WO2019208752A1 - Light radiating device - Google Patents

Light radiating device Download PDF

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Publication number
WO2019208752A1
WO2019208752A1 PCT/JP2019/017849 JP2019017849W WO2019208752A1 WO 2019208752 A1 WO2019208752 A1 WO 2019208752A1 JP 2019017849 W JP2019017849 W JP 2019017849W WO 2019208752 A1 WO2019208752 A1 WO 2019208752A1
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WO
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Prior art keywords
light
guide plate
light guide
peripheral surface
side peripheral
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PCT/JP2019/017849
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French (fr)
Japanese (ja)
Inventor
顕治 櫻井
篤史 宮武
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シーシーエス株式会社
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Application filed by シーシーエス株式会社 filed Critical シーシーエス株式会社
Priority to JP2020515591A priority Critical patent/JP7157799B2/en
Publication of WO2019208752A1 publication Critical patent/WO2019208752A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications

Definitions

  • the present invention relates to a light irradiation device.
  • Patent Document 1 As a light irradiation device used in an inspection device for inspecting a defect of a workpiece, for example, Patent Document 1 has a plate shape having a light source, a front surface, a back surface, and a side peripheral surface, and the surface is a workpiece to be inspected. And a light guide plate into which the light of the light source is introduced from the side peripheral surface, and light introduced from the side peripheral surface of the light guide plate by a diffuse reflection portion provided on the back surface of the light guide plate Is configured to diffusely reflect and emit from the surface.
  • the conventional light irradiation apparatus includes a cover body arranged to cover the back surface of the light guide plate, and has a structure in which the workpiece is observed through a through hole provided in the center of the cover body. .
  • the diffuse reflection portion is formed up to the peripheral portion of the light guide plate
  • a part of the light introduced from the side peripheral surface of the light guide plate toward the back side of the light guide plate is a light source of the diffuse reflection portion. Because the light is diffusely reflected in the vicinity, light emitted from the vicinity of the light source of the light guide plate, that is, from the end side far from the through hole of the light guide plate is extremely strong, and light emitted from the center side of the light guide plate is weak. . As a result, light could not be efficiently irradiated to the workpiece. Further, when viewed as the entire light guide plate, there is also a problem that light unevenness is large between the end portion side and the center side.
  • the light irradiation apparatus has a plate shape having a light source, a front surface, a back surface, and a side peripheral surface, and the surface is disposed toward the workpiece, and light from the light source is emitted from the side peripheral surface.
  • a light irradiating device configured to reflect the light introduced into the light guide plate from the side peripheral surface thereof and to be emitted from the surface.
  • the cover further includes a cover body provided with a through hole at a predetermined location, and a first region around a portion corresponding to the through hole is provided on the back surface of the light guide plate.
  • a diffuse reflection part that diffuses and reflects light introduced into the light guide plate from the side peripheral surface is provided, and the second region further outside the first region is introduced into the light guide plate from the side peripheral surface.
  • a total reflection part that totally reflects the emitted light is provided. And it is characterized in and.
  • a total reflection part is provided in the outer side of the diffuse reflection part in the back surface of a light-guide plate, it goes to the back surface side of a light-guide plate among the light of the light source introduced from the side peripheral surface of a light-guide plate. Part of the light is reflected by the total reflection portion and guided to the center side of the light guide plate. Thereby, the light guide
  • the size of the hole in the cut surface obtained by cutting the through hole in parallel with the back surface of the light guide plate may be reduced toward the light guide plate. If it is such, the installation area
  • a line-shaped camera may be used in order to efficiently observe the entire workpiece.
  • the through hole has a slit shape.
  • the diffuse reflection portion may be a laminate in which a diffuse reflection layer is laminated on the entire surface of the first region. If it is such, since a diffused reflection layer can be formed by printing, for example, the number of parts which comprise a light irradiation apparatus can be reduced, and productivity improves. Moreover, even if the diffuse reflection part has a complicated shape, it can be easily formed.
  • the diffuse reflection layer when the diffuse reflection layer is thin, a part of the light incident on the diffuse reflection part is transmitted, and the light transmitted through the diffuse reflection part is absorbed by the cover body, resulting in light loss. Therefore, a reflection member that reflects the light transmitted through the diffuse reflection portion toward the light guide plate may be further provided between the diffuse reflection portion of the light guide plate and the cover body. If it is such, since the light which permeate
  • the light irradiation apparatus having such a configuration, it is possible to efficiently irradiate the work with light and to improve the uniformity of light emitted from the light guide plate.
  • the inspection apparatus A is used to inspect defects (scratches, dirt, foreign matter, etc.) of the workpiece W, and is installed in a conveyance line that conveys the workpiece W in, for example, a factory. It is what is done.
  • the inspection apparatus A is arranged on the opposite side of the light irradiation apparatus 100 that irradiates light to the work W to be inspected and the light irradiation apparatus 100 with respect to the work W.
  • a camera C As the camera C, for example, a CCD camera can be used.
  • the camera of this embodiment is a line camera.
  • the light irradiation device 100 has a plate shape having a light source 10, a front surface 21, a back surface 22, and a side peripheral surface 23, and the front surface 21 is disposed toward the workpiece W.
  • the light guide plate 20 into which the light of the light source 10 is introduced from the side peripheral surface 23, the housing 30 that supports the light guide plate 20 and the light source 10 and covers the back surface 22 of the light guide plate 20, and the back surface 22 of the light guide plate 20 and the housing And a reflection member 40 disposed between the body 30 and the body 30.
  • the housing 30 is provided with a through hole 30 a for observing the workpiece W by the camera C at a predetermined location covering the back surface 22 of the light guide plate 20.
  • the through hole 30a of the present embodiment has a slit shape extending along the longitudinal direction of the line camera (see FIG. 4).
  • the light source 10 includes a plurality of LEDs arranged at equal intervals along the side peripheral surface 23 of the light guide plate 20, and the light emission direction thereof faces the side peripheral surface 23.
  • the light source 10 further includes a lens extending along the side peripheral surface 23 in the light emission direction.
  • the light source 10 is disposed to face the side circumferential surface 23 along the longitudinal direction of the light guide plate 20 with respect to the light guide plate 20, and the side circumferential surface 23 along the width direction of the light guide plate 20. Is not arranged.
  • the light guide plate 20 is a transparent plate having a rectangular shape in plan view, and is composed of, for example, an acrylic plate or a glass plate, and the surface 21 is provided with a non-reflective coating.
  • the light guide plate 20 is arranged such that its longitudinal direction is parallel to the longitudinal direction of the slit-shaped through hole 30a.
  • the first region 22 a which is a region on both sides of the portion corresponding to the through hole 30 a, is introduced into the light guide plate 20 from the side peripheral surface 23.
  • a diffuse reflector 24 that diffusely reflects the reflected light is provided along the longitudinal direction of the through hole 30a.
  • the second region 22b which is a region closer to the end than the first region 22a, is totally reflected by the light introduced into the light guide plate 20 from the side peripheral surface 23.
  • the reflection part 25 is provided along the longitudinal direction of the through hole 30a. That is, the second region 22 b is a region between the first region 22 a and the side peripheral surface 23 on the back surface 22 of the light guide plate 20, in other words, a peripheral region on the back surface 22 of the light guide plate 20.
  • the diffuse reflection portion 24 is obtained by laminating a diffuse reflection layer 24a on the first region 22a.
  • the diffuse reflection portions 24 are preferably provided 10 to 20 mm apart from the light source 10 in the width direction of the light guide plate 20, and are formed as a pair with an interval of 2 to 20 mm so as to sandwich the through hole 30 a.
  • the diffuse reflection layer 24a of the present embodiment is formed by printing ink on the entire surface of the first region 22a without any gap.
  • the ink white ink is used and formed with a thickness of 20 to 25 ⁇ m. In addition to this, not only ink but also paint may be applied on the light guide plate 20 and laminated.
  • the housing 30 is formed in a rectangular shape in plan view, and supports the light guide plate 20 and the light source 10. Specifically, the housing 30 includes a cover body 31 disposed so as to cover the back surface 22 of the light guide plate 20, a frame-shaped side plate 32 disposed so as to surround the side peripheral surface 23 of the light guide plate 20, It has.
  • the cover body 31 includes the through-hole 30a, and the through-hole 30a is formed at the center of the cover body 31 in the width direction along the longitudinal direction of the cover body 31.
  • the through hole 30 a has a substantially V-shaped cross section, and specifically, the size of the hole in the cut surface when cut in parallel with the back surface 22 of the light guide plate 20 faces the back surface 22 of the light guide plate 20. The shape gradually becomes smaller.
  • the cover body 31 is provided with a connection piece 31 a for connecting to the side plate 32 at the side edge portion.
  • the cover body 31 has the same thickness at the portion facing the back surface 22 of the light guide plate 20 except for the connection piece 31a.
  • the side plate 32 supports the light source 10 in a recess 32 a provided on an inner surface facing the side peripheral surface 23 of the light guide plate 20. Moreover, the cover part 32b which covers the surface 21 of the light-guide plate 20 is extended inward from the inner surface from the side plate 32. As shown in FIG. Further, the side plate 32 is provided with a mounting groove 32c used on the outer surface of the side plate 32 when the light irradiation device 100 is installed.
  • the housing 30 supports the light guide plate 20 fitted in the frame of the side plate 32 with the cover portion 32b of the side plate 32 and the cover body 31 interposed therebetween. In this state, the cover portion 32 b of the side plate 32 is disposed so as to cover the surface of the surface 21 of the light guide plate 20 opposite to the total reflection portion 25.
  • casing 30 is formed with the material which has light-shielding property and has heat dissipation, for example. Specifically, it is preferably formed of a metal such as an aluminum alloy.
  • the reflection member 40 is a thin plate attached to the inner surface of the cover body 31.
  • the light guide plate 20 is disposed between the diffuse reflection part 24 provided on the back surface 22 of the light guide plate 20 and the cover body 31, but may be opposed to a part or all of the total reflection part 25.
  • the reflecting member 40 is composed of, for example, a reflecting mirror, and is arranged with its reflecting surface directed toward the diffuse reflecting portion 24 side. The reflection member 40 plays a role of reflecting light transmitted through the diffuse reflection part 24 among the light introduced into the light guide plate 20 toward the light guide plate 20.
  • the diffuse reflection portion 24 and the reflection member 40 are sandwiched between the light guide plate 20 and the cover body 31, and the total reflection portion 25 and the cover body 31 on the back surface 22 of the light guide plate 20 are arranged.
  • An air layer AL is formed between the two.
  • the light irradiation device 100 is installed so that the surface 21 of the light guide plate 20 faces the workpiece W side, and the back surface 22 side of the light guide plate 20 is provided.
  • Camera C is installed in
  • the through-hole 30a of the light irradiation apparatus 100 has a substantially V-shaped cross section, as shown in FIG.
  • the light irradiation device 100 light is irradiated to the workpiece W from the light irradiation device 100.
  • the light emitted from the light source 10 enters the light guide plate 20 from the side peripheral surface 23 of the light guide plate 20, and a part of the light traveling toward the back surface 22 side of the light guide plate 20 is reflected by the total reflection unit 25.
  • the light is totally reflected and guided to the center side of the light guide plate 20.
  • the light after being totally reflected by the inner surface of the surface 21 of the light guide plate 20 and diffusely reflected by the diffuse reflection portion 24 (diffuse reflection layer 24a), the light is emitted from the light guide plate 20 to the outside and irradiated onto the workpiece W.
  • the diffuse reflection portion 24 Some of the light traveling toward the rear surface 22 side of the light guide plate 20 is directly incident on the diffuse reflection portion 24 and is diffusely reflected. Such light is also emitted from the light guide plate 20 to the outside and irradiated onto the workpiece W. Is done. Of the light incident on the diffuse reflector 24, the light transmitted through the diffuse reflector 24 is also reflected by the reflecting member 40 toward the light guide plate 20 and is irradiated onto the workpiece W.
  • the workpiece W irradiated with light in this way is imaged by the camera C through the through hole 30a, and the workpiece W is inspected based on the image obtained by the imaging.
  • the total reflection portion 25 is provided outside the diffuse reflection portion 24 on the back surface 22 of the light guide plate 20, it is introduced from the side peripheral surface 23 of the light guide plate 20.
  • a part of the light traveling toward the back surface 22 of the light guide plate 20 is reflected by the total reflection portion 25 and guided to the center side of the light guide plate 20. Therefore, although the light emitted from the vicinity of the light source 10 (end) of the light guide plate 20 is weakened, the light emitted from the inside of the light guide plate 20 is strengthened. Thereby, the work W can be efficiently irradiated with uniform light from the entire surface of the light guide plate 20.
  • the diffuse reflection part 24 is formed by printing ink, it can be easily formed.
  • the light transmitted through the diffuse reflection portion 24 is reflected by the reflecting member 40 toward the light guide plate 20, the light loss can be further eliminated.
  • the light guide plate 20 is interposed between the camera C and the work W, it is possible to prevent dust and the like from falling from the camera C side to the work W side.
  • the cover body 31 as shown in FIG. 5 can be mentioned. Specifically, in the cover body 31 shown in FIG. 5, the side plate 32 side is thicker than the through hole 30a side. In addition, an air layer AL is formed between the side plate 32 side formed to be thicker than the cover body 31 and the back surface 22 (specifically, the total reflection portion 25) of the light guide plate 20. In such a case, the thickness of the cover body 31 in the vicinity of the light source 10 is increased, so that the heat generated by the light source 10 is radiated more efficiently.
  • the diffuse reflection layer 24a is laminated on the first region 22a to form the diffuse reflection portion 24.
  • the entire region of the first region 22a is damaged by, for example, blasting.
  • the portion 24 may be formed.
  • the diffuse reflection part 24 may be formed by installing a member that diffuses and reflects light separate from the light guide plate 20 in the first region 22a.
  • the through hole 30a is formed in a slit shape in accordance with the line camera.
  • the present invention is not limited to this, and may be, for example, a circular shape or a rectangular shape.
  • the first region 22a is formed around the portion corresponding to the through hole 30a on the back surface 22 of the light guide plate 20, and the second region 22b is formed outside thereof.
  • the light source 10 is disposed on the entire circumference of the side peripheral surface 23 of the light guide plate 20.
  • the light guide plate 20 is rectangular, but is not limited thereto, and may be, for example, circular.
  • the back surface 22 of the light guide plate 20 in the embodiment includes a region without the diffuse reflection portion 24 at a portion corresponding to the through hole 30a so that the workpiece W can be observed from the through hole 30a through the light guide plate 20. It only has to be. Therefore, for example, if the through hole 30a is circular, the first region 22a may be formed up to the inside of the portion corresponding to the through hole 30a as shown in FIG. As shown to b), you may form in the outer side of the site
  • the through hole 30 a is formed in the central portion of the cover body 31, but the through hole 30 a may be formed in addition to the central portion of the cover body 31.
  • the light irradiation apparatus According to the light irradiation apparatus according to the present invention, it is possible to efficiently irradiate the work with light and to improve the uniformity of light emitted from the light guide plate.

Abstract

Provided is a light radiating device with which light losses are small and which is capable of radiating light efficiently toward a workpiece, and with which unevenness of light is small when viewed as an entire light-guiding plate. This light radiating device is provided with a light source, and a light-guiding plate which has a plate shape with a top surface, a rear surface, and a side peripheral surface, in which the top surface is disposed facing a workpiece to be inspected, and light from the light source is guided in from the side peripheral surface, the light radiating device being configured in such a way that light guided into the light-guiding plate from the side peripheral surface is internally reflected and is emitted from the top surface, wherein: the light radiating device is additionally provided with a cover body which is disposed in such a way as to cover the rear surface of the light-guiding plate, and in which a through hole is provided in a prescribed location; a diffuse reflecting portion for effecting diffuse reflection of light guided into the light-guiding plate from the side peripheral surface is provided in a first region surrounding a position corresponding to the through hole, on the rear surface of the light-guiding plate, and a total internal reflection portion for effecting total internal reflection of light guided into the light-guiding plate from the side peripheral surface is provided in a second region further to the outside of the first region.

Description

光照射装置Light irradiation device
 本発明は、光照射装置に関するものである。 The present invention relates to a light irradiation device.
 ワークの欠陥を検査する検査装置に用いられる光照射装置として、例えば、特許文献1には、光源と、表面、裏面及び側周面を有する板状をなし、当該表面が検査対象であるワークに向けて配置されると共に、当該側周面から前記光源の光が導入される導光板とを備え、導光板の裏面に設けられた拡散反射部によって、導光板の側周面から導入された光を拡散反射して、表面から射出する構成のものが開示されている。 As a light irradiation device used in an inspection device for inspecting a defect of a workpiece, for example, Patent Document 1 has a plate shape having a light source, a front surface, a back surface, and a side peripheral surface, and the surface is a workpiece to be inspected. And a light guide plate into which the light of the light source is introduced from the side peripheral surface, and light introduced from the side peripheral surface of the light guide plate by a diffuse reflection portion provided on the back surface of the light guide plate Is configured to diffusely reflect and emit from the surface.
 なお、前記従来の光照射装置は、導光板の裏面を覆うように配置されたカバー体を備え、そのカバー体の中央に設けられた貫通孔を介してワークが観察される構造になっている。 The conventional light irradiation apparatus includes a cover body arranged to cover the back surface of the light guide plate, and has a structure in which the workpiece is observed through a through hole provided in the center of the cover body. .
 ところが、導光板の周縁部まで拡散反射部が形成された前記従来の光照射装置では、導光板の側周面から導入され、導光板の裏面側に向かう光の一部が拡散反射部の光源近傍部分で拡散反射されるため、導光板の光源近傍、すなわち、導光板の貫通孔から遠い端部側から射出される光が極端に強く、導光板の中央側から射出される光が弱くなる。その結果、ワークに対して効率良く光を照射できなかった。また、導光板全体として見た場合に、端部側と中央側とで光のムラが大きいという問題もあった。 However, in the conventional light irradiation device in which the diffuse reflection portion is formed up to the peripheral portion of the light guide plate, a part of the light introduced from the side peripheral surface of the light guide plate toward the back side of the light guide plate is a light source of the diffuse reflection portion. Because the light is diffusely reflected in the vicinity, light emitted from the vicinity of the light source of the light guide plate, that is, from the end side far from the through hole of the light guide plate is extremely strong, and light emitted from the center side of the light guide plate is weak. . As a result, light could not be efficiently irradiated to the workpiece. Further, when viewed as the entire light guide plate, there is also a problem that light unevenness is large between the end portion side and the center side.
特開2016-136124号公報JP 2016-136124 A
 そこで、本発明は、ワークに対して効率良く光を照射することができ、また、導光板全体として見た場合に、光のムラが小さい光照射装置を提供することを主な課題とするものである。 SUMMARY OF THE INVENTION Accordingly, it is a main object of the present invention to provide a light irradiation device that can efficiently irradiate a work with light and has small light unevenness when viewed as an entire light guide plate. It is.
 すなわち、本発明に係る光照射装置は、光源と、表面、裏面及び側周面を有する板状をなし、前記表面がワークに向けて配置されるとともに、前記側周面から前記光源の光が導入される導光板とを備え、前記側周面から前記導光板に導入された光が内部で反射して、前記表面から射出されるように構成された光照射装置であって、前記導光板の裏面を覆うように配置されるとともに、所定箇所に貫通孔が設けられたカバー体をさらに備え、前記導光板の裏面において、前記貫通孔に対応する部位の周囲の第1領域には、前記側周面から当該導光板内に導入された光を拡散反射する拡散反射部が設けられるとともに、前記第1領域のさらに外側の第2領域には、前記側周面から当該導光板内に導入された光を全反射する全反射部が設けられることを特徴とするものである。 That is, the light irradiation apparatus according to the present invention has a plate shape having a light source, a front surface, a back surface, and a side peripheral surface, and the surface is disposed toward the workpiece, and light from the light source is emitted from the side peripheral surface. A light irradiating device configured to reflect the light introduced into the light guide plate from the side peripheral surface thereof and to be emitted from the surface. The cover further includes a cover body provided with a through hole at a predetermined location, and a first region around a portion corresponding to the through hole is provided on the back surface of the light guide plate. A diffuse reflection part that diffuses and reflects light introduced into the light guide plate from the side peripheral surface is provided, and the second region further outside the first region is introduced into the light guide plate from the side peripheral surface. A total reflection part that totally reflects the emitted light is provided. And it is characterized in and.
 このようなものであれば、導光板の裏面における拡散反射部の外側に全反射部が設けられるので、導光板の側周面から導入された光源の光のうち、導光板の裏面側へ向かう光の一部が、全反射部で反射されて導光板の中央側へと導かれるようになる。これにより、導光板の中央側へ導かれる光が増し、導光板の中央側から射出される光が強くなる。その結果、ワークに対して効率良く光を照射できるようになる。また、導光板の中央側から射出される光が強くなる一方、導光板の光源近傍(外側)から射出される光が弱まるため、導光板全体として見た場合に、端部側と中央側とのムラが小さくなる。 If it is such, since a total reflection part is provided in the outer side of the diffuse reflection part in the back surface of a light-guide plate, it goes to the back surface side of a light-guide plate among the light of the light source introduced from the side peripheral surface of a light-guide plate. Part of the light is reflected by the total reflection portion and guided to the center side of the light guide plate. Thereby, the light guide | induced to the center side of a light-guide plate increases, and the light inject | emitted from the center side of a light-guide plate becomes strong. As a result, the workpiece can be efficiently irradiated with light. In addition, the light emitted from the center side of the light guide plate becomes stronger, while the light emitted from the vicinity of the light source (outside) of the light guide plate becomes weaker. The non-uniformity becomes smaller.
 また、前記貫通孔を前記導光板の裏面と平行に切断した切断面の孔の大きさが前記導光板に向かうに従って小さくなっているものであってもよい。このようなものであれば、導光板の裏面側に配置されるカメラのワークに対する設置領域が広がり、これにより、光照射装置に対してワーク及びカメラを配置する場合に、その配置に自由度が増して各機器の設置が容易となる。 Further, the size of the hole in the cut surface obtained by cutting the through hole in parallel with the back surface of the light guide plate may be reduced toward the light guide plate. If it is such, the installation area | region with respect to the workpiece | work of the camera arrange | positioned at the back surface side of a light-guide plate will spread, Thereby, when arrange | positioning a workpiece | work and a camera with respect to a light irradiation apparatus, the freedom degree in the arrangement | positioning has it. In addition, installation of each device becomes easier.
 また、ワークを観察するカメラとして、ワーク全体を効率良く観察するためにライン状のものが使用されることがあるが、この場合、前記貫通孔がスリット状をなしているものが好適である。 Also, as a camera for observing the workpiece, a line-shaped camera may be used in order to efficiently observe the entire workpiece. In this case, it is preferable that the through hole has a slit shape.
 また、前記拡散反射部は、前記第1領域全面に拡散反射層を積層したものであってもよい。このようなものであれば、例えば、拡散反射層を印刷によって形成できるため、光照射装置を構成する部品の点数を削減することができ、生産性が向上する。また、拡散反射部の形状が複雑なものであっても容易に形成できる。 Further, the diffuse reflection portion may be a laminate in which a diffuse reflection layer is laminated on the entire surface of the first region. If it is such, since a diffused reflection layer can be formed by printing, for example, the number of parts which comprise a light irradiation apparatus can be reduced, and productivity improves. Moreover, even if the diffuse reflection part has a complicated shape, it can be easily formed.
 また、例えば、前記拡散反射層が薄い場合には、拡散反射部へ入射した光の一部が透過し、拡散反射部を透過した光は、カバー体で吸収されて光のロスが生じる。そこで、前記導光板の拡散反射部と前記カバー体との間に、前記拡散反射部を透過した光を当該導光板側へ反射する反射部材をさらに設けるようにしてもよい。このようなものであれば、拡散反射部を透過した光が、反射部材で反射して導光板へ戻されるため、光のロスを低減できる。その結果、ワークに対してより効率良く光を照射できるようになる。 Also, for example, when the diffuse reflection layer is thin, a part of the light incident on the diffuse reflection part is transmitted, and the light transmitted through the diffuse reflection part is absorbed by the cover body, resulting in light loss. Therefore, a reflection member that reflects the light transmitted through the diffuse reflection portion toward the light guide plate may be further provided between the diffuse reflection portion of the light guide plate and the cover body. If it is such, since the light which permeate | transmitted the diffuse reflection part is reflected by a reflection member and returned to a light-guide plate, the loss of light can be reduced. As a result, the workpiece can be irradiated with light more efficiently.
 このような構成の光照射装置によれば、ワークに対して効率的に光を照射することができるとともに、導光板から射出される光の均一性を高めることができる。 According to the light irradiation apparatus having such a configuration, it is possible to efficiently irradiate the work with light and to improve the uniformity of light emitted from the light guide plate.
本実施形態に係る検査装置を模式的に示す断面図である。It is sectional drawing which shows typically the inspection apparatus which concerns on this embodiment. 同実施形態に係る光照射装置の導光板と光源との位置関係を示す模式図である。It is a schematic diagram which shows the positional relationship of the light-guide plate and light source of the light irradiation apparatus which concerns on the same embodiment. 同実施形態に係る光照射装置を導光板の表面側から見た模式的斜視図である。It is the typical perspective view which looked at the light irradiation apparatus which concerns on the same embodiment from the surface side of the light-guide plate. 同実施形態に係る光照射装置を導光板の裏面側から見た模式的斜視図である。It is the typical perspective view which looked at the light irradiation apparatus which concerns on the same embodiment from the back surface side of the light-guide plate. その他の実施形態に係る光照射装置の光源近傍の構造を模式的に示す断面図である。It is sectional drawing which shows typically the structure of the light source vicinity of the light irradiation apparatus which concerns on other embodiment. その他の実施形態に係る貫通孔と第1領域との関係を示す模式図である。It is a schematic diagram which shows the relationship between the through-hole and 1st area | region which concern on other embodiment.
100 光照射装置
10 光源
20 導光板
21 導光板の表面
22 導光板の裏面
23 導光板の側周面
24 拡散反射部
25 全反射部
30 筐体
40 反射部材
DESCRIPTION OF SYMBOLS 100 Light irradiation apparatus 10 Light source 20 Light guide plate 21 Front surface 22 of a light guide plate Back surface 23 of a light guide plate Side peripheral surface 24 of a light guide plate Diffuse reflection part 25 Total reflection part 30 Case 40 Reflective member
 以下に、本発明に係る光照射装置及び当該光照射装置を備えた検査装置を図面に基づいて説明する。 Hereinafter, a light irradiation apparatus according to the present invention and an inspection apparatus including the light irradiation apparatus will be described with reference to the drawings.
 本発明に係る検査装置Aは、ワークWの欠陥(傷、汚れ、異物の混入等)を検査するために使用されるものであり、例えば、工場等において、ワークWを搬送する搬送ラインに設置されるものである。 The inspection apparatus A according to the present invention is used to inspect defects (scratches, dirt, foreign matter, etc.) of the workpiece W, and is installed in a conveyance line that conveys the workpiece W in, for example, a factory. It is what is done.
 <実施形態>
 本実施形態に係る検査装置Aは、図1に示すように、検査対象であるワークWに光を照射する光照射装置100と、ワークWに対し、光照射装置100を挟んで反対側に配置されるカメラCと、を備えている。なお、カメラCとしては、例えば、CCDカメラを用いることができる。本実施形態のカメラは、ラインカメラである。
<Embodiment>
As shown in FIG. 1, the inspection apparatus A according to the present embodiment is arranged on the opposite side of the light irradiation apparatus 100 that irradiates light to the work W to be inspected and the light irradiation apparatus 100 with respect to the work W. And a camera C. As the camera C, for example, a CCD camera can be used. The camera of this embodiment is a line camera.
 前記光照射装置100は、図1~図4に示すように、光源10と、表面21、裏面22及び側周面23を有する板状をなし、表面21がワークWに向けて配置されると共に、側周面23から光源10の光が導入される導光板20と、導光板20及び光源10を支持し、導光板20の裏面22を覆う筐体30と、導光板20の裏面22と筐体30との間に配置される反射部材40と、を備えている。なお、筐体30には、導光板20の裏面22を覆う所定箇所にカメラCによってワークWを観察するための貫通孔30aが設けられている。本実施形態の貫通孔30aは、ラインカメラの長手方向に沿って延びるスリット状をなしている(図4参照)。 As shown in FIGS. 1 to 4, the light irradiation device 100 has a plate shape having a light source 10, a front surface 21, a back surface 22, and a side peripheral surface 23, and the front surface 21 is disposed toward the workpiece W. The light guide plate 20 into which the light of the light source 10 is introduced from the side peripheral surface 23, the housing 30 that supports the light guide plate 20 and the light source 10 and covers the back surface 22 of the light guide plate 20, and the back surface 22 of the light guide plate 20 and the housing And a reflection member 40 disposed between the body 30 and the body 30. The housing 30 is provided with a through hole 30 a for observing the workpiece W by the camera C at a predetermined location covering the back surface 22 of the light guide plate 20. The through hole 30a of the present embodiment has a slit shape extending along the longitudinal direction of the line camera (see FIG. 4).
 前記光源10は、導光板20の側周面23に沿って等間隔に配置された複数のLEDを備え、その光射出方向が当該側周面23に向いている。また、光源10は、その光射出方向に当該側周面23に沿って延びるレンズを更に備えている。なお、本実施形態では、光源10は、導光板20に対し、導光板20の長手方向に沿った側周面23と対向して配置され、導光板20の幅方向に沿った側周面23には配置されていない。 The light source 10 includes a plurality of LEDs arranged at equal intervals along the side peripheral surface 23 of the light guide plate 20, and the light emission direction thereof faces the side peripheral surface 23. The light source 10 further includes a lens extending along the side peripheral surface 23 in the light emission direction. In the present embodiment, the light source 10 is disposed to face the side circumferential surface 23 along the longitudinal direction of the light guide plate 20 with respect to the light guide plate 20, and the side circumferential surface 23 along the width direction of the light guide plate 20. Is not arranged.
 前記導光板20は、平面視矩形状をした透明板であり、例えば、アクリル板やガラス板等から構成され、表面21には、無反射コーティングが施されている。導光板20は、その長手方向がスリット状の貫通孔30aの長手方向と平行に配置される。図2に示すように、導光板20の裏面22において、貫通孔30aに対応する部位を挟んだ両側の領域である第1領域22aには、その側周面23から導光板20内に導入された光を拡散反射する拡散反射部24が貫通孔30aの長手方向に沿って設けられている。また、導光板20の裏面22において、第1領域22aよりも端部側の領域である第2領域22bには、その側周面23から導光板20内に導入された光を全反射する全反射部25が貫通孔30aの長手方向に沿って設けられている。すなわち、第2領域22bは、導光板20の裏面22における第1領域22aと側周面23との間の領域であり、言い換えれば、導光板20の裏面22における周縁部の領域である。 The light guide plate 20 is a transparent plate having a rectangular shape in plan view, and is composed of, for example, an acrylic plate or a glass plate, and the surface 21 is provided with a non-reflective coating. The light guide plate 20 is arranged such that its longitudinal direction is parallel to the longitudinal direction of the slit-shaped through hole 30a. As shown in FIG. 2, on the back surface 22 of the light guide plate 20, the first region 22 a, which is a region on both sides of the portion corresponding to the through hole 30 a, is introduced into the light guide plate 20 from the side peripheral surface 23. A diffuse reflector 24 that diffusely reflects the reflected light is provided along the longitudinal direction of the through hole 30a. Further, on the back surface 22 of the light guide plate 20, the second region 22b, which is a region closer to the end than the first region 22a, is totally reflected by the light introduced into the light guide plate 20 from the side peripheral surface 23. The reflection part 25 is provided along the longitudinal direction of the through hole 30a. That is, the second region 22 b is a region between the first region 22 a and the side peripheral surface 23 on the back surface 22 of the light guide plate 20, in other words, a peripheral region on the back surface 22 of the light guide plate 20.
 前記拡散反射部24は、第1領域22aに拡散反射層24aを積層したものである。拡散反射部24は、導光板20の幅方向において光源10から10~20mm離間させて設けることが好ましく、また、貫通孔30aを挟むように2~20mmの間隔を空けて一対形成される。なお、本実施形態の拡散反射層24aは、第1領域22a全面に隙間なくインキを印刷して形成されている。インキとしては、白色インキを用い、これを20~25μmの厚みで形成している。この他、インキに限らず、塗料を導光板20上に塗布して積層しても良い。 The diffuse reflection portion 24 is obtained by laminating a diffuse reflection layer 24a on the first region 22a. The diffuse reflection portions 24 are preferably provided 10 to 20 mm apart from the light source 10 in the width direction of the light guide plate 20, and are formed as a pair with an interval of 2 to 20 mm so as to sandwich the through hole 30 a. In addition, the diffuse reflection layer 24a of the present embodiment is formed by printing ink on the entire surface of the first region 22a without any gap. As the ink, white ink is used and formed with a thickness of 20 to 25 μm. In addition to this, not only ink but also paint may be applied on the light guide plate 20 and laminated.
 前記筐体30は、平面視矩形状に形成され、導光板20及び光源10を支持するものである。具体的には、筐体30は、導光板20の裏面22を覆うように配置されるカバー体31と、導光板20の側周面23を囲むように配置される枠状の側板32と、を備えている。 The housing 30 is formed in a rectangular shape in plan view, and supports the light guide plate 20 and the light source 10. Specifically, the housing 30 includes a cover body 31 disposed so as to cover the back surface 22 of the light guide plate 20, a frame-shaped side plate 32 disposed so as to surround the side peripheral surface 23 of the light guide plate 20, It has.
 前記カバー体31は、前記貫通孔30aを備え、この貫通孔30aはカバー体31の幅方向の中央部に、当該カバー体31の長手方向に沿って形成されている。また、この貫通孔30aは、断面略V字状であり、具体的には、導光板20の裏面22と平行に切断したときの切断面における孔の大きさが導光板20の裏面22に向かって徐々に小さくなる形状である。また、カバー体31には、その側縁部に側板32に接続するための接続片31aが設けられている。なお、カバー体31は、接続片31aを除いて導光板20の裏面22と対向する部分が同一厚みになっている。 The cover body 31 includes the through-hole 30a, and the through-hole 30a is formed at the center of the cover body 31 in the width direction along the longitudinal direction of the cover body 31. Further, the through hole 30 a has a substantially V-shaped cross section, and specifically, the size of the hole in the cut surface when cut in parallel with the back surface 22 of the light guide plate 20 faces the back surface 22 of the light guide plate 20. The shape gradually becomes smaller. Further, the cover body 31 is provided with a connection piece 31 a for connecting to the side plate 32 at the side edge portion. The cover body 31 has the same thickness at the portion facing the back surface 22 of the light guide plate 20 except for the connection piece 31a.
 前記側板32は、導光板20の側周面23と対向する内側面に設けられた凹部32aに光源10を支持している。また、側板32は、その内側面から導光板20の表面21を覆うカバー部32bが内側へ向かって延設されている。また、側板32は、その外側面に光照射装置100を設置する場合に使用する取付溝32cが設けられている。 The side plate 32 supports the light source 10 in a recess 32 a provided on an inner surface facing the side peripheral surface 23 of the light guide plate 20. Moreover, the cover part 32b which covers the surface 21 of the light-guide plate 20 is extended inward from the inner surface from the side plate 32. As shown in FIG. Further, the side plate 32 is provided with a mounting groove 32c used on the outer surface of the side plate 32 when the light irradiation device 100 is installed.
 そして、前記筐体30は、側板32の枠内に嵌め込まれた導光板20を、その側板32のカバー部32bとカバー体31によって挟んで支持している。この状態において、側板32のカバー部32bは、導光板20の表面21における全反射部25と反対側の面を覆うように配置される。なお、筐体30は、例えば、遮光性を有し、また、放熱性を有する材料で形成することが好ましい。具体的には、アルミ合金等の金属によって形成することが好ましい。 The housing 30 supports the light guide plate 20 fitted in the frame of the side plate 32 with the cover portion 32b of the side plate 32 and the cover body 31 interposed therebetween. In this state, the cover portion 32 b of the side plate 32 is disposed so as to cover the surface of the surface 21 of the light guide plate 20 opposite to the total reflection portion 25. In addition, it is preferable that the housing | casing 30 is formed with the material which has light-shielding property and has heat dissipation, for example. Specifically, it is preferably formed of a metal such as an aluminum alloy.
 前記反射部材40は、カバー体31の内面に取り付けられた薄板状のものである。本実施形態では導光板20の裏面22に設けられた拡散反射部24とカバー体31との間に配置されるが、全反射部25の一部又は全部と対向していても良い。また、反射部材40は、例えば反射ミラーから構成され、その反射面を拡散反射部24側へ向けた状態で配置される。そして、反射部材40は、導光板20内に導入された光のうちで、拡散反射部24を透過した光を導光板20側へ反射する役割を果たす。 The reflection member 40 is a thin plate attached to the inner surface of the cover body 31. In the present embodiment, the light guide plate 20 is disposed between the diffuse reflection part 24 provided on the back surface 22 of the light guide plate 20 and the cover body 31, but may be opposed to a part or all of the total reflection part 25. Moreover, the reflecting member 40 is composed of, for example, a reflecting mirror, and is arranged with its reflecting surface directed toward the diffuse reflecting portion 24 side. The reflection member 40 plays a role of reflecting light transmitted through the diffuse reflection part 24 among the light introduced into the light guide plate 20 toward the light guide plate 20.
 なお、本実施形態においては、導光板20とカバー体31との間に拡散反射部24及び反射部材40が挟まれた状態となり、導光板20の裏面22における全反射部25とカバー体31との間に空気層ALが形成されている。 In the present embodiment, the diffuse reflection portion 24 and the reflection member 40 are sandwiched between the light guide plate 20 and the cover body 31, and the total reflection portion 25 and the cover body 31 on the back surface 22 of the light guide plate 20 are arranged. An air layer AL is formed between the two.
 このように構成された本実施形態に係る検査装置Aによれば、先ず、導光板20の表面21がワークW側に向くように光照射装置100を設置すると共に、導光板20の裏面22側にカメラCを設置する。なお、光照射装置100の貫通孔30aが断面略V字状になっていることから、図1に示すように、ワークWに対するカメラCの設置領域が広くなる。 According to the inspection apparatus A according to the present embodiment configured as described above, first, the light irradiation device 100 is installed so that the surface 21 of the light guide plate 20 faces the workpiece W side, and the back surface 22 side of the light guide plate 20 is provided. Camera C is installed in In addition, since the through-hole 30a of the light irradiation apparatus 100 has a substantially V-shaped cross section, as shown in FIG.
 そして、光照射装置100からワークWに光を照射する。このとき、光源10から射出された光は、導光板20の側周面23から導光板20内へと入射し、導光板20の裏面22側へ向かう一部の光が、全反射部25で全反射されて導光板20の中央側へと導かれる。そして、導光板20の表面21の内面で全反射され、拡散反射部24(拡散反射層24a)で拡散反射された後、導光板20から外部に射出されてワークWへ照射される。導光板20の裏面22側へ向かう光の中には、拡散反射部24に直接入射して拡散反射されるものもあり、このような光も導光板20から外部に射出されてワークWへ照射される。なお、拡散反射部24へ入射した光のうちで、拡散反射部24を透過した光も、反射部材40によって導光板20側へ反射されてワークWへ照射される。 Then, light is irradiated to the workpiece W from the light irradiation device 100. At this time, the light emitted from the light source 10 enters the light guide plate 20 from the side peripheral surface 23 of the light guide plate 20, and a part of the light traveling toward the back surface 22 side of the light guide plate 20 is reflected by the total reflection unit 25. The light is totally reflected and guided to the center side of the light guide plate 20. Then, after being totally reflected by the inner surface of the surface 21 of the light guide plate 20 and diffusely reflected by the diffuse reflection portion 24 (diffuse reflection layer 24a), the light is emitted from the light guide plate 20 to the outside and irradiated onto the workpiece W. Some of the light traveling toward the rear surface 22 side of the light guide plate 20 is directly incident on the diffuse reflection portion 24 and is diffusely reflected. Such light is also emitted from the light guide plate 20 to the outside and irradiated onto the workpiece W. Is done. Of the light incident on the diffuse reflector 24, the light transmitted through the diffuse reflector 24 is also reflected by the reflecting member 40 toward the light guide plate 20 and is irradiated onto the workpiece W.
 そして、このようにして光が照射されたワークWを貫通孔30aを介してカメラCで撮像し、その撮像によって得られた画像等に基づきワークWを検査する。 Then, the workpiece W irradiated with light in this way is imaged by the camera C through the through hole 30a, and the workpiece W is inspected based on the image obtained by the imaging.
 斯くして、本実施形態の検査装置Aによれば、導光板20の裏面22における拡散反射部24の外側に全反射部25が設けられているので、導光板20の側周面23から導入された光源の光のうち、導光板20の裏面22側へ向かう一部の光がこの全反射部25で反射されて導光板20の中央側へと導かれるようになる。したがって、導光板20の光源10近傍(端部)から射出される光は弱まるものの、導光板20の内側から射出される光が強くなる。これにより、ワークWに対し、導光板20の全面からムラのない光を効率的に照射することができる。 Thus, according to the inspection apparatus A of the present embodiment, since the total reflection portion 25 is provided outside the diffuse reflection portion 24 on the back surface 22 of the light guide plate 20, it is introduced from the side peripheral surface 23 of the light guide plate 20. Of the light from the light source, a part of the light traveling toward the back surface 22 of the light guide plate 20 is reflected by the total reflection portion 25 and guided to the center side of the light guide plate 20. Therefore, although the light emitted from the vicinity of the light source 10 (end) of the light guide plate 20 is weakened, the light emitted from the inside of the light guide plate 20 is strengthened. Thereby, the work W can be efficiently irradiated with uniform light from the entire surface of the light guide plate 20.
 また、拡散反射部24をインキの印刷により形成したので、容易に形成することができる。また、拡散反射部24を透過した光を反射部材40により導光板20側へ反射させるようにしたので、光のロスをさらになくすことができる。 Moreover, since the diffuse reflection part 24 is formed by printing ink, it can be easily formed. In addition, since the light transmitted through the diffuse reflection portion 24 is reflected by the reflecting member 40 toward the light guide plate 20, the light loss can be further eliminated.
 さらに、このようなものであれば、カメラCとワークWとの間に導光板20が介在した状態になるため、カメラC側からワークW側へ埃等のゴミが落ちることを防止できる。 Furthermore, in such a case, since the light guide plate 20 is interposed between the camera C and the work W, it is possible to prevent dust and the like from falling from the camera C side to the work W side.
 <その他の実施形態>
 その他の実施形態としては、図5に示すようなカバー体31を挙げることができる。具体的には、図5に示すカバー体31は、側板32側が貫通孔30a側よりも分厚くなっている。なお、カバー体31の分厚く形成された側板32側と、導光板20の裏面22(具体的には、全反射部25)との間には、空気層ALが形成されている。このようなものであれば、カバー体31の光源10近傍の厚みが増し、これにより、光源10で生じた熱がより効率良く放熱されるようになる。
<Other embodiments>
As other embodiment, the cover body 31 as shown in FIG. 5 can be mentioned. Specifically, in the cover body 31 shown in FIG. 5, the side plate 32 side is thicker than the through hole 30a side. In addition, an air layer AL is formed between the side plate 32 side formed to be thicker than the cover body 31 and the back surface 22 (specifically, the total reflection portion 25) of the light guide plate 20. In such a case, the thickness of the cover body 31 in the vicinity of the light source 10 is increased, so that the heat generated by the light source 10 is radiated more efficiently.
 また、前記実施形態においては、第1領域22aに拡散反射層24aを積層して拡散反射部24を形成しているが、例えばブラスト加工により第1領域22aの全面に傷を付けることによって拡散反射部24を形成してもよい。さらに、第1領域22aに導光板20とは別体の光を拡散反射する部材を設置して拡散反射部24を形成してもよい。 In the embodiment, the diffuse reflection layer 24a is laminated on the first region 22a to form the diffuse reflection portion 24. For example, the entire region of the first region 22a is damaged by, for example, blasting. The portion 24 may be formed. Furthermore, the diffuse reflection part 24 may be formed by installing a member that diffuses and reflects light separate from the light guide plate 20 in the first region 22a.
 また、前記実施形態においては、貫通孔30aをラインカメラに合わせてスリット状をなすものとしたが、これに限定されず、例えば、円形状や矩形状等のものとしてもよい。貫通孔30aを円形状や矩形状とする場合、第1領域22aは、導光板20の裏面22において、貫通孔30aに対応する部位の周囲に形成し、第2領域22bは、その外側に形成する。さらに、光源10は、導光板20の側周面23の全周に配置される。また、同様に、前記実施形態においては、導光板20を矩形状のものとしたが、これに限定されず、例えば、円形状等のものとしてもよい。 In the above-described embodiment, the through hole 30a is formed in a slit shape in accordance with the line camera. However, the present invention is not limited to this, and may be, for example, a circular shape or a rectangular shape. When the through hole 30a is circular or rectangular, the first region 22a is formed around the portion corresponding to the through hole 30a on the back surface 22 of the light guide plate 20, and the second region 22b is formed outside thereof. To do. Further, the light source 10 is disposed on the entire circumference of the side peripheral surface 23 of the light guide plate 20. Similarly, in the above-described embodiment, the light guide plate 20 is rectangular, but is not limited thereto, and may be, for example, circular.
 なお、前記実施形態における導光板20の裏面22は、貫通孔30aから導光板20を介してワークWが観察できるように、貫通孔30aに対応する部位に拡散反射部24のない領域が含まれていればよい。よって、例えば、貫通孔30aが円形状であるとすると、第1領域22aは、図6(a)に示すように、貫通孔30aに対応する部位の内側まで形成されていても、図6(b)に示すように、貫通孔30aに対応する部位の外側に形成されていてもよい。 In addition, the back surface 22 of the light guide plate 20 in the embodiment includes a region without the diffuse reflection portion 24 at a portion corresponding to the through hole 30a so that the workpiece W can be observed from the through hole 30a through the light guide plate 20. It only has to be. Therefore, for example, if the through hole 30a is circular, the first region 22a may be formed up to the inside of the portion corresponding to the through hole 30a as shown in FIG. As shown to b), you may form in the outer side of the site | part corresponding to the through-hole 30a.
 また、前記実施形態においては、カバー体31の中央部に貫通孔30aを形成したが、カバー体31の中央部以外に貫通孔30aを形成してもよい。 In the above embodiment, the through hole 30 a is formed in the central portion of the cover body 31, but the through hole 30 a may be formed in addition to the central portion of the cover body 31.
 その他、本発明は前記各実施形態に限られず、その趣旨を逸脱しない範囲で種々の変形が可能であるのは言うまでもない。 In addition, it goes without saying that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.
 本発明に係る光照射装置よれば、ワークに対して効率的に光を照射することができるとともに、導光板から射出される光の均一性を高めることができる。

 
According to the light irradiation apparatus according to the present invention, it is possible to efficiently irradiate the work with light and to improve the uniformity of light emitted from the light guide plate.

Claims (5)

  1.  光源と、
     表面、裏面及び側周面を有する板状をなし、前記表面がワークに向けて配置されるとともに、前記側周面から前記光源の光が導入される導光板とを備え、
     前記側周面から前記導光板に導入された光が内部で反射して、前記表面から射出されるように構成された光照射装置であって、
     前記導光板の裏面を覆うように配置されるとともに、所定箇所に貫通孔が設けられたカバー体をさらに備え、
     前記導光板の裏面において、前記貫通孔に対応する部位の周囲の第1領域には、前記側周面から当該導光板内に導入された光を拡散反射する拡散反射部が設けられるとともに、前記第1領域のさらに外側の第2領域には、前記側周面から当該導光板内に導入された光を全反射する全反射部が設けられることを特徴とする光照射装置。
    A light source;
    A plate having a front surface, a back surface, and a side peripheral surface, and the light guide plate into which light from the light source is introduced from the side peripheral surface while the surface is disposed toward the workpiece,
    A light irradiation device configured to reflect light introduced into the light guide plate from the side peripheral surface and to be emitted from the surface,
    It is arranged so as to cover the back surface of the light guide plate, and further comprises a cover body provided with a through hole at a predetermined location,
    On the back surface of the light guide plate, the first region around the portion corresponding to the through hole is provided with a diffuse reflection portion that diffuses and reflects light introduced into the light guide plate from the side peripheral surface, and The light irradiation apparatus according to claim 1, wherein a total reflection portion that totally reflects light introduced into the light guide plate from the side peripheral surface is provided in the second region further outside the first region.
  2.  前記貫通孔を前記導光板の裏面と平行に切断した切断面の孔の大きさが前記導光板に向かうに従って小さくなっている請求項1記載の光照射装置。 The light irradiation device according to claim 1, wherein the size of the hole in the cut surface obtained by cutting the through hole in parallel with the back surface of the light guide plate decreases toward the light guide plate.
  3.  前記貫通孔がスリット状をなしている請求項1記載の光照射装置。 The light irradiation device according to claim 1, wherein the through hole has a slit shape.
  4.  前記拡散反射部が、前記第1領域全面に拡散反射層を積層したものである請求項1記載の光照射装置。 The light irradiating apparatus according to claim 1, wherein the diffuse reflection portion is formed by laminating a diffuse reflection layer over the entire first region.
  5.  前記導光板の拡散反射部と前記カバー体との間に、前記拡散反射部を透過した光を当該導光板側へ反射する反射部材をさらに備える請求項1記載の光照射装置。

     
    The light irradiation apparatus according to claim 1, further comprising a reflection member that reflects light transmitted through the diffuse reflection portion toward the light guide plate between the diffuse reflection portion of the light guide plate and the cover body.

PCT/JP2019/017849 2018-04-27 2019-04-26 Light radiating device WO2019208752A1 (en)

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JP2010112735A (en) * 2008-11-04 2010-05-20 Imac Co Ltd Illuminating device for inspection
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Publication number Priority date Publication date Assignee Title
JPH10319242A (en) * 1997-05-14 1998-12-04 Sanyo Electric Co Ltd Light guide plate
JP2000164017A (en) * 1998-11-30 2000-06-16 Nippon Zeon Co Ltd Edge light type light guide plate and its manufacture
JP2010112735A (en) * 2008-11-04 2010-05-20 Imac Co Ltd Illuminating device for inspection
JP2016136124A (en) * 2015-01-24 2016-07-28 株式会社イマック Inspection illumination device
JP2016152156A (en) * 2015-02-18 2016-08-22 カルソニックカンセイ株式会社 Light guide structure
JP2017032289A (en) * 2015-07-29 2017-02-09 シーシーエス株式会社 Light irradiation device

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