WO2019194695A1 - Pressure sensor for hostile environments - Google Patents

Pressure sensor for hostile environments Download PDF

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Publication number
WO2019194695A1
WO2019194695A1 PCT/RO2019/000008 RO2019000008W WO2019194695A1 WO 2019194695 A1 WO2019194695 A1 WO 2019194695A1 RO 2019000008 W RO2019000008 W RO 2019000008W WO 2019194695 A1 WO2019194695 A1 WO 2019194695A1
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WO
WIPO (PCT)
Prior art keywords
capsule
pressure sensor
magnet
layer
hostile environments
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Application number
PCT/RO2019/000008
Other languages
French (fr)
Inventor
Gabriel MOAGĂR-POLADIAN
Constantin TIBEICĂ
Original Assignee
National Institute For Research And Development In Microtechnologies - Imt București
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Filing date
Publication date
Application filed by National Institute For Research And Development In Microtechnologies - Imt București filed Critical National Institute For Research And Development In Microtechnologies - Imt București
Publication of WO2019194695A1 publication Critical patent/WO2019194695A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/14Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general

Definitions

  • the invention is referring to a pressure sensor that is able to operate in hostile environments such as toxic ones, biologically contaminated ones, corrosive ones, flammable ones or explosive ones.
  • hostile environments such as toxic ones, biologically contaminated ones, corrosive ones, flammable ones or explosive ones.
  • the present day pressure sensors cannot be used in such environments because they either cannot withstand the exposure to the respective material / atmosphere or because their electric supply and electric signal reading may create a risk in the respective material / atmosphere.
  • a pressure sensor that allows optical reading of its output signal. Its measurement principle is based on either optical interference or on light beam deflection or on the shift of the focus of an optical lens or on the piezooptic effect.
  • the problem solved by the invention consists in that the pressure sensor can operate in hostile environments without any degradation and without posing safety risks. Even if the sensor reading is electrical, this reading is completely decoupled from the sensor part that is placed inside the hostile environment, the electrical reading part being placed outside the container in which the dangerous fluid is kept.
  • the proposed solution eliminates the above mentioned disadvantages by decoupling the pressure measuring part from the electrical reading part.
  • the sensing part is mounted inside the container in which the dangerous fluid is kept and is coupled to the external part through a magnetic field.
  • the magnetic field is produced by two magnets, one magnet placed inside the container and one magnet place outside.
  • the magnetic field is measured outside the container either by a magnetic field sensor placed between the two repelling magnets or by a pressure sensor.
  • the reading is made by measuring the variation of the magnetic field produced by the inside pressure acting on and displacing the inner magnet from its equilibrium position.
  • the repelling force between the two magnets is applied to the outside mounted pressure sensor, the force of acting on the outside magnet being sensed by the pressure sensor. In this way, the electric part is placed outside the dangerous environment and does not need any electrical or optical access inside the container.
  • the pressure sensor according to the invention is composed, in a first embodiment, by two physically separated capsules, capsule 1 and capsule 2.
  • Capsule 1 is non-magnetic and is mounted inside the container 3 in which the fluid 4 is placed, fluid 4 being the one whose pressure is measured.
  • Container 3 is formed from a paramagnetic or diamagnetic material.
  • Capsule 2 is formed from a paramagnetic or diamagnetic material and is mounted outside the container 3 in the external environment 5. Both capsule 1 and capsule 2 may be fabricated from polymer, metal, glass, wood or ceramic.
  • Capsule 1 contains inside it the magnet 6, while capsule 2 contains inside it the magnet 7 and magnetic sensor 8. The distance between magnet 6 and magnet 7 is less than the value of their diameter. Magnet 7 and sensor 8 are fixed.
  • Magnet 6 can be displaced along a vertical direction perpendicular to its surface as a consequence of the pressure difference between fluid 4 and the gas existing inside capsule 1 , pressure difference which is applied on top of capsule 1. Magnets 6 and 7 are mounted is such a way that they repel each other. Capsule 1 and capsule 2 are placed face-to-face, one atop the other, being separated only by the wall of container 3. For this way of magnet mounting, the magnetic field between magnets varies linearly with distance from any of the magnets. Capsule 1 and capsule 2 are fixed on the container 3 wall either by using an adhesive 9 or by using other known fixing methods. Magnets 6, respectively magnet 7, are fixed on capsule 1 , respectively capsule 2, by using a layer 10 that can be either an adhesive or another known fixing mean.
  • capsule 1 are made by using additive fabrication techniques. As a consequence of that, they are microporous. Because of that microporosity, capsule 1 is covered by a non-magnetic layer 1 1 of fluidproofing that has the role to prevent entering of fluid 4, through the micropores, inside capsdle 1 and thus degrading pressure sensor functionality.
  • Layer 11 can be formed by a single layer or by multiple layers and can be made from polymer, metal, ceramic.
  • a nonmagnetic layer 12 is deposited on top of layer 1 1 .
  • Layer 12 has the role to ensure the electrochemical compatibility / neutrality of capsule 1 with respect to the hostile environment for the case when fluid 4 is a solid or liquid electrolyte.
  • Layer 12 can be formed by a single layer or by multiple layers.
  • the pressure sensor operates as follows: the pressure of medium 4 contained in the container 3 pushes on top of capsule 1 , more precisely on its top membrane. There is a pressure difference between medium 4 and the gas inside part of capsule 1.
  • inside capsule 1 can be gas at low pressure or can be vacuum.
  • the pressure difference between medium 4 and interior of capsule 1 displaces magnet 6 on a certain distance.
  • the variation of distance between magnet 6 and magnet 7 produces a variation of magnetic field at the position of sensor 8, magnet 7 and sensor 8 being fixed in place on capsule 2.
  • the displacement is linearly to a high degree with pressure difference and its value depends on the material from which capsule 1 is made and on its geometry.
  • capsule 1 is made from polymer PA2200 (nylon) and the thickness of the membrane to which magnet 6 is attached is 1.6 mm at a diameter of 27 mm, then the maximum pressure up to which linearity is observed is 6 bar. In this way, a linear relation exists between the pressure inside container 3 and the magnetic field measured by sensor 8.
  • the pressure sensor according to the invention is structured as follows: capsule 1 is identical with that of embodiment 1 , while for capsule 2 the magnet 7 is mobile this time being ruggedly fixed on a nonmagnetic platform 13 by using known fixing methods and elements.
  • Platform 13 is made of a nonmagnetic material that may be metal or ceramic.
  • Platform 13 is supported by some nonmagnetic elastic elements 14.
  • the elastic element 14 may be a metal structure with highly elastic behaviour such a spring or can be an elastomer.
  • Platform 13 and element(s) 14 seal the external environment 5 from the gel 15.
  • the gel 15 has the role to transmit the pressure made by ensemble of the magnet 7 and platform 13 to the pressure sensor 16.
  • the sensor 16 is fixed to capsule 2 with the help of an element 10 that can be an adhesive or other known mean of structural fixing.
  • the pressure sensor operates as follows: the pressure of medium 4 contained in the container 3 pushes on top of capsule 1 , more precisely on its top membrane. There is a pressure difference between medium 4 and the gas inside part of capsule 1 .
  • inside capsule 1 can be gas at low pressure or can be vacuum.
  • the pressure difference between medium 4 and interior of capsule 1 displaces magnet 6 on a certain distance. This displacement of magnet 6 towards magnet 7 produces a greater repelling force, repelling force that is further transmitted from magnet 7 to gel 15 and, further, to sensor 16.
  • the pressure of medium 4 is not, generally speaking, equally to that measured by sensor 16.
  • sealing nonmagnetic element 17 that can be made of polymer, metal or ceramic.
  • a soft ferromagnetic layer 18 is deposited atop layer 11 and on capsule 2.
  • the role of the layer 18 is to guide the magnetic field of magnets 6 and 7 through it.
  • a superparamagnetic layer 19 is placed, layer 19 having the role to further improve the guiding of magnetic field lines and impinge them towards capsule 1.
  • layer 19 reduces to a certain extent the influence of external magnetic fields on magnets 6 and 7, respectively.
  • Layer 12 is deposited atop layer 19 by using an adhesion adaptation layer 20. There could be another adhesion adaptation layer between layer 18 and layer 19, respectively.
  • the measurement range of the pressure sensor according to the invention can be tuned either by tuning the geometry of capsule 1 or by tuning the material properties of capsule 1 or by tuning the pressure of the gas situated inside capsule 1.
  • the pressure sensor’s sensitivity can be tuned either by choosing magnets 6 and 7 with desired magnetization value, or by tuning the geometry of capsule 1 , or by tuning the material properties of capsule 1 , or by tuning the pressure of the gas situated inside capsule 1 , or by tuning the distance between magnets 6 and 7, respectively.
  • the pressure inside the inner part of capsule (1 ) is tuned when mounting capsule (1 ) to container (3), according to the needs.
  • Capsule 1 and capsule 2 are made by additive manufacturing from PA2200 polymer.
  • Container 3 is made of duraluminum, the wall thickness of it being 1 mm.
  • Medium 4 is a gas.
  • Medium 5 is atmosphere.
  • Magnets 6 and 7 are of the NdFeB type and have a magnetization of 1.35 T, a diameter of 15 mm and the distance between them is 7 mm.
  • Sensor 8 is Hall-type magnetic sensor, for example sensor SS495 from Honeywell. Sensor 8 is mounted on the symmetry axis of the two magnets 6 and 7.
  • Layer 9 is an adhesive like superglue, similar to layer 10.
  • Layer 1 1 is made of polymer with a thickness of 10 microns deposited from solution while layer 12 is Ti/Pt bi-layer with a total thickness of 1 micron.

Abstract

The invention refers to a pressure sensor for hostile environments that present risk such as of toxicity, of biological contamination, of corrosion, of flammability or of explosion. The sensor uses two magnets (6) and, respectively, (7) mounted in opposition / repelling manner, the pressure inside container (3) that contains the dangerous environment (4) whose pressure being determined producing the displacement of magnet (6) with respect / relative to magnet (7). This relative displacement is read either with a magnetic field sensor (8) for the case when magnetic field value is measured or by a pressure sensor (16) for the case when the repelling force between magnets is measured, any of the sensors (8), respectively (16), being mounted outside container (3) in the external environment (5).

Description

PRESSURE SENSOR FOR HOSTILE ENVIRONMENTS
The invention is referring to a pressure sensor that is able to operate in hostile environments such as toxic ones, biologically contaminated ones, corrosive ones, flammable ones or explosive ones. In all these cases, the present day pressure sensors cannot be used in such environments because they either cannot withstand the exposure to the respective material / atmosphere or because their electric supply and electric signal reading may create a risk in the respective material / atmosphere.
It is known a pressure sensor for which the energy supply and signal reading are achieved by electric means. Its operation principle may be based on either piezoresistive effect, or piezoelectric effect, or capacitive coupling or inductive coupling or coupling through the means of eddy currents.
Moreover, a pressure sensor is known that allows optical reading of its output signal. Its measurement principle is based on either optical interference or on light beam deflection or on the shift of the focus of an optical lens or on the piezooptic effect.
The disadvantages of the pressure sensors based on electric reading of their output are:
- do not withstand corrosive environments
- cannot be used in flammable or explosive environments
- need supplementary safety measures with respect to the corrosive and/or flammable and/or explosive environment
The disadvantages of the pressure sensors based on optical reading of their output are:
- do not withstand corrosive environments
- need supplementary safety measures with respect to the corrosive and/or flammable and/or explosive environment
- do not allow the exit of the optical beam from the inside of the hostile environment container to the external medium if the container wall is optically opaque
The problem solved by the invention consists in that the pressure sensor can operate in hostile environments without any degradation and without posing safety risks. Even if the sensor reading is electrical, this reading is completely decoupled from the sensor part that is placed inside the hostile environment, the electrical reading part being placed outside the container in which the dangerous fluid is kept.
The proposed solution, according to the invention, eliminates the above mentioned disadvantages by decoupling the pressure measuring part from the electrical reading part. The sensing part is mounted inside the container in which the dangerous fluid is kept and is coupled to the external part through a magnetic field. The magnetic field is produced by two magnets, one magnet placed inside the container and one magnet place outside. The magnetic field is measured outside the container either by a magnetic field sensor placed between the two repelling magnets or by a pressure sensor. In the case of the magnetic sensor, the reading is made by measuring the variation of the magnetic field produced by the inside pressure acting on and displacing the inner magnet from its equilibrium position. In the case of the pressure sensor, the repelling force between the two magnets is applied to the outside mounted pressure sensor, the force of acting on the outside magnet being sensed by the pressure sensor. In this way, the electric part is placed outside the dangerous environment and does not need any electrical or optical access inside the container.
The advantages of the pressure sensor are:
- it can operate inside hostile environments
- eliminates the risks associated to the introduction of the electrical signals inside the hostile environment
- its sensitivity can be tuned either by controlling the geometry and mechanical properties of the pressure sensing part or by choosing a magnetic sensor / pressure sensor according to the needs
In the following, we present examples of invention embodiments with respect to figures 1-4 that represent:
- Figure 1 : the sketch of the pressure sensor that determines the variation of the magnetic field
- Figure 2: the ketch of the pressure sensor that determined the repelling force between magnets
- Figure 3: the way the inner par sensing membrane is sealed
- Figure 4: the sketch of the version with magnetic insulation
- Figure 5: an example of experimentally measured response of the pressure sensor, R indicating the sensor sensitivity in mV/kPa
The pressure sensor according to the invention is composed, in a first embodiment, by two physically separated capsules, capsule 1 and capsule 2. Capsule 1 is non-magnetic and is mounted inside the container 3 in which the fluid 4 is placed, fluid 4 being the one whose pressure is measured. Container 3 is formed from a paramagnetic or diamagnetic material. Capsule 2 is formed from a paramagnetic or diamagnetic material and is mounted outside the container 3 in the external environment 5. Both capsule 1 and capsule 2 may be fabricated from polymer, metal, glass, wood or ceramic. Capsule 1 contains inside it the magnet 6, while capsule 2 contains inside it the magnet 7 and magnetic sensor 8. The distance between magnet 6 and magnet 7 is less than the value of their diameter. Magnet 7 and sensor 8 are fixed. Magnet 6 can be displaced along a vertical direction perpendicular to its surface as a consequence of the pressure difference between fluid 4 and the gas existing inside capsule 1 , pressure difference which is applied on top of capsule 1. Magnets 6 and 7 are mounted is such a way that they repel each other. Capsule 1 and capsule 2 are placed face-to-face, one atop the other, being separated only by the wall of container 3. For this way of magnet mounting, the magnetic field between magnets varies linearly with distance from any of the magnets. Capsule 1 and capsule 2 are fixed on the container 3 wall either by using an adhesive 9 or by using other known fixing methods. Magnets 6, respectively magnet 7, are fixed on capsule 1 , respectively capsule 2, by using a layer 10 that can be either an adhesive or another known fixing mean.
In some of the embodiments capsule 1 , respectively capsule 2, are made by using additive fabrication techniques. As a consequence of that, they are microporous. Because of that microporosity, capsule 1 is covered by a non-magnetic layer 1 1 of fluidproofing that has the role to prevent entering of fluid 4, through the micropores, inside capsdle 1 and thus degrading pressure sensor functionality. Layer 11 can be formed by a single layer or by multiple layers and can be made from polymer, metal, ceramic. In some embodiments, on top of layer 1 1 a nonmagnetic layer 12 is deposited. Layer 12 has the role to ensure the electrochemical compatibility / neutrality of capsule 1 with respect to the hostile environment for the case when fluid 4 is a solid or liquid electrolyte. Layer 12 can be formed by a single layer or by multiple layers.
In this first embodiment, the pressure sensor operates as follows: the pressure of medium 4 contained in the container 3 pushes on top of capsule 1 , more precisely on its top membrane. There is a pressure difference between medium 4 and the gas inside part of capsule 1. For example, inside capsule 1 can be gas at low pressure or can be vacuum. The pressure difference between medium 4 and interior of capsule 1 displaces magnet 6 on a certain distance. The variation of distance between magnet 6 and magnet 7 produces a variation of magnetic field at the position of sensor 8, magnet 7 and sensor 8 being fixed in place on capsule 2. The displacement is linearly to a high degree with pressure difference and its value depends on the material from which capsule 1 is made and on its geometry. For example, if capsule 1 is made from polymer PA2200 (nylon) and the thickness of the membrane to which magnet 6 is attached is 1.6 mm at a diameter of 27 mm, then the maximum pressure up to which linearity is observed is 6 bar. In this way, a linear relation exists between the pressure inside container 3 and the magnetic field measured by sensor 8.
In a second embodiment, the pressure sensor according to the invention is structured as follows: capsule 1 is identical with that of embodiment 1 , while for capsule 2 the magnet 7 is mobile this time being ruggedly fixed on a nonmagnetic platform 13 by using known fixing methods and elements. Platform 13 is made of a nonmagnetic material that may be metal or ceramic. Platform 13 is supported by some nonmagnetic elastic elements 14. The elastic element 14 may be a metal structure with highly elastic behaviour such a spring or can be an elastomer. Platform 13 and element(s) 14 seal the external environment 5 from the gel 15. The gel 15 has the role to transmit the pressure made by ensemble of the magnet 7 and platform 13 to the pressure sensor 16. The sensor 16 is fixed to capsule 2 with the help of an element 10 that can be an adhesive or other known mean of structural fixing.
In this second embodiment, the pressure sensor operates as follows: the pressure of medium 4 contained in the container 3 pushes on top of capsule 1 , more precisely on its top membrane. There is a pressure difference between medium 4 and the gas inside part of capsule 1 . For example, inside capsule 1 can be gas at low pressure or can be vacuum. The pressure difference between medium 4 and interior of capsule 1 displaces magnet 6 on a certain distance. This displacement of magnet 6 towards magnet 7 produces a greater repelling force, repelling force that is further transmitted from magnet 7 to gel 15 and, further, to sensor 16. The pressure of medium 4 is not, generally speaking, equally to that measured by sensor 16. A linear relation exists between these two pressure values, relation given by the mechanical properties and geometry of capsule’s 1 membrane, by magnet 6 and magnet 7 magnetic field and by the elastic properties of element 14, respectively.
Whichever the embodiment, there could be necessary to establish the measurement range of the sensor by adjusting the pressure value of the gas inside capsule 1. In this case, there is a sealing nonmagnetic element 17 that can be made of polymer, metal or ceramic.
Whichever the embodiment, there are situations in which the magnetic field produce by magnet 6 and magnet 7 may affect medium 4 or other devices placed in the immediate vicinity of the pressure sensor. In order to avoid such a situation, a soft ferromagnetic layer 18 is deposited atop layer 11 and on capsule 2. The role of the layer 18 is to guide the magnetic field of magnets 6 and 7 through it. Moreover, atop layer 18 a superparamagnetic layer 19 is placed, layer 19 having the role to further improve the guiding of magnetic field lines and impinge them towards capsule 1. Also, layer 19 reduces to a certain extent the influence of external magnetic fields on magnets 6 and 7, respectively. Layer 12 is deposited atop layer 19 by using an adhesion adaptation layer 20. There could be another adhesion adaptation layer between layer 18 and layer 19, respectively.
It has to be mentioned that the measurement range of the pressure sensor according to the invention can be tuned either by tuning the geometry of capsule 1 or by tuning the material properties of capsule 1 or by tuning the pressure of the gas situated inside capsule 1.
The pressure sensor’s sensitivity can be tuned either by choosing magnets 6 and 7 with desired magnetization value, or by tuning the geometry of capsule 1 , or by tuning the material properties of capsule 1 , or by tuning the pressure of the gas situated inside capsule 1 , or by tuning the distance between magnets 6 and 7, respectively.
The pressure inside the inner part of capsule (1 ) is tuned when mounting capsule (1 ) to container (3), according to the needs.
An example of embodiment is presented in the following. Capsule 1 and capsule 2 are made by additive manufacturing from PA2200 polymer. Container 3 is made of duraluminum, the wall thickness of it being 1 mm. Medium 4 is a gas. Medium 5 is atmosphere. Magnets 6 and 7 are of the NdFeB type and have a magnetization of 1.35 T, a diameter of 15 mm and the distance between them is 7 mm. Sensor 8 is Hall-type magnetic sensor, for example sensor SS495 from Honeywell. Sensor 8 is mounted on the symmetry axis of the two magnets 6 and 7. Layer 9 is an adhesive like superglue, similar to layer 10. Layer 1 1 is made of polymer with a thickness of 10 microns deposited from solution while layer 12 is Ti/Pt bi-layer with a total thickness of 1 micron.
In another embodiment, we have elements 1 , 2, 3, 4, 5, 6, 7, 9, 10, 1 1 , 12 similar to the previous embodiment example. This time, magnet 7 is glued to platform 13 that is made from Ti64 alloy. Platform 13 is placed atop an elastomer ring 14, ring 14 that seals the gel 15 and, at the same time, supplies the recovery force that is necessary to bring ensemble formed by magnet 7 and platform 13 back to initial position. Gel 15 is a special gel used for pressure sensors like KP254 ones produced by Infineon Technologies. Sensor 16 is a pressure sensor like KP235 produced by Infineon Technologies. REFERENCES
1. G. MoagHir-Poladian, C. Tibeica, V. MoagSr-Poladian - “3D Printed acceleration sensors: a case study”, Romanian Journal of Information Science and Technology, Volume21 , Number 1 , p.61 -81 , (2018)
2. https://www.infineon.com/cms/en/product/sensor/integrated-automotive-pressure-sensor/barometric- ai r-pressu re-se nsor-bap/kp254/
3. https://sensing.honeywell.com/SS495A-S-linear-and-angle-sensor-ics
4. W. P. Eaton, J. H. Smit -“Micromachined pressure sensors: review and recent developments", Smart Materials and Structures, Vol. 6, No. 5, (1997)

Claims

1. Pressure sensor for hostile environments according to the invention characterized by that it is composed, in a first embodiment, by a capsule (1 ) mounted inside the nonmagnetic container (3) containing the environment (4) whose pressure is measured, by a capsule (2) mounted outside same container (3) in the external environment (5), by magnets (6) and, respectively, (7) mounted in opposition / repelling position and at a distance less than their diameter, by magnetic sensor (8), capsule (1 ) and capsule (2) being attached to container (3) with the help of a fixing element (9) while magnet (6) and magnet (7) being fixed on their corresponding capsules (1 ), respectively (2), with the help of a fixing element (10), capsule (1 ) being covered when necessary by an fluidproofing layer (11 ) and, respectively, by a layer (12) that ensures electrochemical neutrality of the capsule (1 ) with respect to environment (4).
2. Pressure sensor for hostile environments according to the invention characterized by that it is composed, in a second embodiment, by a capsule (1 ) mounted inside the nonmagnetic container (3) containing the environment (4) whose pressure is measured, by a capsule (2) mounted outside same container (3) in the external environment (5), by magnets (6) and, respectively, (7) mounted in opposition / repelling position and at a distance less than their diameter, capsule (1 ) and capsule (2) being attached to container (3) with the help of a fixing element (9) while magnet (6) and magnet (7) being fixed on their corresponding capsules (1 ), respectively (2), with the help of a fixing element (10), capsule (1 ) being covered when necessary by an fluidproofing layer (1 1 ) and, respectively, by a layer (12) that ensures electrochemical neutrality of the capsule (1 ) with respect to environment (4), by a platform (13) to which magnet (7) is firmly attached, by an elastic element (14) for sealing, by a gel (15) for transmitting pressure and, respectively, by the pressure sensor (16).
3. Pressure sensor for hostile environments according to claim 1 characterized by that the pressure of environment (4) inside container (3) produces the displacement of magnet (6) placed on the inner part of the capsule’s (1 ) top membrane, displacement of magnet (6) that produces a variation of the magnetic field value at the position of magnetic sensor (8).
4. Pressure sensor for hostile environments according to claim 2 characterized by that the pressure of environment (4) inside container (3) produces the displacement of magnet (6) placed on the inner part of the capsule’s (1 ) top membrane, displacement of magnet (6) that gives rise to a variation of the repelling force between magnets (6) and magnet (7) and, the respective change of force being transmitted through platform (13) and further through element (14) and even further through gel (15) to the pressure sensor (16).
5. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the inner part of capsule (1 ) may contain a sealing element (17), element (17) that is nonmagnetic and can be made from polymer, metal or ceramic.
6. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the material from which capsules (1 ) and, respectively, (2) are made is nonmagnetic and can be either a polymer, metal, glass, wood or ceramic.
7. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that fixing element (9) may be an adhesive or a known mechanical fixing element.
8. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that fixing element (10) of magnet (6), respectively magnet (7), can be an adhesive or a known mechanical fixing element.
9. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the layer (1 1 ) has the role to insulate / fluidproof capsule (1 ) against environment (4) and is made from a nonmagnetic material, layer (1 1 ) being either single layer or a multilayered structure and is made by either polymer, metal or ceramic.
10. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the layer (12) has the role to ensure the electrochemical compatibility / neutrality of capsule (1 ) with respect to environment (4), layer (12) being nonmagnetic and being made by one or several metallic layers.
1 1. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the platform (13) is made from a nonmagnetic material that can be either metal or ceramic.
12. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the elastic element (14) is either an elastomer structure or a metallic structure with a highly elastic behaviour.
13. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the pressure inside the inner part of capsule (1 ) is tuned when mounting capsule (1 ) to container (3), according to the needs.
14. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the measurement range is tuned according to the needs by either tuning the geometry of capsule (1 ) or by tuning the material properties of capsule (1 ) or by tuning the pressure inside the inner part of capsule (1 ).
15. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that the sensitivity of the sensor is tuned according to the needs by either tuning the magnetization value of magnets (6) and, respectively, (7) or by tuning the geometry of capsule (1 ) or by tuning the material properties of capsule (1 ) or by tuning the distance between magnet (6) and magnet (7).
16. Pressure sensor for hostile environments according to claims 1 and 2 characterized by that a soft ferromagnetic layer (18) is deposited atop element (10), respectively atop capsule (2), layer (18) atop which another superparamagnetic layer (19) is deposited, between layer (18) and layer (19) a supplementary layer being deposited for enhancing the adhesion between them, another layer (20) being deposited atop of the capsule (1 ) ensemble for enhancing adhesion of layer (12) that ensures electrochemical neutrality.
PCT/RO2019/000008 2018-04-02 2019-04-02 Pressure sensor for hostile environments WO2019194695A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2290659A1 (en) * 1974-11-06 1976-06-04 Merlin Gerin Pressure indicator for use in sealed enclosures - is used in electrical apparatus and includes permanent magnet inside enclosure
US4254395A (en) * 1979-12-26 1981-03-03 Robert Bosch Gmbh Electromechanical force converter for measuring gas pressure
DE4219338A1 (en) * 1991-07-01 1993-01-14 Landis & Gyr Betriebs Ag Non-electrical parameter detecting sensor e.g. for pressure or pressure difference in system contg. water - has measurement magnet protected against contact with fluid by highly flexible seting material
US6499353B1 (en) * 1999-10-20 2002-12-31 Vista Research, Inc. Method and apparatus for remote measurement of physical properties inside a sealed container
US20100077862A1 (en) * 2008-09-30 2010-04-01 Hubert Benzel Workpiece Composite and Use of the Workpiece Composite

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2290659A1 (en) * 1974-11-06 1976-06-04 Merlin Gerin Pressure indicator for use in sealed enclosures - is used in electrical apparatus and includes permanent magnet inside enclosure
US4254395A (en) * 1979-12-26 1981-03-03 Robert Bosch Gmbh Electromechanical force converter for measuring gas pressure
DE4219338A1 (en) * 1991-07-01 1993-01-14 Landis & Gyr Betriebs Ag Non-electrical parameter detecting sensor e.g. for pressure or pressure difference in system contg. water - has measurement magnet protected against contact with fluid by highly flexible seting material
US6499353B1 (en) * 1999-10-20 2002-12-31 Vista Research, Inc. Method and apparatus for remote measurement of physical properties inside a sealed container
US20100077862A1 (en) * 2008-09-30 2010-04-01 Hubert Benzel Workpiece Composite and Use of the Workpiece Composite

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