WO2019221536A1 - Capteur de pression et dispositif d'affichage d'image comprenant ce dernier - Google Patents

Capteur de pression et dispositif d'affichage d'image comprenant ce dernier Download PDF

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Publication number
WO2019221536A1
WO2019221536A1 PCT/KR2019/005895 KR2019005895W WO2019221536A1 WO 2019221536 A1 WO2019221536 A1 WO 2019221536A1 KR 2019005895 W KR2019005895 W KR 2019005895W WO 2019221536 A1 WO2019221536 A1 WO 2019221536A1
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WO
WIPO (PCT)
Prior art keywords
electrode layer
pressure sensor
layer
tunneling
electrode
Prior art date
Application number
PCT/KR2019/005895
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English (en)
Korean (ko)
Inventor
최병진
Original Assignee
동우화인켐 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020190057406A external-priority patent/KR20190132259A/ko
Application filed by 동우화인켐 주식회사 filed Critical 동우화인켐 주식회사
Publication of WO2019221536A1 publication Critical patent/WO2019221536A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means

Definitions

  • the present invention relates to a pressure sensor and an image display device including the same. More specifically, the present invention relates to a pressure sensor including a plurality of electrode layers and an image display device including the same.
  • a flat panel display device having features such as thinness, light weight, and low power consumption, for example, a liquid crystal display device, a plasma display panel device, Electro luminescent display devices and organic light-emitting diode display devices have been studied.
  • various sensor members are coupled to the display device to implement a user's command input.
  • a touch sensor or a touch screen panel that receives a user's command through a touch on the screen of the display device is combined.
  • a pressure sensor may be coupled to the display device to sense the pressure applied through the user's finger so that the operation of the display device is started or the user's command is performed.
  • the thickness of the touch sensor or the pressure sensor also becomes thin.
  • even the minute unevenness and the step by the electrode, the insulating pattern, etc. of the sensor member may inhibit the overall flattening of the sensor member, and the thickness uniformity of the display device may also be deteriorated.
  • a touch screen panel in which a touch sensor is coupled to various image display devices has recently been developed, but it does not include the case where the pressure sensor is coupled together.
  • One object of the present invention is to provide a pressure sensor having improved mechanical and electrical reliability.
  • One object of the present invention is to provide an image display device including a pressure sensor having improved mechanical and electrical reliability.
  • a first electrode layer comprising a plurality of sensing electrode patterns separated from each other;
  • a second electrode layer disposed to face the first electrode layer and serving as a common electrode for the plurality of sensing electrode patterns; And a tunneling layer disposed between the first electrode layer and the second electrode layer.
  • the pressure sensor In the above 1, wherein the second electrode layer is overlapped with the plurality of sensing electrode patterns in a plane direction, the pressure sensor.
  • the pressure sensor is spaced apart from the first electrode layer.
  • the first substrate includes an active region in which the sensing electrode patterns are arranged and a peripheral region surrounding the active region.
  • the first electrode layer further comprises a first wiring branched from each of the sensing electrode patterns and extending in the active region.
  • the pressure sensor of 12 above further comprising at least one via pad arranged on the peripheral region of the first substrate and electrically connecting the via structure and the second wiring to each other.
  • the via structure penetrates through the coupling structure.
  • tunneling layer and the second electrode layer each have a single layer shape covering the sensing electrode patterns as a whole in a planar direction.
  • the pressure sensor according to the embodiments of the present invention is disposed on the first electrode layer and the first electrode layer including a plurality of sensing electrode patterns that provide a sensing domain, and is provided as a common electrode for the plurality of sensing electrode patterns. It may include a second electrode layer. Since the second electrode layer is provided as a common electrode layer covering the plurality of independent sensing electrode patterns, the flattening of the pressure sensor is increased and a thinner pressure sensor can be realized.
  • a tunneling layer may be disposed between the first electrode layer and the second electrode layer to provide selective signal generation in a region to which pressure is applied.
  • the tunneling layer may also be provided as a common layer for the sensing electrode patterns included in the first electrode layer, thereby improving flatness of the pressure sensor.
  • a via structure may connect the second electrode layer to the driving circuit at the same level as the first electrode layer. Accordingly, the bonding process between the second electrode layer and the first electrode layer and the flexible circuit board may be implemented in one layer, and thus, a thinned pressure sensor may be implemented while reducing the bezel area.
  • the pressure sensor can be applied to an image display device such as a flexible display to effectively provide folding or folding characteristics.
  • FIG. 1 is a schematic cross-sectional view illustrating a pressure sensor in accordance with example embodiments.
  • FIG. 2 is a schematic plan view illustrating an arrangement of a first electrode layer of a pressure sensor according to example embodiments.
  • FIG 3 is a schematic plan view illustrating a coupling structure of a pressure sensor according to example embodiments.
  • 4 and 5 are schematic plan views for describing a tunneling layer and a second electrode layer, respectively, according to exemplary embodiments.
  • FIG. 6 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.
  • FIG. 7 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.
  • FIG. 8 is a schematic plan view for explaining an arrangement of a first electrode layer of a pressure sensor according to some exemplary embodiments.
  • FIG. 9 is a schematic plan view illustrating a coupling structure of a pressure sensor in accordance with some example embodiments.
  • FIG. 10 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.
  • FIG. 11 is a schematic cross-sectional view illustrating an image display device according to example embodiments.
  • Embodiments of the present invention provide a pressure sensor including a first electrode layer including a plurality of spaced apart sensing electrode patterns and a second electrode layer disposed on the first electrode layer and provided as a common counter electrode to the sensing electrode patterns. to provide.
  • an image display device including the pressure sensor is provided.
  • the pressure sensor may be a resistive sensor.
  • an electrical signal may be generated by detecting a voltage change caused by energization according to the pressure of the first and second electrode layers.
  • the pressure sensor may be disposed on the rear side of the image display device so as not to be exposed to the user.
  • 1 is a schematic cross-sectional view illustrating a pressure sensor in accordance with example embodiments.
  • 2 is a schematic plan view illustrating an arrangement of a first electrode layer of a pressure sensor according to example embodiments.
  • 3 is a schematic plan view illustrating a coupling structure of a pressure sensor according to example embodiments.
  • 4 and 5 are schematic plan views for describing a tunneling layer and a second electrode layer, respectively, according to exemplary embodiments.
  • the pressure sensor may include a first electrode layer 110 and a second electrode layer 150 facing each other.
  • a tunneling layer 140 may be disposed on the bottom surface of the second electrode layer 150.
  • an air gap 130 may be formed between the tunneling layer 140 and the first electrode layer 110.
  • the first electrode layer 110 may be disposed on the first substrate 100a.
  • the first substrate 100a for example, a substrate material and an insulating film material which are commonly used in an image display device may be used without particular limitation.
  • the first substrate 100a may be a cyclic olefin polymer (COP), polyethylene terephthalate (PET), polyacrylate (PAR), polyetherimide (PEI), polyethylene naphthalate (PEN), or polyphenylene sulfide (PPS), polyallylate, polyimide (PI), cellulose acetate propionate (CAP), polyethersulfone (PES), cellulose triacetate (TAC), polycarbonate (PC), cyclic olefin copolymer Polymer-based materials such as (COC), polymethyl methacrylate (PMMA), and the like.
  • COP cyclic olefin polymer
  • PET polyethylene terephthalate
  • PAR polyacrylate
  • PEI polyetherimide
  • PEN polyethylene
  • the first electrode layer 110 may include a plurality of sensing electrode patterns 115 arranged on the top surface of the first substrate 100a.
  • the first electrode layer 110 may further include first wires 116 electrically connected to the sensing electrode patterns 115.
  • each of the sensing electrode patterns 115 may be provided to a sensing domain of a pressure sensor.
  • the sensing electrode patterns 115 may be physically spaced apart from each other to function as independent sensing domains.
  • the sensing electrode patterns 115 may be electrically separated from each other.
  • the first electrode layer 110 or the sensing electrode patterns 115 may include a transparent conductive oxide or a metal.
  • the transparent conductive oxide may include, for example, indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium zinc oxide (IZTO), cadmium tin oxide (CTO), or the like.
  • the metal is, for example, silver (Ag), gold (Au), copper (Cu), aluminum (Al), platinum (Pt), palladium (Pd), chromium (Cr), titanium (Ti), tungsten (W).
  • the first electrode layer 110 or the sensing electrode patterns 115 may be formed of the metal or the alloy, and may not include the transparent conductive oxide.
  • the pressure sensor may be disposed on the rear side of the image display device and may not be recognized by the user. Accordingly, the sensing sensitivity may be improved by forming the first electrode layer 110 or the sensing electrode patterns 115 using the metal or alloy having low resistance and high conductivity.
  • the sensing electrode patterns 115 are illustrated as having a rectangular shape, but the shape of the sensing electrode patterns 115 may be variously changed in consideration of the shape of the image display device or the pressure sensor, the pattern density, and the like. . In addition, the sensing electrode patterns 115 may include patterns having different sizes and shapes.
  • the first substrate 100a includes a first region I and a second region II, so that the pressure sensor also includes the first region I and the second region II. ) Can be separated.
  • the first region I may correspond to an active region in which pressure sensing is performed.
  • the sensing electrode patterns 115 may be arranged in the first region I.
  • the second region II may correspond to a peripheral region or a bezel region of the first substrate 100a or the pressure sensor.
  • the first region I forms an edge of the first substrate 100a from an area where the sensing electrode patterns 115 are disposed, an area between the sensing electrode patterns 115, and a side surface of the sensing electrode patterns 115. It may include a margin area up to a predetermined distance.
  • first wirings 116 connected to the sensing electrode patterns 115 may be arranged together on the first substrate 100a of the first region I.
  • the first wires 116 may branch from each of the sensing electrode patterns 115 to extend on the first region I.
  • the first interconnections 116 may be distributed in the area between the sensing electrode patterns 115 and the margin area. By arranging the first wirings 116 in the first region I provided as the active region, an area of the second region II that may serve as the bezel region may be reduced.
  • an insulating layer may be further formed on the first substrate 100a to at least partially cover the first wires 116.
  • Terminals of the first wires 116 may be assembled at the circuit connection 118.
  • the circuit connection 118 may have a tail shape protruding from the first substrate 100a.
  • the circuit connection 118 may be provided as a terminal portion of the pressure sensor.
  • the ends of the first wires 116 may be directly connected to a driving circuit such as an integrated circuit (IC) chip through the pad region P through the circuit connection 118.
  • IC integrated circuit
  • the ends of the first wires 116 may be connected to a connector of the controller board connected to the integrated circuit IC through the pad region P.
  • the circuit connection 118 may be provided as a pad portion of the pressure sensor.
  • a passivation layer is formed at the circuit connection portion 118 covering the ends of the first wires 116 or the pads connected to the first wires 116, as shown in FIG. 2.
  • the passivation layer portion may be removed at (P) to expose the ends or pads.
  • the insulating layer may extend to the circuit connection 118 to serve as the passivation layer.
  • the first wirings 116 and the driving circuit may be electrically connected to each other through a pad member P, for example, through a separate circuit member such as a flexible printed circuit board FPCB.
  • the connection with the driving circuit can be implemented without a separate circuit member such as FPCB.
  • the first electrode layer 110 may be coupled to be spaced apart from the second electrode layer 150 and the tunneling layer 140 through the coupling structure 160.
  • the coupling structure 160 may be formed along the edge of the pressure sensor, and may include a structure capable of coupling a plurality of sheet members such as, for example, a gasket.
  • the gasket may be formed of, for example, double-sided tape or by dispensing a resin-based adhesive.
  • the coupling structure 160 may have a shape substantially the same as or similar to that of the edge of the first substrate 100a, and may include an opening that exposes the first region I.
  • the sensing electrode patterns 115 may be exposed through the opening.
  • the tunneling layer 140 and the second electrode layer 150 may be sequentially disposed on the first electrode layer 110.
  • the tunneling layer 140 and the second electrode layer 150 may have a shape substantially the same as or similar to that of the first substrate 100a.
  • the tunneling layer 140 and the second electrode layer 150 may cover the sensing electrode patterns 115 included in the first electrode layer 110 in the planar direction. Accordingly, the second electrode layer 150 may be provided as a common counter electrode with respect to the sensing electrode patterns 115.
  • the tunneling layer 140 and the second electrode layer 150 may substantially entirely overlap the first region I of the first substrate 100a in the planar direction. In addition, the tunneling layer 140 and the second electrode layer 150 may at least partially overlap the second region II of the first substrate 100a in the planar direction.
  • Tunneling layer 140 may comprise Quantum Tunneling Composites (QTC).
  • QTC Quantum Tunneling Composites
  • the binder resin may include a rubber or elastomeric material
  • the tunneling particles may include metal particles capable of implementing a tunneling effect such as nickel.
  • the tunneling layer 140 may directly contact the second electrode layer 150 and may face the first electrode layer 110.
  • the tunneling layer 140 may be spaced apart from the first electrode layer 110 by the coupling structure 160, and an air gap between the tunneling layer 140 and the first electrode layer 110 may be formed. 130 may be formed.
  • a local region of the tunneling layer 140 may contact the sensing electrode pattern 115 included in the first electrode layer 110.
  • An electrical signal may be generated by energization between the second electrode layer 150 and the sensing electrode pattern 115 due to the tunneling effect occurring in the local region of the tunneling layer 140.
  • the second electrode layer 150 may include a conductive material substantially the same as or similar to that of the first electrode layer 110.
  • the second electrode layer 150 may be formed of a metal or an alloy.
  • the second electrode layer 150 is provided as a common counter electrode with respect to the sensing electrode patterns 115, the second electrode layer 150 eliminates the step caused by the sensing electrode patterns 115. To function as a planarization layer.
  • the tunneling layer 140 may also be provided as a common layer to substantially eliminate the step caused by the sensing electrode patterns 115.
  • the tunneling layer 140 and the sensing electrode patterns 115 are spatially separated through the air gap 130, it is possible to suppress electric field diffusion in the horizontal direction. Therefore, as the electric field is concentrated in the vertical direction between the second electrode layer 150 and the first electrode layer 110, the resolution and sensitivity of the pressure sensor may be improved.
  • the tunneling layer 140 may be in contact with the first electrode layer 110, and the air gap 130 may be omitted.
  • a second substrate 100b may be disposed on the second electrode layer 150.
  • the first substrate 100a and the coupling structure 160 on which the first electrode layer 110 is formed are formed. Can be combined with each other.
  • the second substrate 100b may include a polymer-based material substantially the same as or similar to that of the first substrate 100a.
  • FIG. 6 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.
  • the tunneling layer 140 may contact the first electrode layer 110.
  • the tunneling layer 140 substantially covers the sensing electrode patterns 115 included in the first electrode layer 110.
  • Provided as a common layer can eliminate the step.
  • the tunneling layer 140 and the second electrode layer 150 may be combined and fixed to be spaced apart from each other by the coupling structure 160 to form an air gap 130.
  • the tunneling layer 140 When the tunneling layer 140 is in contact with the first electrode layer 110, pressure is applied to the surface of the first electrode layer 110 through a user's finger, so that the tunneling layer 140 and the second electrode layer 150 may be energized. have.
  • FIG. 7 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments.
  • 8 is a schematic plan view for explaining an arrangement of a first electrode layer of a pressure sensor according to some exemplary embodiments.
  • 9 is a schematic plan view illustrating a coupling structure of a pressure sensor in accordance with some example embodiments.
  • a via structure 155 may be formed to electrically connect the second electrode layer 150 to the driving circuit.
  • a via hole may be formed in the coupling structure 160, and a via structure may be formed in the via hole.
  • the via hole may pass through the tunneling layer 140.
  • the via structure 155 may extend from the second electrode layer 150 to penetrate the tunneling layer 140 and the coupling structure 160.
  • a second wiring 153 may be arranged on the first substrate 100a to be electrically connected to the second electrode layer 150 through the via structure 155.
  • the second wiring 153 may be arranged on the peripheral area or the second area II of the first substrate 100a.
  • the second wiring 153 may be assembled at the circuit connection portion 118 together with the first wirings 116.
  • the second wiring 153 and the first wiring 116 can be electrically connected to the driving circuit through one circuit connecting portion 118. Therefore, the electrical connection with the driving circuit of the first and second electrode layers 110 and 150 can be realized without a separate circuit member such as an FPCB or through, for example, one FPCB. Therefore, the thin pressure sensor can be easily implemented.
  • the second electrode layer 150 is formed as the common electrode as described above, the number of the second wirings 153 may be reduced to reduce the area of the bezel area.
  • via pad 157 may be disposed on which via structure 155 is seated.
  • the second wiring 153 branches and extends from the via pad 157, and the second wiring 153 extends through the second electrode layer 150, the via structure 155, the via pad 157, and the second wiring 153. Signal transmission between the electrode layer 150 and the driving circuit may be performed.
  • the pressure sensor may include at least one via structure 155.
  • a plurality of via structures 155 may be arranged along an edge of the coupling structure 160 or a peripheral area of the first substrate 100a. Therefore, the signal transfer resistance from the second electrode layer 150 to the driving circuit can be reduced.
  • the via structure 155 may be formed through a dispensing or jetting process using a conductive material such as gold, silver, copper, and carbon paste. Accordingly, the via structure 155 may be easily formed without a complicated chemical process or a plating process.
  • FIG. 10 is a schematic cross-sectional view illustrating a pressure sensor in accordance with some example embodiments. Detailed descriptions of substantially the same or similar structures and structures as those described with reference to FIGS. 1 to 5 will be omitted.
  • the tunneling layer 140 may include a plurality of tunneling patterns 145 separated from each other.
  • the tunneling particles 145 may be formed to be substantially separated from each other by controlling the distribution of the aforementioned tunneling particles in the tunneling layer 140 for each region.
  • the QTC composition is applied locally on the second electrode layer 150 such that the tunneling patterns 145 are substantially physically completely separated in an island type pattern, thereby tunneling patterns 145. May be formed.
  • the tunneling layer 140 includes the separated tunneling pattern 145, it is possible to more effectively suppress electric field spreading in the horizontal direction. Therefore, as the electric field is concentrated in the vertical direction between the second electrode layer 150 and the first electrode layer 110, signal interference in the horizontal direction is significantly reduced, thereby improving the resolution and sensitivity of the pressure sensor.
  • FIG. 11 is a schematic cross-sectional view illustrating an image display device according to example embodiments.
  • the image display device may include a display panel 200 and a touch sensor 270 sequentially stacked on the pressure sensor 50.
  • the pressure sensor 50 may include the structure and configuration described with reference to FIGS. 1 to 9.
  • the pressure sensor 50 may be disposed below the display panel 200 and disposed to the rear side of the image display device.
  • the display panel 200 may be stacked on the pressure sensor 50 through the first adhesive layer 202.
  • the display panel 200 may include a pixel electrode 210, a pixel defining layer 220, a display layer 230, an opposite electrode 240, and an encapsulation layer 250 disposed on the panel substrate 205. Can be.
  • a pixel circuit including a thin film transistor TFT may be formed on the panel substrate 205, and an insulating layer covering the pixel circuit may be formed.
  • the pixel electrode 210 may be electrically connected to the drain electrode of the TFT, for example.
  • the panel substrate 205 includes a flexible resin such as polyimide, in which case the image display device may be provided as a flexible display.
  • the pixel defining layer 220 may be formed on the insulating layer to expose the pixel electrode 210 to define a pixel region.
  • the display layer 230 is formed on the pixel electrode 210, and the display layer 230 may include, for example, a liquid crystal layer or an organic emission layer.
  • the opposite electrode 240 may be disposed on the pixel defining layer 220 and the display layer 230.
  • the counter electrode 240 may be provided as, for example, a common electrode or a cathode of the image display device.
  • An encapsulation layer 250 for protecting the display panel 200 may be stacked on the counter electrode 240.
  • the touch sensor 270 may be stacked on the display panel 200 through the second adhesive layer 260.
  • the touch sensor 270 may include, for example, a capacitive sensor of mutual capacitance type or self capacitance type.
  • the touch sensor 270 may be disposed on the front side of the image display device. Therefore, since the sensing electrode of the touch sensor may be visually recognized by the user, the sensing electrode may include a transparent conductive oxide having high transmittance (for example, ITO).
  • the window substrate 290 may be stacked on the touch sensor 280 through, for example, the third adhesive layer 280.
  • an optical layer such as a polarizing layer, may be further included between the window substrate 290 and the touch sensor 280, or between the touch sensor 280 and the display panel 200.
  • sensing electrode patterns (20 mm x 25 mm x length) on a first substrate (23 ⁇ m thick) made of tri-acetyl-cellulose (TAC); (1st electrode layer) was formed.
  • a pressure sensor sample was prepared by stacking a second substrate (thickness: 23 ⁇ m) made of TAC on the second electrode layer.
  • the sensing electrode patterns and the second electrode layer include a silver alloy, and the QTC layer is made of Peratech.
  • the first electrode layer has a width of 3.5 mm, a length of 62 mm, and the second electrode layer has a width of 3.5 mm and a length of 127 mm so that line patterns each include a 13 ⁇ 35 array.
  • the line patterns of the first electrode layer are arranged in the X direction and the line patterns of the second electrode layer to extend in the Y direction and intersect with each other, and are arranged at the intersection of the line pattern of the first electrode layer and the line pattern of the second electrode layer overlapping each other.
  • QTC patterns of 3 mm (width) x 3 mm (length) were formed, respectively.
  • a pressure sensor sample was prepared in the same manner as in the examples except for the configuration and conditions of the first electrode layer, the QTC pattern, and the second electrode layer.
  • Ten panels of at least 1.0 left and right with visual acuity were visually observed the pressure sensor samples of the examples and comparative examples at a distance of 30 cm under a three-wavelength lamp illumination in the direction of the second substrate.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

La présente invention porte, selon des modes de réalisation, sur un capteur de pression qui comprend : une première couche d'électrode comprenant une pluralité de motifs d'électrode de détection qui sont séparés les uns des autres ; une seconde couche d'électrode disposée face à la première couche d'électrode et disposée en tant qu'électrode commune pour la pluralité de motifs d'électrode de détection ; et une couche de tunnellisation disposée entre la première couche d'électrode et la seconde couche d'électrode. Un capteur de pression mince présentant une meilleure planéité peut être obtenu au moyen de la seconde couche d'électrode et de la couche de tunnellisation.
PCT/KR2019/005895 2018-05-18 2019-05-17 Capteur de pression et dispositif d'affichage d'image comprenant ce dernier WO2019221536A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20180057272 2018-05-18
KR10-2018-0057272 2018-05-18
KR1020190057406A KR20190132259A (ko) 2018-05-18 2019-05-16 압력 센서 및 이를 포함하는 화상 표시 장치
KR10-2019-0057406 2019-05-16

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WO2019221536A1 true WO2019221536A1 (fr) 2019-11-21

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010107261A2 (fr) * 2009-03-18 2010-09-23 한양대학교 산학협력단 Cellule solaire et procédé de production de celle-ci
KR20130018863A (ko) * 2010-04-08 2013-02-25 니혼샤신 인사츠 가부시키가이샤 압력검출부 및 압력검출부를 구비한 정보입력장치
WO2017039401A1 (fr) * 2015-09-03 2017-03-09 엘지이노텍 주식회사 Capteur de pression
WO2017078335A1 (fr) * 2015-11-05 2017-05-11 주식회사 모다이노칩 Capteur de pression et élément composite le comprenant
KR101753247B1 (ko) * 2016-06-30 2017-07-04 엘지이노텍 주식회사 압력 감지 센서 및 이를 포함하는 압력 감지 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010107261A2 (fr) * 2009-03-18 2010-09-23 한양대학교 산학협력단 Cellule solaire et procédé de production de celle-ci
KR20130018863A (ko) * 2010-04-08 2013-02-25 니혼샤신 인사츠 가부시키가이샤 압력검출부 및 압력검출부를 구비한 정보입력장치
WO2017039401A1 (fr) * 2015-09-03 2017-03-09 엘지이노텍 주식회사 Capteur de pression
WO2017078335A1 (fr) * 2015-11-05 2017-05-11 주식회사 모다이노칩 Capteur de pression et élément composite le comprenant
KR101753247B1 (ko) * 2016-06-30 2017-07-04 엘지이노텍 주식회사 압력 감지 센서 및 이를 포함하는 압력 감지 장치

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