WO2019232902A1

WO2019232902A1 - Exposure pattern processing method and system

Info

Publication number: WO2019232902A1
Application number: PCT/CN2018/097604
Authority: WO
Inventors: 敦士军; 杜卫冲; 梅文辉
Original assignee: 中山新诺科技股份有限公司
Priority date: 2018-06-06
Filing date: 2018-07-27
Publication date: 2019-12-12
Also published as: CN108648166A

Abstract

Provided is an exposure pattern processing method. The method comprises the following steps: generating dynamic pattern information and pre-set pattern information; and simultaneously transmitting the dynamic pattern information and the pre-set pattern information to a spatial light modulator (300), and combining the dynamic pattern information with the pre-set pattern information by the spatial light modulator (300) to obtain an exposure pattern, or, combining the dynamic pattern information with the pre-set pattern information to obtain combined pattern information, and transmitting the combined pattern information to the spatial light modulator (300) to obtain an exposure pattern. Also provided is an exposure pattern processing system. The exposure pattern processing method and system relate to fewer work stations, so that investment in production equipment is effectively reduced.

Description

Method and system for processing exposure graphics

Technical field

The invention relates to the technical field of graphic exposure, and in particular to a method and system for processing graphic exposure.

Background technique

The continuous development of electronic technology organically combines laser technology and computer technology. Laser marking technology can simultaneously produce clear marks on different materials or uneven surfaces, with "one-shot double-mark" or "riding seam mark" Due to its unique effect, and because it is not easy to imitate, laser marking technology has been widely used.

In the process of marking with a laser, the traditional exposure method is to send the identification code information and the fixed graphic information that need to be exposed to the optical engine respectively, so as to complete the exposure of the entire graphic. This exposure method has many stations, resulting in More investment in production equipment.

Summary of the Invention

Based on this, it is necessary to provide a method and system for graphic exposure with fewer stations, which effectively reduces the investment in production equipment.

Its technical scheme is as follows:

A method for processing exposure graphics includes the following steps: generating dynamic graphics information and preset graphics information; and transmitting the dynamic graphics information and the preset graphics information to a spatial light modulator simultaneously, and the spatial light modulator sends Combining the dynamic graphic information and the preset graphic information to obtain an exposure graphic; or merging the dynamic graphic information and the preset graphic information to obtain a combined graphic information, and transmitting the combined graphic information to the spatial light modulation Device to get the exposure pattern.

The above-mentioned exposure graphic processing method uses a dynamic graphic information generation module to generate dynamic graphic information. For example, a server processes the corresponding information to generate dynamic graphic information, and a preset graphic information generation module generates preset graphic information, such as a server. The corresponding information is processed to generate preset graphic information, and then the generated dynamic graphic information and the generated preset graphic information are transmitted to the spatial light modulator at the same time, and the received dynamic graphic information and the preset graphic are transmitted through the spatial light modulator. The information is combined, and the required exposure graphics are obtained through the control function of the control device, or the dynamic graphics information and the preset graphics information are combined using the graphics information combining module to obtain the combined graphics information, and the combined graphics information is transmitted to the space. The light modulator obtains a required exposure pattern through the control action of the control device. Compared with the conventional method of transmitting dynamic graphic information and preset graphic information to the spatial light modulator, the exposure graphic processing method of this embodiment can obtain the exposure graphic by using fewer stations, which effectively reduces the investment in production equipment. , Reducing production costs.

In one embodiment, the generating dynamic graphic information includes the following steps: establishing a program library corresponding to each sub-information; using the program library to generate sub-program blocks of the sub-information; merging the sub-program blocks to obtain the Dynamic graphics information.

In one embodiment, the sub-information includes one of production time information, batch number information, product model information, or serial number information.

In one embodiment, the preset graphic information includes line information.

In one embodiment, the dynamic graphic information includes two-dimensional code graphic information or identification code graphic information.

In one embodiment, after the step of obtaining an exposure pattern, the method further includes a step of projecting the exposure pattern onto a substrate.

An apparatus for processing exposure graphics includes: a dynamic graphic information generating module for generating dynamic graphic information; a preset graphic information generating module for generating preset graphic information; and a spatial light modulator for the spatial light modulator. Generating an exposure graphic; or a graphic information merging module for merging the dynamic graphic information and the preset graphic information to obtain merged graphic information.

The above-mentioned exposure graphic processing device generates dynamic graphic information by using a dynamic graphic information generating module, for example, by using a server to process the corresponding information to generate dynamic graphic information, and uses a preset graphic information generating module to generate preset graphic information, such as using a server pair. The corresponding information is processed to generate preset graphic information, and then the generated dynamic graphic information and the generated preset graphic information are transmitted to the spatial light modulator at the same time, and the received dynamic graphic information and the preset graphic are transmitted through the spatial light modulator. The information is combined, and the required exposure graphics are obtained through the control function of the control device, or the dynamic graphics information and the preset graphics information are combined using the graphics information combining module to obtain the combined graphics information, and the combined graphics information is transmitted to the space. The light modulator obtains a required exposure pattern through the control action of the control device. Compared with the conventional transmission of dynamic graphic information and preset graphic information to the spatial light modulator, the exposure graphic processing device of this embodiment can obtain the exposure graphic with fewer stations, which effectively reduces the investment in production equipment. , Reducing production costs.

In one embodiment, the dynamic graphics information generating module includes a library building unit for building a program library corresponding to each sub-information, a sub-program block generating unit for generating a sub-program block of the sub-information, and a A subroutine block merging unit for merging the subroutine blocks to obtain dynamic graphics information, and the subroutine block merging unit is communicatively connected with the spatial light modulator.

An exposure graphics processing system includes a computer device and a spatial light modulator, and the computer device is communicatively connected to the spatial light modulator; wherein the computer device includes a memory and a processor, and the memory stores a computer program When the processor executes the computer program, the following steps are realized: generating dynamic graphic information and preset graphic information; and transmitting the dynamic graphic information and the preset graphic information to a spatial light modulator at the same time, and the spatial light A modulator combining the dynamic graphic information and the preset graphic information to obtain an exposure graphic; or combining the dynamic graphic information and the preset graphic information to obtain a combined graphic information, and transmitting the combined graphic information to the A spatial light modulator to obtain an exposure pattern.

A computer-readable storage medium has a computer program stored thereon. When the computer program is executed by a processor, the following steps are performed: generating dynamic graphic information and preset graphic information; and combining the dynamic graphic information and the preset graphic. The information is simultaneously transmitted to a spatial light modulator, which combines the dynamic graphic information and the preset graphic information to obtain an exposure graphic; or merges the dynamic graphic information and the preset graphic information to be combined Graphic information, and transmitting the combined graphic information to the spatial light modulator to obtain an exposure graphic.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a flowchart of a method for processing exposure graphics according to an embodiment; FIG.

2 is a schematic structural diagram of an exposure pattern processing apparatus according to an embodiment;

3 is a schematic structural diagram of an exposure pattern processing apparatus according to another embodiment;

FIG. 4 is an internal structural diagram of a computer device of an exposure graphics processing system according to an embodiment.

Reference sign description:

100, dynamic graphic information generating module, 110, dynamic graphic generator, 120, first server, 200, preset graphic information generating module, 210, file server, 220, second server, 300, spatial light modulator, 400, Imaging converter, 500, light source, 600, mirror, 700, light collimator, 800, substrate.

Detailed ways

To make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not limit the protection scope of the present invention.

It should be noted that when an element is referred to as being “set on” or “fixed to” another element, it may be directly on the other element or there may be a centered element. When an element is referred to as being "fixed to" another element or "fixedly connected" to another element, they may be detachably fixed or non-detachable. When an element is considered to be "connected" or "rotatedly connected" to another element, it may be directly connected to another element or a centered element may be present at the same time. The terms "vertical", "horizontal", "left", "right", "up", "down" and similar expressions used herein are for illustrative purposes only and are not meant to be the only implementations.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the present invention is only for the purpose of describing specific embodiments, and is not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

The terms "first", "second", "third" and the like in the present invention do not represent a specific quantity and order, but are only used to distinguish names.

As shown in FIG. 1, an embodiment of the present invention discloses a method for processing exposure graphics, including the following steps: generating dynamic graphics information and preset graphics information; and transmitting the dynamic graphics information and preset graphics information to spatial light at the same time. Modulator, spatial light modulator combines dynamic graphics information and preset graphic information to obtain exposure graphics; or combines dynamic graphics information and preset graphic information to obtain combined graphic information, and transmits the combined graphic information to the spatial light modulator to obtain exposure Graphics.

In the method for processing the exposed graphics of the above embodiment, dynamic graphic information is generated by using the dynamic graphic information generating module 100. For example, dynamic graphic information is generated after the corresponding information is processed by the server, and preset graphic information is generated using the preset graphic information generating module 200. For example, the server processes the corresponding information to generate preset graphic information, and then transmits the generated dynamic graphic information and the generated preset graphic information to the spatial light modulator 300 at the same time. The dynamic graphic information is combined with the preset graphic information, and the required exposure graphics are obtained through the control function of the control device, or the graphic information combining module (not shown) is used to combine the dynamic graphic information and the preset graphic information to obtain a merge. The graphic information is transmitted to the spatial light modulator 300, and the required exposure graphic is obtained by the control function of the control device. Compared with the conventional method of transmitting dynamic graphic information and preset graphic information to the spatial light modulator 300, the exposure graphic processing method of this embodiment can obtain the exposure graphic with fewer stations, which effectively reduces the production equipment. Investment, reducing production costs.

In one embodiment, generating dynamic graphic information includes the following steps: establishing a program library corresponding to each sub-information; using the program library to generate sub-program blocks of sub-information; merging the sub-program blocks to obtain dynamic graphic information.

Specifically, according to the sub-information such as production time information, batch number information, product model information or serial number information included in the product requirements, a program library creation unit (not shown) is used to establish a program library corresponding to each sub-information; Real-time data information when the product is produced online, using subroutine block generating units (not shown) to generate subroutine blocks corresponding to each subinformation; using subroutine block merging units (not shown) to merge each subroutine block Thereby, dynamic graphic information can be obtained. In one embodiment, the dynamic graphic information includes two-dimensional code graphic information or identification code graphic information, and the identification code graphic information is formed by combining graphics or numbers.

In one embodiment, the preset graphic information includes line information. The preset graphic information is a fixed graphic, including the line information of the product visible area or other line information that needs to be exposed. The graphic of each product is fixed.

Optionally, after the step of obtaining the exposure pattern, the method further includes a step of projecting the exposure pattern onto the substrate 800. For example, using a DMD (Digital Micromirror Device) pattern exposure mode, the imaging converter 400 is used to project the exposure pattern onto a photosensitive material on the substrate 800 (the photosensitive material may be a polymer material, a solution, or a metal particle, etc. It only needs to meet the optical hinge reaction after laser irradiation.) After exposure, development, and etching, an identification code mark can be formed. The identification code mark has higher accuracy and more information, which can adapt to the future high-definition code of the product. The highest resolution of the graphics can reach 2um. Compared with the traditional mode, the pixel resolution is increased by more than 10 times, and the information amount of the identification code mark can be increased by dozens of times.

It should be noted that the imaging converter 400 in this embodiment may be an imaging lens that converts an exposure pattern from the spatial light modulator 300 onto a substrate 800, that is, the imaging converter 400 may use a direct imaging method to project an exposure pattern. On the substrate 800, a dot array imaging system that focuses light from each pixel of the spatial light modulator 300 into a dot array and converts it to the substrate 800, that is, the imaging converter 400 can use the dot array method to convert The exposure pattern is projected onto the substrate 800, and the exposure pattern from the spatial light modulator 300 can also be divided into sub-image arrays and converted to a sub-image array imaging system on the substrate 800. That is, the imaging converter 400 can use the sub-image array method. The exposure pattern is projected onto a substrate 800; the substrate 800 in this embodiment may be an LCD (Liquid Crystal Display) glass flat plate, a PCB (Printed Circuit Board) board, a semiconductor wafer or a non-flat substrate 800, At the same time, the imaging converter 400 of this embodiment can adjust the exposure resolution and graphic accuracy of the graphics according to the needs of the product, and make the graphics high. Identity of static scan pattern exposure with mobile internet or DMD with high accuracy dot pattern for dynamic helical scanning exposure.

As shown in FIG. 2, an embodiment of the present invention further discloses an apparatus for processing exposure graphics, including: a dynamic graphic information generation module 100 for generating dynamic graphic information; a preset graphic information generation module 200 for generating Preset graphic information; and spatial light modulator 300, which is used to generate an exposure graphic; or a graphic information combining module, which is used to combine dynamic graphic information and preset graphic information to obtain combined graphic information.

The apparatus for processing exposure graphics in the above embodiment uses dynamic graphics information generation module 100 to generate dynamic graphics information. For example, the server processes the corresponding information to generate dynamic graphics information, and uses preset graphics information generation module 200 to generate preset graphics information. For example, the server processes the corresponding information to generate preset graphic information, and then transmits the generated dynamic graphic information and the generated preset graphic information to the spatial light modulator 300 at the same time. The dynamic graphic information is combined with the preset graphic information, and the required exposure graphic is obtained through the control function of the control device, or the graphic information combining module is used to combine the dynamic graphic information and the preset graphic information to obtain the combined graphic information. The combined pattern information is transmitted to the spatial light modulator 300, and the required exposure pattern is obtained by the control function of the control device. Compared with the conventional method of transmitting dynamic graphic information and preset graphic information to the spatial light modulator 300, the exposure graphic processing device of this embodiment can obtain the exposure graphic by using fewer stations, which effectively reduces the production equipment. Investment, reducing production costs.

Optionally, the dynamic graphics information generation module 100 includes a library establishment unit for establishing a program library corresponding to each sub-information, a sub-block generation unit for generating sub-sub-blocks of the sub-information, and a combination of sub-program blocks to obtain The sub-block merging unit of the dynamic graphics information is connected to the spatial light modulator 300 in communication.

In one embodiment, according to the sub-information covered by the product requirements, such as production time information, batch number information, product model information, or serial number information, a program building unit is used to establish a program library corresponding to each sub-information; and then according to the product online The real-time data information during production uses the subroutine block generating unit to generate subroutine blocks corresponding to each subinformation; the subroutine block merging unit combines the various subroutine blocks to obtain dynamic graphics information.

As shown in FIG. 2, in another embodiment, the dynamic graphic generator 110 generates independent sub-dynamic graphic information according to the layout position coordinates, production batch number, real-time production date, and production time of the product. It is then output to the first server 120, so as to form complete dynamic graphics information.

As shown in FIG. 2, optionally, the file server 210 receives the preset graphic information of the product and divides it into graphic information of a single laser engine exposure after processing by the second server 220, and the first server 120 and the second server 220 are simultaneously The graphic information that needs to be exposed is transmitted to the spatial light modulator 300. The spatial light modulator 300 loads the exposure graphic information onto the exposure beam and projects it onto the substrate 800 through the imaging converter 400 to complete the graphic exposure and exposure process. The dynamic graphic information and the preset graphic information can be selectively exposed. The dynamic graphic information is exposed on the substrate 800 according to the coordinate values that need to be exposed without overlapping the preset graphic information.

As shown in FIG. 3, in one embodiment, the apparatus for exposing graphic processing further includes a light source 500 and a reflector 600. The light source 500 is used to provide an exposure beam. The reflector 600 is inclined relative to the working platform. The light beam is reflected to the spatial light modulator 300. The light source 500 may provide at least one kind of energy radiation including ultraviolet light, infrared light, visible light, electron beam, ion beam, and X-ray to expose the substrate 800 coated with a photosensitive material, and the exposure beam emitted by the light source 500 is irradiated to The reflector 600 is reflected to the spatial light modulator 300 through the reflector 600. The reflector 600 is inclined relative to the working platform, that is, an angle is formed with the working platform, and the DMD dot matrix can be reduced to smaller light spots, which can effectively improve Resolution, meanwhile, the interval between the micronized DMD light points is equally divided, such as ten equal divisions, one hundred equal divisions, and the smaller the equal division interval, the higher the graphic fineness. The light source 500 in this embodiment can provide an exposure light beam for the spatial light modulator 300 alone, and can also provide a calibration light beam at the same time.

The exposure beam reflected by the mirror may be emitted by a separate light source 500 or may be emitted after corresponding processing, as shown in FIG. 3. In one embodiment, the device for graphic exposure further includes a light collimator 700 and / Or a light homogenizer, a light collimator 700 and a light homogenizer are both disposed between the light source 500 and the reflector 600. The light collimator 700 is used to collimate the exposure light beam, and the light homogenizer is used to uniformly expose the light beam. The exposure beam emitted by the light source 500 passes through the light collimator 700 and / or the homogenizer, so that the exposure beam is collimated and uniform. In this embodiment, the exposure light beam emitted by the light source 500 enters the light collimator 700 and the homogenizer through the optical fiber.

In one embodiment, the apparatus for graphic exposure further includes a moving mechanism (not shown), which is used to adjust the distance between the imaging converter 400 and the substrate 800. The distance between the imaging converter 400 and the substrate 800 in the Z-axis direction is adjusted by using a moving mechanism, so that the focus of the imaging converter 400 is focused on the substrate 800. The moving mechanism in this embodiment may be a motor or other devices capable of adjusting the distance between the imaging converter 400 and the substrate 800 in the Z-axis direction.

In one embodiment, the apparatus for graphic exposure further includes: a plurality of optical engines, the plurality of optical engines are arranged in an array; and a translation device for driving the optical engine array to translate in two directions of XY, wherein one direction engine is in The translation is performed on the beam arm, and the other direction is the overall translation of the beam arm carrying the optical engine. At the same time, the translation device is provided with position sensors in two directions, which are used to detect the position information of each optical engine in the XY direction. Used for automatic distance adjustment and calibration between various optical engines; mobile exposure platform for carrying the substrate 800 and driving the substrate 800 to move in two directions of X and Y; motion control and data processing system for controlling the translation device and Move the movement of the exposure platform and process the exposure graphic data.

An embodiment of the present invention also relates to a system for processing exposure graphics, which includes a computer device and a spatial light modulator 300. The spatial light modulator 300 is communicatively connected to a computer device. The computer device includes a memory and a processor. A computer program. When the processor executes the computer program, the processor realizes the following steps: generating dynamic graphic information and preset graphic information; transmitting the dynamic graphic information and the preset graphic information to the spatial light modulator 300 at the same time, and the spatial light modulator 300 transmits the dynamic graphic information Combining with the preset graphic information to obtain the exposure graphic; or combining the dynamic graphic information and the preset graphic information to obtain the combined graphic information, and transmitting the combined graphic information to the spatial light modulator 300 to obtain the exposure graphic.

Specifically, the computer device may send an instruction to the spatial light modulator 300 so that the spatial light modulator 300 generates an exposure pattern.

Among them, as shown in FIG. 4, the computer equipment may be a terminal, and its internal structure diagram may be shown in FIG. The computer equipment includes a processor, a memory, a network interface, a display screen, and an input device connected through a system bus. The processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for running the operating system and computer programs in a non-volatile storage medium. The network interface of the computer device is used to communicate with an external terminal through a network connection. The computer program is executed by a processor to implement a method for exposing graphics processing. The display screen of the computer device may be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer device may be a touch layer covered on the display screen, or a button, a trackball or a touchpad provided on the computer device casing. , Or an external keyboard, trackpad, or mouse.

Those skilled in the art can understand that the structure shown in FIG. 4 is only a block diagram of a part of the structure related to the scheme of the present application, and does not constitute a limitation on the computer equipment to which the scheme of the present application is applied. The specific computer equipment may be Include more or fewer parts than shown in the figure, or combine certain parts, or have a different arrangement of parts.

In one embodiment, a computer device is provided, which includes a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the following steps: generating dynamic graphic information and preset graphic information; The information and the preset graphic information are transmitted to the spatial light modulator 300 at the same time. The spatial light modulator 300 combines the dynamic graphic information and the preset graphic information to obtain an exposure graphic; or combines the dynamic graphic information and the preset graphic information to obtain the combined graphic information. The combined pattern information is transmitted to the spatial light modulator 300 to obtain an exposure pattern.

In one embodiment, when the computer program is executed by the processor, the following steps are also implemented: establishing a program library corresponding to each sub-information; using the program library to generate sub-program blocks of sub-information; merging the sub-program blocks to obtain dynamic graphics information.

In one embodiment, when the computer program is executed by the processor, the following steps are further implemented: after the step of obtaining the exposure pattern, the method further includes the step of projecting the exposure pattern onto the substrate 800.

A person of ordinary skill in the art can understand that all or part of the processes in the methods of the foregoing embodiments can be implemented by using a computer program to instruct related hardware. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it may include the processes of the embodiments of the methods described above. Wherein, any reference to the storage, storage, database, or other media used in the embodiments provided in this application may include non-volatile and / or volatile storage. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous chain (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

The technical features of the embodiments described above can be arbitrarily combined. In order to simplify the description, all possible combinations of the technical features in the above embodiments have not been described. However, as long as there is no contradiction in the combination of these technical features, It should be considered as the scope described in this specification.

The above-mentioned embodiments only express several implementation manners of the present invention, and their descriptions are more specific and detailed, but they cannot be understood as a restriction on the scope of the invention patent. It should be noted that, for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can be made, which all belong to the protection scope of the present invention. Therefore, the protection scope of the invention patent shall be subject to the appended claims.

Claims

A method for processing exposure graphics, comprising the following steps:

Generate dynamic graphic information and preset graphic information;

Transmitting the dynamic graphic information and the preset graphic information to a spatial light modulator at the same time, and the spatial light modulator combining the dynamic graphic information and the preset graphic information to obtain an exposure graphic;

Alternatively, the dynamic graphic information and the preset graphic information are combined to obtain combined graphic information, and the combined graphic information is transmitted to the spatial light modulator to obtain an exposure graphic.
The method for processing exposure graphics according to claim 1, wherein the generating dynamic graphics information comprises the following steps:

Establish a program library corresponding to each sub-information;

Generating a sub-program block of the sub-information by using the program library;

Merging the subroutine blocks to obtain the dynamic graphics information.
The method according to claim 2, wherein the sub-information includes one of production time information, batch number information, product model information, or serial number information.
The method of claim 1, wherein the preset graphic information includes line information.
The method of claim 1, wherein the dynamic graphic information comprises two-dimensional code graphic information or identification code graphic information.
The method for processing an exposure pattern according to claim 1, wherein after the step of obtaining an exposure pattern, the method further comprises the steps of:

The exposure pattern is projected onto a substrate.
An apparatus for processing exposure graphics is characterized in that it includes:

Dynamic graphic information generation module, for generating dynamic graphic information;

A preset graphic information generating module for generating preset graphic information; and

A spatial light modulator for generating an exposure pattern;

Or, a graphic information merging module is configured to merge the dynamic graphic information and the preset graphic information to obtain merged graphic information.
The apparatus of claim 7, wherein the dynamic graphics information generating module comprises a library building unit for building a library corresponding to each sub-information, and a sub-unit for generating the sub-information. A subroutine block generating unit of a program block and a subroutine block merging unit for merging the subroutine blocks to obtain dynamic graphics information, and the subroutine block merging unit is communicatively connected with the spatial light modulator.
An exposure graphics processing system, comprising a computer device and a spatial light modulator, wherein the computer device is communicatively connected to the spatial light modulator;

The computer device includes a memory and a processor. The memory stores a computer program. When the processor executes the computer program, the steps of the method according to any one of claims 1 to 6 are implemented.
A computer-readable storage medium having stored thereon a computer program, characterized in that when the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 6 are implemented.