WO2019222932A1 - 一种光纤弯曲传感器及光纤弯曲传感器的制备方法 - Google Patents

一种光纤弯曲传感器及光纤弯曲传感器的制备方法 Download PDF

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WO2019222932A1
WO2019222932A1 PCT/CN2018/087931 CN2018087931W WO2019222932A1 WO 2019222932 A1 WO2019222932 A1 WO 2019222932A1 CN 2018087931 W CN2018087931 W CN 2018087931W WO 2019222932 A1 WO2019222932 A1 WO 2019222932A1
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fiber
optical fiber
microlens
microtube
micro
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PCT/CN2018/087931
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English (en)
French (fr)
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何俊
徐锡镇
王义平
侯茂祥
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深圳大学
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Priority to PCT/CN2018/087931 priority Critical patent/WO2019222932A1/zh
Publication of WO2019222932A1 publication Critical patent/WO2019222932A1/zh

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre

Definitions

  • the present invention relates to the field of optical fiber technology, and in particular, to an optical fiber bending sensor and a method for preparing the optical fiber bending sensor.
  • Optical fiber bending sensors have many advantages, such as small size, easy integration, strong high temperature resistance, strong electromagnetic interference resistance, not affected by environmental dust, linear response, and high sensitivity. They are used in many fields: the health status of large buildings and Safety warning, real-time sensing of deformation and bending of the force structure of an aerospace vehicle in flight, motion direction sensing of intelligent robotic arms in the automation industry, and real-time sensing of the motion status of the detection head when detecting internal human tissue structures in biomedicine, etc. .
  • the existing optical fiber bending sensors for measuring bending mainly include long-period fiber gratings, etched Bragg fiber gratings, and fiber Fabry-Perot interferometers.
  • long-period fiber gratings are subject to external refractive index and temperature changes. Interference affects the sensitivity of long-period fiber gratings; etched Bragg fiber gratings can also be used for bending sensing, but their strong strength is greatly reduced, they are more vulnerable to damage, and the sensitivity in the microbend range is not high; fiber Fabry-Perot
  • the Luo interferometer is directly used to measure bending. Its low contrast will affect the sensitivity.
  • the resonant cavity medium of the fiber Fabry-Perot interferometer is air, and the contrast will change with the cavity. As the length increases, it decreases sharply because the exit angle of the single-mode fiber is larger and the cavity length is increased. After most of the energy passes through the second reflecting surface, it cannot be coupled back into the single-mode fiber, which causes the contrast to decrease sharply as the cavity length increases. , Resulting in low sensitivity.
  • the existing optical fiber bending sensors mainly have the technical problems of low measurement sensitivity and inaccurate measurement.
  • the main purpose of the present invention is to provide an optical fiber bend sensor and a method for preparing the optical fiber bend sensor, which aim to solve the technical problems of low sensitivity and inaccurate measurement existing in the existing optical fiber bend sensors.
  • a first aspect of the present invention provides an optical fiber bending sensor, the optical fiber bending sensor includes: a transmission optical fiber, a microlens optical fiber, a microtube, and a reflective optical fiber;
  • One end of the transmission fiber is connected to the system to be tested, the other end of the transmission fiber is connected to one end of the microlens fiber, and the other end of the microlens fiber is connected to one end of the microtube.
  • the other end of the microtube is connected to the reflective optical fiber;
  • the transmission fiber, the micro lens fiber, the micro tube and the reflection fiber have the same coaxiality, the interface of the micro lens fiber and the interface of the micro tube are parallel, and the interface of the micro tube and the reflection fiber The interfaces are parallel to form a Fabry-Perot cavity;
  • the system under test emits a light beam to the transmission fiber, and enters the micro lens fiber through the transmission fiber.
  • the micro lens fiber is used to collimate the light beam into the micro fiber. Tube, the light beam enters the reflective fiber from the microtube, and reflects back from the reflective fiber to the microtube, and performs beam interference in the Fabry-Perot cavity.
  • the transmission fiber is a quartz fiber.
  • a second aspect of the present invention provides a method for preparing an optical fiber bend sensor, the preparation method is used to prepare the optical fiber bend sensor according to the first aspect, and the preparation method includes:
  • the other end of the microtube is connected to a reflective optical fiber.
  • step of connecting the other end of the microlens optical fiber to one end of the microtube further includes:
  • a cutting operation is performed on the other end of the microlens optical fiber to obtain a microlens optical fiber with a 1/4 focusing period length.
  • performing a cutting operation on the other end of the microlens optical fiber to obtain a microlens optical fiber with a 1/4 focusing period length includes:
  • the optical fiber clamping device is installed on a precision displacement platform, the microlens optical fiber is placed on the optical fiber clamping device, and a connection point of the microlens optical fiber and the transmission optical fiber and a precision optical fiber cutting blade are observed through a microscope. The distance, a cutting operation is performed at a position that reaches 1/4 of the focusing period of the microlens fiber, to obtain a microlens fiber having a length of 1/4 focusing period.
  • step of connecting the other end of the microlens optical fiber with one end of the microtube includes:
  • the discharge position is adjusted to one end of the microlens fiber after the cutting operation, and the discharge amount and discharge time are lower than those of a conventional single-mode fiber. Connected at one end.
  • the step of connecting the other end of the microtube with a reflective optical fiber includes:
  • the discharge position is adjusted to one end of the reflective optical fiber, and the discharge amount and discharge time are lower than those of a conventional single-mode optical fiber, and the other end of the microtube is connected to one end of the reflective optical fiber to maintain the transmission optical fiber.
  • the coaxiality of the microlens fiber, the microtube, and the reflective fiber keeping the interface of the microlens fiber and the interface of the microtube parallel, and maintaining the interface of the microtube and the reflection fiber The interface is parallel.
  • the present invention provides an optical fiber bending sensor.
  • the optical fiber bending sensor includes: a transmission fiber, a microlens fiber, a microtube, and a reflection fiber. Connection, the other end of the micro lens fiber is connected to one end of the micro tube, the other end of the micro tube is connected to the reflective fiber, and the transmission fiber, micro lens fiber, micro tube and reflective fiber have the same coaxiality.
  • the interface is parallel to the interface of the microtube, and the interface of the microtube is parallel to the interface of the reflective fiber to form a Fabry-Perot cavity.
  • the system under test sends a beam to the microlens fiber, and the system to be tested sends a beam to the transmission fiber.
  • the transmission lens is used to enter the microlens fiber.
  • the microlens fiber is used to collimate the light beam and enter the microtube.
  • the light beam enters the reflective fiber from the microtube and reflects back from the reflective fiber to the microtube.
  • Beam interference occurs in the Rei-Perot cavity.
  • the transmission fiber, micro lens fiber, micro tube and reflective fiber have the same coaxiality, and the interface of the micro lens fiber and the interface of the micro tube are parallel and fine.
  • the interface of the tube and the interface of the reflective fiber are parallel, so that the prepared Fabry-Perot cavity has a high contrast, and the optical fiber bending sensor prepared thereby has high sensitivity and more accurate measurement.
  • FIG. 1 is a schematic structural diagram of an optical fiber bending sensor according to a first embodiment of the present invention
  • FIG. 2 is a schematic flowchart of a method for manufacturing an optical fiber bending sensor according to a second embodiment of the present invention
  • FIG. 3 is another schematic flowchart of a method for manufacturing an optical fiber bending sensor according to a second embodiment of the present invention.
  • FIG. 1 is a schematic structural diagram of an optical fiber bend sensor according to a first embodiment of the present invention.
  • the optical fiber bend sensor includes: a transmission optical fiber 10, a microlens optical fiber 20, a microtube 30, and a reflective optical fiber 40;
  • One end of the transmission optical fiber 10 is connected to the system to be tested, the other end of the transmission optical fiber 10 is connected to one end of the microlens optical fiber 20, the other end of the microlens optical fiber 20 is connected to one end of the microtube 30, and the other end of the microtube 30 Connected with reflective optical fiber 40;
  • the transmission fiber 10, the micro lens fiber 20, the micro tube 30, and the reflection fiber 40 have the same coaxiality.
  • the interface of the micro lens fiber 20 and the interface of the micro tube 30 are parallel.
  • the interface of the micro tube 30 and the interface of the reflection fiber 40 are the same. Parallel to form a Fabry-Perot cavity;
  • the system under test emits a light beam to the transmission fiber 10 and enters the microlens fiber 20 through the transmission fiber 10.
  • the microlens fiber 20 is used to collimate the light beam and enter the microtube 30, and the light beam enters from the microtube 30
  • the reflective optical fiber 40 reflects back from the reflective optical fiber 40 to the microtube 30, and performs beam interference in the Fabry-Perot cavity.
  • the transmission fiber 10 is a quartz fiber.
  • the microlens fiber 20 is a quartz fiber having a microlens function.
  • the microtube 30 is a quartz tube having a hollow structure.
  • the reflection fiber 40 is a quartz fiber.
  • the materials of the transmission fiber 10, the microlens fiber 20, the microtube 30, and the reflection fiber 40 are the same.
  • the microlens optical fiber 20 In the process of fusion-connecting the transmission optical fiber 10, the microlens optical fiber 20, the microtube 30, and the reflection optical fiber 40, it is necessary to maintain a high mechanical strength and reduce the deformation of the microtube 30.
  • the dotted line in FIG. 1 is only for distinguishing the transmission optical fiber 10, the microlens optical fiber 20, the microtube 30, and the reflective optical fiber 40, and has no other meaning.
  • an optical fiber bending sensor includes: a transmission optical fiber 10, a microlens optical fiber 20, a microtube 30, and a reflective optical fiber 40.
  • One end of the transmission optical fiber 10 is connected to a system to be tested and transmitted.
  • the other end of the optical fiber 10 is connected to one end of the microlens optical fiber 20, the other end of the microlens optical fiber 20 is connected to one end of the microtube 30, and the other end of the microtube 30 is connected to the reflection optical fiber 40, and the transmission optical fiber 10 and microlens are connected.
  • the optical fiber 20, the microtube 30, and the reflective fiber 40 have the same coaxiality.
  • the interface of the microlens fiber 20 and the interface of the microtube 30 are parallel, and the interface of the microtube 30 and the interface of the reflective fiber 40 are parallel to form a fabric.
  • the system under test emits a beam of light to the transmission fiber 10 and enters the microlens fiber 20 through the transmission fiber 10.
  • the microlens fiber 20 is used to collimate the beam and enter the microtube 30.
  • the microfiber 30 enters the reflective optical fiber 40 and reflects back from the microfiber 30 to the microfiber 30, and performs beam interference in the Fabry-Perot cavity.
  • the transmission fiber 10 the micro lens fiber 20, the micro tube 30 and the reflection fiber 40 have the same coaxiality, and the interface of the micro lens fiber 20 and the micro tube 30
  • the interface of the microtube 30 is parallel, and the interface of the microtube 30 and the reflective fiber 40 are parallel, so that the prepared Fabry-Perot cavity has a high contrast, and the optical fiber bending sensor prepared thereby has high sensitivity and more accurate measurement.
  • FIG. 2 is a schematic flowchart of a method for preparing an optical fiber bending sensor according to a second embodiment of the present invention
  • FIG. 3 is a method for preparing an optical fiber bending sensor according to a second embodiment of the present invention. Another flow diagram, including:
  • Step 201 Connect one end of the transmission optical fiber 10 and one end of the microlens optical fiber 20;
  • one end b of the transmission optical fiber 10 and one end c of the microlens optical fiber 20 are connected.
  • Step 202 Perform a cutting operation on the other end of the micro-lens optical fiber 20 to obtain a micro-lens optical fiber 20 with a length of 1/4 focusing period;
  • the other end d of the microlens optical fiber 20 is cut by using the optical fiber precision cutting blade 50 to obtain the microlens optical fiber 20 with a 1/4 focusing period length.
  • the optical fiber clamping device is installed on a precision displacement platform, the microlens optical fiber 20 is placed on the optical fiber clamping device, and the connection point of the b end of the microlens optical fiber 20 and the transmission optical fiber 10c end and the optical fiber precision cutting blade are observed through a microscope.
  • a cutting operation is performed at a position that reaches 1/4 of the focusing period of the microlens optical fiber 20 to obtain the microlens fiber 20 having a 1/4 focusing period length.
  • the other end d end of the microlens optical fiber 20 becomes a d1 end.
  • Step 203 Connect the other end d1 of the microlens optical fiber 20 and the one end e of the microtube 30;
  • the other end d1 of the microlens optical fiber 20 is connected to one end e of the microtube 30.
  • the discharge position is adjusted to one end d1 of the microlens fiber 20 after the cutting operation, and the microlens fiber after the slicing operation will be used when the discharge volume and discharge time are lower than those of the conventional single-mode fiber.
  • One end d1 end of 20 is connected to one end e end of the microtube 30.
  • Step 204 Connect the other end f of the microtube 30 to the reflective optical fiber 40.
  • the f-end of the other end of the microtube 30 is connected to the g-end of the reflective optical fiber 40.
  • the discharge position is adjusted and biased toward the g end of one end of the reflective optical fiber 40.
  • the discharge amount and discharge time of the single-mode optical fiber are lower than that of the conventional single-mode fiber, and the f end of the other end of the microtube 30 is connected to the g end of one end of the reflective optical fiber 40.
  • the microlens optical fiber 20, the microtube 30, and the reflective optical fiber 40 to keep the interface of the microlens optical fiber 20 and the interface of the microtube 30 parallel, and to maintain the interface of the microtube 30 and the interface of the reflective fiber 40 parallel.
  • the dotted line in FIG. 3 is only for distinguishing the transmission optical fiber 10, the microlens optical fiber 20, the microtube 30, and the reflective optical fiber 40, and has no other meaning.
  • one end of the transmission optical fiber 10 is connected to one end of the microlens optical fiber 20, the other end of the microlens optical fiber 20 is connected to one end of the microtube 30, and the other end of the microtube 30 is connected to the reflection optical fiber. 40-phase connection. Because in the prepared optical fiber bending sensor, the transmission fiber 10, the micro lens fiber 20, the micro tube 30 and the reflection fiber 40 have the same coaxiality, and the interface of the micro lens fiber 20 and the interface of the micro tube 30 are parallel, and the micro tube The interface of 30 and the interface of the reflective optical fiber 40 are parallel, so that the prepared Fabry-Perot cavity has a high contrast, and the optical fiber bending sensor thus prepared has high sensitivity and more accurate measurement.

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Abstract

本发明公开一种光纤弯曲传感器及光纤弯曲传感器的制备方法,包括传输光纤、微透镜光纤、微细管及反射光纤,传输光纤一端与待测试系统相连接,另一端与微透镜光纤一端相连接,微透镜光纤另一端与微细管一端相连接,微细管另一端与反射光纤相连接,传输光纤、微透镜光纤、微细管及反射光纤具有相同同轴度,微透镜光纤和微细管的界面平行,微细管的界面和反射光纤的界面平行,以形成法布里-珀罗腔,微透镜光纤将光束进行光束准直操作,并射入至微细管,光束从微细管射入反射光纤,并从反射光纤反射回微细管,在法布里-珀罗腔内进行光束干涉,使得制备的法布里-珀罗腔具有较高的对比度,由此制备的光纤弯曲传感器的灵敏度高,测量准确。

Description

一种光纤弯曲传感器及光纤弯曲传感器的制备方法
本发明涉及光纤技术领域,尤其涉及一种光纤弯曲传感器及光纤弯曲传感器的制备方法。
随着科技的发展,为了解决各个领域的不同需求,各种光纤弯曲传感器被研制出来。光纤弯曲传感器有众多优点,如体积小、易于集成、耐高温能力强、抗电磁干扰能力强、不受环境尘埃影响、响应线性、灵敏度高等,被应用于多种领域:大型建筑的健康状态以及安全预警、航空航天飞行器的受力结构在飞行状态下实时感知形变弯曲、自动化工业中的智能机械臂的运动方向感知、生物医疗中的人体组织结构内部探测时需要实时感知探测头的运动状态等。
但是现有的测量弯曲的光纤弯曲传感器,主要有长周期光纤光栅、经过腐蚀的布拉格光纤光栅和光纤法布里-珀罗干涉仪,其中,长周期光纤光栅在外界折射率和温度变化时会受到干扰,影响长周期光纤光栅的灵敏度;经过腐蚀的布拉格光纤光栅也能用于弯曲传感,但是其坚固强度大大下降,更容易受到破坏,微弯范围灵敏度不高;光纤法布里-珀罗干涉仪直接用于测量弯曲,其对比度过低会影响灵敏度,波长解调的情况下会影响解调精度,光纤法布里-珀罗干涉仪的谐振腔介质是空气,对比度会随着腔长增加而急剧减小,因为单模光纤的出射角较大,腔长增加,大部分能量经过第二个反射面后,并不能耦合回单模光纤中,使得对比度随着腔长增加急剧下降,导致灵敏度不高。
因此,现有的光纤弯曲传感器主要存在着测量的灵敏度低,测量不准确的技术问题。
发明内容
本发明的主要目的在于提供一种光纤弯曲传感器及光纤弯曲传感器的制备方法 ,旨在解决现有的光纤弯曲传感器存在的测量的灵敏度低,测量不准确的技术问题。
为实现上述目的,本发明第一方面提供一种光纤弯曲传感器,所述光纤弯曲传感器包括:传输光纤、微透镜光纤、微细管及反射光纤;
所述传输光纤的一端与待测试系统相连接,所述传输光纤的另一端与所述微透镜光纤的一端相连接,所述微透镜光纤的另一端与所述微细管的一端相连接,所述微细管的另一端与所述反射光纤相连接;
所述传输光纤、微透镜光纤、微细管及反射光纤具有相同的同轴度,所述微透镜光纤的界面和所述微细管的界面相平行,所述微细管的界面和所述反射光纤的界面相平行,以形成法布里-珀罗腔;
所述待测试系统发出光束至所述传输光纤,并通过所述传输光纤入射至所述微透镜光纤,所述微透镜光纤用于将所述光束进行光束准直操作,并射入所述微细管,所述光束从所述微细管射入所述反射光纤,并从所述反射光纤反射回所述微细管,在所述法布里-珀罗腔内进行光束干涉。进一步的,所述传输光纤为石英光纤。
为实现上述目的,本发明第二方面提供一种光纤弯曲传感器的制备方法,所述制备方法用于制备如第一方面所述的光纤弯曲传感器,所述制备方法包括:
将传输光纤的一端与微透镜光纤的一端相连接;
将所述微透镜光纤的另一端与微细管的一端相连接;
将所述微细管的另一端与反射光纤相连接。
进一步的,所述将所述微透镜光纤的另一端与微细管的一端相连接,之前还包括:
对所述微透镜光纤的另一端进行切割操作,得到1/4聚焦周期长度的微透镜光纤。
进一步的,所述对所述微透镜光纤的另一端进行切割操作,得到1/4聚焦周期长度的微透镜光纤,包括:
将光纤夹持装置安装在精密位移平台上,将所述微透镜光纤置于所述光纤夹持装置上,通过显微镜观察所述微透镜光纤和所述传输光纤的连接点和光纤精密切割刀的距离,在达到所述微透镜光纤的聚焦周期的1/4的位置进行切割操作,得到1/4聚焦周期长度的微透镜光纤。
进一步的,所述将所述微透镜光纤的另一端与微细管的一端相连接,包括:
利用光纤熔接机,将放电位置调控偏向进行切割操作后的微透镜光纤一端,采用低于熔接常规单模光纤的放电量及放电时间,将进行切割操作后的微透镜光纤一端与所述微细管的一端相连接。
进一步的,所述将所述微细管的另一端与反射光纤相连接,包括:
将放电位置调控偏向所述反射光纤的一端,采用低于熔接常规单模光纤的放电量及放电时间,将所述微细管的另一端与所述反射光纤的一端相连接,保持所述传输光纤、所述微透镜光纤、所述微细管及所述反射光纤的同轴度,保持所述微透镜光纤的界面和所述微细管的界面平行,保持所述微细管的界面和所述反射光纤的界面平行。
本发明提供一种光纤弯曲传感器,光纤弯曲传感器包括:传输光纤、微透镜光纤、微细管及反射光纤,传输光纤的一端与待测试系统相连接,传输光纤的另一端与微透镜光纤的一端相连接,微透镜光纤的另一端与微细管的一端相连接,微细管的另一端与反射光纤相连接,传输光纤、微透镜光纤、微细管及反射光纤具有相同的同轴度,微透镜光纤的界面和微细管的界面相平行,微细管的界面和反射光纤的界面相平行,以形成法布里-珀罗腔,待测试系统发出光束至微透镜光纤,待测试系统发出光束至传输光纤,并通过传输光纤入射至微透镜光纤,微透镜光纤用于将光束进行光束准直操作,并射入微细管,光束从微细管射入反射光纤,并从反射光纤反射回微细管,在法布里-珀罗腔内进行光束干涉。与现有技术相比,因为制备的光纤弯曲传感器中的,传输光纤、微透镜光纤、微细管及反射光纤具有相同的同轴度,且微透镜光纤的界面和微细管的界面相平行,微细管的界面和反射光纤的界面相平行,使得制备的法布里-珀罗腔具有较高的对比度,由此制备的光纤弯曲传感器的灵敏度高,测量更加准确。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1为本发明第一实施例提供的一种光纤弯曲传感器的结构示意图;
图2为本发明第二实施例提供的一种光纤弯曲传感器的制备方法的流程示意图;
图3为本发明第二实施例提供的一种光纤弯曲传感器的制备方法的另一流程示意图。
具体实施方式
为使得本发明的发明目的、特征、优点能够更加的明显和易懂,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而非全部实施例。基于本发明中的实施例,本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
为了说明本发明所述的技术方案,下面通过具体实施例来进行说明。
请参阅图1,图1为本发明第一实施例提供的一种光纤弯曲传感器的结构示意图,光纤弯曲传感器包括:传输光纤10、微透镜光纤20、微细管30及反射光纤40;
传输光纤10的一端与待测试系统相连接,传输光纤10的另一端与微透镜光纤20的一端相连接,微透镜光纤20的另一端与微细管30的一端相连接,微细管30的另一端与反射光纤40相连接;
传输光纤10、微透镜光纤20、微细管30及反射光纤40具有相同的同轴度,微透镜光纤20的界面和微细管30的界面相平行,微细管30的界面和反射光纤40的界面相平行,以形成法布里-珀罗腔;
待测试系统发出光束至传输光纤10,并通过传输光纤10入射至微透镜光纤20,微透镜光纤20用于将光束进行光束准直操作,并射入微细管30,光束从微细管30射入反射光纤40,并从反射光纤40反射回微细管30,在法布里-珀罗腔内进行光束干涉。
其中,传输光纤10为石英光纤。微透镜光纤20为具有微透镜作用的石英光纤。微细管30为具有中空结构的石英管。反射光纤40为石英光纤。
其中,传输光纤10、微透镜光纤20、微细管30及反射光纤40的材质是相同的。
其中,将传输光纤10、微透镜光纤20、微细管30及反射光纤40熔融相接的过程中,需要保持较高的机械强度,且减少微细管30的形变量。
需要说明的是,图1中的虚线仅为了区分传输光纤10、微透镜光纤20、微细管30及反射光纤40,不具有其他含义。
在本发明实施例中,提供了一种光纤弯曲传感器,光纤弯曲传感器包括:传输光纤10、微透镜光纤20、微细管30及反射光纤40,传输光纤10的一端与待测试系统相连接,传输光纤10的另一端与微透镜光纤20的一端相连接,微透镜光纤20的另一端与微细管30的一端相连接,微细管30的另一端与反射光纤40相连接,传输光纤10、微透镜光纤20、微细管30及反射光纤40具有相同的同轴度,微透镜光纤20的界面和微细管30的界面相平行,微细管30的界面和反射光纤40的界面相平行,以形成法布里-珀罗腔,待测试系统发出光束至传输光纤10,并通过传输光纤10入射至微透镜光纤20,微透镜光纤20用于将光束进行光束准直操作,并射入微细管30,光束从微细管30射入反射光纤40,并从反射光纤40反射回微细管30,在法布里-珀罗腔内进行光束干涉。与现有技术相比,因为制备的光纤弯曲传感器中的,传输光纤10、微透镜光纤20、微细管30及反射光纤40具有相同的同轴度,且微透镜光纤20的界面和微细管30的界面相平行,微细管30的界面和反射光纤40的界面相平行,使得制备的法布里-珀罗腔具有较高的对比度,由此制备的光纤弯曲传感器的灵敏度高,测量更加准确。
请参阅图2及图3,图2为本发明第二实施例提供的一种光纤弯曲传感器的制备方法的流程示意图,图3为本发明第二实施例提供的一种光纤弯曲传感器的制备方法的另一流程示意图,包括:
步骤201、将传输光纤10的一端与微透镜光纤20的一端相连接;
在本发明实施例中,如图3所示,将传输光纤10的一端b端和微透镜光纤20的一端c端相连接。
步骤202、对微透镜光纤20的另一端进行切割操作,得到1/4聚焦周期长度的微透镜光纤20;
在本发明实施例中,如图3所示,利用光纤精密切割刀50对微透镜光纤20的另一端d端进行切割操作,得到1/4聚焦周期长度的微透镜光纤20。
具体的,将光纤夹持装置安装在精密位移平台上,将微透镜光纤20置于光纤夹持装置上,通过显微镜观察微透镜光纤20的b端和传输光纤10c端的连接点和光纤精密切割刀50的距离,在达到微透镜光纤20的聚焦周期的1/4的位置进行切割操作,得到1/4聚焦周期长度的微透镜光纤20。此时,微透镜光纤20的另一端d端变成d1端。
步骤203、将微透镜光纤20的另一端d1端与微细管30的一端e端相连接;
在本发明实施例中,如图3所示,将微透镜光纤20的另一端d1端与微细管30的一端e端相连接。
具体的,利用光纤熔接机,将放电位置调控偏向进行切割操作后的微透镜光纤20一端d1端,采用低于熔接常规单模光纤的放电量及放电时间,将进行切割操作后的微透镜光纤20一端d1端与微细管30的一端e端相连接。
步骤204、将微细管30的另一端f端与反射光纤40相连接。
在本发明实施例中,如图3所示,将微细管30的另一端f端与反射光纤40的g端相连接。
具体的,将放电位置调控偏向反射光纤40的一端g端,采用低于熔接常规单模光纤的放电量及放电时间,将微细管30的另一端f端与反射光纤40的一端g端相连接,保持传输光纤10、微透镜光纤20、微细管30及反射光纤40的同轴度,保持微透镜光纤20的界面和微细管30的界面平行,保持微细管30的界面和反射光纤40的界面平行。
需要说明的是,图3中的虚线仅为了区分传输光纤10、微透镜光纤20、微细管30及反射光纤40,不具有其他含义。
在本发明实施例中,将传输光纤10的一端与微透镜光纤20的一端相连接,将微透镜光纤20的另一端与微细管30的一端相连接,将微细管30的另一端与反射光纤40相连接。因为制备的光纤弯曲传感器中的,传输光纤10、微透镜光纤20、微细管30及反射光纤40具有相同的同轴度,且微透镜光纤20的界面和微细管30的界面相平行,微细管30的界面和反射光纤40的界面相平行,使得制备的法布里-珀罗腔具有较高的对比度,由此制备的光纤弯曲传感器的灵敏度高,测量更加准确。
在上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述的部分,可以参见其它实施例的相关描述。
以上为对本发明所提供的一种光纤弯曲传感器及光纤弯曲传感器的制备方法的描述,对于本领域的技术人员,依据本发明实施例的思想,在具体实施方式及应用范围上均会有改变之处,综上,本说明书内容不应理解为对本发明的限制。

Claims (6)

  1. 一种光纤弯曲传感器,其特征在于,所述光纤弯曲传感器包括:传输光纤、微透镜光纤、微细管及反射光纤;
    所述传输光纤的一端与待测试系统相连接,所述传输光纤的另一端与所述微透镜光纤的一端相连接,所述微透镜光纤的另一端与所述微细管的一端相连接,所述微细管的另一端与所述反射光纤相连接;
    所述传输光纤、微透镜光纤、微细管及反射光纤具有相同的同轴度,所述微透镜光纤的界面和所述微细管的界面相平行,所述微细管的界面和所述反射光纤的界面相平行,以形成法布里-珀罗腔;
    所述待测试系统发出光束至所述传输光纤,并通过所述传输光纤入射至所述微透镜光纤,所述微透镜光纤用于将所述光束进行光束准直操作,并射入所述微细管,所述光束从所述微细管射入所述反射光纤,并从所述反射光纤反射回所述微细管,在所述法布里-珀罗腔内进行光束干涉。
  2. 一种光纤弯曲传感器的制备方法,所述制备方法用于制备如权利要求1所述的光纤弯曲传感器,其特征在于,所述制备方法包括:
    将传输光纤的一端与微透镜光纤的一端相连接;
    将所述微透镜光纤的另一端与微细管的一端相连接;
    将所述微细管的另一端与反射光纤相连接。
  3. 根据权利要求2所述的光纤弯曲传感器,其特征在于,所述将所述微透镜光纤的另一端与微细管的一端相连接,之前还包括:
    对所述微透镜光纤的另一端进行切割操作,得到1/4聚焦周期长度的微透镜光纤。
  4. 根据权利要求2所述的光纤弯曲传感器,其特征在于,所述对所述微透镜光纤的另一端进行切割操作,得到1/4聚焦周期长度的微透镜光纤,包括:
    将光纤夹持装置安装在精密位移平台上,将所述微透镜光纤置于所述光纤夹持装置上,通过显微镜观察所述微透镜光纤和所述传输光纤的连接点和光纤精密切割刀的距离,在达到所述微透镜光纤的聚焦周期的1/4的位置进行切割操作,得到1/4聚焦周期长度的微透镜光纤。
  5. 根据权利要求3所述的光纤弯曲传感器,其特征在于,所述将所述微透镜光纤的另一端与微细管的一端相连接,包括:
    利用光纤熔接机,将放电位置调控偏向进行切割操作后的微透镜光纤一端,采用低于熔接常规单模光纤的放电量及放电时间,将进行切割操作后的微透镜光纤一端与所述微细管的一端相连接。
  6. 根据权利要求2所述的光纤弯曲传感器,其特征在于,所述将所述微细管的另一端与反射光纤相连接,包括:
    将放电位置调控偏向所述反射光纤的一端,采用低于熔接常规单模光纤的放电量及放电时间,将所述微细管的另一端与所述反射光纤的一端相连接,保持所述传输光纤、所述微透镜光纤、所述微细管及所述反射光纤的同轴度,保持所述微透镜光纤的界面和所述微细管的界面平行,保持所述微细管的界面和所述反射光纤的界面平行。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238390A (zh) * 2020-03-12 2020-06-05 燕山大学 一种检测金属深孔微弯的探测器及其方法
CN115389538A (zh) * 2022-08-09 2022-11-25 深圳市埃芯半导体科技有限公司 X射线分析装置及方法
CN116295657A (zh) * 2023-05-16 2023-06-23 山西省建筑科学研究院集团有限公司 一种建筑结构健康监测装置及其使用方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006208264A (ja) * 2005-01-31 2006-08-10 Fujikura Ltd 光ファイバセンサ
CN101178464A (zh) * 2007-12-13 2008-05-14 北京理工大学 微透镜光纤法布里-珀罗干涉仪
KR20090087600A (ko) * 2008-02-13 2009-08-18 이규완 벤딩 센서
CN102374874A (zh) * 2011-09-20 2012-03-14 重庆大学 内嵌石英毛细管的全石英光纤Fabry-Perot干涉传感器及制作方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006208264A (ja) * 2005-01-31 2006-08-10 Fujikura Ltd 光ファイバセンサ
CN101178464A (zh) * 2007-12-13 2008-05-14 北京理工大学 微透镜光纤法布里-珀罗干涉仪
KR20090087600A (ko) * 2008-02-13 2009-08-18 이규완 벤딩 센서
CN102374874A (zh) * 2011-09-20 2012-03-14 重庆大学 内嵌石英毛细管的全石英光纤Fabry-Perot干涉传感器及制作方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111238390A (zh) * 2020-03-12 2020-06-05 燕山大学 一种检测金属深孔微弯的探测器及其方法
CN115389538A (zh) * 2022-08-09 2022-11-25 深圳市埃芯半导体科技有限公司 X射线分析装置及方法
CN115389538B (zh) * 2022-08-09 2023-12-29 深圳市埃芯半导体科技有限公司 X射线分析装置及方法
CN116295657A (zh) * 2023-05-16 2023-06-23 山西省建筑科学研究院集团有限公司 一种建筑结构健康监测装置及其使用方法
CN116295657B (zh) * 2023-05-16 2023-08-11 山西省建筑科学研究院集团有限公司 一种建筑结构健康监测装置及其使用方法

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