＡＤコンバータ
２４：判定回路
１００：トルクセンサ
Ｒ：固定抵抗
１００Ａ：トルクセンサ
１１０：起歪体
１１１：第１固定部
１１２：第２固定部
１１３：連結部
１２２：センサ基板（第１のセンサ基板）
１２２Ａ：本体部
１２２Ｂ：接続部
１２２Ｃ：接続部
１２２Ｄ：歪ゲージ
１２４：センサ基板（第２のセンサ基板）
１２４Ａ：本体部
１２４Ｂ：接続部
１２４Ｃ：接続部
１２４Ｄ：歪ゲージ
１３０：回路基板
１３２：コネクタ
１３４Ａ：ＩＣ
１３４Ｂ：ＩＣ 1: strain body 2: insulating layer 3: strain gauge 11: first fixing part 12: second fixing part 13: connecting parts 14 to 17: opening 21: switch circuit 22: amplifier circuit 23: AD converter 24: judgment Circuit 100: Torque sensor R: Fixed resistance 100A: Torque sensor 110: Strain element 111: First fixing part 112: Second fixing part 113: Connecting part 122: Sensor board (first sensor board)
122A: body part 122B: connection part 122C: connection part 122D: strain gauge 124: sensor board (second sensor board)
124A: body part 124B: connecting part 124C: connecting part 124D: strain gauge 130: circuit board 132: connector 134A: IC
134B: IC

Claims (11)

  1. 　環状の第１固定部と、前記第１固定部と中心を共有する第２固定部と、前記第１固定部と前記第２固定部とを連結する複数の連結部と、を有する起歪体と、
    　前記起歪体上に設けられた複数の歪ゲージと、
    を備え、
    　前記連結部は、前記第１固定部と前記第２固定部との間に配置され、両端部が前記第１固定部の内周に接続され、中央部が前記第２固定部の外周に接続される
    トルクセンサ。     A strain body having an annular first fixing portion, a second fixing portion sharing a center with the first fixing portion, and a plurality of connecting portions connecting the first fixing portion and the second fixing portion. When,
    A plurality of strain gauges provided on the strain body,
    With
    The connecting portion is disposed between the first fixing portion and the second fixing portion, and both ends are connected to an inner periphery of the first fixing portion, and a center portion is connected to an outer periphery of the second fixing portion. Torque sensor.
  2. 　前記連結部は、前記両端部が前記中央部より細い
    請求項１に記載のトルクセンサ。     The torque sensor according to claim 1, wherein the connecting portion has the both end portions thinner than the central portion.
  3. 　前記連結部は、前記第１固定部及び前記第２固定部より薄い
    請求項１又は請求項２に記載のトルクセンサ。     The torque sensor according to claim 1, wherein the connection portion is thinner than the first fixed portion and the second fixed portion.
  4. 　前記連結部は、前記第２固定部の接線方向に延びる
    請求項１から請求項３までのいずれか１項に記載のトルクセンサ。     4. The torque sensor according to claim 1, wherein the connecting portion extends in a tangential direction of the second fixing portion. 5.
  5. 　前記複数の連結部は、前記第２固定部の周囲に正多角形状に配置される
    請求項１から請求項４までのいずれか１項に記載のトルクセンサ。     5. The torque sensor according to claim 1, wherein the plurality of connecting portions are arranged in a regular polygon around the second fixing portion. 6.
  6. 　前記起歪体は、４つの前記連結部を有する
    請求項１から請求項５までのいずれか１項に記載のトルクセンサ。     The torque sensor according to any one of claims 1 to 5, wherein the strain body has four of the connection portions.
  7. 　前記歪ゲージは、前記連結部の前記両端部の第１面に配置される
    請求項１から請求項６までのいずれか１項に記載のトルクセンサ。     The torque sensor according to any one of claims 1 to 6, wherein the strain gauge is disposed on a first surface of each of the both ends of the connection portion.
  8. 　前記起歪体の一方の面および他方の面の各々に、複数の前記歪ゲージを有する
    　請求項１から請求項７までのいずれか１項に記載のトルクセンサ。     The torque sensor according to any one of claims 1 to 7, wherein a plurality of the strain gauges are provided on each of one surface and the other surface of the strain body.
  9. 　複数の前記歪ゲージを有し、前記起歪体の前記一方の面に配置される第１のセンサ基板と、
    　複数の前記歪ゲージを有し、前記起歪体の前記他方の面に配置される第２のセンサ基板と
    　を有する
    　請求項８に記載のトルクセンサ。     A first sensor substrate having a plurality of the strain gauges and disposed on the one surface of the strain body;
    The torque sensor according to claim 8, further comprising: a second sensor substrate having a plurality of the strain gauges and disposed on the other surface of the strain body.
  10. 　前記第１のセンサ基板および前記第２のセンサ基板は、互いに連結されており、且つ、１枚のフレキシブル基板によって一体的に形成されている
    　請求項９に記載のトルクセンサ。     The torque sensor according to claim 9, wherein the first sensor substrate and the second sensor substrate are connected to each other, and are integrally formed by one flexible substrate.
  11. 　前記第１のセンサ基板および前記第２のセンサ基板は、互いに同一形状および同一構成を有する
    　請求項９に記載のトルクセンサ。     The torque sensor according to claim 9, wherein the first sensor substrate and the second sensor substrate have the same shape and the same configuration as each other.
PCT/JP2019/025563 2018-08-10 2019-06-27 Torque sensor WO2020031540A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-152024 2018-08-10
JP2018152024A JP2021179309A (en) 2018-08-10 2018-08-10 Torque sensor

Publications (1)

Publication Number Publication Date
WO2020031540A1 true WO2020031540A1 (en) 2020-02-13

Family

ID=69414638

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/025563 WO2020031540A1 (en) 2018-08-10 2019-06-27 Torque sensor

Country Status (2)

Country Link
JP (1) JP2021179309A (en)
WO (1) WO2020031540A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112129440A (en) * 2020-09-22 2020-12-25 陈会良 Bob torque sensor
EP4235128A1 (en) * 2022-02-28 2023-08-30 Nagano Keiki Co., Ltd. Torque sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010088922A1 (en) * 2009-02-06 2010-08-12 Abb Ag Set of multiaxial force and torque sensor and assembling method
JP2013096735A (en) * 2011-10-28 2013-05-20 Toyota Motor Corp Strain element and torque sensor
JP2016094967A (en) * 2014-11-12 2016-05-26 本田技研工業株式会社 Annular spring, and torque detection device and robot articulation mechanism having the same
WO2018073188A1 (en) * 2016-10-17 2018-04-26 Franka Emika Gmbh Torque sensor device and method for detecting torques

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010088922A1 (en) * 2009-02-06 2010-08-12 Abb Ag Set of multiaxial force and torque sensor and assembling method
JP2013096735A (en) * 2011-10-28 2013-05-20 Toyota Motor Corp Strain element and torque sensor
JP2016094967A (en) * 2014-11-12 2016-05-26 本田技研工業株式会社 Annular spring, and torque detection device and robot articulation mechanism having the same
WO2018073188A1 (en) * 2016-10-17 2018-04-26 Franka Emika Gmbh Torque sensor device and method for detecting torques

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112129440A (en) * 2020-09-22 2020-12-25 陈会良 Bob torque sensor
CN112129440B (en) * 2020-09-22 2022-04-29 陈会良 Bob torque sensor
EP4235128A1 (en) * 2022-02-28 2023-08-30 Nagano Keiki Co., Ltd. Torque sensor

Also Published As

Publication number Publication date
JP2021179309A (en) 2021-11-18

Similar Documents

Publication Publication Date Title
JP6092326B2 (en) Torque sensor
JP6214072B1 (en) Force sensor
CN108139288B (en) Force sensor
JP7114804B2 (en) STRAIN WAVE GEAR AND ELASTIC TRANSMISSION ELEMENT FOR THE SAME, ROBOT ARM AND Strain GAUGE ARRANGEMENT METHOD
JP5007083B2 (en) Force sensor chip
JP5507306B2 (en) Force sensor chip and acceleration sensor chip
JP4948630B2 (en) Torque sensor
JP6108584B1 (en) Force sensor
JP6460972B2 (en) Crank arm assembly
US11788906B2 (en) Force sensor
WO2020031540A1 (en) Torque sensor
CN111742205B (en) Torque sensor
US11105693B2 (en) Torque sensor
JP2004354049A (en) Force detection device
JP7396731B2 (en) Multi-axis tactile sensor
US20220412819A1 (en) Sensor and power transmission device
JP6835475B2 (en) Surface pressure sensor
CN114761774B (en) Torque sensor
CN107850502B (en) Torque sensor
JP2023013371A (en) Outer tooth gear, wave motion reduction gear and robot
JP7396588B2 (en) Strain detection sensor and power transmission device
JP2021004819A (en) Torque detection sensor and motive power transmission device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19848419

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19848419

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP